A slide gate valve device and vacuum coating equipment

Abstract

This invention relates to the field of slide gate valve technology, specifically disclosing a slide gate valve device and a vacuum coating equipment. The slide gate valve device includes a bracket, a transmission mechanism, a sealing element, and several driving elements. The fixed ends of the driving elements are all fixedly connected to the bracket, and the driving elements are spaced apart along the length of the bracket. The output ends of the driving elements are all drivenly connected to the transmission mechanism, and the driving elements can drive the transmission mechanism to move along the Z-axis. The sealing element is drivenly connected to the transmission mechanism. When the transmission mechanism moves along the Z-axis, it can drive the sealing element to move along the Y-axis, so that the sealing element can seal with the opening of the vacuum chamber, thus increasing the length of the sealing cover while ensuring sealing performance.

Description

Technical Field

[0001] This invention relates to the field of gate valve technology, and more particularly to a gate valve device and a vacuum coating equipment. Background Technology

[0002] With increasing environmental awareness, vacuum coating technology for workpiece surface priming is considered one of the most promising decorative or functional coating technologies to replace traditional electroplating. Currently, vacuum coating technology is widely used in high-tech fields such as electronic products, optical components, and sensors. Researchers have developed various vacuum coating equipment suitable for different technical requirements based on the characteristics of each production chain.

[0003] In vacuum coating equipment, valves are generally used for sealing. However, due to the stringent requirements on valve response speed and sealing performance during mass production, slide gate valves are often employed. Large vacuum coating equipment demands longer sealing plates for slide gate valves. Extending the sealing plate of a traditional slide gate valve to meet these requirements can lead to poor parallelism and reduced sealing performance. Furthermore, when the opening of the vacuum coating equipment cavity is small, installing a slide gate valve with its sealing element moving along its length is difficult. Summary of the Invention

[0004] According to one aspect of the present invention, a slide gate valve device is provided that can ensure sealing performance while increasing the length of the sealing cover plate, and is applicable to devices with limited space at the opening of the vacuum chamber.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A slide gate valve device for sealing the opening of a vacuum chamber, characterized in that it comprises:

[0007] support;

[0008] A plurality of driving components, the fixed ends of the plurality of driving components are fixedly connected to the bracket, and the plurality of driving components are spaced apart along the length direction of the bracket.

[0009] The transmission mechanism has several of the above-mentioned driving components whose output ends are connected to the transmission mechanism, and the above-mentioned driving components are capable of driving the transmission mechanism to move along the Z-axis.

[0010] The sealing element is connected to the transmission mechanism. When the transmission mechanism moves along the Z-axis, it can drive the sealing element to move along the Y-axis so that the sealing element can be sealed to the opening of the vacuum chamber.

[0011] Optionally, the transmission mechanism includes a transmission frame and a rotating arm. The transmission frame is connected to the output end of the drive member and can be driven to move along the Z-axis. One end of the rotating arm is rotatably connected to the transmission frame, and the other end is rotatably connected to the seal. The seal is limited to move only along the Y-axis.

[0012] Optionally, the transmission frame includes a vertically connected crossbeam and a longitudinal beam, the crossbeam being driven to the output end of a plurality of the aforementioned driving components, and the longitudinal beam being rotatably connected to the aforementioned rotating arm.

[0013] Optionally, multiple longitudinal beams are provided, and the multiple longitudinal beams are spaced apart along the length direction of the transverse beam.

[0014] Optionally, it also includes a guide member, one end of which is fixedly connected to the bracket and the other end of which is slidably connected to the transmission mechanism.

[0015] Optionally, multiple guide members are provided, and the multiple guide members are spaced apart along the length direction of the bracket.

[0016] Optionally, the sealing element includes a sealing cover and a reinforcing support plate, the sealing cover and the reinforcing support plate having a T-shaped structure, and the sealing cover being able to seal and connect with the opening of the vacuum chamber.

[0017] Optionally, it also includes a plurality of flatness adjustment components, which are spaced apart along the length of the sealing cover. One end of each flatness adjustment component is connected to the transmission mechanism and the other end is connected to the sealing cover. The flatness adjustment components can adjust the flatness of the sealing cover.

