Detection method and detection equipment

Abstract

The present invention provides a detection method, comprising the following steps: providing an object to be detected, the object to be detected having a surface to be detected, the surface to be detected including a plurality of points to be detected; obtaining a first positional relationship between the plurality of points to be detected in a reference plane; obtaining a first angular relationship between the surface to be detected and the reference plane; and correcting the positional relationship based on the angular relationship to obtain a first spatial positional relationship between the plurality of points to be detected. Through the above arrangement, the angular relationship between the object to be detected and the reference plane is first obtained, and the positional relationship between the plurality of points to be detected on the object to be detected in the reference plane is then corrected based on the angular relationship, ultimately obtaining a precise positional relationship between the plurality of points to be detected on the object to be detected, thereby improving the detection accuracy of the detection method.

Description

Technical Field

[0001] The present invention relates to a detection device and a detection method thereof, and in particular to position detection of a to-be-detected point of an object to be detected. Background Art

[0002] In the prior art, contact probe detection equipment is generally used to detect the positions of various components on the surface of the object to be detected, which has the problems of long detection time and low detection efficiency.

[0003] With the development of the field of optical inspection, optical inspection equipment has gradually replaced some probe-type inspection equipment. For example, three-dimensional topography inspection devices are used to detect the three-dimensional coordinates of various components on the surface of the object to be inspected and obtain the position of the components. However, the efficiency of three-dimensional topography inspection still needs to be improved. In the existing technology, optical equipment uses a two-dimensional imaging device and a three-dimensional topography inspection device. The two-dimensional imaging device can quickly obtain the two-dimensional coordinates of each component on the surface of the object to be inspected. The premise is that the surface of the object to be inspected must be located within the measurement plane of the two-dimensional imaging device. Otherwise, the position information of the components on the surface to be inspected obtained by the two-dimensional imaging device will contain errors, affecting the measurement results. Summary of the Invention

[0004] In response to the shortcomings of existing detection methods, the present invention provides a detection method, which is characterized in that it includes: providing an object to be measured, wherein the object to be measured has a surface to be measured, and the surface to be measured includes multiple points to be measured; obtaining a first positional relationship between the multiple points to be measured in a reference plane; obtaining a first angular relationship between the surface to be measured and the reference plane; correcting the first positional relationship according to the first angular relationship, and obtaining a first spatial positional relationship between the multiple points to be measured.

[0005] Specifically, the step of correcting the first position relationship according to the first angle relationship includes: adjusting the object to be measured so that the surface to be measured coincides with the reference surface; or, performing data compensation on the first position relationship according to the first angle relationship to obtain the first spatial position relationship of the multiple points to be measured.

[0006] Specifically, the data compensation step includes: obtaining the inverse matrix of the projection of the measured surface on the reference plane according to the first angle relationship to obtain a correction matrix; and performing inverse projection processing on the first position relationship according to the correction matrix to obtain the first spatial position relationship.

[0007] Specifically, the step of obtaining the first positional relationship of the plurality of points to be measured in the reference plane includes: obtaining image information of the surface to be measured, and obtaining the positional relationship of the plurality of points to be measured in the reference plane according to the image information.

[0008] Specifically, the object to be measured has a measuring plane, the measuring plane has at least three non-collinear first feature points, and there is a predetermined angular relationship between the measuring plane and the reference plane; the step of obtaining the first angular relationship between the measured surface and the reference plane includes: obtaining the second spatial position relationship of the at least three first feature points relative to the reference plane; and obtaining the first angular relationship based on the second spatial position relationship of the at least three first feature points and the predetermined angular relationship.

[0009] Specifically, the step of obtaining the first angle relationship based on the second spatial position relationship of the at least three first feature points and the predetermined angle relationship includes: obtaining the second angle relationship between the measurement plane and the reference plane based on the second spatial position relationship of the at least three first feature points; and obtaining the first angle relationship based on the second angle relationship and the predetermined angle relationship.

