Testing Method, Server, and Storage Medium

Abstract

The present disclosure relates to the field of integrated circuit technologies, and provides a test method, a server, and a storage medium for semiconductor finished product detection. First, two non-overlapping scanning intervals for parameters to be determined are selected; and based on these two scanning intervals, different reference values are respectively determined; then, scanning is respectively performed starting from the different reference values until two target values that meet the preset threshold accuracy range of the reference values are obtained or the scanning ends; after the scanning ends, one of the different target values and the average value of the different target values is output as the scanning result of the parameter to be determined for this scan, where the preset threshold is the state trigger value of the parameter to be determined. Thus, it is possible to shorten the test time and significantly reduce the cost of the product test link while ensuring that the finished product test parameters meet the accuracy requirements in mass production.

Description

Technical Field

[0001] The present disclosure relates to the field of integrated circuit technologies, and particularly to a test method, a server, and a storage medium for semiconductor finished product detection. Background Art

[0002] In the prior art, many semiconductor packages need to be subjected to finished product testing. For example, for analog chips (such as comparators) with high-precision threshold flip, the testing of many parameters (such as flip threshold voltage) requires high-precision trimming. The consistency of parameters before trimming is poor, and a large range needs to be scanned for testing. At the same time, a small scanning step size is required for accurate testing for trimming calculation. The scanning test with a small step size and a large range takes a long time and accounts for a high proportion of the total test time.

[0003] Another example is the minimum output voltage drop Vdrop of a Low Dropout Regulator (LDO) (the so-called minimum output voltage drop is the voltage difference between the input voltage Vin and the output voltage Vout when the output voltage of the product is 98% of the actual output voltage of the product). Traditional analog LDOs (ALDOs) require an off-chip decoupling capacitor in the order of microfarads to obtain good ripple immunity and excellent transient response characteristics. With the development of system-in-package technology, high requirements are put forward for the power consumption and size of LDOs. In order to reduce the chip area and maintain good stability, ALDOs without off-chip capacitors require additional complex compensation networks. At the same time, with the continuous reduction of the CMOS process size and the increasing requirement for low power consumption, very large scale integration circuits (VLSIs) are even required to operate at a low voltage (0.5V) state, and this operating voltage close to the MOS transistor threshold voltage level cannot be directly obtained by measuring the product output. Therefore, in order to obtain these parameters of the product, the prior art often adopts a linear scanning method from high to low or from low to high, and observes the state change of the product to obtain these parameters.

[0004] The AWG function of existing test machines usually uses a dual ramp to implement two tests of coarse scanning and fine scanning; there is also a method of combining coarse scanning and fine scanning through programming: for example, using a loop statement structure to implement scanning with different step sizes and ranges, and jumping out of the loop after inversion. Although the above two methods reduce the test time relatively and maintain a certain test accuracy, they are still not the optimal solutions. It still causes certain difficulties for the yield testing of finished products in the mass production process, and the efficiency is low. Summary of the Invention

[0005] To solve the above technical problems, the present disclosure provides a test method, a server, and a storage medium for semiconductor finished product detection, which can shorten the test time and significantly reduce the cost of the product test link while ensuring that the test parameters of the finished products in mass production meet the accuracy requirements.

[0006] On the one hand, the present disclosure provides a test method for semiconductor finished product detection, which includes:

[0007] Select a first scanning range and a second scanning range of the parameter to be determined, where the first scanning range and the second scanning range do not overlap;

[0008] Based on the foregoing first scanning range and second scanning range, determine a first reference value and a second reference value for this scan;

[0009] Start scanning with the first reference value until a first target value at which the foregoing first reference value meets the preset threshold accuracy range is obtained or the scanning ends, and

[0010] Start scanning with the second reference value until a second target value at which the foregoing second reference value meets the preset threshold accuracy range is obtained or the scanning ends;

[0011] Obtain the foregoing first target value and second target value obtained when the scanning stops, and output one of the foregoing first target value, second target value, and their average value as the scanning result of the parameter to be determined for this scan,

[0012] wherein, the foregoing preset threshold is the state trigger value of the parameter to be determined.

