Failure analysis device

By using a high-transparent glass substrate and adapter plate structure in the failure analysis device, problems such as needle injection time and needle tip damage are solved, and the stability and efficiency of chip testing are improved, reducing costs.

CN114624568BActive Publication Date: 2025-08-08YANGTZE MEMORY TECH CO LTD
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Patent Information

Application Number
CN202210173710.9
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-02-24
Publication Date
2025-08-08
Estimated Expiration
2042-02-24

AI Technical Summary

Technical Problem

During the chip testing process, existing failure analysis devices have problems such as long needle insertion, needle tip damage, poor contact, difficult operation and high cost, especially the testing of multi-chip packaging structures.

Method used

The structure of a high-transparent glass substrate and an adapter plate is adopted. Multiple pad arrays are provided on the substrate, which are connected to the chip through the pads. Combined with the fixing method of the PCB board and the adapter plate, the needle insertion process is simplified, and the contact stability and the number of substrate utilization are improved.

Benefits of technology

It improves the stability and efficiency of chip testing, reduces the risk of needle tip damage and poor contact, extends the service life of the substrate, simplifies the operation process, and reduces costs.

✦ Generated by Eureka AI based on patent content.

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Abstract

Disclosed is a failure analysis device comprising: a substrate including a plurality of first pads and a plurality of second pads that are in one-to-one correspondence and electrically connected, wherein the first pads are configured to connect to a third pad of a chip; wherein a test signal is applied to the chip via the second pads on the substrate. The failure analysis device of this application utilizes high-transmittance glass as the substrate for securing the chip, and utilizes the first and second pads formed on the substrate to improve contact during probe testing, thereby enhancing test stability.
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Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor testing, and in particular to a failure analysis device. Background Art

[0002] Failure analysis of packaged chips (PKGs) typically requires I / V curves to measure and verify the electrical properties, parameters, and characteristics of the components. Chip failure localization is then performed using methods such as EMMI (micro-light microscopy), OBIRCH (beam-induced resistance variation), and thermal (hotspot location). For single-chip packaged samples, the plastic encapsulation can be removed to remove the chip, or hotspot location can be performed after sufficient processing to expose the chip's front or back surface. For multi-chip stacked packaged samples, the faulty chip must first be identified.

[0003] In the process of identifying the failed chip and locating the defect of the failed chip, probe cards are often used for testing. Figure 1a The processed chip 110 is fixed on the substrate 120 through the colloid 121, and then the corresponding pad 111 on the chip 110 is pierced with a probe 131 of the PCB board 130. The test signal is applied to the chip 110 through the PCB board 130 and the probe 131, and the I / V curve of the chip 110 is obtained.

[0004] However, the following problems exist in the electrical testing of the chip using this method: (1) It is necessary to use a probe station to poke the pads 111 on the chip 110. It takes a long time to switch the number of pokes and the poke position during the entire test process. The contact between the needle tip and the pad 111 is very likely to damage the needle tip, resulting in waste. In addition, the inconsistency of the contact resistance will lead to fluctuations in the test data. (2) After removing the plastic package, it is difficult to achieve completely flat adhesion when the chip is fixed to the substrate with the help of hot melt adhesive. It is also difficult to treat the metal residue of the chip pad to the same level. These will lead to problems such as the needle not being able to poke or poor contact, and even some needles may be poke too deep while other needles are not poke, causing damage to the chip or damage to the PCB board. (3) Testing at the package chip level requires The packaging structure needs to be processed to expose the pads on the back. When grabbing the points on the front, a flip table is required. During this process, the influence of gravity and vibration can easily lead to poor contact between the needle tip and the sample, making the operation difficult. (4) The socket method can only grab the points on the front, and the method of re-wiring the PCB board with the socket needs to be based on actual needs, that is, the PKG sample can be processed accordingly by needle-piercing on the back and grabbing on the front, or grabbing on the front and needle-piercing on the back. (5) The method of connecting the chip pads to the PCB through metal wires for testing requires the use of sandpaper or polishing cloth to grind the PCB board, which can easily cause damage or short circuit of the internal circuit. Therefore, the number of times the PCB board can be used will be limited, and the corresponding cost will increase. Summary of the Invention

[0005] In view of the above problems, the object of the present invention is to provide a failure analysis device, which increases the number of uses of a PCB board and is not restricted in the needle-piercing and gripping methods of the chip.

