Galvanometer calibration method and device and computer readable storage medium

Abstract

The application discloses a galvanometer calibration method and device and a computer readable storage medium. The method comprises the following steps: acquiring a plurality of reference coordinates of a galvanometer and actual measurement coordinates corresponding to the reference coordinates, wherein the reference coordinates are distributed in a grid shape; determining compensation values corresponding to adjacent coordinates in the actual measurement coordinates according to coordinate values of the actual measurement coordinates and coordinate values of the reference coordinates, wherein the compensation values comprise horizontal coordinate compensation values and vertical coordinate compensation values; generating a compensation curve according to the compensation values; and calibrating the galvanometer according to the compensation curve. The application improves the efficiency of galvanometer calibration.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of galvanometer calibration, and in particular to a galvanometer calibration method and device and a computer readable storage medium. BACKGROUND

[0002] The main galvanometer calibration method at present is box calibration, which is mainly used for calibrating the pillow-shaped distortion, barrel-shaped distortion and mechanical error caused by optical deflection. Because of the optical, mechanical and electrical system error, some high-end process application requirements cannot be met. After galvanometer calibration, a secondary calibration is needed by using the grid calibration method, which is complicated in calibration times and low in galvanometer calibration efficiency. SUMMARY

[0003] Embodiments of the present application provide a galvanometer calibration method, device and computer readable storage medium, aiming to solve the technical problem of how to improve the efficiency of galvanometer calibration.

[0004] The present application provides a galvanometer calibration method, which comprises the following steps:

[0005] Obtain a plurality of reference coordinates of a galvanometer and measured coordinates corresponding to the reference coordinates, wherein the reference coordinates are distributed in a grid shape;

[0006] Determine a compensation value corresponding to adjacent coordinates in the measured coordinates according to coordinate values of the measured coordinates and coordinate values of the reference coordinates, wherein the compensation value comprises a horizontal coordinate compensation value and a vertical coordinate compensation value;

[0007] Generate a compensation curve according to the compensation value;

[0008] Calibrate the galvanometer according to the compensation curve.

[0009] In an embodiment, the step of determining the compensation value corresponding to the adjacent coordinates in the measured coordinates according to the coordinate values of the measured coordinates and the coordinate values of the reference coordinates comprises:

[0010] Obtain a reference distance between adjacent coordinates in the reference coordinates, and obtain an actual distance between adjacent coordinates in the measured coordinates corresponding to the reference distance;

[0011] Compare the actual distance with the reference distance to obtain a difference value between the actual distance and the reference distance;

[0012] Determine the compensation value corresponding to the adjacent coordinates in the measured coordinates according to the difference value.

[0013] In an embodiment, the step of obtaining a plurality of reference coordinates of a galvanometer and measured coordinates corresponding to the reference coordinates comprises:

[0014] Place a mark grid plate on an electrically controlled motion X / Y platform, each area on the mark grid plate corresponds to a mark coordinate;

[0015] Control a galvanometer to emit laser according to a control parameter corresponding to the reference coordinate, to form a laser spot on the mark grid plate;

[0016] Determine a coordinate position of the laser spot on the mark grid plate, and take the coordinate position as the measured coordinate corresponding to the reference coordinate.

[0017] In an embodiment, the step of determining the coordinate position of the laser spot on the mark grid plate and taking the coordinate position as the measured coordinate corresponding to the reference coordinate comprises:

[0018] Obtain an image of the mark grid plate through an image acquisition device;

[0019] Identify the image, and determine the coordinate position of the laser spot on the mark grid plate according to the identification result;

[0020] Take the coordinate position as the measured coordinate corresponding to the reference coordinate.

[0021] In an embodiment, the step of identifying the image and determining the coordinate position of the laser spot on the mark grid plate according to the identification result comprises:

[0022] Identify whether there is a laser spot feature in the image;

[0023] When the image has the laser spot feature, obtain a target position corresponding to the laser spot feature in the image;

[0024] Obtain the coordinate position corresponding to the target position on the mark grid plate.

[0025] In an embodiment, the step of obtaining the coordinate position corresponding to the target position on the mark grid plate comprises:

[0026] Obtain a target coordinate corresponding to the target position in the image, each position in the image corresponds to a preset coordinate;

[0027] Take the target coordinate as the coordinate position corresponding to the target position on the mark grid plate.

