Semiconductor apparatus, semiconductor transport system, and semiconductor transport method

Abstract

This disclosure provides a semiconductor device, a semiconductor transport system, and a semiconductor transport method. The semiconductor device is positioned between a crane body and a track. The semiconductor device includes two support devices spaced apart along a preset direction. Each support device includes: a base for connecting to the crane body; and a support assembly vertically mounted on the base. The support devices have a support position where the support assembly is raised to contact the track and a reset position where it is lowered to separate from the track. The support assembly includes a connecting structure and a wheel. The connecting structure is connected to the base, and the wheel is rotatably connected to the connecting structure. When the support device is in the support position, the wheel is in contact with the track. The preset direction forms an angle with the travel direction of the crane body. This disclosure effectively solves the problem in the prior art where the reset of the lateral stabilizing support device increases the labor intensity of workers.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor technology, and more specifically, to a semiconductor device, a semiconductor transport system, and a semiconductor transport method. Background Technology

[0002] In automated material handling systems for semiconductor integrated circuits, the outrigger of an automated overhead crane (OHT) is used to maintain the crane's balance and stability when picking up and placing goods on the left and right sides. The OHT has a supporting position and a reset position.

[0003] However, during long-term use, the OHT lateral stabilizing support device may malfunction and fail to automatically reset. In such cases, a lift or elevated platform must be used to manually remove the cover plate of the OHT lateral stabilizing support device and manually rotate the motor to reset it. However, this reset method increases the workload of workers and wastes manpower. Summary of the Invention

[0004] The main objective of this disclosure is to provide a semiconductor device, a semiconductor transport system, and a semiconductor transport method to solve the problem of increased labor intensity for workers when resetting lateral stabilizing support devices in the prior art.

[0005] To achieve the above objectives, according to one aspect of this disclosure, a semiconductor device is provided, disposed between a crane body and a track. The semiconductor device includes two support devices spaced apart along a preset direction. Each support device includes: a base for connecting to the crane body; and a support assembly vertically mounted on the base. The support devices have a support position where the support assembly is raised to contact the track and a reset position where the support assembly is lowered to separate from the track. The support assembly includes a connecting structure and a wheel. The connecting structure is connected to the base, and the wheel is rotatably connected to the connecting structure. When the support device is in the support position, the wheel is in contact with the track. The preset direction forms an angle with the travel direction of the crane body.

[0006] Furthermore, the support device also includes a reset structure, which is disposed on the base. The reset structure is used to apply a reset force to the connecting structure in the direction of the crane body, so that the support device moves from the support position to the reset position.

[0007] Furthermore, the support device also includes: a drive structure; a cam, the drive structure being connected to the cam drive to drive the cam to rotate; wherein the outer peripheral surface of the cam contacts the connecting structure to drive the connecting structure to perform lifting and lowering movements.

[0008] Furthermore, the connecting structure includes: a connecting rod, with a wheel body disposed on at least one end of the connecting rod; and a rotating body rotatably disposed in the middle of the connecting rod, with the outer peripheral surface of the rotating body contacting the outer peripheral surface of the cam.

[0009] Furthermore, the connecting structure also includes a first connecting shaft, which is located in the middle of the connecting rod; the rotating body is a bearing, the outer ring of the bearing is in contact with the outer peripheral surface of the cam, and the inner ring of the bearing is sleeved on the first connecting shaft and is anti-rotatingly engaged with the first connecting shaft.

[0010] Furthermore, the base includes a support rod, and the connecting rod has a through hole, through which the support rod passes, so that the connecting rod can move up and down along the support rod.

[0011] Furthermore, there may be one support rod; or there may be multiple support rods, which are spaced apart along the travel direction of the crane body.

[0012] Furthermore, the reset structure is a spring, which is sleeved outside the support rod and located above the connecting rod; wherein, the support rod has a limiting protrusion located outside the through hole, and the spring is located between the limiting protrusion and the connecting rod.

[0013] Furthermore, the support device also includes: a first limit sensor for detecting the position of the support component; wherein, when the first limit sensor detects that the support component has descended to the reset position, the drive structure is controlled to stop operating.

[0014] Furthermore, the support device also includes a second limit sensor for detecting the position of the support component; wherein, when the second limit sensor detects that the support component has risen to the support position, the drive structure is controlled to stop operating.

