Substrate processing system

Abstract

The application provides a substrate processing system, which comprises a loading unit, a transition unit, a process unit, at least one first conveying unit, at least one first position detecting unit, at least one second conveying unit and at least one second position detecting unit. In the substrate processing system, the first position detecting unit and the second position detecting unit are included, so that partial or whole synchronous movement of mechanical arms in the same first conveying unit is ensured, and partial or whole synchronous movement of mechanical arms in the same second conveying unit is ensured, so that multiple substrates can be simultaneously carried between the loading unit and the transition unit, and between the transition unit and the process unit, and the processing efficiency of the substrates is improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and more particularly to a substrate processing system. Background Technology

[0002] Existing substrate processing systems handle only one substrate at a time, resulting in very low substrate handling efficiency. This leads to a significant amount of idle time in the transition and process units of the substrate processing system, greatly reducing the substrate processing efficiency.

[0003] Therefore, it is necessary to provide a novel substrate processing system to solve the aforementioned problems existing in the prior art. Summary of the Invention

[0004] The purpose of this invention is to provide a substrate processing system that enables the simultaneous handling of multiple substrates between different units, thereby improving the substrate processing efficiency.

[0005] To achieve the above objectives, the substrate processing system of the present invention includes:

[0006] Loading unit, used for loading substrate;

[0007] Transition unit, used for temporarily storing substrates and / or performing pre-processing on substrates;

[0008] Process unit, used for processing the substrate;

[0009] At least one first transfer unit is disposed between the loading unit and the transition unit, and the first transfer unit includes at least two robotic arms for picking up and placing substrates between the loading unit and the transition unit;

[0010] At least one first position detection unit is fixed on the first transmission unit and is used to detect the position of the robotic arm in the first transmission unit so that the robotic arms in the same first transmission unit move partially or completely synchronously.

[0011] At least one second transfer unit is disposed between the transition unit and the process unit, and the second transfer unit includes at least two robotic arms for picking up and placing substrates between the transition unit and the process unit; and,

[0012] At least one second position detection unit is fixed to the second transmission unit and is used to detect the position of the robotic arm in the second transmission unit so that the robotic arms in the same first transmission unit move partially or completely synchronously.

[0013] The beneficial effects of the present invention are as follows: it includes a first position detection unit and a second position detection unit, thereby ensuring that the robotic arms in the same first transfer unit move partially or completely synchronously, and also ensuring that the robotic arms in the same second transfer unit move partially or completely synchronously, thereby ensuring that multiple substrates are simultaneously transported between the loading unit and the transition unit, and between the transition unit and the process unit, thus improving the substrate processing efficiency.

[0014] Preferably, the number of the first position detection units is the same as the number of robotic arms in the first conveying unit, and the first position detection units are configured in a one-to-one correspondence with the robotic arms in the first conveying unit. The advantage of this is that the one-to-one correspondence between the first position detection units and the robotic arms in the first conveying unit improves the accuracy of the detection by the first position detection units.

[0015] Preferably, the number of the second position detection units is the same as the number of robotic arms in the second conveying unit, and the second position detection units are arranged in a one-to-one correspondence with the robotic arms in the second conveying unit. The advantage of this is that the one-to-one correspondence between the second position detection units and the robotic arms in the second conveying unit improves the accuracy of the detection by the second position detection units.

[0016] Preferably, the number of the first position detection units is less than the number of robotic arms in the first transmission unit, with one first position detection unit corresponding to m robotic arms in the first transmission unit, where m is a natural number greater than 1. The advantage is that by having one first position detection unit corresponding to more than one robotic arm in the first transmission unit, the number of first position detection units is reduced, saving space.

[0017] Preferably, the number of second position detection units is less than the number of robotic arms in the second transmission unit, with one second position detection unit corresponding to m robotic arms in the second transmission unit, where m is a natural number greater than 1. The advantage is that by having one second position detection unit corresponding to more than one robotic arm in the second transmission unit, the number of second position detection units is reduced, saving space.

[0018] More preferably, both the first position detection unit and the second position detection unit are one of an image detection unit, an ultrasonic detection unit, and a light detection unit.

[0019] More preferably, the image detection unit calculates the position of the robotic arm by acquiring image information of the substrate held by the robotic arm.

