Electrostatic excitation circuit and control system of metal shell resonant gyroscope

Abstract

The present invention discloses an electrostatic excitation circuit and a control system of a metal shell resonant gyroscope. The electrostatic excitation circuit comprises: an excitation circuit configured to generate an electrostatic force as a driving force for a mass block in a metal resonator; a capacitor plate configured to apply an alternating electrostatic force to the mass block based on the driving force, to excite the mass block to perform simple harmonic motion, so as to drive the metal resonator to work, wherein the alternating voltage is greater than a threshold voltage. The present invention solves the technical problems of large errors and poor stability caused by contact excitation in traditional electrostatic excitation circuits.

Description

Technical Field

[0001] The present invention relates to the field of circuits, and in particular to an electrostatic excitation circuit and a control system of a metal shell resonant gyroscope. Background Art

[0002] As an important branch of vibrating gyroscopes in recent years, metal shell resonant gyroscopes not only have the inertial quality of traditional vibrating gyroscopes, but also have the characteristics of high structural strength, strong environmental adaptability, and wide dynamic range. The metal resonant gyroscope is called a metal shell resonant gyroscope because its sensitive structure, the resonator, is made of metal. The fundamental difference between this resonant sensor and other sensors is that the resonance is usually achieved by closed-loop drive. The drive of the resonator is divided into the excitation part and the detection part. Due to the metal material, the metal resonator requires sufficient excitation to work, so the design of the excitation circuit has become a key research direction.

[0003] Compared with common mechanical gyroscopes, resonant gyroscopes have no rotating structure, so their driving methods are very different. Common driving methods for resonant gyroscopes include electrostatic force, electromagnetic force, and piezoelectric drive. The traditional excitation method for metal shell resonant gyroscopes uses piezoelectric excitation, and the piezoelectric electrode is close to the free end of the resonator. This contact excitation affects the stiffness distribution of the resonator, resulting in an increase in the modal interference error, which limits the stability and range of the gyroscope.

[0004] To address the above-mentioned problems, no effective solution has been proposed yet. Summary of the invention

[0005] The embodiments of the present invention provide an electrostatic excitation circuit and a control system of a metal shell resonant gyroscope, so as to at least solve the technical problems of large error and poor stability caused by contact excitation of a traditional electrostatic excitation circuit.

[0006] According to one aspect of an embodiment of the present invention, there is provided an electrostatic excitation circuit, comprising:

[0007] an excitation circuit configured to generate an electrostatic force as a driving force for a mass block in the metal resonator;

[0008] The capacitor plate is configured to apply an alternating electrostatic force to the mass block based on the driving force, so as to excite the mass block to perform simple harmonic motion, so as to drive the metal resonator to work, wherein the alternating voltage is greater than a threshold voltage.

[0009] According to another aspect of an embodiment of the present invention, a control system of a metal shell resonant gyroscope is provided, comprising: a metal shell resonant gyroscope for collecting inertial navigation data; and the electrostatic excitation circuit as described above for exciting the metal shell resonant gyroscope.

[0010] According to another aspect of an embodiment of the present invention, an electrostatic excitation method is also provided, comprising: generating an electrostatic force as a driving force for a mass block in a metal resonator; based on the driving force, a capacitor plate applies an alternating electrostatic force to the mass block to excite the mass block to perform simple harmonic motion, so as to drive the metal resonator to operate, wherein the alternating voltage is greater than a threshold voltage.

[0011] According to another aspect of an embodiment of the present invention, there is provided an inertial navigation system, comprising the metal shell resonant gyroscope as described above, for collecting inertial navigation data.

