A magnetron sputtering coating device for the inner wall of a thin pipe

Abstract

A magnetron sputtering coating device for the inner wall of a thin pipe comprises: a connecting guide mechanism, a counterweight guide mechanism, a cathode wire and a magnetic field generating mechanism; the connecting guide mechanism comprises: a connecting tube, a conductor fixing member, and an insulating connecting member; a first connecting through hole is provided inside the conductor fixing member, a second connecting through hole is provided inside the insulating connecting member, one end of the cathode wire is passed through the first connecting through hole and the second connecting through hole, and is fixed on the conductor fixing member; the counterweight guide mechanism comprises: a guide tube and a counterweight member; the counterweight member is slidably arranged in the guide tube, a fixed position is provided on the counterweight member, and the other end of the cathode wire is connected to the fixed position; the magnetic field generating mechanism is used to be sleeved on the outer side of the plated pipe. The two ends of the cathode wire are respectively connected to the connecting guide mechanism and the conductor counterweight guide mechanism, and the coaxiality of the cathode wire and the slender pipe is maintained through the connecting guide mechanism and the counterweight guide mechanism to avoid the phenomenon that the cathode wire contacts the slender pipe and causes a short circuit.

Description

Technical Field

[0001] The invention relates to the technical field of magnetron sputtering coating devices, and in particular to a magnetron sputtering coating device for the inner wall of a thin pipe. Background Art

[0002] With the rapid development of modern industrial technology, thin film technology has become one of the most active research fields in contemporary vacuum technology and material science, and plays a vital role in the new technological revolution. Pipeline inner surface coating technology is an important field. It is widely used in industrial production, for example: superhard materials are deposited on the inner surface of pipelines to improve wear resistance; in the field of accelerators, titanium nitride is deposited on the inner surface of vacuum boxes to reduce the secondary electron emission coefficient, and non-evaporable getter films (NEG) are deposited to enable vacuum boxes to have pumping capabilities.

[0003] For coating the inner surface of conventional-sized pipes, magnetron sputtering coating can be performed using a cathode with a permanent magnet or an internal metal wire. However, for extremely fine pipes (less than 10 mm in diameter and greater than 500 mm in length), the permanent magnet cathode cannot be placed inside the pipe due to size limitations, and the internal metal filament method is also prone to short circuits. Summary of the invention

[0004] The main technical problem solved by the present invention is to provide a magnetron sputtering coating device for the inner wall of a thin pipe to ensure the coaxiality of the cathode wire and avoid contact with the plated pipe, thereby preventing a short circuit.

[0005] The present application provides a magnetron sputtering coating device for the inner wall of a thin pipe, comprising: a connecting guide mechanism, a counterweight guide mechanism, a cathode wire and a magnetic field generating mechanism; the connecting guide mechanism comprises: a connecting pipe, a conductor fixing member, and an insulating connecting member; the conductor fixing member is arranged inside the connecting pipe, the insulating connecting member is arranged at one end of the connecting pipe, and the insulating connecting member is connected to the conductor fixing member; a first connecting through-hole is arranged inside the conductor fixing member, a second connecting through-hole is arranged inside the insulating connecting member, and one end of the cathode wire is passed through the first connecting through-hole. The counterweight guide mechanism comprises: a guide tube and a counterweight; the counterweight is slidably arranged in the guide tube, a fixing position is provided on the counterweight, and the other end of the cathode wire is connected to the fixing position; the other end of the connecting tube is used to connect one end of the plated pipe, and the guide tube is used to connect the other end of the plated pipe, and the magnetic field generating mechanism is arranged on the outside of the plated pipe, and is used to generate a magnetic field parallel to the cathode wire; the cathode wire, the first connecting through hole, the second connecting through hole, the guide tube and the fixing position are all coaxial.

[0006] In one embodiment, it further includes:

[0007] A first observation window assembly, the first observation window assembly includes: a first transition connecting pipe and a first observation piece; the first transition connecting pipe has a first transition connecting channel, the first observation piece has a first observation channel, the first observation piece is connected to the first transition connecting pipe, and the first observation channel is connected to the first transition connecting channel; one end of the first transition connecting pipe is connected to the insulating connecting piece, and the other end of the first transition connecting pipe is used to connect to one end of the plated pipe.

