Measuring unit

Abstract

The present invention provides a measurement unit capable of suppressing noise. The measurement unit comprises: a ground portion, which forms a portion of a circuit for conducting a potential for grounding, and has a flat surface at one end; a signal portion, which forms a portion of a circuit for conducting a measurement signal, and has an end exposed on the same plane as the ground portion; an insulating dielectric portion disposed between the ground portion and the signal portion; a conductive first contact probe, which is extendable along a longitudinal axis and contacts the signal portion; and a conductive second contact probe, which is extendable along the longitudinal axis and contacts the ground portion.

Description

Technical Field

[0001] The invention relates to a measuring unit. Background Art

[0002] Conventionally, when inspecting the conduction state or operating characteristics of inspection objects such as semiconductor integrated circuits and liquid crystal panels, a cable connected to an inspection device and a connector connected to the end of the cable opposite the inspection device are used (see, for example, Patent Document 1). The cable has a central signal conductor, a dielectric covering the signal conductor, and a ground conductor covering the dielectric. The connector has a central contact connected to the signal conductor and side contacts that contact the ground conductor.

[0003] Patent Document 1: Japanese Patent No. 4678993 Summary of the Invention

[0004] However, in the configuration described in Patent Document 1, the cable end is cut obliquely and connected to the connection member. In this connection portion, the transmission line changes from a coaxial line to a so-called coplanar line, and the line change easily generates noise.

[0005] The present invention has been made in view of the above-mentioned circumstances, and an object of the present invention is to provide a measurement unit capable of suppressing noise.

[0006] To solve the above-mentioned problems and achieve the purpose, the measurement unit of the present invention includes: a ground portion, which forms a portion of a circuit for conducting a potential for a ground line, and has a surface on one end side formed into a flat surface; a signal portion, which forms a portion of a circuit for conducting a measurement signal, and has an end portion exposed on the same plane as the flat surface of the ground portion; an insulating dielectric portion provided between the ground portion and the signal portion; a conductive first contact probe, which is freely extendable along a longitudinal axis and contacts the signal portion; and a conductive second contact probe, which is freely extendable along the longitudinal axis and contacts the ground portion.

[0007] In addition, the measuring unit of the present invention, in the above invention, includes: a ground plate; and a coaxial cable connected to the above ground plate, the above coaxial cable having: a signal conductor, which forms a part of the above line of the above signal part; a dielectric, which is arranged on the outer periphery of the above signal conductor; and a grounding conductor, which is arranged on the outer periphery of the above dielectric, the above signal conductor constitutes the above signal part, the above dielectric constitutes the above dielectric part, and the above grounding conductor and the above ground plate constitute the above ground part.

[0008] Furthermore, in the measurement unit of the present invention, in the above invention, a through hole is formed in the ground plate, through which the ground conductor is inserted.

[0009] Furthermore, in the measurement unit of the present invention, in the above invention, a through hole is formed in the ground plate and is inserted through the dielectric, and the ground conductor is electrically connected to the surface of the ground plate.

[0010] In addition, the measuring unit of the present invention, in the above invention, includes: a ground plate; and a coaxial cable, which is connected to the above ground plate, the above ground plate has: a signal relay part, which forms a part of the above-mentioned line of the above-mentioned signal part; and a ground plate side dielectric, which covers the outer periphery of the above-mentioned signal relay part, the above-mentioned coaxial cable has: a signal conductor, which forms a part of the above-mentioned line of the above-mentioned signal part and is electrically connected to the above-mentioned signal relay part; a cable side dielectric, which is arranged on the outer periphery of the above-mentioned signal conductor; and a grounding conductor, which is arranged on the outer periphery of the above-mentioned cable side dielectric and is electrically connected to the above-mentioned ground plate at a position different from the above-mentioned signal relay part and the above-mentioned ground plate side dielectric of the above-mentioned ground plate, the above-mentioned signal relay part and the above-mentioned signal conductor constitute the above-mentioned signal part, the above-mentioned ground plate side dielectric and the above-mentioned cable side dielectric constitute the above-mentioned dielectric part, and the above-mentioned grounding conductor and the above-mentioned ground plate constitute the above-mentioned ground part.

[0011] Furthermore, the measuring unit of the present invention, in the above invention, is configured such that a plurality of the coaxial cables are connected to the ground plate.

