Adaptive parallel sealing mechanism for microelectronic packaging under high vacuum conditions

Abstract

The invention discloses an adaptive parallel sealing welding mechanism for microelectronic packaging under a high vacuum state, which solves the problem of how to complete high-quality parallel sealing welding of a cover plate of a thin-shell device and a tube shell at a low cost under a vacuum environment, thereby improving the sealing welding yield rate; a floating parallel welding wheel bracket is arranged, so that two parallel welding wheels on the bracket are floatingly pressed on the parallel welding seam between the cover plate and the tube shell, and weights are arranged on the top of the parallel welding wheel bracket. By increasing or decreasing the number of weights, the welding pressure of the parallel welding wheels on the welding seam is adjusted, thereby realizing the adjustment of adaptive welding pressure during the welding process; a shoulder pole-shaped half-mouth-shaped lifting frame is arranged between the left and right parallel welding wheel brackets, and the floating parallel welding wheel bracket is lifted and lowered by the eccentric wheel to complete the conversion of the welding state and the waiting welding state of the two parallel welding wheels; thereby greatly improving the sealing welding quality of the packaging component.

Description

Technical Field

[0001] The invention relates to a microelectronic packaging device, in particular to a mechanism and a welding method for parallel welding a thin shell device cover plate and a tube shell in a microelectronic packaging assembly in a high vacuum chamber. Background Art

[0002] Microelectronic packaging and assembly (MEMS devices) is the process of using membrane technology and micro-machining technology to arrange, paste, fix and connect chips and other elements on a frame or substrate, lead out the connection terminals, and fix them by encapsulating with a plastic insulating medium. Then, according to the electrical schematic or logic diagram, the microelectronics technology and high-density assembly technology are used to assemble the microelectronic devices and micro-components into applicable and producible electronic components, parts or a system. At present, vacuum packaging equipment is changing from a single machine to a multi-chamber capable of performing multiple processes (such as baking, activation, alignment, sealing, and testing). High-vacuum multi-chamber production lines have emerged, which greatly improve the transportation efficiency of microelectronic packaging components under high vacuum. Under high vacuum conditions, the packaging of thin shell cover plates and tube shells in microelectronic packaging is completed by parallel welding mechanisms. When the thin shell cover plates are accurately aligned and placed on the tube shell, the parallel welding mechanism will drive the welding head to descend a certain distance, press the two parallel welding wheels onto the welds at the welding point between the cover plate and the tube shell, and then the parallel welding mechanism Then the two parallel welding wheels are driven to move horizontally along the weld to achieve welding of the cover plate and the tube shell. The existing parallel welding mechanism has the following defects: (1) The driving motors of the parallel welding mechanism are all vacuum motors, which are expensive and have a short life, which greatly increases the equipment cost and the equipment maintenance cost. (2) For different types of packaging cover plates, it is necessary to repeatedly and accurately adjust the downward stroke of the parallel welding mechanism, which is time-consuming and labor-intensive, affecting the production rhythm and efficiency on site. (3) Since thin shell cover plates inevitably have processing errors during machining, the downward stroke of the fixed parallel welding mechanism cannot fully meet the downward stroke requirements when welding all cover plates and tube shells. For cover plates with large errors, inappropriate downward stroke will cause the packaging window set on the tube shell to shift due to uneven force on both sides of the weld when the parallel welding wheels are welding, which directly leads to a decrease in the yield of the packaged components. (4) The driving mechanism for pressing down and lifting the welding head of the welding mechanism is complex and has high maintenance costs. Summary of the invention

[0003] The invention provides a microelectronic package adaptive parallel sealing welding mechanism under high vacuum state, which solves the technical problem of how to complete high-quality parallel sealing welding of a thin shell device cover plate and a tube shell at low cost under vacuum environment, thereby improving the sealing welding yield rate.

[0004] The present invention solves the above technical problems through the following technical solutions:

[0005] The overall concept of the present invention is as follows: an ordinary motor is arranged in a closed independent chamber, and vacuum transmission outside the independent chamber is realized through magnetic fluid isolation, thereby realizing the use of an ordinary motor instead of a vacuum motor to complete the driving task of the welding mechanism; a floating parallel welding wheel bracket is arranged, so that the two parallel welding wheels on the bracket are floatingly crimped on the parallel weld between the cover plate and the tube shell, and weights are arranged at the top of the parallel welding wheel bracket. By increasing or decreasing the number of weights, the welding pressure of the parallel welding wheels on the weld is adjusted, thereby realizing the adjustment of the adaptive welding pressure during the welding process; a shoulder pole-shaped half-mouth-shaped lifting frame is arranged between the left and right parallel welding wheel brackets, and the floating parallel welding wheel bracket is lifted and lowered by the eccentric wheel to the half-mouth-shaped lifting frame, thereby completing the conversion of the welding state and the waiting welding state of the two parallel welding wheels; the present invention abandons the process of setting and adjusting the pre-pressure stroke of the welding head mechanism in traditional parallel welding, and greatly improves the sealing quality of the packaging component.

