Teaching method for conveyor devices and robotic arms

Abstract

The present invention provides a conveying device and a teaching method for a robotic arm that can teach a robotic arm with high precision. The conveying device includes: a robotic arm having an arm and a driving unit that rotates the arm, a first irradiating unit, a first light receiving unit, and a control device. The control device performs steps a) to c). In step a), the first rotation angle of the arm is detected when the state in which the first light path of the light irradiated from the first irradiating unit is not blocked by the arm changes to the state in which the first light path is blocked. In step b), the second rotation angle of the arm is detected when the state in which the first light path is blocked by the arm changes to the state in which the first light path is not blocked by the arm. In step c), the position of the first rotation axis of the arm is determined based on the width of the robotic arm through the portion of the first light path, the position of the first intersection of the first light path and the arm when the first light path is blocked, the first rotation angle, and the second rotation angle.

Description

Technical Field

[0001] Various aspects and embodiments of the present invention relate to a teaching method for a conveyor device and a robotic arm. Background Art

[0002] In recent years, various robots have been used in various industrial fields. For example, in the field of semiconductor manufacturing, robotic arms are used in conveying devices that transport substrates. Semiconductor device manufacturing requires high-precision micro-processing. Therefore, teaching is performed to impart to conveying devices the information necessary to accurately transport substrates on which semiconductor devices will be formed to predetermined positions within processing equipment where the substrates are processed.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Laid-Open No. 6-326172 Summary of the Invention

[0006] Technical problem to be solved by the invention

[0007] The present invention provides a conveying device and a teaching method for a robot arm capable of teaching a robot arm with high precision.

[0008] Technical solutions to technical problems

[0009] One aspect of the present invention is a conveying device for conveying a substrate, comprising a robotic arm, a first illuminating unit, a first light receiving unit, and a control device. The robotic arm includes an arm for conveying a substrate and a drive unit for rotating the arm. The first illuminating unit irradiates light along a first optical path. The first light receiving unit receives the light irradiated by the first illuminating unit. The control device controls the drive unit to rotate the arm transversely to the first optical path. Furthermore, the control device performs steps a), b), and c). In step a), based on whether the light irradiated by the first illuminating unit is received by the first light receiving unit, a first rotation angle of the arm is detected when the first optical path changes from being unblocked by the arm to being blocked by the arm. In step b), based on whether the light irradiated by the first illuminating unit is received by the first light receiving unit, a second rotation angle of the arm is detected when the first optical path changes from being blocked by the arm to being unblocked by the arm. In step c), the position of the first rotation axis of the arm is determined based on the width of the portion of the arm that passes through the first optical path, the position of the first intersection of the first optical path and the arm when the first optical path is blocked, the first rotation angle, and the second rotation angle.

[0010] Effects of the Invention

[0011] According to various aspects and embodiments of the present invention, it is possible to perform teaching of a robot arm with high precision. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a schematic plan view showing an example of the processing system in the first embodiment.

[0013] Figure 2 This is a schematic cross-sectional view showing an example of the vacuum transport module and the atmospheric transport module in the first embodiment.

[0014] Figure 3 This is a schematic cross-sectional view showing another example of the vacuum transport module and the atmospheric transport module.

[0015] Figure 4 This is a schematic cross-sectional view showing another example of the vacuum transport module and the atmospheric transport module.

[0016] Figure 5 This is a diagram showing an example of a robot arm.

[0017] Figure 6 This is a flowchart showing an example of a teaching method for the robot arm in the first embodiment.

[0018] Figure 7 This is a diagram showing an example of a teaching procedure for a robot arm.

[0019] Figure 8 This is a diagram showing an example of a teaching procedure for a robot arm.

[0020] Figure 9 This is a diagram showing an example of a teaching procedure for a robot arm.

[0021] Figure 10 This is a diagram for explaining an example of a method for determining the position of the rotation axis of the first arm in the first embodiment.

[0022] Figure 11 This is a diagram showing an example of a teaching procedure for a robot arm.

[0023] Figure 12 This is a diagram showing an example of a teaching procedure for a robot arm.

[0024] Figure 13 It is a schematic plan view showing an example of a processing system in the second embodiment.

[0025] Figure 14 This is a schematic cross-sectional view showing an example of a vacuum transport module and an atmospheric transport module in the second embodiment.

[0026] Figure 15 This is a flowchart showing an example of a teaching method for a robot arm in the second embodiment.

[0027] Figure 16 This is a flowchart showing an example of a teaching method for a robot arm in the second embodiment.

[0028] Figure 17 This is a flowchart showing an example of a teaching method for a robot arm in the second embodiment.

[0029] Figure 18 This is a diagram showing an example of a teaching procedure for a robot arm.

[0030] Figure 19 This is a diagram showing an example of a teaching procedure for a robot arm.

[0031] Figure 20 This is a diagram showing an example of a teaching procedure for a robot arm.

[0032] Figure 21 This is a diagram showing an example of a teaching procedure for a robot arm.

[0033] Figure 22 This is a diagram showing an example of a teaching procedure for a robot arm.

[0034] Figure 23 This is a diagram for explaining an example of a method for determining the position of the rotation axis of the first arm in the second embodiment.

[0035] Figure 24 This is a diagram for explaining an example of a method for determining the position of the rotation axis of the first arm in the second embodiment.

[0036] Figure 25 This is a diagram for explaining an example of a method for determining the position of the rotation axis of the first arm in the second embodiment.

[0037] Figure 26 This is a diagram showing an example of hardware of a control device.

[0038] Description of Reference Numerals

[0039] G Gate

[0040] L optical path

[0041] P position

[0042] W Width

[0043] 1 Processing system

[0044] 10 Main Body

[0045] 11 Vacuum conveying module

[0046] 110 guide rail

[0047] 12 Processing Module

[0048] 13 Load lock module

[0049] 14 Atmospheric transport module

[0050] 140 guide rail

[0051] 15 Loading Port

[0052] 20 Robotic Arm

[0053] 21 base

[0054] 22a First driving unit

[0055] 22b Second driving unit

[0056] 22c Third drive unit

[0057] 23a First Arm

[0058] 23b Second Arm

[0059] 23c Third Arm

[0060] 24a Part 1

[0061] 24b Part 2

[0062] 24c Part 3

[0063] 25 End Effector

[0064] 30 sensors

[0065] 31 Irradiation Department

[0066] 32 Light receiving part

[0067] 100 Control Device

[0068] 101 Processor

[0069] 102 RAM

[0070] 103 ROM

[0071] 104 Auxiliary storage device

[0072] 105 Communication I / F

[0073] 106 Input / Output I / F

[0074] 107 Media I / F

[0075] 108 Recording medium. DETAILED DESCRIPTION

[0076] Hereinafter, embodiments of the disclosed conveyor device and teaching method for a robot arm will be described in detail based on the accompanying drawings. Note that the disclosed conveyor device and teaching method for a robot arm are not limited to the following embodiments.

[0077] (First embodiment)

[0078] [Structure of Processing System 1]

[0079] Figure 1 1 is a schematic plan view showing an example of the processing system 1 in the first embodiment. Figure 1 For convenience, some of the internal components of the device are shown in the figure. The processing system 1 includes a main body 10 and a control device 100 for controlling the main body 10. The processing system 1 is an example of a conveying device.

