Cutting device

Abstract

This invention provides a cutting apparatus that, in a cutting apparatus having a cutting tool changing unit, prevents the insertion of other cutting tools into a cutting tool storage section that already houses a cutting tool. Instead, the cutting tool is inserted into a cutting tool storage section that is determined by a storage determination unit to not house a cutting tool. This prevents the insertion of other cutting tools into a cutting tool storage section that already houses other cutting tools.

Description

Technical Field

[0001] This invention relates to a cutting apparatus having a cutting tool changing unit that automatically loads and unloads cutting tools installed in the cutting unit. Background Technology

[0002] Semiconductor chips, such as ICs (Integrated Circuits) and LSIs (Large Scale Integration), are indispensable structures in various electronic devices, including mobile phones and personal computers. Such chips are typically manufactured by dividing a wafer, on the front side, which has a large number of semiconductor devices formed thereon, into regions containing each individual semiconductor device.

[0003] The slitting of workpieces such as wafers is performed, for example, by cutting the workpieces using a cutting device. Such a cutting device typically includes: a chuck stage that holds the workpieces; and a cutting unit that rotatably mounts a cutting tool that cuts the workpiece held by the chuck stage. The outer periphery of the rotating cutting tool contacts the workpiece along the boundary of the region containing the semiconductor device, thereby cutting the workpiece and slitting it into individual chips.

[0004] The cutting tool wears down as it cuts the workpiece. Therefore, in such a cutting device, the cutting tool needs to be replaced periodically. In view of this, a cutting device having a cutting tool changing unit (cutting tool changing device) that automatically changes the cutting tool has been proposed (see, for example, Patent Document 1).

[0005] Specifically, the cutting tool changing unit includes: a cutting tool holder (tool rack) having multiple cutting tool storage sections (tool storage units) for individually storing cutting tools; and a cutting tool conveying mechanism (guide unit, movable base plate, positioning unit, fastening nut loading / unloading mechanism, and cutting tool loading / unloading mechanism) that conveys cutting tools between the cutting tool holder and the cutting unit. Furthermore, the cutting tool conveying mechanism automatically conveys used cutting tools from the cutting unit to the cutting tool holder and unused cutting tools from the cutting tool holder to the cutting unit.

[0006] Patent Document 1: Japanese Patent Application Publication No. 2007-105829

[0007] In cutting equipment, the operator typically manually replenishes used and / or unused cutting tools stored in multiple cutting tool holders. The cutting equipment is usually configured to monitor the operator's actions and thus track the storage status of used and unused cutting tools in the multiple cutting tool holders.

[0008] However, if the operator performs this operation while the cutting device is temporarily stopped due to some error, it may be impossible to accurately grasp the storage status of the cutting tools in the multiple tool holders. Furthermore, if the cutting device cannot accurately grasp this situation, various problems may arise.

[0009] For example, the cutting tool conveying mechanism might load a used cutting tool into a cutting tool storage section that already contains unused cutting tools. In this case, there is a possibility that the two cutting tools might collide, causing damage to the cutting tool conveying mechanism or the unused cutting tool. Summary of the Invention

[0010] In view of the above, the object of the present invention is to prevent the insertion of a cutting tool into a cutting tool storage section that already contains other cutting tools in a cutting apparatus having a cutting tool changing unit.

[0011] According to the present invention, a cutting apparatus is provided, comprising: a chuck table for holding a workpiece; a cutting unit equipped with a cutting tool for cutting the workpiece held by the chuck table and the cutting tool being rotatable; and a cutting tool changing unit for automatically loading and unloading the cutting tool mounted in the cutting unit, wherein the cutting tool changing unit comprises: a cutting tool holder having a plurality of cutting tool storage sections, each of which individually stores the cutting tool; and a cutting tool conveying mechanism for conveying the cutting tool between the cutting tool holder and the cutting unit, the cutting tool holder having a storage determination unit for determining whether the cutting tool is stored in the cutting tool storage section, and the cutting tool conveying mechanism moving the cutting tool into the cutting tool storage section that is determined by the storage determination unit not to store the cutting tool.

[0012] Preferably, the cutting device further includes a control unit that controls the operation of the cutting tool conveying mechanism. The storage determination unit includes: an illumination unit that illuminates the cutting tool storage unit with light; and an imaging element that receives light and converts it into an electrical signal when illuminated by the illumination unit. The control unit includes: a brightness calculation unit that calculates brightness based on the portion corresponding to the cutting tool contained in the image captured by the storage determination unit; and a threshold storage unit that stores a threshold as a distinction criterion for the state in which the cutting tool is stored in the cutting tool storage unit. The brightness of the portion corresponding to the cutting tool in the image captured by the storage determination unit under the current state is distinguished from the brightness of the portion corresponding to the cutting tool in the image captured by the storage determination unit under the current state where the cutting tool is not stored in the cutting tool storage part and the cutting tool is positioned at a predetermined distance from the cutting tool storage part; and the determination unit compares the brightness calculated by the brightness calculation unit with the threshold stored in the threshold storage unit to determine whether the cutting tool is stored in the cutting tool storage part.

[0013] Preferably, the cutting tool has a recording unit that records one or both of the type and characteristics of the cutting tool, and the determination unit determines one or both of the type and characteristics of the cutting tool based on the portion of the image obtained by the storage determination unit that corresponds to the recording unit.

[0014] Preferably, the lighting section is oblique lighting.

[0015] Preferably, the cutting tool storage part is disposed on the front side of the transparent support member, and the storage determination unit is disposed on the back side of the support member. The storage determination unit photographs the cutting tool through the support member.

[0016] In this invention, cutting tools are moved into a cutting tool storage section that has been determined by a storage determination unit to not contain cutting tools. This prevents the insertion of cutting tools into a cutting tool storage section that already contains other cutting tools. Attached Figure Description

[0017] Figure 1 This is a perspective view schematically illustrating an example of a cutting device.

[0018] Figure 2 This is an exploded perspective view schematically showing an example of a cutting unit.

[0019] Figure 3 (A) is a perspective view schematically showing the front side of an example of a cutting tool. Figure 3 (B) is a perspective view schematically showing an example of a cutting tool from the back side.

[0020] Figure 4 This is a perspective view schematically illustrating an example of a cutting tool changing unit.

[0021] Figure 5 This is a perspective view schematically showing an example of a cutting tool holder.

[0022] Figure 6 This is a perspective view schematically illustrating an example of a loading and unloading unit.

[0023] Figure 7 (A) is a schematic side view showing a portion of a cutting tool holder in which other cutting tools are stored in a cutting tool storage section. Figure 7 (B) is a schematic side view of a portion of a cutting tool holder in the cutting tool storage section, where no other cutting tools are stored.

[0024] Label Explanation

[0025] 11: Workpiece; 13: Slicing strip; 15: Frame; 2: Cutting device; 4: Base (4a, 4b: Opening); 6: Box mounting platform; 8: Box; 10: Chuck table moving mechanism (10a: Moving table); 12: Dustproof and drip-proof cover; 14: Chuck table (14a: Holding surface); 16: Fixture; 18: Guide rail; 20: First support structure; 22: Track; 24: First conveying unit moving mechanism; 26: First conveying unit (26a: Holding part); 28: Track; 30: Second conveying unit moving mechanism; 32: Second conveying unit; 34: Second support structure; 36a, 36b: Cutting unit moving mechanism; 38a, 38b: Cutting unit; 40: Housing; 42: Spindle; 44 : Mounting base; 46: Flange (46a: front, 46b: protrusion, 46c: front end face); 48: Support shaft (48a: threaded part, 48b: recessed part); 50, 51: Cutting tool; 52: Base (52a: opening, 52b: protrusion, 52c: recording part); 54: Cutting edge; 56: Nut (56a: opening, 56b: through hole); 60: Camera; 62: Cleaning unit (62a: rotary table, 62b: nozzle); 64: Cutting tool changing unit; 66: Control unit (66a: brightness calculation unit, 66b: threshold storage unit, 66c: judgment unit); 70a, 70b: Cutting tool storage unit; 72: Support structure; 74: Spindle; 76: Support component (76a: 76a: Front, 76b: Back, 76c: Opening); 78: Cutting tool storage part; 80: Support component (80a: Front); 82: Boss part (Support shaft); 86: Imaging unit (storage determination unit) (86a: Objective lens, 86b: Illumination part); 88: Cutting tool conveying mechanism; 90: Loading and unloading unit moving mechanism (90a: Base); 92: Ball screw; 94: Moving block; 96: Support component (96a: Upper wall, 96b: Side wall, 96c: Support part); 98: Loading and unloading unit; 100: Tool loading and unloading unit; 102: Motor (102a: Housing, 102b: Pulley); 104: Power transmission mechanism (104a: Housing, 104b: Pulley, 104c: Through hole); 106: Shaft; 108: Connecting component; 110a, 110b: Tool holding unit; 112: Support component; 114a, 114b: Tool gripping unit; 116: Gripping part (116a: front); 118: Locating pin; 120: Gripping component (120a: contact part); 130: Nut loading / unloading unit; 132: Motor (132a: housing, 132b: pulley); 134: Power transmission mechanism (134a: housing, 134b: pulley, 134c: through hole); 136: Shaft; 138: Connecting component; 140a, 140b: Nut holding unit; 142: Rotating component (142a: front); 144: Retaining pin; 146: Gripping component (146a: claw);148: Cover. Detailed Implementation