[0013] Preferably, the step of starting scanning with the first reference value until a first target value at which the foregoing first reference value meets the preset threshold accuracy range is obtained or the scanning ends includes:

[0014] Compare the foregoing first reference value with the preset threshold as the starting value, stepwise adjust the upper limit value or lower limit value of the foregoing first scanning range according to the comparison result, and re-determine the first reference value for the next scan based on the adjusted first scanning range until a first target value at which the foregoing first reference value meets the foregoing preset threshold accuracy range is obtained or the scanning ends.

[0015] Preferably, the step of starting scanning with the second reference value until a second target value at which the foregoing second reference value meets the preset threshold accuracy range is obtained or the scanning ends includes:

[0016] Taking the foregoing second reference value as the starting value, compare it with the foregoing preset threshold value. According to the comparison result, stepwise adjust the upper limit value or the lower limit value of the foregoing second scanning interval, and re-determine the second reference value for the next scan based on the adjusted second scanning interval until the second target value whose foregoing second reference value meets the preset threshold accuracy range is obtained by scanning or the scanning ends.

[0017] Preferably, the foregoing semiconductor finished product is an integrated analog chip of the threshold switching type, then the parameter to be determined is the excitation signal input into the foregoing integrated analog chip, and the excitation signal is any one selected from voltage, current, frequency, and temperature;

[0018] Or, the foregoing semiconductor finished product is a transistor device, then the parameter to be determined is the conduction voltage or breakdown voltage characterizing the electrical characteristics of the foregoing transistor device.

[0019] Preferably, the absolute value of the difference between the lower limit value of the foregoing first scanning interval and the lower limit value of the foregoing second scanning interval is less than the first preset margin, and the absolute value of the difference between the upper limit value of the foregoing first scanning interval and the upper limit value of the foregoing second scanning interval is less than the second preset margin.

[0020] Preferably, the steps of selecting the foregoing first scanning interval and the second scanning interval of the parameter to be determined include:

[0021] Query the historical test data associated with the foregoing parameter to be determined in the database;

[0022] Select the upper limit value and the lower limit value of the foregoing first scanning interval of the parameter to be determined according to the foregoing historical test data; and

[0023] Select the upper limit value and the lower limit value of the foregoing second scanning interval of the parameter to be determined according to the foregoing historical test data.

[0024] Preferably, the foregoing first reference value is the median value of the upper limit value and the lower limit value of the foregoing first scanning interval during this scan,

[0025] And, the foregoing second reference value is the median value of the upper limit value and the lower limit value of the foregoing second scanning interval during this scan.

[0026] Preferably, the step of taking the foregoing first reference value as the starting value to compare with the preset threshold value and stepwise adjusting the upper limit value or the lower limit value of the foregoing first scanning interval according to the comparison result includes:

[0027] During the scanning process, obtain the first reference value obtained by scanning in real time and compare it with the foregoing preset threshold value:

[0028] If the aforementioned first reference value obtained by scanning is greater than the aforementioned preset threshold value, then the aforementioned first reference value of the current scan is used as the upper limit value of the aforementioned first scan interval for the next scan in the direction of decreasing signal value;

[0029] If the aforementioned first reference value obtained by scanning is less than the aforementioned preset threshold value, then the aforementioned first reference value of the current scan is used as the lower limit value of the aforementioned first scan interval for the next scan in the direction of increasing signal value.

[0030] Preferably, the condition for the end of the aforementioned scan is:

[0031] During the current scan, the test value obtained by scanning exceeds the upper limit value or the lower limit value of the aforementioned first scan interval initially determined during the scan, or

[0032] During consecutive scans, the number of scans exceeds the preset maximum number of loops.

[0033] Preferably, if the aforementioned semiconductor finished product is an integrated analog chip of the threshold switching type and the aforementioned parameter to be determined is a parameter with a hysteresis function, then the switching operation is released before applying an excitation signal to the integrated analog chip.

[0034] On the other hand, the present disclosure provides a server, including:

[0035] A processor;

[0036] A memory for storing one or more programs;

[0037] Wherein, when the one or more programs are executed by the aforementioned processor, the processor implements the test method as described above.

[0038] On the other hand, the present disclosure also provides a computer-readable storage medium, on which a computer program is stored, wherein when the program is executed by a processor, the test method as described above is implemented.

