Physical quantity sensor, physical quantity sensor device, electronic device, and mobile object

Abstract

Provided are a physical quantity sensor, a physical quantity sensor device, an electronic device, and a movable body having electrode fingers that are difficult to break and have excellent impact resistance. The sensor comprises a fixed electrode portion, a movable portion that can be displaced in the X-axis direction, and a movable electrode portion provided on the movable portion. The fixed electrode portion comprises first and second fixed electrode portions arranged along the Y-axis direction, the first fixed electrode portion comprising a plurality of first fixed electrode fingers extending from a first main portion to both sides in the Y-axis direction, and the second fixed electrode portion comprising a plurality of second fixed electrode fingers extending from a second main portion to both sides in the Y-axis direction. The movable electrode portion comprises a first movable electrode portion and a second movable electrode portion arranged in the Y-axis direction, the first movable electrode portion comprising a plurality of first movable electrode fingers located on both sides of the first main portion in the Y-axis direction and opposite to the first fixed electrode fingers, and the second movable electrode portion comprising a plurality of second movable electrode fingers located on both sides of the second main portion in the Y-axis direction and opposite to the second fixed electrode fingers.

Description

[0001] This application is a divisional application of a patent application filed on December 4, 2017, with application number 201711258636.6 and invention name “Physical Quantity Sensor, Physical Quantity Sensor Device, Electronic Device and Mobile Body”. Technical Field

[0002] The present invention relates to a physical quantity sensor, a physical quantity sensor device, an electronic device, and a mobile object. Background Art

[0003] For example, as acceleration sensors capable of detecting acceleration (physical quantity), structures described in Patent Documents 1 and 2 are known.

[0004] The acceleration sensor disclosed in Patent Document 1 includes: a substrate; a movable portion displaceable relative to the substrate in the X-axis direction (a first direction along the detection axis); a first movable electrode portion and a second movable electrode portion disposed on the movable portion and arranged in the Y-axis direction (a second direction orthogonal to the first direction); and a first fixed electrode portion and a second fixed electrode portion fixed to the substrate and arranged in the Y-axis direction. The first fixed electrode portion includes a first fixed electrode finger extending in the negative direction of the Y-axis, and the second fixed electrode portion includes a second fixed electrode finger extending in the positive direction of the Y-axis. The first movable electrode portion includes a first movable electrode finger extending from the movable portion toward the positive direction of the Y-axis and opposing the first fixed electrode finger in the X-axis direction, and the second movable electrode portion includes a second movable electrode finger extending from the movable portion toward the negative direction of the Y-axis and opposing the second fixed electrode finger in the X-axis direction.

[0005] The acceleration sensor disclosed in Patent Document 2 includes: a substrate; a movable portion displaceable relative to the substrate in a first direction along a detection axis; a first movable electrode portion and a second movable electrode portion disposed on the movable portion and arranged in the first direction; and a first fixed electrode portion and a second fixed electrode portion fixed to the substrate and arranged in the first direction. Furthermore, the first fixed electrode portion includes a plurality of first fixed electrode fingers extending in a second direction perpendicular to the first direction, and the second fixed electrode portion includes a plurality of second fixed electrode fingers extending in the second direction. Furthermore, the first movable electrode portion includes first movable electrode fingers extending from the movable portion in the second direction and facing the first fixed electrode fingers in the first direction, and the second movable electrode portion includes second movable electrode fingers extending from the movable portion in the second direction and facing the second fixed electrode fingers in the first direction.

[0006] Prior art literature

[0007] Patent Literature

[0008] Patent Document 1: Japanese Patent Application Laid-Open No. 2007-139505

[0009] Patent Document 2: Japanese Patent Application Laid-Open No. 2010-238921

[0010] However, the acceleration sensors described in Patent Documents 1 and 2 have the following problem: the first and second fixed electrode fingers and the first and second movable electrode fingers are each longer, and these electrode fingers are easily damaged (easily broken) due to impact or the like. Summary of the Invention

[0011] An object of the present invention is to provide a physical quantity sensor, a physical quantity sensor device, an electronic device, and a mobile object in which electrode fingers are unlikely to be damaged and which have excellent impact resistance.

[0012] The present invention is made to solve at least a part of the above-mentioned problems, and can be achieved by the following inventions.

[0013] The physical quantity sensor of the present invention is characterized in that it comprises: a base; and an element portion, which is arranged on the base and is used to detect a physical quantity, the element portion comprising: a fixed electrode portion fixed to the base; a movable portion that can be displaced relative to the base in a first direction as a detection axis direction of the physical quantity; and a movable electrode portion, which is arranged on the movable portion, the fixed electrode portion comprising a first fixed electrode portion and a second fixed electrode portion arranged in a second direction as a direction intersecting the detection axis, the first fixed electrode portion comprising: a first main body portion; and a plurality of first fixed electrode fingers extending from the first main body portion to both sides of the second direction, the ... The two fixed electrode portions include: a second main body; and a plurality of second fixed electrode fingers extending from the second main body to both sides of the second direction; the movable electrode portion includes a first movable electrode portion and a second movable electrode portion arranged along the second direction; at least a portion of the first movable electrode portion has a plurality of first movable electrode fingers, which are located on both sides of the first main body in the second direction and are opposite to the first fixed electrode fingers in the first direction; at least a portion of the second movable electrode portion has a plurality of second movable electrode fingers, which are located on both sides of the second main body in the second direction and are opposite to the second fixed electrode fingers in the first direction.

[0014] This allows the first and second fixed electrode fingers, as well as the first and second movable electrode fingers, to be shortened, thereby achieving a physical quantity sensor in which the electrode fingers are less susceptible to damage and which has excellent shock resistance.

[0015] In the physical quantity sensor of the present invention, it is preferable that the first trunk portion and the second trunk portion extend in directions inclined with respect to the first direction and the second direction, respectively.

[0016] This allows for shorter electrode fingers to be formed.

[0017] In the physical quantity sensor of the present invention, it is preferable that the first trunk portion and the second trunk portion are inclined in opposite directions relative to the first direction.

[0018] This allows the joints between the movable portion and the base, the first fixed electrode portion and the base, and the second fixed electrode portion and the base to be placed closer together, making them less susceptible to base deflection and enabling more accurate detection of physical quantities.

[0019] Preferably, in the physical quantity sensor of the present invention, a plurality of first fixed electrode fingers are arranged in the first direction, and the length of the plurality of first fixed electrode fingers located on one side of the second direction relative to the first main body and arranged in the first direction along the second direction gradually decreases toward one side of the first direction, and the length of the plurality of first fixed electrode fingers located on the other side of the second direction relative to the first main body and arranged in the first direction along the second direction gradually increases toward one side of the first direction; a plurality of second fixed electrode fingers are arranged in the first direction, and the length of the plurality of second fixed electrode fingers located on one side of the second direction relative to the second main body and arranged in the first direction along the second direction gradually increases toward one side of the first direction, and the length of the plurality of second fixed electrode fingers located on the other side of the second direction relative to the second main body and arranged in the first direction along the second direction gradually decreases toward one side of the first direction.

[0020] Thus, damage due to impact or the like can be effectively reduced in the plurality of first and second fixed electrode fingers.

[0021] Preferably, in the physical quantity sensor of the present invention, a plurality of first movable electrode fingers are arranged in the first direction, and the length of the plurality of first movable electrode fingers along the second direction located on one side of the second direction relative to the first main body and arranged in the first direction gradually decreases toward one side of the first direction, and the length of the plurality of first movable electrode fingers along the second direction located on the other side of the second direction relative to the first main body and arranged in the first direction gradually increases toward one side of the first direction; a plurality of second movable electrode fingers are arranged in the first direction, and the length of the plurality of second movable electrode fingers along the second direction located on one side of the second direction relative to the second main body and arranged in the first direction gradually increases toward one side of the first direction, and the length of the plurality of second movable electrode fingers along the second direction located on the other side of the second direction relative to the second main body and arranged in the first direction gradually decreases toward one side of the first direction.

[0022] Thus, damage due to impact or the like can be effectively reduced in the plurality of first movable electrode fingers and the plurality of second movable electrode fingers.

[0023] In the physical quantity sensor of the present invention, preferably, each of the first movable electrode fingers is located on one side of the first fixed electrode finger pair, and each of the second movable electrode fingers is located on the other side of the first direction relative to the second fixed electrode finger pair.

[0024] This allows differential calculation of the first detection signal obtained between the first fixed electrode finger and the first movable electrode finger, and the second detection signal obtained between the second fixed electrode finger and the second movable electrode finger, thereby eliminating noise and enabling more accurate detection of physical quantities.

[0025] In the physical quantity sensor of the present invention, it is preferred to have: a movable part support part, which supports the movable part and is fixed to the base; a first main body support part, which supports the first main body and is fixed to the base; and a second main body support part, which supports the second main body and is fixed to the base, and the joint part between the movable part support part and the base, the joint part between the first main body and the base, and the joint part between the second main body support part and the base are arranged along the second direction.

[0026] As a result, the joints between the movable portion support and the base, the joints between the first trunk portion support and the base, and the joints between the second trunk portion support and the base can be arranged closer together, making them less susceptible to the effects of base deflection, thereby enabling more accurate detection of physical quantities.

[0027] In the physical quantity sensor of the present invention, it is preferable that the movable section supporting portion is located between the first fixed electrode portion and the second fixed electrode portion.

[0028] Thereby, the movable portion can be supported more stably.

[0029] In the physical quantity sensor of the present invention, it is preferred to have: a first connecting portion connecting the first main body and the first main body support portion; and a second connecting portion connecting the second main body and the second main body support portion, the first connecting portion being located on the opposite side of the movable part support portion relative to the first main body support portion, and the second connecting portion being located on the opposite side of the movable part support portion relative to the second main body support portion.

[0030] Thus, the joints between the movable portion support and the base, the joints between the first trunk portion support and the base, and the joints between the second trunk portion support and the base can be arranged closer together, making them less susceptible to the deflection of the base, thereby enabling more accurate detection of physical quantities.

[0031] In the physical quantity sensor of the present invention, it is preferable that the movable portion is formed in a frame shape surrounding the fixed electrode portion.

[0032] This makes it possible to increase the mass of the movable portion, thereby enabling more accurate detection of physical quantities.

[0033] The physical quantity sensor device of the present invention is characterized by including the physical quantity sensor of the present invention.

[0034] Thereby, the effects of the above-mentioned physical quantity sensor can be obtained, and a physical quantity sensor device with high reliability can be obtained.

[0035] The electronic device of the present invention is characterized by including the physical quantity sensor of the present invention.

[0036] This makes it possible to obtain the effects of the above-mentioned physical quantity sensor and to obtain an electronic device with high reliability.

[0037] The mobile object of the present invention is characterized by including the physical quantity sensor of the present invention.

[0038] Thereby, the effects of the above-mentioned physical quantity sensor can be obtained, and a highly reliable moving object can be obtained. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 It is a plan view showing the physical quantity sensor according to the first embodiment of the present invention.