[0012] Furthermore, the measuring unit of the present invention, in the above invention, includes a coaxial cable having: a signal conductor forming the line of the signal portion; a dielectric provided on the periphery of the signal conductor and constituting the dielectric portion; and a ground conductor provided on the periphery of the dielectric and constituting the ground portion, the ground conductor having: a cylindrical portion extending along the signal conductor and the dielectric; and a flat plate portion provided at one end of the cylindrical portion and having a flat plate shape, wherein the end surfaces of the signal conductor and the dielectric are located on the same plane as the surface of the flat plate portion.

[0013] Furthermore, the measuring unit of the present invention, in the above invention, includes a plurality of groups, each group consisting of the signal conductor, the dielectric, and the cylindrical portion.

[0014] In addition, the measuring unit of the present invention in the above invention includes: a first connecting portion, which has the above-mentioned ground portion, the above-mentioned signal portion and the above-mentioned dielectric portion; and a second connecting portion, which has the above-mentioned ground portion, the above-mentioned signal portion and the above-mentioned dielectric portion, and is arranged opposite to the above-mentioned first connecting portion, and one end of the above-mentioned first contact probe and the second contact probe contacts the above-mentioned first connecting portion, and the other end contacts the above-mentioned second connecting portion.

[0015] The present invention can achieve the effect of suppressing noise. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1This is a diagram showing the configuration of a measurement system according to one embodiment of the present invention.

[0017] Figure 2 Is used to illustrate Figure 1 Figure 2 shows a partial structure of the measurement system.

[0018] Figure 3 It is a diagram showing the detailed structure of the probe accommodated in the probe holder.

[0019] Figure 4 This is a diagram for explaining the connection state between the probe and the ground plate.

[0020] Figure 5 yes Figure 4 An enlarged view of a portion of .

[0021] Figure 6 This is a diagram for explaining the structure of a ground plate and a coaxial cable.

[0022] Figure 7 It is a diagram for explaining the structure of a ground plate and a coaxial cable according to Modification 1.

[0023] Figure 8 It is a diagram for explaining the structure of a ground plate and a coaxial cable according to Modification 2.

[0024] Figure 9 It is a diagram for explaining the structure of a coaxial cable according to Modification 3.

[0025] Figure 10 It is a diagram for explaining the structure of a coaxial cable according to Modification 4.

[0026] Figure 11 This is a perspective view showing an example of a contact state between a coaxial cable and a probe according to Modification 4.

[0027] Explanation of symbols

[0028] 1 measuring unit

[0029] 2 contact probes (probes)

[0030] 3 probe holders

[0031] 4First ground plate

[0032] 5 Second ground plate

[0033] 6First coaxial line

[0034] 7 Second coaxial line

[0035] 21 First Plunger

[0036] 22 Second plunger

[0037] 23 coil spring

[0038] 31 First Part

[0039] 32 Second component

[0040] 51 second signal conductor

[0041] 52 second dielectric

[0042] 61, 71, 71A to 71D coaxial cables

[0043] 62, 72 signal conductors

[0044] 63, 73 dielectrics

[0045] 64, 74, 74A to 74C grounding conductors

[0046] 72A first signal conductor

[0047] 73A first dielectric DETAILED DESCRIPTION

[0048] Hereinafter, a method for implementing the present invention (hereinafter referred to as an "embodiment") will be described with reference to the accompanying drawings. The accompanying drawings are merely schematic diagrams, and the relationship between the thickness and width of each portion, the ratio of the thickness of each portion, etc., may differ from the actual embodiment. The accompanying drawings also contain portions with different dimensional relationships and ratios.

[0049] Implementation Method

[0050] Figure 1 This is a diagram showing the configuration of a measurement system according to one embodiment of the present invention. Figure 2 Is used to illustrate Figure 1 Figure 2 shows a partial structure of the measurement system. Figure 2 The structure shown is a configuration in which a probe holder 3 described later is removed from the measurement unit 1. The measurement system includes the measurement unit 1, a measurement device 100 that inputs and outputs signals to a measurement target, and connection cables 110 and 120 that connect the measurement unit 1 and the measurement device 100.

[0051] The measurement unit 1 includes a contact probe 2 (hereinafter referred to as “probe 2 ”), a probe holder 3 for accommodating the probe 2 , a first ground plate 4 , a second ground plate 5 , a first coaxial line portion 6 , and a second coaxial line portion 7 .

