A detection device and method for galvanometer protective lenses
By designing a protective lens detection device with a light strip, camera, and data analysis module in the laser welding galvanometer, the problem of time-consuming and labor-intensive manual inspection is solved, realizing automated and rapid contamination judgment and ensuring the efficient operation of laser welding.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2022-04-25
- Publication Date
- 2026-04-03
AI Technical Summary
In existing technologies, the detection of contamination in the protective lens of laser welding galvanometers mainly relies on manual inspection, which is time-consuming, labor-intensive, and difficult to guarantee accuracy, resulting in inaccurate detection and affecting welding efficiency and cost.
Design a galvanometer protective lens detection device, including an LED strip, a camera, a data analysis module, and a motion actuator. The LED strip illuminates the protective lens, the camera captures an image, the data analysis module analyzes the contamination status in the image, and the motion actuator enables automated switching to determine whether the lens needs to be replaced.
It enables automated and rapid inspection of protective lenses, avoids human error, improves inspection efficiency, reduces time costs, and ensures the continuity and efficiency of laser processing.
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Figure CN114858817B_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of lens testing technology, specifically relating to a testing device and method for galvanometer-protected lenses. Background Technology
[0002] With the continuous upgrading of welding technology, the requirements for welding are becoming increasingly stringent and diverse for different welding objects. Furthermore, with the continuous innovation of laser welding galvanometer technology, laser welding galvanometers, with their high cycle time and high welding efficiency, are widely used in fields such as laser marking. However, for large-format, large-diameter welding galvanometers, during high-power scanning welding processes, there is always a risk of contamination of the protective lens by spatter generated during welding or dust from the environment.
[0003] Furthermore, when the protective lens of the galvanometer is contaminated by spatter or dust and cannot be detected in time, the contaminants adhering to the protective lens will absorb a large amount of laser energy. On the one hand, this causes the protective lens to heat up rapidly under the action of high-power laser, resulting in deformation and reducing its service life; on the other hand, it reduces the energy of the laser beam actually used to process the workpiece, causing the weld to not form as expected, resulting in defects and scrapping the workpiece. In either case, it will increase welding costs and reduce economic benefits, so the problem of contamination detection of the protective lens of the laser welding galvanometer is crucial.
[0004] Currently, the contamination detection of protective lenses in laser welding galvanometer systems is mainly carried out manually by production technicians. Technicians need to check the contamination status of the protective lenses after each welding operation. On the one hand, technicians spend a lot of time on contamination detection of the protective lenses, which is time-consuming and labor-intensive. On the other hand, it is difficult for technicians to ensure the completeness and accuracy of contaminant detection through long-term human visual inspection. Summary of the Invention
[0005] In view of one or more of the above-mentioned defects or improvement needs of the prior art, the present invention provides a detection device and method for galvanometer protective lenses, so as to solve the problem of inaccurate detection of surface stains on existing galvanometer protective lenses.
[0006] To achieve the above objectives, the present invention provides a detection device for a protective lens of a galvanometer, which includes a galvanometer, a protective lens, a light strip, a camera, a data analysis module, and a motion execution mechanism.
[0007] The protective lens is located at the light outlet of the galvanometer to form a protective structure.
[0008] The light strip is arranged circumferentially along the protective lens and can emit light into the protected lens in a direction parallel to the mirror surface of the protective lens to form diffuse reflection within the protective lens;
[0009] The camera is positioned on the side of the protective lens away from the galvanometer, and when the protective lens is being inspected, the camera's aperture is positioned directly facing the mirror surface of the protective lens.
[0010] The data analysis module is communicatively connected to the camera and is used to acquire images captured by the camera and analyze the contamination status of the protective lens surface in the images.
[0011] The motion actuator is located on the side of the galvanometer away from the protective lens and is used to adjust the position of the protective lens.
