Motion module and motion device having the same

Abstract

The present invention provides a motion module and a motion device having the same, comprising: a first moving assembly, comprising a first stator portion and a first movable portion; the first movable portion is slidably connected to the first stator portion, and the first movable portion can move horizontally relative to the first stator portion; a second moving assembly, comprising a second stator portion and a second movable portion; the second stator portion is fixed to the first movable portion, the second movable portion is slidably connected to the first movable portion, and the second movable portion can move vertically relative to the first movable portion; the first movable portion can drive the second moving assembly to move horizontally relative to the first stator portion; a gravity compensation assembly is connected to the second moving assembly, and the gravity compensation assembly applies a force opposite to the direction of gravity to the second moving assembly to offset part of the gravity of the second moving assembly. The present invention solves the problems of unstable power source and low processing precision of motion modules in the prior art.

Description

Technical Field

[0001] The present invention relates to the technical field of micro motion platforms, and in particular to a motion module and a motion device having the same. Background Art

[0002] At present, the rapid development of electronic information technology has driven and spawned the development and innovation of related industrial chains. Among them, an important factor restricting the development of chips is the imperfect equipment for manufacturing chips. Taking the high-precision micro-motion platform as an example, the high-precision micro-motion platform can ensure the precision requirements in the chip manufacturing process and improve the quality of the chip.

[0003] Most existing micro-motion platforms rely on linear motors as their power source. During motor movement, the coils generate a large amount of heat, which will reduce the coil's working performance over time. The insulation and stability of the coils themselves and the coil connections will also directly affect the quality of the motor. In addition, the gravity of the motion platform itself will also affect the processing accuracy, which will in turn lead to a reduction in the processing accuracy of the chip. Summary of the Invention

[0004] The main purpose of the present invention is to provide a motion module and a motion device having the same, so as to solve the problems of unstable power source and low processing precision of the motion module in the prior art.

[0005] In order to achieve the above-mentioned purpose, according to one aspect of the present invention, a motion module is provided, including: a first moving component, including a first stator part and a first movable part; the first movable part is slidably connected to the first stator part, and the first movable part can move in a horizontal direction relative to the first stator part; a second moving component, including a second stator part and a second movable part; the second stator part is fixed on the first movable part, the second movable part is slidably connected to the first movable part, and the second movable part can move in a vertical direction relative to the first movable part; the first movable part can drive the second moving component to move in a horizontal direction relative to the first stator part; a gravity compensation component, connected to the second moving component, the gravity compensation component applies a force opposite to the direction of gravity to the second moving component to offset part of the gravity of the second moving component.

[0006] Furthermore, the first mover part includes a horizontal movable plate, which is movably arranged in the horizontal direction relative to the first stator part; the second stator part includes: a second coil assembly, which is arranged on the horizontal movable plate; the second mover part includes: a vertical movable plate, which is slidably connected to the horizontal movable plate in the vertical direction; a second magnetic steel group is provided on the vertical movable plate, and the second magnetic steel group is arranged opposite to the second coil assembly, so that the second magnetic steel group drives the vertical movable plate to move in the vertical direction relative to the horizontal movable plate under the action of the magnetic force of the second coil assembly; the gravity compensation assembly is connected to the vertical movable plate.

[0007] Furthermore, the second coil assembly includes: a second circuit board; a second coil group, arranged on the circuit connection end surface of the second circuit board and electrically connected to the second circuit board; and a second insulating layer, covering the second coil group and connected to the second circuit board.

[0008] Furthermore, the second coil assembly also includes a second back plate, the second circuit board is arranged on the second back plate, the edge of the second back plate is provided with a step structure, and the second back plate is fixedly connected to the horizontal movable plate.

[0009] Furthermore, the second movable assembly also includes: a second slide rail, which is arranged on the horizontal movable plate, the second slide rail extends in the vertical direction, and the vertical movable plate is connected to the second slide rail; and the second coil assembly is arranged on the side of the second slide rail.

[0010] Furthermore, there are two second slide rails, which are arranged with relative spacing in the horizontal direction, and the vertical movable plate is connected to both second slide rail assemblies; the second coil assembly is arranged between the two second slide rails.

[0011] Furthermore, the first mover part also includes: a first magnetic steel group, which is arranged on the horizontal movable plate and located above the second coil assembly; the first stator part includes a first coil assembly and a fixed plate; the first coil assembly is arranged on the fixed plate, and the first coil assembly is arranged opposite to the first magnetic steel group, so that the first magnetic steel group drives the horizontal movable plate to move horizontally relative to the fixed plate under the action of the magnetic force of the first coil assembly.

[0012] Furthermore, the first moving component also includes: a first slide rail, which is arranged on the fixed plate and extends in the horizontal direction; there are two first slide rails, and the two first slide rails are arranged relative to each other in the vertical direction, and the horizontal moving plate is connected to the two first slide rails; the first coil assembly is arranged between the two first slide rails.

