Ultraviolet curing system and control method thereof

Abstract

The present application discloses a UV curing system and a control method thereof, wherein the UV curing system comprises a driving mechanism, a first light source, a second light source, a position detection component and a control device; wherein the driving mechanism is used to drive the first light source and the second light source to rotate in at least one single rotation cycle; the position detection component is used to obtain at least two groups of detection signals corresponding to different positions within a single rotation cycle of the first light source and the second light source, and transmit the detection signals to the control device; the control device is used to obtain the actual rotation parameters of the driving mechanism driving the first light source and the second light source to rotate to the corresponding positions within a single rotation cycle according to the detection signals, and when the theoretical rotation parameters and the actual rotation parameters meet the correction conditions, the theoretical rotation parameters of the driving mechanism in the next single rotation cycle are corrected according to the actual rotation parameters. This solution can solve the problem of poor processing quality of wafers.

Description

Technical Field

[0001] The present application belongs to the field of semiconductor processing technology, and specifically relates to an ultraviolet curing system and a control method thereof. Background Art

[0002] In the semiconductor field, UV curing process is a common processing technology, and the light source is an indispensable device for the UV curing process. Therefore, the structure of the light source has a crucial influence on the effect of the UV curing process.

[0003] Due to the limitations of production capacity and process requirements, the light source used in the UV curing process is usually a long strip light source, while the wafer to be cured is a circular structure. In order to meet the uniformity requirements, the light source needs to be driven to rotate through a driving mechanism so that the light emitted by the light source can evenly scan the wafer.

[0004] However, long-term operation of the UV curing system will cause the mechanical structure of the driving mechanism that drives the light source to rotate to loosen or wear and deform, which will lead to the actual rotation angle of the light source being inconsistent with the target angle during the rotation of the light source, and the light emitted by the light source cannot be evenly scanned across the wafer, ultimately resulting in poor wafer processing quality and even unqualified products. Summary of the invention

[0005] The purpose of the embodiments of the present application is to provide a UV curing system and a control method thereof, which can solve the problem of poor wafer processing quality.

[0006] In order to solve the above technical problems, this application is implemented as follows:

[0007] In a first aspect, an embodiment of the present application provides a UV curing system, including a driving mechanism, a first light source, a second light source, a position detection component and a control device; wherein:

[0008] The driving mechanism is used to drive the first light source and the second light source to rotate in at least one single rotation cycle;

[0009] The position detection component is used to obtain at least two groups of detection signals corresponding to different positions within one single rotation cycle of the first light source and the second light source, and transmit the detection signals to the control device;

[0010] The control device is used to obtain the actual rotation parameters of the driving mechanism driving the first light source and the second light source to rotate to corresponding positions within the single rotation cycle based on the detection signal, and when the theoretical rotation parameters and the actual rotation parameters meet the correction conditions, correct the theoretical rotation parameters of the driving mechanism in the next single rotation cycle according to the actual rotation parameters.

[0011] In a second aspect, an embodiment of the present application provides a control method for a UV curing system, which is applied to the above-mentioned UV curing system, and includes:

[0012] driving the first light source and the second light source to rotate in at least one single rotation cycle, and obtaining theoretical rotation parameters of the driving mechanism in the single rotation cycle;

[0013] Acquire at least two groups of detection signals corresponding to different positions within one single rotation cycle of the first light source and the second light source;

[0014] Acquire actual rotation parameters of the driving mechanism driving the first light source and the second light source to rotate to corresponding positions within the single rotation cycle according to the detection signal;

[0015] When the theoretical rotation parameter and the actual rotation parameter satisfy a correction condition, the theoretical rotation parameter of the driving mechanism in the next single rotation cycle is corrected according to the actual rotation parameter.

[0016] In an embodiment of the present application, the position detection component of the UV curing system can obtain at least two groups of detection signals corresponding to different positions within a single rotation cycle of the first light source and the second light source, and transmit the detection signals to the control device, so that the control device can obtain the actual rotation parameters of the driving mechanism driving the first light source and the second light source to rotate to the corresponding positions within a single rotation cycle. By comparing the actual rotation parameters with the theoretical rotation parameters, the error size of the rotational motion of the driving mechanism can be known. Finally, when the error needs to be corrected, the theoretical rotation parameters of the driving mechanism are adjusted, so that the actual rotation angle of the corresponding position of the driving mechanism within a single rotation cycle tends to be consistent with the theoretical rotation angle, so that the light emitted by the first light source and the second light source can scan the wafer more evenly, thereby improving the processing quality of the wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 and Figure 2 They are schematic diagrams of the structure of the UV curing system disclosed in the embodiments of the present application in different states, Figure 1 and Figure 2 The arrow lines in the figure indicate the rotation directions of the first light source and the second light source;

[0018] Figure 3 The present invention is a flow chart of a control method of a UV curing system disclosed in an embodiment of the present application.

[0019] Description of reference numerals:

[0020] 110-base, 120-driving mechanism, 121-driving source, 122-transmission belt, 123-driving wheel, 124-first driven wheel, 125-second driven wheel, 126-first idle wheel, 127-second idle wheel, 130-first light source, 140-second light source, 151-first sensor, 152-first trigger, 153-second sensor, 154-second trigger. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0022] The terms "first", "second", etc. in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described here. In addition, the "and / or" in the specification and claims represents at least one of the connected objects, and the character " / " generally represents that the objects associated with each other are in an "or" relationship.

[0023] The ultraviolet curing system and control method thereof provided in the embodiments of the present application are described in detail below through specific embodiments and their application scenarios in conjunction with the accompanying drawings.

