Chemical delivery system and method of eliminating static electricity from chemical delivery lines

Abstract

The application relates to a chemical delivery system and a method for eliminating electrostatic of a chemical delivery pipeline, comprising a chemical reagent delivery pipeline, a liquid storage device and an aerosol generating device. The liquid storage device is used for storing an aerosol generating solution. Input and output ends of the aerosol generating device are communicated with the liquid storage device and the chemical reagent delivery pipeline respectively. The aerosol generating solution in the liquid storage device enters the aerosol generating device. The aerosol generating device converts the aerosol generating solution from a liquid state into an aerosol state. The aerosol diffuses into the chemical reagent delivery pipeline and adsorbs charged ions in the chemical reagent delivery pipeline, so that electrostatic ions can be prevented from meeting flammable and explosive chemical reagents to cause fire or explosion.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor equipment, in particular to a chemical delivery system and a method for eliminating electrostatic in a chemical delivery pipeline. BACKGROUND

[0002] In the manufacturing process of semiconductor devices, wafers are essential basic elements. In order to improve production efficiency, the wafers usually need to be quickly dried after cleaning. High-concentration isopropyl alcohol can improve the drying efficiency of wafers after cleaning due to its high volatility.

[0003] However, high-concentration isopropyl alcohol has strong corrosiveness, and using stainless steel pipes to transport high-concentration isopropyl alcohol can easily cause corrosion of the stainless steel pipes, increasing the risk of pipeline leakage. Therefore, most manufacturers will choose chemical reagent delivery pipelines made of polyvinylidene fluoride (PVDF) material with super tensile and temperature-resistant properties to transport high-concentration isopropyl alcohol solution. However, polyvinylidene fluoride material is a high-resistance medium, so the static electricity accumulated in the chemical reagent delivery pipeline cannot be dissipated in time, and the volatilization of high-concentration isopropyl alcohol can form flammable gas in the chemical reagent delivery pipeline, with a concentration as high as 5000 ppm. In the chemical reagent delivery pipeline, static electricity may cause fire or explosion when it meets high-concentration isopropyl alcohol. SUMMARY

[0004] Therefore, it is necessary to provide a chemical delivery system and a method for eliminating electrostatic in a chemical delivery pipeline to solve the problem that static electricity may cause fire or explosion when it meets high-concentration isopropyl alcohol in the chemical reagent delivery pipeline.

[0005] A chemical delivery system, comprising:

[0006] a chemical reagent delivery pipe;

[0007] a liquid storage device for storing an aerosol generating solution; and

[0008] an aerosol generating device in communication with the liquid storage device and the chemical reagent delivery pipe, respectively, for converting the aerosol generating solution from a liquid state to an aerosol state and delivering the aerosol to the chemical reagent delivery pipe to eliminate electrostatic in the chemical reagent delivery pipe.

[0009] In one embodiment, the aerosol generating device comprises:

[0010] A Venturi tube having a first port and a second port, a variable diameter portion between the first port and the second port, and a liquid inlet connected to the variable diameter portion, the first port being provided with a gas interface, the second port being in communication with the chemical reagent delivery pipe, the liquid inlet being in communication with the liquid storage device, the aerosol generating solution entering the variable diameter portion via the liquid inlet, wherein the diameter of the Venturi tube gradually decreases from the first port and the second port to the variable diameter portion.

[0011] In one embodiment, further comprising a pressure control device connected to the gas interface of the Venturi tube for controlling the pressure of the gas entering the gas interface.

[0012] In one embodiment, the aerosol generating device comprises a solution transportation pipe, the liquid storage device comprises a liquid treatment device, the liquid treatment device is arranged in the solution transportation pipe and between the liquid storage device and the Venturi tube.

[0013] In one embodiment, further comprising an aerosol delivery device for connecting the second port 219 of the Venturi tube with the chemical reagent delivery pipe wall, the aerosol delivery device being connected perpendicularly with the chemical reagent delivery pipe wall.

[0014] In one embodiment, the aerosol delivery device further comprises a plurality of first communication ports, the plurality of first communication ports being arranged in the chemical reagent delivery pipe in the extension direction of the chemical reagent delivery pipe, the output end of the aerosol generating device being in communication with the plurality of first communication ports.

[0015] In one embodiment, further comprising a control device electrically connected with the aerosol generating device for controlling the aerosol generating device to convert the aerosol generating solution from liquid state to aerosol state when the chemical reagent flows in the chemical reagent delivery pipe.

