Surface inspection device

Abstract

This application discloses a surface detection device. Based on this application, the detection light generated by the light source module is multidirectional, and this multidirectional detection light can form multidirectional reflections on the surface of the object being detected. Therefore, even if the surface of the object is smooth enough to form a specular reflection of directional light, the multidirectional reflection can suppress the occurrence of specular reflection by producing a reflection effect equivalent to diffuse reflection. Thus, the reflected light generated by multidirectional reflection can avoid the generation of virtual images unrelated to surface features, thereby preventing the interference of environmental virtual images on the imaging quality of the reflected light in the imaging module, thereby improving the detection accuracy of surface features.

Description

Technical Field

[0001] The present application relates to surface detection technology, and in particular to a surface detection device. Background Art

[0002] The surface of an object may have uneven surface defects due to scratches, collisions, etc., and such surface defects are often subtle and difficult to observe.

[0003] To detect these surface defects, a detection light can be generated on the surface of an object, and the reflected light formed by the detection light on the object's surface can be received and imaged by an imaging module. The surface characteristics of the object's surface affect the imaging position of the reflected light in the imaging module. Therefore, the surface characteristics of the object's surface can be determined based on the imaging position of the reflected light in the imaging module. For example, the depth information of the object's surface can be determined based on the imaging position of the reflected light in the imaging module. This depth information is used to characterize the degree of concavity and convexity of the surface characteristics. Therefore, based on the surface characteristics of the object's surface, it can be determined whether the object's surface has surface defects.

[0004] However, for object surfaces with a surface roughness close to that of a mirror, such as display screens, the detection light may form a mirror reflection or a reflection effect close to mirror reflection on the surface of the object, thereby causing the reflected light to form an environmental virtual image that is unrelated to the surface features, and the environmental virtual image will seriously interfere with the imaging quality of the reflected light in the imaging module, thereby interfering with the determination of the surface features, resulting in low detection accuracy. Summary of the Invention

[0005] In an embodiment of the present application, a surface detection device is provided to help improve the detection accuracy of surface features.

[0006] In one embodiment, a surface detection device may include:

[0007] A light source module is used to generate multi-directional detection light toward the surface of the detection object;

[0008] an imaging module for imaging reflected light generated by the detection light on the surface of the object, wherein a plurality of sub-beams of the detection light that are not completely parallel form multi-directional reflections on the surface of the object that suppress specular reflection, and the reflected light is generated by the multi-directional reflections;

[0009] The processing module is used to determine the surface features of the object surface according to the imaging position of the reflected light in the imaging module.

[0010] Optionally, the light source module includes: a light beam generating component for generating a source light beam, wherein the source light beam is used to stimulate the generation of a directional light beam; and a multi-directional refractive component for refracting the directional light beam into different directions to form the detection light with the multi-directionality.

[0011] Optionally, the incident light surface of the multi-directional refractive component is configured to: split the directional light beam into multiple groups of sub-beams, and make the multiple groups of sub-beams enter the multi-directional refractive component at different incident angles; the output light surface of the multi-directional refractive component is configured to: make the multiple groups of sub-beams refracted in different directions converge to form the detection light with the multi-directionality.

[0012] Optionally, the beam cross-section of the directional light beam is linear; the incident light surface is configured to: make the multiple groups of sub-beams enter the multi-directional refractive component at the same incident angle in the line width direction of the linear shape, and make the multiple groups of sub-beams enter the multi-directional refractive component at different incident angles in the line length direction of the linear shape; the exit light surface is configured to: make the size of the detection light formed by convergence in the line width direction be the incident line width of the directional light beam when entering the multi-directional refractive component, and make the size of the detection light formed by convergence in the line length direction be limited to not more than a preset line length threshold.

[0013] Optionally, the incident light surface includes multiple cylindrical surfaces; wherein the axes of the multiple cylindrical surfaces extend along the line width direction so that the multiple groups of sub-light beams enter the multi-directional refractive component at the same incident angle in the line width direction; and the multiple cylindrical surfaces are arranged along the line length direction so that the multiple groups of sub-light beams enter the multi-directional refractive component at different incident angles in the line length direction.

[0014] Optionally, the light-emitting surface includes a smooth cylindrical surface; wherein the axis of the smooth cylindrical surface extends along the line width direction so that the size of the detection light formed by the convergence in the line width direction is the incident line width of the directional light beam when entering the multi-directional refractive component; and the smooth cylindrical surface spans the light-emitting surface in the line length direction, and the curvature radius of the smooth cylindrical surface is configured to limit the size of the detection light formed by the convergence in the line length direction to not exceed the line length threshold.