[0028] After the step of identifying the laser spot feature in the image, the method further comprises:

[0029] When the image does not have the laser spot feature, output prompt information of an adjustment device.

[0030] The embodiment of the present application also provides a galvanometer calibration device, which comprises a memory, a processor and a computer program stored on the memory and executable on the processor, and the processor implements each step of the galvanometer calibration method when executing the computer program.

[0031] The embodiment of the present application also provides a computer readable storage medium, which stores a computer program, and each step of the galvanometer calibration method is implemented when the processor executes the computer program.

[0032] In the technical scheme of the embodiment, the galvanometer calibration device acquires a plurality of reference coordinates of the galvanometer and measured coordinates corresponding to the reference coordinates, wherein the reference coordinates are distributed in a grid shape; determines compensation values corresponding to adjacent coordinates in the measured coordinates according to coordinate values of the measured coordinates and coordinate values of the reference coordinates, the compensation values comprising horizontal coordinate compensation values and vertical coordinate compensation values; generates a compensation curve according to the compensation values; and calibrates the galvanometer according to the compensation curve. Since the galvanometer calibration device acquires the grid-shaped reference coordinates for calibration, compensation values of coordinates of a plurality of measured positions can be obtained at one time, thereby realizing nonlinear calibration. Compared with the conventional technical scheme, the conventional technical scheme needs to be calibrated again in a grid calibration mode after box calibration, and the galvanometer calibration can be realized through one calibration process, thereby improving the efficiency of the galvanometer calibration. BRIEF DESCRIPTION OF DRAWINGS

[0033] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the drawings needed in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative effort.

[0034] Figure 1 The hardware architecture of the galvanometer calibration device according to the embodiment of the present application is shown in the figure;

[0035] Figure 2 The flowchart of the first embodiment of the galvanometer calibration method according to the present application is shown in the figure;

[0036] Figure 3 The detailed flowchart of step S30 of the second embodiment of the galvanometer calibration method according to the present application is shown in the figure;

[0037] Figure 4 The detailed flowchart of step S20 of the third embodiment of the galvanometer calibration method according to the present application is shown in the figure;

[0038] Figure 5For the fourth embodiment of the mirror calibration method of the present application, the detailed process of step S10 is shown in Figure 10.

[0039] Figure 6 For the fourth embodiment of the mirror calibration method of the present application, the detailed process of step S10 is shown in Figure 10. DETAILED DESCRIPTION

[0040] In order to better understand the above technical solutions, the exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided to enable a more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.

[0041] The main solution of the present application is that the mirror calibration device obtains a plurality of reference coordinates of the mirror and a plurality of measured coordinates corresponding to the reference coordinates, wherein the reference coordinates are distributed in a grid shape; determines a compensation value corresponding to adjacent coordinates in the measured coordinates according to coordinate values of the measured coordinates and coordinate values of the reference coordinates, the compensation value including a horizontal coordinate compensation value and a vertical coordinate compensation value; generates a compensation curve according to the compensation value; and calibrates the mirror according to the compensation curve.

[0042] Since the mirror calibration device obtains the grid-shaped reference coordinates for calibration, a plurality of compensation values of the coordinates of the measured positions can be obtained at one time, thereby realizing nonlinear calibration. Compared with conventional technical means, the conventional technical means needs to be calibrated twice in a grid calibration manner after box calibration. The present application can realize mirror calibration through one calibration process, thereby improving the efficiency of mirror calibration.

[0043] As an implementation manner, the mirror calibration device can be as shown in Figure 11. Figure 1 .

[0044] The embodiment scheme of the present application relates to a mirror calibration device, which includes a processor 101 such as a CPU, a memory 102, and a communication bus 103. The communication bus 103 is used to realize the connection and communication between these components.

[0045] The memory 102 can be a high-speed RAM memory or a stable memory (non-volatile memory) such as a disk memory. As a computer readable storage medium, the memory 103 can include a detection program. Figure 1 The processor 101 can be used to call the detection program stored in the memory 102 and perform the following operations:

[0046] Obtaining a plurality of reference coordinates of the galvanometer and a plurality of measured coordinates corresponding to the reference coordinates, wherein the reference coordinates are distributed in a grid shape;

[0047] Determining compensation values corresponding to adjacent coordinates in the measured coordinates according to coordinate values of the measured coordinates and coordinate values of the reference coordinates, wherein the compensation values include horizontal coordinate compensation values and vertical coordinate compensation values;

[0048] Generating a compensation curve according to the compensation values;

[0049] Calibrating the galvanometer according to the compensation curve.

