Quick adjustment vacuum nozzle mechanism

The crank slider mechanism composed of the bracket, linear slide rail and rotating part realizes the rapid adjustment and precise positioning of the vacuum nozzle spacing, solves the problem of low efficiency in the existing technology, and provides hardware support for automatic adjustment.

CN114203612BActive Publication Date: 2025-10-24SHENZHEN SUNMENTA ELECTRONICS
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Patent Information

Application Number
CN202010979650.0
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2020-09-17
Publication Date
2025-10-24
Estimated Expiration
2040-09-17

AI Technical Summary

Technical Problem

The existing vacuum nozzle mechanism is inefficient when adjusting the nozzle spacing and cannot quickly adapt to different-sized wafers. Especially in the production of semiconductor stacked inductors, multiple nozzle positions need to be manually adjusted to avoid touching the detection area and mark points.

Method used

A crank slider mechanism consisting of a bracket, linear slide rail, slider, rotating part and connecting rod is adopted. The slider slides along the linear slide rail through the rotating part to achieve rapid adjustment of the nozzle spacing, and rapid positioning and fixation are achieved through the cooperation of positioning holes and positioning pins.

Benefits of technology

It realizes the rapid adjustment and precise positioning of the nozzle spacing, simplifies the adjustment process, improves efficiency, provides the hardware foundation for automatic adjustment, and reduces the workload of manual adjustment.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application discloses a kind of quick adjustment vacuum suction nozzle mechanism, comprising: support, including platform part and four support arms, support arm is connected to platform part and extends outward, the support is X-shaped;Linear slide rail is respectively fixed on support arm;Sliding block is respectively slidably fixed on linear slide rail, sliding block can slide along linear slide rail;Suction nozzle is respectively fixed on sliding block, the suction nozzle moves synchronously with sliding block;Rotary part is rotationally fixed at the center of platform part by hinged shaft, rotary part can rotate relative to support;Connecting rod is used to connect rotary part and sliding block, connecting rod is hinged at both ends with rotary part and sliding block, and the rotary part drives sliding block by connecting rod.
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Description

Technical Field

[0001] The invention relates to the field of vacuum nozzle grippers, in particular to a quick-adjusting vacuum nozzle mechanism. Background Art

[0002] When producing semiconductor multilayer inductors, the loading process is often completed by sucking the blanks with a vacuum nozzle gripper. Figure 1 As shown in the figure, when picking up a blank, the nozzle must not touch the detection area or mark on the blank. In actual semiconductor multilayer inductor production, commonly used blank sizes are 6 inches, 8 inches, and 10 inches. To prevent the nozzle from touching the detection area and mark during loading, the spacing between the nozzles must be frequently adjusted to accommodate different sizes of blanks.

[0003] like Figure 2 As shown, the existing suction nozzle mechanism includes 4 suction nozzles for sucking the sheets. The suction nozzles are located in the slide groove of the bracket and are fixed by loosening and tightening screws. When the spacing needs to be adjusted, the position of the suction nozzles needs to be adjusted manually one by one. Generally, a mechanical gripper is equipped with four vacuum suction nozzle mechanisms, which suck 4 sheets at a time. Therefore, for sheets of different sizes, the positions of 16 suction nozzles need to be adjusted each time. The adjustment process is extremely inconvenient and inefficient. Summary of the Invention

[0004] The object of the present invention is to provide a fast-adjusting vacuum nozzle mechanism for producing semiconductor stacked inductors, which can quickly adjust the nozzle spacing.

[0005] The technical solutions adopted by the present invention to solve the above technical problems are as follows:

[0006] A quick-adjustable vacuum nozzle mechanism comprising:

[0007] The bracket includes a platform portion and four supporting arms, wherein the supporting arms are connected to the platform portion and extend outward, and the bracket is X-shaped;

[0008] The linear guide rails are respectively fixed on the support arms;

[0009] The sliders are respectively slidably fixed on the linear guide rails, and the sliders can slide along the linear guide rails;

[0010] Suction nozzles are respectively fixed on the sliders, and the suction nozzles move synchronously with the sliders;

[0011] The rotating part is rotatably fixed to the center of the platform part through a hinge shaft, and the rotating part can rotate relative to the bracket;

[0012] The connecting rod is used to connect the rotating part and the slider. The two ends of the connecting rod are hinged to the rotating part and the slider respectively. The rotating part drives the slider through the connecting rod.

