Sample transport apparatus and semiconductor device

Abstract

The application provides a sample transmission device for transmitting a sample in a cavity of a semiconductor device, comprising: a transmission table for placing the sample; a transmission rod movably connected with the transmission table, one end of the transmission rod comprising a positioning member, the transmission table being internally structured with a placement cavity, the positioning member being allowed to rotate circumferentially and move axially in the placement cavity, so that the front end surface or the rear end surface of the positioning member in the axial movement direction is in contact with the transmission table, the transmission table being pushed and pulled by the positioning member to transmit the sample in the cavity; and a limiting module for limiting the transmission rod to form a locked state in which the transmission rod is prevented from moving axially, and when a circumferential rotation force is applied to the transmission rod to rotate the positioning member, the positioning member is switched between the locked state and an unlocked state in which the transmission rod can be driven to move axially. The application also provides a semiconductor device comprising the sample transmission device. The application solves the problem of collision of the transmission table caused by sliding of the transmission rod and the transmission table at rest.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment technology, and in particular to a sample transfer device and a semiconductor device. Background Technology

[0002] Semiconductor equipment typically includes a preparation chamber and a main chamber. A sample transfer device delivers a sample from the preparation chamber to a mounting stage within the main chamber, where subsequent processing is performed on the sample. In the prior art, the sample transfer device includes a transfer rod and a transfer stage for placing the sample. The transfer rod is used to push and pull the transfer stage to transfer the sample within the chamber of the semiconductor equipment, for example, transferring the sample between the preparation chamber and the main chamber.

[0003] Taking the detection or measurement of a sample under vacuum as an example, first, the main chamber is evacuated. Then, the sample is placed on the transfer stage in the preparation chamber, and the preparation chamber is evacuated again. After the vacuum level in the preparation chamber meets the requirements, the valve located between the main chamber and the preparation chamber is opened to horizontally send the sample into the clamping stage located in the main chamber. Then, the sample rod is pulled out so that the sample and the transfer stage remain at the clamping stage. Finally, the valve is closed to complete the sample delivery process. The sampling process is the reverse of the sample delivery process. Taking the sample delivery process as an example, there is a need to keep the transfer rod stationary. For example, when evacuating the preparation chamber, the transfer rod and transfer stage need to be stationary.

[0004] The applicant points out the following problems with existing sample transfer devices: The inability to lock the stationary transfer rod allows it and the transfer platform to slide, creating a risk of collision. For example, when a sample is placed on the transfer platform within the preparation chamber, which is connected to the outside atmosphere, a pressure difference exists between the inside and outside of the preparation chamber after evacuation. Under atmospheric pressure, the transfer rod and transfer platform may slide towards the main chamber, posing a risk of collision (e.g., collision between the transfer platform and a valve or the main chamber), potentially damaging semiconductor equipment or causing the sample to fall off the transfer platform. Furthermore, when the stationary transfer rod is disturbed by external forces, the lack of locking mechanism also causes the transfer rod and transfer platform to slide, again presenting the aforementioned collision risk. Summary of the Invention

[0005] The purpose of this invention is to disclose a sample transfer device and a semiconductor device based thereon, in order to solve the problem of collisions occurring on the transfer stage in the prior art.

[0006] To achieve the above objectives, the present invention discloses a sample transfer device for transferring samples within a cavity of a semiconductor device, comprising:

[0007] A conveyor belt, used for placing samples;

[0008] A conveyor rod is movably connected to or separated from the conveyor platform. One end of the conveyor rod includes a positioning element. The conveyor platform has an insertion cavity inside. The positioning element is rotated circumferentially and moved axially within the insertion cavity to bring the front or rear face of the positioning element in the axial movement direction into contact with the conveyor platform. The positioning element pushes and pulls the conveyor platform to transfer the sample within the cavity.

[0009] The limiting module is used to limit the transmission rod to a locked state that prevents axial movement. When a circumferential rotational force is applied to the transmission rod to rotate the positioning member, the positioning member switches between the locked state and the unlocked state that allows the transmission rod to move axially.