[0010] Specifically, the step of obtaining the second angular relationship between the measurement plane and the reference plane based on the second spatial position relationship of the at least three first feature points includes: obtaining the normal angle relationship between the first normal of the measurement plane and the reference normal of the reference plane based on the second spatial position relationship of the at least three first feature points, and obtaining the second angular relationship.

[0011] Specifically, the step of obtaining the second spatial position relationship of the at least three first feature points relative to the reference plane includes: establishing a first reference system based on the reference plane, the first reference system being a three-dimensional coordinate system; obtaining the spatial position coordinates of the at least three non-collinear first feature points in the second reference system to obtain the second spatial position relationship.

[0012] Specifically, the angular relationship between the first normal of the measuring plane and the reference normal of the reference plane is obtained according to the second spatial position relationship of the at least three first feature points, and the step of obtaining the second angular relationship includes: obtaining the first normal vector of the measured surface in the first reference system according to the spatial position coordinates of the at least three first points; obtaining the second normal vector of the reference plane in the first reference system; and obtaining the second angular relationship according to the first normal vector and the second normal vector.

[0013] Specifically, based on the second spatial position relationship of the at least three first feature points and the preset angle relationship, the step of obtaining the first angle relationship between the surface to be measured and the reference plane includes: obtaining the third normal vector of the measuring plane in the first reference system based on the spatial position coordinates of the at least three first feature points; obtaining the first normal vector of the surface to be measured in the first reference system based on the first normal vector and the preset angle relationship; obtaining the second normal vector of the reference plane in the first reference system; and obtaining the first angle relationship based on the first normal vector and the second normal vector.

[0014] Specifically, the surface to be measured has a second point, and the second point has a predetermined spatial position relationship with a first measuring point among one or more measuring points; the detection method also includes: obtaining a third spatial position relationship between the second point and a reference point; the multiple measuring points also include a second measuring point; the step of obtaining the first position relationship between the second point and the reference point includes: before obtaining the first position relationship of the multiple points to be measured in the reference surface, using the reference point as the second measuring point; after the correction processing, obtaining the third spatial position relationship of the second point relative to the reference point based on the first spatial position relationship and the predetermined spatial position relationship.

[0015] Specifically, the second point is the midpoint between any two measurement points.

[0016] Specifically, the first spatial position relationship includes a distance scalar or a position vector between any two measurement points.

[0017] The present invention also provides a detection device, characterized in that the detection device has a reference plane, the object to be measured has a surface to be measured, the surface to be measured includes multiple points to be measured, and the detection device includes: a first detection device, used to obtain a first position relationship of the multiple points to be measured in the reference plane; a second detection device, used to obtain a first angular relationship between the surface to be measured and the reference plane; a processing unit, configured to correct the position relationship according to the angular relationship, and obtain the first spatial position relationship of the multiple points to be measured.

[0018] Specifically, the first detection device includes an imaging detection device, which is used to obtain image information of the object to be measured and obtain a first positional relationship of the multiple points to be measured on the reference plane based on the image information.

[0019] Specifically, the second detection device includes a three-dimensional morphology detection device, which is used to obtain the second spatial position relationship of at least three non-collinear first feature points on the surface to be measured relative to the reference plane. The at least three non-collinear first feature points are located in a measuring plane, and there is a predetermined angular relationship between the measuring plane and the surface to be measured.

[0020] Specifically, the three-dimensional shape detection device is arranged on one side of the surface to be measured of the first detection device; or, the second detection device includes two three-dimensional shape detection devices, and the two three-dimensional shape detection devices are respectively arranged on both sides of the first detection device.

[0021] Specifically, the object to be measured has a measuring plane, and the detection equipment also includes a mobile platform. The three-dimensional morphology detection device is used to obtain the position information of the measuring point in the measuring plane according to the mobile platform, and to obtain the height information of the measuring point along the measuring direction. The angle between the measured direction and the measuring plane is greater than zero, and the three-dimensional coordinates of the measuring point on the surface of the object to be measured in a preset reference system are obtained according to the position information and the height information.

