Flipping device, semiconductor process equipment and control method for opening and closing door body

Abstract

The present application discloses a film flipping device, semiconductor process equipment and a control method for opening and closing a door body, and relates to the field of semiconductor equipment. A film flipping device includes a cavity, a door body, a driving mechanism, a motion track and a damping mechanism; the cavity is provided with an opening; the door body is flippably arranged at the opening, and the door body is rotatably connected to the cavity; the driving mechanism is rotatably connected to the cavity, and the driving mechanism includes a servo drive assembly and a first connecting member, and the first connecting member is used to rotatably connect the servo drive assembly to the door body, and the servo drive assembly drives the door body to flip relative to the cavity through the first connecting member; the damping mechanism connects the door body to the cavity, and the damping mechanism is used to apply resistance to flip the door body in a direction away from the opening. A semiconductor process equipment includes the above-mentioned film flipping device. A control method for opening and closing a door body is applied to the above-mentioned semiconductor process equipment. The present application can at least solve the problem that the flip door cannot move smoothly and affects the position accuracy of the wafer in the wafer box.

Description

Technical Field

[0001] The present application belongs to the field of semiconductor equipment technology, and specifically relates to a wafer flipping device, semiconductor process equipment, and a control method for a switch door body. Background Art

[0002] The SiC high-temperature furnace process requires extremely high internal cleanliness levels. Wafers must be placed in the equipment in a clean environment and transferred by the robotic arm of the equipment's wafer rewind mechanism. This prevents operators from manually placing and removing wafers, which could introduce contamination into the equipment. The entrance to the rewind mechanism is a flip door with locating pins on its inner surface for positioning the wafer cassette. The operator's procedure for placing wafers into the equipment is as follows: first, open the flip door. Once the flip door is open, place the cassette containing the wafers on the door. Finally, close the flip door. The reverse process is repeated to remove the wafers. During this process, the operator does not come into contact with the wafers, ensuring the cleanliness of the equipment.

[0003] Based on this, the control method of the flip door is particularly critical. The opening or closing process must ensure smooth movement. Because the opening or closing speed of the flip door is fast or slow or there is obvious vibration, it will cause the wafers in the cassette to move out of the correct position, which is easy to cause errors in the wafer transfer process and affect the stable operation of the equipment. Summary of the Invention

[0004] The purpose of the embodiments of the present application is to provide a wafer flipping device, semiconductor process equipment and a control method for a switch door body, which can at least solve the problem that the flip door cannot move smoothly and affects the position accuracy of the wafer in the wafer box.

[0005] In order to solve the above technical problems, this application is implemented as follows:

[0006] The embodiment of the present application provides a wafer flipping device, which is applied to semiconductor process equipment. The wafer flipping device includes: a cavity, a door, a driving mechanism, a motion track, and a damping mechanism;

[0007] The cavity body has a transmission cavity for rewinding the film, and the cavity body is provided with an opening communicating with the transmission cavity;

[0008] The door body is flippably arranged at the opening, and the area of ​​the door body near the lower end is rotatably connected to the two side walls of the cavity;

[0009] The drive mechanism is swingably connected to the outside of the first side wall of the cavity, and the drive mechanism includes a servo drive assembly and a first connecting member. The motion track is used to move the output end of the servo drive assembly along the trajectory of the motion track. The first connecting member is used to rotationally connect the output end of the servo drive assembly to the area near the lower end of the door body. The servo drive assembly drives the door body to flip relative to the cavity through the first connecting member.

[0010] The damping mechanism connects the door body and the cavity, and is used for applying resistance to the door body to cause the door body to flip in a direction away from the opening.

[0011] The embodiment of the present application further provides a semiconductor process equipment, which includes a controller and the above-mentioned wafer flipping device;

[0012] The film rewinding device further includes a limit switch, the servo drive assembly includes a servo driver and a servo motor connected by signals, the controller is used to send a signal to the servo driver to flip the door body, the limit switch is used to detect whether the servo motor is at the origin position, and the servo driver is used to receive the signal sent by the controller to flip the door body and control the servo motor to drive the door body to flip when detecting the signal from the limit switch that the servo motor is at the origin position;

[0013] And / or, the film rewinding device further comprises a proximity switch, the proximity switch being used to detect whether the door body is fully closed, and the controller being used to control the servo drive assembly to be closed and enabled when a signal indicating that the door body is fully closed is detected by the proximity switch;

[0014] And / or, the film rewinding device further comprises a magnetic switch, the magnetic switch being used to detect whether the piston of the stop cylinder has retracted into position, and the controller being used to control the door body to flip when the piston has retracted into position signal detected by the magnetic switch;

[0015] And / or, the film rewinding device further includes a solenoid valve and a controller, wherein the solenoid valve is used to control the extension and retraction speed of the stop cylinder according to a control signal from the controller.

[0016] The present application also provides a method for controlling an opening and closing door, the method comprising:

[0017] Detect the position status of the door;

[0018] When the door body is in an open state and needs to be switched to a closed state, the controller controls the driving mechanism to drive the door body to perform a closing action;

[0019] Determine whether the door has reached the first target position, the driving speed of the drive mechanism, and whether there is a signal from the proximity switch to determine whether the door has been fully closed;

[0020] When the door body is fully closed, the controller controls the stop mechanism to lock the door body so that the door body is in a closed state;

[0021] When the door body is in a closed state and needs to be switched to an open state, the controller controls the locking mechanism to release the lock on the door body;

[0022] When the door is unlocked, the controller controls the driving mechanism to drive the door to open.

[0023] Determining whether the door body reaches a second target position;

[0024] When the door body reaches the second target position, the door body is in a fully open state.