[0015] Furthermore, the semiconductor device also includes a second connecting shaft, through which the drive structure is connected to the cam drive; the support assembly also includes: a first limiting component, disposed on the connecting rod or the second connecting shaft, wherein a first limiting sensor is used to detect the position of the first limiting component; and a second limiting component, disposed on the connecting rod or the second connecting shaft, wherein the second limiting component is disposed opposite to the first limiting component, wherein a second limiting sensor is used to detect the position of the second limiting component.

[0016] Furthermore, the support rod includes: a support rod body; a locking component, one end of which is locked onto the support rod body, and a spring is sleeved on the other end of the locking component.

[0017] Furthermore, the drive structure includes: a drive body; a drive end, which is disposed on the drive body and connected to a cam drive; and a controller, which is electrically connected to the drive body for controlling the rotation of the drive end.

[0018] According to another aspect of this disclosure, a semiconductor transport system is provided, including a crane body, a track, and a semiconductor device, wherein the crane body is slidable along the track, and the semiconductor device is disposed between the track and the crane body; wherein the semiconductor device is the aforementioned semiconductor device.

[0019] Furthermore, the overhead crane body has a loading / unloading state and a driving state. When the semiconductor equipment is operating normally, when the overhead crane body is in the loading / unloading state, the support device of the semiconductor equipment is in the supporting position. When the overhead crane body is in the driving state, the support device of the semiconductor equipment is in the reset position. The semiconductor transportation system also includes: a control system, which is communicatively connected to the controller of the semiconductor equipment; and a terminal device, which is connected to the control system. Wherein, after the overhead crane body switches from the loading / unloading state to the driving state, if the support component of the semiconductor equipment remains in the supporting position, the terminal device sends a signal to the control system to control the overhead crane body to remain in the driving state.

[0020] According to another aspect of this disclosure, a semiconductor transportation method is provided, applicable to the aforementioned semiconductor transportation system, the semiconductor transportation method comprising:

[0021] The system determines whether the support device of the semiconductor equipment in the semiconductor transport system has malfunctioned, and inputs a preset signal to the terminal equipment of the semiconductor transport system based on the operating status of the support device. After the control system of the semiconductor transport system receives the preset signal, it controls the crane body to be in a driving state. The operating status includes normal operation and inability to reset.

[0022] Furthermore, the preset signal includes a shielding signal, where the support device cannot be reset; the method for controlling the crane body to be in a driving state after the control system of the semiconductor transport system receives the preset signal includes: when the preset signal is a shielding signal, the control system controls the crane body to be in a driving state after receiving the shielding signal.

[0023] By applying the technical solution of this disclosure, each support device is spaced apart along a preset direction, and the support component of the support device includes a connecting structure and a wheel. The connecting structure is vertically movable, and the wheel is rotatably connected to the connecting structure to achieve support and reset of the support device. Thus, when the support device is in the supported position and cannot be reset, the rotatable wheel forms a rolling friction pair with the track, allowing the crane body to continue moving along the track. In this case, workers do not need to manually reset the support device, thereby solving the problem of increased labor intensity for workers when resetting lateral stabilizing support devices in existing technologies, and reducing the labor intensity of workers. Attached Figure Description

[0024] The accompanying drawings, which form part of this application, are used to provide a further understanding of this disclosure. The illustrative embodiments of this disclosure and their descriptions are used to explain this disclosure and do not constitute an undue limitation of this disclosure. In the drawings:

[0025] Figure 1 A perspective view of the semiconductor device according to an embodiment of the present disclosure in a supported position is shown;

[0026] Figure 2 It shows Figure 1 A three-dimensional structural diagram of a semiconductor device in the reset position;

[0027] Figure 3 It shows Figure 1 A top view of a semiconductor device;

[0028] Figure 4 A front view is shown when loading and unloading goods on the left side according to an embodiment of the transportation system of this disclosure; and

[0029] Figure 5 It shows Figure 4 The front view of the transportation system in the middle when picking up and placing goods on the right.

[0030] The above figures include the following reference numerals:

[0031] 10. Overhead crane body; 20. Track; 30. Support device; 31. Seat; 311. Support rod; 32. Support assembly; 321. Connecting structure; 3211. Connecting rod; 3212. Rotating body; 3213. First connecting shaft; 322. Wheel; 323. First limiting component; 324. Second limiting component; 33. Reset structure; 34. Drive structure; 35. Cam; 36. First limiting sensor; 37. Second limiting sensor; 40. Cargo; 50. Locking component; 60. Second connecting shaft. Detailed Implementation

[0032] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present disclosure will now be described in detail with reference to the accompanying drawings and embodiments.