[0040] Figure 2 yes Figure 1 AA line section view in.

[0041] Figure 3 It is a plan view showing a physical quantity sensor according to a second embodiment of the present invention.

[0042] Figure 4 It is a plan view showing a physical quantity sensor according to a third embodiment of the present invention.

[0043] Figure 5 It is a plan view showing a physical quantity sensor according to a fourth embodiment of the present invention.

[0044] Figure 6 It shows Figure 5 A top view of a modified example of the physical quantity sensor shown.

[0045] Figure 7 It is a plan view showing a physical quantity sensor according to a fifth embodiment of the present invention.

[0046] Figure 8 It is a plan view showing a physical quantity sensor according to a sixth embodiment of the present invention.

[0047] Figure 9 It is a plan view showing a physical quantity sensor according to a seventh embodiment of the present invention.

[0048] Figure 10 yes Figure 9 BB line section view in.

[0049] Figure 11 It is a plan view showing a physical quantity sensor according to an eighth embodiment of the present invention.

[0050] Figure 12 It is a plan view showing a physical quantity sensor according to a ninth embodiment of the present invention.

[0051] Figure 13 It is a plan view showing a physical quantity sensor according to a tenth embodiment of the present invention.

[0052] Figure 14 It is a plan view showing a physical quantity sensor according to an eleventh embodiment of the present invention.

[0053] Figure 15 It is a plan view showing a physical quantity sensor according to a twelfth embodiment of the present invention.

[0054] Figure 16 It is a plan view showing a physical quantity sensor according to a thirteenth embodiment of the present invention.

[0055] Figure 17 It is a cross-sectional view showing a physical quantity sensor device according to a fourteenth embodiment of the present invention.

[0056] Figure 18It is a perspective view showing an electronic device according to a fifteenth embodiment of the present invention.

[0057] Figure 19 It is a perspective view showing an electronic device according to a sixteenth embodiment of the present invention.

[0058] Figure 20 It is a perspective view showing an electronic device according to a seventeenth embodiment of the present invention.

[0059] Figure 21 It is a perspective view showing a moving body according to an eighteenth embodiment of the present invention.

[0060] Captions

[0061] 1: Physical quantity sensor; 2: Base; 21: Recess; 22, 23, 24: Fixing frame; 25, 26, 27: Groove; 3: Element; 4: Fixed electrode; 41: First fixed electrode; 411: First stem; 412, 412', 412": First fixed electrode finger; 413: First stem support; 413a: Joint; 414: First connecting portion; 42: Second fixed electrode; 421: Second stem; 422, 422', 422": Second fixed electrode finger; 423: Second stem support; 423a: Joint; 424: Second connecting portion 43: Main body support portion; 431: Joint portion; 51: Movable portion support portion; 511: Joint portion; 512: Base portion; 513, 514: Protrusions; 515: Base portion; 516: Extension portion; 52: Movable portion; 521: Frame portion; 522: First Y-axis extension portion; 523: First X-axis extension portion; 524: Second Y-axis extension portion; 525: Second X-axis extension portion; 526: First protrusion portion; 527: Second protrusion portion; 528: First opening portion; 529: Second opening portion; 53, 54: Spring portion; 53x, 53y: Portions; 531, 532: Spring leaf; 6 : Movable electrode portion; 61: First movable electrode portion; 611, 611', 611": First movable electrode finger; 62: Second movable electrode portion; 621, 621', 621": Second movable electrode finger; 71, 72, 73: Wiring; 8: Cover portion; 81: Recess; 82: Communication hole; 83: Sealing member; 89: Glass frit; 1000: Physical quantity sensor device; 1010: Base substrate; 1011: Connecting terminal; 1012: Mounting terminal; 1020: Circuit element; 1030: Molded portion; 1100: Personal computer; 1102: Keyboard; 1104: Main body 1106: Display unit; 1108: Display unit; 1200: Portable phone; 1202: Operation button; 1204: Receiver; 1206: Microphone; 1208: Display unit; 1300: Digital still camera; 1302: Housing; 1304: Light receiving unit; 1306: Shutter button; 1308: Memory; 1310: Display unit; 1500: Automobile; 1501: Vehicle body; 1502: Vehicle body posture control device; 1503: Wheel; Ax: Acceleration; BW1, BW2: Welding wires; L: Center axis; L411, L421: Axes; S: Accommodation space. DETAILED DESCRIPTION

[0062] Hereinafter, a physical quantity sensor, a physical quantity sensor device, an electronic device, and a moving object according to the present invention will be described in detail based on the embodiments shown in the drawings.

[0063] First embodiment

[0064] First, a physical quantity sensor according to a first embodiment of the present invention will be described.

[0065] Figure 1 It is a plan view showing the physical quantity sensor according to the first embodiment of the present invention. Figure 2 yes Figure 1 In addition, for the sake of convenience, the following Figure 1 The front side of the paper and Figure 2 The upper side of the Figure 1 The inside of the paper and Figure 2 The lower side in the diagram is also referred to as "lower." Furthermore, as shown in the figures, the three mutually orthogonal axes are referred to as the X-axis, Y-axis, and Z-axis, respectively. The direction parallel to the X-axis is also referred to as the "X-axis direction," the direction parallel to the Y-axis is also referred to as the "Y-axis direction," and the direction parallel to the Z-axis is also referred to as the "Z-axis direction." Furthermore, the leading end of the arrow direction of each axis is also referred to as the "positive side," and the opposite end is also referred to as the "negative side."

[0066] Figure 1The physical quantity sensor 1 shown is an acceleration sensor capable of detecting acceleration Ax in the X-axis direction. Such a physical quantity sensor 1 includes a base 2 and an element section 3 disposed on the base 2 and configured to detect acceleration Ax (a physical quantity) in the X-axis direction. Furthermore, the element section 3 includes a fixed electrode section 4 attached to the base 2; a movable section 52 displaceable relative to the base 2 in the X-axis direction (the first direction, the direction of the physical quantity detection axis); and a movable electrode section 6 disposed on the movable section 52. Furthermore, the fixed electrode section 4 includes a first fixed electrode section 41 and a second fixed electrode section 42 arranged along the Y-axis direction (a direction intersecting (orthogonal in this embodiment) the detection axis, i.e., the second direction). Furthermore, the first fixed electrode section 41 includes a first main body section 411 and a plurality of first fixed electrode fingers 412 disposed on both sides of the first main body section 411 in the Y-axis direction (the second direction), with their lengths extending along the second direction. The second fixed electrode section 42 includes a second trunk portion 421 and a plurality of second fixed electrode fingers 422 arranged on either side of the second trunk portion 421 in the Y-axis direction (second direction), with their lengths extending along the second direction. The movable electrode section 6 includes a first movable electrode section 61 and a second movable electrode section 62 arranged side by side in the Y-axis direction (second direction). At least a portion of the first movable electrode section 61 includes a plurality of first movable electrode fingers 611 located on either side of the first trunk portion 411 in the Y-axis direction (second direction), with their lengths extending along the second direction, and facing the first fixed electrode fingers 412 in the X-axis direction (first direction). At least a portion of the second movable electrode section 62 includes a plurality of second movable electrode fingers 621 located on either side of the second trunk portion 421 in the Y-axis direction (second direction), with their lengths extending along the second direction, and facing the second fixed electrode fingers 422 in the X-axis direction (first direction). This structure maintains sufficiently high capacitance between the first movable electrode finger 611 and the first fixed electrode finger 412, and between the second movable electrode finger 621 and the second fixed electrode finger 422, while also shortening the first and second fixed electrode fingers 412, 422, and the first and second movable electrode fingers 611, 621, respectively. Consequently, the electrode fingers 412, 422, 611, and 621 are less susceptible to damage, resulting in a physical quantity sensor 1 with excellent shock resistance. This physical quantity sensor 1 will be described in detail below.

[0067] like Figure 1 As shown, the physical quantity sensor 1 includes: a base 2 ; an element portion 3 provided on the base 2 ; and a cover 8 joined to the base 2 to cover the element portion 3 .

[0068] (base)

[0069] like Figure 1As shown, the base 2 is formed into a plate-like shape having a rectangular top view. Furthermore, the base 2 has a recessed portion 21 that is open to the upper surface. Furthermore, when viewed from above in the Z-axis direction, the recessed portion 21 is formed larger than the element portion 3 so as to surround the element portion 3. This recessed portion 21 functions as a relief portion to prevent contact between the element portion 3 and the base 2.

[0070] In addition, if Figure 2 As shown, the base 2 has three protruding mounting portions 22, 23, and 24 provided on the bottom surface of the recess 21. Furthermore, the first fixed electrode portion 41 is joined to the mounting portion 22, the second fixed electrode portion 42 is joined to the mounting portion 23, and the movable portion support portion 51 is joined to the mounting portion 24.

[0071] In addition, if Figure 1 As shown, the base 2 has grooves 25, 26, and 27 that are open to the upper surface. One end of the grooves 25, 26, and 27 is located outside the cover 8, and the other end is connected to the recess 21.

[0072] As the base 2, for example, a glass substrate made of a glass material containing alkali metal ions (mobile ions) (e.g., borosilicate glass such as Belleglass (registered trademark)) can be used. Therefore, depending on the material of the cover 8, for example, the base 2 and the cover 8 can be joined by anodic bonding, achieving a secure bond. Furthermore, since the base 2 is optically transparent, the state of the element 3 can be visually recognized from outside the physical quantity sensor 1 through the base 2.

[0073] However, the base 2 is not limited to a glass substrate, and a silicon substrate or a ceramic substrate may be used, for example. In addition, when a silicon substrate is used, from the viewpoint of preventing short circuits, it is preferable to use a high-resistance silicon substrate or a silicon substrate having a silicon oxide film (insulating oxide) formed on the surface by thermal oxidation or the like.

[0074] In addition, if Figure 1 As shown, wirings 71, 72, 73 are provided in grooves 25, 26, 27. One end of wiring 71 in groove 25 is exposed to the outside of cover 8 and functions as a terminal for electrical connection with an external device. Figure 2 As shown, the other end of the wiring 71 is drawn to the fixing frame portion 22 via the recessed portion 21 . The wiring 71 is electrically connected to the first fixed electrode portion 41 on the fixing frame portion 22 .

[0075] In addition, if Figure 1 As shown, one end of the wiring 72 in the groove 26 is exposed to the outside of the cover 8 and functions as a terminal for electrical connection with an external device. Figure 2As shown, the other end of the wiring 72 is drawn to the fixing frame portion 23 via the recessed portion 21 . The wiring 72 is electrically connected to the second fixed electrode portion 42 on the fixing frame portion 23 .

[0076] In addition, if Figure 1 As shown, one end portion of the wiring 73 in the groove portion 27 is exposed to the outside of the cover portion 8 and functions as a terminal for electrical connection with an external device. Figure 2 As shown, the other end of the wiring 73 is drawn to the fixing frame portion 24 via the recessed portion 21 . The wiring 73 is electrically connected to the movable portion supporting portion 51 on the fixing frame portion 24 .

