Arrangement device and arrangement method

Abstract

The present invention provides an arrangement device and an arrangement method. The arrangement device may include a light irradiation component, a reflection component, a detection component, and an adjustment component. The light irradiation component is capable of irradiating linear light in a direction perpendicular to the components arranged relative to an object. The reflection component is capable of reflecting the linear light irradiated from the light irradiation component. The detection component is capable of detecting light reflected from the reflection component and generating a detection signal based on the detected light. The adjustment component is capable of receiving a detection signal from the detection component, confirming the arrangement of the arranged components relative to the object based on the detection signal, and adjusting the arrangement between the object and the arranged components. Utilizing the arrangement device can improve the reliability of a display device including an organic light-emitting display device.

Description

[0001] This application claims priority from Korean Invention Application No. 10-2020-0175759 filed with the Korean Intellectual Property Office on December 15, 2020. Technical Field

[0002] Exemplary embodiments of the present invention relate to an aligning device and an aligning method, and more particularly, to an aligning device for a chemical liquid supplying member capable of supplying chemical liquid onto a substrate and an aligning method using the aligning device. Background Art

[0003] To manufacture a display device including an organic light-emitting display, a plurality of pixels are formed on a substrate using a chemical supply component, such as an inkjet head. To achieve this, a chemical supply component is required to supply chemical liquid to the substrate. In this process, the chemical liquid is supplied to the plurality of areas of the substrate for forming the plurality of pixels, as the spacing between the pixels is less than several micrometers. Therefore, the chemical supply component for supplying the chemical liquid to the areas of the substrate must be accurately aligned with respect to the substrate.

[0004] However, the existing alignment device uses a camera to align the liquid medicine supply components relative to the substrate. Therefore, the existing alignment device cannot precisely align the liquid medicine supply components relative to the substrate in order to form pixels with fine sizes. Summary of the Invention

[0005] Technical issues

[0006] An object of the present invention is to provide an aligning device for accurately aligning components to be aligned with respect to an object.

[0007] Another object of the present invention is to provide a method for accurately aligning components relative to an object.

[0008] Another object of the present invention is to provide an aligning device for accurately aligning a chemical liquid supply component relative to a substrate.

[0009] Technical Solution

[0010] According to one aspect of the present invention, an arrangement device is provided that includes a light irradiation component, a reflection component, a detection component, and an adjustment component. The light irradiation component is capable of irradiating linear light in a direction perpendicular to components arranged relative to an object. The reflection component is capable of reflecting the linear light irradiated from the light irradiation component. The detection component is capable of detecting light reflected from the reflection component and generating a detection signal based on the detected light. The adjustment component is capable of receiving the detection signal from the detection component, confirming the arrangement of the arranged components relative to the object based on the detection signal, and adjusting the arrangement between the object and the arranged components.

[0011] In an exemplary embodiment, the light irradiation member may include a laser generator.

[0012] In an exemplary embodiment, the reflecting component may include the 1st parallel reflecting plate to the Nth (where N is a positive integer greater than 2) parallel reflecting plate parallel to the light irradiating component and the 1st inclined reflecting plate to the N-1th inclined reflecting plate inclined relative to the light irradiating component.

[0013] In an exemplary embodiment, the first to Nth parallel reflective plates are respectively spaced apart from the light irradiation member by a first distance to an Nth distance, and the first to N-1th inclined reflective plates may have an inclined angle relative to the light irradiation member.

[0014] In an exemplary embodiment, the reflective member may have a structure in which the first to the N-1th inclined reflective plates and the second to the Nth parallel reflective plates are continuously arranged on the left and right sides of the first parallel reflective plate.

[0015] In an exemplary embodiment, the adjusting component can confirm the distance and tilt angle between the object and the arranged components according to the detection signal, and then can adjust the distance and tilt angle between the object and the arranged components.

[0016] According to another aspect of the present invention, there is provided an arrangement method, characterized in that it includes: a step of irradiating linear light along a direction perpendicular to a component arranged relative to an object through a light irradiation component, a step of reflecting the linear light, a step of detecting the reflected light and generating a detection signal based on the detected light, and a step of confirming the arrangement between the object and the arranged component based on the detection signal and adjusting it.

[0017] In an exemplary embodiment, the linear light may include laser light.

