Substrate storage container

Abstract

The present application provides a substrate storage container with a holder, which has a structure capable of effectively absorbing the deflection of a substrate. The substrate storage container comprises a container body for storing a substrate, a cover for closing an opening provided at the front of the container body, and a holder provided at the rear side of the cover for limiting the movement of the substrate to the front side. The holder is composed of a frame, an abutting portion, and a beam structure. The frame is detachably provided at the rear side of the cover. The abutting portion has a convex part for abutting against the substrate to limit the movement of the substrate to the front side. The beam structure connects the abutting portion and the frame. The abutting portion and the beam structure are arranged to be away from the cover.

Description

TECHNICAL FIELD

[0001] The present application relates to a substrate storage container that stores a substrate. BACKGROUND

[0002] A substrate storage container that stores a substrate such as a semiconductor wafer is used for storage of substrates in a warehouse, conveyance of substrates between semiconductor processing devices, or conveyance of substrates between factories, or the like. An opening for taking out and putting in a substrate is provided on the front side of the substrate storage container, and the opening is closed by a detachable lid. A retainer is provided on the inner side of the lid (the inner side of the substrate storage container) for restricting movement of a substrate accommodated in the substrate storage container toward the opening side.

[0003] PRIOR ART

[0004] PATENT LITERATURE

[0005] Patent Literature 1: International Publication No. 2009 / 60782 SUMMARY

[0006] PROBLEMS TO BE SOLVED BY THE INVENTION

[0007] In the conventional retainer, each substrate is supported by forming an engaging portion at a position corresponding to the height of each of a plurality of substrates accommodated in the substrate storage container. However, in thin wafers or glass substrates and the like that have been used in recent years, the amount of deflection is increased compared with conventional substrates, and it is considered that the substrates cannot be maintained in a proper engaging state with respect to the engaging portions provided for each substrate. Therefore, in order to stabilize the state of holding the substrates, a retainer that can effectively absorb the deflection of the substrates is required. Further, in the case of accommodating a substrate having a greater thickness than a normal substrate, or a substrate composed of a plurality of substrates stacked, it is necessary to change the shape and size of the engaging portions of the retainer. Therefore, the design of the retainer needs to be changed according to the thickness of the substrate.

[0008] An object of the present application is to provide a substrate storage container provided with a retainer that can effectively absorb the deflection of a substrate and has a structure that can cope with differences in the thickness of substrates.

[0009] MEANS OF SOLVING THE PROBLEMS

[0010] One technical solution of the present application provides a substrate storage container, which comprises: a container body for storing a substrate; a cover for closing an opening provided at a front of the container body; and a holder provided at a rear side of the cover for limiting movement of the substrate to the front side; wherein the holder is integrally formed by a frame, an abutting portion, and a beam structure, the frame is detachably provided at the rear side of the cover, the abutting portion has a convex part for abutting against the substrate to limit movement of the substrate to the front side, and the beam structure combines the abutting portion and the frame, and the abutting portion and the beam structure are provided to be away from the cover.

[0011] Inventive Effects

[0012] According to the present application, the holder can effectively absorb the deflection of the substrate, and can cope with the difference in thickness of the substrate. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 is an exploded perspective view of a substrate storage container according to the present embodiment.

[0014] Figure 2 is a cross-sectional perspective view of a substrate storage container.

[0015] Figure 3 is an exploded perspective view of a cover and a holder.

[0016] Figure 4 is a perspective view of a cover and a holder 4 mounted to the cover.

[0017] Figure 5A is a perspective view of a holder.

[0018] Figure 5B is a perspective view of a holder.

[0019] Figure 5C is a perspective view of a holder.

[0020] Figure 6A is an enlarged rear view of a part of a holder.

[0021] Figure 6B is a cross-sectional view along lines VIb-VIb of Figure 6A .

[0022] Figure 6C is a cross-sectional view along lines VIc-VIc of Figure 6A .

[0023] Figure 6D is a cross-sectional view along lines VId-VId of Figure 6A .

[0024] Figure 7 It is a horizontal cross-sectional view showing a state in which the front surface of the engaging portion abuts against the recessed portion of the cover.

[0025] Figure 8A This is a perspective view showing an example in which other members can be attached to and detached from the abutting portion.

[0026] Figure 8B This is a horizontal cross-sectional view showing an example in which other members can be attached to and detached from the abutting portion.

[0027] Figure 9 This is a perspective view showing an example of a cage with improved moldability.