[0022] Specifically, the three-dimensional morphology detection device includes a dispersive confocal device, which is used to emit detection light of different wavelengths to the object to be measured. The detection light of different wavelengths converges at different positions along the measurement direction. The detection light is reflected by the object to be measured to form signal light. The dispersive confocal device is also used to collect the signal light and obtain the height information of the measurement point on the surface of the object to be measured based on the collected signal light of different wavelengths.

[0023] Specifically, the optical axis of the first detection device is parallel to or intersects with the optical axis of the second detection device.

[0024] Specifically, the detection equipment also includes an adjustment device, which is signal-connected to the processing unit and is configured to adjust the object to be tested according to the first angle relationship output by the processing unit, so that the object to be tested rotates around an axis parallel to the reference plane.

[0025] Through the above settings, the angular relationship between the object to be measured and the reference plane is first obtained, and then the positional relationship of multiple test points on the object to be measured in the reference plane is corrected according to the angular relationship, and finally the precise positional relationship of multiple test points on the object to be measured is obtained, thereby improving the detection accuracy of the detection method. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0027] Figure 1 A flow chart of an embodiment of a detection method is provided for this application;

[0028] Figure 2 A physical image of the object to be tested in this application;

[0029] Figure 3 A flowchart of step S103 of the detection method is provided for this application;

[0030] Figure 4 A flow chart of another embodiment of a detection method is provided for the present application;

[0031] Figure 5 A schematic diagram of an embodiment of a detection device is provided for this application;

[0032] Figure 6 This is a schematic diagram of the surface to be tested provided in this application. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0034] It should also be noted that the directional terms such as left, right, up and down in the embodiments of the present invention are merely relative concepts or are based on the normal use status of the product, and should not be considered as restrictive.

[0035] The following describes embodiments of the present invention in detail, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and are not to be construed as limiting the present invention.

[0036] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature identified as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined.

[0037] The present invention provides a detection method, please refer to Figure 1 The detection method comprises the following steps:

[0038] S101: Providing an object to be tested, wherein the object to be tested has a surface to be tested, and the surface to be tested includes a plurality of points to be tested;

[0039] S102: Obtaining a first positional relationship of the plurality of points to be measured in the reference plane:

[0040] S103: Acquire a first angle relationship between the surface to be measured and the reference surface;

[0041] S104: Correcting the first positional relationship according to the first angular relationship to obtain a first spatial positional relationship of the plurality of points to be measured.

[0042] Through the above settings, the angular relationship between the object to be measured and the reference plane is first obtained, and then the positional relationship of multiple test points on the object to be measured in the reference plane is corrected according to the angular relationship, and finally the precise positional relationship of multiple test points on the object to be measured is obtained, thereby improving the detection accuracy of the detection method.

[0043] Please refer to Figures 1 to 6 , the following will explain each step in detail:

[0044] S101: providing an object to be tested, wherein the object to be tested has a surface to be tested 200a, and the surface to be tested 200a includes a plurality of points to be tested.

[0045] In this embodiment, Figure 2 As shown, the object to be tested includes: a flat panel and a frame connected to the edge of the flat panel. The frame has a through hole, which is a volume hole, a USB hole, or an SMI card slot. The test point is located at the edge of the through hole.

[0046] S102: Acquire a first positional relationship of the plurality of points to be measured in the reference plane C by a first detection device.

[0047] The first detection device 110 is a two-dimensional detection device or a one-dimensional detection device.

[0048] Specifically, the first detection device 110 is an imaging device. The step of obtaining the positional relationship of the multiple test points in the reference plane C includes: obtaining image information of the test object, and obtaining a first positional relationship of the multiple test points in the reference plane C based on the image information. The first detection device 110 is a line array camera or an area array camera. Specifically, when the image information of the test object is obtained by the first detection device 110, the imaging plane of the imaging detection device is conjugate with the reference plane C. Based on the image information, the first positional relationship of the multiple test points in the reference plane C can be quickly obtained, thereby accelerating the detection speed.