[0012] In an embodiment of the present invention, electrostatic force is used as the driving force of the mass block in the resonator, a high-voltage alternating voltage is applied to two capacitor plates, and an alternating electrostatic force is applied to the mass block to stimulate the simple harmonic motion of the mass block and drive the metal resonator to work, thereby solving the technical problems of large errors and poor stability caused by contact excitation in traditional electrostatic excitation circuits. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of this application. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0014] Figure 1 is a schematic diagram of a parallel plate capacitor according to an embodiment of the present invention;

[0015] Figure 2 is a schematic diagram of a bilateral comb-teeth electrode according to an embodiment of the present invention;

[0016] Figure 3 is a circuit diagram of an excitation circuit according to an embodiment of the present invention;

[0017] Figure 4 is a circuit diagram of a high voltage circuit according to an embodiment of the present invention;

[0018] Figure 5 is a circuit diagram of a DC inverter module according to an embodiment of the present invention;

[0019] Figure 6 is a schematic diagram of a reverse PWM wave according to an embodiment of the present invention;

[0020] Figure 7 is a schematic diagram of the output voltage before filtering of a half-bridge inverter module according to an embodiment of the present invention;

[0021] Figure 8 is a schematic diagram of an output voltage after filtering by a half-bridge inverter module according to an embodiment of the present invention;

[0022] Fig. 9is a circuit diagram of another electrostatic excitation circuit according to an embodiment of the present invention;

[0023] Fig.10 is a schematic structural diagram of a control system of a metal shell resonant gyroscope according to an embodiment of the present invention;

[0024] Fig.11 is a flow chart of an electrostatic excitation method according to an embodiment of the present invention. DETAILED DESCRIPTION

[0025] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0026] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0027] Explanation of terms

[0028] Electrostatic excitation uses electrostatic force to simulate the principle of sound wave force. A known electrostatic force is added to the diaphragm of the condenser microphone (metal or metal-coated) through an auxiliary electrode to perform frequency response on the condenser microphone.

[0029] Overview

[0030] The present application provides an excitation circuit based on the electrostatic excitation method. Electrostatic excitation belongs to non-contact excitation and is widely used in various silicon micro-vibration gyroscopes. This method uses electrostatic force as the driving force of the mass block in the resonator. A high voltage alternating voltage is applied to two capacitor plates, and an alternating electrostatic force is applied to the mass block to excite the simple harmonic motion of the mass block and drive the metal resonator to work.

[0031] Example 1

[0032] According to an embodiment of the present invention, an electrostatic excitation circuit is provided for a micro-sized metal shell resonant gyroscope, which converts the input positive and negative high voltages into sinusoidal high voltage outputs through a DC inverter circuit and applies them to a pair of capacitor plates. Figure 1 As shown, the area of ​​the upper and lower capacitor plates is S, the capacitance value is C, and the distance is X. The capacitor plate voltages V1 and V2 are applied respectively, so that the mass block between the plates is subjected to an electrostatic force F d The excitation performs simple harmonic motion, provides the linear velocity required by the Coriolis force, and drives the metal resonator to obtain the sensitive modal signal and then calculate the angular velocity. The embodiment of the present application can be divided into two parts: electrode design and excitation circuit.

[0033] 1) Electrode design

[0034] The capacitor plates are designed as variable area double-sided comb electrodes, such as Figure 2 The comb-shaped mass block is excited by two charged comb-shaped electrodes, the mass block comb teeth are located in the middle of the electrode comb teeth, and the AC parts of the capacitor plate voltages V1 and V2 are inverted respectively:

[0035] V1=V d +V a sinωt (1)

[0036] V2=V d -V a sinωt (2)

[0037] Among them, V d Indicates the DC voltage amplitude, V a represents the AC voltage amplitude, ω represents the AC voltage frequency, and t represents time.

[0038] The electric field is formed by applying a sinusoidal high voltage to the capacitor plates, so the electrostatic force and the resultant force generated are:

[0039]

[0040] Among them, F d1 represents the electrostatic force generated by the upper electrode, n represents the number of active comb teeth, x0 represents the thickness of the comb teeth, d represents the distance between the fixed comb teeth and the active comb teeth, and F d Represents the electrostatic force of the upper and lower plates, F d2 represents the electrostatic force generated by the lower electrode, ε represents the vacuum dielectric constant, a represents the distance between the fixed comb teeth and the movable comb teeth in the initial state, and b represents the width of the comb teeth. The embodiment of the present application introduces the distance a between the fixed comb teeth and the movable comb teeth in the initial state and the width b of the comb teeth to calculate the electrostatic force and the resultant force, so that the calculated electrostatic force and the resultant force are more accurate.