[0010] As a further improvement of the present invention, the limiting module includes a first limiting member and a second limiting member. The first limiting member protrudes from the conveying rod. When the conveying rod rotates circumferentially and moves axially, it can limit or separate the first limiting member and the second limiting member, thereby enabling the positioning member to switch between a locked state and an unlocked state.

[0011] As a further improvement of the present invention, the first limiting member is a handle, and both the first limiting member and the second limiting member are disposed outside the cavity.

[0012] As a further improvement of the present invention, the front end face and / or insertion cavity of the positioning member protrudes toward the first side wall of the positioning member for abutting a portion between the first side wall and the positioning member, so as to form a gap between the first side wall and the positioning member.

[0013] As a further improvement of the present invention, the front end face of the positioning member protrudes from the abutment portion, the first sidewall is constructed to be planar, and the end of the abutment portion forms a protrusion or a planar surface.

[0014] As a further improvement of the present invention, the front end face of the positioning member protrudes from the abutting portion, and the first sidewall and the abutting portion are recessed and convex to accommodate each other.

[0015] As a further improvement of the present invention, a locking surface is formed on the second side wall of the insertion cavity in the retraction direction along the axial movement of the conveying rod, which matches the contour of the rear end face of the positioning member. The locking surface and the rear end face of the positioning member are concave and convex. When the positioning member stops at the locking surface, the positioning member is in a locked state. When the positioning member disengages from the locking surface, the positioning member is in an unlocked state.

[0016] As a further improvement of the present invention, a conveying surface is also formed on the second sidewall, which is intersected with the locking surface. The conveying surface matches the contour of the rear end face of the positioning member, and the conveying surface and the rear end face of the positioning member are concave and convex. Before using the conveying rod to transport the sample, the positioning member is stopped on the conveying surface.

[0017] As a further improvement of the present invention, it also includes: a dynamic sealing guide module, the dynamic sealing guide module comprising: at least one ring of sealing ring and linear sliding member coaxially surrounding the outer wall of the conveying rod, and a housing; the sealing ring and linear sliding member are housed within the housing, and the housing is connected to the cavity.

[0018] Based on the same inventive concept, the present invention also provides a semiconductor device, including: a cavity and the aforementioned sample transfer device.

[0019] Compared with the prior art, the beneficial effects of the present invention are: by limiting the transmission rod through the limiting module, the transmission rod is locked in a state that prevents axial movement. When a circumferential rotational force is applied to the transmission rod to make the positioning member rotate, the positioning member switches between the locked state and the unlocked state that can drive the transmission rod to move axially. This effectively prevents the stationary transmission rod and the transmission table from sliding and effectively eliminates the hidden danger of the transmission table colliding due to the transmission rod sliding. Attached Figure Description

[0020] Figure 1 This is a perspective view of the sample transfer device provided in an embodiment of the present invention, with the positioning component in an unlocked state;

[0021] Figure 2 for Figure 1 A magnified view of a portion of region A in the middle;

[0022] Figure 3 This is a perspective view of the sample transfer device provided in an embodiment of the present invention, with the positioning element in a locked state;

[0023] Figure 4 for Figure 3 A magnified view of a portion of region B in the middle;

[0024] Figure 5 for Figure 1 Schematic diagram of the positioning component;

[0025] Figure 6 This is a cross-sectional view of the transfer station at the insertion cavity in an embodiment of the present invention. Detailed Implementation

[0026] The present invention will now be described in detail with reference to the embodiments shown in the accompanying drawings. However, it should be noted that these embodiments are not intended to limit the present invention. Equivalent transformations or substitutions in function, method, or structure made by those skilled in the art based on these embodiments are all within the scope of protection of the present invention. The term "and / or" includes any and all combinations of one or more of the related listed items. The terms "center," "longitudinal," "lateral," "length," "upper," "lower," "vertical," "horizontal," "top," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the technical solution and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the technical solution.