[0049] In this embodiment, the step of obtaining the positional relationship of the multiple points to be measured in the reference plane C based on the image information includes: establishing a second reference system based on the reference plane C, the second reference system being a two-dimensional coordinate system; and obtaining the position coordinates of the multiple points to be measured in the second reference system.

[0050] S103: The step of obtaining the angle relationship between the surface to be measured 200a and the reference surface C is described as follows. Figure 3 .

[0051] The object to be measured has a measurement plane 200 b, the measurement plane 200 b has at least three non-collinear first feature points, and a predetermined angular relationship exists between the measurement plane 200 b and the reference plane C. The step of obtaining the first angular relationship between the measurement surface 200 a and the reference plane C includes:

[0052] S1031: Acquire a second spatial position relationship of the at least three first feature points relative to the reference plane C;

[0053] S1032: Obtain the first angular relationship according to the second spatial position relationship of the at least three first feature points and the predetermined angular relationship. S1031: Obtain the second spatial position relationship of the at least three first feature points relative to the reference plane C.

[0054] The measuring plane 200b and the surface to be measured 200a may be the same plane or different planes. Specifically, in this embodiment, the measuring plane 200b and the surface to be measured 200a are different planes.

[0055] In this embodiment, the measuring plane 200b is perpendicular to the surface to be measured 200a. In other embodiments, the measuring plane 200b and the surface to be measured 200a have an acute angle.

[0056] Specifically, in this embodiment, the measuring plane 200b is the main surface of the flat plate; the surface to be measured 200a is the plane where the edge of the through hole of the frame is located.

[0057] When the predetermined angular relationship is that the measurement plane 200 b and the reference plane C are coplanar, obtaining the first angular relationship according to the second angular relationship and the predetermined angular relationship includes: making the first angular relationship the same as the second angular relationship.

[0058] In this embodiment, the step of obtaining the second spatial position relationship of the at least three first feature points relative to the reference plane C includes: establishing a first reference system based on the reference plane C, the first reference system being a three-dimensional coordinate system; obtaining the spatial position coordinates of the at least three non-collinear first feature points in the second reference system through the second detection device, and obtaining the second spatial position relationship of the at least three first feature points relative to the reference plane C.

[0059] The second detection device 120 includes at least one three-dimensional shape detection device, which obtains the position information of the multiple measurement points in the measurement plane 200b and the height information of the measurement points along the measurement direction through the three-dimensional shape detection device, and obtains the spatial position coordinates of the measured points in the first reference system based on the position information and the height information; the angle between the measurement direction and the measurement plane is greater than zero. In this embodiment, the angle between the measurement direction and the measurement plane is 90 degrees.

[0060] S1032: Acquire the first angular relationship according to the second spatial position relationship of the at least three first feature points and the predetermined angular relationship.

[0061] The step of obtaining the first angular relationship based on the second spatial positional relationship of the at least three first feature points and the predetermined angular relationship includes: obtaining a second angular relationship between the measurement plane 200b and the reference plane C based on the second spatial positional relationship of the at least three first feature points; and obtaining the first angular relationship based on the second angular relationship and the predetermined angular relationship. In this embodiment, the step of obtaining the second angular relationship between the measurement plane 200b and the reference plane C based on the second spatial positional relationship of the at least three first feature points includes: obtaining the normal angle relationship between the first normal of the measurement plane 200b and the reference normal of the reference plane C based on the second spatial positional relationship of the at least three first feature points, thereby obtaining the second angular relationship. In other words, the angular relationship between two planes is converted into the angular relationship between two straight lines.

[0062] Specifically, the angular relationship between the first normal of the measuring plane 200b and the reference normal of the reference plane C is obtained according to the second spatial position relationship of the at least three first feature points. The step of obtaining the second angular relationship includes: obtaining the first normal vector of the measured surface 200a in the first reference system according to the spatial position coordinates of the at least three first feature points; obtaining the second normal vector of the reference plane C in the first reference system; and obtaining the second angular relationship according to the first normal vector and the second normal vector.

