Method and components for monitoring device fatigue in semiconductor wafer transfer robot arm

Abstract

The present invention relates to a method and assembly for monitoring the lifespan of components within a semiconductor wafer transfer robot arm. The method comprises a transmission belt with internal teeth, an automatic tensioning pulley disposed on the outer side of the transmission belt, the automatic tensioning pulley being arranged in contact with the transmission belt, a distance sensor being coaxially disposed with the automatic tensioning pulley, and the distance sensor being electrically connected to a terminal device; a movable slide rail disposed within the inner ring of the transmission belt, a touch rod disposed on the movable slide rail via a slider, the touch rod being coaxially disposed with the automatic tensioning pulley, the touch rod being connected to a sensor, and the sensor being connected to a terminal device. After the automatic tensioning pulley is displaced, the touch rod moves a distance equal to the distance moved by the automatic tensioning pulley. The present invention can improve work efficiency.

Description

Technical Field

[0001] The present invention belongs to the field of wafer transfer arms, and in particular relates to a method and assembly for monitoring device fatigue in a semiconductor wafer transfer robot arm. Background Art

[0002] Wafer processing is a crucial step in semiconductor manufacturing, and the process primarily involves repeated steps such as cleaning, oxidation, deposition, lithography, etching, and ion implantation to fabricate the circuits on the wafer. During this process, multiple process chambers are sometimes required to complete the wafer process (e.g., AMAT RTO_DPN equipment). This requires a wafer transfer device to transfer or cache the wafers. Existing wafer transfer devices typically utilize an arm structure for transfer, and the internal structure of the arm structure is composed of various mechanical components connected together. If a problem occurs with one of these components (e.g., a motor or belt, which is damaged by aging), the problem typically manifests itself in the arm, which becomes inoperable or fails to achieve the required accuracy. This problem is then reflected in the corresponding back-end control device, requiring shutdown for maintenance, increasing costs and time. Summary of the Invention

[0003] In order to solve the above technical problems, the purpose of the present invention is to provide a monitoring method for device fatigue in a semiconductor wafer transfer robot arm.

[0004] To achieve the above object, the present invention adopts the following technical solutions:

[0005] A method for monitoring the life of components in a semiconductor wafer transfer robot arm.

[0006] The following steps are involved:

[0007] Step 1: An automatic tensioning wheel is arranged on the outside of the transmission belt, and a distance sensor is arranged on one side of the automatic tensioning wheel, and the distance sensor is used to detect the distance L between the automatic tensioning wheel and the distance sensor;

[0008] When the transmission belt becomes loose, the automatic tensioner changes its original position to tighten the loose transmission belt, increasing the distance L between the automatic tensioner and the distance detector.

[0009] Step 2: Preset the tension distance L max , when the tension distance L max When the distance is greater than or equal to L, the transmission belt is judged to have reached the end of its life;

[0010] When the tension distance L max When it is less than the distance L, it is determined that the transmission belt has not reached the end of its life;

[0011] Step 3: A movable touch rod is provided on the inner side of the transmission belt. One end of the touch rod contacts the top of the inner teeth of the transmission belt. After the touch rod is touched, the sensor transmits the signal to the terminal device.

[0012] The number of preset limits not touched N min , when the number of untouched touch rods N is less than the limit touch N min When the inner teeth of the transmission belt reach the end of their lifespan;

[0013] When the number of untouched touch rods N is greater than or equal to the limit touch N min When the inner teeth of the transmission belt are worn out, it is determined that the life of the inner teeth of the transmission belt has reached the end.

[0014] Preferably, in the method for monitoring the life of components in a semiconductor wafer transfer robot arm, when one of the distance L of the automatic tensioning wheel and the number N of untouched components meets a satisfied condition, it is determined that the transmission belt has reached the end of its life.

[0015] Preferably, in the method for monitoring the life of components in a semiconductor wafer transfer robot arm, if, in step 3, the distance L moved by the automatic tensioning wheel does not reach the tensioning distance L max When the tensioner is turned on, the touch rod needs to move the same distance as the automatic tensioner.

[0016] Preferably, in the method for monitoring the life of components in a semiconductor wafer transfer robot arm, the maximum allowable transmission length is in the range of 1.02 to 10.3 times its own length.