[0041] The electrostatic force of the upper and lower electrodes causes the mass block to move. From formula (5), it can be seen that the electrostatic force is not affected by the overlapping area of ​​the mass block and the electrode. Only when the voltage of the capacitor plate changes, the electrostatic force changes, thus forming a stable resonant motion. In the embodiment of the present application, the electrode material is aluminum, the electrode thickness is 0.2μm, the bonding area is pressed into length is 20μm, the tooth width is 10μm, and the number of teeth is 10 as appropriate electrode design parameters.

[0042] 2) Excitation circuit

[0043] The electrostatic excitation circuit adopts switch-type drive, such as Figure 3 As shown, it is mainly composed of a high-voltage circuit 32 and a DC inverter circuit 34. The high-voltage circuit is responsible for generating positive and negative DC high voltages and inputting them into the DC inverter circuit. The DC inverter circuit first uses the 4-way PWM wave generated by the single-chip microcomputer to isolate through optical coupling, control the drive circuit to output the drive signal, and then the signal drives the half-bridge inverter template to work, inverting the input positive and negative high voltages into high-voltage alternating square waves, and finally outputting high-voltage sine waves through the filter circuit to complete the DC-AC conversion.

[0044] The following is a detailed introduction to each circuit.

[0045] High voltage circuit: Generate ±400V high voltage for the excitation circuit, convert DC to AC through the inverter circuit, and the AC high voltage can provide sufficient electrostatic force F d , thereby fully exciting the mass block m and ensuring the sensitivity S of the metal resonator y As shown in the following formula (6) and (7)

[0046]

[0047] Among them, C represents the capacitance value between the plates, V represents the voltage value between the plates, x represents the plate spacing, s represents the plate area, ω d represents the driving angular frequency, and ω represents the natural angular frequency of the driving mode.

[0048] The circuit composed of two LT3580 synchronous boost chips generates positive and negative high voltages respectively. Taking the principle of generating positive voltage as an example, Figure 4 As shown. 5V voltage is input to the chip power pin VIN and the start-up and shutdown pin SHDN through the input filter capacitor C2. The internal comparator negative input pin VC is connected to the external compensation circuit composed of R3 and C5 in parallel with C3, the soft start pin SS is connected to the start capacitor C4, the synchronous input pin SYNC is grounded, the oscillator charging pin RT is connected to the large resistor R2, and the output pin SW is connected to the transformer T1 and the Schottky diode D2 ground protection circuit. After transformation, it passes through the withstand voltage diode D1 and the output filter capacitor C1. The output voltage V OUT Can be set by feedback resistor R1 The appropriate resistance value is calculated according to the formula to output a voltage of ±400V.

[0049] The DC inverter circuit can be divided into: optical coupling isolation module, drive module, half-bridge inverter module, RC filter module, such as Figure 5 shown.

[0050] Optical coupling isolation module: The optical coupling isolation module uses PS2801-4 four-channel optical coupling isolator. Each channel does not affect each other. 10k shunt resistors R1R3R10R18 are connected in parallel to achieve the conversion between "electricity-light-electricity", so that the output signal will not affect the input signal. Therefore, it has strong anti-interference ability and stable operation. The four input signals PWM1 and PMW2 are a pair of mutually opposite PWM waves, and PWM3 and PMW4 are a pair of mutually opposite PWM waves. Figure 6 As shown. PWM1 and PWM2 through the isolator control the on and off of the transistor to generate an alternating signal output to the HI pin of the gate driver behind. The same is true for PWM3 and PWM4, which are output to the LI pin of the gate driver behind.

[0051] Driver module: The driver module uses UCC27714D with 600V high-end and low-end gate drivers as the main chip. The chip enable pin EN and the power pin VDD are connected to 12V, and the logic ground pin VSS is connected to -400V. The 12V power supply is connected to the chip HB through the fast recovery diode D1 and the current limiting resistor R2, and then connected to the HS pin through the charging capacitor C2 to complete the bootstrap boost circuit. Capacitor C2 is selected according to C2≥10×C g ≥76nf, so 0.1nf is selected. The two signals output by the optical coupling isolation template are connected to the high-end input pin HI and the low-end input pin LI respectively. The output of the pins HO and LO can be controlled according to the logic level of the pins HL and LI. Figure 5 , the output drives the MOS tube behind to turn on and off to achieve inversion. HS is the high-side output return pin, and COM is the low-side output return pin. Among them, C g Indicates the gate capacitance of the MOS tube, Q g Indicates the gate charge value of the MOS tube, V Q1g Indicates the gate voltage value of the MOS tube.