[0012] This application also includes a method for detecting a galvanometer-protected lens, which is implemented using the aforementioned camera-based device for detecting vibration in the protective lens. The specific detection steps are as follows:
[0013] S1. The light strip illuminates the surface of the protective lens, and a camera is used to take a picture of the surface of the protective lens.
[0014] S2. The data analysis module collects the images captured by the camera and calculates the gray area of individual contaminants and total contaminants in the images;
[0015] S3. Determine the contamination status of the protective lens based on the grayscale area of individual contaminants and total contaminants in the image;
[0016] If the area of a single polluted gray area is greater than the preset threshold for the area of a single polluted gray area or the total area of polluted gray areas is greater than the preset threshold for the total area of polluted gray areas, turn off the light strip and replace the protective lens on the surface of the galvanometer.
[0017] If the area of a single contaminated gray area is less than or equal to a preset threshold for the area of a single contaminated gray area and the total area of contaminated gray areas is less than or equal to a preset threshold for the total area of contaminated gray areas, the light strip will be turned off, and the protective lens will be used for subsequent laser processing.
[0018] As a further improvement of the present invention, a laser processing station is also included, wherein the motion actuator is used to switch the position of the galvanometer at the camera detection galvanometer protective lens device at the laser processing station, and the specific switching steps are as follows:
[0019] Before step S1, during the laser production and processing interval, the motion actuator drives the galvanometer to rotate so that the protective lens on the surface of the galvanometer is facing the camera.
[0020] After step S3, the motion actuator drives the galvanometer to rotate, so that the protective lens on the surface of the galvanometer faces the laser processing station.
[0021] As a further improvement of the present invention, the straight-line distance between the protective lens and the camera in step S1 is 180mm to 250mm.
[0022] As a further improvement of the present invention, the calculation steps for the gray area of individual pollutants and total pollutants in step S2 are as follows:
[0023] S201. Perform grayscale processing on the image to obtain the grayscale information of the image, and count the grayscale value of each pixel in the image.
[0024] S202. Calculate the weighted area of pixels with gray values of total contaminated areas in the image;
[0025] S203. Calculate the weighted area of pixels with gray values in a single contaminated area in the image.
[0026] As a further improvement of the present invention, the weighted area S of the pixels with the total contamination grayscale value in step S202 σ The calculation method is as follows:
[0027]
[0028] Where n is the number of zero pixels in the image, and ω is the actual area of a single pixel, in mm. 2 , σ i Weights for each pixel.
[0029] As a further improvement to the present invention, σ in Formula 1 i The calculation method is as follows:
[0030]
[0031] Where x is the grayscale value of the pixel, and the value of τ is related to the lighting of the light strip, and its range is 20 to 80.
[0032] As a further improvement of the present invention, the weighted area SR of a single contaminated grayscale pixel in step S203 i The calculation method is as follows:
[0033]
[0034] Where m is the number of pixels in each contamination, l is the number of independent contamination regions, and the weight σ is... k As obtained from Formula 2, ω is the actual area of a single pixel.
[0035] As a further improvement of the present invention, the method for determining whether the total polluted area exceeds the total polluted area threshold in step S3 is as follows:
[0036]
[0037] Where S is the actual area of the protective lens, and P is the laser power under the current process parameters. max For maximum laser power, P min This represents the minimum laser power.
[0038] As a further improvement of the present invention, the method for determining whether the area of a single polluted area exceeds the threshold for the area of a single polluted area in step S3 is as follows:
[0039]
[0040] Where S is the actual area of the protective lens, and P is the laser power under the current process parameters. max For maximum laser power, P min This represents the minimum laser power.
[0041] The aforementioned improved technical features can be combined with each other as long as they do not conflict with each other.
