A product detection method, device, computer equipment and readable storage medium

Abstract

The present application provides a product detection method, device, computer equipment and readable storage medium, wherein, in the first detection stage of the detection cycle, for each processing machine, the total number of products processed by the processing machine and the number of detected products are counted; the product detection rate of each processing machine is calculated based on the total number of products and the number of detected products of the processing machine; in the second detection stage, when there are machines with product detection rates lower than a preset threshold and machines with product detection rates higher than a preset threshold, the products that meet the preset sampling rules among the unprocessed products are transferred to the processing machines with product detection rates lower than the preset threshold for processing, and the products that do not meet the preset sampling rules are transferred to the processing machines with product detection rates higher than the preset threshold for processing, until the detection cycle ends. The above method is adopted, and by assigning products that meet the conditions to different machines for processing and detection, it is beneficial to improve the accuracy of detecting the qualified rate of products.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor processing technology, and in particular to a product detection method, device, computer equipment and readable storage medium. Background Art

[0002] In the semiconductor product processing industry chain, it is necessary to conduct random inspections on the products processed by each machine in order to control the attributes of each dimension of the products processed by each machine.

[0003] In the prior art, sampling rules are usually set according to the product serial numbers. For example, when it is stipulated that products with odd-numbered last digits are to be inspected, if the products produced by the processing machine include more products with even-numbered last digits, the number of inspected products processed by the processing machine will be smaller, thereby reducing the accuracy of the inspection of the pass rate of the products processed by the processing machine. Summary of the invention

[0004] In view of this, an object of the present invention is to provide a product detection method, device, computer equipment and readable storage medium, which are conducive to improving the accuracy of detecting the qualified rate of products.

[0005] In a first aspect, an embodiment of the present application provides a product detection method, which is applied to a semiconductor processing system, wherein the semiconductor processing system includes a detection machine and at least one processing machine, wherein products in the same detection cycle are sequentially transmitted to each processing machine for processing, and the processed products are sequentially transmitted to the detection machine for detection. During the process of the detection machine detecting the product, the method includes:

[0006] In the first detection stage of the detection cycle, for each processing machine, the total number of processed products and the number of detected products processed by the processing machine are counted, wherein the total number of products is the number of all products that are processed by the processing machine and then transmitted to the detection machine, and the number of detected products is the number of products that meet the preset sampling rules among the processed products;

[0007] For each processing machine, the product inspection rate of each processing machine is calculated according to the total number of products of the processing machine and the number of products inspected by the processing machine;

[0008] In the second detection stage of the detection cycle, when at least one machine with a product detection rate lower than a preset threshold and at least one machine with a product detection rate higher than the preset threshold appear in the first detection stage, the products among the unprocessed products that meet the preset sampling rules are sequentially transferred to the processing machines with a product detection rate lower than the preset threshold for product processing, and the products among the unprocessed products that do not meet the preset sampling rules are sequentially transferred to the processing machines with a product detection rate higher than the preset threshold for product processing, and the product detection rate of each machine in the second detection stage is calculated, wherein the unprocessed products are products that have not been processed by the processing machines in the detection cycle;

[0009] When at least one machine with a product detection rate lower than a preset threshold and at least one machine with a product detection rate higher than the preset threshold appear in the second detection stage, the unprocessed products that meet the preset sampling rules are sequentially transferred to the processing machines with a product detection rate lower than the preset threshold for product processing, and the unprocessed products that do not meet the preset sampling rules are sequentially transferred to the processing machines with a product detection rate higher than the preset threshold for product processing until the current detection cycle ends.

[0010] Optionally, before the products in the same inspection cycle are sequentially transferred to each processing machine for processing, the method includes:

[0011] A processing machine used to process the product is matched for each product in the same inspection cycle, and a product number is configured for each product according to the type of the product, the processing steps of the product and the number of the processing machine to which the product belongs.

[0012] Optionally, when counting the total number of processed products processed by each processing machine, the method includes:

[0013] Obtaining, by a number collector in the processing machine, a product number of each product processed by the processing machine;

[0014] The number of the product numbers is counted as the total number of products.

[0015] Optionally, when counting the number of inspected products processed by the processing machine, the method includes:

[0016] Acquiring a number collector in the processing machine to collect a product number of each product processed by the processing machine;

[0017] The number of product numbers that meet the preset sampling rules among the product numbers is counted as the number of tested products.

