Magnetic levitation system, handling system and method for transporting carrier

Abstract

A magnetic levitation system (100) for transporting a carrier (10) in a transport direction (T) is described. The magnetic levitation system comprises: at least one magnetic bearing (120) having a first actuator (121) with a U-shaped electromagnet for holding the carrier (10) in a contactless manner in a carrier transport space (15); and a drive unit (130) having a second actuator (131) for moving the carrier (10) in the transport direction. The second actuator (131) or a projection of the second actuator along the transport direction (T) is partially surrounded by the U-shaped electromagnet.

Description

Technical Field

[0001] Embodiments of the present disclosure relate to apparatus and methods for transporting carriers, particularly carriers used during processing of large area substrates. More specifically, embodiments of the present disclosure relate to apparatus and methods for non-contact transport of carriers, which may be used in processing systems for vertical substrate processing, such as depositing materials on large area substrates for display production. In particular, embodiments of the present disclosure relate to magnetic levitation systems and methods for transporting carriers in vacuum processing systems. Background Art

[0002] Techniques for depositing layers on substrates include, for example, sputtering deposition, physical vapor deposition (PVD), chemical vapor deposition (CVD), and thermal evaporation. Coated substrates can be used in several applications and in several technical fields. For example, coated substrates can be used in the field of display devices. Display devices can be used to manufacture television screens, computer displays, mobile phones, other handheld devices, etc. to display information. Typically, displays are produced by coating substrates with layer stacks of different materials.

[0003] For depositing layer stacks, an in-line processing module arrangement may be used. An in-line processing system comprises a plurality of subsequent processing modules (such as a deposition module) and optionally additional processing modules (such as a cleaning module and / or an etching module), wherein processing aspects are subsequently performed in the processing modules, so that a plurality of substrates may be processed continuously or quasi-continuously in an in-line processing system.

[0004] The substrate may be carried by a carrier (i.e., a carrying device for carrying the substrate). The carrier is typically transported through the vacuum system using a transport system. The transport system may be configured to transport the carrier with the substrate positioned thereon along one or more transport paths. At least two transport paths may be arranged close to each other in the vacuum system, such as a first transport path for transporting the carrier in a forward direction and a second transport path for transporting the carrier in a return direction opposite to the forward direction.

[0005] The functionality of the display device typically depends on the coating thickness of the material, which must be within a predetermined range. In order to obtain a high-resolution display device, technical challenges regarding material deposition need to be mastered. In particular, it is challenging to accurately and smoothly transport substrate carriers and / or mask carriers through a vacuum system. For example, particle generation due to wear of moving parts may degrade the manufacturing process. Therefore, it is necessary to transport the carrier in the processing system while reducing or minimizing particle generation. In addition, the challenge is to provide a robust carrier transport system for high temperature vacuum environments, for example at low cost.

[0006]

[0006] Therefore, there is a continuing need for improved apparatus and methods for transporting carriers that overcome at least some of the problems of the prior art and to provide improved vacuum handling systems. Summary of the invention

[0007] In view of the above, a magnetic levitation system for transporting a carrier, a processing system for vertically processing a substrate and a method of transporting a carrier according to the independent claims are provided. Further aspects, advantages and features are apparent from the dependent claims, the description and the drawings.

[0008] According to one aspect of the present disclosure, a magnetic levitation system for transporting a carrier in a transport direction is provided. The magnetic levitation system comprises: at least one magnetic bearing, the at least one magnetic bearing having a first actuator with a U-shaped electromagnet for holding the carrier in a carrier transport space in a non-contact manner, the first actuator being arranged above or below the carrier transport space; and a drive unit having a second actuator for moving the carrier in the transport direction. The second actuator or a projection of the second actuator along the transport direction is partially surrounded by the U-shaped electromagnet.

[0009] According to another aspect of the present disclosure, a magnetic levitation system for transporting a carrier in a transport direction is provided. The magnetic levitation system comprises: at least one magnetic bearing, the at least one magnetic bearing having a first actuator for holding the carrier in a carrier transport space in a non-contact manner; and a drive unit having a second actuator for moving the carrier in the transport direction. Both the first actuator and the second actuator are centered above the carrier transport space. Alternatively, both the first actuator and the second actuator are centered below the carrier transport space. In particular, the center plane of the carrier transport space may intersect (centrally) with both the first actuator and the second actuator.

[0010] As used herein, "centered above the carrier transport space" may be understood to mean that the center of gravity G of the carrier is arranged below both the first actuator and the second actuator during carrier transport (i.e., when the carrier moves below the first actuator and below the second actuator).

[0011] According to another aspect of the present disclosure, a processing system for vertically processing a substrate is provided. The processing system includes at least one vacuum processing chamber, and the at least one vacuum processing chamber includes a processing device. Additionally, the processing system includes one or more magnetic suspension systems, and the one or more magnetic suspension systems are used to transport one or more carriers in a transport direction. The one or more magnetic suspension systems are configured according to any of the magnetic suspension systems described herein. In particular, the magnetic suspension system includes: at least one magnetic bearing, the at least one magnetic bearing having a first actuator with a U-shaped electromagnet, for contactlessly holding the carrier in a carrier transport space; and a drive unit, the drive unit having a second actuator, for moving the carrier in the transport direction. The second actuator or the projection of the second actuator along the transport direction is partially surrounded by the U-shaped electromagnet.

[0012] According to another aspect described herein, a magnetic levitation system for transporting a carrier in a transport direction is provided. The magnetic levitation system comprises: at least one magnetic bearing having a first actuator for holding the carrier in a carrier transport space in a non-contact manner; and a drive unit having a second actuator for moving the carrier in the transport direction. Both the first actuator and the second actuator are arranged above the carrier transport space, or alternatively, below the carrier transport space.

[0013] According to another aspect of the present disclosure, a method for transporting a carrier is provided. The method includes using at least one magnetic bearing having a first actuator with a U-shaped electromagnet to hold the carrier in a carrier transport space in a non-contact manner. The method further includes transporting the carrier in the transport direction using a drive unit having a second actuator, wherein the second actuator or a projection of the second actuator along the transport direction is partially surrounded by the U-shaped electromagnet.

[0014] According to another aspect of the present disclosure, a method for transporting a carrier is provided. The method includes using at least one magnetic bearing having a first actuator to hold the carrier in a carrier transport space in a non-contact manner. The method further includes using a drive unit having a second actuator to transport the carrier in the transport direction, wherein when the carrier moves under the first actuator and the second actuator, both the first actuator and the second actuator are arranged above the center of gravity of the carrier.

[0015] When the first actuator and the second actuator are centered above the center of gravity of the carrier, both the retaining force applied by the first actuator and the driving force applied by the second actuator can act on the carrier symmetrically relative to a vertical plane extending through the center of gravity of the carrier, thereby allowing smooth and stable carrier transportation and reducing carrier vibration.

