Magnet module and sputter device comprising the same

Abstract

A magnet module and a sputtering apparatus including the same are disclosed. The magnet module includes at least one magnet unit. Each magnet unit includes a first magnet member and a second magnet member surrounding the first magnet member in a plan view. The first magnet member extends along a first direction and includes a middle portion and an end portion. The first magnet member includes a first portion disposed in the middle portion and extending along the first direction, and a second portion disposed in the end portion and having a width greater than a width of the first portion.

Description

TECHNICAL FIELD

[0001] Embodiments relate to a magnet module. More particularly, embodiments relate to a magnet module and a sputtering apparatus including the same. BACKGROUND

[0002] Sputtering is a deposition method that provides target atoms ejected from a target when ions in a plasma collide with the target by electric energy applied to the ions.

[0003] A magnetron sputtering method can use a magnetic field to increase a deposition rate. For example, a magnetic field formed by a magnet module disposed adjacent to a target can trap ions to generate a high-density plasma. Accordingly, a deposition speed can be increased.

[0004] However, the magnetic field can not have a uniform distribution, and the plasma can be concentrated in a particular region. Accordingly, erosion of the target can be non-uniform. SUMMARY

[0005] Embodiments provide a magnet module capable of improving irregularity of a magnetic field formed by the magnet module.

[0006] Embodiments provide a sputtering apparatus capable of improving non-uniform erosion of a target.

[0007] According to embodiments, the magnet module includes at least one magnet unit. Each magnet unit includes a first magnet member and a second magnet member surrounding the first magnet member in a plan view. The first magnet member extends along a first direction and includes a middle portion and an end portion. The first magnet member includes a first portion disposed in the middle portion and extending along the first direction, and a second portion disposed in the end portion and having a width greater than that of the first portion. The second magnet member includes a first portion spaced apart from the first magnet member along a second direction crossing the first direction, and a second portion spaced apart from the first magnet member along the first direction. The width of the first magnet member gradually or stepwise increases along the first direction at a portion where Y1 is equal to or greater than L1 0.5 and equal to or less than L1 1.2. A distance between the first magnet member and the second magnet member along the second direction is equal to or greater than L2 0.5 at a point where Y1=L1 0.5 and equal to or less than G1 0.75. Y1 is a distance from the first magnet member to an outer boundary of the second magnet member along the first direction. L1 is a width of each magnet unit along the second direction. L2 is a width of the first portion of the second magnet member. G1 is a distance between the first portion of the first magnet member and the first portion of the second magnet member.

[0008] In an embodiment, the first magnet member further includes a third portion disposed adjacent to the second portion of the first magnet member and having a width that decreases toward the second portion of the second magnet member along the first direction.

[0009] In an embodiment, the first magnet member further includes a fourth portion disposed between the first portion and the second portion of the first magnet member and having a width that is smaller than the width of the second portion of the first magnet member and larger than the width of the first portion of the first magnet member.

[0010] In an embodiment, in the first magnet member, the width of the fourth portion gradually decreases from the second portion toward the first portion.

[0011] In an embodiment, the width of at least a portion of the third portion of the first magnet member is larger than the width of the second portion of the first magnet member.

[0012] In an embodiment, the first magnet member further includes a third portion disposed closer to the second magnet member than the second portion of the first magnet member and having a uniform width that is larger than the width of the second portion of the first magnet member.

[0013] In an embodiment, the second magnet member further includes a corner portion connecting the first portion and the second portion of the second magnet member to each other and having a boundary surface extending in an oblique direction crossing the first direction and the second direction.

[0014] In an embodiment, a plurality of magnet units are arranged along the second direction. Virtual center lines of the first magnet member and the second magnet member extending along the first direction coincide with each other in the magnet units disposed in an inner region of the magnet module. The virtual center line of the first magnet member disposed in an outermost portion of the magnet module does not overlap the virtual center line of the second magnet member disposed in the outermost portion of the magnet module.

[0015] In an embodiment, the height of the first magnet member is different from the height of the second magnet member.

[0016] In an embodiment, the first magnet member is an S-pole and the second magnet member is an N-pole.

[0017] In an embodiment, the first magnet member is an N-pole and the second magnet member is an S-pole.

[0018] In an embodiment, the magnet module further includes a shield member partially covering the magnet units.