[0013] Further, the rotating part comprises a first rotating rod and a second rotating rod, the first rotating rod and the second rotating rod are fixed to the center of the platform part through a hinge shaft, and the first rotating rod and the second rotating rod are connected to the slide blocks with opposite oblique angles through connecting rods.

[0014] Further, the platform part is provided with a first limiting nut and a second limiting nut, and the first limiting nut and the second limiting nut are used for limiting the rotation angle of the first rotating rod and the second rotating rod respectively.

[0015] Further, the horizontal height of the first limiting nut and the second limiting nut corresponds to the first rotating rod and the second rotating rod respectively.

[0016] Further, the sliding track of the suction nozzle is distributed at equal angles with the hinge shaft of the platform part as the center, the rotating part is a positive cross rod or a disc, the connecting rod is hinged to the end point of the positive cross rod or the connecting rods are hinged on the disc at equal angles.

[0017] Further, the rotating part is provided with a positioning pin, the positioning pin can move vertically relative to the rotating part, the platform part is provided with a plurality of positioning holes corresponding to the positioning pin, and the positioning pin and the positioning hole are matched to position the rotating part.

[0018] Further, the positioning pin is adjusted and fixed on the upper and lower sides of the rotating part through two elastic nuts.

[0019] Further, the positioning pin is a spring bolt, a spring is arranged between the elastic nut on the lower side of the rotating part and the rotating part, and the spring is used for resetting the positioning pin.

[0020] Further, the end of the supporting arm connected to the platform part is provided with a limiting nut, and the limiting nut is used for limiting the sliding stroke of the slide block.

[0021] Further, the linear slide rail can be replaced by a linear slide groove, and the slide block is located in the slide groove.

[0022] The technical scheme of the application is that the suction nozzle is slidably fixed on the supporting arms of the support, the rotating part is connected with the suction nozzle through the connecting rod, and the rotating part is rotationally fixed on the platform part; wherein the rotating part, the connecting rod, the suction nozzle, the linear slide rail and the sliding block form a crank slider mechanism, when the rotating part rotates, the sliding block is driven to slide along the linear slide rail through the connecting rod, and the sliding blocks on the four supporting arms are connected with the rotating part through the connecting rods, so that the interval of the suction nozzle is synchronously adjusted to adapt to different sizes of the material sheet; the platform part is provided with a plurality of positioning holes, different positioning holes correspond to different commonly used sizes, and the positioning pin and the positioning hole are matched to realize the quick adjustment, positioning and fixing effect; compared with the prior art, the device realizes quick adjustment through the rotating part linkage, avoids adjusting the suction nozzle one by one, reduces the workload, realizes quick positioning and fixing through the positioning hole, simplifies the adjustment process, optimizes the accuracy, and improves the adjustment efficiency; compared with manual adjustment one by one, the linkage adjustment realized through the rotating part and the connecting rod provides a hardware basis for automatic adjustment and production.

[0023] Other features and advantages of the present application will be set forth in the following description, and in part will become apparent to those skilled in the art from the description, or can be learned by practice of the present application. The objects and other advantages of the present application can be achieved and obtained by means of the structures particularly pointed out in the written description and the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0024] The present application will be described in detail below with reference to the drawings, so that the above advantages of the present application are more clear.

[0025] Figure 1 is a schematic view of a semiconductor laminated inductor sheet material;

[0026] Figure 2 is a prior art suction nozzle support;

[0027] Figure 3 is a schematic view of a support of a quick adjustment vacuum suction nozzle mechanism of the present application;

[0028] Figure 4 is a schematic view of a quick adjustment vacuum suction nozzle mechanism of the present application;

[0029] Figure 5 is a top view of a quick adjustment vacuum suction nozzle mechanism of the present application;

[0030] Figure 6 is a side view of a quick adjustment vacuum suction nozzle mechanism of the present application;

[0031] Figure 7 is a schematic view of another embodiment of a quick adjustment vacuum suction nozzle mechanism of the present application. DETAILED DESCRIPTION

[0032] In the description of the present application, it needs to be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like indicate the orientation or positional relationship shown in the drawings, which are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0033] In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise explicitly specified and limited.