[0006] A self-adaptive parallel sealing welding mechanism for microelectronic packaging under high vacuum state comprises a high vacuum sealed chamber, a box-shaped frame body is arranged in the high vacuum sealed chamber, an eccentric wheel is arranged on the front elevation of the front side vertical plate of the box-shaped frame body, a sealed shell of an eccentric wheel driving motor is arranged in the box-shaped frame body, an eccentric wheel driving motor is arranged in the sealed shell, air is sealed in the sealed shell, and the output shaft of the eccentric wheel driving motor is connected with the eccentric wheel shaft of the eccentric wheel after passing through the sealed magnetic fluid; a U-shaped The frame plate, the eccentric wheel is movably arranged in the frame of the U-shaped frame plate, and the left lifting guide block and the right lifting guide block are fixedly arranged in parallel with each other on the front side vertical surface of the U-shaped frame plate, and the left guide groove in the up-down direction is fixedly arranged on the front side vertical plate on the left side of the U-shaped frame plate, and the right guide groove in the up-down direction is fixedly arranged on the front side vertical plate on the right side of the U-shaped frame plate. The left column of the half-mouth lifting frame is arranged in the left guide groove in the up-down direction, and the right column of the half-mouth lifting frame is arranged in the right guide groove in the up-down direction. On the lower bottom surface of the middle part of the crossbeam, a lifting block of a lifting frame is fixedly connected, and a lifting guide wheel axle is connected to the lifting block of the lifting frame, and a lifting guide wheel is arranged on the lifting guide wheel axle, and the lifting guide wheel is top-connected with the outer edge side of the eccentric wheel; a left lifting slider is arranged on the left lifting guide rail block, and a right lifting slider is arranged on the right lifting guide rail block, and a left parallel welding wheel mechanism is fixedly connected to the left lifting slider, and a right parallel welding wheel mechanism is fixedly connected to the right lifting slider, and the structure of the left parallel welding wheel mechanism and the structure of the right parallel welding wheel mechanism are complete. The two parts are completely identical; a left parallel welding wheel bracket of a left parallel welding wheel mechanism is connected to the left lifting slide block, a left welding wheel assembly is connected to the lower end of the left parallel welding wheel bracket, a left welding wheel assembly is connected to the left welding wheel, a left weight support plate is fixedly connected to the upper end of the left parallel welding wheel bracket, a left weight connecting rod is arranged on the left weight support plate, and the left weight is placed on the left weight support plate through the connecting hole thereon; a sealing welding assembly is arranged directly below the left parallel welding wheel mechanism and the right parallel welding wheel mechanism, and the left welding wheel is crimped onto the left weld of the sealing welding assembly.

[0007] The left welding wheel assembly is connected to the lower end of the left parallel welding wheel bracket through a left L-shaped hanging plate, and the left L-shaped hanging plate and the lower end of the left parallel welding wheel bracket are connected together through an insulating gasket and an insulating screw; the weight of the left weight placed on the left parallel welding wheel mechanism is the same as the weight of the right weight placed on the right parallel welding wheel mechanism; a nylon lifting screw is arranged on the lower bottom surface of the left support plate of the weight, and the lifting block of the lifting frame is arranged directly below the nylon lifting screw.

[0008] The left welding wheel and the right welding wheel are floatingly crimped on the two welds of the sealing and welding assembly. The pre-pressure of the two parallel welds of the sealing and welding assembly can be adjusted and set by adjusting the number and weight of the left weights placed on the left support plate of the weights, as well as the number and weight of the right weights placed on the right parallel welding wheel mechanism.

[0009] When the left welding wheel and the right welding wheel are welding the two parallel welds of the sealing welding assembly, the lifting block of the lifting frame on the half-U-shaped lifting frame is arranged directly below the nylon lifting screw. At this time, the left parallel welding wheel mechanism and the right parallel welding wheel mechanism are in a detached state with the half-U-shaped lifting frame; when the left welding wheel and the right welding wheel are welding the two parallel welds of the sealing welding assembly, after the welding is completed, the eccentric wheel drive motor arranged in the closed shell is started, and the eccentric wheel lifts the half-U-shaped lifting frame through the lifting guide wheel. The half-U-shaped lifting frame lifts the left welding wheel and the right welding wheel through the left support plate connected to the weight and the right support plate of the weight in the right parallel welding wheel mechanism, and then separates from the sealing welding assembly.