[0026] The embodiments of the present invention will be described with reference to the accompanying drawings. Figure 1 This is a perspective view schematically illustrating the cutting device according to an embodiment. Additionally, Figure 1 The X-axis direction (machining feed direction, first horizontal direction, forward / backward direction) and Y-axis direction (indexing feed direction, second horizontal direction, left / right direction) shown are perpendicular to the horizontal plane. Additionally, Figure 1 The Z-axis direction shown (cut-in feed direction, up and down direction, height direction) is the direction perpendicular to the X-axis and Y-axis directions (vertical direction).

[0027] Figure 1 The cutting device 2 shown has a base 4 that supports or houses the various components constituting the cutting device 2. A rectangular opening 4a that opens onto the upper surface of the base 4 is provided at the corner of the front end side of the base 4.

[0028] A rectangular opening 4b is provided on the side of the opening 4a, which is open on the upper surface of the base 4 and extends along the X-axis. Inside the opening 4a is a box-holding platform 6 for holding the box 8. The box 8 is a cuboid container capable of holding multiple workpieces 11 that are cut in the cutting device 2.

[0029] A lifting unit (not shown) is connected to the box mounting stage 6, which moves (lifts) the box mounting stage 6 along the Z-axis. Furthermore, boxes 8 containing multiple workpieces 11 are mounted on the upper surface of the box mounting stage 6. Figure 1 In the image, only the outline of box 8 is shown with a double-dotted line.

[0030] The workpiece 11 is, for example, a disk-shaped wafer formed of a semiconductor such as silicon, having a generally parallel front and back side. The workpiece 11 is divided into multiple rectangular regions by multiple predetermined dividing lines (spacers) arranged in a grid pattern.

[0031] Furthermore, semiconductor devices such as ICs and LSIs are formed in the areas divided by the predetermined dividing lines on the front side of the workpiece 11. When the workpiece 11 is divided by cutting along the predetermined dividing lines using the cutting device 2, semiconductor device chips are obtained.

[0032] A circular strip (scribing strip) 13 with a diameter larger than that of the workpiece 11 is attached to the back (lower surface) side of the workpiece 11. The strip 13 has, for example, a circular film-like substrate and an adhesive (paste layer) disposed on the substrate.

[0033] The substrate is formed of resins such as polyolefins, polyvinyl chloride, or polyethylene terephthalate, and the adhesive is formed of adhesives such as epoxy-based, acrylic-based, or rubber-based adhesives. Alternatively, UV-curing resins that harden upon exposure to ultraviolet light can be used as the adhesive.

[0034] The outer periphery of the band 13 is attached to a ring-shaped frame 15 made of metal such as SUS (stainless steel). A circular opening with a diameter larger than that of the workpiece 11 is provided in the center of the frame 15.

[0035] When the workpiece 11 is placed inside the opening of the frame 15 and the central part of the belt 13 is attached to the back side of the workpiece 11, and the outer periphery of the belt 13 is attached to the frame 15, the workpiece 11 is supported by the frame 15 by means of the belt 13.

[0036] Furthermore, there are no restrictions on the type, material, shape, structure, and size of the workpiece 11. The workpiece 11 can be, for example, a wafer formed from semiconductors other than silicon (GaAs, InP, GaN, or SiC, etc.), glass, ceramics, resin, or metal. Additionally, there are no restrictions on the type, number, shape, structure, size, and arrangement of devices formed on the workpiece 11, and devices may not even be formed on the workpiece 11.

[0037] A ball screw type chuck table moving mechanism 10 is provided inside the opening 4b of the base 4. The chuck table moving mechanism 10 has a flat moving table 10a, which can move along the X-axis.

[0038] In addition, a pleated dustproof and dripproof cover 12 is provided on one side and the other side (front and rear) of the movable worktable 10a in the X-axis direction, covering the upper side of the chuck worktable moving mechanism 10 and extending and retracting along the X-axis direction.

[0039] A chuck table 14 is provided on the movable worktable 10a to hold the workpiece 11. The upper surface of the chuck table 14 is a surface that is approximately parallel to the horizontal plane (XY plane), forming a circular holding surface 14a for holding the workpiece 11.

[0040] The holding surface 14a is connected to a suction source (not shown) such as an injector via a flow path (not shown) and a valve (not shown) formed inside the chuck table 14. In addition, a plurality of clamps 16 are provided around the chuck table 14, which hold and fix the frame 15 supporting the workpiece 11.

[0041] The chuck table moving mechanism 10 enables the chuck table 14 and the moving table 10a to move together along the X-axis. In addition, the chuck table 14 is connected to a rotary drive source (not shown) such as an electric motor, which enables the chuck table 14 to rotate about a rotation axis that passes through the center of the holding surface 14a and is approximately parallel to the Z-axis.

[0042] Above the front end of the opening 4b, a pair of guide rails 18 are arranged along the Y-axis. One of the guide rails 18 has a bottom wall that is substantially parallel to the horizontal plane and a side wall that is erected from the end of the bottom wall on the side away from the other of the pair of guide rails 18. Similarly, the other of the pair of guide rails 18 has a bottom wall that is substantially parallel to the horizontal plane and a side wall that is erected from the end of the bottom wall on the side away from the other of the pair of guide rails 18.

[0043] Furthermore, the X-axis spacing of the pair of guide rails 18 can be adjusted. For example, with the bottom walls of each guide rail 18 supporting the lower surface of the frame 15, the X-axis spacing of the pair of guide rails 18 can be adjusted so that their side walls contact the outer periphery of the frame 15. This allows for the alignment of the workpiece 11 and the frame 15.

[0044] Furthermore, a portal-shaped first support structure 20 is arranged on the upper surface of the base 4, spanning the opening 4b. A track 22 along the Y-axis is fixed to the front surface side (guide rail 18 side) of the first support structure 20. A first conveying unit 26 is connected to the front surface side of the track 22 by means of a first conveying unit moving mechanism 24.

[0045] The first conveying unit moving mechanism 24 can slide along the front surface of the track 22, i.e., it can move along the Y-axis. Furthermore, the first conveying unit moving mechanism 24 includes a lifting unit such as a cylinder, and the lifting unit has a rod that moves up and down along the Z-axis.

[0046] A first conveying unit 26 is fixed to the lower end of the rod of the lifting unit. Therefore, the first conveying unit moving mechanism 24 can move the first conveying unit 26 along the Y-axis by sliding on the front surface side of the track 22 and / or can move the first conveying unit 26 along the Z-axis by raising and lowering the rod.

[0047] Additionally, the first conveying unit 26 has a plurality of suction pads for holding the frame 15. The lower surface of the suction pads forms a holding surface for attracting and holding the upper surface of the frame 15. The holding surface of the suction pads is connected to a suction source (not shown) such as an injector via a flow path (not shown) formed inside the suction pads, a pipe (not shown) communicating with the flow path, and a valve (not shown) for controlling the flow of gas in the pipe.

[0048] Additionally, a gripping part 26a for holding the frame 15 is provided at the end of the first conveying unit 26 on the opening 4a side (box 8 side). The first conveying unit moving mechanism 24 can move along the Y-axis direction (sliding on the front surface side of the track 22) so that the first conveying unit 26, which is in a state where the frame 15 stored in the box 8 is held by the gripping part 26a, moves away from the box 8. In this case, the workpiece 11 and the frame 15 are taken out of the box 8 together and placed on a pair of guide rails 18.