[0025] In an embodiment of the present application, the servo drive assembly transmits power to the door body through the first connecting member to drive the door body to flip relative to the cavity, thereby closing or opening the door body. During this process, the servo drive assembly can accurately control the opening and closing speed and position of the door body, so that the repeatability of the door body opening and closing is good, thereby overcoming the problem that the debugging process is more cumbersome due to the inability to accurately control the opening and closing speed and position of the door body; and under the control of the servo drive assembly, the opening and closing speed of the door body does not change with the change of the opening and closing angle of the door body, making the opening and closing of the door body more stable; in addition, the servo drive assembly can be swingably connected to the outside of the first side wall of the cavity. Compared with the method of setting the drive component at the bottom of the chamber, it is not restricted by space and can expand the driving stroke of the servo drive assembly to a certain extent, so that the door body has a larger opening angle, thereby facilitating the placement and removal of the wafer box and the wafer. The output end of the servo drive assembly can be moved along the trajectory of the motion track through the motion track, and the door body is driven to flip relative to the cavity through the first connecting member to achieve opening and closing. In addition, the damping mechanism applies resistance to the door body to make it flip away from the opening, so that during the process of opening and closing the door, the door body will not vibrate at the moment of opening and closing due to sudden opening and closing of the door body, making the entire door opening and closing process smoother. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a structural diagram of a flip door device in the related art;

[0027] Figure 2 This is a first perspective view of the film rewinding device disclosed in an embodiment of the present application (the door is in a closed state);

[0028] Figure 3A second perspective view of the film rewinding device disclosed in an embodiment of the present application (the door is in a closed state);

[0029] Figure 4 A third perspective view of the film rewinding device disclosed in an embodiment of the present application (with the door in a closed state);

[0030] Figure 5 This is a fourth perspective view of the film rewinding device (door in open state) disclosed in an embodiment of the present application;

[0031] Figure 6 This is a first partial schematic diagram of the film rewinding device disclosed in an embodiment of the present application;

[0032] Figure 7 A second partial schematic diagram of the film rewinding device disclosed in an embodiment of the present application;

[0033] Figure 8 A schematic diagram showing the connection of electrical components of a film rewinding device disclosed in an embodiment of the present application;

[0034] Figure 9 This is a control logic diagram of the control method for opening and closing a door body disclosed in an embodiment of the present application.

[0035] Description of reference numerals:

[0036] 10- cavity; 20- flip door; 30- cylinder;

[0037] 100 - cavity; 110 - opening; 120 - first side wall; 121 - first support portion; 1211 - first arc-shaped hole; 130 - second side wall; 131 - second support portion; 1311 - second arc-shaped hole; 141 - first fixing seat; 142 - second fixing seat; 150 - wiring baffle; 160 - sealing ring;

[0038] 200 - door body; 210 - stop block; 211 - first stop plate surface; 212 - second stop plate surface; 220 - door body support portion;

[0039] 300-driving mechanism; 310-servo driving assembly; 311-servo motor; 312-telescopic cylinder; 313-servo driver; 320-first connecting member;

[0040] 400-damping mechanism; 410-gas spring; 420-second connecting member;

[0041] 500-stop mechanism; 510-stop cylinder; 520-stop protrusion;

[0042] 610-controller; 620-host computer; 630-limit switch; 640-proximity switch; 650-magnetic switch; 660-solenoid valve. DETAILED DESCRIPTION

[0043] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0044] The terms "first," "second," and the like in the specification and claims of this application are used to distinguish similar objects, and are not used to describe a specific order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate, so that the embodiments of this application can be implemented in an order other than that illustrated or described herein, and that the objects distinguished by "first," "second," and the like are generally of the same type, and do not limit the number of objects; for example, the first object can be one or more. In addition, the term "and / or" in the specification and claims refers to at least one of the connected objects, and the character " / " generally indicates that the objects connected are in an "or" relationship.

[0045] refer to Figure 1 The related art provides a reversible door device for a high-temperature oxidation furnace, which uses a cylinder 30 to control the reversal of the reversible door 20 to open or close the chamber 10. Specifically, the two air inlets of the cylinder 30 are connected to a two-position, five-way solenoid valve. When the door is opened, the controller sends a first signal to the solenoid valve, connecting the lower air inlet to high-pressure air and the upper air inlet to the atmosphere. When the door is closed, the controller sends a second signal to the solenoid valve, connecting the upper air inlet to high-pressure air and the lower air inlet to the atmosphere. When the reversible door 20 moves into position, the movement information of the cylinder 30 and the reversible door 20 position signal can be detected by a detection element to determine whether the reversible door 20 has completed the opening or closing action.

[0046] However, the above-mentioned flip door device has some defects, including:

[0047] 1. The flip door is driven by a cylinder, which is set at the bottom of the flip door. Due to limited space, the stroke of the cylinder is limited, resulting in a small opening angle of the flip door, which affects the placement and removal of film cassettes;

[0048] 2. The cylinder drive will make the flip door run unsteadily, with obvious vibration at the moment of opening or closing, and the running speed of the flip door will change with the change of the opening and closing angle of the flip door;

[0049] 3. The speed and position of the flip door movement cannot be accurately controlled, making the debugging process cumbersome;

[0050] 4. The detection signal of the detection element is inaccurate and has poor repeatability;

[0051] 5. The air tightness between the flip door and the cavity is poor;

[0052] 6. The door body suddenly starts to move when opening or closing the door, causing the door body to vibrate.

[0053] Based on this, the embodiments of the present application improve the above-mentioned flip door device to overcome the above-mentioned problems.

[0054] refer to Figures 2 to 8 The present invention discloses a wafer flipping device for use in semiconductor process equipment. Optionally, the semiconductor process equipment may be a SiC high-temperature furnace, or other equipment, which is not limited in the present invention.

[0055] The disclosed film rewinding device includes a cavity 100 , a door 200 , a driving mechanism 300 , a motion track and a damping mechanism 400 .

[0056] The cavity 100 has a transfer cavity for reversing the wafer, and the cavity 100 also has an opening 110, which is connected to the transfer cavity. Through the opening 110, a wafer cassette loaded with wafers can be placed in the transfer cavity or the wafer cassette can be taken out of the transfer cavity, thereby facilitating the placement or removal of wafers. Considering that the wafers need to be placed in the semiconductor process equipment in a clean environment, a door body 200 is provided at the opening 110 of the cavity 100. The door body 200 is reversibly provided at the opening 110. By reversing the door body 200, the opening 110 can be opened or closed, thereby meeting various requirements such as wafer placement and retrieval, as well as process requirements.

[0057] In some embodiments, the cavity 100 may include a first sidewall 120 and a second sidewall 130 disposed opposite each other, and the region near the lower end of the door body 200 may be rotatably connected to the two sidewalls of the cavity 100. Optionally, the region near the lower end of the door body 200 may be connected to the first sidewall 120 on one side via a rotating shaft, and to the second sidewall 130 on the other side via a rotating shaft, thereby enabling the door body 200 to be installed and flipped relative to the cavity 100 to be opened or closed.

[0058] In the embodiment of the present application, the driving mechanism 300 provides driving force for the flipping of the door body 200, so as to achieve the flipping of the door body 200 relative to the cavity 100. In some embodiments, the driving mechanism 300 is swingably connected to the outside of the first side wall 120 of the cavity 100. The driving mechanism 300 includes a servo drive assembly 310 and a first connecting member 320. The servo drive assembly 310 is used to provide driving force for the flipping of the door body 200 and can control the flipping of the door body 200. The first connecting member 320 is used to transmit driving force and motion to the door body 200.