[0033] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0034] In this disclosure, unless otherwise stated, directional terms such as "up" and "down" are generally used in relation to the direction shown in the accompanying drawings, or in relation to the vertical, perpendicular, or gravitational direction; similarly, for ease of understanding and description, "left" and "right" are generally used in relation to the left and right shown in the accompanying drawings; "inner" and "outer" refer to the inner and outer contours relative to the outline of each component itself, but the above directional terms are not used to limit this disclosure.

[0035] To address the problem that resetting lateral stabilizing support devices in existing technologies increases the workload of workers, this application provides a semiconductor transportation system and a semiconductor transportation method.

[0036] like Figures 1 to 5 As shown, a semiconductor device is disposed between the crane body 10 and the track 20. The semiconductor device includes two support devices 30 spaced apart along a preset direction. Each support device 30 includes a base 31 and a support assembly 32. The base 31 is used to connect to the crane body 10. The support assembly 32 is movably mounted on the base 31. The support device 30 has a support position where the support assembly 32 rises to contact the track 20 and a reset position where the support assembly 32 descends to separate from the track 20. The support assembly 32 includes a connecting structure 321 and a wheel 322. The connecting structure 321 is connected to the base 31, and the wheel 322 is rotatably connected to the connecting structure 321. When the support device 30 is in the support position, the wheel 322 is in contact with the track 20. The preset direction forms an angle with the travel direction of the crane body 10.

[0037] Applying the technical solution of this embodiment, each support device 30 is spaced apart along a preset direction, and the support component 32 of the support device 30 includes a connecting structure 321 and a wheel 322. The connecting structure 321 is vertically movable, and the wheel 322 is rotatably connected to the connecting structure 321 to achieve support and reset of the support device 30. Thus, when the support device 30 is in the supported position and cannot be reset, because the wheel 322 is rotatably movable and forms a rolling friction pair with the track 20, the crane body 10 can still travel along the track 20. At this time, the operator does not need to manually reset the support device 30, thereby solving the problem in the prior art where resetting lateral stabilizing support devices increases the labor intensity of operators, and reducing the labor intensity of operators.

[0038] In this embodiment, the two support devices 30 are located on the left and right sides of the crane body 10, respectively. Compared with the two support devices 30 being located in the front and rear direction of the crane body 10, even if the support device 30 fails and cannot be automatically reset, it will not affect the normal operation of the crane. Therefore, there is no need for manual reset of the support device 30, which reduces the labor intensity of the staff.

[0039] like Figure 1and Figure 2 As shown, the support device 30 also includes a reset structure 33. The reset structure 33 is mounted on the base 31 and applies a reset force to the connecting structure 321, moving it toward the crane body 10, thereby moving the support device 30 from the supported position to the reset position. This allows for automatic reset of the support device 30, ensuring it can automatically switch between the supported and reset positions, further enhancing the intelligence level of the support device 30.

[0040] Specifically, when retrieving goods from the left side of the overhead crane, the support device 30 furthest from the goods is controlled to be in a supporting position to support the right side of the crane, while the support device 30 closest to the goods is controlled to be in a reset position to ensure smooth crane movement. When retrieving goods from the right side of the overhead crane, the support device 30 furthest from the goods is controlled to be in a supporting position to support the left side of the crane, while the support device 30 closest to the goods is controlled to be in a reset position, thereby improving the support reliability of the support devices 30.

[0041] like Figures 1 to 3 As shown, the support device 30 also includes a drive structure 34 and a cam 35. The drive structure 34 is driven to rotate the cam 35. The outer peripheral surface of the cam 35 contacts the connecting structure 321, causing the connecting structure 321 to move vertically. Thus, the rotation of the cam 35 achieves the vertical movement of the connecting structure 321, which in turn achieves the vertical movement of the wheel 322, allowing the support device 30 to freely switch between a supported position and a reset position, thereby reducing the manufacturing cost of the support device 30.

[0042] Optionally, the drive structure 34 is a motor, with its motor shaft connected to the cam 35 to drive the cam 35 to rotate. Thus, when the cam 35 rotates to its maximum radial distance and contacts the connecting structure 321, the connecting structure 321 and the wheel 322 are at their highest positions, and the support device 30 is in the supported position. When the cam 35 rotates to its minimum radial distance and contacts the connecting structure 321, the connecting structure 321 and the wheel 322 are at their lowest positions, and the support device 30 is in the reset position. In this way, by driving the cam 35 to rotate through the drive structure 34, the support device 30 can be switched between the supported and reset positions, making it easier and simpler for operators to control the support device 30 and reducing the difficulty of control.