[0024] refer to Figure 1 to Figure 2 The embodiment of the present application discloses a UV curing system, which can be optionally used to implement UV curing operations on wafers. The UV curing system includes a base 110, a driving mechanism 120, a first light source 130, a second light source 140, a position detection component and a detection device. The first light source 130 and the second light source 140 here can be directed toward different wafers, and the first light source 130 and the second light source 140 can be driven to rotate simultaneously by the same driving mechanism 120, thereby implementing UV curing operations on two wafers at the same time. Of course, the number of light sources can be further increased, so as to implement UV curing operations on more wafers at the same time.

[0025] The base 110 is the installation base of the UV curing system and can be the upper cover of the process chamber. The driving mechanism 120 is arranged on the base 110, and the driving mechanism 120 is used to drive the first light source 130 and the second light source 140 to rotate in at least one single rotation cycle. Optionally, the driving mechanism 120 includes a driving source 121 and a transmission assembly, the driving source 121 is connected to the transmission assembly, the first light source 130 and the second light source 140 are both arranged in the transmission assembly, and the driving mechanism 120 drives the first light source 130 and the second light source 140 to rotate in at least one single rotation cycle through the transmission assembly. Optionally, the driving source 121 here can be a motor. It should be noted that in a single rotation cycle, the first light source 130 and the second light source 140 can rotate in one direction, or in two opposite directions, or even multiple reciprocating rotations.

[0026] The position detection component is used to detect the positions of the first light source 130 and the second light source 140 within the above-mentioned single rotation cycle. Specifically, the position detection component is used to obtain at least two groups of detection signals corresponding to different positions within a single rotation cycle of the first light source 130 and the second light source 140, and transmit the detection signals to the control device. In other words, within a single rotation cycle, when the first light source 130 and the second light source 140 are in different positions, the position detection component can obtain at least two groups of detection signals corresponding to the different positions, and the detection signals can indicate the positions of the first light source 130 and the second light source 140.

[0027] Optionally, the position detection component includes a plurality of sensors and a trigger, and the plurality of sensors are disposed on the base 110. When the driving mechanism 120 includes a driving source 121 and a transmission component, the trigger can be disposed in the transmission component, that is, the plurality of sensors can be fixed, and the trigger moves with the transmission component, and the movement of the trigger can be rotation, movement, or even a combination of rotation and movement. Optionally, the number of triggers can be one, and the same trigger can be opposed to different sensors in sequence; or, the number of triggers is at least two, and different triggers can be opposed to different sensors. In addition, the sensor can be a photoelectric sensor, a piezoelectric sensor, a magnetic sensor, or other type of sensor, and the trigger can be a block component.

[0028] Further optionally, the position detection component may include multiple sensors and multiple triggers, and the multiple triggers are all arranged on the transmission component. When the first light source 130 and the second light source 140 are located at the first position within a single rotation cycle, at least one sensor is opposite to a trigger, thereby triggering the sensor to send a signal; when the first light source 130 and the second light source 140 are located at the second position within a single rotation cycle, at least one sensor is opposite to a trigger, thereby triggering the sensor to send a signal. It should be noted that the sensor and the trigger described here are opposite, which means that the distance between the sensor and the trigger is close enough to ensure that the sensor is triggered. In addition, in the first position and the second position, different sensors can be triggered by different triggers, so that the detection signal can be more conveniently and accurately obtained through the corresponding relationship between the sensor and the trigger.

[0029] The control device is used to obtain the actual rotation parameters when the driving mechanism 120 drives the first light source 130 and the second light source 140 to rotate to the corresponding positions in a single rotation cycle according to the detection signal, and when the theoretical rotation parameters and the actual rotation parameters meet the correction conditions, the theoretical rotation parameters of the driving mechanism 120 in the next single rotation cycle are corrected according to the actual rotation parameters. Optionally, the theoretical rotation parameters here may include the theoretical rotation angle of the driving mechanism 120; the actual rotation parameters may include the actual rotation angle of the driving mechanism 120; the theoretical rotation parameters and the actual rotation parameters satisfying the correction conditions means that the theoretical rotation parameters do not match the actual rotation parameters, thereby causing the driving mechanism 120 to be unable to rotate the first light source 130 and the second light source 140 to the target position, or there is a large difference between the position of the first light source 130 and the second light source 140 after rotation and the target position.

[0030] In the embodiment of the present application, during the rotation of the first light source 130 and the second light source 140, the position detection component can obtain at least two groups of detection signals corresponding to different positions within a single rotation cycle of the first light source 130 and the second light source 140, and transmit the detection signals to the control device, so that the control device can obtain the actual rotation parameters of the driving mechanism 120 driving the first light source 130 and the second light source 140 to rotate to the corresponding positions within a single rotation cycle. By comparing the actual rotation parameters with the theoretical rotation parameters, the error size of the rotational motion of the driving mechanism 120 can be known. Finally, when the error needs to be corrected, the theoretical rotation parameters of the driving mechanism 120 are adjusted, so that the actual rotation angle of the driving mechanism 120 driving the first light source 130 and the second light source 140 to rotate to the corresponding positions within a single rotation cycle tends to be consistent with the theoretical rotation angle, so that the light emitted by the first light source 130 and the second light source 140 can scan the wafer more evenly. The use of this embodiment can improve the stability and reliability of the UV curing process, thereby improving the processing quality of the wafer.

[0031] In addition, when the position detection component includes multiple sensors, once some of the sensors are damaged, the other sensors can still work, thereby ensuring that the UV curing system can operate normally. It is not easy for the driving mechanism 120 to continue to drive the first light source 130 and the second light source 140 to rotate due to sensor damage, thereby avoiding hardware damage caused by this situation.