[0016] Embodiments of the present application further provide a method for eliminating electrostatic in a chemical delivery pipe, comprising:

[0017] Providing an aerosol generating device;

[0018] Controlling the aerosol generating device to deliver aerosol to the chemical reagent delivery pipe to eliminate electrostatic in the chemical reagent delivery pipe.

[0019] In one embodiment, the controlling the aerosol generating device to deliver aerosol to the chemical reagent delivery pipe to eliminate electrostatic in the chemical reagent delivery pipe comprises:

[0020] Controlling the aerosol generating device to periodically generate the aerosol;

[0021] The aerosol is delivered to the chemical reagent delivery pipe to eliminate static electricity in the chemical reagent delivery pipe.

[0022] In one embodiment, the pressure at which the aerosol generating device sprays the aerosol is controlled according to the flow rate of the chemical reagent in the chemical reagent delivery pipe.

[0023] The chemical delivery system and the method for eliminating static electricity in a chemical delivery pipeline provided by the embodiments of the present application include a chemical reagent delivery pipe, a liquid storage device, and an aerosol generating device. The liquid storage device is used to store an aerosol generating solution. The input end and the output end of the aerosol generating device are in communication with the liquid storage device and the chemical reagent delivery pipe, respectively. The aerosol generating solution in the liquid storage device enters the aerosol generating device. The aerosol generating device converts the aerosol generating solution from a liquid state to an aerosol state. The aerosol diffuses into the chemical reagent delivery pipe and adsorbs charged ions in the chemical reagent delivery pipe, thereby avoiding fire or explosion caused by the contact between the static ions and the flammable and explosive chemical reagent. BRIEF DESCRIPTION OF DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present application or the prior art, the drawings needed in the embodiments or the prior art description will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor on the basis of these drawings.

[0025] Figure 1 The structural schematic diagram of the chemical delivery system provided by one embodiment of the present application is shown in the figure.

[0026] Figure 2 The structural schematic diagram of the static electricity elimination pipeline system provided by one embodiment of the present application is shown in the figure.

[0027] Figure 3 The structural schematic diagram of the static electricity elimination pipeline system provided by another embodiment of the present application is shown in the figure.

[0028] Explanation of reference signs:

[0029] Chemical delivery system 10, liquid storage device 100, aerosol generating device 200, Venturi tube 210, gas interface 211, variable diameter portion 212, spray head 217, solution transport tube 220, on-off valve 213, pressure control device 214, pressure gauge 215, gas flow meter 216, first port 218, second port 219, liquid inlet 223, filter 221, liquid flow meter 222, static elimination tubing system 20, chemical delivery tubing 300, first communication port 310, dispersion tubing 400, adapter 410, second communication port 420, dispersion branch tubing 430, vacuum pump 500, liquid treatment device 600, aerosol delivery device 700, control device 800. DETAILED DESCRIPTION

[0030] In order to make the above objectives, features and advantages of the present application more clear and comprehensible, specific embodiments of the present application will be described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be practiced in a variety of ways other than those described herein without departing from the spirit of the present application, and it is understood that similar modifications can be made by those skilled in the art in the light of the above teachings. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0031] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0032] In addition, the terms "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, for example, two, three, etc., unless otherwise specifically limited.

[0033] In the present application, unless specifically defined otherwise, the terms "mount", "connected", "connecting", "fixed", and "fixedly" mean to be connected by any means, for example, fixedly connected, releasably connected, or integrally connected, mechanically or electrically connected, directly or indirectly connected, or two elements connected together in any way, unless otherwise explicitly defined. The specific meaning of the above terms in the present application can be understood according to the specific circumstances by those skilled in the art.

[0034] In the present application, unless specifically defined otherwise, the first feature is "on" or "under" the second feature, which can be direct contact between the first and second features, or indirect contact between the first and second features through an intermediate medium. Moreover, the first feature "above", "over" and "on" the second feature can be directly above or obliquely above the second feature, or only indicate that the first feature is higher than the second feature in horizontal height. The first feature "below", "under" and "under" the second feature can be directly below or obliquely below the second feature, or only indicate that the first feature is lower than the second feature in horizontal height.

[0035] It should be noted that when an element is referred to as "fixed to" or "disposed on" another element, it can be directly on the other element or there can be an intermediate element. When an element is referred to as "connected to" another element, it can be directly connected to the other element or there can be an intermediate element. The terms "vertical", "horizontal", "up", "down", "left", "right", and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation.

