Ultraviolet irradiation device

Abstract

The present application provides a kind of ultraviolet irradiation device, the degree of inhibition caused to human body impact.The ultraviolet irradiation device has: lampshade, at least one face is formed with light extraction surface;Excimer lamp, is housed in the lampshade in the position separated from the light extraction surface in the first direction, and emits the ultraviolet of the first wave band whose main emission wavelength belongs to 190nm above and 225nm below;A pair of electrodes, for applying voltage to the light emitting tube of excimer lamp;Optical filter, is configured to light extraction surface, substantially transmits the ultraviolet of the first wave band, on the other hand, substantially does not transmit the ultraviolet of wavelength 240nm above and 300nm below;And light diffuser, at least a part is configured to excimer lamp side than optical filter in the lampshade in the first direction, and makes the incident light diffuse reflection.

Description

Technical Field

[0001] This invention relates to an ultraviolet irradiation device. Background Technology

[0002] Previously, it was known that DNA exhibited the highest absorption characteristics around a wavelength of 260 nm. Additionally, low-pressure mercury lamps exhibited a high emission spectrum around a wavelength of 254 nm. Therefore, techniques for sterilization using ultraviolet light irradiation from low-pressure mercury lamps have been widely employed (see, for example, Patent Document 1).

[0003] However, light with a wavelength around 254nm may have adverse effects when it shines on the human body. Patent Document 2 discloses a technique that uses ultraviolet light with a wavelength of 207nm or higher and 220nm or lower in a medical setting to perform sterilization while avoiding risks to the human body.

[0004] Existing technical documents

[0005] Patent documents

[0006] Patent Document 1: Japanese Patent Application Publication No. 2011-048968

[0007] Patent Document 2: Japanese Patent No. 6025756 Summary of the Invention

[0008] The problem that the invention aims to solve

[0009] However, Patent Document 2 only mentions the use of ultraviolet light with wavelengths of 207 nm to 220 nm for sterilization in medical settings, and does not consider its general application to sterilization by ordinary consumers or workers in other industries outside of medical settings. For example, if the use of ultraviolet light in the aforementioned wavelength range for sterilization in living rooms, toilets, kitchens, bathrooms, conference rooms, hotel rooms, etc., is considered, the light source emitting this ultraviolet light is highly likely to be placed in a location visible to ordinary consumers or workers in ordinary businesses. Therefore, such an ultraviolet light source must be one whose effects on the human body are sufficiently suppressed.

[0010] The present invention was made in view of the above-mentioned problems, and its object is to provide an ultraviolet irradiation device that suppresses the degree of impact on the human body.

[0011] Technical solutions for solving the problem

[0012] The ultraviolet irradiation device of the present invention is characterized in that it comprises:

[0013] The lampshade shall have at least one surface that allows light to be emitted;

[0014] An excimer lamp is housed within the lamp cover at a position separated from the light extraction surface in a first direction and emits ultraviolet light belonging to a first wavelength band, the first wavelength band being the main emission wavelength of 190nm or more and 225nm or less.

[0015] Electrodes for applying voltage to the light-emitting tubes of the excimer lamp;

[0016] An optical filter, disposed on the light extraction surface, substantially transmits ultraviolet light of the first wavelength band, and substantially does not transmit ultraviolet light with wavelengths above 240 nm and below 300 nm; and

[0017] A light diffuser is disposed within the lampshade in the first direction closer to the excimer lamp side than the optical filter, and diffuses and reflects the incident light.

[0018] In this specification, the term "dominant emission wavelength" refers to the wavelength λi within a wavelength region Z(λi) that exhibits an integrated intensity of 40% or more relative to the total integrated intensity within the emission spectrum, given a wavelength region Z(λ) defined relative to a certain wavelength λ by ±10 nm. For example, in light sources such as excimer lamps containing luminescent gases including KrCl, KrBr, and ArF, which have extremely narrow half-widths and exhibit light intensity only at specific wavelengths, the wavelength with the highest relative intensity (the dominant peak wavelength) can typically be used as the dominant emission wavelength.

[0019] In this specification, "substantially transmits ultraviolet light" means that the intensity of ultraviolet light transmitted through the optical filter is 60% or more greater than the intensity of ultraviolet light incident on the optical filter. Conversely, "substantially does not transmit ultraviolet light" means that the intensity of ultraviolet light transmitted through the optical filter is less than 20% greater than the intensity of ultraviolet light incident on the optical filter.

[0020] In addition, optical filters can also substantially reflect ultraviolet light with wavelengths of 240 nm or higher and 300 nm or lower. Here, in this specification, "substantially reflect ultraviolet light" means that the intensity of the ultraviolet light reflected by the optical filter is 80% or more relative to the intensity of the ultraviolet light incident on the optical filter.

