A sealing structure and a scanning electron microscope

Abstract

The present application discloses a sealing structure and a scanning electron microscope, relating to the technical field of vacuum sealing, and is used for sealing a transfer channel on a chamber for an object to enter and exit. On the chamber wall of the chamber, a fixed sealing surface is provided around the channel opening of the transfer channel; the sealing structure includes a sealing component movably connected to the chamber wall. The sealing component is provided with a movable sealing surface. The sealing component moves to open or close the transfer channel, and when the channel opening is closed, the movable sealing surface is pressed against and fits with the fixed sealing surface to seal the channel opening. The sealing structure provided by the present application can, on the basis of ensuring the sealing and isolation effects, solve the problem in the prior art that the opening and closing and sealing operations of the channel are not simple and fast enough, causing great damage to the vacuum environment. At the same time, this structure is applicable to the sealing and isolation between two adjacent chambers.

Description

Technical Field

[0001] This application relates to the technical field of vacuum sealing, and particularly relates to a sealing structure, and also relates to a scanning electron microscope having the above sealing structure. Background Art

[0002] Due to functional and application requirements, partial work is involved in sealed isolation chambers on many types of equipment. Especially for equipment that always needs to work in a high-vacuum environment, there are relatively high requirements for vacuum partition and vacuum sealing. For example, a scanning electron microscope is an electron optical instrument that uses various physical signals excited when a focused electron beam scans the sample surface row by row to modulate an image. The electron beam needs to work in a high-vacuum environment to ensure accurate scanning imaging and working performance. However, each time the sample is taken and placed, that is, when the sample enters and exits the high-vacuum environment, it will damage the vacuum degree in the chamber. And to ensure the vacuum environment during the working process, after the sample is placed in the high-vacuum environment, the channel opening for the sample to enter and exit the chamber needs to be quickly sealed to form isolation from the external environment. Therefore, for equipment involving a high-vacuum working environment, there are high requirements for the tightness of the channel opening of the high-vacuum chamber. At the same time, since the transfer channel needs to be frequently opened and closed to take and place the sample, there is also a certain need for the simplicity, quickness of the opening and closing and sealing operations to prevent long-term and severe damage to the internal vacuum environment of the chamber.

[0003] In the traditional technology, usually a gate valve is installed at the channel opening, and the valve hole is communicated with the channel opening for articles to enter and exit. When performing the closing and sealing operations, it is necessary to first align the valve cover with the valve hole, perform the alignment and covering, and then perform fastening operations such as screwing or pressing to make the valve cover seal the valve hole. This traditional structural technology not only has inconvenient and slow operations, resulting in a longer opening time of the transfer channel when taking and placing the sample, causing greater damage to the vacuum environment, but also easily has problems of low sealing performance due to poor alignment between the valve cover and the valve hole. On the other hand, the structure for opening, closing and sealing through the valve is not suitable for the application of conduction and isolation between two adjacent chambers. Summary of the Invention

[0004] In view of this, this application provides a sealing structure to solve the problem in the prior art that the opening, closing and sealing operations of the channel are not simple and fast enough, causing greater damage to the vacuum environment, while ensuring the sealing and isolation effects. At the same time, this structure is applicable to the sealing and isolation between two adjacent chambers. This application also provides a scanning electron microscope having the above sealing structure.

[0005] In order to achieve the above purpose, the present invention provides the following technical solutions:

[0006] A sealing structure is used to seal a transfer channel for objects to enter and exit a chamber. On the chamber wall of the chamber, a fixed sealing surface is provided around the channel opening of the transfer channel; the sealing structure includes a sealing component movably connected to the chamber wall, the sealing component is provided with a movable sealing surface, the sealing component moves to open or close the transfer channel, and when the channel opening is closed, the movable sealing surface presses against and fits with the fixed sealing surface to seal the channel opening.

[0007] Optionally, the sealing component is arranged in a sliding manner and slides under the push-pull action to switch between an open position and a closed position.

[0008] Optionally, there are angles between both the movable sealing surface and the fixed sealing surface and the chamber wall, and the sliding direction of the sealing component is parallel to the extending direction of the chamber wall.

[0009] Optionally, a sealing ring is arranged between the movable sealing surface and the fixed sealing surface and is arranged to surround the circumference of the channel opening. When the movable sealing surface blocks the transfer channel, the sealing ring is squeezed to seal the channel opening.