[0043] like Figures 1 to 3As shown, the connecting structure 321 includes a connecting rod 3211 and a rotating body 3212. A wheel 322 is disposed at at least one end of the connecting rod 3211. The rotating body 3212 is rotatably disposed in the middle of the connecting rod 3211, and its outer peripheral surface contacts the outer peripheral surface of the cam 35. This arrangement makes the kinematic pair between the connecting structure 321 and the cam 35 a rolling friction pair, thereby reducing structural wear on the support device 30 and the track 20, and extending the service life of the overhead crane and semiconductor equipment.

[0044] Specifically, there are two wheels 322, which are respectively disposed at both ends of the connecting rod 3211, and the rotating body 3212 is located between the two wheels 322. The outer peripheral surface of the rotating body 3212 is an annular surface, which contacts the outer peripheral surface of the cam 35, so that the kinematic pair between the connecting structure 321 and the cam 35 is a rolling friction pair, thereby reducing the structural wear of the semiconductor device and the track 20.

[0045] In this embodiment, the distance between the pivot axis of the rotating body 3212 and the rotation axis of each wheel 322 is the same, so that the supporting force of the two wheels 322 on the track 20 is consistent, thereby improving the support stability of the support device 30 on the track 20.

[0046] It should be noted that the number of wheel bodies 322 is not limited to this and can be adjusted according to working conditions and usage requirements. Optionally, there may be one, three, four, or more wheel bodies 322.

[0047] like Figure 1 and Figure 2 As shown, the connecting structure 321 also includes a first connecting shaft 3213, which is located in the middle of the connecting rod 3211. The rotating body 3212 is a bearing, with its outer ring contacting the outer circumferential surface of the cam 35, and its inner ring fitted onto the first connecting shaft 3213 and engaging with it to prevent rotation. This arrangement reduces the manufacturing cost of the rotating body 3212, thereby reducing the overall manufacturing cost of the semiconductor device.

[0048] Specifically, the inner ring of the bearing is anti-rotationally fitted with the first connecting shaft 3213, thereby preventing relative rotation between the inner ring of the bearing and the first connecting shaft 3213 from causing the kinematic pair between the outer ring of the bearing and the cam 35 to change from a rolling friction pair to a sliding friction pair, further reducing the structural wear of the semiconductor device and the track 20. At the same time, the central axis of the bearing is parallel to the central axis of the cam 35 and is located above the central axis of the cam 35.

[0049] In this embodiment, the inner ring of the bearing is fixedly connected to the first connecting shaft 3213, which on the one hand realizes the anti-rotation fit between the inner ring and the first connecting shaft 3213; on the other hand, it prevents the bearing from falling off the first connecting shaft 3213 and affecting the support reliability of the support device 30.

[0050] like Figure 1 and Figure 2 As shown, the seat 31 includes a support rod 311 and a connecting rod 3211 with a through hole. The support rod 311 passes through the through hole, allowing the connecting rod 3211 to move up and down along the support rod 311. This configuration improves the reliability of the lifting and lowering of the connecting structure 321, ensuring that the wheel 322 can switch between a supported position and a reset position, and also reduces the manufacturing cost of the seat 31.

[0051] Specifically, the support rod 311 is an L-shaped rod, which includes a first rod body and a second rod body connected to each other. The first rod body and the second rod body are arranged perpendicularly to each other. The first rod body is connected to the crane body 10, and the second rod body passes through the through hole. The extension direction of the second rod body is consistent with the height direction to ensure that the connecting structure 321 and the wheel 322 can move up and down along the second rod body.

[0052] Optionally, there may be one support rod 311; or there may be multiple support rods 311, which are spaced apart along the travel direction of the crane body 10. This arrangement allows for greater flexibility in selecting the number of support rods 311 to meet different usage requirements and working conditions, and also improves the processing flexibility for workers.

[0053] In this embodiment, there are two support rods 311, located on either side of the cam 35. This arrangement not only improves the reliability of the support rods 311 but also enhances the overall structural stability of the support device 30.

[0054] It should be noted that the number of support rods 311 is not limited to this and can be adjusted according to working conditions and usage requirements. Optionally, there may be three, four, or more support rods 311.