[0039] The beneficial effects of the present disclosure are as follows: A testing method, a server, and a storage medium for semiconductor finished product detection provided by the present disclosure first select a first scanning range and a second scanning range for the parameter to be determined, where the first scanning range and the second scanning range do not overlap; secondly, based on the aforementioned first scanning range and second scanning range, determine a first reference value and a second reference value for this scan; then start scanning with the first reference value as the starting value until a first target value where the aforementioned first reference value meets the preset threshold accuracy range is obtained or the scan ends, and start scanning with the second reference value as the starting value until a second target value where the aforementioned second reference value meets the preset threshold accuracy range is obtained or the scan ends; finally, obtain the aforementioned first target value and second target value obtained when the scanning stops, and output one of the aforementioned first target value, second target value, and their average value as the scanning result of the parameter to be determined for this scan, where the aforementioned preset threshold is the state trigger value of the parameter to be determined. Thus, this testing method not only effectively saves the scanning times and scanning time by using the scanning algorithm of the dichotomy method, can shorten the testing time and significantly reduce the cost of the product testing link while ensuring that the testing parameters of the finished products in mass production meet the accuracy requirements, but also dynamically sets the scanning range through the algorithm, that is, determines the target value (the first target value, the second target value, or their average value) that meets the preset threshold accuracy range by setting two (or more) non-overlapping scanning ranges, improving the fault tolerance and reliability of the parameter to be determined.

[0040] In addition, this testing method is universal for parameters of threshold inversion type and can effectively save the program development and debugging time for testing similar parameters. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Through the following description of the embodiments of the present disclosure with reference to the drawings, the above and other objects, features, and advantages of the present disclosure will become clearer.

[0042] Figure 1 FIG. 1 shows a schematic flowchart of a testing method for semiconductor finished product detection according to Embodiment 1 of the present disclosure;

[0043] Figure 2 shows Figure 1 FIG. 2 shows a schematic flowchart of the sub-steps of step S130 in the testing method shown;

[0044] Figure 3 FIG. 3 shows a schematic structural diagram of a server according to Embodiment 2 of the present disclosure. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0045] To facilitate the understanding of the present disclosure, the present disclosure will be described more comprehensively below with reference to the relevant drawings. Preferred embodiments of the present disclosure are shown in the drawings. However, the present disclosure can be implemented in different forms and is not limited to the embodiments described herein. On the contrary, these embodiments are provided to make the understanding of the content of the present disclosure more thorough and comprehensive.

[0046] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field to which the present disclosure belongs. The terms used in the specification of the present disclosure are only for the purpose of describing specific embodiments and are not intended to limit the present disclosure.

[0047] According to the related art, after semiconductor packaging, finished product testing is required. For example, for analog chips (such as comparators) with high-precision threshold inversion, many parameters (such as the inversion threshold voltage) need to be tested with high-precision trimming. The consistency of the parameters before trimming is poor, and a large range of scanning tests are required. At the same time, a small scanning step is required for accurate testing for trimming calculation. The scanning test with a small step and a large range takes a long time and accounts for a high proportion of the total test time.

[0048] At the same time, the AWG function of the existing test machine usually uses dual ramp to implement two tests of coarse scanning and fine scanning; there is also a method of combining coarse scanning and fine scanning through programming: for example, using a loop statement structure to implement scanning with different step sizes and ranges, and jumping out of the loop after inversion. Although the above two methods relatively reduce the test time and maintain a certain test accuracy, they are still not the optimal solutions. It still causes certain difficulties and low efficiency in the yield test of finished products during mass production.

[0049] Based on this, the test method, server, and storage medium provided by the present disclosure for semiconductor finished product detection can shorten the test time and significantly reduce the cost of the product test link while ensuring that the test parameters of the finished products in mass production meet the accuracy requirements.

[0050] Next, the present disclosure will be described in detail with reference to the drawings.

[0051] Embodiment 1:

[0052] Figure 1 The flowchart showing a test method for semiconductor finished product detection according to Embodiment 1 of the present disclosure is shown. Figure 2 Shown Figure 1 The flowchart of the sub-steps of step S130 in the shown test method is shown.

