Crystal boat and semiconductor device

Abstract

The application provides a crystal boat and a semiconductor device. The crystal boat comprises multiple spaced boat piece groups. Each boat piece group comprises two opposite and spaced boat pieces. Adjacent two boat piece groups are used for being connected with opposite electrodes of a radio frequency power supply, and the boat pieces in the same boat piece group are used for being connected with the same electrode of the radio frequency power supply. The spacing space between the adjacent two boat piece groups is used for placing a wafer. The crystal boat and the semiconductor device provided by the application can realize single side discharge, improve the stability of exciting process gas to generate glow discharge to generate plasma, and thus can improve the film coating effect.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor equipment, in particular to a wafer boat and a semiconductor equipment. BACKGROUND

[0002] The tube type PECVD equipment in the plasma enhanced chemical vapor deposition (PECVD) equipment usually adopts graphite material carrier boat to carry wafers, the carrier boat includes a plurality of graphite sheets arranged at intervals, the wafers are carried between two adjacent graphite sheets, the two adjacent graphite sheets are connected with the positive and negative electrodes of the radio frequency power supply respectively, the process gas between the two adjacent graphite sheets is excited to produce glow discharge to generate plasma by pulse radio frequency, and the plasma is accelerated to move between the two adjacent graphite sheets by applying opposite alternating voltages to the two adjacent graphite sheets, so as to carry out film coating on the surface of the wafer.

[0003] However, with the demand for thinning the film thickness, the traditional low-frequency radio frequency rapid film coating method cannot meet the demand, and high-frequency radio frequency needs to be used. However, due to the fast energy decay of high-frequency radio frequency and the large surface area of the graphite sheet, the energy density of the high-frequency radio frequency on the surface of the graphite sheet is low, which cannot meet the double-sided discharge of the graphite sheet (i.e. the discharge between one graphite sheet and two graphite sheets adjacent to it), resulting in unstable excitation of the process gas between one graphite sheet and two graphite sheets adjacent to it to produce glow discharge to generate plasma, and poor film coating effect on the surface of the wafer. SUMMARY

[0004] The present application aims to at least solve one of the technical problems existing in the prior art, and provides a wafer boat and a semiconductor equipment, which can realize single-sided discharge, improve the stability of the excitation of the process gas to produce glow discharge to generate plasma, and thus improve the film coating effect.

[0005] To achieve the purpose of the present application, a wafer boat is provided, which includes a plurality of wafer sheet groups arranged at intervals, each wafer sheet group includes two wafer sheets arranged opposite to each other and at intervals, two adjacent wafer sheet groups are connected with opposite electrodes of a radio frequency power supply, and the wafer sheets in the same wafer sheet group are connected with the same electrode of the radio frequency power supply, and the space between two adjacent wafer sheet groups is used to place wafers.

[0006] Optionally, the distance between two adjacent wafer sheets ranges from 0.5mm to 100mm.

[0007] Optionally, the distance between two adjacent wafer sheets is positively correlated with the frequency of the radio frequency loaded to the wafer sheets by the radio frequency power supply.

[0008] Optionally, the crystal boat further comprises an insulating connecting rod, a through hole is arranged on the boat piece, the insulating connecting rod passes through the through hole, and the boat piece is detachably connected to the insulating connecting rod.

[0009] Optionally, the crystal boat further comprises a plurality of insulating spacing adjusting pieces, the insulating spacing adjusting pieces are arranged between two adjacent boat pieces, the thicknesses of some of the insulating spacing adjusting pieces are different, and the insulating spacing adjusting pieces are used for adjusting the spacing between the two adjacent boat pieces.

[0010] Optionally, the thickness of the insulating spacing adjusting piece ranges from 0.5 mm to 100 mm.

[0011] Optionally, the insulating spacing adjusting piece is annular, the insulating spacing adjusting piece is sleeved on the insulating connecting rod, the outer diameter of the insulating spacing adjusting piece is greater than the hole diameter of the through hole, and the two end faces of the insulating spacing adjusting piece abut against two adjacent boat pieces, respectively.

[0012] Optionally, the material of the boat piece is graphite.

[0013] Optionally, the materials of the insulating connecting rod and the insulating spacing adjusting piece are ceramic.

[0014] The application further provides a semiconductor device comprising the crystal boat provided by the application.

[0015] The application has the following beneficial effects:

[0016] The crystal boat provided by the application can make the two boat pieces in the same boat piece group have the same electromotive force, eliminate the potential difference between the two boat pieces in the same boat piece group, make the two boat pieces in the same boat piece group not form an electromagnetic field, eliminate the possibility that the two boat pieces in the same boat piece group excite the process gas between them to generate glow discharge to produce plasma, and make the two boat pieces in the adjacent two boat piece groups excite the process gas between them to generate glow discharge to produce plasma, so that one-side discharge of the boat piece can be realized, the stability of exciting the process gas to generate glow discharge to produce plasma is improved, and the film coating effect is improved.