[0052]

[0053] Table 1

[0054] Half-bridge inverter module: The outputs of driver pins HO and LO are connected to the gates of two NMOS tubes Q3 and Q4 respectively, and the HS pin and COM pin are connected to the source respectively, controlling the on and off of NMOS and thus controlling the conduction of ±400V high voltage. Because the outputs of pins HO and LO are always a high level and a low level, driving NMOS to turn on and off alternately, the positive and negative high voltages are alternately output to form a square wave alternating voltage, such as Figure 7 As shown. Because there is junction capacitance between NMOS tubes DG and GS, R3, R4, and C3 are connected in parallel to form a resistor-capacitor circuit to release the charge stored in the junction capacitance to prevent damage to the NMOS tube. The fast recovery diode D2 can speed up the MOS tube shutdown.

[0055] RC filter module: The low-pass passive filter circuit composed of R1 and C1 filters the square wave voltage output by the rectifier, removes the high-order harmonics and leaves the fundamental wave as a sine wave output, such as Figure 8 shown.

[0056] The electrostatic excitation circuit provided in the embodiment of the present application solves the problems of large error, poor stability, stability and range of the gyroscope in the traditional contact excitation. In addition, the applied high voltage alternating voltage can solve the problem that the metal resonator cannot be fully excited and has low sensitivity.

[0057] Example 2

[0058] According to an embodiment of the present invention, an electrostatic excitation circuit is provided, such as Fig. 9 As shown, the electrostatic excitation circuit includes: an excitation circuit 92, which is configured to generate an electrostatic force as a driving force for a mass block in a metal resonator; a capacitor plate 94, which is configured to apply an alternating electrostatic force to the mass block based on the driving force, to excite the mass block to perform simple harmonic motion, so as to drive the metal resonator to work, wherein the alternating voltage is greater than a threshold voltage.

[0059] In an exemplary embodiment, the excitation circuit 92 includes: a high-voltage circuit, configured to generate positive and negative DC high voltage, wherein the DC high voltage is a voltage greater than or equal to a voltage threshold; a DC inverter circuit, configured to invert the input positive and negative DC high voltage into a high-voltage alternating square wave, and convert the high-voltage alternating square wave into a high-voltage sinusoidal wave through filtering.

[0060] In an exemplary embodiment, the DC inverter circuit includes: an optical coupling isolation module, configured to perform electrical-optical-electrical conversion on an input signal so that the output signal will not affect the input signal, and the input signal is a multi-channel PWM wave generated by a single-chip microcomputer; a driving module, configured to output a driving signal based on the multi-channel PWM wave; a half-bridge inverter module, configured to invert the positive and negative DC high voltage into the high-voltage alternating square wave based on the driving signal; and an RC filtering module, configured to convert the high-voltage alternating square wave into the high-voltage sine wave after filtering.

[0061] In an exemplary embodiment, the optical coupling isolation module uses a four-channel optical coupling isolator, each of the four channels does not affect each other, and each channel is connected in parallel with a shunt resistor to achieve the electrical-optical-electrical conversion.

[0062] In an exemplary embodiment, based on the input PWM wave, the coupling isolator of each channel in the four-channel optical coupling isolator generates an alternating output terminal signal by controlling the on-off of a transistor.

[0063] In an exemplary embodiment, the capacitor plate 94 is a variable-area double-sided comb-tooth electrode plate electrode, and the capacitor plate 94 includes two upper and lower charged comb-tooth electrode pairs. The electrode pairs are configured to apply sinusoidal high voltage to form an electric field, generate the electrostatic force, and move the mass block.

[0064] In an exemplary embodiment, the material of each electrode in the electrode pair is aluminum and has a thickness of 0.2 μm. Each electrode in the electrode pair includes a plurality of electrode comb teeth with a length of 20 μm and a tooth width of 10 μm. The plurality of electrode comb teeth are pressed into the bonding area between the electrode pair and the mass block, wherein the mass block is located in the middle of the electrode comb teeth of the electrode pair.