[0053] Refer to Figure 1 and Figure 2 , on the one hand, Embodiment 1 of the present disclosure provides a test method for semiconductor finished product detection, which includes:

[0054] Step S110: Select a first scanning range and a second scanning range for the parameter to be determined.

[0055] In step S110, the first scanning range and the second scanning range do not overlap. If the semiconductor finished product is an integrated analog chip of the threshold switching type, the parameter to be determined is the excitation signal input to the integrated analog chip, and the excitation signal is any one selected from voltage, current, frequency, and temperature; or, if the semiconductor finished product is a transistor device, the parameter to be determined is the on-voltage or breakdown voltage characterizing the electrical characteristics of the transistor device.

[0056] Further, if the semiconductor finished product is an integrated analog chip of the threshold switching type and the parameter to be determined is a parameter with a hysteresis function, the switching operation is released before the excitation signal is connected to the integrated analog chip.

[0057] Further, the absolute value of the difference between the lower limit value of the first scanning range and the lower limit value of the second scanning range is less than a first preset margin, and the absolute value of the difference between the upper limit value of the first scanning range and the upper limit value of the second scanning range is less than a second preset margin. Different scanning ranges determine different upper and lower limit values within different scanning ranges by designing the margin, define multiple reference values with non-overlapping multiple scanning ranges, and perform scans to find multiple target values, and use different target values as verification values for the target values that relatively meet the threshold accuracy standard, so as to realize the verification function of retest and improve the fault tolerance of the test.

[0058] Further, the selection of the first scanning range and the second scanning range for the parameter to be determined can be achieved, for example, by querying the historical test data associated with the parameter to be determined in the database;

[0059] Select the upper limit value and the lower limit value of the first scanning range of the parameter to be determined according to the foregoing historical test data; and select the upper limit value and the lower limit value of the second scanning range of the parameter to be determined according to the foregoing historical test data.

[0060] Step S120: Based on the foregoing first scanning range and second scanning range, determine a first reference value and a second reference value for the current scan.

[0061] In step S120, the foregoing first reference value is the median value of the upper limit value and the lower limit value of the first scanning range during this scan, and the foregoing second reference value is the median value of the upper limit value and the lower limit value of the second scanning range during this scan.

[0062] Further, the test method is a scan test method. Of course, the present disclosure is not limited thereto, and the test method can also be a stuck point test. It should be understood here that the stuck point test can perform a process similar to that in step S130 of the following scan test, only with different selected test data values. Moreover, the test speed of obtaining the target value by the stuck point test is faster and the time is shorter; while the accuracy of the threshold range corresponding to the target value obtained by the scan test is higher, which can meet the chip applications with higher requirements. In practice, different selections can be made with reference to the embodiments of the present disclosure.

[0063] Step S130: Start scanning with the first reference value until the first target value where the first reference value meets the preset threshold accuracy range is scanned or the scanning ends, and start scanning with the second reference value until the second target value where the second reference value meets the preset threshold accuracy range is scanned or the scanning ends.

[0064] In step S130, the aforementioned preset threshold is the state trigger value of the parameter to be determined. The specific operation steps of starting scanning with the first reference value until the first target value where the first reference value meets the preset threshold accuracy range is scanned or the scanning ends are as follows in sub-step S131:

[0065] Compare the first reference value with the preset threshold as the starting value, stepwise adjust the upper limit value or the lower limit value of the first scanning interval according to the comparison result, and re-determine the first reference value for the next scan based on the adjusted first scanning interval until the first target value where the first reference value meets the preset threshold accuracy range is scanned or the scanning ends.

[0066] Further, during the scanning process, the first reference value obtained by scanning is acquired in real time and compared with the aforementioned preset threshold:

[0067] If the obtained first reference value is greater than the preset threshold, then use the obtained first reference value of this scan as the upper limit value of the first scanning interval for the next scan in the direction of decreasing signal value;

[0068] If the obtained first reference value is less than the preset threshold, then use the obtained first reference value of this scan as the lower limit value of the first scanning interval for the next scan in the direction of increasing signal value.