[0032] Optionally, the sensor includes a first sensor 151 and a second sensor 153, and the trigger includes a first trigger 152 and a second trigger 154. When the first light source 130 and the second light source 140 are located at the first position, the first sensor 151 is opposite to the first trigger 152; when the first light source 130 and the second light source 140 are located at the second position, the second sensor 153 is opposite to the second trigger 154. At this time, the first trigger 152 corresponds to the first sensor 151, so the first sensor 151 will be triggered only when the first trigger 152 is opposite to the first sensor 151, and if the second trigger 154 is opposite to the first sensor 151, the first sensor 151 will not be triggered. Similarly, the second trigger 154 corresponds to the second sensor 153, so the second sensor 153 will be triggered only when the second trigger 154 is opposite to the second sensor 153. Therefore, this embodiment does not need to distinguish whether the triggering member opposite to the first sensor 151 is the corresponding triggering member when the first sensor 151 is triggered. Similarly, it does not need to distinguish whether the triggering member opposite to the second sensor 153 is the corresponding triggering member when the second sensor 153 is triggered. Therefore, this embodiment can simplify the control operation of the UV curing system.

[0033] The structural form of the transmission assembly can be flexibly selected, for example, a gear transmission assembly, a belt transmission assembly, a chain transmission assembly, etc. can be adopted. When the transmission assembly is a belt transmission assembly, the transmission assembly can include a transmission belt 122, a driving wheel 123, a first driven wheel 124, a second driven wheel 125, and even an idler wheel. The number of the idler wheels can be one, two or more. When the number of the idler wheels is at least two, the transmission assembly can also include a first idler wheel 126 and a second idler wheel 127. The transmission belt 122 is wound around the driving wheel 123, the first driven wheel 124, the second driven wheel 125, the first idler wheel 126 and the second idler wheel 127, the driving source 121 is connected to the driving wheel 123, the first light source 130 is connected to the first driven wheel 124, and the second light source 140 is connected to the second driven wheel 125. When the driving source 121 outputs a rotational driving force, the driving wheel 123 rotates accordingly, thereby driving the transmission belt 122 to move, and the transmission belt 122 further drives the first driven wheel 124, the second driven wheel 125, the first idler wheel 126 and the second idler wheel 127 to rotate, and the first light source 130 and the second light source 140 rotate under the drive of the first driven wheel 124 and the second driven wheel 125.

[0034] When the transmission assembly includes the transmission belt 122, the driving wheel 123, the first driven wheel 124, the second driven wheel 125, the first idler wheel 126 and the second idler wheel 127, the first trigger 152 and the second trigger 154 are respectively arranged on any two of the transmission belt 122, the driving wheel 123, the first driven wheel 124, the second driven wheel 125, the first idler wheel 126 and the second idler wheel 127, that is, the first trigger 152 and the second trigger 154 are arranged on different rotating components. Compared with the embodiment in which the first trigger 152 and the second trigger 154 are arranged on the same rotating component, when the first trigger 152 and the second trigger 154 are arranged on different rotating components, the rotation tracks of the first trigger 152 and the second trigger 154 are not easy to overlap, and thus it is not easy for the second trigger 154 to be opposite to the first sensor 151 and the first trigger 152 to be opposite to the second sensor 153, so that it is more convenient to detect the positions of the first light source 130 and the second light source 140.

[0035] Further optionally, since the first driven wheel 124 and the second driven wheel 125 are far from the driving source 121, the first trigger member 152 can be set on the first driven wheel 124, and the second trigger member 154 can be set on the second driven wheel 125, so that the disassembly and assembly of the first trigger member 152 and the second trigger member 154 are not easily restricted by the driving source 121. Furthermore, the first trigger member 152 is set at the edge of the first driven wheel 124, and the second trigger member 154 is set at the edge of the second driven wheel 125, so that the first sensor 151 and the second sensor 153 can sense the first trigger member 152 and the second trigger member 154 more sensitively.

[0036] The specific arrangement positions of the first sensor 151, the second sensor 153, the first trigger member 152 and the second trigger member 154 can be flexibly selected, as long as the trigger signals can be sent out successively within a single rotation cycle. The line between the first sensor 151 and the rotation center of the first driven wheel 124 can be defined as the first line, the line between the second sensor 153 and the rotation center of the second driven wheel 125 can be defined as the second line, and the line between the second trigger member 154 and the rotation center of the second driven wheel 125 can be defined as the third line. The first line can be parallel to the second line, so that it is easier to arrange the first sensor 151 and the second sensor 153.

[0037] Furthermore, when the first sensor 151 is opposite to the first trigger member 152, the angle between the second connecting line and the third connecting line is greater than or equal to the first preset value, and less than or equal to the rotation angle of the first light source 130 and the second light source 140 in a single rotation cycle. In other words, between the moment when the first sensor 151 is triggered and the moment when the second sensor 153 is triggered, the rotation angle of the first light source 130 and the second light source 140 cannot be too small, otherwise the detection accuracy of the position detection component will be reduced, and at the same time, the rotation angle cannot exceed the rotation angle of the first light source 130 and the second light source 140 in a single rotation cycle, otherwise position detection cannot be achieved in a single rotation cycle.

