X-ray inspection device and method for determining degradation of X-ray inspection device

Abstract

The present invention provides an X-ray inspection device and a method for determining degradation of components constituting an X-ray tube, which improve the accuracy of determining degradation of components constituting an X-ray tube. The X-ray inspection device (1) includes: an X-ray tube (210) for generating X-rays; a high-voltage power supply (220) for supplying a tube voltage to the X-ray tube (210) to generate X-rays; an X-ray irradiation control unit (134) for outputting a first control signal and a second control signal to the high-voltage power supply (220) to control the high-voltage power supply (220); and a determination unit (135) for counting at least one of the first control signal and the second control signal output from the X-ray irradiation control unit (134) to the high-voltage power supply (220), and comparing the counted count value with a preset threshold value to determine the degradation state of the components constituting the X-ray tube (210).

Description

Technical Field

[0001] The present invention relates to an X-ray inspection device and a method for determining degradation of the X-ray inspection device. Background Art

[0002] The X-ray inspection apparatus includes an X-ray tube, and generates X-rays by heating a filament included in the X-ray tube and allowing hot electrons generated by the heated filament to hit a target. The X-ray tube includes a plurality of consumables, and a technique for predicting replacement periods of these consumables is known.

[0003] For example, Patent Document 1 discloses an X-ray tube operating state acquisition device that determines the degree of filament consumption based on the energization time of the filament.

[0004] [Prior art literature]

[0005] [Patent Document]

[0006] [Patent Document 1] International Publication No. 2003-092336 Summary of the invention

[0007] [Problems to be solved by the invention]

[0008] X-ray tubes include a plurality of consumables in addition to filaments. If the replacement time of consumables including filaments can be determined with high accuracy, downtime can be avoided or shortened.

[0009] An object of the present invention is to provide an X-ray inspection apparatus and a method for determining degradation of an X-ray inspection apparatus that improve the accuracy of determining degradation of components constituting an X-ray tube.

[0010] [Technical means to solve the problem]

[0011] An X-ray inspection device according to a first aspect of the present invention includes: an X-ray tube for generating X-rays; a high-voltage power supply for supplying a tube voltage to the X-ray tube to generate X-rays; an X-ray irradiation control unit for outputting a first control signal for causing the high-voltage power supply to start supplying the tube voltage and a second control signal for causing the high-voltage power supply to stop supplying the tube voltage to control the high-voltage power supply; and a determination unit for counting at least one of the first control signal and the second control signal output from the X-ray irradiation control unit to the high-voltage power supply, and comparing the counted value with a preset threshold value to determine the degradation state of components constituting the X-ray tube.

[0012] A second aspect of a degradation determination method for an X-ray inspection device of the present invention is a degradation determination method for an X-ray inspection device including an X-ray tube and a high-voltage power supply, wherein the X-ray tube generates X-rays, and the high-voltage power supply supplies a tube voltage to the X-ray tube to generate X-rays, and the degradation determination method for the X-ray inspection device includes the following steps: counting at least one of a first control signal that causes the high-voltage power supply to start supplying the tube voltage and a second control signal that causes the high-voltage power supply to stop supplying the tube voltage; and comparing the counted count value with a preset threshold value to determine the degradation state of components constituting the X-ray tube.

[0013] [Effects of the Invention]

[0014] According to the first aspect of the X-ray inspection apparatus of the present invention and the degradation determination method of the X-ray inspection apparatus of the second aspect of the present invention, the degradation state of the components constituting the X-ray tube can be determined based on the number of times the tube voltage is supplied from the high voltage power supply to the X-ray tube. Therefore, the degradation state of the components degraded by the supply of the tube voltage to the X-ray tube can be determined with high accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural diagram of an X-ray inspection device.

[0016] Figure 2 It is a diagram showing a schematic configuration of an X-ray generating unit.

[0017] Figure 3 This is a flowchart showing the operation of the control device.