[0017] The semiconductor device provided by the application can realize one-side discharge, improve the stability of exciting the process gas to generate glow discharge to produce plasma, and improve the film coating effect by means of the crystal boat provided by the application. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 A structure diagram of a crystal boat provided by an embodiment of the present application is shown in the figure;

[0019] Explanation of reference numerals:

[0020] 1-crystal boat; 11-boat piece; 12-insulating connecting rod; 13-insulating spacing adjusting member. DETAILED DESCRIPTION

[0021] In order to enable those skilled in the art to better understand the technical solutions of the present application, the crystal boat and semiconductor equipment provided by the present application are described in detail below in combination with the drawings.

[0022] As shown in the figure, Figure 1 the present application provides a crystal boat 1, which comprises a plurality of spaced-apart boat piece groups, each boat piece group comprising two opposite and spaced-apart boat pieces 11, adjacent two boat piece groups being used to be connected with opposite electrodes of a radio frequency power supply, and the boat pieces 11 in the same boat piece group being used to be connected with the same electrode of the radio frequency power supply, and the spacing space between the adjacent two boat piece groups being used to place a wafer.

[0023] The crystal boat 1 provided by the embodiment of the present application, by spacing a plurality of boat piece groups and connecting adjacent two boat piece groups with opposite electrodes of a radio frequency power supply and connecting the boat pieces 11 in the same boat piece group with the same electrode of the radio frequency power supply, can make the two boat pieces 11 in the same boat piece group have the same electric potential, eliminate the potential difference between the two boat pieces 11 in the same boat piece group, make the two boat pieces 11 in the same boat piece group not form an electromagnetic field between them, eliminate the possibility that the two boat pieces 11 in the same boat piece group excite the process gas between them to produce glow discharge to generate plasma, and make the two adjacent boat pieces 11 in the adjacent two boat piece groups excite the process gas between them to produce glow discharge to generate plasma, so that one-sided discharge of the boat pieces 11 can be realized, the stability of exciting the process gas to produce glow discharge to generate plasma is improved, and the film coating effect is further improved.

[0024] As shown in the figure, Figure 1 for example, the crystal boat 1 can comprise five spaced-apart boat piece groups, Figure 1From left to right, the first to the fifth boat groups are respectively (left and right in this embodiment are only illustrative directions and do not represent actual directions). The two boats 11 in the first boat group can both be used to connect to the negative electrode of the RF power supply. The two boats 11 in the second boat group can both be used to connect to the positive electrode of the RF power supply. The two boats 11 in the third boat group can both be used to connect to the negative electrode of the RF power supply. The two boats 11 in the fourth boat group can both be used to connect to the positive electrode of the RF power supply. The two boats 11 in the fifth boat group can both be used to connect to the negative electrode of the RF power supply. That is, the boats 11 in the same boat group are all used to connect to the same electrode of the RF power supply, and two adjacent boats are used to connect to the opposite electrode of the RF power supply.

[0025] exist Figure 1 In the five spaced wafer groups shown, from left to right, the space between the first and second wafer groups can be used to place wafers, the space between the second and third wafer groups can be used to place wafers, the space between the third and fourth wafer groups can be used to place wafers, and the space between the fourth and fifth wafer groups can be used to place wafers. That is, the space between two adjacent wafer groups is used to place wafers.

[0026] However, the number of boat pieces 11 and the number of boat piece groups included in the crystal boat 1 provided in the embodiments of the present invention are not limited thereto.

[0027] The following is based on Figure 1 Taking the first to third boat groups from left to right as an example, since both boats 11 in the second boat group are connected to the positive electrode of the RF power supply, their voltages and phase angles are the same, resulting in equal electromotive forces. This eliminates the potential difference between the two boats 11, preventing the formation of an electromagnetic field between them and eliminating the possibility of the two boats 11 exciting the process gas between them to generate plasma through glow discharge. However, since both boats 11 in the first and third boat groups are connected to the negative electrode of the RF power supply, the boat 11 on the left side of the second boat group (i.e., ...) Figure 1 The third boat piece 11 from left to right) and the rightmost boat piece 11 in the first boat piece group (i.e., Figure 1 The potential difference between the two boat pieces 11 (from left to right) creates an electromagnetic field, which can excite the process gas between them to generate a glow discharge and produce plasma. The boat piece 11 on the right side of the second boat piece group (i.e., the one formed by...) Figure 1the left to the right fourth boat piece 11) and the left boat piece 11 in the third boat piece group (that is, the boat piece 11 connected to the opposite electrode of the radio frequency power supply by the first connecting rod 12 and the second connecting rod 13) Figure 1 The potential difference between the left to the right fifth boat piece 11) and the left boat piece 11 in the third boat piece group (that is, the boat piece 11 connected to the opposite electrode of the radio frequency power supply by the first connecting rod 12 and the second connecting rod 13) has an electromagnetic field, which can excite the process gas between the two to produce glow discharge to generate plasma, so that the two boat pieces 11 in the second boat piece group can realize single-sided discharge, thereby improving the stability of the process gas excited to produce glow discharge to generate plasma, and thereby improving the film coating effect.