[0052] Figure 3This diagram shows the detailed structure of the probe housed in the probe holder. Probe 2 is conductive and connected to a first ground plate 4 and a second ground plate 5 at both ends along its length. Probe 2 is made of a conductive material and includes a first plunger 21 in contact with first ground plate 4; a second plunger 22 in contact with second ground plate 5; and a coil spring 23 positioned between and connecting the first and second plungers 21, 22 to allow for flexible extension and retraction of probe 2. The first plunger 21, second plunger 22, and coil spring 23 that constitute probe 2 are coaxial.

[0053] The probe base 3 is formed of an insulating material such as resin, machinable ceramics, silicone, etc. Figure 3 The first component 31 on the upper side and the second component 32 on the lower side are stacked. The first component 31 and the second component 32 each have an equal number of seating holes 33 and 34 for accommodating multiple probes 2. The seating holes 33 and 34 for accommodating the probes 2 are formed so that their axes are aligned. The positions of the seating holes 33 and 34 depend on the arrangement pattern of the probes 2.

[0054] When the probe holder 3 is disposed between the first ground plate 4 and the second ground plate 5 , the coil spring 23 is compressed in the longitudinal direction due to the contact load from the ground plates.

[0055] Next, the connection state between the probe 2 and the first ground plate 4 and the second ground plate 5 will be described. Figure 4 This is a diagram for explaining the connection state between the probe and the ground plate. Figure 5 yes Figure 4 An enlarged view of a portion of . Figure 6 This is a diagram for explaining the structure of a ground plate and a coaxial cable. Figure 6 (a) is a cross-sectional view showing a structure in which the second ground plate 5 and the coaxial cable 71 are connected. Figure 6 (b) shows a top view of the second ground plate 5 viewed from the side opposite to the side connected to the coaxial cable 71. Figure 6 Although the connection between the second ground plate 5 and the coaxial cable 71 is shown, the connection between the first ground plate 4 and the coaxial cable 61 also has the same structure.

[0056] The first ground plate 4 is formed of a conductive material and has a plate shape. The first ground plate 4 has a through hole 4a (see Figure 2 The through hole 4a is a hole extending with a diameter substantially equal to the outer diameter of the coaxial cable 61 described later. The term "substantially equal" includes "same" and "slightly different" due to manufacturing errors.

[0057] The second ground plate 5 is formed of a conductive material and has a plate shape. A through hole 5a is formed in the second ground plate 5, penetrating in the plate thickness direction. The through hole 5a is a hole extending with a diameter substantially equal to the outer diameter of a coaxial cable 71 described later.

[0058] The first ground plate 4 and the second ground plate 5 are formed of, for example, copper, nickel, or stainless steel, etc. The first ground plate 4 and the second ground plate 5 may be formed of the same material as the ground conductors 64 and 74 described later.

[0059] The first coaxial portion 6 includes a coaxial cable 61. The coaxial cable 61 is held by the cable holding member 60. Furthermore, the end of the coaxial cable 61, opposite to the end connected to the connection cable 110, is inserted into the through-hole 4a of the first ground plate 4. The coaxial cable 61 may be press-fitted into the through-hole 4a, secured by welding, or a combination of these methods.

[0060] The coaxial cable 61 includes a signal conductor 62 for transmitting a signal from the measuring device 100; an insulating dielectric 63 provided on the periphery of the signal conductor 62; and a ground conductor 64 provided on the periphery of the dielectric 63 (see FIG. Figure 2 The signal conductor 62, dielectric 63, and ground conductor 64 form a coaxial structure. The dielectric 63 and ground conductor 64 are each cylindrical. The ground conductor 64 is formed from copper, nickel, stainless steel, or the like. Therefore, the coaxial cable 61 has the same structure as a so-called semi-rigid cable. In this embodiment, the signal conductor constitutes the signal portion, and the dielectric constitutes the dielectric portion.

[0061] The end of the coaxial cable 61 on the first ground plate 4 side is exposed through the through-hole 4a on the surface of the first ground plate 4. At this point, the end face of the coaxial cable 61 and the surface of the first ground plate 4 on the side where the end face of the coaxial cable 61 is exposed are coplanar. Furthermore, the first ground plate 4 is electrically connected to the ground conductor 64, forming a grounded portion. The grounded portion forms part of a path that conducts a ground potential.

