Capacitive networks for enhancing high voltage operation of high electron mobility transistors and methods therein
By using a capacitor network to couple the field plate in a high electron mobility transistor, the problems of non-uniform electric field and process complexity in traditional designs are solved, achieving uniform electric field distribution under high voltage and cost reduction.
CN114127950BActive Publication Date: 2026-06-02POWER INTEGRATIONS INC
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- POWER INTEGRATIONS INC
- Filing Date
- 2020-06-24
- Publication Date
- 2026-06-02
AI Technical Summary
Technical Problem
Traditional field plate designs may result in uneven electric field distribution in high-voltage HEMTs, increasing process costs and complexity. Furthermore, traditional methods require thick dielectrics to support high breakdown voltages.
Method used
A capacitor network is used to couple the field plates. The potential of each field plate is predetermined by the capacitor network, and the electric field is uniformly distributed. The field plates are fabricated on the same metal layer to reduce costs.
Benefits of technology
It achieves a uniform electric field distribution under high voltage, reduces process cost and complexity, and improves device stability and dynamic on-resistance performance.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN114127950B_ABST
Abstract
Provided herein are capacitance networks for enhancing high voltage operation of high electron mobility transistors (HEMTs). Integrated and / or external capacitance networks can be provided with a fixed number of capacitively coupled field plates to distribute the electric field in the drift region. The capacitively coupled field plates can advantageously be fabricated on the same metal layer to reduce cost; and a capacitance network can be provided to control the field plate potentials. The potential on each field plate can be predetermined by the capacitance network, resulting in a uniform and / or substantially uniform electric field distribution along the drift region.
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