[0021] In practice, the transmittance or reflectance of ultraviolet light in an optical filter changes depending on the angle of incidence of the ultraviolet light relative to the incident ultraviolet light. Here, although the ultraviolet light emitted from the excimer lamp travels at a certain divergence angle, the light rays traveling at an angle near 0° relative to the light exit surface have the strongest intensity, and the intensity decreases as the divergence angle moves further away from 0°. Therefore, an optical filter exhibiting a transmittance of 60% or more relative to the intensity of ultraviolet light incident on the optical filter at an angle of incidence within 20° can be treated as an optical filter that substantially transmits ultraviolet light, as described above. Similarly, an optical filter exhibiting a transmittance of less than 20% relative to the intensity of ultraviolet light incident on the optical filter at an angle of incidence within 20° can also be treated as an optical filter that substantially does not transmit ultraviolet light, as described above. Likewise, an optical filter exhibiting a reflectance of 90% or more relative to the intensity of ultraviolet light incident on the optical filter at an angle of incidence within 20° can also be treated as an optical filter that substantially reflects ultraviolet light, as described above.

[0022] Excimer lamps that emit ultraviolet light with a primary wavelength belonging to the first band of ultraviolet light, although with extremely low intensity, can still emit ultraviolet light in a band (wavelength above 240nm and below 300nm) that may have an impact on the human body. Figure 1 This is an example of the emission spectrum of an excimer lamp (with a main peak wavelength around 222 nm) containing KrCl in its luminescent gas.

[0023] according to Figure 1 Although light output was confirmed even in wavelengths above 240 nm, it was not limited to excimer lamps containing KrCl as the luminescent gas. Other excimer lamps that emit ultraviolet light with wavelengths above 240 nm and below 300 nm, such as excimer lamps containing KrBr as the luminescent gas (main peak wavelength of 207 nm) and excimer lamps containing ArF as the luminescent gas (main peak wavelength of 193 nm), which emit ultraviolet light with main emission wavelengths belonging to the first band, can also emit ultraviolet light.

[0024] As described above, the ultraviolet irradiation device according to the present invention has an optical filter disposed on the light extraction surface side. This optical filter substantially transmits ultraviolet light of the first wavelength band and substantially reflects ultraviolet light with wavelengths of 240 nm or more and 300 nm or less. Therefore, for the components of ultraviolet light emitted from the excimer lamp with wavelengths of 240 nm or more and 300 nm or less, since they are substantially reflected in the optical filter, the amount extracted to the outside of the ultraviolet irradiation device is reduced. That is, by providing such an optical filter, the amount of light extracted to the outside is further reduced (even for components of the wavelength band with low light output), thereby further suppressing the effects on the human body.

[0025] However, as mentioned above, the transmittance or reflectance of ultraviolet light in the optical filter changes depending on the angle of incidence of the ultraviolet light relative to the optical filter. In the first band of ultraviolet light emitted from the ultraviolet irradiation device, the transmittance decreases and the reflectance increases as the angle of incidence relative to the optical filter becomes extremely large. Therefore, for ultraviolet light in the first band emitted from the excimer lamp that is incident at a relatively large angle of incidence (e.g., 30° or more) relative to the optical filter, a portion of it is reflected back to the excimer lamp side by the optical filter. As a result, the light extraction efficiency is reduced to some extent compared to the case without an optical filter, as the light is not extracted outside the ultraviolet irradiation device.

[0026] In contrast, the ultraviolet irradiation device according to the present invention includes a light diffuser located inside the lamp housing and positioned in a first direction closer to the excimer lamp than the optical filter, thus diffusing and reflecting the incident light. Therefore, even if the first-band ultraviolet light emitted from the excimer lamp and incident at a relatively large angle of incidence relative to the optical filter is reflected by the optical filter, at least a portion of the ultraviolet light will still incident on the light diffuser and be diffused and reflected within it. Since at least a portion of this diffused light incident on the optical filter at a relatively small angle of incidence, it passes directly through the optical filter and is extracted from the light extraction surface outside the lamp housing.

[0027] That is, according to the above structure, compared with the case without a light diffuser, the proportion of ultraviolet light passing through the optical filter increases, and the output of the first band of ultraviolet light extracted from the ultraviolet irradiation device increases.

[0028] In addition, the term "optical filter disposed on the light extraction surface" includes not only the case where the optical filter is disposed in a completely integrated manner with respect to the light extraction surface, but also the case where the optical filter is disposed at a position separated from the light extraction surface by a small distance (e.g., a few mm to tens of mm) in the first direction.

[0029] The location of a light diffuser can be in various forms.