[0049] Similarly, the first conveying unit moving mechanism 24 can move along the Y-axis (sliding on the front surface side of the track 22) so that the first conveying unit 26, which is held by the holding part 26a and is arranged on a pair of guide rails 18, is brought close to the box 8. In this case, the workpiece 11 to be processed is moved into the box 8 together with the frame 15.

[0050] Additionally, a track 28 along the Y-axis is fixed to the front surface of the first support structure 20. A second conveying unit 32 is connected to the front surface of the track 28 via a second conveying unit moving mechanism 30.

[0051] The second conveying unit moving mechanism 30 can slide along the front surface of the track 28, i.e., it can move along the Y-axis. Furthermore, the second conveying unit moving mechanism 30 includes a lifting unit such as a cylinder, which has a rod that moves up and down along the Z-axis.

[0052] A second conveying unit 32 is fixed to the lower end of the rod of the lifting unit. Therefore, the second conveying unit moving mechanism 30 can move the second conveying unit 32 along the Y-axis direction by sliding on the front surface side of the track 28 and / or can move the second conveying unit 32 along the Z-axis direction by raising and lowering the rod.

[0053] Additionally, the second conveying unit 32 has a plurality of suction pads for holding the frame 15. The lower surface of the suction pads forms a holding surface for attracting and holding the upper surface of the frame 15. The holding surface of the suction pads is connected to a suction source (not shown) such as an injector via a flow path (not shown) formed inside the suction pads, a pipe (not shown) communicating with the flow path, and a valve (not shown) for controlling the flow of gas in the pipe.

[0054] A portal-shaped second support structure 34 is arranged behind the first support structure 20, spanning the opening 4b. Ball screw type cutting unit moving mechanisms 36a and 36b are provided at both ends of the front surface side (side of the first support structure 20) in the Y-axis direction of the second support structure 34.

[0055] A cutting unit 38a for cutting the workpiece 11 is fixed at the lower part of the cutting unit moving mechanism 36a, and a cutting unit 38b for cutting the workpiece 11 is fixed at the lower part of the cutting unit moving mechanism 36b.

[0056] Furthermore, the cutting unit moving mechanism 36a enables the cutting unit 38a to move along the Y-axis and / or Z-axis, and the cutting unit moving mechanism 36b enables the cutting unit 38b to move along the Y-axis and / or Z-axis.

[0057] Figure 2 This is a schematic exploded perspective view of the cutting unit 38a. The cutting unit 38a has a cylindrical housing 40. A cylindrical spindle (rotation shaft) 42 arranged along the Y-axis is housed in the housing 40.

[0058] The front end of the spindle 42 protrudes outside the housing 40, and a mounting base 44 is fixed to the front end. In addition, a rotation drive source such as an electric motor (not shown) that rotates the spindle 42 is connected to the base end (the other end side) of the spindle 42.

[0059] The mounting base 44 has a disc-shaped flange portion 46 and a cylindrical support shaft 48 protruding from the center of the front surface 46a of the flange portion 46. An annular protrusion 46b protruding from the front surface 46a is provided on the outer periphery of the flange portion 46. The front end face 46c of the protrusion 46b is formed to be substantially parallel to the front surface 46a.

[0060] A threaded portion 48a is formed on the outer peripheral surface of the support shaft 48. Additionally, a recess 48b is formed at the center of the front end face of the support shaft 48. An annular cutting tool 50 for cutting the workpiece 11 is mounted on the support shaft 48.

[0061] Figure 3 (A) is a perspective view schematically showing the front side of the cutting tool 50. Figure 3 (B) is a perspective view schematically showing the back side of the cutting tool 50. The cutting tool 50 has: an annular base 52 made of a metallic material such as aluminum (Al); and an annular cutting edge 54 formed along the outer periphery of the base 52.

[0062] An opening 52a, penetrating through the base 52 in the thickness direction, is provided at the center of the base 52 so that the support shaft 48 can be inserted. In addition, an annular protrusion 52b protruding towards the front side along the thickness direction of the base 52 is formed around the opening 52a of the base 52.

[0063] Additionally, a recording section 52c is provided on the back side of the base 52, which records one or both of the types and characteristics of the cutting tool 50. The recording section 52c may be, for example, a one-dimensional barcode or a two-dimensional barcode (QR code (Quick Response code (registered trademark)).

[0064] The cutting edge 54 is formed, for example, by fixing abrasive grains made of diamond or the like using a nickel-plated layer. However, there are no restrictions on the materials of the abrasive grains and bonding materials of the cutting edge 54, and they are appropriately selected according to the material of the workpiece 11 and the purpose of processing.

[0065] Refer again Figure 2 The remaining components of the cutting unit 38a will be described below. A ring-shaped nut 56 for fixing the cutting tool 50 is fastened to the threaded portion 48a of the support shaft 48. A circular opening 56a corresponding to the diameter of the support shaft 48 is formed in the center of the nut 56.

[0066] A threaded groove corresponding to the threaded portion 48a formed on the support shaft 48 is formed in the opening 56a. In addition, a plurality of through holes 56b extending through the nut 56 in the thickness direction are formed at approximately equal intervals along the circumference of the nut 56.

[0067] The cutting tool 50 is mounted on the mounting base 44 such that the support shaft 48 is inserted into the opening 52a of the base 52. Furthermore, when the nut 56 is screwed into the threaded portion 48a of the support shaft 48 and tightened, the cutting tool 50 is clamped by the front end face 46c of the flange portion 46 and the nut 56. Thus, the cutting tool 50 is fixed to the front end of the spindle 42.

[0068] Furthermore, while cutting unit 38a has been described here, cutting unit 38b also has the same structure as cutting unit 38a. Moreover, the cutting tool 50 mounted on cutting unit 38a and the cutting tool 50 mounted on cutting unit 38b are configured to face each other.

[0069] In addition, such as Figure 1 As shown, a camera 60 is provided at a position adjacent to the cutting units 38a and 38b along the X-axis to take pictures of the workpiece 11 held by the chuck table 14.

[0070] The camera 60 may be, for example, a visible light camera having an imaging element that receives visible light and converts it into an electrical signal, or an infrared camera having an imaging element that receives infrared light and converts it into an electrical signal.

[0071] In the cutting device 2, for example, the workpiece 11 can be aligned with the cutting units 38a and 38b based on an image obtained by taking a picture of the workpiece 11 on the chuck table 14 using a camera 60.

[0072] Furthermore, viewed from opening 4b, a cleaning unit 62 is arranged on the side of opening 4b, opposite to opening 4a. The cleaning unit 62 has a rotary table 62a within a cylindrical cleaning space for holding the workpiece 11.

[0073] A rotary drive source (not shown) such as an electric motor is connected to the rotary table 62a, which rotates the rotary table 62a about a rotation axis that is approximately parallel to the Z-axis direction. A nozzle 62b is arranged above the rotary table 62a to spray a cleaning fluid (e.g., a mixture of water and air) toward the workpiece 11 held by the rotary table 62a.

[0074] In the cutting device 2, for example, the workpiece 11 can be cleaned by spraying fluid from the nozzle 62b toward the workpiece 11 while rotating the rotary table 62a that holds the workpiece 11.

[0075] In addition, a cutting tool replacement unit 64 for replacing the cutting tool 50 is provided on the rear side (rear side) of the second support structure 34. Figure 4 This is a schematic perspective view of the cutting tool changing unit 64. The cutting tool changing unit 64 has a pair of cutting tool holders 70a and 70b for holding and storing a plurality of cutting tools 50.

[0076] Cutting tool holders 70a and 70b are configured to face each other along the Y-axis. Used cutting tools 50 that have been used for cutting the workpiece 11 and replacement cutting tools 50 (unused cutting tools 50) are stored in the cutting tool holders 70a and 70b.

[0077] The cutting tool holders 70a and 70b have a columnar support structure 72 arranged along the Z-axis direction. The support structure 72 is, for example, provided in the second support structure 34 (see reference). Figure 1 It is fixed to the upper surface of the base 4 behind the support structure 72. However, there are no restrictions on the location of the support structure 72.

[0078] A cylindrical spindle 74 arranged along the Y-axis is housed in the support structure 72. The front end (one end side) of the spindle 74 protrudes from the side of the support structure 72, and a rotary drive source such as an electric motor (not shown) is connected to the base end (the other end side) of the spindle 74.

[0079] Additionally, a disc-shaped support member 76 is fixed to the front end of the spindle 74. The support member 76 rotates about a rotation axis that is substantially parallel to the Y-axis direction by means of power transmitted from the rotation drive source via the spindle 74.