[0050] In an embodiment, the processor 101 can be configured to call a detection program stored in the memory 102 and perform the following operations:

[0051] Determining a calibration point coordinate in the measured target, wherein the measured target includes calibration point coordinates and non-calibration point coordinates, and the calibration point coordinates do not correspond to the compensation values, and when the target calibration point coordinate is determined, the non-calibration point coordinates correspond to the compensation values one by one;

[0052] Taking the calibration point coordinate as a calibration starting point, calibrating the galvanometer according to the compensation curve.

[0053] In an embodiment, the processor 101 can be configured to call a detection program stored in the memory 102 and perform the following operations:

[0054] Obtaining a reference distance between adjacent coordinates in the reference coordinates, and obtaining an actual distance between adjacent coordinates in the measured coordinates corresponding to the reference distance;

[0055] Comparing the actual distance with the reference distance to obtain a difference value between the actual distance and the reference distance;

[0056] Determining compensation values corresponding to adjacent coordinates in the measured coordinates according to the difference value.

[0057] In an embodiment, the processor 101 can be configured to call a detection program stored in the memory 102 and perform the following operations:

[0058] Placing an identification grid plate on an electrically controlled motion X / Y platform, wherein each region on the identification grid plate corresponds to an identification coordinate;

[0059] Controlling the galvanometer to emit laser light according to control parameters corresponding to the reference coordinates, so as to form a laser spot on the identification grid plate;

[0060] Determining a coordinate position of the laser spot on the identification grid plate, and taking the coordinate position as the measured coordinate corresponding to the reference coordinate.

[0061] In an embodiment, the processor 101 can be configured to invoke a detection program stored in the memory 102, and perform the following operations:

[0062] acquire an image of the identification grid board through an image acquisition device;

[0063] identify the image, and determine the coordinate position of the laser spot on the identification grid board according to the identification result;

[0064] take the coordinate position as the measured coordinate corresponding to the reference coordinate.

[0065] In an embodiment, the processor 101 can be configured to invoke a detection program stored in the memory 102, and perform the following operations:

[0066] identify whether a laser spot feature exists in the image;

[0067] when the image has the laser spot feature, acquire a target position corresponding to the laser spot feature in the image;

[0068] acquire the coordinate position corresponding to the target position on the identification grid board.

[0069] In an embodiment, the processor 101 can be configured to invoke a detection program stored in the memory 102, and perform the following operations:

[0070] the step of acquiring the coordinate position corresponding to the target position on the identification grid board comprises:

[0071] acquiring a target coordinate corresponding to the target position in the image, each position in the image corresponding to a preset coordinate;

[0072] taking the target coordinate as the coordinate position corresponding to the target position on the identification grid board.

[0073] In an embodiment, the processor 101 can be configured to invoke a detection program stored in the memory 102, and perform the following operations:

[0074] when the image does not have the laser spot feature, output prompt information of an adjustment device.

[0075] In the technical scheme of the embodiment, the galvanometer calibration device acquires a plurality of reference coordinates of the galvanometer and measured coordinates corresponding to the reference coordinates, wherein the reference coordinates are distributed in a grid shape; compensation values corresponding to adjacent coordinates in the measured coordinates are determined according to coordinate values of the measured coordinates and coordinate values of the reference coordinates, the compensation values including horizontal coordinate compensation values and vertical coordinate compensation values; a compensation curve is generated according to the compensation values; and the galvanometer is calibrated according to the compensation curve. Since the galvanometer calibration device acquires the reference coordinates distributed in a grid shape for calibration, compensation values of coordinates of a plurality of measured positions can be obtained at one time, thereby realizing nonlinear calibration. Compared with the conventional technical means, the conventional technical means needs to be calibrated again in a grid calibration manner after box calibration, and the galvanometer calibration can be realized through one calibration process, thereby improving the efficiency of galvanometer calibration.