[0018] In a second aspect, an embodiment of the present application provides a product detection device, the device comprising:

[0019] A product number statistics module is used to count the total number of processed products and the number of tested products processed by each processing machine in the first detection stage of the detection cycle, wherein the total number of products is the number of all products that are processed by the processing machine and then transmitted to the testing machine, and the number of tested products is the number of products that meet the preset sampling rules among the processed products;

[0020] A first detection rate calculation module is used to calculate the product detection rate of each processing machine according to the total number of products of the processing machine and the number of detected products of the processing machine;

[0021] A second detection rate calculation module is used for, in the second detection stage of the detection cycle, when at least one machine with a product detection rate lower than a preset threshold and at least one machine with a product detection rate higher than the preset threshold appear in the first detection stage, sequentially transferring the products among the unprocessed products that meet the preset sampling rules to the processing machines with a product detection rate lower than the preset threshold for product processing, and sequentially transferring the products among the unprocessed products that do not meet the preset sampling rules to the processing machines with a product detection rate higher than the preset threshold for product processing, and calculating the product detection rate of each machine in the second detection stage, wherein the unprocessed products are products that have not been processed by the processing machines in the detection cycle;

[0022] The product conveying module is used to convey the products among the unprocessed products that meet the preset sampling rules to the processing machines with product detection rates lower than the preset threshold for product processing in sequence when at least one machine with a product detection rate lower than the preset threshold and at least one machine with a product detection rate higher than the preset threshold appear in the second detection stage, and to convey the products among the unprocessed products that do not meet the preset sampling rules to the processing machines with product detection rates higher than the preset threshold for product processing in sequence until the current detection cycle ends.

[0023] Optionally, the device further comprises:

[0024] The product number configuration module is used to match each product in the same inspection cycle with a processing machine used to process the product, and configure a product number for each product according to the type of the product, the processing steps of the product and the processing machine number to which the product belongs.

[0025] Optionally, when the product number counting module counts the total number of processed products processed by each processing machine, the product number counting module is further used to:

[0026] Obtaining, by a number collector in the processing machine, a product number of each product processed by the processing machine;

[0027] The number of the product numbers is counted as the total number of products.

[0028] Optionally, when counting the number of inspected products of the processed products processed by the processing machine, the product number counting module is further used to:

[0029] Acquiring a number collector in the processing machine to collect a product number of each product processed by the processing machine;

[0030] The number of product numbers that meet the preset sampling rules among the product numbers is counted as the number of tested products.

[0031] In a third aspect, an embodiment of the present application provides a computer device, comprising: a processor, a memory and a bus, wherein the memory stores machine-readable instructions executable by the processor, and when the computer device is running, the processor and the memory communicate through the bus, and when the machine-readable instructions are executed by the processor, the steps of the product detection method described in any optional implementation manner of the first aspect above are performed.

[0032] In a fourth aspect, an embodiment of the present application provides a computer-readable storage medium having a computer program stored thereon, and when the computer program is executed by a processor, the steps of the product detection method described in any optional implementation manner in the above-mentioned first aspect are executed.