[0036] Referring to Figure 1 The embodiments of the present application provide a chemical delivery system 10. The chemical delivery system 10 includes a chemical reagent delivery pipe 300, a liquid storage device 100 and an aerosol generating device 200. The aerosol generating device 200 is in communication with the liquid storage device 100 and the chemical reagent delivery pipe 300, respectively. The liquid storage device 100 is used to store an aerosol generating solution. The aerosol generating device 200 is used to convert the aerosol generating solution from a liquid state to an aerosol state, and deliver the aerosol to the chemical reagent delivery pipe 300 to eliminate static electricity in the chemical reagent delivery pipe 300.

[0037] The liquid storage device 100 can be a pressure container. The liquid storage device 100 can be made of polyester material or metal material, as long as the liquid storage device 100 is not easily corroded by the aerosol generating solution. The aerosol generating device 200 can atomize the aerosol generating solution to generate the aerosol. The liquid storage device 100 can deliver the aerosol to the aerosol generating device 200 by a power device. The aerosol device can also generate negative pressure to absorb the aerosol generating solution into the aerosol generating device 200. The aerosol generating device 200 can use the principle of fluid mechanics to change the flow rate and pressure of the aerosol generating solution to vaporize the liquid aerosol generating solution into an aerosol state. The aerosol can be ejected from the output end of the aerosol generating device 200 into the chemical reagent delivery pipe 300. Since the aerosol can continuously diffuse in the chemical reagent delivery pipe 300, it can combine with the charged ions in the chemical reagent delivery pipe 300 and can flow out of the chemical reagent delivery pipe 300 with the chemical reagent solution. It can be understood that when the chemical delivery system 10 is applied to a semiconductor production line, the chemical reagent can be an isopropyl alcohol solution.

[0038] The chemical delivery system 10 provided by the embodiments of the present application includes a chemical reagent delivery pipe 300, a liquid storage device 100, and an aerosol generating device 200. The liquid storage device 100 is used to store an aerosol generating solution. The input end and the output end of the aerosol generating device 200 are in communication with the liquid storage device 100 and the chemical reagent delivery pipe 300, respectively. The aerosol generating solution in the liquid storage device 100 enters the aerosol generating device 200. The aerosol generating device 200 converts the aerosol generating solution from a liquid state to an aerosol state. The aerosol enters the chemical reagent delivery pipe 300 and diffuses therein, and adsorbs and eliminates the charged ions in the chemical reagent delivery pipe 300, so that the electrostatic ions can be prevented from encountering flammable and explosive isopropyl alcohol gas to cause fire or explosion.

[0039] In one embodiment, the aerosol generating device includes a Venturi tube 210. The Venturi tube 210 has a first port 218 and a second port 219, a variable diameter portion 212 between the first port 218 and the second port 219, and a liquid inlet 223 connected to the variable diameter portion 212. The first port 218 is provided with a gas interface 211. The second port 219 is in communication with the chemical reagent delivery pipe 300. The liquid inlet 223 is in communication with the liquid storage device 100. The aerosol generating solution enters the variable diameter portion 212 through the liquid inlet 223. The diameter of the Venturi tube 210 gradually decreases from the first port 218 and the second port 219 to the variable diameter portion 212.

[0040] The Venturi tube 210 can be made of ceramic, glass or polyester material. The gas interface 211 can be fitted with a VCR joint. Through the gas interface 211, inert gas can be introduced into the Venturi tube 210 through the first port 218 and the second port 219. In one embodiment, nitrogen gas can be introduced into the Venturi tube 210 through the gas interface 211. The variable diameter portion 212 can be located in the middle of the Venturi tube 210, i.e. between the first port 218 and the second port 219. It can be appreciated that the diameter of the Venturi tube 210 can be the same at both ends of the variable diameter portion 212. That is, the diameter of the first port 218 and the second port 219 can be the same. From the first port 218 to the second port 219 of the Venturi tube 210, the diameter of the Venturi tube 210 can gradually decrease and then gradually increase. That is, the diameter of the Venturi tube 210 is the smallest at the variable diameter portion 212. It can be appreciated that the diameter of the Venturi tube 210 also gradually decreases from both ends of the variable diameter portion 212 to the middle of the variable diameter portion 212. The diameter of the Venturi tube 210 can decrease in steps, i.e. the cross-sectional area of the Venturi tube 210 can decrease at the same rate, or the cross-sectional area of the Venturi tube 210 can decrease at different rates in steps.

