Optics

Abstract

In an optical device, a base and a movable part are composed of a semiconductor substrate having a first semiconductor layer, an insulating layer and a second semiconductor layer in order from one side in a specified direction. The base is composed of a first semiconductor layer, an insulating layer and a second semiconductor layer. The movable part has a configuration part composed of a second semiconductor layer. The optical functional part is configured on a surface of one side of the configuration part. The first semiconductor layer constituting the base is thicker than the second semiconductor layer constituting the base. The surface of one side of the base is located on one side closer to the optical functional part. Each of the multiple elastic support parts has: a lever; a first torsion support part connected between the lever and the base; and a second torsion support part connected between the lever and the movable.

Description

[0001] This application is filed on July 6, 2018 、Application No. 201880041551.9 、The name of the invention is Reflector unit A divisional application for a patent application. Technical Field

[0002] The present invention relates to optical devices. Background Art

[0003] Optical devices are known that form an interference optical system on an SOI (Silicon On Insulator) substrate based on MEMS (Micro Electro Mechanical Systems) technology (for example, see Patent Document 1). Such optical devices have attracted attention because they can provide FTIR (Fourier Transform Infrared Spectrometer) that realizes a high-precision optical configuration.

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application No. 2012-524295 Summary of the invention

[0007] Problems to be solved by the invention

[0008] In the optical device as described above, the movable mirror constituting the interference optical system moves along the main surface of the SOI substrate. In contrast, in order to realize the enlargement of the reflective mirror surface of the movable reflective mirror, it is considered to adopt a structure in which the movable reflective mirror moves in a direction perpendicular to the main surface of the SOI substrate. However, only adopting such a structure cannot fully protect the reflective mirror surface, and there is a problem of reduced reliability as a device.

[0009] An object of one aspect of the present invention is to provide an optical device with high reliability.

[0010] Methods used to solve problems

[0011] An optical device according to one aspect of the present invention includes: a substrate having a main surface; a movable portion supported on the substrate in a manner capable of moving along a specified direction intersecting the main surface; and an optical functional portion arranged on the movable portion, the substrate and the movable portion being composed of a semiconductor substrate having a first semiconductor layer, an insulating layer and a second semiconductor layer in sequence from one side in the specified direction, the substrate being composed of a first semiconductor layer, an insulating layer and a second semiconductor layer, the movable portion having a configuration portion composed of a second semiconductor layer, the optical functional portion being arranged on a surface on one side of the configuration portion, the first semiconductor layer constituting the substrate being thicker than the second semiconductor layer constituting the substrate, and the surface on one side of the substrate being located closer to the optical functional portion.

[0012] In the optical device, the surface of one side of the substrate is located on one side of the optical function part. Thus, the substrate can be used to protect the optical function part, for example, it is possible to suppress damage to the optical function part due to direct contact during transportation. Further, in the optical device, the first semiconductor layer constituting the substrate is thicker than the second semiconductor layer constituting the substrate. Thus, the protrusion amount of the substrate relative to the optical function part can be ensured, and the optical function part can be effectively protected by the substrate. Thus, according to the optical device, reliability can be improved.

[0013] The structure may also be as follows: the movable part further includes a beam part arranged around the optical functional part, the beam part is composed of a first semiconductor layer and an insulating layer arranged on the second semiconductor layer, and an end face of one side of the beam part is located on one side of the optical functional part. In this case, the optical functional part can also be protected by the beam part. Furthermore, the deformation of the movable part during movement can also be suppressed by the beam part.

[0014] The beam portion may also be arranged on the surface of one side of the configuration portion in a manner extending along the outer edge of the configuration portion when viewed from a predetermined direction. In this case, the beam portion can be arranged near the optical function portion, and the optical function portion can be more effectively protected. Furthermore, since the beam portion is arranged on the configuration portion, deformation of the configuration portion can be more appropriately suppressed.

[0015] The movable part may also include a frame portion surrounding the configuration part when viewed from a specified direction and a connecting portion connecting the configuration part and the frame portion to each other, the frame portion and the connecting portion are composed of a second semiconductor layer, and the beam portion is configured on the surface of one side of the frame portion in a manner extending along the frame portion when viewed from a specified direction.

[0016] In this case, the optical function portion can be more effectively protected by the beam portion. Furthermore, the deformation of the frame portion can be suppressed by the beam portion, and deformation of the arrangement portion caused by the deformation of the frame portion can be suppressed.

[0017] The first semiconductor layer constituting the beam may be thinner than the first semiconductor layer constituting the base. In this case, the beam can be prevented from protruding from the base during the movement of the movable portion, and the amount of movement of the movable portion in a predetermined direction can be increased.

[0018] The optical device of one aspect of the present invention may also be configured as follows: the optical device further comprises an electrode pad provided on the substrate, the electrode pad being arranged on the surface of one side of the second semiconductor layer in an opening formed on the surface of one side of the first semiconductor layer so as to reach the second semiconductor layer, and the substrate having a groove portion formed on the surface of one side of the first semiconductor layer so as to reach the second semiconductor layer and extending so as to surround the opening when viewed from a predetermined direction. In this case, the electrical insulation of the electrode pad can be achieved by utilizing the groove portion, and reliability can be further improved.

[0019] The electrode pad can also extend across the bottom and side surfaces of the opening. In this case, a large-area electrode pad can be realized.

[0020] Alternatively, the electrode pad and the optical function part may be formed of metal layers, respectively, and the metal layer forming the electrode pad is thicker than the metal layer forming the optical function part. In this case, deformation of the optical function part can be suppressed and electrical connection to the electrode pad can be achieved.

[0021] A reflector unit according to one aspect of the present invention comprises: the above-mentioned optical device; an optical functional component arranged on the other side of a specified direction relative to the optical device; and a fixed reflector arranged on the other side relative to the optical functional component, wherein the optical functional portion is a reflector surface which constitutes the movable reflector together with the movable portion, and the optical device is provided with a first light passing portion which constitutes the first part of the optical path between a beam splitter unit and the fixed reflector, wherein the beam splitter unit, the movable reflector and the fixed reflector constitute an interference optical system, and the optical functional component is provided with a second light passing portion which constitutes the second part of the optical path between the beam splitter unit and the fixed reflector, and the second light passing portion corrects the optical path difference generated between the optical path between the beam splitter unit and the movable reflector and the optical path between the beam splitter unit and the fixed reflector.

[0022] In the reflector unit, reliability can be improved based on the above reasons. In addition, by improving the second light passing portion of the optical functional component, the optical path length difference between the optical path between the beam splitter unit and the movable reflector and the optical path between the beam splitter unit and the fixed reflector can be corrected. Further, in the reflector unit, the reflector surface is arranged near the optical functional component. Such a structure is particularly effective when the optical path length difference is corrected by using the second light passing portion of the optical functional component.

[0023] Effects of the Invention

[0024] According to one aspect of the present invention, it is possible to provide an optical device with high reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 is a cross-sectional view of an optical assembly according to one embodiment.

[0026] Figure 2 yes Figure 1 A top view of the reflector unit is shown.

[0027] Figure 3 is along Figure 2 A cross-sectional view of the reflector unit along line III-III is shown.

[0028] Figure 4 is along Figure 2 A cross-sectional view of the mirror unit along line IV-IV is shown.

[0029] Figure 5 is along Figure 2 A schematic cross-sectional view of the mirror device along line VV is shown.

[0030] Figure 6 yes Figure 2 A partial enlarged view of the reflector device is shown.

[0031] Figure 7 yes Figure 2 A top view of the optical functional component shown.

[0032] Figure 8 is along Figure 1 A cross-sectional view of the optical assembly along line VIII-VIII is shown.

[0033] Fig. 9 is along Figure 1 A cross-sectional view of the optical assembly along line IX-IX is shown.

[0034] Fig.10 yes Figure 1 A schematic cross-sectional view of a mirror unit and a beam splitter unit is shown.

[0035] Fig.11 is along Figure 2 A schematic cross-sectional view of the mirror device along line XI-XI is shown. DETAILED DESCRIPTION

[0036] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In addition, the same reference numerals are given to the same or corresponding parts in each figure, and the overlapping parts are omitted.

[0037] [Structure of optical components]

[0038] like Figure 1As shown, the optical component 1 includes a reflector unit 2, a beam splitter unit 3, a light incident portion 4, a first light detector 6, a second light source 7, a second light detector 8, a support body 9, a first support structure 11 and a second support structure 12. The reflector unit 2 is arranged on one side of the support body 9 in the Z-axis direction (predetermined direction, first direction), for example, mounted on the support body 9 by an adhesive. The support body 9 is formed of, for example, copper tungsten, for example, in the shape of a rectangular plate. The reflector unit 2 includes a movable reflector 22 that moves along the Z-axis direction and a fixed reflector 16 whose position is fixed (details will be described later). In addition, the Z-axis direction is, for example, a vertical direction, and one side in the Z-axis direction is, for example, an upper side.

[0039] The beam splitter unit 3 is arranged on one side of the reflector unit 2 in the Z-axis direction and supported by the first support structure 11. The first support structure 11 is mounted on the support body 9, for example, by an adhesive. The light incident portion 4 is arranged on one side of the beam splitter unit 3 in the X-axis direction (a third direction perpendicular to the first direction) and supported by the second support structure 12. The first photodetector 6, the second light source 7, and the second photodetector 8 are arranged on one side of the beam splitter unit 3 in the Z-axis direction and supported by the second support structure 12. The second support structure 12 is mounted on the support body 9, for example, by bolts.

[0040] In the optical unit 1, the beam splitter unit 3, the movable mirror 22 and the fixed mirror 16 form interference optical systems for the measuring light L0 and the laser light L10. The interference optical systems for the measuring light L0 and the laser light L10 are, for example, Michelson interference optical systems.

[0041] Regarding the measuring light L0, the interference light L1 of the measuring light is detected as follows. That is, when the measuring light L0 incident from the first light source (not shown) via the measuring object (not shown) or the measuring light L0 emitted from the measuring object (for example, the light emitted by the measuring object itself, etc.) enters the beam splitter unit 3 from the light incident portion 4, the measuring light L0 is split into a part and a remaining part in the beam splitter unit 3. Moreover, a part of the measuring light L0 is reflected by the movable reflector 22 that reciprocates in the Z-axis direction and returns to the beam splitter unit 3. On the other hand, the remaining part of the measuring light L0 is reflected by the fixed reflector 16 and returns to the beam splitter unit 3. The part of the measuring light L0 that has returned to the beam splitter unit 3 and the remaining part are emitted from the beam splitter unit 3 as the interference light L1, and the interference light L1 of the measuring light is detected by the first light detector 6.

[0042] For the laser L10, the interference light L11 of the laser is detected as follows. That is, when the laser L10 emitted from the second light source 7 is incident on the beam splitter unit 3, the laser L10 is split into a part and a remaining part in the beam splitter unit 3. Moreover, a part of the laser L10 is reflected by the movable reflector 22 that reciprocates along the Z-axis direction and returns to the beam splitter unit 3. On the other hand, the remaining part of the laser L10 is reflected by the fixed reflector 16 and returns to the beam splitter unit 3. The part and the remaining part of the laser L10 that have returned to the beam splitter unit 3 are emitted from the beam splitter unit 3 as interference light L11, and the interference light L11 of the laser is detected by the second light detector 8.