[0020] More preferably, the image detection unit detects at least two points in the image information and then calculates the position of the robotic arm based on the position of the detected points.

[0021] More preferably, the image detection unit detects the center position of the image information to calculate the position of the robotic arm based on the center position.

[0022] More preferably, the light detection unit includes a light emitting unit and a light receiving unit, wherein the light emitting unit emits a light beam toward the light receiving unit, which passes through the plane of the substrate surface held by the corresponding robotic arm.

[0023] More preferably, the optical emitting unit includes at least two optical emitting sub-units, and the optical receiving unit includes at least two optical receiving sub-units. The number of optical emitting sub-units and the number of optical receiving sub-units are the same, and they are arranged in a one-to-one correspondence.

[0024] More preferably, the light detection unit includes a reflection sensing unit, wherein the light emission direction of the reflection sensing unit passes through the plane containing the surface of the substrate held by the corresponding robotic arm.

[0025] Preferably, the substrate processing system further includes a first substrate detection unit disposed on the loading unit, used to detect whether a substrate exists in each subunit of the loading unit.

[0026] Preferably, the substrate processing system further includes a second substrate detection unit disposed on the transition unit, used to detect whether a substrate exists in each subunit of the transition unit.

[0027] Preferably, the substrate processing system further includes a third substrate detection unit disposed on the process unit, used to detect whether a substrate exists in each sub-unit of the process unit.

[0028] Preferably, the first conveying unit includes a first rotating mechanism, and the robotic arms within the first conveying unit are all mounted on the first rotating mechanism and driven to rotate by the first rotating mechanism. The advantages are that: the robotic arms within the first conveying unit are all mounted on the first rotating mechanism, allowing the robotic arms within the first conveying unit to rotate synchronously, which greatly saves space and simplifies the control program.

[0029] Preferably, the second conveying unit includes a second rotating mechanism, and the robotic arms within the second conveying unit are all mounted on the second rotating mechanism and driven to rotate by the second rotating mechanism. The advantages are that: the robotic arms within the second conveying unit are all mounted on the second rotating mechanism, allowing the robotic arms within the second conveying unit to rotate synchronously, which greatly saves space and simplifies the control program. Attached Figure Description

[0030] Figure 1 This is a top view of the substrate processing system of the present invention;

[0031] Figure 2 This is a schematic diagram showing the relative positions of the image detection unit and the substrate in some embodiments of the present invention;

[0032] Figure 3 for Figure 2 A schematic diagram of the first substrate image information acquired by the image detection unit;

[0033] Figure 4 This is a schematic diagram showing the relative positions of the light detection unit and the substrate in some embodiments of the present invention;

[0034] Figure 5 This is a schematic diagram showing the relative positions of the image detection unit and the substrate in some other embodiments of the present invention;

[0035] Figure 6 for Figure 5 A schematic diagram of the image information of the second and third substrates acquired by the image detection unit. Detailed Implementation

[0036] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions in the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without inventive effort are within the scope of protection of this invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but do not exclude other elements or objects.

[0037] To address the problems existing in the prior art, embodiments of the present invention provide a substrate processing system, referring to... Figure 1The substrate processing system 10 includes a loading unit 11, a transition unit 12, a process unit 13, at least one first transfer unit 14, at least one first position detection unit (not shown in the figure), at least one second transfer unit 15, and at least one second position detection unit (not shown in the figure). The first transfer unit 14 is disposed between the loading unit 11 and the transition unit 12, and the first position detection unit is fixed on the first transfer unit 14. The second transfer unit 15 is disposed between the transition unit 12 and the process unit 13, and the second position detection unit is fixed on the second transfer unit 15.

[0038] In some embodiments, the sub-units in the loading unit, the transition unit, and the process unit are arranged in one of the following ways: side-by-side, vertical, or matrix. The robotic arms in the first and second transfer units are also arranged in one of the following ways: side-by-side, vertical, or matrix. Furthermore, the arrangement of the robotic arms in the first and second transfer units is adapted to the arrangement of the sub-units in the loading unit, the transition unit, and the process unit.