[0077] The constituent materials of the wirings 71, 72, and 73 are not particularly limited, and examples thereof include metal materials such as gold (Au), silver (Ag), platinum (Pt), palladium (Pd), iridium (Ir), copper (Cu), aluminum (Al), nickel (Ni), Ti (titanium), and tungsten (W); alloys of these metal materials; and oxide-based transparent conductive materials such as ITO (indium tin oxide), IZO (indium zinc oxide), zinc oxide (ZnO), and indium gallium zinc oxide (IGZO). One or more of these materials can be used in combination (for example, as a laminate of two or more layers).

[0078] (cover part)

[0079] like Figure 1 As shown in FIG. 1 , the cover 8 is in the shape of a plate having a rectangular top view. Figure 2 As shown, the cover 8 has a recess 81 open to the lower surface side. The cover 8 is engaged with the base 2 to accommodate the element 3 in the recess 81. The cover 8 and the base 2 form an accommodation space S for accommodating the element 3.

[0080] In addition, if Figure 2 As shown, the cover 8 has a communication hole 82 that connects the inside and outside of the storage space S. The atmosphere of the storage space S can be replaced with a desired atmosphere through the communication hole 82. In addition, a sealing member 83 is provided in the communication hole 82 to seal the communication hole 82.

[0081] The sealing component 83 is not particularly limited as long as it can seal the connecting hole 82. For example, various alloys such as gold (Au) / tin (Sn) alloys, gold (Au) / germanium (Ge) alloys, gold (Au) / aluminum (Al) alloys, and glass materials such as low-melting-point glass can be used.

[0082] The storage space S is preferably filled with an inert gas such as nitrogen, helium, or argon, and maintained at an operating temperature (approximately -40°C to 80°C) at approximately atmospheric pressure. By setting the storage space S to atmospheric pressure, the viscous resistance increases, exerting a damping effect and rapidly converging (stopping) the vibration of the movable portion 52. This improves the detection accuracy of the acceleration Ax of the physical quantity sensor 1.

[0083] In this embodiment, the lid 8 is formed of a silicon substrate. However, the lid 8 is not limited to a silicon substrate; for example, a glass substrate or a ceramic substrate may be used. Furthermore, the method for joining the base 2 and the lid 8 is not particularly limited and may be appropriately selected depending on the materials of the base 2 and the lid 8. Examples include activation bonding, which involves joining surfaces activated by anodic bonding or plasma irradiation; bonding using a bonding material such as glass frit; and diffusion bonding, which involves joining a metal film formed on the upper surface of the base 2 and the lower surface of the lid 8.

[0084] like Figure 2 As shown, in this embodiment, the base 2 and the lid 8 are joined using glass frit 89 (low-melting-point glass), an example of a bonding material. When the base 2 and the lid 8 are overlapped, the interior and exterior of the storage space S communicate with each other via the grooves 25, 26, and 27. However, by using glass frit 89, the grooves 25, 26, and 27 can be sealed simultaneously with the base 2 and the lid 8, thereby making it easier to seal the storage space S. Furthermore, when the base 2 and the lid 8 are joined using anodic bonding or other bonding methods (a bonding method that does not seal the grooves 25, 26, and 27), the grooves 25, 26, and 27 can be sealed using, for example, a SiO2 film formed using a CVD method using TEOS (tetraethoxysilane).

[0085] (Components Department)

[0086] like Figure 1 As shown, the element portion 3 includes a fixed electrode portion 4 fixed to the base 2, a movable portion support portion 51 fixed to the base 2, a movable portion 52 that can be displaced in the X-axis direction relative to the movable portion support portion 51, spring portions 53 and 54 connecting the movable portion support portion 51 and the movable portion 52, and a movable electrode portion 6 provided on the movable portion 52. Among them, the movable portion support portion 51, the movable portion 52, the spring portions 53 and 54 and the movable electrode portion 6 are formed integrally. Such an element portion 3 can be formed, for example, by patterning a silicon substrate doped with impurities such as phosphorus (P) and boron (B). In addition, the element portion 3 is bonded to the base 2 (fixed frame portions 22, 23, 24) by anodic bonding. However, there is no particular limitation on the material of the element portion 3 and the method of bonding the element portion 3 to the base 2.

[0087] like Figure 1As shown, the movable portion support portion 51 has an elongated shape extending in the X-axis direction. Furthermore, the movable portion support portion 51 has a joint portion 511 that joins with the fixed frame portion 24 at its negative end in the X-axis direction. It should be noted that in this embodiment, the movable portion support portion 51 has an elongated shape extending in the X-axis direction. However, the shape of the movable portion support portion 51 is not particularly limited as long as it can function. In the following description, when viewed from above in the Z-axis direction, the imaginary axis that bisects the movable portion support portion 51 in the Y-axis direction is referred to as the center axis L.

[0088] Such a movable section supporting portion 51 is located between the first fixed electrode portion 41 and the second fixed electrode portion 42. Therefore, the movable section supporting portion 51 can be arranged at the center of the movable section 52, and the movable section 52 can be supported more stably.

[0089] like Figure 1 As shown, the movable portion 52 includes a frame-shaped portion in a plan view from the Z-axis direction, which surrounds the movable portion support portion 51, the spring portions 53 and 54, and the first and second fixed electrode portions 41 and 42. In other words, the movable portion 52 includes a frame-shaped portion that surrounds the fixed electrode portion 4. This increases the mass of the movable portion 52, thereby further improving sensitivity and enabling accurate detection of physical quantities.

[0090] The movable portion 52 also includes a first opening 528 (first notch) within which the first fixed electrode portion 41 is located, and a second opening 529 (second notch) within which the second fixed electrode portion 42 is located. The first opening 528 and the second opening 529 are arranged side by side along the Y-axis. The movable portion 52 is symmetrical about the central axis L.

[0091] If the shape of the movable part 52 is described in more detail, the movable part 52 includes: a frame part 521 that surrounds the movable part support part 51, the spring parts 53, 54, and the first fixed electrode part 41 and the second fixed electrode part 42; a first Y-axis extension part 522 that is located on the positive side of the first opening part 528 in the X-axis direction and extends from the frame part 521 to the negative side in the Y-axis direction; a first X-axis extension part 523 that extends from the front end part of the first Y-axis extension part 522 to the negative side in the X-axis direction; a second Y-axis extension part 524 that is located on the positive side of the second opening part 529 in the X-axis direction and extends from the frame part 521 to the positive side in the Y-axis direction; and a second X-axis extension part 525 that extends from the front end part of the second Y-axis extension part 524 to the negative side in the X-axis direction. In addition, the first Y-axis extension portion 522 and the second Y-axis extension portion 524 are respectively arranged near the spring portion 53 and are configured along the Y-axis direction of the spring portion 53 (the extension direction of the spring piece 531), and the first X-axis extension portion 523 and the second X-axis extension portion 525 are respectively arranged near the movable portion support portion 51 and are configured along the movable portion support portion 51.

[0092] In this configuration, the first Y-axis extension 522 and the first X-axis extension 523 function as support portions for the first movable electrode fingers 611 , and the second Y-axis extension 524 and the second X-axis extension 523 function as support portions for the second movable electrode fingers 621 .

[0093] The movable portion 52 also includes a first protrusion 526 that projects from the frame 521 into the first opening 528 to fill the remaining space in the first opening 528, and a second protrusion 527 that projects from the frame 521 into the second opening 529 to fill the remaining space in the second opening 529. Providing the first and second protrusions 526 and 527 in this manner further increases the mass of the movable portion 52 without increasing its size. This further improves sensitivity, resulting in a highly sensitive physical quantity sensor 1.

[0094] In addition, the spring portions 53 and 54 are elastically deformable, and the movable portion 52 can be displaced in the X-axis direction relative to the movable portion support portion 51 by the elastic deformation of the spring portions 53 and 54. Figure 1 As shown, the spring portion 53 connects the positive end of the movable portion 52 in the X-axis direction to the positive end of the movable portion support portion 51 in the X-axis direction, while the spring portion 54 connects the negative end of the movable portion support portion 52 in the X-axis direction to the negative end of the movable portion support portion 51 in the X-axis direction. This allows the movable portion 52 to be supported on both sides in the X-axis direction, stabilizing the posture and movement of the movable portion 52. Consequently, unnecessary vibration can be reduced, allowing for higher-precision detection of acceleration Ax.

[0095] The spring portion 53 also includes a pair of spring pieces 531 and 532 arranged in the Y-axis direction. Each of the spring pieces 531 and 532 has a meandering shape in the Y-axis direction and is formed symmetrically with respect to the central axis L. The spring portion 53 includes a portion 53y extending longer in the Y-axis direction and a portion 53x extending shorter in the X-axis direction. The structure of the spring portion 54 is the same as that of the spring portion 53.

[0096] Thus, by making the spring portions 53 and 54 longer in the Y-axis direction (orthogonal to the X-axis) than in the X-axis (the detection axis), displacement of the movable portion 52 outside the X-axis direction (the detection axis direction) (particularly rotational displacement about the Z-axis) when acceleration Ax is applied can be reduced. Consequently, unnecessary vibration can be reduced, and acceleration Ax can be detected with higher accuracy. However, the configuration of the spring portions 53 and 54 is not particularly limited, as long as they can perform their functions.

[0097] In addition, if Figure 1 As shown, the fixed electrode section 4 includes a first fixed electrode section 41 located in the first opening 528 and a second fixed electrode section 42 located in the second opening 529. The first fixed electrode section 41 and the second fixed electrode section 42 are arranged side by side in the Y-axis direction.

[0098] The first fixed electrode unit 41 includes a first trunk support portion 413 fixed to the base 2; a first trunk 411 supported by the first trunk support portion 413; and a plurality of first fixed electrode fingers 412 extending from the first trunk 411 in both directions in the Y-axis direction. The first trunk support portion 413, the first trunk 411, and the first fixed electrode fingers 412 are integrally formed.

[0099] The first trunk portion supporting portion 413 includes a joint portion 413a that is joined to the fixing frame portion 22. The joint portion 413a is disposed offset to the negative side of the first trunk portion supporting portion 413 in the X-axis direction.

[0100] Furthermore, the first trunk portion 411 has a rod-like, longitudinal shape, one end of which is connected to the first trunk portion support portion 413 and is thereby supported by the first trunk portion support portion 413. Furthermore, the length direction of the first trunk portion 411 extends in a direction inclined relative to the X-axis and the Y-axis when viewed from above in the Z-axis direction. More specifically, the first trunk portion 411 is inclined toward the front end, thereby increasing the separation distance from the central axis L. This arrangement makes it easy to position the first trunk portion support portion 413 near the movable portion support portion 51.