[0018] Optionally, the flatness adjustment component includes a body, a first adjusting bolt, and a second adjusting bolt. One end of the body is connected to the transmission mechanism. The first adjusting bolt passes through the other end of the body and is threaded to the sealing cover plate. The second adjusting bolt is threaded to the other end of the body and can be pressed against the sealing cover plate. When the screwing length of the second adjusting bolt is changed, the distance between the sealing cover plate and the body can be changed.

[0019] According to another aspect of the present invention, the present invention provides a vacuum coating apparatus with good sealing performance.

[0020] To achieve the above objectives, the present invention adopts the following technical solution:

[0021] A vacuum coating apparatus includes a vacuum chamber with an opening, and also includes the aforementioned gate valve device, which is sealed to the opening.

[0022] The beneficial effects of this invention are as follows:

[0023] By simultaneously driving the transmission mechanism with several driving components, and by designing the transmission mechanism to move along the Z-axis, causing the sealing element to move along the Y-axis, the opening of the vacuum chamber can be sealed. Since the sealing element needs to be relatively long to fit large vacuum coating equipment, using several driving components to drive the transmission mechanism, which in turn moves the sealing element along the Y-axis, ensures more even force distribution on the sealing element, maintaining the sealing performance of the aforementioned gate valve device while increasing the sealing element's length. Furthermore, by setting the driving components to move along the Z-axis and thus the sealing element along the Y-axis, for cases where the space at the vacuum chamber opening is small, the sealing element only needs to be positioned relative to the vacuum chamber opening, with the driving components and other structures positioned above the vacuum chamber, thus improving the versatility of the aforementioned gate valve device.

[0024] By setting the transmission mechanism to include several longitudinal beams connected to the sealing element, the force on the sealing element can be made more uniform, which is beneficial to improving the sealing performance of the above-mentioned slide gate valve.

[0025] Because large-scale vacuum coating equipment requires relatively long sealing components, local deformation of the sealing components can easily occur, affecting the sealing effect. The slide gate valve device proposed in this invention can adjust the parallelism of the sealing cover by setting a flatness adjustment component, thereby reducing the deformation of the sealing cover and ensuring sealing performance. Attached Figure Description

[0026] Figure 1 Schematic diagram of the slide gate valve device provided by the present invention Figure 1 ;

[0027] Figure 2 Schematic diagram of the slide gate valve device provided by the present invention Figure 2 ;

[0028] Figure 3 for Figure 2 A magnified view of the area at point B;

[0029] Figure 4 for Figure 2 A magnified view of a portion at point A;

[0030] Figure 5 for Figure 2 A magnified view of a section at point C.

[0031] In the picture:

[0032] 100, bracket; 200, drive component; 300, transmission mechanism; 310, crossbeam; 320, longitudinal beam; 330, slider; 400, seal; 410, sealing cover; 500, guide component; 510, slide rail; 600, rotating arm; 610, spring; 700, flatness adjustment assembly; 710, first adjusting bolt; 720, second adjusting bolt. Detailed Implementation

[0033] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0034] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions. Furthermore, "above," "on top of," and "over" the first feature in relation to the second feature includes the first feature directly above and diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "under," and "below" the first feature in relation to the second feature includes the first feature directly below and diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0035] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0036] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0037] This invention provides a slide gate valve device that can ensure sealing performance while increasing the length of the sealing cover plate, and is suitable for devices with limited space at the opening of the vacuum chamber.

[0038] Specifically, such as Figure 1 and Figure 2 As shown, the slide gate valve device includes a bracket 100, a transmission mechanism 300, a sealing element 400, and several driving elements 200. The fixed ends of the driving elements 200 are all fixedly connected to the bracket 100. The driving elements 200 can be spaced apart along the length of the bracket 100. Preferably, the driving elements 200 can be equally spaced along the length of the bracket 100. The output ends of the driving elements 200 are all connected to the transmission mechanism 300 to drive the transmission mechanism 300 to move along the Z-axis. The other end of the transmission mechanism 300 is connected to the sealing element 400. When the transmission mechanism 300 moves along the Z-axis, it drives the sealing element 400 to move along the Y-axis. The movement of the sealing element 400 along the Y-axis allows it to form a sealing structure with the opening of the vacuum chamber, achieving a seal. In the above slide gate valve device, the transmission mechanism 300 acts as a bridge, converting the force of the driving elements 200 along the Z-axis into a force that drives the sealing element 400 to move along the Y-axis. During use, the sealing element 400 is connected to the housing of the vacuum chamber opening and is fixed along the Z-axis, but can only move along the Y-axis.