[0018] [Explanation of Symbols]

[0019] 1: X-ray inspection device

[0020] 10: X-ray irradiation unit

[0021] 20: X-ray generating unit

[0022] 30: X-ray detection department

[0023] 40: Carrier

[0024] 50: Mobile mechanism

[0025] 70: Operation Department

[0026] 80: Ministry of Communications

[0027] 100: Control device

[0028] 110: Memory

[0029] 111: First count value

[0030] 113: Second count value

[0031] 115: Identification information

[0032] 130: Processor

[0033] 131: Image Processing Department

[0034] 133: Mobile Control Department

[0035] 134: X-ray irradiation control unit

[0036] 135: Judgment Department

[0037] 136: Communication Control Department

[0038] 201: Chamber

[0039] 203: Frame

[0040] 205: Cover

[0041] 210: X-ray tube

[0042] 211: Glass tube

[0043] 213: Anode

[0044] 215: Cathode

[0045] 220: High voltage power supply

[0046] 231: Terminal

[0047] 233: Wiring

[0048] 235: Terminal

[0049] 237: Wiring body

[0050] 239: Terminal

[0051] 250: Rubber components

[0052] 300: Server device

[0053] F:Filament DETAILED DESCRIPTION

[0054] Hereinafter, the present embodiment will be described with reference to the accompanying drawings.

[0055] [1.Structure]

[0056] Figure 1 1 is a block diagram of the X-ray inspection apparatus 1 .

[0057] The X-ray inspection apparatus 1 includes an X-ray irradiation unit 10, a display unit 60, an operation unit 70, a communication unit 80, and a control device 100. In addition, the X-ray irradiation unit 10 includes an X-ray generation unit 20, an X-ray detection unit 30, a stage 40, and a moving mechanism 50. The X-ray irradiation unit 10 is disposed inside a housing including an X-ray shielding member.

[0058] The X-ray generating unit 20 includes an X-ray tube 210 (see Figure 2 ) to irradiate the workpiece W, which is the object to be inspected and placed on the stage 40, with X-rays.

[0059] The X-ray detection unit 30 detects X-rays transmitted through the workpiece W on the stage 40. The X-ray detection unit 30 includes, for example, a line sensor in which a large number of X-ray detection elements are arranged linearly, and detects X-rays transmitted through the workpiece W.

[0060] The stage 40 is a member for placing the workpiece W, and is disposed between the X-ray generator 20 and the X-ray detector 30. The stage 40 is driven by a moving mechanism 50 including a motor (not shown), and is configured to be movable in two directions orthogonal to each other in a horizontal plane or in a vertical direction.

[0061] Figure 2 It is a diagram showing a schematic configuration of the X-ray generation unit 20 .

[0062] Here, refer to Figure 2 The structure of the X-ray generation unit 20 will be described.

[0063] The X-ray generating unit 20 is a structure in which an X-ray tube 210 and a high-voltage power supply 220 are housed in a chamber 201 including a frame 203 and a cover 205. The chamber 201 is filled with insulating oil. In addition, a rubber member 250 is provided in the chamber 201 to prevent the insulating oil from leaking out of the chamber 201. The rubber member 250 is a rubber bellows and is in contact with the insulating oil. The rubber member 250 absorbs the volume change of the insulating oil caused by thermal expansion and adjusts the pressure of the insulating oil in the chamber 201.

[0064] The X-ray tube 210 includes a glass tube 211. An anode portion 213 including a target T and a cathode portion 215 including a filament F are arranged in the glass tube 211. The target T is made of metal such as tungsten or molybdenum, and the filament F is made of tungsten, for example.

[0065] Anode unit 213 is connected to high voltage power source 220 via terminal 231 and wiring 233 .

[0066] The cathode portion 215 is connected to the high voltage power source 220 via the terminal 235 , the wiring body 237 , and the terminal 239 .

[0067] The high voltage power supply 220 supplies a predetermined voltage to the anode portion 213 and the cathode portion 215, respectively, and generates a potential difference (hereinafter referred to as tube voltage) between the anode portion 213 and the cathode portion 215. In addition, the high voltage power supply 220 supplies a filament current to the cathode portion 215. When the filament current is supplied to the cathode portion 215 in a state where a predetermined potential difference is generated between the anode portion 213 and the cathode portion 215, the cathode portion 215 is heated, and thermal electrons are released from the cathode portion 215. X-rays are generated by the collision of the thermal electrons released from the cathode portion 215 with the anode portion 213. The generated X-rays are emitted to the outside of the X-ray tube 210 through an X-ray irradiation window (not shown).