[0016] Embodiments also relate to apparatus for performing the disclosed methods and include apparatus components for performing each described method aspect. These method aspects may be performed by means of hardware components, computers programmed by appropriate software, any combination of the two, or in any other manner. In addition, embodiments according to the present disclosure also relate to methods for operating the described apparatus and methods for manufacturing the described apparatus. The methods for operating the described apparatus include method aspects for performing each function of the apparatus. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to understand the above-mentioned features of the present disclosure in detail, a more detailed description of the present disclosure briefly summarized above can be obtained by reference to the embodiments. The accompanying drawings relate to the embodiments of the present disclosure and are described as follows:

[0018] Figure 1 shows a schematic cross-sectional view of a magnetic levitation system according to embodiments described herein;

[0019] Figure 2 shows a schematic top view of a carrier for a magnetic levitation system according to embodiments described herein;

[0020] Figure 3A shows a schematic cross-sectional view of a magnetic levitation system according to further embodiments described herein;

[0021] Figure 3B Shows Figure 3A Schematic top view of the magnetic levitation system;

[0022] Figure 4 shows a schematic cross-sectional view of a processing system for vertically processing a substrate according to embodiments described herein; and

[0023] Figure 5 A flow chart is shown for illustrating a method of transporting a carrier according to embodiments described herein. DETAILED DESCRIPTION

[0024] Reference will now be made in detail to various embodiments of the present disclosure, one or more examples of which are shown in the drawings. In the following description of the drawings, the same reference numerals refer to the same components. Only the differences relative to individual embodiments are described. Each example is provided in a manner to explain the present disclosure and is not intended to be a limitation of the present disclosure. In addition, features shown or described as part of one embodiment may be used on other embodiments or in combination with other embodiments to produce yet another embodiment. The specification is intended to include such modifications and variations.

[0025] For example, reference Figure 1 , describes a magnetic levitation system 100 according to the present disclosure for transporting a carrier 10 in a transport direction T. The transport direction T is perpendicular to Figure 1 Paper plane.

[0026] According to an embodiment that can be combined with any other embodiment described herein, the magnetic levitation system 100 comprises at least one magnetic bearing 120 having a first actuator 121 for contactlessly holding the carrier 10 in the carrier transport space 15. The carrier transport space 15 may be understood as a region in which the carrier is arranged during transport of the carrier along a transport path in a transport direction T. In particular, as Figure 1 As shown exemplarily, the carrier transport space may be a vertical carrier transport space having a height H extending in the vertical direction and a width W extending in the horizontal direction. For example, the aspect ratio H / W may be H / W ≥ 5, in particular H / W ≥ 10. In addition, the magnetic levitation system 100 includes a drive unit 130 having a second actuator 131 for moving the carrier 10 in the transport direction.

[0027] Both the first actuator 121 and the second actuator 131 may be arranged above the carrier transport space 15 or below the carrier transport space 15. In the embodiment described below, both the first actuator 121 of at least one magnetic bearing 120 and the second actuator 131 of at least one drive unit 130 are arranged above the carrier transport space 15.

[0028] Thus, embodiments of the magnetic levitation system 100 described herein are improved over conventional carrier transport devices, particularly with respect to accurately and smoothly transporting carriers in a high temperature vacuum environment. Additionally, embodiments described herein advantageously provide more robust contactless carrier transport at lower production costs than conventional carrier transport devices. In particular, embodiments of the magnetic levitation system as described herein are less sensitive to manufacturing tolerances, deformation, and thermal expansion. Additionally, advantageously, the magnetic levitation system is simpler to integrate into a chamber.

[0029] Before describing various additional embodiments of the present disclosure in more detail, some aspects regarding some terms used herein are explained.

[0030] In the present disclosure, a "magnetic levitation system" may be understood as a system configured to hold an object (e.g., a carrier) in a floating manner by using magnetic force. In the present disclosure, the term "levitating" or "levitation" refers to a state of an object (e.g., a carrier carrying a substrate or a mask) in which the weight of the object is carried by the magnetic force of a magnetic actuator without mechanical support. In some embodiments, the carrier may float without mechanical contact or support. On the other hand, moving or transporting an object refers to providing a driving force in a transport direction, such as a force in a direction different from the levitation force, wherein the object moves from one position to another different position, such as a different position along the transport direction. For example, a carrier carrying a substrate or a mask may be suspended, i.e., suspended by a force that counteracts gravity, and may move in a direction different from the direction parallel to gravity while being suspended.

[0031] Specifically, the first actuator 121 of the magnetic bearing may apply a vertical force to the carrier to counteract the gravity of the carrier, and the second actuator 131 of the driving unit may apply a horizontal force to the carrier to move the carrier to different positions in the transport direction T along the transport path.

[0032] In the present disclosure, the term "non-contact" may be understood in the sense that a weight (e.g., the weight of a carrier, in particular a carrier carrying a substrate or a mask) is not held by mechanical contact or mechanical force but is partially or completely held by magnetic force. In other words, the term "non-contact" used throughout the specification may be understood as using magnetic force rather than mechanical force (i.e., contact force) to hold a carrier in a suspended or floating state.

[0033] like Figure 1 Schematically shown, the carrier 10 is held contactlessly in the carrier transport space 15, in particular between an upper chamber wall and a lower chamber wall of the vacuum chamber 210. In particular, the upper chamber wall may be a ceiling of the vacuum chamber, and the lower chamber wall may be a bottom wall of the vacuum chamber 210.

[0034] In the present disclosure, a "carrier" may be understood as a carrier configured to hold a substrate, also referred to as a substrate carrier. For example, the carrier may be a substrate carrier for carrying a large area substrate. It should be understood that embodiments of the magnetic levitation system may also be used for other carrier types, such as a mask carrier. Therefore, additionally or alternatively, the carrier may be a carrier configured to carry a mask.

[0035] In the present disclosure, the term "substrate" may particularly encompass substantially non-flexible substrates, such as wafers, slices of transparent crystals (such as sapphire, etc.), or glass plates. However, the present disclosure is not limited thereto, and the term "substrate" may also encompass flexible substrates, such as coils or foils. The term "substantially non-flexible" should be understood to be distinguished from "flexible". In particular, a substantially non-flexible substrate may have a certain degree of flexibility, such as a glass plate with a thickness of 0.5 mm or less, wherein the flexibility of the substantially non-flexible substrate is small compared to a flexible substrate. According to embodiments described herein, the substrate may be made of any material suitable for material deposition. For example, the substrate may be made of a material selected from the group consisting of glass (e.g., soda-lime glass, borosilicate glass, etc.), metal, polymer, ceramic, compound material, carbon fiber material, or any other material or material combination that can be coated by a deposition process.