[0043] According to the optical unit 1, the position of the movable reflector 22 in the Z-axis direction can be calculated based on the detection result of the laser interference light L11, and the spectrum analysis of the measurement object can be performed based on the position measurement result and the detection result of the measurement light interference light L1.

[0044] [Structure of the reflector unit]

[0045] like Figure 2 , Figure 3 and Figure 4 As shown, the mirror unit 2 includes a mirror device (optical device) 20, an optical function component 13, a fixed mirror 16, and a stress relaxation substrate 17. The mirror device 20 includes a base 21, a movable mirror 22, and a drive unit 23.

[0046] The substrate 21 has a first surface 21a (a surface on one side in the Z-axis direction) and a second surface 21b on the opposite side to the first surface 21a. The first surface 21a and the second surface 21b are respectively the main surfaces of the substrate 21. The substrate 21 is, for example, in the shape of a rectangular plate, for example, having a size of about 10 mm×15 mm×0.35 mm (thickness). The movable reflector 22 has a reflector surface (optical function portion) 22a and a movable portion 22b provided with the reflector surface 22a. The movable reflector 22 (movable portion 22b) is supported on the substrate 21 in a manner that allows it to move in the Z-axis direction (a predetermined direction perpendicular to the first surface) perpendicular to the first surface 21a. The drive portion 23 moves the movable reflector 22 in the Z-axis direction.

[0047] The reflector device 20 is provided with a pair of light passage openings 24 and 25. The pair of light passage openings 24 and 25 are arranged on both sides of the movable reflector 22 in the X-axis direction. The light passage opening (first light passage portion) 24 constitutes the first part of the optical path between the beam splitter unit 3 and the fixed reflector 16. In addition, in the present embodiment, the light passage opening 25 does not function as a light passage opening.

[0048] Here, refer to Figure 2 , Figure 5 and Figure 6 The structure of the reflector device 20 is described in detail. Figure 5 yes Figure 3 The schematic cross-sectional view of the reflector device 20 is shown in FIG. Figure 5 , for example, the mirror device 20 is schematically shown in a state where the size in the Z-axis direction is enlarged compared to the actual size.

[0049] The base 21, the movable part 22b of the movable reflector 22 and the driving part 23 are composed of an SOI (Silicon On Insulator) substrate (semiconductor substrate) 100. That is, the reflector device 20 is composed of the SOI substrate 100. The reflector device 20 is formed in the shape of a rectangular plate, for example. The SOI substrate 100 has a support layer 101, a device layer 102 and an intermediate layer 103. The support layer 101 is a first silicon layer (first semiconductor layer). The device layer 102 is a second silicon layer (second semiconductor layer). The intermediate layer 103 is an insulating layer arranged between the support layer 101 and the device layer 102. The SOI substrate 100 has a support layer 101, an intermediate layer 103 and a device layer 102 in this order from one side in the Z-axis direction.

[0050] The substrate 21 is composed of a supporting layer 101, a device layer 102, and a portion of an intermediate layer 103. The first surface 21a of the substrate 21 is the surface of the supporting layer 101 on the opposite side to the intermediate layer 103. The second surface 21b of the substrate 21 is the surface of the device layer 102 on the opposite side to the intermediate layer 103. The supporting layer 101 constituting the substrate 21 is thicker than the device layer 102 constituting the substrate 21. The thickness of the supporting layer 101 constituting the substrate 21 is, for example, about 4 times the thickness of the device layer 102 constituting the substrate 21. In the reflector unit 2, as described later, the second surface 21b of the substrate 21 and the third surface 13a of the optical functional component 13 are bonded to each other (see Figure 3 and Figure 4 ).

[0051] The movable reflector 22 is arranged with the intersection of the axis R1 and the axis R2 as the center position (center of gravity position). The axis R1 is a straight line extending in the X-axis direction. The axis R2 is a straight line extending in the Y-axis direction (the second direction perpendicular to the first direction and the third direction). When viewed from the Z-axis direction, the portion of the reflector device 20 other than the portion overlapping with the sixth surface 21d of the substrate 21 described later is linearly symmetrical about the axis R1 and the axis R2.

[0052] The movable reflector 22 (movable part 22b) has a configuration part 221, a frame part 222, a pair of connecting parts 223 and a beam part 224. The configuration part 221, the frame part 222 and the pair of connecting parts 223 are composed of a part of the device layer 102. The configuration part 221 is circular when viewed from the Z-axis direction. The configuration part 221 has a central part 221a and an outer edge part 221b. On a surface 221as on one side of the central part 221a in the Z-axis direction, a reflector surface 22a is provided, for example, by forming a metal film (metal layer). The reflector surface 22a extends perpendicularly to the Z-axis direction and is circular. The surface 221as of the central part 221a is a surface on the intermediate layer 103 side of the device layer 102. The reflector surface 22a is located on the other side of the substrate 21 in the Z-axis direction than the first surface 21a. In other words, the first surface 21a is located on the side of the reflector surface 22a in the Z-axis direction. The outer edge portion 221 b surrounds the central portion 221 a when viewed from the Z-axis direction.

[0053] The frame portion 222 extends in an annular shape so as to surround the configuration portion 221 with a predetermined interval therebetween when viewed in the Z-axis direction. The frame portion 222 is, for example, an annular shape when viewed in the Z-axis direction. A pair of connecting portions 223 connect the configuration portion 221 and the frame portion 222 to each other. The pair of connecting portions 223 are arranged on both sides of the configuration portion 221 in the Y-axis direction.

[0054] The beam portion 224 is composed of a support layer 101 and an intermediate layer 103 arranged on the device layer 102. The beam portion 224 is arranged around the mirror surface 22a. The beam portion 224 has an inner beam portion 224a, an outer beam portion 224b and a pair of connecting beam portions 224c. The inner beam portion 224a is arranged on the surface of one side of the outer edge portion 221b in the Z-axis direction. The inner beam portion 224a surrounds the mirror surface 22a when viewed from the Z-axis direction. For example, the outer edge of the inner beam portion 224a extends along the outer edge of the configuration portion 221 at a predetermined interval when viewed from the Z-axis direction. The inner edge of the inner beam portion 224a extends along the outer edge of the mirror surface 22a at a predetermined interval when viewed from the Z-axis direction. An end surface 224as on one side in the Z-axis direction of the inner beam portion 224a is located on the Z-axis direction side relative to the reflection mirror surface 22a.

[0055] The outer beam portion 224b is arranged on the surface of one side in the Z-axis direction of the frame portion 222. The outer beam portion 224b surrounds the inner beam portion 224a when viewed from the Z-axis direction, and further surrounds the reflective mirror surface 22a. For example, the outer edge of the outer beam portion 224b extends along the outer edge of the frame portion 222 at a predetermined interval from the outer edge of the frame portion 222 when viewed from the Z-axis direction. The inner edge of the outer beam portion 224b extends along the inner edge of the frame portion 222 at a predetermined interval from the inner edge of the frame portion 222 when viewed from the Z-axis direction. The end surface 224bs of the outer beam portion 224b on one side in the Z-axis direction is located on the Z-axis side of the reflective mirror surface 22a.

[0056] The pair of connecting beams 224c are respectively arranged on the surface of one side in the Z-axis direction of the pair of connecting parts 223. Each connecting beam 224c connects the inner beam 224a and the outer beam 224b to each other. The end surface 224cs on one side in the Z-axis direction of the connecting beam 224c is located on the Z-axis side of the reflecting mirror surface 22a.

[0057] The thickness of the inner beam 224a, the outer beam 224b, and the connecting beams 224c in the Z-axis direction are equal to each other. That is, the thickness of the support layer 101 constituting the inner beam 224a, the outer beam 224b, and the connecting beams 224c is equal to each other. The end surface 224as of the inner beam 224a, the end surface 224bs of the outer beam 224b, and the end surface 224cs of the connecting beams 224c are located on the same plane perpendicular to the Z-axis direction. The support layer 101 constituting the inner beam 224a, the outer beam 224b, and the connecting beams 224c is thinner than the support layer 101 constituting the base 21. Therefore, the end surfaces 224as, 224bs, and 224cs are located on the side of the base 21 closer to the Z-axis direction than the first surface 21a. In other words, the first surface 21 a is located on the other side in the Z-axis direction relative to the end surfaces 224as , 224bs , and 224cs .

[0058] When viewed from the Z-axis direction, the width of the outer beam portion 224b is wider than the width of the inner beam portion 224a. The width of the inner beam portion 224a when viewed from the Z-axis direction is the length of the inner beam portion 224a in the direction perpendicular to the extension direction of the inner beam portion 224a, and in the present embodiment, is the length of the inner beam portion 224a in the radial direction of the inner beam portion 224a. This is also true for the width of the outer beam portion 224b when viewed from the Z-axis direction. The width of each connecting beam portion 224c is greater than the width of each of the inner beam portion 224a and the outer beam portion 224b. The width of each connecting beam portion 224c is the length of each connecting beam portion 224c along the extension direction of the inner beam portion 224a.

[0059] The driving portion 23 includes a first elastic supporting portion 26 , a second elastic supporting portion 27 , and an actuator portion 28 . The first elastic supporting portion 26 , the second elastic supporting portion 27 , and the actuator portion 28 are formed by a part of the device layer 102 .

[0060] The first elastic support portion 26 and the second elastic support portion 27 are respectively connected between the base 21 and the movable mirror 22. The first elastic support portion 26 and the second elastic support portion 27 support the movable mirror 22 (movable portion 22b) so that the movable mirror 22 can move in the Z-axis direction.

[0061] The first elastic support portion 26 has a pair of levers 261, a first connecting member 262, a second connecting member 263, a pair of beam members 264, an intermediate member 265, a pair of first torsion bars (first torsion support portions) 266, a pair of second torsion bars (second torsion support portions) 267, a pair of nonlinear buffer springs 268 and a plurality of electrode support portions 269.

[0062] A pair of levers 261 are arranged on both sides of the light passage opening 24 in the Y-axis direction and face each other in the Y-axis direction. Each lever 261 is in the shape of a plate extending along a plane perpendicular to the Z-axis direction. Each lever 261 has a first portion 261a, a second portion 261b arranged on the opposite side of the movable reflector 22 relative to the first portion 261a, and a third portion 261c connected to the first portion 261a and the second portion 261b. The first portion 261a and the second portion 261b extend in the X-axis direction. The length of the first portion 261a in the X-axis direction is shorter than the length of the second portion 261b in the X-axis direction. The third portion 261c of the pair of levers 261 extends obliquely in a manner that they are separated from each other as they are farther away from the movable reflector 22.

[0063] The first connecting member 262 is mounted between the first end portions 261d of the pair of levers 261 on the opposite side to the movable reflector 22. The first connecting member 262 is in the shape of a plate extending along a plane perpendicular to the Z-axis direction, and extends in the Y-axis direction. The second connecting member 263 is mounted between the second end portions 261e of the pair of levers 261 on the movable reflector 22 side. The second connecting member 263 is in the shape of a plate extending along a plane perpendicular to the Z-axis direction, and extends in the Y-axis direction. The width of the second connecting member 263 in the X-axis direction is narrower than the width of the first connecting member 262 in the X-axis direction. The length of the second connecting member 263 in the Y-axis direction is shorter than the length of the first connecting member 262 in the Y-axis direction.