[0068] The X-ray tube 210 has a sealed structure in which the filament F and the target T are arranged in a sealed container, a glass tube 211. However, the X-ray inspection apparatus 1 may also be applied to an open X-ray tube in which the filament F and the target T can be replaced as a single unit.

[0069] Back to Figure 1 The structure of the X-ray inspection apparatus 1 will be described.

[0070] The display unit 60 includes a display panel 65. The display unit 60 displays an image based on display data input from the control device 100 on the display panel 65. The image based on the display data includes an X-ray image detected by the X-ray detection unit 30.

[0071] The operation unit 70 includes a plurality of operation buttons and outputs an operation signal corresponding to the operation button whose operation has been accepted to the control device 100 .

[0072] The communication unit 80 is connected to a network N such as the Internet by wire or wirelessly. The communication unit 80 and the server device 300 connected to the network N mutually perform data communication.

[0073] The control device 100 is a computer device including a memory 110 and a processor 130 .

[0074] The memory 110 includes, for example, a non-volatile memory such as a flash memory or an electrically erasable programmable read-only memory (EEPROM). In addition, the memory 110 may also be a structure that includes a volatile memory such as a random access memory (RAM) in addition to a non-volatile memory. The control program executed by the processor 130 or the X-ray image detected by the X-ray detection unit 30 is stored in the memory 110. In addition, the memory 110 stores the number of times the first control signal and the second control signal are detected, that is, the first count value 111 and the second count value 113. The details of the first control signal and the second control signal will be described later. In addition, the memory 110 stores identification information 115 that uniquely identifies the X-ray inspection device 1.

[0075] The processor 130 includes a central processing unit (CPU), or a microcontroller (MCU) or microprocessor (MPU) equipped with a CPU. In addition, the control device 100 can also be implemented by an integrated circuit such as an application specific integrated circuit (ASIC) or a field programmable gate array (FPGA).

[0076] The control device 100 includes an image processing unit 131, a display control unit 132, a movement control unit 133, an X-ray irradiation control unit 134, a determination unit 135, and a communication control unit 136. These functional blocks represent functions of the control device 100 implemented by the processor 130 executing a control program stored in the memory 110.

[0077] The image processing unit 131 performs predetermined image processing on the X-ray image detected by the X-ray detection unit 30. The display control unit 132 generates display data to be displayed on the display unit 60 based on the X-ray image on which the image processing has been performed by the image processing unit 131, and outputs the generated display data to the display unit 60. As a result, the X-ray image is displayed on the display panel 65 of the display unit 60.

[0078] The movement control unit 133 outputs a drive signal for driving the moving mechanism 50 , and moves the stage 40 in two directions orthogonal to each other within a horizontal plane.

[0079] The X-ray irradiation control unit 134 controls the high-voltage power supply 220 to cause the X-ray generator 20 to irradiate X-rays. The X-ray irradiation control unit 134 outputs a first control signal and a second control signal to the high-voltage power supply 220. The first control signal is a signal instructing the high-voltage power supply 220 to output a tube voltage. The second control signal is a signal instructing the high-voltage power supply 220 to stop outputting the tube voltage.

[0080] For example, when the workpiece W is placed on the stage 40 and the operation unit 70 receives an instruction to start the inspection, the X-ray irradiation control unit 134 outputs a first control signal to the high-voltage power supply 220. When the irradiation of the workpiece W with X-rays is completed, the X-ray irradiation control unit 134 outputs a second control signal to the high-voltage power supply 220 to terminate the irradiation of X-rays.

[0081] The determination unit 135 counts at least one of the first control signal and the second control signal output from the X-ray irradiation control unit 134 to the high voltage power supply 220. The determination unit 135 compares the counted value with a preset threshold value to determine the degradation state of the components constituting the X-ray tube 210. The threshold value includes a first threshold value and a second threshold value. The determination unit 135 of this embodiment determines the degradation state of the rubber member 250 and the filament F which are components of the X-ray tube 210.

[0082] The chamber 201 is filled with insulating oil without any gaps. When a tube voltage is applied to the X-ray tube 210 and a filament current is supplied to the cathode 215, the cathode 215 is heated and the insulating oil expands due to the generated heat. When the application of the tube voltage to the X-ray tube 210 is stopped, the temperature of the cathode 215 drops and the expanded insulating oil contracts.