[0042] In summary, the beneficial effects of the above-described technical solutions conceived by this invention compared with the prior art include:
[0043] (1) The detection device for the protective lens of the galvanometer of the present invention uses a light strip structure arranged around the protective lens of the galvanometer to increase the brightness of the protective lens surface. A camera samples the surface of the protective lens, and a data analysis module directly judges the surface contamination to determine whether the protective lens needs to be replaced. The data analysis module analyzes and judges individual contamination areas and the overall contamination area, and a motion actuator switches the galvanometer between the laser processing station and the galvanometer protective lens detection station, achieving fully automatic detection of the protective lens without affecting the efficiency of laser processing.
[0044] (2) The detection method of the galvanometer protective lens of the present invention illuminates the protective lens through the light strip structure, so that the camera can perfectly capture the stains on the surface of the protective lens. Then, the surface condition is analyzed and judged by the data analysis module to directly determine whether the protective lens needs to be replaced. This avoids the judgment error caused by human factors and realizes the complete automation of switching and judgment, which greatly improves the detection efficiency of the galvanometer protective lens, reduces the detection time, and improves the efficiency of laser processing. Attached Figure Description
[0045] Figure 1This is a schematic diagram of the overall structure of the detection device for the protective lens of the galvanometer in an embodiment of the present invention;
[0046] Figure 2 This is a schematic diagram of the optical path for the LED strip to illuminate the protective lens in an embodiment of the present invention;
[0047] Figure 3 The image captured by the camera in this embodiment of the invention has undergone grayscale processing.
[0048] Figure 4 This is a flowchart illustrating the detection method for the protective lens of the galvanometer in an embodiment of the present invention;
[0049] Figure 5 This is a flowchart illustrating the method for calculating the area of the contaminated gray region in step S2 of this embodiment of the invention.
[0050] In all the accompanying drawings, the same reference numerals denote the same technical features, specifically:
[0051] 1. Galvanometer; 2. Protective lens; 3. LED strip; 4. Camera; 5. Data analysis module; 6. Motion actuator. Detailed Implementation
[0052] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention. Furthermore, the technical features involved in the various embodiments of this invention described below can be combined with each other as long as they do not conflict with each other.
[0053] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.
[0054] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.
[0055] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.
[0056] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.
[0057] Example:
[0058] Please see Figures 1-5 The detection device for the protective lens of the galvanometer in a preferred embodiment of the present invention includes a galvanometer 1, a protective lens 2, a light strip 3, a camera 4, a data analysis module 5, and a motion execution mechanism 6. The protective lens 2 is positioned directly below the light outlet of the galvanometer 1, forming a protective structure on the surface of the light outlet to prevent welding residue or dust from the environment from contaminating the galvanometer 1. The light strip 3 is arranged circumferentially along the protective lens 2 and generates a light source to illuminate it. The camera 4 is positioned on the side of the protective lens 2 away from the galvanometer 1, with its camera aperture facing the mirror surface of the protective lens 2, for capturing images of the mirror surface and recording the surface contamination status. The data analysis module 5 is communicatively connected to the camera 4, receiving and analyzing the mirror surface information captured by the camera 4 to determine the surface contamination status of the protective lens 2, and finally determining whether the protective lens 2 needs to be replaced.
[0059] Traditional mirror inspection methods, such as human observation and lens surface light intensity detection, are subject to various limitations. Manual visual inspection is affected by the operator's experience, judgment level, and fatigue, leading to inconsistent judgment standards. This is not only time-consuming and labor-intensive but also significantly reduces laser welding efficiency. While lens surface light intensity detection is used, the light intensity in unobstructed areas and areas with dust attachments on the protective lens surface remains largely unaffected, making accurate conclusions impossible. To address this, this application incorporates a light strip 3 structure circumferentially around the protective lens 2. This light strip 3 structure is not activated during normal operation of the galvanometer 1, thus preventing interference with normal laser emission. When it is necessary to inspect the galvanometer 1, the angle of the galvanometer 1 is adjusted by the motion actuator 6 so that the mirror surface of the protective lens 2 is facing the camera 4. Then, the light strip 3 is lit so that the light emitted from the light strip 3 forms diffuse reflection in the protective lens 2 to reveal the stains on the surface of the protective lens 2. The camera 4 is then used to record the surface condition of the protective lens 2, and the data analysis module 5 is used to analyze the surface stains to determine whether the protective lens 2 needs to be replaced.