[0038] Optionally, the first preset value can be flexibly set. In order to improve the detection accuracy of the position detection component, the first preset value can be set to 30°, that is, between the moment when the first sensor 151 is triggered and the moment when the second sensor 153 is triggered, the rotation angle of the first light source 130 and the second light source 140 is at least 30°. In addition, the rotation angle of the first light source 130 and the second light source 140 in a single rotation cycle can be 180°. Through a single rotation of the first light source 130 and the second light source 140, the light emitted by the first light source 130 can be uniformly swept across one wafer, and the light emitted by the second light source 140 can be uniformly swept across another wafer. Therefore, such a setting can achieve uniform coverage of the wafer with ultraviolet light with a minimum number of rotations, thereby improving the curing efficiency. Furthermore, when the first sensor 151 is opposite to the first trigger member 152, the angle between the second line and the third line can be equal to 180°. Since the rotation angle of the first light source 130 and the second light source 140 in a single rotation cycle is usually 180°, this setting can meet the working requirements of the UV curing system in most cases.

[0039] The first light source 130 and the second light source 140 usually have an initial position, and the first light source 130 and the second light source 140 use the initial position as the rotation starting point. When a single rotation cycle ends, the first light source 130 and the second light source 140 return to the initial position to facilitate the next rotation. The starting point corresponding to the single rotation cycle can be the initial position mentioned here, or a position different from the initial position. Based on this, optionally, the UV curing system also includes a third sensor and a third trigger, the third sensor is arranged on the base 110, and the third trigger is arranged on the transmission assembly. When the first light source 130 and the second light source 140 are in the initial position, the third sensor is opposite to the third trigger. When the third sensor is triggered, it means that the first light source 130 and the second light source 140 are already in the initial position. In this embodiment, the first light source 130 and the second light source 140 can start to rotate from the initial position, reach the end position after the first position and the second position, and then reach the initial position after the second position and the first position. As the number of sensors increases, the ability of the UV curing system to cope with the unexpected situation of sensor damage is improved accordingly.

[0040] Optionally, the control device may include:

[0041] A first acquisition module is used to acquire theoretical rotation parameters of the driving mechanism 120 in a single rotation cycle;

[0042] A second acquisition module is used to acquire actual rotation parameters of the first light source 130 and the second light source 140 driven by the driving mechanism 120 to rotate to corresponding positions within a single rotation cycle according to the detection signal of the position detection component;

[0043] The correction module is used to correct the theoretical rotation parameters of the driving mechanism 120 in the next single rotation cycle according to the actual rotation parameters when the theoretical rotation parameters and the actual rotation parameters meet the correction conditions.

[0044] The control device can perform different operations through different modules, thereby realizing the functions of the control device more reliably.

[0045] The control device in the embodiment of the present application can be a device, or a component, integrated circuit, or chip in a terminal. The device can be a mobile electronic device or a non-mobile electronic device. Exemplarily, the mobile electronic device can be a mobile phone, a tablet computer, a laptop computer, a PDA, an in-vehicle electronic device, a wearable device, etc., and the non-mobile electronic device can be a server, a network attached storage (NAS), a personal computer (PC), etc., which is not specifically limited in the embodiment of the present application.

[0046] The control device in the embodiment of the present application may be a device having an operating system. The operating system may be an Android operating system, an iOS operating system, or other possible operating systems, which are not specifically limited in the embodiment of the present application.

[0047] like Figure 3 As shown, the embodiment of the present application further discloses a control method of a UV curing system, which is applied to the UV curing system described in any of the above embodiments, and includes:

[0048] S100 , driving the first light source 130 and the second light source 140 to rotate in at least one single rotation cycle, and acquiring theoretical rotation parameters of the driving mechanism 120 in the single rotation cycle.

[0049] Controlling the driving mechanism 120 to work can drive the first light source 130 and the second light source 140 to rotate in at least one single rotation cycle. The theoretical rotation parameter here may include the rotation angle of the driving mechanism 120 in a single rotation cycle. Optionally, the theoretical rotation parameter may be a theoretical rotation parameter of the driving mechanism 120 when the error is not considered, or may be a corrected rotation parameter after the error is considered.

[0050] S200 , acquiring at least two groups of detection signals corresponding to different positions within a single rotation cycle of the first light source 130 and the second light source 140 .

[0051] In a single rotation cycle, when the first light source 130 and the second light source 140 are at different positions, the position detection component can obtain at least two groups of corresponding detection signals, and the detection signals can indicate the positions of the first light source 130 and the second light source 140 .

[0052] S300 , obtaining actual rotation parameters of the first light source 130 and the second light source 140 driven by the driving mechanism 120 to rotate to corresponding positions within a single rotation cycle according to the detection signal.

[0053] That is, the actual rotation parameter of the driving mechanism 120 between the moments when the position detection component obtains the detection signal is obtained. Optionally, the actual rotation parameter may include the rotation angle of the driving mechanism 120.

[0054] S400: When the theoretical rotation parameter and the actual rotation parameter satisfy a correction condition, the theoretical rotation parameter of the driving mechanism 120 in the next single rotation cycle is corrected according to the actual rotation parameter.

[0055] When the theoretical rotation parameters do not match the actual rotation parameters, it means that the driving mechanism 120 cannot rotate the first light source 130 and the second light source 140 to the target position, or there is a large difference between the position of the first light source 130 and the second light source 140 after rotation and the target position. At this time, it is necessary to correct the theoretical rotation parameters of the driving mechanism 120 in the next single rotation cycle, so that the driving mechanism 120 can rotate the first light source 130 and the second light source 140 to the target position after moving according to the theoretical rotation parameters, or the difference between the position of the first light source 130 and the second light source 140 after rotation and the target position is within an acceptable range.

[0056] The above control method can obtain the actual rotation parameters of the corresponding position of the driving mechanism 120 within a single rotation cycle. By comparing the actual rotation parameters with the theoretical rotation parameters of the corresponding position of the driving mechanism 120 within a single rotation cycle, the error size of the rotational motion of the driving mechanism 120 can be known. Finally, when the error needs to be corrected, the theoretical rotation parameters of the driving mechanism 120 are adjusted, so that the actual rotation angle of the corresponding position of the driving mechanism 120 within a single rotation cycle tends to be consistent with the theoretical rotation angle, so that the light emitted by the first light source 130 and the second light source 140 can scan the wafer more evenly, thereby improving the processing quality of the wafer.