[0069] And, the specific operation steps of starting scanning with the second reference value until the second target value where the second reference value meets the preset threshold accuracy range is scanned or the scanning ends are as follows in sub-step S132:

[0070] Compare the foregoing second reference value as the starting value with the foregoing preset threshold value, stepwise adjust the upper limit value or the lower limit value of the foregoing second scanning interval according to the comparison result, and re-determine the second reference value for the next scan based on the adjusted second scanning interval until the second target value that satisfies the preset threshold accuracy range is obtained by scanning or the scanning ends.

[0071] Further, during the scanning process, the second reference value obtained by scanning is acquired in real time and compared with the foregoing preset threshold value:

[0072] If the foregoing second reference value obtained by scanning is greater than the foregoing preset threshold value, then use the foregoing second reference value of the current scan as the upper limit value of the foregoing second scanning interval for the next scan in the direction of decreasing signal value;

[0073] If the foregoing second reference value obtained by scanning is less than the foregoing preset threshold value, then use the foregoing second reference value of the current scan as the lower limit value of the foregoing second scanning interval for the next scan in the direction of increasing signal value.

[0074] Further, the upper limit value and / or the lower limit value of the scanning interval during a certain scan process can be appropriately adjusted according to actual requirements. On the one hand, it improves the accuracy of the scanning test, and on the other hand, it improves the fault tolerance of the scanning algorithm, avoids repeated operations after the scanning stops, and saves scanning time.

[0075] Step S140: Acquire the foregoing first target value and second target value obtained when the scanning stops, and output one of the foregoing first target value, second target value and their average value as the scanning result of the current scan of the foregoing parameter to be determined.

[0076] In step S140, the condition for the foregoing scanning to end is: during the current scan process, the test value obtained by scanning exceeds the upper limit value or the lower limit value of the foregoing first scanning interval initially determined for the scan, or during consecutive scans, the number of scans exceeds the preset maximum number of loops. Initialize when the scanning stops and return to step S110 to re-determine the scanning interval and start scanning. And when the scanning process is normally completed and the foregoing first target value and second target value are obtained when the scanning stops, output one of the foregoing first target value, second target value and their average value as the scanning result of the current scan of the foregoing parameter to be determined.

[0077] Further, the obtained target value (or its average value) also includes the upper limit value and the lower limit value of the scanning interval corresponding to this target value for the current scan. When outputting this scanning result, use the upper limit value and the lower limit value of the corresponding scanning interval as the accuracy range of the parameter to be determined for this semiconductor finished product.

[0078] It is known that there are test errors when the test system applies stimuli (voltage, current, frequency, temperature, etc.) to the chip and measures these parameters. During the chip testing process, there is also system noise, resulting in a certain degree of randomness in the test results. By using two or more approximate values to confirm the flip result, when obtaining the aforementioned first target value and second target value at the stop of scanning, one of the two can be used as the output target value, and the other can be used as the verification value. It is also possible to use the average of the two as the output target value. This is not unique here, aiming to improve the fault tolerance and reliability of the test of the parameter to be determined.

[0079] Of course, it should be noted here that only two non-overlapping scanning intervals are schematically given in the embodiments of the present disclosure. It does not mean that there are exactly two non-overlapping scanning intervals. There can also be multiple. In actual applications, the appropriate number of scanning intervals can be selected according to the actual production cost and test efficiency considerations, as well as the accuracy requirements of the product for the parameter to be determined (flip threshold). There is no limit here.

[0080] In a specific embodiment, the threshold flip type of analog chip parameters has a similar test process. For example, for the enable pin EN, when VEN is greater than 2.056V, the VOUT pin outputs a high level, otherwise it outputs a low level. Another example is the overcurrent protection type parameter. When the output current is greater than 2.511A, the protection is activated, the current path is closed, the current value becomes zero, and the VI source voltage of the tester reaches the rail.

[0081] Here, a function type can be defined. The functions of this type will be used as the input parameters of the binary search (BinarySearch) fast scanning algorithm to achieve the generality of the test.

[0082] The input excitation function is defined as taking a double-precision floating-point number as the input parameter and returning a boolean value. When a value is input, if the function returns true, the preset threshold is greater than the test value (reference value), and the BinarySearch function will increase the lower limit value of the scanning interval. If it returns false, the preset threshold is less than the test value (reference value), and the BinarySearch function will decrease the upper limit value of the scanning interval.