[0060] Specifically, this application provides a detection method for the protective lens 2 of the galvanometer 1 of the camera 4, which is implemented through a detection device for the protective lens of the galvanometer. The specific detection steps are as follows:
[0061] S1. The light strip 3 illuminates the mirror surface of the protective lens 2, and the camera 4 takes a picture of the surface of the protective lens 2.
[0062] S2. Data analysis module 5 collects images captured by camera 4 and calculates the gray area of individual contaminants and total contaminants in the images;
[0063] S3. Determine the contamination status of the protective lens 2 based on the grayscale area of individual contaminants and total contaminants in the image;
[0064] If the area of a single contaminated gray area is greater than the preset threshold for the area of a single contaminated gray area or the total area of contaminated gray areas is greater than the preset threshold for the total area of contaminated gray areas, turn off the light strip 3, replace the protective lens 2, perform laser processing after replacement, and perform the next inspection during the next laser processing interval.
[0065] If the area of a single contaminated gray area is less than or equal to a preset threshold for the area of a single contaminated gray area and the total area of contaminated gray areas is less than or equal to a preset threshold for the total area of contaminated gray areas, turn off the light strip 3, use the protective lens 2 for subsequent laser processing, and perform the next inspection during the next laser processing interval.
[0066] More preferably, in order to improve the automation efficiency of the device of this application, the galvanometer 1 is provided with a motion actuator 6 on the side away from the protective lens 2. The motion actuator 6 is a simple three-axis robotic arm, which can realize the switching of the galvanometer 1 between the laser processing station and the galvanometer protective lens inspection station.
[0067] Specifically, during production breaks, the motion actuator 6 moves the galvanometer 1 from the laser processing station to a position where the protective lens 2 faces the camera 4 for inspection. After the protective lens 2 is inspected or replaced, the motion actuator 6 moves the galvanometer 1 with the protective lens 2 to the laser processing station for laser processing. During the process of moving the galvanometer 1 by the motion actuator 6, since the laser processing station and the protective lens inspection position are constant, the motion actuator 6 does not need additional procedures to adjust or determine the specific position of the galvanometer 1; it only needs to switch positions according to the preset positions of the two stations.
[0068] Furthermore, to ensure the image quality of the protective lens 2 captured by the camera 4, in addition to illuminating the protective lens 2 via the light strip 3, it is also necessary to limit the distance between the camera 4 and the protective lens 2 during shooting, thereby ensuring image quality. Specifically, when the camera 4 captures the image of the protective lens 2, the straight-line distance between the lens of the camera 4 and the protective lens 2 is between 180mm and 250mm. Preferably, the straight-line distance between the lens of the camera 4 and the protective lens 2 is 200mm or 230mm.
[0069] More preferably, the galvanometer 1 is a large-format and large-diameter galvanometer 1, and the scanning processing range of the galvanometer 1 can reach a maximum of 180mm*180mm.
[0070] More preferably, the galvanometer 1 in this application is square in shape, and correspondingly, the protective lens 2 can be circular or square, preferably circular. Since the light strip 3 structure is arranged along the circumference of the protective lens 2, when the protective lens 2 is circular, the light strip 3 can evenly illuminate the protective lens 2, resulting in a more uniform image information sampled by the camera 4 and better visualization. When the protective lens 2 is square, the light from the light strips at the four corners of the protective lens 2 is more concentrated, resulting in concentrated brightness in the surrounding and edge areas of the image information sampled by the camera 4, leading to a less effective visualization. Furthermore, since the data analysis module 5 analyzes the grayscale of the image in this application, the surface illumination only affects the actual surface observation captured by the camera 4 and does not affect the subsequent judgment of the data analysis module 5.