[0062] The second coaxial cable portion 7 includes a coaxial cable 71. The coaxial cable 71 is held by the cable holding member 70. Furthermore, the end of the coaxial cable 71 opposite to the end connected to the connection cable 120 is inserted into the through-hole 5a of the second ground plate 5. The coaxial cable 71 may be press-fitted into the through-hole 5a, secured by welding, or a combination of these methods.

[0063] Coaxial cable 71 includes a signal conductor 72 that transmits the signal from measurement device 100; a dielectric 73 disposed around the periphery of signal conductor 72; and a ground conductor 74 disposed around the periphery of dielectric 73. Signal conductor 72, dielectric 73, and ground conductor 74 form a coaxial structure. Dielectric 73 and ground conductor 74 are each cylindrical. Ground conductor 74 is formed from copper, nickel, stainless steel, or other materials. Therefore, coaxial cable 71 has the same structure as a so-called semi-rigid cable.

[0064] The end of the coaxial cable 71 on the second ground plate 5 side is exposed through the through-hole 5a on the surface of the second ground plate 5. At this point, the end surface of the coaxial cable 71 and the surface of the second ground plate 5 on the side where the end surface of the coaxial cable 71 is exposed are located on the same plane. Furthermore, the second ground plate 5 is electrically connected to the ground conductor 74, forming the ground portion as described above.

[0065] In this embodiment, coaxial cables 61 and 71 are connected to three probes 2, respectively. Here, the first ground plate 4 and coaxial cable 61 form a first connection portion, while the second ground plate 5 and coaxial cable 71 form a second connection portion. The measurement system only needs to have at least one of the first and second connection portions; the other connection portion can also adopt a known connection configuration.

[0066] At the end of the coaxial cable 61 exposed in the first ground plate 4 , one end of each probe 2 (here, the first plunger 21 ) comes into contact with one of the signal conductor 62 and the ground conductor 64 . Figure 4 、 Figure 5 In the embodiment, one probe 2 is in contact with the signal conductor 62, and the other two probes 2 are in contact with the ground conductor 64. Similarly, with respect to the coaxial cable 71, the probe 2 in contact with the signal conductor 62 is in contact with the signal conductor 72, and the other two probes 2 in contact with the ground conductor 64 are in contact with the ground conductor 74. In this case, the longitudinal directions of the coaxial cables 61 and 71 and the longitudinal directions of the probes 2 are aligned with or extend parallel to each other.

[0067] In the figure, the probe 2 (first contact probe) that contacts the signal conductors 62 and 72 is referred to as probe 2S, and the probe 2 (second contact probe) that contacts the ground conductors 64 and 74 is referred to as probe 2G. Furthermore, probe 2G is not limited to contacting the ground conductors 64 and 74 but may also contact the surface of the first ground plate 4 or the surface of the second ground plate 5.

[0068] Here, the minimum distance between the probes 2 is the inner radius of the ground conductor. For example, when the probes 2 are brought into contact with the center of the ground conductor at the end face of the coaxial cable, the distance between the probes 2 is calculated as (outer diameter of the ground conductor + inner diameter of the ground conductor) ÷ 2 ÷ 2.

[0069] In the embodiment of the present invention described above, the end faces of the signal conductor of the coaxial cable and the ground portion formed by the ground conductor and the ground plate are located on the same plane. Multiple probes are brought into contact with the signal conductor and the ground portion to establish electrical continuity between the signal and ground lines. This embodiment maintains the coaxial line, eliminating the changes in line shape typically seen in conventional designs, and consequently suppresses noise.

[0070] Furthermore, in the above embodiment, since multiple probes 2 are independently connected to the coaxial cable, the pitch between the probes 2 and the number and arrangement of the probes 2G connected to the ground portion can be freely set.

[0071] Furthermore, the above embodiment describes a structure using a single coaxial cable. However, a plurality of through holes may be provided in a ground plate, and the ground plate may be used as a structure for holding a plurality of coaxial cables.

[0072] Modification 1

[0073] Figure 7 It is a diagram for explaining the structure of a ground plate and a coaxial cable according to Modification 1. Figure 7 (a) is a cross-sectional view showing a structure in which the second ground plate is connected to the coaxial cable. Figure 7 (b) shows a top view of the second ground plate from the side opposite to the side connected to the coaxial cable. The measurement unit of this first modification includes a second ground plate 5A in place of the aforementioned second ground plate 5, and a coaxial cable 71A in place of the coaxial cable 71. The following description of the same structures as those in the above embodiment will be omitted.