[0080] The main body 10 includes a vacuum transport module 11, a plurality of processing modules 12, a plurality of load lock modules 13, and an atmospheric transport module 14. The plurality of processing modules 12 are connected to the side wall of the vacuum transport module 11 via a gate valve G1. Figure 1 In the example shown in FIG. 5 , six processing modules 12 are connected to the vacuum transport module 11 . However, the number of processing modules 12 connected to the vacuum transport module 11 may be 5 or less, or 7 or more.

[0081] Each processing module 12 performs etching, film formation and other processes on the substrate to be processed, thereby forming a semiconductor device on the substrate. A plurality of load lock modules 13 are connected to the other side wall of the vacuum transfer module 11 via a gate G2. Figure 1 In the example, two load lock modules 13 are connected to the vacuum transfer module 11 , but the number of load lock modules 13 connected to the vacuum transfer module 11 may be one or more.

[0082] A robot arm 20 is disposed within the vacuum transfer module 11. The robot arm 20 moves within the vacuum transfer module 11 along a guide rail 110 provided within the vacuum transfer module 11. Furthermore, the robot arm 20 transports substrates between a processing module 12 and another processing module 12, and between a processing module 12 and a load lock module 13. Alternatively, the robot arm 20 may be fixed to a predetermined position within the vacuum transfer module 11 and not move within the vacuum transfer module 11. The interior of the vacuum transfer module 11 is maintained at a pressure lower than atmospheric pressure.

[0083] Each load lock module 13 is connected to the vacuum transfer module 11 on one side via a gate G2, and to the atmospheric transfer module 14 on the other side via a gate G3. After a substrate is transferred from the atmospheric transfer module 14 into the load lock module 13 via gate G3, gate G3 is closed, reducing the pressure within the load lock module 13 from atmospheric pressure to a preset pressure. Gate G2 is then opened, and the robotic arm 20 transfers the substrate from the load lock module 13 into the vacuum transfer module 11.

[0084] With the pressure inside the load lock module 13 lower than atmospheric pressure, the robot arm 20 transfers the substrate from the vacuum transfer module 11 into the load lock module 13 via the gate G2, and the gate G2 is closed. The pressure inside the load lock module 13 is then raised to atmospheric pressure. Then, the gate G3 is opened, and the substrate in the load lock module 13 is transferred to the atmospheric transfer module 14.

[0085] Multiple load ports 15 are provided on the side wall of atmospheric transfer module 14 opposite to the side wall where gate G3 is provided. A container such as a FOUP (Front Opening Unified Pod) capable of storing multiple substrates is connected to each load port 15. Furthermore, an alignment module, etc., for adjusting the orientation of substrates may be provided in atmospheric transfer module 14.

[0086] The pressure within the atmospheric conveying module 14 is atmospheric pressure. A robotic arm 20 is disposed within the atmospheric conveying module 14. The robotic arm 20 moves within the atmospheric conveying module 14 along a guide rail 140 disposed within the atmospheric conveying module 14, transporting substrates between the load lock module 13 and a container connected to the load port 15. The robotic arm 20 may also be fixed to a predetermined position within the atmospheric conveying module 14 and not move within the atmospheric conveying module 14.

[0087] An FFU (Fan Filter Unit) or the like is installed above the atmospheric conveying module 14. Air from which particles have been removed is supplied from above into the atmospheric conveying module 14, forming a downward flow within the module. While the atmosphere within the atmospheric conveying module 14 is maintained at atmospheric pressure in this embodiment, the pressure within the module can alternatively be controlled to a positive pressure. This prevents particles from entering the module 14 from the outside.

[0088] Furthermore, sensors 30 for detecting the position of the robot arm 20 are provided in the vacuum transport module 11 and the atmospheric transport module 14 . Figure 2 FIG. 1 is a schematic cross-sectional view showing an example of the vacuum transport module 11 and the atmospheric transport module 14 in the first embodiment. The sensor 30 is, for example, Figure 2 As shown, the illuminating unit 31 includes an illuminating unit 31 and a light receiving unit 32. The illuminating unit 31 irradiates light along an optical path L. The light receiving unit 32 receives the light irradiated from the illuminating unit 31. In this embodiment, the light receiving unit 32 is provided on the optical path L. The illuminating unit 31 is an example of a first illuminating unit, the light receiving unit 32 is an example of a first light receiving unit, and the optical path L is an example of a first optical path.

[0089] In this embodiment, the irradiation unit 31 is, for example, a laser irradiation device, and irradiates a point light having a diameter of several millimeters or less along the optical path L. In this embodiment, the irradiation unit 31 irradiates light in a vertical direction. The light irradiated from the irradiation unit 31 in the vertical direction is blocked by the robot 20 when the robot 20 crosses the optical path L. When the optical path L is blocked by the robot 20, the light irradiated from the irradiation unit 31 is irradiated to a position P on the robot 20. Position P is an example of the position of the first intersection of the optical path L and the robot 20 when the optical path L is blocked by the robot 20.

[0090] In this embodiment, the control device 100 determines whether the light emitted from the irradiation unit 31 is blocked by the robot arm 20 by determining whether the light receiving unit 32 receives the light emitted from the irradiation unit 31. Furthermore, the control device 100 determines whether the robot arm 20 has passed near the sensor 30 by determining whether the light emitted from the irradiation unit 31 is blocked by the robot arm 20.

[0091] In this embodiment, the optical path L is a vertical optical path, so the position P coincides with the positions of the irradiating unit 31 and the light receiving unit 32 (i.e., the position of the sensor 30) in the horizontal plane. Alternatively, the irradiating unit 31 may be located below the vacuum transfer module 11, and the light receiving unit 32 may be located above the vacuum transfer module 11, with the irradiating unit 31 irradiating light upward in the vertical direction.

[0092] In addition, in this embodiment, the optical path L is an optical path along the vertical direction, but as another embodiment, for example, Figure 3 As shown, the optical path L may also be an optical path along a direction inclined relative to the vertical direction. Figure 3 In the example of , the position P is different from the positions of the irradiating portion 31 and the light receiving portion 32 (ie, the position of the sensor 30 ) in the direction within the horizontal plane.

[0093] In addition, in this embodiment, the control device 100 determines that the light irradiated from the irradiating unit 31 is blocked by the robot 20 when the light irradiated from the irradiating unit 31 is not received by the light receiving unit 32, but the technology of the present invention is not limited to this. Figure 4As shown, when the light irradiated from the irradiating unit 31 along the optical path L is reflected by the robot 20 at the position P and received by the light receiving unit 32 , it can also be determined that the light irradiated from the irradiating unit 31 is blocked by the robot 20 .

[0094] [Structure of Robotic Arm 20]

[0095] Figure 5 This figure shows an example of a robot arm 20. The robot arm 20 includes a base 21, a first drive unit 22a, a second drive unit 22b, a third drive unit 22c, a first arm 23a, a second arm 23b, and a third arm 23c. The first drive unit 22a and the first arm 23a are mounted on the base 21. The second drive unit 22b and the second arm 23b are mounted on the first arm 23a. The third drive unit 22c and the third arm 23c are mounted on the second arm 23b. The first drive unit 22a is an example of a drive unit, and the first arm 23a is an example of an arm.