[0063] In this embodiment, after obtaining the second angular relationship, the first angular relationship is obtained based on the second angular relationship and the preset angular relationship. If the measuring plane 200b and the surface to be measured 200a are the same plane, the preset angular relationship is zero, and the second angular relationship is the same as the first angular relationship.

[0064] In another embodiment, based on the second spatial position relationship of the at least three first feature points and the preset angle relationship, the step of obtaining the first angle relationship between the measured surface 200a and the reference plane C includes: obtaining the third normal vector of the measuring plane 200b in the first reference system based on the spatial position coordinates of the at least three first feature points; obtaining the first normal vector of the measured surface 200a in the first reference system based on the third normal vector and the preset angle relationship; obtaining the second normal vector of the reference plane C in the first reference system; and finally obtaining the first angle relationship based on the first normal vector and the second normal vector.

[0065] It should be noted that the reference plane C is a plane specified by the design, and its normal vector in any coordinate system is a known design quantity.

[0066] In another embodiment, the normal vector may not be obtained, and the step of obtaining the first angular relationship between the measured surface 200a and the reference plane C according to the second spatial position relationship of the at least three first feature points and the preset angular relationship includes: obtaining the first intersection line between the measured surface 200a and the reference plane C according to the second spatial position relationship of the at least three first feature points and the preset angular relationship; drawing a perpendicular line from any point on the measured surface 200a to the first intersection line to obtain the first straight line, and drawing a perpendicular line from any point on the reference plane C to the first intersection line to obtain the second straight line; and obtaining the first angular relationship based on the first straight line and the second straight line.

[0067] In another embodiment, the step of obtaining the first angular relationship between the surface to be measured 200a and the reference plane C includes: obtaining a second intersection line between the measurement plane 200b and the reference plane C based on the at least three first feature points; obtaining a third straight line by drawing a perpendicular line from any point on the measurement plane 200b to the second intersection line, and obtaining a fourth straight line by drawing a perpendicular line from any point on the reference plane C to the second intersection line; obtaining the second angular relationship based on the third straight line and the fourth straight line; and obtaining the first angular relationship based on the second angular relationship and the preset angular relationship. The above methods can quickly obtain the first angular relationship between the surface to be measured 200a and the reference plane C.

[0068] S104: Correct the positional relationship according to the first angle relationship to obtain a first spatial positional relationship P of the plurality of points to be measured. For the first spatial positional relationship P, refer to Figure 6 shown.

[0069] In this embodiment, the step of correcting the first positional relationship according to the first angular relationship includes: adjusting the object to be measured so that the measured surface 200a coincides with the reference plane C; or performing data compensation on the first positional relationship according to the first angular relationship to obtain the first spatial positional relationship of the multiple measured points. Specifically, when the angle between the measured surface 200a and the reference plane C is large and exceeds a preset value, the first positional relationship is corrected by adjusting the object to be measured; when the angle between the measured surface 200a and the reference plane C is small, the first positional relationship is corrected through data compensation.

[0070] In this embodiment, the data compensation step includes: obtaining the inverse matrix A of the projection of the surface to be measured 200a on the reference plane C according to the first angle relationship. -1 , obtain a correction matrix A, perform back projection processing on the position relationship according to the correction matrix A, and obtain the first spatial position relationship.

[0071] The step of correcting the first positional relationship based on the first angular relationship to obtain a first spatial positional relationship of the plurality of test points includes compensating the first positional relationship based on the correction matrix A to obtain the first spatial positional relationship of the plurality of test points. Through the above arrangement, the first spatial positional relationship of the plurality of test points, i.e., the distance scalar between any two measurement points, can be accurately obtained with high precision.