[0036] In this disclosure, the term "large area substrate" refers to a substrate having an area of ​​0.5 m 2 or larger, especially 1m 2 In some embodiments, the large area substrate may be a 4.5 generation substrate (which corresponds to about 0.67 m 2 substrate (0.73m×0.92m)), the 5th generation (which corresponds to about 1.4m 2 Substrate (1.1m×1.3m)), 7.5th generation (which corresponds to about 4.29m 2 Substrate (1.95m×2.2m)), 8.5th generation (which corresponds to about 5.7m 2 substrate (2.2m×2.5m)) or even the 10th generation (which corresponds to about 8.7m 2 Substrate (2.85m×3.05m)). Even higher generations (such as 11th and 12th generations) and corresponding substrate areas can be similarly realized. In addition, the substrate thickness can be from 0.1mm to 1.8mm, in particular about 0.9mm or less, such as 0.7mm or 0.5mm.

[0037] In the present disclosure, the term "transport direction T" may be understood as the direction in which the carrier is transported by the drive unit along the transport path. Typically, the transport direction may be a substantially horizontal direction.

[0038] In the present disclosure, a "magnetic bearing" may be understood as a bearing configured to hold or support an object (e.g., a carrier as described herein) in a contactless manner (i.e., without or substantially without physical contact). Thus, at least one magnetic bearing as described herein may be configured to generate a magnetic force acting on the carrier such that the carrier is contactlessly held at a predetermined distance from a base structure (e.g., an upper chamber wall). In particular, at least one magnetic bearing 120 may be configured to generate a magnetic force acting in a substantially vertical direction V such that the vertical width of the gap 122 between the first actuator 121 and the carrier 10 may be maintained substantially constant.

[0039] Some embodiments described herein relate to the concept of a "vertical direction". The vertical direction is considered to be a direction substantially parallel to the direction in which gravity extends. The vertical direction may deviate from the completely vertical (the latter being defined by gravity) by an angle of up to 15 degrees. In addition, some embodiments described herein may relate to the concept of a "lateral direction L". The lateral direction is understood to be distinct from the vertical direction. The lateral direction L may be perpendicular or substantially perpendicular to the completely vertical direction defined by gravity and may be perpendicular to the transport direction T.

[0040] In the present disclosure, the "first actuator" of at least one magnetic bearing may be understood as an active and controllable element of the magnetic bearing. In particular, the first actuator may include a controllable magnet, such as an electromagnet. The magnetic field of the first actuator may be actively controllable to maintain and / or adjust the distance between the first actuator and the carrier 10. In other words, the "first actuator" of at least one magnetic bearing may be understood as an element having a controllable and adjustable magnetic field to provide a magnetic levitation force acting on the carrier.

[0041] Therefore, the first actuator 121 is configured to hold the carrier in a non-contact manner. Figure 1 As shown exemplarily, the magnetic pairing 180 may be arranged at the carrier 10, in particular at the top portion of the carrier. The magnetic pairing 180 of the carrier may interact magnetically with the first actuator 121 of the at least one magnetic bearing 120. In particular, the magnetic pairing 180 may include one or more passive magnetic elements. In particular, the magnetic pairing 180 may be made of a magnetic material, such as a ferromagnetic material, for example a magnetic steel or a magnet.

[0042] In some implementations, an output parameter (such as a current applied to the first actuator 121) may be controlled according to an input parameter (such as a distance between the first actuator 121 and the carrier 10). For example, the distance may be measured by a distance sensor (e.g., Figure 1The width of the gap 122 indicated by the distance measurement may be determined, and the magnetic field strength of the first actuator 121 may be set according to the measured distance. In particular, the magnetic field strength may be increased in the case of a distance above a predetermined threshold, and the magnetic field strength may be reduced in the case of a distance below the threshold. The first actuator may be controlled by closed loop or feedback control.

[0043] In the present disclosure, a "drive unit" may be understood as a unit configured to move an object (e.g., a carrier as described herein) in a contactless manner in a transport direction. In particular, a drive unit as described herein may be configured to generate a magnetic force acting on the carrier in the transport direction. Thus, the drive unit may be a linear motor, in particular a synchronous linear motor. For example, the linear motor may be an iron core linear motor. Alternatively, the linear motor may be an ironless linear motor. An ironless linear motor may be advantageous for avoiding torsional moments on the carrier due to vertical forces caused by possible interaction of passive magnetic elements of the carrier with the iron core of the linear motor.

[0044] More specifically, if Figure 1 As shown exemplarily, the drive unit comprises a second actuator 131, which is configured for contactlessly moving the carrier in the transport direction. The second actuator may be a stator of a linear motor, in particular a stator of a synchronous linear motor. The second actuator 131 may comprise one or more magnets, such as electromagnets. Thus, the second actuator may be controllable to exert a moving force on the carrier in the transport direction. Figure 1 As shown by way of example, the drive partner 182 can be arranged at the carrier 10, in particular at the top portion of the carrier. The drive partner 182 of the carrier can interact magnetically with the second actuator 131 of the drive unit 130. In particular, the drive partner 182 can include a passive magnetic element. For example, the drive partner 182 can be made of a magnetic material, such as a ferromagnetic material, a permanent magnet, or can have permanent magnetic properties. The drive partner 182 can correspond to the (unfolded) rotor of the linear motor.

[0045] The driving partner 182 may include a plurality of permanent magnets arranged in a linear manner at the top or bottom portion of the carrier. In particular, the plurality of permanent magnets may be arranged in alternating polarity in the transport direction T at the top surface of the carrier.

[0046] According to some embodiments that can be combined with other embodiments described herein, the first actuator 121 and the second actuator 131 can be arranged in the air space 110 (see Figure 4), and the carrier transport space 15 may be in the inner volume of the vacuum chamber. The expression "atmospheric space" may be understood as a space having atmospheric pressure conditions, i.e., about 1.0 bar. For example, the atmospheric space may be a space arranged outside the vacuum chamber. Alternatively, the atmospheric space may be provided by an atmospheric box or an atmospheric container arranged inside the vacuum chamber.

[0047] According to some embodiments, which may be combined with other embodiments described herein, the first actuator 121 and the second actuator 131 may be attached to the outer surface of the upper chamber wall 212, in particular the outer surface of the vacuum chamber 210 (see in this regard Figure 4 ). Accordingly, advantageously, the active element of at least one magnetic bearing is arranged at a position that is easily accessible for installation and / or maintenance, thereby reducing costs. According to an example, the outer surface of the upper chamber wall 212 may include a receiving portion for receiving the first actuator 121 and the second actuator 131 (see in this regard Figure 4 ).

[0048] Reference again Figure 1 According to some embodiments, which can be combined with other embodiments described herein, the magnetic levitation system 100 can further include a non-contact guiding arrangement 140 for guiding the carrier 10 in the transport direction T. Typically, the non-contact guiding arrangement 140 can be arranged in the lower part of the carrier transport space 15. For example, the non-contact guiding arrangement 140 can include one or more passive magnetic bearings 125. In particular, as Figure 1 As shown by way of example, one or more passive magnetic bearings 125 may be arranged vertically. Accordingly, one or more passive magnetic bearings 125 may be configured to provide a magnetic force acting on the carrier in a horizontal direction, in particular in a lateral direction L, such as Figure 1 Indicated exemplarily.