[0027] like Figure 1-6 As shown, this embodiment provides a sample transfer device for transferring a sample (e.g., a wafer) within a cavity (not shown) of a semiconductor device, comprising:

[0028] Conveyor 1 is used to place samples;

[0029] The conveying rod 2 is movably connected to or separated from the conveying platform 1. One end of the conveying rod 2 includes a positioning member 3. The conveying platform 1 has an insertion cavity 4 inside. The positioning member 3 is rotated circumferentially and moved axially within the insertion cavity 4 so that the front end face 31 or rear end face 33 of the positioning member 3 in the axial movement direction contacts the conveying platform 1. The positioning member 3 pushes and pulls the conveying platform 1 to transfer the sample within the cavity.

[0030] The limiting module is used to limit the transmission rod 2 to form a locked state that prevents the transmission rod 2 from making axial movement. When a circumferential rotational force is applied to the transmission rod 2 to make the positioning member 3 rotate, the positioning member 3 can switch between the locked state and the unlocked state that can drive the transmission rod 2 to make axial movement.

[0031] By limiting the transmission rod with a limiting module, the transmission rod is locked in a state that prevents axial movement. When a circumferential rotational force is applied to the transmission rod to rotate the positioning member, the positioning member switches between the locked state and the unlocked state that allows the transmission rod to move axially. This solves the problem of the transmission rod 2 sliding due to being unlocked when stationary. For example, it can solve the problem of the transmission rod 2 sliding due to external disturbance, thereby effectively preventing the stationary transmission rod 2 and the transmission platform 1 from sliding, and effectively eliminating the hidden danger of the transmission platform 1 colliding due to the sliding of the transmission rod 2.

[0032] For example, even if the cavity of the semiconductor device is evacuated, resulting in a vacuum difference between the inside and outside of the cavity, which causes the stationary transfer rod 2 to be subjected to a pushing force, the sample transfer device provided in this embodiment of the invention is also applicable to this situation. That is, it can also solve the problem that the stationary transfer rod 2 slides due to the pressure difference between the inside and outside of the cavity caused by the evacuation of the semiconductor device cavity, thereby preventing the transfer rod 2 and the transfer table 1 from sliding and eliminating the risk of collision of the transfer table 1.

[0033] Exemplarily, the cavity includes a preparation cavity and a main cavity, with a gate valve disposed between the main cavity and the preparation cavity, the gate valve being openable or closed. The sample transfer device is used to perform a sample delivery process (transferring a sample from the preparation cavity to the main cavity) or a sample retrieval process (transferring a sample from the main cavity to the preparation cavity), thereby transferring samples within the cavity of the semiconductor device using the sample transfer device.

[0034] Exemplarily, the volume of the chamber formed by the preparation cavity is smaller than the volume of the chamber formed by the main cavity. A clamping stage (not shown) is provided in the main cavity to transfer samples to and from the transfer stage 1, receive samples delivered by the transfer stage, or remove the transfer stage 1 and samples from the main cavity. Various semiconductor-related processes, such as detection, measurement, or machining, are performed on the samples within the main cavity. Specifically, after the transfer stage 1 and the clamping stage are detachably fixed in alignment (in this embodiment, the transfer stage 1 and the clamping stage are snapped together), the transfer rod is pulled out, causing the transfer stage 1 and the sample on it to remain at the clamping stage. After the semiconductor process on the sample is completed in the main cavity, the transfer rod is re-aligned and fixed with the clamping stage, causing the transfer stage 1 to detach from the clamping stage to retrieve the sample.

[0035] In this embodiment, as Figure 6 As shown, the term "axial" for spatial orientation refers to the axial direction P of the transmission rod 2, and the term "circumferential" refers to the direction in which the transmission rod 2 rotates about the axial direction P.

[0036] For example, the limiting module includes a first limiting member and a second limiting member (not shown). The first limiting member protrudes from the conveying rod 2. When the conveying rod 2 rotates circumferentially and moves axially, it can limit or separate the first limiting member and the second limiting member, thereby enabling the positioning member 2 to switch between a locked state and an unlocked state. Figure 1 and Figure 3 As shown, the first limiting member is a handle 5, and both the first and second limiting members are located outside the cavity.