[0083] The test method of the present disclosure can be applied to, for example, the UINX operating system and a test machine based on the 4070 programming platform. In this programming platform, a subroutine for performing parameter scanning by implementing the above method is configured. Then the main program fragments are as follows:

[0084]

[0085]

[0086]

[0087]

[0088]

[0089] Combining the above content, the testing method provided by the embodiments of the present disclosure determines the target value (the first target value, the second target value, or the average of the two) that meets the preset threshold accuracy range by setting two non-overlapping scanning intervals, improving the fault tolerance and reliability of the parameter to be determined. It can shorten the testing time and significantly reduce the cost of the product testing link while ensuring that the testing parameters of the finished products in mass production meet the accuracy requirements;

[0090] In addition, this testing method can select stuck-point testing or scanning testing, and is universal for parameters with threshold flipping, which can effectively save the program development and debugging time for testing similar parameters.

[0091] Embodiment 2

[0092] Figure 3 FIG. shows a schematic structural diagram of a server provided by Embodiment 2 of the present disclosure.

[0093] Reference Figure 3 , the present disclosure also presents a block diagram of an exemplary server suitable for implementing the embodiments of the present disclosure. It should be understood that Figure 3 the server shown is merely an example and should not impose any limitation on the functions and usage scope of the embodiments of the present disclosure.

[0094] As Figure 3 shown, the server 200 is presented in the form of a general-purpose computing device. The components of the server 200 may include, but are not limited to: one or more processors or processing units 210, a memory 220, and a bus 201 connecting different system components (including the memory 220 and the processing unit 210).

[0095] The bus 201 represents one or more of several types of bus structures, including a memory bus or a memory controller, a peripheral bus, a graphics acceleration port, a processor, or a local bus using any of the various bus structures. For example, these architectures include, but are not limited to, Industry Standard Architecture (ISA) bus, Micro Channel Architecture (MAC) bus, Enhanced ISA bus, Video Electronics Standards Association (VESA) local bus, and Peripheral Component Interconnect (PCI) bus.

[0096] The server 200 typically includes a variety of computer system-readable media. These media can be any available media accessible by the server 200, including volatile and non-volatile media, removable and non-removable media.

[0097] System memory 220 may include computer system readable media in the form of volatile memory, such as random access memory (RAM) 221 and / or cache memory 222. Server 200 may further include other removable / non-removable, volatile / non-volatile computer system storage media. By way of example only, storage system 223 may be used for reading and writing on non-removable, non-volatile magnetic media ( Figure 3 not shown, typically referred to as a "hard disk drive"). Although Figure 3 not shown in, a disk drive for reading and writing on removable non-volatile disks (such as a "floppy disk"), and an optical disk drive for reading and writing on removable non-volatile optical disks (such as CD-ROM, DVD-ROM or other optical media) may be provided. In these cases, each drive may be connected to bus 201 through one or more data media interfaces. Memory 220 may include at least one program product having a set (such as at least one) of program modules configured to perform the functions of the embodiments of the present disclosure.

[0098] A program / utility 224 having a set (at least one) of program modules 2241 may be stored, for example, in memory 220. Such program modules 2241 include, but are not limited to, an operating system, one or more application programs, other program modules, and program data. Each or some combination of these examples may include an implementation of a network environment. Program modules 2241 generally perform the functions and / or methods in the embodiments described in the embodiments of the present disclosure.

[0099] Further, server 200 may also be communicatively connected to a display 300 for displaying the scan results of the parameters to be determined. The display 300 may include, but is not limited to, a liquid crystal display (LCD), a light emitting diode (LED) display, and a plasma display. In some embodiments, the display 300 may also be a touch screen.

[0100] Further, the server 200 can also communicate with one or more devices that enable users to interact with the server 200, and / or communicate with any device (such as a network card, a modem, etc.) that enables the server 200 to communicate with one or more other computing devices. Such communication can be carried out through the input / output (I / O) interface 230. Moreover, the server 200 can also communicate with one or more networks (such as a local area network (LAN), a wide area network (WAN), and / or a public network, such as the Internet) through the network adapter 240. As shown in the figure, the network adapter 240 communicates with other modules of the server 200 through the bus 201. It should be understood that although not shown in the figure, other hardware and / or software modules can be used in combination with the server 200, including but not limited to: microcode, device drivers, redundant processing units, external disk drive arrays, RAID systems, tape drives, and data backup storage systems, etc.