[0049] For example, Figure 1 As shown by way of example, one or more passive magnetic bearings 125 may be provided by vertically, parallel arranged passive magnetic elements. Typically, at least two passive magnetic elements are arranged to provide a receiving portion for a further magnetic counterpart 183 of the carrier. Thus, in the presence of the carrier, the further magnetic counterpart 183 is arranged between the oppositely arranged passive magnetic elements of the one or more passive magnetic bearings 125. Typically, the further magnetic counterpart 183 comprises a passive magnetic element. Figure 1 In FIG. 1 , the north pole N portion of the passive magnetic element is schematically indicated by a hatched pattern. The south pole portion of the passive magnetic element is indicated by a blank element adjacent to the north pole N portion.

[0050] like Figure 1As shown by way of example, the passive magnetic elements of the one or more passive magnetic bearings 125 and the additional magnetic pairing 183 may be arranged such that the south pole portion of the passive magnetic element of the additional magnetic pairing 183 faces the south pole portion of the passive magnetic element of the one or more passive magnetic bearings 125 ( Figure 1 Thus, the north pole portion of the passive magnetic element of the additional magnetic counterpart 183 may face the north pole portion of the passive magnetic element of one or more passive magnetic bearings 125 ( Figure 1 ). Thus, the one or more passive magnetic bearings 125 and the passive magnetic elements of the additional magnetic pairing 183 may be arranged such that a repulsive magnetic force acts between the passive magnetic elements of the additional magnetic pairing 183 and the passive magnetic elements of the one or more passive magnetic bearings 125. Although not explicitly shown, it will be understood that, alternatively, the one or more passive magnetic bearings 125 and the passive magnetic elements of the additional magnetic pairing 183 may be arranged such that an attractive magnetic force acts between the passive magnetic elements of the additional magnetic pairing 183 and the passive magnetic elements of the one or more passive magnetic bearings 125.

[0051] Thus, a contact-free lateral guidance of the carrier may advantageously be provided.In addition, it is noted that providing a passive guiding arrangement is particularly suitable for providing robust carrier transport in a high temperature vacuum environment at low cost.

[0052] In the present disclosure, a "passive magnetic bearing" may be understood as a bearing having a passive magnetic element that is not actively controlled or adjusted, at least during operation of the device. In particular, a passive magnetic bearing may be suitable for generating a magnetic field, such as a static magnetic field. In other words, a passive magnetic bearing may not be configured for generating an adjustable magnetic field. For example, the magnetic elements of one or more passive magnetic bearings may be made of a magnetic material (such as a ferromagnetic material, a permanent magnet), or may have permanent magnetic properties.

[0053] Therefore, as used herein, a "passive magnetic element" or "passive magnet" may be understood as a magnet that is not actively controlled (e.g., via feedback control). For example, there is no output parameter (such as the magnetic field strength of the passive magnet) that is controlled based on an input parameter (such as distance). In contrast, a "passive magnetic element" or "passive magnet" may provide lateral stabilization of a carrier without any feedback control. For example, a "passive magnetic element" or "passive magnet" as described herein may include one or more permanent magnets. Alternatively or additionally, a "passive magnetic element" or "passive magnet" may include one or more electromagnets that may not be actively controlled.

[0054] According to some embodiments described herein, the first actuator 121 comprises a U-shaped electromagnet for holding the carrier 10 in the carrier transport space 15 , and the second actuator 131 is at least partially surrounded by the U-shaped electromagnet. Figure 1 and Figure 4 , an embodiment is depicted in which the second actuator 131 is partially surrounded by the U-shaped electromagnet of the first actuator 121.

[0055] According to other embodiments described herein, the first actuator 121 comprises a U-shaped electromagnet for holding the carrier 10 in the carrier transport space 15 , and the projection of the second actuator 131 in the transport direction T is surrounded by the U-shaped electromagnet. Figure 3A and Figure 3B This embodiment is depicted in FIG. The projection of the second actuator 131 is Figure 3A The second actuator 131 is actually arranged offset relative to the first actuator 121 in the transport direction T, as shown in FIG. Figure 3B Better seen in the top view.

[0056] In some embodiments, the U-shaped electromagnet of the first actuator 121 surrounds the second actuator 131 on three sides of the second actuator 131, in particular on two opposite sides of the second actuator in the lateral direction and on the top side of the second actuator. In other embodiments (not shown in the figures) with the first actuator and the second actuator arranged below the carrier transport space, the U-shaped electromagnet of the first actuator may surround the second actuator on two opposite sides of the second actuator in the lateral direction and on the bottom side of the second actuator.

[0057] Since the second actuator is partially surrounded by the first actuator, a compact magnetic suspension system may be provided, wherein the drive unit is at least partially arranged "inside" the suspension magnet. In particular, the magnetic bearing and the drive unit may be integrated or at least partially integrated such that a compact magnetic suspension arrangement and drive arrangement are provided.

[0058] In some embodiments, the U-shaped electromagnet of the first actuator 121 has a U-shaped core, and the two legs of the U-shaped core are surrounded by a winding. In some implementations, the windings surrounding the two legs of the electromagnet can be powered by a power supply and / or a controller. The ends of the two legs of the U-shaped core can provide two magnetic poles of the electromagnet of the first actuator, so that a magnetic levitation force with a corresponding absolute value can be applied to the carrier by the two legs. In particular, the two legs of the U-shaped core can be oriented toward the carrier transport space 15 to apply a magnetic force to the carrier 10, such as Figure 1 Schematically depicted in .

[0059] Specifically, the two legs of the U-shaped electromagnet may be oriented in a downward direction toward the carrier transport space 15, with the first leg arranged on the right side of the vertical plane 111 and the second leg arranged on the left side of the vertical plane 111. The vertical plane 111 extending vertically through the center of the carrier transport space 15 and parallel to the transport direction T is also referred to herein as a center plane.

[0060] When the carrier is held by the first actuator 121, the two legs may be arranged symmetrically with respect to a vertical plane 111 extending through the center of gravity G of the carrier. Since the two legs constitute two magnetic poles of one electromagnetic actuator, corresponding suspension forces may be applied to the carrier symmetrically with respect to the center of gravity G of the carrier, thereby providing a smooth and stable suspension of the carrier.

[0061] In some embodiments, the two legs of the U-shaped electromagnet may be oriented toward the carrier transport space 15 so as to magnetically interact with the magnetic partner 180 of the carrier, in particular with the two surfaces 181 of the magnetic partner 181 of the carrier (e.g., the two top surfaces of the magnetic partner 181 pointing in an upward direction). The two surfaces 181 of the magnetic partner 180 may extend parallel to each other along the top end (or alternatively along the bottom end) of the carrier.