[0015] Optionally, the light source module further includes a beam shaping component for generating the directional light beam with a predetermined beam cross-sectional shape in response to energy excitation of the source light beam.

[0016] Optionally, the beam shaping member includes a linear spot lens, and the linear spot lens is used to generate the directional light beam with a linear beam cross section in response to an energy spot formed by the source light beam in the beam shaping member.

[0017] Optionally, the light source module further includes a beam aggregation component for aggregating the energy of the source light beam on the beam-forming component.

[0018] Optionally, the beam aggregation component includes a collimating lens, which is used to aggregate the individual rays of the source light beam in the beam shaping component to form an energy spot; the beam shaping component includes a linear spot lens, which is used to generate the directional light beam with a linear beam cross-section in response to the energy spot.

[0019] Based on the above embodiment, the detection light generated by the light source module is multidirectional, and this multidirectional detection light can form multidirectional reflections on the surface of the detection object. Therefore, even if the surface of the object is smooth enough to form a specular reflection for directional light, multidirectional reflection can suppress the occurrence of specular reflection by producing a reflection effect equivalent to diffuse reflection. As a result, the reflected light generated by multidirectional reflection can avoid the generation of virtual images unrelated to surface features, thereby preventing the interference of environmental virtual images on the imaging quality of the reflected light in the imaging module, thereby improving the accuracy of surface feature detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The following drawings are only provided for schematic illustration and explanation of the present application and do not limit the scope of the present application:

[0021] Figure 1 A schematic diagram of the detection principle according to the embodiments of the present application;

[0022] Figure 2 This is a schematic diagram of an exemplary structure of a surface detection device in one embodiment of the present application;

[0023] Figure 3 For example Figure 2 A schematic structural diagram of a first embodiment of a light source module in a surface detection device is shown;

[0024] Figure 4 For example Figure 2 A schematic structural diagram of a second embodiment of a light source module in a surface detection device shown;

[0025] Figure 5 For example Figure 2 A schematic structural diagram of a third embodiment of the light source module in the surface detection device shown;

[0026] Figure 6 For example Figure 2The schematic diagram of the example structure of the imaging module in the surface detection device shown. DETAILED DESCRIPTION

[0027] In order to make the objectives, technical solutions and advantages of this application more clear, the application is further described in detail below with reference to the accompanying drawings and examples.

[0028] Figure 1 This is a schematic diagram of the detection principle based on the embodiment of this application. Figure 1 In the figure, the detection light is emitted from the light source module 20 at the detection light exit position P1, the reflected light enters the imaging module 30 at the reflected light entrance position P2, and the detection light generates reflected light at the object surface S0 of the detection object at the light reflection position P3, wherein the detection light exit position P1, the reflected light entrance position P2 and the light reflection position P3 are distributed in a triangular pattern, and the reflected light passing through the reflected light entrance position P2 can generate an image on the photosensitive array 300.

[0029] Normally, the detection light emitting position P1 and the reflected light entering position P2 are pre-deployed and fixed, while the light reflection position P3 changes accordingly with the different depths of the concave and convex parts of the object surface S0. Therefore, the light reflection angle θ formed by the light reflection position P3 will also change accordingly with the change of the light reflection position P3, thereby causing the position where the reflected light is generated in the photosensitive array 300 to change.

[0030] For example, Figure 1 The solid line shows the reflection path when the object surface S0 is flat, and the dotted line shows the light path when the object surface S0 is convex. In addition, the light reflection angles θ of these two light paths and the positions where the reflected light is generated in the photosensitive array 300 are different. The difference in the generation position can represent the depth difference of the object surface S0 when it is flat and convex.

[0031] The surface detection implemented in the embodiments of the present application can be based on the following Figure 1 The principle shown is as follows, and since the detection light emitting position P1, the reflected light incident position P2 and the light reflection position P3 are distributed in a triangle, this principle can also be called the "triangulation method" principle.

[0032] Figure 2 This is a schematic diagram of an exemplary structure of a surface detection device in one embodiment of the present application. Figure 2The surface detection device in this embodiment may include a light source module 20 and an imaging module 30 for performing surface detection based on triangulation. For example, the optical axis of the imaging module 30 may be at a 45-degree angle or other angle to the optical axis of the light source module 20. Furthermore, the optical axis of the light source module 20 may be perpendicular to the object surface S0 or at another angle relative to the object surface. Furthermore, the surface detection device in this embodiment may also include a processing module 50.