[0080] Figure 5This is a schematic perspective view of the cutting tool holder 70a. The following description of the cutting tool holder 70a shows that the cutting tool holder 70b is constructed in the same manner as the cutting tool holder 70a.

[0081] The support member 76 has a front side 76a and a back side 76b that are substantially parallel to each other, and the front end of the spindle 74 is fixed to the back side 76b side of the support member 76. Furthermore, a plurality of cutting tool storage sections 78 for storing the cutting tool 50 are provided on the front side 76a side of the support member 76.

[0082] Specifically, the support member 76 is provided with a plurality of circular openings 76c that penetrate the support member 76 in the thickness direction (Y-axis direction). For example, the plurality of openings 76c are formed at approximately equal intervals along the circumference of the support member 76.

[0083] A disc-shaped support member 80, made of transparent material, is embedded in the opening 76c to support the cutting tool 50. Furthermore, the support member 80 is fixed to the support member 76 inside the opening 76c.

[0084] A cylindrical boss (support shaft) 82 protruding from the front surface 80a of the support member 80 is provided at the center of the support member 80. The boss 82 is formed of, for example, the same transparent material as the support member 80 and is fixed to the center of the support member 80.

[0085] The boss portion 82 is formed with a diameter equal to that of the opening 52a provided on the base 52 of the cutting tool 50 (see reference). Figure 2 The diameter corresponds to that of the base 52. That is, the boss 82 can be inserted into the opening 52a of the base 52.

[0086] When the boss portion 82 is inserted into the opening 52a of the base 52, the cutting tool 50 is supported by the front surface 80a of the support member 80 and the boss portion 82. That is, the cutting tool storage portion 78 is composed of the front surface 80a of the support member 80 and the boss portion 82.

[0087] Additionally, an imaging unit (storage determination unit) 86 is provided on the back side 76b of the support member 76 and fixed to the side of the support structure 72. The imaging unit 86 includes: an objective lens 86a; an annular illumination section 86b arranged around the objective lens 86a; and an imaging element (not shown) that receives visible light or infrared light, etc., passing through the objective lens 86a while being illuminated by light from the illumination section 86b and converts it into an electrical signal.

[0088] The illumination unit 86b provides oblique illumination, for example, by focusing light and illuminating visible or infrared light at an angle toward the back 76b of the support member 76. Additionally, the imaging unit 86 is positioned overlapping the support member 76 in the Y-axis direction to capture images of the cutting tool storage unit 78, which is located opposite the imaging unit 86.

[0089] Furthermore, in the cutting device 2, the presence or absence of a cutting tool 50 in the cutting tool storage section 78 is determined based on the image captured by the imaging unit 86. The details of this determination will be described later.

[0090] Furthermore, when the support member 76 is rotated, the cutting tool storage section 78 moves circumferentially along the support member 76, thereby changing the cutting tool storage section 78 opposite to the imaging unit 86. This allows the cutting tool storage section 78 to be selected as the subject of the imaging unit 86.

[0091] The material of the support member 80 is appropriately selected according to the type of light used in the shooting unit 86. For example, if the light irradiated from the illumination unit 86b is visible light, the support member 80 is made of a component that transmits visible light. The support member 80 is made of, for example, plastic or glass (quartz glass, borosilicate glass, etc.). In addition, the boss portion 82 may also use the same material as the support member 80.

[0092] Alternatively, instead of providing an opening 76c and a support member 80 in the support member 76, the support member 76 itself can be made of a transparent material such as plastic or glass. In this case, a plurality of bosses 82 protruding from the front surface 76a of the support member 76 are provided, and the front surface 76a and the bosses 82 of the support member 76 constitute the cutting tool storage part 78.

[0093] like Figure 4 As shown, the cutting tool holders 70a and 70b are arranged separately from each other, with the front face 76a of the support member 76 of the cutting tool holder 70a facing the front face 76a of the support member 76 of the cutting tool holder 70b. Furthermore, a cutting tool transport mechanism 88 is provided to hold and transport the cutting tool 50 between the cutting tool holders 70a and 70b when viewed from the front.

[0094] The cutting tool conveying mechanism 88 includes a loading / unloading unit moving mechanism 90 that moves the loading / unloading unit (loading / unloading mechanism) 98, described later. The loading / unloading unit moving mechanism 90 has a plate-shaped base 90a arranged substantially parallel to the X-axis and Y-axis directions. The base 90a is, for example, disposed on the second support structure 34 (see reference). Figure 1 Behind ).

[0095] A ball screw 92, arranged along the X-axis, is fixed to the lower surface of the base 90a. A cuboid-shaped movable block 94 is screwed onto the ball screw 92, and a support member 96, shaped like a "U" in side view, is fixed to the lower surface of the movable block 94. The support member 96 supports the cutting tool 50 and the nut 56 (see reference). Figure 2 The loading and unloading unit 98 is supported for loading and unloading.

[0096] A pulse motor (not shown) is connected to the end of the ball screw 92. When the ball screw 92 is rotated by the pulse motor, the loading / unloading unit 98 supported by the support member 96 moves along the ball screw 92 in the X-axis direction. This controls the position of the loading / unloading unit 98 in the X-axis direction.

[0097] In addition, the loading / unloading unit moving mechanism 90 has a ball screw type Y-axis moving mechanism (not shown) that moves the base 90a along the Y-axis direction. The position of the loading / unloading unit 98 in the Y-axis direction is controlled by this Y-axis moving mechanism.

[0098] Figure 6 This is a schematic perspective view of the loading / unloading unit 98. The support member 96 supporting the loading / unloading unit 98 has: a plate-shaped upper wall portion 96a, which is fixed to the lower surface side of the movable block 94; a column-shaped side wall portion 96b, which protrudes downward from the rear end of the upper wall portion 96a; and a plate-shaped support portion 96c, which protrudes forward from the lower end of the side wall portion 96b, and is configured to be substantially parallel to the upper wall portion 96a.

[0099] The loading / unloading unit 98 is supported by the support portion 96c of the support member 96. The loading / unloading unit 98 includes: a tool loading / unloading unit 100 for loading and unloading the cutting tool 50; and a nut loading / unloading unit 130 for loading and unloading the nut 56 (see reference) used to fix the cutting tool 50. Figure 2 Loading and unloading.

[0100] The tool loading / unloading unit 100 and the nut loading / unloading unit 130 are fixed to the support portion 96c of the support member 96. The tool loading / unloading unit 100 includes: an electric motor 102 constituting a rotary drive source; and a power transmission mechanism 104 connected to the electric motor 102. The electric motor 102 and the power transmission mechanism 104 are arranged adjacent to each other along the X-axis direction.

[0101] The electric motor 102 includes: a housing 102a, which is formed in a hollow cubic shape to house components such as the rotor and stator; and a main shaft (not shown), which is connected to the rotor and arranged along the Z-axis. The front end of the main shaft of the electric motor 102 protrudes from the upper surface of the housing 102a, and a disc-shaped pulley 102b is fixed to the front end of the main shaft.

[0102] The power transmission mechanism 104 includes: a housing 104a, which is formed in a hollow cubic shape; and a main shaft (not shown), which is housed in the housing 104a and arranged along the Z-axis. The front end of the main shaft of the power transmission mechanism 104 protrudes from the upper surface of the housing 104a, and a disc-shaped pulley 104b is fixed to the front end of the main shaft.

[0103] A through hole 104c is formed in the housing 104a, which penetrates the housing 104a in the left-right direction (Y-axis direction). A cylindrical shaft 106 is inserted into the through hole 104c in such a way that it penetrates the housing 104a, and the two ends of the shaft 106 protrude from the two sides of the housing 104a.

[0104] The shaft 106 is held in a state where it can rotate about a rotation axis that is substantially parallel to the Y-axis direction, and is connected to the main shaft of the power transmission mechanism 104 inside the housing 104a. Specifically, a conversion mechanism is provided inside the housing 104a to convert the rotational power of the main shaft of the power transmission mechanism 104, which is arranged along the Z-axis direction, into the rotational power of the shaft 106, which is arranged along the Y-axis.

[0105] The conversion mechanism is composed, for example, of a bevel gear (circular bevel gear, straight bevel gear, etc.) or a hypoid gear. The electric motor 102 and the power transmission mechanism 104 are connected by a ring-shaped connecting member 108 made of a belt or chain.

[0106] Specifically, the connecting component 108 is wound in an elongated shape around the pulleys 102b and 104b in a manner that contacts the side of the pulley 102b of the motor 102 and the side of the pulley 104b of the power transmission mechanism 104 when viewed from above.