[0028] Figure 10 It is a perspective view showing an example of a retainer in which the bending direction is restricted. DETAILED DESCRIPTION

[0029] Hereinafter, various embodiments will be described with reference to the accompanying drawings.

[0030] Figure 1 It is an exploded perspective view showing the substrate storage container of this embodiment. Figure 2 It is a cross-sectional perspective view showing a substrate storage container.

[0031] like Figure 1 as well as Figure 2 As shown, a substrate storage container 1 includes a container body 2 for accommodating a plurality of substrates 10, and a lid 3 that is attached to and detached from the container body 2. The substrates 10 may be any substrate that can be accommodated, and examples of the substrates 10 include semiconductor wafers or mask glasses having a diameter of 300 mm or 450 mm. While the number of substrates 10 that can be accommodated is arbitrary, the substrate storage container 1 can accommodate, for example, up to 25 substrates 10.

[0032] like Figure 1 as well as Figure 2 As shown, an opening 2A ( Figure 1 ), so that the cover 3 can be mounted to the opening 2A while maintaining the airtightness of the substrate storage container 1.

[0033] The container body 2 has a back wall 2B ( Figure 2 ), right side wall 2C( Figure 1 ), left wall 2D( Figure 1 ), top surface 2E and bottom surface 2F ( Figure 2), the substrate-accommodating container 1 has a substantially rectangular parallelepiped shape in a state where the lid 3 is installed to the opening 2A of the container main body 2. The substrate-accommodating container 1 is a so-called front-open box type container having the opening 2A on the front side. Hereinafter, the face on which the opening 2A is formed is referred to as the front face, and the face on which the back wall 2B is formed is referred to as the back face. Further, the left-right direction as viewed from the front side is referred to as the "left-right direction", and the up-down direction in a state where the substrate 10 is accommodated horizontally is referred to as the "up-down direction".

[0034] A plurality of support pieces (not shown) are provided inside the container main body 2 and installed to the right side wall 2C and the left side wall 2D. The number of the support pieces corresponds to the maximum number of the substrates 10 accommodated in the substrate-accommodating container 1. The support pieces are provided at equal intervals in the up-down direction on the right side wall 2C and the left side wall 2D, and a pair of the support pieces provided at the same height support the same substrate 10 from both sides, respectively, so that the substrate 10 is accommodated horizontally in the container main body 2.

[0035] The bottom face 2F of the container main body 2 is configured to be able to install a bottom plate 26 for positioning the container main body 2 placed at a predetermined position. The container main body 2, the lid 3, and the bottom plate 26 are formed by injection molding of a molding material containing a resin. As the resin contained in the molding material, for example, a thermoplastic resin such as polycarbonate, cyclic olefin polymer, polyether imide, polyether ketone, polybutylene terephthalate, polyacetal, liquid crystal polymer, or an alloy thereof, or the like can be cited.

[0036] Further, in these resins, as needed, an electroconductive substance including carbon fiber, carbon powder, carbon nanotube, electroconductive polymer, or various antistatic agents of anionic, cationic, nonionic, or the like is added. Further, as needed, an ultraviolet absorber, or a reinforcing fiber such as glass fiber or carbon fiber, or the like is added.

[0037] Figure 3 is an exploded perspective view showing the lid 3 and the holder 4, Figure 4 is a perspective view showing the lid 3 and the holder 4 installed to the lid 3, Figure 5A - Figure 5C is a perspective view showing the holder 4.

[0038] As shown in Figs. 1 and 2, the substrate-accommodating container 1 includes a container main body 2 and a lid 3. Figure 3 and As shown in Figs. 1 and 2, the substrate-accommodating container 1 includes a container main body 2 and a lid 3. Figure 4 As shown in Figs. 1 and 2, the substrate-accommodating container 1 includes a container main body 2 and a lid 3.

[0039] In the recess 31 of the lid 3, five pairs of engaging portions 32 for installing the holder 4 on the left and right and three pairs of engaging portions 33 for installing the holder 4 on the upper and lower are formed. Figure 3 In the recess 31 of the lid 3, five pairs of engaging portions 32 for installing the holder 4 on the left and right and three pairs of engaging portions 33 for installing the holder 4 on the upper and lower are formed. Figure 3 In the recess 31 of the lid 3, five pairs of engaging portions 32 for installing the holder 4 on the left and right and three pairs of engaging portions 33 for installing the holder 4 on the upper and lower are formed.