[0039] Because the sealing element 400 of the slide gate valve device provided by this invention is relatively long, several driving elements 200 are provided to drive the transmission mechanism 300 to move along the Z-axis, thereby driving the sealing element 400 to move along the Y-axis. This improves the uniformity of force on the sealing element 400, thus ensuring the sealing performance between the sealing element 400 and the opening of the vacuum chamber. Since the sealing element 400 is mounted on the housing of the vacuum chamber, the housing of the vacuum chamber can limit the sealing element 400 along the Z-axis, ensuring the reliability of the movement of the sealing element 400 along the Y-axis. By setting the driving elements 200 and the sealing element 400 to move in different directions, this invention is applicable to devices with limited space at the opening of the vacuum chamber, thus broadening its applicability.

[0040] Furthermore, in one embodiment, the seal 400 includes a sealing cover plate 410 and a reinforcing support plate. The sealing cover plate 410 and the reinforcing support plate can be arranged in a T-shape. The sealing cover plate 410 is used for a sealing connection with the opening of the vacuum chamber, thereby sealing the opening of the vacuum chamber. Arranging the sealing cover plate 410 and the reinforcing support plate in a T-shape allows the reinforcing support plate to provide support for the sealing cover plate 410 on the side where it is not sealed to the opening of the vacuum chamber. This effectively prevents deformation of the sealing cover plate 410 and improves its operational reliability.

[0041] Preferably, in one embodiment, a sealing unit can be provided between the sealing cover plate 410 and the opening of the vacuum chamber to improve the sealing performance between the sealing cover plate 410 and the opening of the vacuum chamber. The sealing unit can be a sealing ring, which can be made of rubber. Rubber material has good elastic deformation ability and can adhere tightly to the surface of the sealing cover plate 410 and the outer edge of the opening of the vacuum chamber through its own deformation, which is beneficial to improving the sealing performance between the sealing cover plate 410 and the opening of the vacuum chamber.

[0042] Optionally, a groove can be made on the side of the sealing cover plate 410 that is sealed to the opening of the vacuum chamber. The sealing ring is placed in the groove, and the sealing ring can be fixed without adhesive. This simplifies the assembly process of the sealing ring and facilitates the disassembly and subsequent maintenance of the sealing ring.

[0043] As a preferred technical solution, when the sealing ring is installed in the groove on the sealing cover plate 410, part of the sealing ring can be placed outside the groove. Since the sealing cover plate 410 has a certain speed when it moves along the Y-axis and approaches the opening of the vacuum chamber, it will apply a certain pressure to the outer edge of the opening of the vacuum chamber. Placing part of the sealing ring outside the groove allows the sealing ring to deform when the sealing cover plate 410 applies pressure to the outer edge of the opening of the vacuum chamber, thereby better fitting the sealing cover plate 410 and the outer edge of the opening of the vacuum chamber. This is beneficial for a complete seal between the opening of the vacuum chamber and the sealing cover plate 410, ensuring the reliability of the sealing cover plate 410 in operation.

[0044] Furthermore, such as Figure 3 As shown, the transmission mechanism 300 may include a transmission frame and a rotating arm 600. The output ends of several driving devices 200 are all connected to the transmission frame to drive the transmission frame to move along the Z-axis. One end of the rotating arm 600 is rotatably connected to the transmission frame, and the other end is rotatably connected to the sealing member 400. Since the sealing member 400 is mounted on the shell of the vacuum chamber, the shell of the vacuum chamber has a limiting effect on the sealing member 400 along the Z-axis. In this embodiment, the shell of the vacuum chamber achieves the limiting effect by abutting against the sealing member 400, and the movement process of the sealing member 400 can be regarded as sliding along the surface of the shell of the vacuum chamber.

[0045] Further, see also Figure 1 and Figure 2The transmission frame may include a crossbeam 310 and a longitudinal beam 320, wherein the crossbeam 310 and the longitudinal beam 320 are arranged perpendicularly. In this embodiment, the crossbeam 310 is arranged along the X-axis direction, and the longitudinal beam 320 is arranged along the Z-axis direction. The output end of the drive member 200 is connected to the crossbeam 310 for transmission, and the longitudinal beam 320 is rotatably connected to the rotating arm 600. By connecting the crossbeam 310 to the output ends of all drive members 200, the force on the crossbeam 310 can be evenly distributed, thereby ensuring the force on the longitudinal beam 320 is evenly distributed, preventing deformation of the seal 400, and thus helping to ensure the sealing performance of the seal 400. In other embodiments, the transmission mechanism 300 may also have other structures, which can be set according to actual needs.