[0017] Preferably, in the method for monitoring the life of components in a semiconductor wafer transfer robot arm, the number of untouched internal teeth of the transmission belt is greater than or equal to 10% to 15% of the number of its own internal teeth.

[0018] Preferably, in the method for monitoring the life of components in a semiconductor wafer transfer robot arm, the automatic tensioning wheel and the touch rod are arranged on the same axis.

[0019] A monitoring component for the life of devices in a semiconductor wafer transfer robot arm comprises a transmission belt with internal teeth, an automatic tensioning pulley is provided on the outer side of the transmission belt, the automatic tensioning pulley is arranged in contact with the transmission belt, a distance sensor is provided on the same axis as the automatic tensioning pulley, and the distance sensor is electrically connected to a terminal device; a movable slide rail is provided in the inner ring of the transmission belt, a touch rod is provided on the movable slide rail via a slider, the touch rod and the automatic tensioning pulley are arranged on the same axis, the touch rod is connected to a sensor, and the sensor is connected to the terminal device, and after the automatic tensioning pulley is displaced, the distance moved by the touch rod is equal to the distance moved by the automatic tensioning pulley.

[0020] Preferably, in the monitoring component for the life of components in a semiconductor wafer transfer robot arm, the sliders on the movable slide rails are connected via a drive motor.

[0021] Preferably, in the monitoring component for the life of components in a semiconductor wafer transfer robot arm, the touch rod is a flexible board with a sensor.

[0022] By means of the above solution, the present invention has at least the following advantages:

[0023] The present invention determines whether the transmission has reached the end of its service life by measuring the tightness of the transmission belt and the wear of the inner teeth, thereby ensuring that the transmission robot arm always maintains a good working condition, ensuring work efficiency, and achieving the purpose of reducing costs.

[0024] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0026] Figure 1 It is a structural schematic diagram of the present invention. DETAILED DESCRIPTION

[0027] To make the objectives, technical solutions, and advantages of the embodiments of the present application more clear, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Generally, the components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0028] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for protection, but merely represents selected embodiments of the present application. All other embodiments obtained by persons of ordinary skill in the art based on the embodiments in the present application without creative work are within the scope of protection of the present application.

[0029] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0030] In the description of this application, it should be noted that the terms "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the product of this application is typically placed when in use. These terms are intended solely to facilitate the description of this application and simplify the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," etc., etc., are used solely to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0031] In addition, the terms "horizontal" and "vertical" do not mean that the components must be absolutely horizontal or vertical, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0032] It should also be noted that, in the description of this application, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0033] Example

[0034] like Figure 1 As shown, a monitoring component for the life of devices in a semiconductor wafer conveying robot arm includes a transmission belt 1 with internal teeth, an automatic tensioning pulley 2 is provided on the outer side of the transmission belt 1, and is arranged in contact with the transmission belt 1, and a distance sensor 3 is provided on the coaxial axis of the automatic tensioning pulley 2, and the distance sensor 3 is electrically connected to a terminal device; a movable slide rail is provided in the inner ring of the transmission belt 1, and a touch rod 4 is provided on the movable slide rail through a slider, and the touch rod 4 is arranged on the same axis as the automatic tensioning pulley, the touch rod is connected to the sensor, and the sensor is connected to the terminal device. After the automatic tensioning pulley is displaced, the distance moved by the touch rod is equal to the distance moved by the automatic tensioning pulley.

[0035] The sliders on the movable slide rails of the present invention are connected via a driving motor.

[0036] The touch bar in the present invention is a flexible board with a sensor.

[0037] A method for monitoring the life of components in a semiconductor wafer transfer robot arm.

[0038] The following steps are involved:

[0039] Step 1: An automatic tensioning wheel is arranged on the outside of the transmission belt, and a distance sensor is arranged on one side of the automatic tensioning wheel, and the distance sensor is used to detect the distance L between the automatic tensioning wheel and the distance sensor;

[0040] When the transmission belt becomes loose, the automatic tensioner changes its original position to tighten the loose transmission belt, increasing the distance L between the automatic tensioner and the distance detector.