[0040] like Figure 3 、 Figure 4 、 Figure 5A - Figure 5C As shown, the holder 4 is integrally formed of a frame 41, a contact portion 42, and a beam structure 43. The frame 41 is detachably mounted on the rear side of the cover 3 (recess 31). The contact portion 42 has a convex portion 421 that contacts the substrate 10 to restrict movement of the substrate 10 toward the front. The beam structure 43 connects the contact portion 42 and the frame 41. Furthermore, when the holder 4 is mounted on the cover 3, the contact portion 42 and the beam structure 43 are positioned away from the cover 3 toward the rear side.

[0041] The frame body 41 is formed in a rectangular shape surrounding the contact portion 42 and constitutes an outer peripheral end portion of the holder 4 .

[0042] Four pairs of positioning portions 411 and five pairs of engaging portions 412 are formed vertically on the left and right ends of the frame 41. Two pairs of positioning portions 413 are also formed on the upper and lower ends of the frame 41.

[0043] The retainer 4 is formed using a molding material such as a synthetic resin such as polypropylene, polycarbonate, polyethylene terephthalate, polybutylene terephthalate, polyetheretherketone, polyacetal, or polyetherimide, a polyester-based thermoplastic elastomer, or a polyurethane-based thermoplastic elastomer. Polypropylene is particularly preferred due to its excellent flexibility and hardness. Appropriate amounts of an antistatic agent, a conductivity-imparting agent such as carbon or metal fiber, a UV absorber, or a reinforcing agent such as glass fiber or carbon fiber may be selectively added to the molding material.

[0044] Figure 6A It is an enlarged rear view showing a part of the retainer 4 . Figure 6B It means along Figure 6A Cross-sectional view along line VIb-VIb. Figure 6C It means along Figure 6A Cross-sectional view of line VIc-VIc. Figure 6D It means along Figure 6A Cross-sectional view along line VId-VId.

[0045] like Figure 6B As shown, the positioning portions 413 formed at the upper and lower ends of the retainer 4 respectively abut against the engaging portions 33 of the cover 3, thereby limiting the vertical direction ( Figure 6A The position in the up and down directions in the image.

[0046] like Figure 6C As shown, the engaging portions 412 formed on the left and right ends of the retainer 4 respectively abut against the engaging portion 32 of the cover 3 and are positioned between the recess 31 and the engaging portion 32.Figure 6C The position in the up and down directions in the image.

[0047] like Figure 6D As shown, the positioning portions 411 formed at the left and right ends of the retainer 4 abut against the side surfaces 31a ( Figure 6D The right side of the frame 41 is limited in the left and right directions relative to the cover 3 ( Figure 6A as well as Figure 6D position in the left and right directions).

[0048] like Figure 5B 、 Figure 6A as well as Figure 6C As shown, the engaging portion 412 is formed along the front-to-back direction ( Figure 6C Hole 412a extends through the locking portion 412 (in the vertical direction). Hole 412a facilitates the removal of cleaning liquid (water) adhering to the periphery of the locking portion 412. For example, when an air gun is used to remove the adhering water, the water remaining in the frame 41 including the locking portion 412 and the recessed portion 31 of the cover 3 can be easily removed.

[0049] like Figure 5A - Figure 5C As shown, the abutment portion 42 of the retainer 4 is arranged in the up-down direction ( Figure 1 as well as Figure 2 The abutment portion 42 is formed with a pair of left and right convex portions 421 extending in the vertical direction. The end surface of the substrate 10 abuts near the apex of the convex portions 421, thereby restricting the forward movement of the substrate 10. Because the apex of the convex portions 421 extends linearly in the vertical direction, the abutment portion 42 maintains stable contact with the substrate 10 regardless of the vertical position of the substrate 10 and the abutment portion 42, thereby stably restricting the movement of the substrate 10.

[0050] In addition, the contact portion 42 is formed with 10 holes 422 located between a pair of left and right convex portions 421 and arranged in the vertical direction. The holes 422 are arranged in the front-to-back direction (with Figure 6A The cleaning liquid (water) attached to the contact portion 42 or the cover 3 is easily removed. For example, when an air gun is used to remove attached water, the remaining water can be easily removed.