[0101] The inclination of the axis L411 of the first trunk portion 411 relative to the X-axis is not particularly limited, but is preferably between 10° and 45°, and more preferably between 10° and 30°. This reduces the expansion of the first fixed electrode portion 41 in the Y-axis direction and enables miniaturization of the element portion 3.

[0102] Furthermore, the first fixed electrode fingers 412 extend from the first trunk portion 411 in both directions along the Y-axis. In other words, the first fixed electrode fingers 412 include a first fixed electrode finger 412' located on the positive side of the first trunk portion 411 in the Y-axis direction, and a first fixed electrode finger 412' located on the negative side of the first trunk portion 411 in the Y-axis direction. Furthermore, a plurality of first fixed electrode fingers 412' and 412' are provided, spaced apart from each other along the X-axis direction.

[0103] In addition, the length of the plurality of first fixed electrode fingers 412' (the length in the Y-axis direction) gradually decreases toward the positive side of the X-axis direction. In addition, the front ends of the plurality of first fixed electrode fingers 412' are respectively located on the same straight line along the X-axis direction. On the other hand, the length of the plurality of first fixed electrode fingers 412" (the length in the Y-axis direction) gradually increases toward the positive side of the X-axis direction. In addition, the front ends of the plurality of first fixed electrode fingers 412" are respectively located on the same straight line along the X-axis direction. In addition, the total length of the first fixed electrode fingers 412' and the first fixed electrode fingers 412" arranged in the Y-axis direction is approximately the same.

[0104] The second fixed electrode unit 42 includes a second trunk support portion 423 fixed to the base 2; a second trunk 421 supported by the second trunk support portion 423; and a plurality of second fixed electrode fingers 422 extending from the second trunk 421 in both directions in the Y-axis direction. The second trunk support portion 423, the second trunk 421, and the second fixed electrode fingers 422 are integrally formed.

[0105] The second trunk supporting portion 423 has a joint portion 423a that is joined to the upper surface of the fixing frame portion 23. The joint portion 423a is arranged offset to the negative side of the second trunk supporting portion 423 in the X-axis direction.

[0106] Furthermore, the second trunk portion 421 has a longitudinally elongated, rod-like shape, one end of which is connected to the second trunk support portion 423 and thereby supported by the second trunk support portion 423. Furthermore, the longitudinal direction of the second trunk portion 421 extends in directions inclined relative to the X-axis and the Y-axis, respectively, when viewed from above in the Z-axis direction. More specifically, the second trunk portion 421 is inclined such that the distance from the central axis L increases toward its front end. This arrangement allows the second trunk support portion 423 to be easily positioned near the movable portion support portion 51.

[0107] The inclination of the axis L421 of the second trunk portion 421 relative to the X-axis is not particularly limited, but is preferably between 10° and 45°, and more preferably between 10° and 30°. This reduces the expansion of the second fixed electrode portion 42 in the Y-axis direction and enables miniaturization of the element portion 3.

[0108] In addition, the second fixed electrode fingers 422 extend from the second main body 421 in both directions along the Y-axis. In other words, the second fixed electrode fingers 422 include: a second fixed electrode finger 422' located on the positive side of the second main body 421 in the Y-axis direction, and a second fixed electrode finger 422" located on the negative side of the second main body 421 in the Y-axis direction. In addition, a plurality of second fixed electrode fingers 422' and 422" are provided in a manner spaced apart from each other along the X-axis direction.

[0109] In addition, the length of the plurality of second fixed electrode fingers 422' (the length in the Y-axis direction) gradually increases toward the positive side of the X-axis direction. In addition, the front ends of the plurality of second fixed electrode fingers 422' are respectively located on the same straight line along the X-axis direction. On the other hand, the length of the plurality of second fixed electrode fingers 422" (the length in the Y-axis direction) gradually decreases toward the positive side of the X-axis direction. In addition, the front ends of the plurality of second fixed electrode fingers 422" are respectively located on the same straight line along the X-axis direction. In addition, the total lengths of the second fixed electrode fingers 422' and the second fixed electrode fingers 422" arranged in the Y-axis direction are respectively approximately the same.

[0110] The first fixed electrode portion 41 and the second fixed electrode portion 42 have been described above. The shapes and configurations of the first fixed electrode portion 41 and the second fixed electrode portion 42 are line-symmetrical with respect to the central axis L (excluding the case where the first fixed electrode finger 412 and the second fixed electrode finger 422 are offset in the X-axis direction). In particular, in this embodiment, the first trunk portion 411 and the second trunk portion 421 each extend in a direction inclined relative to the X-axis, such that the separation distance from the central axis L gradually increases toward the front end. Through such a configuration, the joint portion 413a of the first trunk portion support portion 413 and the joint portion 423a of the second trunk portion support portion 423 can be configured closer to the joint portion 511 of the movable portion support portion 51. Therefore, the offset difference in the Z-axis direction between the movable part 52 and the fixed electrode part 4 when the base 2 warps or bends due to heat, residual stress, etc. can be more effectively reduced. Specifically, the offset difference in the Z-axis direction between the first movable electrode finger 611 and the first fixed electrode finger 412, and the offset difference in the Z-axis direction between the second movable electrode finger 621 and the second fixed electrode finger 422 can be more effectively reduced.

[0111] In particular, in this embodiment, the joint portion 413a of the first trunk supporting portion 413, the joint portion 423a of the second trunk supporting portion 423, and the joint portion 511 of the movable portion supporting portion 51 are arranged in the Y-axis direction. This allows the joint portions 413a and 423a to be arranged closer to the joint portion 511, further enhancing the aforementioned effect.

[0112] In addition, if Figure 1 As shown, the movable electrode section 6 includes a first movable electrode section 61 located in the first opening 528 and a second movable electrode section 62 located in the second opening 529. The first movable electrode section 61 and the second movable electrode section 62 are arranged side by side in the Y-axis direction.

[0113] In addition, the first movable electrode portion 61 has a plurality of first movable electrode fingers 611 located on both sides of the first main body portion 411 in the Y-axis direction and extending along the Y-axis direction. That is, the first movable electrode finger 611 has: a first movable electrode finger 611' located on the positive side of the first main body portion 411 in the Y-axis direction, and a first movable electrode finger 611". located on the negative side in the Y-axis direction. Moreover, a plurality of first movable electrode fingers 611' and first movable electrode fingers 611" are respectively provided separately from each other along the X-axis direction. In addition, the first movable electrode finger 611' extends from the frame portion 521 toward the negative side in the Y-axis direction, and the first movable electrode finger 611" extends from the first X-axis extension portion 523 toward the positive side in the Y-axis direction.

[0114] Furthermore, each first movable electrode finger 611 is located on the positive side in the X-axis direction with respect to the corresponding first fixed electrode finger 412 , and faces the first fixed electrode finger 412 via a gap.

[0115] In addition, the length of the plurality of first movable electrode fingers 611' (the length in the Y-axis direction) gradually decreases toward the positive side of the X-axis direction. In addition, the front ends of the plurality of first movable electrode fingers 611' are respectively located on the same straight line along the extension direction of the first main body 411. On the other hand, the length of the plurality of first movable electrode fingers 611" (the length in the Y-axis direction) gradually increases toward the positive side of the X-axis direction. In addition, the front ends of the plurality of first movable electrode fingers 611" are respectively located on the same straight line along the extension direction of the first main body 411. In addition, the total lengths of the first movable electrode fingers 611' and the first movable electrode fingers 611" arranged in the Y-axis direction are respectively approximately the same.

[0116] In addition, the second movable electrode portion 62 has a plurality of second movable electrode fingers 621 located on both sides of the second main body portion 421 in the Y-axis direction and extending along the Y-axis direction. That is, the second movable electrode finger 621 has a second movable electrode finger 621' located on the positive side of the second main body portion 421 in the Y-axis direction and a second movable electrode finger 621". located on the negative side in the Y-axis direction. In addition, a plurality of second movable electrode fingers 621' and 621" are respectively arranged in a manner spaced apart from each other along the X-axis direction. Furthermore, the second movable electrode finger 621' extends from the second X-axis extension portion 525 toward the negative side in the Y-axis direction, and the second movable electrode finger 621" extends from the frame portion 521 toward the positive side in the Y-axis direction.

[0117] Furthermore, each second movable electrode finger 621 is located on the negative side in the X-axis direction with respect to the corresponding second fixed electrode finger 422 , and faces the second fixed electrode finger 422 via a gap.

[0118] In addition, the length of the plurality of second movable electrode fingers 621' (the length in the Y-axis direction) gradually increases toward the positive side of the X-axis direction. In addition, the front ends of the plurality of second movable electrode fingers 621' are respectively located on the same straight line along the extension direction of the second main body 421. On the other hand, the length of the plurality of second movable electrode fingers 621" (the length in the Y-axis direction) gradually decreases toward the positive side of the X-axis direction. In addition, the front ends of the plurality of second movable electrode fingers 621" are respectively located on the same straight line along the extension direction of the second main body 421. In addition, the total lengths of the second movable electrode fingers 621' and the second movable electrode fingers 621" arranged in the Y-axis direction are respectively approximately the same.

[0119] The first movable electrode section 61 and the second movable electrode section 62 have been described above. The shapes and arrangements of the first movable electrode section 61 and the second movable electrode section 62 are line-symmetrical with respect to the central axis L (excluding the case where the first movable electrode fingers 611 and the second movable electrode fingers 621 are offset in the X-axis direction).

[0120] The above describes the structure of the physical quantity sensor 1 in detail. When acceleration Ax is applied to such a physical quantity sensor 1, the movable portion 52 displaces in the X-axis direction based on the magnitude of the acceleration Ax, simultaneously causing the spring portions 53 and 54 to elastically deform. This displacement changes the gap between the first movable electrode finger 611 and the first fixed electrode finger 412, and the gap between the second movable electrode finger 621 and the second fixed electrode finger 422. This displacement also changes the magnitude of the electrostatic capacitance between the first movable electrode finger 611 and the first fixed electrode finger 412, and the electrostatic capacitance between the second movable electrode finger 621 and the second fixed electrode finger 422. Therefore, acceleration Ax can be detected based on these changes in electrostatic capacitance.

[0121] As described above, each first movable electrode finger 611 is located on the positive side of the X-axis direction relative to the corresponding first fixed electrode finger 412. Conversely, each second movable electrode finger 621 is located on the negative side of the X-axis direction relative to the corresponding second fixed electrode finger 422. In other words, each first movable electrode finger 611 is located on one side of its paired first fixed electrode finger 412 in the X-axis direction (first direction), while each second movable electrode finger 621 is located on the other side of its paired second fixed electrode finger 422 in the X-axis direction (first direction). Therefore, when acceleration Ax is applied, the gap between the first movable electrode finger 611 and the first fixed electrode finger 412 decreases, while the gap between the second movable electrode finger 621 and the second fixed electrode finger 422 increases. Alternatively, the gap between the first movable electrode finger 611 and the first fixed electrode finger 412 increases, while the gap between the second movable electrode finger 621 and the second fixed electrode finger 422 decreases. Therefore, by performing differential calculation on the first detection signal obtained between the first fixed electrode finger 412 and the first movable electrode finger 611 and the second detection signal obtained between the second fixed electrode finger 422 and the second movable electrode finger 621 , noise can be eliminated and the acceleration Ax can be detected more accurately.