[0010] Optionally, there is also a constraint surface opposite to and spaced from the fixed sealing surface. When the sealing component blocks the transfer channel, it is embedded between the fixed sealing surface and the constraint surface so that the movable sealing surface presses against the fixed sealing surface.

[0011] Optionally, there is also a spacer, which is hermetically connected to the chamber wall. The fixed sealing surface is formed on the spacer, and a through hole provided in the spacer along the thickness direction forms the channel opening on the fixed sealing surface and communicates with the transfer channel of the chamber.

[0012] Optionally, both the sealing component and the guiding chute for the sealing component to slide are arranged or connected to the spacer.

[0013] Optionally, the guiding chutes are arranged on both sides of the channel opening. The sealing component includes sealing plates that can be slidably embedded in the guiding chutes on both sides respectively. The opposite surfaces of the sealing plates that are close to the fixed sealing surface form the movable sealing surface, and a section of the groove wall of the guiding chute forms the constraint surface.

[0014] Optionally, a pushing handle is provided on the sealing component.

[0015] The present invention also provides a scanning electron microscope, including a chamber and a sealing structure. The chamber is the chamber as described above, and the sealing structure is the sealing structure as described above.

[0016] In the technical solution provided by the present application, the sealing structure is provided with a fixed sealing surface around the channel opening on the chamber wall, and a sealing member that is movable relative to the fixed sealing surface is provided. A movable sealing surface is provided on the sealing member. As the displacement occurs, the movable sealing surface leaves or fits against the fixed sealing surface to open or close the channel, realizing the opening and closing operation. At the same time, at the position where the transfer channel is closed, the movable sealing surface presses against and fits against the fixed sealing surface, which can effectively seal the channel opening; and the movable sealing surface is formed on the movably arranged sealing member. The displacement of the sealing member can realize the state switching of the conduction or closed sealing of the transfer channel, without additional operations such as pressing or screwing. The execution action is simple, fast and efficient, which can effectively reduce the degree of damage to the indoor environment, is conducive to quickly and efficiently restoring the required working conditions in the subsequent chamber, and improves work efficiency; on the other hand, the movable sealing member can complete the opening and closing operation, reducing the restrictions on the operation space and operation direction, so that the sealing structure can be fully applied to the sealing isolation between two adjacent chambers, and has the function of simply completing the conduction or quickly sealing and isolating two adjacent specific air pressure environments.

[0017] The present application also provides a preferred solution. The sealing member is arranged in a sliding manner and slides under the pushing and pulling action to switch between the open position and the closed position. With such a setting, not only is the required operation simple and easy to perform, but also the opening and closing actions are executed smoothly, which is more conducive to achieving effective sealing in the simple execution action and improving the operation efficiency of obtaining high vacuum in the chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only the embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained according to the provided drawings.

[0019] Figure 1 It is a schematic application diagram of the sealing structure in the embodiment of the present invention;

[0020] Figure 2 is Figure 1 the schematic cross-sectional structure diagram of;

[0021] Figure 3 It is a schematic exploded view of the sealing member and the chamber + in the embodiment of the present invention;

[0022] Figure 4 It is a schematic diagram of the sealing structure in the embodiment of the present invention;

[0023] Figure 5 It is a schematic exploded view of the sealing structure from the first angle in the embodiment of the present invention;

[0024] Figure 6 This is a schematic diagram of the disassembly of the sealing structure from the second angle in the embodiments of the present invention.

[0025] In Figures 1-6 :

[0026] 1 - Chamber, 11 - Chamber wall, 2 - Transfer channel, 21 - Channel opening, 3 - Sealing component, 31 - Sealing plate, 311 - Movable sealing surface, 32 - Sealing ring, 33 - Pushing handle, 4 - Isolation member, 41 - Inclined protrusion, 411 - Fixed sealing surface, 42 - Second sealing member, 5 - Guide block, 51 - Guide chute, 511 - Constraint surface. Detailed implementation manners

[0027] The present application provides a sealing structure to solve the problem in the prior art that the opening / closing and sealing operations of the channel are not simple and fast enough, which causes great damage to the vacuum environment, while ensuring the sealing and isolation effects. At the same time, this structure is applicable to the sealing and isolation between two adjacent chambers. The present application also provides a scanning electron microscope having the above sealing structure.