[0033] The embodiments of the present invention provide a product detection method, device, computer equipment and readable storage medium, wherein in the first detection stage of the detection cycle, for each processing machine, the total number of processed products and the number of detected products processed by the processing machine are counted, wherein the total number of products is the number of all products processed by the processing machine and then transmitted to the detection machine, and the number of detected products is the number of products that meet the preset sampling rules among the processed products; for each processing machine, the product detection rate of each processing machine is calculated according to the total number of products of the processing machine and the number of detected products of the processing machine. In this step, the product detection rate of this stage can be directly calculated by counting and analyzing the products processed by the processing machine; in the second detection stage of the detection cycle, when at least one machine with a product detection rate lower than a preset threshold and at least one machine with a product detection rate higher than the preset threshold appear in the first detection stage, the products that meet the preset sampling rules among the unprocessed products are sequentially transmitted to the processing machines with product detection rates lower than the preset threshold for product processing, and the products that do not meet the preset sampling rules among the unprocessed products are sent to the processing machines with product detection rates lower than the preset threshold for product processing. The products meeting the sampling inspection rules are sequentially transferred to processing machines with a product detection rate higher than a preset threshold for product processing, and the product detection rate of each machine in the second detection stage is calculated, wherein the unprocessed products are products that have not been processed by the processing machines in the detection cycle. In this step, the product detection rate of the first detection stage is judged and the unprocessed products are allocated to processing machines, and the cycle of the second detection stage is started; when at least one machine with a product detection rate lower than the preset threshold and at least one machine with a product detection rate higher than the preset threshold appear in the second detection stage, the products among the unprocessed products that meet the preset sampling inspection rules are sequentially transferred to processing machines with a product detection rate lower than the preset threshold for product processing, and the products among the unprocessed products that do not meet the preset sampling inspection rules are sequentially transferred to processing machines with a product detection rate higher than the preset threshold for product processing until the current detection cycle ends. In this step, the product detection rate in the second detection stage is judged in real time and the processing machines are allocated to the unprocessed products in real time until all products in the detection cycle are processed and inspected. By adopting the above method, by allocating qualified products to machines with different detection rates for processing and testing, it is beneficial to improve the accuracy of testing the qualified rate of products.

[0034] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0036] Figure 1 A flow chart of a product detection method provided by Embodiment 1 of the present invention is shown;

[0037] Figure 2 A schematic diagram of a semiconductor processing system provided by Embodiment 1 of the present invention is shown;

[0038] Figure 3 A schematic diagram of the structure of a product detection device provided in the second embodiment of the present invention is shown;

[0039] Figure 4 A schematic diagram of the structure of a computer device provided in Embodiment 3 of the present invention is shown. DETAILED DESCRIPTION

[0040] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. The components of the embodiments of the present invention generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present invention.

[0041] Embodiment 1

[0042] To facilitate understanding of this application, Figure 1 The flowchart of a product detection method provided in the first embodiment of the present invention is shown to describe the contents of the first embodiment of the present application in detail.

[0043] See also Figure 1 As stated, Figure 1 A flow chart of a product detection method provided in Embodiment 1 of the present invention is shown, and the method comprises steps S101 to S104:

[0044] S101: In the first detection stage of the detection cycle, for each processing machine, the total number of processed products and the number of detected products processed by the processing machine are counted, wherein the total number of products is the number of all products processed by the processing machine and then transmitted to the detection machine, and the number of detected products is the number of products among the processed products that meet the preset sampling rules.

[0045] Specifically, each inspection cycle includes all products that need to be processed and inspected in the current cycle. After each product is processed by each processing machine, it will be sent to the inspection machine for inspection in turn. When calculating the product inspection rate of each machine, all products that belong to the same product type and are in the same processing step are regarded as a product group. The products in this product group are randomly sent to each processing machine for processing and then inspected. In other words, for the products in each product group, the processing machine used for processing does not need to be specially designated, which greatly reduces the product allocation time at this stage.

[0046] Since each product processed by the processing machine needs to be sent to the inspection machine for inspection, the number of products can be counted on the processing machine. The statistical methods include but are not limited to collecting the number of objects passing through the processing machine through a quantity sensor, or collecting the identification or number of the passing products and then counting the number of identifications or numbers.

[0047] It should be noted that the method for counting the total number of processed products and the number of inspected products processed by the processing machine can be set according to actual needs and is not specifically limited here. The above specific description is an illustrative description of Embodiment 1 of the present invention and does not limit Embodiment 1 of the present invention.

[0048] S102: For each processing machine, the product detection rate of each processing machine is calculated according to the total number of products of the processing machine and the number of products detected by the processing machine.

[0049] Specifically, the calculation method is to divide the number of products detected by the processing machine by the total number of products of the processing machine to obtain the product detection rate of each processing machine, which is used to describe the percentage of detected products in the total number of products.

[0050] S103: In the second detection stage of the detection cycle, when at least one machine with a product detection rate lower than a preset threshold and at least one machine with a product detection rate higher than the preset threshold appear in the first detection stage, the unprocessed products that meet the preset sampling rules are sequentially transferred to the processing machines with a product detection rate lower than the preset threshold for product processing, and the unprocessed products that do not meet the preset sampling rules are sequentially transferred to the processing machines with a product detection rate higher than the preset threshold for product processing, and the product detection rate of each machine in the second detection stage is calculated, wherein the unprocessed products are products that have not yet been processed by the processing machines in the detection cycle.

