Vertical movement device and semiconductor equipment

Abstract

The utility model discloses a vertical motion device and a semiconductor device, the vertical motion device comprises a lifting mechanism, the lifting mechanism is provided with a bottom plate, a first wedge block and a second wedge block, the first wedge block is in sliding connection with the bottom plate, and the first wedge block is in sliding connection with the second wedge block; the first wedge block comprises a first surface, the first surface is obliquely arranged, the second wedge block is provided with a second surface, and the second surface is parallel to the first surface; and the driving mechanism is mounted on the bottom plate and is in driving connection with the first wedge block. The structure of the device is flat and compact in the vertical direction, two wedge blocks are adopted for cooperation, the device is stable in place, loads can be driven with small force, the structure height of the device in the vertical space is minimized, a micropositioner or a wafer jacking table can be directly stacked, macro-micro combined movement is achieved, and modular integration is facilitated. By arranging the measuring mechanism, the position of the second wedge block can be accurately measured, the measuring result is fed back to the driving mechanism, the driving mechanism is opened and closed according to the measuring result, closed-loop control is achieved, and the movement precision of the lifting mechanism is guaranteed.

Description

Technical Field

[0001] This utility model relates to a vertical motion device and a semiconductor device, belonging to the field of semiconductor device technology. Background Technology

[0002] In semiconductor testing equipment, the cavity is a vacuum environment. After the wafer is transferred to the vacuum cavity, it needs to complete a vertical lifting and lowering motion in order to achieve focusing with a large depth of focus deviation.

[0003] Currently, most wafer lifting mechanisms use lead screw and nut mechanisms, such as the vertical motion device disclosed in Chinese patent document CN210920761U. This device uses a lead screw and nut in conjunction with a guide for lifting. However, because the lead screw and nut wear during operation, generating particles, it is unsuitable for use in a vacuum environment, and its positioning accuracy is also low. Furthermore, actuators such as electric push rods and cylinders are also unsuitable for vacuum environments due to issues with material release rates and lubrication.

[0004] There are also methods that use stacked piezoelectric ceramic actuators for Z-axis lifting, such as a leveling and positioning device disclosed in Chinese patent document CN117260646B, which uses stacked piezoelectric ceramics in conjunction with a flexible connection amplification mechanism for lifting. However, due to the short stroke of the piezoelectric material, only a micrometer-level stroke can be achieved. Despite the amplification, it still cannot achieve millimeter-level macro-motion.

[0005] Voice coil motors are also commonly used for precision vertical motion. For example, the micro-stage and motion device disclosed in Chinese patent document CN112259488A uses three voice coil motors arranged on the outer edges to provide high-precision vertical motion, with a centrally located voice coil motor for ejection. Magnetic levitation gravity compensation is also incorporated to counteract gravity. However, voice coil motors have limited load-bearing capacity; higher load capacity means larger structural dimensions, making them unsuitable for heavy loads. Furthermore, voice coil motors introduce electromagnetic interference, requiring electromagnetic shielding in the design, which increases structural complexity and manufacturing costs. Utility Model Content

[0006] To address the aforementioned technical problems, this utility model provides a vertical motion device and a semiconductor equipment. This device achieves a vertically flat and compact overall structure, stable positioning, large vertical displacement (up to the millimeter level), and resistance to electromagnetic interference, as well as high load capacity. Furthermore, it can be directly superimposed with a micro-motion stage or a wafer lifting stage to achieve macro-micro combined motion, resulting in a high degree of integration.

[0007] The technical solution adopted by this utility model to solve its technical problem is:

[0008] In a first aspect, this utility model provides a vertical motion device, comprising:

[0009] A lifting mechanism is provided with a base plate, a first wedge block and a second wedge block, wherein the first wedge block is slidably connected to the base plate and the second wedge block is slidably connected to each other.

[0010] The first wedge includes a first surface, which is inclined, and the second wedge has a second surface, which is parallel to the first surface.