[0018] In an exemplary embodiment, the step of confirming and adjusting the arrangement between the object and the arranged components may include: the step of confirming the distance and the tilt angle between the object and the arranged components; and the step of adjusting the distance and the tilt angle between the object and the arranged components.

[0019] According to another aspect of the present invention, there is provided an arrangement device for arranging chemical liquid supply components that supply chemical liquid to a substrate. The arrangement device may include: a light irradiation component that irradiates light in a direction perpendicular to a chemical liquid supply surface of the chemical liquid supply component; a reflection component that reflects the light irradiated by the light irradiation component; a detection component that detects the light reflected from the reflection component and generates a detection signal based on the detected light; and an adjustment component that receives the detection signal from the detection component, confirms the arrangement of the chemical liquid supply component relative to the substrate based on the detection signal, and adjusts the arrangement between the substrate and the chemical liquid supply component.

[0020] In an exemplary embodiment, the light irradiation member may include a laser generator.

[0021] In an exemplary embodiment, the reflective member is arranged to face a liquid medicine supply surface of the liquid medicine supply member.

[0022] In an exemplary embodiment, the reflective member may include first to Nth parallel reflective plates parallel to the light irradiating member and first to N-1th inclined reflective plates inclined to the light irradiating member.

[0023] In an exemplary embodiment, the first to Nth parallel reflective plates may be spaced apart from the light irradiation member by a first distance to an Nth distance, respectively, and the first to N-1th inclined reflective plates may have an inclined angle relative to the light irradiation member.

[0024] In an exemplary embodiment, the reflective member may have a structure in which the first to the N-1th inclined reflective plates and the second to the Nth parallel reflective plates are continuously arranged on the left and right sides of the first parallel reflective plate.

[0025] In an exemplary embodiment, the adjusting component can confirm the distance and tilt angle between the substrate and the chemical liquid supply component according to the detection signal, and then can adjust the distance and tilt angle between the substrate and the chemical liquid supply component.

[0026] Technical Effects

[0027] According to an exemplary embodiment of the present invention, the adjustment component can confirm the arrangement of the distance and angle between the object and the arranged components based on the detection signal from the detection component, and then adjust the arrangement of the distance and angle between the object and the arranged components. When the arranged components include the liquid chemical supply component, the arrangement of the distance and tilt angle between the substrate and the liquid chemical supply component can be precisely adjusted, thereby accurately supplying liquid chemical from the liquid chemical supply component to multiple areas of the substrate for multiple pixels. Therefore, the reliability of a display device including an organic light-emitting display device can be improved using the arrangement device.

[0028] However, the technical effects of the present invention are not limited to the above technical effects, and can be expanded in various ways without exceeding the scope of the idea and field of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 and Figure 2 FIG. 1 is a simplified schematic diagram for illustrating an arrangement device according to an exemplary embodiment of the present invention. DETAILED DESCRIPTION

[0030] The following describes exemplary embodiments of the present invention. The present invention may be modified in various ways and may have various forms, and the embodiments are described in detail herein. However, this is not intended to limit the present invention to a specific disclosed form, and it should be understood to include all variations, equivalents, and alternatives within the scope of the present invention's concept and technology. Similar reference numerals are used for similar components when describing the various figures. Terms such as first and second may be used to describe various components, but the components shall not be limited by the terms. The terms are only used to distinguish one component from other components. The terms used in this application are only used to describe specific embodiments and are not intended to limit the present invention. Singular expressions also include plural expressions unless otherwise expressly stated in the text. Terms such as "including" or "having" described in this application should be understood to mean the presence of features, numbers, steps, actions, components, parts, or combinations thereof recorded in the specification, and should not be understood to preclude the existence or additional possibility of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0031] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms defined in commonly used dictionaries should be interpreted as having the same meaning as that in the context of the relevant art and should not be construed as having an ideal or overly formal meaning unless explicitly defined in this application.

[0032] Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the accompanying drawings, the same components are denoted by the same reference numerals, and repeated description of the same components may be omitted.

[0033] In exemplary embodiments, an alignment device may be used to manufacture a display device including an organic light-emitting display device or an integrated circuit device including a semiconductor device. In such cases, the alignment device can accurately align components arranged relative to an object. For example, the alignment device can accurately align components including a chemical liquid supply component relative to the object including a substrate. The chemical liquid supply component is capable of supplying a specified chemical liquid onto the substrate.