[0051] Specifically, when the first detection stage of the detection cycle ends, the second detection stage begins. Since the products processed by each processing machine at this time are the products randomly transmitted to the processing machine in the first stage and the unprocessed products have not yet been allocated, when judging how to allocate the first product of the second detection stage, it is necessary to judge the product processing rate of each machine in the first detection stage.

[0052] When at least one machine with a product detection rate lower than the preset threshold and at least one machine with a product detection rate higher than the preset threshold appear in the first detection stage, the unprocessed products that meet the preset sampling rules, that is, the products that have the same attributes as the products detected in the first detection stage in a certain dimension, are transferred to the processing machine with a product detection rate lower than the preset threshold for product processing, so that the total number of products processed by the processing machine and the number of detected products increase at the same time, thereby increasing the product detection rate of the processing machine.

[0053] The unprocessed products that do not meet the preset sampling rules, that is, the products that do not have the same attributes in this specific dimension as the products inspected in the first inspection stage, are transmitted to a processing machine with a product inspection rate higher than a preset threshold for product processing, so that the total number of products processed by the processing machine increases but the number of inspected products remains unchanged, so that the product inspection rate of the processing machine is reduced.

[0054] S104: When at least one machine with a product detection rate lower than a preset threshold and at least one machine with a product detection rate higher than the preset threshold appear in the second detection stage, the unprocessed products that meet the preset sampling rules are sequentially transferred to the processing machines with a product detection rate lower than the preset threshold for product processing, and the unprocessed products that do not meet the preset sampling rules are sequentially transferred to the processing machines with a product detection rate higher than the preset threshold for product processing until the current detection cycle ends.

[0055] Specifically, when performing cyclic judgment and product allocation in the second detection stage, the product detection rate of the machine in the second detection stage is judged and the unprocessed products are allocated, so that the processing machine whose original product detection rate is lower than the preset threshold can improve the product detection rate of the machine by processing specific products; and the processing machine whose original product detection rate is higher than the preset threshold can reduce the product detection rate of the machine by processing specific products, so as to achieve the goal of gradually stabilizing the product detection rate of all machines and keeping it near the preset threshold.

[0056] In a feasible implementation scheme, before the products in the same inspection cycle are sequentially transferred to each processing machine for processing, the method includes:

[0057] A processing machine used to process the product is matched for each product in the same inspection cycle, and a product number is configured for each product according to the type of the product, the processing steps of the product and the number of the processing machine to which the product belongs.

[0058] Specifically, since each product has its own unique product number to indicate the product identity, all products need to be numbered before being transferred to the processing machine; the products are numbered according to the product type, product processing steps and processing machine. If there is more than one product belonging to the same product type, processing steps and processing machine, the product number will be specially marked to distinguish the above different products, so that all products have their own unique identification information.

[0059] In a feasible implementation manner, when counting the total number of processed products processed by each processing machine, the method includes:

[0060] Obtaining the product number of each product processed by the processing machine from a number collector in the processing machine; and counting the number of the product numbers as the total number of products.

[0061] Specifically, since each product has a unique number, when counting the number of products, the numbers on the products can be collected through the number collector in the processing machine. After all numbers are collected, the number of collected numbers is counted as the total number of products.

[0062] In a feasible implementation manner, when counting the number of inspected products processed by the processing machine, the method includes:

[0063] The number collector in the processing machine collects the product number of each product processed by the processing machine; and the number of product numbers that meet the preset sampling rules among the product numbers is counted as the number of inspected products.

[0064] Specifically, after the serial numbers of all products are collected, the serial numbers are identified and analyzed, the number of product serial numbers that meet the preset sampling rules is counted, and the number of serial numbers after counting is used as the number of tested products.