[0011] A drive mechanism is mounted on the base plate and is driven by the first wedge block.

[0012] In one embodiment of this utility model, the first wedge is slidably connected to the base plate through a first sliding mechanism, and the first wedge is slidably connected to the second wedge through a second sliding mechanism.

[0013] In one embodiment of this utility model, the lifting mechanism is provided with a first groove, and the first sliding mechanism is installed in the first groove.

[0014] In one embodiment of this utility model, the lifting mechanism is provided with a stop structure, which is installed on both sides of the first sliding mechanism. This serves as a mechanical limit, preventing the first wedge block from exceeding the required travel range during movement.

[0015] In one embodiment of this utility model, the driving mechanism includes a motor, a friction strip, and a mounting plate. The motor abuts against the friction strip, and the friction strip is connected to the first wedge block through the mounting plate.

[0016] In one embodiment of this utility model, a guiding mechanism is included, with its two ends connected to the base plate and the second wedge block, respectively. This ensures that the second wedge block can only move vertically under the constraint of the guiding mechanism.

[0017] In one embodiment of this utility model, a measuring mechanism is included. The measuring mechanism comprises a scale and a reading head, with the scale and reading head arranged parallel to each other. The measuring mechanism can measure the height information of the second wedge and feed the measurement result back to the driving mechanism. The driving mechanism performs closed-loop control based on the measurement result to ensure the motion accuracy of the lifting mechanism.

[0018] In one embodiment of this utility model, the measuring mechanism further includes a first mounting block and a second mounting block, the reading head is connected to the base plate through the first mounting block, and the scale is connected to the second wedge block through the second mounting block.

[0019] In one embodiment of this utility model, a supporting mechanism is further included. The supporting mechanism is provided with an elastic body, the two ends of which abut against the base plate and the second wedge block, respectively. This is used to balance the weight of the load on the second wedge block and reduce the output force required by the driving mechanism.

[0020] Secondly, this utility model provides a semiconductor device, including the aforementioned vertical motion device, and the semiconductor device further includes a working cavity, wherein the vertical motion device is installed in the working cavity.

[0021] The beneficial effects of this utility model are as follows:

[0022] This utility model provides a vertical motion device and semiconductor equipment, including a lifting mechanism and a driving mechanism. The lifting mechanism is provided with a first wedge and a second wedge. The driving mechanism drives the first wedge to move, thereby lifting the second wedge. The overall structure of this vertical motion device is vertically flat and compact. The two wedges work together to ensure stable positioning, enabling the device to drive a load with relatively small force. It also minimizes the structural height of the device in vertical space, allowing direct stacking of micro-stages or wafer lifting stages to achieve macro-micro combined motion, facilitating modular integration. A guiding mechanism restricts the horizontal movement of the second wedge, allowing it to move only vertically. A measuring mechanism accurately measures the position of the second wedge and feeds the measurement results back to the driving mechanism. The driving mechanism opens and closes based on the measurement results, achieving closed-loop control and ensuring the motion accuracy of the lifting mechanism. Attached Figure Description

[0023] Figure 1 A perspective view of the vertical motion device provided in an embodiment of this utility model.

[0024] Figure 2 This is a perspective view of the vertical motion device provided in an embodiment of the present utility model.

[0025] Figure 3 A cross-sectional view of the vertical motion device provided in an embodiment of this utility model.

[0026] Figure 4 A perspective view of the measuring mechanism provided in an embodiment of this utility model.

[0027] Figure 5 A front view of the drive mechanism provided in an embodiment of this utility model.