[0096] The first arm 23a includes a first portion 24a having a substantially constant width along the longitudinal direction of the first arm 23a. The second arm 23b includes a second portion 24b having a substantially constant width along the longitudinal direction of the second arm 23b. The third arm 23c includes a third portion 24c having a substantially constant width along the longitudinal direction of the third arm 23c. An end effector 25 capable of placing a substrate is provided at the distal end of the third arm 23c.

[0097] The first drive unit 22a rotates the first arm 23a relative to the base 21 about the rotation axis of the first drive unit 22a. The second drive unit 22b rotates the second arm 23b relative to the first arm 23a about the rotation axis of the second drive unit 22b. The third drive unit 22c rotates the third arm 23c relative to the second arm 23b about the rotation axis of the third drive unit 22c.

[0098] [Teaching method of robot arm 20]

[0099] Figure 6 This is a flowchart showing an example of a teaching method for the robot arm 20 in the first embodiment. Figure 6 The illustrated process is implemented by the control device 100 controlling the robot arm 20 and the sensor 30. Figure 6 Before the illustrated process, the robot arm 20 is controlled as follows, for example Figure 7 Illustrate such position and posture. Figure 7 In the illustrated example, the control device 100 controls the first driving unit 22 a so that the first arm 23 a faces a preset reference direction d near the light receiving unit 32 .

[0100] First, the control device 100 controls the irradiation unit 31 to irradiate light, and confirms that the light irradiated from the irradiation unit 31 is received by the light receiving unit 32. Then, for example, Figure 7 As shown, the control device 100 controls the first driving unit 22a to start the rotation of the first arm 23a (S100). In step S100, the control device 100 controls the first driving unit 22a to make the first portion 24a of the first arm 23a pass over the light receiving unit 32. Figure 7 In the example shown in FIG. 2 , the first arm 23 a rotates clockwise, but the first arm 23 a may rotate counterclockwise.

[0101] When the first arm 23a passes over the light receiving portion 32, for example, Figure 8 As shown, the light emitted from the irradiating section 31 is blocked by the first arm 23a, and the light from the irradiating section 31 cannot be received by the light receiving section 32. Based on the fact that the light emitted from the irradiating section 31 is blocked by the first arm 23a, the control device 100 detects that the state of the light from the irradiating section 31 being received by the light receiving section 32 has changed to a state of not being received by the light receiving section 32. Then, the control device 100 detects the rotation angle θ of the first arm 23a when the light from the irradiating section 31 changes from being received by the light receiving section 32 to a state of not being received by the light receiving section 32. A (S101) Step S101 is an example of step a), and the rotation angle θ A is an example of the first rotation angle.

[0102] When the first arm 23a is further rotated, for example Figure 9 As shown, the light blocking by the first arm 23a is released, allowing the light irradiated from the irradiating section 31 to be received by the light receiving section 32 again. Based on the fact that the blocking by the first arm 23a is released, the control device 100 detects that the light from the irradiating section 31 has changed from a state not received by the light receiving section 32 to a state received by the light receiving section 32. Then, the control device 100 detects the rotation angle θ of the first arm 23a when the light from the irradiating section 31 changes from a state not received by the light receiving section 32 to a state received by the light receiving section 32. B (S102) Step S102 is an example of step b), and the rotation angle θ B is an example of the second rotation angle.

[0103] Next, the control device 100 determines the position O of the rotation axis of the first arm 23a (S103). Step S103 is an example of step c). In step S103, the control device 100 determines the position O of the rotation axis of the first arm 23a based on the width of the first portion 24a of the first arm 23a, the position P of the intersection of the optical path L and the first arm 23a, and the rotation angle θ. A and the rotation angle θ B, the position O of the rotation axis of the first arm 23a is determined. The position O of the rotation axis of the first arm 23a is an example of the position of the first rotation axis.

[0104] Figure 10 This is a diagram for explaining an example of a method for determining the position of the rotation axis of the first arm 23 a in the first embodiment. Figure 10 The triangle AOB is an isosceles triangle, and the angle ∠AOB is (θ B -θ A ), so the angle of ∠AOP is (θ B -θ A ) / 2. In addition, since the width W of the first portion 24a of the first arm 23a is known, Figure 10 The length of side AP in the illustrated right triangle AOP is W / 2.

[0105] thus, Figure 10 The length L of the side PO in the right triangle AOP is shown as PO It is represented by the following formula (1).

[0106]

[0107] ∠APO is 90 degrees - ∠POA, so it is possible to move a distance L from position P in the direction of ∠APO. PO The position of is determined as the position O of the rotation axis of the first arm 23a.

[0108] Furthermore, the first arm 23a rotates, whereby the optical path L of the light irradiated from the irradiation portion 31 is changed as follows, for example. Figure 10 As shown, the light path L is blocked by the first portion 24a of the first arm 23a, which has a substantially constant width in the longitudinal direction. The width of the first portion 24a is known. Since the light path L is blocked by the first portion 24a of the first arm 23a, even if the position of the first arm 23a is slightly offset relative to the light receiving portion 32, it can be determined with high accuracy. Figure 10 The length of side AP in triangle AOP.

[0109] Next, the control device 100 takes the position O of the rotation axis determined in step S103 as the center, for example, Figure 11 As shown, the first arm 23a is rotated to a preset angle θ1 (S104). Angle θ1 is an angle from the reference direction d. In this embodiment, angle θ1 is, for example, 110 degrees. Figure 11 In the illustrated state, light irradiated from the irradiation section 31 is received by the light receiving section 32 .

[0110] Next, the control device 100, for example, Figure 11In the state shown, the second drive unit 22b is controlled so that the second arm 23b starts to rotate clockwise (S105). In addition, the second arm 23b can also rotate counterclockwise.

[0111] Then, the second arm 23b passes over the light receiving unit 32, whereby the light emitted from the irradiating unit 31 is blocked by the second arm 23b. The control device 100 detects that the light from the irradiating unit 31 changes from being received by the light receiving unit 32 to not being received by the light receiving unit 32. The control device 100 then detects the rotation angle θ of the second arm 23b when the light from the irradiating unit 31 changes from being received by the light receiving unit 32 to not being received by the light receiving unit 32. A (S106).

[0112] Then, when the second arm 23b further rotates and the light blocking by the second arm 23b is released, the control device 100 detects that the light from the irradiating section 31 has changed from being not received by the light receiving section 32 to being received by the light receiving section 32. Then, the control device 100 detects the rotation angle θ of the second arm 23b when the light from the irradiating section 31 has changed from being not received by the light receiving section 32 to being received by the light receiving section 32. B (S107).

[0113] Next, the control device 100 Figure 10 The same procedure is followed to determine the position O of the rotation axis of the second arm 23b (S108). Then, the control device 100 uses the position O of the rotation axis determined in step S108 as the center, for example, Figure 12 As shown, the second arm 23b is rotated to a preset angle θ2 (S109). Angle θ2 is an angle from the direction of the first arm 23a. In this embodiment, angle θ2 is, for example, 10 degrees. Figure 12 In the illustrated state, light irradiated from the irradiation section 31 is received by the light receiving section 32 .

[0114] Next, the control device 100, for example, Figure 12 In the state shown, the third driving unit 22c is controlled to start the third arm 23c to rotate counterclockwise (S110). Alternatively, the third arm 23c may also rotate clockwise.