[0065] The solution provided by the present invention is described below with reference to a specific example. Figure 2 A schematic diagram of a semiconductor processing system provided in the first embodiment of the present invention is shown, wherein the semiconductor processing system 200 includes a first processing machine 201, a second processing machine 202, a third processing machine 203, a fourth processing machine 204 and a detection machine 205. When the semiconductor processing system executes the method provided in the first embodiment of the present invention, steps S201 to S206 are specifically performed:

[0066] S201: Taking the same type of products undergoing the same processing steps as an example, there are 13 products of the same type undergoing the same processing steps in the detection cycle, numbered respectively as product 1, product 2, product 3, product 4, product 5, product 6, product 7, product 8, product 9, product 10, product 11, product 12, product 13; in the first detection stage of the cycle, the above 10 products are randomly transmitted to the first processing machine, the second processing machine, the third processing machine and the fourth processing machine for product processing. Here, we transmit product 1, product 2, product 3 to the first processing machine, product 4, product 5, product 6 to the second processing machine, and product 7, product 8, product 9, product 10 to the third processing machine.

[0067] S202: According to the preset sampling rules, select products with odd-numbered product numbers for inspection and calculate the product inspection rate of each processing machine. According to the number and number of products processed by each processing machine in step one, it can be obtained that the product inspection rate of the first processing machine is 66.66%, the product inspection rate of the second processing machine is 33.33%, the product inspection rate of the third processing machine is 50%, and the product inspection rate of the fourth processing machine is 0%.

[0068] S203: Entering the second product inspection stage, first determine the relationship between the product inspection rates of the first processing machine, the second processing machine and the third processing machine and the preset threshold value of 50%. It can be obtained that the product inspection rate of the first processing machine is higher than the preset threshold value, and the product inspection rates of the second processing machine and the fourth processing machine are lower than the preset threshold value. Then, product 11 among the remaining unprocessed products 11, 12 and 13 is transmitted to the second processing machine or 4 for processing. Taking the transmission to the fourth processing machine as an example, the current product processing rate of the fourth processing machine is 100%.

[0069] S204: Re-determine the product detection rate of each processing machine. Since the current product detection rates of the first processing machine and the fourth processing machine are both greater than the preset threshold, and the product detection rate of the second processing machine is lower than the preset threshold, the product 12 is transmitted to the first processing machine or the fourth processing machine. Taking the transmission to the fourth processing machine as an example, the current product detection rate of the fourth processing machine is 50%.

[0070] S205: Re-determine the product detection rate of each processing machine. Since the current product detection rate of the first processing machine is greater than the preset threshold, and the product detection rate of the second processing machine is lower than the preset threshold, the product 13 is transmitted to the second processing machine, and the product detection rate of the second processing machine is 50%.

[0071] S206: All products are processed and inspected within this cycle, and the inspection is ended. The product inspection rate of the first processing machine is 66.66%, the product inspection rate of the second processing machine is 50%, and the product inspection rate of the third processing machine is 50%. The product inspection rate of the third processing machine is 50%. The product inspection rate of all machines tends to be stable and remains near the preset threshold of 50%.

[0072] When steps S201 to S206 are applied to a semiconductor manufacturing platform that integrates MES (manufacturing execution system), EAP (tool automation program) and RTD (resource dispatch system), the method includes S301 to S304:

[0073] S301: The user sets a preset threshold detection rate in MES.

[0074] S302: Each time a product passes through a processing machine, EAP adds a field of the processing machine on the product.

[0075] S303: The RTD system counts the current detection rate of each dimension in real time, and reports the processing machines with low detection rates to MES.

[0076] S304: MES actively selects qualified batches to enter the inspection step based on the fields of the processing machine.

[0077] Embodiment 1 of the present invention further provides a second product detection method for detecting a product, which is applied to a second semiconductor processing system. The second semiconductor processing system includes a fifth processing machine and a second detection machine. The second product detection method includes steps S401 to S406:

[0078] S401: For the fifth processing machine, product 21, product 22, product 23, product 24, product 25, and product 26 belonging to the fifth processing machine are sequentially transferred to the fifth processing machine for processing, and the processed products are transferred to the second inspection machine for inspection.

[0079] S402: When the processed product 21 is transmitted to the second inspection machine, calculate and determine whether the product inspection rate of the machine is less than the preset threshold. If the product inspection rate of the machine is less than the preset threshold, the current product is inspected. If the product inspection rate of the machine is equal to or greater than the preset threshold, the current product is not inspected. Here, it is assumed that the preset threshold is 50%. Since product 21 is the first product transmitted to the second inspection machine but has not been inspected, the total number of products is 1 and the number of products inspected is 0, so the current product inspection rate is 0. If it is determined that the current product inspection rate is less than the preset threshold, the current product 21 is inspected so that the inspection rate of the product after inspection is 100%.