[0072] In another embodiment, please refer again to Figure 6 The surface to be measured 200a has a second point O, and the second point has a predetermined spatial position relationship with a first measuring point in one or more measuring points, and the plurality of measuring points further includes a second measuring point, such as Figure 4 As shown, the detection method includes:

[0073] S201: providing an object to be measured, wherein the object to be measured has a surface to be measured 200a, wherein the surface to be measured 200a includes a first measuring point and a second measuring point, and wherein the surface to be measured 200a has the second point;

[0074] S202: Using the reference point as the second measurement point, obtaining a third spatial position relationship between the second point and the reference point;

[0075] S203: Acquire a first angle relationship between the surface to be measured 200a and the reference plane C;

[0076] S204: Correct the third spatial position relationship according to the first angular relationship, and obtain a first spatial position relationship between the second point and the reference point.

[0077] In this embodiment, the second point is the midpoint of any two measuring points; in other embodiments, the second point may be any point on the line connecting any two measuring points.

[0078] In this embodiment, the steps of obtaining the second angular relationship between the measured surface 200a and the reference plane C and correcting the third spatial position relationship according to the first angular relationship, and obtaining the second spatial position relationship between the second point and the reference point are the same as the steps in the above embodiment.

[0079] In this embodiment, after the correction process, a third spatial position relationship of the second point relative to the reference point is acquired based on the first spatial position relationship and the predetermined spatial position relationship.

[0080] Through the above steps, the position vector of the second point can be accurately obtained, thereby improving detection accuracy.

[0081] The present invention provides a detection device, such as Figure 5 As shown, the detection equipment has a reference plane C, the object to be measured 200 has a test surface 200a, and the test surface 200a includes multiple test points. The detection equipment includes: a first detection device 110, used to obtain a first position relationship of the multiple test points in the reference plane C; a second detection device 120, used to obtain a first angular relationship between the test surface 200a and the reference plane C; a processing unit, configured to correct the position relationship according to the angular relationship, and obtain the first spatial position relationship of the multiple test points.

[0082] In this embodiment, the first detection device 110 includes an imaging detection device, which is used to obtain image information of the object to be measured and obtain the positional relationship of the multiple points to be measured on the reference plane C based on the image information.

[0083] In this embodiment, the second detection device 120 includes a three-dimensional shape detection device; the three-dimensional shape detection device is used to obtain the second spatial position relationship of at least three non-collinear first feature points on the surface to be measured 200a relative to the reference plane C.

[0084] In this embodiment, the number of the three-dimensional shape detection device can be one or more, and the multiple three-dimensional shape detection devices can be arranged on both sides of the object to be measured or on the same side of the object to be measured. The three-dimensional shape detection device is used to detect a first angular relationship between the object to be measured and the reference plane C. The object to be measured and the surface to be measured 200a have a predetermined angular relationship. The three-dimensional shape detection device ultimately determines the first angular relationship between the surface to be measured 200a and the reference plane C based on the second angular relationship and the predetermined angular relationship.

[0085] In this embodiment, the object to be measured 200 has a measuring plane 200b, and the detection equipment also includes a mobile platform. The three-dimensional morphology detection device is used to obtain the position information of the measuring point in the measuring plane 200b based on the mobile platform, and is used to obtain the height information of the measuring point along the measuring direction. The angle between the measured direction and the measuring plane 200b is greater than zero, and the three-dimensional coordinates of the measurement point on the surface of the object to be measured in a preset reference system are obtained based on the position information and the height information.

[0086] Specifically, the three-dimensional morphology detection device includes a dispersive confocal device, which is used to emit detection light of different wavelengths to the object to be measured. The detection light of different wavelengths converges at different positions along the measurement direction. The detection light is reflected by the object to be measured to form signal light. The dispersive confocal device is also used to collect the signal light and obtain the height information of the measurement point on the surface of the object to be measured based on the collected signal light of different wavelengths.

[0087] The measuring plane 200b and the measured surface 200a may be the same plane or different planes. In this embodiment, the measured surface 200a and the measuring plane 200b are different planes, and there is a predetermined angle relationship between the measuring plane 200b and the measured surface 200a.