[0013] Furthermore, the horizontal moving plate is in an L-shaped structure, comprising: a first plate body and a second plate body connected to each other; the first magnetic steel group is arranged on the first plate body, and the second coil assembly is arranged on the second plate body.

[0014] Furthermore, the motion module further includes: a buffer component, which is arranged on the horizontal moving plate and is arranged opposite to the vertical moving plate, and the buffer component has a blocking end surface.

[0015] Furthermore, the gravity compensation component includes a fixed part and a moving part: the fixed part includes a third magnetic steel part, the third magnetic steel part is fixed to the horizontal movable plate, and the third magnetic steel part extends in the vertical direction; the moving part includes a fourth magnetic steel part, the fourth magnetic steel part is sleeved on the third magnetic steel part and connected to the vertical movable plate, and the magnetic field direction of the fourth magnetic steel part is perpendicular to the magnetic field direction of the third magnetic steel part.

[0016] Furthermore, the fixed component also includes a stator back iron, the third magnetic steel portion includes two groups of columnar third magnetic steel groups arranged at intervals in the vertical direction, the magnetization directions of the two groups of third magnetic steel groups are opposite, the stator back iron is arranged between the two groups of third magnetic steel groups, and the two groups of third magnetic steel groups are symmetrically arranged relative to the stator back iron; the fourth magnetic steel portion includes a group of annular fourth magnetic steel groups, and the fourth magnetic steel group is sleeved on the fixed component.

[0017] Furthermore, the fixed component also includes a mounting cylinder, which is fixedly connected to the horizontal movable plate, and the third magnetic steel group is arranged in the mounting cylinder; the moving component also includes a mounting sleeve, which is arranged on the mounting cylinder, and the fourth magnetic steel group is arranged in the mounting sleeve, and a gap is provided between the fourth magnetic steel group and the mounting cylinder.

[0018] Furthermore, a mezzanine space is provided on the sleeve body of the mounting sleeve, the mezzanine space extends in a vertical direction, and the fourth magnetic steel group is provided in the mezzanine space.

[0019] According to another aspect of the present invention, a motion device is provided, comprising a plurality of motion modules and a plurality of load components, wherein the plurality of load components are mounted on the plurality of motion modules in a one-to-one correspondence, and the load components are driven to move by the motion modules, wherein the motion modules are the above-mentioned motion modules.

[0020] Applying the technical solution of the present invention, the motion module includes a first moving component, a second moving component and a gravity compensation component, wherein the first moving component includes a first stator part and a first movable part; the first movable part is slidingly connected to the first stator part, and the first movable part can move in a horizontal direction relative to the first stator part; the second moving component includes a second stator part and a second movable part; the second stator part is fixed on the first movable part, the second movable part is slidingly connected to the first movable part, and the second movable part can move in a vertical direction relative to the first movable part; the first movable part can drive the second moving component to move in a horizontal direction relative to the first stator part; the gravity compensation component is connected to the second moving component, and the gravity compensation component applies a force opposite to the direction of gravity to the second moving component to offset part of the gravity of the second moving component. Specifically, the gravity compensation component is connected to the second movable part in the second moving component, so that the second stator part is driven to move in the horizontal direction by the first movable part, and the second stator part is driven to move in the vertical direction by the second movable part. During the reciprocating movement of the second movable part in the vertical direction, the movement accuracy of the second movable part will be affected by the action of gravity. Therefore, a gravity compensation component is provided to compensate for part of the gravity exerted on the second movable part, so as to improve the movement accuracy of the second movable part, thereby improving the overall processing accuracy of the motion module. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The accompanying drawings, which constitute part of this application, are intended to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are intended to explain the present invention and do not constitute an undue limitation of the present invention. In the accompanying drawings:

[0022] Figure 1 A schematic structural diagram of a motion module according to a specific embodiment of the present invention is shown;

[0023] Figure 2 An exploded view of a motion module according to a specific embodiment of the present invention is shown;

[0024] Figure 3 An exploded view of a second coil assembly of a motion module according to a specific embodiment of the present invention is shown;

[0025] Figure 4 A schematic structural diagram of a gravity compensation component of a motion module according to a specific embodiment of the present invention is shown;

[0026] Figure 5 A schematic diagram showing the magnetization direction of a gravity compensation component of a motion module according to a specific embodiment of the present invention is shown;

[0027] Figure 6 An exploded view of a gravity compensation component of a motion module according to a specific embodiment of the present invention is shown;

[0028] Figure 7 A schematic structural diagram of a sports device according to a specific embodiment of the present invention is shown.

