Integrated box and pneumatic high vacuum baffle valve

Abstract

The present invention discloses an integrated box, comprising a box body and a cover plate mounted on the box body. An integrated box cavity is formed between the box body and the cover plate. A solenoid valve and a sensor assembly are disposed within the integrated box cavity. A through hole, an integrated box air inlet pipe, and an integrated box air outlet pipe are provided on one side of the integrated box. The solenoid valve communicates with the external air of the box body through the integrated box air inlet pipe and the integrated box air outlet pipe, respectively. The sensor assembly senses an external trigger signal through the through hole. An electrical connector is provided on the other side of the integrated box. The electrical connector is used to electrically connect the solenoid valve and the sensor assembly to the outside world. The integrated box and a pneumatic high-vacuum baffle valve including the integrated box provided by the present invention facilitate replacement of the solenoid valve and the sensor assembly, reducing maintenance costs.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum valves, in particular to an integrated box and a pneumatic high vacuum baffle valve. Background Art

[0002] Pneumatic high-vacuum flapper valves are a mature product widely used in the high-vacuum valve industry. In actual use, the solenoid valve and sensor components within the high-vacuum flapper valve are the most prone to failure. When a pneumatic high-vacuum flapper valve malfunctions, it can be difficult for the user to determine whether the fault lies with the solenoid valve or the sensor assembly. Furthermore, replacing the solenoid valve and sensor assemblies is inconvenient, requiring the manufacturer to dispatch professional after-sales personnel to the site where the pneumatic high-vacuum flapper valve is used to troubleshoot and replace parts. While the cost of the solenoid valve and sensor assemblies is relatively low, travel expenses for after-sales personnel are relatively high, resulting in extended downtime for the customer and increased repair costs. Summary of the Invention

[0003] The object of the present invention is to provide an integrated box and a pneumatic high vacuum baffle valve, which facilitate the replacement of the solenoid valve and the sensor assembly and reduce the maintenance cost.

[0004] The technical solution adopted by the pneumatic high vacuum flapper valve disclosed in the present invention is:

[0005] An integrated box comprises a box body and a cover plate arranged on the box body, an integrated box cavity is formed between the box body and the cover plate, a solenoid valve and a sensor assembly are arranged in the integrated box cavity, a through hole, an integrated box air inlet pipe and an integrated box air outlet pipe are opened on one side of the integrated box, the solenoid valve is communicated with the external gas of the box body through the integrated box air inlet pipe and the integrated box air outlet pipe respectively, the sensor assembly senses the external trigger signal through the through hole, and an electrical connector is provided on the other side of the integrated box, the electrical connector is used to electrically connect the solenoid valve and the sensor assembly to the outside world.

[0006] As a preferred solution, the solenoid valve is provided with a solenoid valve air inlet hole and a solenoid valve air outlet hole, the integrated box air inlet pipe includes the integrated box air inlet hole, the integrated box air inlet hole is provided on one side of the box body, one end of the integrated box air inlet pipe is communicated with the solenoid valve air inlet hole, and the other end is communicated with the external gas through the integrated box air inlet hole, the integrated box air outlet pipe includes a sealing groove, the sealing groove is provided at the bottom of the box body, one end of the integrated box air outlet pipe is communicated with the solenoid valve air outlet hole, and the other end is connected to the external gas through the sealing groove, and a first sealing ring is installed in the sealing groove.

[0007] As a preferred solution, an integrated box exhaust pipeline is opened on one side of the box body, and the integrated box exhaust pipeline includes an integrated box exhaust hole. A solenoid valve exhaust hole is opened on the solenoid valve, and one end of the integrated box exhaust pipeline is connected to the solenoid valve exhaust hole, and the other end is connected to the external gas through the integrated box exhaust hole.

[0008] As a preferred solution, the box body has a bottom plate and side plates arranged around the bottom plate, the solenoid valve is installed on the bottom plate, the through hole is located in the center of the bottom plate, the integrated box air inlet pipe and the integrated box air outlet pipe are respectively opened on the bottom plate, and the electrical connector is installed on a side plate.

[0009] As a preferred solution, one or more of a solenoid valve indicator light, a valve opening sensor indicator light and a valve closing sensor indicator light are installed on the side panel on the same side as the electrical connector.

