A MEMS gyroscope

Abstract

The present invention discloses a MEMS gyroscope, which includes a substrate, a first unit and a second unit. The first unit and the second unit are oppositely arranged on the substrate along a first direction. The first unit and the second unit are connected by a coupling spring. A driving electrode and a detection electrode are also provided on the substrate, wherein: the first unit includes a first mass block and a second mass block oppositely arranged along a second direction, and a first group of coupling structures are connected to the first mass block and the second mass block through a first group of elastic beams; the second unit includes a third mass block and a fourth mass block oppositely arranged along the second direction, and a second group of coupling structures are connected to the third mass block and the fourth mass block through a second group of elastic beams. Compared with the prior art, the beneficial effect of the present invention is that the MEMS gyroscope adopts a symmetric layout, which is convenient for realizing differential detection and improving sensitivity.

Description

Technical Field

[0001] The present invention relates to gyroscopes, and particularly to a MEMS gyroscope. Background Art

[0002] Micro-machined gyroscopes, namely MEMS (Micro Electro Mechanical systems) gyroscopes, are typical micro angular velocity micro sensors. Due to their advantages such as small size, low power consumption, and convenient processing, they have very wide applications in the consumer electronics market. In recent years, with the gradual improvement of gyroscope performance, they have been widely used in fields such as automobiles, industries, and virtual reality.

[0003] The MEMS out-of-plane oscillating gyroscope is a typical representative of MEMS out-of-plane detection gyroscopes. The driving mode of the MEMS out-of-plane oscillating gyroscope in the related art oscillates around the axis of the anchor point. When an angular velocity Ω is applied, due to the Coriolis effect, the gyroscope transfers energy to the detection mode, causing the mass structure to oscillate out-of-plane relative to the driving. The magnitude of Ω can be obtained by detecting the displacement of the out-of-plane oscillation. However, the detection capacitance of this kind of MEMS out-of-plane oscillating gyroscope is small and the sensitivity is low. Summary of the Invention

[0004] The purpose of the present invention is to provide a MEMS gyroscope to solve the technical problems in the prior art.

[0005] The present invention provides a MEMS gyroscope, including a substrate, a first unit, and a second unit. The first unit and the second unit are relatively arranged on the substrate along a first direction. The first unit and the second unit are connected by a coupling spring. The substrate is also provided with a driving electrode and a plurality of detection electrodes, wherein:

[0006] The first unit includes a first mass block and a second mass block that are relatively arranged along a second direction perpendicular to the first direction. The MEMS gyroscope further includes a first group of coupling structures arranged on opposite sides of the first mass block and the second mass block along the second direction. The first group of coupling structures is connected to the first mass block and the second mass block through a first group of elastic beams;

[0007] The second unit includes a third mass block and a fourth mass block that are relatively arranged along the second direction. The MEMS gyroscope further includes a second group of coupling structures arranged on opposite sides of the third mass block and the fourth mass block along the second direction. The second group of coupling structures is connected to the third mass block and the fourth mass block through a second group of elastic beams. The coupling structures that are relatively arranged along the first direction in the first group of coupling structures and the second group of coupling structures are all connected by the coupling spring.

[0008] A MEMS gyroscope as described above, wherein preferably, the first set of coupling structures includes a first coupling structure provided on a side of the first mass block away from the second mass block, a second coupling structure provided between the first mass block and the second mass block, and a third coupling structure provided on a side of the second mass block away from the first mass block; the first coupling structure, the second coupling structure, and the third coupling structure are connected to the first mass block and / or the second mass block through the first set of elastic beams;

[0009] The second set of coupling structures includes a fourth coupling structure provided on a side of the third mass block away from the fourth mass block, a fifth coupling structure provided between the third mass block and the fourth mass block, and a sixth coupling structure provided on a side of the fourth mass block away from the third mass block; the fourth coupling structure, the fifth coupling structure, and the sixth coupling structure are connected to the third mass block and / or the fourth mass block through the second set of elastic beams; the first coupling structure and the fourth coupling structure, the second coupling structure and the fifth coupling structure, and the third coupling structure and the sixth coupling structure are all connected through the coupling springs.