[0029] The above drawings include the following reference numerals:

[0030] 1. First moving assembly; 1001. First stator; 1002. First mover; 10. Horizontal moving plate; 101. Connecting portion; 102. First plate; 103. Second plate; 11. First magnetic steel group; 12. First coil assembly; 13. Wire slot; 14. First grating scale; 15. First reader;

[0031] 2. Second moving assembly; 2001. Second stator; 2002. Second mover; 20. Second coil assembly; 201. Second circuit board; 202. Second coil assembly; 203. Second insulating layer; 204. Second back plate; 21. Vertical moving plate; 22. Second magnetic steel assembly; 23. Second slide rail; 24. Second optical scale; 25. Second read head;

[0032] 3. Gravity compensation assembly; 30. Third magnetic steel section; 301. Third magnetic steel group; 3010. Third magnetic steel; 31. Fourth magnetic steel section; 310. Fourth magnetic steel group; 3101. Fourth magnetic steel; 32. Mounting cylinder; 33. Mounting sleeve; 330. Interlayer space; 331. Connecting protrusion; 34. Connecting block; 35. Stator back iron;

[0033] 4. Buffer component; 41. Limit plate; 42. Buffer block;

[0034] 5. Fixed plate;

[0035] 100. Motion module; 200. Support frame; 300. Load component; 400. Workpiece to be processed. DETAILED DESCRIPTION

[0036] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. The following description of at least one exemplary embodiment is actually only illustrative and is in no way intended to limit the present invention and its application or use. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative work are within the scope of protection of the present invention.

[0037] In the description of the present invention, unless otherwise expressly specified or limited, the terms "connected," "connected," and "fixed" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integration; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention in specific circumstances.

[0038] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Furthermore, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0039] In the description of this embodiment, terms such as "upper," "lower," "left," and "right" are used to refer to positions or locations based on those shown in the accompanying drawings. These terms are intended solely to facilitate description and simplify operation, and are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.

[0040] refer to Figures 1 to 6 , this embodiment discloses a motion module, including: a first moving component 1, including a first stator part 1001 and a first movable part 1002, wherein the first movable part 1002 is slidably connected to the first stator part 1001, and the first movable part 1002 can move in a horizontal direction relative to the first stator part 1001; a second moving component 2, including a second stator part 2001 and a second movable part 2002, wherein the second stator part 2001 is fixed to the first movable part 1002, the second movable part 2002 is slidably connected to the first movable part 1002, and the second movable part 2002 can move in a vertical direction relative to the first movable part 1002; the first movable part 1002 can drive the second moving component 2 to move in a horizontal direction relative to the first stator part 1001; a gravity compensation component 3, connected to the second moving component 2, the gravity compensation component 3 applies a force opposite to the direction of gravity to the second moving component 2 to offset part of the gravity of the second moving component 2.

[0041] According to the motion module provided in this embodiment, it includes a first moving component 1, a second moving component 2 and a gravity compensation component 3, wherein the first moving component 1 includes a first stator part 1001 and a first movable part 1002; the first movable part 1002 is slidably connected to the first stator part 1001, and the first movable part 1002 can move horizontally relative to the first stator part 1001; the second moving component 2 includes a second stator part 2001 and a second movable part 2002; the second stator part 2001 is fixed to On the first movable part 1002, the second movable part 2002 is slidably connected to the first movable part 1002, and the second movable part 2002 can move in the vertical direction relative to the first movable part 1002; the first movable part 1002 can drive the second movable component 2 to move in the horizontal direction relative to the first stator part 1001; the gravity compensation component 3 is connected to the second movable component 2, and the gravity compensation component 3 applies a force opposite to the direction of gravity to the second movable component 2 to offset part of the gravity of the second movable component 2. Specifically, the gravity compensation component 3 is connected to the second movable sub-part 2002 in the second movable component 2, so that the second stator part 2001 is driven to move in the horizontal direction by the first movable sub-part 1002, and the second stator part 2001 is driven to move in the vertical direction. In the process of the second movable sub-part 2002 moving back and forth in the vertical direction, the movement accuracy of the second movable sub-part 2002 will be affected by the action of gravity. Therefore, a gravity compensation component 3 is provided to compensate for part of the gravity exerted on the second movable sub-part 2002, so as to improve the movement accuracy of the second movable sub-part 2002, thereby improving the overall processing accuracy of the motion module.

[0042] This embodiment takes chip processing as an example. The chip is small in size, but has high requirements for processing accuracy. In the process of processing the chip through the motion module, the gravity compensation component 3 is used to compensate for the influence of gravity exerted by the second mover part 2002 on the drive motor. Since the motor output is relatively stable, the motor output fluctuation can be reduced, thereby reducing the heat generated by the motor coil, optimizing the motor performance, and improving the positioning accuracy of the second mover part 2002, thereby improving the processing accuracy and processing quality of the chip.