[0046] In this embodiment, when the drive member 200 drives the longitudinal beam 320 to move downward along the Z-axis, the rotating arm 600 will change from an inclined state to a horizontal state. Since the sealing member 400 is limited along the Z-axis, the distance between the transmission mechanism 300 and the sealing member 400 will increase when the rotating arm 600 changes from an inclined state to a horizontal state, thereby achieving the purpose of pushing the sealing member 400 to move along the Y-axis and thus sealing the opening of the vacuum chamber.

[0047] Preferably, in one embodiment, rotating arms 600 can be provided on both sides of the longitudinal beam 320, thereby improving the connection strength between the transmission mechanism 300 and the seal 400 and ensuring the reliability of the seal 400. In other embodiments, four rotating arms 600 can be connected on one longitudinal beam 320, and two rotating arms 600 can be connected on the same side of the same longitudinal beam 320. The two rotating arms 600 located on the same side of the longitudinal beam 320 can be located on both sides of the reinforcing support plate, which is beneficial to ensuring the reliability of the seal 400.

[0048] As a preferred technical solution, please refer to [link / reference]. Figure 3When the output end of the drive unit 200 is in the initial position, the seal 400 hangs down under its own weight and contacts the housing of the vacuum chamber. However, considering that the friction between the rotating arm 600 and the seal 400 may prevent the seal 400 from contacting the housing of the vacuum chamber, when the transmission mechanism 300 moves along the Z-axis, the seal 400 first moves a certain distance along the Z-axis with the transmission mechanism 300 to contact the housing of the vacuum chamber, and then moves along the Y-axis until it seals with the opening of the vacuum chamber. This causes the seal 400 to make hard contact with the housing of the vacuum chamber when moving along the Z-axis, which can easily damage the seal 400 and reduce its service life. It can also cause some damage to the housing of the vacuum chamber, reducing its service life. When the output end of the drive unit is in the termination position and moves towards the initial position, the friction between the rotating arm 600 and the seal 400 may cause the seal 400 to move along the Z-axis, making it impossible to limit the seal 400 along the Z-axis. Therefore, a spring 610 can be provided between the rotating arm 600 and the transmission mechanism 300. In this embodiment, one end of the spring 610 is connected to the rotating arm 600 and the other end is connected to the longitudinal beam 320, which can ensure that the seal 400 is always in contact with the shell of the vacuum chamber, thereby ensuring that the seal 400 is limited along the Z-axis direction, which is beneficial to improving the service life of the seal 400.

[0049] Preferably, multiple longitudinal beams 320 can be provided, and the multiple longitudinal beams 320 are spaced apart along the length direction of the transverse beam 310 to facilitate uniform stress distribution throughout the sealing element 400. Optionally, the longitudinal beams 320 can be provided at equal intervals along the length direction of the transverse beam 310, and the distance between two adjacent longitudinal beams 320 can be determined according to the number of longitudinal beams 320 and the length of the sealing element 400. This helps to ensure uniform stress distribution throughout the sealing element 400, prevents deformation of the sealing element 400 due to uneven stress, and helps to ensure that the sealing performance of the sealing element 400 is not affected.

[0050] Furthermore, a guide member 500 can be provided, with one end of the guide member 500 fixedly connected to the bracket 100 and the other end slidably connected to the transmission mechanism 300. On the one hand, the guide member 500 can improve the connection strength between the drive member 200 and the transmission mechanism 300, ensuring the reliability of the transmission mechanism 300's operation; on the other hand, the guide member 500 can assist the movement of the transmission mechanism 300 along the Z-axis, making the movement of the transmission mechanism 300 more stable and smooth.

[0051] Preferably, multiple guide members 500 can be provided, and multiple guide members 500 can be spaced apart along the length direction of the bracket 100. More preferably, the guide members 500 can be equally spaced along the length direction of the bracket 100, so that the transmission mechanism 300 is subjected to uniform force at all points, which is beneficial to ensuring the reliability of the operation of the transmission mechanism 300.