[0028] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0029] As Figures 1-6 shown, the embodiments of the present application provide a sealing structure for sealing the transfer channel 2 for objects to enter and exit on the chamber 1, including a sealing component 3; a fixed sealing surface 411 is provided or formed on the chamber wall 11, and the fixed sealing surface 411 is arranged around the channel opening 21 of the transfer channel 2. It can also be understood that the channel opening 21 of the transfer channel 2 is opened on the fixed sealing surface 411; and the sealing component 3 is movably connected to the chamber wall 11 and is provided with a movable sealing surface 311. The sealing component 3 can be displaced under the action of pushing and pulling. As it moves, the movable sealing surface 311 can leave or fit the fixed sealing surface 411 to open or close the channel opening 21, realizing the opening / closing operation. When the sealing component 3 is displaced to the position of closing the channel, the movable sealing surface 311 presses against and fits the fixed sealing surface 411, having the effect of a binding force of mutual pressing, not only closing the channel but also effectively sealing the channel opening 21.

[0030] With such a setting, for the sealing structure provided in this embodiment, on the one hand, opening and closing as well as sealing are achieved by the separation or pressing fit of the two sealing surfaces, ensuring the sealing effect during closing; on the other hand, the sealing member 3 can move under the push-pull action, and switching positions can achieve the conduction and sealing of the closed transfer channel 2 without additional other operations, such as screwing or pressing the valve with other components in the prior art. Then, the operator only needs to push and pull the sealing member 3 to conduct or close the transfer channel 2 to open and close the chamber 1 to complete the sample transfer, and the closing and sealing of the transfer channel 2 are achieved synchronously with the same operation. After the sample is transferred, the isolation of the two different gas pressure environments can be quickly restored. The entire execution process is simple to operate, the execution actions are simple, fast, and efficient, effectively reducing the degree of damage to the indoor environment, achieving the function of quickly restoring the required working conditions in the chamber 1, such as high vacuum, which is beneficial to improving the working efficiency of the work in the chamber 1; on the other hand, the sealing member 3 can achieve opening and closing and sealing directly by displacement, and the restrictions on the operation space and operation direction are also significantly reduced, enabling this sealing structure to be fully applied to the sealing isolation between two adjacent chambers 1, and having the function of simply completing conduction or quickly sealing and isolating two adjacent specific gas pressure environments.

[0031] The sealing structure provided in this embodiment not only solves the technical problem in the prior art that for a chamber 1 with specific gas pressure environment requirements, the sealing operation of its channel is not fast, simple, and reliable enough, but also solves the technical problem that it is not convenient to achieve conduction and quick sealing and isolation operations between two adjacent chambers 1 both having specific gas pressure environment requirements, and has stronger applicability and practicability.

[0032] As described above, the sealing member 3 is movably arranged relative to the chamber wall 11. In some embodiments, it can be arranged in a hinged manner. For example, the sealing member 3 includes a sealing plate 31 and two hinge shafts connected to both sides of the sealing plate 31. Through the two hinge shafts, the sealing plate 31 is hingedly connected to the chamber wall and can displace relative to the fixed sealing surface 411, and the plate surface of the sealing plate 31 forms a movable sealing surface 311; under the push-pull action, the sealing plate 31 rotates or swings and displaces, switching between two positions of opening the transfer channel 2 and closing and sealing the transfer channel 2 to achieve conduction and sealing.

[0033] In a preferred embodiment provided by this application, the sealing member 3 is arranged in a sliding manner, that is, it is slidably connected relative to the chamber wall 11, and the sealing member 3 slides and displaces under the push-pull action in the up-down or left-right direction and switches between the positions of opening the channel and blocking the channel. With such a setting, on the one hand, the sealing member 3 slides and displaces, and the opening and closing actions are executed smoothly and quickly, which is more conducive to quickly achieving effective sealing in a simple execution action and improving the working efficiency of obtaining high vacuum in the chamber 1; on the other hand, it is very convenient for the operator to open and close the channel, and also reduces the space occupied by the sealing structure, which is more conducive to being applied to the isolation sealing environment between two adjacent chambers 1 and is also beneficial to reducing the size of the device.Figure 2 Figure 1 shows a schematic cross-sectional view of the sealing structure in an embodiment of the present application, in which the sealing member 3 is slidably arranged.