[0043] In the specific implementation process, Figure 2As shown, the first movable part 1002 includes a horizontal movable plate 10, which is movably arranged in the horizontal direction relative to the first stator part 1001; the second stator part 2001 includes: a second coil assembly 20, which is arranged on the horizontal movable plate 10; the second movable part 2002 includes: a vertical movable plate 21, which is slidably connected to the horizontal movable plate 10 in the vertical direction; a second magnetic steel group 22 is provided on the vertical movable plate 21, and the second magnetic steel group 22 is arranged opposite to the second coil assembly 20, so that the second magnetic steel group 22 drives the vertical movable plate 21 to move in the vertical direction relative to the horizontal movable plate 10 under the action of the magnetic force of the second coil assembly 20; the gravity compensation component 3 is connected to the vertical movable plate 21. The second coil assembly 20 and the second magnetic steel group 22 cooperate with each other as a power source to drive the vertical movable plate 21 to move, so that the vertical movable plate 21 can achieve slight movement in the vertical direction, meeting the processing requirements of parts with high processing precision. At the same time, the gravity compensation assembly 3 is used to compensate for the self-gravity of the vertical movable plate 21 to reduce the driving force of the second coil assembly 20 on the second magnetic steel group 22, thereby extending the service life of the device.

[0044] Specifically, if Figure 3 As shown, the second coil assembly 20 includes: a second circuit board 201; a second coil group 202, which is arranged on the circuit connection end surface of the second circuit board 201 and electrically connected to the second circuit board 201; and a second insulating layer 203, which covers the second coil group 202 and is connected to the second circuit board 201. By directly arranging the second coil group 202 on the circuit connection end surface of the second circuit board 201, the internal circuit of the second coil group 202 can be directly soldered to the connection points on the second circuit board 201, and then connected to an external power supply through the second circuit board 201. This connection through the internal circuit of the second circuit board 201 reduces the number of external cables, avoids the problem of connection connectors falling off and circuit instability, and helps improve motor performance and thus improve motion accuracy. Among them, the body of the second circuit board 201 is made of an insulating material. When the second coil group 202 is connected to the circuit on the second circuit board 201, the second coil group 202 is prevented from contacting the body of the second circuit board 201 and causing a short circuit. In actual application, after the second coil group 202 and the second circuit board 201 are connected, the second coil group 202 is glued using a corresponding glue-filling tool to form a second insulating layer 203, and after curing, it is taken out and polished to integrate the second coil group 202 and the second circuit board 201 into a whole.

[0045] In order to facilitate the installation of the second coil assembly 20 on the horizontal moving plate 10, the second coil assembly 20 further includes a second back plate 204, the second circuit board 201 is disposed on the second back plate 204, and the second back plate 204 is fixedly connected to the horizontal moving plate 10. Figure 2As shown, the second moving assembly 2 further includes a second slide rail 23 disposed on the horizontal moving plate 10. The second slide rail 23 extends vertically, and the vertical moving plate 21 is connected to the second slide rail 23. The second coil assembly 20 is disposed to the side of the second slide rail 23. This ensures a certain distance between the second coil assembly 20 and the second magnetic steel group 22, while reducing the friction between the vertical moving plate 21 and the horizontal moving plate 10 via the second slide rail 23, allowing the vertical moving plate 21 to move smoothly.

[0046] Preferably, in order to keep the vertical movable plate 21 stable during the movement, there are two second slide rails 23, and the two second slide rails 23 are in the horizontal direction (ie Figure 2 The second coil assembly 20 is disposed between the two second slide rails 23. At least two sliders are disposed on each second slide rail 23, and at least two sliders are connected to the vertically movable plate 21.

[0047] The second movable assembly 2 also includes a vertical displacement detection device for detecting the displacement of the second movable portion 2002. Specifically, the vertical displacement detection device includes: a second optical scale 24, disposed on the vertical movable plate 21, and arranged in the vertical direction; and a second reader 25, disposed on the horizontal movable plate 10. The second reader 25 reads the scale information on the second optical scale 24 to provide feedback on the movement position of the vertical movable plate 21. This arrangement facilitates real-time detection of the position of the vertical movable plate 21, thereby facilitating control of the travel of the vertical movable plate 21. In this embodiment, the second optical scale 24 is disposed on the side of the vertical movable plate 21 facing the second coil assembly 20, and the second reader 25 is disposed on the horizontal movable plate 10, corresponding to the second optical scale 24. It will be appreciated that in some alternative embodiments, the second optical scale 24 and the second reader 25 may also be disposed in other manners, such as disposing the second optical scale 24 on the side of the vertical movable plate 21 facing away from the second coil assembly 20.