[0010] A MEMS gyroscope as described above, wherein preferably, the drive electrodes are provided between the first unit and the second unit, and movable drive interdigital fingers are provided inside the first mass block, the second mass block, the third mass block, and the fourth mass block, and the movable drive interdigital fingers and the fixed drive interdigital fingers on the drive electrodes form drive capacitors.

[0011] A MEMS gyroscope as described above, wherein preferably, the plurality of detection electrodes correspond to the outer sides of the first unit and the second unit along the first direction and are respectively arranged at intervals with the first mass block, the second mass block, the third mass block, and the fourth mass block to form detection capacitors.

[0012] A MEMS gyroscope as described above, wherein preferably, the MEMS gyroscope further includes a plurality of anchor structures fixed to the substrate, a first groove penetrates through the first coupling structure, a second groove penetrates through the second coupling structure, a third groove penetrates through the third coupling structure, the plurality of anchor structures include a first anchor, a second anchor, and a third anchor respectively arranged in the first groove, the second groove, and the third groove, and the first unit of the MEMS gyroscope is fixed to the substrate through the first anchor, the second anchor, and the third anchor;

[0013] The fourth groove penetrates through the fourth coupling structure, the fifth groove penetrates through the fifth coupling structure, the sixth groove penetrates through the sixth coupling structure, and the plurality of anchor structures further include a fourth anchor, a fifth anchor, and a sixth anchor disposed in the fourth groove, the fifth groove, and the sixth groove respectively. The second unit of the MEMS gyroscope is fixed to the substrate through the fourth anchor, the fifth anchor, and the sixth anchor.

[0014] For a MEMS gyroscope as described above, preferably, the plurality of anchor structures are respectively connected to the coupling structure where they are located through at least one elastic beam.

[0015] For a MEMS gyroscope as described above, preferably, the anchor structure further includes a seventh anchor disposed on a side of the first mass away from the second mass and fixed to the substrate, and an eighth anchor disposed on a side of the second mass away from the first mass and fixed to the substrate. The seventh anchor and the eighth anchor are respectively connected to the first mass or the second mass through elastic beams.

[0016] For a MEMS gyroscope as described above, preferably, the anchor structure further includes a ninth anchor disposed on a side of the third mass away from the fourth mass and fixed to the substrate, and a tenth anchor disposed on a side of the fourth mass away from the third mass and fixed to the substrate. The ninth anchor and the tenth anchor are respectively connected to the third mass or the fourth mass through elastic beams.

[0017] For a MEMS gyroscope as described above, preferably, the first unit further includes a first fixing member disposed between the first mass and the second mass, connected to the first mass and / or the second mass, and fixed to the substrate; the second unit further includes a second fixing member disposed between the third mass and the fourth mass, connected to the third mass and / or the fourth mass, and fixed to the substrate.

[0018] For a MEMS gyroscope as described above, preferably, the MEMS gyroscope is a symmetric structure along the first direction and / or the second direction.

[0019] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0020] 1. The MEMS gyroscope adopts a symmetric layout, which is convenient for realizing differential detection;

[0021] 2. The driving mode of the gyroscope is differential driving, which can effectively improve the driving stability;

[0022] 3. The gyroscope detection mode can achieve anti-phase vibration and total structural moment balance, so it can realize gyroscope differential detection, effectively immune to the influence of acceleration shock and orthogonal error, and improve sensitivity.

[0023] 4. The gyroscope mass blocks are elastically connected to the anchor points through the coupling structure to achieve anti-phase motion between different mass blocks, effectively forming differential detection.

[0024] 5. Out-of-plane large-area capacitance detection effectively improves the electromechanical coupling coefficient of gyroscope detection, and improves the sensitivity and signal-to-noise ratio of gyroscope detection. Description of the Drawings

[0025] Figure 1 is a schematic structural diagram of the present invention.