[0041] The liquid storage device 100 can contain an aerosol generating solution. In one embodiment, the aerosol generating solution can be an inorganic salt solution. In one embodiment, the aerosol generating solution can be a sodium chloride solution. The sodium chloride solution can have a concentration ranging from 5% to 10%. By adjusting the concentration of the sodium chloride solution, the size of the aerosol particles can be adjusted. The liquid inlet 223 can be provided on the sidewall of the portion of the variable diameter portion 212 having the smallest diameter. The variable diameter portion 212 communicates with the liquid storage device 100 through the liquid inlet 223.

[0042] In one embodiment, the chemical delivery system further comprises a solution transport tube 220. The solution transport tube 220 communicates with the solution transport tube 220 and the Venturi tube 210 at two ends thereof. One end of the solution transport tube 220 can communicate with the Venturi tube 210 through the liquid inlet 233. The connection between the solution transport tube 220 and the Venturi tube 210 can be at the location of the Venturi tube 210 having the smallest diameter, i.e. the solution transport tube 220 can communicate with the Venturi tube 210 at the variable diameter portion 212.

[0043] It can be understood that gas can be introduced into the venturi 210 through the gas interface 211. When the gas passes through the variable diameter portion 212, the flow rate of the gas increases due to the decrease of the diameter of the venturi 210, and the pressure at the variable diameter portion 212 decreases accordingly. Therefore, the pressure in the solution transportation pipe 220 is greater than the pressure at the variable diameter portion 212. That is, a negative pressure is formed at the variable diameter portion 212 compared to the solution transportation pipe 220. Under the action of the negative pressure, the aerosol generating solution in the liquid storage device 100 is sucked into the venturi 210. When the pressure at the variable diameter portion 212 reaches a certain value, the aerosol generating solution can be sprayed from the second port 219 of the venturi 210 in the form of an aerosol. The aerosol can be sprayed into the chemical reagent delivery pipe 300 through the second port 219, and adsorb and eliminate the charged ions in the chemical reagent delivery pipe 300, so as to avoid fire or explosion caused by the contact between the electrostatic ions and the high-concentration isopropyl alcohol solution gas.

[0044] In one embodiment, the chemical delivery system 10 further comprises a pressure control device 214. The pressure control device 214 is connected to the gas interface 211 of the venturi 210. The pressure control device 214 is used to control the pressure of the gas entering the gas interface 211. In one embodiment, the pressure control device 214 can be a pressure regulating valve 214.

[0045] In one embodiment, the chemical delivery system 10 further comprises a switch valve 213, a pressure gauge 215 and a gas flow meter 216. The switch valve 213, the pressure control device 214, the pressure gauge 215 and the gas flow meter 216 are arranged in the venturi 210. The switch valve 213, the pressure control device 214, the pressure gauge 215 and the gas flow meter 216 are arranged in sequence between the gas interface 211 and the variable diameter portion 212. That is, in the direction towards the variable diameter portion 212, the switch valve 213, the pressure control device 214, the pressure gauge 215 and the gas flow meter 216 are arranged in sequence between the gas interface 211 and the variable diameter portion 212.

[0046] The switch valve 213 can be used to control the gas entering the venturi 210. The pressure control device 214 can adjust the pressure of the gas entering the venturi 210. The pressure control device 214 can be adjusted in time so that the aerosol is sprayed from the end of the venturi 210 away from the gas interface 211. The pressure gauge 215 can display the pressure value in the venturi 210. The gas flow meter 216 can reflect the flow rate of the gas in the venturi 210.

[0047] In one embodiment, the liquid storage device 100 comprises a liquid treatment device 600. The liquid treatment device 600 is disposed in the solution transportation pipe 220 and is located between the liquid storage device 100 and the Venturi tube 210. The liquid treatment device 600 can monitor and control the flow rate, flow volume, temperature, pressure and other parameters of the aerosol generating solution output from the liquid storage device 100. The liquid treatment device 600 can also control whether the aerosol generating solution is output from the liquid storage device 100. In one embodiment, the liquid treatment device 600 can also filter the aerosol generating solution in the liquid storage device 100.

[0048] In one embodiment, the liquid treatment device 600 comprises a filter 221 and a liquid flow meter 222. The filter 221 and the liquid flow meter 222 are disposed in the solution transportation pipe 220 and are located between the liquid storage device 100 and the Venturi tube 210 in sequence. That is, the filter 221 is disposed closer to the liquid storage device 100. The filter 221 can filter impurities in the aerosol generating solution output from the liquid storage device 100, so as to avoid the impurities from entering the Venturi tube 210 and causing blockage. The liquid flow meter 222 can monitor the flow volume of the aerosol generating solution in the solution transportation pipe 220.