[0074] Coaxial cable 71A includes a signal conductor 72, a dielectric 73, and a ground conductor 74A disposed on the periphery of dielectric 73. Signal conductor 72, dielectric 73, and ground conductor 74A form a coaxial structure. Ground conductor 74A is made of copper, nickel, stainless steel, or other materials. Therefore, coaxial cable 71A has the same structure as a so-called semi-rigid cable.

[0075] The end portion of the ground conductor 74A connected to the second ground plate 5A is shorter than the signal conductor 72 and the dielectric 73 by the thickness of the second ground plate 5A. Therefore, the outer periphery of the dielectric 73 is exposed at the end portion of the ground conductor 74A connected to the second ground plate 5A.

[0076] The second ground plate 5A is formed of a conductive material and has a plate shape. The second ground plate 5A has a through hole 5b extending through the plate in the thickness direction. The through hole 5b is a hole extending to a diameter substantially equal to the outer diameter of the dielectric 73.

[0077] Coaxial cable 71A is connected to second ground plate 5A by inserting dielectric 73 into through-hole 5b. Coaxial cable 71A can press dielectric 73 into through-hole 5b, secure dielectric 73 to second ground plate 5A by welding, or a combination of these methods. At this point, ground conductor 74A abuts the surface of second ground plate 5A. This electrically connects second ground plate 5A and ground conductor 74A. Alternatively, ground conductor 74A and second ground plate 5A can be secured by welding, or by other means to achieve electrical connection.

[0078] The ends of the signal conductor 72 and dielectric 73 of the coaxial cable 71A are exposed through the through-hole 5b on the surface of the second ground plate 5A. At this time, the end faces of the signal conductor 72 and dielectric 73 are flush with the surface of the second ground plate 5A where the end face of the coaxial cable 71A is exposed.

[0079] The probe 2S contacts the signal conductor 72 exposed from the through-hole 5b. The probe 2G contacts the surface of the second ground plate 5A.

[0080] Even in the first variant described above, the signal conductor of the coaxial cable and the end faces of the ground portion formed by the ground conductor and the ground plate are still located on the same plane. Multiple probes are brought into contact with the signal conductor and the ground portion, creating electrical continuity between the signal and ground lines. This first variant maintains the coaxial line, preventing the changes in line shape seen in previous implementations, resulting in noise suppression. Furthermore, as with the first embodiment, the first variant offers a high degree of flexibility in the placement of the probes 2, enabling various measurements.

[0081] Modification 2

[0082] Figure 8 It is a diagram for explaining the structure of a ground plate and a coaxial cable according to Modification 2. Figure 8 (a) is a cross-sectional view showing a structure in which the second ground plate is connected to the coaxial cable. Figure 8 (b) shows a top view of the second ground plate from the side opposite to the side connected to the coaxial cable. The measurement unit of this second variation includes a second ground plate 5B in place of the aforementioned second ground plate 5, and a coaxial cable 71B in place of the coaxial cable 71. The following description of the same structures as those in the above embodiment will be omitted.

[0083] The coaxial cable 71B includes a first signal conductor 72A (signal conductor) that transmits signals from the measuring device 100; a first dielectric 73A (cable-side dielectric) disposed around the periphery of the first signal conductor 72A; and a ground conductor 74A disposed around the periphery of the first dielectric 73A. The first signal conductor 72A, first dielectric 73A, and ground conductor 74A form a coaxial structure, with their end surfaces connected to the second ground plate 5B being coplanar.

[0084] The second ground plate 5B is formed of a conductive material and has a plate shape. It includes a second signal conductor 51 (signal relay portion) and a second dielectric 52 (ground plate-side dielectric) covering the outer periphery of the second signal conductor 51. In this second variation, the first signal conductor 72A and the second signal conductor 51 constitute the signal portion, while the first dielectric 73A and the second dielectric 52 constitute the dielectric portion.