[0034] Figure 1 and Figure 2 FIG. 1 is a simplified schematic diagram for illustrating an arrangement device according to an exemplary embodiment of the present invention.

[0035] See also Figure 1 and Figure 2 The alignment device 100 is capable of aligning the component 200 relative to an object. In an exemplary embodiment, the alignment device 100 is capable of aligning the alignment component 200, including a chemical liquid supply component, relative to the object including a substrate. For example, the alignment device 100 is capable of accurately aligning the chemical liquid supply component, which is capable of supplying chemical liquid to the substrate in order to form desired pixels on the substrate, relative to the substrate. The chemical liquid supply component may include an inkjet head.

[0036] Although not shown in the figure, the liquid medicine supply component is capable of supplying the liquid medicine to the substrate that is being moved in a specified direction on the upper part of the workbench. The liquid medicine supply component can be supported by a support unit including a gantry, for example. In this case, the liquid medicine supply component may include a plurality of nozzles that can spray the liquid medicine onto the substrate. For example, the plurality of nozzles may be arranged to substantially face the upper surface of the object. Hereinafter, the surface of the liquid medicine supply component on which the plurality of nozzles are arranged may be referred to as a "liquid medicine supply surface." The plurality of nozzles may be substantially arranged on the liquid medicine supply surface at certain intervals. In an exemplary embodiment, the liquid medicine supply component may further include a plurality of piezoelectric elements respectively arranged adjacent to the plurality of nozzles. In order to operate the plurality of piezoelectric elements, a specified voltage may be applied to each of the piezoelectric elements. Through the operation of the plurality of piezoelectric elements, the liquid medicine can be sprayed from the plurality of nozzles onto the object.

[0037] In a process of supplying the liquid medicine to the object using the liquid medicine supply component as the arrangement component 200 that can be arranged by the arrangement device 100, process failure may occur if the liquid medicine is not accurately sprayed from the liquid medicine supply component onto the desired area. If the liquid medicine supply component is not accurately aligned with respect to the object, the liquid medicine may not be accurately supplied to the desired area of ​​the object, thereby causing process failure. Therefore, in order to accurately supply the liquid medicine to the desired area of ​​the object, the alignment between the object and the liquid medicine supply component can be an important factor.

[0038] In an exemplary embodiment, the alignment device 100 can confirm the alignment of the alignment components 200 including the chemical liquid supply component relative to the object including the substrate, and can adjust the alignment between the object and the alignment components 200. To this end, the alignment device 100 may include a light irradiation unit 11, a reflection unit 13, a detection unit 33, and an adjustment unit 35.

[0039] The light irradiation unit 11 may be arranged in a direction substantially perpendicular to the array of components 200. The light irradiation unit 11 may irradiate linear light onto the reflective component 13 in a direction substantially perpendicular to the array of components 200. For example, the light irradiation unit 11 may include a laser generator capable of irradiating laser light onto the reflective component 13. In an exemplary embodiment, the light irradiation unit 11 may be arranged adjacent to the array of components 200. If the array of components 200 includes the liquid medicine supply unit, the light irradiation unit 11 may be arranged on the liquid medicine supply surface adjacent to a nozzle of the liquid medicine supply unit.

[0040] During the process of arranging the arranged components 200 relative to the object using the arranging device 100, the light irradiating unit 11 disposed adjacent to the arranged components 200 may irradiate the linear light toward the reflective unit 13 in a direction substantially perpendicular to the arranged components 200. For example, when the arranged components 200 include the liquid chemical supply unit, the light irradiating unit 11 located on the liquid chemical supply surface of the liquid chemical supply unit may irradiate the linear light toward the reflective unit 13 in a direction substantially perpendicular to the liquid chemical supply unit.

[0041] See again Figure 1 and Figure 2The reflective component 13 is capable of reflecting the linear light emitted from the light irradiation component 11 in a specified direction. For example, the reflective component 13 may include a reflective material such as metal or alloy. However, if the linear light includes laser light, the reflective component 13 may include any material capable of reflecting the laser light. In an exemplary embodiment, the reflective component 13 may be configured to substantially face the light irradiation component 11. For example, if the arranged component 200 includes the liquid medicine supply component, the reflective component 13 may substantially face the liquid medicine supply surface of the liquid medicine supply component.