[0059] Alternatively, the first connecting member 320 may be a fixed seat, which is fixed to an area near the lower end of the door body 200 and is rotatably connected to the output end of the servo drive assembly 310, so that the door body 200 can be flipped by the first connecting member 320 under the drive of the servo drive assembly 310. In a more specific embodiment, the first connecting member 320 and the output end of the servo drive assembly 310 are rotatably connected by a shaft and a shaft sleeve.

[0060] In some embodiments, the motion track is used to move the output end of the servo drive assembly 310 along the trajectory of the motion track, thereby limiting the movement of the output end of the servo drive assembly 310 so that it moves along a predetermined trajectory. Alternatively, the motion track can be a guide rail, a guide slot, a guide hole, or other structure, and its specific form is not limited.

[0061] The first connecting member 320 is used to rotationally connect the output end of the servo drive component 310 with the area near the lower end of the door body 200. In this way, the driving force and movement output by the servo drive component 310 can be transmitted to the door body 200 through the first connecting member 320. That is, the servo drive component 310 drives the door body 200 to flip relative to the cavity 100 through the first connecting member 320, thereby enabling the door body 200 to open or close the opening 110 of the cavity 100.

[0062] In order to avoid the movement of the driving mechanism 300 being restricted, resulting in a smaller opening angle of the door body 200, thereby affecting the process of placing or taking out the film, the servo drive component 310 can be set on the side of the cavity 100, that is, the servo drive component 310 can be swingably connected to the outside of the first side wall 120 of the cavity 100, and the driving force and movement are transmitted to the door body 200 through the first connecting member 320. Compared with the related art, in the embodiment of the present application, the movement space of the servo drive component 310 is not restricted, so that the opening angle of the door body 200 will not be restricted, and thus will not affect the process of placing or taking out the film; at the same time, the driving force and movement output by the servo drive component 310 are transmitted through the first connecting member 320, which to a certain extent also has the function of amplifying the stroke, that is, a larger opening angle of the door body 200 is achieved through the servo drive component 310 with a small stroke, so that the opening angle of the door body 200 will not be restricted, ensuring normal placing or taking out of the film.

[0063] refer to Figure 2 and Figure 5To improve the airtightness between the cavity 100 and the door 200, the film rewinding device may further include a damping mechanism 400. The damping mechanism 400 connects the door 200 and the cavity 100 and is used to apply resistance to the door 200, causing it to flip away from the opening 110. In other words, the damping mechanism 400 tends to close the opening 110. Therefore, when the door 200 is in the closed state, the damping mechanism 400 can make the door 200 close more tightly, thereby ensuring the airtightness between the cavity 100 and the door 200 and preventing the door 200 from vibrating when opening or closing it.

[0064] Based on the above settings, the embodiment of the present application can accurately control the opening and closing speed and position of the door body 200 through the servo drive component 310, so that the repeatability of the opening and closing of the door body 200 is better, thereby overcoming the problem that the debugging process is more cumbersome due to the inability to accurately control the opening and closing speed and position of the door body 200; and under the control of the servo drive component 310, as the opening and closing angle of the door body 200 changes, the opening and closing speed of the door body 200 will not change, so that the opening and closing of the door body 200 is more stable, and the problem of vibration of the door body 200 at the moment of opening or closing is effectively alleviated; in addition, the servo drive component 310 is connected to the side of the cavity 100. Compared with setting the drive component at the bottom, it is not restricted by space, and the movement stroke of the servo drive component 310 can be expanded to a certain extent, so that the door body 200 has a larger opening angle, thereby facilitating the placement and removal of the wafer box and wafers.

[0065] The motion track allows the output end of the servo drive assembly 310 to move along the track, and the first connector 320 drives the door body 200 to flip relative to the cavity 100 to achieve opening and closing. The damping mechanism 400 allows the door body 200 to have a movement tendency to close the opening 110, thereby making the door body 200 close more tightly and ensuring the airtightness between the cavity 100 and the door body 200.

[0066] refer to Figures 2 to 4 In some embodiments, the servo drive assembly 310 may include a servo motor 311 and a telescopic cylinder 312, wherein the servo motor 311 is transmission-connected to the telescopic cylinder 312, the fixed end of the telescopic cylinder 312 is swingably connected to the outside of the first side wall 120 of the cavity 100, the output end of the telescopic cylinder 312 is rotationally connected to the first connecting member 320, and the first connecting member 320 is fixedly connected to the area near the lower end of the door body 200.

[0067] In addition, the servo drive assembly 310 may further include a servo driver 313 for controlling the servo motor 311 , and the servo driver 313 is signal-connected to the servo motor 311 .

[0068] It should be noted here that the servo motor 311 is provided with an encoder, which can detect the position of the magnetic pole, the angle of the rotating shaft, and the rotation speed of the rotating shaft in the servo motor 311. Based on this, it can be converted into the actual position and running speed of the door body 200, so that the flipping status of the door body 200 can be obtained.

[0069] Optionally, the telescopic cylinder 312 may include a cylinder body and a telescopic rod, the telescopic rod being slidably connected to the cylinder body. To extend or retract the telescopic rod relative to the cylinder body, a screw is disposed within the cylinder body, the telescopic rod being in transmission connection with the screw. Thus, when the screw rotates, the telescopic rod can be extended or retracted relative to the main cylinder body.

[0070] In addition, the servo motor 311 can be arranged on the outer wall of the cylinder body, and the rotating shaft of the servo motor 311 is transmission-connected to the screw rod, so that the screw rod can be driven to rotate.

[0071] Based on the above configuration, under the driving action of the servo motor 311 , the telescopic cylinder 312 can extend or shorten, thereby pushing or pulling the door body 200 to rotate through the first connecting member 320 , so that the door body 200 flips relative to the cavity 100 .

[0072] refer to Figure 3 In order to allow the telescopic cylinder 312 to swing outside the first side wall 120 of the cavity 100, a first fixing seat 141 can be provided on the outer side of the first side wall 120, and one end of the telescopic cylinder 312 can be rotatably connected to the first fixing seat 141. Optionally, a bearing seat can be provided at one end of the telescopic cylinder 312, and the bearing seat and the first fixing seat 141 can be connected via a shaft. In this way, the telescopic cylinder 312 can be flexibly swung.

[0073] Considering that the transmission cavity of the cavity 100 needs to be sealed, the embodiment of the present application arranges the connecting part between the door body 200 and the cavity 100 and the driving part at the lower part of the transmission cavity, thereby effectively avoiding leakage of the transmission cavity and ensuring the sealing of the transmission cavity.