[0062] In an embodiment that can be combined with other embodiments described herein, the first actuator 121 is centered above the carrier transport space 15. In particular, when the carrier 10 is held by the first actuator 121, the first actuator is centered above the center of gravity G of the carrier 10 (or alternatively centered below the center of gravity), such as Figure 1 Since the first actuator 121 is centered above the center of gravity G of the carrier, the magnetic levitation force applied by the first actuator 121 acts symmetrically with respect to a vertical plane 111 on the carrier, enabling the carrier to be stably and smoothly levitated.

[0063] In particular, the base of the U-shaped electromagnet connecting the two legs of the U-shaped electromagnet can be centered above the carrier transport space so that the two legs of the U-shaped electromagnet are symmetrically arranged on both sides of a vertical plane 111 extending through the center of gravity G of the carrier during transport of the carrier in the transport direction T. The vertical plane 111 is also referred to herein as the center plane of the carrier transport space 15.

[0064] In some embodiments that may be combined with other embodiments described herein, the second actuator 131 is centered above the carrier transport space 15. In particular, the second actuator 131 is centrally arranged above (or below) the center of gravity of the carrier during carrier transport. More specifically, the second actuator 131 may intersect with the center plane (vertical plane 111) of the carrier transport space. Therefore, the driving force applied by the driving unit 130 acts on the carrier symmetrically with respect to the center of gravity of the carrier, thereby providing stable and smooth carrier movement.

[0065] In some embodiments that may be combined with other embodiments described herein, both the first actuator 121 and the second actuator 131 are centered above (or alternatively below) the carrier transport space 15. In particular, during carrier transport, the first actuator 121 and the second actuator 131 are centrally arranged above the center of gravity G of the carrier 10. Therefore, both the suspension force of the at least one magnetic bearing 120 and the driving force of the driving unit 130 act on the carrier symmetrically with respect to the center plane, thereby providing stable and smooth carrier transport and suspension.

[0066] According to one aspect of the present document, a magnetic levitation system for transporting a carrier 10 in a transport direction T is described, the magnetic levitation system comprising at least one magnetic bearing 120 with a first actuator 121 and a drive unit 130 with a second actuator 131, wherein both the first actuator 121 and the second actuator 131 are centered above (or alternatively below) a carrier transport space 15. In particular, both the first actuator 121 and the second actuator 131 are arranged symmetrically with respect to a center plane of the carrier transport space 15. Thus, both levitation forces and driving forces can be applied to the carrier symmetrically with respect to the center plane.

[0067] The first actuator 121 may comprise a U-shaped electromagnet, and / or the second actuator 131 or its projection may be partially surrounded by the U-shaped electromagnet. Thus, an integrated transport arrangement may be provided comprising both the first actuator and the second actuator in the same housing space, the two actuators being centered relative to the carrier transport space.

[0068] In some embodiments, the second actuator 131 may include or may be a stator of a linear motor, in particular a stator of a synchronous linear motor.

[0069] The at least one magnetic bearing 120 may be an actively controllable magnetic bearing, in particular an actively controllable magnetic bearing comprising a U-shaped electromagnet, which is configured to be actively controlled to maintain a specified distance between the first actuator 121 and the carrier.

[0070] like Figure 1 Schematically depicted, the carrier transport space 15 may be a vertical carrier transport space having a height H extending in the vertical direction and a width W extending in the horizontal direction, wherein the aspect ratio H / W is H / W ≥ 5. The center plane of the carrier transport space 15 may be a vertical plane 111 extending along the transport direction T during carrier transport and intersecting the center of gravity G of the carrier.

[0071] from Figure 1 In the embodiment of the present invention, it will be understood that the size of the carrier 10 typically corresponds to the size of the carrier transport space 15. Therefore, the carrier may have a height H corresponding to the height H of the carrier transport space 15. CIn addition, the carrier may have a width W corresponding to the width W of the carrier transport space 15. C Therefore, the aspect ratio H C / W C It can be H C / W C ≥5, especially H C / W C ≥10.

[0072] The magnetic levitation system 100 as described herein may also include a carrier 10. The carrier 10 is Figure 1 Depicted in cross-section and shown in Figure 2 Depicted in top view.

[0073] In some embodiments, which may be combined with other embodiments described herein, the magnetic levitation system further comprises at least one lateral stabilization device (not depicted in the figures) with at least one stabilization magnet, the at least one lateral stabilization device being configured to exert a restoring force F on the carrier 10 in a lateral direction L transverse to the transport direction T. For example, the at least one stabilization magnet may be arranged above the carrier transport space 15, for example in the air space. Typically, the at least one stabilization magnet may be arranged at a lateral distance from the first actuator.

[0074] Thus, advantageously, in case the carrier is displaced laterally, the lateral stabilization device may stabilize the carrier at a predetermined lateral position by applying a restoring force to the carrier 10. The restoring force pushes or pulls the carrier 10 back to the predetermined lateral position, in which the first actuator 121 is centered above and facing the magnetic partner 181 of the carrier. Thus, advantageously, the lateral stabilization device may generate a stabilization force configured to counteract the displacement of the carrier from the carrier transport space 15 in the lateral direction L. In other words, when the carrier is displaced from the predetermined lateral position or equilibrium position in the lateral direction L, the lateral stabilization device may be configured to generate a restoring force F that pushes and / or pulls the carrier back into the carrier transport space 15.

[0075] The at least one stabilizing magnet may be a passive magnet having a north pole N and a south pole S. In some embodiments, the at least one stabilizing magnet may include a plurality of passive magnets, which may be arranged one after another in the transport direction. At least one carrier stabilizing magnet (not depicted in the figure) may be attached to the carrier 10, so that a displacement of the carrier 10 from the carrier transport space 15 in the lateral direction L causes a repulsive magnetic force between the at least one stabilizing magnet of the lateral stabilizing device and the at least one carrier stabilizing magnet, thereby counteracting the displacement. Thus, advantageously, the carrier is maintained in a balanced position during holding and during transport of the carrier along the transport path.

[0076] The at least one carrier stabilizing magnet may be a passive magnet having a north pole N and a south pole S. In particular, the at least one carrier stabilizing magnet may be arranged in an opposite orientation compared to the at least one stabilizing magnet of the lateral stabilizing device, so that when the carrier is arranged in the equilibrium position, the north pole N of the at least one carrier stabilizing magnet is arranged close to and attracted by the south pole S of the at least one stabilizing magnet, and the south pole S of the at least one carrier stabilizing magnet is arranged close to and attracted by the north pole N of the at least one stabilizing magnet of the lateral stabilizing device. When the carrier is displaced from the equilibrium position in a first lateral direction, the north pole N of the at least one carrier stabilizing magnet approaches the north pole N of the at least one stabilizing magnet of the lateral stabilizing device, which generates a restoring force that pushes the carrier back to the equilibrium position. When the carrier is displaced from the equilibrium position in a second (opposite) lateral direction, the south pole S of the at least one carrier stabilizing magnet approaches the south pole S of the at least one stabilizing magnet of the lateral stabilizing device, which generates a restoring force that pushes the carrier back to the equilibrium position. Thus, the lateral stabilizing device stabilizes the carrier at a predetermined lateral position, so that lateral movement of the carrier can be reduced or prevented.