[0026] Description of the reference numerals: 1 - substrate, 2 - first unit, 3 - second unit, 4 - coupling spring, 5 - driving electrode, 6 - detecting electrode, 7 - first mass block, 8 - second mass block, 9 - third mass block, 10 - fourth mass block, 11 - first coupling structure, 12 - second coupling structure, 13 - third coupling structure, 14 - fourth coupling structure, 15 - fifth coupling structure, 16 - sixth coupling structure, 17 - first group of elastic beams, 18 - second group of elastic beams, 19 - movable driving interdigital fingers, 20 - first groove, 21 - second groove, 22 - third groove, 23 - fourth groove, 24 - fifth groove, 25 - sixth groove, 26 - first anchor point, 27 - second anchor point, 28 - third anchor point, 29 - fourth anchor point, 30 - fifth anchor point, 31 - sixth anchor point, 32 - seventh anchor point, 33 - eighth anchor point, 34 - ninth anchor point, 35 - tenth anchor point, 36 - first fixing member, 37 - second fixing member. Detailed Embodiments

[0027] The embodiments described below with reference to the drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0028] Refer to Figure 1 As shown, it is defined that the positive direction of the X-axis of the three-dimensional coordinate system with the center point of the substrate 1 as the origin points to the right, the positive direction of the Y-axis points upward, and the positive direction of the Z-axis points to the outside of the X and Y planes.

[0029] As Figure 1As shown in the figure, an embodiment of the present invention provides a MEMS gyroscope, which includes a substrate 1, a first unit 2 and a second unit 3. The first unit 2 and the second unit 3 are oppositely arranged on the substrate 1 along a first direction. In this embodiment, the first direction is defined as the X-axis direction. The first unit 2 and the second unit 3 adopt a symmetric layout, which can effectively suppress various common-mode interference signals and facilitate differential detection. The first unit 2 and the second unit 3 are connected by an elastic connecting member such as a coupling spring 4. A driving electrode 5 and a detection electrode 6 are also provided on the substrate 1. In some embodiments, the driving electrode 5 is symmetrically arranged between the first unit 2 and the second unit 3, and the detection electrode 6 is symmetrically arranged outside the first unit 2 and the second unit 3 (that is, on the side facing away from each other) and corresponds to the first unit 2 and the second unit 3. Among them:

[0030] The first unit 2 includes a first mass 7 and a second mass 8 that are oppositely arranged along a second direction. In this embodiment, the second direction is defined as the Y-axis direction. The MEMS gyroscope further includes a first set of coupling structures arranged on opposite sides of the first mass 7 and the second mass 8 along the second direction. The first set of coupling structures is connected to the first mass 7 and the second mass 8 through a first set of elastic beams 17 to realize the movement of the first mass 7 and the second mass 8 in the X-axis direction and the swing with the Y-axis as the axis direction.

[0031] The second unit 3 includes a third mass 9 and a fourth mass 10 that are oppositely arranged along a second direction. The MEMS gyroscope further includes a second set of coupling structures arranged on opposite sides of the third mass 9 and the fourth mass 10 along the second direction. The second set of coupling structures is connected to the third mass 9 and the fourth mass 10 through a second set of elastic beams 18. The coupling structures of the first set of coupling structures and the second set of coupling structures that are opposite to each other along the first direction are all connected by a coupling spring 4 to realize the movement of the third mass 9 and the fourth mass 10 in the X-axis direction and the torsion with the Y-axis as the axis. Among them, the first mass 7 and the third mass 9 are oppositely arranged along the X-axis direction, and the second mass 8 and the fourth mass 10 are oppositely arranged along the X-axis direction. Preferably, the structures and sizes of the first mass 7, the second mass 8, the third mass 9, and the fourth mass 10 are the same.