[0019] According to an embodiment, a magnet module includes at least one magnet unit. Each magnet unit includes a first magnet member and a second magnet member surrounding the first magnet member in a plan view. The first magnet member extends along a first direction and includes a middle portion and an end portion. The first magnet member includes a first portion disposed in the middle portion and extending along the first direction, a second portion disposed in the end portion and having a width greater than that of the first portion, and a third portion disposed adjacent to the second portion and having a width decreasing toward the second magnet member along the first direction. The second magnet member includes a first portion extending along the first direction and spaced apart from the first magnet member along a second direction crossing the first direction, and a second portion spaced apart from the first magnet member along the first direction.

[0020] According to an embodiment, a sputtering apparatus includes a back plate connected to a power supply and a magnet module disposed below the back plate. The magnet module includes at least one magnet unit. Each magnet unit includes a first magnet member and a second magnet member surrounding the first magnet member in a plan view. The first magnet member extends along a first direction and includes a middle portion and an end portion. The first magnet member includes a first portion disposed in the middle portion and extending along the first direction, and a second portion disposed in the end portion and having a width greater than that of the first portion. The second magnet member includes a first portion spaced apart from the first magnet member along a second direction crossing the first direction, and a second portion spaced apart from the first magnet member along the first direction. At a point where Y1 is equal to or greater than L1 0.5 and equal to or less than L1 1.2, the width of the first magnet member gradually or stepwise increases along the first direction. At a point where Y1 = L1 0.5, a distance between the first magnet member and the second magnet member along the second direction is equal to or greater than L2 0.5 and equal to or less than G1 0.75. Y1 is a distance from the first magnet member to an outer boundary of the second magnet member along the first direction. L1 is a width of each magnet unit along the second direction. L2 is a width of the first portion of the second magnet member. G1 is a distance between the first portion of the first magnet member and the first portion of the second magnet member.

[0021] According to an embodiment, uniformity of a magnetic field in a sputtering apparatus can be improved. Accordingly, uniformity of erosion of a target can be improved. Therefore, quality of a thin film formed by sputtering can be improved, and a target can be used for a longer time. BRIEF DESCRIPTION OF DRAWINGS

[0022] Aspects of one or more embodiments of the present inventive concepts will become more readily apparent from the following detailed description, taken in conjunction with the following drawings.

[0023] Figure 1 is a schematic diagram illustrating a sputter apparatus according to an embodiment.

[0024] Figure 2 is a plan view illustrating a magnet module according to an embodiment.

[0025] Figure 3 is an enlarged plan view illustrating a region "A" of Figure 2

[0026] Figure 4 Figure 5 and Figure 6 are enlarged plan views illustrating a portion of a magnet module according to an embodiment.

[0027] Figure 7 is a plan view illustrating a magnet module according to an embodiment.

[0028] Figure 8 Figure 9 and Figure 10 are sectional views illustrating a magnet unit of a magnet module according to an embodiment.

[0029] Figure 11 is a plan view illustrating a magnet module according to an embodiment.

[0030] Figure 12 and Figure 13 are schematic diagrams illustrating a sputter apparatus according to an embodiment.

[0031] Figure 14 is an enlarged plan view illustrating a magnet module according to a comparative example.

[0032] Figure 15 is a graph illustrating the intensity of a magnetic field measured from magnet modules according to a comparative example and an embodiment. DETAILED DESCRIPTION

[0033] Hereinafter, a magnet module and a sputter apparatus according to embodiments of the inventive concepts will be described with reference to the accompanying drawings, in which some embodiments are illustrated.

[0034] Figure 1 is a schematic diagram illustrating a sputter apparatus according to an embodiment.

[0035] Referring to Figure 1 , a sputter apparatus according to an embodiment includes a back plate 40 and a magnet module 10 disposed below the back plate 40. The back plate 40 can support a target 80, and can serve as an electrode (cathode) that receives a voltage to generate a plasma.

[0036] ​​​The sputtering apparatus can further include a chamber 30 that accommodates an inert gas to generate a plasma and provide a discharge space for the plasma. The inert gas can be supplied into the chamber 30 through a gas supply part 70. For example, the inert gas can include argon (Ar), neon (Ne), xenon (Xe), or the like.

[0037] A deposition substrate 100 can be disposed in the chamber 30. The deposition substrate 100 can be spaced apart from the target 80 and can face the target 80. For example, the deposition substrate 100 can be fixed in the chamber 30 by a substrate fixing part 110.

[0038] The back plate 40 can be electrically connected to a power supply 60. The power supply 60 can provide a radio frequency (RF) power (alternating current power) or a direct current (DC) power to the back plate 40.