[0065] Example 3

[0066] According to an embodiment of the present invention, a control system of a metal shell resonant gyroscope is provided, such as Fig.10 As shown, the gyroscope includes a metal shell resonant gyroscope 12 , an electrostatic excitation circuit 14 , a detection circuit 16 and a data resolution component 18 .

[0067] In this embodiment, the detection of the metal shell resonant gyroscope 12 is completed by a piezoelectric electrode. The piezoelectric electrode is attached to the wall of the oscillator, and the piezoelectric effect of the piezoelectric electrode is used to detect the vibration mode of the resonator.

[0068] The detection circuit 16 is used to detect the disturbance of the metal shell resonant gyroscope 12. The data solving component 18 is used to calculate the control voltage for inputting into the electrostatic excitation circuit 14 based on the disturbance detected by the detection circuit 16. The electrostatic excitation circuit 14 is used to generate an electrostatic force based on the control voltage. The electrostatic force is used as a driving force to control the mass block of the metal shell resonant gyroscope 12 to perform simple harmonic motion, so as to drive the metal resonator to work.

[0069] The metal shell resonant gyroscope system can be regarded as a dual-input dual-output tracking system, and the tracking error of the detection circuit can be defined as

[0070] e(t)=X(t)-X d (t) (8)

[0071] The differential of the tracking error can be obtained as

[0072]

[0073] According to the dynamic equation, the state equation of the metal shell resonant gyroscope is determined as follows:

[0074]

[0075] in,

[0076] In this state equation, F d Define F as the input electrostatic force d The linear term of is the perturbation part of the model parameters.

[0077] Based on the state equation of the metal shell resonant gyroscope obtained by analysis and the given tracking error, the electrostatic excitation circuit is designed. First, the proportional integral sliding surface is selected as follows:

[0078]

[0079] Where s = [s p s q ] T , c is a constant coefficient matrix, satisfying cB is a full rank matrix; K e Satisfaction (A d +BK e ) is the Hurwitz matrix. So we can find that the derivative of the sliding surface is

[0080]

[0081] The sliding mode control based on the reaching law is selected, which has good robustness for this type of disturbance system. In the selection of the reaching law, the exponential reaching law is selected in this embodiment, and there is

[0082]

[0083] Among them, ε=diag{ε1 ε2}, k=diag{k1 k2}, so the sliding mode control law can be obtained as follows:

[0084]

[0085] Among them, K * =-(cB) -1 c(AA d ), AA d is the parameter perturbation, c is a constant. Obviously, due to the parameter perturbation AA d and disturbance r are unknown, the above control law cannot be implemented. First, for the parameter perturbation case AA d , using adaptive method to design control law

[0086]

[0087] in, It's K * Estimates.

[0088] The estimation error is defined as

[0089]

[0090] The final control law can be obtained as

[0091]

[0092] Among them, K e is the Hurwitz matrix, It's K * The estimate of K * is the measurement error, X(t) is the state variable at time t, e(t) is the tracking error, s(t) is the proportional integral sliding surface, cB is the full rank matrix, k is the constant coefficient, r1 and r2 are the disturbances of the X-axis and Y-axis respectively, and u(t) represents the control voltage at time t.

[0093] In this embodiment, the control system of the metal shell resonant gyroscope includes not only an electrostatic excitation circuit, but also a detection circuit and a data solution component, thereby forming a control loop. Based on the disturbance detected by the detection circuit, the solution is performed, so that the input voltage of the electrostatic excitation circuit can be changed in real time, so that the electrostatic excitation circuit can adaptively change the input voltage to reduce the error caused by the disturbance and more accurately drive the mass block of the metal shell resonant gyroscope to move.

[0094] Example 4

[0095] The embodiment of the present invention also provides an electrostatic excitation method, such as Fig.11As shown, the method comprises the following steps:

[0096] Step S1102: The excitation circuit generates an electrostatic force as a driving force for the mass block in the metal resonator.

[0097] In an exemplary embodiment, the high-voltage circuit of the excitation circuit generates positive and negative DC high voltages, and the DC high voltage is a voltage greater than or equal to a voltage threshold; the DC inverter circuit of the excitation circuit inverts the input positive and negative DC high voltages into high-voltage alternating square waves, and filters the high-voltage alternating square waves to convert them into high-voltage sinusoidal waves.