[0052] Optionally, such as Figure 4 As shown, in one embodiment, a slide rail 510 can be provided on the guide member 500, and correspondingly, a slider 330 is provided on the transmission mechanism 300. The slider 330 is slidably connected to the slide rail 510, thereby ensuring that the transmission mechanism 300 moves smoothly and steadily. The slider 330 is a standard part, which facilitates the installation of the slider 330 and the slide rail 510 and improves installation efficiency.

[0053] Furthermore, such as Figure 5 As shown, due to the relatively long length of the seal 400, it may experience localized deformation due to uneven stress, affecting its sealing performance. Therefore, several flatness adjustment components 700 can be provided and spaced apart along the length of the sealing cover plate 410. Specifically, one end of each flatness adjustment component 700 is connected to the transmission mechanism 300, and the other end is connected to the sealing cover plate 410. The flatness adjustment components 700 can adjust the flatness of the sealing cover plate 410, thereby ensuring the reliability of the sealing cover plate 410's operation.

[0054] Furthermore, the flatness adjustment assembly 700 may include a body, a first adjusting bolt 710, and a second adjusting bolt 720. One end of the body is connected to the transmission mechanism 300. The first adjusting bolt 710 passes through the other end of the body and is threadedly connected to the sealing cover plate 410, thus connecting the body and the sealing cover plate 410. The second adjusting bolt 720 passes through the other end of the body and is threadedly connected to the other end of the body, and the second adjusting bolt 720 can be tightened against the sealing cover plate 410. By setting the screwing length of the second adjusting bolt 720, the distance between the sealing cover plate 410 and the body can be controlled, thereby adjusting the flatness of the sealing cover plate 410.

[0055] Optionally, in one embodiment, the body can be an I-shaped structure, with one horizontal end rotatably connected to the rotating arm 600 and the other horizontal end connected to the sealing cover plate 410. The I-shaped structure not only meets the functional requirements of the body but also facilitates processing, thus saving costs. In other embodiments, the flatness adjustment component 700 can also be other structures, which can be set according to actual needs.

[0056] Furthermore, to facilitate the assembly of the aforementioned slide gate valve device, a lifting structure can be provided on the bracket 100. This lifting structure is connected to lifting equipment, facilitating the handling of the slide gate valve. Multiple lifting structures can be provided, depending on actual needs; multiple structures contribute to stable lifting. In one embodiment, the lifting structure can be a lifting ring.

[0057] Furthermore, the drive component 200 can be a mechanism capable of outputting linear motion, such as a cylinder, hydraulic cylinder, or linear motor, and can be configured according to actual needs. In this embodiment, the drive component 200 is a cylinder.

[0058] Specifically, in this embodiment, the length of the sealing element 400 is 2.6m, which is longer than that of a traditional slide gate valve device. There are 4 driving elements 200, 5 guide elements 500, and 6 longitudinal beams 320, which can ensure that the sealing cover plate 410 is subjected to uniform force to meet the sealing requirements.

[0059] To facilitate understanding, the working process of the above-mentioned slide gate valve device will be briefly described below:

[0060] First, the output end of the drive unit 200 drives the transmission mechanism 300 to move downward along the Z-axis. During the downward movement of the transmission mechanism 300, the seal 400 moves along the Y-axis. When the rotating arm 600 is in a horizontal state, the drive unit 200 stops driving. At this time, the sealing cover plate 410 is sealed to the opening of the vacuum chamber, thus sealing the opening of the vacuum chamber. When sealing is not required, the drive unit 200 drives the output end to move back to the initial position, that is, to move upward along the Z-axis, driving the transmission mechanism 300 to move upward along the Z-axis. At this time, the seal 400 moves along the Y-axis under its own weight and the action of the spring 610. When the output end of the drive unit 200 returns to the initial position, the seal 400 returns to the initial position, opening the opening of the vacuum chamber.