[0010] The driving motor of the welding mechanism of the present invention is sealed in an air chamber for operation, and an ordinary linear motor can be selected, which greatly saves the investment cost of the motor and overcomes the defect of short life of the linear motor; the present invention designs the parallel welding head mechanism as a floating mechanism, and controls the downward pressure of welding by adjusting the weight of the weights on the floating mechanism, thereby realizing the self-adaptation of the welding wheel and the sealing welding component during the welding process and improving the quality of the weld. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a schematic diagram of the structure of the present invention;

[0012] Figure 2 It is a structural schematic diagram of the upper and lower guide rail seats of the two parallel welding wheel mechanisms of the present invention and the lifting guide rail seats of the half-mouth-shaped lifting frame 317;

[0013] Figure 3 It is a structural schematic diagram of a half-mouth-shaped lifting frame 317 of the present invention;

[0014] Figure 4 It is a structural schematic diagram of the U-shaped frame plate 313 of the present invention;

[0015] Figure 5 It is a diagram showing the coordination relationship between the eccentric wheel 323, the lifting guide wheel 324, the lifting block 326 of the lifting frame and the half-mouth-shaped lifting frame 317 of the present invention;

[0016] Figure 6 It is a diagram showing the matching relationship between the lifting block 326 of the lifting frame, the weight left support plate 306 and the nylon lifting screw 327 of the present invention;

[0017] Figure 7 It is a structural schematic diagram of the left parallel welding wheel mechanism bracket of the present invention;

[0018] Figure 8 It is a structural schematic diagram of the left welding wheel assembly 301 of the present invention. DETAILED DESCRIPTION

[0019] The present invention is described in detail below in conjunction with the accompanying drawings:

[0020] A self-adaptive parallel sealing welding mechanism for microelectronic packaging under high vacuum state, comprising a high vacuum sealed chamber, a box-shaped frame body 315 is arranged in the high vacuum sealed chamber, an eccentric wheel 323 is arranged on the front elevation of the front side vertical plate 316 of the box-shaped frame body 315, a sealed shell 328 of an eccentric wheel driving motor is arranged in the box-shaped frame body 315, an eccentric wheel driving motor is arranged in the sealed shell 328, air is sealed in the sealed shell 328, and the output shaft of the eccentric wheel driving motor is connected to the eccentric wheel shaft 322 of the eccentric wheel 323 after passing through a sealed magnetic fluid; a U-shaped frame plate 313 is buckled on the front elevation of the front side vertical plate 316, and the eccentric wheel The left lifting guide block 312 and the right lifting guide block 314 are fixedly arranged in parallel with each other on the front side vertical surface of the U-shaped frame plate 313. The left guide groove 318 in the vertical direction is fixedly arranged on the front side vertical plate 316 on the left side of the U-shaped frame plate 313. The right guide groove 319 in the vertical direction is fixedly arranged on the front side vertical plate 316 on the right side of the U-shaped frame plate 313. The left side column 320 of the half-mouth lifting frame 317 is arranged in the left guide groove 318 in the vertical direction. The right side column 321 of the half-mouth lifting frame 317 is arranged in the right guide groove 319 in the vertical direction. On the lower bottom surface of the middle part of the cross beam of the lowering frame 317, a lifting frame lifting block 326 is fixedly connected, and a lifting guide wheel shaft 325 is connected to the lifting frame lifting block 326, and a lifting guide wheel 324 is arranged on the lifting guide wheel shaft 325, and the lifting guide wheel 324 is connected to the outer edge side of the eccentric wheel 323; a left lifting slider 304 is arranged on the left lifting guide rail block 312, and a right lifting slider is arranged on the right lifting guide rail block 314. A left parallel welding wheel mechanism is fixedly connected to the left lifting slider 304, and a right parallel welding wheel mechanism is fixedly connected to the right lifting slider, and the structure of the left parallel welding wheel mechanism is exactly the same as that of the right parallel welding wheel mechanism; A left parallel welding wheel bracket 305 of a left parallel welding wheel mechanism is connected to the left lifting slider 304, a left welding wheel assembly 301 is connected to the lower end of the left parallel welding wheel bracket 305, a left welding wheel 302 is connected to the left welding wheel assembly 301, a left weight support plate 306 is fixedly connected to the upper end of the left parallel welding wheel bracket 305, a left weight connecting rod 307 is provided on the weight left support plate 306, and a left weight 308 is placed on the weight left support plate 306 through a connecting hole 309 thereon; a sealing welding assembly 329 is provided directly below the left parallel welding wheel mechanism and the right parallel welding wheel mechanism, and the left welding wheel 302 is crimped onto the left weld of the sealing welding assembly 329.

