A cathode edge conductive mechanism and cathode conductive module of horizontal electroplating equipment

Abstract

The present invention discloses a cathode edge conductive mechanism and a cathode conductive module of a horizontal electroplating device, wherein the cathode edge conductive mechanism comprises an upper conductive belt, a lower conductive belt, an upper conductive belt driving assembly, a lower conductive belt driving assembly, an upper conductive belt pressing assembly and a lower conductive belt pressing assembly, wherein the upper conductive belt and the lower conductive belt are arranged opposite to each other up and down, the upper conductive belt driving assembly is connected to the upper conductive belt and drives the upper conductive belt to rotate, the upper conductive belt pressing assembly drives the lower end of the upper conductive belt to move downward, presses the edge of the film to the lower conductive belt and tightens the upper conductive belt, the lower conductive belt driving assembly is connected to the lower conductive belt and drives the lower conductive belt to rotate, the lower conductive belt pressing assembly drives the lower end of the lower conductive belt to move downward, and tightens the lower conductive belt. The present invention can effectively solve the problem of many product holes and large hole diameters by means of edge pressing and conducting electricity.

Description

Technical Field

[0001] The present invention relates to the technical field of electroplating equipment, and in particular to a cathode edge conductive mechanism and a cathode conductive module of a horizontal electroplating equipment. Background Art

[0002] Electroplating is the process of plating a thin layer of metal or alloy on the metal surface by electrolysis. It is a process that uses electrolysis to make a layer of metal film adhere to the surface of metal or other material parts, thereby preventing metal oxidation (such as rust), improving wear resistance, conductivity, reflectivity and enhancing aesthetics. With the development of modern industrial technology, the demand for surface coating of thin film substrates is increasing, and it is widely used in high-performance car films, plasma TV flat-panel displays, touch screens, solar cells, flexible printed circuit boards (FPCs), chip-on-film (COF) and other fields.

[0003] In existing electroplating equipment, the cathode conductive roller plus the plating liquid tank is mostly used for electroplating. The disadvantage of this method is that due to the thin film substrate, the cathode conductive roller is very easy to be plated with dotted particles during the electroplating process. The particles continue to grow under the action of the current and easily pierce the film surface, resulting in more holes in the product and larger hole diameters, affecting product quality.

[0004] The above defects need to be improved. Summary of the invention

[0005] In order to overcome the deficiencies of the prior art, the present invention provides a cathode edge conductive mechanism and a cathode conductive module of a horizontal electroplating device.

[0006] The technical solution of the present invention is as follows:

[0007] On the one hand, the present invention provides a cathode edge conductive mechanism, including an upper conductive belt, a lower conductive belt, an upper conductive belt driving assembly, a lower conductive belt driving assembly, an upper conductive belt clamping assembly and a lower conductive belt clamping assembly, wherein the upper conductive belt and the lower conductive belt are arranged opposite to each other up and down, the upper conductive belt driving assembly is connected to the upper conductive belt and drives the upper conductive belt to rotate, the upper conductive belt clamping assembly drives the lower end of the upper conductive belt to move downward, presses the edge of the film toward the lower conductive belt and tensions the upper conductive belt, the lower conductive belt driving assembly is connected to the lower conductive belt and drives the lower conductive belt to rotate, and the lower conductive belt clamping assembly drives the lower end of the lower conductive belt to move downward and tensions the lower conductive belt.

[0008] According to the above scheme of the present invention, the upper conductive belt drive assembly includes an upper conductive belt drive motor and two upper and lower rows of upper conductive belt pulleys, the upper row of the upper conductive belt pulleys are mounted on a first fixed plate, the lower row of the upper conductive belt pulleys are mounted on a second fixed plate, the upper conductive belt is sleeved on the upper and lower rows of the upper conductive belt pulleys, and the upper conductive belt drive motor is connected to any one of the upper conductive belt pulleys.