[0048] In the embodiment provided herein, the first mover portion further includes: a first magnetic steel group 11, disposed on the horizontally movable plate 10 and located above the second coil assembly 20; the first stator portion includes a first coil assembly 12 and a fixed plate 5; the first coil assembly 12 is disposed on the fixed plate 5 and is arranged opposite the first magnetic steel group 11, so that the first magnetic steel group 11 drives the horizontally movable plate 10 to move horizontally relative to the fixed plate 5 under the magnetic force of the first coil assembly 12. In this way, the Ampere force generated between the first coil assembly 12 and the first magnetic steel group 11 drives the first mover portion 1002 to achieve micro-movement, cooperating with the second mover portion, making it more suitable for machining parts with high machining precision. Specifically, the first coil assembly 12 includes a first coil group and a first circuit board. The internal circuit of the first coil group is directly welded to the connection point on the first circuit board, and then the external power supply is passed through the first circuit board. A wire groove 13 is provided on the fixing plate 5, and the cable connected to the first circuit board is clamped in the wire groove 13 to fix the cable. The connection through the internal circuit of the first circuit board reduces the number of external cables and avoids the problem of circuit instability caused by the falling off of the connection connector. Among them, the main body of the first circuit board is made of insulating material. When the first coil group is connected to the circuit on the first circuit board, it can avoid the first coil group contacting the main body of the first circuit board to cause a short circuit.

[0049] Specifically, the first moving component 1 also includes: a first slide rail (not shown in the figure), which is arranged on the fixed plate 5 and extends in the horizontal direction; there are two first slide rails, and the two first slide rails are arranged relatively spaced apart in the vertical direction, and the horizontal moving plate 10 is connected to the two first slide rails; the first coil assembly 12 is arranged between the two first slide rails. By setting two first slide rails, the horizontal moving plate 10 can move more smoothly in the horizontal direction, and at the same time, the first coil assembly 12 is arranged between the two first slide rails, and the layout is more reasonable, so that the interaction force between the first coil assembly 12 and the first magnetic steel group 11 can achieve the best effect. Among them, the vertical direction is Figure 2 The width direction of the middle fixing plate 5.

[0050] In practice, the horizontally movable plate 10 comprises a first plate 102 and a second plate 103 connected to each other, forming an L-shaped structure. The first magnetic steel group 11 is mounted on the horizontally extending first plate 102, and the second coil assembly 20 is mounted on the vertically extending second plate 103. This configuration simplifies the structure. The horizontally movable plate 10 can drive the vertically movable plate 21 in horizontal motion while also providing a mounting space for the second coil assembly 20, making the overall structure of the device more compact.

[0051] The motion module further includes a buffer component 4, which is disposed on the horizontal movable plate 10 and opposite the vertical movable plate 21. The buffer component 4 has a blocking end surface. When the vertical movable plate 21 moves upward to a predetermined position, at least a portion of the vertical movable plate 21 contacts the blocking end surface, thereby blocking the vertical movable plate 21 through the buffer component 4. This can limit the travel of the vertical movable plate 21 and prevent the vertical movable plate 21 from interfering with the fixed plate 5 during movement.

[0052] In a specific implementation, two buffer components 4 are provided, and the two buffer components 4 are arranged on the second plate body 103 at intervals in the vertical direction. The second coil assembly 20 and the vertical movable plate 21 are arranged between the two buffer components 4. The two buffer components 4 can limit and buffer the movement stroke of the vertical movable plate 21 to prevent the vertical movable plate 21 from moving beyond the preset stroke.

[0053] At the same time, the two buffer components 4 can further fix the second coil assembly 20 to prevent the second coil assembly 20 from falling off. Figure 2 As shown, the buffer component 4 includes a limit plate 41 and a buffer block 42. The buffer block 42 is arranged on the surface of the limit plate 41 facing the second coil assembly 20 and the vertical movable plate 21. The limit plate 41 is fixed to the second plate body 103, wherein the buffer block 42 is made of a material with a good buffering effect such as foam. The second back plate 204 and the second plate body 103 are both provided with threaded holes. The second back plate 204 is fixedly connected to the second plate body 103 by connecting screws. The buffer block 42 presses the fixed second back plate 204 on the second plate body 103, which can prevent the second back plate 204 from falling off after the connecting screws are loosened, and can also play a role in pre-positioning during the installation process of the second back plate 204. The first moving assembly 1 also includes a horizontal displacement detection device for detecting the displacement of the first movable part 1002 (horizontally movable plate 10). Specifically, as Figure 2 As shown, the horizontal displacement detection device includes a first grating scale 14 mounted at the end of the horizontal movable plate 10 and arranged horizontally; and a first reader 15 mounted on the fixed plate 5. The first reader 15 reads the scale information on the first grating scale 14 to provide feedback on the movement position of the horizontal movable plate 10. This arrangement facilitates real-time monitoring of the movement position of the horizontal movable plate 10, thereby facilitating control of the travel of the horizontal movable plate 10.