[0033] The light source module 20 can generate detection light. For example, the light source module 20 can include a light beam generating component 200 as a light source, and an optical lens assembly 210 for generating the detection light in response to energy excitation of the light source. The light beam generating component 200 can include a light source device such as a laser that can provide a light source, and Figure 1 The detection light exit position P1 may be located at the optical lens assembly 210 of the light source module 20 .

[0034] In this embodiment, the light source module 20 is used to generate multi-directional detection light to the object surface S0 of the detection object (for example, a mirror surface such as the display panel surface of a display screen). The multi-directionality of the detection light means that the detection light generated by the light source module 20 may include multiple groups of sub-beams that are not completely parallel, that is, the detection light generated by the light source module 20 is not a unidirectional light beam, but a light beam with multi-directionality. Therefore, the multiple groups of sub-beams that are not completely parallel in the detection light generated by the light source module 20 can form multi-directional reflections on the object surface S0 to suppress mirror reflections, that is, even if the object surface S0 is a smooth surface sufficient to form mirror reflections for directional light, the multi-directional reflections can suppress the occurrence of mirror reflections by producing a reflection effect equivalent to diffuse reflections, and the reflected light generated by the multi-directional reflections can avoid the generation of virtual images that are not related to the surface features.

[0035] In this embodiment, the detection light generated by the light source module 20 may have a linear beam cross-sectional shape in addition to being multidirectional. The beam cross-sectional shape is also the projection shape of the first detection light L1 and the second detection light L2 on the surface of the detection object, that is, the detection light may be a multidirectional line beam. The linear length direction of the line may be the length direction of the linear extension, and the linear length direction of the line may be perpendicular to the line. Figure 2 The width direction of the line shape may be the width direction perpendicular to the length direction of the line shape, and the width direction of the line shape may be Figure 2 In the horizontal direction. And, the line beam as the detection light can cover the linear area of ​​the object surface S0. Figure 2 When moving in the horizontal direction as shown, the line beam as the detection light scans the entire two-dimensional surface of the object surface S0.

[0036] The imaging module 30 can image the reflected light of the detection light. For example, the imaging module 30 may include a lens assembly 310 and a photosensitive array 300 arranged in the optical path of the lens assembly 310. The photosensitive array 300 may include a photosensitive element such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor), and, Figure 1 The reflected light incident position P2 in the image may be located at the lens assembly 310 .

[0037] In this embodiment, the imaging module 30 is used to image the reflected light generated by the detection light generated by the light source module 20 on the object surface S0, wherein, since the multiple groups of sub-light beams that are not completely parallel in the detection light generated by the light source module 20 can form multi-directional reflections on the object surface S0 to suppress mirror reflection, the reflected light imaged in the imaging module 30 is generated by multi-directional reflection and may not include virtual images caused by mirror reflection and unrelated to surface features, thereby avoiding interference of environmental virtual images on the imaging quality of the reflected light in the imaging module 30.

[0038] In this embodiment, if the detection light generated by the light source module 20 is a multi-directional line beam, the photosensitive elements included in the photosensitive array 300 can be arranged in a two-dimensional array, with each column of the two-dimensional array corresponding to a position along the line length, and each photosensitive element in each column of photosensitive elements is used to represent the imaging position of the reflected light at the corresponding position along the line length. In this case, the photosensitive array 300 can cover the imaging position of the reflected light at each position along the line length.

[0039] The processing module 50 can control the light source module 20 to generate detection light and control the imaging of the imaging module 30. In addition, the processing module 50 can also determine the surface features of the object surface S0 based on the image signal generated by the imaging module 30.

[0040] For example, the processing module 50 may be a processor, which may be a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), or a programmable logic device such as an FPGA (Field Programmable Gate Array).

[0041] In this embodiment, the processing module 50 is configured to determine the surface features of the object surface S0 based on the imaging position of the reflected light on the imaging module 30 (i.e., the photosensitive array 300). Since the imaging quality of the reflected light on the imaging module 30 is not affected by the interference of virtual images of the environment, the processing module 50 can improve the accuracy of detecting surface features.