[0064] A pair of beam members 264 are respectively arranged between the second portion 261b of the pair of levers 261 and the first connecting member 262. Each beam member 264 is in the shape of a plate extending along a plane perpendicular to the Z-axis direction. The pair of beam members 264 extend obliquely in a manner that the farther away from the movable reflector 22, the closer they are to each other. The pair of levers 261, the first connecting member 262, the second connecting member 263 and the pair of beam members 264 define a light passage opening 24. The light passage opening 24 is polygonal when viewed from the Z-axis direction. The light passage opening 24 is, for example, a cavity (hole). Alternatively, a material having light transmittance relative to the measurement light L0 and the laser light L10 may be arranged in the light passage opening 24.

[0065] The intermediate member 265 is in the shape of a plate extending along a plane perpendicular to the Z-axis direction and extending along the Y-axis direction. The intermediate member 265 is disposed between the movable reflector 22 and the second coupling member 263 (in other words, between the movable reflector 22 and the light passage opening 24). The intermediate member 265 is connected to the movable reflector 22 via a nonlinear relaxation spring 268 as described later.

[0066] A pair of first torsion bars 266 are respectively arranged between the first end 261d of one lever 261 and the base 21 and between the first end 261d of the other lever 261 and the base 21. That is, a pair of first torsion bars 266 are respectively connected between a pair of levers 261 and the base 21. Each first torsion bar 266 extends along the Y-axis direction. A pair of first torsion bars 266 are arranged on the same center line parallel to the Y-axis direction. In the present embodiment, the center line of each first torsion bar 266 and the center line of the first connecting member 262 are located on the same straight line. A protrusion 261f protruding outward in the Y-axis direction is provided at the first end 261d of each lever 261, and each first torsion bar 266 is connected to the protrusion 261f.

[0067] The pair of second torsion bars 267 are respectively arranged between the second end 261e of one lever 261 and one end of the intermediate member 265 and between the second end 261e of the other lever 261 and the other end of the intermediate member 265. That is, the pair of second torsion bars 267 are respectively connected between the pair of levers 261 and the movable reflector 22. Each second torsion bar 267 extends in the Y-axis direction. The pair of second torsion bars 267 are arranged on the same center line parallel to the Y-axis direction.

[0068] A pair of nonlinear relaxation springs 268 are connected between the movable reflector 22 and the intermediate member 265. That is, a pair of nonlinear relaxation springs 268 are connected between the movable reflector 22 and the second torsion bar 267. Each nonlinear relaxation spring 268 has a meandering portion 268a extending in a meandering manner when viewed from the Z-axis direction. The meandering portion 268a extends in the Y-axis direction and includes a plurality of straight-line portions 268b arranged in the X-axis direction and a plurality of return portions 268c alternately connecting the two ends of the plurality of straight-line portions 268b. One end of the meandering portion 268a is connected to the intermediate member 265, and the other end of the meandering portion 268a is connected to the frame portion 222. The portion of the meandering portion 268a on the frame portion 222 side is in a shape formed along the outer edge of the frame portion 222.

[0069] The nonlinear relaxation spring 268 is configured such that, in a state where the movable mirror 22 moves in the Z-axis direction, the deformation amount of the nonlinear relaxation spring 268 around the Y-axis direction is smaller than the deformation amount of each of the first torsion bar 266 and the second torsion bar 267 around the Y-axis direction, and the deformation amount of the nonlinear relaxation spring 268 in the X-axis direction is larger than the deformation amount of each of the first torsion bar 266 and the second torsion bar 267 in the X-axis direction. Thus, it is possible to suppress the occurrence of nonlinearity in the torsional deformation of the first torsion bar 266 and the second torsion bar 267, and suppress the deterioration of the control characteristics of the movable mirror 22 caused by the nonlinearity. In addition, the deformation amount of the first torsion bar 266, the second torsion bar 267, and the nonlinear relaxation spring 268 around the Y-axis direction refers to, for example, the absolute value of the torsion amount (torsion angle). The deformation amount of the first torsion bar 266, the second torsion bar 267, and the nonlinear relaxation spring 268 in the X-axis direction refers to, for example, the absolute value of the deflection amount. The deformation amount of the component around the Y-axis direction refers to the deformation amount of the component in the circumferential direction of a circle centered on an axis passing through the center of the component and parallel to the Y-axis. This also applies to the first torsion bar 276, the second torsion bar 277, and the nonlinear relaxation spring 278 described later.

[0070] The plurality of electrode support parts 269 include a pair of first electrode support parts 269a, a pair of second electrode support parts 269b, and a pair of third electrode support parts 269c. Each electrode support part 269a, 269b, 269c is in the shape of a plate extending along a plane perpendicular to the Z-axis direction, and extends along the Y-axis direction. Each electrode support part 269a, 269b, 269c extends from the second portion 261b of the lever 261 to the opposite side of the light passage opening 24. A pair of first electrode support parts 269a is arranged on the same center line parallel to the Y-axis direction. A pair of second electrode support parts 269b is arranged on the same center line parallel to the Y-axis direction. A pair of third electrode support parts 269c is arranged on the same center line parallel to the Y-axis direction. In the X-axis direction, the first electrode support part 269a, the second electrode support part 269b, and the third electrode support part 269c are arranged in sequence from the movable reflector 22 side.

[0071] The second elastic support portion 27 has a pair of levers 271, a first connecting member 272, a second connecting member 273, a pair of beam members 274, an intermediate member 275, a pair of first torsion bars (first torsion support portion) 276, a pair of second torsion bars (second torsion support portion) 277, a pair of nonlinear buffer springs 278 and a plurality of electrode support portions 279.

[0072] A pair of levers 271 are arranged on both sides of the light passage opening 25 in the Y-axis direction and face each other in the Y-axis direction. Each lever 271 is in the shape of a plate extending along a plane perpendicular to the Z-axis direction. Each lever 271 has a first portion 271a, a second portion 271b arranged on the opposite side of the movable reflector 22 relative to the first portion 271a, and a third portion 271c connected to the first portion 271a and the second portion 271b. The first portion 271a and the second portion 271b extend in the X-axis direction. The length of the first portion 271a in the X-axis direction is shorter than the length of the second portion 271b in the X-axis direction. The third portion 271c of the pair of levers 271 extends obliquely in a manner that they are separated from each other as they are farther away from the movable reflector 22.

[0073] The first connecting member 272 is mounted between the first end portions 271d of the pair of levers 271 on the opposite side to the movable reflector 22. The first connecting member 272 is in the shape of a plate extending along a plane perpendicular to the Z-axis direction, and extends in the Y-axis direction. The second connecting member 273 is mounted between the second end portions 271e of the pair of levers 271 on the movable reflector 22 side. The second connecting member 273 is in the shape of a plate extending along a plane perpendicular to the Z-axis direction, and extends in the Y-axis direction. The width of the second connecting member 273 in the X-axis direction is narrower than the width of the first connecting member 272 in the X-axis direction. The length of the second connecting member 273 in the Y-axis direction is shorter than the length of the first connecting member 272 in the Y-axis direction.

[0074] A pair of beam members 274 are respectively arranged between the second portion 271b of the pair of levers 271 and the first connecting member 272. Each beam member 274 is in the shape of a plate extending along a plane perpendicular to the Z-axis direction. The pair of beam members 274 extend obliquely in a manner that the farther away from the movable reflector 22, the closer they are to each other. The pair of levers 271, the first connecting member 272, the second connecting member 273 and the pair of beam members 274 define a light passage opening 25. The light passage opening 25 is polygonal when viewed from the Z-axis direction. The light passage opening 25 is, for example, a cavity (hole). Alternatively, a material having light transmittance with respect to the measuring light L0 and the laser light L10 may also be arranged in the light passage opening 25.

[0075] The intermediate member 275 is in the shape of a plate extending along a plane perpendicular to the Z-axis direction and extending along the Y-axis direction. The intermediate member 275 is disposed between the movable reflector 22 and the second coupling member 273 (in other words, between the movable reflector 22 and the light passage opening 25). The intermediate member 275 is connected to the movable reflector 22 via a nonlinear relaxation spring 278 as described later.

[0076] A pair of first torsion bars 276 are respectively arranged between the first end 271d of one lever 271 and the base 21 and between the first end 271d of the other lever 271 and the base 21. That is, a pair of first torsion bars 276 are respectively connected between a pair of levers 271 and the base 21. Each first torsion bar 276 extends along the Y-axis direction. A pair of first torsion bars 276 are arranged on the same center line parallel to the Y-axis direction. In the present embodiment, the center line of each first torsion bar 276 and the center line of the first connecting member 272 are located on the same straight line. A protrusion 271f protruding outward in the Y-axis direction is provided at the first end 271d of each lever 271, and each first torsion bar 276 is connected to the protrusion 271f.

[0077] The pair of second torsion bars 277 are respectively arranged between the second end 271e of one lever 271 and one end of the intermediate member 275 and between the second end 271e of the other lever 271 and the other end of the intermediate member 275. That is, the pair of second torsion bars 277 are respectively connected between the pair of levers 271 and the movable reflector 22. Each second torsion bar 277 extends in the Y-axis direction. The pair of second torsion bars 277 are arranged on the same center line parallel to the Y-axis direction.

[0078] A pair of nonlinear relaxation springs 278 are connected between the movable reflector 22 and the intermediate member 275. That is, a pair of nonlinear relaxation springs 278 are connected between the movable reflector 22 and the second torsion bar 277. Each nonlinear relaxation spring 278 has a meandering portion 278a extending in a meandering manner when viewed from the Z-axis direction. The meandering portion 278a includes a plurality of straight-line portions 278b extending in the Y-axis direction and arranged in the X-axis direction, and a plurality of return portions 278c alternately connecting the two ends of the plurality of straight-line portions 278b. One end of the meandering portion 278a is connected to the intermediate member 275, and the other end of the meandering portion 278a is connected to the frame portion 222. The portion of the meandering portion 278a on the frame portion 222 side is shaped to be formed along the outer edge of the frame portion 222.

[0079] The nonlinear relaxation spring 278 is configured such that, when the movable mirror 22 moves in the Z-axis direction, the amount of deformation of the nonlinear relaxation spring 278 around the Y-axis direction is smaller than the amount of deformation of each of the first torsion bar 276 and the second torsion bar 277 around the Y-axis direction, and the amount of deformation of the nonlinear relaxation spring 278 in the X-axis direction is larger than the amount of deformation of each of the first torsion bar 276 and the second torsion bar 277 in the X-axis direction. Thus, it is possible to suppress the occurrence of nonlinearity in the torsional deformation of the first torsion bar 276 and the second torsion bar 277, and to suppress the degradation of the control characteristics of the movable mirror 22 caused by the nonlinearity.