[0051] like Figure 5A - Figure 5C as well as Figure 6A As shown, the beam structure 43 has ten pairs of beams 431 on the left and right sides that are arranged between the frame 41 and the contact portion 42. The beams 431 have base ends 431a connected to the frame 41 and terminal ends 431b connected to the contact portion 42, and support the contact portion 421 ( Figure 5A as well as Figure 6A). The beams 431 extend in a direction having an angle with the horizontal direction, and the directions in which the beams 431 extending in abutment with each other above and below are alternately arranged so as to have an angle of about 60° with each other. As a result, the frame body 41 is alternately formed in the up-and-down direction in a manner that the first region in which the interval Wl between the base ends 431a of the beams 431 in abutance is narrow and the second region in which the interval W2 between the base ends 431a of the beams 431 in abutance is wider are alternately arranged. Figure 4 , Figure 6A ) the first region in which the interval Wl between the base ends 431a of the beams 431 in abutance is narrow and the second region in which the interval W2 between the base ends 431a of the beams 431 in abutance is wider.

[0052] The positioning portion 411 of the frame body 41 is formed in the first region in which the interval Wl between the base ends 431a is narrow, and the engaging portion 412 of the frame body 41 is formed in the second region in which the interval W2 between the base ends 431a is wider.

[0053] Since the positioning portion 411 is formed in the first region in which the interval Wl between the base ends 431a is narrow, the amount of deformation in the left-and-right direction of the frame body 41 at the portion where the positioning portion 411 is formed is small. Therefore, the frame body 41 is relatively firmly fixed to the cover 3 in the left-and-right direction by the positioning portion 411 abutting against the cover 3.

[0054] On the other hand, since the engaging portion 412 is formed in the second region in which the interval W2 between the base ends 431a is wider, the amount of deformation in the left-and-right direction of the frame body 41 at the portion where the engaging portion 412 is formed is large, and the frame body 41 can be easily deformed toward the center direction of the holder 4. Further, since the deformation of the frame body 41 occurs independently at each portion where the engaging portion 412 is formed, when the holder 4 is attached to the cover 3, each engaging portion 412 can be easily engaged with the cover 3 by deforming the portion corresponding to each engaging portion 412 toward the center direction of the holder 4.

[0055] Further, even if the position of the holder 4 with respect to the cover 3 is shifted due to a force or the like applied to the holder 4, the frame body 41 in the vicinity of the engaging portion 412 is deformed in a manner that absorbs the shift. Further, the frame body 41 in the vicinity of each engaging portion 412 is deformed independently from the portion in the vicinity of the other engaging portion 412, and thus the easiness of the deformation is equalized. Therefore, even if the position of the holder 4 with respect to the cover 3 is shifted, the portion of the frame body 41 in the vicinity of each engaging portion 412 is deformed by an amount necessary to maintain the engaged state, and thus the engaged state is maintained. Therefore, the possibility that the holder 4 is detached from the cover 3 is reduced.

[0056] In addition, the engaging force of each engaging portion 412 can be independently adjusted by changing the shape of each engaging portion 412 or the shape of the engaging portion 32 of the corresponding cover 3.

[0057] In the retainer 4, the contact portion 42 extending in the vertical direction is supported by two or more beams 431 arranged in the vertical direction. Since each beam 431 deforms approximately equally in response to the force applied to the contact portion 42 in the front-back direction, when an impact is applied to the contact portion 42, the entire beam structure 43 bends equally, so that the impact can be stably absorbed by the entire beam structure 43. For example, when the contact portion 42 is extended in the vertical direction, the beam 431 deforms approximately equally in response to the force applied to the contact portion 42 in the front-back direction. Figure 5C When a force is applied to the contact portion 42 in the P direction (front-back direction), the beams 431 flex in unison to move the contact portion 42 in the P direction, thereby suppressing the concentration of stress on a specific portion. Therefore, for example, in the event of an impact when the substrate storage container 1 is dropped, the possibility of the retainer 4 being separated from the lid 3 is reduced.

[0058] On the other hand, the beam structure 43 exhibits required strength in the direction along the cover 3 (in-plane direction) similarly to a truss structure due to the combination of the beams 431 .

[0059] Furthermore, when the retainer 4 is mounted on the cover 3, the abutment portion 42 and the beam structure 43 of the retainer 4 are arranged to be separated from the cover 3 toward the rear side. Figure 5C ) is in contact with the recess 31 of the cover 3, the contact portion 42 and the beam structure 43 are in a state of being away from the recess 31 to the rear side, even if the contact portion 42 is moved in the front-to-back direction ( Figure 5C The contact portion 42 and the beam structure 43 will not contact the recess 31 of the cover 3. Therefore, the retainer 4 can be prevented from being separated from the cover 3 due to inadvertent contact between the retainer 4 and the cover 3.