[0010] A pneumatic high vacuum baffle valve comprises a cylinder assembly, a valve body and a valve plate assembly, wherein the cylinder assembly comprises a cylinder body, a piston and a signal trigger rod, the piston is located in the cylinder body, one side of the piston is connected to the valve plate assembly, and the center of the other side is connected to the signal trigger rod. It is characterized in that it comprises an integrated box according to any one of claims 1 to 4, the signal trigger rod passes through the through hole on the box body to transmit signals with the sensor assembly, and the valve body is connected to the integrated box by screws.

[0011] As a preferred solution, the sensor assembly includes one or two of a valve opening sensor and a valve closing sensor, the valve opening sensor and the valve closing sensor are micro switches, and a signal triggering boss is provided on the signal triggering rod, and the signal triggering boss is used to trigger the valve closing sensor to output a valve closing signal, and to trigger the valve opening sensor to output a valve opening signal.

[0012] As a preferred embodiment, the sensor assembly includes one or two of a valve opening sensor and a valve closing sensor, the valve opening sensor and the valve closing sensor are magnetic switches, and a permanent magnet is installed inside the signal trigger rod, and the permanent magnet is used to trigger the valve closing sensor to output a valve closing signal, and to trigger the valve opening sensor to output a valve opening signal.

[0013] As a preferred solution, a central sealing tube body is provided in the box body of the integrated box, one end of the central sealing tube body is connected to the through hole, and the other end is in contact with the cover plate. An integrated box cavity is formed between the box body, the central sealing tube body and the cover plate, and the integrated box cavity is filled with a constant temperature phase change material, and the phase change temperature of the constant temperature deformation material is 25 degrees to 40 degrees.

[0014] As a preferred solution, the valve body has a circular cylinder installation cavity, the outer wall of the cylinder is circular, and the cylinder is built into the cylinder installation cavity.

[0015] The beneficial effects of the integrated box disclosed in the present invention are as follows: an integrated box air inlet pipeline is opened on the box body of the integrated box to realize the air intake of the solenoid valve, an integrated box air outlet pipeline is opened on the box body to realize the gas exchange between the solenoid valve and the pneumatic high vacuum baffle valve, and a through hole is opened on the box body to realize the connection between the sensor assembly and the pneumatic high vacuum baffle valve. Since the solenoid valve and the sensor assembly are centrally arranged in the integrated box, no matter whether the solenoid valve or the sensor assembly fails, it is only necessary to replace the integrated box as a whole, and there is no need to send professional after-sales personnel to the site to troubleshoot the solenoid valve and the sensor assembly; since the integrated box and the pneumatic high vacuum baffle valve are arranged separately, when the solenoid valve or the sensor assembly in the integrated box fails, it is only necessary to replace the integrated box as a whole, and there is no need for the manufacturer to send professional after-sales personnel to replace it on site, so the replacement of the solenoid valve and the sensor assembly is convenient, and the maintenance cost of the pneumatic high vacuum baffle valve is reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Schematic diagram of the integrated box and pneumatic high vacuum baffle valve of the present invention;

[0017] Figure 2 It is a top view of the integrated box and the pneumatic high vacuum baffle valve of the present invention;

[0018] Figure 3 yes Figure 2 Cross-sectional view along the AA axis;

[0019] Figure 4 yes Figure 2 The cross-sectional view along the BB axis is rotated 90 degrees to maintain consistency in the top and bottom directions. The following drawings with the same situation will not be described again.

[0020] Figure 5 This is a right side view of the pneumatic high vacuum flapper valve of the present invention;

[0021] Figure 6 yes Figure 2 Cross-sectional view in CC direction;

[0022] Figure 7 yes Figure 2 Cross-sectional view along the DD direction;

[0023] Figure 8 yes Figure 2 Cross-sectional view along the EE direction;

[0024] Figure 9 is a schematic diagram of a case where the sensor assembly of the present invention is a magnetic switch;

[0025] Figure 10 This is an exploded schematic diagram of the integrated box and the pneumatic high vacuum baffle valve of the present invention;

[0026] Figure 11 Schematic diagram of the integrated box and the box body of the pneumatic high vacuum baffle valve of the present invention;

[0027] Figure 12 Schematic diagram of the integrated box and the cover plate of the pneumatic high vacuum baffle valve of the present invention;

[0028] Figure 13 This is a schematic diagram of the integrated box and the pneumatic high vacuum baffle valve of the present invention when the box body has a central sealing tube body;

[0029] Figure 14 This is a schematic diagram of the integrated box and the pneumatic high vacuum baffle valve of the present invention when the box body has another central sealing tube body;

[0030] Figure 15 It is an exploded schematic diagram of the third embodiment of the integrated box and the pneumatic high vacuum baffle valve of the present invention.