[0055] like Figure 1 and Figure 2 As shown, the reset structure 33 is a spring, which is sleeved outside the support rod 311 and located above the connecting rod 3211. The support rod 311 has a limiting protrusion located outside the through hole, and the spring is located between the limiting protrusion and the connecting rod 3211. This design reduces the manufacturing cost of the reset structure 33, thereby reducing the overall manufacturing cost of the semiconductor device. Furthermore, the limiting protrusion limits and stops the spring, preventing it from detaching from the support rod 311 and affecting reset reliability.

[0056] In this embodiment, a spring is sleeved on a second rod, and the end of the second rod has a limiting protrusion to limit and stop the first end of the spring. The second end of the spring abuts against a connecting rod 3211 to apply an elastic restoring force to the connecting rod 3211.

[0057] In this embodiment, there are two springs, and the two springs are arranged in a one-to-one correspondence with the two support rods 311.

[0058] It should be noted that the number of springs is not limited to this and can be adjusted according to working conditions and usage requirements. Optionally, the number of springs can be the same as the number of support rods 311.

[0059] like Figure 3 As shown, the support device 30 also includes a first limit sensor 36. The first limit sensor 36 is used to detect the position of the support assembly 32. Specifically, when the first limit sensor 36 detects that the support assembly 32 has descended to the reset position, it controls the drive structure 34 to stop operating. Thus, during the operation of the support device 30, the position of the support assembly 32 is detected by the first limit sensor 36, and when the support assembly 32 is detected to have descended to the reset position, the control system controls the drive structure 34 to stop operating, so that the support device 30 is in the reset position.

[0060] Specifically, the first limit sensor 36 is used to detect whether the connecting structure 321 has moved to the low position. When the connecting structure 321 is detected to have descended to the low position, the control system controls the drive structure 34 to stop running, thereby causing the support device 30 to stay at the reset position, thus realizing the reset of the support device 30.

[0061] like Figure 3 As shown, the support device 30 also includes a second limit sensor 37. The second limit sensor 37 is used to detect the position of the support assembly 32. Specifically, when the second limit sensor 37 detects that the support assembly 32 has risen to the support position, it controls the drive structure 34 to stop operating. Thus, during the operation of the support device 30, the second limit sensor 37 detects the position of the support assembly 32, and when it detects that the support assembly 32 has risen to the support position, the control system controls the drive structure 34 to stop operating, so that the support device 30 is in the support position.

[0062] Specifically, the second limit sensor 37 is used to detect whether the connecting structure 321 has moved to the high position. When the connecting structure 321 is detected to have risen to the high position, the control system controls the drive structure 34 to stop running, thereby causing the support device 30 to stay at the support position, thus realizing the support function of the support device 30 on the track 20.

[0063] In this embodiment, the drive structure 34 drives the cam 35 to rotate. When the connecting structure 321 descends to its lowest point, the first limit sensor 36 is triggered and transmits a signal to the controller, causing the drive structure 34 to stop rotating. At this time, the wheel 322 descends under spring pressure and disengages from the track 20. Conversely, the second limit sensor 37 detects a signal and feeds it back to the controller, causing the drive structure 34 to stop rotating. At this time, the wheel 322 is lifted up, thus providing stable support.

[0064] Optionally, the semiconductor device further includes a second connecting shaft 60, through which the drive structure 34 is drivenly connected to the cam 35. The support assembly 32 also includes a first limiting component 323 and a second limiting component 324. The first limiting component 323 is disposed on the connecting rod 3211 or the second connecting shaft 60, and a first limiting sensor 36 is used to detect the position of the first limiting component 323. The second limiting component 324 is disposed on the connecting rod 3211 or the second connecting shaft 60, and is positioned opposite to the first limiting component 323. A second limiting sensor 37 is used to detect the position of the second limiting component 324. Thus, during the operation of the support device 30, the position of the limiting component is detected by the limiting sensor. When the limiting component is detected to be in a low or high position, the drive structure is controlled to stop operating, thereby making the position detection of the limiting sensor more accurate and ensuring that the support device 30 can be in the reset position and the support position. At the same time, the above arrangement makes the setting position of the limiting component more flexible to meet different usage requirements and working conditions, and also improves the processing flexibility of the operator.

[0065] In this embodiment, the first limiting component 323 and the second limiting component 324 are both disposed on the second connecting shaft 60, and the first limiting component 323 and the second limiting component 324 are disposed opposite to each other to ensure that they can detect the high position and the low position respectively.