[0039] When a voltage is applied to the back plate 40, a plasma discharge can occur in the chamber 30, and the inert gas can be ionized. The ionized atoms can be accelerated toward the target 80 to collide with the target 80. Then, atoms constituting the target 80 can be ejected or sputtered therefrom, and the atoms constituting the target 80 can travel toward the deposition substrate 100 so that a thin film can be formed on the deposition substrate 100.

[0040] The target 80 can include various materials depending on a thin film to be deposited on the deposition substrate 100. For example, the target 80 can include a metal, a metal oxide, or a combination thereof. For example, the metal can include aluminum, titanium, molybdenum, gold, silver, indium, zinc, tin, silicon, or a combination thereof. For example, the metal oxide can include indium oxide, zinc oxide, tin oxide, indium zinc oxide, indium zinc tin oxide, indium zinc gallium oxide, or a combination thereof.

[0041] When the plasma is generated, the magnet module 10 can form a magnetic field to increase a plasma density and a deposition rate.

[0042] In an embodiment, a protective sheet 50 can be disposed between the back plate 40 and the magnet module 10. For example, the protective sheet 50 can include a fluorine-containing resin such as polytetrafluoroethylene (PTFE) or the like.

[0043] The magnet module 10 can be combined with the back plate 40 to constitute a cathode module. For example, the cathode module can be disposed in the chamber 30, or can be inserted into the chamber 30 so that a portion of the cathode module can be disposed in the chamber 30. However, embodiments are not limited thereto, and the magnet module 10 and the back plate 40 can be combined with each other according to various configurations known in the art.

[0044] Figure 2 is a plan view illustrating a magnet module according to an embodiment.

[0045] Referring to Figure 1 and Figure 2The magnet module 10 includes a plurality of magnet units MU, each of which includes a first magnet member 12 and a second magnet member 14. The first magnet member 12 can extend along a first direction D1. The second magnet member 14 can surround the first magnet member 12 in a plan view. The second magnet member 14 can completely surround the first magnet member 12 in a plan view. The first magnet member 12 and the second magnet member 14 can be fixed on a support plate 16 to form the magnet unit MU.

[0046] The first magnet member 12 and the second magnet member 14 can have poles opposite to each other. For example, the first magnet member 12 can have an S pole, and the second magnet member 14 can have an N pole. However, embodiments are not limited thereto, and the first magnet member 12 can have an N pole, and the second magnet member 14 can have an S pole.

[0047] In embodiments, the height (height of the upper surface) of the first magnet member 12 can be substantially the same as the height of the second magnet member 14. However, embodiments are not limited thereto. For example, the first magnet member 12 and the second magnet member 14 can have different heights from each other.

[0048] The magnet unit MU can include one first magnet member 12 and one second magnet member 14. A plurality of magnet units MU can be arranged along a second direction D2 intersecting the first direction D1 to form the magnet module 10.

[0049] In embodiments, the first magnet member 12 can have a width in an end portion (end region) greater than a width in the middle portion. The specific shape of the first magnet member 12 and the second magnet member 14 will be more fully described below.

[0050] Figure 3 is an enlarged plan view showing a region "A" of Figure 2

[0051] Referring to Figure 3 The first magnet member 12 includes a first portion 12a extending along the first direction D1, and a second portion 12b having a width W2 greater than a width W1 of the first portion 12a and extending along the first direction D1. The second portion 12b can be spaced apart from or adjacent to the first portion 12a along the first direction D1. For example, the second portion 12b can have a substantially rectangular shape in a plan view.

[0052] ​The first magnet member 12 further includes a third portion 12c adjacent to the second portion 12b. The width (average width) of the third portion 12c can be smaller than the width W2 of the second portion 12b. For example, the third portion 12c can be provided adjacent to the second portion 12b along the first direction D1 and form a terminal end of the first magnet member 12. The width of the third portion 12c can decrease in a direction away from the second portion 12b. For example, the third portion 12c adjacent to the second portion 12b can have a maximum width of the same width W2 as the width W2 of the second portion 12b, and the width of the third portion 12c decreases from the third portion 12c adjacent to the second portion 12b to an end of the third portion 12c.

[0053] In the embodiment, the third portion 12c can have a tapered shape having a gradually decreasing width. However, the embodiment is not limited thereto. For example, the third portion 12c can have a width that decreases stepwise.

[0054] The fourth portion 12d can be provided between the second portion 12b and the first portion 12a. The width of the fourth portion 12d can be greater than the width W1 of the first portion 12a and smaller than the width W2 of the second portion 12b. The fourth portion 12d can reduce a large change in width between the first portion 12a and the second portion 12b, so that a change in the magnetic field at a boundary region between the first portion 12a and the second portion 12b can be reduced.