[0032] The MEMS gyroscope provided by the present invention is a symmetric structure along the first direction and / or the second direction. Preferably, the structure of the MEMS gyroscope involved in this embodiment is a completely symmetric structure along the X-axis and the Y-axis.

[0033] The MEMS gyroscope provided in this embodiment has at least two modes: a driving mode (the mass moves horizontally) and a detection mode (the mass swings out of the plane).

[0034] The driving mode is that the first mass block 7 and the third mass block 9 move in opposite directions along the x-axis simultaneously, and the second mass block 8 and the fourth mass block 10 move in opposite directions along the X-axis simultaneously. The principle is as follows: When an alternating current is applied to the driving electrode 5 and a direct current is applied to the mass block, and when the alternating current is positive, a repulsive force is generated between the driving electrode 5 and the mass block. When the alternating current is negative, an attractive force is generated between the driving electrode 5 and the mass block. Therefore, when an alternating current is applied to the driving electrode 5 and a direct current is applied to the mass block, it will cause the first mass block 7 and the third mass block 9 to move in opposite directions along the X-axis simultaneously, and the second mass block 8 and the fourth mass block 10 to move in opposite directions along the X-axis simultaneously.

[0035] In the driving mode, due to the symmetric difference design of the first mass block 7, the second mass block 8, the third mass block 9, and the fourth mass block 10, the movement directions of the two mass blocks are anti-phase, which is differential driving. It can effectively improve the stability of the gyroscope driving, and improve the quality factor and mechanical sensitivity of the gyroscope.

[0036] Through an external driving force, the gyroscope is driven to vibrate in the driving mode vibration mode. At this time, when the gyroscope is subjected to an angular velocity ω in the Y-axis direction, according to the Coriolis principle, the angular velocity ω will generate a resultant Coriolis force in the Z-axis direction, and the resultant Coriolis force will force the gyroscope to generate a vibration in the Y-axis detection mode vibration mode. Finally, by detecting the vibration displacement of the gyroscope in the Z-axis direction, the magnitude of the angular velocity ω can be obtained.

[0037] Furthermore, the driving electrodes 5 are symmetrically arranged between the first unit 2 and the second unit 3. Active driving interdigital fingers 19 are provided on the inner sides of the first mass block 7, the second mass block 8, the third mass block 9, and the fourth mass block 10. The active driving interdigital fingers 19 and the fixed driving interdigital fingers on the driving electrode 5 form a driving capacitance. The driving capacitance receives the driving signal provided by the peripheral circuit and generates the external driving force required to force the gyroscope to vibrate in the driving mode vibration mode.

[0038] Furthermore, a plurality of detection electrodes 6 correspond to the outer sides of the first unit 2 and the second unit 3 along the first direction and are respectively arranged at intervals with the first mass block 7, the second mass block 8, the third mass block 9, and the fourth mass block 10 to form a detection capacitance. The detection capacitance detects the vibration displacement of the gyroscope in the detection mode vibration direction, thereby obtaining the magnitude of the angular velocity ω.

[0039] Further, the first set of coupling structures includes a first coupling structure 11 disposed on the side of the first mass 7 away from the second mass 8, a second coupling structure 12 disposed between the first mass 7 and the second mass 8, and a third coupling structure 13 disposed on the side of the second mass 8 away from the first mass 7; the first coupling structure 11, the second coupling structure 12, and the third coupling structure 13 are connected to the first mass 7 and / or the second mass 8 through a first set of elastic beams 17. Specifically, the first coupling structure 11 is connected to the first mass 7, the second coupling structure 12 is connected to both the first mass 7 and the second mass 8, and the third coupling structure 13 is connected to the second mass 8.

[0040] The second set of coupling structures includes a fourth coupling structure 14 disposed on the side of the third mass 9 away from the fourth mass 10, a fifth coupling structure 15 disposed between the third mass 9 and the fourth mass 10, and a sixth coupling structure 16 disposed on the side of the fourth mass 10 away from the third mass 9; the fourth coupling structure 14, the fifth coupling structure 15, and the sixth coupling structure 16 are connected to the third mass 9 and / or the fourth mass 10 through a second set of elastic beams 18. Specifically, the fourth coupling structure 14 is connected to the third mass 9, the fifth coupling structure 15 is connected to both the third mass 9 and the fourth mass 10, and the sixth coupling structure 16 is connected to the fourth mass 10.