[0080] The plurality of electrode support parts 279 include a pair of first electrode support parts 279a, a pair of second electrode support parts 279b, and a pair of third electrode support parts 279c. Each electrode support part 279a, 279b, 279c is in the shape of a plate extending along a plane perpendicular to the Z-axis direction, and extends along the Y-axis direction. Each electrode support part 279a, 279b, 279c extends from the second portion 271b of the lever 271 to the opposite side of the light passage opening 25. A pair of first electrode support parts 279a is arranged on the same center line parallel to the Y-axis direction. A pair of second electrode support parts 279b is arranged on the same center line parallel to the Y-axis direction. A pair of third electrode support parts 279c is arranged on the same center line parallel to the Y-axis direction. In the X-axis direction, the first electrode support part 279a, the second electrode support part 279b, and the third electrode support part 279c are arranged in sequence from the movable reflector 22 side.

[0081] The actuator unit 28 moves the movable mirror 22 in the Z-axis direction. The actuator unit 28 includes a fixed comb electrode 281, a movable comb electrode 282, a fixed comb electrode 283, and a movable comb electrode 284. The fixed comb electrodes 281 and 283 are fixed in position. The movable comb electrodes 282 and 284 move as the movable mirror 22 moves.

[0082] The fixed comb-teeth electrode 281 is provided on a portion of the surface of the device layer 102 of the substrate 21 facing the electrode support portion 269. The fixed comb-teeth electrode 281 has a plurality of fixed comb teeth 281a extending along a plane perpendicular to the Y-axis direction. These fixed comb teeth 281a are arranged side by side at predetermined intervals in the Y-axis direction.

[0083] The movable comb-teeth electrode 282 is provided on the surface of each first electrode support portion 269a on the movable reflector 22 side, the surfaces of each second electrode support portion 269b on both sides in the X-axis direction, and the surface of each third electrode support portion 269c on the movable reflector 22 side. The movable comb-teeth electrode 282 has a plurality of movable comb teeth 282a extending along a plane perpendicular to the Y-axis direction. These movable comb teeth 282a are arranged side by side with a predetermined interval in the Y-axis direction.

[0084] A plurality of fixed comb teeth 281a and a plurality of movable comb teeth 282a are alternately arranged on the fixed comb teeth electrode 281 and the movable comb teeth electrode 282. That is, each fixed comb tooth 281a of the fixed comb teeth electrode 281 is located between the movable comb teeth 282a of the movable comb teeth electrode 282. Adjacent fixed comb teeth 281a and movable comb teeth 282a face each other in the Y-axis direction. The distance between adjacent fixed comb teeth 281a and movable comb teeth 282a is, for example, about several μm.

[0085] The fixed comb-teeth electrode 283 is provided on a portion of the surface of the device layer 102 of the substrate 21 facing the electrode support portion 279. The fixed comb-teeth electrode 283 has a plurality of fixed comb teeth 283a extending along a plane perpendicular to the Y-axis direction. These fixed comb teeth 283a are arranged side by side at predetermined intervals in the Y-axis direction.

[0086] The movable comb-tooth electrode 284 is provided on the surface of each first electrode support portion 279a on the movable reflector 22 side, the surfaces of each second electrode support portion 279b on both sides in the X-axis direction, and the surface of each third electrode support portion 279c on the movable reflector 22 side. The movable comb-tooth electrode 284 has a plurality of movable comb teeth 284a extending along a plane perpendicular to the Y-axis direction. These movable comb teeth 284a are arranged side by side with a predetermined interval in the Y-axis direction.

[0087] A plurality of fixed comb teeth 283a and a plurality of movable comb teeth 284a are alternately arranged on the fixed comb teeth electrode 283 and the movable comb teeth electrode 284. That is, each fixed comb tooth 283a of the fixed comb teeth electrode 283 is located between the movable comb teeth 284a of the movable comb teeth electrode 284. Adjacent fixed comb teeth 283a and movable comb teeth 284a face each other in the Y-axis direction. The distance between adjacent fixed comb teeth 283a and movable comb teeth 284a is, for example, about several μm.

[0088] A plurality of electrode pads 211 are provided on the substrate 21. Each electrode pad 211 is arranged on the surface of the device layer 102 in an opening 213 formed on the first surface 21a of the substrate 21 so as to reach the device layer 102. Some of the plurality of electrode pads 211 are electrically connected to the fixed comb-tooth electrode 281 or the fixed comb-tooth electrode 283 through the device layer 102. Other electrode pads 211 are electrically connected to the movable comb-tooth electrode 282 or the movable comb-tooth electrode 284 through the first elastic support portion 26 or the second elastic support portion 27. In addition, a pair of electrode pads 212 used as ground electrodes are provided on the substrate 21. The pair of electrode pads 212 are arranged on the first surface 21a so as to be located on both sides of the movable reflector 22 in the Y-axis direction.

[0089] Reference Fig.11 , the structure of the periphery of the electrode pad 211 is further described. The following description is made with reference to one electrode pad 211, but the other electrode pads 211 are also constructed in the same manner. Fig.11 As shown, each electrode pad 211 is arranged on the surface 102 a of the device layer 102 in the Z-axis direction in an opening 213 formed on the surface 101 a of the support layer 101 in the Z-axis direction so as to reach the device layer 102 .

[0090] The opening 213 has a bottom surface 214 formed by the surface 102a and a side surface 215 formed by the support layer 101 and the intermediate layer 103. The bottom surface 214 is, for example, rectangular. The side surface 215 has a first surface 215a formed continuously with the bottom surface 214 and extending substantially perpendicularly to the bottom surface 214, a step surface 215b formed continuously with the first surface 215a and extending substantially parallel to the bottom surface 214, and a second surface 215c formed continuously with the step surface 215b and extending substantially perpendicularly to the bottom surface 214. The step surface 215b extends in a ring shape along the edge of the opening 213 when viewed from the Z-axis direction.

[0091] The electrode pad 211 is arranged on the entire surface of the bottom surface 214. In addition, the electrode pad 211 extends across the bottom surface 214 and the side surface 215. More specifically, the electrode pad 211 is formed in a manner that reaches the first surface 215a of the side surface 215 but does not reach the step surface 215b. The electrode pad 211 is composed of, for example, a metal film (metal layer). The metal film is formed, for example, by a sputtering method using a hard mask. The metal film constituting the electrode pad 211 is thicker than the metal film constituting the reflective mirror surface 22a.

[0092] The substrate 21 has a groove portion 216 formed on the surface 101a of the supporting layer 101 in a manner that reaches the device layer 102. The groove portion 216 extends in a ring shape in a manner that surrounds the opening 213 when viewed from the Z-axis direction. The groove portion 216 is, for example, in a rectangular ring shape when viewed from the Z-axis direction. By providing the groove portion 216, the electrode pads 211 can be reliably electrically insulated from each other. That is, as in the present embodiment, the metal film constituting the electrode pad 211 is formed in a manner that reaches the side surface 215, and when the electrode pad 211 is in contact with the supporting layer 101, there is a problem that the electrode pads 211 are electrically connected to each other via the supporting layer 101. In contrast, in the reflector device 20, by providing the groove portion 216, the electrode pads 211 can be reliably electrically insulated from each other even in such a case.

[0093] In the reflector device 20 constructed as described above, an electrical signal for moving the movable reflector 22 along the Z-axis direction is input to the drive unit 23 through the lead pin 113 and the cable (not shown) described later. As a result, an electrostatic force is generated, for example, between the fixed comb-tooth electrode 281 and the movable comb-tooth electrode 282 facing each other and between the fixed comb-tooth electrode 283 and the movable comb-tooth electrode 284 facing each other, so that the movable reflector 22 moves to one side in the Z-axis direction. At this time, the first torsion bars 266, 276 and the second torsion bars 267, 277 are twisted in the first elastic support part 26 and the second elastic support part 27, and an elastic force is generated in the first elastic support part 26 and the second elastic support part 27. In the reflector device 20, by giving a periodic electrical signal to the drive unit 23, the movable reflector 22 can be horizontally reciprocated along the Z-axis direction at its resonant frequency. In this way, the drive unit 23 functions as an electrostatic actuator.

[0094] [Other structures of the reflector unit]

[0095] like Figure 2 , Figure 3 , Figure 4 and Figure 7As shown, the optical functional component 13 has a third surface 13a (a surface on one side in the Z-axis direction) opposite to the second surface 21b of the substrate 21 and a fourth surface 13b on the opposite side to the third surface 13a. The optical functional component 13 is arranged on the other side in the Z-axis direction relative to the reflector device 20. When viewed from the Z-axis direction, the outer edge 13c of the optical functional component 13 is located outside the outer edge 21c of the substrate 21. That is, when viewed from the Z-axis direction, the outer edge 13c of the optical functional component 13 surrounds the outer edge 21c of the substrate 21. The optical functional component 13 is integrally formed of a material having transmissivity with respect to the measurement light L0 and the laser light L10. The optical functional component 13 is formed of, for example, glass in a rectangular plate shape, and has a size of, for example, about 15 mm×20 mm×4 mm (thickness). In addition, the material of the optical functional component 13 is selected, for example, according to the sensitivity wavelength of the optical component 1, and is glass when the sensitivity wavelength of the optical component 1 is in the near-infrared region, and is silicon when the sensitivity wavelength of the optical component 1 is in the mid-infrared region.

[0096] A pair of light-transmitting parts 14 and 15 are provided in the optical functional component 13. The light-transmitting part 14 is a part of the optical functional component 13 that is opposite to the light-passing opening 24 of the reflector device 20 in the Z-axis direction. The light-transmitting part 15 is a part of the optical functional component 13 that is opposite to the light-passing opening 25 of the reflector device 20 in the Z-axis direction. The surface 14a of the light-transmitting part 14 on the side of the reflector device 20 and the surface 15a of the light-transmitting part 15 on the side of the reflector device 20 are located on the same plane as the third surface 13a. The light-transmitting part (second light-transmitting part) 14 constitutes the second part (a part) of the optical path between the beam splitter unit 3 and the fixed reflector 16. The light-transmitting part 14 is a part that corrects the optical path difference generated between the optical path between the beam splitter unit 3 and the movable reflector 22 and the optical path between the beam splitter unit 3 and the fixed reflector 16. In addition, in the present embodiment, the light-transmitting part 15 does not function as a light-transmitting part.

[0097] The optical functional component 13 has a fifth surface 13d that is opposite to the movable reflector 22 and the drive unit 23 of the reflector device 20. The fifth surface 13d is located closer to the fourth surface 13b than the third surface 13a. The fifth surface 13d extends to the outer edge 13c of the optical functional component 13 when viewed from the Z-axis direction. In the present embodiment, the fifth surface 13d surrounds the end of each light-transmitting portion 14, 15 on the reflector device 20 side, and extends to a pair of opposite sides extending in the Y-axis direction in the outer edge 13c of the optical functional component 13.

[0098] The third surface 13a of the optical functional component 13 is bonded to the second surface 21b of the substrate 21 by direct bonding (e.g., plasma activation bonding, surface-activated room-temperature bonding (SAB), atomic diffusion bonding (ADB), anodic bonding, fusion bonding, hydrophilic bonding, etc.). In the present embodiment, the third surface 13a extends on both sides of the fifth surface 13d in the Y-axis direction so as to face the plurality of electrode pads 211 and 212 provided on the substrate 21. Here, the fifth surface 13d is located on the fourth surface 13b side relative to the third surface 13a, so that the fifth surface 13d is separated from the mirror device 20 in the region facing the movable mirror 22 and the drive unit 23. In addition, the surface 14a of the light transmission part 14 and the surface 15a of the light transmission part 15 are respectively opposite to the light passage openings 24 and 25 of the reflector device 20. Thus, the reflector unit 2 prevents the movable reflector 22 and the drive part 23 from contacting the optical functional component 13 when the movable reflector 22 reciprocates in the Z-axis direction.