[0034] In some embodiments, to enhance the sealing performance and at the same time reduce the wear on the sealing part, there are angles between the moving sealing surface 311 and the fixed sealing surface 411 and the chamber wall 11, that is, both sealing surfaces are inclined with respect to the chamber wall 11. To improve the sealing performance, the inclination angles of the two can be the same and the two planes are parallel; at the same time, the sliding direction of the sealing member 3 is parallel to the extension direction of the chamber wall 11, that is, there are angles between both sealing surfaces and the sliding direction of the sealing member 3, and both sealing surfaces are inclined with respect to the sliding direction of the sealing member 3. With such a setting, on the one hand, the two inclined surfaces are in contact to achieve inclined sealing, which is more conducive to ensuring and improving the sealing effect. On the other hand, in the embodiment where the sealing member 3 is slidably arranged, when the sealing member 3 slides, the two inclined sealing surfaces will directly separate or come into contact, and there will be no strong relative friction between them due to the displacement, effectively avoiding the situation of frequent wear of the sealing member 3, which is conducive to the long-term effective use of the sealing structure and conducive to maintaining the long-term effectiveness of the seal.

[0035] In some embodiments, under a high processing precision, when the smoothness and flatness of the moving sealing surface 311 and the fixed sealing surface 411 reach high-precision standards, no sealing element is required between them, and a tight fit can also be achieved to obtain an effective sealing effect.

[0036] In other embodiments, a first sealing element is arranged between the moving sealing surface 311 and the fixed sealing surface 411. The first sealing element is connected to one of the moving sealing surface 311 or the fixed sealing surface 411. Of course, first sealing elements can also be arranged on both sealing surfaces. Preferably, the first sealing element is annular and is set as a sealing ring 32. The sealing ring 32 is arranged around the circumference of the channel opening 21 to completely surround the channel opening 21. When the sealing member 3 blocks the transmission channel 2, the moving sealing surface 311 and the fixed sealing surface 411 are pressed against each other, which acts on the sealing ring 32. On the basis of squeezing the sealing ring 32 to deform, they are tightly attached to each other to form an effective sealing effect and effectively seal the channel opening 21. After setting the sealing ring 32, not only can the sealing effect be improved, but also the complexity of the processing technology of the two sealing surfaces can be slightly reduced to a certain extent, the production efficiency can be improved, and the production cost can also be reduced. The embodiment of setting the sealing ring 32, combined with the structure in which the above two sealing surfaces are both inclined, can avoid serious wear of the sealing ring 32 caused by displacement. Through a simple but innovative structure setting, the sealing structure has the functions of good durability and long-term sealing effectiveness.

[0037] Limited to the opening / closing and sealing operations, only the displacement of the sealing component 3 is required to complete, without other operations. When the sealing component 3 is displaced to the position of blocking the transfer channel 2, it also presses against the fixed sealing surface 411 at the same time. Therefore, in this embodiment, as Figure 2 shown, the sealing structure further includes a constraint surface 511 that is opposite to and spaced from the fixed sealing surface 411. The constraint surface 511 is located on the sliding path of the sealing component 3. A position area where the sealing component 3 seals the transfer channel 2 is formed between the constraint surface 511 and the chamber wall 11. When the sealing component 3 is displaced to the position of blocking the transfer channel 2, it is embedded between the fixed sealing surface 411 and the constraint surface 511. Through dimensional cooperation, there is a pressing force between the constraint surface 511 and the sealing component 3, which also makes the movable sealing surface 311 press against the fixed sealing surface 411. On the basis of squeezing the sealing ring 32, they are closely fitted to achieve effective sealing. With such a setting, it not only ensures the effective sealing of the transfer channel 2 by the sealing component 3, preventing the occurrence of insufficient sealing due to insufficient binding force, but also does not require additional operations. It is only necessary to push and pull the sealing component 3 to displace it, ensuring that the function of tightly and effectively sealing the channel can be achieved with only the push-pull execution action. At the same time, this structure is reasonably and simply arranged, and does not increase the structural complexity to a large extent. Thus, the required functional requirements are achieved with high standards on a simple structure, making the sealing structure integrate the effects of simple and efficient execution, tight sealing, durability, and long-term effective sealing.

[0038] Of course, there are also other implementation manners. For example, in some implementation manners, there is also a magnetic attraction structure capable of generating strong suction force between the sealing component 3 and the chamber wall 11. With such a setting, although the force required to move the sealing component 3 away from the blocking position needs to be increased, this is a routine operation, which does not pose a technical difficulty and does not give rise to other operations and requirements, and achieves the effects of ensuring the tightness and long-term effectiveness of the sealing.