[0055] For example, the first portion 12a of the first magnet member 12 can be referred to as a middle portion or a middle region. The second portion 12b, the third portion 12c, and the fourth portion 12d of the first magnet member 12 can be referred to as end portions or end regions.

[0056] The second magnet member 14 can include a first portion 14a spaced apart from the first magnet member 12 along a second direction D2 and a second portion 14b spaced apart from the first magnet member 12 along the first direction D1. For example, the first portion 14a can extend along the first direction D1, and the second portion 14b can extend along the second direction D2. In the embodiment, the second portion 14b of the second magnet member 14 can be provided adjacent to the third portion 12c of the first magnet member 12 to face an end of the third portion 12c.

[0057] In the embodiment, the second magnet member 14 can further include a corner portion 14c connecting the first portion 14a to the second portion 14b. In the embodiment, the corner portion 14c can extend in an oblique direction crossing the first direction D1 and the second direction D2. Accordingly, a reduction in the magnetic field in a region adjacent to the corner portion 14c can be improved.

[0058] In the embodiment, the first magnet member 12 can be designed according to the following conditions.

[0059] (1) Y1 is equal to or greater than L1 0.5 and equal to or less than L1 1.2, the width of the first magnet member 12 gradually or stepwise increases toward the end of the first magnet member 12.

[0060] (2) At the point where Y1 = L1 0.5, G2 is equal to or greater than L2 0.5 and equal to or less than G1 0.75.

[0061] Y1 is a distance along the first direction from the first magnet member to the outer boundary of the second magnet member.

[0062] L1 is a width along the second direction of the magnet unit (the entire width of the second magnet member).

[0063] L2 is a width of the first portion of the second magnet member.

[0064] G1 is a distance between the first portion of the first magnet member and the first portion of the second magnet member.

[0065] G2 is a distance along the second direction between the first magnet member and the second magnet member.

[0066] When G2 is less than L2 0.5, the magnetic field can be distorted and the magnet members can be damaged. When G2 is greater than G1 0.75, the uniformity of the magnetic field will be poor.

[0067] In embodiments having Figure 3 the shape shown in FIG. 1, L1 can be about 120 mm, L2 can be about 17 mm, G1 can be about 31 mm, the distance along the first direction D1 between the third portion 12c of the first magnet member 12 and the second portion 14b of the second magnet member 14 can be about 22 mm, the minimum value of Y1 can be about 39 mm, the width W1 of the first portion 12a of the first magnet member 12 can be about 24 mm, the width W2 of the second portion 12b of the first magnet member 12 can be about 40 mm, the minimum width of the third portion 12c of the first magnet member 12 can be about 30 mm, the width of the fourth portion 12d of the first magnet member 12 can be about 30 mm, the length of the second portion 12b of the first magnet member 12 can be about 52 mm, the length of the third portion 12c of the first magnet member 12 can be about 9 mm, the length of the fourth portion 12d of the first magnet member 12 can be about 50 mm, G2 for the second portion 12b of the first magnet member 12 can be about 23 mm, and G2 for the fourth portion 12d of the first magnet member 12 can be about 28 mm. In the above, the length is defined along the first direction D1 and the width is defined along the second direction D2.

[0068] Figure 4 、 Figure 5 and Figure 6 is an enlarged plan view showing a portion of a magnet module according to an embodiment.

[0069] Referring to Figure 4 , the first magnet member 12 includes a first portion 12a having a width W1 and extending along a first direction D1, a second portion 12b having a width W2 greater than the width W1 of the first portion 12a, a third portion 12c disposed between the second portion 12b and the second magnet member 14, and a fourth portion 12d disposed between the second portion 12b and the first portion 12a. The first portion 12a can be disposed in a middle portion of the first magnet member 12. The second portion 12b, the third portion 12c, and the fourth portion 12d can be disposed in end portions of the first magnet member 12.

[0070] The second magnet member 14 includes a first portion 14a spaced apart from the first magnet member 12 along a second direction D2, a second portion 14b spaced apart from the first magnet member 12 along the first direction D1, and a corner portion 14c connecting the first portion 14a to the second portion 14b.

[0071] In an embodiment, the third portion 12c of the first magnet member 12 can have a width smaller than the width W2 of the second portion 12b. For example, the third portion 12c can have a shape having a width decreasing in a direction away from the second portion 12b. The fourth portion 12d of the first magnet member 12 can gradually decrease in width in a direction close to the first portion 12a.