[0099] In addition, the substrate 21 of the reflector device 20 is provided with a sixth surface 21d that is separated from the optical functional component 13 in a state where the third surface 13a of the optical functional component 13 and the second surface 21b of the substrate 21 are bonded to each other. The sixth surface 21d is separated from the optical functional component 13 in a region including at least a portion of the outer edge of the substrate 21 when viewed from the Z-axis direction. In the present embodiment, the sixth surface 21d is formed by removing the device layer 102 and the intermediate layer 103 by etching along one side extending in the Y-axis direction of the outer edge of the substrate 21. In addition, a plurality of reference holes 13e are formed on the third surface 13a of the optical functional component 13. In the present embodiment, the plurality of reference holes 13e are formed on the third surface 13a in a manner corresponding to the plurality of corners of the substrate 21. When the third surface 13a of the optical functional component 13 and the second surface 21b of the base 21 are bonded to each other, the operation of the reflector device 20 is performed by holding the portion of the base 21 corresponding to the sixth surface 21d, and the position of the reflector device 20 in the X-axis direction and the Y-axis direction and the angle of the reflector device 20 in the plane perpendicular to and parallel to the Z-axis direction are adjusted based on the multiple reference holes 13e formed on the third surface 13a.

[0100] like Figure 3 and Figure 4As shown, the fixed reflector 16 is arranged on the other side of the Z-axis direction (opposite to the reflector device 20) relative to the optical functional component 13, and is fixed relative to the position of the base 21 of the reflector device 20. The fixed reflector 16 is formed, for example, by vapor deposition on the fourth surface 13b of the optical functional component 13. The fixed reflector 16 has a reflector surface 16a perpendicular to the Z-axis direction. In the present embodiment, the reflector surface 22a of the movable reflector 22 and the reflector surface 16a of the fixed reflector 16 face one side in the Z-axis direction (the beam splitter unit 3 side). In addition, the fixed reflector 16 is formed continuously with the fourth surface 13b of the optical functional component 13 in a manner that reflects the light transmitted from each light transmitting portion 14, 15 of the optical functional component 13, but a fixed reflector that reflects the light transmitted from the light transmitting portion 14 and a fixed reflector that reflects the light transmitted from the light transmitting portion 15 may be separately provided.

[0101] The stress relaxation substrate 17 is mounted on the fourth surface 13b of the optical functional component 13 via the fixed reflector 16. The stress relaxation substrate 17 is mounted on the fixed reflector 16 by, for example, an adhesive. When viewed from the Z-axis direction, the outer edge of the stress relaxation substrate 17 is located outside the outer edge 13c of the optical functional component 13. That is, when viewed from the Z-axis direction, the outer edge of the stress relaxation substrate 17 surrounds the outer edge 13c of the optical functional component 13. The thermal expansion coefficient of the stress relaxation substrate 17 is closer to the thermal expansion coefficient of the base 21 of the reflector device 20 (more specifically, the thermal expansion coefficient of the support layer 101) than the thermal expansion coefficient of the optical functional component 13. In addition, the thickness of the stress relaxation substrate 17 is closer to the thickness of the base 21 of the reflector device 20 than the thickness of the optical functional component 13. The stress relaxation substrate 17 is formed in a rectangular plate shape using, for example, silicon, and has a size of, for example, about 16 mm×21 mm×0.65 mm (thickness).

[0102] In the reflector unit 2 constructed as above, Figure 1 As shown, the surface of the stress relaxation substrate 17 opposite to the optical functional component 13 is fixed to the surface 9a (the surface on one side in the Z-axis direction) of the support body 9 by, for example, an adhesive, and thus mounted on the support body 9. When the reflector unit 2 is mounted on the support body 9, as shown in FIG. Figure 8 As shown in FIG. 1 , the position of the reflector device 20 in the X-axis direction and the Y-axis direction and the angle of the reflector device 20 in the plane perpendicular to the Z-axis direction are adjusted based on the reference hole 9b formed in the support body 9. Figure 8 The second support structure 12 is omitted in the figure.

[0103] [Structure of the First Support Structure and Beam Splitter Unit]

[0104] like Figure 1 and Figure 8As shown, the first support structure 11 includes a frame 111, a light-transmitting member 112, and a plurality of lead pins 113. The frame 111 is formed so as to surround the reflector unit 2 when viewed from the Z-axis direction, and is mounted on the surface 9a of the support body 9 by an adhesive such as silver solder. The frame 111 is formed of, for example, ceramic, and is, for example, in a rectangular frame shape. An end face 111a of the frame 111 on the opposite side to the support body 9 is located on the opposite side to the support body 9 compared to the first surface 21a of the base 21 of the reflector device 20.

[0105] The light-transmitting member 112 is formed in a manner to close the opening of the frame 111, and is attached to the end surface 111a of the frame 111 by, for example, an adhesive. The light-transmitting member 112 is formed of a material having transmissivity with respect to the measuring light L0 and the laser light L10, and is, for example, in the shape of a rectangular plate. Here, the end surface 111a of the frame 111 is located on the opposite side of the support body 9 compared to the first surface 21a of the base 21 of the reflector device 20, so that the light-transmitting member 112 is separated from the reflector device 20. As a result, in the optical component 1, the movable reflector 22 and the drive unit 23 are prevented from contacting the light-transmitting member 112 when the movable reflector 22 reciprocates in the Z-axis direction. In addition, in the optical component 1, the support body 9, the frame 111, and the light-transmitting member 112 constitute a package that accommodates the reflector unit 2.

[0106] Each lead pin 113 is provided in the frame 111 in such a manner that one end 113a is located inside the frame 111 and the other end (not shown) is located outside the frame 111. One end 113a of the lead pin 113 is electrically connected to the electrode pads 211 and 212 corresponding to the lead pin 113 in the reflector device 20 through a cable (not shown). In the optical component 1, an electrical signal for moving the movable reflector 22 in the Z-axis direction is input to the drive unit 23 through a plurality of lead pins 113. In the present embodiment, a step surface 111b extending in the X-axis direction on both sides of the optical functional component 13 in the Y-axis direction is formed in the frame 111, and one end 113a of each lead pin 113 is arranged on the step surface 111b. Each lead pin 113 extends in the Z-axis direction on both sides of the support body 9 in the Y-axis direction, and the other end of each lead pin 113 is located on the other side of the support body 9 in the Z-axis direction.

[0107] like Fig.10 As shown, the beam splitter unit 3 is mounted on the surface 112a of the light transmission component 112 on the opposite side of the reflector device 20 by, for example, an optical adhesive that also serves as a refractive index matching agent. The beam splitter unit 3 has a first reflector surface 31, a second reflector surface 32, and a plurality of optical surfaces 33a, 33b, 33c, and 33d. The beam splitter unit 3 is formed by joining a plurality of optical blocks 34 and 35. Each optical block 34 and 35 is formed of a material having a refractive index that is the same as or similar to that of the optical functional component 13. In addition, Fig.10 yes Figure 1The schematic cross-sectional view of the reflector unit 2 and the beam splitter unit 3 is shown in FIG. Fig.10 In the figure, for example, the reflector device 20 is schematically shown in a state where the size in the Z-axis direction is enlarged to be larger than the actual size.

[0108] The first reflector surface 31 is a reflector surface (for example, a half-reflector surface) inclined with respect to the Z-axis direction, and is formed between the optical block 34 and the optical block 35. In the present embodiment, the first reflector surface 31 is a surface parallel to the Y-axis direction and is a surface that forms an angle of 45° with the Z-axis direction, and is a surface that is inclined in a manner that the closer it is to the reflector device 20, the farther it is from the light incident portion 4. The first reflector surface 31 has a function of reflecting a portion of the measurement light L0 and transmitting the remaining portion of the measurement light L0, and a function of reflecting a portion of the laser light L10 and transmitting the remaining portion of the laser light L10. The first reflector surface 31 is formed, for example, of a dielectric multilayer film. The first reflector surface 31 overlaps with the light passage opening 24 of the reflector device 20, the light transmission portion 14 of the optical functional component 13, and the reflector surface 16a of the fixed reflector 16 when viewed from the Z-axis direction, and overlaps with the light incident portion 4 when viewed from the X-axis direction (see FIG. 2 ). Figure 1 ) That is, the first reflecting mirror surface 31 is opposite to the fixed reflecting mirror 16 in the Z-axis direction, and is opposite to the light incident portion 4 in the X-axis direction.

[0109] The second reflector surface 32 is a reflector surface (e.g., a total reflection reflector surface) parallel to the first reflector surface 31, and is formed in the optical block 35 in a manner that is located on the opposite side of the light incident portion 4 relative to the first reflector surface 31. The second reflector surface 32 has a function of reflecting the measurement light L0 and a function of reflecting the laser light L10. The second reflector surface 32 is formed of, for example, a metal film. The second reflector surface 32 overlaps with the reflector surface 22a of the movable reflector 22 of the reflector device 20 when viewed from the Z-axis direction, and overlaps with the first reflector surface 31 when viewed from the X-axis direction. That is, the second reflector surface 32 is opposite to the movable reflector 22 in the Z-axis direction, and is opposite to the first reflector surface 31 in the X-axis direction.

[0110] The optical surface 33a is a surface perpendicular to the Z-axis direction, and is formed in the optical block 35 so as to be located on the opposite side of the reflector device 20 relative to the first reflector surface 31. The optical surface 33b is a surface perpendicular to the Z-axis direction, and is formed in the optical block 35 so as to be located on the reflector device 20 side relative to the second reflector surface 32. The optical surface 33c is a surface perpendicular to the Z-axis direction, and is formed in the optical block 34 so as to be located on the reflector device 20 side relative to the first reflector surface 31. The optical surface 33b and the optical surface 33c are located on the same plane. The optical surface 33d is a surface perpendicular to the X-axis direction, and is formed in the optical block 34 so as to be located on the light incident portion 4 side relative to the first reflector surface 31. Each of the optical surfaces 33a, 33b, 33c, and 33d has a function of transmitting the measurement light L0 and a function of transmitting the laser light L10.

[0111] The beam splitter unit 3 configured as described above is mounted on the light-transmitting member 112 by fixing the optical surface 33b and the optical surface 33c located on the same plane to the surface 112a of the light-transmitting member 112 using, for example, an optical adhesive. When the beam splitter unit 3 is mounted on the light-transmitting member 112, Fig. 9 As shown in FIG. 1 , the position of the beam splitter unit 3 in the X-axis direction and the Y-axis direction and the angle of the beam splitter unit 3 in a plane perpendicular to the Z-axis direction are adjusted based on the reference hole 9b formed in the support body 9. Fig. 9 The second support structure 12 is omitted in the figure.

[0112] Here, refer to Fig.10 The optical path of the measuring light L0 and the optical path of the laser light L10 in the mirror unit 2 and the beam splitter unit 3 will be described in detail.