[0034] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood broadly, for example, it can be connected, or detachable, or integrated; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium, it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0035] As shown in Figures 3-7 A quick adjustment vacuum nozzle mechanism, comprising:

[0036] A support 100, comprising a platform part 102 and four support arms 101, the support arms 101 are connected to the platform part 102 and extend outward, the support 100 is X-shaped;

[0037] Linear slide rails 200 are respectively fixed on the support arms 101;

[0038] Sliding blocks 300 are respectively slidably fixed on the linear slide rails 200, and the sliding blocks 300 can slide along the linear slide rails 200;

[0039] Nozzles 400 are respectively fixed on the sliding blocks 300, and the nozzles 400 move synchronously with the sliding blocks 300;

[0040] A rotating part 500 is rotatably fixed at the center of the platform part 102 through a hinge shaft, and the rotating part 500 can rotate relative to the support 100;

[0041] A connecting rod 600 is used to connect the rotating part 500 and the slider 300, and the two ends of the connecting rod 600 are respectively hinged to the rotating part 500 and the slider 300, and the rotating part 500 drives the slider 300 through the connecting rod 600.

[0042] The suction nozzle 400 is slidably fixed on the supporting arm 101 of the support 100 through the slider 300 and the linear slide rail 200 to form a sliding pair, the rotating part 500 is connected with the suction nozzle 400 through the connecting rod 600, the connecting rod 600 is respectively hinged to the rotating part 500 and the slider 300 to form two rotating pairs, and the rotating part 500 is rotatably fixed on the platform part 102 to form a rotating pair; wherein the rotating part 500, the connecting rod 600, the suction nozzle 400, the linear slide rail 200 and the slider 300 form a crank slider 300 mechanism, when the rotating part 500 rotates, the slider 300 is driven to slide along the linear slide rail 200 through the connecting rod 600, and the sliders 300 on the four supporting arms 101 are connected with the rotating part 500 through the connecting rod 600, so that the distance between the suction nozzles 400 is adjusted in linkage to adapt to different sizes of tablets, and the position of the suction nozzle 400 is avoided to be adjusted one by one, and the efficiency is improved.

[0043] In the embodiment, the rotating part 500 includes a first rotating rod 501 and a second rotating rod 502, the first rotating rod 501 and the second rotating rod 502 are stacked above and below and are fixed at the center of the platform part 102 through a hinge shaft, and the first rotating rod 501 and the second rotating rod 502 are connected with the sliders 300 with opposite oblique angles through the connecting rod 600. The first rotating rod 501 and the second rotating rod 502 link the sliders 300 with opposite oblique angles respectively, the hinge shaft is located at the center of the first rotating rod 501 and the second rotating rod 502, and the sliders 300 with opposite oblique angles move synchronously, that is, rotating the first rotating rod 501 and the second rotating rod 502 to adjust the distance between the suction nozzles 400.

[0044] In the embodiment, the platform part 102 is provided with a first limiting nut 503 and a second limiting nut 504, and the first limiting nut 503 and the second limiting nut 504 are respectively used to limit the rotation angle of the first rotating rod 501 and the second rotating rod 502. In order to avoid that the rotation angle of the first rotating rod 501 and the second rotating rod 502 is too large, the slider 300 falls off from the linear slide rail 200, and the first limiting nut 503 and the second limiting nut 504 are arranged to limit the rotation angle.

[0045] In the embodiment, the horizontal height of the first limiting nut 503 and the second limiting nut 504 respectively corresponds to the first rotating rod 501 and the second rotating rod 502. Because the first rotating rod 501 and the second rotating rod 502 are stacked above and below and have different heights, the rotation angle is limited accordingly, so the horizontal height of the first limiting nut 503 and the second limiting nut 504 respectively corresponds to the first rotating rod 501 and the second rotating rod 502.

[0046] In another embodiment, the sliding tracks of the suction nozzles 400 are distributed at equal angles around the hinge axis of the platform 102, the rotating part 500 is a positive crossbar or a disc, and the connecting rods 600 are hinged to the end points of the positive crossbar or are hinged at equal angles on the disc. When the rotating part 500 rotates, the suction nozzles 400 on the four supporting arms 101 are displaced synchronously, that is, the rotation of one component can adjust the positions of the four suction nozzles 400, and the four suction nozzles 400 are adjusted synchronously, so that the displacement adjustment is more accurate and the adjustment process is simpler.