[0030] For example, the pair of electrodes may also consist of a pair of electrode blocks, which are separately arranged along the axial direction of the light-emitting tube such that a portion of each block contacts the tube wall of the excimer lamp.

[0031] The light diffuser is formed on the surface of at least one of the electrode blocks in the region opposite to the optical filter.

[0032] In this case, the light diffuser may also be composed of uneven regions formed on the surface of the electrode block.

[0033] As another example, the ultraviolet irradiation device may have a first light diffuser plate as the light diffuser, which is disposed within the lampshade on the side opposite to the light extraction surface in the first direction and sandwiched between a pair of electrodes.

[0034] The first light diffusion plate can be made of a sheet or coating composed of particles of inorganic materials such as alumina or silicon dioxide, or particles of fluorinated resin materials such as polytetrafluoroethylene (PTFE).

[0035] As another example, the ultraviolet irradiation device may include a second light diffuser plate as the light diffuser, which is configured within the lampshade to clamp or surround the optical filter when viewed from the first direction.

[0036] The second light diffusion plate, like the first light diffusion plate described above, can be made of a sheet or coating composed of particles of inorganic materials such as alumina or silicon dioxide, or particles of fluorinated resin materials such as polytetrafluoroethylene (PTFE).

[0037] Invention Effects

[0038] According to the present invention, an ultraviolet irradiation device is available that can suppress the reduction in the light extraction efficiency of the first ultraviolet light and suppress the degree of its impact on the human body. Attached Figure Description

[0039] Figure 1 This is an example of the emission spectrum of an excimer lamp containing KrCl in its luminescent gas.

[0040] Figure 2 This is a perspective view schematically showing the appearance of the first embodiment of the ultraviolet irradiation device.

[0041] Figure 3 From Figure 2 A perspective view of the main body and cover of the lampshade of the ultraviolet irradiation device is provided.

[0042] Figure 4 It is a three-dimensional diagram schematically showing the structure of the electrode block and excimer lamp in an ultraviolet irradiation device.

[0043] Figure 5 From Figure 4 A stereoscopic view with a changed viewpoint.

[0044] Figure 6 It is a three-dimensional diagram schematically representing the structure of the electrode block.

[0045] Figure 7 Observing from the +Z direction Figure 4 A schematic top view of a 3D model.

[0046] Figure 8 This is a chart showing an example of the transmission spectrum of an optical filter.

[0047] Figure 9 This is a schematic diagram used to illustrate the angle of incidence of ultraviolet light relative to an optical filter.

[0048] Figure 10 This is a graph showing an example of the reflection spectrum of an optical filter.

[0049] Figure 11 This is a schematic cross-sectional view of the ultraviolet irradiation device of the first embodiment when cut with a plane parallel to the XZ plane.

[0050] Figure 12 This is a schematic exploded perspective view of the ultraviolet irradiation device according to the second embodiment.

[0051] Figure 13 It is a schematic representation Figure 12 A three-dimensional diagram showing the structure of the electrode block and excimer lamp in the ultraviolet irradiation device.

[0052] Figure 14 From Figure 13 A stereoscopic view with a changed viewpoint.

[0053] Figure 15 Observing from the +X direction Figure 13 A schematic top view of the excimer lamp shown.

[0054] Figure 16 This is a magnified view used to schematically illustrate the function of the light diffuser.

[0055] Figure 17A This is a schematic cross-sectional view of the ultraviolet irradiation device of the third embodiment when cut with a plane parallel to the XZ plane.

[0056] Figure 17B This is a schematic cross-sectional view of the ultraviolet irradiation device of the third embodiment when cut with a plane parallel to the XY plane.

[0057] Figure 18 This is another schematic cross-sectional view of the ultraviolet irradiation device of the third embodiment when cut with a plane parallel to the XZ plane. Detailed Implementation

[0058] Various embodiments of the ultraviolet irradiation device according to the present invention will be described with appropriate reference to the accompanying drawings. Furthermore, the following drawings are schematic illustrations, and the aspect ratios shown in the drawings may not necessarily correspond to the actual aspect ratios. Additionally, the aspect ratios may not be consistent between the various drawings.

[0059] [First Implementation Method]

[0060] A first embodiment of the ultraviolet irradiation device will be described.

[0061] Figure 2 This is a perspective view schematically showing the appearance of the first embodiment of the ultraviolet irradiation device. Figure 3 From Figure 2 A perspective view of the main body shell 2a and cover 2b of the lampshade 2 of the ultraviolet irradiation device 1, which has been exploded.