[0098] In an exemplary embodiment, the DC inverter circuit includes an optical coupling isolation module, a driving module, a half-bridge inverter module and an RC filter module. The optical coupling isolation module performs electrical-optical-electrical conversion on the input end signal so that the output end signal will not affect the input end signal, and the input end signal is a multi-channel PWM wave generated by a single-chip microcomputer; the driving module outputs a driving signal based on the multi-channel PWM wave; the half-bridge inverter module inverts the positive and negative DC high voltage into the high-voltage alternating square wave based on the driving of the driving signal; the RC filter module converts the high-voltage alternating square wave into the high-voltage sine wave after filtering.

[0099] The optical coupling isolation module uses a four-channel optical coupling isolator. Each of the four channels does not affect each other, and each channel is connected in parallel with a shunt resistor to achieve the electrical-optical-electrical conversion. Based on the input PWM wave, the coupling isolator of each channel in the four-channel optical coupling isolator generates an alternating output signal by controlling the on and off of the transistor.

[0100] Step S1104: the capacitor plate applies an alternating electrostatic force to the mass block based on the driving force to stimulate the mass block to perform simple harmonic motion, so as to drive the metal resonator to work, wherein the alternating voltage is greater than a threshold voltage.

[0101] In an exemplary embodiment, the capacitor plate is a variable-area double-sided comb-tooth electrode plate electrode, and the capacitor plate includes two upper and lower charged comb-tooth electrode pairs. The electrode pairs are configured to apply sinusoidal high voltage to form an electric field, generate the electrostatic force, and move the mass block.

[0102] In an exemplary embodiment, each electrode in the electrode pair is made of aluminum and has a thickness of 0.2 μm, and each electrode in the electrode pair includes a plurality of electrode comb teeth with a length of 20 μm and a tooth width of 10 μm, and the plurality of electrode comb teeth are pressed into a bonding area between the electrode pair and the mass block, wherein the mass block is located in the middle of the electrode comb teeth of the electrode pair.

[0103] Example 5

[0104] The embodiment of the present invention further provides a storage medium. Optionally, in this embodiment, the storage medium can implement the method in embodiment 4.

[0105] Optionally, in this embodiment, the above-mentioned storage medium may include but is not limited to: a USB flash drive, a read-only memory (ROM), a random access memory (RAM), a mobile hard disk, a magnetic disk or an optical disk, and other media that can store program codes.

[0106] The embodiment of the present invention may also be configured as follows:

[0107] An electrostatic excitation circuit comprises: an excitation circuit configured to generate an electrostatic force as a driving force for a mass block in a metal resonator; a capacitor plate configured to apply an alternating electrostatic force to the mass block based on the driving force, thereby exciting the mass block to perform simple harmonic motion to drive the metal resonator to work, wherein the alternating voltage is greater than a threshold voltage.

[0108] Among them, the excitation circuit includes: a high-voltage circuit, configured to generate positive and negative DC high voltage, and the DC high voltage is a voltage greater than or equal to a voltage threshold; a DC inverter circuit, configured to invert the input positive and negative DC high voltage into a high-voltage alternating square wave, and convert the high-voltage alternating square wave into a high-voltage sine wave after filtering.

[0109] Among them, the DC inverter circuit includes: an optical coupling isolation module, which is configured to perform electrical-optical-electrical conversion on the input end signal so that the output end signal will not affect the input end signal, and the input end signal is a multi-channel PWM wave generated by the single-chip microcomputer; a driving module, which is configured to output a driving signal based on the multi-channel PWM wave; a half-bridge inverter module, which is configured to invert the positive and negative DC high voltage into the high-voltage alternating square wave based on the driving of the driving signal; and an RC filtering module, which is configured to convert the high-voltage alternating square wave into the high-voltage sine wave after filtering.

[0110] The optical coupling isolation module uses a four-channel optical coupling isolator, each of the four channels does not affect each other, and is respectively connected in parallel with a shunt resistor to achieve the electrical-optical-electrical conversion.