[0028] In the diagram: 1. Lifting mechanism; 2. Guiding mechanism; 3. Measuring mechanism; 4. Bearing mechanism; 5. Driving mechanism;

[0029] 11. Base plate; 1101. First groove; 1102. Hole; 12. First sliding mechanism; 1201. First guide rail; 1202. First slider; 13. First wedge; 1301. First surface; 14. Second sliding mechanism; 1401. Second guide rail; 1402. Second slider; 15. Second wedge; 1501. Second groove; 1502. Second surface; 16. Stop structure;

[0030] 31. Scale; 32. Reading head; 33. First mounting block; 34. Second mounting block;

[0031] 41. Cylindrical pin; 42. Elastomer;

[0032] 51. Motor; 52. Friction strip; 53. Mounting plate. Detailed Implementation

[0033] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0034] In this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0035] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0036] Please see Figure 1 , Figure 2 , Figure 3 and Figure 4As shown in the figure, this application embodiment provides a vertical motion device, which includes a lifting mechanism 1, a guiding mechanism 2, a measuring mechanism 3, a bearing mechanism 4, and a driving mechanism 5. The lifting mechanism 1 is used for lifting the load. The guiding mechanism 2 is symmetrically distributed at the four corners of the lifting mechanism 1 to provide guidance for the lifting mechanism 1, ensuring the stability of the vertical movement of the lifting mechanism 1 and limiting its horizontal movement and vertical rotation. The measuring mechanism 3 is installed on the lifting mechanism to measure the lifting height of the lifting mechanism 1 and feeds it back to the driving mechanism 5. The driving mechanism 5 is connected to the lifting mechanism 1 to provide a power source for the lifting mechanism 1 and control the movement of the lifting mechanism 1. The bearing mechanism 4 is installed on the lifting mechanism 1 to assist the lifting mechanism 1 in bearing the load weight, further reducing the force output by the driving mechanism 5 and reducing the size of the driving mechanism 5.

[0037] In some embodiments, the lifting mechanism 1 includes a base plate 11, which is rectangular in structure. The base plate 11 is provided with a first groove 1101 and holes 1102. The holes 1102 are countersunk holes, and there are four holes 1102 symmetrically arranged at the four corners of the base plate 11 for installing the guide mechanism 2.

[0038] In some embodiments, the lifting mechanism 1 includes a first wedge 13 and a second wedge 15. The first wedge 13 has a trapezoidal cross-section, is horizontally positioned on the side near the base plate 11, and has a first surface 1301 inclined on the side away from the base plate 11, forming a certain wedge angle with the base plate. The first wedge 13 is slidably connected to the base plate 11 via a first sliding mechanism 12. The first sliding mechanism 12 includes a first guide rail 1201 and a first slider 1202. The first guide rail 1201 is installed in a first groove 1101, and the first slider 1202 is fixedly connected to the first wedge 13. The first slider 1202 can slide along the first guide rail 1201, allowing the first wedge 13 to move along the first guide rail 1201. The second wedge 15 has a plate-like structure. A second groove 1501 is provided on the side of the second wedge 15 closest to the first wedge 13. A second surface 1502 is provided inside the second groove 1501. The second surface 1502 is inclined and parallel to the first surface 1301, with an inclination angle the same as the wedge angle of the first wedge 13. The first wedge 13 is slidably connected to the second wedge 15 via a second sliding mechanism 14. The second sliding mechanism 14 includes a second guide rail 1401 and a second slider 1402. The second guide rail 1401 is mounted on the first surface 1301, and the second slider 1402 is mounted on the second surface 1502. The second slider 1402 can drive the second wedge 15 to slide along the second guide rail 1401.

[0039] Furthermore, in this embodiment, there are two of each of the first sliding mechanism 12 and the second sliding mechanism 14. The two first sliding mechanisms 12 are symmetrically arranged on the base plate 11, and the two second sliding mechanisms 14 are symmetrically mounted on the first surface 1301. The centers of the two first sliding mechanisms 12 and the two second sliding mechanisms 14 are on the same axis. In use, the center of gravity of the load should be on the same axis as the centers of the first sliding mechanism 12 and the second sliding mechanism 14 to reduce the overturning moment on the sliding mechanism.