[0062] In the following figures, the explanation refers to the XYZ coordinate system, where the extraction direction of ultraviolet L1 is defined as the X direction, and the plane orthogonal to the X direction is defined as the YZ plane. For more details, please refer to... Figure 3 As described later in the accompanying figures, the tube axis direction of the excimer lamp 3 is defined as the Y direction, and the direction orthogonal to both the X and Y directions is defined as the Z direction. The X direction corresponds to the "first direction".

[0063] like Figure 2 and Figure 3 As shown, the ultraviolet irradiation device 1 includes a lamp cover 2 with a light extraction surface 10 formed on one side. The lamp cover 2 includes a main body housing 2a and a cover 2b, and an excimer lamp 3 and electrode blocks (11, 12) are housed in the main body housing 2a.

[0064] like Figure 2 and Figure 3 As shown, an optical filter 21 is provided in the area of ​​the light extraction surface 10 of the cover portion 2b, which is part of the lampshade 2. The characteristics of the optical filter 21 will be described later.

[0065] In this embodiment, an example is given where four excimer lamps 3 (3a, 3b, 3c, 3d) are housed within the lamp cover 2 (see reference). Figure 4 However, the number of excimer lamps 3 can be one, two, three, or more than five. The electrode blocks (11, 12) are electrically connected to the power supply line 8, forming electrodes for supplying power to each excimer lamp 3.

[0066] Figure 4 and Figure 5 From Figure 3 The illustration of the main housing part 2a, which constitutes part of the lamp cover 2, is omitted. Instead, a perspective view is provided showing the electrode blocks (11, 12) and the excimer lamps 3 (3a, 3b, 3c, 3d). Figure 4 and Figure 5 The observation directions are different. Additionally, in Figure 5 The holding member 9 used to hold the electrode blocks (11, 12) and the excimer lamp 3 is also illustrated. Figure 4For ease of illustration, retaining member 9 has been omitted.

[0067] in addition, Figure 6 From Figure 5 Only the electrode blocks (11, 12) were extracted and illustrated in a three-dimensional diagram.

[0068] like Figures 3-5 As shown, the ultraviolet irradiation device 1 of this embodiment includes four excimer lamps 3 (3a, 3b, 3c, 3d) arranged separately in the Z direction. In addition, two electrode blocks (11, 12) are arranged in contact with the outer surface of the light-emitting tube of each excimer lamp 3.

[0069] Electrode blocks (11, 12) are positioned separately along the Y direction. Figure 6 In the example shown, electrode block 11 has a mounting region 11a for mounting the excimer lamp 3, which is shaped like a curved surface along the outer surface of the light-emitting tube of the excimer lamp 3. Electrode block 12 also has a mounting region 12a for mounting the excimer lamp 3.

[0070] In this embodiment, a light diffusion surface 11b is formed in the region of the electrode block 11 other than the mounting region 11a in the region facing the light extraction surface 10. Similarly, a light diffusion surface 12b is formed in the region of the electrode block 12 other than the mounting region 12a in the region facing the light extraction surface 10.

[0071] The light diffusion surfaces 11b and 12b are formed to diffuse and reflect ultraviolet light L1 emitted from the excimer lamp 3. As an example, the light diffusion surfaces (11b, 12b) can be formed by roughening the surface of the metal material constituting the electrode blocks (11, 12). Alternatively, as another example, the light diffusion surfaces (11b, 12b) can be formed on the surface of the electrode blocks (11, 12) as a sheet or coating composed of particles of inorganic materials such as alumina or silicon dioxide, or particles of fluorinated resin materials such as polytetrafluoroethylene (PTFE).

[0072] The function of the light diffusion surfaces (11b, 12b) and the characteristics of the optical filter 21 will be described later.

[0073] In addition, Figure 6 In the example shown, a light diffusion surface 11b is formed in the electrode block 11, in the entire area other than the mounting area 11a in the region opposite to the light extraction surface 10. However, it is sufficient for the light diffusion surface 11b to be formed in at least a portion of the area other than the mounting area 11a. The same applies to the light diffusion surface 12b.

[0074] The electrode blocks (11, 12) are made of a conductive material, preferably a material that reflects ultraviolet light emitted from the excimer lamp 3. As an example, the electrode blocks (11, 12) are both made of Al, Al alloy, stainless steel, etc.

[0075] The electrode blocks (11, 12) are in contact with the outer surface of the light-emitting tube of each excimer lamp 3 (3a, 3b, 3c, 3d) and are configured to span each excimer lamp 3 in the Z direction.

[0076] Figure 7 This diagram schematically shows the positional relationship between the excimer lamp 3 and the electrode blocks (11, 12), corresponding to a schematic top view of the excimer lamp 3 viewed from the +Z direction. Additionally, in Figure 7 The diagram only shows excimer lamp 3a, which is located on the -Z side of the four excimer lamps 3 (3a, 3b, 3c, 3d). The diagrams of the other excimer lamps (3b, 3c, 3d) are omitted. However, as mentioned above, there are also excimer lamps (3b, 3c, 3d) arranged in the +Z direction.