[0122] The physical quantity sensor 1 described above includes: a plurality of first fixed electrode fingers 412 extending from a first trunk portion 411 on both sides in the Y-axis direction (second direction); a plurality of second fixed electrode fingers 422 extending from a second trunk portion 421 on both sides in the Y-axis direction (second direction); a plurality of first movable electrode fingers 611 located on both sides of the first trunk portion 411 in the Y-axis direction (second direction) and facing the first fixed electrode fingers 412 in the X-axis direction (first direction); and a plurality of second movable electrode fingers 621 located on both sides of the second trunk portion 421 in the Y-axis direction (second direction) and facing the second fixed electrode fingers 422 in the X-axis direction (first direction). This configuration allows for sufficiently large capacitance to be formed between the first fixed electrode fingers 412 and the first movable electrode fingers 611, and between the second fixed electrode fingers 422 and the second movable electrode fingers 621, while also shortening the lengths of the electrode fingers 412, 422, 611, and 621. Therefore, a physical quantity sensor 1 can be obtained that exhibits excellent detection accuracy, reduces damage to electrode fingers 412, 422, 611, and 621, and exhibits excellent impact resistance. Furthermore, since damage to electrode fingers 412, 422, 611, and 621 is reduced, the thickness of electrode fingers 412, 422, 611, and 621 can be reduced, thereby achieving miniaturization and increased sensitivity of physical quantity sensor 1.

[0123] In addition, in the physical quantity sensor 1, the first main body 411 and the second main body 421 extend in directions inclined relative to the X-axis direction (first direction) and the Y-axis direction (second direction), respectively. As a result, a first fixed electrode finger 412 shorter than the first fixed electrode finger 412 can be included among the plurality of first fixed electrode fingers 412, and the first fixed electrode portion 41 as a whole becomes more difficult to damage. Similarly, a second fixed electrode finger 422 shorter than the second fixed electrode finger 422 can be included among the plurality of second fixed electrode fingers 422, and the second fixed electrode portion 42 as a whole becomes more difficult to damage. The same applies to each first movable electrode finger 611 and the second movable electrode finger 621. Therefore, the damage to the electrode fingers 412, 422, 611, and 621 can be more effectively reduced, and a physical quantity sensor 1 capable of exhibiting better impact resistance can be obtained.

[0124] Furthermore, in the physical quantity sensor 1, the first trunk portion 411 and the second trunk portion 421 are inclined toward opposite sides relative to the X-axis direction (first direction). Consequently, the joint portion 413a of the first trunk support portion 413 and the joint portion 423a of the second trunk support portion 423 can be positioned closer to the joint portion 511 of the movable portion support portion 51. Therefore, when the base portion 2 warps or flexes due to heat, the offset difference in the Z-axis direction between the movable portion 52 and the fixed electrode portion 4 can be more effectively reduced. As a result, for example, changes in detection characteristics based on ambient temperature are reduced, resulting in a physical quantity sensor 1 having excellent temperature characteristics.

[0125] In particular, this embodiment includes: a movable portion support portion 51 that supports the movable portion 52 and is fixed to the base 2; a first trunk portion support portion 413 that supports the first trunk portion 411 and is fixed to the base 2; and a second trunk portion support portion 423 that supports the second trunk portion 421 and is fixed to the base 2. The joint portion 511 between the movable portion support portion 51 and the base 2, the joint portion 413a between the first trunk portion support portion 413 and the base, and the joint portion 423a between the second trunk portion support portion 423 and the base 2 are arranged in the Y-axis direction (second direction). Therefore, the joint portion 413a and the joint portion 423a can be arranged closer to the joint portion 511. Consequently, the offset difference in the Z-axis direction between the movable portion 52 and the fixed electrode portion 4 can be more effectively reduced when the base 2 warps or flexes due to heat, residual stress, or the like. As a result, for example, variations in detection characteristics due to ambient temperature are further reduced, resulting in a physical quantity sensor 1 with even better temperature characteristics.

[0126] Furthermore, in this embodiment, a plurality of first fixed electrode fingers 412 are arranged in the X-axis direction (first direction). Furthermore, the length of the plurality of first fixed electrode fingers 412' arranged in the X-axis direction, located on the positive side (one side) of the Y-axis direction (second direction) relative to the first main body portion 411, gradually decreases toward the positive side (one side) of the X-axis direction. Conversely, the length of the plurality of first fixed electrode fingers 412" arranged in the X-axis direction, located on the negative side (the other side) of the Y-axis direction relative to the first main body portion 411, gradually increases toward the positive side of the X-axis direction. This reduces the proportion of elongated (long in the Y-axis direction) first fixed electrode fingers 412 among the plurality of first fixed electrode fingers 412, thereby making the first fixed electrode fingers 412 as a whole less susceptible to damage. Consequently, damage to the first fixed electrode fingers 412 due to impact, etc., can be more effectively reduced.

[0127] On the other hand, a plurality of second fixed electrode fingers 422 are arranged in the X-axis direction. Furthermore, the length of the plurality of second fixed electrode fingers 422' located on the positive side of the Y-axis direction relative to the second main body 421 and arranged in the X-axis direction along the Y-axis direction gradually increases toward the positive side of the X-axis direction, and the length of the plurality of second fixed electrode fingers 422" located on the negative side of the Y-axis direction relative to the second main body 421 and arranged in the X-axis direction along the Y-axis direction gradually decreases toward the positive side of the X-axis direction. The proportion of slender (long in the Y-axis direction) second fixed electrode fingers 422 among the plurality of second fixed electrode fingers 422 can be reduced, and accordingly, the second fixed electrode fingers 422 as a whole become less susceptible to damage. Therefore, the damage of the second fixed electrode fingers 422 due to impact, etc. can be more effectively reduced.

[0128] In addition, in this embodiment, a plurality of first movable electrode fingers 611 are arranged in the X-axis direction (first direction). Furthermore, the length of the plurality of first movable electrode fingers 611' arranged in the X-axis direction and located on the positive side (one side) of the Y-axis direction (second direction) relative to the first main body 411 gradually decreases toward the positive side (one side) of the X-axis direction, while the length of the plurality of first movable electrode fingers 611" arranged in the X-axis direction and located on the negative side (the other side) of the Y-axis direction relative to the first main body 411 gradually increases toward the positive side of the X-axis direction. This reduces the proportion of elongated (long in the Y-axis direction) first movable electrode fingers 611 among the plurality of first movable electrode fingers 611, making the first movable electrode fingers 611 as a whole less susceptible to damage. Consequently, damage to the first movable electrode fingers 611 due to impacts, etc., can be more effectively reduced.

[0129] On the other hand, a plurality of second movable electrode fingers 621 are arranged in the X-axis direction. Furthermore, the length of the plurality of second movable electrode fingers 621' located on the positive side (one side) of the Y-axis direction relative to the second main body 421 and arranged in the X-axis direction along the Y-axis direction gradually increases toward the positive side (one side) of the X-axis direction, and the length of the plurality of second movable electrode fingers 621" located on the negative side of the Y-axis direction relative to the second main body 421 and arranged in the X-axis direction along the Y-axis direction gradually decreases toward one side of the X-axis direction. As a result, the proportion of the slender (long in the Y-axis direction) second movable electrode fingers 621 among the plurality of second movable electrode fingers 621 can be reduced, and accordingly, the second movable electrode fingers 621 as a whole become less susceptible to damage. Therefore, damage to the second movable electrode fingers 621 due to impact, etc. can be more effectively reduced.

[0130] Second embodiment

[0131] Next, a physical quantity sensor according to a second embodiment of the present invention will be described.

[0132] Figure 3 1 is a top view showing a physical quantity sensor according to a second embodiment of the present invention. Figure 3 In the figure, the base and the cover are omitted and only the element portion is shown.

[0133] The physical quantity sensor 1 of the present invention is the same as the physical quantity sensor 1 of the first embodiment except that the configuration of the element portion 3 is different.

[0134] In the following description, the differences between the physical quantity sensor 1 of the second embodiment and the first embodiment are mainly described, and the description of the same matters will be omitted. Figure 3 In the present invention, the same components as those in the first embodiment are denoted by the same reference numerals.

[0135] like Figure 3 As shown, in the physical quantity sensor 1 of this embodiment, the first trunk portion 411 and the second trunk portion 421 each extend in the X-axis direction. Furthermore, the lengths of the plurality of first fixed electrode fingers 412 are substantially equal, and similarly, the lengths of the plurality of second fixed electrode fingers 422 are substantially equal. Furthermore, the lengths of the plurality of first movable electrode fingers 611 are substantially equal, and similarly, the lengths of the plurality of second movable electrode fingers 621 are substantially equal.

[0136] According to the second embodiment as well, the same effects as those of the first embodiment can be achieved.

[0137] Third embodiment

[0138] Next, a physical quantity sensor according to a third embodiment of the present invention will be described.

[0139] Figure 4 1 is a top view showing a physical quantity sensor according to a third embodiment of the present invention. Figure 4 In the figure, the base and the cover are omitted and only the element portion is shown.

[0140] The physical quantity sensor 1 of the present invention is the same as the physical quantity sensor 1 of the second embodiment described above except that the configuration of the element portion 3 is different.

[0141] In the following description, the differences between the physical quantity sensor 1 of the third embodiment and the second embodiment are mainly described, and descriptions of the same matters will be omitted. Figure 4 In the present invention, the same components as those in the second embodiment are denoted by the same reference numerals.

[0142] like Figure 4 As shown, the first fixed electrode portion 41 further includes a first connecting portion 414 connecting the first trunk portion supporting portion 413 and the first trunk portion 411. Furthermore, the first connecting portion 414 is located on the side of the first trunk portion supporting portion 413 opposite the movable portion supporting portion 51. Furthermore, the first connecting portion 414 extends in the Y-axis direction and is connected to the end of the first trunk portion 411 on the negative side in the X-axis direction.

[0143] Similarly, the second fixed electrode portion 42 further includes a second connecting portion 424 connecting the second trunk portion supporting portion 423 and the second trunk portion 421. Furthermore, the second connecting portion 424 is located on the side of the second trunk portion supporting portion 423 opposite the movable portion supporting portion 51. Furthermore, the second connecting portion 424 extends in the Y-axis direction and is connected to the end of the second trunk portion 421 on the negative side in the X-axis direction.