[0077] In some embodiments, the carrier 10 includes a magnetic pairing 180 having two surfaces 181 extending parallel to each other along the top end of the carrier in the transport direction T for magnetically interacting with the first actuator 121, in particular with two legs (i.e., two magnetic poles) of a U-shaped electromagnet of the first actuator 121 oriented toward the carrier transport space 15. The two surfaces 181 of the magnetic pairing 180 may be configured as two tracks or rails made of a magnetic material (such as iron or steel, i.e., a ferromagnetic material). The magnetic pairing 180 including the two surfaces 181 may be an integral magnetic element or may include a plurality of magnetic elements directly in contact with each other, so that the magnetic flux lines from one leg of the first actuator 121 toward the second leg of the first actuator 121 may travel along a closed path extending through the magnetic pairing 181, i.e., extending from a first surface of the two surfaces 181 to a second surface of the two surfaces 181.

[0078] In some embodiments, the carrier may include a drive partner 182 for magnetically interacting with the second actuator 131. The drive partner 182 may extend between two surfaces 181 of the magnetic partner 180 in the transport direction T, ie in the longitudinal direction of the carrier.

[0079] like Figure 1As shown, the carrier may include a ferromagnetic head portion having a groove arranged therein for accommodating a drive partner 182. The ferromagnetic head portion of the carrier may provide two surfaces 181 of the magnetic partner 180 on both sides of the groove. Thus, the magnetic flux lines may travel along a closed path through the ferromagnetic head portion of the carrier between the two surfaces 181 of the two legs that may point upwards to the first actuator 121. The drive partner 182 may be arranged in the groove and extend in the transport direction T (i.e., in the longitudinal direction of the carrier). As shown in FIG. Figure 2 As shown, in some embodiments, the drive partner 182 includes a plurality of permanent magnets in a row, which are configured to magnetically interact with the stator of the linear motor. The polarity of the permanent magnets of the drive partner 182 can be alternated in the transport direction T (ie, in the longitudinal direction of the carrier).

[0080] In some embodiments that may be combined with other embodiments described herein, the magnetic pairing 180 includes a first guided area 185 and a second guided area 187, wherein a recessed area 186 is arranged between the first guided area 185 and the second guided area 187 in the transport direction T, and the recessed area 186 is recessed in the vertical direction relative to the first guided area and the second guided area. Accordingly, the recessed area 186 is not configured to magnetically interact with the first actuator 121 during transport of the carrier. Such a "3-zone" carrier is Figure 2 It is schematically depicted in a top view.

[0081] The first guided area 185 may be disposed at the front portion of the top surface of the carrier 10, the recessed area 186 may be disposed at the central portion of the top surface of the carrier 10, and the second guided area 187 may be disposed at the rear portion of the top surface of the carrier. When the magnetic pairing member 181 is disposed only at the front and rear portions of the carrier in the transport direction with the recessed area 186 therebetween, the risk that the top portion of the carrier touches the first actuator during transport (e.g., due to the curvature of the top wall of the vacuum chamber) may be reduced.

[0082] Optionally, as Figure 2 As schematically depicted in FIG. 1 , the drive partner 182 may include a first magnet segment and a second magnet segment, the first magnet segment and the second magnet segment being spaced apart from each other in the transport direction, such as Figure 2 For example, the magnets of the first magnet section may be arranged in a groove provided between two surfaces 181 of the first guided area 185, and the magnets of the second magnet section may be arranged in a groove provided between two surfaces 181 of the second guided area 187. Optionally, no permanent magnet may be provided in the recessed area 186 of the carrier.

[0083] Figure 3Ais a schematic cross-sectional view of an upper portion of a magnetic levitation system 100 according to an embodiment described herein. Figure 3A The magnetic levitation system basically corresponds to Figure 1 The magnetic levitation system can be referred to the above description and will not be described again here.

[0084] The magnetic levitation system 100 is configured to transport a carrier 10 in a transport direction T (i.e., perpendicular to the paper plane). The magnetic levitation system 100 comprises at least one magnetic bearing 120 having a first actuator 121, which is used to generate a magnetic levitation force acting on the carrier 10. Accordingly, the carrier can be held under the first actuator 121 in the carrier transport space 15. The magnetic levitation system 100 further comprises a drive unit 130 having a second actuator 131, in particular a linear motor, which is used to move the carrier in the transport direction T.

[0085] The projection of the second actuator 131 in the transport direction may be partially surrounded by the U-shaped electromagnet of the first actuator 121. In other words, if the second actuator 131 is displaced in the transport direction, the second actuator 131 is partially surrounded by the U-shaped electromagnet. For this reason, the second actuator 131 is Figure 3A Shown by dotted lines.

[0086] In particular, in some embodiments, the first actuator 121 and the second actuator 131 are arranged adjacent to each other in the transport direction, but do not overlap. This configuration may also be referred to herein as "partial integration" of the linear motor and the suspension actuator. On the other hand, Figure 1 Embodiments in which the second actuator 131 is partially surrounded by the first actuator 121 (ie, the first actuator and the second actuator overlap each other) may also be referred to herein as "full integration" of the linear motor and the suspension actuator.

[0087] In some embodiments, the first actuator and the second actuator may be controlled by a common controller.

[0088] In some embodiments, the magnetic levitation system 100 may include a plurality of magnetic bearings 120, 120', 120" and a plurality of drive units 130, 130', 130", wherein the first actuators of the plurality of magnetic bearings and the second actuators of the plurality of drive units are alternately arranged in the transport direction (e.g. Figure 3B ), for example, there is a certain offset between the two.

[0089] Alternatively, the first actuators of the plurality of magnetic bearings and the second actuators of the drive unit overlap each other or are completely integrated with each other (see Figure 1), each second actuator is surrounded by a first actuator on three sides thereof. In particular, a plurality of first actuators having U-shaped electromagnets can be arranged adjacent to one another in the transport direction, wherein the U-shaped electromagnets respectively surround the respective second actuators of the plurality of drive units on three sides thereof.

[0090] The first actuator 121 of the plurality of magnetic bearings and the second actuator 131 of the plurality of drive units may be centered above (or alternatively below) the carrier transport space, in particular relative to the center plane of the carrier transport space. During carrier transport, the center of gravity G of the carrier may be arranged below both the first actuator and the second actuator.