[0042] In this embodiment, if the detection light generated by the light source module 20 is a multi-directional line beam, and the photosensitive array 300 covers the imaging position of the reflected light at each position in the line length direction, the processing module 50 can determine the surface features at each position in the line length direction. Figure 2 During the horizontal movement shown, the surface features at each position in the linear direction of each scan can be considered as a set of two-dimensional data. After scanning the complete two-dimensional surface of the object surface S0, the processing module 50 can output the two-dimensional data obtained from each scan in the form of 3D (three-dimensional) point cloud image data.

[0043] In addition, the surface detection device in this embodiment may further include a housing bracket (not shown). Figure 2 As shown in FIG, the housing bracket is used to fix the light source module 20 and the imaging module 30, and to install the processing module 50, and the housing bracket can be a metal frame that is conducive to heat dissipation.

[0044] Figure 3 For example Figure 2 The first embodiment of the structure diagram of the light source module in the surface detection device is shown. Figure 3 In this embodiment, the light source module 20 can utilize the light refraction of the optical lens assembly 210 to make the multiple groups of sub-beams in the detection light not completely parallel.

[0045] That is, Figure 3 The light beam generating assembly 200 shown in the figure is used to generate a source light beam, wherein the source light beam is used to stimulate the generation of a directional light beam. The directional light beam in this embodiment may refer to a light beam with a regular distribution of light directions (for example, parallel to each other or close to parallel to each other). For example, the light beam generating assembly 200 may include any component that can generate laser energy, such as a semiconductor laser, and the source light beam generated by it may include a blue-violet light with a wavelength in the range of 400nm to 410nm (preferably a wavelength of 405nm), or a laser with a wavelength in the range of 440nm to 460nm (preferably a wavelength of 450nm), or a laser with a wavelength in the range of 540nm to 560nm (preferably a wavelength of 550nm), or a laser with a wavelength in the range of 640nm to 660nm (preferably a wavelength of 650nm), wherein the shorter the wavelength, the higher the detection accuracy.

[0046] The optical lens assembly 210 may include a multi-directional refractive member 213, wherein: Figure 1 The detection light emitting position P1 can be located at the multi-directional refractive component 213, and the multi-directional refractive component 213 is used to refract multiple groups of sub-beams in the directional light beam excited by the source light beam to different directions respectively, so as to form multiple groups of sub-beams of detection light with irregular distribution in directions such as not completely parallel.

[0047] For example, the incident light surface 213a of the multi-directional refractive component 213 can be configured to: split the directional light beam excited by the source light beam into multiple groups of sub-beams, and make the multiple groups of sub-beams of the directional light beam enter the multi-directional refractive component 213 at different incident angles, so that the directional light beam is refracted in different directions.

[0048] For example, the light-emitting surface 213b of the multi-directional refractive component 213 can be configured to converge the multiple groups of sub-light beams refracted in different directions to form detection light generated toward the object surface S0, that is, the multiple groups of sub-light beams refracted in different directions converge to form detection light with multi-directionality, so as to ensure that the light energy is concentrated on the object surface S0 and that the reflected light has an intensity sufficient to form an image in the imaging module 30.

[0049] If the detection light is a multi-directional line beam, the line width of the line beam will have a more significant impact on the final imaging effect than the line length. Figure 3 The direction of the paper, the length direction of the line can be Figure 3 Horizontal direction in .

[0050] For example, as mentioned above, the object surface S0 can be along Figure 2 The horizontal movement shown is as shown, and the movement of the object surface S0 is in unit steps of line width, so that the linear area scanned each time can be spliced ​​to cover the complete two-dimensional surface of the object surface S0. If the size of the line width direction of the detection light cannot be reasonably set, the splicing accuracy may be affected.

[0051] In this case, the beam cross-section of the directional light beam excited by the source light beam can also be linear, and the multiple groups of sub-beams in the directional light beam excited by the source light beam can be refracted in different directions in the linear length direction by the multi-directional refractive component 213 to prioritize ensure that the line width size of the line light beam does not exceed the size limit.

[0052] That is, the incident light surface 213a of the multi-directional refractive component 213 can be further configured to: enable multiple groups of sub-beams in the directional light beam excited by the source light beam to enter the multi-directional refractive component 213 at the same incident angle in the line width direction of the linear shape, and enable multiple groups of sub-beams in the directional light beam excited by the source light beam to enter the multi-directional refractive component 213 at different incident angles in the line length direction of the linear shape.