[0107] When power is supplied to the motor 102, the power of the motor 102 is transmitted to the rotating shaft of the power transmission mechanism 104 via pulley 102b, connecting member 108, and pulley 104b. Additionally, through a conversion mechanism located inside the housing 104a, the power of the main shaft of the power transmission mechanism 104 is transmitted to shaft 106, causing shaft 106 to rotate. Thus, the power of the motor 102 is transmitted to shaft 106 via the power transmission mechanism 104.

[0108] A pair of components mounted on the cutting unit 38a are fixed at one end of the shaft 106 (see reference). Figure 1 The cutting tool 50 and the tool holding unit 110a that will hold the cutting tool 50 which will be newly installed in the cutting unit 38a.

[0109] Additionally, a pair of components mounted on the cutting unit 38b (see reference) are fixed at the other end of shaft 106. Figure 1 The cutting tool 50 and the tool holding unit 110b that will hold the cutting tool 50 which will be newly installed in the cutting unit 38b.

[0110] The tool holding units 110a and 110b each have: a plate-shaped support member 112, which is formed in an elongated oval shape in side view and is fixed to the front end of the shaft 106; and tool holding units 114a and 114b, which are disposed on the side of the support member 112 opposite to the power transmission mechanism 104.

[0111] The tool holding unit 114a is fixed to one end (front end) of the support member 112, and the tool holding unit 114b is fixed to the other end (rear end) of the support member 112. The tool holding units 114a and 114b each have a cylindrical holding part 116 fixed to the support member 112.

[0112] The grip portion 116 has a front surface 116a facing the opposite side of the power transmission mechanism 104. Additionally, a locating pin 118 protruding from the front surface 116a is provided on the grip portion 116. The front end of the locating pin 118 intersects with a recess 48b formed in the support shaft 48 of the mounting base 44 (see reference). Figure 2 The position and size of the ) are formed accordingly, so that it can be inserted into the recess 48b.

[0113] Around the gripping portion 116, protrusions 52b for the cutting tools 50 are arranged at approximately equal intervals along the circumference of the gripping portion 116 (see reference). Figure 2 Multiple gripping components 120 are used for gripping. Each of the multiple gripping components 120 is formed in the shape of a column, and the base end (one end side) of the gripping component 120 is connected to the outer peripheral surface of the gripping part 116.

[0114] exist Figure 6 The diagram shows an example of four gripping members 120 provided with the outer peripheral surface of the protrusion 52b of the cutting tool 50 gripping from four directions. The front end (other end side) of the gripping member 120 protrudes from the front face 116a of the gripping portion 116, and a contact portion 120a is formed at the front end that contacts the outer peripheral surface of the protrusion 52b of the cutting tool 50.

[0115] The front end of the gripping member 120 moves along the radial direction of the gripping portion 116, for example, via a moving mechanism (not shown) housed inside the gripping portion 116. This moving mechanism switches between a state in which the contact portion 120a contacts the outer peripheral surface of the protrusion 52b of the cutting tool 50 to grip the cutting tool 50 (closed state) and a state in which the contact portion 120a is positioned outside the gripping portion 116 in the radial direction compared to the closed state to release the gripping of the cutting tool 50 (open state).

[0116] When changing the cutting tool 50 installed in the cutting units 38a and 38b, the cutting tool 50 is loaded and unloaded through the tool holding units 110a and 110b. The specific operation of the tool holding units 110a and 110b during the replacement of the cutting tool 50 will be described later.

[0117] A nut loading and unloading unit 130 is provided in front of the tool loading and unloading unit 100. The nut loading and unloading unit 130 includes: an electric motor 132 constituting a rotary drive source; and a power transmission mechanism 134 connected to the electric motor 132. The electric motor 132 and the power transmission mechanism 134 are arranged adjacent to each other along the X-axis direction.

[0118] The structure of the electric motor 132 and the power transmission mechanism 134 is the same as that of the electric motor 102 and the power transmission mechanism 104 of the tool loading and unloading unit 100. Specifically, the electric motor 132 has a housing 132a and a pulley 132b fixed to the front end of the main shaft of the electric motor 132. In addition, the power transmission mechanism 134 has a housing 134a and a pulley 134b fixed to the front end of the main shaft of the power transmission mechanism 134.

[0119] A through hole 134c is formed in the housing 134a, which penetrates the housing 134a in the left-right direction (Y-axis direction). A cylindrical shaft 136 is inserted into the through hole 134c in such a way that it penetrates the housing 134a, and the two ends of the shaft 136 protrude from the two sides of the housing 134a.

[0120] Shaft 136 is held in a state where it can rotate about a rotation axis that is approximately parallel to the Y-axis direction, and is connected to the rotation axis of the power transmission mechanism 134 inside the housing 134a. The motor 132 and the power transmission mechanism 134 are connected by a ring-shaped connecting member 138 made of a belt or chain.

[0121] Specifically, the connecting component 138 is wound in an elongated shape around the pulleys 132b and 134b in a manner that contacts the side of the pulley 132b of the motor 132 and the side of the pulley 134b of the power transmission mechanism 134 when viewed from above.

[0122] When power is supplied to the motor 132, the power of the motor 132 is transmitted to the main shaft of the power transmission mechanism 134 via pulley 132b, connecting member 138, and pulley 134b. Furthermore, through a conversion mechanism located inside the housing 134a, the power of the main shaft of the power transmission mechanism 134 is transmitted to shaft 136, causing shaft 136 to rotate. Thus, the power of the motor 132 is transmitted to shaft 136 via the power transmission mechanism 134.

[0123] A pair of nuts 56 are fixed at one end of shaft 136 for fixing the cutting tool 50 to the spindle 42 of the cutting unit 38a (see reference). Figure 2 A nut retaining unit 140a is used to retain and rotate the cutting tool 50. Additionally, a nut retaining unit 140b is fixed to the other end of the shaft 136 to retain and rotate the nut 56 used to fix the cutting tool 50 to the spindle 42 of the cutting unit 38b.

[0124] Nut retaining units 140a and 140b each have a cylindrical rotating member 142 connected to the front end of shaft 136. The rotating member 142 is subjected to force by springs or the like toward the opposite side of power transmission mechanism 134, and is configured to be able to move along the Y-axis direction by external force.

[0125] The rotating component 142 has a front side 142a facing the opposite side of the power transmission mechanism 134. Four retaining pins 144 protruding from the front side 142a are provided on the rotating component 142. The retaining pins 144 are connected to the nut 56 (see reference). Figure 2 The position and size of the through hole 56b are formed accordingly, so that it can be inserted into the through hole 56b.

[0126] Furthermore, the number of retaining pins 144 is appropriately set according to the number of through holes 56b. In addition, a plurality of holding members 146 for holding nuts 56 are arranged at approximately equal intervals around the rotating member 142 along the circumference of the rotating member 142.

[0127] The holding member 146 is formed in a columnar shape, and its base end (one end side) is connected to the outer peripheral surface of the rotating member 142. Figure 6 The image shows an example with four gripping parts 146 that grip the outer periphery of the nut 56 from four directions.

[0128] The front end (other end side) of the gripping member 146 protrudes from the front 142a of the rotating member 142, and a claw portion 146a curved toward the center side of the rotating member 142 is formed at the front end.

[0129] In addition, the gripping member 146 is subjected to force by a spring or the like in the radial direction outward of the rotating member 142, so that the claw 146a can move along the radial direction of the rotating member 142.

[0130] Additionally, a hollow cylindrical cover 148 is provided around the rotating member 142. The base end side (power transmission mechanism 134 side) of the rotating member 142 and the holding member 146 are housed inside the cover 148.

[0131] When the rotating member 142 is pressed toward the inside of the cover 148, the spring that applies force to the rotating member 142 contracts, and the rotating member 142, together with the multiple holding members 146, is pushed into the inside of the cover 148.

[0132] When the rotating member 142 is pushed into the inside of the cover 148, the front ends (claw 146a side) of the plurality of gripping members 146 come into contact with the inner wall of the cover 148 and are pressed, causing the springs that apply force to the gripping members 146 to contract. As a result, the front ends of the plurality of gripping members 146 move toward the radial direction of the rotating member 142.

[0133] Furthermore, the multiple gripping members 146 are configured such that their length direction is along the inner wall of the cover 148. At this time, the claw portion 146a of the gripping member 146 is, for example, positioned inside the radial direction of the rotating member 142, closer to the outer periphery of the rotating member 142 (closed state).