[0144] With this configuration, the inclusion of the first connecting portion 414 and the second connecting portion 424 allows the joint portion 413a of the first trunk supporting portion 413 and the joint portion 423a of the second trunk supporting portion 423 to be positioned closer to the joint portion 511 of the movable portion supporting portion 51. Consequently, the offset difference in the Z-axis direction between the movable portion 52 and the fixed electrode portion 4 can be more effectively reduced when the base portion 2 warps or flexes due to heat, residual stress, or the like. Specifically, the offset difference in the Z-axis direction between the first movable electrode finger 611 and the first fixed electrode finger 412, as well as the offset difference in the Z-axis direction between the second movable electrode finger 621 and the second fixed electrode finger 422, can be more effectively reduced. Consequently, physical quantities can be detected more accurately.

[0145] Even according to such a third embodiment, the same effects as those of the above-mentioned first embodiment can be exhibited.

[0146] Fourth embodiment

[0147] Next, a physical quantity sensor according to a fourth embodiment of the present invention will be described.

[0148] Figure 5 It is a plan view showing a physical quantity sensor according to a fourth embodiment of the present invention. Figure 6 It shows Figure 5 FIG. 1 is a top view of a modified example of the physical quantity sensor shown in FIG. Figure 5 and Figure 6 In the figure, the base and the cover are omitted, and only the element part is shown.

[0149] The physical quantity sensor 1 of the present invention is the same as the physical quantity sensor 1 of the first embodiment except that the configuration of the element portion 3 is different.

[0150] In the following description, the differences between the physical quantity sensor 1 of the fourth embodiment and the first embodiment are mainly described, and descriptions of the same matters will be omitted. Figure 5 and Figure 6 In the present invention, the same components as those in the first embodiment are denoted by the same reference numerals.

[0151] like Figure 5 As shown, the first fixed electrode portion 41 has a pair of first main bodies 411 extending in directions inclined relative to the X-axis and the Y-axis, respectively. Furthermore, the pair of first main bodies 411 are located on opposite sides of the X-axis direction relative to the first main body support portion 413. That is, one first main body 411 extends from the first main body support portion 413 in a direction inclined relative to the X-axis toward the positive side of the X-axis direction, and the other first main body 411 extends from the first main body support portion 413 in a direction inclined relative to the X-axis toward the negative side of the X-axis direction. In addition, the pair of first main bodies 411 are line-symmetrical with respect to a line parallel to the Y-axis. Furthermore, a plurality of first fixed electrode fingers 412 are provided on each first main body 411, and a plurality of first movable electrode fingers 611 are provided on the movable portion 52 so as to be opposite to each first fixed electrode finger 412.

[0152] Similarly, the second fixed electrode portion 42 has a pair of second main stems 421 extending in directions inclined relative to the X-axis and the Y-axis, respectively. Furthermore, the pair of second main stems 421 are located on opposite sides of the second main stem support portion 423 in the X-axis direction. That is, one second main stem 421 extends from the second main stem support portion 423 in a direction inclined relative to the X-axis toward the positive side of the X-axis direction, and the other second main stem 421 extends from the second main stem support portion 423 in a direction inclined relative to the X-axis toward the negative side of the X-axis direction. Furthermore, the pair of second main stems 421 are line-symmetrical with respect to a line parallel to the Y-axis. Furthermore, a plurality of second fixed electrode fingers 422 are provided on each second main stem 421, and a plurality of second movable electrode fingers 621 are provided on the movable portion 52 so as to oppose each second fixed electrode finger 422.

[0153] With this configuration, for example, the number of first and second fixed electrode fingers 412, 422, and first and second movable electrode fingers 611, 621 can be increased compared to the first embodiment. Therefore, for example, if the electrode finger lengths remain the same as in the first embodiment, the capacitance between the first movable electrode finger 611 and the first fixed electrode finger 412, as well as the capacitance between the second movable electrode finger 621 and the second fixed electrode finger 422, can be increased. This also increases the change in capacitance when acceleration Ax is applied, thereby improving sensitivity and enabling more accurate detection of acceleration Ax. From another perspective, for example, if the capacitance remains the same as in the first embodiment, the electrode fingers 412, 422, 611, and 621 can be shortened accordingly, making each electrode finger 412, 422, 611, and 621 less susceptible to damage.

[0154] Furthermore, the joint 511 where the movable portion support portion 51 joins the base portion 2 is located at the center of the movable portion support portion 51 in the X-axis direction. Furthermore, the joint 511 is provided at two locations in the center of the movable portion support portion 51, sandwiching its center of gravity. This arrangement allows the joint 413a between the first fixed electrode portion 41 and the base portion 2, and the joint 423a between the second fixed electrode portion 42 and the base portion 2, to be positioned near the joint 511. Consequently, the offset difference in the Z-axis direction between the movable portion 52 and the fixed electrode portion 4 can be more effectively reduced when the base portion 2 warps or flexes due to heat, residual stress, or the like.

[0155] In addition, the configuration of the joint 511 is not particularly limited. Figure 6As shown, it can be provided at a location overlapping the center of gravity of the movable portion support portion 51. Furthermore, the portion of the movable portion support portion 51 sandwiched between the two joint portions 511 does not necessarily need to be integral and can be separated. Alternatively, the first X-axis extension portion 523 and the second X-axis extension portion 525 can be connected in this separated gap.

[0156] Even according to such a fourth embodiment, the same effects as those of the above-mentioned first embodiment can be exhibited.

[0157] Fifth embodiment

[0158] Next, a physical quantity sensor according to a fifth embodiment of the present invention will be described.

[0159] Figure 7 1 is a top view showing a physical quantity sensor according to a fifth embodiment of the present invention. Figure 7 In the figure, the base and the cover are omitted, and only the element part is shown.

[0160] The physical quantity sensor 1 of the present invention is the same as the physical quantity sensor 1 of the third embodiment except that the configuration of the element portion 3 is different.

[0161] In the following description, the differences between the physical quantity sensor 1 of the fifth embodiment and the third embodiment are mainly described, and descriptions of the same matters will be omitted. Figure 7 In the present invention, the same components as those in the first embodiment are denoted by the same reference numerals.

[0162] like Figure 7 As shown, the first fixed electrode portion 41 has a first connecting portion 414 connecting the first main body support portion 413 and the first main body 411. Furthermore, the first connecting portion 414 is located on the side opposite to the movable portion support portion 51 relative to the first main body support portion 413. Furthermore, the first connecting portion 414 extends in the Y-axis direction and is connected to the central portion of the first main body 411 in the X-axis direction. In addition, in the first main body 411, first fixed electrode fingers 412 are respectively provided at one end side (positive side in the X-axis direction) and the other end side (negative side in the X-axis direction). That is, the first fixed electrode fingers 412 are provided over substantially the entire area in the extension direction except for the connection portion with the first connecting portion 414.

[0163] Similarly, the second fixed electrode portion 42 has a second connecting portion 424 connecting the second main body support portion 423 and the second main body 421. Furthermore, the second connecting portion 424 is located on the side opposite to the movable portion support portion 51 relative to the second main body support portion 423. Furthermore, the second connecting portion 424 extends in the Y-axis direction and is connected to the central portion of the second main body 421 in the X-axis direction. In addition, in the second main body 421, second fixed electrode fingers 422 are respectively provided on one end side (positive side in the X-axis direction) and the other end side (negative side in the X-axis direction). In other words, the second fixed electrode fingers 422 are provided over substantially the entire area in the extension direction except for the connection portion with the second connecting portion 424.

[0164] With this configuration, the inclusion of the first connecting portion 414 and the second connecting portion 424 allows the joint portion 413a of the first trunk supporting portion 413 and the joint portion 423a of the second trunk supporting portion 423 to be positioned closer to the joint portion 511 of the movable portion supporting portion 51. Consequently, the offset difference in the Z-axis direction between the movable portion 52 and the fixed electrode portion 4 can be more effectively reduced when the base portion 2 warps or flexes due to heat, residual stress, or the like. Specifically, the offset difference in the Z-axis direction between the first movable electrode finger 611 and the first fixed electrode finger 412, as well as the offset difference in the Z-axis direction between the second movable electrode finger 621 and the second fixed electrode finger 422, can be more effectively reduced. Consequently, more accurate detection of physical quantities is possible.

[0165] Furthermore, for example, compared to the second embodiment, the number of first and second fixed electrode fingers 412, 422, and first and second movable electrode fingers 611, 621 can be increased. Therefore, for example, if the electrode finger lengths remain the same as in the first embodiment, the capacitance between the first movable electrode finger 611 and the first fixed electrode finger 412, and the capacitance between the second movable electrode finger 621 and the second fixed electrode finger 422 can be increased, thereby improving sensitivity and enabling more accurate detection of acceleration Ax. From another perspective, for example, if the capacitance remains the same as in the first embodiment, the electrode fingers 412, 422, 611, and 621 can be shortened accordingly, making each electrode finger 412, 422, 611, and 621 less susceptible to damage.

[0166] Furthermore, the joint 511 where the movable portion support portion 51 joins the base portion 2 is located at the center of the movable portion support portion 51 in the X-axis direction. Furthermore, the joint 511 is provided at two locations (arranged in the X-axis direction) in the center of the movable portion support portion 51, sandwiching its center of gravity. This arrangement allows the joint 413a between the first fixed electrode portion 41 and the base portion 2, and the joint 423a between the second fixed electrode portion 42 and the base portion 2, to be positioned near the joint 511. Consequently, the offset difference in the Z-axis direction between the movable portion 52 and the fixed electrode portion 4 can be more effectively reduced when the base portion 2 warps or flexes due to heat, residual stress, or the like.

[0167] Furthermore, the portion of the movable portion supporting portion 51 sandwiched between the two joint portions 511 does not need to be integrated but may be separated. Furthermore, the first X-axis extending portion 523 and the second X-axis extending portion may be connected in the separated gap.

[0168] Even according to such a fifth embodiment, the same effects as those of the above-mentioned first embodiment can be exhibited.

[0169] Sixth embodiment

[0170] Next, a physical quantity sensor according to a sixth embodiment of the present invention will be described.

[0171] Figure 8 1 is a top view showing a physical quantity sensor according to a sixth embodiment of the present invention. Figure 8 In the figure, the base and the cover are omitted, and only the element part is shown.

[0172] The physical quantity sensor 1 of the present invention is the same as the physical quantity sensor 1 of the second embodiment described above except that the configuration of the element portion 3 is different.

[0173] In the following description, the differences between the physical quantity sensor 1 of the sixth embodiment and the second embodiment are mainly described, and descriptions of the same matters will be omitted. Figure 8 In the present invention, the same components as those in the first embodiment are denoted by the same reference numerals.

[0174] like Figure 8As shown, the first fixed electrode portion 41 has a pair of first trunk portions 411 extending in the X-axis direction. Furthermore, the pair of first trunk portions 411 are located on opposite sides of the first trunk portion support portion 413 in the X-axis direction. That is, one first trunk portion 411 extends from the first trunk portion support portion 413 toward the positive side of the X-axis direction, while the other first trunk portion 411 extends from the first trunk portion support portion 413 toward the negative side of the X-axis direction. Furthermore, each first trunk portion 411 is provided with a plurality of first fixed electrode fingers 412, and the movable portion 52 is provided with a plurality of first movable electrode fingers 611 opposite each first fixed electrode finger 412.