[0041] The first coupling structure 11 and the fourth coupling structure 14, the second coupling structure 12 and the fifth coupling structure 15, and the third coupling structure 13 and the sixth coupling structure 16 are symmetrically arranged along the Y-axis direction and are connected to each other through coupling springs 4. Preferably, the structures and dimensions of the first coupling structure 11, the second coupling structure 12, the third coupling structure 13, the fourth coupling structure 14, the fifth coupling structure 15, and the sixth coupling structure 16 are the same. In some embodiments, the cross-sections of the first coupling structure 11, the second coupling structure 12, the third coupling structure 13, the fourth coupling structure 14, the fifth coupling structure 15, and the sixth coupling structure 16 in the X, Y plane are regular octagons. Those skilled in the art can understand that the structures of the first coupling structure 11, the second coupling structure 12, the third coupling structure 13, the fourth coupling structure 14, the fifth coupling structure 15, and the sixth coupling structure 16 can be other regular or irregular figures, which are not limited herein.

[0042] The MEMS gyroscope further includes a plurality of anchor structures fixed to the substrate 1. The plurality of anchor structures include a first anchor 26, a second anchor 27, and a third anchor 28. A first groove 20 penetrates through the first coupling structure 11, and the first anchor 26 is disposed in the first groove 20. In some embodiments, the projection of the first anchor 26 on the Z axis falls within the first groove 20. The first anchor 26 is connected to the first coupling structure 11 where it is located through an elastic beam. The first groove 20 is preferably a circular groove. One end of the elastic beam is connected to the first anchor 26, and the other end of the elastic beam is connected to the inner wall of the first groove 20. A second groove 21 penetrates through the second coupling structure 12, and the second anchor 27 is disposed in the second groove 21. In some embodiments, the projection of the second anchor 27 on the Z axis falls within the second groove 21. The second anchor 27 is connected to the second coupling structure 12 through an elastic beam. One end of the elastic beam is connected to the second anchor 27, and the other end of the elastic beam is connected to the inner wall of the second groove 21. A third groove 22 penetrates through the third coupling structure 13, and the third anchor 28 is disposed in the third groove 22. In some embodiments, the projection of the third anchor 28 on the Z axis falls within the third groove 22. The third anchor 28 is connected to the third coupling structure 13 through an elastic beam. One end of the elastic beam is connected to the third anchor 28, and the other end of the elastic beam is connected to the inner wall of the third groove 22.

[0043] The plurality of anchor structures further include a fourth anchor 29, a fifth anchor 30, and a sixth anchor 31. A fourth groove 23 penetrates through the fourth coupling structure 14, and the fourth anchor 29 is disposed in the fourth groove 23. In some embodiments, the projection of the fourth anchor 29 on the Z axis falls within the fourth groove 23. The fourth anchor 29 is connected to the fourth coupling structure 14 through an elastic beam. One end of the elastic beam is connected to the fourth anchor 29, and the other end of the elastic beam is connected to the inner wall of the fourth groove 23. A fifth groove 24 penetrates through the fifth coupling structure 15, and the fifth anchor 30 is disposed in the fifth groove 24. In some embodiments, the projection of the fifth anchor 30 on the Z axis falls within the fifth groove 24. The fifth anchor 30 is connected to the fifth coupling structure 15 through an elastic beam. One end of the elastic beam is connected to the fifth anchor 30, and the other end of the elastic beam is connected to the inner wall of the fifth groove 24. A sixth groove 25 penetrates through the sixth coupling structure 16, and the sixth anchor 31 is disposed in the sixth groove 25. In some embodiments, the projection of the sixth anchor 31 on the Z axis falls within the sixth groove 25. The sixth anchor 31 is connected to the sixth coupling structure 16 through an elastic beam. One end of the elastic beam is connected to the sixth anchor 31, and the other end of the elastic beam is connected to the inner wall of the sixth groove 25.