[0077] The excimer lamp 3 has a light-emitting tube with the Y direction as its tube axis. At the separation position along the Y direction, the outer surface of the light-emitting tube of the excimer lamp 3 is in contact with each electrode block (11, 12). A luminescent gas 3G is sealed inside the light-emitting tube of the excimer lamp 3. When a power supply line 8 (refer to...) is connected between each electrode block (11, 12)... Figure 1 When a high-frequency AC voltage of approximately 10 kHz to 5 MHz is applied, the voltage is applied to the luminescent gas 3G via the light-emitting tube of the excimer lamp 3. At this time, a discharge plasma is generated in the discharge space containing the luminescent gas 3G, and the atoms of the luminescent gas 3G are excited to become excimer states. When these atoms transition to the ground state, excimer luminescence is generated.

[0078] The luminescent gas 3G is composed of materials that emit ultraviolet L1 light with a primary emission wavelength between 190 nm and 225 nm during excimer luminescence. For example, luminescent gas 3G includes KrCl, KrBr, and ArF. In addition to the above-mentioned gases, it may also contain inert gases such as argon (Ar) and neon (Ne).

[0079] For example, when the luminescent gas 3G contains KrCl, the predominant peak wavelength of ultraviolet L1 emitted from the excimer lamp 3 is around 222 nm. When the luminescent gas 3G contains KrBr, the predominant peak wavelength of ultraviolet L1 emitted from the excimer lamp 3 is around 207 nm. When the luminescent gas 3G contains ArF, the predominant peak wavelength of ultraviolet L1 emitted from the excimer lamp 3 is around 193 nm. Regarding the spectrum of ultraviolet L1 emitted from the excimer lamp 3 containing KrCl in the luminescent gas 3G, see reference [reference needed]. Figure 1 As stated above.

[0080] like Figure 1 As shown, when KrCl is included in the luminescent gas 3G, the light output in the ultraviolet L1 spectrum is mainly concentrated around 222nm, which is the main peak wavelength. However, light output is also observed in the band above 240nm, which is of concern for human health, although it is very small. Therefore, an optical filter 21 is provided in the region constituting the light extraction surface 10 to block the light component in this band.

[0081] Figure 8 This is a graph showing an example of the transmission spectrum of the optical filter 21, obtained by measuring the ratio of the intensity of light incident on the optical filter 21 to the intensity of light emitted from the optical filter 21 at each wavelength. Additionally, in Figure 8 In the diagram, the transmission spectrum is shown at the incident angle θ when ultraviolet L1 is incident relative to optical filter 21. Here, as... Figure 9 As shown, the incident angle θ is defined by the angle between the normal 21N relative to the incident surface of the optical filter 21 and the ultraviolet L1 incident on the incident surface of the optical filter 21.

[0082] have Figure 8 The optical filter 21 with the characteristics shown is designed assuming that the luminescent gas 3G of the excimer lamp 3 contains KrCl, that is, that the excimer lamp 3 emits ultraviolet L1 with a main peak wavelength of 222 nm. That is, as... Figure 8 As shown, the optical filter 21 substantially transmits ultraviolet L1 with a wavelength around 222 nm, more specifically 218 nm and below 226 nm, and substantially does not transmit ultraviolet L1 with a wavelength between 240 nm and 300 nm. The optical filter 21 can also be designed to substantially transmit ultraviolet L1 with wavelengths near the main peak wavelength of the ultraviolet L1 emitted from the excimer lamp 3, and substantially not transmit ultraviolet L1 with a wavelength between 240 nm and 300 nm.

[0083] according to Figure 8The optical filter 21 shown exhibits a transmittance of less than 5% for ultraviolet L1 above 240 nm and below 300 nm in the range of incident angle θ from 0° to 40°, and even at an incident angle θ of 50°, it exhibits a transmittance of less than 10%.

[0084] Thus, the optical filter 21, exhibiting different transmittances depending on the wavelength of the incident ultraviolet light L1, is implemented using multiple dielectric multilayer films with different refractive indices. On the other hand, when the optical filter 21 is composed of such multiple dielectric multilayer films with different refractive indices, the transmittance inevitably changes depending on the incident angle θ of the ultraviolet light L1 relative to the optical filter 21. As a result, as... Figure 8 As shown, for components near the dominant peak wavelength (222 nm in this example), the transmittance also decreases according to the incident angle θ of ultraviolet L1 relative to optical filter 21. For example, according to Figure 8 For example, when the incident angle θ is above 40°, the transmittance of ultraviolet L1 near 222nm is less than 20%.