[0057] It should be noted that, in the process of judging whether the theoretical rotation parameters and the actual rotation parameters satisfy the correction conditions, it is necessary to compare the parameters of the same nature. Specifically, the theoretical rotation angle of the first light source 130 and the second light source 140 in the entire single rotation cycle can be compared with the actual rotation angle, or the theoretical rotation angle of the corresponding positions of the first light source 130 and the second light source 140 in a single rotation cycle can be compared with the actual rotation angle. The embodiments of the present application do not limit this.

[0058] Optionally, the driving mechanism 120 may include a stepping motor. In this case, the theoretical rotation parameter may include the theoretical output steps when the driving mechanism 120 drives the first light source 130 and the second light source 140 to rotate between the first position and the second position in a single rotation cycle, and the actual rotation parameter includes the actual output steps when the driving mechanism 120 drives the first light source 130 and the second light source 140 to rotate between the first position and the second position. The correction conditions mentioned above are:

[0059] |S1-S0| / S0>second preset value.

[0060] Wherein, S1 is the actual output step number, and S0 is the theoretical output step number. That is, the absolute value of the difference between the actual output step number and the theoretical output step number and the ratio between the theoretical output step number are greater than the second preset value. The second preset value here is an acceptable error value. Once |S1-S0| / S0 is greater than the acceptable error value, the rotation parameter of the drive mechanism 120 needs to be corrected. Optionally, the second preset value can be 0.05, 0.03, 0.01, 0.001 or other values, which are not limited in the embodiments of the present application.

[0061] The above embodiment sets an acceptable range for the error when the first light source 130 and the second light source 140 rotate. Within the acceptable range, the rotation parameters of the driving mechanism 120 do not need to be corrected. Therefore, this embodiment reduces the burden of the control program of the UV curing system, so that the control program can run more reliably.

[0062] In the above step S400, when the theoretical rotation parameters of the driving mechanism 120 in the next single rotation cycle are corrected, the corrected theoretical rotation parameters can be parameters such as the rotation angle and the number of output steps corresponding to the current single rotation cycle. If the rotation range of the first light source 130 and the second light source 140 in the next single rotation cycle is the same as the current single rotation cycle, the corrected theoretical rotation parameters can be directly used. If the rotation range of the first light source 130 and the second light source 140 in the next single rotation cycle is different from the current single rotation cycle, the corrected theoretical rotation parameters cannot be directly used and further calculation is required. For this reason, in an optional embodiment, the theoretical rotation parameters of the driving mechanism 120 in the next single rotation cycle are corrected according to the actual rotation parameters in the above step S400, specifically:

[0063] The corrected output step number is obtained according to the actual output step number. The corrected output step number is the output step number corresponding to each rotation of the driving mechanism 120 by 1°. The corrected output step number satisfies the following relationship:

[0064] S2 = S1 / θ;

[0065] Wherein, θ is the rotation angle of the driving mechanism 120 when it rotates between the first position and the second position in the current single rotation cycle. After such setting, no matter what the rotation range of the first light source 130 and the second light source 140 is in the next single rotation cycle, the corrected theoretical rotation parameter is the output step number corresponding to each rotation of the driving mechanism 120 by 1°. In the next single rotation cycle, the corrected output step number can be directly used to control the rotation of the driving mechanism 120. Therefore, this embodiment can be applied to a single rotation cycle of any rotation angle, which is more convenient for the control of the UV curing system.

[0066] In the actual operation process, the following two situations may occur: First, when the first sensor 151 is triggered, the rotation angle of the driving mechanism 120 reaches the theoretical angle of rotation between the first position and the second position, and the second sensor 153 is still not triggered. Then, as the driving mechanism 120 continues to rotate, the second sensor 153 is triggered. In this case, the theoretical output step number is less than the actual output step number; second, when the first sensor 151 is triggered, the rotation angle of the driving mechanism 120 does not reach the theoretical angle of rotation between the first position and the second position, and the second sensor 153 is triggered. In this case, the theoretical output step number is greater than the actual output step number. In the latter case, it can be concluded that the driving mechanism 120 needs to be calibrated before the current single rotation cycle ends. Based on this, optionally, the control method of the UV curing system also includes:

[0067] S500. When |S1-S0| / S0>the second preset value and the theoretical output step number is greater than the actual output step number, determine whether the correction mode of the drive mechanism 120 is the real-time correction mode. If so, turn off the drive mechanism 120 or control the drive mechanism 120 to rotate with the correct output step number. Otherwise, control the drive mechanism 120 to continue running.

[0068] When the correction mode of the driving mechanism 120 is the real-time correction mode, while correcting the theoretical rotation parameters of the driving mechanism 120, the driving mechanism 120 is turned off or controlled to rotate with the correct output step number, so that the driving mechanism 120 no longer rotates with an excessively large driving error, so as to correct the rotation parameters of the driving mechanism 120 more quickly. When the correction mode of the driving mechanism 120 is not the real-time correction mode, that is, the correction mode of the driving mechanism 120 is the delayed correction mode, the driving mechanism 120 can continue to drive the first light source 130 and the second light source 140 to rotate, so that the light emitted by the first light source 130 and the second light source 140 sweeps a larger range of the wafer in the current single rotation cycle, thereby minimizing the adverse effects of the driving error on the uniformity of light irradiation.