[0053] For example, in Figure 3 In the example, the incident light surface 213a includes multiple cylindrical surfaces:

[0054] The generatrix of the plurality of cylindrical surfaces extends along the line width direction, so that the plurality of groups of sub-beams in the directional light beam excited by the source light beam enter the multi-directional refractive member 213, and the angle components of the incident angles of the plurality of groups of sub-beams entering the multi-directional refractive member 213 in the line width direction are the same;

[0055] Furthermore, the plurality of cylindrical surfaces are arranged along the linear direction, so that the plurality of sub-beams in the directional beam excited by the source beam enter the multi-directional refractive member 213 at different incident angles along the linear direction.

[0056] Accordingly, the light-emitting surface 213b of the multi-directional refractive component 213 can be configured to converge the multiple groups of sub-beams after refraction to form emitted detection light, wherein the size of the detection light in the line width direction is the incident line width of the directional light beam when entering the multi-directional refractive component, and the size of the detection light in the line length direction is limited to not exceeding a preset line length threshold.

[0057] For example, in Figure 3 In the example, the light emitting surface 213b includes a smooth cylindrical surface:

[0058] The generatrix of the smooth cylindrical surface extends in the line width direction, so as to constrain the sizes of the multiple groups of sub-beams in the detection light in the line width direction to the incident line width of the directional light beam when entering the multi-directional refractive member 213;

[0059] Furthermore, the smooth cylinder extends upward along the line length to form an exit light surface 213b, the curvature radius of the smooth cylinder is greater than the curvature radius of each cylinder of the incident light surface 213a, and the curvature radius of the smooth cylinder is configured to limit the size of the detection light in the line length direction to not exceed a preset line length threshold.

[0060] In the case where the incident light surface 213a includes multiple cylindrical surfaces and the exit light surface 213b includes a smooth cylindrical surface, the multi-directional refractive component 213 may include multiple cylindrical mirrors assembled with each other, wherein the incident light surface 213a includes a small cylindrical surface of a cylindrical mirror with a relatively small curvature radius, and the smooth cylindrical surface of the exit light surface 213b includes a large cylindrical surface of a cylindrical mirror with a relatively large curvature radius.

[0061] In addition to the linear shape, the beam cross-section of the detection light can also be configured to other shapes. Since the beam cross-section shape of the source light beam generated by the light beam generating component 200 is fixed, if different requirements for the beam cross-section shape of the detection light are to be met, either the device specifications of the light beam generating component 200 are selected to be replaced, or the source light beam generated by the light beam generating component 200 is subjected to aperture filtering of a specified shape. Replacing the device specifications of the light beam generating component 200 will increase the supporting cost of the surface detection device and will be difficult to operate. Implementing aperture filtering of a specified shape on the source light beam generated by the light beam generating component 200 will lose the light energy of the source light beam. Therefore, in order to configure the beam cross-section shape of the detection light as needed without increasing the supporting cost and without losing light energy, an optimization solution is provided in the embodiment of the present application.

[0062] Figure 4 For example Figure 2 The second embodiment of the structure of the light source module in the surface detection device is shown in FIG. Figure 4 In this embodiment, the optical lens assembly 210 of the light source module 20 can be Figure 3 The optical beam forming component 212 is further included on the basis of the optical beam forming component 200, and the optical beam forming component 212 is used to generate a directional optical beam with a predetermined beam cross-sectional shape in response to the energy excitation of the source optical beam generated by the optical beam generating component 200.

[0063] For example, the detection light can be a multi-directional linear beam, and accordingly, the beam cross-section shape of the directional beam can also be linear. In this case, the beam shaping component 212 can include a straight spot lens. For example, the straight spot lens can include a cylindrical mirror or a Powell prism, and the straight spot lens is used to respond to the energy spot formed by the source light beam generated by the light beam generating component 200 in the beam shaping component 212 to generate a directional light beam with a linear beam cross-section.

[0064] Figure 5 For example Figure 2 The third embodiment of the structure of the light source module in the surface detection device is shown in FIG. Figure 5 In order to reduce the energy loss of the beam-forming component 212 in converting the energy spot, in this embodiment, the optical lens assembly 210 of the light source module 20 can be Figure 4 On the basis of the light beam generating assembly 200, it further includes a light beam aggregation component 211, which is used to aggregate the energy of the source light beam generated by the light beam generating assembly 200 into the light beam beam-forming component.

[0065] For example, the beam aggregation component 211 may include a collimating lens, wherein the collimating lens may be an optical lens having a glass spherical surface or an aspherical surface, and the collimating lens is used to aggregate the rays of the cylindrical source light beam in the beam-forming component 212 to form an energy spot, so that the beam-forming component 211 (such as a straight spot lens) can respond to the energy spot and generate a directional light beam with a linear beam cross-section.