[0091] For example, reference Figure 4 , describes a processing system 200 for vertically processing a substrate according to the present disclosure. According to an embodiment that can be combined with any other embodiment described herein, the processing system 200 comprises at least one vacuum chamber 210, which comprises a processing device 205. In particular, typically, the processing device 205 is arranged in the vacuum chamber 210, and the processing device 205 can be selected from the group consisting of: a deposition source, an evaporation source and a sputtering source. The term "vacuum" can be understood as a technical vacuum with a vacuum pressure of less than, for example, 10 mbar. Typically, the pressure in the vacuum chamber as described herein can be 10 -5 millibar and about 10 -8 mbar, more typically between 10 -5 Millibar and 10 -7 mbar, and even more typically around 10 -6 millibar and about 10 -7 According to some embodiments, the pressure in the vacuum chamber may be considered to be the partial pressure or the total pressure of the evaporated material in the vacuum chamber (when there is only evaporated material as the component to be deposited in the vacuum chamber, the two may be approximately the same). In some embodiments, the total pressure in the vacuum chamber may be between about 10 -4 mbar to about 10 -7 mbar range, especially if a second component (such as a gas etc.) is present in the vacuum chamber in addition to the evaporated material. Thus, the vacuum chamber may be a "vacuum deposition chamber", ie a vacuum chamber configured for vacuum deposition.

[0092] In addition, if Figure 4 As shown exemplarily, the handling system 200 comprises one or more magnetic levitation systems for transporting one or more carriers in a transport direction T according to any embodiment described herein.

[0093] For example, the processing system 200 may include a first magnetic levitation system 100A and a second magnetic levitation system 100B. The first magnetic levitation system 100A and the second magnetic levitation system 100B may be configured according to any embodiment described herein, in particular, as described in reference Figures 1 to 3B As described. Figure 4 As shown, the first magnetic levitation system 100A providing the first transport path T1 can be arranged next to the second magnetic levitation system 100B providing the second transport path T2. In particular, the second magnetic levitation system 100B is horizontally offset from the first magnetic levitation system 100A. Therefore, the second transport path T2 is horizontally offset from the first transport path T1.

[0094] One or more magnetic suspension systems of the processing system 200 respectively include at least one magnetic bearing 120 with a first actuator 121 for holding the carrier 10 in a non-contact manner in the carrier transport space 15. In particular, one magnetic suspension system includes a plurality of magnetic bearings arranged along a corresponding transport path, wherein there is an offset between corresponding adjacent magnetic bearings. Therefore, the carrier can be held in a non-contact manner along the transport path defined by the corresponding magnetic suspension system.

[0095] Additionally, the one or more magnetic levitation systems comprise a respective drive unit 130, in particular a plurality of drive units, having a second actuator 131 for moving the carrier 10 in the transport direction T. Both the first actuator 121 and the second actuator 131 may be arranged above the carrier transport space 15 (or alternatively both arranged below).

[0096] According to some embodiments that can be combined with any other embodiments described herein, the processing system 200 can further include a track switching assembly 190 configured to move the carrier from the first transport path T1 to the second transport path T2 in the path switching direction S, such as in Figure 4 Typically, the path switching direction S corresponds to the lateral direction L. In addition, the track switching assembly 190 may be configured to move the carrier to a processing position T3 horizontally offset from the first transport path and the second transport path.

[0097] In addition, if Figure 4 As exemplarily indicated by the double-headed arrow 144 in FIG. 1 , the non-contact guiding device 140 of the first magnetic suspension system 100A and the second magnetic suspension system 100B may optionally move in the vertical direction to allow the carrier to move in the path switching direction S. In addition, as Figure 4 As exemplarily shown, a mask 206 (eg, an edge exclusion mask) may be disposed between the processing position T3 and the processing device 205 .

[0098] In some embodiments, the distal ends of the two legs of the U-shaped electromagnet, the lower end of the second actuator 131, and / or the lower end of the optional side stabilization device are flush with each other and / or do not substantially protrude into the vacuum chamber. In addition, the magnetic partner 180, the drive partner 182, and / or the optional side stabilization magnets of the carrier can be substantially flush with each other, for example, can be arranged on a horizontal plane. Thus, the carrier can be, for example, composed of Figure 4 The track switching assembly 190 schematically depicted in FIG. 1 is conveyed out of the carrier transport space in a lateral direction L without the risk of the magnet units obstructing each other.

[0099] For example, reference Figure 5 The flowchart shown describes a method 300 for transporting a carrier according to the present disclosure. According to an embodiment that can be combined with any other embodiment described herein, the method 300 includes contactlessly holding the carrier in a carrier transport space using at least one magnetic bearing 120 having a first actuator with a U-shaped electromagnet (represented by box 310).

[0100] The method further comprises transporting the carrier in the transport direction T using a drive unit 130 with a second actuator, wherein the second actuator or a projection of the second actuator in the transport direction T is surrounded by a U-shaped electromagnet (indicated by box 320 ).

[0101] In some embodiments, during transport of the carrier, the two legs of the U-shaped electromagnet are oriented toward two surfaces of the magnetic partner 180 extending along the top end of the carrier in the transport direction T, so that the two legs of the electromagnet interact magnetically with the two surfaces. The magnetic partner 180 may include two ferromagnetic tracks extending parallel to each other at the head portion of the carrier.

[0102] Alternatively or additionally, the second actuator interacts magnetically with a drive partner 182 which is arranged at the head portion of the carrier between two surfaces of the magnetic partner 180. The drive partner may comprise a plurality of permanent magnets arranged alternately.

[0103] During transport of the carrier, when the carrier moves under the first actuator and the second actuator, both the first actuator 121 and the second actuator 131 may be arranged centrally above the center of gravity G of the carrier. In particular, the center plane of the magnetic levitation system may intersect (centrally) both the first actuator and the second actuator, so that the magnetic forces applied by both the first actuator and the second actuator act on the carrier symmetrically with respect to the center plane.

[0104] The second actuator 131 may be fully or partially integrated with the first actuator 121. Specifically, the second actuator may be accommodated in an accommodation space provided by the first actuator 121, in particular surrounded by a U-shaped core of the electromagnet of the first actuator, for example on three sides.

[0105] Optionally, the first actuator and the second actuator may be arranged in air space, in particular outside the vacuum chamber, for example above a top wall of the vacuum chamber. In some embodiments, the first actuator and the second actuator may be attached to an outer surface of an upper chamber wall of the vacuum chamber.

[0106] In view of the above, it will be appreciated that, compared to the prior art, embodiments of the present disclosure advantageously provide a magnetic levitation system, a processing system, and a method of transporting a carrier that improves the accuracy and stability of transporting carriers in high temperature vacuum environments, particularly in high quality display manufacturing. In addition, embodiments described herein advantageously provide more robust non-contact carrier transport at lower production costs compared to conventional carrier transport equipment.

[0107] In the embodiments described herein, the driving force and the suspension force can be applied to the carrier symmetrically relative to the center of gravity of the carrier. Therefore, the interference force and the torque acting on the carrier can be reduced. The drive track and the suspension actuator track can be partially or completely integrated, thereby allowing a space-saving and compact design of the magnetic suspension system. In addition, when the carrier has a "3-zone" design including two guide areas and a recessed area between the two, a smooth and reliable carrier transportation can be obtained. The embodiments described herein allow a small number of suspension actuators to be provided. In addition, the first actuator and the second actuator can be controlled by the same controller, thereby allowing integrated control.