[0009] Furthermore, the lower conductive belt drive assembly includes a lower conductive belt drive motor and two upper and lower rows of lower conductive belt pulleys, the upper row of the lower conductive belt pulleys is installed on a third fixed plate, the lower row of the lower conductive belt pulleys is installed on a fourth fixed plate, the lower conductive belt is sleeved on the upper and lower rows of the lower conductive belt pulleys, and the lower conductive belt drive motor is connected to any one of the lower conductive belt pulleys.

[0010] Furthermore, the upper conductive belt clamping assembly includes an upper clamping cylinder and a plurality of upper rubber-coated pressure wheels arranged side by side between the upper conductive belt pulleys in the lower row, the upper clamping cylinder is mounted on the first fixed plate, and the plurality of upper rubber-coated pressure wheels are mounted on the second fixed plate, and the movable end of the upper clamping cylinder is connected to the second fixed plate and drives the second fixed plate to move up and down.

[0011] Furthermore, the lower conductive belt clamping assembly includes a lower clamping cylinder and a plurality of lower rubber-coated pressure wheels arranged side by side between the lower conductive belt pulleys in the upper row, the lower clamping cylinder is mounted on the fifth fixed plate, and the plurality of lower rubber-coated pressure wheels are mounted on the third fixed plate, and the movable end of the lower clamping cylinder is connected to the fourth fixed plate and drives the fourth fixed plate to move up and down.

[0012] Furthermore, it also includes a membrane-penetrating lifting component, the lifting end of which is connected to the upper conductive belt, the upper conductive belt driving component and the upper conductive belt pressing component, and drives the upper conductive belt, the upper conductive belt driving component and the upper conductive belt pressing component to move up and down.

[0013] Furthermore, the membrane-penetrating lifting assembly includes a membrane-penetrating lifting cylinder, which is installed on the sixth fixed plate. The movable end of the membrane-penetrating lifting cylinder is connected to the first fixed plate and drives the first fixed plate to move up and down.

[0014] Furthermore, it also includes an upper auxiliary cathode slot and a lower auxiliary cathode slot, the upper auxiliary cathode slot is installed on the first fixed plate, and openings for the upper conductive belt to pass through are arranged on both sides of the upper auxiliary cathode slot, and an upper copper etching mechanism for eliminating copper-plated particles on the surface of the conductive layer of the upper conductive belt is arranged in the upper auxiliary cathode slot; the lower auxiliary cathode slot is installed on the fourth fixed plate, and openings for the lower conductive belt to pass through are arranged on both sides of the upper auxiliary cathode slot, and a lower copper etching mechanism for eliminating copper-plated particles on the surface of the conductive layer of the lower conductive belt is arranged in the upper auxiliary cathode slot.

[0015] The present invention according to the above scheme further comprises a plurality of upper conductive slip rings and a plurality of lower conductive slip rings, wherein the upper conductive slip rings are connected to the upper conductive wheel via the upper conductive rotating shaft, and the upper conductive wheel is in contact with the conductive layer of the upper conductive belt, and the lower conductive slip rings are connected to the lower conductive wheel via the lower conductive rotating shaft, and the lower conductive wheel is in contact with the conductive layer of the lower conductive belt.

[0016] Furthermore, it also includes a clamping mechanism for clamping the film, and the clamping mechanism is arranged at the film inlet of the upper conductive belt and the lower conductive belt.