[0049] In one embodiment, the chemical supply system 10 further comprises an aerosol delivery device 700. The aerosol delivery device 700 is used to connect the second port 219 of the Venturi tube 210 and the wall of the chemical reagent delivery pipe 300. The aerosol delivery device 700 is connected perpendicularly to the wall of the chemical reagent delivery pipe 300. The aerosol delivery device 700 can make the aerosol enter the chemical reagent delivery pipe 300 as uniformly as possible.

[0050] In one embodiment, the aerosol delivery device 700 can further comprise a spray head 217. The spray head 217 is disposed at the second port 219 of the Venturi tube 210. The diameter of the spray head 217 far from the second port 219 is the smallest, so as to increase the speed of the aerosol spray. In one embodiment, the cross-sectional area of the spray head 217 can increase from small to large and then decrease from large to small from the end of the spray head 217 close to the Venturi tube 210 to the end of the spray head 217 far from the Venturi tube 210. Therefore, when the aerosol enters the part of the spray head 217 with a larger cross-sectional area, the flow rate decreases and the pressure increases, which can cause disturbance of the aerosol and avoid the aerosol particles from gathering.

[0051] Please refer to Figure 2In one embodiment, the aerosol delivery device 700 further comprises a plurality of first communication ports 310. The plurality of first communication ports 310 are arranged along the extension direction of the chemical agent delivery pipe 300. The output end of the aerosol generator 200 is in communication with the plurality of first communication ports 310. That is, along the extension direction of the chemical agent delivery pipe 300, the chemical agent delivery pipe 300 is arranged with a plurality of first communication ports 310. The output end of the aerosol generator 200 is in communication with the plurality of first communication ports 310. The plurality of first communication ports 310 can be uniformly distributed along the axis of the chemical agent delivery pipe 300. It can be understood that the aerosol output from the output end of the aerosol generator 200 can enter the chemical agent delivery pipe 300 from different first communication ports 310 respectively. The aerosol can uniformly spread in the chemical agent delivery pipe 300 to a larger space. Therefore, the static electricity at different positions in the chemical agent delivery pipe 300 can be adsorbed and eliminated by the aerosol, thereby further reducing the charged ions in the chemical agent delivery pipe 300.

[0052] In one embodiment, the aerosol delivery device 700 further comprises a dispersion pipe 400. The dispersion pipe 400 is provided with an adapter 410. The adapter 410 is in communication with the output end of the aerosol generator 200. Along the extension direction of the dispersion pipe 400, the dispersion pipe 400 is arranged with a plurality of second communication ports 420. The plurality of first communication ports 310 and the second communication ports 420 are in one-to-one correspondence. The adapter 410 is arranged between any two adjacent second communication ports 420. It can be understood that, similar to the arrangement of the first communication ports 310, the second communication ports 420 can also be uniformly arranged along the axis of the dispersion pipe 400. That is, the second communication ports 420 can be arranged at equal intervals along the axis of the dispersion pipe 400. The first connection port and the second connection port can be in communication through a soft pipe or a hard pipe. The aerosol output from the output end of the aerosol generator 200 can fill the dispersion pipe 400, and then enter the plurality of first communication ports 310 through the plurality of second communication ports 420 respectively.

[0053] In one embodiment, the diameter of the dispersion pipe 400 can be greater than the diameter of the chemical agent delivery pipe 300, so as to facilitate the aerosol to fully spread in the dispersion pipe 400, so that the amount of aerosol entering the first communication port 310 from the second communication port 420 is as uniform as possible. The distribution of the aerosol in the chemical agent delivery pipe 300 is also more uniform.

[0054] In one embodiment, the number of the second communication ports 420 on both sides of the adapter 410 is the same in the extending direction of the chemical reagent delivery pipe 300. That is, the adapter 410 is disposed in the middle of the plurality of second communication ports 420. In one embodiment, the adapter 410 is also disposed in the middle of the chemical reagent delivery pipe 300. Therefore, the rate of diffusion of the aerosol from the adapter 410 to both ends of the dispersion pipe 400 is more uniform. The amount of the aerosol entering the plurality of second communication ports 420 also tends to be the same.