[0031] Figure 16 It is a schematic diagram of the integrated box and the integrated box and positioning pin of the pneumatic high vacuum baffle valve of the present invention. DETAILED DESCRIPTION

[0032] The present invention will be further described and explained below in conjunction with specific embodiments and accompanying drawings:

[0033] First embodiment:

[0034] Please refer to Figure 1 and Figure 10 The four valve body fixing screws 5 respectively fix the integrated box 1, cylinder assembly 2, valve body 3, and valve plate assembly 4 together through the four first cover plate fixing holes 102b, the box bottom plate fixing holes 101f, the cylinder fixing holes 201a and the valve body threaded fixing holes 307. The mechanical movement mode of the cylinder assembly 2, valve body 3, and valve plate assembly 4 is known and will not be elaborated in the present invention.

[0035] Please refer to Figure 3 and Figure 4In this embodiment, an independent integrated box 1 is added to the upper part of the cylinder assembly 2. The integrated box 1 has a square box body 101 and a square cover 102. The box body 101 has a box body bottom plate 101a and a first box body side plate 101b, a second box body side plate 101c, a third box body side plate 101d and a fourth box body side plate 101e. The center of the box body bottom plate 101a has a bottom plate center hole 101g, and the four corners of the box body bottom plate 101a are provided with four box body bottom plate fixing holes 101g. 1f, the center of the cover plate 102 has a cover plate center hole 102a, and the four corners of the cover plate 102 have four first cover plate fixing holes 102b. The cover plate 102 is installed on the box body 101. The box body 101, the cover plate 102 and the internal space constitute an integrated box chamber 116. The integrated box chamber 116 has a solenoid valve 103 and a sensor assembly, wherein the solenoid valve 103 is installed on the box body bottom plate 101a, and the sensor assembly includes a valve opening sensor 104 and a valve closing sensor 105. Figure 4 As shown, the two sensors are installed near the center hole of the bottom plate of the box body, wherein the valve opening sensor 104 is close to the upper cover plate 102, and the valve closing sensor 105 is close to the lower bottom plate 101a of the box body. When the valve is opened, the valve opening sensor 104 outputs a signal, and when the valve is closed, the valve closing sensor 105 outputs a signal (according to needs, only the valve opening sensor 104 or the valve closing sensor 105 can be installed); an electrical connector 106 is installed on the second box body side plate 101c, and the electrical leads of the sensor assembly and the solenoid valve 103 are connected to the electrical connector 106, and the external electrical signal is connected through the electrical connector 106.

[0036] The solenoid valve 103 in the present invention can adopt a two-position two-way or a two-position three-way, wherein the two-position three-way solenoid valve 103 includes a solenoid valve air outlet 103a, a solenoid valve air inlet 103b, and a solenoid valve exhaust hole 103c, and the two-position two-way solenoid valve 103 only includes a solenoid valve air outlet 103a and a solenoid valve air inlet 103b. This type of solenoid valve exhausts to the integrated box chamber 116 through the solenoid valve itself, and then can be exhausted through the cover plate 102 or the opening on one of the side panels of the box body 101. The two-position two-way solenoid valve eliminates the processing of the exhaust pipeline and is simpler than the two-position three-way solenoid valve. In this embodiment, only a two-position three-way solenoid valve is used for illustration.

[0037] Please refer to Figure 6, an integrated box air inlet pipe 114 (a first air inlet hole 114a, a second air inlet hole 114b and an air inlet hole 107a) is provided in the bottom plate 101a of the box body, and the air inlet pipe 107 includes an integrated box air inlet hole 107a, wherein the solenoid valve air inlet hole 103b is connected to the integrated box air inlet hole 107a through the first air inlet hole 114a and the second air inlet hole 114b. The integrated box air inlet hole 107a has a threaded structure, and an air inlet connector 107 can be installed, and an external high-pressure gas pipeline is connected through the air inlet connector 107.