[0074] Based on the above settings, refer to Figure 3 、 Figure 4 and Figure 7 The first side wall 120 may include a first support portion 121 extending downward to the bottom of the transmission chamber. Accordingly, the door body 200 includes a door body support portion 220 extending downward to the bottom of the transmission chamber. A first arc-shaped hole 1211 is opened on the first support portion 121 to form a motion track, and the output end of the telescopic cylinder 312 passes through the first arc-shaped hole 1211 and is rotatably connected to the first connecting member 320, and the output end of the telescopic cylinder 312 is movable along the first arc-shaped hole 1211, and the first connecting member 320 is fixedly connected to the door body support portion 220.

[0075] Considering that the servo drive assembly 310 is located outside the cavity 100, and the area where the door body 200 is connected to the first connecting member 320 is located inside the cavity 100, due to the provision of the first arc-shaped hole 1211, the servo drive assembly 310 located outside the cavity 100 and the door body 200 located inside the cavity 100 can be connected through the first connecting member 320, thereby avoiding the first side wall 120 interfering with the output end of the servo drive assembly 310 and the movement of the first connecting member 320, thereby ensuring the smooth opening or closing of the door body 200.

[0076] In some embodiments, the first connecting member 320 is rotatably connected to the first support portion 121. Optionally, the first connecting member 320 may be provided with a mounting hole. Accordingly, the inner side surface of the first support portion 121 may be provided with a shaft member that is mounted in conjunction with the mounting hole, thereby allowing the first connecting member 320 to rotate relative to the first support portion 121 about the shaft member. Considering that the first connecting member 320 is fixed to the door body 200, the door body 200 can also rotate about the shaft member, thereby enabling the door body 200 to be opened or closed relative to the cavity 100.

[0077] In order to rotationally connect the first connector 320 to the output end of the servo drive assembly 310, in some embodiments, the first connector 320 may be provided with a connecting shaft. Accordingly, the output end of the servo drive assembly 310 is provided with a connecting sleeve, and the connecting shaft is inserted into the connecting sleeve to achieve rotational engagement. Thus, the rotational engagement of the connecting shaft and the connecting sleeve enables rotational connection between the output end of the servo drive assembly 310 and the first connector 320, thereby avoiding motion interference and ensuring normal opening and closing of the door body 200.

[0078] To ensure the sealing of the cavity 100, in some embodiments, the damping mechanism 400 is arranged outside the second side wall 130 opposite to the first side wall 120, that is, the damping mechanism 400 is located outside the cavity 100, thereby avoiding leakage of the cavity 100 due to the setting and damping movement of the damping mechanism 400.

[0079] Considering that the damping mechanism 400 connects the door body 200 and the cavity 100, in order to adapt to the flipping of the door body 200, the damping mechanism 400 can be swingably connected to the outside of the second side wall 130. In this way, during the process of flipping the door body 200 to open or close, the damping mechanism 400 can swing to adapt to the movement of the door body 200, thereby avoiding motion interference.

[0080] refer to Figure 5 and Figure 6In some embodiments, the damping mechanism 400 may include a gas spring 410 and a second connector 420, wherein the fixed end of the gas spring 410 is rotatably connected to the outside of the second side wall 130, and the second connector 420 is used to rotatably connect the movable end of the gas spring 410 to the area near the lower end of the door body 200, and the second connector 420 is fixedly connected to the door body 200. Optionally, the gas spring 410 may be a nitrogen gas spring.

[0081] Among them, the gas spring 410 is used to provide elastic force for closing the door body 200, and the second connecting member 420 is used to transmit the elastic force. The elastic force generated by the gas spring 410 can be transmitted to the door body 200 through the second connecting member 420, so that the door body 200 has a closing movement tendency, thereby making the door body 200 tightly closed.

[0082] Based on the above arrangement, when the servo drive assembly 310 drives the door body 200 to flip and close via the first connecting member 320, the gas spring 410 applies an elastic force to the door body 200 via the second connecting member 420, thereby cooperating with the servo drive assembly 310 to jointly apply the driving force for closing the door, thereby reducing the load on the servo drive assembly 310. In addition, the gas spring 410 is swingable relative to the cavity 100, and the second connecting member 420 rotates relative to the moving end of the gas spring 410, thereby facilitating the closing of the door body 200. When the door body 200 is closed, the elastic force of the gas spring 410 tightly closes the door body 200, thereby ensuring the airtightness between the cavity 100 and the door body 200 and preventing motion interference.

[0083] Optionally, the gas spring 410 and the servo drive assembly 310 can be respectively arranged on the outside of two opposite side walls of the cavity 100. In this way, the gas spring 410 and the servo drive assembly 310 can respectively act on both sides of the door body 200, which can make the door body 200 evenly stressed to a certain extent, so as to ensure that the door body 200 can be flipped smoothly.

[0084] In order to make the gas spring 410 swing relative to the cavity 100, a second fixing seat 142 can be provided on the outer side of the second side wall 130, and the fixed end of the gas spring 410 is rotatably connected to the second fixing seat 142, as shown in FIG. Figure 5 Optionally, a bearing seat may be provided at one end of the gas spring 410 , and the bearing seat is connected to the second fixing seat 142 via a shaft, so that the gas spring 410 can swing flexibly.

[0085] Considering that the transmission cavity of the cavity 100 needs to be sealed, the embodiment of the present application arranges the connecting part between the door body 200 and the cavity 100 and the damping part outside the transmission cavity, thereby effectively avoiding leakage of the transmission cavity and ensuring the sealing of the transmission cavity.

[0086] refer to Figures 4 to 7 The second side wall 130 may include a second support portion 131 extending downward to the bottom of the transmission chamber. Accordingly, the door body 200 includes a door body support portion 220 extending downward to the bottom of the transmission chamber. A second arc-shaped hole 1311 is opened on the second support portion 131 to form another motion track, and the moving end of the gas spring 410 passes through the second arc-shaped hole 1311 and is rotatably connected to the second connecting member 420, and the moving end of the gas spring 410 is movable along the second arc-shaped hole 1311, and the second connecting member 420 is rotatably connected to the second support portion 131.

[0087] Considering that the gas spring 410 is located outside the cavity 100, and the area where the door body 200 is connected to the second connecting piece 420 is located inside the cavity 100, due to the provision of the second arc-shaped hole 1311, the gas spring 410 located outside the cavity 100 and the door body 200 located inside the cavity 100 can be connected through the second connecting piece 420, thereby avoiding the second side wall 130 interfering with the output end of the gas spring 410 and the movement of the second connecting piece 420, thereby ensuring the smooth opening or closing of the door body 200.