[0085] The second ground plate 5B has a through-hole 5b extending through the plate thickness. The through-hole 5b extends to a diameter approximately equal to the outer diameter of the second dielectric 52. Of the second signal conductor 51 and the second dielectric 52, the second dielectric 52 is fixed to the through-hole 5b. The end surfaces of the second signal conductor 51 and the second dielectric 52 are flush with the surface of the main body of the second ground plate 5B.

[0086] The second signal conductor 51 and the first signal conductor 72A preferably have the same diameter. The second dielectric 52 and the first dielectric 73A preferably have the same diameter. The first dielectric 73A and the second dielectric 52 may be made of the same material or different materials.

[0087] The coaxial cable 71B is connected to the second ground plate 5B by fixing the first signal conductor 72A in contact with the second signal conductor 51. At this point, the ground conductor 74A contacts the surface of the second ground plate 5B. This electrically connects the second ground plate 5B and the ground conductor 74A. Alternatively, the first signal conductor 72A and the second signal conductor 51 may be fixed by welding or other means to electrically connect them. Alternatively, the second ground plate 5B and the ground conductor 74A may be fixed by welding or other means to electrically connect them.

[0088] Probe 2S contacts and electrically connects to the side of second signal conductor 51 opposite to the side contacting first signal conductor 72A. Probe 2G contacts and electrically connects to the surface of second ground plate 5B opposite to the side contacting ground conductor 74A.

[0089] Even in the second variant described above, the signal conductor of the coaxial cable and the end faces of the ground portion formed by the ground conductor and the ground plate are still located on the same plane. Multiple probes are brought into contact with the signal conductor and the ground portion, creating electrical continuity between the signal and ground lines. This second variant maintains the coaxial line, preventing the changes in line shape seen in previous implementations, resulting in reduced noise. Furthermore, as with the first embodiment, this second variant offers a high degree of flexibility in the placement of the probes 2, enabling various measurements.

[0090] Modification 3

[0091] Figure 9 It is a diagram for explaining the structure of a coaxial cable according to Modification 3. Figure 9 (a) shows a cross-sectional view of a coaxial cable. Figure 9 (b) shows a top view of the coaxial cable. The measurement unit of this modification 3 does not include the second ground plate 5 described above, and a coaxial cable 71C is provided instead of the coaxial cable 71. Hereinafter, description of the same configuration as that of the above embodiment will be omitted.

[0092] The coaxial cable 71C includes the aforementioned signal conductor 72 and dielectric 73, and a ground conductor 74B covering the outer periphery of the dielectric 73. The signal conductor 72, dielectric 73, and ground conductor 74B form a coaxial structure.

[0093] The ground conductor 74B includes a cylindrical portion 741 extending along the length of the coaxial cable 71C (dielectric 73) and a flat plate portion 742 provided at one end of the cylindrical portion 741. The end surfaces of the signal conductor 72 and dielectric 73 exposed on the surface of the flat plate portion 742 are flush with the surface of the flat plate portion 742. In this third variation, the ground conductor 74B constitutes the ground portion.

[0094] The probe 2S contacts the signal conductor 72 exposed from the flat plate portion 742 . The probe 2G contacts the surface of the flat plate portion 742 .

[0095] Even in the third variant described above, the end face of the coaxial cable's signal conductor and the surface of the ground conductor (flat portion) are still located on the same plane, allowing multiple probes to contact the signal and ground conductors, thereby achieving electrical continuity between the signal and ground lines. This third variant maintains the coaxial line, preventing the changes in line shape seen in previous implementations, resulting in reduced noise. Furthermore, as with the first embodiment, this third variant offers a high degree of flexibility in the placement of the probes 2, enabling various measurements.

[0096] Modification 4

[0097] Figure 10 It is a diagram for explaining the structure of a coaxial cable according to Modification 4. Figure 10 (a) shows a cross-sectional view of a coaxial cable. Figure 10 (b) shows a top view of the coaxial cable. The measurement unit of this modification 4 does not include the second ground plate 5 described above, and a coaxial cable 71D is provided instead of the coaxial cable 71. Hereinafter, description of the same configuration as that of the above embodiment will be omitted.

[0098] The coaxial cable 71D includes the aforementioned signal conductor 72 and dielectric 73 , and a ground conductor 74C covering the outer periphery of the dielectric 73 .