[0113] like Fig.10As shown, when the measurement light L0 enters the beam splitter unit 3 along the X-axis direction through the optical surface 33d, a portion of the measurement light L0 is transmitted from the first reflection mirror surface 31, reflected from the second reflection mirror surface 32, and reaches the reflection mirror surface 22a of the movable reflection mirror 22 through the optical surface 33b and the light-transmitting component 112. A portion of the measurement light L0 is reflected by the reflection mirror surface 22a of the movable reflection mirror 22, travels in the opposite direction on the same optical path P1, and is reflected by the first reflection mirror surface 31. The remaining portion of the measurement light L0 is reflected by the first reflection mirror surface 31, passes through the optical surface 33c, the light-transmitting component 112, the light-passing opening 24 of the reflection mirror device 20, and the light-transmitting portion 14 of the optical functional component 13, and reaches the reflection mirror surface 16a of the fixed reflection mirror 16. The remaining portion of the measurement light L0 is reflected by the reflection mirror surface 16a of the fixed reflection mirror 16, travels in the opposite direction on the same optical path P2, and is transmitted from the first reflection mirror surface 31. Part of the measurement light L0 reflected by the first reflection mirror 31 and the remaining part of the measurement light L0 transmitted through the first reflection mirror 31 become interference light L1, and the interference light L1 of the measurement light passes through the optical surface 33a and is emitted from the beam splitter unit 3 in the Z-axis direction.

[0114] On the other hand, when the laser light L10 enters the beam splitter unit 3 along the Z-axis direction through the optical surface 33a, a portion of the laser light L10 is reflected by the first reflecting mirror surface 31 and the second reflecting surface 32, passes through the optical surface 33b and the light-transmitting member 112, and reaches the reflecting mirror surface 22a of the movable reflecting mirror 22. A portion of the laser light L10 is reflected by the reflecting mirror surface 22a of the movable reflecting mirror 22, travels in the reverse direction on the same optical path P3, and is reflected by the first reflecting mirror surface 31. The remaining portion of the laser light L10 is transmitted through the first reflecting mirror surface 31, passes through the optical surface 33c, the light-transmitting member 112, the light-passing opening 24 of the reflecting mirror device 20, and the light-transmitting portion 14 of the optical functional component 13, and reaches the reflecting mirror surface 16a of the fixed reflecting mirror 16. The remaining portion of the laser light L10 is reflected by the reflecting mirror surface 16a of the fixed reflecting mirror 16, travels in the reverse direction on the same optical path P4, and is transmitted from the first reflecting mirror surface 31. Part of the laser light L10 reflected by the first reflecting mirror 31 and the rest of the laser light L10 transmitted through the first reflecting mirror 31 become interference light L11, and the interference light L11 of the laser light passes through the optical surface 33a and is emitted from the beam splitter unit 3 in the Z-axis direction.

[0115] As described above, the light passage opening 24 of the reflector device 20 constitutes the first portion P2a of the optical path P2 of the measuring light L0 and the first portion P4a of the optical path P4 of the laser light L10 in the optical path between the beam splitter unit 3 and the fixed reflector 16. In addition, the light transmission portion 14 of the optical functional component 13 constitutes the second portion P2b of the optical path P2 of the measuring light L0 and the second portion P4b of the optical path P4 of the laser light L10 in the optical path between the beam splitter unit 3 and the fixed reflector 16.

[0116] By forming the second portion P2b of the optical path P2 of the measuring light L0 by the light transmitting portion 14, the optical path difference between the two optical paths P1 and P2 is corrected, so that the difference between the optical path length of the optical path P1 of the measuring light L0 (the optical path length taking into account the refractive index of each medium through which the optical path passes) and the optical path length of the optical path P2 of the measuring light L0 is reduced. Similarly, by forming the second portion P4b of the optical path P4 of the laser light L10 by the light transmitting portion 14, the optical path difference between the two optical paths P3 and P4 is corrected, so that the difference between the optical path length of the optical path P3 of the laser light L10 and the optical path length of the optical path P4 of the laser light L10 is reduced. In this embodiment, the refractive index of the light-transmitting portion 14 is equal to the refractive index of each optical block constituting the beam splitter unit 3, and the distance between the first reflecting mirror surface 31 and the second reflecting mirror surface 32 along the X-axis direction is equal to the thickness of the light-transmitting portion 14 along the Z-axis direction (that is, the distance between the surface 14a of the light-transmitting portion 14 along the Z-axis direction and the fourth surface 13b of the optical functional component 13).

[0117] [Structure of the Second Support Structure and the Light Incident Section, etc.]

[0118] like Figure 1 As shown, the second support structure 12 has a connecting unit 120. The connecting unit 120 includes a main body 121, a frame 122 and a fixing plate 123. The main body 121 includes a pair of side wall portions 124, 125 and a top wall portion 126. The pair of side wall portions 124, 125 are opposite to each other in the X-axis direction. An opening 124a is formed in the side wall portion 124 on one side in the X-axis direction. The top wall portion 126 is opposite to the support body 9 in the Z-axis direction. An opening 126a is formed in the top wall portion 126. The main body 121 is formed integrally with, for example, metal. A plurality of positioning pins 121a are provided in the main body 121. The main body 121 is positioned relative to the support body 9 by embedding the positioning pins 121a in the reference holes 9b and holes 9c formed in the support body 9, respectively, and in this state, is mounted on the support body 9, for example, by bolts.

[0119] The frame 122 is arranged on the surface of the side wall 124 on the opposite side to the beam splitter unit 3. The opening of the frame 122 is opposite to the beam splitter unit 3 through the opening 124a of the side wall 124. The light incident portion 4 is arranged in the frame 122. The fixing plate 123 is a member for fixing the light incident portion 4 arranged in the frame 122 to the main body 121 (details will be described later).

[0120] The second support structure 12 further includes a holding unit 130. The holding unit 130 includes a main body 131, a frame 132, and a fixing plate 133. The main body 131 is mounted on the surface of the top wall 126 on the opposite side to the support body 9. The main body 131 is positioned relative to the main body 121 of the connecting unit 120 by a plurality of positioning pins 131a, and in this state, is mounted on the top wall 126 by, for example, bolts. A recess 134 is formed on the surface of the main body 131 on the opposite side to the support body 9. A first light passage hole 135, a second light passage hole 136, and a third light passage hole 137 are formed on the bottom surface of the recess 134. The first light passage hole 135 is formed at a position opposite to the first reflection mirror surface 31 of the beam splitter unit 3 in the Z-axis direction. The second light passage hole 136 is formed on the other side of the first light passage hole 135 in the X-axis direction (i.e., on the opposite side to the light incident portion 4). The third light transmission hole 137 is formed on the other side of the second light transmission hole 136 in the X-axis direction.

[0121] The frame 132 is arranged on the bottom surface of the recess 134. The opening of the frame 132 is opposite to the third light passage hole 137. The second light source 7 is arranged in the frame 132. The first light detector 6 is arranged on the bottom surface of the recess 134 in a state opposite to the first light passage hole 135. The second light detector 8 is arranged on the bottom surface of the recess 134 in a state opposite to the second light passage hole 136. The fixing plate 133 is a component for fixing the first light detector 6 and the second light detector 8 arranged on the bottom surface of the recess 134 and the second light source 7 arranged in the frame 132 to the main body 131 (details will be described later).

[0122] The light incident portion 4 includes a holder 41 and a collimating lens 42. The holder 41 holds the collimating lens 42 and is configured to be connected to an optical fiber (not shown) that guides the measurement light L0. The collimating lens 42 collimates (calibrates) the measurement light L0 emitted from the optical fiber. When the optical fiber is connected to the holder 41, the optical axis of the optical fiber coincides with the optical axis of the collimating lens 42.

[0123] The retainer 41 is provided with a flange portion 41a. The flange portion 41a is arranged between the frame 122 and the fixing plate 123. In this state, by attaching the fixing plate 123 to the side wall portion 124, for example, by bolts, the light incident portion 4 arranged in the frame 122 is fixed to the main body 121. In this way, the light incident portion 4 is arranged on one side of the beam splitter unit 3 in the X-axis direction and is supported by the second support structure 12. The light incident portion 4 allows the measurement light L0 incident from the first light source through the measurement object or the measurement light L0 emitted from the measurement object (in this embodiment, the measurement light L0 guided by the optical fiber) to enter the beam splitter unit 3.

[0124] The optical filter 54 is installed in the frame 122. The optical filter 54 has a function of cutting off the laser L10. The optical filter 54 is arranged in the opening 124a of the side wall portion 124 in a state of being inclined relative to the optical axis of the light incident portion 4. The optical filter 54 closes the opening of the frame 122 when viewed from the X-axis direction. In this way, the optical filter 54 is arranged between the light incident portion 4 and the beam splitter unit 3, and is supported by the second support structure 12 in a state of being inclined relative to the optical axis of the light incident portion 4. In the present embodiment, the optical surface of the optical filter 54 is a surface parallel to the Z-axis direction, and is a surface that forms an angle of 10° to 20° with the Y-axis direction. In addition, the optical axis of the light incident portion 4 is parallel to the X-axis direction.

[0125] Thus, even if the measurement light L0 contains light in the same wavelength band as the laser light L10, the light can be prevented from entering the beam splitter unit 3, so the position of the movable reflector 22 in the Z-axis direction can be obtained with high accuracy based on the detection result of the interference light L11 of the laser. In addition, since the filter 54 is inclined relative to the optical axis of the light incident portion 4, the light in the same wavelength band as the laser light L10 can be reflected outside the interference optical system, thereby reliably preventing the light from becoming stray light. In this embodiment, the light in the same wavelength band as the laser light L10 emitted from the beam splitter unit 3 along the X-axis direction is reflected by the filter 54 and emitted from the pair of side wall portions 124 and 125 of the main body portion 121 of the second support structure 12 to the outside of the interference optical system. Thus, the light can be reliably prevented from becoming stray light.

[0126] The first photodetector 6 includes a holder 61, a photodetection element 62, and a condenser lens 63. The holder 61 holds the photodetection element 62 and the condenser lens 63. The photodetection element 62 detects interference light L1 of the measurement light. The photodetection element 62 is, for example, an InGaAs photodiode. The condenser lens 63 condenses the interference light L1 of the measurement light incident on the photodetection element 62 to the photodetection element 62. In the holder 61, the optical axis of the photodetection element 62 and the optical axis of the condenser lens 63 coincide with each other.

[0127] The retainer 61 is provided with a flange portion 61a. The flange portion 61a is arranged between the bottom surface of the recessed portion 134 of the main body 131 and the fixing plate 133. In this state, the fixing plate 133 is mounted on the main body 131 by, for example, bolts, and the first light detector 6 arranged on the bottom surface of the recessed portion 134 is fixed to the main body 131. In this way, the first light detector 6 is arranged on one side of the beam splitter unit 3 in the Z-axis direction and is supported by the second support structure 12. The first light detector 6 is opposite to the first reflection mirror surface 31 of the beam splitter unit 3 in the Z-axis direction. The first light detector 6 detects the interference light L1 of the measurement light emitted from the beam splitter unit 3.