[0101] The processing unit 210 executes various functional applications and data processing by running programs stored in the system memory 220, such as implementing the test method for semiconductor finished product detection provided in the first embodiment of the present disclosure.

[0102] Embodiment III

[0103] The third embodiment of the present disclosure also provides a computer-readable storage medium, on which a computer program (or computer-executable instructions) is stored. When the program is executed by a processor, it is used to execute the test method for semiconductor finished product detection provided in the first embodiment of the present disclosure. The method includes:

[0104] Select a first scanning interval and a second scanning interval for the parameter to be determined, and the first scanning interval and the second scanning interval do not overlap;

[0105] Based on the foregoing first scanning interval and second scanning interval, determine a first reference value and a second reference value for this scan;

[0106] Start scanning with the first reference value as the starting value until the first target value at which the foregoing first reference value meets the preset threshold accuracy range is obtained or the scanning ends, and start scanning with the second reference value as the starting value until the second target value at which the foregoing second reference value meets the preset threshold accuracy range is obtained or the scanning ends;

[0107] Obtain the foregoing first target value and second target value obtained when the scanning stops, and output one of the foregoing first target value, second target value, and their average value as the scanning result of the parameter to be determined for this scan,

[0108] Wherein, the foregoing preset threshold is the state trigger value of the parameter to be determined.

[0109] The computer storage medium of the embodiments of the present disclosure may adopt any combination of one or more computer-readable media. The computer-readable media may be computer-readable signal media or computer-readable storage media. The computer-readable storage media may be, for example, but not limited to, an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or any combination of the above. More specific examples (a non-exhaustive list) of the computer-readable storage media include: an electrical connection having one or more wires, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above. In the present disclosure, the computer-readable storage media may be any tangible medium that contains or stores a program, and the program may be used by or in combination with an instruction execution system, apparatus, or device.

[0110] The computer-readable signal media may include a data signal propagated in a baseband or as part of a carrier wave, which carries the computer-readable program code. Such a propagated data signal may take various forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination of the above. The computer-readable signal media may also be any computer-readable media other than the computer-readable storage media, and the computer-readable media may send, propagate, or transmit a program for use by or in combination with an instruction execution system, apparatus, or device.

[0111] The program code contained on the computer-readable media may be transmitted by any appropriate medium, including but not limited to wireless, wire, optical cable, RF, etc., or any suitable combination of the above.

[0112] The computer program code for performing the operations of the embodiments of the present disclosure may be written in one or more programming languages or combinations thereof. The programming languages include object-oriented programming languages (such as Java, Smalltalk, C++), and also include conventional procedural programming languages such as the "C" language or similar programming languages. The program code may be executed entirely on the user's computer, partially on the user's computer, executed as an independent software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In the case of a remote computer, the remote computer may be connected to the user's computer through any type of network - including a local area network (LAN) or a wide area network (WAN) - or may be connected to an external computer (for example, by using an Internet service provider to connect through the Internet).

[0113] It should be noted that in the description of the present disclosure, it is to be understood that the terms "upper", "lower", "inner", etc. indicating orientation or positional relationships are only for the convenience of describing the present disclosure and simplifying the description, rather than indicating or implying that the components or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present disclosure.

[0114] In addition, in this text, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, such that a process, method, article or device comprising a series of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "comprising one..." does not exclude the presence of additional identical elements in the process, method, article or device comprising the said element.

[0115] Finally, it should be noted that: Obviously, the above embodiments are merely examples given for clearly illustrating the present disclosure and are not limitations on the implementation manners. For those of ordinary skill in the art, other different forms of changes or modifications can be made on the basis of the above description. It is not necessary and impossible to enumerate all the implementation manners here. And the obvious changes or modifications derived therefrom are still within the protection scope of the present disclosure.