[0085] In addition, a portion of the ultraviolet L1 that does not pass through the optical filter 21 is reflected by the optical filter 21. Figure 10 This is a graph showing an example of the reflection spectrum of the optical filter 21, obtained by measuring the ratio of the intensity of light incident on the optical filter 21 to the intensity of light reflected by the optical filter 21 at each wavelength. However, since the light-emitting part and the light-receiving part cannot be arranged on the same optical axis, therefore... Figure 10 The chart does not show data for cases where the incident angle θ is 0°.

[0086] according to Figure 10 The optical filter 21 shown exhibits a reflectivity of over 95% for ultraviolet L1 ranging from 240 nm to 300 nm within an incident angle θ of 10° to 40°, and even at an incident angle θ of 50°, it exhibits a reflectivity of over 90%.

[0087] Next, the effects of the light diffusion surfaces (11b, 12b) provided on the surfaces of the electrode blocks (11, 12) will be explained with reference to the accompanying drawings. Figure 11 This is a schematic cross-sectional view of the ultraviolet irradiation device 1 of this embodiment, cut along a plane parallel to the XZ plane at a specified Y-coordinate position. Figure 11 The image schematically illustrates the travel of ultraviolet light L1 emitted from the excimer lamp 3 towards the optical filter 21. Figure 11 The diagram illustrates, representatively, the ultraviolet L1 emitted from each excimer lamp 3, and the ultraviolet L1 emitted from excimer lamp 3c. Additionally, Figure 11The labels L1a, L1b, L1b1, and L1b2 all represent a portion of ultraviolet L1.

[0088] The ultraviolet light L1 emitted from each excimer lamp 3 travels toward the optical filter 21 at a predetermined divergence angle. For ultraviolet light L1a, which has a relatively small angle of incidence relative to the optical filter 21, the components near the main peak wavelength are substantially transmitted through the optical filter 21. However, for ultraviolet light L1b, which has a relatively large angle of incidence relative to the optical filter 21, even the components near the main peak wavelength are reflected by the optical filter 21 to a certain extent and travel toward the side opposite to the light extraction direction (-X direction) (ultraviolet light L1b1).

[0089] In this embodiment of the ultraviolet irradiation apparatus 1, a light diffusion surface 11b is formed on the surface of the electrode block 11. Therefore, a portion of the ultraviolet light L1b1 is incident on this light diffusion surface 11b and diffused and reflected (ultraviolet light L1b2). A portion of the diffused and reflected ultraviolet light L1b2 is incident relative to the optical filter 21 at an angle of incidence smaller than that of ultraviolet light L1b. As a result, a portion of the ultraviolet light L1b2 is extracted through the optical filter 21 and exits to the outside of the ultraviolet irradiation apparatus 1. Thus, compared to the case where the light diffusion surface 11b is not provided, the light extraction efficiency is improved. The same applies to the light diffusion surface 12b on the electrode block 12 side.

[0090] [Example]

[0091] An ultraviolet irradiation device 1, which forms a light diffusion surface 11b by providing a PTFE sheet on the surface of the light extraction surface 10 of the electrode block 11, and similarly forms a light diffusion surface 12b by providing a PTFE sheet on the surface of the light extraction surface 10 of the electrode block 12, is shown as Example 1. An ultraviolet irradiation device without PTFE sheets provided on the surfaces of each electrode block (11, 12) is shown as Reference Example 1. When the ultraviolet irradiation devices of Example 1 and Reference Example 1 are lit, and the illuminance on the irradiation surface provided on the outer side of the light extraction surface 10 is measured with an illuminance meter, the results are shown in Table 1 below.

[0092] [Table 1]

[0093] Illuminance (relative value) Reference Example 1 No PTFE 1.00 Example 1 PTFE 1.17

[0094] In addition, an ultraviolet irradiation device 1 was formed by roughening the surface of the light extraction surface 10 side of the electrode block 11 with a grinding tool of #500 grit to form an uneven region to form a light diffusion surface 11b, and similarly by forming an uneven region on the surface of the light extraction surface 10 side of the electrode block 12 to form a light diffusion surface 12b, which is an example of this embodiment. Reference Example 1 is an ultraviolet irradiation device in which, similarly as described above, no light diffusion surfaces (11b, 12b) are formed on the surface of the electrode blocks (11, 12), specifically, the surface of the electrode blocks (11, 12) is mirror-like. When the ultraviolet irradiation devices of Embodiment 2 and Reference Example 1 are lit, and the illuminance on the irradiation surface provided outside the light extraction surface 10 is measured, the results are shown in Table 2 below.