[0006] According to one aspect of the present invention, a failure analysis device is provided, comprising: a substrate including a plurality of first pads and a plurality of second pads that correspond to each other and are electrically connected, the first pads being used to connect to the third pads of a chip; wherein the substrate is made of high-transmittance glass, and a test signal is applied to the chip through the second pads.

[0007] Optionally, it also includes: a PCB board, including a connector and a through hole, the connector is used to connect to the testing machine, and the through hole is used to accommodate at least a portion of the substrate; an adapter board, including a plurality of fourth solder pads, the plurality of fourth solder pads are used to correspond one-to-one and connect with the plurality of second solder pads of the substrate and the connector respectively.

[0008] Optionally, the area of the second pad of the substrate is larger than the area of the first pad.

[0009] Optionally, it further includes: a clip located on the PCB board, and the clip is used to fix the base board and / or the adapter board.

[0010] Optionally, one side of the adapter board further includes a through-hole pad, the through-hole pad includes a plurality of fifth pads, and the plurality of fifth pads correspond one-to-one to the plurality of fourth pads and are electrically connected.

[0011] Optionally, the clip includes a first clip and a second clip, wherein a plurality of sixth solder pads are formed in the first clip, the plurality of sixth solder pads are electrically connected to the adapter, and the plurality of sixth solder pads are used to correspond one-to-one and be connected to the plurality of fifth solder pads; the second clip is used to disassemble and install the adapter board.

[0012] Optionally, the shape of the through hole in the PCB board matches the shape of the substrate, so as to be embedded in the substrate.

[0013] Optionally, the fourth pad is a spring pin or a hemispherical metal, and the sixth pad is a spring pin.

[0014] Optionally, the adapter board and the PCB board are integrally formed, and the fourth solder pad is connected to the connector.

[0015] Optionally, the through hole is used to accommodate a chip fixed on the substrate.

[0016] Optionally, it further includes: a snap cover, used together with the snap to fix the substrate.

[0017] Optionally, the substrate is made of high-transmittance glass.

[0018] Optionally, it further includes: a locking plate located on the PCB board, a first probe in the locking plate electrically connected to a connector; a second probe located around the locking plate, the second probe electrically connected to the connector.

[0019] Optionally, the failure analysis device is used to perform failure analysis on the chip.

[0020] The failure analysis device provided by the present invention has a substrate made of high-transmittance glass and is provided with a plurality of first and second pads. The first and second pads are connected in a one-to-one correspondence via wires. The first pads are then connected to the third pads of the chip. Electrical testing of the chip is performed by puncturing the second pads with a needle and applying a test signal. The use of high-transmittance glass as a substrate, because it is light-transmissive, allows for unlimited point-grabbing methods.

[0021] Furthermore, the second pads on the substrate are arranged in an array and have a large area. In addition, the second pads are flat and have no metal residue and are in the same plane. Therefore, when testing the chip, piercing the needle through the second pad can not only avoid damage to the needle tip and the chip, but also reduce poor contact and improve the stability of contact resistance, thereby reducing fluctuations in test data.

[0022] Furthermore, the substrate can be polished, ground, pickled, or other operations to remove metal residue from the first pads, thereby increasing the number of times the substrate can be used. Furthermore, the first pads on the substrate can be appropriately lengthened and widened to increase the number of metal connections between the chip and the first pads, thereby increasing the number of times the substrate can be used.

[0023] In one embodiment, a through-hole matching the shape of the substrate is provided on the PCB, and a clip for securing the substrate is formed around the through-hole. Furthermore, an adapter plate is included, which has a fourth pad corresponding one-to-one with the second pad. When securing the substrate to the PCB, the fourth pad of the adapter plate is placed face-to-face with the second pad of the substrate and secured. One side of the adapter plate has a direct-insert pad that can be connected to the PCB, thereby achieving an electrical connection with the chip. Using an adapter plate can replace the cumbersome card racking process of the needle test method, thereby saving a considerable amount of time.

[0024] In another embodiment, the adapter card is formed integrally with the PCB board. When the base plate is connected to the PCB board, the second solder pad contacts the fourth solder pad of the adapter board to achieve electrical connection with the chip, thereby reducing the number of components of the failure analysis device and reducing the risk of damage or loss of the adapter board.