[0083] The rubber member 250 is a member that absorbs the volume change of the insulating oil caused by thermal expansion and adjusts the pressure of the insulating oil in the chamber 201, and repeatedly expands and contracts according to the expansion and contraction of the insulating oil. The rubber member 250 deteriorates due to repeated expansion and contraction. When the rubber member 250 deteriorates and cannot absorb the volume of the insulating oil, oil leakage occurs, and the X-ray inspection device 1 cannot operate normally.

[0084] In addition, the filament F in the X-ray tube 210 is loaded by the flow of the filament current. The filament F is coated with alumina or the like and subjected to insulation processing. In the method of monitoring the cumulative power-on time of the filament F as disclosed in Patent Document 1, it is impossible to detect the influence of expansion and contraction on alumina with high accuracy, and thus it is impossible to accurately determine the degree of deterioration of alumina.

[0085] Therefore, the determination unit 135 counts the number of times at least one of the first control signal and the second control signal is output from the X-ray irradiation control unit 134 to the high voltage power supply 220 to detect the number of times the rubber member 250 expands or contracts, thereby detecting the number of times the filament F is loaded.

[0086] When the second control signal is detected after the first control signal is detected, the determination unit 135 of the present embodiment increments the first count value 111 and the second count value 113 by 1. The first count value 111 and the second count value 113 counted by the determination unit 135 are stored in the memory 110 .

[0087] The first count value 111 is used to determine the degradation state of the rubber member 250 .

[0088] When the first count value becomes equal to or greater than a preset first threshold value, the determination unit 135 determines that the rubber member 250 is in a deteriorated state and causes the communication control unit 136 to perform a notification operation to the server device 300. In addition, when the rubber member 250 is replaced and a predetermined operation is accepted by the operation unit 70, the determination unit 135 resets the first count value 111.

[0089] In addition, the second count value 113 is used to determine the degradation state of the filament F. When the second count value 113 becomes equal to or greater than a preset second threshold value, the determination unit 135 determines that the filament F is in a degraded state and causes the communication control unit 136 to perform a notification operation. The second threshold value can be set to 10,000 times, for example. In addition, when the filament F is replaced and a predetermined operation is accepted by the operation unit 70, the determination unit 135 resets the second count value 113.

[0090] When the second control signal is detected after the first control signal is detected, the determination unit 135 of the present embodiment increments the first count value 111 and the second count value 113 by 1, but the determination unit 135 of the present embodiment may be configured to detect either the first control signal or the second control signal and increment the first count value 111 and the second count value 113 by 1. Even with such a configuration, the number of times the rubber member 250 expands and contracts and the number of times the filament F is loaded can be detected with high accuracy.

[0091] When determination unit 135 determines that first count value 111 is equal to or greater than the first threshold, communication control unit 136 notifies server device 300 of the determination result via communication unit 80. Communication control unit 136 transmits information indicating that rubber member 250 is determined to be in a degraded state and identification information 115 of X-ray inspection apparatus 1 to server device 300 as the determination result.

[0092] When the determination unit 135 determines that the second count value 113 is equal to or greater than the second threshold value, the communication control unit 136 notifies the server device 300 of the determination result via the communication unit 80. The communication control unit 136 transmits information indicating that the filament F is determined to be in a degraded state and the identification information 115 of the X-ray inspection apparatus 1 to the server device 300 as the determination result.

[0093] In addition, when the determination unit 135 determines that the first count value 111 is equal to or greater than the first threshold value, or when the second count value 113 is equal to or greater than the second threshold value, the display control unit 132 may cause the display unit 60 to display a predetermined display. For example, when the determination unit 135 determines that the first count value 111 is equal to or greater than the first threshold value, the display control unit 132 causes the display unit 60 to display a guidance display for guiding replacement of the rubber member 250. In addition, when the determination unit 135 determines that the second count value 113 is equal to or greater than the second threshold value, the display control unit 132 causes the display unit 60 to display a guidance display for guiding replacement of the filament F.

[0094] [2.Action]

[0095] Figure 3 It is a flowchart showing the operation of the control device 100 .