[0088] refer to Figure 2 、 Figure 4 and Figure 5 In order to prevent the door body 200 from accidentally opening when it is in a closed state, the rewinding device of the embodiment of the present application also includes a stopping mechanism 500. The stopping mechanism 500 is used to abut against the area near the lower part of the door body 200 when the door body 200 closes the opening 110 to lock the door body 200, thereby preventing the door body 200 from accidentally opening.

[0089] In order to stop the door body 200, a stop block 210 is arranged on one side of the door body 200 close to its own flipping axis. The stop block 210 has a first stop plate surface 211 and a second stop plate surface 212. The first stop plate surface 211 is perpendicular to the door body 200, and the first stop plate surface 211 and the second stop plate surface 212 are arranged perpendicularly.

[0090] refer to Figure 6 and Figure 7 In some embodiments, the stopping mechanism 500 is arranged below the cavity 100, and the stopping mechanism 500 may include a stopping cylinder 510 and a stopping protrusion 520, wherein the stopping cylinder 510 is used to drive the stopping protrusion 520 to rise when the door body 200 closes the opening 110, so that the stopping protrusion 520 abuts against the first stop plate surface 211 and the second stop plate surface 212.

[0091] Based on the above setting, when the door body 200 is closed, the first stop plate surface 211 is set horizontally, the second stop plate surface 212 is set vertically, and a vertical space is formed between the first stop plate surface 211 and the second stop plate surface 212. At this time, the stop cylinder 510 extends and pushes the stop protrusion 520 to move into the vertical space, and the top surface and side surface of the stop protrusion 520 respectively abut against the first stop plate surface 211 and the second stop plate surface 212, so that the door body 200 can be locked to prevent the door body 200 from opening.

[0092] When the door body 200 needs to be opened, the locking effect of the stop mechanism 500 needs to be released first. Specifically, the stop cylinder 510 retracts and drives the stop protrusion 520 to disengage from the vertical space, so that the stop protrusion 520 is separated from the first stop plate surface 211 and the second stop plate surface 212 respectively, and the abutment effect of the stop protrusion 520 on the stop block 210 is released. In this way, the door body 200 can be opened under the driving action of the driving mechanism 300.

[0093] In order to ensure the stability of the locked state, a plurality of stopping mechanisms 500 may be provided so that the stopping block 210 can be stopped and locked simultaneously by the plurality of stopping mechanisms 500 , thereby ensuring the stability of the locked state.

[0094] Optionally, the stopping protrusion 520 may be a cubic structure, a roller structure, a spherical structure, or other structures, which is not limited in the present application.

[0095] In other embodiments, the stop mechanism 500 may further include a first stop cylinder and a second stop cylinder, wherein the first stop cylinder has a first stop end and the second stop cylinder has a second stop end. In this way, when the door body 200 closes the opening 110, the first stop end of the first stop cylinder abuts against the first stop plate surface 211, and the second stop end of the second stop cylinder abuts against the second stop plate surface 212. Based on this, under the action of the first stop cylinder and the second stop cylinder, the stop block 210 is locked and cannot move, thereby locking the door body 200 and preventing it from turning over, thereby effectively preventing the door body 200 from opening accidentally.

[0096] Based on the above setting, when the first stop cylinder is extended, the first stop end abuts against the first stop plate surface 211, and when the second stop cylinder is extended, the second stop end abuts against the second stop plate surface 212, thereby achieving double abutment, thereby achieving a firm locking of the stop block 210, thereby preventing the door body 200 from being accidentally opened, ensuring the airtightness of the inner cavity of the cavity 100, and effectively avoiding accidental damage to the semiconductor process equipment.

[0097] Taking into account that the length of the door body 200 is relatively large, and objects such as film boxes and chips will be placed on the door body 200, the servo motor 311 may have insufficient torque when driving the door body 200 to flip. In this way, the weight of the stop block 210 can be increased so that the stop block 210 can be used as a counterweight block at the same time, thereby reducing the load on the servo motor 311.

[0098] refer to Figures 2 to 4 In some embodiments, a wiring baffle 150 is further provided on the side wall of the cavity 100 . The wiring baffle 150 can prevent the telescopic cylinder 312 from touching the cable of the servo motor 311 , thereby ensuring the normal operation of the servo motor 311 .

[0099] Based on the above-mentioned wafer flipping device, an embodiment of the present application further discloses a semiconductor process equipment, and the disclosed semiconductor process equipment includes the above-mentioned wafer flipping device.

[0100] refer to Figure 8 In order to realize the control of the opening or closing process of the door body 200 in the rewinding device, the rewinding device of the embodiment of the present application also includes a controller 610, which can be a PLC. Through the controller 610, some detection signals can be received, such as the speed and position signals of the servo motor 311, and logical processing, condition judgment, signal output, etc. can be performed according to the detection signals, thereby realizing control to ensure movement accuracy and improve movement stability.

[0101] In addition, the film rewinding device is connected to a host computer 620, which is in signal communication with the controller 610. The host computer 620 may have a human-computer interaction function, allowing an operator to input commands through the host computer 620, which then outputs control signals through the controller 610 to control the opening process of the door 200. The host computer 620 can also monitor and modify the controller 610 program online to change the control method according to actual needs. Of course, the speed, position, and other status of the door 200 can also be viewed at any time through the interface of the host computer 620, allowing program optimization and parameter setting during debugging.

[0102] In some embodiments, the servo drive assembly 310 includes a servo driver 313 and a servo motor 311, and the servo driver 313 is signal-connected to the servo motor 311 and the controller 610. The servo driver 313 is configured to convert and process control signals received from the controller 610 and transmit the converted signals to the servo motor 311 to control the servo motor 311 to operate according to actual needs. Furthermore, the servo drive assembly 310 also includes a telescopic cylinder 312, which is in transmission connection with the servo motor 311. The servo motor 311 can drive the telescopic cylinder 312 to perform telescopic movements to open and close the door 200.

[0103] At the same time, the servo driver 313 can also obtain the actual position and speed of the servo motor 311 through the feedback signal of the encoder, and send a signal corresponding to the actual position and speed of the servo motor 311 to the controller 610. Based on this, the controller 610 can determine the position state of the door body 200 according to the actual position and speed of the servo motor 311.

[0104] In order to locate the origin of the servo motor 311, the rewinding device of the embodiment of the present application also includes a limit switch 630, which is connected to the signal of the servo driver 313. The limit switch 630 is used to detect whether the servo motor 311 is at the origin position. The servo driver 313 is used to control the servo motor 311 to drive the door body 200 to flip when the limit switch 630 detects that the servo motor 311 is at the origin position.