[0054] Combine Figures 4 to 6 As shown, Figure 1The gravity compensation assembly 3 shown includes a fixed component and a moving component. The fixed component includes a third magnetic steel portion 30, which is fixed to the horizontal movable plate 10 and extends in the vertical direction. The moving component includes a fourth magnetic steel portion 31, which is mounted on the third magnetic steel portion 30 and connected to the vertical movable plate 21. The magnetic field direction of the fourth magnetic steel portion 31 is perpendicular to the magnetic field direction of the third magnetic steel portion 30, so that the fourth magnetic steel portion 31 applies a force opposite to the direction of gravity to the vertical movable plate 21. The fixed component also includes a stator back iron 35. The third magnetic steel portion 30 includes two groups of columnar third magnetic steel groups 301 spaced apart in the vertical direction. The stator back iron 35 is disposed between the two groups of third magnetic steel groups 301, and the two groups of third magnetic steel groups 301 are symmetrically arranged relative to the stator back iron 35. At least a portion of the fourth magnetic steel portion 31 is disposed opposite the stator back iron 35. The stator back iron 35 has a magnetic conductivity. The magnetic induction lines of the two groups of third magnetic steel groups 301 pass through the stator back iron 35 and then remain perpendicular to the magnetic induction lines of the fourth magnetic steel part 31, thereby making the magnetic field forces of the two perpendicular to each other, thereby achieving the effect of gravity compensation for the vertical movable plate 21.

[0055] Specifically, the fourth magnetic steel portion 31 includes a group of fourth magnetic steel groups 310, and the fourth magnetic steel group 310 is annular, wherein the fourth magnetic steel group 310 includes one or more annular fourth magnetic steels 3101, and the plurality of fourth magnetic steels 3101 are arranged in the vertical direction, and two adjacent fourth magnetic steels 3101 are bonded to each other, and the third magnetic steel group 301 includes a plurality of columnar third magnetic steels 3010. Preferably, each group of third magnetic steel groups 301 includes two third magnetic steels 3010, and the two third magnetic steels 3010 and the third magnetic steels 3010 and the stator back iron 35 are bonded to each other. It should be noted here that the number of third magnetic steels 3010 in each group of third magnetic steel groups 301 can be one or more, as long as the two groups of third magnetic steel groups 301 are symmetrical relative to the stator back iron 35 and the magnetizing directions of the two groups of third magnetic steel groups 301 are opposite. Figure 5 As shown, the two third magnetic steel groups 301 have opposite magnetization directions. The third magnetic steel group 301 above the stator back iron 35 is magnetized vertically upward, while the third magnetic steel group 301 below the stator back iron 35 is magnetized vertically downward. The fourth magnetic steel group 310 is magnetized vertically downward. In a specific implementation, each third magnetic steel group 301 and fourth magnetic steel group 310 may each include only one magnetic steel. In this embodiment, multiple small magnetic steels are used to form a magnetic steel group, which can reduce costs.

[0056] This arrangement utilizes the principle of magnetic levitation. The magnetic levitation force generated between two mutually perpendicular magnetic fields, that is, the magnetic field force of the third magnetic steel part 30 is perpendicular to the magnetic field force of the fourth magnetic steel part 31, and acts on each other, ultimately generating an upward magnetic levitation force on the fourth magnetic steel part 31 (opposite to the direction of gravity). The fourth magnetic steel part 31 reduces the influence of the vertical movable plate 21's own gravity on the processing accuracy.

[0057] The fixed component further includes: a mounting cylinder 32, which is fixedly connected to the horizontal movable plate 10, and the third magnetic steel portion 30 and the stator back iron 35 are disposed within the mounting cylinder 32; the moving component further includes a mounting sleeve 33, which is sleeved on the mounting cylinder 32, and the fourth magnetic steel portion 31 is disposed within the mounting sleeve 33, with a gap being provided between the fourth magnetic steel portion 31 and the mounting cylinder 32. In this way, the mounting cylinder 32 is used to facilitate the fixed installation of the third magnetic steel portion 30, while the installation of the mounting sleeve 33 facilitates the installation of the fourth magnetic steel portion 31. Preferably, an interlayer space 330 is provided on the sleeve body of the mounting sleeve 33, and the interlayer space 330 extends in the vertical direction, and the fourth magnetic steel portion 31 is disposed within the interlayer space 330.

[0058] Specifically, if Figure 4 As shown, the mounting sleeve 33 is provided with a connecting protrusion 331. The connecting protrusion 331 protrudes relative to the outer wall of the mounting sleeve 33 and is connected to the vertically movable plate 21. The provision of the connecting protrusion 331 facilitates the connection between the mounting sleeve 33 and the vertically movable plate 21, thereby transmitting the force exerted on the fourth magnetic steel portion 31 to the vertically movable plate 21, thereby achieving gravity compensation for the vertically movable plate 21.