[0025] In another embodiment, a locking plate is further provided on the PCB board, a through slot is provided at the center of the locking plate, a plurality of socket substrates are provided in the through slot, and a plurality of probes are provided near the through slot of the locking plate, so that the failure analysis device can also perform failure analysis on the chip under the packaging structure.

[0026] Furthermore, with the help of pins, the packaged chip can be directly measured using an improved BNC-to-plug cable, avoiding needle tip contact, reducing machine usage and needle waste, solving the contact resistance problem, and improving operating efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The above and other objects, features and advantages of the present invention will become more apparent through the following description of the embodiments of the present invention with reference to the accompanying drawings, in which:

[0028] Figures 1a to 1d Shows the structure of four failure analysis devices in the prior art;

[0029] Figures 2a to 2f It shows a structural diagram of a failure analysis device according to a first embodiment of the present invention;

[0030] Figures 3a to 3c A method for using the failure analysis device according to the first embodiment of the present invention is shown;

[0031] Figure 4a and Figure 4b Shows a structural diagram of a failure analysis device and a method of use according to a second embodiment of the present invention;

[0032] Figure 5 FIG. 1 shows a structural diagram of a failure analysis device according to a third embodiment of the present invention. DETAILED DESCRIPTION

[0033] Various embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. In each of the accompanying drawings, identical elements are represented by identical or similar reference numerals. For the sake of clarity, the various parts in the accompanying drawings are not drawn to scale.

[0034] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, article, or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, article, or device. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of additional identical elements in the process, article, or device comprising the element.

[0035] Figures 1a to 1d The following are structural diagrams of four failure analysis devices in the prior art.

[0036] refer to Figure 1a In the first failure analysis device, a defective chip 110 is fixed to a substrate 120 by means of a colloid 121, and then the pads 111 of the chip 110 are pierced with a probe through a PCB board with a probe 131 for testing. However, in this method, it is difficult to achieve completely smooth adhesion when the chip 110 is fixed to the substrate 120 by means of the colloid 121 after removing the plastic package, and it is also difficult to treat the metal residue on the pads 111 of the chip 110 to the same level. These problems may lead to problems such as the probe not being able to penetrate or poor contact, and even the situation where some needles penetrate too deeply while others are not penetrated, causing damage to the chip 110 or damage to the PCB board 130. Furthermore, it may be necessary to use a probe station to penetrate the pads 111 on the chip 110. During the entire test process, it takes a long time to change the number of needles and the needle position. The contact between the needle tip and the pad 111 is very likely to damage the needle tip, resulting in waste. In addition, the inconsistency of the contact resistance will lead to fluctuations in the test data.

[0037] refer to Figure 1bIn another failure analysis device, a locking plate 133 is provided on the PCB board 130, and the electrical test of the chip in the packaged state is performed through the socket in the locking plate 133. However, in this method, the socket method can only be used to grasp the points on the front side, and the method of re-wiring the PCB board 130 with the socket needs to be based on actual needs, that is, the PKG sample is processed accordingly by pricking the back side with needles and grasping the points on the front side, or grasping the points on the front side with needles on the back side. Furthermore, the test at the package chip level requires processing the package structure to expose the pads on the back side, and when grasping the points on the front side, it is necessary to use a flip table. During this process, due to the influence of gravity and vibration, it is very easy to cause the needle tip and the sample to have poor contact, and the operation is difficult.

[0038] refer to Figure 1c and Figure 1d In another failure analysis device, chip 110 is fixed to a predetermined area 134 of PCB 130 or to substrate 120. Then, metal wires are used to connect pads 111 on chip 110 to corresponding pads on PCB 130, thereby performing an electrical test on chip 110. However, this method requires polishing PCB 130 with sandpaper or a polishing cloth after each test. This can easily damage or short-circuit the internal circuits of PCB 130, thus limiting the number of times PCB 130 can be used, and increasing costs.

[0039] The inventors of the present application have noted the above problems and provided a failure analysis device.

[0040] The specific implementation of the present invention is further described in detail below with reference to the accompanying drawings and examples.

[0041] Figures 2a to 2f It shows a structural diagram of a failure analysis device according to a first embodiment of the present invention; Figures 3a to 3c A method of using the failure analysis device according to the first embodiment of the present invention is shown.

[0042] The failure analysis device disclosed in the present application includes a substrate 220, a PCB board 230 and an adapter board 240. The failure analysis device is used to perform failure analysis on a chip.