[0008] A second observation window assembly, the second observation window assembly includes: a second transition connecting pipe and a second observation piece; the second transition connecting pipe has a second transition connecting channel, the second observation piece has a second observation channel, the second observation piece is connected to the second transition connecting pipe, and the second observation channel is connected to the second transition connecting channel; one end of the second transition connecting pipe is connected to one end of the guide pipe, and the other end of the second transition connecting pipe is used to connect to the other end of the plated pipe.

[0009] In one embodiment, it further includes:

[0010] a first shielding tube, wherein the first shielding tube is passed through the first transition connection channel, the first connection through hole and the second connection through hole, and the first shielding tube is fixed on the conductor fixing member, and one end of the cathode wire is passed through the first shielding tube;

[0011] A second shielding tube, wherein the second shielding tube is passed through the second transition connection channel and is fixedly connected to the counterweight; the other end of the cathode wire is passed through the second shielding tube.

[0012] In one embodiment,

[0013] The length of the first shielding tube is greater than the length of the first transition connecting tube, and both ends of the first shielding tube extend to the outside of both ends of the first transition connecting tube respectively;

[0014] The length of the second shielding tube is greater than that of the second transition connecting tube, and both ends of the second shielding tube extend to the outside of both ends of the second transition connecting tube respectively.

[0015] In one embodiment,

[0016] The first observation window assembly further includes: a first observation window, the first observation window being disposed in the first observation channel;

[0017] The second observation window assembly further includes: a second observation window, and the second observation window is arranged in the second observation channel.

[0018] In one embodiment, it further includes:

[0019] The first air inlet and outlet assembly comprises: a first connecting pipe and a first air inlet pipe; one end of the first connecting pipe is used to connect to the vacuum pumping device, the other end of the first connecting pipe is connected to the connecting pipe, the first air inlet pipe is connected to the first connecting pipe, and the first air inlet pipe is provided with a first air inlet;

[0020] The second air inlet and outlet assembly includes: a second connecting pipe and a second air inlet pipe; one end of the second connecting pipe is used to connect to the vacuum pumping device, the other end of the second connecting pipe is connected to the guide pipe, the second air inlet pipe is connected to the second connecting pipe, and a second air inlet port is provided on the second air inlet pipe; an air guide hole is provided on the counterweight, and the air guide hole is used to connect the connecting pipe with the pipe to be plated.

[0021] In one embodiment,

[0022] The first air inlet and outlet assembly further includes: a first pressure regulating valve and a first vacuum gauge, wherein the first pressure regulating valve is installed on the first air inlet pipeline, and the first vacuum gauge is connected to the first connecting pipeline;

[0023] The second air inlet and outlet assembly further includes: a second pressure regulating valve and a second vacuum gauge, wherein the second pressure regulating valve is installed on the second air inlet pipe, and the second vacuum gauge is connected to the second connecting pipe.

[0024] In one embodiment, it further includes: an electrical connection component, which includes: an insulating tube and a connecting wire; the connecting wire is inserted into the insulating tube, and one end of the insulating tube is connected to the conductor fixing piece, and the connecting wire is connected to the conductor fixing piece.

[0025] In one embodiment, the connection guide mechanism further includes: a first insulating member, which is arranged between the conductor fixing member and the connecting tube; the counterweight guide mechanism further includes: a second insulating member, which is arranged between the counterweight member and the guide tube.

[0026] In one embodiment, the conductor fixing member is further provided with at least two first locking screw holes connected to the first connecting through-hole, the at least two first locking screw holes are arranged opposite to each other, and the first locking screw holes are screwed with a first top screw to fix the cathode wire; the conductor fixing member is further provided with at least two second locking screw holes connected to the first connecting through-hole, the at least two second locking screw holes are arranged opposite to each other, and the second locking screw holes are screwed with a second top screw to fix the first shielding tube.