[0059] A connecting portion 101 is provided on one side of the horizontally movable plate 10. The connecting portion 101 extends from the horizontally movable plate 10 in a direction away from the horizontally movable plate 10. There are two connecting portions 101, spaced apart in the vertical direction. The fixing component also includes two connecting blocks 34, which are respectively provided at each end of the mounting tube 32 and fixedly connected to the connecting portion 101. The two connecting portions 101 and the two connecting blocks 34 secure the ends of the mounting tube 32, thereby maintaining the stability of the mounting tube 32.

[0060] This embodiment also provides a sports device, such as Figure 7 As shown, it includes multiple motion modules 100 and multiple load components 300. The load components 300 are installed on the motion modules 100 in a one-to-one correspondence. The load components 300 are driven to move by the motion modules 100. The motion module 100 is the motion module of the above embodiment.

[0061] In actual application, the motion module 100 is mounted on the support frame 200, and the load component 300 is mounted on the second movable sub-unit 2002 of the motion module 100. The motion module 100 drives the load component 300 to move horizontally or vertically. The load component 300 is a component such as a tool for processing a workpiece. The workpiece 400 to be processed is placed under the second movable sub-unit 2002 for processing. As needed, multiple support frames 200 and multiple motion modules 100 can be installed in combination to facilitate simultaneous processing of multiple workpieces 400 to meet different production efficiency requirements.

[0062] From the above description, it can be seen that the above embodiments of the present invention achieve the following technical effects:

[0063] According to the motion module provided in this embodiment, it includes a first moving component 1, a second moving component 2 and a gravity compensation component 3, wherein the first moving component 1 includes a first stator part 1001 and a first movable part 1002; the first movable part 1002 is slidably connected to the first stator part 1001, and the first movable part 1002 can move horizontally relative to the first stator part 1001; the second moving component 2 includes a second stator part 2001 and a second movable part 2002; the second stator part 2001 is fixed to On the first movable part 1002, the second movable part 2002 is slidably connected to the first movable part 1002, and the second movable part 2002 can move in the vertical direction relative to the first movable part 1002; the first movable part 1002 can drive the second movable component 2 to move in the horizontal direction relative to the first stator part 1001; the gravity compensation component 3 is connected to the second movable component 2, and the gravity compensation component 3 applies a force opposite to the direction of gravity to the second movable component 2 to offset part of the gravity of the second movable component 2. Specifically, the gravity compensation component 3 is connected to the second movable sub-part 2002 in the second movable component 2, so that the second stator part 2001 is driven to move in the horizontal direction by the first movable sub-part 1002, and the second stator part 2001 is driven to move in the vertical direction. In the process of the second movable sub-part 2002 moving back and forth in the vertical direction, the movement accuracy of the second movable sub-part 2002 will be affected by the action of gravity. Therefore, a gravity compensation component 3 is provided to compensate for part of the gravity exerted on the second movable sub-part 2002, so as to improve the movement accuracy of the second movable sub-part 2002, thereby improving the overall processing accuracy of the motion module.

[0064] The foregoing description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that various modifications and variations of the present invention are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention are intended to be within the scope of protection of the present invention.

Claims

1. A motion module, characterized in that: include: A first moving assembly (1) comprises a first stator portion (1001) and a first mover portion (1002); the first mover portion (1002) is slidably connected to the first stator portion (1001), and the first mover portion (1002) is movable in a horizontal direction relative to the first stator portion (1001); The second moving assembly (2) comprises a second stator portion (2001) and a second movable portion (2002); the second stator portion (2001) is fixed to the first movable portion (1002), the second movable portion (2002) is slidably connected to the first movable portion (1002), and the second movable portion (2002) can move in a vertical direction relative to the first movable portion (1002); the first movable portion (1002) can drive the second moving assembly (2) to move in a horizontal direction relative to the first stator portion (1001); A gravity compensation component (3) is connected to the second moving component (2), and the gravity compensation component (3) applies a force opposite to the direction of gravity to the second moving component (2) to offset part of the gravity of the second moving component (2); The first mover part (1002) comprises a horizontal movable plate (10), the horizontal movable plate (10) being movably arranged in a horizontal direction relative to the first stator part (1001); the second mover part (2002) comprises a vertical movable plate (21) slidably connected to the horizontal movable plate (10) in a vertical direction; the gravity compensation component (3) is connected to the vertical movable plate (21); The gravity compensation component (3) includes a fixed component and a moving component: the fixed component includes a third magnetic steel portion (30), the third magnetic steel portion (30) is fixed to the horizontal movable plate (10), and the third magnetic steel portion (30) extends in the vertical direction; the moving component includes a fourth magnetic steel portion (31), the fourth magnetic steel portion (31) is sleeved on the third magnetic steel portion (30) and connected to the vertical movable plate (21), and the magnetic field direction of the fourth magnetic steel portion (31) is perpendicular to the magnetic field direction of the third magnetic steel portion (30); The horizontal moving plate (10) includes a second plate body (103); The motion module further comprises: a buffer component (4), which is arranged on the horizontal movable plate (10) and is arranged opposite to the vertical movable plate (21), and the buffer component (4) has a blocking end surface; two buffer components (4) are provided, and the two buffer components (4) are arranged on the second plate body (103) at intervals in the vertical direction, and the vertical movable plate (21) is arranged between the two buffer components (4).