[0043] Among them, reference Figure 2a , Figure 2b , Figure 3a and Figure 3bSubstrate 220 is made of high-transmittance glass and is divided into a first region and a second region. The first region is the chip connection region, used to secure the chip 210 to be tested, and the second region is the signal connection region, used to connect electrical signals to PCB 230. The width of the second region is, for example, smaller than that of the first region, resulting in a "convex" shape for substrate 220.

[0044] Specifically, the first surface of the substrate 220 includes a plurality of linearly arranged first pads 221 in the first region, and a plurality of array-arranged second pads 222 in the second region. The first pads 221 are relatively narrow but relatively long, and the second pads 222 are larger in area than the first pads 221. When the chip 210 to be tested is fixed to the first region of the substrate 220 using the colloid 201, the chip 210 does not block the first pads 221. The third pads 211 of the chip 210 are connected to the first pads 221 of the substrate 220 via the metal wire 202. Figure 3b In addition, the first pad 221 and the second pad 222 on the substrate 220 are connected by a wire 223. Since the third pad 211 of the chip 210 is connected to the first pad 221, the chip 210 and the second pad 222 are also electrically connected.

[0045] In this embodiment, the second pad 222 can be probed with a probe to perform electrical testing on the chip 210. Using high-transmittance glass as the substrate 220 does not affect the probing and gripping of the chip 210. At the same time, the longer first pad 221 can increase the number of connections between the chip 210 and the substrate 220. Using a larger and flatter second pad as the probing pad can improve the contact effect during probing, thereby improving the stability of the test. In addition, high-transmittance glass can be polished, ground, pickled, and other operations to remove metal residues on the first pad, thereby increasing the number of times the substrate can be used.

[0046] The PCB board 230 includes a through hole 231 that matches the shape of the substrate 220, which is used to embed the substrate 220 into the PCB board 230; on both sides of the through hole 231 on the first surface of the PCB board 230 corresponding to the second area of the substrate 220, there is a set of clips 232, which are used to fix the substrate 220 and the adapter board 240; on the top of the PCB board 230, there is also a connector 234, which is used to connect to the test machine to provide test signals to the PCB board 230.

[0047] The adapter plate 240 is a rectangle slightly larger than the second area of the substrate 220. Specifically, the width of the adapter plate 240 is greater than the width of the second area, so that the adapter plate 240 will not move through the through hole 231 when it is fixed by the buckle 232 on the PCB board 230.

[0048] On the first surface of the adapter plate 240, a fourth pad 241 is formed that corresponds to the second pad 222 of the substrate 220. When the substrate 220 is fixed to the PCB board 230 and the adapter plate 240 is also fixed to the PCB board 230 by the buckle 232, the second pad 222 can correspond to and contact the fourth pad 241. Figure 3c In addition, one side of the adapter board 240 further includes a through-hole pad 242 , and the through-hole pad 242 includes a plurality of fifth pads that correspond one-to-one to and are connected to the fourth pads 241 .

[0049] In this embodiment, the fourth pad 241 of the adapter board 240 is a spring pin or a metal ball, such as Figure 2d shown.

[0050] Further, refer to Figure 2e , Figure 2f and Figure 3c , Figure 2e and Figure 2f For the sake of separation Figure 2c An enlarged cross-sectional view of lines AA and BB. The latch 232 includes a first latch 232a and a second latch 232b. The first latch 232a corresponds to the through-hole solder pad 242 of the adapter board 240, while the second latch 232b is rotatable for installing and removing the adapter board 240. Specifically, the first latch 232a, corresponding to the through-hole solder pad 242 of the adapter board 240, has a space that matches the shape of the through-hole solder pad 242. Furthermore, the first latch 232a has a sixth solder pad 237 that corresponds one-to-one with the fifth solder pad in the through-hole solder pad 242. The sixth solder pad is, for example, a spring-loaded solder pad.

[0051] When fixing the adapter plate 240 to the PCB board 230, first open the clip 232b and rotate it to one side. Then, face the side of the adapter plate 240 with the fourth solder pad 241 toward the PCB board 230, insert the plug-in solder pad 242 of the adapter plate 240 into the clip 232a, and then fix the clip 232b to fix the adapter plate 240 to the PCB board 230.

[0052] In addition, reference Figure 3c and Figure 3c When the substrate 220 is embedded in the through hole 231 of the PCB board 230, the adhesive tape 204 is used to fix the substrate 220 and the PCB board 230. In other embodiments, other fixing structures can also be used.