[0047] In the present embodiment, the rotating part 500 is provided with a positioning pin 700 that can move vertically relative to the rotating part 500, and the platform 102 is provided with a plurality of positioning holes 103 corresponding to the positioning pin 700, which cooperate with the positioning pin 700 to position the rotating part 500. Different positioning holes 103 correspond to different commonly used sizes, and the cooperation of the positioning pin 700 and the positioning hole 103 can achieve the effects of quick adjustment, positioning and fixing. When adjustment is needed, the positioning pin 700 is lifted upward, the rotating part 500 is rotated, the positioning pin 700 rotates synchronously with the rotating part 500, the positioning pin 700 is moved to above the positioning hole 103 of the corresponding size according to the need, and the positioning pin 700 is inserted into the positioning hole 103 to fix the rotating part 500, thereby fixing the positions of the suction nozzles 400.

[0048] In the present embodiment, the positioning pin 700 is adjusted and fixed on the upper and lower sides of the rotating part 500 by two elastic nuts 701. When the positioning pin 700 needs to be lifted upward, the lower locking nut is loosened. After the positioning pin 700 is reinserted into the positioning hole 103, the positioning pin 700 is fixed by the lower locking nut.

[0049] In another embodiment, the positioning pin 700 is a spring-loaded pin, and a spring is arranged between the elastic nut 701 on the lower side of the rotating part 500 and the rotating part 500. The spring is used for resetting the positioning pin 700. When the positioning pin 700 needs to be lifted upward, the positioning pin 700 is directly lifted upward, and the spring is compressed to store energy. When the positioning pin 700 is moved above the designated positioning hole 103, the positioning pin 700 is released, and under the action of the spring force, the positioning pin 700 is reset downward and inserted into the positioning hole 103. In the process of daily use, under the action of the spring force, the positioning pin 700 can be effectively prevented from jumping out of the positioning hole 103 due to vibration.

[0050] In another embodiment, one end of the supporting arm 101 connected to the platform 102 is provided with a limiting nut 104 for limiting the sliding stroke of the sliding block 300. By arranging an obstacle at the port of the linear slide rail 200, the sliding stroke of the sliding block 300 can be effectively limited to prevent the sliding block 300 from sliding out of the linear slide rail 200.

[0051] In another embodiment, the linear slide rail 200 can be replaced by a linear slide groove, and the slide block 300 is located in the slide groove. The slide block 300 is located in the slide groove, and the sliding stroke of the slide block 300 is limited by the slide groove, that is, the slide block 300 can be effectively prevented from derailing.

[0052] In another embodiment, the rotating part 500 can be driven by a motor, and the positioning hole 103 and the positioning pin 700 can be replaced by a limit sensor. The rotating part 500 is driven by the motor, thereby automatically adjusting the spacing of the suction nozzle 400 to adapt to different sizes of the sheet material, and the sensor is numbered, corresponding to 6-inch, 8-inch and 10-inch sheet materials respectively. That is, automatic adjustment and automatic positioning are realized, and manual adjustment is completely eliminated, realizing automation.

[0053] Through the above technical solution, the suction nozzle 400 is slidably fixed on the supporting arm 101 of the support 100, the rotating part 500 is connected with the suction nozzle 400 through the connecting rod 600, and the rotating part 500 is rotationally fixed on the platform part 102. The rotating part 500, the connecting rod 600, the suction nozzle 400, the linear slide rail 200 and the slide block 300 form a crank slide block 300 mechanism. When the rotating part 500 rotates, the slide block 300 is driven to slide along the linear slide rail 200 through the connecting rod 600. The slide blocks 300 on the four supporting arms 101 are connected with the rotating part 500 through the connecting rod 600, thereby synchronously adjusting the spacing of the suction nozzle 400 to adapt to different sizes of the sheet material. The platform part 102 is provided with a plurality of positioning holes 103, different positioning holes 103 correspond to different commonly used sizes, and the positioning pin 700 cooperates with the positioning hole 103 to realize quick adjustment, positioning and fixing effect. Compared with the prior art, the device realizes quick adjustment through the linkage of the rotating part 500, avoids adjusting the suction nozzle 400 one by one, reduces the workload, and realizes quick positioning and fixing through the positioning hole 103, simplifies the adjustment process, optimizes the accuracy, and improves the adjustment efficiency. Through the cooperation of the rotating part 500 and the connecting rod 600, linkage adjustment is realized, which provides a hardware basis for automatic adjustment and production compared with manual adjustment one by one.