[0099] The ground conductor 74C includes a first cylindrical portion 743 that covers the dielectric 73; a second cylindrical portion 744 that covers a dielectric 73 different from the dielectric 73 covered by the first cylindrical portion 743; and a flat plate portion 745 provided at one end of the first cylindrical portion 743 and the second cylindrical portion 744. The end surfaces of the signal conductor 72 and the dielectric 73 that are exposed on the surface of the flat plate portion 745 are flush with the surface of the flat plate portion 745.

[0100] In this modification example 4, two probes 2S and three probes 2G are provided. Figure 11 This is a perspective view showing an example of the contact state between the coaxial cable and the probes according to Modification 4. One probe 2S contacts one signal conductor 72 exposed from the flat plate portion 745. The other probe 2S contacts the other signal conductor 72 exposed from the flat plate portion 745. Furthermore, one of the probes 2G is located between (inside) the probes 2S and contacts the surface of the flat plate portion 745. The remaining two probes 2G are located outside the two probes 2S and contact the surface of the flat plate portion 745.

[0101] In addition, probe 2G is not limited to Figure 11 The arrangement and number of probes 2S shown in the figure can be modified in various ways. For example, the structure may not include the probe 2G provided between the two probes 2S.

[0102] Even in the fourth variant described above, the end face of the coaxial cable's signal conductor and the surface of the ground conductor (flat portion) are still located on the same plane, allowing multiple probes to contact the signal and ground conductors, thereby achieving electrical continuity between the signal and ground lines. This fourth variant maintains the coaxial line, preventing the line's shape from changing as in the previous embodiment, resulting in reduced noise. Furthermore, as in the first embodiment, this fourth variant offers a high degree of flexibility in the placement of the probes 2, enabling various measurements.

[0103] Furthermore, while Modifications 1 to 4 above describe configurations involving a second ground plate and a coaxial cable connected thereto, as well as configurations without a second ground plate, these modifications are also applicable to configurations involving a first ground plate and a coaxial cable connected thereto. The connection between the probe 2 and the coaxial cable can adopt any of the aforementioned configurations. In this case, the configurations may be combined in the same or different ways.

[0104] While the embodiment for implementing the present invention has been described above, the present invention is not limited to the above embodiment. For example, the ground plate may have a partially insulating structure as long as the probe 2G can be electrically connected to the ground plate.

[0105] The contact probe configuration described here is merely an example, and various known probes are applicable. For example, the probe is not limited to the aforementioned plunger and coil spring configuration; it may also include a probe having a tubular member, a spring probe, a solid conductive member, a conductive tube, a wire, or a connection terminal (connector) for connecting electrical contacts, or any combination of these.

[0106] Therefore, the present invention includes various embodiments and the like that are not described here, and various design changes and the like can be implemented without departing from the technical concept specified by the claims.

[0107] As described above, the measuring unit of the present invention is suitable for suppressing noise.

Claims

1. A measuring unit, characterized in that: include: The first connecting portion includes a first grounding portion forming a portion of a line for conducting a potential of a ground line, and having a surface on one end side formed into a flat surface; a first signal portion forming a portion of a line for conducting a measurement signal, with an end portion exposed on the same plane as the plane of the first ground portion; and an insulating first dielectric portion provided between the first ground portion and the first signal portion; The second connecting portion includes: a second ground portion forming a portion of a line for conducting a ground potential, with a surface on one end thereof being formed as a flat surface; a second signal portion forming a portion of a line for conducting a measurement signal, with an end portion exposed on the same plane as the flat surface of the second ground portion; and an insulating second dielectric portion provided between the second ground portion and the second signal portion; a conductive first contact probe that is retractable along a longitudinal axis, one end of which contacts the first signal portion within the plane of the first connecting portion, and the other end of which contacts the second signal portion within the plane of the second connecting portion; and The conductive second contact probe is stretchable along the longitudinal axis, and one end contacts the first ground portion within the plane of the first connecting portion, while the other end contacts the second ground portion within the plane of the second connecting portion.

2. The measuring unit according to claim 1, wherein include: a first ground plate; a first coaxial cable connected to the first ground plate; a second ground plate; as well as a second coaxial cable connected to the second ground plate, The first coaxial cable has: a first signal conductor forming part of the circuit of the first signal portion; a first dielectric disposed on an outer periphery of the first signal conductor; and a first ground conductor provided on the outer periphery of the first dielectric, The second coaxial cable has: a second signal conductor forming part of the circuitry of the second signal portion; a second dielectric disposed on an outer periphery of the second signal conductor; and a second ground conductor provided on the outer periphery of the second dielectric, The first signal conductor constitutes the first signal portion, The first dielectric constitutes the first dielectric portion, The first ground conductor and the first ground plate constitute the first ground portion. The second signal conductor constitutes the second signal portion, The second dielectric constitutes the second dielectric portion, The second ground conductor and the second ground plate constitute the second ground portion.