[0072] In an embodiment, the first magnet member 12 can have a seamless edge, so that uniformity of a magnetic field can be further improved.

[0073] Referring to Figure 5 , the first magnet member 12 includes a first portion 12a having a width W1 and extending along a first direction D1, a second portion 12b having a width W2 greater than the width W1 of the first portion 12a, a third portion 12c disposed between the second portion 12b and the second magnet member 14, and a fourth portion 12d disposed between the second portion 12b and the first portion 12a. The first portion 12a can be disposed in a middle portion of the first magnet member 12. The second portion 12b, the third portion 12c, and the fourth portion 12d can be disposed in end portions of the first magnet member 12.

[0074] The second magnet member 14 includes a first portion 14a spaced apart from the first magnet member 12 along a second direction D2, a second portion 14b spaced apart from the first magnet member 12 along the first direction D1, and a corner portion 14c connecting the first portion 14a to the second portion 14b.

[0075] In an embodiment, at least a portion of the third portion 12c of the first magnet member 12 can have a width greater than the width W2 of the second portion 12b. For example, the third portion 12c can have a width W3 greater than the width W2 of the second portion 12b in a region adjacent to the second portion 12b, and can have a shape having a width that gradually decreases in a direction away from the second portion 12b.

[0076] Referring to Figure 6 The first magnet member 12 includes a first portion 12a having a first width W1 and extending along a first direction D1, a second portion 12b having a width W2 greater than the width W1 of the first portion 12a, a third portion 12c disposed between the second portion 12b and the second magnet member 14, and a fourth portion 12d disposed between the second portion 12b and the first portion 12a. The first portion 12a can be disposed in a middle portion of the first magnet member 12. The second portion 12b, the third portion 12c, and the fourth portion 12d can be disposed in an end portion of the first magnet member 12.

[0077] The second magnet member 14 includes a first portion 14a spaced apart from the first magnet member 12 along a second direction D2, a second portion 14b spaced apart from the first magnet member 12 along the first direction D1, and a corner portion 14c connecting the first portion 14a to the second portion 14b.

[0078] In an embodiment, the third portion 12c of the first magnet member 12 can have a uniform width W3 greater than the width W2 of the second portion 12b. For example, the third portion 12c can have a substantially rectangular shape.

[0079] Figure 7 is a plan view illustrating a magnet module according to an embodiment.

[0080] Referring to Figure 1 and Figure 7 The magnet module includes a plurality of magnet units MU. Each of the magnet units MU includes a first magnet member 12 and a second magnet member 14. The first magnet member 12 can extend along a first direction D1. The second magnet member 14 can surround the first magnet member 12 in a plan view. The second magnet member 14 can completely surround the first magnet member 12 in a plan view. The first magnet member 12 and the second magnet member 14 can be fixed on a support plate 16.

[0081] In an embodiment, the first magnet member 12 can have a width in an end portion greater than a width in a middle portion. The shapes of the first magnet member 12 and the second magnet member 14 can be substantially the same as the shapes explained above.

[0082] The magnet unit MU can be defined by a combination of a first magnet member 12 and a second magnet member 14. A plurality of magnet units MU can be arranged along a second direction D2 intersecting the first direction D1.

[0083] In an embodiment, the magnet module 10 can include an inner region and an outer region adjacent to the inner region along the second direction D2. The magnet module 10 can include a first magnet unit MU1 disposed in the inner region and a second magnet unit MU2 disposed in the outer region. The magnet module 10 can further include a third magnet unit MU3 disposed in another outer region opposite the second magnet unit MU2.

[0084] In the first magnet unit MU1, the first magnet member 12 can be disposed to be symmetrical with respect to a virtual center line passing through a center portion of the second magnet member 14 along the first direction D1. For example, the virtual center line passing through the center portion of the second magnet member 14 along the first direction D1 can coincide with the virtual center line passing through the center portion of the first magnet member 12 along the first direction D1.