[0039] Specifically, the sealing component 3 includes a sealing plate 31 for covering the channel opening 21. In the embodiment where the sealing ring 32 is connected to the sealing plate 31, the sealing ring 32 is also included. As Figure 2 and Figure 5 shown, the sealing plate 31 can specifically be a trapezoidal plate with a gradually increasing cross-section. The inclined surface in the trapezoid serves as the plate surface of the sealing plate 31 that is close to and opposite to the fixed sealing surface 411, and forms the above-mentioned movable sealing surface 311.

[0040] The sealing ring 32 can be a sealing ring or a sealing gasket. The sealing gasket can be directly bonded to the plate surface. When using a sealing ring, a sealing groove for the sealing ring to be embedded is provided on the sealing plate 31. As Figure 5As shown, a notch is formed on the movable sealing surface 311. The diameter of the sealing ring is greater than the depth of the sealing groove, so that part of the sealing ring is embedded in the sealing groove and part protrudes outside the groove. When the movable sealing surface 311 fits against the fixed sealing surface 411, the sealing ring is squeezed to form a tight and effective seal for the channel opening 21.

[0041] The sealing plate 31 is slidably arranged relative to the chamber wall 11. There may be a guide rail for the sealing plate 31 to slide on the chamber wall 11, or a guiding chute 51 for the sealing plate 31 to slide is formed on the chamber wall 11. When a guide rail is connected to the chamber wall 11, the restraining surface 511 can be directly arranged on the chamber wall 11 or formed by the surface of a plate connected to the chamber wall 11. A groove for the sealing plate 31 to slide into is formed between the restraining surface 511 and the fixed sealing surface 411, and the restraining surface 511 is also the groove wall of the groove. When a guiding chute 51 for the sealing plate 31 to slide is formed on the chamber wall 11, the restraining surface 511 can be formed by a section of the chute wall at the position of the guiding chute 51 opposite to the fixed sealing surface 411.

[0042] There may be one guiding chute 51, and a protrusion extending into the chute is provided on the sealing plate 31 to achieve sliding connection with the guiding chute 51; there may also be at least two guiding chutes 51, which are arranged on both sides of the sealing plate 31. The two side plate ends of the sealing plate 31 extend into the guiding chutes 51 respectively for sliding connection. In this way, the smoothness of sliding can be ensured. At the same time, when blocking the conveying channel 2, the two guiding chutes 51 on both sides form two restraining surfaces 511 to press against the sealing plate 31 on both sides, and the pressing is stable and balanced, ensuring that the sealing plate 31 will not have the problem of warping on one side or partially.

[0043] The guiding chute 51 can be directly opened on the chamber wall 11, or arranged on the guiding block 5. As Figure 1 shown, guiding blocks 5 are respectively arranged on both sides of the sealing plate 31, and the above-mentioned guiding chutes 51 are respectively arranged on each guiding block 5. The guiding blocks 5 are directly or indirectly connected and fixed to the chamber wall 11, and the sealing plate 31 is slidably connected to the guiding blocks 5.

[0044] As Figure 3 and Figure 6 shown, connecting bosses for extending into the guiding chutes 51 are arranged at the two side plate ends of the sealing plate 31. The connecting bosses are strip-shaped and extend from the top end to the bottom end of the sealing plate 31, increasing the connection area with the guiding chutes 51 and enhancing the connection stability and displacement smoothness. At the same time, the side walls on both sides of the connecting bosses and the plate end surfaces of the rest areas respectively form two docking steps, and the two docking steps just dock with the chute walls and the outer end surfaces on both sides of the guiding chute 51 opening, surface against surface, improving the docking accuracy of the sealing plate 31 and avoiding the problem of jamming during movement caused by the sealing plate 31 being skewed or offset.

[0045] The fixed sealing surface 411 can be directly machined on the chamber wall 11. Or, in this embodiment, as Figure 1 and Figure 2 shown, the sealing structure is further provided with a spacer 4. The spacer 4 is used for sealing connection with the chamber wall 11. At the same time, the spacer 4 is provided with a through hole penetrating in the thickness direction, and the through hole is communicated with the transfer channel 2 of the chamber 1 itself. In other words, the through hole forms part of the transfer channel 2; and the fixed sealing surface 411 is formed on the spacer 4, and the orifice of the through hole on the fixed sealing surface 411 forms the above-mentioned channel orifice 21. The sealing plate 31 is slidably arranged relative to the spacer 4 to seal and close the through hole on the spacer 4. With such a setting, the fixed sealing surface 411 is directly machined on the spacer 4, which also avoids machining and changing the chamber wall 11 and reduces the process complexity; moreover, the sealing member 3 and the guide block 5 formed with the guide chute 51 can be directly connected to the spacer 4, so as to form or basically form the whole of the sealing structure. When in use, the spacer 4 is connected and fixed to the chamber wall 11, and the whole assembly is fixed, that is, a directly usable sealing structure is formed on the chamber 1, which has the function of flexible application, is very convenient for mass-producing the sealing structure and applying it to various devices or apparatuses of different types and specifications.