[0115] Then, the third arm 23c passes over the light receiving unit 32, whereby the light emitted from the irradiating unit 31 is blocked by the third arm 23c. The control device 100 detects that the light from the irradiating unit 31 changes from being received by the light receiving unit 32 to not being received by the light receiving unit 32. The control device 100 then detects the rotation angle θ of the third arm 23c when the light from the irradiating unit 31 changes from being received by the light receiving unit 32 to not being received by the light receiving unit 32. A (S111).

[0116] Then, when the third arm 23c further rotates and the light blocking by the third arm 23c is released, the control device 100 detects that the light from the irradiating section 31 has changed from being not received by the light receiving section 32 to being received by the light receiving section 32. Then, the control device 100 detects the rotation angle θ of the third arm 23c when the light from the irradiating section 31 has changed from being not received by the light receiving section 32 to being received by the light receiving section 32. B (S112).

[0117] Next, the control device 100 Figure 10 The position O of the rotation axis of the third arm 23c is determined in the same manner (S113). Then, the control device 100 ends the teaching method of the robot arm 20 shown in this flowchart. Figure 6 The positions of the rotation axes of the first arm 23a, the second arm 23b, and the third arm 23c are corrected based on the positions of the rotation axes determined by the teaching method of the robot arm 20. This allows the robot arm 20 to be taught with high accuracy.

[0118] The first embodiment has been described above. The processing system 1 in this embodiment includes a robot 20, an irradiation unit 31, a light receiving unit 32, and a control device 100. The robot 20 has a first arm 23a for conveying a substrate and a first drive unit 22a for rotating the first arm 23a. The irradiation unit 31 irradiates light along the optical path L. The light receiving unit 32 receives the light irradiated from the irradiation unit 31. The control device 100 controls the first drive unit 22a so as to rotate the first arm 23a across the optical path L. In addition, the control device 100 performs steps a), b), and c). In step a), based on whether the light irradiated from the irradiation unit 31 is received by the light receiving unit 32, the rotation angle θ of the first arm 23a when the optical path L is changed from a state where the optical path L is not blocked by the first arm 23a to a state where the optical path L is blocked by the first arm 23a is detected. A In step b), based on whether the light irradiated from the irradiating unit 31 is received by the light receiving unit 32, the rotation angle θ of the first arm 23a when the light path L changes from the state blocked by the first arm 23a to the state not blocked by the first arm 23a is detected. B In step c), based on the width of the first portion 24a of the first arm 23a passing through the optical path L, the position P of the intersection of the optical path L and the first arm 23a when the optical path L is blocked, the rotation angle θ A and the rotation angle θ B , the position O of the rotation axis of the first arm 23a is determined. This enables teaching of the robot arm 20 to be performed with high accuracy.

[0119] Furthermore, in the first embodiment described above, the light receiving unit 32 is provided on the optical path L. When the light receiving unit 32 changes from receiving light from the irradiating unit 31 to not receiving light from the irradiating unit, the control device 100 determines that the optical path L has changed from being unblocked by the first arm 23a to being blocked. Furthermore, when the light receiving unit 32 changes from not receiving light from the irradiating unit 31 to receiving light from the irradiating unit, the control device 100 determines that the optical path L has changed from being blocked by the first arm 23a to being unblocked by the first arm 23a. This makes it possible to easily determine whether the optical path L has changed from being unblocked by the first arm 23a to being blocked, and whether the optical path L has changed from being blocked by the first arm 23a to being unblocked by the first arm 23a.

[0120] Furthermore, in the above-described embodiment, the control device 100 controls the first drive unit 22a so as to rotate the portion of the first arm 23a having a constant outer width so as to cross the optical path L of the light emitted from the irradiation unit 31. Thus, even if the position of the first arm 23a is slightly offset, the position O of the rotation axis of the first arm 23a can be determined with high accuracy.

[0121] In the above-described embodiment, the robot arm 20 includes a first arm 23a, a second arm 23b mounted on the first arm 23a, a first drive unit 22a for rotating the first arm 23a, and a second drive unit 22b mounted on the first arm 23a for rotating the second arm 23b. The control device 100 controls the first drive unit 22a to perform steps a) through c) on the first arm 23a. After controlling the first arm 23a to a predetermined posture based on the position of the rotation axis of the first arm 23a determined in step c), the control device 100 controls the second drive unit 22b to perform steps a) through c) on the second arm 23b. This allows high-precision teaching of the robot arm 20 even in a multi-jointed robot arm 20.

[0122] (Second embodiment)

[0123] In the first embodiment, one sensor 30 is used to determine the position of the rotation axis of the robot arm 20 for one robot arm 20. However, in the robot arm 20, there may be a zero-point offset of the rotation angle, an installation error of the robot arm 20, etc. In such a case, it is difficult to determine the position of the rotation axis of the robot arm 20 with high precision using one sensor 30. Therefore, in this embodiment, two sensors 30 are used to determine the position of the rotation axis of the robot arm 20 for one robot arm 20. Thus, even in the case of a zero-point offset of the rotation angle, an installation error of the robot arm 20, etc., the position of the rotation axis of the robot arm 20 can be determined with high precision.

[0124] [Structure of Processing System 1]

[0125] Figure 13 1 is a schematic plan view showing an example of the processing system 1 in the second embodiment. Figure 13 For the sake of convenience, the internal components of some devices are shown in the figure in a perspective manner. In addition, except for the points described below, Figure 13 In the Figure 1 Structures with the same reference numerals have Figure 1 The structures in FIG and FIG have the same or similar functions, so the description is omitted.

[0126] Sensors 30 - 1 and 30 - 2 for detecting the position of the robot arm 20 are provided in the vacuum transport module 11 and the atmospheric transport module 14 . Figure 14 This is a schematic cross-sectional view showing an example of the vacuum conveying module 11 and the atmospheric conveying module 14 in the second embodiment. The sensor 30-1 includes an irradiating unit 31-1 and a light receiving unit 32-1. The sensor 30-2 includes an irradiating unit 31-2 and a light receiving unit 32-2. The irradiating unit 31-1 irradiates light along an optical path L1, and the irradiating unit 31-2 irradiates light along an optical path L2. The light receiving unit 32-1 is arranged on the optical path L1 and receives the light irradiated by the irradiating unit 31-1. The light receiving unit 32-2 is arranged on the optical path L2 and receives the light irradiated by the irradiating unit 31-2. The irradiating unit 31-1 is an example of a first irradiating unit, and the irradiating unit 31-2 is an example of a second irradiating unit. Furthermore, the light receiving unit 32-1 is an example of a first light receiving unit, and the light receiving unit 32-2 is an example of a second light receiving unit. Furthermore, the optical path L1 is an example of a first optical path, and the optical path L2 is an example of a second optical path.

[0127] In this embodiment, the irradiation units 31-1 and 31-2 irradiate light in the vertical direction. When the light irradiated from the irradiation unit 31-1 in the vertical direction is blocked by the robot 20, the light irradiated from the irradiation unit 31-1 is irradiated to a position P1 on the robot 20. Position P1 is an example of the position of the first intersection of the optical path L1 and the robot 20 when the optical path L1 is blocked by the robot 20. In addition, when the light irradiated from the irradiation unit 31-2 in the vertical direction is blocked by the robot 20, the light irradiated from the irradiation unit 31-2 is irradiated to a position P2 on the robot 20. Position P2 is an example of the position of the second intersection of the optical path L2 and the robot 20 when the optical path L2 is blocked by the robot 20.