[0028] In addition, as disclosed in a crystal boat 1 with publication number CN214753673U, an insulating piece is arranged between the two boat pieces 11 connected to the opposite electrode of the radio frequency power supply, and the space between the two boat pieces 11 connected to the opposite electrode of the radio frequency power supply is physically blocked by the insulating piece to prevent the two boat pieces 11 connected to the opposite electrode of the radio frequency power supply from exciting the process gas between them to produce glow discharge to generate plasma. Since the boat piece 11 and the insulating piece are mechanically connected, the manual assembly process will have gaps, and these gaps may cause the space between the two boat pieces 11 connected to the opposite electrode of the radio frequency power supply to be unable to be completely blocked by the insulating piece, resulting in the process gas between the two boat pieces 11 connected to the opposite electrode of the radio frequency power supply still forming an unstable glow discharge area on the outer surface of the insulating piece, thereby exciting the plasma to deposit on the boat piece 11. After multiple processes, the boat piece 11 will be dirty and contaminate the wafer. Moreover, the commonly used insulating piece is made of ceramic material, which is expensive and difficult to process, resulting in an increase in the cost of the crystal boat 1. Furthermore, ceramic is fragile and has a high density, and the ceramic insulating piece is heavy, making it difficult to place and fix the insulating piece, and the mechanical structure has poor reliability, making it difficult to be used on a large scale. Moreover, the space between the two boat pieces 11 needs to be adjusted according to the requirements of different processes, resulting in the thickness of the insulating piece also needing to be adjusted, and the processing of insulating pieces of different thicknesses will also increase the cost.

[0029] The crystal boat 1 provided by the embodiment of the present application is connected to the same electrode of the radio frequency power supply by the boat pieces 11 in the same boat piece group, so that the two boat pieces 11 in the same boat piece group have the same electric potential, the potential difference between the two boat pieces 11 in the same boat piece group is eliminated, the electromagnetic field between the two boat pieces 11 in the same boat piece group is eliminated, and the possibility of the two boat pieces 11 in the same boat piece group exciting the process gas between them to produce glow discharge to generate plasma is eliminated. That is, the process gas between the two boat pieces 11 in the same boat piece group will not be excited to produce glow discharge to generate plasma at all. Therefore, the boat piece 11 of the crystal boat 1 provided by the embodiment of the present application can still remain clean after multiple processes, and will not be dirty. Moreover, since the crystal boat 1 provided by the embodiment of the present application does not need to use an insulating piece, the cost, weight, design, processing and assembly difficulties are naturally avoided.

[0030] In a preferred embodiment of the present application, the distance between the two adjacent boat pieces 11 can range from 0.5mm to 100mm.

[0031] In practical applications, the distance between the two adjacent boat pieces 11 can be adjusted according to the process requirements of different processes, so as to achieve multiple combinations among the uniformity of the film forming process, the number of wafer carrying, and the stability of the electromagnetic field.

[0032] In a preferred embodiment of the present application, the distance between the two adjacent boat pieces 11 can be positively correlated with the frequency of the radio frequency loaded to the boat piece 11.

[0033] That is, the greater the frequency of the radio frequency loaded to the boat piece 11, the greater the distance between the two adjacent boat pieces 11, and the smaller the frequency of the radio frequency loaded to the boat piece 11, the smaller the distance between the two adjacent boat pieces 11.

[0034] As shown in Figure 1 In a preferred embodiment of the present application, the boat 1 can further include an insulating connecting rod 12, the boat piece 11 is provided with a through hole, the insulating connecting rod 12 passes through the through hole, and the boat piece 11 is detachably connected to the insulating connecting rod 12.

[0035] That is, the insulating connecting rod 12 passes through the through holes on the plurality of boat pieces 11, and the plurality of boat pieces 11 are connected through the insulating connecting rod 12. By detachably connecting the plurality of boat pieces 11 to the insulating connecting rod 12, the distance between the two adjacent boat pieces 11 can be adjusted, and the boat piece 11 can be replaced.