[0085] In the second magnet unit MU2 and the third magnet unit MU3, the first magnet member 12 can be disposed to be asymmetrical with respect to a virtual center line CL2 passing through a center portion of the second magnet member 14 along the first direction D1. For example, a virtual center line CL1 passing through the center portion of the first magnet member 12 along the first direction D1 can be spaced apart from the virtual center line CL2 passing through the center portion of the second magnet member 14 along the first direction D1. In the second magnet unit MU2, the virtual center line CL1 passing through the center portion of the first magnet member 12 along the first direction D1 is disposed outside the virtual center line CL2 passing through the center portion of the second magnet member 14 along the first direction D1. In the third magnet unit MU3, the virtual center line CL1 passing through the center portion of the first magnet member 12 along the first direction D1 is disposed outside the virtual center line CL2 passing through the center portion of the second magnet member 14 along the first direction D1. In other words, the virtual center line CL1 of the first magnet member 12 disposed in the outermost portion of the magnet module 10 is not disposed to be superimposed on the virtual center line CL2 of the second magnet member 14, but is shifted outside the virtual center line CL2 of the second magnet member 14.

[0086] In an embodiment, the amount of shift, which can be the distance between the virtual center lines CL1 and CL2, can be about 5 mm to 10 mm. When the amount of shift is too large, the first magnet member 12 and the second magnet member 14 can contact each other.

[0087] According to the above configuration, the uniformity of the magnetic field can be improved in the outer region of the magnet module.

[0088] Figure 8 、 Figure 9 and Figure 10 are cross-sectional views showing a magnet unit of a magnet module according to an embodiment.

[0089] Referring to Figure 8 , the magnet unit MU includes a first magnet member 12 and a second magnet member 14. The second magnet member 14 can surround the first magnet member 12 in a plan view, and can be spaced apart from the first magnet member 12.

[0090] In an embodiment, the first magnet member 12 can have a height greater than a height of the second magnet member 14.

[0091] Referring to Figure 9 , the first magnet member 12 can have a height less than a height of the second magnet member 14.

[0092] Referring to Figure 10 , the first magnet member 12 can have a height identical to a height of the second magnet member 14.

[0093] In an embodiment shown in Figure 1 , the first magnet member 12 can be an S pole, and the second magnet member 14 can be an N pole. However, embodiments are not limited thereto.

[0094] For example, the first magnet member 12 can be an N pole, and the second magnet member 14 can be an S pole.

[0095] As explained above, the first magnet member and the second magnet member can be adjusted or combined in various ways to change or control the shape of a magnetic field.

[0096] Figure 11 is a plan view showing a magnet module according to an embodiment. Figure 12 and Figure 13 are schematic views showing a sputtering apparatus according to an embodiment.

[0097] Referring to Figure 11 and Figure 12 , a sputtering apparatus according to an embodiment includes a back plate 40 and a magnet module 10 disposed below the back plate 40. The back plate 40 can support a target 80, and can serve as a cathode that receives a voltage to generate a plasma.

[0098] The magnet module 10 includes a first magnet member 12 and a second magnet member 14. The first magnet member 12 can extend along a first direction D1. The second magnet member 14 can surround the first magnet member 12 in a plan view. The second magnet member 14 can completely surround the first magnet member 12 in a plan view. The first magnet member 12 and the second magnet member 14 can be fixed on a support plate 16.

[0099] The magnet unit MU may include a combination of a first magnet component 12 and a second magnet component 14. Multiple magnet units MU may be arranged along a second direction D2 intersecting the first direction D1 to form a magnet module 10.

[0100] In an embodiment, the magnet module 10 may further include a shielding member 18 covering at least a portion of the magnet unit MU.

[0101] The shielding member 18 can reduce the magnetic field in the area where it overlaps with the magnetic field. Therefore, the shielding member 18 can be placed in the area where the magnetic field is relatively strong, thereby improving the uniformity of the magnetic field on the magnet module 10 as a whole.

[0102] For example, such as Figure 11 As shown, each shielding member 18 is configured to cover the central portion of each first magnet unit MU1 disposed in the internal region of the magnet module 10. However, the embodiment is not limited to this. The shielding member 18 can be configured in various ways depending on the actual distribution of the magnetic field. One shielding member 18 may cover the central portion of the first magnet unit MU1 disposed in the internal region of the magnet module 10.

[0103] The shielding member 18 may include a material with high magnetic permeability. For example, the shielding member 18 may include a stainless steel sheet, an amorphous metal sheet, a permalloy sheet, a silicon steel sheet, a steel sheet, or a combination thereof.

[0104] Reference Figure 13 The shielding member 42 can be disposed on the lower surface of the back plate 40. For example, the shielding member 42 can be disposed between the back plate 40 and the protective sheet 50.

[0105] As described above, the magnet module can be combined with other components according to the embodiments to improve the uniformity of the magnetic field. Furthermore, the position of the magnet module can be changed to improve the erosion uniformity of the target. The sputtering apparatus may also include a transport device for moving the magnet module.