[0061] This invention improves the uniformity of force distribution on the transmission mechanism 300 by using several driving components 200 to drive the transmission mechanism 300, thereby improving the uniformity of force distribution on the sealing component 400. This facilitates smooth movement of the sealing component 400 and prevents deformation of the sealing component 400 due to uneven force distribution, which could affect its sealing performance. Thus, while increasing the length of the sealing cover plate 410, the reliability of the sealing component 400 is ensured. By setting the transmission mechanism 300 so that the movement direction of the driving components 200 is different from that of the sealing component 400, it is beneficial for devices with limited space at the opening of the vacuum chamber, improving the versatility of the aforementioned gate valve device. By including the sealing cover plate 410 and the reinforcing support plate in a T-shaped structure, the deformation of the sealing cover plate 410 is reduced, which helps to ensure a good sealing effect. By adjusting the parallelism of the sealing cover plate 410 using the flatness adjustment component 700, the risk of deformation of the sealing cover plate 410 can be reduced, and the sealing performance of the sealing cover plate 410 can be guaranteed while increasing the length of the sealing cover plate 410.

[0062] The present invention also provides a vacuum coating apparatus, which includes a vacuum chamber with an opening and the aforementioned gate valve device, wherein the gate valve device is connected to the opening of the vacuum chamber and has good sealing performance.

[0063] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A plug valve device for sealing an opening of a vacuum chamber, characterized in that include: Bracket (100); A plurality of driving components (200) are provided, and the fixed ends of the plurality of driving components (200) are fixedly connected to the bracket (100), and the plurality of driving components (200) are spaced apart along the length direction of the bracket (100); The output ends of the transmission mechanism (300) and the driving elements (200) are all connected to the transmission mechanism (300), and the driving elements (200) can drive the input end of the transmission mechanism (300) to move along the Z-axis direction. A sealing element (400) is connected to the output end of the transmission mechanism (300). When the input end of the transmission mechanism (300) moves along the Z-axis, the output end of the transmission mechanism (300) can drive the sealing element (400) to move along the Y-axis, so that the sealing element (400) can be sealed to the opening of the vacuum chamber. The sealing element (400) is disposed relative to the opening of the vacuum chamber; The transmission mechanism (300) includes a transmission frame and a rotating arm (600). The transmission frame is connected to the output end of the drive member (200) and can be driven to move along the Z-axis. One end of the rotating arm (600) is rotatably connected to the transmission frame, and the other end is rotatably connected to the seal (400). The seal (400) is limited to move only along the Y-axis.

2. The insertion valve device of claim 1, wherein, The transmission frame includes a vertically connected crossbeam (310) and a longitudinal beam (320). The crossbeam (310) is connected to the output end of a plurality of the driving components (200), and the longitudinal beam (320) is rotatably connected to the rotating arm (600).

3. The insertion valve device of claim 2, wherein, Multiple longitudinal beams (320) are provided, and the multiple longitudinal beams (320) are spaced apart along the length direction of the cross beam (310).

4. Plug valve device according to any one of claims 1-3, characterized in that It also includes a guide (500), one end of which is fixedly connected to the bracket (100), and the other end is slidably connected to the transmission mechanism (300).

5. The insertion valve device of claim 4, wherein, Multiple guide members (500) are provided, and the multiple guide members (500) are spaced apart along the length direction of the bracket (100).

6. The insertion valve device according to any one of claims 1-3, characterized in that The sealing element (400) includes a sealing cover plate (410) and a reinforcing support plate. The sealing cover plate (410) and the reinforcing support plate are in a T-shaped structure. The sealing cover plate (410) can be sealed to the opening of the vacuum chamber.

7. The insertion valve device of claim 6, wherein, It also includes several flatness adjustment components (700), which are spaced apart along the length of the sealing cover plate (410). One end of each flatness adjustment component (700) is connected to the transmission mechanism (300), and the other end is connected to the sealing cover plate (410). The flatness adjustment component (700) can adjust the flatness of the sealing cover plate (410).

8. The insertion valve device of claim 7, wherein, The flatness adjustment assembly (700) includes a body, a first adjusting bolt (710) and a second adjusting bolt (720). One end of the body is connected to the transmission mechanism (300). The first adjusting bolt (710) passes through the other end of the body and is threadedly connected to the sealing cover plate (410). The second adjusting bolt (720) is threadedly connected to the other end of the body and can abut against the sealing cover plate (410). When the screwing length of the second adjusting bolt (720) is changed, the distance between the sealing cover plate (410) and the body can be changed.

9. A vacuum coating apparatus comprising a vacuum chamber having an opening, characterized in that It also includes a gate valve device as described in any one of claims 1-8, wherein the gate valve device is sealed to the opening.

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