[0040] In some embodiments, the first sliding mechanism 12 is provided with stop structures 16 at both ends, which can play a mechanical limiting role and prevent the first wedge block 13 from exceeding the required stroke range during movement. Specifically, in this embodiment, there are four stop structures 16, each of which is a stop screw. The top of the stop screw is made of fluororubber. Fluororubber has strong aging resistance, a long service life, and is not easy to harden or crack, thus maintaining its performance for a long time.

[0041] In some embodiments, the number of guide mechanisms 2 is four, which are installed in the holes 1102 of the base plate 11. One end of the guide mechanism 2 away from the base plate 11 is connected to the second wedge 15, so that the second wedge 15 can only move vertically under the restriction of the guide mechanism 2.

[0042] Specifically, in this embodiment, the guide mechanism 2 adopts a ball spline, which includes a spline nut and a spline shaft. The spline shaft can move up and down in the spline nut. The spline nut of the ball spline is installed in the hole 1102. The end of the spline shaft away from the base plate 11 is provided with a threaded hole and is connected to the second wedge 15 by bolts or screws, restricting the horizontal movement of the second wedge 15 so that the second wedge 15 can only move up and down in the vertical direction. The center of symmetry of the four ball splines is on the same axis as the center of the first sliding mechanism 12 and the second sliding mechanism 14, ensuring that the center of gravity of the load passes through the center of symmetry of the four ball splines, so that the four ball splines are subjected to uniform force and achieve synchronous rising or falling.

[0043] In some embodiments, the measuring mechanism 3 includes a scale 31, a reading head 32, a first mounting block 33, and a second mounting block 34. The first mounting block 33 is installed in the first groove 1101, and the reading head 32 is installed on the side of the first mounting block 33 facing away from the base plate 11. The second mounting block 34 is connected to the second wedge 15, and the scale 31 is installed on the second mounting block 34, with the scale 31 and the reading head 32 positioned opposite each other. The first mounting block 33 is provided with a mounting hole, which is an oblong hole, to adjust the position of the reading head 32 and ensure that the reading head 32 is parallel to the scale 31. When the second wedge 15 is raised to a specified height, the measuring mechanism 3 can measure the height information of the second wedge 15 and feed the measurement result back to the drive mechanism 5. The drive mechanism 5 performs closed-loop control based on the measurement result to ensure the motion accuracy of the lifting mechanism 1.

[0044] In some embodiments, the bearing mechanism 4 includes a cylindrical pin 41 and an elastic body 42. The cylindrical pin 41 is mounted on the base plate 11, and the elastic body 42 is sleeved on the outer periphery of the cylindrical pin 41. The two ends of the elastic body 42 abut against the base plate 11 and the second wedge 15 respectively and are in a compressed state to balance the weight of the load on the second wedge 15 and reduce the output force required by the drive mechanism 5.

[0045] Specifically, in this embodiment, the elastic body 42 is a spring, and the spring force changes constantly during the lifting or lowering process of the lifting mechanism 1. The spring constant must meet the following requirements:

[0046] 2kX1 <G (1)

[0047] F1+2k(X1-h)>G (2)

[0048] Where h is the lifting height, G is the load weight, k is the spring constant, X1 is the initial compression of the spring, and F1 is the output force of the motor.

[0049] Alternatively, the elastic body 42 of the bearing mechanism 4 can also be a disc spring. Multiple disc springs are connected in series around the outer periphery of the cylindrical pin 41 and placed between the base plate 11 and the second wedge 15 to balance the weight of the load on the second wedge 15 and reduce the output force required by the drive mechanism 5. Since the force-displacement curve of the disc spring is non-linear, multiple disc springs connected in series can obtain a constant output force within a small displacement range, and the disc spring itself can bear a large load, making it suitable for use in places where the dimension in the direction of load application is small.