[0042] The linear light emitted from the light irradiation component 11 can be reflected at the specified angle by the reflective component 13. In this case, the detection component 33 can detect the reflected light from the reflective component 13 and then generate a detection signal based on the detected light. The reflective component 13 can substantially face the light irradiation component 11, so that the reflected light can travel from the reflective component 13 toward the light irradiation component 11. Therefore, the detection component 33 can be positioned adjacent to the light irradiation component 11. For example, the detection component 33 can substantially face the liquid medicine supply surface.

[0043] In some exemplary embodiments, the arrangement device 100 may include a plurality of detection components 33 located near the light irradiation component 11. In this case, the detection components 33 may be arranged centered around the light irradiation component 11. For example, the detection components 33 may each contact a side portion of the light irradiation component 11. The reflective component 13 may reflect the linear light toward the detection components 33, and the detection components 33 may each detect the light reflected from the reflective component 13.

[0044] As described above, the arrangement device 100 may include the light irradiation component 11, the reflection component 13, the detection component 33, and the control component 35. The arrangement device 100 may have a structure in which the light irradiation component 11 and the detection component 33 are adjacent to the arrangement component 200, and the reflection component 13 faces the arrangement component 200. When the arrangement component 200 includes the liquid medicine supply component, the light irradiation component 11 may be located on the liquid medicine supply surface, and the reflection component 13 may face the liquid medicine supply surface. The control component 35 may confirm the arrangement of the arrangement component 200 relative to the object and then adjust the alignment between the object and the arrangement component 200.

[0045] If the arrangement members 200 are not precisely aligned relative to the object, the linear light emitted from the light irradiation member 11 may not be reflected precisely perpendicularly from the surface of the reflective member 13, and the linear light may be reflected from the surface of the reflective member 13 at various reflection angles. In an exemplary embodiment, the reflective member 13 may have a structure capable of reflecting the linear light at various reflection angles. In other words, the arrangement members 200 may be irregularly aligned relative to the object, so that the reflective member 13 may have a structure capable of reflecting the linear light emitted from the light irradiation member 11 in various directions.

[0046] According to an exemplary embodiment, the reflective component 13 may include 1st to Nth (where N is a positive integer greater than or equal to 2) parallel reflectors to reflect the linear light in a direction substantially perpendicular to the surface of the reflective component 13. The 1st to Nth parallel reflectors may be spaced 1st to Nth distances from the light irradiation component 11, respectively. Furthermore, the reflective component 13 may include 1st to N-1th inclined reflectors to reflect the linear light at the plurality of reflection angles. In this case, the 1st to Nth parallel reflectors and the 1st to N-1th inclined reflectors may be arranged alternately with each other. Furthermore, the 1st to Nth parallel reflectors and the 1st to N-1th inclined reflectors may be arranged continuously.

[0047] In the reflecting component 13 having the above-mentioned structure, the 1st parallel reflecting plate to the Nth parallel reflecting plate may be separated from the light irradiating component 11 by different 1st to Nth distances. The 1st inclined reflecting plate to the N-1th inclined reflecting plate may be respectively located between the 1st parallel reflecting plate to the Nth parallel reflecting plate. The parallel reflecting plates and the inclined reflecting plates of the reflecting component 13 may be substantially formed as one piece. The 1st parallel reflecting plate to the Nth parallel reflecting plate may be arranged at different distances relative to the light irradiating component 11, and the 1st inclined reflecting plate to the N-1th inclined reflecting plate may be respectively inclined at various angles relative to the light irradiating component 11. In other words, the 1st inclined reflecting plate to the N-1th inclined reflecting plate may be arranged at different angles relative to the light irradiating component 11.

[0048] In an exemplary embodiment, the reflective component 13 may have a structure in which the first to the N-1th inclined reflective plates and the second to the Nth parallel reflective plates are arranged in series on the left and right sides of the first parallel reflective plate, respectively. With the first parallel reflective plate as the center, the parallel reflective plates arranged on the left side and the parallel reflective plates arranged on the right side may be spaced the same distance or different distances from the light irradiation component 11. Furthermore, with the first parallel reflective plate as the center, the inclined reflective plates arranged on the left side of the first parallel reflective plate and the inclined reflective plates arranged on the right side of the first parallel reflective plate may be tilted at substantially the same angle or different angles relative to the light irradiation component 11.