[0027] According to the magnetron sputtering coating device for the inner wall of a thin pipe of the above-mentioned embodiment, the two ends of the cathode filament are respectively connected to the connecting guide mechanism and the wire counterweight guide mechanism, and the coaxiality of the cathode filament and the slender pipe is maintained by the connecting guide mechanism and the counterweight guide mechanism to avoid the cathode filament contacting the slender pipe and causing a short circuit. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 A three-dimensional diagram of a magnetron sputtering coating device for the inner wall of a thin pipe provided in the present application;

[0029] Figure 2 A cross-sectional view of a magnetron sputtering coating device for the inner wall of a thin pipe provided in the present application;

[0030] Figure 3 for Figure 2 A local enlarged schematic diagram of the middle A;

[0031] Figure 4 for Figure 2 A local enlarged schematic diagram of point B in the middle. DETAILED DESCRIPTION

[0032] The present invention is further described in detail below by specific embodiments in conjunction with the accompanying drawings. Wherein similar elements in different embodiments adopt associated similar element numbers. In the following embodiments, many detailed descriptions are for making the present application better understood. However, those skilled in the art can easily recognize that some features can be omitted in different situations, or can be replaced by other elements, materials, methods. In some cases, some operations related to the present application are not shown or described in the specification, this is to avoid the core part of the present application being overwhelmed by too much description, and for those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations according to the description in the specification and the general technical knowledge in the art.

[0033] In addition, the features, operations or characteristics described in the specification can be combined in any appropriate manner to form various implementations. At the same time, the steps or actions in the method description can also be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the various sequences in the specification and the drawings are only for the purpose of clearly describing a certain embodiment and are not meant to be a required sequence, unless otherwise specified that a certain sequence must be followed.

[0034] The serial numbers of the components in this document, such as "first", "second", etc., are only used to distinguish the objects described and do not have any order or technical meaning. The "connection" and "coupling" mentioned in this application, unless otherwise specified, include direct and indirect connections (couplings).

[0035] The present application provides a magnetron sputtering coating device for the inner wall of a thin pipe, which can be used for magnetron sputtering coating of the inner wall of a slender pipe with a diameter less than 10 mm and a length greater than 500 mm. The connecting guide mechanism is connected to one end of the slender pipe, the counterweight guide mechanism is connected to the other end of the slender pipe, and the two ends of the cathode wire are respectively connected to the connecting guide mechanism and the wire counterweight guide mechanism, and the coaxiality of the cathode wire and the slender pipe is maintained by the connecting guide mechanism and the counterweight guide mechanism to avoid the phenomenon that the cathode wire contacts the slender pipe and causes a short circuit. In the following embodiments, the plated pipe is a slender pipe with a diameter less than 10 mm and a length greater than 500 mm.

[0036] See also Figure 1-Figure 4 As shown, the magnetron sputtering coating device for the inner wall of a thin pipe provided in this embodiment mainly includes: a connecting guide mechanism 10, a counterweight guide mechanism 20, a cathode wire 30 and a magnetic field generating mechanism 40. The connecting guide mechanism 10 is connected to one end of the plated pipe 100, the counterweight guide mechanism 20 is connected to the other end of the plated pipe 100, the cathode wire 30 is connected between the connecting guide mechanism 10 and the counterweight guide mechanism 20, the cathode wire 30 penetrates the inner wall of the plated pipe 100 along the axial direction of the plated pipe 100, and the magnetic field generating mechanism 40 is arranged on the outer side of the plated pipe 100, and the magnetic field generating mechanism 40 can be in the form of an electromagnet, a permanent magnet, etc., for generating a magnetic field parallel to the cathode wire 30. In this embodiment, the magnetic field generating mechanism 40 is a cylindrical magnetic field generating mechanism in a cylindrical shape, and the cylindrical magnetic field generating mechanism is sleeved on the outer side of the plated pipe 100.

[0037] In actual work, the interior of the plated pipe 100 is filled with sputtering gas (such as argon or xenon), and the entire device is kept in a vacuum environment. The cathode filament 30 is connected to the negative pole of the DC pulse power supply, and the positive pole of the DC pulse power supply is usually electrically grounded. Under the action of the magnetic field, the electrons present in the sputtering gas are accelerated away from the cathode filament 30, resulting in collisions with nearby sputtering gas atoms. These collisions cause electrostatic repulsion, which in turn leads to ionization. The positive sputtering gas atoms are accelerated toward the negatively charged cathode, resulting in high-energy collisions with the target surface (target material surface, target material refers to the plated material). Each of these collisions will cause the atoms on the target surface to be ejected into the vacuum environment with sufficient kinetic energy to reach the inner wall surface of the plated pipe 100, thereby completing magnetron sputtering.