[0050] In some embodiments, the drive mechanism 5 includes a motor 51, a friction strip 52, and a mounting plate 53. The mounting plate 53 is mounted on the side of the first wedge 13 perpendicular to the first surface 1301, and the friction strip 52 is mounted on the side of the mounting plate 53 away from the first wedge 13. The motor 51 is mounted in the first groove 1101 of the base plate 11 and can abut against the friction strip 52. When the lifting mechanism 1 needs to lift, the motor 51 is turned on, and the motor 51 can drive the friction strip 52 to move. The friction strip 52 drives the first wedge 13 to slide synchronously along the first guide rail 1201 through the mounting plate 53. The movement of the first wedge 13 causes the second sliding mechanism 14 to lift the second wedge 15.

[0051] Specifically, in this embodiment, the motor 51 is a piezoelectric ultrasonic motor, which can be used in a vacuum environment, can be installed in a narrow vertical space, has a fast response speed and is not affected by electromagnetic interference, and also has a power-off self-locking function. When the second wedge 15 is raised to the specified height, the reading head 32 reads the reading on the scale 31 and feeds it back to the motor 51, and the motor 51 stops moving, thereby ensuring the movement accuracy of the lifting mechanism 1. At the same time, the piezoelectric ultrasonic motor is arranged inside the vacuum cavity and directly drives the lifting mechanism 1 as an actuator, eliminating the complex intermediate transmission links, which is more efficient. It also eliminates the need to design an interface on the vacuum cavity and eliminates the risk of sealing leakage.

[0052] Furthermore, in this embodiment, the thrust provided by the motor 51 is F, and the thrust F provided by the motor 51 required by the vertical motion device should meet the following requirements:

[0053] F≥Gtan(θ+2α) (3)

[0054] Where F is the thrust, G is the load weight, θ is the wedge angle, α is the friction angle, and the friction coefficient μ = tanα. From the above formula (3), it can be seen that if a smaller thrust F is needed to lift the load, the wedge angle θ of the first wedge 13 needs to be reduced, or the friction angle α needs to be reduced. Since the wedge angle θ of the first wedge 13 determines the wedge ratio of the horizontal movement distance L and the vertical lifting height H of the lifting mechanism 1, the relationship is tanθ = H / L. Based on the vertical lifting height H and the horizontal movement distance L of the first wedge 13, the corresponding wedge angle θ can be obtained. For example, when the wedge ratio of the lifting mechanism 1 is 1:20, the corresponding wedge angle θ is 2.86°. If the friction coefficient is 0.05, the friction angle α is 2.86°. According to formula (3), F≥0.15G, that is, the vertical motion device only needs 15% of the load weight to drive the load. The lifting mechanism 1 realizes that the motor drives the load with a smaller force, while ensuring that the structural height in the vertical space is minimized, making the structure more compact and easy to modularly integrate.

[0055] like Figure 5As shown, optionally, two drive mechanisms 5 can be provided. The two drive mechanisms 5 are symmetrically arranged on both sides of the first wedge 13 and connected to the first wedge 13 through the mounting plate 53. The two drive mechanisms 5 drive the first wedge 13 to move simultaneously, which can not only provide a larger output force, but also balance the torque in the horizontal direction, making the operation more stable and reliable.

[0056] Furthermore, this utility model also provides a semiconductor device including the aforementioned vertical motion device. In some embodiments, the semiconductor device further includes a working chamber, and the vertical motion device is installed in the working chamber. Specifically, the base plate 11 can be installed at the bottom of the working chamber. The working chamber can be a vacuum working chamber, with a vacuum environment inside. The vertical motion device provided in this application embodiment enables load lifting in a vacuum environment, eliminating complex intermediate transmission links, resulting in higher efficiency. It also eliminates the need for interfaces on the vacuum chamber, thus eliminating the risk of seal leakage.