[0049] like Figure 1 and Figure 2 For example, the left side of the first parallel reflector 15 at a first distance from the light irradiation component 11 in the reflective component 13 of the arrangement device 100 may include a first inclined reflector 27 at a first angle relative to the light irradiation component 11, a second parallel reflector 19 at a second distance, a second inclined reflector 31 at a second angle, and a third parallel reflector 23 at a third distance. Furthermore, the right side of the first parallel reflector 15 in the reflective component 13 may include a third inclined reflector 25 at a third angle, a fourth parallel reflector 17 at a fourth distance, a fourth inclined reflector 29 at a fourth angle, and a fifth parallel reflector 21 at a fifth distance. In this case, the first to fifth distances may be substantially the same or different, and the first to fourth angles may be substantially the same or different.

[0050] The second parallel reflector 19 and the fourth parallel reflector 17 may be spaced at the same or different distances from the light irradiation member 11. The third parallel reflector 23 and the fifth parallel reflector 21 may be spaced at the same or different distances from the light irradiation member 11. Furthermore, the first inclined reflector 27 and the third inclined reflector 25 may be tilted at the same or different angles relative to the light irradiation member 11. The second inclined reflector 31 and the fourth inclined reflector 29 may be tilted at the same or different angles relative to the light irradiation member 11.

[0051] The linear light reflected from the reflecting member 13 having the above-mentioned structure at various reflection angles can be detected by the detecting member 33 adjacent to the light irradiating member 11. Figure 2For example, when the detection component 33 detects light reflected from the third inclined reflector 25, the degree of tilt of the arranged components 200 relative to the object can be determined based on the third angle of the third inclined reflector 25. In other words, when the arranged components 200 are tilted at a specified angle relative to the object, even if the linear light is irradiated perpendicularly from the light irradiation component 11 toward the reflective component 13, the linear light will be reflected by one of the first to N-1th inclined reflectors corresponding to the specified angle, rather than by the first parallel reflector 15. Therefore, the tilt angle of the arranged components 200 relative to the object can be determined. When the linear light irradiated from the light irradiation component 11 is reflected by one of the second to Nth parallel reflectors, rather than by the first parallel reflector 15, the linear light can be reflected perpendicularly from the reflective component 13, thereby determining the distance between the arranged components 200 and the object. The detection component 33 can detect light reflected from the plurality of reflective plates of the reflection component 13 and generate a detection signal regarding the distance and angle between the object and the arranged components 200 based on the detected light.

[0052] The adjustment component 35 can confirm the arrangement of the arranged components 200 relative to the object based on the detection signal from the detection component 33, and can adjust the arrangement between the object and the arranged components 200. When the arranged components 200 include the liquid medicine supply component, the adjustment component 35 can confirm the distance and tilt angle of the liquid medicine supply component relative to the substrate, and can adjust the distance and tilt angle between the substrate and the liquid medicine supply component. In other words, the adjustment component 35 can confirm and adjust the arrangement between the substrate and the liquid medicine supply component. When the liquid medicine supply component is supported by a gantry, the adjustment component 35 can confirm the distance and tilt angle of the liquid medicine supply component relative to the gantry, and can adjust the distance and tilt angle between the gantry and the liquid medicine supply component.

[0053] As described above, the adjustment component 35 can confirm the arrangement of the distance and angle between the object and the arrangement component 200 based on the detection signal from the detection component 33, and then can adjust the arrangement of the distance and angle between the object and the arrangement component 200. For example, the adjustment component 35 can adjust the arrangement of the distance and angle between the object and the arrangement component 200 to maintain the initial parallel position of the arrangement component 200 relative to the object. When the arrangement component 200 includes the liquid medicine supply component, the arrangement of the distance and tilt angle between the substrate and the liquid medicine supply component can be precisely adjusted, so that the liquid medicine supply component can accurately supply liquid medicine to multiple areas of the substrate for multiple pixels. Therefore, the reliability of the display device including the manufactured organic light-emitting display device can be improved using the arrangement device 100.

[0054] While exemplary embodiments of the present invention are described above, it will be understood by those skilled in the art that various changes and modifications may be made to the present invention without departing from the spirit and scope of the invention as described in the appended claims.