[0095] [Table 2]

[0096] Illuminance (relative value) Reference Example 1 The electrode surface is mirror-like. 1.00 Example 2 The electrode surface is rough. 1.07

[0097] The results in Tables 1 and 2 also confirm that light extraction efficiency is improved by forming light diffusion surfaces (11b, 12b) on the surface of the light extraction surface 10 side of the electrode blocks (11, 12).

[0098] [Second Implementation]

[0099] The third embodiment of the ultraviolet irradiation device will be described mainly focusing on the parts that differ from the first embodiment. The only difference between the ultraviolet irradiation device 1 in this embodiment and the first embodiment is the position of the light diffusion surface.

[0100] Figure 12 It is an imitation Figure 3 This is an exploded perspective view of the ultraviolet irradiation device according to this embodiment. Figure 13 and Figure 14 From Figure 12 The illustration omits the main housing portion 2a, which constitutes part of the lampshade 2, and instead extracts the electrode blocks (11, 12) and the excimer lamps 3 (3a, 3b, 3c, 3d) and presents a three-dimensional view, respectively modeled after... Figure 4 and Figure 5 A diagram has been provided. Additionally, Figure 15 Corresponding to observation from the +X direction Figure 13 A schematic top view of the excimer lamp 3 shown.

[0101] like Figures 12-15 As shown, the ultraviolet irradiation device 1 of this embodiment has a light diffusion plate 25 between the electrode block 11 and the electrode block 12. This light diffusion plate 25 corresponds to the "first light diffusion plate". The light diffusion plate 25 can be, for example, a sheet or coating made of inorganic material particles such as alumina or silicon dioxide, or fluorine resin material particles such as PTFE, formed on the surface of a glass component.

[0102] Figure 16 This is a partially enlarged view used to schematically illustrate the function of the light diffuser 25. In the first embodiment, as described above, a portion of the ultraviolet L1b with a relatively large incident angle relative to the optical filter 21 is reflected by the optical filter 21 and travels to the side opposite to the light extraction direction (-X direction), i.e., the electrode block (11, 12) side (ultraviolet L1b1).

[0103] In this embodiment, a light diffuser 25 is provided between electrode blocks 11 and 12. Therefore, a portion of ultraviolet light L1b1 is incident on the light diffuser 25 and diffused and reflected (ultraviolet light L1b2). A portion of the diffused ultraviolet light L1b2 is incident relative to the optical filter 21 at a smaller angle of incidence than ultraviolet light L1b. As a result, a portion of ultraviolet light L1b2 is extracted through the optical filter 21 and exits to the outside of the ultraviolet irradiation device 1. Thus, compared to the case where the light diffuser 25 is not provided, the light extraction efficiency is improved.

[0104] In addition, in the ultraviolet irradiation device 1 of this embodiment, the light diffusion surface (11b, 12b) may be provided on the surface of the electrode blocks (11, 12) in the same manner as in the first embodiment.

[0105] [Third Implementation Method]

[0106] The third embodiment of the ultraviolet irradiation device will be described mainly focusing on the parts that differ from the first embodiment. The only difference between the ultraviolet irradiation device 1 in this embodiment and the first embodiment is the position of the light diffusion surface.

[0107] Figure 17A and Figure 17B This is a cross-sectional view schematically showing the structure of the ultraviolet irradiation device 1 of this embodiment. Figure 17A Is with Figure 11 Similarly, a schematic cross-sectional view of the ultraviolet irradiation device 1 of this embodiment is shown, cut at a specified Y-coordinate position using a plane parallel to the XZ plane. Additionally, Figure 17B This is a schematic cross-sectional view of the ultraviolet irradiation device 1 cut by a plane parallel to the XY plane at a specified Z-coordinate position.

[0108] like Figure 17A and Figure 17B As shown, the ultraviolet irradiation device 1 of this embodiment has a light diffusion plate 26 on the inner side of the lamp cover 2. This light diffusion plate 26 corresponds to the "second light diffusion plate". Similar to the light diffusion plate 25 described above, the light diffusion plate 26 can be, for example, a sheet or coating made of inorganic material particles such as alumina or silicon dioxide, or fluorine resin material particles such as PTFE, formed on the surface of a glass component.

[0109] In this embodiment, a light diffuser plate 26 is arranged along the inner side of the lampshade 2 in such a way that it surrounds the optical filter 21 when viewed in the X direction.