[0038] Please refer to Figure 7 The bottom plate 101a of the box body has an integrated box outlet pipe 113 (a first outlet hole 113a, a second outlet hole 113b and a third outlet hole 113c). Figure 7 The integrated box air outlet pipe 113 shown also requires a first pipe plug 113e for sealing. A sealing groove 113d is also machined into the lower portion of the box body bottom plate 101a. The solenoid valve air outlet 103a is connected to the sealing groove 113d through the first air outlet 113a, the second air outlet 113b, and the third air outlet 113c. The cylinder body 201 in the cylinder assembly 2 has a cylinder body air outlet pipe 209 (first cylinder body air outlet 209a and second cylinder body air outlet 209b), of which the second cylinder body air outlet 209b is connected to the bottom of the cylinder chamber 208. The cylinder body air outlet pipe 209 shown in the figure also requires a second pipe plug 209c for sealing. The sealing groove 113d is connected to the cylinder chamber 208 in the cylinder assembly 2 through the first cylinder body air outlet 209a and the second cylinder body air outlet 209b. A first sealing ring 112 is installed inside the sealing groove 113d. The sealing groove 113d and the first cylinder air outlet 209a are sealed by the first sealing ring 112 to form a closed air path.

[0039] Please refer to Figure 8 An integrated box exhaust pipe 115 (a first exhaust hole 115a, a second exhaust hole 115b and an integrated box exhaust hole 115c) is provided in the bottom plate 101a of the box body, wherein the solenoid valve exhaust hole 103c is exhausted through the first exhaust hole 115a, the second exhaust hole 115b and the integrated box exhaust hole 115c. The integrated box exhaust hole 115c has a threaded structure and a muffler 111 can be installed to reduce exhaust noise.

[0040] Please refer to Figure 3When the solenoid valve 103 is opened, the solenoid valve exhaust hole 103c is in a closed state, the solenoid valve air inlet 103b is connected to the solenoid valve air outlet 103a, and the external high-pressure gas passes through the air inlet connector 107, the integrated box air inlet 107a, the first air inlet 114a, the second air inlet 114b, the solenoid valve air inlet 103b, the solenoid valve air outlet 103a, the first air outlet 113a, the second air outlet 113b, the third air outlet 113c, the sealing groove 113d, the first cylinder body air outlet 209a and the second cylinder body air outlet 209b to provide high-pressure gas to the cylinder chamber 208 and drive the piston 203 to move upward to the top of the cylinder chamber 208, and the valve is opened.

[0041] When the solenoid valve 103 is closed, the solenoid valve air inlet 103b is in a closed state, the solenoid valve exhaust hole 103c is connected to the solenoid valve air outlet 103a, and the high-pressure gas in the cylinder chamber 208 is exhausted in sequence through the second cylinder body air outlet 209b, the first cylinder body air outlet 209a, the sealing groove 113d, the third air outlet 113c, the second air outlet 113b, the first air outlet 113a, the solenoid valve air outlet 103a, the solenoid valve exhaust hole 103c, the first exhaust hole 115a, the second exhaust hole 115b, the integrated box exhaust hole 115c, and the muffler 111, and the piston 203 returns to the bottom of the cylinder chamber 208 through the spring pressure provided by the spring 404, and the valve is closed.

[0042] Please refer to Figure 4 and Figure 13 The sensor assembly is a micro switch, and a signal trigger rod 202 is installed in the center position above the piston 203. The signal trigger rod 202 has a signal trigger boss 202a and passes through the center hole 101g of the bottom plate of the box body; when the valve is closed, the signal trigger boss 202a is located below the valve closing sensor 105, and the valve closing sensor 105 outputs an electrical signal indicating that the valve is closed; when the valve is opened, the piston 203 moves to the upper part of the cylinder chamber 208, and the signal trigger rod 202 moves upward together with the piston 203, and the signal trigger boss 202a triggers the valve closing sensor 105 and the valve opening sensor 104 in turn, and the valve opening sensor 104 outputs a valve opening signal; when the pressure in the cylinder chamber is insufficient, the piston 203 only moves to the middle of the cylinder chamber 208. At this time, the signal trigger boss 202a only triggers the valve closing sensor 105. This signal can provide the outside world with information about insufficient gas source pressure.

[0043] When the signal trigger rod 202 is long enough, the signal trigger rod 202 will pass through the center hole 102a of the cover plate after the valve is opened, which can serve as a mechanical indication signal of the valve opening; when the signal trigger rod 202 is designed to be shorter, the center hole 102a of the cover plate is not necessary.