[0105] refer to Figure 4 and Figure 8 In some embodiments, the limit switch 630 can be disposed on the inner wall of the cavity 100 near the upper end of the second arc-shaped hole 1311. Thus, when the second connector 420 moves to the upper end of the second arc-shaped hole 1311, it contacts the limit switch 630. At this point, the limit switch 630 sends a signal to the servo driver 313, thereby confirming that the servo motor 311 is at the origin. This allows the origin of the servo motor 311 to be positioned, thereby ensuring the motion accuracy of the servo motor 311.

[0106] In other embodiments, the limit switch 630 can also be set on the inner wall of the cavity 100, close to the upper end of the first arc-shaped hole 1211. In this way, when the first connecting member 320 moves to the upper end of the first arc-shaped hole 1211, it will touch the limit switch 630, and the positioning of the origin of the servo motor 311 can also be achieved at this time.

[0107] Of course, limit switches 630 may also be provided at the upper end of the first arc-shaped hole 1211 and the upper end of the second arc-shaped hole 1311 respectively, so as to realize the positioning of the origin of the servo motor 311 .

[0108] In order to determine whether the door body 200 is in a closed state, the film rewinding device of the embodiment of the present application may further include a proximity switch 640 and a controller 610. The proximity switch 640 is connected to the controller 610 by signal. The proximity switch 640 is used to detect whether the door body 200 is fully closed. When the controller 610 detects a signal that the door body 200 is fully closed, it controls the servo drive assembly 310 to be turned off and enabled. In this way, when the door body 200 is closed, the proximity switch 640 will sense the door body 200 and send a signal to the controller 610, thereby the controller 610 determines that the door body 200 is in a closed state.

[0109] Optionally, the proximity switch 640 can be provided at the opening 110 of the cavity 100 to facilitate detection of the door body 200 when the door body 200 is closed. Of course, the proximity switch 640 can also be provided at the edge of the door body 200 facing the opening 110, so that when the door body 200 is closed, the proximity switch 640 can detect the frame around the opening 110 to determine whether the door body 200 is in a closed state.

[0110] To detect the piston position of the stop cylinder 510, the film rewinding device of the embodiment of the present application further includes a magnetic switch 650 and a controller 610. The magnetic switch 650 is signal-connected to the controller 610. The magnetic switch 650 is used to detect whether the piston of the stop cylinder 510 has retracted into position. The controller 610 is used to control the door body 200 to flip when the piston retracts into position signal detected by the magnetic switch 650. In this way, the piston position signal of the stop cylinder 510 can be sent to the controller 610 via the magnetic switch 650 to determine whether the stop cylinder 510 is in the extended or retracted state, thereby determining whether the stop mechanism 500 is in the locked or unlocked state.

[0111] Optionally, a magnetic switch 650 may be installed on the surface of the stopper cylinder 510 to detect the position of the piston in the stopper cylinder 510 .

[0112] To control the extension and retraction of the stopper cylinder 510, the film rewinding device of the embodiment of the present application further includes a solenoid valve 660 and a controller 610. The solenoid valve 660 is signal-connected to the controller 610 and is configured to control the extension and retraction speed of the stopper cylinder 510 based on control signals from the controller 610. Thus, the controller 610 can control the opening and closing of the solenoid valve 660 or the flow control, thereby controlling the extension and retraction speed of the stopper cylinder 510.

[0113] Optionally, the air port of the stop cylinder 510 is connected to a solenoid valve 660 , and the extension and retraction of the stop cylinder 510 is controlled by opening and closing the solenoid valve 660 , and the extension and retraction speed of the stop cylinder 510 is controlled by the opening degree of the solenoid valve 660 .

[0114] In the embodiment of the present application, the specific process of flipping the door body 200 is as follows:

[0115] When the servo motor 311 is in operation, the servo motor 311 drives the telescopic cylinder 312 to perform linear telescopic motion, and the telescopic cylinder 312 can swing relative to the cavity 100, so that the moving end of the telescopic cylinder 312 moves in the first arc hole 1211, and drives the first connecting member 320 to move along the first arc hole 1211. The first connecting member 320 drives the door body 200 to rotate around the axis, and finally realizes the flipping motion of the door body 200 to realize the opening or closing of the door body 200. When the telescopic cylinder 312 is in the retracted state, the movable end of the telescopic cylinder 312 is located at the upper end of the first arc-shaped hole 1211, and the movable end of the gas spring 410 is located at the upper end of the second arc-shaped hole 1311. At this time, the door body 200 is in the open state. When the telescopic cylinder 312 is in the extended state, the movable end of the telescopic cylinder 312 is located at the lower end of the first arc-shaped hole 1211, and the movable end of the gas spring 410 is located at the lower end of the second arc-shaped hole 1311. At this time, the door body 200 is in the closed state. Based on the above configuration, the purpose of controlling the opening and closing of the door body 200 by controlling the servo motor 311 can be achieved.

[0116] During the flipping process of the door body 200, the servo motor 311 provides a power source for the flipping of the door body 200, while the damping mechanism 400 always provides a thrust to the door body 200, which constantly tends to close the door body 200. That is, the damping mechanism 400 always prevents the door body 200 from opening, and facilitates the closing of the door body 200. In this way, when the door body 200 is opened, by calculating and selecting an appropriate gas spring 410, its thrust can be equal to the weight of the door body 200 itself. The holding torque output of the servo motor 311 when the door body 200 is open can be significantly reduced, effectively avoiding the risk of overloading the servo motor 311. When the door body 200 is closed, the servo motor 311 can be deactivated, and the gas spring 410 provides thrust, so that the door body 200 is firmly attached to the opening 110. In this way, the door body 200, under the thrust of the gas spring 410, presses the sealing ring 160 at the opening 110, ensuring the airtightness of the cavity 100.

[0117] Based on the above-mentioned film reversing device, an embodiment of the present application further discloses a control method for opening and closing a door body, which is applied to the above-mentioned film reversing device or semiconductor process equipment to control the opening or closing of the door body.

[0118] refer to Figures 2 to 9 , the disclosed control method includes:

[0119] Detecting the position status of the door body 200;

[0120] When the door body 200 is in an open state and needs to be switched to a closed state, the controller 610 controls the driving mechanism 300 to drive the door body 200 to perform a closing action;

[0121] Determine whether the door body 200 has reached the first target position, the driving speed of the driving mechanism 300, and whether there is a signal from the proximity switch 640 to determine whether the door body 200 has been fully closed;

[0122] When the door body 200 is fully closed, the controller 610 controls the stop mechanism 500 to lock the door body 200 so that the door body 200 is in a closed state;

[0123] When the door body 200 is in a closed state and needs to be switched to an open state, the controller 610 controls the locking mechanism 500 to release the lock on the door body 200;

[0124] When the door body 200 is unlocked, the controller 610 controls the driving mechanism 300 to drive the door body 200 to open the door.