[0038] The connection guide mechanism 10 includes: a connection tube 11, a conductor fixing member 12, and an insulating connector 13. The conductor fixing member 12 is arranged inside the connection tube 11, and the insulating connector 13 is arranged at one end of the connection tube 11, and the insulating connector 13 is connected to the conductor fixing member 12. A first connection through-hole 120 is provided inside the conductor fixing member 12, and a second connection through-hole 130 is provided inside the insulating connector 13. One end of the cathode wire 30 is passed through the first connection through-hole 120 and the second connection through-hole 130, and one end of the cathode wire 30 is fixed on the conductor fixing member 12. The insulating connector 13 is connected to one end of the plated pipe 100. One end of the cathode wire 30 fixed to the conductor fixing member 12 is connected to the negative pole of the power supply.

[0039] In one embodiment, the conductor fixing member 12 may be a block-shaped conductor fixing member, which is fixed inside the connecting tube 11. The insulating connector 13 may also be a block-shaped insulating connector, which is partially installed inside one end of the connecting tube 11 and connected to the conductor fixing member, and the remaining part of the block-shaped insulating connector is located outside one end of the connecting tube 11.

[0040] In another embodiment, the conductor fixing member 12 may be a conductor tube of a tubular structure, the inner tube of which is formed as a first connection through-hole 120. Similarly, the insulating connector 13 may also be an insulating tube of a tubular structure, the inner tube of which is formed as a second connection through-hole 130. The outer wall of the insulating tube fits the inner wall of the connecting tube 11, or the axial centerline of the insulating tube coincides with the axial centerline of the connecting tube 11. When the axial centerline of the insulating tube coincides with the axial centerline of the connecting tube 11, the axial centerline of the insulating tube is the axial centerline of the second connection through-hole 130. The cross section of the insulating tube is similar to a stepped pipe fitting, wherein the end of the stepped pipe fitting with a smaller diameter is inserted into the interior of the connecting tube 11, the end of the adjusting pipe fitting with a larger diameter is located outside the connecting tube 11, and the second connection through-hole 130 runs through the axial direction of the stepped pipe fitting.

[0041] The counterweight guide mechanism 20 includes: a guide tube 21 and a counterweight 22 ; the counterweight 22 is slidably disposed in the guide tube 21 , a fixing position 220 is provided on the counterweight 22 , and the other end of the cathode filament 30 is connected to the fixing position 220 .

[0042] The other end of the connecting tube 11 is used to connect one end of the plated pipe 100, and the guide tube 21 is used to connect the other end of the plated pipe 100. The cathode wire 30, the first connecting through hole 120, the second connecting through hole 130, the guide tube 21, and the fixing position 220 are all coaxial.

[0043] The other end of the connecting tube 11 is connected to one end of the plated pipe 100, and the guide tube 21 is connected to the other end of the plated pipe 100. To ensure the coaxiality between the cathode wire 30 and the first connecting through-hole 120, the second connecting through-hole 130, the guide tube 21, and the fixing position 220, the other end of the connecting tube 11 and one end of the plated pipe 100, and the guide tube 21 and the other end of the plated pipe 100 are connected by flanges. It can be understood that the flange set on the other end of the connecting tube 11, the flange set on one end of the guide tube 21, and the flanges set on both ends of the plated pipe 100 are kept coaxial with the first connecting through-hole 120, the second connecting through-hole 130, the guide tube 21, and the fixing position 220. At the same time, to ensure the sealing of the connection, a corresponding sealing structure, such as a sealing ring, can be set at the flange connection between the other end of the connecting tube 11 and one end of the plated pipe 100, and the guide tube 21 and the other end of the plated pipe 100. In this way, the connecting pipe 11 , the plated pipe 100 , and the guide pipe 21 are coaxial to ensure that the cathode wire 30 is coaxial with the plated pipe 100 , and the connecting pipe 11 , the guide pipe 21 and the plated pipe 100 are sealed and connected.