[0096] Reference Figure 3 The operation of the control device 100 will be described.

[0097] First, the control device 100 determines whether to output the first control signal to the high voltage power supply 220 (step S1). If the control device 100 does not output the first control signal to the high voltage power supply 220 (step S1 / NO), the process returns to the determination of step S1.

[0098] In addition, when the first control signal is output to the high-voltage power supply 220 (step S1 / Yes (YES)), the control device 100 determines whether to output the second control signal to the high-voltage power supply 220 (step S2). When the second control signal is not output to the high-voltage power supply 220 (step S2 / No), the control device 100 returns to the determination of step S2.

[0099] When the second control signal is output to the high voltage power supply 220 (step S2 / Yes), the control device 100 increases the first count value 111 and the second count value 113 by 1 (step S3). Thereafter, the control device 100 determines whether the first count value 111 is equal to or greater than the first threshold value (step S4).

[0100] When the first count value 111 is greater than or equal to the first threshold value (step S4 / yes), the control device 100 determines that the rubber member 250 is in a degraded state. The control device 100 sends information indicating that the rubber member 250 is determined to be in a degraded state and the identification information of the X-ray inspection device 1 to the server device 300 (step S5). In addition, the control device 100 may also cause the display unit 60 to display a guidance display for guiding the rubber member 250 to be determined to be in a degraded state (step S5). Thereafter, when the rubber member 250 is replaced and a prescribed operation is accepted by the operation unit 70 (step S6 / yes), the control device 100 resets the first count value 111 (step S7). Thereafter, the control device 100 returns to the determination of step S1.

[0101] In addition, when the first count value 111 is not greater than the first threshold value (step S4 / No), the control device 100 determines whether the second count value 113 is greater than the second threshold value (step S8). When the second count value 113 is not greater than the second threshold value (step S8 / No), the control device 100 returns to the determination of step S1.

[0102] In addition, when the second count value 113 is greater than or equal to the second threshold value (step S8 / yes), the control device 100 determines that the filament F is in a degraded state. The control device 100 sends information indicating that the filament F is determined to be in a degraded state and the identification information of the X-ray inspection device 1 to the server device 300 (step S9). In addition, the control device 100 may also cause the display unit 60 to display a guidance display for guiding the determination of the filament F in a degraded state (step S9). Thereafter, when the filament F is replaced and a prescribed operation is accepted by the operation unit 70 (step S10 / yes), the control device 100 resets the second count value 113 (step S11). Thereafter, the control device 100 returns to the determination of step S1.

[0103] [3. Form and effect]

[0104] Those skilled in the art will understand that the above-described embodiments are specific examples of the following embodiments.

[0105] (First Item)

[0106] A first form of an X-ray inspection device includes: an X-ray tube that generates X-rays; a high-voltage power supply that supplies a tube voltage to the X-ray tube to generate X-rays; an X-ray irradiation control unit that outputs a first control signal that causes the high-voltage power supply to start supplying the tube voltage and a second control signal that causes the high-voltage power supply to stop supplying the tube voltage to control the high-voltage power supply; and a determination unit that counts at least one of the first control signal and the second control signal output from the X-ray irradiation control unit to the high-voltage power supply, and compares the counted value with a preset threshold value to determine the degradation state of components constituting the X-ray tube.

[0107] According to the X-ray inspection apparatus described in the first aspect, the degradation state of the components constituting the X-ray tube can be determined based on the number of times the tube voltage is supplied from the high-voltage power supply to the X-ray tube. Therefore, the degradation state of the components deteriorated by the supply of the tube voltage to the X-ray tube can be determined with high accuracy, thereby avoiding or shortening downtime.

[0108] (Second Item)

[0109] The X-ray inspection apparatus according to the first item, wherein the determination unit counts at least one of the first control signal and the second control signal output from the X-ray irradiation control unit to the high-voltage power supply, and determines that the rubber member that absorbs an increase caused by thermal expansion of the insulating oil filled in the tube of the X-ray tube is in a deteriorated state when the count value is greater than a first threshold value included in the threshold values.

[0110] According to the X-ray inspection apparatus described in the second aspect, the deterioration state of the rubber member that absorbs the increase caused by thermal expansion of the insulating oil filled in the X-ray tube can be determined with high accuracy, thereby avoiding or shortening downtime.