[0044] The anchor structure further includes a seventh anchor 32 and an eighth anchor 33. The seventh anchor 32 is disposed on a side of the first mass 7 away from the second mass 8. The first mass 7 is connected to the seventh anchor 32 through an elastic beam. The eighth anchor 33 is disposed on a side of the second mass 8 away from the first mass 7. The second mass 8 is connected to the eighth anchor 33 through an elastic beam.

[0045] The anchor structure further includes a ninth anchor 34 and a tenth anchor 35. The ninth anchor 34 is disposed on a side of the third mass 9 away from the fourth mass 10. The third mass 9 is connected to the ninth anchor 34 through an elastic beam. The tenth anchor 35 is disposed on a side of the fourth mass 10 away from the third mass 9. The fourth mass 10 is connected to the tenth anchor 35 through an elastic beam.

[0046] The first unit 2 further includes a first fixing member 36 disposed between the first mass 7 and the second mass 8 and connected to the first mass 7 and / or the second mass 8 and fixed to the substrate 1. The second unit 3 further includes a second fixing member 37 disposed between the third mass 9 and the fourth mass 10 and connected to the third mass 9 and / or the fourth mass 10 and fixed to the substrate 1.

[0047] In some embodiments, when the gyroscope is in the driving mode, the first mass 7 and the second mass 8 move along the X-axis direction and approach each other, and the third mass 9 and the fourth mass 10 move along the X-axis direction and move away from each other, thereby driving the first coupling structure 11 to rotate counterclockwise about the first anchor 26, the second coupling structure 12 to rotate clockwise about the second anchor 27, the third coupling structure 13 to rotate counterclockwise about the third anchor 28, the fourth coupling structure 14 to rotate clockwise about the fourth anchor 29, the fifth coupling structure 15 to rotate counterclockwise about the fifth anchor 30, and the sixth coupling structure 16 to rotate clockwise about the sixth anchor 31.

[0048] When the gyroscope is in the detection mode, the first mass 7, the second mass 8, the third mass 9, and the fourth mass 10 all swing about the Y-axis. In some embodiments, the outer side of the first mass 7 swings towards the -Z axis, the outer side of the second mass 8 swings towards the +Z axis, the outer side of the third mass 9 swings towards the +Z axis, and the outer side of the fourth mass 10 swings towards the -Z axis.

[0049] The structure, features, and effects of the present invention have been described in detail based on the embodiments shown in the drawings. The above are only the preferred embodiments of the present invention, but the present invention is not limited to the scope shown in the drawings. Any changes made according to the concept of the present invention, or equivalent embodiments modified into equivalent changes, still within the spirit covered by the specification and the drawings, shall be within the protection scope of the present invention.

Claims

1. A MEMS gyroscope, comprising a substrate, a first unit and a second unit. The first unit and the second unit are oppositely arranged on the substrate along a first direction. The first unit and the second unit are connected by a coupling spring. The substrate is further provided with a driving electrode and a plurality of detection electrodes, and is characterized in that: The first unit includes a first mass block and a second mass block oppositely arranged along a second direction perpendicular to the first direction. The MEMS gyroscope further includes a first set of coupling structures arranged on opposite sides of the first mass block and the second mass block along the second direction. The first set of coupling structures is connected to the first mass block and the second mass block through a first set of elastic beams; The second unit includes a third mass block and a fourth mass block oppositely arranged along the second direction. The MEMS gyroscope further includes a second set of coupling structures arranged on opposite sides of the third mass block and the fourth mass block along the second direction. The second set of coupling structures is connected to the third mass block and the fourth mass block through a second set of elastic beams. The coupling structures opposite to each other along the first direction in the first set of coupling structures and the second set of coupling structures are all connected by the coupling spring; The first set of coupling structures includes a first coupling structure arranged on a side of the first mass block away from the second mass block, a second coupling structure arranged between the first mass block and the second mass block, and a third coupling structure arranged on a side of the second mass block away from the first mass block. The first coupling structure, the second coupling structure and the third coupling structure are connected to the first mass block and / or the second mass block through the first set of elastic beams; The second set of coupling structures includes a fourth coupling structure arranged on a side of the third mass block away from the fourth mass block, a fifth coupling structure arranged between the third mass block and the fourth mass block, and a sixth coupling structure arranged on a side of the fourth mass block away from the third mass block. The fourth coupling structure, the fifth coupling structure and the sixth coupling structure are connected to the third mass block and / or the fourth mass block through the second set of elastic beams; The first coupling structure and the fourth coupling structure, the second coupling structure and the fifth coupling structure, and the third coupling structure and the sixth coupling structure are all connected by the coupling spring.