[0017] On the other hand, the present invention provides a cathode conductive module of a horizontal electroplating device, comprising two cathode edge conductive mechanisms as mentioned above which are symmetrically arranged on the left and right.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] 1. The present invention uses two upper and lower conductive belts to transfer the cathode current to the film by edge compression and conduction, and drives the film to move, and then transfers the cathode current to the plating solution to form a conductive closed loop with the positive electrode conductive titanium basket. The copper ions in the plating solution are evenly covered on the film through the current, which can effectively solve the problem of many holes and large hole diameters in the product;

[0020] 2. The upper conductive belt pressing assembly and the lower conductive belt pressing assembly can play the role of pressing the edge of the film, transferring the negative current to the film evenly, and driving the film to run horizontally and steadily during the film operation;

[0021] 3. Through the film lifting assembly, when the film is broken or the film is worn for the first time, the upper conductive belt, the upper conductive belt driving assembly and the upper conductive belt pressing assembly can be lifted up as a whole, so that it is convenient for the staff to sort out the film that has been worn;

[0022] 4. The negative current is transferred to the conductive layer of the upper conductive belt through the upper conductive slip ring, and the negative current is transferred to the conductive layer of the lower conductive belt through the lower conductive slip ring, and then the negative current is transferred to the film through the conductive layers of the upper conductive belt and the lower conductive belt;

[0023] 5. By setting an upper auxiliary cathode slot on the belt path of the upper conductive belt and upper and lower auxiliary cathode slots on the belt path of the lower conductive belt, the copper-plated particles on the surface of the conductive layer of the upper conductive belt and the lower conductive belt can be eliminated in time to prevent the copper-plated particles from growing continuously under the action of the current and piercing the film surface at the edge of the film;

[0024] 6. By setting a clamping mechanism at the film inlet of the upper conductive belt and the lower conductive belt, the undesirable problem caused by the film slipping backward can be prevented, and the film can be tightened. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic structural diagram of the cathode edge conductive mechanism in the present invention;

[0026] Figure 2 It is a front view of the cathode edge conductive mechanism in the present invention;

[0027] Figure 3 It is a side view of the cathode edge conductive mechanism in the present invention.

[0028] In the figure,

[0029] 1. Cathode edge conductive mechanism; 101. Upper conductive belt; 102. Lower conductive belt; 103. Upper conductive pulley; 104. Upper conductive belt drive motor; 105. First fixed plate; 106. Second fixed plate; 107. Lower conductive pulley; 108. Lower conductive belt drive motor; 109. Third fixed plate; 110. Fourth fixed plate; 111. Upper pressing cylinder; 112. Upper rubber-coated pressure wheel; 113. Lower pressing cylinder; 114. Lower rubber-coated pressure wheel; 115. Fifth fixed plate; 116. Fixed plate; 116, first linear guide rod; 117, first linear bearing; 118, membrane lifting cylinder; 119, sixth fixed plate; 120, second linear guide rod; 121, second linear bearing; 122, third linear bearing; 123, upper conductive slip ring; 124, upper conductive rotating shaft; 125, upper conductive wheel; 126, lower conductive slip ring; 127, lower conductive rotating shaft; 128, lower conductive wheel; 129, upper auxiliary cathode slot; 130, lower auxiliary cathode slot; 131, clamping mechanism. DETAILED DESCRIPTION

[0030] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments.

[0031] It should be noted that when a component is referred to as being "set on" or "fixed on" or "installed on" another component, it may be directly or indirectly located on the other component. When a component is referred to as being "connected to" another component, it may be directly or indirectly connected to the other component. The directions or positions indicated by the terms "upper", "lower", "left", "right", "front", "rear", "inside", "outside", etc. are based on the directions or positions shown in the accompanying drawings and are only for the convenience of description and cannot be understood as limitations on the present technical solution. The terms "first", "second", "third", "fourth", "fifth" and "sixth" are only used for the convenience of description and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features. "Multiple" means two or more, unless otherwise clearly and specifically defined. "Several" means one or more, unless otherwise clearly and specifically defined.