[0036] As shown in Figure 1 In a preferred embodiment of the present application, the boat 1 can further include a plurality of insulating distance adjusting pieces 13, the insulating distance adjusting pieces 13 are arranged between the two adjacent boat pieces 11, the thicknesses of some of the plurality of insulating distance adjusting pieces 13 are different, and the insulating distance adjusting pieces 13 are used for adjusting the distance between the two adjacent boat pieces 11.

[0037] By arranging insulating distance adjusting pieces 13 with different thicknesses between the two adjacent boat pieces 11, the distance between the two adjacent boat pieces 11 can be changed, and the distance between the two adjacent boat pieces 11 can be adjusted, so that the boat 1 can be suitable for different processes.

[0038] In a preferred embodiment of the present application, the thickness of the insulating distance adjusting piece 13 can range from 0.5mm to 100mm.

[0039] In this way, the distance between the two adjacent boat pieces 11 can range from 0.5mm to 100mm.

[0040] In a preferred embodiment of the present application, the insulation spacing adjusting member 13 can be ring-shaped, the insulation spacing adjusting member 13 can be sleeved on the insulation connecting rod 12, the outer diameter of the insulation spacing adjusting member 13 is greater than the hole diameter of the through hole, and the two end faces of the insulation spacing adjusting member 13 respectively abut against the two adjacent boat pieces 11.

[0041] By making the insulation spacing adjusting member 13 ring-shaped and making the outer diameter of the insulation spacing adjusting member 13 greater than the hole diameter of the through hole on the boat piece 11, when the insulation spacing adjusting member 13 is sleeved on the insulation connecting rod 12, the insulation spacing adjusting member 13 can be prevented from passing through the through hole on the boat piece 11, so that the two end faces of the insulation spacing adjusting member 13 can respectively abut against the two adjacent boat pieces 11, thereby the spacing between the two adjacent boat pieces 11 can be adjusted by means of the insulation spacing adjusting member 13.

[0042] In a preferred embodiment of the present application, the material of the boat piece 11 can be graphite.

[0043] In a preferred embodiment of the present application, the material of the insulation connecting rod 12 and the insulation spacing adjusting member 13 can be ceramic.

[0044] The present application also provides a semiconductor device comprising the boat 1 provided by the present application.

[0045] The semiconductor device provided by the present application can realize unilateral discharge and improve the stability of exciting process gas to generate glow discharge to produce plasma, thereby improving the film coating effect.

[0046] In summary, the boat 1 and the semiconductor device provided by the present application can realize unilateral discharge and improve the stability of exciting process gas to generate glow discharge to produce plasma, thereby improving the film coating effect.

[0047] It can be understood that the above embodiments are only exemplary embodiments for illustrating the principles of the present application, but the present application is not limited thereto. Those skilled in the art can make various modifications and improvements without departing from the spirit and essence of the present application, and these modifications and improvements are also regarded as the protection scope of the present application.

Claims

1. A crystal boat, characterized in that, The device includes multiple spaced-apart wafer groups, each wafer group comprising two opposing and spaced-apart wafers. Two adjacent wafer groups are used to connect to opposite electrodes of an RF power supply, and the wafers in the same wafer group are all used to connect to the same electrode of the RF power supply. The space between two adjacent wafer groups is used to place a wafer.

2. The crystal boat according to claim 1, characterized in that, The spacing between two adjacent boat pieces ranges from 0.5mm to 100mm.

3. The crystal boat according to claim 2, characterized in that, The spacing between two adjacent boat pieces is positively correlated with the frequency of the radio frequency applied to the boat piece by the radio frequency power supply.

4. The crystal boat according to claim 1, characterized in that, The crystal boat also includes an insulating connecting rod. The boat piece has a through hole, through which the insulating connecting rod passes. The boat piece is detachably connected to the insulating connecting rod.

5. The crystal boat according to claim 4, characterized in that, The crystal boat also includes a plurality of insulating spacing adjustment members, which are disposed between two adjacent boat pieces. Some of the insulating spacing adjustment members have different thicknesses, and the insulating spacing adjustment members are used to adjust the spacing between two adjacent boat pieces.

6. The crystal boat according to claim 5, characterized in that, The thickness range of the insulation gap adjustment component is 0.5mm-100mm.

7. The crystal boat according to claim 5, characterized in that, The insulating gap adjusting component is annular and is sleeved on the insulating connecting rod. The outer diameter of the insulating gap adjusting component is larger than the diameter of the through hole, and the two end faces of the insulating gap adjusting component abut against the two adjacent boat pieces respectively.

8. The crystal boat according to claim 1, characterized in that, The material of the boat piece is graphite.

9. The crystal boat according to claim 5, characterized in that, The insulating connecting rod and the insulating gap adjusting component are made of ceramic.

10. A semiconductor device, characterized in that, Includes the crystal boat as described in any one of claims 1-9.

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