[0088] In this embodiment, the optical axis of the first detection device 110 intersects with the optical axis of the second detection device 120, and the measurement plane 200b and the surface to be measured 200a are different planes; in other embodiments, the optical axis of the first detection device 110 is parallel to the optical axis of the second detection device 120, in which case the measurement plane 200b and the surface to be measured 200a are the same plane.

[0089] In addition, the detection equipment also includes an adjustment device, which is connected to the signal of the processing unit. The adjustment device is configured to adjust the object to be tested according to the first angle relationship output by the processing unit, so that the object to be tested rotates around an axis parallel to the reference plane C, thereby making the surface to be tested 200a conjugate with the reference plane C.

[0090] Although the present invention has been described with reference to specific examples, which are intended to be illustrative only and not limiting, it is obvious to those skilled in the art that changes, additions or deletions may be made to the disclosed embodiments without departing from the spirit and scope of the present invention.

Claims

1. A detection method, characterized in that: include: Providing an object to be measured, wherein the object to be measured has a surface to be measured, the surface to be measured includes a plurality of points to be measured, and the object to be measured has a measurement plane, wherein the measurement plane has at least three non-collinear first feature points; Acquiring a first positional relationship of the plurality of points to be measured in a reference plane, wherein a predetermined angular relationship exists between the measurement plane and the reference plane; Obtaining a first angular relationship between the surface to be measured and the reference plane, comprising: obtaining a second spatial position relationship of the at least three first feature points relative to the reference plane; and obtaining the first angular relationship based on the second spatial position relationship of the at least three first feature points and the predetermined angular relationship; The first positional relationship is corrected according to the first angular relationship to obtain a first spatial positional relationship of the plurality of points to be measured.

2. The detection method according to claim 1, wherein The step of correcting the first position relationship according to the first angle relationship includes: Adjusting the object to be measured so that the surface to be measured coincides with the reference surface; Alternatively, data compensation is performed on the first position relationship according to the first angular relationship to obtain the first spatial position relationship of the multiple points to be measured.

3. The detection method according to claim 2, characterized in that The data compensation step includes: Obtain an inverse matrix of the projection of the surface to be measured on the reference plane according to the first angle relationship to obtain a correction matrix; Perform back projection processing on the first position relationship according to the correction matrix to obtain the first spatial position relationship.

4. The detection method according to claim 1, wherein The step of obtaining a first positional relationship of the plurality of points to be measured in the reference plane includes: Image information of the surface to be measured is obtained, and the positional relationship of the multiple points to be measured in the reference surface is obtained according to the image information.

5. The detection method according to claim 1, wherein The step of acquiring the first angular relationship according to the second spatial position relationship of the at least three first feature points and the predetermined angular relationship includes: A second angular relationship between the measurement plane and the reference plane is obtained according to the second spatial position relationship of the at least three first feature points; and the first angular relationship is obtained according to the second angular relationship and the predetermined angular relationship.

6. The detection method according to claim 5, characterized in that The step of acquiring a second angular relationship between the measurement plane and the reference plane according to the second spatial position relationship of the at least three first feature points comprises: The normal angle relationship between the first normal of the measurement plane and the reference normal of the reference plane is acquired according to the second spatial position relationship of the at least three first feature points to obtain the second angle relationship.

7. The detection method according to claim 6, characterized in that The step of obtaining a second spatial position relationship of the at least three first feature points relative to the reference plane includes: Establishing a first reference system based on the reference plane, wherein the first reference system is a three-dimensional coordinate system; The spatial position coordinates of the at least three non-collinear first feature points in the first reference system are acquired to obtain the second spatial position relationship.

8. The detection method according to claim 7, characterized in that The step of obtaining an angular relationship between a first normal line of the measurement plane and a reference normal line of the reference plane according to a second spatial position relationship of the at least three first feature points, and obtaining the second angular relationship includes: Acquire a first normal vector of the measurement plane in the first reference system according to the spatial position coordinates of the at least three first feature points; Obtaining a second normal vector of the reference plane in the first reference system; The second angle relationship is acquired according to the first normal vector and the second normal vector.