2. The motion module according to claim 1, characterized in that: The second stator part (2001) comprises: a second coil assembly (20), wherein the second coil assembly (20) is arranged on the horizontal moving plate (10); A second magnetic steel group (22) is provided on the vertical movable plate (21), and the second magnetic steel group (22) is arranged opposite to the second coil assembly (20), so that the second magnetic steel group (22) drives the vertical movable plate (21) to move in a vertical direction relative to the horizontal movable plate (10) under the action of the magnetic force of the second coil assembly (20).

3. The motion module according to claim 2, characterized in that: The second coil assembly (20) comprises: A second circuit board (201); A second coil assembly (202) is provided on a circuit connection end surface of the second circuit board (201) and is electrically connected to the second circuit board (201); A second insulating layer (203) is provided on the second coil group (202) and is connected to the second circuit board (201).

4. The motion module according to claim 3, characterized in that: The second coil assembly (20) further comprises a second back plate (204), the second circuit board (201) is arranged on the second back plate (204), and the second back plate (204) is fixedly connected to the horizontal moving plate (10).

5. The motion module according to claim 2, characterized in that: The second moving component (2) further comprises: A second slide rail (23) is provided on the horizontal movable plate (10), the second slide rail (23) extends in a vertical direction, and the vertical movable plate (21) is connected to the second slide rail (23); The second coil assembly (20) is arranged on the side of the second slide rail (23).

6. The motion module according to claim 5, characterized in that: There are two second slide rails (23), and the two second slide rails (23) are arranged relatively spaced apart in the horizontal direction. The vertical movable plate (21) is connected to both second slide rail (23) components. The second coil assembly (20) is arranged between the two second slide rails (23).

7. The motion module according to any one of claims 2 to 6, characterized in that: The first mover portion further includes: A first magnetic steel group (11) is arranged on the horizontal movable plate (10) and located above the second coil assembly (20); The first stator portion comprises a first coil assembly (12) and a fixed plate (5), wherein the first coil assembly (12) is arranged on the fixed plate (5), and the first coil assembly (12) is arranged relative to the first magnetic steel group (11), so that the first magnetic steel group (11) drives the horizontal movable plate (10) to move in a horizontal direction relative to the fixed plate (5) under the magnetic force of the first coil assembly (12).

8. The motion module according to claim 7, characterized in that: The first moving component (1) further comprises: A first slide rail is provided on the fixed plate (5), and the first slide rail extends in the horizontal direction; there are two first slide rails, and the two first slide rails are relatively spaced apart in the vertical direction, and the horizontal movable plate (10) is connected to the two first slide rails; The first coil assembly (12) is arranged between the two first slide rails.

9. The motion module according to claim 7, characterized in that: The first magnetic steel group (11) is arranged on the first plate (102), and the second coil assembly (20) is arranged on the second plate (103).

10. The motion module according to claim 1, characterized in that: The fixed component further includes a stator back iron (35), the third magnetic steel portion (30) includes two groups of columnar third magnetic steel groups (301) spaced apart in a vertical direction, the magnetization directions of the two groups of the third magnetic steel groups (301) are opposite, the stator back iron (35) is arranged between the two groups of the third magnetic steel groups (301), and the two groups of the third magnetic steel groups (301) are symmetrically arranged relative to the stator back iron (35); The fourth magnetic steel portion (31) comprises a group of annular fourth magnetic steel groups (401), and the fourth magnetic steel group (401) is sleeved on the fixing component.

11. The motion module according to claim 1, characterized in that: The fixing component further comprises a mounting cylinder (32), wherein the mounting cylinder (32) is fixedly connected to the horizontal moving plate (10), and the third magnetic steel portion (30) is arranged in the mounting cylinder (32); The moving component further comprises a mounting sleeve (33), wherein the mounting sleeve (33) is sleeved on the mounting cylinder (32), the fourth magnetic steel portion (31) is arranged in the mounting sleeve (33), and a gap is provided between the fourth magnetic steel portion (31) and the mounting cylinder (32).

12. The motion module according to claim 11, characterized in that: An interlayer space (330) is provided on the sleeve body of the mounting sleeve (33), the interlayer space (330) extends in a vertical direction, and the fourth magnetic steel portion (31) is provided in the interlayer space (330).

13. A motion device comprising a plurality of motion modules (100) and a plurality of load components (300), wherein the plurality of load components (300) are mounted on the plurality of motion modules (100) in a one-to-one correspondence, and the motion modules (100) drive the load components (300) to move, characterized in that: The motion module (100) is the motion module according to any one of claims 1 to 12.

Images