[0066] Specifically, during the rotation of the second connecting shaft 60 driven by the drive structure 34, both the first limiting component 323 and the second limiting component 324 rotate synchronously with the second connecting shaft 60. When the first limiting sensor 36 is positioned opposite to the first limiting component 323 and detects the first limiting component 323, it is determined that the support assembly 32 has descended to the reset position. The control system then controls the drive structure 34 to stop running, so that the support device 30 is in the reset position. When the second limiting sensor 37 is positioned opposite to the second limiting component 324 and detects the second limiting component 324, it is determined that the support assembly 32 has risen to the support position. The control system then controls the drive structure 34 to stop running, so that the support device 30 is in the support position, thereby making the position detection more accurate.

[0067] In other embodiments not shown in the accompanying drawings, the first limiting component is disposed on the connecting rod, and the second limiting component is disposed on the second connecting shaft, so that the placement of the first limiting component and the second limiting component is more flexible to meet different usage requirements and working conditions.

[0068] In other embodiments not shown in the accompanying drawings, the first limiting component is disposed on the connecting rod, and the second limiting component is disposed on the connecting rod, so that the placement of the first limiting component and the second limiting component is more flexible to meet different usage requirements and working conditions.

[0069] In other embodiments not shown in the accompanying drawings, the first limiting component is disposed on the second connecting shaft, and the second limiting component is disposed on the connecting rod, so that the placement of the first limiting component and the second limiting component is more flexible to meet different usage requirements and working conditions.

[0070] like Figures 1 to 3 As shown, the support rod 311 includes a support rod body and a locking component 50. One end of the locking component 50 is locked to the support rod body, and a spring is sleeved on the other end of the locking component 50. Optionally, the locking component 50 is a locking screw. In this way, the locking screw limits the spring to the support rod body, thereby preventing the spring from detaching from the support rod 311 and affecting its reliable reset of the support assembly 32.

[0071] In this embodiment, the drive structure 34 includes a drive body, a drive end, and a controller. The drive end is mounted on the drive body and is driven by the cam 35. The controller is electrically connected to the drive body to control the rotation of the drive end. Optionally, the controller is a control board. Thus, during the operation of the semiconductor equipment, operators can control the rotation or stop of the drive end via the controller, achieving intelligent control of the semiconductor equipment and improving the user experience. Simultaneously, operators can also control the controller via signal transmission through a terminal device, thereby controlling the operating state of the drive structure 34.

[0072] like Figure 4 and Figure 5 As shown, this application also provides a semiconductor transportation system, including a crane body 10, a track 20, and semiconductor equipment. The crane body 10 can slide along the track 20, and the semiconductor equipment is disposed between the track 20 and the crane body 10. The semiconductor equipment is the aforementioned semiconductor equipment.

[0073] Optionally, the semiconductor transport system is an Automated Material Handling System (AMHS). When the overhead crane is picking up or placing goods on either side, the support device 30 for the semiconductor equipment is used to maintain the balance and stability of the overhead crane.

[0074] In this embodiment, the overhead crane body 10 has a loading / unloading state and a driving state. When the semiconductor equipment is operating normally, when the overhead crane body 10 is in the loading / unloading state, the support device 30 of the semiconductor equipment is in a supported position; when the overhead crane body 10 is in the driving state, the support device 30 of the semiconductor equipment is in a reset position. The semiconductor transport system also includes a control system and a terminal device. The control system is communicatively connected to the controller of the semiconductor equipment. The terminal device is connected to the control system. Specifically, after the overhead crane body 10 switches from the loading / unloading state to the driving state, if the support component 32 of the semiconductor equipment remains in the supported position, the terminal device sends a signal to the control system to control the overhead crane body 10 to remain in the driving state. Thus, during the operation of the semiconductor transport system, personnel control the control system through the terminal device to ensure that the overhead crane can continue to drive even if the support device 30 fails to reset.

[0075] This application also provides a semiconductor transportation method applicable to the aforementioned semiconductor transportation system, the semiconductor transportation method comprising:

[0076] The system determines whether the support device for the semiconductor equipment in the semiconductor transport system has malfunctioned. Based on the operating status of the support device, a preset signal is input to the terminal equipment of the semiconductor transport system. After receiving the preset signal, the control system of the semiconductor transport system controls the overhead crane body 10 to enter a driving state. The operating status includes normal operation and inability to reset.