[0069] As mentioned above, when |S1-S0| / S0 is greater than the second preset value, it is necessary to calibrate the rotation parameters of the driving mechanism 120. Furthermore, the control method of the UV curing system further includes:

[0070] S600, when |S1-S0| / S0≤the second preset value, the output step number corresponding to each rotation of 1° of the driving mechanism 120 in the next single rotation cycle is S0 / θ.

[0071] Wherein, θ is the rotation angle of the drive mechanism 120 when it rotates between the first position and the second position in the current single rotation cycle. In other words, when |S1-S0| / S0≤the second preset value, that is, the absolute value of the difference between the actual output step number and the theoretical output step number and the ratio between the theoretical output step number is less than or equal to the second preset value, it means that the driving error is within an acceptable range, and the rotation parameters of the drive mechanism 120 may not be corrected at this time. Therefore, in the next single rotation cycle, the drive mechanism 120 still drives the first light source 130 and the second light source 140 to rotate with the theoretical output step number corresponding to the current single rotation cycle. This embodiment can reduce the burden of the control program of the ultraviolet curing system, so that the control program can run more reliably. At the same time, in the next single rotation cycle, the theoretical output step number corresponding to each rotation of the drive mechanism 120 by 1° can be directly used as the driving basis, so that it is applicable to a single rotation cycle of any rotation angle, which is more convenient for the control of the ultraviolet curing system.

[0072] Further optionally, the control method of the UV curing system also includes:

[0073] S700: When |S1-S0| / S0>the third preset value, an alarm signal is issued.

[0074] Among them, the third preset value is greater than the second preset value. When |S1-S0| / S0>the third preset value, it means that the driving error of the driving mechanism 120 is too large and cannot be adjusted by correction, and the driving mechanism 120 may even have failed. At this time, an alarm signal needs to be issued to remind the operator so that the operator can perform the corresponding operation in time. Optionally, the third preset value here can be 0.1, 0.05, 0.03, 0.01, 0.001, etc., and the embodiment of the present application is not limited to this.

[0075] It is understandable that the operation of correcting the rotation parameters of the driving mechanism 120 can be performed in each single rotation cycle. However, considering that the driving error of the driving mechanism 120 needs to be accumulated for a period of time before reaching the level that requires correction, in another embodiment, before obtaining the theoretical rotation parameters of the driving mechanism 120 in a single rotation cycle, the following steps are further included:

[0076] S101, obtaining a calibration instruction.

[0077] The correction instruction refers to an instruction for executing a correction operation, and the instruction can be input by an operator through a structure such as a button.

[0078] At this time, the theoretical rotation parameters of the driving mechanism 120 in a single rotation cycle are obtained, specifically:

[0079] In response to the above correction instruction, the theoretical rotation parameters of the driving mechanism 120 in a single rotation cycle are obtained.

[0080] That is, the above steps are performed only when the correction instruction is received. It can be seen that this embodiment can reduce the number of times the correction operation is performed, thereby simplifying the control method of the ultraviolet curing system.

[0081] The following is Figure 1 and Figure 2 The illustrated embodiment describes the UV curing system disclosed in the present application in detail. For the convenience of description, the positions of the first light source 130 and the second light source 140 are marked as 0°, 90°, 180°, and 270°, respectively.

[0082] For example, when the first light source 130 and the second light source 140 rotate from 0° to 180°, and the angle of rotation of the driving mechanism 120 between the first position and the second position is 180°, the theoretical output step number of the driving mechanism 120 when rotating between the first position and the second position is S0, and the actual output step number of the driving mechanism 120 when rotating between the first position and the second position is S1. By comparing S0 and S1, the following two situations can be divided:

[0083] In the first case, S1 is greater than S0, that is, due to the existence of the driving error, after the driving mechanism 120 outputs S0 steps, the second sensor 153 is still not triggered. If (S1-S0) / S0 is less than or equal to the second preset value, then in the next single rotation cycle, the driving mechanism 120 will output S0 / 180 steps for every 1° rotation, that is, in the next rotation from 0° to 180° or other rotation angles of 180°, the total output steps will be S0 output, and no correction will be performed; if (S1-S0) / S0 is greater than the second preset value, then in the next single rotation cycle, the driving mechanism 120 will output S1 / 180 steps for every 1° rotation, that is, in the next rotation from 0° to 180° or other rotation angles of 180°, the total output steps will be S1 output. Then the output steps of the next single rotation cycle are judged again. If the rotation range of the first light source 130 and the second light source 140 is not 0° to 180° in the next single rotation cycle, the system will calculate according to the calibration result of the current single rotation cycle to determine the theoretical output step number of the drive mechanism 120. For example, after calibration, the drive mechanism 120 will output S0 / 180 steps per rotation of 1° in the next single rotation cycle. The next single rotation cycle requires the first light source 130 and the second light source 140 to rotate from 90° to 225° (rotation angle is 135°). At this time, the theoretical output step number of the drive mechanism 120 is 135*S0 / 180, and then the actual output step number of the drive mechanism 120 when rotating between the first position and the second position is recalibrated. If (S1-S0) / S0>the third preset value, it can be determined that the drive mechanism 120 has a large damage or the sensor fails. At this time, the hardware needs to be repaired in time to avoid unnecessary damage or personal injury, so an alarm signal can be issued at this time, and all actions of the entire UV curing system can be stopped.