[0128] The second photodetector 8 includes a holder 81, a photodetection element 82, and a condenser lens 83. The holder 81 holds the photodetection element 82 and the condenser lens 83. The photodetection element 82 detects the interference light L11 of the laser. The photodetection element 82 is, for example, a Si photodiode. The condenser lens 83 directs the interference light L11 of the laser incident on the photodetection element 82 to the photodetection element 82. In the holder 81, the optical axis of the light condensed by the photodetection element 82 and the optical axis of the condenser lens 83 coincide with each other.

[0129] The retainer 81 is provided with a flange portion 81a. The flange portion 81a is disposed between the bottom surface of the recessed portion 134 of the main body 131 and the fixing plate 133. In this state, the fixing plate 133 is mounted on the main body 131, for example, by bolts, and the second photodetector 8 disposed on the bottom surface of the recessed portion 134 is fixed to the main body 131. In this way, the second photodetector 8 is disposed on one side of the beam splitter unit 3 in the Z-axis direction and is supported by the second support structure 12. The second photodetector 8 detects the interference light L11 of the laser light emitted from the beam splitter unit 3.

[0130] The second light source 7 includes a holder 71, a light emitting element 72, and a collimating lens 73. The holder 71 holds the light emitting element 72 and the collimating lens 73. The light emitting element 72 emits a laser beam L10. The light emitting element 72 is, for example, a semiconductor laser such as a VCSEL. The collimating lens 73 collimates the laser beam L10 emitted from the light emitting element 72. In the holder 71, the optical axis of the light emitting element 72 and the optical axis of the collimating lens 73 coincide with each other.

[0131] The retainer 71 is provided with a flange portion 71a. The flange portion 71a is disposed between the frame 132 and the fixing plate 133. In this state, the fixing plate 133 is mounted on the main body 131 by, for example, bolts, and the second light source 7 disposed in the frame 132 is fixed to the main body 131. In this way, the second light source 7 is disposed on one side of the beam splitter unit 3 in the Z-axis direction and is supported by the second support structure 12. The second light source 7 emits the laser light L10 that is incident on the beam splitter unit 3.

[0132] As described above, the holding unit 130 holds the first photodetector 6, the second photodetector 8, and the second light source 7 so that the first photodetector (first optical device) 6, the second photodetector (second optical device) 8, and the second light source (third optical device) 7 face the same side and are arranged in the order of the first photodetector 6, the second photodetector 8, and the second light source 7. In the present embodiment, the holding unit 130 holds the first photodetector 6, the second photodetector 8, and the second light source 7 on one side of the beam splitter unit 3 in the Z-axis direction so that the first photodetector 6, the second photodetector 8, and the second light source 7 face the other side in the Z-axis direction (i.e., the beam splitter unit 3 side). In addition, the holding unit 130 holds the first photodetector 6, the second photodetector 8, and the second light source 7 so that they are arranged in the order of the first photodetector 6, the second photodetector 8, and the second light source 7 from one side in the X-axis direction (i.e., the light incident portion 4 side).

[0133] The first reflecting mirror 51, the second reflecting mirror 52, and the third reflecting mirror 53 are mounted on the main body 131 of the holding unit 130. The first reflecting mirror 51 is held by the holding unit 130 and is located on the opposite side of the first light detector 6 with respect to the first light passage hole 135. The second reflecting mirror 52 is held by the holding unit 130 and is located on the opposite side of the second light detector 8 with respect to the second light passage hole 136. The third reflecting mirror 53 is held by the holding unit 130 and is located on the opposite side of the second light source 7 with respect to the third light passage hole 137.

[0134] The first reflector 51 has a function of transmitting the measuring light L0 and reflecting the laser light L10, and is a dichroic mirror tilted relative to the optical axis of the first light detector 6. The first reflector 51 is arranged between the beam splitter unit 3 and the first light detector 6. That is, the first reflector 51 is arranged in a manner opposite to the beam splitter unit 3 and the first light detector 6. In this embodiment, the optical surface of the first reflector 51 is a surface parallel to the Y-axis direction and a surface forming an angle of 45° with the Z-axis direction. In addition, the optical axis of the first light detector 6 is parallel to the Z-axis direction.

[0135] The second reflector 52 has a function of reflecting a part of the laser light L10 and transmitting the remaining part of the laser light L10, and is a reflector (for example, a half reflector) parallel to the first reflector 51. The second reflector 52 is arranged so as to overlap with the first reflector 51 when viewed from the X-axis direction and overlap with the second photodetector 8 when viewed from the Z-axis direction. That is, the second reflector 52 is arranged so as to face the first reflector 51 and the second photodetector 8. In the present embodiment, the optical surface of the second reflector 52 is a surface parallel to the Y-axis direction and a surface forming an angle of 45° with the Z-axis direction.

[0136] The third reflector 53 has a function of reflecting the laser light L10, and is a reflector (for example, a total reflector) parallel to the second reflector 52. The third reflector 53 is arranged so as to overlap with the second reflector 52 when viewed from the X-axis direction and overlap with the second light source 7 when viewed from the Z-axis direction. That is, the third reflector 53 is arranged so as to face the second reflector 52 and the second light source 7. In the present embodiment, the optical surface of the third reflector 53 is a surface parallel to the Y-axis direction and a surface forming an angle of 45° with the Z-axis direction.

[0137] The aperture member 55 is mounted on the main body 131 of the holding unit 130. The aperture member 55 is held by the holding unit 130 and is located between the first reflector 51 and the first photodetector 6. The aperture member 55 is a member formed with a circular opening when viewed from the Z-axis direction, and is arranged in the first light passage hole 135.

[0138] The interference light L1 of the measuring light emitted from the beam splitter unit 3 in the Z-axis direction is transmitted through the first reflector 51, passes through the aperture member 55, and is incident on the first photodetector 6, and is detected by the first photodetector 6. On the other hand, the laser light L10 emitted from the second light source 7 is reflected by the third reflector 53, is transmitted through the second reflector 52, is reflected by the first reflector 51, and is incident on the beam splitter unit 3 in the Z-axis direction. The interference light L11 of the laser light emitted from the beam splitter unit 3 in the Z-axis direction is reflected by the first reflector 51 and the second reflector 52, and is incident on the second photodetector 8, and is detected by the second photodetector 8.

[0139] [Function and Effect]

[0140] In the reflector device 20 described above, the first surface 21a (the surface on one side in the Z-axis direction) of the substrate 21 is arranged to be located on one side than the reflector surface 22a. Thus, the reflector surface 22a can be protected by the substrate 21, and for example, damage to the reflector surface 22a due to direct contact during transportation can be suppressed. Further, in the reflector device 20, the support layer 101 constituting the substrate 21 is thicker than the device layer 102 constituting the substrate 21. Thus, the protrusion amount of the substrate 21 relative to the reflector surface 22a can be ensured, and the reflector surface 22a can be effectively protected by the substrate 21. Thus, according to the reflector device 20, reliability can be improved. In addition, "the first surface 21a of the substrate 21 is located on one side than the reflector surface 22a" means that "at least a portion of the first surface 21a is located on one side than the reflector surface 22a". In the reflector device 20, the entire first surface 21a is located on the side of the Z-axis direction than the reflector surface 22a. In other words, the entire reflective mirror surface 22a is located on the other side of the first surface 21a in the Z-axis direction. In other words, "the surface on one side of the substrate in the Z-axis direction" means "the end surface on one side of the substrate in the Z-axis direction" or "the surface of the substrate located closest to the side on one side in the Z-axis direction".

[0141] The end surface (end surface 224as, 224bs, 224cs) on one side of the Z-axis direction of the beam portion 224 is located on one side of the reflective mirror surface 22a. Thus, the other beam portion 224 can also protect the reflective mirror surface 22a. Furthermore, the beam portion 224 can also suppress the deformation of the movable portion 22b during movement.

[0142] The beam portion 224 has an inner beam portion 224a arranged on the surface of one side of the arrangement portion 221 in a manner extending along the outer edge of the arrangement portion 221 when viewed from the Z-axis direction. Thus, the inner beam portion 224a is arranged near the reflection mirror surface 22a, thereby being able to more effectively protect the reflection mirror surface 22a. Furthermore, since the inner beam portion 224a is arranged on the arrangement portion 221, deformation of the arrangement portion 221 can be more appropriately suppressed.

[0143] The beam portion 224 has an outer beam portion 224b disposed on a surface of one side of the frame portion 222 in a manner extending along the frame portion 222 when viewed from the Z-axis direction. Thus, the reflector surface 22a can be more effectively protected by the beam portion 224. Furthermore, the outer beam portion 224b can suppress deformation of the frame portion 222, and further, deformation of the arrangement portion 221 caused by deformation of the frame portion 222 can be suppressed.

[0144] The support layer 101 constituting the beam 224 is thinner than the support layer 101 constituting the base 21. Thus, the beam 224 can be prevented from protruding from the base 21 during the movement of the movable portion 22b, and the amount of movement of the movable portion 22b in the Z-axis direction can be increased.

[0145] In the base 21, a groove 216 extending from the surface 101a (one side surface in the Z-axis direction) of the support layer 101 to the device layer 102 so as to surround the opening 213 when viewed in the Z-axis direction is formed. Thus, the groove 216 can realize electrical insulation of the electrode pad 211, and reliability can be further improved.

[0146] The electrode pad 211 extends across the bottom surface 214 and the side surface 215 of the opening 213. Thus, a large area of ​​the electrode pad 211 can be realized. The metal layer constituting the electrode pad 211 is thicker than the metal layer constituting the reflector surface 22a. In this case, the deformation of the reflector surface 22a can be suppressed, and the electrical connection of the ground electrode pad 211 can be achieved. That is, in order to suppress the warping of the reflector surface 22a, it is preferred that the metal layer constituting the reflector surface 22a is thinner. By making the metal layer constituting the electrode pad 211 thick, the wire bonding performance in the cable wire bonding process can be improved. If the electrode pad 211 is too thin, there is a concern that the cable cannot be set and sufficient adhesion cannot be obtained. Such a situation can be suppressed in the reflector device 20.

[0147] In the reflector unit 2, the optical path length difference between the optical path between the beam splitter unit 3 and the movable reflector 22 and the optical path between the beam splitter unit 3 and the fixed reflector 16 can be corrected by the light transmission section 14 of the optical functional component 13. "Correcting the optical path length difference" means reducing the difference between the optical path length of the optical path between the beam splitter unit 3 and the movable reflector 33 (the optical path length taking into account the refractive index of each medium through which the optical path passes) and the optical path length of the optical path between the beam splitter unit 3 and the fixed reflector 16. Furthermore, in the reflector unit 2, for example, the reflector surface 22a is arranged near the optical functional component 13, compared with the structure in which the reflector surface 22a is arranged on the surface of the device layer 102 on the side opposite to the intermediate layer 103, and the substrate 21 is bonded to the third surface 13a of the optical functional component 13 on the surface of the support layer 101 on the side opposite to the intermediate layer 103. Such a structure is particularly effective in the case of correcting the optical path length difference by the light transmission section 14. That is, for example, the reference position when the movable reflector 22 is reciprocated in the Z-axis direction can be easily (with a small amount of movement) placed on the third surface 13a of the optical functional component 13. Therefore, the amount of reciprocation of the movable reflector 22 in the Z-axis direction can be suppressed and a sufficient optical interference signal can be obtained.