[0066] In addition to providing the above-mentioned optimization solution for the light source module 20 , in this embodiment, an optimization solution is also provided to help improve the imaging accuracy of the imaging module 30 .

[0067] Figure 6 For example Figure 2 Schematic diagram of an example structure of an imaging module in a surface detection device shown in FIG. Figure 6 In this embodiment, the optical axis of the lens assembly 310 of the imaging module 30 can be arranged at a preset inclination angle with the photosensitive array 300 so that the imaging of the reflected light on the photosensitive array 300 conforms to Sam's law.

[0068] In addition, the lens assembly 310 can specifically include an optical lens 311 and a filter 312, wherein the optical lens 311 can be an industrial lens, and the filter 312 can be a bandpass filter, and the wavelength range allowed to pass by the filter 312 is the same as the wavelength range of the source light beam generated by the light beam generating assembly 200.

[0069] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application shall be included in the scope of protection of the present application.

Claims

1. A surface detection device, characterized in that: include: A light source module is used to generate multi-directional detection light toward the surface of the detection object; an imaging module for imaging reflected light generated by the detection light on the surface of the object, wherein a plurality of sub-beams of the detection light that are not completely parallel form multi-directional reflections on the surface of the object that suppress specular reflection, and the reflected light is generated by the multi-directional reflections; a processing module, configured to determine a surface feature of the object surface according to an imaging position of the reflected light in the imaging module; in: The light source module includes a light beam generating component, the light beam generating component is used to generate a source light beam, and the source light beam is used to stimulate the generation of a directional light beam; The light source module further includes a multi-directional refractive component; The incident light surface of the multi-directional refractive component is configured to: split the directional light beam into multiple groups of sub-beams, and make the multiple groups of sub-beams enter the multi-directional refractive component at different incident angles; The light emitting surface of the multi-directional refraction member is configured to converge the plurality of sub-beams refracted in different directions to form the detection light having multi-directionality.

2. The surface detection device according to claim 1, characterized in that The beam cross section of the directional light beam is linear; The incident light surface is configured to: allow the plurality of groups of sub-light beams to enter the multi-directional refractive member at the same incident angle in the line width direction of the line shape, and allow the plurality of groups of sub-light beams to enter the multi-directional refractive member at different incident angles in the line length direction of the line shape; The light emitting surface is configured to: make the size of the converged detection light in the line width direction equal to the incident line width of the directional light beam when entering the multi-directional refractive component, and limit the size of the converged detection light in the line length direction to not exceed a preset line length threshold.

3. The surface detection device according to claim 2, characterized in that The incident light surface includes a plurality of cylindrical surfaces; The axes of the plurality of cylindrical surfaces extend along the line width direction, so that the plurality of groups of sub-light beams enter the multi-directional refractive component at the same incident angle in the line width direction; Furthermore, the plurality of cylindrical surfaces are arranged along the linear direction, so that the plurality of groups of sub-light beams enter the multi-directional refractive component at different incident angles in the linear direction.

4. The surface detection device according to claim 2, characterized in that The light emitting surface comprises a smooth cylindrical surface; The axis of the smooth cylindrical surface extends along the line width direction, so that the size of the converged detection light in the line width direction is the incident line width of the directional light beam when entering the multi-directional refractive component; Furthermore, the smooth cylindrical surface spans the light emitting surface in the linear direction, and the curvature radius of the smooth cylindrical surface is configured to limit the size of the converged detection light in the linear direction to not exceed the linear threshold.

5. The surface detection device according to claim 1, characterized in that The light source module further includes a beam shaping member for generating the directional light beam with a predetermined beam cross-sectional shape in response to energy stimulation of the source light beam.

6. The surface detection device according to claim 5, characterized in that The beam shaping member includes a linear spot lens, and the linear spot lens is used to generate the directional light beam with a linear beam cross section in response to an energy spot formed by the source light beam in the beam shaping member.

7. The surface detection device according to claim 5, characterized in that: The light source module further includes a beam aggregation component for converging the energy of the source light beam on the beam shaping component.

8. The surface detection device according to claim 7, characterized in that: The beam aggregation component includes a collimating lens, and the collimating lens is used to aggregate the light rays of the source light beam in the beam shaping component to form an energy spot; The beam shaping component includes a linear spot lens, and the linear spot lens is used to generate the directional light beam with a linear beam cross section in response to the energy spot.

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