[0044] In this embodiment, the connection pipe 11, the guide pipe 21 and the plated pipe 100 are hard-connected. In other words, the connection pipe 11 and the guide pipe 21 are made of metal or other materials with a certain hardness, avoiding the use of corrugated pipes, which can improve the coaxiality. After the connection pipe 11 and the guide pipe 21 are respectively connected to the two ends of the plated pipe 100, the cathode wire 30 can maintain coaxiality with the plated pipe 100, and a negative voltage is provided to the cathode wire 30. In a preferred embodiment, a DC pulse negative voltage is provided to the cathode wire 30. During the discharge and expansion of the cathode wire 30, the counterweight 22 can straighten the cathode wire 30 to maintain the relative position of the cathode wire 30 and the plated pipe 100, which can avoid the cathode wire 30 from contacting the plated pipe 100, thereby avoiding the occurrence of short circuit, maintaining the uniformity of the electric field, and improving the discharge stability.

[0045] In this embodiment, Figure 3As shown, at least two first locking screw holes 121 are also provided on the conductor fixing member 12, each of which is connected to the first connecting through hole 120, and each of the first locking screw holes 121 is relatively arranged on the conductor fixing member 12, and a first top screw 122 is screwed into the first locking screw hole 121 to fix one end of the cathode wire 30. Specifically, four first locking screw holes 121 are provided on the conductor fixing member 12, and two of the first locking screw holes 121 are relatively arranged on opposite sides of the conductor fixing member 12. In other words, two of the first locking screw holes 121 are symmetrically arranged, and the cathode wire 30 is fixed by tightening one end of the cathode wire 30 with the first top screw 122. More specifically, the first top screw 122 screwed into each of the first locking screw holes 121 extends into the first connecting through hole 120 through the first locking screw hole 121 to the same depth, which can ensure that the cathode wire 30 is coaxial with the first connecting through hole 120.

[0046] In one embodiment, a connecting through hole may be correspondingly provided at the fixing position 220 of the counterweight 22, and four locking screw holes may also be opened on the counterweight 22. The locking screw holes are connected to the connecting through holes, and the other end of the cathode wire 30 is fixed by screwing the top screw in the locking screw hole.

[0047] like Figure 3 and Figure 4 As shown, the magnetron sputtering coating device for the inner wall of a thin pipe provided in this embodiment also includes: a first observation window assembly 50 and a second observation window assembly 50'. The first observation window assembly 50 can be used to observe the working status of one end of the cathode filament 30, and the second observation window assembly 50' can be used to observe the working status of the other end of the cathode filament 30.

[0048] like Figure 3 As shown, the first observation window assembly 50 includes: a first transition connecting pipe 51 and a first observation piece 52; the first transition connecting pipe 51 has a first transition connecting channel 510, and the first observation piece 52 has a first observation channel 520. The first observation piece 52 is connected to the first transition connecting pipe 51, and the first observation channel 520 is connected to the first transition connecting channel 510. The working status of one end of the cathode filament 30 in the first transition connecting channel 510 can be observed through the first observation channel 520.

[0049] like Figure 4As shown, the second observation window assembly 50' includes: a second transition connecting pipe 51' and a second observation piece 52'; the second transition connecting pipe 51' has a second transition connecting channel 510', the second observation piece 52' has a second observation channel 520', the second observation piece 52' is connected to the second transition connecting pipe 51', the second observation channel 520' is connected to the second transition connecting channel 510', and the working status of the other end of the cathode filament 30 in the second transition connecting channel 510' can be observed through the second observation channel 520'.

[0050] In some embodiments, the first observation window assembly 50 further includes: a first observation window, which is disposed in the first observation channel 520. The second observation window assembly 50' further includes: a second observation window, which is disposed in the second observation window channel 520'.

[0051] In this embodiment, one end of the first transition connecting pipe 51 is connected to the insulating connector 13, and the other end of the first transition connecting pipe 51 is used to connect to one end of the plated pipe 100; one end of the second transition connecting pipe 51' is connected to one end of the guide pipe 21, and the other end of the second transition connecting pipe 51' is used to connect to the other end of the plated pipe 100. In a preferred embodiment, the cathode filament 30 is coaxial with the first transition connecting pipe 51 and the second transition connecting pipe 51'.