[0134] On the other hand, when the external force applied to the rotating member 142 is released, the rotating member 142 moves toward the outside of the cover 148, releasing the state in which the front end of the holding member 146 is pressed by the inner wall of the cover 148. As a result, the front ends of the plurality of holding members 146 move toward the outside of the rotating member 142 in the radial direction.

[0135] Furthermore, the front ends of the plurality of gripping members 146 are positioned outside the radial direction of the rotating member 142 compared to the closed state. At this time, the claw portion 146a of the gripping member 146 is, for example, positioned outside the radial direction of the rotating member 142, beyond the outer periphery of the rotating member 142 (open state).

[0136] The aforementioned nut retaining units 140a and 140b respectively retain and rotate the nut 56. Specifically, firstly, the retaining pin 144 of the rotating component 142 is inserted into the through hole 56b of the nut 56 (see reference). Figure 2 The nut 56 is brought into contact with the front side 142a of the rotating component 142 in the manner described in the figure.

[0137] When the rotating component 142 is pushed into the inside of the cover 148 in this state, the multiple gripping components 146 are closed, and the claw 146a contacts the outer peripheral surface of the nut 56 to grip the nut 56.

[0138] When the motor 132 is driven while the nut 56 is held in place by multiple holding members 146, the power of the motor 132 is transmitted to the shaft 136 via the power transmission mechanism 134, causing the shaft 136 to rotate. As a result, the rotating member 142 rotates, and the nut 56 held by the holding members 146 also rotates.

[0139] By using nut retaining units 140a and 140b to hold and rotate the nut 56, the tightening and loosening of the nut 56 can be automatically performed when changing the cutting tool 50 mounted on the cutting units 38a and 38b. Furthermore, the specific operation of the nut loading and unloading unit 130 during the changing of the cutting tool 50 will be described later.

[0140] Each component of the cutting device 2 (chuck table moving mechanism 10, chuck table 14, fixture 16, guide rail 18, first conveying unit moving mechanism 24, first conveying unit 26, second conveying unit moving mechanism 30, second conveying unit 32, cutting unit moving mechanisms 36a, 36b, cutting unit 38a, 38b, camera 60, cleaning unit 62, and cutting tool changing unit 64, etc.) is connected to the control unit 66.

[0141] The control unit 66 generates control signals for controlling the operation of each component of the cutting device 2, and outputs the generated control signals. The control unit 66 is, for example, a computer, and includes: a processing unit that performs various processes (calculations, etc.) required to operate each component of the cutting device 2; and a storage unit that stores various information (data and programs, etc.) used in the processing based on the processing unit.

[0142] The processing unit is configured to include a processor such as a CPU (Central Processing Unit). The storage unit is configured to include various types of memory that constitute main storage devices and auxiliary storage devices.

[0143] The workpiece 11 is cut using the cutting device 2 described above. When processing the workpiece 11, it is first placed in the box 8. The box 8 is then placed on the upper surface of the box-mounting platform 6.

[0144] The workpiece 11 stored in the box 8 is removed from the box 8 by the first conveying unit 26. Specifically, the first conveying unit 26 moves along the Y-axis in a manner away from the box 8 while holding the end of the frame 15 with the holding part 26a.

[0145] Thus, the workpiece 11 is pulled out of the box 8 and placed on a pair of guide rails 18. Furthermore, the workpiece 11 is clamped by the pair of guide rails 18, and the workpiece 11 is aligned.

[0146] Next, the workpiece 11 is conveyed to the chuck table 14 by holding the upper surface of the frame 15 through the first conveying unit 26. The workpiece 11 is positioned on the chuck table 14 with the belt 13 in between.

[0147] In addition, the frame 15 is fixed by multiple clamps 16. When a negative pressure from the suction source is applied to the holding surface 14a in this state, the workpiece 11 is attracted and held by the chuck table 14 through the belt 13.

[0148] Furthermore, the cutting tools 50 mounted on the cutting units 38a and 38b rotate and cut into the workpiece 11 to perform cutting operations on the workpiece 11. For example, the workpiece 11 is cut by the cutting tools 50 along a predetermined dividing line and divided into multiple device chips.

[0149] When the workpiece 11 is finished being processed, the upper surface of the frame 15 is held by the second conveying unit 32, and the workpiece 11 is conveyed from the chuck table 14 to the cleaning unit 62. Then, the workpiece 11 is cleaned by the cleaning unit 62.

[0150] When the workpiece 11 is cleaned, the upper surface of the frame 15 is held and transported to a pair of guide rails 18 by the first conveying unit 26. The frame 15 is clamped by the pair of guide rails 18 to align the workpiece 11 and the frame 15.

[0151] Then, the first conveying unit 26, while holding the frame 15 with the holding part 26a, moves along the Y-axis towards the box 8. As a result, the workpiece 11 is placed in the box 8. Thus, the workpiece 11 is processed by the cutting device 2.

[0152] Furthermore, the storage unit of the control unit 66 stores a program describing a series of operations of the cutting device 2. When a signal instructing the cutting device 2 to process the workpiece 11 is input, the processing unit of the control unit 66 reads the program from the storage unit and executes it, sequentially generating control signals for controlling the operations of each component of the cutting device 2.

[0153] Here, the cutting tools 50 installed in the cutting units 38a and 38b gradually wear down as they cut the workpiece 11, and therefore need to be replaced periodically. The replacement of the cutting tools 50 is carried out automatically by the cutting tool changing unit 64.

[0154] The following describes a specific example of the operation of the cutting tool changing unit 64 when changing the cutting tool 50. Specifically, the operation is described when replacing a used cutting tool 50 that has been installed in the cutting unit 38a and an unused cutting tool 50 stored in the cutting tool storage container 70a.

[0155] Furthermore, the same procedure applies when replacing a used cutting tool 50 that has been installed in the cutting unit 38b with an unused cutting tool 50 stored in the cutting tool storage unit 70b.

[0156] First, the loading / unloading unit 98 is moved along the X-axis direction by the loading / unloading unit moving mechanism 90 so that the tool holding unit 114b of the tool holding unit 110a (see reference) can be moved. Figure 6 ) and cutting tool holder 70a (refer to Figure 4 Opposite.

[0157] At this time, if necessary, the spindle 74 of the cutting tool holder 70a is rotated so that the holding part 116 of the tool holding unit 114b is opposite to the replacement cutting tool 50 held by the cutting tool storage part 78 of the cutting tool holder 70a.

[0158] Next, the holding member 120 surrounding the holding part 116 of the tool holding unit 114b is opened by the moving mechanism housed inside the holding part 116. Then, the base 90a is moved along the Y-axis by the Y-axis moving mechanism of the loading / unloading unit moving mechanism 90 so that the locating pin 118 protruding from the front 116a of the holding part 116 approaches the boss 82 of the cutting tool receiving part 78 (see reference). Figure 5 ).

[0159] Next, the moving mechanism inside the gripping portion 116 housed in the tool gripping unit 114b closes the gripping member 120 surrounding the gripping portion 116. As a result, the contact portion 120a formed at the front end of the gripping member 120 and the protrusion 52b of the cutting tool 50 (see reference)... Figure 2 The outer peripheral surface of the tool is in contact with the tool. That is, the tool 50 for replacement is held by the holding member 120.

[0160] Next, the base 90a is moved along the Y-axis direction by the Y-axis moving mechanism of the loading / unloading unit moving mechanism 90 so that the locating pin 118 is moved away from the boss portion 82. Next, the loading / unloading unit 98 is moved along the X-axis direction by the loading / unloading unit moving mechanism 90 so that the nut retaining unit 140a of the loading / unloading unit 98 (see reference) Figure 6 It is positioned opposite the mounting base 44 of the cutting unit 38a.

[0161] Next, the cutting unit 38a is moved along the Y-axis direction by the cutting unit moving mechanism 36a so as to move the nut 56 (see reference) of the cutting tool 50 fixedly mounted on the cutting unit 38a. Figure 2 Press it onto the front side 142a of the rotating part 142 of the nut retaining unit 140a.

[0162] At this time, the multiple retaining pins 144 of the nut retaining unit 140a are inserted into the through holes 56b of the nut 56. When the rotating member 142 is pressed by the nut 56, the rotating member 142 is pushed into the inside of the cover 148, and the multiple holding members 146 disposed around the rotating member 142 are closed. Thus, the nut 56 is held by the claws 146a of the multiple holding members 146.