[0110] In the first embodiment, as described above, a portion of the ultraviolet L1b, which has a relatively large angle of incidence relative to the optical filter 21, is reflected by the optical filter 21 and travels in the opposite direction (-X direction) to the light extraction direction (ultraviolet L1b1). In this embodiment, since a light diffuser 26 is disposed on the inner side of the lampshade 2, a portion of the ultraviolet L1b1 is incident on the light diffuser 26 and diffused and reflected (ultraviolet L1b2). A portion of the diffused and reflected ultraviolet L1b2 is incident relative to the optical filter 21 at a smaller angle of incidence than ultraviolet L1b. As a result, a portion of the ultraviolet L1b2 is extracted to the outside of the ultraviolet irradiation device 1 through the optical filter 21. Therefore, compared with the case where the light diffuser 26 is not provided, the light extraction efficiency is improved.

[0111] In the above embodiment, the light diffuser 26 is configured to surround the optical filter 21 when viewed along the X direction, but it is not necessary for the light diffuser 26 to be configured to surround all four directions. For example, when viewed along the X direction, the light diffuser 26 can be configured to sandwich the optical filter 21 in the Y direction or in the Z direction.

[0112] However, as Figure 18 As shown, in order to provide the light extraction surface 10 containing the optical filter 21 on the lamp cover 2, the lamp cover 2 may have an embedding mounting portion 2c formed by a protruding region in the X direction. In this case, a light diffuser plate 26 may also be provided on the inner surface of the mounting portion 2c. According to this structure, the separation distance between the excimer lamp 3 and the light diffuser plate 26 in the YZ plane direction can be made close, thus allowing ultraviolet light L1b1 reflected by the optical filter 21 to be incident on the light diffuser plate 26 at a high proportion. However, in Figure 18 Alternatively, the light diffusion plate 26 may not be provided on the inner side of the lampshade 2, but only on the inner side of the mounting part 2c.

[0113] In addition, in the ultraviolet irradiation device 1 of this embodiment, light diffusion surfaces (11b, 12b) may be provided on the surface of the electrode blocks (11, 12) in the same manner as in the first embodiment, and light diffusion plate 25 may be provided between the electrode blocks 11 and 12 in the same manner as in the second embodiment.

[0114] [Other Implementation Methods]

[0115] The ultraviolet irradiation apparatus 1 in the above embodiment has been described with electrode blocks (11, 12) on which excimer lamps 3 (3a-3d) are mounted. However, in the ultraviolet irradiation apparatus 1 of the second and third embodiments, the electrodes do not need to be block-shaped. For example, the electrodes can be formed by attaching conductive members constituting electrodes to the outer surface of the excimer lamps 3.

[0116] Label Explanation

[0117] 1: Ultraviolet irradiation device

[0118] 2: Lampshade

[0119] 2a: Main body shell section

[0120] 2b: Cover

[0121] 2c: Mounting section

[0122] 3, 3a, 3b, 3c, 3d: Excimer lamps

[0123] 3G: Emitting gas

[0124] 8: Power supply line

[0125] 9: Retaining components

[0126] 10: Light extraction surface

[0127] 11: Electrode Block

[0128] 11a: Placement area

[0129] 11b: Light diffusion surface

[0130] 12: Electrode block

[0131] 12a: Placement area

[0132] 12b: Light diffusion surface

[0133] 21: Optical Filter

[0134] 21N: Normal

[0135] 25: Light diffusion plate

[0136] 26: Light diffusion plate

Claims

1. An ultraviolet irradiation device, characterized in that, have: The lampshade shall have at least one surface that allows light to be emitted; An excimer lamp is housed within the lamp cover at a position separated from the light extraction surface in a first direction and emits ultraviolet light belonging to a first wavelength band, the first wavelength band being the main emission wavelength of 190nm or more and 225nm or less. A pair of electrodes for applying voltage to the light-emitting tube of the excimer lamp; An optical filter, disposed on the light extraction surface, substantially transmits ultraviolet light of the first wavelength band, and substantially does not transmit ultraviolet light with wavelengths above 240 nm and below 300 nm; and A light diffuser, within the lampshade, at least a portion of which is positioned in the first direction closer to the excimer lamp than the optical filter, diffuses and reflects the incident light. The ultraviolet irradiation device includes at least one of a light diffuser plate disposed within the lampshade on the side opposite to the light extraction surface in the first direction and sandwiched between a pair of electrodes, and a light diffuser plate disposed within the lampshade to sandwich or surround the optical filter when viewed from the first direction.

2. The ultraviolet irradiation device according to claim 1, characterized in that, The pair of electrodes includes a pair of electrode blocks disposed separately in the axial direction of the light-emitting tube of the excimer lamp, a portion of each electrode block being in contact with the tube wall of the light-emitting tube of the excimer lamp.

3. The ultraviolet irradiation device according to claim 1 or 2, characterized in that, The excimer lamp is encapsulated with a luminescent gas containing KrCl or KrBr.

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