[0052] Continue to see Figure 3 and Figure 4 As shown, the magnetron sputtering coating device for the inner wall of a thin pipe provided in this embodiment also includes: a first shielding tube 60 and a second shielding tube 60', the first shielding tube 60 is inserted into the first transition connection channel 510, the first connection through hole 120 and the second connection through hole 130, and the first shielding tube 60 is fixed on the conductor fixing member 12, and one end of the cathode wire 30 is inserted into the first shielding tube 60. The second shielding tube 60' is inserted into the second transition connection channel 510', and the second shielding tube 60' is fixedly connected to the counterweight 22. The other end of the cathode wire 30 is inserted into the second shielding tube 60'.

[0053] In one embodiment, at least two second locking screw holes 123 are further provided on the conductor fixing member 12, each second locking screw hole 123 is communicated with the first connection through hole 120, and each second locking screw hole 123 is relatively arranged on the conductor fixing member 12, and a second top screw is screwed in the second locking screw hole 123 to fix the first shielding tube 60. Specifically, two second locking screw holes 123 are provided on the conductor fixing member 12, and the two second locking screw holes 123 are relatively arranged on opposite sides of the conductor fixing member 12. In other words, the two second locking screw holes 123 are symmetrically arranged, and the first shielding tube 60 is fixed by tightening the first shielding tube 60 with the second top screw 124. More specifically, the second top screw 124 screwed in each second locking screw hole 123 extends into the first connection through hole 120 through the second locking screw hole 123 to the same depth, so that the cathode filament 30 is coaxial with the first shielding tube 60.

[0054] In this embodiment, the length of the first shielding tube 60 is greater than the length of the first transition connecting tube 51, and the two ends of the first shielding tube 60 extend to the outside of the two ends of the first transition connecting tube 51. Similarly, the length of the second shielding tube 60' is greater than the length of the second transition connecting tube 51', and the two ends of the second shielding tube 60' extend to the outside of the two ends of the second transition connecting tube 51'. The first transition connecting tube 51 and the second transition connecting tube 51' form a non-discharge area. The length of the first shielding tube 60 is greater than the length of the first transition connecting tube 51, and the length of the second shielding tube 60' is greater than the length of the second transition connecting tube 51', which can effectively shield the discharge and improve the discharge stability.

[0055] like Figure 1 and Figure 2 As shown, the magnetron sputtering coating device for the inner wall of a thin pipe provided in this embodiment also includes: a first air inlet and outlet component 70 and a second air inlet and outlet component 80, the first air inlet and outlet component 70 is connected to the other end of the connecting pipe 11, and the second air inlet and outlet component 80 is connected to the guide pipe 21, and air is respectively introduced into and out of the two ends of the pipe 100 to be plated through the first air inlet and outlet component 70 and the second air inlet and outlet component 80 to control the internal pressure of the pipe 100 to be plated, thereby ensuring the uniformity of film formation.

[0056] The first air inlet and outlet assembly 70 includes: a first connecting pipe 71 and a first air inlet pipe 72; one end of the first connecting pipe 71 is used to connect to a vacuum pumping device, and the interior of the plated pipe 100 is vacuumed by the vacuum pumping device, and the other end of the first connecting pipe 71 is connected to the connecting pipe 11, and the first air inlet pipe 72 is connected to the first connecting pipe 71. A first air inlet port 720 is opened on the first air inlet pipe 72, and gas is injected into the plated pipe 100 through the first air inlet port 720 to adjust the pressure at one end of the plated pipe 100.

[0057] In one embodiment, the first air inlet and outlet assembly 70 also includes: a first pressure regulating valve 73 and a first vacuum gauge 74. The first pressure regulating valve 73 is installed on the first air inlet pipe 72, and is used to adjust the pressure of the gas entering from the first air inlet 720. The first vacuum gauge 74 is connected to the first connecting pipe 71, and is used to detect the vacuum degree of the inside of the plated pipe 100 by the vacuum pumping device connected to the first connecting pipe 71.

[0058] The second air inlet and outlet assembly 80 includes: a second connecting pipe 81 and a second air inlet pipe 82; one end of the second connecting pipe 81 is used to connect to a vacuum pumping device, through which the interior of the plated pipe 100 is vacuumed, the other end of the second connecting pipe 81 is connected to the guide pipe 21, the second air inlet pipe 82 is connected to the second connecting pipe 81, and a second air inlet port 820 is opened on the second air inlet pipe 82, and gas is injected into the plated pipe 100 through the second air inlet port 820 to adjust the pressure at the other end of the plated pipe 100.