[0080] S403: When the processed product 22 is transmitted to the second inspection machine, the total number of products is 2, the number of inspected products is 1, and the current product inspection rate is 50%. Since the current product inspection rate is equal to the preset threshold, the current product 22 is not inspected, so that the current product inspection rate is 50%;

[0081] S404: When the processed product 23 is transmitted to the second inspection machine, the total number of products is 3, the number of inspected products is 1, and the current product inspection rate is 33.33%. Since the current product inspection rate is less than the preset threshold, the current product 23 is inspected, so that the inspection rate of the inspected product is 66.66%;

[0082] S405: When the processed product 24 is transmitted to the second inspection machine, the total number of products is 4, the number of inspected products is 2, and the current product inspection rate is 50%. Since the current product inspection rate is equal to the preset threshold, the current product 24 is not inspected, so that the current product inspection rate is 50%.

[0083] S406: The above method is repeated until all products have been processed and tested, so that the detection rate of the machine is maintained above a preset threshold; all processing machines are subjected to product testing according to steps S401 to S406.

[0084] When steps S401 to S406 are applied to a semiconductor manufacturing platform that integrates MES (manufacturing execution system), EAP (tool automation program) and RTD (resource dispatch system), the method includes S501 to S505:

[0085] S501: The user sets preset sampling rules in MES.

[0086] S502: The RTD system counts the current detection rate of each dimension in real time.

[0087] S503: RTD proactively dispatches qualified batches of products to processing machines with a detection rate lower than a preset threshold.

[0088] S504: EAP selects the correct processing machine to process the batch of products.

[0089] S506: When the detection rates are all at the preset thresholds, the products are still processed and tested according to the preset sampling rules.

[0090] Embodiment 2

[0091] See also Figure 3 As shown, Figure 3 FIG. 1 is a schematic diagram showing the structure of a product detection device provided in Embodiment 2 of the present invention, wherein the product detection device 300 comprises:

[0092] The product quantity statistics module 301 is used to count the total number of processed products and the number of tested products processed by each processing machine in the first detection stage of the detection cycle, wherein the total number of products is the number of all products that are processed by the processing machine and then transmitted to the testing machine, and the number of tested products is the number of products that meet the preset sampling rules among the processed products;

[0093] A first detection rate calculation module 302 is used to calculate the product detection rate of each processing machine according to the total number of products of the processing machine and the number of detected products of the processing machine;

[0094] The second detection rate calculation module 303 is used for, in the second detection stage of the detection cycle, when at least one machine with a product detection rate lower than a preset threshold and at least one machine with a product detection rate higher than the preset threshold appear in the first detection stage, sequentially transferring the products among the unprocessed products that meet the preset sampling rules to the processing machines with a product detection rate lower than the preset threshold for product processing, and sequentially transferring the products among the unprocessed products that do not meet the preset sampling rules to the processing machines with a product detection rate higher than the preset threshold for product processing, and calculating the product detection rate of each machine in the second detection stage, wherein the unprocessed products are products that have not been processed by the processing machines in the detection cycle;

[0095] The product conveying module 304 is used to convey the products among the unprocessed products that meet the preset sampling rules to the processing machines with product detection rates lower than the preset threshold for product processing in sequence when at least one machine with a product detection rate lower than the preset threshold and at least one machine with a product detection rate higher than the preset threshold appear in the second detection stage, and to convey the products among the unprocessed products that do not meet the preset sampling rules to the processing machines with product detection rates higher than the preset threshold for product processing in sequence until the end of the current detection cycle.

[0096] In a feasible embodiment, the device further comprises:

[0097] The product number configuration module 305 is used to match a processing machine used to process each product in the same inspection cycle, and configure a product number for each product according to the type of the product, the processing steps of the product and the processing machine number to which the product belongs.

[0098] In a feasible implementation manner, the product quantity statistics module is further used to:

[0099] Obtaining, by a number collector in the processing machine, a product number of each product processed by the processing machine;

[0100] The number of the product numbers is counted as the total number of products.