[0055] In one embodiment, the dispersion pipe 400 is disposed between the output end of the aerosol generating device 200 and the chemical reagent delivery pipe 300. The dispersion pipe 400 is disposed in parallel with respect to the chemical reagent delivery pipe 300. The plurality of first communication ports 310 and the plurality of second communication ports 420 are in one-to-one correspondence. The dispersion pipe 400 and the chemical reagent delivery pipe 300 are disposed in the same plane. The aerosol output from the adapter 410 can enter the chemical reagent delivery pipe 300 through the dispersion pipe 400. The parallel arrangement of the dispersion pipe 400 and the chemical reagent delivery pipe 300 can make the first communication ports 310 and the second communication ports 420 in direct correspondence, reducing the length of the pipeline between the first communication ports 310 and the second communication ports 420. The length of the pipeline between the plurality of first communication ports 310 and the plurality of second communication ports 420 is the same. The rate of the aerosol entering the plurality of second communication ports 420 is more uniform.

[0056] In one embodiment, the diameter of the dispersion pipe 400 gradually increases from both sides of the adapter 410 to the dispersion pipe 400. It can be understood that the flow rate of the aerosol is related to the diameter of the dispersion pipe 400. When the aerosol flows to the adapter 410, the diameter of the corresponding dispersion pipe 400 of the adapter 410 is the smallest, the flow rate of the aerosol at this position is large, and the pressure is small. The diameter of the dispersion pipe 400 gradually increases from both sides of the adapter 410, so the flow rate of the aerosol to both ends of the dispersion pipe 400 gradually slows down, but the pressure of the aerosol gradually increases.

[0057] It can be understood that the greater the pressure of the aerosol at the second communication port 420, the greater the rate of ejection into the first communication port 310. Since the aerosol entering the chemical reagent delivery pipe 300, close to the second communication port 420 of the adapter 410 to the first communication port 310 of the aerosol injection will produce a greater diversion of the aerosol. When the aerosol flows in the dispersion pipe 400 to a position away from the adapter 410, the concentration of the aerosol has become smaller. But because the diameter of the dispersion pipe 400 becomes larger, the flow rate of the aerosol becomes smaller, the pressure becomes larger, so the aerosol flow rate from the second communication port 420 increases relatively, the amount of aerosol ejected from the second communication port 420 away from the adapter 410 in the same time relative to the amount of aerosol ejected from the second communication port 420 close to the adapter 410 tends to be consistent, so as to make the aerosol in the chemical reagent delivery pipe 300 as uniform as possible.

[0058] In one embodiment, the distance between the second communication port 420 and the adapter 410 to both sides of the dispersion pipe 400 gradually increases. That is, the second communication port 420 close to the adapter 410 has a greater density, and the second communication port 420 away from the adapter 410 has a smaller density. It can be understood that the aerosol close to the adapter 410 has a greater density and a faster flow rate. Therefore, the aerosol is not easy to be ejected from the second connection port close to the dispersion pipe 400. Therefore, by increasing the density of the second connection port, the amount of aerosol ejected can be increased. At a position away from the adapter 410, the flow rate of the aerosol in the dispersion pipe 400 decreases, and the amount of aerosol output by each second communication port 420 will be larger. By setting a larger distribution density of the second communication port 420 close to the adapter 410 and a smaller distribution density of the second communication port 420 away from the adapter 410, the aerosol ejected into different positions of the chemical reagent delivery pipe 300 can be more uniform.

[0059] In one embodiment, the aerosol delivery device 700 further comprises a plurality of branch pipes 430. Each of the plurality of branch pipes 430 is connected between a corresponding first communication port 310 and a corresponding second communication port 420. That is, one branch pipe 430 is connected between a corresponding first communication port 310 and a corresponding second communication port 420. The branch pipes 430 can be arranged perpendicularly relative to the dispersing pipe 400 and the chemical agent delivery pipe 300. The branch pipes 430 can be made of corrosion-resistant materials such as polyester. The branch pipes 430 can have the same length. The aerosol can be delivered to different first communication ports 310 through the branch pipes 430.