9. The detection method according to claim 8, characterized in that The step of obtaining a first angular relationship between the surface to be measured and the reference surface according to the second spatial position relationship of the at least three first feature points and the predetermined angular relationship includes: Acquire a third normal vector of the measurement plane in the first reference system according to the spatial position coordinates of the at least three first feature points; Obtaining a first normal vector of the surface to be measured in the first reference system according to a relationship between the third normal vector and the predetermined angle; The first angle relationship is obtained according to the first normal vector and the second normal vector.

10. The detection method according to claim 1, characterized in that The surface to be measured has a second point, and the second point has a predetermined spatial position relationship with a first point to be measured among the one or more points to be measured; the detection method further includes: Acquire a third spatial position relationship between the second point and the reference point; The plurality of points to be measured further include a second point to be measured; and the step of obtaining a first positional relationship between the second point and the reference point includes: Before obtaining the first positional relationship of the plurality of points to be measured in the reference plane, using the reference point as the second point to be measured; After the correction process, a third spatial position relationship of the second point relative to the reference point is obtained according to the first spatial position relationship and the predetermined spatial position relationship.

11. The detection method according to claim 10, characterized in that: The second point is the midpoint of any two points to be measured.

12. The detection method according to claim 1, characterized in that The first spatial position relationship includes a distance scalar or a position vector between any two points to be measured.

13. A detection device, characterized in that: The detection device has a reference surface, the object to be measured has a surface to be measured, the surface to be measured includes a plurality of points to be measured, and the object to be measured has a measurement plane. The detection device includes: A first detection device is used to obtain a first positional relationship between the plurality of points to be measured in the reference plane; a second detection device for obtaining a first angular relationship between the surface to be measured and the reference plane; the second detection device includes a three-dimensional shape detection device, the three-dimensional shape detection device being used to obtain a second spatial position relationship of at least three non-collinear first feature points on the measurement plane relative to the reference plane, the measurement plane having a predetermined angular relationship with the surface to be measured, and the three-dimensional shape detection device being further used to obtain the first angular relationship based on the second spatial position relationship of the at least three first feature points and the predetermined angular relationship; The processing unit is configured to correct the positional relationship according to the first angular relationship and obtain a first spatial positional relationship of the plurality of points to be measured.

14. The detection device according to claim 13, characterized in that The first detection device includes an imaging detection device, which is used to obtain image information of the object to be measured and obtain a first positional relationship between the multiple points to be measured on the reference plane based on the image information.

15. The detection device according to claim 13, characterized in that The three-dimensional shape detection device is arranged on one side of the surface to be measured of the first detection device; or, the second detection device includes two three-dimensional shape detection devices, and the two three-dimensional shape detection devices are respectively arranged on both sides of the first detection device.

16. The detection device according to claim 13, characterized in that The detection equipment also includes a mobile platform, and the three-dimensional morphology detection device is used to obtain the position information of the point to be measured in the measurement plane based on the mobile platform, and to obtain the height information of the point to be measured along the measurement direction. The angle between the measurement direction and the measurement plane is greater than zero. The three-dimensional coordinates of the point to be measured on the surface of the object to be measured in a preset reference system are obtained based on the position information and the height information.

17. The detection device according to claim 13, characterized in that The three-dimensional morphology detection device includes a dispersive confocal device, which is used to emit detection light of different wavelengths to the object to be measured. The detection light of different wavelengths converges at different positions along the measurement direction. The detection light is reflected by the object to be measured to form signal light. The dispersive confocal device is also used to collect the signal light and obtain the height information of the measured point on the surface of the object to be measured based on the collected signal light of different wavelengths.

18. The detection device according to claim 13, characterized in that The optical axis of the first detection device is parallel to or intersects with the optical axis of the second detection device.

19. The detection device according to claim 13, characterized in that The detection equipment further includes an adjusting device, which is signal-connected to the processing unit and configured to adjust the object to be tested according to the first angular relationship output by the processing unit, so that the object to be tested rotates around an axis parallel to the reference plane.

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