[0044] In this embodiment, the sensor assembly can also use a magnetic switch (this solution will no longer be explained as a separate embodiment). The sensor assembly is a magnetic switch. The upper part of the signal trigger rod 202 has a threaded hole, and the hole has a permanent magnet 210. The permanent magnet 210 is fixed by a permanent magnet fixing screw 211. The permanent magnet 210 replaces the signal trigger boss 202a as the signal trigger device of the sensor assembly; when the valve is closed, the permanent magnet 210 triggers the valve closing sensor 105, and the valve closing sensor 105 outputs an electrical signal indicating that the valve is closed; when the valve is open, the piston 203 moves to the top of the cylinder chamber 208, the permanent magnet 210 triggers the valve opening sensor 104, and the valve opening sensor 104 outputs a valve opening signal.

[0045] Please refer to Figure 11 and 12 In this embodiment, the box body 101 and the cover plate 102 can also be fixed together with screws to form an inseparable whole (this solution will not be described as a separate embodiment). Two cover plate fixing threaded holes 101h are machined on the box body bottom plate 101a, and two second cover plate fixing holes 102c are machined on the cover plate 102. Two fixing screws pass through the two second cover plate fixing holes 102c and are fixed in the two cover plate fixing threaded holes 101h. The box body 101 and the cover plate 102 form an inseparable whole. There should be at least one cover plate fixing threaded hole 101h and one cover plate fixing hole 102c, and in this embodiment, there are preferably two.

[0046] Please refer to Figure 5 In this embodiment, the second box body side plate 101c also has a solenoid valve indicator light 108, a valve open solenoid valve indicator light 109 and a valve closed sensor indicator light 110.

[0047] In this embodiment, the integrated box air outlet pipe 113, the integrated box air inlet pipe 114 and the integrated box exhaust hole 115c can also be processed into different distribution pipeline forms, the straight pipeline can also be replaced by an inclined hole, the integrated box air inlet hole 107a and the integrated box exhaust hole 115c can also be distributed on different box body side panels, different professional and technical personnel can design different gas pipeline distribution methods, so the present invention is not limited to the pipeline distribution method described in this embodiment.

[0048] The description and drawings of this embodiment have demonstrated the principles and structure of the present invention. To save space, some simple variations will not be described in terms of new embodiments. Therefore, the present invention is not limited to this embodiment. Any equivalent modifications made to a certain extent based on this embodiment should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection defined by the claims.

[0049] Second embodiment:

[0050] Please refer to Figure 1 、 Figures 11 to 13 In the first embodiment, when a magnetic switch is used as the sensor assembly, a tubular central sealing tube 101k is added to the center of the bottom plate 101a of the housing 101. The upper edge of the central sealing tube 101k is flush with the side plates. When the cover 102 is installed on the housing 101, the central sealing tube 101k forms a closed integrated chamber 116 within the housing 1. A hole is defined in the center of the central sealing tube 101k, with an inner diameter equal to that of the center hole 101g of the bottom plate. This hole, together with the center hole 101g of the bottom plate and the center hole 102a of the cover, forms a hole through which the signal trigger rod 202 can pass. The central sealing tube 101k isolates the sensor assembly from the signal trigger rod 202. Therefore, a microswitch-type sensor assembly cannot be used in this embodiment. Therefore, the sensor assembly in this embodiment must be a magnetic switch.

[0051] In this embodiment, the solenoid valve can only be a two-position three-way type, because the closed integrated box chamber 116 cannot provide an exhaust function for the solenoid valve 103. The solenoid valve 103 must have an exhaust hole and be exhausted through the integrated box exhaust pipe 115 in the box bottom plate 101a.

[0052] In this embodiment, the box body 101 and the cover plate 102 need to be fixed together with screws to form an inseparable whole.

[0053] The sealed integrated box chamber 116 is filled with a constant-temperature phase-change material. Phase-change wax or microcapsules can be used as the constant-temperature phase-change material, and the phase-change temperature of the constant-temperature phase-change material is preferably between 25°C and 40°C. Because the constant-temperature phase-change material can absorb a large amount of heat at the phase-change temperature, when the solenoid valve operates for a long time, the heat generated by the solenoid valve 103 is absorbed by the constant-temperature phase-change material and dissipated through the outer wall of the integrated box 1, allowing the temperature of the solenoid valve 103 to be maintained at the phase-change temperature of the constant-temperature phase-change material. Failure of the solenoid valve coil is primarily caused by prolonged operation of the solenoid valve 103, which results in a high temperature within the solenoid valve 103 itself. When the ambient temperature is high, the solenoid valve 103 may exceed the allowable operating temperature, making it prone to overheating and malfunctioning. Adding the phase-change material to the sealed integrated box reduces the temperature of the solenoid valve 103 and reduces the frequency of solenoid valve 103 failures.