[0039] In some embodiments, the loading unit is used to load substrates and includes four loading sub-units arranged in parallel. Each loading sub-unit includes vertically arranged substrate stages, and the number of substrate stages in one loading sub-unit is 1 to 25. The transition unit is used to temporarily store substrates and / or perform pre-processing on the substrates and includes two transition sub-units arranged in parallel. The process unit is used to perform processing on the substrates and includes four process sub-units arranged in parallel. The difference between the loading unit, the transition unit, and the process unit and the prior art lies in the fact that the arrangement of each sub-unit is adapted to the arrangement of the robotic arms in the first and second transfer units, which will not be described in detail here.

[0040] In some embodiments, the substrate processing system further includes a first substrate detection unit, a second substrate detection unit, and a third substrate detection unit. The first substrate detection unit is disposed on the loading unit and is used to detect whether a substrate exists in each sub-unit of the loading unit; the second substrate detection unit is disposed on the transition unit and is used to detect whether a substrate exists in each sub-unit of the transition unit; the third substrate detection unit is disposed on the process unit and is used to detect whether a substrate exists in each sub-unit of the process unit. The first substrate detection unit, the second substrate detection unit, and the third substrate detection unit detect the presence of a substrate using any one of vacuum detection, optical detection, or sensor detection.

[0041] In some embodiments, the first conveying unit includes a first base and a first rotating mechanism. The first rotating mechanism is disposed on the first base, and the robotic arms within the first conveying unit are all disposed on the first rotating mechanism and rotated by the first rotating mechanism. Furthermore, the robotic arms within the first conveying unit all face the same direction. After the robotic arms in the first conveying unit grasp the substrate from the loading unit, they rotate under the drive of the first rotating mechanism. Specifically, the first transfer unit transports the substrate from the loading unit to the transition unit. All robotic arms within the first transfer unit face the loading unit. After some or all of the robotic arms in the first transfer unit grasp the substrate from the loading unit, the first rotating mechanism drives all the robotic arms in the first transfer unit to rotate, so that all the robotic arms in the first transfer unit face the transition unit. Then, the robotic arms in the first transfer unit place the grasped substrate into the transition unit. The first transfer unit then transports the substrate from the transition unit to the loading unit. All the robotic arms in the first transfer unit face the transition unit. After some or all of the robotic arms in the first transfer unit grasp the substrate from the transition unit, the first rotating mechanism drives all the robotic arms in the first transfer unit to rotate, so that all the robotic arms in the first transfer unit face the loading unit. Then, the robotic arms in the first transfer unit place the grasped substrate into the loading unit.

[0042] In some embodiments, the second conveying unit includes a second base and a second rotating mechanism. The second rotating mechanism is disposed on the second base, and the robotic arms within the second conveying unit are all disposed on the second rotating mechanism and rotated by the second rotating mechanism. Furthermore, the robotic arms within the second conveying unit face the same direction. After the robotic arms in the second conveying unit grasp the substrate from the loading unit, they rotate under the drive of the second rotating mechanism. Specifically, the second transfer unit transports the substrate from the transition unit to the process unit. All robotic arms within the second transfer unit face the transition unit. After some or all of the robotic arms in the second transfer unit grasp the substrate from the transition unit, the second rotation mechanism drives all the robotic arms in the second transfer unit to rotate, so that all the robotic arms in the second transfer unit face the process unit. Then, the robotic arms in the second transfer unit place the grasped substrate into the process unit.

[0043] In some embodiments, both the first and second transmission units further include a lifting mechanism for realizing the overall lifting of the robotic arm.

[0044] In some embodiments, the first conveying unit further includes a first position detection unit bracket, wherein the first position detection units are disposed between the first position detection units, and the first position detection bracket is disposed on the first rotating mechanism, wherein the position of the first position detection units relative to the first rotating mechanism is fixed. Further, the number of the first position detection units is adapted to the number of robotic arms in the first conveying unit, and is used to detect the position of the robotic arms in the first conveying unit, so that some or all of the robotic arms in the same first conveying unit move synchronously.

[0045] In some embodiments, the second conveying unit further includes a second position detection unit bracket, wherein the second position detection units are disposed between the second position detection units, and the second position detection bracket is disposed on the second rotating mechanism, wherein the position of the second position detection units relative to the second rotating mechanism is fixed. Further, the number of the second position detection units is adapted to the number of robotic arms in the second conveying unit, and is used to detect the position of the robotic arms in the second conveying unit, so that some or all of the robotic arms in the same second conveying unit move synchronously.