[0106] According to the embodiments, the uniformity of the magnetic field in the sputtering apparatus can be improved. Therefore, the erosion uniformity of the target can be improved. Consequently, the quality of the film formed by sputtering can be improved, and the target can be used for a longer period of time.

[0107] Figure 14 This is an enlarged plan view of the magnet module according to the comparative example.

[0108] Reference Figure 14 The magnet module according to the comparative example includes a first magnet component 12 and a second magnet component 14. The first magnet component 12 extends along a first direction D1. The second magnet component 14 surrounds the first magnet component 12 in a plan view.

[0109] The first magnet member 12 has the same width W1 along the first direction D1. The width W1 of the first magnet member 12 is the same as the width of the middle portion (first portion) of the first magnet member 12 according to the embodiment. The second magnet member 14 has the same shape as the shape of the second magnet member 14 according to the embodiment.

[0110] The magnetic field of the magnet module according to Comparative Example 1 having the shape shown in FIG. 1 and Comparative Example 2 having the shape shown in FIG. 2 was measured. Specifically, the magnetic field was measured at positions (e.g., Position 1, Position 10, and Position 19) in the region between the first magnet member 12 and the second magnet member 14 along the dashed line boxes designated by Figure 3 Figure 5 Figure 14

[0111] Figure 15 are graphs showing the intensity of the magnetic field measured from the magnet modules according to Comparative Examples and the embodiment. In Figure 15 Figure 14 Figure 15 The ordinate of FIG. 1 indicates the magnitude of the intensity of the magnetic field.

[0112] Referring to Figure 15 It can be noted that the sharp decrease in the magnetic field in the end region CP can be improved in the magnet modules according to Example 1 and Example 2. Further, it can be noted that when the protrusion is removed between the third portion 12c having a tapered shape and the second portion 12b having a rectangular shape to form a seamless edge, the uniformity of the magnetic field can be further improved.

[0113] The embodiments can be used for deposition apparatuses and deposition processes. For example, the embodiments can be used to form various thin films to form thin film transistors, wiring, active layers in processes of manufacturing display devices, semiconductor devices, etc.

[0114] The foregoing is a description of the embodiments and is not to be interpreted as limiting thereof. Although the embodiments have been described, it will be readily apparent to those skilled in the art that many modifications can be made in the embodiments without departing from the novel teachings and aspects of the inventive concept. Accordingly, all such modifications are intended to be included within the scope of the inventive concept. It is therefore to be understood that the foregoing is a description of various embodiments and is not to be interpreted as limiting. The modifications to the disclosed embodiments and other embodiments are intended to be included within the scope of the inventive concept as set forth in the claims and their equivalents.​​​​​

Claims

1. A magnet module comprising at least one magnet unit each including a first magnet member and a second magnet member surrounding the first magnet member in a plan view, the first magnet member extending along a first direction and including a middle portion and an end portion, wherein the first magnet member including: a first portion provided in the middle portion and extending along the first direction; and a second portion provided in the end portion and having a width greater than that of the first portion, and wherein a width of the first magnet member is increased at a portion where Y1 is equal to or greater than L1 0.5 and equal to or less than L1 1.2, wherein Y1 is a distance from the first magnet member to an outer boundary of the second magnet member along the first direction, and L1 is a width of each magnet unit along a second direction that intersects the first direction.

2. The magnet module of claim 1, wherein, the second magnet member including: a first portion extending along the first direction and spaced apart from the first magnet member along the second direction; and a second portion extending along the second direction and spaced apart from the first magnet member along the first direction.

3. The magnet module of claim 2, wherein, The width of the first magnet member gradually or stepwise increases along the first direction toward one end of the first magnet member.

4. The magnet module of claim 1, wherein, a distance between the first magnet member and the second magnet member along the second direction is Y1=L1 equal to or greater than L2 at a point of 0.5 0.5 and equal to or less than G1 0.75, where L2 is the width of the first portion of the second magnet member, and G1 is the distance between the first portion of the first magnet member and the first portion of the second magnet member.

5. The magnet module of claim 4, wherein, The first magnet member further includes a third portion provided adjacent to the second portion of the first magnet member and having a width that decreases along the first direction toward the second portion of the second magnet member.

6. The magnet module of claim 5, wherein, The first magnet member further includes a fourth portion provided between the first portion and the second portion of the first magnet member and having a width smaller than that of the second portion of the first magnet member and greater than that of the first portion of the first magnet member.