[0084] In the second case, S0 is greater than S1, that is, due to the existence of the driving error, the second sensor 153 has been triggered before the driving mechanism 120 outputs S0 steps. If (S0-S1) / S0 is less than or equal to the second preset value, the output steps of the driving mechanism 120 are not corrected, and the driving mechanism 120 outputs S0 / 180 steps per rotation of 1° in the next single rotation cycle; if (S0-S1) / S0 is greater than the second preset value, it can be further determined whether the correction mode of the driving mechanism 120 is the real-time correction mode. If it is the real-time correction mode, the driving mechanism 120 is immediately turned off, and at the same time, the next rotation from 0° to 180° or other rotation angle of 180° is output according to the total output steps of S1; if it is the delayed correction mode, the driving mechanism 120 is controlled to continue to operate, and at the same time, in the next single rotation cycle, the driving mechanism 120 outputs S1 / 180 steps per rotation of 1°. If S0-S1 / S0> the third preset value, it can be determined that the drive mechanism 120 is seriously damaged or the sensor is faulty. At this time, the hardware needs to be repaired in time to avoid unnecessary damage or personal injury, so an alarm signal can be issued at this time, and all actions of the entire UV curing system can be stopped.

[0085] In another embodiment, the first light source 130 and the second light source 140 rotate from 0° to 180°, and when the driving mechanism 120 is in the first position, the first trigger member 152 is located at 5°, and the second trigger member 154 is located at 175°. The difference between this embodiment and the embodiment in which the angle of rotation of the driving mechanism 120 between the first position and the second position is 180° is that when the second sensor 153 is opposite to the second trigger member 154, the single rotation cycle of the first light source 130 and the second light source 140 is not ended. When the output step number of the driving mechanism 120 needs to be corrected, in the next single rotation cycle, the driving mechanism 120 outputs S1 / 170 steps per rotation of 1°. For the remaining rotational movement of the first light source 130 and the second light source 140, in this example, the remaining rotation angle of the first light source 130 and the second light source 140 is 180°-175°=5°. If the correction mode of the driving mechanism 120 is the real-time correction mode, then within the remaining rotation angle, the driving mechanism 120 rotates with a total step number of 5*S1 / 170; if the correction mode of the driving mechanism 120 is the delayed correction mode, the driving mechanism 120 is controlled to rotate with the theoretical output step number of the current single rotation cycle, and at the same time, in the next single rotation cycle, the driving mechanism 120 outputs S1 / 170 steps for every rotation of 1°.

[0086] It should be noted that, in this article, the terms "comprise", "include" or any other variant thereof are intended to cover non-exclusive inclusion, so that the process, method, article or device including a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise one..." do not exclude the presence of other identical elements in the process, method, article or device including the element. In addition, it should be pointed out that the scope of the methods and devices in the embodiments of the present application is not limited to performing functions in the order shown or discussed, and may also include performing functions in a substantially simultaneous manner or in reverse order according to the functions involved, for example, the described method may be performed in an order different from that described, and various steps may also be added, omitted, or combined. In addition, the features described with reference to certain examples may be combined in other examples.

[0087] Through the description of the above implementation methods, those skilled in the art can clearly understand that the above-mentioned embodiment methods can be implemented by means of software plus a necessary general hardware platform, and of course by hardware, but in many cases the former is a better implementation method. Based on such an understanding, the technical solution of the present application, or the part that contributes to the prior art, can be embodied in the form of a software product, which is stored in a storage medium (such as ROM / RAM, a disk, or an optical disk), and includes a number of instructions for a terminal (which can be a mobile phone, a computer, a server, or a network device, etc.) to execute the methods described in each embodiment of the present application.

[0088] The embodiments of the present application are described above in conjunction with the accompanying drawings, but the present application is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of the present application, ordinary technicians in this field can also make many forms without departing from the purpose of the present application and the scope of protection of the claims, all of which are within the protection of the present application.

Claims

1. A UV curing system, It is characterized in that It comprises a driving mechanism (120), a first light source (130), a second light source (140), a position detection component and a control device; wherein: The driving mechanism (120) is used to drive the first light source (130) and the second light source (140) to rotate in at least one single rotation cycle; The position detection component is used to successively obtain at least two groups of detection signals corresponding to different positions within a single rotation cycle of the first light source (130) and the second light source (140), and transmit the detection signals to the control device; The control device is used to obtain actual rotation parameters of the driving mechanism (120) driving the first light source (130) and the second light source (140) to rotate to corresponding positions within a single rotation cycle based on the detection signal, and to correct the theoretical rotation parameters of the driving mechanism (120) within the next single rotation cycle based on the actual rotation parameters when the theoretical rotation parameters and the actual rotation parameters meet a correction condition.

2. The UV curing system according to claim 1, It is characterized in that The driving mechanism (120) comprises a driving source (121) and a transmission assembly, the driving source (121) is connected to the transmission assembly, the first light source (130) and the second light source (140) are both arranged on the transmission assembly, and the driving mechanism (120) drives the first light source (130) and the second light source (140) to rotate in at least one single rotation cycle via the transmission assembly; The position detection component comprises a plurality of sensors and a plurality of triggering members, wherein the plurality of triggering members are arranged on the transmission component; when the first light source (130) and the second light source (140) are located at a first position within the single rotation cycle, at least one of the sensors is opposite to one of the triggering members; when the first light source (130) and the second light source (140) are located at a second position within the single rotation cycle, at least one of the sensors is opposite to one of the triggering members.

3. The UV curing system according to claim 2, It is characterized in that The sensor comprises a first sensor (151) and a second sensor (153), and the trigger component comprises a first trigger component (152) and a second trigger component (154); When the first light source (130) and the second light source (140) are located at the first position, the first sensor (151) is opposite to the first trigger member (152); when the first light source (130) and the second light source (140) are located at the second position, the second sensor (153) is opposite to the second trigger member (154).