[0148] [Modifications]

[0149] In the above-mentioned embodiment, the materials and shapes of each structure are not limited to the above-mentioned materials and shapes, and various materials and shapes can be used. For example, the configuration portion 221 and the reflector surface 22a can each be in any shape such as a rectangle or an octagon when viewed from the Z-axis direction. The frame portion 222 can also be in any ring shape such as a rectangular ring or an octagon when viewed from the Z-axis direction. The light passage opening 24 and the light passage opening 25 can each be in any shape such as a circular or octagonal shape when viewed from the Z-axis direction. The reflector device 20 can also have a hole or cutout formed in the substrate 21 as the first light passage portion instead of the light passage opening 24 or the light passage portion 25. The semiconductor substrate constituting the reflector device 20 is not necessarily an SOI substrate, as long as it is a substrate having a first semiconductor layer, an insulating layer and a second semiconductor layer in sequence from one side in the Z-axis direction.

[0150] The inner beam portion 224a, the outer beam portion 224b and the connecting beam portion 224c can each be formed into an arbitrary shape. For example, the beam portion can also extend obliquely or in a zigzag shape relative to the X-axis direction or the Y-axis direction. The configuration, number, length, width and thickness of each beam portion can be set arbitrarily. For example, the thickness of the inner beam portion 224a, the outer beam portion 224b and the connecting beam portion 224c can also be different from each other. At least one of these beam portions can also be omitted. The beam portion 224 may not surround the reflector surface 22a when viewed from the Z-axis direction. The thickness of the supporting layer 101 constituting the beam portion 224 may also be the same as the thickness of the supporting layer 101 constituting the substrate 21. The shapes of the first torsion bars 266, 276 and the second torsion bars 267, 277 are not limited, and can also be any shape such as a rod. The electrode pad 211 can also be configured only on the bottom surface 214 of the opening 213 without reaching the side surface 215. In this case, the groove 216 may be omitted. The second surface 21b of the base 21 and the third surface 13a of the optical functional component 13 may be joined to each other by a method other than direct bonding (e.g., an adhesive such as a UV curing resin). The fixed reflector 16 may be arranged on the opposite side of the reflector device 20 relative to the optical functional component 13, or may be separated from the fourth surface 13b of the optical functional component 13.

[0151] The optical device of the present invention is not limited to the reflector device, and other optical functional parts other than the reflector surface 22a can also be optical devices arranged on the movable part 22b. As other optical functional parts, lenses, etc. can be listed, for example. The driving part 23 of the reflector device 20 can also have more than three elastic support parts that elastically support the movable reflector 22. The actuator part 28 is not limited to an electrostatic actuator, for example, it is a piezoelectric actuator, an electromagnetic actuator, etc. In the above-mentioned embodiment, the moving direction (prescribed direction) of the movable part 22b is a direction perpendicular to the first surface 21a of the substrate 21, but the moving direction can be any direction that intersects with the first surface 21a. The reflector device 20 is not limited to the reflector device constituting FTIR, and can also be a reflector device constituting other optical systems. Each structure in the above-mentioned one embodiment or modification can be arbitrarily applied to each structure in other embodiments or modification.

[0152] Description of Reference Numerals

[0153] 3…Beam splitter unit

[0154] 13…Optical functional components

[0155] 14 ... light transmission portion (second light passing portion)

[0156] 16…Fixed reflector

[0157] 20…Reflector device (optical device)

[0158] 21…Matrix

[0159] 21a…first surface (main surface)

[0160] 21b…Second surface (main surface)

[0161] 22a ... reflective mirror surface (optical function part)

[0162] 22b…Movable part

[0163] 221…Configuration Department

[0164] 222…Frame

[0165] 223…Connection

[0166] 224…Beam

[0167] 24…Light passage opening (first light passage portion)

[0168] 100…SOI substrate (semiconductor substrate)

[0169] 101 ...support layer (first semiconductor layer)

[0170] 101a…Surface

[0171] 102 ... device layer (second semiconductor layer)

[0172] 102a…Surface

[0173] 103…Middle layer (insulating layer)

[0174] 211…Electrode pad

[0175] 213…Open

[0176] 214…bottom

[0177] 215…side

[0178] 216…groove portion.

Claims

1. An optical device, characterized in that: include: a substrate having a major surface; movable part; a plurality of elastic support parts connected between the base and the movable part and supporting the movable part so that the movable part can move in a predetermined direction intersecting the main surface; and an optical function portion disposed on the movable portion, The base and the movable part are composed of a semiconductor substrate having a first semiconductor layer, an insulating layer, and a second semiconductor layer in order from one side in the predetermined direction. The substrate is composed of the first semiconductor layer, the insulating layer and the second semiconductor layer. The movable portion has a placement portion formed of the second semiconductor layer. The optical function portion is arranged on the surface of the one side of the arrangement portion, The first semiconductor layer constituting the substrate is thicker than the second semiconductor layer constituting the substrate, The surface of the one side of the base is located closer to the one side than the optical function portion. Each of the plurality of elastic support portions has: lever; a first torsion support portion connected between the lever and the base; and A second torsion support portion is connected between the lever and the movable portion.

2. The optical device according to claim 1, characterized in that: The movable part further includes a beam part arranged around the optical function part. The beam portion is composed of the first semiconductor layer and the insulating layer disposed on the second semiconductor layer. The end surface on the one side of the beam portion is located closer to the one side than the optical function portion.

3. The optical device according to claim 2, characterized in that: The beam portion is disposed on the surface on the one side of the arrangement portion so as to extend along the outer edge of the arrangement portion when viewed from the predetermined direction.

4. The optical device according to claim 2, characterized in that: The movable portion further includes a frame portion surrounding the arrangement portion when viewed from the predetermined direction, and a connection portion connecting the arrangement portion and the frame portion to each other. The frame portion and the connecting portion are formed of the second semiconductor layer. The beam portion is disposed on the surface of the one side of the frame portion so as to extend along the frame portion when viewed from the predetermined direction.

5. The optical device according to claim 3, characterized in that: The movable portion further includes a frame portion surrounding the arrangement portion when viewed from the predetermined direction, and a connection portion connecting the arrangement portion and the frame portion to each other. The frame portion and the connecting portion are formed of the second semiconductor layer. The beam portion is disposed on the surface of the one side of the frame portion so as to extend along the frame portion when viewed from the predetermined direction.

6. The optical device according to any one of claims 2 to 5, characterized in that: The first semiconductor layer constituting the beam portion is thinner than the first semiconductor layer constituting the base.

7. The optical device according to any one of claims 1 to 5, characterized in that: It also has an electrode pad disposed on the substrate, The electrode pad is arranged on the surface of the second semiconductor layer in an opening formed on the surface of the first semiconductor layer so as to reach the second semiconductor layer. The base has a groove portion formed on the surface of the first semiconductor layer on the one side so as to reach the second semiconductor layer and extending so as to surround the opening when viewed from the predetermined direction.

8. The optical device according to claim 6, characterized in that: It also has an electrode pad disposed on the substrate, The electrode pad is arranged on the surface of the second semiconductor layer in an opening formed on the surface of the first semiconductor layer so as to reach the second semiconductor layer. The base has a groove portion formed on the surface of the first semiconductor layer on the one side so as to reach the second semiconductor layer and extending so as to surround the opening when viewed from the predetermined direction.

9. The optical device according to claim 7, characterized in that: The electrode pads extend across the bottom and side surfaces of the opening.

10. The optical device according to claim 8, characterized in that: The electrode pads extend across the bottom and side surfaces of the opening.

11. The optical device according to claim 7, characterized in that: The electrode pad and the optical functional part are respectively composed of metal layers, The metal layer constituting the electrode pad is thicker than the metal layer constituting the optical function portion.

12. The optical device according to claim 8, characterized in that: The electrode pad and the optical functional part are respectively composed of metal layers, The metal layer constituting the electrode pad is thicker than the metal layer constituting the optical function portion.

13. The optical device according to claim 9, characterized in that: The electrode pad and the optical functional part are respectively composed of metal layers, The metal layer constituting the electrode pad is thicker than the metal layer constituting the optical function portion.

14. The optical device according to claim 10, characterized in that: The electrode pad and the optical functional part are respectively composed of metal layers, The metal layer constituting the electrode pad is thicker than the metal layer constituting the optical function portion.

15. The optical device according to claim 1, characterized in that: The movable part further includes a beam part arranged around the optical function part. The end surface on the one side of the beam portion is located closer to the one side than the optical function portion.

16. The optical device according to claim 1 or 15, characterized in that: The movable portion further includes a frame portion surrounding the arrangement portion when viewed from the predetermined direction, and a connection portion connecting the arrangement portion and the frame portion to each other.

17. The optical device according to claim 16, characterized in that: The frame portion and the connection portion are formed of the second semiconductor layer.

18. The optical device according to claim 1, characterized in that: The movable portion further includes a beam portion disposed around the optical functional portion, a frame portion surrounding the disposed portion when viewed from the predetermined direction, and a connecting portion connecting the disposed portion and the frame portion to each other. The beam portion is disposed on the surface of the one side of the frame portion so as to extend along the frame portion when viewed from the predetermined direction.

19. The optical device according to any one of claims 1 to 5, 15, 17 and 18, characterized in that: It also has an electrode pad disposed on the substrate, The electrode pad is disposed on the one surface of the second semiconductor layer in an opening formed on the one surface of the first semiconductor layer so as to reach the second semiconductor layer.

20. The optical device according to claim 6, characterized in that: It also has an electrode pad disposed on the substrate, The electrode pad is disposed on the one surface of the second semiconductor layer in an opening formed on the one surface of the first semiconductor layer so as to reach the second semiconductor layer.

21. The optical device according to claim 16, wherein: It also has an electrode pad disposed on the substrate, The electrode pad is disposed on the one surface of the second semiconductor layer in an opening formed on the one surface of the first semiconductor layer so as to reach the second semiconductor layer.

22. A reflector unit, characterized in that: include: The optical device according to any one of claims 1 to 14; an optical functional component arranged on the other side of the prescribed direction relative to the optical device; and a fixed reflector arranged on the other side relative to the optical functional component, The optical function part is a reflective mirror surface which constitutes a movable reflector together with the movable part. The optical device includes a first light passage portion constituting a first portion of an optical path between a beam splitter unit and the fixed reflector, wherein the beam splitter unit, the movable reflector, and the fixed reflector together constitute an interference optical system. The optical functional component includes a second light passage portion constituting a second portion of the optical path between the beam splitter unit and the fixed reflecting mirror. The second light transmission portion corrects an optical path difference generated between an optical path between the beam splitter unit and the movable reflecting mirror and an optical path between the beam splitter unit and the fixed reflecting mirror.

23. A reflector unit, characterized in that: include: The optical device according to any one of claims 1 to 21; an optical functional component arranged on the other side of the prescribed direction relative to the optical device; and a fixed reflector arranged on the other side relative to the optical functional component, The optical function portion is a reflecting mirror surface that constitutes a movable reflecting mirror together with the movable portion.

Images