[0108] While the foregoing is directed to embodiments, other and further embodiments may be envisaged without departing from the basic scope, and the scope is to be determined by the scope of the appended claims.

Claims

1. A magnetic suspension system (100) for transporting a carrier (10) in a transport direction (T), comprising: at least one magnetic bearing (120) having a first actuator (121) with a U-shaped electromagnet for holding the carrier (10) in a contactless manner in a carrier transport space (15), the first actuator (121) being arranged above or below the carrier transport space (15); as well as a drive unit (130) having a second actuator (131) for moving the carrier (10) in the transport direction, wherein the second actuator (131) or a projection of the second actuator along the transport direction (T) is partially surrounded by the U-shaped electromagnet, The U-shaped electromagnet has a U-shaped core with two legs, the two legs are oriented toward the carrier transport space (15) and the ends of the two legs provide two magnetic poles of the U-shaped electromagnet for exerting a magnetic levitation force on the carrier (10).

2. The magnetic levitation system of claim 1, wherein both the first actuator (121) and the second actuator (131) are centered above or below the carrier transport space (15).

3. The magnetic levitation system according to claim 2, wherein: During transport of the carrier, the first actuator (121) and the second actuator are arranged centrally above the center of gravity (G) of the carrier (10).

4. The magnetic levitation system of claim 1, wherein the U-shaped electromagnet surrounds the second actuator (131) or the projection of the second actuator on two opposite lateral sides and on one of the top side and the bottom side.

5. The magnetic levitation system of claim 1, wherein the two legs are configured to magnetically interact with a magnetic partner having two surfaces (181) extending parallel to each other along a top surface or a bottom surface of the carrier.

6. The magnetic levitation system according to any one of claims 1 to 4, wherein the magnetic levitation system comprises a plurality of magnetic bearings (120, 120', 120") and a plurality of drive units (130, 130'), wherein the first actuators of the plurality of magnetic bearings and the second actuators of the plurality of drive units are alternately arranged in the transport direction.

7. The magnetic levitation system according to any one of claims 1 to 4, wherein the magnetic levitation system comprises a plurality of magnetic bearings (120, 120', 120") and a plurality of drive units (130, 130'), and the first actuators of the plurality of magnetic bearings and the second actuators of the plurality of drive units are respectively centered above the carrier transport space.

8. The magnetic levitation system according to any one of claims 1 to 4, wherein the second actuator (131) is a stator of a linear motor.

9. The magnetic levitation system of claim 8, wherein the linear motor is a synchronous linear motor.

10. A magnetic levitation system as described in any one of claims 1 to 4, wherein the at least one magnetic bearing (120) is an actively controllable magnetic bearing including the U-shaped electromagnet, and the actively controllable magnetic bearing is configured to be actively controlled to maintain a specified distance between the first actuator (121) and the carrier.

11. The magnetic levitation system (100) according to any one of claims 1 to 4, wherein the carrier transport space (15) is a vertical carrier transport space having a height H extending in a vertical direction and a width W extending in a lateral direction, wherein the aspect ratio H / W is H / W≥5.

12. The magnetic levitation system (100) of claim 1, wherein the U-shaped electromagnet is configured to be actively controlled in a closed loop or feedback control manner to maintain a specified distance between the first actuator and the carrier.

13. A magnetic suspension system (100) for transporting a carrier (10) in a transport direction (T), comprising: at least one magnetic bearing (120) having a first actuator (121) with a U-shaped electromagnet for holding the carrier (10) in a contactless manner in a carrier transport space (15), and a drive unit (130) having a second actuator (131) for moving the carrier (10) in the transport direction, wherein the first actuator (121) and the second actuator (131) are both centered above or below the carrier transport space, The U-shaped electromagnet has a U-shaped core with two legs, the two legs are oriented toward the carrier transport space (15) and the ends of the two legs provide two magnetic poles of the U-shaped electromagnet for exerting a magnetic levitation force on the carrier (10).

14. The magnetic levitation system according to claim 1 or 13, further comprising carrier, The carrier comprises a magnetic pairing member and a drive pairing member (182), wherein the magnetic pairing member has two surfaces (181) extending parallel to each other along the top surface of the carrier and is used to magnetically interact with the first actuator (121), and the drive pairing member is used to magnetically interact with the second actuator (131), and the drive pairing member (182) extends between the two surfaces (181) of the magnetic pairing member in the transport direction (T).

15. A magnetic levitation system as described in claim 14, wherein the magnetic pairing member includes a first guided area (185) and a second guided area (187), wherein a recessed area (186) is arranged between the first guided area and the second guided area in the transport direction (T) of the carrier, and the recessed area is recessed relative to the first guided area and the second guided area.

16. A processing system (200) for vertically processing a substrate, comprising: at least one vacuum chamber (210), the at least one vacuum chamber comprising a processing device (205); as well as One or more magnetic levitation systems, the one or more magnetic levitation systems being used to transport one or more carriers (10) in a transport direction (T), the one or more magnetic levitation systems comprising: at least one magnetic bearing (120) having a first actuator (121) with a U-shaped electromagnet for holding the carrier (10) in a contactless manner in a carrier transport space (15); as well as a drive unit (130) having a second actuator (131) for moving the carrier (10) in the transport direction, wherein the second actuator (131) or a projection of the second actuator along the transport direction (T) is partially surrounded by the U-shaped electromagnet, The U-shaped electromagnet has a U-shaped core with two legs, the two legs are oriented toward the carrier transport space (15) and the ends of the two legs provide two magnetic poles of the U-shaped electromagnet for exerting a magnetic levitation force on the carrier (10).

17. A method for transporting a carrier (10) in a transport direction (T), comprising: The carrier (10) is held contactlessly in a carrier transport space (15) using at least one magnetic bearing (120) having a first actuator (121) with a U-shaped electromagnet; as well as transporting the carrier (10) in the transport direction (T) using a drive unit (130) having a second actuator (131), wherein the second actuator or a projection of the second actuator along the transport direction (T) is partially surrounded by the U-shaped electromagnet, The U-shaped electromagnet has a U-shaped core with two legs, the two legs are oriented toward the carrier transport space (15) and the ends of the two legs provide two magnetic poles of the U-shaped electromagnet for exerting a magnetic levitation force on the carrier (10).

18. The method of claim 17, wherein both the first actuator (121) and the second actuator (131) are arranged above a center of gravity (G) of the carrier when the carrier moves beneath the first actuator and the second actuator.

19. A method as claimed in claim 17 or 18, wherein during transport of the carrier, the two legs of the U-shaped electromagnet are oriented toward two surfaces (181) of a magnetic partner extending along the top part of the carrier in the transport direction (T), and the second actuator (131) interacts magnetically with a drive partner (182) arranged between the two surfaces (181).

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