[0060] Referring to Figure 3 In one embodiment, at least one of the branch pipes 430 extends into the chemical agent delivery pipe 300 through the first communication port 310 and is spaced apart from the inner wall of the chemical agent delivery pipe 300. It can be understood that the inner wall of the chemical agent delivery pipe 300 is prone to adhere to charged ions. The aerosol is prone to float in the chemical agent delivery pipe 300 due to its low density. Therefore, the aerosol is prone to adsorb the charged ions on the top of the inner wall of the chemical agent delivery pipe 300. However, the isopropyl alcohol solution flows at the bottom of the chemical agent delivery pipe 300. Therefore, the aerosol is less likely to contact the charged ions at the bottom of the chemical agent delivery pipe 300. At least one of the branch pipes 430 extends into the chemical agent delivery pipe 300, that is, the outlet of the branch pipe 430 can extend to the bottom of the chemical agent delivery pipe 300. The aerosol output from the branch pipe 430 can be directly sprayed to the bottom of the chemical agent delivery pipe 300, so as to adsorb the charged ions at the bottom of the chemical agent delivery pipe 300. The outlet of the branch pipe 430 is spaced apart from the inner wall of the chemical agent delivery pipe 300, so as to provide space for the aerosol output and avoid affecting the ejection of the aerosol from the outlet of the branch pipe 430. In one embodiment, a plurality of branch pipes 430 extend into the chemical agent delivery pipe 300 along the extension direction of the chemical agent delivery pipe 430.

[0061] In one embodiment, a vacuum pump 500 is arranged on the side of the chemical reagent delivery pipe 300 away from the output end of the aerosol generator 200 along the flow direction of the isopropyl alcohol solution. It can be understood that when the aerosol adsorbs the charged ions, the aerosol particles will gradually collide and fuse with each other. Under the action of gravity, the large particle aerosol will fall into the isopropyl alcohol solution and flow out with the isopropyl alcohol solution. When the isopropyl alcohol solution is used waste solution, the particle aerosol will be discharged into the waste liquid pool together with the isopropyl alcohol solution. Some aerosols that have not fused will still float in the chemical reagent delivery pipe 300. If the chemical reagent delivery pipe 300 delivers unused isopropyl alcohol solution, the aerosol can be absorbed by the vacuum pump 500, so that the influence of the aerosol on the isopropyl alcohol solution can be minimized, and the purity of the isopropyl alcohol solution can be improved.

[0062] In one embodiment, the electrostatic elimination pipeline system 10 further comprises a control device 800. The control device 800 is electrically connected to the aerosol generator 200. The control device 800 is used to control the aerosol generator 200 to convert the aerosol generating solution from a liquid state to an aerosol state when the chemical solution flows in the chemical reagent delivery pipe 300. That is, the aerosol generator 200 can have two states of pause and start. It can be understood that isopropyl alcohol waste liquid is not always produced during production. That is, the isopropyl alcohol waste liquid in the chemical reagent delivery pipe 300 can be produced periodically. Therefore, when the isopropyl alcohol waste liquid flows in the chemical reagent delivery pipe 300, the aerosol generator 200 can be started to fill the chemical reagent delivery pipe 300 with the aerosol. It can be understood that the time when the aerosol generator 200 is started can be set in advance, as long as it is synchronized with the time when the isopropyl alcohol waste liquid is discharged into the chemical reagent delivery pipe 300. In one embodiment, an induction device can be used to sense whether the isopropyl alcohol waste liquid is in the chemical reagent delivery pipe 300. When the isopropyl alcohol waste liquid is sensed, the control device 800 controls the aerosol generator 200 to start. The control device 800 controls the aerosol generator 200 to work periodically. It can be understood that when the aerosol generator 200 works once, the aerosol can be injected into the chemical reagent delivery pipe 300 once. Under the requirement of removing static electricity, the amount of aerosol can be saved, and the electricity consumption can be saved.

[0063] The embodiments of the present application also provide a method for eliminating static electricity of a chemical delivery pipeline. The method comprises:

[0064] S10, providing an aerosol generator 200;

[0065] S20, controlling the aerosol generating device 200 to deliver aerosol to the chemical reagent delivery pipe 300 to eliminate static electricity in the chemical reagent delivery pipe 300.

[0066] The aerosol diffuses into the chemical reagent delivery pipe 300 and adsorbs charged ions to eliminate static electricity in the chemical reagent delivery pipe 300, so that the flammable and explosive isopropyl alcohol gas will not cause fire or explosion.

[0067] In one embodiment, the S20 includes:

[0068] S21, controlling the aerosol generating device 200 to periodically generate the aerosol;

[0069] S22, delivering the aerosol to the chemical reagent delivery pipe 300 to eliminate static electricity in the chemical reagent delivery pipe 300.

[0070] The aerosol generating device 200 periodically generates the aerosol, i.e. the aerosol generating device 200 can be periodically paused and worked, and the aerosol is sprayed to the chemical reagent delivery pipe 300 every certain time interval. In this way, the amount of aerosol can be saved, and the production cost can be reduced under the requirement of removing static electricity. It can be understood that the cycle of the aerosol generating device 200 can be synchronized with the cycle of discharging the isopropyl alcohol waste liquid into the chemical reagent delivery pipe 300.