[0071] More preferably, the protective lens 2 in this application is an overall plane mirror, and the light emitted from the light strip 3 is emitted into the protective lens 2 in a diffuse manner, causing diffuse reflection within the protective lens 2 to illuminate the mirror surface of the protective lens 2. Preferably, the light emitted from the light strip 3 is one of red, purple, and blue, preferably blue.
[0072] More preferably, the specific steps of image analysis and processing by the data analysis module 5 in this application are as follows:
[0073] S201. Perform grayscale processing on the image to obtain the grayscale information of the image, and count the grayscale value of each pixel in the image.
[0074] Preferably, the grayscale value of each pixel in the above image is between 0 and 255.
[0075] S202. Calculate the weighted area of all pixels with gray values in the image;
[0076] The weighted area Sσ of the pixels with grayscale values in the above image is calculated as follows:
[0077]
[0078] In Formula 1 above, n is the number of zero pixels in the image, and ω is the actual area of a single pixel, in mm. 2 σi is the weight of each pixel.
[0079] Preferably, the weight is determined based on its influence on the surface area of the protective lens 2, wherein pixels with larger gray values have a greater impact on the area and therefore have a larger weight; pixels with smaller gray values have a smaller impact on the area and therefore have a smaller weight. The value is determined by the following formula:
[0080]
[0081] In Formula 2 above, x is the grayscale value of the pixel, and the value of τ is related to the lighting of the light strip. Its selection range is 20 to 80, preferably 50.
[0082] S203. Calculate the weighted area SRi of a single contaminated grayscale pixel. SRi is the weighted area of a single contaminated pixel within the grayscale connected region where the weight σ is greater than 0. The specific calculation method is as follows:
[0083]
[0084] In Formula 3 above, m is the number of pixels contained in each contamination, l is the number of independent contamination regions, the weight σk is obtained from Formula 2 above, and ω is the actual area size of a single pixel. Specifically, when judging a single contamination area SRi, there may be contamination areas SR formed by connecting two or more contamination regions. i At this point, the impact of this contaminated area on the protective lens surface needs to be considered as a contaminated area SR. i Therefore, the contaminated area SR is determined. i It represents a single pollution point or a pollution area formed by multiple pollution points connected together.
[0085] In step S3 above, it is determined whether the area of a single polluted area exceeds a set threshold for the area of a single polluted area, and whether the area of the total polluted area exceeds a set threshold for the area of the total polluted area. The specific determination method is as follows:
[0086]
[0087]
[0088] In formulas four and five above, S represents the actual area of the protective lens 2, P is the laser power in the current processing parameters, and Pmax is the maximum laser power. mi n is the minimum laser power.
[0089] If either Formula 4 or Formula 5 is true, then replace the protective lens 2. Formula 4 is a judgment on whether the total contaminated area exceeds the set threshold for the total contaminated area; Formula 5 is a judgment on whether the area of a single contaminated area exceeds the set threshold for the area of a single contaminated area.
[0090] When the data analysis module 5 calculates the surface contamination of the protective lens 2 by running the above formula, if the contamination in a single area is large, it will directly affect the laser processing efficiency, and the protective lens 2 needs to be replaced; if the contamination in a single area is small, so that it will not affect the laser processing, it is necessary to calculate all the contamination areas in the protective lens 2 to determine whether the overall contamination on the lens will affect the laser processing efficiency.
[0091] Those skilled in the art will readily understand that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.