2. The MEMS gyroscope according to claim 1, wherein, The driving electrode is arranged between the first unit and the second unit. Moving driving interdigital fingers are arranged on the inner sides of the first mass block, the second mass block, the third mass block and the fourth mass block. The moving driving interdigital fingers and the fixed driving interdigital fingers on the driving electrode form a driving capacitor.

3. The MEMS gyroscope according to claim 2, wherein The plurality of detection electrodes correspond to the outer sides of the first unit and the second unit along the first direction and are respectively arranged at intervals with the first mass block, the second mass block, the third mass block and the fourth mass block to form detection capacitors.

4. The MEMS gyroscope according to claim 1, wherein, The MEMS gyroscope further includes a plurality of anchor structures fixed to the substrate. A first groove penetrates through the first coupling structure, a second groove penetrates through the second coupling structure, and a third groove penetrates through the third coupling structure. The plurality of anchor structures include a first anchor, a second anchor, and a third anchor disposed in the first groove, the second groove, and the third groove respectively. The first unit of the MEMS gyroscope is fixed to the substrate through the first anchor, the second anchor, and the third anchor; A fourth groove penetrates through the fourth coupling structure, a fifth groove penetrates through the fifth coupling structure, and a sixth groove penetrates through the sixth coupling structure. The plurality of anchor structures further include a fourth anchor, a fifth anchor, and a sixth anchor disposed in the fourth groove, the fifth groove, and the sixth groove respectively. The second unit of the MEMS gyroscope is fixed to the substrate through the fourth anchor, the fifth anchor, and the sixth anchor.

5. The MEMS gyroscope according to claim 4, wherein, The plurality of anchor structures are respectively connected to the coupling structure where they are located through at least one elastic beam.

6. The MEMS gyroscope according to claim 5, wherein The anchor structure further includes a seventh anchor disposed on a side of the first mass block away from the second mass block and fixed to the substrate, and an eighth anchor disposed on a side of the second mass block away from the first mass block and fixed to the substrate. The seventh anchor and the eighth anchor are respectively connected to the first mass block or the second mass block through elastic beams.

7. The MEMS gyroscope according to claim 5, characterized in that, The anchor structure further includes a ninth anchor disposed on a side of the third mass block away from the fourth mass block and fixed to the substrate, and a tenth anchor disposed on a side of the fourth mass block away from the third mass block and fixed to the substrate. The ninth anchor and the tenth anchor are respectively connected to the third mass block or the fourth mass block through elastic beams.

8. The MEMS gyroscope according to claim 1, wherein, The first unit further includes a first fixing member disposed between the first mass block and the second mass block, connected to the first mass block and / or the second mass block, and fixed to the substrate; the second unit further includes a second fixing member disposed between the third mass block and the fourth mass block, connected to the third mass block and / or the fourth mass block, and fixed to the substrate.

9. The MEMS gyroscope according to claim 1, characterized in that, The MEMS gyroscope is a symmetric structure along the first direction and / or the second direction.

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