[0037] For example, refer to Figure 2 and Figure 5The front end face 31 of the positioning member 3 and / or the insertion cavity 4 protrude from the first side wall (not shown) of the positioning member 3 to abut against the space between the first side wall and the positioning member 3, thus forming a gap (not shown) between the first side wall and the positioning member 3. Therefore, when the conveying rod 2 pushes against the conveying table 1, there is a gap between the positioning member 3 of the conveying rod 2 and the conveying table 1, resulting in a small contact area, less wear, and less likelihood of generating particulate matter. In this embodiment, the front end face 31 of the positioning member 3 protrudes from the abutment portion 32.

[0038] For example, the first sidewall is constructed to be planar, and the end of the abutment portion 32 is formed as a protrusion or a plane, the end of the abutment portion 32 being used to abut against the first sidewall.

[0039] For example, the first sidewall and the abutting portion 32 have a concave-convex receiving relationship, which can guide and limit the abutting portion 32, allowing the abutting portion 32 to be quickly pushed against the first sidewall and providing a certain degree of limitation for the abutting portion 32. This helps to prevent the transmission rod 2 from shifting, avoids alignment errors, and ensures that the transmission rod 2 moves along its axial direction. For example, a groove is formed on the first sidewall, and a protrusion is formed at the end of the abutting portion 32; or a protrusion is formed on the first sidewall, and a groove is formed at the end of the abutting portion 32. The cross-sectional shape of the protrusion can be rectangular, semi-circular, or semi-elliptical, and the cross-sectional shape of the groove can be rectangular, semi-circular, or semi-elliptical, but is not limited to these. The groove completely or partially accommodates the protrusion. In this embodiment, the protrusion is a spherical protrusion, and the groove is a spherical groove.

[0040] The limiting device ensures that the conveyor rod 2 is in a locked state. However, to prevent the conveyor rod 2 from rotating circumferentially due to disturbances, thus ensuring it remains properly locked, in this embodiment, as shown... Figure 2 and Figure 6 As shown, the conveyor rod 2 is inserted into or withdrawn from the insertion cavity 4 through the insertion hole 11. A locking surface 42 is formed on the second sidewall 41 of the insertion cavity 4 along the retraction direction of the conveyor rod 2, which conforms to the contour of the rear end face 33 of the positioning member 3. The locking surface 42 and the rear end face 33 of the positioning member 3 are concave and convex, respectively. When the positioning member 3 rests on the locking surface 42, it is in a locked state; when it disengages from the locking surface 42, it is in an unlocked state. By setting the locking surface 42 and ensuring its concave-convex fit with the positioning member 3, the conveyor rod 2 can be further circumferentially limited, keeping it in a locked state and preventing it from easily disengaging due to disturbance.

[0041] To switch the transmission rod 2 from the locked state to the unlocked state, the transmission rod 2 can be rotated circumferentially to disengage the positioning member 3 from the locking surface 42 and to separate the first limiting member and the second limiting member. For example, using the handle 5 to rotate the transmission rod 2 circumferentially can separate the handle 5 from the second limiting member and disengage the positioning member 3 from the locking surface 42.

[0042] refer to Figure 6 In this embodiment, to avoid circumferential displacement of the conveyor rod 2 when it is moved axially to transfer the sample, a conveying surface 43 is also formed on the second sidewall 41, which is intersected with the locking surface 42. The conveying surface 43 is in contour with the rear end face 33 of the positioning member 3. The conveying surface 43 and the rear end face 33 of the positioning member 3 are concave and convex. Before using the conveyor rod 2 to transfer the sample, the positioning member 3 is stopped on the conveying surface 43.

[0043] Both the conveying surface 43 and the locking surface 42 can limit the circumferential rotation of the conveying rod 2, but neither can limit the axial movement of the conveying rod 2. When the conveying rod 2 is in the locked state, the conveying rod 2 cannot move axially. When it is in the unlocked state, the conveying rod 2 can move axially.

[0044] In this embodiment, when the positioning member 3 rests on the locking surface 42 or the conveying surface 43, the abutting part 32 abuts against the first side wall respectively.