[0111] Wherein, based on the input PWM wave, the coupling isolator of each channel in the four-channel optical coupling isolator generates an alternating output terminal signal by controlling the on-off of the transistor.

[0112] Among them, the capacitor plate is a variable-area double-sided comb-tooth electrode plate electrode, and the capacitor plate includes two upper and lower charged comb-tooth electrode pairs. The electrode pair is configured to apply sinusoidal high voltage to form an electric field, generate the electrostatic force, and move the mass block.

[0113] Wherein, the material of each electrode in the electrode pair is aluminum and the thickness is 0.2 μm, and each electrode in the electrode pair includes a plurality of electrode comb teeth with a length of 20 μm and a tooth width of 10 μm, and the plurality of electrode comb teeth are pressed into the bonding area between the electrode pair and the mass block.

[0114] Wherein, the mass block is located in the middle of the electrode comb teeth of the electrode pair.

[0115] A control system for a metal shell resonant gyroscope, wherein the control system comprises: a metal shell resonant gyroscope for collecting inertial navigation data; and the electrostatic excitation circuit as described above for exciting the metal shell resonant gyroscope.

[0116] Among them, the control system also includes a detection circuit and a data solution component, the detection circuit is configured to detect the disturbance of the metal shell resonant gyroscope, and the data solution component is configured to generate a control voltage based on the disturbance, and input the control voltage to the electrostatic excitation circuit as the DC high voltage.

[0117] The control voltage is generated based on the following formula:

[0118]

[0119] Among them, K e is the Hurwitz matrix, It's K * The estimate of K * is the measurement error, X(t) is the state variable at time t, e(t) is the tracking error, s(t) is the proportional integral sliding surface, cB is the full rank matrix, k is the constant coefficient, r1 and r2 are the disturbances of the X-axis and Y-axis respectively, and u(t) represents the control voltage at time t.

[0120] An electrostatic excitation method comprises: generating an electrostatic force as a driving force for a mass block in a metal resonator; applying an alternating electrostatic force to the mass block based on the driving force by a capacitor plate to excite the mass block to perform simple harmonic motion, so as to drive the metal resonator to work, wherein the alternating voltage is greater than a threshold voltage.

[0121] A control method for a metal shell resonant gyroscope comprises: the metal shell resonant gyroscope collects inertial navigation data; and the electrostatic excitation circuit as described above excites the metal shell resonant gyroscope.

[0122] The detection circuit detects the disturbance of the metal shell resonant gyroscope, and the data solution component generates a control voltage based on the disturbance, and inputs the control voltage to the electrostatic excitation circuit as the DC high voltage.

[0123] The control voltage is generated based on the following formula:

[0124]

[0125] Among them, K e is the Hurwitz matrix, It's K * The estimate of K * is the measurement error, X(t) is the state variable at time t, e(t) is the tracking error, s(t) is the proportional integral sliding surface, cB is the full rank matrix, k is the constant coefficient, r1 and r2 are the disturbances of the X-axis and Y-axis respectively, and u(t) represents the control voltage at time t.

[0126] It should be noted that, for the above-mentioned method embodiments, for the sake of simplicity, they are all described as a series of action combinations, but those skilled in the art should know that the present invention is not limited by the described action sequence, because according to the present invention, certain steps can be performed in other sequences or simultaneously. Secondly, those skilled in the art should also know that the embodiments described in the specification are all preferred embodiments, and the actions and modules involved are not necessarily required by the present invention.

[0127] Through the description of the above implementation methods, those skilled in the art can clearly understand that the method according to the above embodiment can be implemented by means of software plus a necessary general hardware platform, and of course can also be implemented by hardware, but in many cases the former is a better implementation method. Based on such an understanding, the technical solution of the present invention, or the part that contributes to the prior art, can be embodied in the form of a software product, which is stored in a storage medium (such as ROM / RAM, a magnetic disk, or an optical disk), and includes a number of instructions for enabling a terminal device (which can be a mobile phone, a computer, a server, or a network device, etc.) to execute the methods described in each embodiment of the present invention.

[0128] The serial numbers of the above embodiments of the present invention are only for description and do not represent the advantages or disadvantages of the embodiments.