[0046] Specifically, on the one hand, robotic arms have a certain volume. If each robotic arm has an independent rotating structure, the first and second transmission units would be very large, occupying a lot of space. On the other hand, robotic arms are electrically controlled, and single electrical control cannot guarantee the accuracy of control. Moreover, the more robotic arms there are, the greater the difficulty of control and the more prone to control errors. For example, if the system controls two robotic arms to grasp a substrate, and the first robotic arm has already retracted the substrate, but the second robotic arm moves slowly due to aging, the system will issue a rotation command after a certain time. If the second robotic arm fails to retract successfully and rotates, a collision will occur. In this application, the robotic arms in the first transmission unit share a common first rotating mechanism, and the robotic arms in the second transmission unit share a common second rotating mechanism, greatly reducing the space occupied. The first transmission unit is equipped with a first position detection unit, and the second transmission unit is equipped with a second position detection unit, which can detect the position of the robotic arm, thereby determining the position of the robotic arm and forming feedback control with the system to avoid collisions when the robotic arm rotates.

[0047] In some embodiments, both the first position detection unit and the second position detection unit are image detection units. These units acquire image information of the substrate held by the robotic arm to calculate the position of the robotic arm. More specifically, the image detection unit calculates the center position of the substrate using at least two points in the image information, and then calculates the position of the robotic arm using the center position of the substrate. Alternatively, the image detection unit directly determines the diameter position of the substrate using at least two points in the image information; this diameter position is the position of the substrate, and the position of the robotic arm is then calculated. The first position detection unit is fixed relative to the first rotating mechanism, the second detection unit is fixed relative to the second rotating mechanism, and the robotic arm is fixed relative to the held substrate. The center position of the held substrate is calculated, and the position of the robotic arm is obtained based on the fixed positions of the first and second position detection units.

[0048] In some embodiments, the number of the first position detection units is the same as the number of robotic arms in the first transmission unit, and the first position detection units are configured in a one-to-one correspondence with the robotic arms in the first transmission unit; the number of the second position detection units is the same as the number of robotic arms in the second transmission unit, and the second position detection units are configured in a one-to-one correspondence with the robotic arms in the second transmission unit.

[0049] In some embodiments, the substrate processing system further includes a control unit, specifically a central processing unit (CPU), for controlling the loading unit, the transition unit, the process unit, the first transfer unit, the second transfer unit, the first position detection unit, the second position detection unit, the first substrate detection unit, the second substrate detection unit, and the third substrate detection unit.

[0050] Figure 2 This is a schematic diagram showing the relative positions of the image detection unit and the substrate in some embodiments of the present invention. (Refer to...) Figure 2 The image detection unit 16 is configured in a one-to-one correspondence with the robotic arm. The figure includes an image detection unit 16 and a first substrate 17. The robotic arm that holds the first substrate 17 and the position detection unit bracket that fixes the image detection unit 16 are omitted. The area of ​​the image acquisition area 161 of the image detection unit 16 is greater than or equal to the surface area of ​​the first substrate 17.

[0051] Figure 3 for Figure 2 A schematic diagram of the first substrate image information acquired by the image detection unit. (Refer to...) Figure 2 and Figure 3 The first image information 171 of the first substrate 17 is a circle. The image detection unit 16 acquires the first point 1711, the second point 1712 and the third point 1713 on the edge of the first image information 171. The line connecting the first point 1711 and the second point 1712 is the first connecting line 1714. The perpendicular bisector of the first connecting line 1714 is the first perpendicular bisector 1715. The line connecting the first point 1711 and the third point 1713 is the second connecting line 1716. The perpendicular bisector of the second connecting line 1716 is the second perpendicular bisector 1717. The intersection point 1718 of the first perpendicular bisector 1715 and the second perpendicular bisector 1717 is the center of the circle of the first image information 171. The image acquisition area 161 of the image detection unit 171 is fixed. Based on the coordinates of the image acquisition area 161, the center position of the first image information 171, that is, the center position of the first substrate 17, can be obtained. The center position of the first substrate 17 is fixed relative to the robotic arm that holds the first substrate, and thus the position of the robotic arm can be obtained.