[0032] See also Figures 1 to 3 The embodiment of the present invention provides a cathode conductive module of a horizontal electroplating device, comprising two cathode edge conductive mechanisms 1 arranged symmetrically on the left and right. The cathode edge conductive mechanism 1 comprises an upper conductive belt 101, a lower conductive belt 102, an upper conductive belt driving assembly, a lower conductive belt driving assembly, an upper conductive belt pressing assembly and a lower conductive belt pressing assembly. The upper conductive belt 101 and the lower conductive belt 102 are arranged opposite to each other up and down. The upper conductive belt driving assembly is connected to the upper conductive belt 101 and drives the upper conductive belt 101 to rotate. The upper conductive belt pressing assembly drives the lower end of the upper conductive belt 101 to move downward, presses the edge of the film to the lower conductive belt 102 and tensions the upper conductive belt 101. The lower conductive belt driving assembly is connected to the lower conductive belt 102 and drives the lower conductive belt 102 to rotate. The lower conductive belt pressing assembly drives the lower end of the lower conductive belt 102 to move downward and tensions the lower conductive belt 102. The present invention uses two upper and lower conductive belts to transfer cathode current to the film by edge compression and conduction, and drives the film to move, and then transfers the cathode current to the plating solution to form a conductive closed loop with the positive conductive titanium basket. The copper ions in the plating solution are evenly covered on the film by the current, which can effectively solve the problems of many holes in the product and large hole diameters; the upper conductive belt compression assembly and the lower conductive belt compression assembly can play the role of pressing the edge of the film, evenly transferring the negative electrode current to the film, and driving the film to run horizontally and stably during the operation of the film.

[0033] See also Figures 1 to 3The upper conductive belt drive assembly includes an upper conductive belt drive motor 104 and two upper and lower rows of upper conductive belt pulleys 103. The upper row of upper conductive belt pulleys 103 and the upper conductive belt drive motor 104 are installed on a first fixed plate 105, and the lower row of upper conductive belt pulleys 103 are installed on a second fixed plate 106. The upper conductive belt 101 is sleeved on the upper and lower rows of upper conductive belt pulleys 103. The upper conductive belt drive motor 104 is connected to any one of the upper conductive belt pulleys 103 in the upper row and drives the upper conductive belt pulley 103 to rotate, thereby driving the upper conductive belt 101 to rotate.

[0034] See also Figures 1 to 3 The lower conductive belt driving assembly includes a lower conductive belt driving motor 108 and two upper and lower rows of lower conductive belt pulleys 107. The upper row of lower conductive belt pulleys 107 are installed on a third fixed plate 109, and the lower row of lower conductive belt pulleys 107 and the lower conductive belt driving motor 108 are installed on a fourth fixed plate 110. The lower conductive belt 102 is sleeved on the upper and lower rows of lower conductive belt pulleys 107. The lower conductive belt driving motor 108 is connected to any one of the lower conductive belt pulleys 107 in the lower row and drives the lower conductive belt pulley 107 to rotate, thereby driving the lower conductive belt 102 to rotate.

[0035] See also Figures 1 to 3 The upper conductive belt pressing assembly includes an upper pressing cylinder 111 and a plurality of upper rubber-coated pressing wheels 112 evenly arranged side by side between the upper conductive belt pulleys 103 in the lower row. The upper pressing cylinder 111 is installed on the first fixed plate 105, and the plurality of upper rubber-coated pressing wheels 112 are installed on the second fixed plate 106. The movable end of the upper pressing cylinder 111 is connected to the second fixed plate 106 and drives the second fixed plate 106 to move up and down. After the upper pressing cylinder 111 is started, the upper conductive belt pulleys 103 and the upper rubber-coated pressing wheels 112 in the lower row are driven to move downward through the second fixed plate 106, thereby driving the lower end of the upper conductive belt 101 to move downward, pressing the lower conductive belt 102 and tensioning the upper conductive belt 101.