[0021] The left welding wheel assembly 301 is connected to the lower end of the left parallel welding wheel bracket 305 through the left L-shaped hanging plate 303, and the left L-shaped hanging plate 303 and the lower end of the left parallel welding wheel bracket 305 are connected together through an insulating gasket 310 and an insulating screw 311; the weight of the left weight 308 placed on the left parallel welding wheel mechanism is the same as the weight of the right weight placed on the right parallel welding wheel mechanism; a nylon lifting screw 327 is arranged on the lower bottom surface of the left weight support plate 306, and the lifting frame lifting block 326 is arranged directly below the nylon lifting screw 327.

[0022] A box-shaped frame body 315 is arranged in the high vacuum sealed chamber, and a U-shaped frame plate 313 is buckled on the front elevation of the front side vertical plate 316 of the box-shaped frame body 315, and a left lifting guide block 312 and a right lifting guide block 314 are fixedly arranged in parallel with each other on the front side elevation of the U-shaped frame plate 313, a left lifting slide block 304 is arranged on the left lifting guide block 312, and a right lifting slide block is arranged on the right lifting guide block 314, a left parallel welding wheel mechanism is fixedly connected to the left lifting slide block 304, and a right parallel welding wheel mechanism is fixedly connected to the right lifting slide block, and the structure of the left parallel welding wheel mechanism is exactly the same as that of the right parallel welding wheel mechanism; a left parallel welding wheel bracket 305 of the left parallel welding wheel mechanism is connected to the left lifting slide block 304, a left welding wheel assembly 301 is connected to the lower end of the left parallel welding wheel bracket 305, and a left welding wheel 304 is connected to the left welding wheel assembly 301. 02. A weight left support plate 306 is fixedly connected to the upper end of the left parallel welding wheel bracket 305. A left weight connection rod 307 is arranged on the weight left support plate 306. The left weight 308 is placed on the weight left support plate 306 through the connection hole 309 thereon; a sealing welding assembly 329 is arranged directly below the left parallel welding wheel mechanism and the right parallel welding wheel mechanism, the left welding wheel 302 is crimped on the left weld of the sealing welding assembly 329, and the right welding wheel on the right parallel welding wheel mechanism is crimped on the right weld of the sealing welding assembly 329; it is characterized by the following steps: the left welding wheel 302 and the right welding wheel are floatingly crimped on the two welds of the sealing welding assembly 329, and the pre-pressure of the two parallel welds of the sealing welding assembly 329 is adjusted and set by adjusting the number and weight of the left weight 308 placed on the weight left support plate 306 and the number and weight of the right weight placed on the right parallel welding wheel mechanism.

[0023] An eccentric wheel 323 is arranged on the front facade of the front side vertical plate 316 of the box-shaped frame body 315, and a closed housing 328 of an eccentric wheel driving motor is arranged in the box-shaped frame body 315. An eccentric wheel driving motor is arranged in the closed housing 328, and air is sealed in the closed housing 328. The output shaft of the eccentric wheel driving motor is connected to the eccentric wheel shaft 322 of the eccentric wheel 323 through a sealed magnetic fluid; a left guide rail groove 318 in the up-down direction is fixedly arranged on the front side vertical plate 316 on the left side of the U-shaped frame plate 313, and a left guide rail groove 318 in the up-down direction is fixedly arranged on the front side vertical plate 316 on the right side of the U-shaped frame plate 313. 16, a right guide groove 319 in the up-down direction is fixedly arranged, a left column 320 of a half-mouth-shaped lifting frame 317 is arranged in the left guide groove 318 in the up-down direction, a right column 321 of the half-mouth-shaped lifting frame 317 is arranged in the right guide groove 319 in the up-down direction, a lifting frame lifting block 326 is fixedly connected to the lower bottom surface of the middle part of the cross beam of the half-mouth-shaped lifting frame 317, a lifting guide wheel shaft 325 is connected to the lifting frame lifting block 326, a lifting guide wheel shaft 325 is arranged on the lifting guide wheel shaft 325, and the lifting guide wheel 324 is connected to the outer edge side of the eccentric wheel 323;

[0024] When the left welding wheel 302 and the right welding wheel are welding the two parallel welds of the sealing welding assembly 329, the lifting frame lifting block 326 on the half-mouth-shaped lifting frame 317 is arranged directly below the nylon lifting screw 327. At this time, the left parallel welding wheel mechanism and the right parallel welding wheel mechanism are in a disengaged state from the half-mouth-shaped lifting frame 317.