[0128] In this embodiment, the control device 100 determines whether the light irradiated from the irradiating unit 31-1 is blocked by the robot arm 20 by determining whether the light receiving unit 32-1 receives the light irradiated from the irradiating unit 31-1. In addition, the control device 100 determines whether the light irradiated from the irradiating unit 31-2 is blocked by the robot arm 20 by determining whether the light receiving unit 32-2 receives the light irradiated from the irradiating unit 31-2.

[0129] In this embodiment, the optical path L1 is a vertical optical path, so the position P1 coincides with the position of the irradiating unit 31-1 and the light receiving unit 32-1 (i.e., the position of the sensor 30-1) in the horizontal plane. Furthermore, the optical path L2 is a vertical optical path, so the position P2 coincides with the position of the irradiating unit 31-2 and the light receiving unit 32-2 (i.e., the position of the sensor 30-2) in the horizontal plane. Furthermore, in this embodiment, the irradiating units 31-1 and 31-2 may be positioned below the vacuum transfer module 11, while the light receiving units 32-1 and 32-2 may be positioned above the vacuum transfer module 11.

[0130] In addition, in this embodiment, the optical path L1 and the optical path L2 may also be Figure 3 Similarly, it is a light path along a direction inclined relative to the vertical direction. Figure 4 Similarly, when the light irradiated from the irradiating unit 31-1 along the optical path L1 is reflected at the position P1 and received by the light receiving unit 32-1, the control device 100 determines that the light irradiated from the irradiating unit 31 is blocked by the robot arm 20. Figure 4 Likewise, when light emitted from the irradiation unit 31 - 2 along the optical path L2 is reflected at the position P2 and received by the light receiving unit 32 - 2 , the control device 100 determines that the light emitted from the irradiation unit 31 - 2 is blocked by the robot 20 .

[0131] [Teaching method of robot arm 20]

[0132] Figures 15 to 17 This is a flowchart showing an example of a teaching method for the robot arm 20 in the second embodiment. Figures 15 to 17 The illustrated process is implemented by the control device 100 controlling the robot arm 20 and the sensor 30. Figure 15 Before the illustrated process, the robot arm 20 is controlled as follows, for example Figure 18 Illustrate such position and posture. Figure 18 In the illustrated example, the control device 100 controls the first driving unit 22 a so that the first arm 23 a faces a preset reference direction d near the light receiving units 32 - 1 and 32 - 2 .

[0133] First, the control device 100 controls the irradiation units 31-1 and 31-2 to irradiate light, confirming that the light irradiated from the irradiation unit 31-1 is received by the light receiving unit 32-1 and the light irradiated from the irradiation unit 31-2 is received by the light receiving unit 32-2. Figure 18 As shown, the control device 100 controls the first driving unit 22a to start the rotation of the first arm 23a (S200). Figure 18 In the example shown in FIG. 2 , the first arm 23 a rotates clockwise, but the first arm 23 a may rotate counterclockwise.

[0134] When the first arm 23a passes through the light receiving portion 32-1, for example, Figure 19 As shown, the light emitted from the irradiating section 31-1 is blocked by the first arm 23a, and the light from the irradiating section 31-1 cannot be received by the light receiving section 32-1. Based on the fact that the light emitted from the irradiating section 31-1 is blocked by the first arm 23a, the control device 100 detects that the light from the irradiating section 31-1 has changed from being received by the light receiving section 32-1 to not being received by the light receiving section 32-1. Then, the control device 100 detects the rotation angle θ of the first arm 23a when the light from the irradiating section 31-1 has changed from being received by the light receiving section 32-1 to not being received by the light receiving section 32-1. A1 (S201) Step S201 is an example of step a), and the rotation angle θ A1 is an example of the first rotation angle.

[0135] When the first arm 23a is further rotated, for example Figure 20 As shown, the light emitted from the irradiating section 31-2 is blocked by the first arm 23a, and the light from the irradiating section 31-2 cannot be received by the light receiving section 32-2. The control device 100 detects that the light from the irradiating section 31-2 has changed from being received by the light receiving section 32-2 to not being received by the light receiving section 32-2 by the fact that the light emitted from the irradiating section 31-2 is blocked by the first arm 23a. Then, the control device 100 detects the rotation angle θ of the first arm 23a when the light from the irradiating section 31-2 has changed from being received by the light receiving section 32-2 to not being received by the light receiving section 32-2. A2 (S202) Step S202 is an example of step d), and the rotation angle θ A2 is an example of the third rotation angle.

[0136] When the first arm 23a is further rotated, for example Figure 21As shown, the light from the irradiation section 31-1 is blocked, and the light irradiated from the irradiation section 31-1 can be received by the light receiving section 32-1 again. Based on the fact that the blockage caused by the first arm 23a is cleared, the control device 100 detects that the light from the irradiation section 31-1 has changed from a state not received by the light receiving section 32-1 to a state received by the light receiving section 32-1. Then, the control device 100 detects the rotation angle θ of the first arm 23a when the light from the irradiation section 31-1 changes from a state not received by the light receiving section 32-1 to a state received by the light receiving section 32-1. B1 (S203) Step S203 is an example of step b), and the rotation angle θ B1 is an example of the second rotation angle.

[0137] When the first arm 23a is further rotated, for example Figure 22 As shown, the light from the irradiation section 31-2 is blocked, and the light irradiated from the irradiation section 31-2 can be received by the light receiving section 32-2 again. Based on the fact that the blockage caused by the first arm 23a is cleared, the control device 100 detects that the light from the irradiation section 31-2 has changed from a state not received by the light receiving section 32-2 to a state received by the light receiving section 32-2. Then, the control device 100 detects the rotation angle θ of the first arm 23a when the light from the irradiation section 31-2 has changed from a state not received by the light receiving section 32-2 to a state received by the light receiving section 32-2. B2 (S204). Step S204 is an example of step e), and the rotation angle θ B2 is an example of the fourth rotation angle.

[0138] Next, the control device 100 determines the position O1 of the rotation axis of the first arm 23a (S205). Step S205 is an example of step c). In step S205, the control device 100 determines the position O1 of the rotation axis of the first arm 23a based on the width of the first portion 24a of the first arm 23a passing through the optical path L1, the position P1 of the intersection of the optical path L1 and the first arm 23a, and the rotation angle θ. A1 and the rotation angle θ B1 , determine the position O1 of the first rotation axis of the first arm 23a.

[0139] Figure 23 This is a diagram for explaining an example of a method for determining the position of the rotation axis of the first arm 23 a in the second embodiment. Figure 23 The triangle AO1B is an isosceles triangle, and the angle ∠AO1B is (θ B1 -θ A1 ), so the angle of ∠AO1P1 is (θ B1 -θ A1 ) / 2. In addition, since the width W of the first portion 24a of the first arm 23a is known, Figure 23The length of side AP1 in the illustrated right triangle AO1P1 is W / 2.

[0140] thus, Figure 23 The length L of the side P1O1 in the right triangle AO1P1 is shown as P1O1 It is represented as the following formula (2).