[0077] Specifically, the control drive structure 34 drives the cam 35 to rotate via the second connecting shaft 60. When the second limiting component 324 rotates to the point where it senses the second limiting sensor 37, the cam 35 rotates to its highest point, the wheel 322 supports the track 20, and the support device 30 is in the supporting position. The second limiting sensor 37 sends a detected signal to the controller, which controls the drive end of the drive structure 34 to stop rotating and sends a signal back to the crane's control system. The crane can then perform left and right FOUP (wafer transfer box) transport. After the crane completes the left and right FOUP transport, the crane's control system sends a signal to the controller of the support device 30. The drive structure 34 drives the cam 35 to rotate clockwise. When the first limiting component 323 rotates to the point where it senses the first limiting sensor 36, the cam 35 rotates to its lowest point, the wheel 322 disengages from the track 20 due to spring pressure, and the first limiting sensor 36 sends a detected signal back to the controller. The controller controls the drive end of the drive structure 34 to stop rotating and sends a signal back to the crane's control system. The crane then continues its journey.

[0078] In this embodiment, the preset signal includes a shielding signal, which indicates that the support device cannot be reset; the method for controlling the crane body 10 to be in a driving state after the control system of the semiconductor transportation system receives the preset signal includes:

[0079] When the preset signal is a shielding signal, the control system receives the shielding signal and controls the crane body 10 to be in a driving state.

[0080] Specifically, when the support device 30 reports an error (the support device 30 cannot be reset), a shielding code is input to the terminal device. After the control system of the crane receives the shielding code, it ignores the error signal fed back from the controller (control board) of the support device 30. At this time, the crane automatically goes offline for inspection, eliminating the need for staff to climb up for inspection, saving manpower and improving the efficiency of handling.

[0081] As can be seen from the above description, the embodiments of this disclosure achieve the following technical effects:

[0082] Each support device is spaced apart along a preset direction, and the support component of each device includes a connecting structure and wheels. The connecting structure is vertically movable, and the wheels are rotatably connected to the connecting structure to achieve support and reset of the support device. Thus, when the support device is in the supported position and cannot be reset, the rotatable wheels form a rolling friction pair with the track, allowing the overhead crane to continue moving along the track. In this situation, manual reset of the support device is unnecessary, thus solving the problem of increased labor intensity for workers when resetting lateral stabilizing support devices in existing technologies, and reducing the labor intensity of workers.

[0083] Obviously, the embodiments described above are merely some, not all, of the embodiments disclosed herein. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without inventive effort should fall within the scope of protection of this disclosure.

[0084] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0085] It should be noted that the terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in sequences other than those illustrated or described herein.

[0086] The above description is merely a preferred embodiment of this disclosure and is not intended to limit this disclosure. Various modifications and variations can be made to this disclosure by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this disclosure should be included within the scope of protection of this disclosure.

Claims

1. A semiconductor device disposed between a crane body (10) and a track (20), characterized in that, The semiconductor device includes two support devices (30) spaced apart along a predetermined direction, each of the support devices (30) comprising: A seat (31) is used to connect to the crane body (10); The support assembly (32) is vertically and vertically mounted on the seat (31), and the support device (30) has a support position in which the support assembly (32) rises to contact the track (20) and a reset position in which the support assembly (32) falls to separate from the track (20); The support component (32) includes a connecting structure (321) and a wheel (322). The connecting structure (321) is connected to the seat (31), and the wheel (322) is rotatably connected to the connecting structure (321). When the support device (30) is in the support position, the wheel (322) is in contact with the track (20). The preset direction is set at an angle to the travel direction of the crane body (10). The support device (30) further includes: A reset structure (33) is provided on the seat (31). The reset structure (33) is used to apply a reset force to the connecting structure (321) to move toward the crane body (10) so that the support device (30) moves from the support position to the reset position. Drive structure (34); Cam (35), the drive structure (34) is driven to connect with the cam (35) to drive the cam (35) to rotate; wherein, the outer peripheral surface of the cam (35) is in contact with the connecting structure (321) to drive the connecting structure (321) to perform lifting and lowering movements; The connection structure (321) includes: A connecting rod (3211), wherein the wheel (322) is disposed on at least one end of the connecting rod (3211); A rotating body (3212) is rotatably disposed in the middle of the connecting rod (3211), and the outer peripheral surface of the rotating body (3212) is in contact with the outer peripheral surface of the cam (35).