[0101] In a feasible implementation manner, the product quantity statistics module is further used to:

[0102] Acquiring a number collector in the processing machine to collect a product number of each product processed by the processing machine;

[0103] The number of product numbers that meet the preset sampling rules among the product numbers is counted as the number of tested products.

[0104] Embodiment 3

[0105] Based on the same application concept, see Figure 4 As shown, Figure 4 FIG. 4 shows a schematic diagram of the structure of a computer device provided by Embodiment 3 of the present invention, wherein: Figure 4 As shown, a computer device 400 provided in Embodiment 3 of the present application includes:

[0106] A processor 401, a memory 402 and a bus 403, wherein the memory 402 stores machine-readable instructions executable by the processor 401. When the computer device 400 is running, the processor 401 communicates with the memory 402 via the bus 403. When the processor 401 is running, the machine-readable instructions execute the steps of a product detection method shown in the above-mentioned embodiment 1.

[0107] Embodiment 4

[0108] Based on the same application concept, an embodiment of the present invention further provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the steps of a product detection method described in any one of the above embodiments are executed.

[0109] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working process of the system and device described above can refer to the corresponding process in the aforementioned method embodiment, and will not be repeated here.

[0110] The computer program product for performing product detection provided in the embodiment of the present invention includes a computer-readable storage medium storing program code. The instructions included in the program code can be used to execute the methods described in the previous method embodiments. The specific implementation can be found in the method embodiments and will not be repeated here.

[0111] A device for product detection provided in an embodiment of the present invention may be specific hardware on a device or software or firmware installed on a device. The device provided in an embodiment of the present invention has the same implementation principle and technical effects as those in the aforementioned method embodiment. For the sake of brief description, for matters not mentioned in the device embodiment, reference may be made to the corresponding contents in the aforementioned method embodiment. Technical personnel in the relevant field can clearly understand that for the convenience and simplicity of description, the specific working processes of the systems, devices and units described above can all refer to the corresponding processes in the aforementioned method embodiment, and will not be repeated here.

[0112] In the embodiments provided by the present invention, it should be understood that the disclosed devices and methods can be implemented in other ways. The device embodiments described above are only schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some communication interfaces, and the indirect coupling or communication connection of devices or units can be electrical, mechanical or other forms.

[0113] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0114] In addition, each functional unit in the embodiment provided by the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.

[0115] If the functions are implemented in the form of software functional units and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention, or the part that contributes to the prior art or the part of the technical solution, can be embodied in the form of a software product. The computer software product is stored in a storage medium, including several instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the methods described in each embodiment of the present invention. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), disk or optical disk, etc., which can store program codes.

[0116] It should be noted that similar numbers and letters represent similar items in the following figures. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description and are not to be understood as indicating or implying relative importance.

[0117] Finally, it should be noted that the above-described embodiments are only specific implementations of the present invention, which are used to illustrate the technical solutions of the present invention, rather than to limit them. The protection scope of the present invention is not limited thereto. Although the present invention is described in detail with reference to the above-described embodiments, those skilled in the art should understand that any person skilled in the art can still modify the technical solutions described in the above-described embodiments within the technical scope disclosed by the present invention, or can easily think of changes, or perform equivalent replacements on some of the technical features thereof; and these modifications, changes or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention. They should all be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A product detection method, characterized in that: Applied to a semiconductor processing system, the semiconductor processing system includes a detection machine and at least one processing machine, products in the same detection cycle are sequentially transmitted to each processing machine for processing, and the processed products are sequentially transmitted to the detection machine for detection. During the process of the detection machine detecting the product, the method includes: In the first detection stage of the detection cycle, for each processing machine, the total number of processed products and the number of detected products processed by the processing machine are counted, wherein the total number of products is the number of all products that are processed by the processing machine and then transmitted to the detection machine, and the number of detected products is the number of products that meet the preset sampling rules among the processed products; For each processing machine, the product inspection rate of each processing machine is calculated according to the total number of products of the processing machine and the number of products inspected by the processing machine; In the second detection stage of the detection cycle, when at least one machine with a product detection rate lower than a preset threshold and at least one machine with a product detection rate higher than the preset threshold appear in the first detection stage, the products among the unprocessed products that meet the preset sampling rules are sequentially transferred to the processing machines with a product detection rate lower than the preset threshold for product processing, and the products among the unprocessed products that do not meet the preset sampling rules are sequentially transferred to the processing machines with a product detection rate higher than the preset threshold for product processing, and the product detection rate of each machine in the second detection stage is calculated, wherein the unprocessed products are products that have not been processed by the processing machines in the detection cycle; When at least one machine with a product detection rate lower than a preset threshold and at least one machine with a product detection rate higher than the preset threshold appear in the second detection stage, the unprocessed products that meet the preset sampling rules are sequentially transferred to the processing machines with a product detection rate lower than the preset threshold for product processing, and the unprocessed products that do not meet the preset sampling rules are sequentially transferred to the processing machines with a product detection rate higher than the preset threshold for product processing until the current detection cycle ends.