[0125] Determining whether the door body 200 reaches the second target position;

[0126] When the door body 200 reaches the second target position, the door body 200 is in a fully open state.

[0127] It should be noted here that during normal operation of the film rewinding device, the door body 200 has two position states, an open state or a closed state. In this way, the detection element can detect whether the door body 200 is in the open state or the closed state.

[0128] In some embodiments, a limit switch 630 can be used to detect whether the door body 200 is in a fully open state. Specifically, when the door body 200 is in the open state, the telescopic cylinder 312 is in a retracted state, the first connecting member 320 is located at the upper end of the first arc-shaped hole 1211, and at the same time, the second connecting member 420 is located at the upper end of the second arc-shaped hole 1311. In this way, the second connecting member 420 can contact the limit switch 630, thereby causing the limit switch 630 to generate a signal and send the signal to the servo driver 313, thereby determining that the door body 200 is in a fully open state. Of course, the limit switch 630 can also be used to locate the origin of the servo motor 311 to ensure the operating accuracy of the servo motor 311.

[0129] In addition, whether the door body 200 is in a fully closed state can be detected by the proximity switch 640. Specifically, when the door body 200 is in a closed state, the proximity switch 640 detects the door body 200 and sends a signal to the controller 610, thereby determining that the door body 200 is in a fully closed state.

[0130] Based on the above configuration, the position state of the door body 200 can be determined by using the limit switch 630 and the proximity switch 640 in combination.

[0131] The first case: the door body 200 needs to be switched from the open state to the closed state. The specific process is as follows:

[0132] A door closing command is sent to the controller 610 through the host computer 620 or a button. After receiving the door closing command, the controller 610 sends a door closing control command to the servo driver 313. The servo driver 313 controls the servo motor 311 to start. The servo motor 311 drives the door body 200 to flip through the telescopic cylinder 312 and the first connecting member 320 to close the door body 200.

[0133] When the door body 200 flips over and closes, the servo driver 313 controls the servo motor 311 to stop. At the same time, the controller 610 judges the position and speed of the door body 200 to determine whether the actual position of the door body 200 coincides with the first target position and whether the actual speed of the servo motor 311 is zero. Based on the above two conditions, it can be determined whether the door body 200 has flipped to the first target position. At the same time, the proximity switch 640 detects the door body 200 in real time. When the proximity switch 640 detects the door body 200, it generates a signal and sends the signal to the controller 610. Based on this, when the three conditions of the actual position of the door body 200 coincides with the first target position, the actual speed of the servo motor 311 is zero, and the proximity switch 640 generates a signal are met at the same time, it is determined that the door body 200 has been closed in place. At this time, the controller 610 controls the servo driver 313 to turn off the enable.

[0134] The controller 610 controls the solenoid valve 660 to extend the stop cylinder 510. During this process, the position of the piston in the stop cylinder 510 is detected in real time through the magnetic switch 650 to determine whether the stop cylinder 510 is extended into place; when the stop cylinder 510 is extended into place, it can be determined that the door body 200 is closed and locked. At this point, the door closing action is completed, and there will be no leakage or accidental opening, ensuring the normal operation of the equipment.

[0135] The second situation: the door body 200 needs to be switched from the closed state to the open state. The specific process is as follows:

[0136] A door opening command is sent to the controller 610 through the host computer 620 or a button. After receiving the door opening command, the controller 610 sends a control command to release the lock to the stopping mechanism 500. Specifically, the controller 610 controls the solenoid valve 660 to retract the stopping cylinder 510. During this process, the position of the piston in the stopping cylinder 510 is detected in real time through the magnetic switch 650 to determine whether the stopping cylinder 510 has retracted into place.

[0137] When the stop cylinder 510 retracts into place, the controller 610 sends a door opening control instruction to the servo driver 313. The servo driver 313 controls the servo motor 311 to start. The servo motor 311 drives the door body 200 to flip through the telescopic cylinder 312 and the first connecting member 320 to open the door body 200.

[0138] When the door 200 is flipped open, the servo driver 313 controls the servo motor 311 to stop running. At the same time, the controller 610 determines the position and speed of the door 200 to determine whether the actual position of the door 200 coincides with the second target position and whether the actual speed of the servo motor 311 is zero. Based on the above two conditions, it can be determined whether the door 200 has flipped to the second target position. Based on this, when it is determined that the door 200 has been fully opened, the controller 610 controls the servo driver 313 to turn off the enable.

[0139] It should be noted that before opening or closing the door, it is prioritized to ensure that the servo motor 311 has searched for the origin to ensure the accuracy of the servo motor 311's operation. Of course, this process is the basic operation of the servo system. For details, please refer to the relevant art and will not be repeated here. In the embodiment of the present application, when the door body 200 is in the open state, the servo motor 311 is in the zero position state. When the door body 200 is in the closed state, the position of the servo motor 311 is a certain value. After searching the origin, it can be debugged according to the JOG mode.

[0140] To sum up, the embodiment of the present application adopts a servo control method to control the flipping of the door body 200, so that the flipping speed and position of the door body 200 can be accurately controlled, and the vibration during the movement of the door body 200 can be eliminated to ensure the smooth flipping of the door body 200; the position of the door body 200 can be confirmed by combining the servo encoder feedback with various detection switches, with more safety interlocks, making the stability and safety of the equipment higher; when the door body 200 is closed, the servo motor 311 is released to enable, and the elastic force of the gas spring 410 is used to make the door body 200 close more tightly, ensuring the air tightness of the cavity 100; the mechanical structure of the stop cylinder 510 combined with the gas spring 410 limits the door body 200 during a power outage to prevent the door body 200 from falling; in addition, some control parameters can be directly configured, installed, debugged, and maintained through software, making operation more convenient.

[0141] The embodiments of the present application are described above in conjunction with the accompanying drawings, but the present application is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of this application, ordinary technicians in this field can also make many forms without departing from the purpose of this application and the scope of protection of the claims, all of which are within the protection of this application.