[0059] In this embodiment, in order to ensure the connectivity between the second connecting pipe 81 and the pipe to be plated 100, an air guide hole (not shown in the figure) is also provided on the counterweight 22. The air guide hole is used to connect the second connecting pipe 81 and the pipe to be plated 100, so as to ensure that gas is injected into the pipe to be plated 100 through the second air inlet 820 to adjust the pressure at the other end of the pipe to be plated 100.

[0060] In one embodiment, the second air inlet and outlet assembly 80 also includes: a second pressure regulating valve 83 and a second vacuum gauge 84. The second pressure regulating valve 83 is installed on the second air inlet pipe 82, and is used to adjust the pressure of the gas entering from the second air inlet 820. The second vacuum gauge 84 is connected to the second connecting pipe 81, and is used to detect the vacuum degree of the inside of the plated pipe 100 evacuated by the vacuum pumping device connected to the second connecting pipe 81.

[0061] See also Figure 3 As shown, the magnetron sputtering coating device for the inner wall of a thin pipe provided in this embodiment also includes: an electrical connection component 90, which includes: an insulating tube 91 and a connecting wire 92; one end of the insulating tube 81 is connected to the conductor fixing member 12, and the connecting wire 92 is passed through the insulating tube 91. The connecting wire 92 is connected to the conductor fixing member 12, and the connecting wire 92 can be externally connected to the negative pressure of a DC pulse power supply, thereby providing a DC pulse negative pressure to the cathode wire 30 through the connecting wire 92.

[0062] In this embodiment, the aforementioned connection guide mechanism 10 also includes: a first insulating member 14, which is arranged between the conductor fixing member 12 and the connecting tube 11; the aforementioned counterweight guide mechanism 20 also includes: a second insulating member 23, which is arranged between the counterweight member 22 and the guide tube 21.

[0063] To summarize, in the magnetron sputtering coating device for the inner wall of a thin pipe provided in the present application, the two ends of the cathode wire are respectively connected to the connecting guide mechanism and the wire counterweight guide mechanism, and the coaxiality of the cathode wire and the slender pipe is maintained by the connecting guide mechanism and the counterweight guide mechanism to avoid the cathode wire contacting the slender pipe and causing a short circuit.

[0064] The above specific examples are used to illustrate the present invention, which is only used to help understand the present invention and is not intended to limit the present invention. For those skilled in the art, according to the concept of the present invention, some simple deductions, modifications or substitutions can be made.

Claims

1. A magnetron sputtering coating device for the inner wall of a thin pipe, characterized in that: include: A connecting guide mechanism, a counterweight guide mechanism, a cathode wire and a magnetic field generating mechanism; the connecting guide mechanism comprises: a connecting tube, a conductor fixing member, and an insulating connecting member; the conductor fixing member is arranged inside the connecting tube, the insulating connecting member is arranged at one end of the connecting tube, and the insulating connecting member is connected to the conductor fixing member; a first connecting through hole is arranged inside the conductor fixing member, and a second connecting through hole is arranged inside the insulating connecting member, one end of the cathode wire is penetrated through the first connecting through hole and the second connecting through hole, and is fixed on the conductor fixing member; the counterweight guide mechanism comprises: a guide tube and a counterweight member; the counterweight member is slidably arranged in the guide tube, a fixing position is arranged on the counterweight member, and the other end of the cathode wire is connected to the fixing position; the other end of the connecting tube is used to connect one end of the plated pipe, and the guide tube is used to connect the other end of the plated pipe, and the magnetic field generating mechanism is arranged on the outside of the plated pipe, and is used to generate a magnetic field parallel to the cathode wire; the cathode wire, the first connecting through hole, the second connecting through hole, the guide tube, and the fixing position are all coaxial; Also includes: A first observation window assembly, the first observation window assembly comprising: a first transition connecting pipe and a first observation port; the first transition connecting pipe has a first transition connecting channel, the first observation member has a first observation channel, the first observation member is connected to the first transition connecting pipe, and the first observation channel is communicated with the first transition connecting channel; one end of the first transition connecting pipe is connected to the insulating connecting member, and the other end of the first transition connecting pipe is used to be connected to one end of the plated pipe; A second observation window assembly, the second observation window assembly comprises: a second transition connecting pipe and a second observation piece; the second transition connecting pipe has a second transition connecting channel, the second observation piece has a second observation channel, the second observation piece is connected to the second transition connecting pipe, and the second observation channel is communicated with the second transition connecting channel; one end of the second transition connecting pipe is connected to one end of the guide pipe, and the other end of the second transition connecting pipe is used to be connected to the other end of the plated pipe; It also includes: a first shielding tube is inserted into the first transition connection channel, the first connection through hole and the second connection through hole, and the first shielding tube is fixed on the conductor fixing member, and one end of the cathode wire is inserted into the first shielding tube; a second shielding tube, the second shielding tube is passed through the second transition connection channel, and the second shielding tube is fixedly connected to the counterweight; the other end of the cathode wire is passed through the second shielding tube; The length of the first shielding tube is greater than that of the first transition connecting tube, and both ends of the first shielding tube extend to the outside of both ends of the first transition connecting tube respectively; The length of the second shielding tube is greater than that of the second transition connecting tube, and both ends of the second shielding tube extend to the outside of both ends of the second transition connecting tube respectively.