[0175] Similarly, the second fixed electrode portion 42 includes a pair of second trunk portions 421 extending in the X-axis direction. Furthermore, the pair of second trunk portions 421 are located on opposite sides of the second trunk portion support portion 423 in the X-axis direction. Specifically, one second trunk portion 421 extends from the second trunk portion support portion 423 toward the positive side in the X-axis direction, while the other second trunk portion 421 extends from the second trunk portion support portion 423 toward the negative side in the X-axis direction. Furthermore, each second trunk portion 421 is provided with a plurality of second fixed electrode fingers 422, and the movable portion 52 is provided with a plurality of second movable electrode fingers 621 that oppose each second fixed electrode finger 422.

[0176] With this configuration, for example, the number of first and second fixed electrode fingers 412, 422, and first and second movable electrode fingers 611, 621 can be increased compared to the second embodiment. Therefore, for example, if the electrode finger lengths remain the same as in the first embodiment, the capacitance between the first movable electrode finger 611 and the first fixed electrode finger 412, as well as the capacitance between the second movable electrode finger 621 and the second fixed electrode finger 422, can be increased. This also increases the change in capacitance when acceleration Ax is applied, thereby improving sensitivity and enabling more accurate detection of acceleration Ax. From another perspective, for example, if the capacitance remains the same as in the first embodiment, the electrode fingers 412, 422, 611, and 621 can be shortened accordingly, making each electrode finger 412, 422, 611, and 621 less susceptible to damage.

[0177] In addition, the joint 511 where the movable portion support portion 51 joins the base portion 2 is located in the center of the movable portion support portion 51 in the X-axis direction. Furthermore, the joint 511 is provided at two locations in the center of the movable portion support portion 51 (two locations aligned in the Y-axis direction) so that its center of gravity is sandwiched between the two locations. This configuration allows the joint 413a between the first fixed electrode portion 41 and the base portion 2, and the joint 423a between the second fixed electrode portion 42 and the base portion 2 to be provided near the joint 511. Therefore, the offset difference in the Z-axis direction between the movable portion 52 and the fixed electrode portion 4 can be more effectively reduced when the base portion 2 warps or flexes due to heat, residual stress, or the like.

[0178] Even according to the sixth embodiment, the same effects as those of the first embodiment can be achieved.

[0179] Seventh embodiment

[0180] Next, a physical quantity sensor according to a seventh embodiment of the present invention will be described.

[0181] Figure 9 It is a plan view showing a physical quantity sensor according to a seventh embodiment of the present invention. Figure 10 yes Figure 9 In addition, for the convenience of explanation, Figure 9 In the figure, the base and the cover are omitted, and only the element part is shown.

[0182] The physical quantity sensor 1 of the present invention is the same as the physical quantity sensor 1 of the first embodiment except that the configuration of the element portion 3 is different.

[0183] In the following description, the differences between the physical quantity sensor 1 of the seventh embodiment and the first embodiment are mainly described, and descriptions of the same matters will be omitted. Figure 9 and Figure 10 In the present invention, the same components as those in the first embodiment are denoted by the same reference numerals.

[0184] like Figure 9 As shown, a pair of fixed electrode portions 4 are arranged in the X-axis direction. Furthermore, the pair of fixed electrode portions 4 are line-symmetrical with respect to a line parallel to the Y-axis. Furthermore, each fixed electrode portion 4 includes a trunk support portion 43 integrally formed by a first trunk support portion 413 and a second trunk support portion 423. Furthermore, when viewed from above in the Z-axis direction, each trunk support portion 43 is located on the central axis L. With this configuration, the first trunk support portion 413 and the second trunk support portion 423 are integrated, thereby enabling miniaturization of the physical quantity sensor 1.

[0185] Furthermore, in the fixed electrode section 4 located on the positive side in the X-axis direction, the first trunk portion 411 and the second trunk portion 421 are located on the positive side in the X-axis direction relative to the trunk support portion 43. In the fixed electrode section 4 located on the negative side in the X-axis direction, the first trunk portion 411 and the second trunk portion 421 are located on the negative side in the X-axis direction relative to the trunk support portion 43. Therefore, a pair of trunk support portions 43 can be provided adjacent to each other.

[0186] In addition, if Figure 10 As shown, one trunk support portion 43 has a joint portion 431 with the fixing frame portion 22 and is electrically connected to the wiring 71 . The other trunk support portion 43 has a joint portion 431 with the fixing frame portion 23 and is electrically connected to the wiring 72 .

[0187] Here, in the fixed electrode section 4 located on the positive side in the X-axis direction, each first movable electrode finger 611 and second movable electrode finger 621 is located on the positive side in the X-axis direction relative to the corresponding first fixed electrode finger 412 and second fixed electrode finger 422. Conversely, in the fixed electrode section 4 located on the negative side in the X-axis direction, each first movable electrode finger 611 and second movable electrode finger 621 is located on the negative side in the X-axis direction relative to the corresponding first fixed electrode finger 412 and second fixed electrode finger 422. This allows differential calculation to be performed on the first detection signal obtained between one fixed electrode section 4 and the movable electrode section 6 and the second detection signal obtained between the other fixed electrode section 4 and the movable electrode section 6, thereby eliminating noise and more accurately detecting acceleration Ax.

[0188] Furthermore, the movable portion support portion 51 is located between the two trunk support portions 43 and extends in the Y-axis direction. Furthermore, in the movable portion support portion 51, the spring portion 53 is connected to the end portion on the positive side in the Y-axis direction, and the spring portion 54 is connected to the end portion on the negative side in the Y-axis direction. With this configuration, the joint portion 511 can be positioned near the two trunk support portions 43. However, the configuration and arrangement of the movable portion support portion 51 are not particularly limited.

[0189] Even according to the seventh embodiment, the same effects as those of the first embodiment can be achieved.

[0190] Eighth embodiment

[0191] Next, a physical quantity sensor according to an eighth embodiment of the present invention will be described.

[0192] Figure 11 FIG is a top view showing a physical quantity sensor according to an eighth embodiment of the present invention. Figure 11 In the figure, the base and the cover are omitted and only the element portion is shown.

[0193] The physical quantity sensor 1 of the present invention is the same as the physical quantity sensor 1 of the seventh embodiment except that the configuration of the element portion 3 is different.

[0194] In the following description, the differences between the physical quantity sensor 1 of the eighth embodiment and the seventh embodiment are mainly described, and descriptions of the same matters will be omitted. Figure 11 In the embodiment, the same components as those in the seventh embodiment are denoted by the same reference numerals.

[0195] like Figure 11 As shown, the movable portion support portion 51 is provided outside the movable portion 52. Furthermore, the movable portion support portion 51 is frame-shaped and is provided so as to surround the movable portion 52. Furthermore, the movable portion support portion 51 includes a frame-shaped base portion 512 and a pair of protrusions 513 and 514 that protrude inward from the base portion 512. Furthermore, the protrusions 513 and 514 are symmetrically arranged with respect to the central axis L and each protrudes toward the center of the element portion 3. Furthermore, the front ends (center-side ends) of the protrusions 513 and 514 are provided with engagement portions 511 that engage with the fixed frame portion 24.

[0196] Thus, since each joint portion 511 is arranged close to the central portion of the element portion 3, each joint portion 511 can be arranged near the joint portion 413a of the first trunk support portion 413 and the joint portion 423a of the second trunk support portion 423. Therefore, the offset difference in the Z-axis direction between the movable portion 52 and the fixed electrode portion 4 when the base 2 is warped or bent due to heat, residual stress, etc. can be more effectively reduced. Therefore, the physical quantity can be detected more accurately. In particular, in the present embodiment, since the line segment connecting the pair of joints 511 and the line segment connecting the joints 413a and 423a intersect, the joints 511, 413a, and 423a can be arranged to be closer to each other, and the above-mentioned effect becomes more obvious.

[0197] Furthermore, spring portions 53 and 54 are located between the movable portion 52 and the movable portion support portion 51, respectively. The spring portion 53 connects the positive end of the movable portion 52 in the X-axis direction to the positive end of the movable portion support portion 51 in the X-axis direction, while the spring portion 54 connects the negative end of the movable portion support portion 51 in the X-axis direction to the negative end of the movable portion support portion 51 in the X-axis direction. This allows the movable portion 52 to be supported from both sides in the X-axis direction, stabilizing its posture and movement. Consequently, it is possible to reduce unnecessary vibration and detect acceleration Ax with higher accuracy.

[0198] Even according to such an eighth embodiment, the same effects as those of the above-mentioned first embodiment can be exhibited.

[0199] Ninth embodiment

[0200] Next, a physical quantity sensor according to a ninth embodiment of the present invention will be described.

[0201] Figure 12 1 is a top view showing a physical quantity sensor according to a ninth embodiment of the present invention. Figure 12 In the figure, the base and the cover are omitted and only the element portion is shown.

[0202] The physical quantity sensor 1 of the present invention is the same as the physical quantity sensor 1 of the seventh embodiment except that the configuration of the element portion 3 is different.

[0203] In the following description, the differences between the physical quantity sensor 1 of the ninth embodiment and the seventh embodiment are mainly described, and descriptions of the same matters will be omitted. Figure 12 In the embodiment, the same components as those in the seventh embodiment are denoted by the same reference numerals.

[0204] like Figure 12 As shown, a pair of movable portion support portions 51 are provided inside the movable portion 52. Furthermore, one movable portion support portion 51 is located on the positive side in the Y-axis direction relative to the central axis L, and the other movable portion support portion 51 is located on the negative side in the Y-axis direction relative to the central axis L. Furthermore, the pair of movable portion support portions 51 are provided symmetrically with respect to the central axis L.

[0205] The movable portion support portion 51 is formed in a T-shape and includes a base portion 515 extending in the X-axis direction and an extension portion 516 extending in the Y-axis direction from the center of the base portion 515 toward the center of the element portion 3. Furthermore, a joint portion 511 for joining with the fixed frame portion 24 is provided at the front end portion (the end portion on the center side) of each extension portion 516.

[0206] Thus, since each joint portion 511 is arranged close to the central portion of the element portion 3, each joint portion 511 can be set near the joint portion 413a of the first trunk support portion 413 and the joint portion 423a of the second trunk support portion 423. Therefore, the offset difference in the Z-axis direction between the movable portion 52 and the fixed electrode portion 4 when the base 2 is warped or bent due to heat, residual stress, etc. can be more effectively reduced. Therefore, the physical quantity can be detected more accurately. In particular, in the present embodiment, since the line segment connecting the pair of joints 511 and the line segment connecting the joints 413a and 423a intersect, the joints 511, 413a, and 423a can be arranged to be closer to each other, and the above-mentioned effect becomes more obvious.