[0163] Next, via motor 132 (refer to...) Figure 6 The power of the motor causes the shaft 136 to rotate, which in turn rotates the nut retaining unit 140a in the direction of loosening the nut 56. As a result, the nut 56 held by the nut retaining unit 140a can be removed from the support shaft 48 of the mounting base 44.

[0164] Next, the cutting unit 38a is moved along the Y-axis by the cutting unit moving mechanism 36a so that the cutting unit 38a is moved away from the nut holding unit 140a. In addition, the nut holding unit 140a is configured to maintain the state in which the rotating member 142 is pushed into the inside of the cover 148, and the nut 56 is still held by the nut holding unit 140a after being removed from the support shaft 48.

[0165] Next, the loading and unloading unit 98 is moved along the X-axis direction by the loading and unloading unit moving mechanism 90 so that the tool holding unit 114a of the tool holding unit 110a is opposite to the cutting tool 50 mounted on the cutting unit 38a.

[0166] Next, the holding member 120 disposed around the holding part 116 housed in the tool holding unit 114a is opened by a moving mechanism. Then, the cutting unit 38a is moved along the Y-axis by the cutting unit moving mechanism 36a so that the support shaft 48 of the mounting base 44 approaches the locating pin 118 protruding from the front 116a of the holding part 116.

[0167] Next, the holding member 120 surrounding the holding part 116, housed within the tool holding unit 114a, is closed by a moving mechanism within the holding part 116. As a result, the contact portion 120a formed at the front end of the holding member 120 contacts the outer peripheral surface of the protrusion 52b of the cutting tool 50. In other words, the used cutting tool 50 is held by the holding member 120.

[0168] Next, the cutting unit 38a is moved along the Y-axis by the cutting unit moving mechanism 36a so that the cutting unit 38a is moved away from the nut holding unit 140a. As a result, the used cutting tool 50 can be removed from the cutting unit 38a.

[0169] Next, via motor 102 (refer to...) Figure 6The power of the shaft 106 rotates 180°. This causes the support member 112 to rotate, swapping the positions of the tool holding unit 114a and the tool holding unit 114b. As a result, the tool holding unit 114b, holding the unused cutting tool 50, is positioned opposite the mounting base 44 of the cutting unit 38a.

[0170] Next, the cutting unit 38a is moved along the Y-axis by the cutting unit moving mechanism 36a so that the cutting unit 38a approaches the tool holding unit 114b. As a result, the support shaft 48 of the mounting base 44 is inserted into the opening 52a of the unused cutting tool 50 held by the tool holding unit 114b.

[0171] Next, the holding members 120 surrounding the holding part 116, housed within the tool holding unit 114b, are opened by a moving mechanism within the holding part 116. This allows the unused cutting tool 50 to be mounted on the front end of the spindle 42.

[0172] Next, the cutting unit 38a is moved along the Y-axis by the cutting unit moving mechanism 36a so that the cutting unit 38a is moved away from the tool holding unit 114b. Next, the loading and unloading unit 98 is moved by the loading and unloading unit moving mechanism 90 so that the nut holding unit 140a, which is in the state of holding the nut 56, is opposed to the mounting base 44.

[0173] Next, the cutting unit 38a is moved along the Y-axis by the cutting unit moving mechanism 36a so that the cutting unit 38a approaches the nut holding unit 140a. As a result, the nut 56 held by the nut holding unit 140a is positioned at the front end of the support shaft 48 of the mounting base 44.

[0174] Next, the shaft 136 is rotated by the power of the motor 132, causing the nut holding unit 140a to rotate in the direction of tightening the nut 56. This tightens the nut 56 to the threaded portion 48a of the support shaft 48 formed in the mounting base 44. As a result, the unused cutting tool 50 is held by the front end face 46c of the protrusion 46b of the mounting base 44 and the nut 56, and is fixed to the cutting unit 38a.

[0175] Next, the cutting unit 38a is moved along the Y-axis by the cutting unit moving mechanism 36a so that the cutting unit 38a is moved away from the nut holding unit 140a. At this time, the rotating member 142 moves towards the outside of the cover 148, and the multiple holding members 146 are in the open state. As a result, the multiple holding members 146 release their grip on the nut 56.

[0176] Next, the loading and unloading unit 98 is moved along the X-axis direction by the loading and unloading unit moving mechanism 90 so that the tool holding unit 114a, which holds the used cutting tool 50 by the holding member 120, is positioned opposite the cutting tool store 70a.

[0177] At this time, if necessary, the spindle 74 of the cutting tool holder 70a is rotated so that the holding part 116 of the tool holding unit 114a is opposite to the cutting tool storage part 78 of the cutting tool holder 70a.

[0178] Furthermore, in the cutting tool changing unit 64, the imaging unit (storage determination unit) 86 (see reference) provided in the cutting tool storage unit 70a is used. Figure 4 After confirming that no other cutting tools are stored in the cutting tool storage section 78, the used cutting tool 50 is stored in the cutting tool storage section 78.

[0179] The following is for reference Figure 7 (A) and Figure 7 (B) explains the operation for determining whether other cutting tools are stored in the cutting tool storage section 7, section 8. Additionally, Figure 7 (A) is a schematic side view showing a portion of a cutting tool holder 70a in which other cutting tools are stored in the cutting tool storage section 78. Figure 7 (B) is a schematic side view of a portion of a cutting tool holder 70a in the cutting tool storage section 78, where no other cutting tools are stored.

[0180] During this confirmation, the cutting tool 50 is first positioned at a position on the back side of the base 52 made of a metal material such as aluminum, where the imaging unit 86 provided on the back side 76b of the support member 76 can clearly capture images of the cutting tool 50 (at a predetermined distance d from the front side 76a of the support member 76).

[0181] Specifically, the base 90a is moved along the Y-axis direction by the Y-axis moving mechanism of the loading and unloading unit moving mechanism 90 so that the light irradiated from the illumination part 86b of the imaging unit 86 is reflected by the back of the base 52 and enters the objective lens 86a.

[0182] In other words, regarding the illumination unit 86b of the imaging unit 86, the light emission angle and position are designed so that the back side of the base 52 can be clearly photographed when the cutting tool 50 is positioned at a predetermined distance d from the front side 76a of the support member 76 (so that the light irradiated from the illumination unit 86b is reflected by the back side of the base 52 and incident on the objective lens 86a).

[0183] Next, under illumination from the lighting unit 86b, the imaging unit 86 takes a picture. Here, other cutting tools 51 are stored in the cutting tool storage unit 78 (see reference). Figure 7 (A) The light irradiated from the illumination unit 86b will not reach the cutting tool 50, nor will it be reflected by the back surface of the base 52 of the cutting tool 51 and enter the objective lens 86a. Therefore, the image obtained by the imaging unit 86 contains a relatively dark annular portion corresponding to the back surface of the base 52 of the cutting tool 51.

[0184] On the other hand, if no other cutting tools 51 are stored in the cutting tool storage section 78 (see reference 78) Figure 7 (B) The light irradiated from the illumination unit 86b is reflected by the back surface of the base 52 of the cutting tool 50 as described above and then enters the objective lens 86a. Therefore, the image obtained by the imaging unit 86 includes a relatively bright annular portion corresponding to the back surface of the base 52 of the cutting tool 50.

[0185] Next, control unit 66 (refer to...) Figure 1 The control unit 66 determines whether the cutting tool storage section 78 contains the cutting tool 51. Additionally, the control unit 66 includes a brightness calculation section 66a, which calculates the brightness based on the portion of the image captured by the imaging unit 86 that corresponds to the cutting tool 51 or the cutting tool 50.

[0186] That is, regarding the brightness calculation unit 66a, when the cutting tool 51 is stored in the cutting tool storage unit 78, the brightness is calculated based on the portion of the image containing the cutting tool 51. In addition, when the cutting tool storage unit 78 does not store the cutting tool 51, the brightness is calculated based on the portion of the image containing the cutting tool 50.

[0187] In addition, the control unit 66 has a threshold storage unit 66b, which stores threshold values ​​that serve as a reference for distinguishing the brightness of the portion of the image containing the cutting tool 51 from the brightness of the portion of the image containing the cutting tool 50.

[0188] In addition, the control unit 66 has a determination unit 66c, which determines whether a cutting tool 51 is stored in the cutting tool storage unit 78 by comparing the brightness calculated by the brightness calculation unit 66a with the threshold stored in the threshold storage unit 66b.