[0129] If the integrated units in the above embodiments are implemented in the form of software functional units and sold or used as independent products, they can be stored in the above computer-readable storage medium. Based on such an understanding, the technical solution of the present invention, or the part that contributes to the prior art, or all or part of the technical solution can be embodied in the form of a software product, which is stored in a storage medium and includes several instructions for enabling one or more computer devices (which can be personal computers, servers or network devices, etc.) to perform all or part of the steps of the methods described in various embodiments of the present invention.

[0130] In the above embodiments of the present invention, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0131] In the several embodiments provided in the present application, it should be understood that the disclosed client can be implemented in other ways. Among them, the device embodiments described above are only schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of units or modules, which can be electrical or other forms.

[0132] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0133] In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit. The above-mentioned integrated unit may be implemented in the form of hardware or in the form of software functional units.

[0134] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A control system for a metal shell resonant gyroscope, characterized in that: include: Metal shell resonant gyro, used to collect inertial navigation data; An electrostatic excitation circuit, used for exciting the metal shell resonant gyroscope; The electrostatic excitation circuit includes: an excitation circuit configured to generate an electrostatic force as a driving force for a mass block in a metal resonator; a capacitor plate configured to apply an alternating electrostatic force to the mass block based on the driving force, to excite the mass block to perform simple harmonic motion, so as to drive the metal resonator to work; The control system further comprises a detection circuit and a data solving component, wherein the detection circuit is configured to detect the disturbance of the metal shell resonant gyroscope, and the data solving component is configured to generate a control voltage based on the disturbance, and input the control voltage to the electrostatic excitation circuit as the DC high voltage; The control voltage is generated based on the following formula: Among them, K e is the Hurwitz matrix, It's K * The estimate of K * is the measurement error, X(t) is the state variable at time t, e(t) is the tracking error, s(t) is the proportional integral sliding surface, cB is the full rank matrix, k is the constant coefficient, r1 and r2 are the disturbances of the X-axis and Y-axis respectively, and u(t) represents the control voltage at time t.

2. The system according to claim 1, characterized in that The excitation circuit comprises: A high voltage circuit is configured to generate positive and negative DC high voltage, wherein the DC high voltage is a voltage greater than or equal to a voltage threshold, wherein the DC high voltage is a DC voltage greater than a threshold voltage; The DC inverter circuit is configured to invert the input positive and negative DC high voltage into a high voltage alternating square wave, and convert the high voltage alternating square wave into a high voltage sine wave through filtering.

3. The system according to claim 2, characterized in that The DC inverter circuit comprises: The optical coupling isolation module is configured to perform electrical-optical-electrical conversion on the input terminal signal so that the output terminal signal will not affect the input terminal signal, and the input terminal signal is a multi-channel PWM wave generated by the single-chip microcomputer; A driving module, configured to output a driving signal based on the multiple PWM waves; A half-bridge inverter module is configured to invert the positive and negative DC high voltage into the high voltage alternating square wave based on the driving signal; The RC filter module is configured to convert the high-voltage alternating square wave into the high-voltage sine wave through filtering.

4. The system according to claim 3, characterized in that The optical coupling isolation module uses a four-channel optical coupling isolator, each of the four channels does not affect each other, and is respectively connected in parallel with a shunt resistor to achieve the electrical-optical-electrical conversion.

5. The system according to claim 4, characterized in that Based on the input PWM wave, the coupling isolator of each channel in the four-channel optical coupling isolator generates an alternating output terminal signal by controlling the on-off of the transistor.

6. The system according to claim 1, characterized in that The capacitor plate is a variable-area double-sided comb-tooth electrode plate, and the capacitor plate includes two upper and lower charged comb-tooth electrode pairs. The electrode pairs are configured to apply sinusoidal high voltage to form an electric field, generate the electrostatic force, and move the mass block.

7. The system according to claim 6, characterized in that The material of each electrode in the electrode pair is aluminum and the thickness is 0.2 μm. Each electrode in the electrode pair includes a plurality of electrode comb teeth with a length of 20 μm and a tooth width of 10 μm. The plurality of electrode comb teeth are pressed into the bonding area between the electrode pair and the mass block.

8. The system according to claim 7, characterized in that The mass block is located in the middle of the electrode comb teeth of the electrode pair.

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