Claims

1. A wafer flipping device, used in semiconductor process equipment, characterized in that: include: Cavity (100), door body (200), driving mechanism (300), motion track and damping mechanism (400); The cavity (100) has a transmission cavity for rewinding the film, and the cavity (100) is provided with an opening (110) communicating with the transmission cavity; The door body (200) is reversibly arranged at the opening (110), and the area near the lower end of the door body (200) is rotatably connected to the two side walls of the cavity (100); The driving mechanism (300) is swingably connected to the outside of the first side wall (120) of the cavity (100), and the driving mechanism (300) includes a servo driving component (310) and a first connecting member (320). The motion track is used to move the output end of the servo driving component (310) along the trajectory of the motion track. The first connecting member (320) is used to rotationally connect the output end of the servo driving component (310) to the area near the lower end of the door body (200). The servo driving component (310) drives the door body (200) to flip relative to the cavity (100) through the first connecting member (320). The servo driving component (310) accurately controls the opening and closing speed and position of the door body (200). The damping mechanism (400) connects the door body (200) and the cavity (100), and the damping mechanism (400) is used to apply resistance to the door body (200) to cause the door body (200) to flip in a direction away from the opening.

2. The film rewinding device according to claim 1, characterized in that: The servo drive assembly (310) includes a servo motor (311) and a telescopic cylinder (312); The servo motor (311) is transmission-connected to the telescopic cylinder (312), the fixed end of the telescopic cylinder (312) is rotatably connected to the outside of the first side wall (120), the output end of the telescopic cylinder (312) is rotationally connected to the first connecting member (320), and the first connecting member (320) is fixedly connected to the area near the lower end of the door body (200).

3. The film rewinding device according to claim 2, characterized in that: The first side wall (120) includes a first support portion (121) extending downward to the bottom of the transmission chamber, and the door body (200) includes a door body support portion (220) extending downward to the bottom of the transmission chamber. The moving track is formed by a first arc-shaped hole (1211) opened on the first support portion (121). The output end of the telescopic cylinder (312) passes through the first arc-shaped hole (1211) and is rotatably connected to the first connecting member (320) and is movable along the first arc-shaped hole (1211). The first connecting member (320) is fixedly connected to the door body support portion (220).

4. The film rewinding device according to claim 3, characterized in that: The first connecting member (320) is rotatably connected to the first supporting portion (121).

5. The film rewinding device according to claim 1, characterized in that: The damping mechanism (400) is swingably connected to the outside of the second side wall (130) opposite to the first side wall (120), and the damping mechanism (400) includes a gas spring (410) and a second connecting member (420); The fixed end of the gas spring (410) is swingably connected to the outside of the second side wall (130), and the second connecting member (420) is used to rotationally connect the movable end of the gas spring (410) to the area near the lower end of the door body (200), and the second connecting member (420) is fixedly connected to the door body (200).

6. The film rewinding device according to claim 5, characterized in that: The second side wall (130) includes a second support portion (131) extending downward to the bottom of the transmission chamber, and the door body (200) includes a door body support portion (220) extending downward to the bottom of the transmission chamber. The second support portion (131) is provided with a second arc-shaped hole (1311). The movable end of the gas spring (410) passes through the second arc-shaped hole (1311) and is rotatably connected to the second connecting member (420), and is movable along the second arc-shaped hole (1311). The second connecting member (420) is rotatably connected to the second support portion (131).

7. The film rewinding device according to claim 1, characterized in that: The film rewinding device further comprises a stopping mechanism (500), which is used to abut against an area near the lower portion of the door body (200) when the door body (200) closes the opening (110) to lock the door body (200).

8. The film rewinding device according to claim 7, characterized in that: A stop block (210) is provided on one side of the door body (200) close to its own turning axis, and the stop block (210) has a first stop plate surface (211) and a second stop plate surface (212), the first stop plate surface (211) is perpendicular to the door body (200), and the first stop plate surface (211) and the second stop plate surface (212) are arranged perpendicularly; The stop mechanism (500) is arranged below the cavity (100), and comprises a stop cylinder (510) and a stop protrusion (520). The stop cylinder (510) is used to drive the stop protrusion (520) to rise when the door body (200) closes the opening (110), and the stop protrusion (520) abuts against the first stop plate surface (211) and the second stop plate surface (212). Alternatively, the stop mechanism (500) is arranged below the cavity (100), and the stop mechanism (500) includes a first stop cylinder, a second stop cylinder, a first stop protrusion and a second stop protrusion, the first stop cylinder is used to drive the first stop protrusion to rise when the door body (200) closes the opening (110), and the first stop protrusion abuts against the first stop plate surface (211), and the second stop cylinder is used to drive the second stop protrusion to rise when the door body (200) closes the opening (110), and the second stop protrusion abuts against the second stop plate surface (212).

9. A semiconductor process equipment comprising a controller (610) and the wafer flipping device according to any one of claims 1 to 8, characterized in that: The film rewinding device further comprises a limit switch (630), the servo drive assembly (310) comprises a servo driver (313) and a servo motor (311) connected by signals, the controller (610) is used to send a signal to the servo driver (313) to flip the door body (200), the limit switch (630) is used to detect whether the servo motor (311) is at an origin position, and the servo driver (313) is used to receive the signal sent by the controller (610) to flip the door body (200) and, when detecting that the servo motor (311) is at an origin position according to the signal from the limit switch (630), control the servo motor (311) to drive the door body (200) to flip; And / or, the film rewinding device further comprises a proximity switch (640), the proximity switch (640) being used to detect whether the door body (200) is fully closed, and the controller (610) being used to control the servo drive component (310) to be closed and enabled when a signal indicating that the door body (200) is fully closed is detected by the proximity switch (640); And / or, the film rewinding device further comprises a magnetic switch (650), the magnetic switch (650) being used to detect whether the piston of the stop cylinder (510) has retracted to a certain position, and the controller (610) being used to control the door body (200) to flip when the piston has retracted to a certain position signal detected by the magnetic switch (650); And / or, the film rewinding device further comprises a solenoid valve (660), and the solenoid valve (660) is used to control the extension and retraction speed of the stop cylinder (510) according to the control signal of the controller (610).

10. A method for controlling an opening and closing door, applied to the semiconductor process equipment according to claim 9, characterized in that: The control method includes: Detect the position status of the door; When the door body is in an open state and needs to be switched to a closed state, the controller controls the driving mechanism to drive the door body to perform a closing action; Determine whether the door has reached the first target position, the driving speed of the drive mechanism, and whether there is a signal from the proximity switch to determine whether the door has been fully closed; When the door body is fully closed, the controller controls the stop mechanism to lock the door body so that the door body is in a fully closed state; When the door body is in a closed state and needs to be switched to an open state, the controller controls the locking mechanism to release the lock on the door body; When the door is unlocked, the controller controls the driving mechanism to drive the door to open. Determining whether the door body reaches a second target position; When the door body reaches the second target position, the door body is in a fully open state.

Images