[0189] That is, in the control unit 66, the determination unit 66c compares the brightness calculated by the brightness calculation unit 66a based on the portion of the image obtained by the imaging unit 86 that corresponds to the cutting tool 51 or the cutting tool 50, with the threshold stored in the threshold storage unit 66b, thereby determining whether the cutting tool 51 is stored in the cutting tool storage unit 78.

[0190] Specifically, when the brightness is above a threshold, the determination unit 66c determines that the cutting tool 51 is not stored in the cutting tool storage unit 78. Conversely, when the brightness is below a threshold, the determination unit 66c determines that the cutting tool 51 is stored in the cutting tool storage unit 78.

[0191] If the control unit 66 determines that the cutting tool 51 is not stored in the cutting tool storage section 78, the boss 82 of the cutting tool storage section 78 is inserted into the opening 52a of the cutting tool 50 held by the tool holding unit 114a (see reference). Figure 2 Specifically, the base 90a is moved along the Y-axis direction by the Y-axis moving mechanism of the loading and unloading unit moving mechanism 90 so that the cutting tool 50 contacts the front surface 76a of the support member 76.

[0192] Next, the holding member 120 disposed around the holding part 116 housed in the tool holding unit 114a is opened by a moving mechanism. As a result, the contact portion 120a formed at the front end of the holding member 120 is moved away from the outer peripheral surface of the protrusion 52b of the cutting tool 50.

[0193] Next, the base 90a is moved along the Y-axis direction by the Y-axis moving mechanism of the loading and unloading unit moving mechanism 90, so that the positioning pin 118 protruding from the front 116a of the holding part 116 is moved away from the boss part 82. As a result, the used cutting tool 50 is moved into the cutting tool storage part 78.

[0194] On the other hand, when the control unit 66 determines that a cutting tool 51 is stored in the cutting tool storage section 78, the spindle 74 of the cutting tool holder 70a (see reference) is turned on. Figure 5 The tool holding unit 114a is rotated so that the holding part 116 is aligned with the other cutting tool storage part 78. Then, as described above, a confirmation operation is performed again to check whether other cutting tools 51 are stored in the cutting tool storage part 78.

[0195] In addition, if the control unit 66 determines that all cutting tools 51 are stored in the multiple cutting tool storage sections 78 of the cutting tool holder 70a, it will notify the operator of the cutting device 2 of an error message using the display (not shown) or indicator light (not shown) of the cutting device 2.

[0196] As described above, in the cutting device 2, the cutting tool 50 is moved into the cutting tool storage section 78, which is determined by the imaging unit (storage determination unit) 86 to be a section that does not store the cutting tool 51. This prevents the cutting tool 50 from being moved into the cutting tool storage section 78, which already stores other cutting tools 51.

[0197] Furthermore, a recording unit 52c is provided on the back side of the base 52 of the cutting tool 50, which is captured by the imaging unit 86, to record one or both of the type and characteristics of the cutting tool 50. Therefore, the determination unit 66c of the control unit 66 can also determine one or both of the type and characteristics of the cutting tool 50 based on the portion of the image obtained by the imaging unit 86 that corresponds to the recording unit 52c.

[0198] That is, in the cutting device 2, two determinations can be made based on the image obtained by the imaging unit 86 (determination of whether a cutting tool is stored in the cutting tool storage section 78 and determination of one or both of the type and characteristics of the cutting tool 50). In this case, there is no need to set up a new mechanism for determining one or both of the type and characteristics of the cutting tool 50, thus reducing the manufacturing cost of the cutting device 2.

[0199] Furthermore, the cutting device 2 is only one embodiment of the present invention, and the cutting device of the present invention is not limited to the structure of the cutting device 2. For example, in the present invention, it is sufficient to determine whether other cutting tools 51 are stored in the cutting tool storage section 78, and the determination action is not limited to the above-described action.

[0200] Specifically, the imaging unit 86 can be replaced, for example, with a light-projecting part that illuminates visible light or infrared light, and a photoelectric sensor that receives light reflected from the object being detected and generates an electrical signal. Furthermore, in this invention, it is possible to determine whether other cutting tools 51 are stored in the cutting tool storage section 78 based on the electrical signal generated by the sensor.

[0201] Alternatively, a baffle may be provided on the front surface (front 76a of the support member 76) side of the cutting tool storage section 78, which can move between a closed position covering the front surface side of the cutting tool storage section 78 and an open position exposing the front surface side of the cutting tool storage section 78.

[0202] The baffle, for example, has a surface that is at a predetermined distance d from the front surface 76a of the support member 76 when in the closed position, and this surface is capable of reflecting light irradiated from the illumination section 86b of the shooting unit 86.

[0203] Furthermore, in this case, based on the image obtained by the imaging unit 86 when the baffle is in the closed position, it is possible to determine whether other cutting tools 51 are stored in the cutting tool storage section 78, similar to the determination operation described above.

[0204] That is, it is possible to determine whether other cutting tools 51 are stored in the cutting tool storage section 78 without positioning the cutting tool 50 at a distance d from the front surface 76a of the support member 76.

[0205] Furthermore, the illumination unit 86b of the imaging unit 86 can be either oblique illumination or coaxial illumination. In this case, the image obtained by the imaging unit 86 when other cutting tools 51 are stored in the cutting tool storage unit 78 includes a relatively bright annular portion corresponding to the back side of the base 52 of the cutting tool 51.

[0206] On the other hand, the image obtained by the imaging unit 86 when no other cutting tools 51 are stored in the cutting tool storage section 78 does not contain such a brighter ring-shaped portion.

[0207] Therefore, even if the illumination section 86b of the imaging unit 86 is replaced with coaxial illumination, the control unit 66 can determine whether the cutting tool storage section 78 contains the cutting tool 51 by the same method as the determination operation described above.

[0208] In addition, the above-described embodiments and variations can be modified and implemented as appropriate, as long as they do not depart from the scope of the present invention.

Claims

1. A cutting device, comprising: A chuck table holds the workpiece in place; A cutting unit, which is equipped with a cutting tool for cutting the workpiece held by the chuck table, and the cutting tool is rotatable; and The cutting tool changing unit automatically loads and unloads the cutting tool installed in the cutting unit. in, The cutting tool changing unit has: A cutting tool holder having multiple cutting tool storage sections, each section individually storing a cutting tool; and A cutting tool conveying mechanism that conveys the cutting tool between the cutting tool holder and the cutting unit. The cutting tool holder has a storage determination unit, which is used to determine whether other cutting tools are stored in the cutting tool storage section. This determination can only be made when the cutting tool is positioned at a predetermined distance from the cutting tool storage section. The cutting tool conveying mechanism moves the cutting tool into the cutting tool storage section, which is determined by the storage determination unit to be a section that does not store other cutting tools.

2. The cutting device according to claim 1, wherein, The cutting device also includes a control unit that controls the operation of the cutting tool conveying mechanism. This storage determination unit includes: The lighting section illuminates the cutting tool storage section; and The imaging element receives light and converts it into an electrical signal when illuminated by the illumination unit. The control unit includes: The brightness calculation unit calculates the brightness based on the portion of the image captured by the storage determination unit that corresponds to the cutting tool or the other cutting tool. A threshold storage unit stores a threshold used as a reference for differentiation. This reference differentiates the brightness of the portion corresponding to the other cutting tool in an image captured by the storage determination unit when the other cutting tool is stored in the cutting tool storage unit, from the brightness of the portion corresponding to the cutting tool in an image captured by the storage determination unit when the other cutting tool is not stored in the cutting tool storage unit and the cutting tool is positioned at a predetermined distance from the cutting tool storage unit. as well as The determination unit compares the brightness calculated by the brightness calculation unit with the threshold stored in the threshold storage unit to determine whether the other cutting tool is stored in the cutting tool storage unit.

3. The cutting device according to claim 2, wherein, The cutting tool has a recording unit that records one or both of the cutting tool's type and characteristics. The determination unit determines one or both of the type and characteristics of the cutting tool based on the portion of the image captured by the storage determination unit that corresponds to the recording unit.

4. The cutting device according to claim 2, wherein, The lighting section uses oblique lighting.

5. The cutting device according to claim 3, wherein, The lighting section uses oblique lighting.

6. The cutting apparatus according to any one of claims 2 to 5, wherein, The cutting tool storage section is located on the front of the transparent support component. The storage determination unit is located on the back side of the support component. The storage determination unit photographs the cutting tool or other cutting tool through the support component.

Images