[0036] See also Figures 1 to 3The lower conductive belt pressing assembly includes a lower pressing cylinder 113 and a plurality of lower rubber-coated pressing wheels 114 evenly arranged side by side between the upper row of lower conductive pulleys 107. The lower pressing cylinder 113 is mounted on the fifth fixed plate 115, and the plurality of lower rubber-coated pressing wheels 114 are mounted on the third fixed plate 109. The movable end of the lower pressing cylinder 113 is connected to the fourth fixed plate 110 and drives the fourth fixed plate 110 to move up and down. After the lower pressing cylinder 113 is started, the lower conductive pulleys 107 of the lower row are driven to move downward through the fourth fixed plate 110, thereby driving the lower end of the lower conductive belt 102 to move downward and tightening the lower conductive belt 102. Because the upper rubber-coated pressing wheel 112 and the lower rubber-coated pressing wheel 114 are relatively soft in texture, they can not only make the upper conductive belt 101 and the lower conductive belt 102 evenly press the edge of the film, but also play a buffering role to avoid crushing the film.

[0037] See also Figures 1 to 3 In order to enable the lower clamping cylinder 113 to smoothly drive the fourth fixed plate 110 to move downward, a first linear guide rod 116 is provided at the bottom of the fifth fixed plate 115, and a first linear bearing 117 is provided on the fourth fixed plate 110. The first linear bearing 117 is sleeved outside the first linear guide rod 116, so that the fourth fixed plate 110 can move up and down along the first linear guide rod 116.

[0038] See also Figures 1 to 3 The cathode edge conductive mechanism 1 also includes a film-penetrating lifting assembly, the lifting end of which is connected to the upper conductive belt 101, the upper conductive belt driving assembly and the upper conductive belt pressing assembly, and drives the upper conductive belt 101, the upper conductive belt driving assembly and the upper conductive belt pressing assembly to move up and down. When the film is broken or the film is passed for the first time, the upper conductive belt 101 and the lower conductive belt 102 first carry the film over, and then the film-penetrating lifting assembly lifts the upper conductive belt 101, the upper conductive belt driving assembly and the upper conductive belt pressing assembly as a whole, so that the staff can arrange the film after the film is passed.

[0039] See also Figures 1 to 3 The membrane-penetrating lifting assembly includes a membrane-penetrating lifting cylinder 118, which is installed on the sixth fixed plate 119. The movable end of the membrane-penetrating lifting cylinder 118 is connected to the first fixed plate 105 and drives the first fixed plate 105 to move up and down, thereby driving the second fixed plate 106 to move up and down, thereby driving the upper conductive belt 101, the upper conductive belt driving assembly and the upper conductive belt clamping assembly to move up and down.

[0040] See also Figures 1 to 3In order to enable the membrane lifting cylinder 118 to smoothly drive the first fixed plate 105 to move up and down, and the upper clamping cylinder 111 to smoothly drive the second fixed plate 106 to move up and down, a second linear guide rod 120 is arranged between the sixth fixed plate 119 and the third fixed plate 109, a second linear bearing 121 is arranged on the first fixed plate 105, and a third linear bearing 122 is arranged on the second fixed plate 106. The second linear bearing 121 and the third linear bearing 122 are both sleeved outside the second linear guide rod 120, so that the first fixed plate 105 and the second fixed plate 106 can move up and down along the second linear guide rod 120.

[0041] See also Figure 1 , Figure 2 The cathode edge conductive mechanism 1 further includes a plurality of upper conductive slip rings 123 and a plurality of lower conductive slip rings 126. The plurality of upper conductive slip rings 123 are mounted on the first fixed plate 105. The upper conductive slip rings 123 are connected to an upper conductive wheel 125 via an upper conductive rotating shaft 124. The upper conductive wheel 125 is in contact with the conductive layer of the upper conductive belt 101. The plurality of lower conductive slip rings 126 are mounted under the fourth fixed plate 110. The lower conductive slip rings 126 are connected to a lower conductive wheel 128 via a lower conductive rotating shaft 127. The lower conductive wheel 128 is in contact with the conductive layer of the lower conductive belt 102. The upper conductive slip ring 123 transfers the negative current to the conductive layer of the upper conductive belt 101 through the upper conductive rotating shaft 124 and the upper conductive wheel 125, and the lower conductive slip ring 126 transfers the negative current to the conductive layer of the lower conductive belt 102 through the lower conductive rotating shaft 127 and the lower conductive wheel 128, and then transfers the negative current to the film through the conductive layers of the upper conductive belt 101 and the lower conductive belt 102.