[0141]

[0142] ∠AP1O1 is 90 degrees - ∠AO1P1, so it is possible to move a distance L from position P1 in the direction of ∠AP1O1. P1O1 The position of is determined as the position O1 of the first rotation axis of the first arm 23a.

[0143] Next, the control device 100 determines the position O2 of the rotation axis of the first arm 23a (S206). Step S206 is an example of step f). In step S206, the control device 100 determines the position O2 of the rotation axis of the first arm 23a based on the width of the first portion 24a of the first arm 23a, the position P2 of the intersection of the optical path L2 and the first arm 23a, and the rotation angle θ. A2 and the rotation angle θ B2 , determine the position O2 of the second rotation axis of the first arm 23a.

[0144] Figure 24 This is a diagram for explaining an example of a method for determining the position of the rotation axis of the first arm 23 a in the second embodiment. Figure 24 The triangle AO2B is an isosceles triangle, and the angle ∠AO2B is (θ B2 -θ A2 ), so the angle of ∠AO2P2 is (θ B2 -θ A2 ) / 2. In addition, since the width W of the first portion 24a of the first arm 23a is known, Figure 24 The length of side AP2 in the illustrated right triangle AO2P2 is W / 2.

[0145] thus, Figure 24 The length L of the side P2O2 in the right triangle AO2P2 is shown as follows: P2O2 It is represented as the following formula (3).

[0146]

[0147] ∠AP2O2 is 90 degrees - ∠AO2P2, so it is possible to move the distance L from position P2 in the direction of ∠AP2O2. P2O2 The position of φ is determined as the position O2 of the second rotation axis of the first arm 23a.

[0148] Next, the control device 100 determines the position O of the rotation axis of the first arm 23a using the position O1 of the first rotation axis and the position O2 of the second rotation axis (S207). Step S207 is an example of step g). In step S207, for example, Figure 25 As shown, the intersection of a first circle C1 centered at position P1 and passing through position O1 of the first rotation axis and a second circle C2 centered at position P2 and passing through position O2 of the second rotation axis is determined as position O of the rotation axis of the first arm 23a.

[0149] In addition, Figure 25 In the example, the angle formed by line segments P1O1 and P1O, and the angle formed by line segments P2O2 and P2O, is the same angle Δθ. This angle Δθ is the same as the zero offset of the angle of the first arm 23a. Therefore, by determining the angle formed by line segments P1O1 and P1O, or the angle formed by line segments P2O2 and P2O, the magnitude of the zero offset of the angle of the first arm 23a can be determined. Thus, the zero offset of the first arm 23a can be corrected based on the magnitude of the determined zero offset.

[0150] Next, the control device 100 takes the position O of the rotation axis determined in step S207 as the center, for example, Figure 11 As shown, the first arm 23a is rotated to a preset angle θ1 (S208).

[0151] Next, the control device 100, for example, Figure 11 In the state shown, the second drive unit 22b is controlled so that the second arm 23b starts to rotate clockwise (S210). Then, the second arm 23b passes above the light receiving unit 32-1, whereby the light irradiated from the irradiating unit 31-1 is blocked by the second arm 23b. Thus, the control device 100 detects that the light from the irradiating unit 31-1 changes from being received by the light receiving unit 32-1 to not being received by the light receiving unit 32-1. Then, the control device 100 detects the rotation angle θ of the second arm 23b when the light from the irradiating unit 31-1 changes from being received by the light receiving unit 32-1 to not being received by the light receiving unit 32-1. A1 (S211).

[0152] As the second arm 23b rotates further, it passes above the light receiving portion 32-2, and the light emitted from the irradiating portion 31-2 is blocked by the second arm 23b. Consequently, the control device 100 detects that the light from the irradiating portion 31-2 has changed from being received by the light receiving portion 32-2 to not being received by the light receiving portion 32-2. The control device 100 then detects the rotation angle θ of the second arm 23b at which the light from the irradiating portion 31-2 has changed from being received by the light receiving portion 32-2 to not being received by the light receiving portion 32-2. A2(S212).

[0153] When the second arm 23b rotates further, the light from the irradiation section 31-1 is no longer blocked, and the light irradiated from the irradiation section 31-1 can be received by the light receiving section 32-1 again. Based on the fact that the blockage caused by the second arm 23b is no longer blocked, the control device 100 detects that the light from the irradiation section 31-1 has changed from being not received by the light receiving section 32-1 to being received by the light receiving section 32-1. Then, the control device 100 detects the rotation angle θ of the second arm 23b when the light from the irradiation section 31-1 changes from being not received by the light receiving section 32-1 to being received by the light receiving section 32-1. B1 (S213).

[0154] When the second arm 23b rotates further, the light from the irradiation section 31-2 is no longer blocked, and the light irradiated from the irradiation section 31-2 can be received by the light receiving section 32-2 again. Based on the fact that the blockage caused by the second arm 23b is no longer blocked, the control device 100 detects that the light from the irradiation section 31-2 has changed from not being received by the light receiving section 32-2 to being received by the light receiving section 32-2. Then, the control device 100 detects the rotation angle θ of the second arm 23b when the light from the irradiation section 31-2 changes from not being received by the light receiving section 32-2 to being received by the light receiving section 32-2. B2 (S214).

[0155] Next, the control device 100 Figure 23 The position O1 of the first rotation axis of the second arm 23b is determined in the same manner as in the example step (S215). Then, the control device 100 Figure 24 The position O2 of the second rotation axis of the second arm 23b is determined in the same manner as in the example step (S216). Then, the control device 100 performs the same Figure 25 In the same steps as the steps shown in the example, the position O of the rotation axis of the second arm 23b is determined using the position O1 of the first rotation axis and the position O2 of the second rotation axis. Then, the magnitude of the angular zero offset of the second arm 23b is determined based on the angle formed by the line segment P1O1 and the line segment P1O or the angle formed by the line segment P2O2 and the line segment P2O (S217). Then, the control device 100 uses the position O of the rotation axis determined in step S217 as the center, for example, Figure 12 As shown, the second arm 23b is rotated to a preset angle θ2 (S218).

[0156] Next, the control device 100, for example, Figure 12In the state shown, the third driving unit 22c is controlled so that the third arm 23c starts to rotate clockwise (S220). Then, the third arm 23c passes above the light receiving unit 32-1, whereby the light irradiated from the irradiating unit 31-1 is blocked by the third arm 23c. Thus, the control device 100 detects that the light from the irradiating unit 31-1 changes from being received by the light receiving unit 32-1 to not being received by the light receiving unit 32-1. Then, the control device 100 detects the rotation angle θ of the third arm 23c when the light from the irradiating unit 31-1 changes from being received by the light receiving unit 32-1 to not being received by the light receiving unit 32-1. A1 (S221).

[0157] As the third arm 23c rotates further, it passes above the light receiving portion 32-2, and the light emitted from the irradiating portion 31-2 is blocked by the third arm 23c. As a result, the control device 100 detects that the light from the irradiating portion 31-2 has changed from being received by the light receiving portion 32-2 to not being received by the light receiving portion 32-2. The control device 100 then detects the rotation angle θ of the third arm 23c when the light from the irradiating portion 31-2 has changed from being received by the light receiving portion 32-2 to not being received by the light receiving portion 32-2. A2 (S222).