[0046] The connection between the spacer 4 and the chamber wall 11 can be a fixed non-detachable connection, such as bonding or welding, or a detachable connection, such as realized by connection structures such as screw fastening or snap connection. Whether it is detachable or non-detachable, in order to ensure airtightness, the connection between the through hole and the transfer channel 2 of the chamber 1 itself needs to be sealed. Therefore, a second sealing member 42 is further provided on the side of the spacer 4 for connecting with the chamber wall 11, and the second sealing member 42 can be an O-ring or a sealing gasket. Figure 5 and Figure 6 show a specific structure of the spacer 4 in the embodiment of the present application. Among them, the spacer 4 is integrally in a plate shape and can be a separator plate. One side of the plate is flat and is used for connecting with the chamber wall 11. A sealing groove is provided thereon, and an O-ring is embedded in the groove. The O-ring extends circumferentially around the through hole. When the spacer 4 is connected to the chamber wall 11, the O-ring is extruded to form an effective sealing isolation for the gap at the connection. And the inclined fixed sealing surface 411 is arranged or formed on the other side plate surface of the spacer 4. The overall structure is simple and easy to process and form.

[0047] Since there are angles between the movable sealing surface 311 and the fixed sealing surface 411 and the guide chute 51, the sealing plate 31 and the spacer 4 can both be triangular or trapezoidal, that is, both are provided with inclined surfaces. The inclined surface of the spacer 4 forms the fixed sealing surface 411, and the inclined surface of the sealing plate 31 forms the movable sealing surface 311. Or, as Figure 6As shown, the main body of the spacer 4 is in a flat plate shape, and a triangular inclined protrusion 41 is provided on one side surface. The inclined surface of the inclined protrusion 41 forms a fixed sealing surface 411, and a through hole is opened on the inclined protrusion 41. At the same time, the guide block 5 can be in a strip-shaped rectangular shape, or in a triangular or trapezoidal shape, and is connected to the spacer 4 with inclined surfaces facing each other, and the guide chute 51 extends along a direction parallel to other surfaces of the spacer 4.

[0048] As can be seen from the above description, both side ends of the sealing plate 31 are slidably connected to the guide chute 51 respectively. The sealing plate 31 moves within the guide chute 51 to open or block the transfer channel 2. When blocking the transfer channel 2, it is embedded between the embedding constraint surface 511 and the fixed sealing surface 411. The two surfaces are pressed against the sealing plate 31, and the sealing plate 31 can also be locked here. When being pushed or pulled forcefully, it disengages from this position. That is, at the position where the sealing plate 31 blocks the transfer channel 2, it is pressed by the constraint surface 511 and constrained to be locked here. After moving away from this position, it can slide smoothly in other sections of the guide chute 51 without being pressed by the two side groove walls, ensuring smooth execution and perfect function.

[0049] Based on this, the present application provides an implementation manner, which is also a specific structure shown in the drawings of the present application. At the position of blocking the transfer channel 2, it can be directly sealed and position-locked simultaneously through the constraints between the constraint surface 511 and the fixed sealing surface 411 and the sealing plate 31. That is, the sealing plate 31 is inserted between the constraint surface 511 and the fixed sealing surface 411. The distance between the constraint surface 511 and the fixed sealing surface 411 is slightly smaller than the thickness of the corresponding plate section of the sealing plate 31, and they are pressed against each other to lock the sealing plate 31 at this position, and the moving sealing surface 311 abuts against the fixed sealing surface 411.