Claims
1. A method for detecting a protective lens of a galvanometer, which is implemented by a detection device for the protective lens of a galvanometer, the detection device comprising: Galvanometer, protective lens, light strip, camera, data analysis module, and motion actuator; The protective lens is located at the light outlet of the galvanometer to form a protective structure. The light strip is arranged circumferentially along the protective lens and can emit light into the protected lens in a direction parallel to the mirror surface of the protective lens to form diffuse reflection within the protective lens; The camera is positioned on the side of the protective lens away from the galvanometer, and when the protective lens is being inspected, the camera's aperture is positioned directly facing the mirror surface of the protective lens. The data analysis module is communicatively connected to the camera and is used to acquire images captured by the camera and analyze the contamination status of the protective lens surface in the images. The motion actuator is located on the side of the galvanometer away from the protective lens, and is used to adjust the relative position of the galvanometer and the camera; The specific testing steps are as follows: S1. The light strip illuminates the surface of the protective lens, and a camera is used to take a picture of the surface of the protective lens. S2. The data analysis module collects the images captured by the camera and calculates the grayscale area of individual contaminants and total contaminants in the images; the calculation steps for the grayscale area of individual contaminants and total contaminants in step S2 are as follows: S201. Perform grayscale processing on the image to obtain the grayscale information of the image, and count the grayscale value of each pixel in the image. S202. Calculate the weighted area of pixels with total contamination gray values in the image; S203. Calculate the weighted area of a single contaminated grayscale pixel in the image; S3. Determine the contamination status of the protective lens based on the grayscale area of individual contaminants and total contaminants in the image; If the area of a single polluted gray area is greater than the preset threshold for the area of a single polluted gray area or the total area of polluted gray areas is greater than the preset threshold for the total area of polluted gray areas, turn off the light strip and replace the protective lens on the surface of the galvanometer. If the area of a single contaminated gray area is less than or equal to a preset threshold for the area of a single contaminated gray area and the total area of contaminated gray areas is less than or equal to a preset threshold for the total area of contaminated gray areas, the light strip will be turned off, and the protective lens will be used for subsequent laser processing.
2. The method for detecting galvanometer protective lenses according to claim 1, characterized in that, It also includes a laser processing station, wherein the motion actuator is used to switch the position of the galvanometer at the camera detection galvanometer protective lens device at the laser processing station. The specific switching steps are as follows: Before step S1, during the laser production and processing interval, the motion actuator drives the galvanometer to rotate so that the protective lens on the surface of the galvanometer is facing the camera. After step S3, the motion actuator drives the galvanometer to rotate, so that the protective lens on the surface of the galvanometer faces the laser processing station.
3. The method for detecting galvanometer protective lenses according to claim 1, characterized in that, In step S1, the straight-line distance between the protective lens and the camera is 180mm~250mm.
4. The method for detecting galvanometer protective lenses according to claim 1, characterized in that, The weighted area of pixels with total pollution grayscale value in step S202 The calculation method is as follows: (Formula 1) Where n is the number of 0 pixels in the image. This refers to the actual area size of a single pixel, measured in mm. 2 , Weights for each pixel.
5. The method for detecting galvanometer protective lenses according to claim 4, characterized in that, In Formula 1 The calculation method is as follows: (Formula 2) in, The grayscale value of a pixel. The value of is related to the lighting conditions of the LED strip, and its range is 20~80.
6. The method for detecting galvanometer protective lenses according to claim 5, characterized in that, The weighted area of a single contaminated grayscale pixel in step S203 The calculation method is as follows: (Formula 3) Where m is the number of pixels in each contamination. The number of independent contaminated areas contained, weighted Obtained from Formula 2, This represents the actual area size of a single pixel.
7. The method for detecting galvanometer protective lenses according to claim 4, characterized in that, The method for determining whether the total polluted area exceeds the total polluted area threshold in step S3 is as follows: (Formula 4) Where S is the actual area of the protective lens, and P is the laser power under the current process parameters. max For maximum laser power, P min This represents the minimum laser power.
8. The method for detecting galvanometer protective lenses according to claim 5, characterized in that, The method for determining whether the area of a single polluted area exceeds the threshold for the area of a single polluted area in step S3 is as follows: (Formula 5) Where S is the actual area of the protective lens, and P is the laser power under the current process parameters. max For maximum laser power, P min This represents the minimum laser power.
Citation Information
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