[0045] For example, the locking surface 42 is configured as a groove, and the rear end face 33 of the positioning member 3 forms a protrusion; or the locking surface 42 is configured as a protrusion, and the rear end face 33 of the positioning member 3 forms a groove. Similarly, the conveying surface 43 can be configured as either a groove or a protrusion, which will not be elaborated further here. The cross-sectional shape of the protrusion can be rectangular, semi-circular, or semi-elliptical, and the cross-sectional shape of the groove can be rectangular, semi-circular, or semi-elliptical, but is not limited to these. The groove can completely or partially accommodate the protrusion.

[0046] For example, in order to facilitate switching the positioning member 3 between the locking surface 42 and the conveying surface 43, the rear end surface 33 of the positioning member 3 can be set as a raised arc surface, and the locking surface 42 and / or the conveying surface 43 can be set as an arc-shaped groove. Alternatively, the locking surface 42 and / or the conveying surface 43 can be set as a rectangular or other shaped groove.

[0047] In this embodiment, reference Figure 2 , Figure 4 and Figure 6The insertion hole 11 of the insertion cavity 4 is in a horizontal state. After the conveyor rod 2 is axially moved into the insertion cavity 4 of the conveyor table 1 along its axis P, the positioning member 3 is in a horizontal state at this time. When it is necessary to transfer the sample, the positioning member 3 is rotated circumferentially to stop and limit it on the conveying surface 43. For example, the horizontal positioning member 3 is rotated 90 degrees so that the positioning member 3 stops at the vertical conveying surface 43. When it is necessary to keep the conveyor rod 2 stationary, the positioning member 3 is rotated circumferentially to stop and limit it on the locking surface 42. When it is necessary to remove the conveyor rod 2, depending on the position of the positioning member 3 at this time, axial movement or axial movement and circumferential rotation are selected to remove the conveyor rod 2 from the insertion hole 11.

[0048] In this embodiment, reference Figure 6 A pair of locking surfaces 42 and conveying surfaces 43 arranged linearly are provided on the second sidewall 41 above and below the insertion hole 11. The two locking surfaces 42 arranged vertically are arranged linearly along the dotted line M, and the two conveying surfaces 43 arranged vertically are arranged linearly along the dotted line N. The included angle θ between the locking surfaces 42 and the conveying surfaces 43 (i.e., the dotted lines M and N) satisfies 0 < θ < 180°, and θ ≠ 90°, for example, 1 ≤ θ ≤ 45°.

[0049] In this embodiment, the sample transfer device further includes a dynamic sealing guide module 6, which includes: at least one ring of sealing ring and linear sliding member (neither shown) coaxially surrounding the outer wall of the transfer rod, and a housing; the sealing ring and linear sliding member are housed in the housing, and the housing is connected to the cavity.

[0050] Exemplarily, the dynamic sealing guide module 6 includes a sealing module and a guide module. The sealing module includes a housing and at least one ring of seals, and the guide module includes a linear slider. The seals and the linear slider surround the outer wall of the conveyor rod 2 and are housed within the housing, which is connected to the preparation cavity. Preferably, the dynamic sealing guide module 6 includes two rings of seals spaced apart, each seal including an O-ring. Two grooves for embedding the seals are formed on the inner wall of the housing.

[0051] By setting a linear sliding member to constrain the conveyor rod 2, the conveyor rod 2 moves linearly along its axial direction, effectively solving the pitching phenomenon that exists when the conveyor rod 2 moves axially. On the one hand, it effectively prevents the generation of particles due to friction between the conveyor rod 2 and the cavity caused by the pitching of the conveyor rod 2 during repeated axial movements, effectively reducing the wear of the conveyor rod 2 and improving its service life; on the other hand, it improves the accuracy of the conveyor rod 2 in performing the sample feeding and retrieval process.

[0052] For example, a linear slider may include a linear bearing or a linear guide slider.

[0053] This embodiment also provides a semiconductor device, including: a cavity and the aforementioned sample transfer device.

[0054] For example, the cavity includes a main cavity and a preparation cavity, and the sample is transferred between the preparation cavity and the main cavity by the sample transfer device. A gate valve is provided between the main cavity and the preparation cavity.