[0060] Figure 7 The front side 412b of the engagement portion 412 ( Figure 5C ) is a horizontal cross-sectional view of a state in which the cover 3 is in contact with the recess 31.

[0061] like Figure 7 As shown, at the front 412b ( Figure 5C ) is in contact with the recess 31 of the cover 3, the beam structure 43 is provided with a space between the recess 31 of the cover 3, and the contact portion 42 ( Figure 7 Similarly, a space is provided between the front face 412b and the recess 31 (not shown). This allows the engaging portion 412 to contact the cover 3 only via the front face 412b, thereby minimizing the contact area. This facilitates the removal of cleaning fluid (water) adhering to the vicinity of the engaging portion 412. For example, using an air gun to remove adhering water can easily remove any remaining water in the engaging portion 412 or the cover 3 (recess 31).

[0062] In this embodiment, although the convex portion 421 is integrally formed as part of the abutment portion 42, the convex portion 421 may also be formed from another component. In this case, for example, a recessed portion that allows the convex portion 421 to be attached and detached is formed in a portion corresponding to the abutment portion 42, and the convex portion 421 is attached by fitting into the recessed portion. Furthermore, in this case, by preparing convex portions of different heights (in the front-to-back dimension) as the convex portion 421, the height of the convex portion can be varied according to the intended use. This allows the retainer 4 (parts other than the convex portion) to be standardized.

[0063] In addition, other members can also be attached and detached to the abutting portion (corresponding to the abutting portion 42 ). Figure 8A 42A is a perspective view showing an example in which other components can be attached and detached from the contact portion 42A. Figure 8B This is a horizontal cross-sectional view showing an example in which other members can be attached to and detached from the abutment portion 42A.

[0064] exist Figure 8A as well as Figure 8B In the example shown, another member 50 made of a plate-shaped elastic member extending in the vertical direction can be attached to the contact portion 42A. When the end surface of the substrate 10 contacts the other member 50, movement of the substrate 10 toward the front side is restricted.

[0065] A hole 422A similar to the hole 422 is formed in the contact portion 42A. Figure 8B ), by making the claw portion 51 ( Figure 8B ) is fitted or pressed into the hole 422A, thereby installing the other component 50 on the abutment portion 42A.

[0066] As described above, by making the other member 50 and the like attachable and detachable, various other members can be mounted on a common holder, thereby being able to cope with various uses and requirements.

[0067] Figure 9 This is a perspective view showing an example of a cage 4B having improved moldability.

[0068] The entire retainer 4B is formed with a uniform or approximately uniform thickness. Accordingly, the retainer 4B has excellent formability when manufactured by injection molding, which can improve the yield rate. In addition, it also helps to extend the service life of the mold. The retainer 4B is composed of a frame 41B, abutment portion 42B and a beam structure 43B, wherein the frame 41B is detachably arranged on the rear side of the cover body 3, the abutment portion 42B has a convex portion 421B that abuts against the substrate 10 to limit the movement of the substrate 10 toward the front side, and the beam structure 43B combines the abutment portion 42B and the frame 41B. The abutment portion 42B and the beam structure 43B are arranged to move away from the cover body 3 toward the rear side.

[0069] The frame 41B is formed with a positioning portion 411B corresponding to the positioning portion 411 of the holder 4, and a clamping portion 412B corresponding to the clamping portion 412 of the holder 4.

[0070] The holder 4B is larger than the holder 4 in thickness in the front-rear direction (the front-rear direction in the case of the holder 4B) of the beam structure 43B, and in volume of the beam structure 43B, whereby the rigidity of the beam structure 43B is increased. The holes 432B, 433B, and the like formed in the beam structure 43B are holes that pass through in the front-rear direction, and not only do they suppress the weight of the holder 4B, but they also have the function of easily removing cleaning liquid (water) that has adhered to the abutting portion 42B or the cover 3. Figure 9

[0071] Figure 10 is a perspective view of an example of a holder 4C that restricts the direction of flexure.

[0072] The holder 4C is composed of a frame 41C, an abutting portion 42C, and a beam structure 43C, wherein the frame 41C is detachably provided on the rear side of the cover 3, the abutting portion 42C has a convex portion 421C that abuts against the substrate 10 to restrict movement of the substrate 10 toward the front side, and the beam structure 43C joins the abutting portion 42C and the frame 41C. The abutting portion 42C and the beam structure 43C are provided so as to be away from the cover 3 toward the rear side.