[0076] In order to better understand the above technical scheme, the above technical scheme will be described in detail below in combination with the drawings of the specification and specific embodiments.

[0077] Reference Figure 2 , Figure 2 The first embodiment of the galvanometer calibration method of the application comprises the following steps:

[0078] In step S10, a plurality of reference coordinates of the galvanometer and measured coordinates corresponding to the reference coordinates are acquired, wherein the reference coordinates are distributed in a grid shape.

[0079] In the embodiment, the reference coordinates are standard coordinates for generating control parameters of the galvanometer, the control parameters are used to control the galvanometer to emit laser, and the measured coordinates are actual coordinates of a region where a laser spot is located when the galvanometer is controlled to emit laser, wherein an instruction coordinate carried in the control parameters is the reference coordinate. Further, the reference coordinates are distributed in a grid shape, so that the coordinate distribution is regular, the generation of a calibration formula is facilitated, and the complexity of galvanometer calibration is reduced.

[0080] In step S20, compensation values corresponding to adjacent coordinates in the measured coordinates are determined according to coordinate values of the measured coordinates and coordinate values of the reference coordinates, the compensation values including horizontal coordinate compensation values and vertical coordinate compensation values.

[0081] In the embodiment, since the reference coordinates are distributed in a grid shape, the measured coordinates corresponding to the reference coordinates are also distributed in a grid shape, and the adjacent coordinates in the measured coordinates refer to critical measured coordinates in the horizontal and vertical directions of the measured coordinates; and the compensation values refer to values determined based on the coordinate relationship between the reference coordinates and the measured coordinates, and specifically, the compensation values include compensation values commonly corresponding to two adjacent coordinates in the measured coordinates, wherein the compensation values include horizontal compensation values and vertical compensation values.

[0082] Optionally, for the acquisition of compensation value, a laser is used to mark a grid on the surface of the material, and a coordinate system is marked for measurement, to obtain a marked grid plate. The marked plate requires high levelness, and the flatness is less than 50μm. The grid plate includes horizontal lines and vertical lines of the same scale grid, the number of which is N and M respectively, and N and M are both odd numbers, and the total number of horizontal lines or vertical lines is at least 11. The middle point of the grid is taken as the origin, which is defined as the coordinate origin, and the line segment connecting the two end points of the horizontal line passing through the origin is defined as the X direction, and the XY coordinate system is defined accordingly. According to the order from left to right, and then from top to bottom, the coordinates of each point are measured. The measurement can be performed by an external measuring instrument. Note that the marked grid plate is hard and not easy to deform, and the marked grid plate should be measured in a horizontal manner, so that movement or shaking will not occur during measurement. The center of the grid is taken as the coordinate origin. The line segment connecting the left and right end points of the horizontal line passing through the grid origin is taken as the X axis, and the direction is to the right.

[0083] The coaxial CCD or off-axis CCD in the galvanometer calibration device is integrated in the scanning galvanometer module, and the grid marking plate is placed on the electrically controlled X / Y axis. The levelness of the plane of the network marking plate and the X / Y axis movement surface is less than 30μm. The levelness of the mechanical lower plane of the galvanometer scanning module and the grid marking plate is less than 30μm. The scanning sequence is measured according to the principle of first from left to right, and then from top to bottom. The total number of measured coordinate points is N*M points. The grid focal point is captured by the CCD, wherein the shape of the grid focal point is not limited to cross, T-shaped and right-angled shape. When detecting the grid focal point, the coordinate value of the grid focal point (intersection point) is obtained. The center of the grid is taken as the coordinate origin. The line segment connecting the left and right end points of the horizontal line passing through the grid origin is taken as the X axis, and the direction is to the right. After the measurement is completed, the measured coordinate data is derived and imported into the galvanometer module of the galvanometer calibration device.

[0084] The compensation correction calculation of the galvanometer module in the galvanometer calibration device includes: performing universal calibration of the grid on the galvanometer amplitude surface. The current error mainly comes from the change of the galvanometer swing angle corresponding to the amplitude length, which has continuity. In the measured coordinate data, M X coordinate data in the same row are obtained in the order from left to right, that is, in the horizontal direction, or N Y coordinate data in the same column are obtained in the order from top to bottom, that is, in the vertical direction. According to the measured value-reference value=error value, the value is taken as the longitudinal coordinate. The corresponding standard coordinate value is taken as the transverse coordinate, and the error value is taken as the longitudinal coordinate. The correlation term is established.