7. The magnet module of claim 6, wherein, In the first magnet member, the width of the fourth portion gradually decreases from the second portion toward the first portion.

8. The magnet module of claim 5, wherein, The width of at least a portion of the third portion of the first magnet member is greater than the width of the second portion of the first magnet member.

9. The magnet module of claim 4, wherein, The first magnet member further includes a third portion provided adjacent to the second portion of the first magnet member and having a width that decreases along the first direction toward the second portion of the second magnet member.

10. The magnet module of claim 2, wherein, The second magnet member further includes a corner portion connecting the first portion and the second portion of the second magnet member to each other and having a boundary surface extending in an oblique direction intersecting the first direction and the second direction.

11. The magnet module of claim 4, wherein, A plurality of magnet units are arranged along the second direction, wherein virtual center lines of the first magnet members and the second magnet members extending along the first direction coincide with each other in the magnet units provided in an inner region of the magnet module, and wherein the virtual center line of the first magnet member provided in an outermost portion of the magnet module does not overlap the virtual center line of the second magnet member provided in the outermost portion of the magnet module.

12. A magnet module comprising at least one magnet unit, each magnet unit comprising a first magnet member and a second magnet member surrounding the first magnet member in a plan view, the first magnet member extending along a first direction and comprising a middle portion and an end portion, wherein the first magnet member comprising: a first portion provided in the middle portion and extending along the first direction; a second portion provided in the end portion and having a width greater than that of the first portion; and a third portion provided adjacent to the second portion and having a width decreasing toward the second magnet member along the first direction, wherein the second magnet member comprises: a first portion extending along the first direction and spaced apart from the first magnet member along a second direction intersecting the first direction; and a second portion spaced apart from the first magnet member along the first direction and wherein a width of the first magnet member is equal to or greater than L1 at Y1 0.5 and equal to or less than L1 1.2, wherein Y1 is a distance from the first magnet member to an outer boundary of the second magnet member along the first direction, and L1 is a width of each magnet unit along the second direction.

13. The magnet module of claim 12, wherein, the first magnet member further comprising a fourth portion provided between the first portion and the second portion of the first magnet member and having a width smaller than that of the second portion of the first magnet member and greater than that of the first portion of the first magnet member.

14. The magnet module of claim 13, wherein, In the first magnet member, the width of the fourth portion gradually decreases from the second portion toward the first portion.

15. A sputtering apparatus comprising: a back plate connected to a power supply; and a magnet module provided below the back plate, wherein the magnet module comprises at least one magnet unit, each magnet unit comprising: a first magnet member and a second magnet member surrounding the first magnet member in a plan view, the first magnet member extending along a first direction and comprising a middle portion and an end portion, wherein the first magnet member comprises: a first portion provided in the middle portion and extending along the first direction; and a second portion provided in the end portion and having a width greater than that of the first portion, wherein the second magnet member comprises: a first portion extending along the first direction and spaced apart from the first magnet member along a second direction intersecting the first direction; and a second portion extending along the second direction and spaced apart from the first magnet member along the first direction, wherein the width of the first magnet member gradually or stepwise increases along the first direction toward an end of the first magnet member, wherein a width of the first magnet member is equal to or greater than L1 at Y1 0.5 and equal to or less than L1 1.2, wherein Y1 is a distance from the first magnet member to an outer boundary of the second magnet member along the first direction, and L1 is a width of each magnet unit along the second direction, and wherein a distance between the first magnet member and the second magnet member along the second direction at a point of Y1=L1 0.5 is equal to or greater than L2 0.5 and equal to or less than G1 0.75, where L2 is a width of the first portion of the second magnet member, and G1 is a distance between the first portion of the first magnet member and the first portion of the second magnet member.

16. The sputtering apparatus of claim 15, wherein, the first magnet member further comprising a third portion provided adjacent to the second portion of the first magnet member and having a width decreasing toward the second portion of the second magnet member along the first direction.

17. The sputtering apparatus of claim 16, wherein, the first magnet member further comprising a fourth portion provided between the first portion and the second portion of the first magnet member and having a width smaller than that of the second portion of the first magnet member and greater than that of the first portion of the first magnet member.

18. The sputtering apparatus of claim 17, wherein, In the first magnet member, the width of the fourth portion gradually decreases from the second portion toward the first portion.

19. The sputtering apparatus of claim 17, wherein, The width of at least a portion of the third portion of the first magnet member is greater than the width of the second portion of the first magnet member.

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