[0041] Step 2: Preset the tension distance L max , when the tension distance L max When the distance is greater than or equal to L, the transmission belt is judged to have reached the end of its life;

[0042] When the tension distance L max When it is less than the distance L, it is determined that the transmission belt has not reached the end of its life;

[0043] Step 3: A movable touch rod is provided on the inner side of the transmission belt. One end of the touch rod contacts the top of the inner teeth of the transmission belt. After the touch rod is touched, the sensor transmits the signal to the terminal device.

[0044] The number of preset limits not touched N min , when the number of untouched touch rods N is less than the limit touch N min When the inner teeth of the transmission belt reach the end of their lifespan;

[0045] When the number of untouched touch rods N is greater than or equal to the limit touch N min When the inner teeth of the transmission belt are worn out, it is determined that the life of the inner teeth of the transmission belt has reached the end.

[0046] When one of the distance L of the automatic tensioner and the number N of untouched parts in the present invention meets the requirements, the transmission belt is judged to have reached the end of its life. By judging the status of the transmission belt at different positions, the different states of the transmission belt can be judged, thereby enabling more accurate monitoring of the transmission belt life and achieving the purpose of improving work efficiency.

[0047] In the present invention, if in step 3, the distance L of the automatic tensioning wheel movement does not reach the tensioning distance L max When the automatic tensioner is in operation, the touch rod needs to move the same distance as the automatic tensioner to ensure that the inner teeth of the transmission belt and the touch rod are kept in the preset position, so that the wear of the inner teeth can be judged more accurately.

[0048] The maximum allowable length of the transmission in the present invention is 1.02 to 10.3 times its own length, or the number of untouched internal teeth of the transmission belt is greater than or equal to 10% to 15% of the number of its own internal teeth. No matter which of the above conditions is activated, the transmission belt will reach the end of its service life.

[0049] The automatic tensioning wheel and the touch rod are arranged on the same axis.

[0050] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A method for monitoring the life of components in a semiconductor wafer transfer robot arm, characterized in that: The monitoring component includes a transmission belt with internal teeth, an automatic tensioning wheel is provided on the outer side of the transmission belt, which is arranged in contact with the transmission belt, a distance sensor is provided on the coaxial axis of the automatic tensioning wheel, and the distance sensor is electrically connected to the terminal device; a movable slide is provided in the inner ring of the transmission belt, and a touch rod is provided on the movable slide via a slider, the touch rod and the automatic tensioning wheel are arranged on the same axis, the touch rod is connected to the sensor, and the sensor is connected to the terminal device. After the automatic tensioning wheel is displaced, the distance moved by the touch rod is equal to the distance moved by the automatic tensioning wheel, and the touch rod is a flexible board with a sensor; The monitoring method includes the following steps: Step 1: An automatic tensioning wheel is arranged on the outside of the transmission belt, and a distance sensor is arranged on one side of the automatic tensioning wheel, and the distance sensor is used to detect the distance L between the automatic tensioning wheel and the distance sensor; When the transmission belt becomes loose, the automatic tensioner changes its original position to tighten the loose transmission belt, increasing the distance L between the automatic tensioner and the distance detector. Step 2: Preset the tension distance L max , when the tension distance L max When the distance is greater than or equal to L, the transmission belt is judged to have reached the end of its life; When the tension distance L max When it is less than the distance L, it is determined that the transmission belt has not reached the end of its life; Step 3: A movable touch rod is provided on the inner side of the transmission belt. One end of the touch rod contacts the top of the inner teeth of the transmission belt. The touch rod transmits a signal to the terminal device through the sensor after the touch. The preset limit untouched number Nmin, when the number N of untouched times of the touch rod is less than the limit untouched number Nmin, it is determined that the inner teeth of the transmission belt have not reached the end of their life; When the number N of untouched teeth on the touch rod is greater than or equal to the limit number Nmin, it is determined that the inner teeth of the transmission belt have reached the end of their life; When either the distance L of the automatic tensioner or the number N of untouched belts meets the requirements, the transmission belt is deemed to have reached the end of its life.

2. The method for monitoring the life of components in a semiconductor wafer transfer robot arm according to claim 1, wherein: The number of untouched internal teeth of the transmission belt is greater than or equal to 10% to 15% of the number of its own internal teeth.

3. The method for monitoring the life of components in a semiconductor wafer transfer robot arm according to claim 1, wherein: The sliding blocks on the movable slide rail are connected via a driving motor.

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