[0025] When the left welding wheel 302 and the right welding wheel have completed welding the two parallel welds of the sealing welding assembly 329, the eccentric wheel drive motor arranged in the closed shell 328 is started, and the eccentric wheel 323 lifts the half-mouth-shaped lifting frame 317 through the lifting guide wheel 324. The half-mouth-shaped lifting frame 317 lifts the left welding wheel 302 and the right welding wheel through the top-connected weight left support plate 306 and the weight right support plate in the right parallel welding wheel mechanism, and then separates them from the sealing welding assembly 329.

Claims

1. An adaptive parallel sealing welding mechanism for microelectronic packaging under high vacuum state, comprising a high vacuum sealed chamber, a box-shaped frame body (315) is arranged in the high vacuum sealed chamber, an eccentric wheel (323) is arranged on the front facade of the front side vertical plate (316) of the box-shaped frame body (315), a sealed shell (328) of an eccentric wheel drive motor is arranged in the box-shaped frame body (315), an eccentric wheel drive motor is arranged in the sealed shell (328), air is sealed in the sealed shell (328), and the output shaft of the eccentric wheel drive motor is connected to the eccentric wheel shaft (322) of the eccentric wheel (323) after passing through a sealed magnetic fluid; characterized in that: A U-shaped frame plate (313) is buckled on the front face of the front side vertical plate (316); an eccentric wheel (323) is movably arranged in the frame of the U-shaped frame plate (313); a left lifting guide rail block (312) and a right lifting guide rail block (314) are respectively fixedly arranged in parallel with each other on the front side vertical plate (316) on the left side of the U-shaped frame plate (313); a left guide rail groove (318) in the up-down direction is fixedly arranged on the front side vertical plate (316) on the right side of the U-shaped frame plate (313); and a right guide rail groove (319) in the up-down direction is fixedly arranged on the front side vertical plate (316) on the right side of the U-shaped frame plate (313). 19), the left side column (320) of the half-mouth-shaped lifting frame (317) is arranged in the left guide groove (318) in the up-down direction, the right side column (321) of the half-mouth-shaped lifting frame (317) is arranged in the right guide groove (319) in the up-down direction, and a lifting frame lifting block (326) is fixedly connected to the lower bottom surface of the middle part of the cross beam of the half-mouth-shaped lifting frame (317), and a lifting guide wheel shaft (325) is connected to the lifting frame lifting block (326), and a lifting guide wheel (324) is arranged on the lifting guide wheel shaft (325), and the lifting guide wheel (324) and the eccentric wheel (323) are connected to each other. ) are connected together at the outer edge side of the wheel; a left lifting slide block (304) is provided on the left lifting guide rail block (312), and a right lifting slide block is provided on the right lifting guide rail block (314); a left parallel welding wheel mechanism is fixedly connected to the left lifting slide block (304), and a right parallel welding wheel mechanism is fixedly connected to the right lifting slide block; the structure of the left parallel welding wheel mechanism is completely the same as that of the right parallel welding wheel mechanism; a left parallel welding wheel bracket (305) of the left parallel welding wheel mechanism is connected to the left lifting slide block (304), and a left parallel welding wheel bracket (305) is connected to the lower end of the left parallel welding wheel bracket (305). A welding wheel assembly (301) is provided, wherein a left welding wheel (302) is connected to the left welding wheel assembly (301), a weight left support plate (306) is fixedly connected to the upper end of a left parallel welding wheel bracket (305), a left weight connecting rod (307) is provided on the weight left support plate (306), and a left weight (308) is placed on the weight left support plate (306) through a connecting hole (309) thereon; a sealing welding assembly (329) is provided directly below between the left parallel welding wheel mechanism and the right parallel welding wheel mechanism, and the left welding wheel (302) is pressed onto the left welding seam of the sealing welding assembly (329).

2. The self-adaptive parallel sealing mechanism for microelectronic packaging under high vacuum state according to claim 1, characterized in that: The left welding wheel assembly (301) is connected to the lower end of the left parallel welding wheel bracket (305) through a left L-shaped hanging plate (303), and the left L-shaped hanging plate (303) and the lower end of the left parallel welding wheel bracket (305) are connected together through an insulating washer (310) and an insulating screw (311); the weight of the left weight (308) placed on the left parallel welding wheel mechanism is the same as the weight of the right weight placed on the right parallel welding wheel mechanism; a nylon lifting screw (327) is provided on the lower bottom surface of the left weight support plate (306), and the lifting frame lifting block (326) is provided directly below the nylon lifting screw (327).

Images