[0050] Specifically, as Figure 3As shown, in the embodiment where the spacer 4 is provided with inclined protrusions 41, a fixed sealing surface 411 is formed on the inclined protrusions 41. The guide blocks 5 are strip-shaped and are respectively located on both sides of the inclined protrusions 41. Then, the guide chutes 51 are also respectively located on both sides of the inclined protrusions 41, and the notch openings all face the inclined protrusions 41. At the same time, the tip of the inclined protrusion 41 covers a part of the guide chute 51, that is, a part of the fixed sealing surface 411 crosses the groove wall of the guide chute 51 opposite to the constraint surface 511, so that the distance between the constraint surface 511 and the fixed sealing surface 411 is less than the groove width of this section. When the sealing plate 31 is displaced to the position of blocking the conveying channel 2, it is directly inserted between the constraint surface 511 and the fixed sealing surface 411, generating a direct acting force with the constraint surface 511 and the fixed sealing surface 411. The sealing plate 31 is subjected to extrusion constraint, sealing the conveying channel 2, and is also locked in this position. With such a setting, not only is the structure reasonably arranged, the constraint effect is direct and effective, and only one constraint effect is required, which can avoid setting indirect locking constraints. At the same time, this structure enables the guide chute 51 not to require a widened setting. As shown in the accompanying drawings, the guide chute 51 and the guide block 5 are very convenient to process. By setting the connection position with the spacer 4, a misaligned intersection with the inclined protrusion 41 with the fixed sealing surface 411 can form a constraint section for the sealing plate 31.

[0051] Of course, other embodiments can also be adopted. For example, at the position of blocking the conveying channel 2, the sealing plate 31 can be constrained by the guide chute 51, that is, the guide chute 51 reduces the groove width in the constraint surface 511 section, exerts extrusion constraint on the connecting boss, and locks the sealing plate 31 at the position of blocking the conveying channel 2. At the same time, by setting the distance between the constraint surface 511 and the fixed sealing surface 411 to be slightly less than the thickness of the corresponding plate section of the sealing plate 31, the sealing plate 31 is stuck between the constraint surface 511 and the fixed sealing surface 411 and presses the fixed sealing surface 411. Specifically, the guide chute 51 as a whole has a distance from the fixed sealing surface 411. The fixed sealing surface 411 is located on one side in the width direction of the guide chute 51. The guide chute 51 includes a first groove section with a first groove width and a second groove section with a second groove width. The first groove width is greater than the second groove width. The constraint surface 511 is the groove wall of the second groove section relative to the fixed sealing surface 411. The cross-sectional shape and size of the connecting boss on the sealing plate 31 are matched with the first groove section and the second groove section. For example, the cross-sections of the guide chute 51 and the connecting boss are both trapezoidal or conical or stepped hole-shaped, etc. This implementation structure has two aspects of constraint effects. One is the locking constraint of the second groove section of the guide chute 51 on the displacement of the connecting boss, and the other is the extrusion constraint between the constraint surface 511 and the fixed moving surface and the sealing plate 31. It is slightly cumbersome.

[0052] Such as Figure 1As shown in the figure, in this embodiment, a pushing handle 33 is further provided on the sealing plate 31 for connection or pushing by a pushing member. With this arrangement, the sealing plate 31 can be connected to the pushing structure and displaced under the action of the pushing structure, eliminating the need for manual pushing and pulling operations, further reducing the space occupation and the space requirement on the other side of the sealing plate 31. Compared with other sealing operation methods, which are defective in large operation amplitude, cumbersome actions, and large space occupation, and are not convenient for sealing the passage between two adjacent chambers 1, this sealing structure is particularly suitable for sealing and isolating between two adjacent chambers 1. Both sides of the sealing plate 31 are chambers 1 with specific air pressure environment requirements. A transfer passage 2 for transferring samples between the two chambers 1 is provided on the partition plate in the middle separating the two chambers 1. The sealing structure is arranged on the partition plate to open or block this passage; the pushing structure includes a pushing power and a push rod. The push rod is connected to the pushing handle 33 on the sealing plate 31. Driven by the pushing power, the sealing plate 31 can be displaced. The switch or operating handle of the pushing and pulling power is arranged outside the two chambers 1. Even the pushing power can be arranged outside the chamber 1, as long as the push rod penetrates into the chamber 1 and is connected to the pushing handle 33 of the sealing plate 31. With this arrangement, there is no need for manual interference inside the chamber 1, and the environment inside the chamber 1 will not be damaged. Thus, the conduction or sealing isolation between the two chambers 1 can be achieved, extremely effectively improving the work efficiency and work simplicity.