[0052] In some other embodiments, both the first position detection unit and the second position detection unit are ultrasonic detection units.

[0053] In other embodiments, both the first position detection unit and the second position detection unit are light detection units. Each light detection unit includes a light emitting unit and a light receiving unit. The light emitting unit emits a light beam that passes through the plane containing the surface of the substrate held by the corresponding robotic arm. The light emitting unit includes at least two light emitting sub-units, and the light receiving unit includes at least two light receiving sub-units. The number of light emitting sub-units and light receiving sub-units are the same, and they are arranged in a one-to-one correspondence. The light emitted by each light emitting sub-unit passes through the edge of the same circle.

[0054] Figure 4 This is a schematic diagram showing the relative positions of the photodetector unit and the substrate in some embodiments. (Refer to...) Figure 4 The light emitting unit 18 includes a first light emitting subunit 181 and a second light emitting subunit 182, and the light receiving unit 19 includes a first light receiving subunit 191 and a second light receiving subunit 192. The first light receiving subunit 191 faces the first light emitting subunit 181 and is used to receive the first light column 1811 emitted by the first light emitting subunit 181. The second light receiving subunit 192 faces the second light emitting subunit 182 and is used to receive the second light column 1821 emitted by the second light emitting subunit 182. The distance between the first light beam 1811 emitted by the first light emitting subunit 181 and the second light beam 1821 emitted by the second light emitting subunit 182 is equal to the diameter of the fourth substrate 20. When the fourth substrate 20 is located at the center of the detection area of ​​the light detection unit, the plane containing the first light beam 1811 and the second light beam 1821 passes through the center of the fourth substrate 20. The first light receiving subunit 191 receives the first light beam 1811, and the second light receiving subunit 192 receives the second light beam 1921. The detection area of ​​the light detection unit is fixed. Whether the fourth substrate 20 is located at the center of the light detection area is determined by whether the first light receiving subunit 191 receives the first light beam 1811 and whether the second light receiving subunit 192 receives the second light beam 1821. The position of the robotic arm holding the fourth substrate 20 relative to the fourth substrate 20 is fixed, thus the position of the robotic arm can be obtained.

[0055] In some other embodiments, the light detection unit includes a reflection sensing unit, wherein the light emission direction of the reflection sensing unit passes through the plane containing the surface of the substrate held by the corresponding robotic arm.

[0056] In some other embodiments, the number of the first position detection units is less than the number of robotic arms in the first transmission unit, and one first position detection unit is set to correspond to m robotic arms in the first transmission unit, where m is a natural number greater than 1; the number of the second position detection units is less than the number of robotic arms in the second transmission unit, and one second position detection unit is set to correspond to m robotic arms in the second transmission unit, where m is a natural number greater than 1.

[0057] Figure 5 This is a schematic diagram showing the relative positions of the image detection unit and the substrate in some other embodiments of the present invention. (Refer to...) Figure 5 Each imaging unit 16 corresponds to at least two robotic arms. All robotic arms and the imaging unit 16 are arranged in a vertical column, and the robotic arms are arranged adjacent to each other. The figure includes one imaging unit 16, a second substrate 21, and a third substrate 22. The robotic arm that clamps the second substrate 21, the robotic arm that clamps the third substrate 23, and the position detection unit bracket that fixes the imaging detection unit 16 are omitted. The area of ​​the image acquisition area 161 of the imaging detection unit 16 is larger than the surface area of ​​the second substrate 21.

[0058] Figure 6 for Figure 5 A schematic diagram of image information of the second and third substrates acquired by the image detection unit. (Refer to...) Figure 6 The second image information 211 of the second substrate 21 is circular. Since the third substrate 22 is blocked by the second substrate 21, the third image information 221 of the third substrate 22 is crescent-shaped. The image detection unit 16 acquires the fourth point 2211, the fifth point 2212 and the sixth point 2213 on the edge of the third image information 221. The line connecting the fourth point 2211 and the fifth point 2212 is the third connecting line 2214. The perpendicular bisector of the third connecting line 2214 is the third perpendicular bisector 2215. The line connecting the fourth point 2211 and the sixth point 2213 is the fourth connecting line 2216. The perpendicular bisector of the fourth connecting line 2216 is the fourth perpendicular bisector 2217. The intersection point 2218 of the third perpendicular bisector 2215 and the fourth perpendicular bisector 2217 is the center of the third image information 221.