Claims

1. An arrangement device, characterized in that: include: irradiating the component with light, irradiating linear light in a direction perpendicular to the component arranged relative to the object; a reflecting member that reflects the linear light irradiated from the light irradiating member; a detection component that detects the light reflected from the reflection component and generates a detection signal based on the detected light; as well as an adjusting component that receives the detection signal from the detecting component, confirms the arrangement of the arranged components relative to the object based on the detection signal, and adjusts the arrangement between the object and the arranged components; The reflecting member includes a first parallel reflecting plate to an Nth parallel reflecting plate parallel to the light irradiating member and a first inclined reflecting plate to an N-1th inclined reflecting plate inclined relative to the light irradiating member, wherein N is a positive integer greater than 2; The first to Nth parallel reflectors are respectively spaced apart from the light irradiation component by a first distance to an Nth distance, and the first to N-1th inclined reflectors have an inclined angle relative to the light irradiation component.

2. The arrangement device according to claim 1, characterized in that: The light irradiation unit includes a laser generator.

3. The arrangement device according to claim 1, wherein: The reflecting member has a structure in which the first to N-1th inclined reflecting plates and the second to Nth parallel reflecting plates are continuously arranged on the left and right sides of the first parallel reflecting plate.

4. The arrangement device according to claim 1, wherein: The adjusting component confirms the distance and the tilt angle between the object and the arranged components according to the detection signal, and then adjusts the distance and the tilt angle between the object and the arranged components.

5. An arrangement method, characterized in that: The method is performed by an arranging device, the arranging device including a light irradiation component, a reflection component, a detection component, and an adjustment component, and the method includes: a step of irradiating linear light in a direction perpendicular to the member arranged relative to the object through the light irradiation member; a step of reflecting the linear light by the reflecting component; a step of detecting the reflected light by the detection component and generating a detection signal based on the detected light; and a step of confirming the alignment between the object and the arranged components and adjusting the alignment by the adjusting component according to the detection signal; The reflecting member includes a first parallel reflecting plate to an Nth parallel reflecting plate parallel to the light irradiating member and a first inclined reflecting plate to an N-1th inclined reflecting plate inclined relative to the light irradiating member, wherein N is a positive integer greater than 2; The first to Nth parallel reflectors are respectively spaced apart from the light irradiation component by a first distance to an Nth distance, and the first to N-1th inclined reflectors have an inclined angle relative to the light irradiation component.

6. The arrangement method according to claim 5, characterized in that: The linear light includes laser light.

7. The arrangement method according to claim 5, characterized in that: The step of confirming and adjusting the alignment between the object and the arranged components includes: a step of confirming the distance and tilt angle between the object and the arranged components; and The step of adjusting the distance and tilt angle between the object and the arranged components.

8. An arranging device for arranging a liquid supply component for supplying liquid to a substrate, characterized in that: include: a light irradiation member for irradiating light in a direction perpendicular to the liquid supply surface of the liquid supply member; a reflecting member that reflects the light irradiated from the light irradiating member; a detection component that detects the light reflected from the reflection component and generates a detection signal based on the detected light; as well as an adjusting component, receiving a detection signal from the detecting component, confirming an arrangement of the chemical liquid supply component relative to the substrate based on the detection signal, and adjusting an arrangement between the substrate and the chemical liquid supply component; The reflecting component includes a first parallel reflecting plate to an Nth parallel reflecting plate parallel to the light irradiating component and a first inclined reflecting plate to an N-1th inclined reflecting plate inclined to the light irradiating component; The first to Nth parallel reflectors are respectively spaced apart from the light irradiation component by a first distance to an Nth distance, and the first to N-1th inclined reflectors have an inclined angle relative to the light irradiation component.

9. The arrangement device according to claim 8, characterized in that: The light irradiation unit includes a laser generator.

10. The arrangement device according to claim 8, characterized in that: The reflecting member is arranged to face the liquid medicine supply surface of the liquid medicine supply member.

11. The arrangement device according to claim 8, characterized in that: The reflecting member has a structure in which the first to N-1th inclined reflecting plates and the second to Nth parallel reflecting plates are continuously arranged on the left and right sides of the first parallel reflecting plate.

12. The arrangement device according to claim 8, characterized in that: The adjusting component confirms the distance and the tilt angle between the substrate and the chemical liquid supply component according to the detection signal, and then adjusts the distance and the tilt angle between the substrate and the chemical liquid supply component.

Images