[0054] When the first flange port 302 or the second flange port 303 of the pneumatic high vacuum flapper valve temporarily operates on high-temperature equipment, or the first flange port 302 and the second flange port 303 temporarily need to transmit high-temperature gas, the constant temperature phase change material can significantly extend the temporary high-temperature working time.

[0055] Please refer to Figure 13 , showing another center sealed tube body 101k structure.

[0056] Third embodiment:

[0057] Please refer to Figure 15 , the cylinders in existing pneumatic high vacuum baffle valves are all fixed to the valve body with bolts, such as patents US20150285382A1, US20070007475A1, US20060266962A1, US20050006610A1, etc. These cylinders are all square cylinders, so that the square cylinders can be fixed to the valve body with bolts at the four corners of the square cylinder. The square cylinders need to be machined on a lathe for the cylinder chamber and on a milling machine for the square outer wall of the cylinder, which leads to an increase in the cost of cylinder processing. The valve body and cylinder body in the first and second embodiments are both traditional structures. The difference between this embodiment and the first and second embodiments is that the upper part of the valve body 3 has a circular cylinder mounting cavity 306, the outer wall of the cylinder body 201 is also a circular structure, rather than a traditional square outer wall, and the cylinder body 201 does not have a cylinder fixing hole 201a. The cylinder body 201 is fixed in the cylinder body mounting cavity 306 by an integrated box, and does not require screw fixation, eliminating the process of machining the square cylinder outer wall by a milling machine. Only one lathe operation is required to complete the machining, and the machining cost is low. The valve body 3 is manufactured by one-piece molding technology such as forging or die-casting, which adds very little cost, thereby reducing the overall cost of the pneumatic high vacuum baffle valve.

[0058] Please refer to Figure 11 and Figure 15 、 Figure 16 The cylinder 201 can be built into the cylinder mounting cavity 306 of the valve body 3. The upper edge of the cylinder 201 is flush with the upper edge of the cylinder mounting cavity 306. When the integrated box 1 is installed on the valve body 3, the box bottom plate 101a of the box body 101 presses the cylinder 201 tightly into the cylinder mounting cavity 306, and the fifth sealing ring 305 provides pre-tightening force for the cylinder 201.

[0059] The cylinder body 201 in this embodiment can rotate freely, and the position of the first cylinder body outlet hole 209a on the cylinder body 201 is also in an unfixed state, while the sealing groove 113d at the bottom of the box body bottom plate 101a is in a fixed position. Since the first cylinder body outlet hole 209a must be in the same position as the sealing groove 113d, a positioning mechanism needs to be added between the cylinder body 201 and the box body bottom plate 101a so that the positions of the two are relatively fixed. The cylinder body 201 has two cylinder body positioning holes 201a (at least one cylinder body positioning hole), such as Figure 7As shown, the box body bottom plate 101a has two box body bottom plate positioning holes 101m (at least one box body bottom plate positioning hole), and two positioning pins 7 are used to position the two box body bottom plate positioning holes 101m and the two cylinder body positioning holes 201a. During installation, the first cylinder body outlet hole 209a and the sealing groove 113d are in the same position, thereby ensuring the connection of the outlet pipe. The cylinder body 201 and the box body bottom plate 101a can also be directly fixed together using screws. The specific method is easy to implement and will not be explained in this embodiment.

[0060] In summary, integrating the solenoid valve 103 and the sensor assembly into the integrated box 1 facilitates replacement of the solenoid valve 103 and the sensor assembly. Furthermore, the integrated box can be designed to be sealed and infused with a constant-temperature phase-change material, significantly extending the lifespan of the solenoid valve 103 and improving the heat resistance of the pneumatic high-vacuum flapper valve. The intake structure containing this integrated box allows the cylinder 201 to be designed as a structure built into the valve body 3, reducing machining steps for the cylinder 201 and lowering the cost of the pneumatic high-vacuum flapper valve.

[0061] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the scope of protection of the present invention. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention may be modified or replaced by equivalents without departing from the essence and scope of the technical solutions of the present invention.