[0057] The working principle of this utility model is as follows: The vertical motion device includes a lifting mechanism 1, a guiding mechanism 2, a measuring mechanism 3, and a driving mechanism 5. The motor 51 in the driving mechanism 5 drives the friction strip 52 to move. The friction strip 52 drives the first wedge 13 to slide along the first guide rail 1201 via the mounting plate 53. The first wedge 13 drives the second wedge 15 to rise via the second sliding mechanism 14. When the second wedge 15 rises to a specified height, the reading head 32 reads the reading of the scale 31 and feeds back the height information of the second wedge 15 to the motor 51, causing the motor 51 to stop moving, forming a closed-loop control to ensure the motion accuracy of the lifting mechanism 1. When the second wedge 15 needs to descend, simply set the rotation direction of the motor 51 to the opposite direction. The friction strip 52 moves in the opposite direction, driving the first wedge 13 to move in the opposite direction, thereby achieving the descent of the second wedge 15. The guiding mechanism 2 in this vertical motion device is used to restrict the movement direction of the second wedge 15, allowing it to only move vertically.

[0058] This document uses specific embodiments to illustrate the principles and implementation methods of this utility model. The descriptions of these embodiments are merely for the purpose of helping to understand the method and core ideas of this utility model. It should be noted that those skilled in the art can make various improvements and modifications to this utility model without departing from its principles, and these improvements and modifications also fall within the protection scope of the claims of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A vertical motion device, characterized by, The vertical movement device comprises a lifting mechanism (1), a guide mechanism (2), a measuring mechanism (3) and a bearing mechanism (4). The lifting mechanism (1) is provided with a bottom plate (11), a first wedge block (13) and a second wedge block (15), the first wedge block (13) is in sliding connection with the bottom plate (11), and the first wedge block (13) is in sliding connection with the second wedge block (15). The first wedge block (13) comprises a first surface (1301) which is inclinedly arranged, and the second wedge block (15) is provided with a second surface (1502) which is parallel to the first surface (1301). A driving mechanism (5) is installed on the bottom plate (11) and is in driving connection with the first wedge block (13).

2. The vertical motion device of claim 1, wherein, The first wedge block (13) is in sliding connection with the bottom plate (11) through a first sliding mechanism (12), and the first wedge block (13) is in sliding connection with the second wedge block (15) through a second sliding mechanism (14).

3. The vertical motion device of claim 2, wherein, The lifting mechanism (1) is provided with a first groove (1101), and the first sliding mechanism (12) is installed in the first groove (1101).

4. The vertical motion device of claim 3, wherein, The lifting mechanism (1) is provided with a stop structure (16) which is installed on both sides of the first sliding mechanism (12).

5. The vertical motion device of claim 1, wherein, The driving mechanism (5) comprises a motor (51), a friction strip (52) and a mounting plate (53), the motor (51) is in abutment with the friction strip (52), and the friction strip (52) is connected with the first wedge block (13) through the mounting plate (53).

6. The vertical motion device of claim 1, wherein, The guide mechanism (2) is connected with the bottom plate (11) and the second wedge block (15) at both ends respectively.

7. The vertical motion device of claim 1, wherein, The measuring mechanism (3) comprises a grating ruler (31) and a reading head (32), and the grating ruler (31) is arranged in parallel with the reading head (32).

8. The vertical motion device of claim 7, wherein, The measuring mechanism (3) further comprises a first mounting block (33) and a second mounting block (34), the reading head (32) is connected with the bottom plate (11) through the first mounting block (33), and the grating ruler (31) is connected with the second wedge block (15) through the second mounting block (34).

9. The vertical motion device of claim 1, wherein, The bearing mechanism (4) is provided with an elastic body (42), and the elastic body (42) is in abutment with the bottom plate (11) and the second wedge block (15) at both ends respectively.

10. A semiconductor device, characterized by comprising: The semiconductor device further comprises a working cavity, and the vertical movement device is installed in the working cavity. The vertical movement device comprises a lifting mechanism (1), a guide mechanism (2), a measuring mechanism (3) and a bearing mechanism (4).

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