[0073] The frame 41C is formed with a positioning portion 411C corresponding to the positioning portion 411 of the holder 4, and a clamping portion 412C corresponding to the clamping portion 412 of the holder 4. Further, the beam structure 43C has a beam 431C similar to the beam 431 of the holder 4.

[0074] In the holder 4C, the thickness of the frame 41C in the front-rear direction (the up-down direction in the case of the frame 41C) is set to be greater than the thickness of the frame 41. As a result, deformation of the holder 4C in the direction in which the frame 41C, particularly the linear portions on the left and right that extend in the up-down direction, are deformed is suppressed. Figure 10

[0075] Further, the beam structure 43C has a beam 434C that connects the beam 431C and the abutting portion 42C. By extending in the horizontal direction, the beam 434C allows the holder 4C to flex with the abutting portion 42C abutting against the positioning portion 411C or the clamping portion 412C in the front-rear direction (the up-down direction in the case of the holder 4C). Figure 10 ​​The holding member 4C is deformed in the longitudinal direction (the up-and-down direction in the drawing) by the pressing force of the lid 3, and the deformation of the holding member 4C in other directions, for example, the left-and-right direction of the holding member 4C, is suppressed. In addition, by providing the plurality of self-beams 431C extending horizontally to the beam 434C, the deformation of the length direction of the abutting portion 42C when the lid 3 is closed becomes uniform compared to the holding member 4, 4B of the above-described embodiment. Therefore, the variation of the holding force to the substrate 10 can be suppressed.

[0076] The above-described embodiments have been described in detail, but the present application is not limited to the specific embodiments, and various modifications and changes can be made within the scope recited in the claims. In addition, all or a plurality of the components of the above-described embodiments can be combined.

[0077] Explanation of Reference Numerals

[0078] 1 Substrate Storage Container

[0079] 2 Container Main Body

[0080] 3 Lid

[0081] 4, 4B, 4C Holding Member

[0082] 41, 41B, 41C Frame

[0083] 42, 42B, 42C Abutting Portion

[0084] 43, 43B, 43C Beam Structure

[0085] 411, 411B, 411C Positioning Portion

[0086] 412, 412B, 412C Engaging Portion

[0087] 421, 421B, 421C Protruding Portion

[0088] 431, 431B, 431C Beam

Claims

1. A substrate storage container characterized by comprising: The substrate container includes: a container body that houses a substrate; a lid that closes an opening provided in a front surface of the container body; and a retainer provided on a rear surface side of the lid to restrict movement of the substrate toward the front surface side, wherein the retainer is formed of a frame, an abutting portion, and a beam structure, the frame is detachably provided on the rear surface side of the lid, the abutting portion has a convex portion that abuts against the substrate to restrict movement of the substrate toward the front surface side and extends in a straight line in a vertical direction, the beam structure connects the abutting portion and the frame, and the abutting portion and the beam structure are provided to be spaced apart from the lid.

2. The substrate container according to claim 1, wherein the abutting portion extends in a vertical direction, the beam structure has a plurality of beams connected at base ends to the frame and at tip ends to the abutting portion and arranged in a vertical direction, the beams extend in directions having angles with respect to a horizontal direction, and two beams adjacent in the vertical direction extend in different directions.

3. The substrate container according to claim 2, wherein the frame has a plurality of positioning portions arranged in the vertical direction, the frame has a first region in which a distance between base ends of adjacent beams is narrow and a second region in which the distance between the base ends of the adjacent beams is wider than in the first region, the positioning portions are provided in the first region, and by engaging the positioning portions with the lid, a position of the frame in a left-right direction with respect to the lid is restricted.

4. The substrate container according to claim 2, wherein the frame has a plurality of engaging portions arranged in the vertical direction, the frame has a first region in which a distance between base ends of adjacent beams is narrow and a second region in which the distance between the base ends of the adjacent beams is wider than in the first region, the engaging portions are provided in the second region, and by engaging the engaging portions with the lid, a position of the frame in a front-rear direction with respect to the lid is restricted.

5. The substrate container according to claim 4, wherein the engaging portions are formed with through-holes that extend in the front-rear direction.

6. The substrate container according to any one of claims 1 to 5, wherein the abutting portion is formed with a through-hole that extends in the front-rear direction.

7. The substrate container according to any one of claims 1 to 5, further comprising an elastic body that is attached to the abutting portion.

8. The substrate container according to claim 6, further comprising an elastic body that is attached to the abutting portion. ​ ​ ​ ​

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