[0071] In one embodiment, the pressure of the aerosol sprayed by the aerosol generating device 200 is controlled according to the flow rate of the chemical reagent in the chemical reagent delivery pipe 300.

[0072] It can be understood that the flow of the chemical reagent in the chemical reagent delivery pipe 300 usually carries the aerosol. When the flow rate of the chemical reagent is too fast, the aerosol may not have the effect of eliminating static electricity before being discharged with the chemical reagent from the chemical reagent delivery pipe 300. If the pressure of the aerosol is not high enough, the aerosol will be discharged before reaching the bottom of the chemical reagent delivery pipe 300. At this time, the spraying strength of the aerosol generating device 200 needs to be increased to make the aerosol contact the bottom of the chemical reagent delivery pipe 300 as soon as possible. Conversely, when the flow rate of the chemical reagent is slow, the pressure of the aerosol generated by the aerosol generating device 200 can be reduced.

[0073] The experimental data prove that when the aerosol is not introduced into the chemical reagent delivery pipe 300, the electrostatic voltage value in the chemical reagent delivery pipe 300 is 1.3 KV to 4.7 KV. After the aerosol is injected into the chemical reagent delivery pipe 300, the electrostatic voltage value in the chemical reagent delivery pipe 300 is reduced to below -1.0 KV, which can effectively control the electrostatic voltage within a safe range. In addition, when the isopropanol waste liquid concentration exceeds 20%, the pipeline material must be electrostatic conductive material or electrostatic protection measures must be taken. The electrostatic conductive material or other electrostatic protection measures have a higher cost. The use of the electrostatic elimination pipeline system 20 can effectively reduce the cost and improve the safety performance.

[0074] The technical features of the above-described embodiments can be combined in any manner. To make the description concise, all possible combinations of the technical features in the above-described embodiments are not described, but as long as the combinations of the technical features do not contradict, they should be considered within the scope of the present disclosure.

[0075] The above-described embodiments only express several implementation manners of the present application, and the description is relatively specific and detailed, but it should not be understood as a limitation on the patent scope of the present application. It should be pointed out that for ordinary skilled persons in the art, several modifications and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the patent protection scope of the present application should be subject to the appended claims.

Claims

1. A chemical delivery system, characterized in that, include: Chemical reagent delivery tube; A liquid storage device for storing the solution generated by aerosols; as well as An aerosol generating device, connected to both the liquid storage device and the chemical reagent delivery pipe, is used to convert the aerosol generating solution from a liquid state to an aerosol state and to deliver the aerosol to the chemical reagent delivery pipe to eliminate static electricity in the chemical reagent delivery pipe. The aerosol generating device includes: A venturi tube has a first port and a second port, a reducing section located between the first port and the second port, and a liquid inlet connected to the reducing section. The first port is provided with a gas interface, the second port is connected to the chemical reagent delivery tube, and the liquid inlet is connected to the liquid storage device. The aerosol generating solution enters the reducing section through the liquid inlet. The diameter of the venturi tube gradually decreases from the first port and the second port to the reducing section.

2. The chemical delivery system as described in claim 1, characterized in that, It also includes a pressure control device connected to the gas interface of the venturi tube, used to control the pressure of the gas entering the gas interface.

3. The chemical delivery system as described in claim 1, characterized in that, The aerosol generating device includes a solution transport pipe, and the liquid storage device includes a liquid processing device disposed on the solution transport pipe and located between the liquid storage device and the Venturi tube.

4. The chemical delivery system as described in claim 1, characterized in that, It also includes an aerosol delivery device, which is used to connect the second port of the venturi tube to the wall of the chemical reagent delivery tube, and the aerosol delivery device is perpendicularly connected to the wall of the chemical reagent delivery tube.

5. The chemical delivery system as described in claim 4, characterized in that, The aerosol delivery device further includes a plurality of first communication ports, which are spaced apart along the extension direction of the chemical reagent delivery pipe, and the output end of the aerosol generator is connected to the plurality of first communication ports.

6. The chemical delivery system as claimed in claim 1, characterized in that, It also includes a control device electrically connected to the aerosol generator, used to control the aerosol generator to change the aerosol generating solution from a liquid state to an aerosol state when the chemical reagent flows in the chemical reagent delivery tube.

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