[0158] When the third arm 23c rotates further, the light from the irradiation section 31-1 is no longer blocked, and the light irradiated from the irradiation section 31-1 can be received by the light receiving section 32-1 again. Based on the fact that the blockage caused by the third arm 23c is no longer blocked, the control device 100 detects that the light from the irradiation section 31-1 has changed from not being received by the light receiving section 32-1 to being received by the light receiving section 32-1. Then, the control device 100 detects the rotation angle θ of the third arm 23c when the light from the irradiation section 31-1 changes from not being received by the light receiving section 32-1 to being received by the light receiving section 32-1. B1 (S223).

[0159] When the third arm 23c rotates further, the light from the irradiation section 31-2 is no longer blocked, and the light irradiated from the irradiation section 31-2 can be received by the light receiving section 32-2 again. Based on the fact that the blockage caused by the third arm 23c is no longer blocked, the control device 100 detects that the light from the irradiation section 31-2 has changed from not being received by the light receiving section 32-2 to being received by the light receiving section 32-2. Then, the control device 100 detects the rotation angle θ of the third arm 23c when the light from the irradiation section 31-2 has changed from not being received by the light receiving section 32-2 to being received by the light receiving section 32-2. B2 (S224).

[0160] Next, the control device 100 Figure 23 The position O1 of the first rotation axis of the third arm 23c is determined in the same manner as in the steps shown in FIG. 2 (S225). Then, the control device 100 performs the same Figure 24 The position O2 of the second rotation axis of the third arm 23c is determined in the same manner as in the steps shown in FIG. 2 (S226). Then, the control device 100 performs the same Figure 25 In a similar manner to the steps shown in the flowchart, the position O of the rotation axis of the third arm 23c is determined using the position O1 of the first rotation axis and the position O2 of the second rotation axis. Furthermore, the magnitude of the angular zero offset of the third arm 23c is determined based on the angle formed by the line segments P1O1 and P1O, or the angle formed by the line segments P2O2 and P2O (S227). The control device 100 then terminates the teaching method for the robot arm 20 shown in this flowchart.

[0161] The second embodiment has been described above. The processing system 1 in this embodiment includes an irradiating unit 31-1, an irradiating unit 31-2, a light receiving unit 32-1, and a light receiving unit 32-2. The irradiating unit 31-2 irradiates light along the light path L2 that can be blocked by the first arm 23a at a position P2 different from the position P1 of the intersection of the light path L1 and the first arm 23a. The light receiving unit 32-2 receives the light irradiated from the irradiating unit 31-2. The control device 100 performs steps d) to g). In step d), based on whether the light irradiated from the irradiating unit 31-2 is received by the light receiving unit 32-2, the rotation angle θ of the first arm 23a is detected when the light path L2 is blocked by the first arm 23a from the state where the light path L2 is not blocked by the first arm 23a to the state where the light path L2 is blocked by the first arm 23a. A2 In step e), based on whether the light irradiated from the irradiating unit 31-2 is received by the light receiving unit 32-2, the rotation angle θ of the first arm 23a is detected when the light path L2 is changed from being blocked by the first arm 23a to being not blocked by the first arm 23a. B2 In step f), based on the width of the first portion 24a of the first arm 23a that passes through the optical path L2, the position P2 of the intersection of the optical path L2 and the first arm 23a when the optical path L2 is blocked, the rotation angle θ A2 and the rotation angle θ B2, the position O2 of the second rotation axis of the first arm 23a is determined. In step g), the intersection of a first circle C1 centered at position P1 and passing through the first rotation axis position O1 and a second circle C2 centered at position P2 and passing through the second rotation axis position O2 is determined as the corrected rotation axis position O of the first arm 23a. Furthermore, the magnitude of the angular zero offset of the first arm 23a is determined based on the angle formed by line segment P1O1 and line segment P1O, or the angle formed by line segment P2O2 and line segment P2O. Thus, even if the robot arm 20 within the vacuum transfer module 11 or the atmospheric transfer module 14 has offsets in coordinates or rotation angles, the control device 100 can detect and correct these offsets. Consequently, teaching the robot arm 20 can be performed with high precision and ease.

[0162] In addition, the teaching data that has been temporarily determined based on the design values ​​can also be corrected or updated based on the values ​​obtained by the method of the first embodiment or the second embodiment described above. For example, teaching data that is the design value of each transport target such as the processing module 12 and the load lock module 13 is pre-stored in a storage unit such as an auxiliary storage device or RAM (Random Access Memory) of the control device 100. The pre-stored teaching data includes, for example, information indicating how many times each rotation axis of the robot arm 20 needs to rotate each time and information indicating the length of each arm. Moreover, the teaching data that has been pre-stored as the design value is corrected or updated based on the results of sensing (sensor detection) by the method shown in the first embodiment or the second embodiment described above. Thereafter, the control device 100 controls each arm of the robot arm 20 based on the teaching data to transport the substrate to each transport target.

[0163] [hardware]

[0164] Figure 26 1 is a diagram showing an example of hardware of the control device 100 . The control device 100 includes a processor 101 , a RAM 102 , a ROM 103 , an auxiliary storage device 104 , a communication interface (I / F) 105 , an input / output interface (I / F) 106 , and a media interface (I / F) 107 .

[0165] Processor 101 operates and controls each unit based on programs stored in ROM 103 or auxiliary storage device 104. ROM 103 stores a boot program executed by processor 101 when control device 100 is activated, and programs depending on the hardware of control device 100.

[0166] The auxiliary storage device 104 is, for example, an HDD (Hard Disk Drive) or an SSD (Solid State Drive), and stores programs executed by the processor 101 and data used by the programs. The processor 101 reads the programs from the auxiliary storage device 104, loads them into the RAM 102, and executes the loaded programs.

[0167] The communication I / F 105 communicates with the main body 10 via a communication line such as a LAN (Local Area Network). The communication I / F 105 receives data from the main body 10 via the communication line and transmits it to the processor 101. It also transmits data generated by the processor 101 to the main body 10 via the communication line. The processor 101 acquires sensing information, for example, from the sensor 30, via the communication I / F 105. Furthermore, the processor 101 transmits control signals, for example, for driving the robot arm 20, to the robot arm 20 via the communication I / F 105.

[0168] The processor 101 controls input devices such as a keyboard and output devices such as a display via the I / O I / F 106. The processor 101 receives signals from the input devices via the I / O I / F 106 and transmits them to the processor 101. The processor 101 also outputs generated data to the output devices via the I / O I / F 106.

[0169] The media I / F 107 reads programs or data stored in the recording medium 108 and stores them in the auxiliary storage device 104. The recording medium 108 is, for example, an optical recording medium such as a DVD (Digital Versatile Disc) or a PD (Phasechange Rewritable Disk), a magneto-optical recording medium such as an MO (Magneto-Optical Disk), a magnetic tape medium, a magnetic recording medium, or a semiconductor memory.

[0170] The processor 101 of the control device 100 controls the various components of the main body 10 by executing the program loaded into the RAM 102. The processor 101 reads the program loaded into the RAM 102 from the recording medium 108 and stores it in the auxiliary storage device 104. However, as another example, the processor 101 may obtain the program from another device via a communication line and store it in the auxiliary storage device 104. Alternatively, the processor 101 may load the program obtained from another device via a communication line into the RAM 102 for execution without storing it in the auxiliary storage device 104.