2. The method according to claim 1, characterized in that Before the products in the same inspection cycle are sequentially transferred to each processing machine for processing, the method includes: A processing machine used to process the product is matched for each product in the same inspection cycle, and a product number is configured for each product according to the type of the product, the processing steps of the product and the number of the processing machine to which the product belongs.

3. The method according to claim 1, characterized in that When counting the total number of processed products processed by each processing machine, the method includes: Obtaining, by a number collector in the processing machine, a product number of each product processed by the processing machine; The number of the product numbers is counted as the total number of products.

4. The method according to claim 1, characterized in that: When counting the number of inspected products processed by the processing machine, the method includes: Acquiring a number collector in the processing machine to collect a product number of each product processed by the processing machine; The number of product numbers that meet the preset sampling rules among the product numbers is counted as the number of tested products.

5. A product detection device, characterized in that: The device comprises: A product number statistics module is used to count the total number of processed products and the number of tested products processed by each processing machine in the first detection stage of the detection cycle, wherein the total number of products is the number of products that are processed by the processing machine and then transmitted to the testing machine, and the number of tested products is the number of products that meet the preset sampling rules among the processed products; A first detection rate calculation module is used to calculate the product detection rate of each processing machine according to the total number of products of the processing machine and the number of detected products of the processing machine; A second detection rate calculation module is used for, in the second detection stage of the detection cycle, when at least one machine with a product detection rate lower than a preset threshold and at least one machine with a product detection rate higher than the preset threshold appear in the first detection stage, sequentially transferring the products among the unprocessed products that meet the preset sampling rules to the processing machines with a product detection rate lower than the preset threshold for product processing, and sequentially transferring the products among the unprocessed products that do not meet the preset sampling rules to the processing machines with a product detection rate higher than the preset threshold for product processing, and calculating the product detection rate of each machine in the second detection stage, wherein the unprocessed products are products that have not been processed by the processing machines in the detection cycle; The product conveying module is used to convey the products among the unprocessed products that meet the preset sampling rules to the processing machines with product detection rates lower than the preset threshold for product processing in sequence when at least one machine with a product detection rate lower than the preset threshold and at least one machine with a product detection rate higher than the preset threshold appear in the second detection stage, and to convey the products among the unprocessed products that do not meet the preset sampling rules to the processing machines with product detection rates higher than the preset threshold for product processing in sequence until the current detection cycle ends.

6. The device according to claim 5, characterized in that The device also includes: The product number configuration module is used to match each product in the same inspection cycle with a processing machine used to process the product, and configure a product number for each product according to the type of the product, the processing steps of the product and the processing machine number to which the product belongs.

7. The device according to claim 5, characterized in that The product number counting module is further used to count the total number of processed products processed by each processing machine when counting the total number of processed products processed by the processing machine: Obtaining, by a number collector in the processing machine, a product number of each product processed by the processing machine; The number of the product numbers is counted as the total number of products.

8. The device according to claim 5, characterized in that When counting the number of inspected products of the processed products processed by the processing machine, the product number counting module is also used to: Acquiring a number collector in the processing machine to collect a product number of each product processed by the processing machine; The number of product numbers that meet the preset sampling rules among the product numbers is counted as the number of tested products.

9. A computer device, characterized in that: include: A processor, a memory and a bus, wherein the memory stores machine-readable instructions executable by the processor, and when the computer device is running, the processor and the memory communicate via the bus, and when the machine-readable instructions are executed by the processor, the steps of the product detection method as described in any one of claims 1 to 4 are performed.

10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the steps of the product detection method according to any one of claims 1 to 4 are executed.

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