[0053] In the failure analysis structure of the first embodiment provided in the present application, the connector 234 is used to connect to the test machine to obtain the test signal. In addition, the connector 234 is connected to the sixth pad 237 in the buckle 232 through a trace, the sixth pad 237 is connected to the plug-in pad 242 of the adapter board 240, the plug-in pad 242 is connected to the fourth pad 241, the fourth pad 241 is connected to the second pad 222 of the substrate, and the second pad 222 is connected to the third pad 211 of the chip 210 through the conductor 223, the first pad 221 and the metal wire 202, so that the test signal reaches the chip 210.

[0054] In this embodiment, the chip 210 is tested through the adapter board 240 and the PCB board 230. Since the connector can be directly connected to the tester, the card mounting process and multiple needle insertion processes when using the probe method are omitted, thereby simplifying the operation process.

[0055] Figure 4a and Figure 4b The structure diagram and usage method of the failure analysis device according to the second embodiment of the present invention are shown. Compared with the first embodiment, in the failure analysis device of the second embodiment, the adapter board and the PCB board are formed integrally.

[0056] refer to Figure 4a and Figure 4b In the failure analysis device of the second embodiment, the shape and size of the through hole 231 of the PCB 230 correspond to the first region of the substrate 220. A fourth solder pad 235 is formed at a position on the PCB 230 corresponding to the second region of the substrate 220. The fourth solder pad 235 is connected to the connector 234 on the PCB 230. Furthermore, a snap-on cover 236 is included for securing the substrate 220 to the PCB 230.

[0057] In this embodiment, after the chip 210 is fixed and electrically connected to the substrate 220, the second solder pad 222 in the substrate 220 is placed in a corresponding position toward the direction of the fourth solder pad 235 of the PCB board 230, wherein the through hole 231 is used to accommodate the chip 210 fixed on the substrate 220, the second solder pad 222 corresponds to the fourth solder pad 235 one-to-one and is electrically connected, and the substrate 220 and the PCB board 230 are fixedly connected by the snap cover 236, and the snap 232 is only used to fix the snap cover 236.

[0058] In this embodiment, the adapter board and the PCB board 230 are formed integrally, which can reduce the number of connection channels between the pads, thereby reducing the cost of the failure analysis device.

[0059] Figure 5FIG2 shows a structural diagram of a failure analysis device according to a third embodiment of the present invention. Compared with the first embodiment and / or the second embodiment, the failure analysis device of the third embodiment preferably includes a locking plate 238 and a probe 237 .

[0060] This embodiment builds upon the failure analysis devices of the first and second embodiments by adding a locking plate 238 to the PCB 230. Locking plate 238 includes multiple sockets for electrical testing of packaged chips. Probes 237 are formed around locking plate 238 and correspond to and are electrically connected to connector 234, allowing electrical testing of chip 210 in locking plate 238 to be performed via probes 237.

[0061] In addition, the failure analysis device of the present application also includes an adapter 250, such as Figure 5 As shown, when the multiple pads and probes on PCB 230 are electrically connected, the I / V data of chip 210 can be directly tested through the adapter. For example, after applying a test signal to chip 210 through connector 234 of PCB 230, the I / V curve of chip 210 can be directly obtained by connecting to a corresponding instrument through probe 237 and adapter 250.

[0062] The failure analysis device provided by the present invention has a substrate made of high-transmittance glass and is provided with a plurality of first and second pads. The first and second pads are connected in a one-to-one correspondence via wires. The first pads are then connected to the third pads of the chip. Electrical testing of the chip is performed by puncturing the second pads with a needle and applying a test signal. The use of high-transmittance glass as a substrate, because it is light-transmissive, allows for unlimited point-grabbing methods.

[0063] Furthermore, the second pads on the substrate are arranged in an array and have a large area. In addition, the second pads are flat and have no metal residue and are in the same plane. Therefore, when testing the chip, piercing the needle through the second pad can not only avoid damage to the needle tip and the chip, but also reduce poor contact and improve the stability of contact resistance, thereby reducing fluctuations in test data.

[0064] Furthermore, the substrate can be polished, ground, pickled, or other operations to remove metal residue from the first pads, thereby increasing the number of times the substrate can be used. Furthermore, the first pads on the substrate can be appropriately lengthened and widened to increase the number of metal connections between the chip and the first pads, thereby increasing the number of times the substrate can be used.