[0059] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the invention as set forth in the claims. Furthermore, the invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. A substrate processing system, characterized in that, include: Loading unit, used for loading substrate; Transition unit, used for temporarily storing substrates and / or performing pre-processing on substrates; Process unit, used for processing the substrate; At least one first transfer unit is disposed between the loading unit and the transition unit, and the first transfer unit includes at least two robotic arms for picking up and placing substrates between the loading unit and the transition unit; At least one first position detection unit is fixed on the first transmission unit and is used to detect the position of the robotic arm in the first transmission unit so that the robotic arms in the same first transmission unit move partially or completely synchronously. At least one second transfer unit is disposed between the transition unit and the process unit, and the second transfer unit includes at least two robotic arms for picking up and placing substrates between the transition unit and the process unit; as well as, At least one second position detection unit is fixed on the second transmission unit and is used to detect the position of the robotic arm in the second transmission unit so that the robotic arms in the same first transmission unit move partially or completely synchronously. Both the first position detection unit and the second position detection unit are one of the following: an image detection unit, an ultrasonic detection unit, and a light detection unit. The image detection unit collects at least two points or the center position of a circle from the image information of the substrate held by the robotic arm, and calculates the position of the robotic arm based on the positions of the at least two points or the center position. The light detection unit includes a light emitting unit and a light receiving unit. The light emitting unit emits a light beam toward the light receiving unit, which passes through the plane of the substrate surface held by the corresponding robotic arm.

2. The substrate processing system according to claim 1, characterized in that, The number of the first position detection units is the same as the number of robotic arms in the first transmission unit, and the first position detection units are set up in a one-to-one correspondence with the robotic arms in the first transmission unit.

3. The substrate processing system according to claim 1, characterized in that, The number of the second position detection units is the same as the number of robotic arms in the second transmission unit, and the second position detection units are set up in a one-to-one correspondence with the robotic arms in the second transmission unit.

4. The substrate processing system according to claim 1, characterized in that, The number of the first position detection units is less than the number of robotic arms in the first transmission unit. One first position detection unit is set to correspond to m robotic arms in the first transmission unit, where m is a natural number greater than 1.

5. The substrate processing system according to claim 1, characterized in that, The number of the second position detection units is less than the number of robotic arms in the second transmission unit. One second position detection unit is set to correspond to m robotic arms in the second transmission unit, where m is a natural number greater than 1.

6. The substrate processing system according to claim 1, characterized in that, The optical emitting unit includes at least two optical emitting sub-units, and the optical receiving unit includes at least two optical receiving sub-units. The number of optical emitting sub-units and optical receiving sub-units are the same, and they are arranged in a one-to-one correspondence.

7. The substrate processing system according to claim 1, characterized in that, The light detection unit includes a reflection sensing unit, and the light emission direction of the reflection sensing unit passes through the plane containing the surface of the substrate held by the corresponding robotic arm.

8. The substrate processing system according to claim 1, characterized in that, It also includes a first substrate detection unit, which is disposed on the loading unit and is used to detect whether a substrate exists in each subunit of the loading unit.

9. The substrate processing system according to claim 1, characterized in that, It also includes a second substrate detection unit, which is disposed on the transition unit and is used to detect whether there is a substrate in each subunit of the transition unit.

10. The substrate processing system according to claim 1, characterized in that, It also includes a third substrate detection unit, which is disposed on the process unit and is used to detect whether a substrate exists in each sub-unit of the process unit.

11. The substrate processing system according to claim 1, characterized in that, The first conveying unit includes a first rotating mechanism, and the robotic arms in the first conveying unit are all mounted on the first rotating mechanism and are driven to rotate by the first rotating mechanism.

12. The substrate processing system according to claim 1, characterized in that, The second conveying unit includes a second rotating mechanism, and the robotic arms in the second conveying unit are all mounted on the second rotating mechanism and are driven to rotate by the second rotating mechanism.

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