[0042] Preferably, the conductive layer of the upper conductive belt 101 is located at the inner edge of the outer surface of the upper conductive belt 101, and the conductive layer of the upper conductive belt 101 is located at the inner edge of the outer surface of the lower conductive belt 102, so that the conductive layers of the upper conductive belt 101 and the lower conductive belt 102 only contact the edge of the film.

[0043] See also Figure 1 , Figure 2The cathode edge conductive mechanism 1 also includes an upper auxiliary cathode groove 129 and a lower auxiliary cathode groove 130. The upper auxiliary cathode groove 129 is installed on the first fixed plate 105. Openings for the upper conductive belt 101 to pass through are arranged on both sides of the upper auxiliary cathode groove 129. An upper copper etching mechanism / copper etching liquid for eliminating copper-plated particles on the surface of the conductive layer of the upper conductive belt 101 is arranged in the upper auxiliary cathode groove 129. The lower auxiliary cathode groove 130 is installed on the fourth fixed plate 110. Openings for the lower conductive belt 102 to pass through are arranged on both sides of the upper auxiliary cathode groove 129. A lower copper etching mechanism / copper etching liquid for eliminating copper-plated particles on the surface of the conductive layer of the lower conductive belt 102 is arranged in the upper auxiliary cathode groove 129. During the electroplating process, the conductive layers of the upper conductive belt 101 and the lower conductive belt 102 will attract copper ions and are easily plated with copper-plated particles. The copper-plated particles continue to grow under the action of electric current and are easy to pierce the film surface at the edge of the film. Therefore, by setting an upper auxiliary cathode groove 129 on the conveying path of the upper conductive belt 101 and a lower auxiliary cathode groove 130 on the conveying path of the lower conductive belt 102, the copper-plated particles on the surface of the conductive layers of the upper conductive belt 101 and the lower conductive belt 102 can be eliminated in time.

[0044] See also Figures 1 to 3 The cathode edge conductive mechanism 1 also includes a clamping mechanism 131 for clamping the film. The clamping mechanism 131 is arranged at the film inlet of the upper conductive belt 101 and the lower conductive belt 102. By first clamping the film surface at the film inlet of the upper conductive belt 101 and the lower conductive belt 102, the film can be prevented from slipping backwards and the film can be tightened.

[0045] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the appended claims of the present invention.

[0046] The above is an exemplary description of the present invention in conjunction with the accompanying drawings. It is obvious that the implementation of the present invention is not limited to the above-mentioned method. As long as various improvements are made by adopting the method concept and technical solution of the present invention, or the concept and technical solution of the present invention are directly applied to other occasions without improvement, they are all within the protection scope of the present invention.