[0111] (Third Item)

[0112] An X-ray inspection device according to the first item, wherein the determination unit counts at least one of the first control signal and the second control signal output from the X-ray irradiation control unit to the high-voltage power supply, and determines that the filament included in the X-ray tube is in a degraded state when the count value is greater than a second threshold value included in the threshold value.

[0113] According to the X-ray inspection apparatus described in the third aspect, the deterioration state of the filament included in the X-ray tube can be determined with high accuracy, thereby avoiding or shortening downtime.

[0114] (4th item)

[0115] An X-ray inspection apparatus according to the first item, wherein the determination unit counts at least one of the first control signal and the second control signal output from the X-ray irradiation control unit to the high-voltage power supply, and when the counted count value is greater than a first threshold value included in the threshold value, determines that a rubber member that absorbs an increase caused by thermal expansion of insulating oil filled in a tube of the X-ray tube is in a degraded state, and counts at least one of the first control signal and the second control signal, and when the counted count value is included in the threshold value and is greater than a second threshold value different from the first threshold value, determines that a filament included in the X-ray tube is in a degraded state.

[0116] According to the X-ray inspection apparatus described in the fourth aspect, the deterioration state of the rubber member that absorbs the increase caused by the thermal expansion of the insulating oil filled in the tube of the X-ray tube can be determined with high accuracy, and the deterioration state of the filament included in the X-ray tube can be determined with high accuracy. Therefore, the occurrence of downtime can be avoided or the downtime can be shortened.

[0117] (Fifth Item)

[0118] The X-ray inspection device according to any one of the first to fourth items includes: a communication unit; and a communication control unit, which controls the communication unit to communicate with a server device connected via a network, and when the determination unit determines that a degraded state is present, the communication control unit notifies the server device of the component that is determined to be in a degraded state.

[0119] According to the fifth aspect, the X-ray inspection apparatus can communicate with the server device and register the components determined to be in a deteriorated state in the server device. Therefore, the components of the X-ray inspection apparatus can be replaced by referring to the information registered in the server device.

[0120] (Sixth Item)

[0121] A second form of a degradation determination method for an X-ray inspection device is a degradation determination method for an X-ray inspection device including an X-ray tube and a high-voltage power supply, wherein the X-ray tube generates X-rays, and the high-voltage power supply supplies a tube voltage to the X-ray tube to generate X-rays, and the degradation determination method for the X-ray inspection device includes the following steps: counting at least one of a first control signal that causes the high-voltage power supply to start supplying the tube voltage and a second control signal that causes the high-voltage power supply to stop supplying the tube voltage; and comparing the counted count value with a preset threshold value to determine the degradation state of components constituting the X-ray tube.

[0122] According to the degradation determination method of the X-ray inspection apparatus described in the sixth item, the degradation state of the components constituting the X-ray tube can be determined based on the number of times the tube voltage is supplied from the high voltage power supply to the X-ray tube. Therefore, the degradation state of the components deteriorated by the supply of the tube voltage to the X-ray tube can be determined with high accuracy, thereby avoiding the occurrence of downtime or shortening the downtime.

[0123] [4. Other embodiments]

[0124] In addition, the X-ray inspection apparatus 1 of this embodiment is ultimately an example of the form of the X-ray inspection apparatus of the present invention, and can be arbitrarily modified and applied without departing from the scope of the present invention.

[0125] For example, in the present embodiment, the control device 100 of the X-ray inspection apparatus 1 includes: an image processing unit 131, a display control unit 132, a movement control unit 133, an X-ray irradiation control unit 134, a determination unit 135, and a communication control unit 136, but the embodiment of the present invention is not limited to this. For example, the control device 100 and the X-ray inspection apparatus 1 may be configured in a separate manner. In addition, the control device 100 of the X-ray inspection apparatus 1 may perform a part of the functions, and the control device provided in a separate manner from the X-ray inspection apparatus 1 may perform functions other than the functions performed by the control device 100 of the X-ray inspection apparatus 1. For example, the control device provided in a separate manner from the X-ray inspection apparatus 1 may perform the functions of the determination unit 135 and the communication control unit 136.