[0054] Finally, it should be noted that: the above only describes the preferred embodiments of the present application and is not used to limit the present application. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing embodiments or equivalently replace some technical features. Any modification, equivalent replacement, improvement, etc. within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A quick-adjust vacuum nozzle mechanism, comprising: The utility model relates to a kind of adjustable suction nozzle, including: Support (100), including platform part (102) and four support arms (101), support arm (101) is connected to the outside extension with platform part (102), the support (100) is X-shaped; Linear slide rail (200) is respectively fixed on support arm (101); Sliding block (300) is respectively slidably fixed on linear slide rail (200), and sliding block (300) can slide along linear slide rail (200); Suction nozzle (400) is respectively fixed on sliding block (300), and the suction nozzle (400) moves synchronously with sliding block (300); Rotating part (500) is rotatably fixed at the center of platform part (102) by hinged shaft, and rotating part (500) can rotate relative to support (100); Connecting rod (600) is used to connect rotating part (500) and sliding block (300), and connecting rod (600) is hinged at both ends with rotating part (500) and sliding block (300) respectively, and the rotating part (500) drives sliding block (300) by connecting rod (600); Wherein, the rotating part, connecting rod, suction nozzle, linear slide rail and sliding block form a crank slider mechanism, when rotating part rotates, sliding block is driven along linear slide rail by connecting rod, and the sliding block on four support arms is connected with rotating part by connecting rod, so that the interval of suction nozzle is adjusted synchronously to adapt to different sizes of tablet.

2. The quick-adjust vacuum nozzle mechanism of claim 1, wherein, The rotating part (500) includes first rotating rod (501) and second rotating rod (502), and the first rotating rod (501) and the second rotating rod (502) are fixed at the center of the platform part (102) by the hinged shaft in a superposed manner, and the first rotating rod (501) and the second rotating rod (502) are connected with the sliding blocks (300) of opposite oblique angles by the connecting rod (600) respectively.

3. The rapid adjustment vacuum nozzle mechanism of claim 2, wherein, The platform part (102) is provided with a first limiting nut (503) and a second limiting nut (504), and the first limiting nut (503) and the second limiting nut (504) are used for limiting the rotation angle of the first rotating rod (501) and the second rotating rod (502) respectively.

4. The rapid adjustment vacuum nozzle mechanism of claim 3, wherein, The horizontal height of the first limiting nut (503) and the second limiting nut (504) corresponds to the first rotating rod (501) and the second rotating rod (502) respectively.

5. The quick-adjust vacuum nozzle mechanism of claim 1, wherein, The sliding track of the suction nozzle (400) is distributed at equal angles with the hinged shaft of the platform part (102) as the center, the rotating part (500) is a positive cross bar or a disc, and the connecting rod (600) is hinged with the end point of the positive cross bar or hinged at equal angles on the disc.

6. The quick-adjust vacuum nozzle mechanism of claim 4 or 5, wherein, The rotating part (500) is provided with a positioning pin (700), the positioning pin (700) can move vertically relative to the rotating part (500), the platform part (102) is provided with a plurality of positioning holes (103) corresponding to the positioning pin (700), and the positioning pin (700) and the positioning hole (103) are matched to be used for positioning of the rotating part (500).

7. The rapid adjustment vacuum nozzle mechanism of claim 6, wherein, The positioning pin (700) is adjusted and fixed on the upper and lower sides of the rotating part (500) by two elastic nuts (701).

8. The quick-adjust vacuum nozzle mechanism of claim 7, wherein, The positioning pin (700) is a elastic plug, a spring is arranged between the elastic nut (701) on the lower side of the rotating part (500) and the rotating part (500), and the spring is used for resetting the positioning pin (700).

9. The quick-adjust vacuum nozzle mechanism of claim 6, wherein, The end of the supporting arm (101) connected with the platform part (102) is provided with a limiting nut (104), and the limiting nut (104) is used for limiting the sliding stroke of the sliding block (300).

10. The quick-adjust vacuum nozzle mechanism of claim 1, wherein, The linear sliding rail (200) can be replaced by a linear sliding groove, and the sliding block (300) is located in the sliding groove.

Citation Information

Patent Citations

  • Rapid adjustment vacuum suction nozzle mechanism

    CN213212140U