2. The semiconductor device according to claim 1, characterized in that, The connecting structure (321) further includes a first connecting shaft (3213), which is located in the middle of the connecting rod (3211); the rotating body (3212) is a bearing, the outer ring of the bearing is in contact with the outer circumferential surface of the cam (35), and the inner ring of the bearing is sleeved on the first connecting shaft (3213) and is anti-rotationally engaged with the first connecting shaft (3213).

3. The semiconductor device according to claim 1, characterized in that, The seat (31) includes a support rod (311), and the connecting rod (3211) has a through hole. The support rod (311) passes through the through hole so that the connecting rod (3211) can move up and down along the support rod (311).

4. The semiconductor device according to claim 3, characterized in that, The support rod (311) is one; or, the support rod (311) is multiple, and the multiple support rods (311) are spaced apart along the travel direction of the crane body (10).

5. The semiconductor device according to claim 3, characterized in that, The reset structure (33) is a spring, which is sleeved outside the support rod (311) and located above the connecting rod (3211); wherein the support rod (311) has a limiting protrusion located outside the through hole, and the spring is located between the limiting protrusion and the connecting rod (3211).

6. The semiconductor device according to claim 1, characterized in that, The support device (30) further includes: A first limit sensor (36) is used to detect the position of the support component (32); wherein, when the first limit sensor (36) detects that the support component (32) has descended to the reset position, the drive structure (34) is controlled to stop operating.

7. The semiconductor device according to claim 6, characterized in that, The support device (30) further includes: The second limit sensor (37) is used to detect the position of the support component (32); wherein, when the second limit sensor (37) detects that the support component (32) has risen to the support position, the drive structure (34) is controlled to stop operating.

8. The semiconductor device according to claim 7, characterized in that, The semiconductor device further includes a second connecting shaft (60), and the driving structure (34) is driven to the cam (35) via the second connecting shaft (60); The support component (32) also includes: The first limiting component (323) is disposed on the connecting rod (3211) or the second connecting shaft (60), and the first limiting sensor (36) is used to detect the position of the first limiting component (323); The second limiting component (324) is disposed on the connecting rod (3211) or the second connecting shaft (60). The second limiting component (324) is disposed opposite to the first limiting component (323). The second limiting sensor (37) is used to detect the position of the second limiting component (324).

9. The semiconductor device according to claim 5, characterized in that, The support rod (311) includes: Support rod body; A locking component (50) is provided, one end of which is locked onto the support rod body, and the spring is sleeved on the other end of the locking component (50).

10. The semiconductor device according to claim 1, characterized in that, The driving structure (34) includes: Drive body; The driving end is disposed on the driving body and is drivenly connected to the cam (35); A controller, electrically connected to the drive body, is used to control the rotation of the drive end.

11. A semiconductor transport system, characterized in that, The device includes a crane body (10), a track (20), and a semiconductor device. The crane body (10) can slide along the track (20), and the semiconductor device is disposed between the track (20) and the crane body (10). The semiconductor device is the semiconductor device according to any one of claims 1 to 10.

12. The semiconductor transport system according to claim 11, characterized in that, The overhead crane body (10) has a loading / unloading state and a driving state. When the semiconductor equipment is operating normally, when the overhead crane body (10) is in the loading / unloading state, the support device (30) of the semiconductor equipment is in the supporting position. When the overhead crane body (10) is in the driving state, the support device (30) of the semiconductor equipment is in the reset position. The semiconductor transportation system also includes: The control system is communicatively connected to the controller of the semiconductor device. The terminal device is connected to the control system; wherein, after the crane body (10) switches from the loading and unloading state to the driving state, if the support component (32) of the semiconductor device remains in the support position, the terminal device sends a signal to the control system to control the crane body (10) to remain in the driving state through the control system.

13. A semiconductor transportation method, characterized in that, The semiconductor transport system applicable to claim 11 or 12, the semiconductor transport method comprising: Determine whether the support device of the semiconductor equipment in the semiconductor transportation system has malfunctioned, input a preset signal to the terminal device of the semiconductor transportation system according to the operating status of the support device, and control the crane body (10) to be in a driving state after the control system of the semiconductor transportation system receives the preset signal; wherein, the operating status includes normal operation and inability to reset.

14. The semiconductor transport method according to claim 13, characterized in that, The preset signal includes a shielding signal, which indicates that the support device cannot be reset. The method for controlling the crane body (10) to be in a driving state after the control system of the semiconductor transportation system receives the preset signal includes: When the preset signal is the shielding signal, the control system receives the shielding signal and controls the crane body (10) to be in the driving state.

Images