[0065] In one embodiment, a through-hole matching the shape of the substrate is provided on the PCB, and a clip for securing the substrate is formed around the through-hole. Furthermore, an adapter plate is included, which has a fourth pad corresponding one-to-one with the second pad. When securing the substrate to the PCB, the fourth pad of the adapter plate is placed face-to-face with the second pad of the substrate and secured. One side of the adapter plate has a direct-insert pad that can be connected to the PCB, thereby achieving an electrical connection with the chip. Using an adapter plate can replace the cumbersome card racking process of the needle test method, thereby saving a considerable amount of time.

[0066] In another embodiment, the adapter card is fixedly connected to the PCB board. When the base plate is connected to the PCB board, the second solder pad contacts the fourth solder pad of the adapter board to achieve electrical connection with the chip, thereby reducing the number of components of the failure analysis device and reducing the risk of damage or loss of the adapter board.

[0067] In another embodiment, a locking plate is further provided on the PCB board, a through slot is provided at the center of the locking plate, a plurality of socket substrates are provided in the through slot, and a plurality of probes are provided near the through slot of the locking plate, so that the failure analysis device can also perform failure analysis on the chip under the packaging structure.

[0068] Furthermore, with the help of pins, the packaged chip can be directly measured using an improved BNC-to-plug cable, avoiding needle tip contact, reducing machine usage and needle waste, solving the contact resistance problem, and improving operating efficiency.

[0069] While embodiments of the present invention have been described above, these embodiments do not exhaustively describe all details and do not limit the invention to the specific embodiments described. Obviously, many modifications and variations are possible based on the above description. These embodiments are selected and described in detail in this specification in order to better explain the principles and practical applications of the present invention, thereby enabling those skilled in the art to better utilize the present invention and its modifications. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A failure analysis device, characterized in that: include: a substrate comprising a plurality of first pads and a plurality of second pads corresponding to each other and electrically connected to each other, wherein the first pads are used to connect to the third pads of the chip; A PCB board, comprising a connector and a through hole, wherein the connector is used to connect to the test machine, and the through hole is used to accommodate at least a portion of the substrate; an adapter board, comprising a plurality of fourth solder pads, the plurality of fourth solder pads being configured to correspond one-to-one with and be connected to the plurality of second solder pads of the substrate and the connector; A buckle is located on the PCB board and is used to fix the base board and / or the adapter board; The shape of the through hole in the PCB board matches the shape of the substrate, and is used to be embedded in the substrate, and a test signal is applied to the chip through the second pad in the substrate; The buckle includes a first buckle and a second buckle, a plurality of sixth solder pads are formed in the first buckle, the plurality of sixth solder pads are electrically connected to the adapter board, and the second buckle is used for disassembling and installing the adapter board.

2. The failure analysis device according to claim 1, wherein: The area of the second pad of the substrate is larger than that of the first pad.

3. The failure analysis device according to claim 2, wherein: One side of the adapter board further includes a through-hole pad, and the through-hole pad includes a plurality of fifth pads, and the plurality of fifth pads correspond to the plurality of fourth pads in a one-to-one manner and are electrically connected.

4. The failure analysis device according to claim 3, wherein: The plurality of sixth solder pads of the second clip are used for corresponding to and connecting with the plurality of fifth solder pads one by one.

5. The failure analysis device according to claim 4, wherein: The fourth pad is a spring pin or a hemispherical metal, and the sixth pad is a spring pin.

6. The failure analysis device according to claim 1, wherein: The adapter board and the PCB board are integrally formed, and the fourth solder pad is connected to the connector.

7. The failure analysis device according to claim 6, wherein: The through hole is used to accommodate the chip fixed on the substrate.

8. The failure analysis device according to claim 7, wherein: Also includes: A buckle cover is used together with the buckle to fix the substrate.

9. The failure analysis device according to any one of claims 1 to 8, characterized in that: The substrate is made of high-transmittance glass.

10. The failure analysis device according to any one of claims 1 to 8, characterized in that: Also includes: A locking plate is located on the PCB, wherein the first probe in the locking plate is electrically connected to the connector; The second probe is located around the locking plate, and the second probe is electrically connected to the connector.

11. The failure analysis device according to claim 10, wherein: The failure analysis device is used to perform failure analysis on the chip.

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