3. The measuring unit according to claim 2, wherein: The first ground plate has a first through-hole formed therein, through which the first ground conductor is inserted. The second ground plate has a second through-hole formed therein, through which the second ground conductor is inserted.

4. The measuring unit according to claim 2, wherein: The first ground plate has a first through-hole formed therein, through which the first dielectric material is inserted. The first ground conductor is electrically connected to a surface of the first ground plate. The second ground plate has a second through-hole formed therein, through which the second dielectric material is inserted. The second ground conductor is electrically connected to the surface of the second ground plate.

5. The measuring unit according to claim 1, wherein include: a first ground plate; a first coaxial cable connected to the first ground plate; a second ground plate; as well as a second coaxial cable connected to the second ground plate, The first ground plate has: a first signal relay portion forming a portion of the line of the first signal portion; and a first ground plate-side dielectric covering the outer periphery of the first signal relay portion; The second ground plate has: a second signal relay portion forming a portion of the line of the second signal portion; and a second ground plate-side dielectric covering the outer periphery of the second signal relay portion; The first coaxial cable has: a first signal conductor forming a portion of the line of the first signal portion and electrically connected to the first signal relay portion; a first cable-side dielectric provided on an outer periphery of the first signal conductor; as well as a first grounding conductor provided on the outer periphery of the first cable-side dielectric and electrically connected to the first ground plate at a position of the first ground plate different from the first signal relay portion and the first ground plate-side dielectric; The second coaxial cable has: a second signal conductor forming a portion of the line of the second signal portion and electrically connected to the second signal relay portion; a second cable-side dielectric provided on an outer periphery of the second signal conductor; as well as a second grounding conductor provided on the outer periphery of the second cable-side dielectric and electrically connected to the second ground plate at a position of the second ground plate different from the second signal relay portion and the second ground plate-side dielectric; The first signal relay portion and the first signal conductor constitute the first signal portion, the first ground plate-side dielectric and the first cable-side dielectric constitute the first dielectric portion, and the first ground conductor and the first ground plate constitute the first ground portion. The second signal relay portion and the second signal conductor constitute the second signal portion. The second ground plate-side dielectric and the second cable-side dielectric constitute the second dielectric portion, and the second ground conductor and the second ground plate constitute the second ground portion.

6. The measuring unit according to any one of claims 2 to 5, characterized in that: Connecting a plurality of the first coaxial cables to the first ground plate, A plurality of second coaxial cables are connected to the second ground plate.

7. The measuring unit according to claim 1, wherein: include: A first coaxial cable having: a first signal conductor forming the line of the first signal portion; a first dielectric provided on an outer periphery of the first signal conductor to constitute the first dielectric portion; and a first ground conductor provided on an outer periphery of the first dielectric to constitute the first ground portion; as well as The second coaxial cable comprises: a second signal conductor forming the line of the second signal portion; a second dielectric provided on the periphery of the second signal conductor to constitute the second dielectric portion; and a second ground conductor provided on the periphery of the second dielectric to constitute the second ground portion, wherein the first ground conductor has: a first cylindrical portion extending along the first signal conductor and the first dielectric; as well as The first flat plate portion is provided at one end of the first cylindrical portion and is in the shape of a flat plate. The end surfaces of the first signal conductor and the first dielectric are located on the same plane as the surface of the first flat plate portion. The second grounding conductor has: a second cylindrical portion extending along the second signal conductor and the second dielectric; as well as The second flat plate portion is provided at one end of the second cylindrical portion and is in the shape of a flat plate. End surfaces of the second signal conductor and the second dielectric are located on the same plane as a surface of the second flat plate portion.

8. The measuring unit according to claim 7, characterized in that include: There are a plurality of groups, each consisting of the first signal conductor, the first dielectric, and the first cylindrical portion, and a plurality of groups, each consisting of the second signal conductor, the second dielectric, and the second cylindrical portion.

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