[0053] Based on the above sealing structure, the present application further provides a scanning electron microscope, including a chamber 1 and a sealing structure. This chamber 1 is the chamber 1 in the above embodiments, and this sealing structure is the sealing structure in the above embodiments. Since this scanning electron microscope has the above chamber 1 and the transfer passage 2 of the chamber 1 is sealed by the above sealing structure, for the beneficial effects brought by the sealing structure to the scanning electron microscope, please refer to the above content and will not be elaborated here.

[0054] The components and devices involved in the present application are only illustrative examples and do not intend to require or imply that they must be connected, arranged, and configured in the manner shown in the drawings. As those skilled in the art will recognize, these components and devices can be connected, arranged, and configured in any way. Words such as "including", "comprising", "having", etc. are open-ended words, meaning "including but not limited to", and can be used interchangeably with each other. The words "or" and "and" used here refer to the word "and / or" and can be used interchangeably with each other, unless the context clearly indicates otherwise. The word "such as" used here refers to the phrase "such as but not limited to" and can be used interchangeably with each other.

[0055] It should also be noted that in the device of the present application, each component can be disassembled and / or recombined. These disassembly and / or recombination should be regarded as equivalent solutions of the present application.

[0056] The foregoing description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Accordingly, the present application is not intended to be limited to the aspects shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0057] The foregoing description has been presented for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of the present application to the form disclosed herein. Although several example aspects and embodiments have been discussed above, those skilled in the art will recognize some variations, modifications, alterations, additions, and subcombinations thereof.

[0058] The foregoing is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present application shall be included within the protection scope of the present application.

Claims

1. A sealing structure for sealing a transfer channel (2) for objects to enter and exit a chamber (1), characterized in that, On the chamber wall (11) of the chamber (1), there are provided inclined protrusions (41). On the inclined protrusions (41), there are provided channel openings (21) communicating with the transfer channel (2). The inclined surface of the inclined protrusion (41) forms a fixed sealing surface (411) surrounding the channel opening (21). The sealing structure includes a sealing member (3) movably connected to the chamber wall (11). The sealing member (3) includes a sealing plate (31). On the sealing plate (31), there is provided a moving sealing surface (311) formed by an inclined surface. The sealing member (3) moves to open or close the transfer channel (2). When closing the channel opening (21), the moving sealing surface (311) presses against and fits with the fixed sealing surface (411) to seal the channel opening (21). It further includes a guide block (5). On the guide block (5), there are provided guide chutes (51) located on both sides of the inclined protrusion (41) and with the notch facing the inclined protrusion (41). The two side plate ends of the sealing plate (31) are slidably connected in the guide chutes (51). Along the inclined direction, the inclined protrusion (41) gradually approaches the guide chute (51). And along the inclined direction, one end of the inclined protrusion (41) is located on one side of the guide chute (51), and the other end is a protruding tip and extends to cover a part of the guide chute (51). In the section of the guide chute (51) opposite to the protruding tip and the groove wall opposite to the fixed sealing surface forms a constraint surface (511). When the sealing plate (31) moves to a position embedded between the constraint surface (511) and the fixed sealing surface (411), it is locked under extrusion, and the moving sealing surface (311) presses against and seals the fixed sealing surface (411). There are angles between both the moving sealing surface (311) and the fixed sealing surface (411) and the chamber wall (11). The sliding direction of the sealing member (3) is parallel to the extending direction of the chamber wall (11).

2. The sealing structure according to claim 1, characterized in that, A sealing ring (32) is provided between the moving sealing surface (311) and the fixed sealing surface (411) and is arranged to surround the circumference of the channel opening (21). When the moving sealing surface (311) blocks the transfer channel (2), the sealing ring (32) is extruded to seal the channel opening (21).

3. The sealing structure according to claim 1, characterized in that, It further includes a separator (4) hermetically connected to the chamber wall (11). The fixed sealing surface (411) is formed on the separator (4). The through hole provided in the separator (4) along the thickness direction forms the channel opening 2(1) on the fixed sealing surface (411).

4. The sealing structure according to claim 3, characterized in that, Both the sealing member (3) and the guide chute (51) for the sealing member (3) to slide are provided or connected to the separator (4).

5. The sealing structure according to claim 1, characterized in that, A pushing handle (33) is provided on the sealing member (3).

6. A scanning electron microscope, comprising a chamber (1) and a sealing structure, characterized in that, The sealing structure is the sealing structure according to any one of claims 1 - 5.

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