Claims

1. A cathode edge conductive mechanism, characterized in that: It comprises an upper conductive belt, a lower conductive belt, an upper conductive belt driving assembly, a lower conductive belt driving assembly, an upper conductive belt pressing assembly, a lower conductive belt pressing assembly, an upper auxiliary cathode slot, a lower auxiliary cathode slot and a clamping mechanism for clamping a film, wherein the upper conductive belt and the lower conductive belt are arranged opposite to each other up and down, the upper conductive belt driving assembly is connected to the upper conductive belt and drives the upper conductive belt to rotate, the upper conductive belt pressing assembly drives the lower end of the upper conductive belt to move downward, presses the edge of the film toward the lower conductive belt and tightens the upper conductive belt, the lower conductive belt driving assembly is connected to the lower conductive belt and drives the lower conductive belt to rotate, and the lower conductive belt pressing assembly drives the lower end of the lower conductive belt to move downward and tightens the lower conductive belt; The upper conductive belt drive assembly comprises an upper conductive belt drive motor and two upper and lower rows of upper conductive belt pulleys, wherein the upper conductive belt pulleys in the upper row are mounted on a first fixed plate, and the upper conductive belt pulleys in the lower row are mounted on a second fixed plate, the upper conductive belt is sleeved on the upper and lower rows of the upper conductive belt pulleys, and the upper conductive belt drive motor is connected to any one of the upper conductive belt pulleys; The lower conductive belt drive assembly comprises a lower conductive belt drive motor and two rows of lower conductive pulleys, the upper row of the lower conductive pulleys is mounted on a third fixed plate, the lower row of the lower conductive pulleys is mounted on a fourth fixed plate, the lower conductive belt is sleeved on the upper and lower rows of the lower conductive pulleys, and the lower conductive belt drive motor is connected to any one of the lower conductive pulleys; The upper auxiliary cathode slot is mounted on the first fixed plate, and openings are provided on both sides of the upper auxiliary cathode slot for the upper conductive belt to pass through, and a copper etching mechanism is provided in the upper auxiliary cathode slot for removing copper-plated particles on the surface of the conductive layer of the upper conductive belt; The lower auxiliary cathode slot is mounted on the fourth fixed plate, openings for the lower conductive belt to pass through are arranged on both sides of the upper auxiliary cathode slot, and a copper etching mechanism for removing copper-plated particles on the surface of the conductive layer of the lower conductive belt is arranged in the upper auxiliary cathode slot; The clamping mechanism is arranged at the film inlets of the upper conductive belt and the lower conductive belt.

2. The cathode edge conductive mechanism according to claim 1, characterized in that: The upper conductive belt clamping assembly includes an upper clamping cylinder and a plurality of upper rubber-coated pressure wheels arranged side by side between the upper conductive belt pulleys in the lower row. The upper clamping cylinder is mounted on the first fixed plate, and the plurality of upper rubber-coated pressure wheels are mounted on the second fixed plate. The movable end of the upper clamping cylinder is connected to the second fixed plate and drives the second fixed plate to move up and down.

3. The cathode edge conductive mechanism according to claim 2, characterized in that: The lower conductive belt clamping assembly includes a lower clamping cylinder and a plurality of lower rubber-coated pressure wheels arranged side by side between the upper row of the lower conductive belt pulleys, the lower clamping cylinder is mounted on the fifth fixed plate, and the plurality of lower rubber-coated pressure wheels are mounted on the third fixed plate, and the movable end of the lower clamping cylinder is connected to the fourth fixed plate and drives the fourth fixed plate to move up and down.

4. The cathode edge conductive mechanism according to claim 1, characterized in that: It also includes a film-penetrating lifting component, the lifting end of which is connected to the upper conductive belt, the upper conductive belt driving component and the upper conductive belt pressing component, and drives the upper conductive belt, the upper conductive belt driving component and the upper conductive belt pressing component to move up and down.

5. The cathode edge conductive mechanism according to claim 4, characterized in that: The membrane-penetrating lifting assembly includes a membrane-penetrating lifting cylinder, which is installed on the sixth fixed plate. The movable end of the membrane-penetrating lifting cylinder is connected to the first fixed plate and drives the first fixed plate to move up and down.

6. The cathode edge conductive mechanism according to claim 1, characterized in that: It also includes a plurality of upper conductive slip rings and a plurality of lower conductive slip rings, wherein the upper conductive slip rings are connected to the upper conductive wheel via the upper conductive rotating shaft, and the upper conductive wheel is in contact with the conductive layer of the upper conductive belt, and the lower conductive slip rings are connected to the lower conductive wheel via the lower conductive rotating shaft, and the lower conductive wheel is in contact with the conductive layer of the lower conductive belt.

7. A cathode conductive module for horizontal electroplating equipment, characterized in that: It comprises two cathode edge conducting mechanisms according to any one of claims 1 to 6 which are arranged symmetrically on the left and right.

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