Claims

1. A testing method for semiconductor finished product inspection, comprising: selecting a first scanning range and a second scanning range of a parameter to be determined, where the first scanning range and the second scanning range do not overlap; determining a first reference value and a second reference value for the current scan based on the first scanning range and the second scanning range; starting the scan with the first reference value until a first target value where the first reference value meets a preset threshold accuracy range is obtained or the scan ends, and starting the scan with the second reference value until a second target value where the second reference value meets the preset threshold accuracy range is obtained or the scan ends; obtaining the first target value and the second target value obtained when the scan stops, and outputting one of the first target value, the second target value, and their average value as the scan result of the parameter to be determined for the current scan, wherein the preset threshold is a state trigger value of the parameter to be determined, wherein the step of starting the scan with the first reference value until a first target value where the first reference value meets a preset threshold accuracy range is obtained or the scan ends includes: comparing the first reference value with the preset threshold as the starting value, stepwise adjusting the upper limit value or the lower limit value of the first scanning range according to the comparison result, and re-determining the first reference value for the next scan based on the adjusted first scanning range until a first target value where the first reference value meets the preset threshold accuracy range is obtained or the scan ends, the step of starting the scan with the second reference value until a second target value where the second reference value meets the preset threshold accuracy range is obtained or the scan ends includes: comparing the second reference value with the preset threshold as the starting value, stepwise adjusting the upper limit value or the lower limit value of the second scanning range according to the comparison result, and re-determining the second reference value for the next scan based on the adjusted second scanning range until a second target value where the second reference value meets the preset threshold accuracy range is obtained or the scan ends.

2. The testing method according to claim 1, wherein, if the semiconductor finished product is an integrated analog chip of the threshold inversion type, the parameter to be determined is an excitation signal input to the integrated analog chip, and the excitation signal is any one selected from voltage, current, frequency, and temperature; or, if the semiconductor finished product is a transistor device, the parameter to be determined is the turn-on voltage or breakdown voltage characterizing the electrical characteristics of the transistor device.

3. The testing method according to claim 1, wherein, the absolute value of the difference between the lower limit value of the first scanning range and the lower limit value of the second scanning range is less than a first preset margin, and the absolute value of the difference between the upper limit value of the first scanning range and the upper limit value of the second scanning range is less than a second preset margin.

4. The testing method according to claim 3, wherein, the step of selecting the first scanning range and the second scanning range of the parameter to be determined includes: querying historical test data associated with the parameter to be determined in a database; Selecting an upper limit value and a lower limit value of a first scanning interval of the parameter to be determined according to the historical test data; and An upper limit value and a lower limit value of a second scanning interval of the parameter to be determined are selected according to the historical test data.

5. The testing method according to claim 1, in, The first reference value is a median value between an upper limit value and a lower limit value of the first scanning interval during the current scanning. Furthermore, the second reference value is a median value between an upper limit value and a lower limit value of the second scanning interval during the current scanning.

6. The test method according to claim 5, in, The step of taking the first reference value as a starting value and comparing it with a preset threshold value, and adjusting the upper limit value or the lower limit value of the first scanning interval stepwise according to the comparison result comprises: During the scanning process, the first reference value obtained by scanning is obtained in real time, and compared with the preset threshold value: If the first reference value obtained by scanning is greater than the preset threshold value, the first reference value of the current scan is used as the upper limit value of the first scanning interval in the next scan in the direction of decreasing the signal value; If the first reference value obtained by scanning is less than the preset threshold value, the first reference value of this scanning is used as the lower limit value of the first scanning interval in the next scanning in the direction of increasing signal value.

7. The testing method according to claim 1, in, The conditions for the end of the scan are: During this scanning process, the test value obtained by scanning exceeds the upper limit or lower limit of the first scanning interval initially determined by scanning, or During continuous scanning, the number of scans exceeds the preset maximum number of cycles.

8. The testing method according to claim 2, in, The semiconductor product is an integrated analog chip of a threshold flip type, and the parameter to be determined is a parameter with a hysteresis function, and the flip operation is released before the integrated analog chip is connected to an excitation signal.

9. A server, include: processor; A memory for storing one or more programs; When the one or more programs are executed by the processor, the processor implements the testing method as claimed in any one of claims 1 to 8.

10. A computer-readable storage medium having a computer program stored thereon, in, When the program is executed by a processor, the testing method according to any one of claims 1 to 8 is implemented.

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