Claims

1. An integrated box, characterized in that: The invention comprises a box body and a cover plate arranged on the box body, an integrated box cavity is formed between the box body and the cover plate, a solenoid valve and a sensor assembly are arranged in the integrated box cavity, a through hole, an integrated box air inlet pipe and an integrated box air outlet pipe are opened on one side of the integrated box, the solenoid valve is communicated with the external gas of the box body through the integrated box air inlet pipe and the integrated box air outlet pipe respectively, the sensor assembly senses the external trigger signal through the through hole, an electrical connector is provided on the other side of the integrated box, the electrical connector is used to electrically connect the solenoid valve and the sensor assembly to the outside world, The solenoid valve is provided with a solenoid valve air inlet hole and a solenoid valve air outlet hole. The integrated box air inlet pipe includes the integrated box air inlet hole. The integrated box air inlet hole is provided on one side of the box body. One end of the integrated box air inlet pipe is communicated with the solenoid valve air inlet hole, and the other end is communicated with the external gas through the integrated box air inlet hole. The integrated box air outlet pipe includes a sealing groove. The sealing groove is provided at the bottom of the box body. One end of the integrated box air outlet pipe is communicated with the solenoid valve air outlet hole, and the other end is connected to the external gas through the sealing groove. A first sealing ring is installed in the sealing groove.

2. The integrated box according to claim 1, wherein: An integrated box exhaust pipeline is opened on one side of the box body, and the integrated box exhaust pipeline includes an integrated box exhaust hole. A solenoid valve exhaust hole is opened on the solenoid valve. One end of the integrated box exhaust pipeline is connected to the solenoid valve exhaust hole, and the other end is connected to the external gas through the integrated box exhaust hole.

3. The integrated box according to claim 1, wherein: The box body has a bottom plate and side plates arranged around the bottom plate, the solenoid valve is installed on the bottom plate, the through hole is located in the center of the bottom plate, and the integrated box air inlet pipeline and the integrated box air outlet pipeline are respectively opened on the bottom plate.

4. The integrated box according to claim 3, characterized in that The electrical connector is mounted on a side panel, and one or more of a solenoid valve indicator light, a valve opening sensor indicator light, and a valve closing sensor indicator light are mounted on the side panel on the same side as the electrical connector.

5. A pneumatic high vacuum flapper valve, comprising a cylinder assembly, a valve body and a valve plate assembly, wherein the cylinder assembly comprises a cylinder body, a piston and a signal trigger rod, wherein the piston is located in the cylinder body, one side of the piston is connected to the valve plate assembly, and the center of the other side is connected to the signal trigger rod, characterized in that: It comprises the integrated box according to any one of claims 1 to 4, wherein the signal trigger rod passes through the through hole on the box body to transmit signals with the sensor component, and the valve body is connected to the integrated box by screws.

6. The pneumatic high vacuum flapper valve according to claim 5, characterized in that: The sensor assembly includes one or two of a valve opening sensor and a valve closing sensor, and the valve opening sensor and the valve closing sensor are micro switches. A signal triggering boss is provided on the signal triggering rod, and the signal triggering boss is used to trigger the valve closing sensor to output a valve closing signal, and to trigger the valve opening sensor to output a valve opening signal.

7. The pneumatic high vacuum flapper valve according to claim 5, characterized in that: The sensor assembly includes one or two of a valve opening sensor and a valve closing sensor. The valve opening sensor and the valve closing sensor are magnetic switches. A permanent magnet is installed inside the signal trigger rod. The permanent magnet is used to trigger the valve closing sensor to output a valve closing signal, and to trigger the valve opening sensor to output a valve opening signal.

8. The pneumatic high vacuum flapper valve according to claim 7, characterized in that: A central sealing tube body is provided in the box body of the integrated box, one end of the central sealing tube body is connected to the through hole, and the other end is in contact with the cover plate. An integrated box cavity is formed between the box body, the central sealing tube body and the cover plate. The integrated box cavity is filled with a constant temperature phase change material, and the phase change temperature of the constant temperature deformation material is 25 degrees to 40 degrees.

9. The pneumatic high vacuum flapper valve according to any one of claims 5 to 8, characterized in that: The valve body has a circular cylinder installation cavity, the outer wall of the cylinder is circular, and the cylinder is built in the cylinder installation cavity.

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