4. The UV curing system according to claim 3, It is characterized in that The transmission assembly comprises a transmission belt (122), a driving wheel (123), a first driven wheel (124), a second driven wheel (125), a first idle wheel (126) and a second idle wheel (127); the transmission belt (122) is wound around the driving wheel (123), the first driven wheel (124), the second driven wheel (125), the first idle wheel (126) and the second idle wheel (127); the driving source (121) is connected to the driving wheel (123); the first light source (130) is connected to the first driven wheel (124); and the second light source (140) is connected to the second driven wheel (125); The first trigger member (152) and the second trigger member (154) are respectively arranged on any two of the transmission belt (122), the driving wheel (123), the first driven wheel (124), the second driven wheel (125), the first idle wheel (126) and the second idle wheel (127).

5. The UV curing system according to claim 4, It is characterized in that The first trigger member (152) is arranged on the first driven wheel (124), and the second trigger member (154) is arranged on the second driven wheel (125); A line connecting the first sensor (151) and the rotation center of the first driven wheel (124) is a first line, a line connecting the second sensor (153) and the rotation center of the second driven wheel (125) is a second line, a line connecting the second trigger member (154) and the rotation center of the second driven wheel (125) is a third line, and the first line is parallel to the second line; When the first sensor (151) and the first trigger member (152) are opposite to each other, the angle between the second connecting line and the third connecting line is greater than or equal to a first preset value, and less than or equal to a rotation angle of the first light source (130) and the second light source (140) in the single rotation cycle.

6. The UV curing system according to claim 5, It is characterized in that The first preset value is 30°, and the rotation angle of the first light source (130) and the second light source (140) in the single rotation cycle is 180°.

7. The UV curing system according to claim 3, It is characterized in that It also comprises a third sensor and a third triggering member, and when the first light source (130) and the second light source (140) are in the initial position, the third sensor is opposite to the third triggering member.

8. The UV curing system according to any one of claims 1 to 7, It is characterized in that The control device comprises: A first acquisition module, used for acquiring theoretical rotation parameters of the driving mechanism (120) within the single rotation cycle; A second acquisition module, for acquiring, based on a detection signal from the position detection component, actual rotation parameters of the first light source (130) and the second light source (140) driven by the drive mechanism (120) to rotate to corresponding positions within a single rotation cycle; A correction module is used to correct the theoretical rotation parameter of the driving mechanism (120) in the next single rotation cycle according to the actual rotation parameter when the theoretical rotation parameter and the actual rotation parameter meet a correction condition.

9. A control method for a UV curing system, applied to the UV curing system according to any one of claims 1 to 8, It is characterized in that include: driving the first light source (130) and the second light source (140) to rotate in at least one single rotation cycle, and acquiring theoretical rotation parameters of the driving mechanism (120) in the single rotation cycle; At least two groups of detection signals corresponding to different positions are successively acquired within a single rotation cycle of the first light source (130) and the second light source (140); Acquiring actual rotation parameters of the driving mechanism (120) driving the first light source (130) and the second light source (140) to rotate to corresponding positions within a single rotation cycle according to the detection signal; When the theoretical rotation parameter and the actual rotation parameter satisfy a correction condition, the theoretical rotation parameter of the driving mechanism (120) in the next single rotation cycle is corrected according to the actual rotation parameter.

10. The control method according to claim 9, It is characterized in that The theoretical rotation parameter comprises a theoretical output step number when the driving mechanism (120) drives the first light source (130) and the second light source (140) to rotate between a first position and a second position within a single rotation cycle, and the actual rotation parameter comprises an actual output step number when the driving mechanism (120) drives the first light source (130) and the second light source (140) to rotate between the first position and the second position; The calibration conditions are: | S1-S0 | / S0>second preset value; Among them, S1 is the actual output step number, and S0 is the theoretical output step number.

11. The control method according to claim 10, It is characterized in that The step of correcting the theoretical rotation parameter of the drive mechanism (120) in the next single rotation cycle according to the actual rotation parameter is specifically: A corrected output step number is obtained according to the actual output step number, the corrected output step number being the output step number corresponding to each rotation of the drive mechanism (120) by 1°, and the corrected output step number satisfies the following relationship: S2=S1 / θ; Wherein, θ is the rotation angle of the driving mechanism (120) when it rotates between the first position and the second position in the current single rotation cycle.

12. The control method according to claim 11, It is characterized in that The control method further comprises: When |S1-S0| / S0>a second preset value and the theoretical output step number is greater than the actual output step number, it is determined whether the correction mode of the drive mechanism (120) is a real-time correction mode; if so, the drive mechanism (120) is turned off or the drive mechanism (120) is controlled to rotate at the correction output step number; otherwise, the drive mechanism (120) is controlled to continue to operate.

13. The control method according to claim 10, It is characterized in that The control method further comprises: When | S1-S0 | / S0 ≤ the second preset value, the number of output steps corresponding to each rotation of 1° of the drive mechanism (120) in the next single rotation cycle is S0 / θ; Wherein, θ is the rotation angle of the driving mechanism (120) when it rotates between the first position and the second position in the current single rotation cycle.

14. The control method according to claim 10, It is characterized in that The control method further comprises: When | S1-S0 | / S0>the third preset value, an alarm signal is issued; Wherein, the third preset value is greater than the second preset value.

15. The control method according to claim 9, It is characterized in that Before obtaining the theoretical rotation parameters of the driving mechanism (120) within the single rotation cycle, the method further comprises: Get correction instructions; The step of obtaining the theoretical rotation parameters of the driving mechanism (120) within the single rotation cycle is specifically: In response to the correction instruction, a theoretical rotation parameter of the driving mechanism (120) in the single rotation cycle is obtained.

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