[0171] [other]

[0172] In addition, the technology disclosed in the present application is not limited to the above-described embodiment, and various modifications can be made within the scope of the gist of the technology.

[0173] For example, in each of the above-mentioned embodiments, the robot arm 20 transports substrates, but the disclosed technology is not limited thereto. The robot arm 20 may also transport consumable components such as edge rings within the processing module 12 .

[0174] The embodiments disclosed herein are intended to be illustrative in all respects and not restrictive. The embodiments described above can be implemented in a variety of ways. Furthermore, the embodiments described above may be omitted, replaced, or modified in various ways without departing from the scope of the appended claims and their intended meanings.

Claims

1. A conveying device for conveying a substrate, characterized in that: include: a robot arm having an arm for conveying the substrate and a driving portion for rotating the arm; a first irradiation portion for irradiating light along a first light path; a first light receiving portion for receiving the light irradiated from the first irradiating portion; as well as a control device that controls the drive unit to rotate the arm so as to cross the first optical path, The control device performs the following steps: Step a) detecting a first rotation angle of the arm when the first light path is blocked by the arm from a state where the first light path is blocked by the arm, based on whether the light irradiated from the first irradiating portion is received by the first light receiving portion; b) detecting a second rotation angle of the arm when the first light path is not blocked by the arm from being blocked by the arm, based on whether the light irradiated from the first irradiating portion is received by the first light receiving portion; as well as step c) determining the position of a first rotation axis of the arm based on the width of the portion of the arm passing through the first light path, the position of a first intersection of the first light path and the arm when the first light path is blocked, the first rotation angle, and the second rotation angle; The control device controls the driving unit so as to rotate the portion of the arm having a constant outer width so as to cross the first optical path of the light irradiated from the first irradiating unit.

2. The conveying device according to claim 1, characterized in that: The first light receiving portion is arranged on the first light path, The control device, When the state in which the first light receiving portion receives light irradiated from the first irradiating portion changes to a state in which the first light receiving portion does not receive light irradiated from the first irradiating portion, it is determined that the first light path changes from a state not blocked by the arm to a state blocked by the arm. When the state where the first light receiving portion does not receive light irradiated from the first irradiating portion changes to the state where the first light receiving portion receives light irradiated from the first irradiating portion, it is determined that the first optical path changes from being blocked by the arm to being not blocked by the arm.

3. The conveying device according to claim 1 or 2, characterized in that: The arm has: First Arm; and a second arm disposed on the first arm, The driving unit has: a first drive portion for rotating the first arm; and a second driving unit provided on the first arm to rotate the second arm; The control device performs steps a) to c) on the first arm by controlling the first drive unit, and after controlling the first arm to a predetermined posture based on the position of the first rotation axis determined by step c), performs steps a) to c) on the second arm by controlling the second drive unit.

4. The conveying device according to claim 1 or 2, characterized in that include: a second irradiation section that irradiates light along a second light path that can be blocked by the arm at a position different from the position of an intersection of the first light path and the arm when the first light path is blocked by the arm; and a second light receiving portion that receives the light irradiated from the second irradiating portion, The control device further performs the following steps: step d) detecting a third rotation angle of the arm when the second light path is blocked by the arm from a state where the second light path is blocked by the arm, based on whether the light irradiated from the second irradiating portion is received by the second light receiving portion; step e) detecting a fourth rotation angle of the arm when the second light path is not blocked by the arm from being blocked by the arm, based on whether the light irradiated from the second irradiating portion is received by the second light receiving portion; f) determining the position of the second rotation axis of the arm based on the width of the portion of the arm passing through the second optical path, the position of a second intersection of the second optical path and the arm when the second optical path is blocked, the third rotation angle, and the fourth rotation angle; as well as Step g) determining the intersection of a first circle centered at the first intersection point and passing through the first rotation axis and a second circle centered at the second intersection point and passing through the second rotation axis as the position of the corrected rotation axis of the arm.

5. A teaching method for a robotic arm in a conveying device, characterized in that: The conveying device comprises: a robot arm having an arm for conveying a substrate and a driving portion for rotating the arm; a first irradiation portion for irradiating light along a first light path; a first light receiving portion that receives the light irradiated from the first irradiating portion; and a control device that controls the drive unit to rotate the arm so as to cross the first optical path, In the teaching method of the robotic arm, the control device performs the following steps: Step a) detecting a first rotation angle of the arm when the first light path is blocked by the arm from a state where the first light path is blocked by the arm, based on whether the light irradiated from the first irradiating portion is received by the first light receiving portion; b) detecting a second rotation angle of the arm when the first light path is not blocked by the arm from the state where the first light path is blocked by the arm, based on whether the light irradiated from the first irradiating portion is received by the first light receiving portion; and step c) determining the position of a first rotation axis of the arm based on the width of the portion of the arm passing through the first light path, the position of a first intersection of the first light path and the arm when the first light path is blocked, the first rotation angle, and the second rotation angle; The control device controls the driving unit so as to rotate the portion of the arm having a constant outer width so as to cross the first optical path of the light irradiated from the first irradiating unit.

6. The teaching method of a robot arm according to claim 5, wherein: The first light receiving portion is arranged on the first light path, The control device, When the state in which the first light receiving portion receives light irradiated from the first irradiating portion changes to a state in which the first light receiving portion does not receive light irradiated from the first irradiating portion, it is determined that the first light path changes from a state not blocked by the arm to a state blocked by the arm. When the state where the first light receiving portion does not receive light irradiated from the first irradiating portion changes to the state where the first light receiving portion receives light irradiated from the first irradiating portion, it is determined that the first optical path changes from being blocked by the arm to being not blocked by the arm.

7. The teaching method of a robot arm according to claim 5 or 6, wherein: The arm has: First Arm; and a second arm disposed on the first arm, The driving unit has: a first drive portion for rotating the first arm; and a second driving unit provided on the first arm to rotate the second arm; The control device performs steps a) to c) on the first arm by controlling the first drive unit, and after controlling the first arm to a predetermined posture based on the position of the first rotation axis determined by step c), performs steps a) to c) on the second arm by controlling the second drive unit.

8. The teaching method of a robot arm according to claim 5 or 6, wherein: The conveying device further comprises: a second irradiation section that irradiates light along a second light path that can be blocked by the arm at a position different from the position of an intersection of the first light path and the arm when the first light path is blocked by the arm; and a second light receiving portion that receives the light irradiated from the second irradiating portion, The control device further performs the following steps: step d) detecting a third rotation angle of the arm when the second light path is blocked by the arm from a state where the second light path is blocked by the arm, based on whether the light irradiated from the second irradiating portion is received by the second light receiving portion; step e) detecting a fourth rotation angle of the arm when the second light path is not blocked by the arm from being blocked by the arm, based on whether the light irradiated from the second irradiating portion is received by the second light receiving portion; f) determining the position of the second rotation axis of the arm based on the width of the portion of the arm passing through the second optical path, the position of the second intersection of the second optical path and the arm when the second optical path is blocked, the third rotation angle, and the fourth rotation angle; and Step g) determining the intersection of a first circle centered at the first intersection point and passing through the first rotation axis and a second circle centered at the second intersection point and passing through the second rotation axis as the position of the corrected rotation axis of the arm.

Images