[0085] The adjacent interval series is calculated, wherein the horizontal series, horizontal interval=left value-right value, horizontal interval error=ABS(horizontal interval)-standard row interval; the vertical series, vertical interval=upper value-lower value, vertical interval error=ABS(vertical interval)-standard column interval. The values obtained in the above manner are taken as the compensation values.

[0086] The determination flowchart of the compensation value can be referred toFigure 3 .

[0087] Step S30, generating a compensation curve according to the compensation value.

[0088] In the embodiment, the median sequence of the compensation value is taken as the abscissa, and the pitch error is taken as the Y coordinate. The row data (abscissa compensation value) or the column data (ordinate compensation value) in the compensation value is fitted, the fitting method is a polynomial fitting method, and the best standard is selected between 2nd to 6th power with the least mean square error. The best fitting curve equation can be automatically obtained, wherein a total of N+M fitting curves are obtained, and each fitting curve is used to calibrate the control parameter corresponding to the measured coordinate of each row or each column of the galvanometer. The corresponding additional compensation difference under the corresponding standard value is calculated through the fitting polynomial. Further, for the calculation of the additional compensation value, the median sequence coordinate is taken as the abscissa, and the nonlinear error calculated is taken as the ordinate. The curve fitting of the embodiment has a certain error elimination effect. The compensation value of the error value minus the corresponding additional compensation difference is taken as the compensation value of the coordinate in the horizontal direction. The compensation value of the error value plus the corresponding additional compensation difference is taken as the compensation value of the coordinate in the vertical direction.

[0089] Step S40, calibrating the galvanometer according to the compensation curve.

[0090] In the technical scheme of the embodiment, the galvanometer calibration device obtains the grid-shaped reference coordinates for calibration, and the compensation values of the coordinates of multiple measured positions can be obtained at one time, so that nonlinear calibration is realized. Compared with the conventional technical means, the conventional technical means needs to be calibrated twice in the form of grid calibration after box calibration. The galvanometer calibration can be realized through one calibration process, and the efficiency of the galvanometer calibration is improved.

[0091] Referring to Figure 4 , Figure 4 The second embodiment of the galvanometer calibration method is based on the first embodiment, and step S30 comprises:

[0092] Step S31, determining a calibration point coordinate in the measured target, the measured target comprising the calibration point coordinate and the non-calibration point coordinate, and the calibration point coordinate does not need to correspond to the compensation value. When the target calibration point coordinate is determined, the non-calibration point coordinate corresponds to the compensation value one by one.

[0093] In the embodiment, after the calibration point coordinate is determined, it does not need to be compensated, and the compensation value corresponding to the adjacent coordinates of the calibration point coordinate is used for the adjacent coordinates. Similarly, the remaining non-calibration point coordinates have one-to-one corresponding compensation values. It is easy to understand that the non-calibration point coordinates are calibrated by the corresponding compensation values.

[0094] Step S32, according to the compensation curve, calibrating the galvanometer with the calibration point coordinate as a calibration starting point.

[0095] In the technical scheme of the embodiment, after the calibration point coordinate is determined, the rest of the non-calibration point coordinates have independent compensation values, and the non-linear calibration is realized, which is more targeted than linear calibration.

[0096] Referring to Figure 5 , Figure 5 The third embodiment of the galvanometer calibration method is based on any one of the first to second embodiments, and step S20 includes:

[0097] Step S21, obtaining the reference interval of adjacent coordinates in the reference coordinates, and obtaining the actual interval of adjacent coordinates in the measured coordinates corresponding to the reference interval.

[0098] Step S22, comparing the actual interval with the reference interval to obtain the difference between the actual interval and the reference interval.

[0099] Step S23, determining the compensation value corresponding to the adjacent coordinates in the measured coordinates according to the difference.

[0100] In the technical scheme of the embodiment, since the measured coordinates correspond to calibration coordinates, the compensation value can be determined by comparing the interval between two measured coordinates with the interval between two reference coordinates, and the compensation value changes based on the difference between the intervals between two coordinates, which is a non-linear change. The compensation value determined in this way can realize non-linear calibration during galvanometer calibration.