[0055] For example, the semiconductor device may be a semiconductor film thickness measurement device or a semiconductor defect detection device, and the sample may be a semiconductor sample (such as a wafer), but is not limited thereto. For example, when the semiconductor device is a FIB-SEM (Focused Ion Beam Scanning Electron Microscope), the sample may also be a non-semiconductor sample (such as a biological sample).

[0056] In this embodiment, a movable valve that can be opened or closed is provided between the main cavity and the preparation cavity. The volume of the chamber formed by the preparation cavity is smaller than the volume of the chamber formed by the main cavity. A clamping stage is provided in the main cavity. The clamping stage cooperates with the transfer stage to receive or remove the sample sent by the transfer stage. Various processes based on semiconductor manufacturing processes are performed on the sample in the main cavity.

[0057] The detailed descriptions listed above are merely specific descriptions of feasible embodiments of the present invention, and are not intended to limit the scope of protection of the present invention. All equivalent embodiments or modifications made without departing from the spirit of the present invention should be included within the scope of protection of the present invention.

[0058] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A sample transfer device for transferring a sample within a cavity of a semiconductor device, characterized in that, include: A conveyor belt, used for placing samples; A conveyor rod is movably connected to or separated from the conveyor platform. One end of the conveyor rod includes a positioning element. The conveyor platform has an insertion cavity inside. The positioning element is rotated circumferentially and moved axially within the insertion cavity to bring the front or rear face of the positioning element in the axial movement direction into contact with the conveyor platform. The positioning element pushes and pulls the conveyor platform to transfer the sample within the cavity. The limiting module is used to limit the transmission rod to form a locked state that prevents the transmission rod from moving axially. When a circumferential rotational force is applied to the transmission rod to make the positioning member rotate, the positioning member can switch between the locked state and the unlocked state that can drive the transmission rod to move axially. The limiting module includes a first limiting member and a second limiting member. The first limiting member protrudes from the conveyor rod. When the conveyor rod rotates circumferentially and moves axially, it can limit or separate the first limiting member and the second limiting member, thereby enabling the positioning member to switch between a locked state and an unlocked state.

2. The sample transfer device according to claim 1, characterized in that, The first limiting member is a handle, and both the first and second limiting members are located outside the cavity.

3. The sample transfer device according to claim 1, characterized in that, The front end face and / or insertion cavity of the positioning member protrudes towards the first side wall of the positioning member for abutting a portion between the first side wall and the positioning member, thereby forming a gap between the first side wall and the positioning member.

4. The sample transfer device according to claim 3, characterized in that, The front end face of the positioning member has the abutment portion protruding, the first sidewall is constructed to be planar, and the end of the abutment portion forms a protrusion or a planar surface.

5. The sample transfer device according to claim 3, characterized in that, The front end face of the positioning member has the abutment portion protruding, and the first sidewall and the abutment portion are recessed and convex to accommodate each other.

6. The sample transfer device according to any one of claims 1-5, characterized in that, On the second sidewall of the insertion cavity in the retraction direction along the axial movement of the conveyor rod, a locking surface is formed that matches the contour of the rear end face of the positioning member. The locking surface and the rear end face of the positioning member are concave and convex. When the positioning member stops at the locking surface, the positioning member is in a locked state. When the positioning member disengages from the locking surface, the positioning member is in an unlocked state.

7. The sample transfer device according to claim 6, characterized in that, A conveying surface is also formed on the second sidewall, which intersects with the locking surface. The conveying surface matches the contour of the rear end face of the positioning member, and the conveying surface and the rear end face of the positioning member are concave and convex. Before using the conveying rod to transfer the sample, the positioning member is stopped on the conveying surface.

8. The sample transfer device according to claim 1, characterized in that, Also includes: A dynamic sealing guide module, comprising: at least one ring of sealing elements and linear sliding elements coaxially arranged and surrounding the outer wall of the conveyor rod, and a housing; The sealing ring and the linear sliding element are housed within the housing, which is connected to the cavity.

9. A semiconductor device, characterized in that, include: The cavity and the sample transfer device as described in any one of claims 1 to 8.

Images