2. The magnetron sputtering coating device for the inner wall of a thin pipe according to claim 1, characterized in that: The first observation window assembly further includes: a first observation window, the first observation window being disposed in the first observation channel; The second observation window assembly further includes: a second observation window, and the second observation window is arranged in the second observation channel.

3. The magnetron sputtering coating device for the inner wall of a thin pipe according to claim 1, characterized in that: Also includes: The first air inlet and outlet assembly comprises: a first connecting pipe and a first air inlet pipe; one end of the first connecting pipe is used to connect to the vacuum pumping device, the other end of the first connecting pipe is connected to the connecting pipe, the first air inlet pipe is connected to the first connecting pipe, and the first air inlet pipe is provided with a first air inlet; The second air inlet and outlet assembly includes: a second connecting pipe and a second air inlet pipe; one end of the second connecting pipe is used to connect to the vacuum pumping device, the other end of the second connecting pipe is connected to the guide pipe, the second air inlet pipe is connected to the second connecting pipe, and a second air inlet port is provided on the second air inlet pipe; an air guide hole is provided on the counterweight, and the air guide hole is used to connect the connecting pipe with the pipe to be plated.

4. The magnetron sputtering coating device for the inner wall of a thin pipe according to claim 3, characterized in that: The first air inlet and outlet assembly further includes: a first pressure regulating valve and a first vacuum gauge, wherein the first pressure regulating valve is installed on the first air inlet pipeline, and the first vacuum gauge is connected to the first connecting pipeline; The second air inlet and outlet assembly further includes: a second pressure regulating valve and a second vacuum gauge, wherein the second pressure regulating valve is installed on the second air inlet pipe, and the second vacuum gauge is connected to the second connecting pipe.

5. The magnetron sputtering coating device for the inner wall of a thin pipe according to claim 1, characterized in that: Also includes: An electrical connection assembly, the electrical connection assembly comprising: an insulating tube and a connecting wire; The connecting wire is passed through the insulating tube, and one end of the insulating tube is connected to the conductor fixing piece, and the connecting wire is connected to the conductor fixing piece.

6. The magnetron sputtering coating device for the inner wall of a thin pipe according to claim 1, characterized in that: The connection guide mechanism further includes: a first insulating member, which is arranged between the conductor fixing member and the connection tube; the counterweight guide mechanism further includes: a second insulating member, which is arranged between the counterweight member and the guide tube.

7. The magnetron sputtering coating device for the inner wall of a thin pipe according to claim 1, characterized in that: The conductor fixing member is also provided with at least two first locking screw holes connected to the first connecting through-hole, the at least two first locking screw holes are arranged opposite to each other, and the first locking screw hole is screwed with a first top screw to fix the cathode wire; the conductor fixing member is also provided with at least two second locking screw holes connected to the first connecting through-hole, the at least two second locking screw holes are arranged opposite to each other, and the second locking screw hole is screwed with a second top screw to fix the first shielding tube.

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