[0126] in addition, Figure 1 The functional units shown represent functional structures, and there is no particular limitation on the specific installation form. That is, it is not necessary to install hardware corresponding to each functional unit, and it is also possible to set a structure in which the functions of multiple functional units are realized by executing a program by one processor. In addition, in the above-mentioned embodiments, a part of the functions realized by software can be realized by hardware, or a part of the functions realized by hardware can be realized by software.

[0127] In order to facilitate understanding of the processing of the control device 100, Figure 3 The processing units in the flowchart shown are divided according to the main processing contents. Figure 3 The division method or name restriction of the processing unit shown in the flowchart can be divided into more processing units according to the processing content, or one processing unit can be divided into more processing units. In addition, the processing order of the flowchart is not limited to the example shown in the figure.

[0128] In addition, the control program executed by the processor 130 included in the control device 100 can also be recorded in a recording medium recorded in a computer-readable manner. As the recording medium, a magnetic, optical recording medium or a semiconductor memory device can be used. Specifically, the following can be cited: portable or fixed recording media such as a floppy disk, a hard disk drive (HDD), a compact disk read only memory (CD-ROM), a digital versatile disc (DVD), a Blu-ray (registered trademark) disc (Disc), an optical magnetic disc, a flash memory, and a card-type recording medium. In addition, the control program can also be stored in a server device, etc., and the control program can be downloaded from the server device to the control device 100.

Claims

1. An X-ray inspection device, characterized in that: include: X-ray tube, which produces X-rays; a high voltage power supply for supplying a tube voltage to the X-ray tube to generate X-rays; An X-ray irradiation control unit outputs a first control signal for causing the high-voltage power supply to start supplying a tube voltage, and a second control signal for causing the high-voltage power supply to stop supplying a tube voltage, thereby controlling the high-voltage power supply; as well as A determination unit counts at least one of the first control signal and the second control signal output from the X-ray irradiation control unit to the high voltage power supply, and compares the counted value with a preset threshold value to determine a deterioration state of a rubber member constituting a component of the X-ray tube, the rubber member absorbing an increase caused by thermal expansion of insulating oil filled in a tube of the X-ray tube.

2. The X-ray inspection device according to claim 1, characterized in that: The determination unit counts at least one of the first control signal and the second control signal output from the X-ray irradiation control unit to the high voltage power supply, and determines that the rubber member is in a deteriorated state when the count value is greater than or equal to a first threshold value included in the threshold values.

3. The X-ray inspection device according to claim 1, characterized in that: The determination unit counts at least one of the first control signal and the second control signal output from the X-ray irradiation control unit to the high-voltage power supply, and determines that the filament included in the X-ray tube is in a degraded state when the counted value is greater than a second threshold value included in the threshold value.

4. The X-ray inspection device according to claim 1, characterized in that: the determination unit counts at least one of the first control signal and the second control signal output from the X-ray irradiation control unit to the high voltage power supply, and determines that the rubber member is in a deteriorated state when the counted value is greater than a first threshold value included in the threshold values, At least one of the first control signal and the second control signal is counted, and when the counted value is included in the threshold and is equal to or greater than a second threshold different from the first threshold, it is determined that the filament included in the X-ray tube is in a degraded state.

5. The X-ray inspection device according to any one of claims 2 to 4, characterized in that: include: Ministry of Communications; as well as a communication control unit that controls the communication unit to communicate with a server device connected via a network, When the determination unit determines that the component is in a degraded state, the communication control unit notifies the server device of the component determined to be in a degraded state.

6. A method for determining degradation of an X-ray inspection device, characterized in that: The invention discloses a method for determining degradation of an X-ray inspection device including an X-ray tube and a high-voltage power supply, wherein the X-ray tube generates X-rays, and the high-voltage power supply supplies a tube voltage to the X-ray tube to generate X-rays, and the method for determining degradation of the X-ray inspection device includes the following steps: counting at least one of a first control signal for causing the high voltage power supply to start supplying a tube voltage and a second control signal for causing the high voltage power supply to stop supplying a tube voltage; and The counted count value is compared with a preset threshold value to determine the deterioration state of a rubber member constituting a component of the X-ray tube, the rubber member absorbing an increase caused by thermal expansion of insulating oil filled in a tube of the X-ray tube.

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