[0101] Referring to Figure 6 , Figure 6 The fourth embodiment of the galvanometer calibration method is based on any one of the first to third embodiments, and step S10 includes:

[0102] Step S11, placing an identification grid plate on the electrically controlled motion X / Y platform, each region on the identification grid plate corresponding to an identification coordinate.

[0103] Step S12, controlling the galvanometer to emit laser light according to the control parameters corresponding to the reference coordinates, to form a laser spot on the identification grid plate.

[0104] Step S13, determining the coordinate position of the laser spot on the identification grid plate, and taking the coordinate position as the measured coordinate corresponding to the reference coordinate.

[0105] Optionally, an image of the identification grid plate is acquired by the image acquisition device; the image is recognized, and the coordinate position of the laser spot on the identification grid plate is determined according to the recognition result; and the coordinate position is taken as the measured coordinate corresponding to the reference coordinate.

[0106] Optionally, whether the laser spot feature exists in the image is recognized; when the laser spot feature exists in the image, a target position corresponding to the laser spot feature in the image is acquired; and the coordinate position corresponding to the target position on the identification grid plate is acquired.

[0107] In the technical scheme of the embodiment, the reference coordinate is input, the interface controls the galvanometer to emit laser through the galvanometer calibration device, and thus the measured coordinate corresponding to the reference coordinate is obtained, and the difficulty of data acquisition is reduced.

[0108] To achieve the above object, the embodiment of the present application further provides a galvanometer calibration device, which comprises a memory, a processor and a computer program stored in the memory and executable on the processor, and the processor implements each step of the galvanometer calibration method when executing the computer program.

[0109] To achieve the above object, the embodiment of the present application further provides a computer readable storage medium, which stores a computer program, and each step of the galvanometer calibration method is implemented when the computer program is executed by a processor.

[0110] Those skilled in the art should understand that the embodiments of the present application can be provided as a method, a system or a control program product for driving and controlling a transformer. Therefore, the present application can adopt a completely hardware embodiment, a completely software embodiment or an embodiment combining software and hardware aspects. Moreover, the present application can adopt a form of a control program product for driving and controlling a transformer implemented on one or more computer usable storage media (including but not limited to disk memory, CD-ROM, optical memory, etc.) containing computer usable program codes.

[0111] The present application is described with reference to flowcharts and / or block diagrams of a method, an apparatus (system) and a control program product for driving and controlling a transformer according to embodiments of the present application. It should be understood that each flow and / or block in the flowcharts and / or block diagrams and the combination of the flows and / or blocks in the flowcharts and / or block diagrams can be implemented by control program instructions for driving and controlling a transformer. These control program instructions for driving and controlling a transformer can be provided to a processor of a general purpose computer, a special purpose computer, an embedded processor or other programmable data processing device to produce a machine, so that the instructions executed by the processor of the computer or other programmable data processing device produce a device for implementing the functions specified in the flowcharts and / or block diagrams. Figure 1One or more processes and / or boxes Figure 1 A device that provides the functions specified in one or more boxes.

[0112] The control program instructions for these drive control converters may also be stored in a computer-readable storage medium that can instruct a computer or other programmable data processing device to operate in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1 One or more processes and / or boxes Figure 1 The function specified in one or more boxes.

[0113] The control program instructions for these drive control converters can also be loaded onto a computer or other programmable data processing device, causing a series of operational steps to be executed on the computer or other programmable device to produce a computer-implemented process, thereby providing instructions that execute on the computer or other programmable device for implementing the process. Figure 1 One or more processes and / or boxes Figure 1 The steps of the function specified in one or more boxes.

[0114] It should be noted that any reference signs placed between parentheses in the claims should not be construed as limiting the claims. The word "comprising" does not exclude the presence of components or steps not listed in the claims. The word "a" or "an" preceding a component does not exclude the presence of a plurality of such components. The invention can be implemented by means of hardware comprising several different components and by means of a suitably programmed computer. In a unit claim enumerating several means, several of these means may be embodied by the same item of hardware. The use of the words first, second, and third, etc., does not indicate any order. These words can be interpreted as names.

[0115] Although preferred embodiments of the invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including both the preferred embodiments and all changes and modifications falling within the scope of the invention.

[0116] Obviously, those skilled in the art can make various modifications and variations to this invention without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this invention and their equivalents, this invention also intends to include these modifications and variations.

Claims

1. A galvanometer calibration method, characterized in that, The galvanometer calibration method includes the following steps: Multiple reference coordinates of the galvanometer and the corresponding measured coordinates are obtained. The reference coordinates are distributed in a grid pattern. The reference coordinates are standard coordinates used to generate the control parameters of the galvanometer. The command coordinates carried in the control parameters are the reference coordinates. Obtain the reference distance between adjacent coordinates in the reference coordinates, and obtain the actual distance between adjacent coordinates in the measured coordinates corresponding to the reference distance, wherein the adjacent coordinates in the measured coordinates refer to the measured coordinates that are adjacent to the measured coordinates in the horizontal and vertical directions; The actual distance is compared with the reference distance to obtain the difference between the actual distance and the reference distance; The compensation value corresponding to adjacent coordinates in the measured coordinates is determined based on the difference. The compensation value includes a horizontal compensation value and a vertical compensation value. Since the measured coordinates correspond to reference coordinates, the corresponding compensation value is determined by comparing the distance between each pair of measured coordinates with the distance between each pair of reference coordinates. The compensation value changes based on the different distances between each pair of coordinates and is a non-linear change. Using the median sequence of the compensation values ​​as the abscissa and the spacing error as the ordinate, the compensation values ​​on the abscissa or the compensation values ​​on the ordinate are fitted to generate a compensation curve. The galvanometer is calibrated according to the compensation curve.

2. The galvanometer calibration method as described in claim 1, characterized in that, The step of calibrating the galvanometer according to the compensation curve includes: A calibration point coordinate is determined in the measured target. The measured target includes calibration point coordinates and non-calibration point coordinates. The calibration point coordinates do not need to correspond to the compensation value. When the target calibration point coordinates are determined, the non-calibration point coordinates correspond one-to-one with the compensation value. Using the coordinates of the calibration point as the calibration starting point, the galvanometer is calibrated according to the compensation curve.

3. The galvanometer calibration method as described in claim 1, characterized in that, The steps of obtaining multiple reference coordinates of the galvanometer and the corresponding measured coordinates of the reference coordinates include: A marker grid plate is placed on an electrically controlled motion X / Y platform, and each area on the marker grid plate corresponds to a marker coordinate. The laser emitted from the galvanometer is controlled according to the control parameters corresponding to the reference coordinates to form a laser spot on the marking grid plate; The coordinate position of the laser spot on the marking grid plate is determined, and the coordinate position is used as the measured coordinate corresponding to the reference coordinate.

4. The galvanometer calibration method as described in claim 3, characterized in that, The step of determining the coordinate position of the laser spot on the marking grid plate and using the coordinate position as the measured coordinate corresponding to the reference coordinate includes: The image of the marking grid plate is acquired using an image acquisition device; The image is identified, and the coordinate position of the laser spot on the marking grid plate is determined based on the identification result; The coordinate position is taken as the measured coordinate corresponding to the reference coordinate.

5. The galvanometer calibration method as described in claim 4, characterized in that, The step of identifying the image and determining the coordinate position of the laser spot on the marking grid plate based on the identification result includes: Identify whether laser spot features exist in the image; When the image contains the laser spot feature, obtain the target position corresponding to the laser spot feature in the image; Obtain the coordinate position of the target location corresponding to the marking grid plate.

6. The galvanometer calibration method as described in claim 5, characterized in that, The step of obtaining the coordinate position of the target position on the marker grid plate includes: Obtain the target coordinates corresponding to the target location in the image, where each location in the image corresponds to a preset coordinate; The target coordinates are used as the coordinate positions corresponding to the target location on the marking grid plate.

7. The galvanometer calibration method as described in claim 5, characterized in that, After the step of identifying laser spot features in the image, the method further includes: If the image does not contain the laser spot feature, an adjustment device prompt message will be output.

8. A galvanometer calibration device, characterized in that, The galvanometer calibration device includes: a memory, a processor, and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, it implements the steps of the galvanometer calibration method as described in any one of claims 1 to 7.

9. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program that, when executed by a processor, implements the steps of the galvanometer calibration method as described in any one of claims 1 to 7.

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