[0207] Furthermore, a pair of spring portions 53 are provided. One spring portion 53 connects the end portion of the movable portion 52 on the positive side in the X-axis direction to the end portion of the movable portion support portion 51 on the positive side in the X-axis direction (the end portion of the base portion 515 on the positive side in the X-axis direction), and the other spring portion 53 connects the end portion of the movable portion 52 on the positive side in the X-axis direction to the end portion of the other movable portion support portion 51 on the positive side in the X-axis direction (the end portion of the base portion 515 on the positive side in the X-axis direction).

[0208] Similarly, a pair of spring portions 54 are provided. One spring portion 54 connects the end portion of the movable portion 52 on the negative side in the X-axis direction to the end portion of the movable portion support portion 51 on the negative side in the X-axis direction (the end portion of the base portion 515 on the negative side in the X-axis direction), and the other spring portion 54 connects the end portion of the movable portion 52 on the negative side in the X-axis direction to the end portion of the other movable portion support portion 51 on the negative side in the X-axis direction (the end portion of the base portion 515 on the negative side in the X-axis direction).

[0209] Thus, the movable portion 52 can be supported on both sides in the X-axis direction by the spring portions 53 and 54, stabilizing the posture and movement of the movable portion 52. Therefore, unnecessary vibration can be reduced, and the acceleration Ax can be detected with higher accuracy.

[0210] According to this ninth embodiment, the same effects as those of the first embodiment can be achieved. In particular, in this embodiment, since the movable portion 52 is frame-shaped and located at the outermost side, the mass of the movable portion 52 can be increased, for example, compared to the eighth embodiment. This further improves sensitivity, resulting in a highly sensitive physical quantity sensor 1.

[0211] Tenth embodiment

[0212] Next, a physical quantity sensor according to a tenth embodiment of the present invention will be described.

[0213] Figure 13 1 is a top view showing a physical quantity sensor according to a tenth embodiment of the present invention. Figure 13 In the figure, the base and the cover are omitted and only the element portion is shown.

[0214] The physical quantity sensor 1 of the present invention is the same as the physical quantity sensor 1 of the first embodiment except that the configuration of the element portion 3 is different.

[0215] In the following description, the differences between the physical quantity sensor 1 of the tenth embodiment and the first embodiment are mainly described, and descriptions of the same matters will be omitted. Figure 13 In the present invention, the same components as those in the first embodiment are denoted by the same reference numerals.

[0216] like Figure 13 As shown, a pair of fixed electrode portions 4 are arranged in the X-axis direction. Furthermore, the pair of fixed electrode portions 4 are line-symmetrical with respect to a line parallel to the Y-axis. Furthermore, each fixed electrode portion 4 includes a trunk support portion 43 integrally formed by a first trunk support portion 413 and a second trunk support portion 423. Furthermore, when viewed from above in the Z-axis direction, each trunk support portion 43 is located on the central axis L. With this configuration, since the first trunk support portion 413 and the second trunk support portion 423 are integrated, miniaturization of the physical quantity sensor 1 can be achieved.

[0217] As in the seventh embodiment, one trunk support portion 43 has a joint portion 431 for joining with the mounting portion 22 and electrically connected to the wiring 71. The other trunk support portion 43 has a joint portion 431 for joining with the mounting portion 23 and electrically connected to the wiring 72.

[0218] Each first fixed electrode portion 41 has a first connecting portion 414 connecting the main support portion 43 and the first trunk portion 411. The first trunk portion 411 extends in the X-axis direction. The first connecting portion 414 extends in the Y-axis direction and is connected to one end of the first trunk portion 411.

[0219] Each second fixed electrode portion 42 has a second connecting portion 424 connecting the main support portion 43 to the second trunk portion 421. The second trunk portion 421 extends in the X-axis direction. The second connecting portion 424 extends in the Y-axis direction and is connected to one end of the second trunk portion 421.

[0220] Furthermore, in the fixed electrode section 4 located on the positive side in the X-axis direction, the first trunk section 411 and the second trunk section 412 are located on the positive side in the X-axis direction relative to the trunk section support section 43, and in the fixed electrode section 4 located on the negative side in the X-axis direction, the first trunk section 411 and the second trunk section 421 are located on the negative side in the X-axis direction relative to the trunk section support section 43. Therefore, the pair of trunk sections 43 can be disposed close to each other.

[0221] Here, in the fixed electrode section 4 located on the positive side in the X-axis direction, each first movable electrode finger 611 and second movable electrode finger 621 is located on the positive side in the X-axis direction relative to the corresponding first fixed electrode finger 412 and second fixed electrode finger 422. Conversely, in the fixed electrode section 4 located on the negative side in the X-axis direction, each first movable electrode finger 611 and second movable electrode finger 621 is located on the negative side in the X-axis direction relative to the corresponding first fixed electrode finger 412 and second fixed electrode finger 422. This allows differential calculation to be performed on the first detection signal obtained between one fixed electrode section 4 and the movable electrode section 6 and the second detection signal obtained between the other fixed electrode section 4 and the movable electrode section 6, thereby eliminating noise and more accurately detecting acceleration Ax.

[0222] Furthermore, the movable portion support portion 51 is located between the two trunk support portions 43 and extends in the Y-axis direction. Furthermore, in the movable portion support portion 51, the spring portion 53 is connected to the end portion on the positive side in the Y-axis direction, and the spring portion 54 is connected to the end portion on the negative side in the Y-axis direction. With this configuration, the joint portion 511 can be positioned near the two trunk support portions 43. However, the configuration and arrangement of the movable portion support portion 51 are not particularly limited.

[0223] Even according to the tenth embodiment, the same effects as those of the first embodiment can be achieved.

[0224] Eleventh embodiment

[0225] Next, a physical quantity sensor according to an eleventh embodiment of the present invention will be described.

[0226] Figure 14 1 is a top view showing a physical quantity sensor according to an eleventh embodiment of the present invention. Figure 14 In the figure, the base and the cover are omitted and only the element portion is shown.

[0227] The physical quantity sensor 1 of the present invention is the same as the physical quantity sensor 1 of the tenth embodiment described above, except that the configuration of the element portion 3 is different.

[0228] In the following description, the differences between the physical quantity sensor 1 of the eleventh embodiment and the tenth embodiment are mainly described, and the description of the same matters will be omitted. Figure 14 In the embodiment, the same components as those in the tenth embodiment are denoted by the same reference numerals.

[0229] like Figure 14As shown, the movable portion support portion 51 is provided outside the movable portion 52. Furthermore, the movable portion support portion 51 is frame-shaped and is provided so as to surround the movable portion 52. Furthermore, the movable portion support portion 51 includes a frame-shaped base portion 512 and a pair of protrusions 513 and 514 that protrude inward from the base portion 512. Furthermore, the protrusions 513 and 514 are symmetrically arranged with respect to the central axis L and each protrudes toward the center of the element portion 3. Furthermore, the front ends (center-side ends) of the protrusions 513 and 514 are provided with engagement portions 511 that engage with the fixed frame portion 24.

[0230] Thus, since each joint portion 511 is arranged in the central portion of the element portion 3, each joint portion 511 can be arranged near the joint portion 413a of the first trunk support portion 413 and the joint portion 423a of the second trunk support portion 423. Therefore, the offset difference in the Z-axis direction between the movable portion 52 and the fixed electrode portion 4 when the base 2 is warped or bent due to heat, residual stress, etc. can be more effectively reduced. Therefore, the physical quantity can be detected more accurately. In particular, in the present embodiment, since the line segment connecting the pair of joints 511 and the line segment connecting the joints 413a and 423a intersect, the joints 511, 413a, and 423a can be arranged close to each other, and the above-mentioned effect becomes more obvious.

[0231] Furthermore, spring portions 53 and 54 are located between the movable portion 52 and the movable portion support portion 51, respectively. The spring portion 53 connects the positive end of the movable portion 52 in the X-axis direction to the positive end of the movable portion support portion 51 in the X-axis direction, while the spring portion 54 connects the negative end of the movable portion 52 in the X-axis direction to the negative end of the movable portion support portion 51 in the X-axis direction. This allows the movable portion 52 to be supported from both sides in the X-axis direction, stabilizing its posture and movement. Consequently, it is possible to reduce unnecessary vibration and detect acceleration Ax with higher accuracy.

[0232] Even according to such an eleventh embodiment, the same effects as those of the above-mentioned first embodiment can be exhibited.

[0233] Twelfth embodiment

[0234] Next, a physical quantity sensor according to a twelfth embodiment of the present invention will be described.

[0235] Figure 15 1 is a top view showing a physical quantity sensor according to a twelfth embodiment of the present invention. Figure 15 In the figure, the base and the cover are omitted and only the element portion is shown.

[0236] The physical quantity sensor 1 of the present invention is the same as the physical quantity sensor 1 of the tenth embodiment described above, except that the configuration of the element portion 3 is different.

[0237] In the following description, the differences between the physical quantity sensor 1 of the twelfth embodiment and the tenth embodiment are mainly described, and the description of the same matters will be omitted. Figure 15 In the embodiment, the same components as those in the tenth embodiment are denoted by the same reference numerals.

[0238] like Figure 15 As shown, a pair of movable portion support portions 51 are provided inside the movable portion 52. One movable portion support portion 51 is located on the positive side in the Y-axis direction relative to the central axis L, and the other movable portion support portion 51 is located on the negative side in the Y-axis direction relative to the central axis L. Furthermore, the pair of movable portion support portions 51 are provided symmetrically with respect to the central axis L.

[0239] The movable portion support portion 51 is formed in a T-shape and includes a base portion 515 extending in the X-axis direction and an extension portion 516 extending from the center of the base portion 515 toward the center of the element portion 3 in the Y-axis direction. Furthermore, a joint portion 511 for joining with the fixed frame portion 24 is provided at the front end (the end on the center side) of each extension portion 516.

[0240] Thus, since each joint portion 511 is arranged close to the central portion of the element portion 3, each joint portion 511 can be arranged near the joint portion 413a of the first trunk support portion 413 and the joint portion 423a of the second trunk support portion 423. Therefore, the offset difference in the Z-axis direction between the movable portion 52 and the fixed electrode portion 4 when the base 2 is warped or bent due to heat, residual stress, etc. can be more effectively reduced. Therefore, the physical quantity can be detected more accurately. In particular, in the present embodiment, since the line segment connecting the pair of joints 511 and the line segment connecting the joints 413a and 423a intersect, the joints 511, 413a, and 423a can be arranged close to each other, and the above-mentioned effect becomes more obvious.

[0241] Furthermore, a pair of spring portions 53 are provided. One spring portion 53 connects the end portion on the positive side in the X-axis direction of the movable portion 52 to the end portion on the positive side in the X-axis direction of one movable portion support portion 51 (the end portion on the positive side in the X-axis direction of the base portion 515), and the other spring portion 54 connects the end portion on the positive side in the X-axis direction of the movable portion 52 to the end portion on the negative side in the X-axis direction of the other movable portion support portion 51 (the end portion on the negative side in the X-axis direction of the base portion 515).

[0242] Similarly, a pair of spring portions 54 are provided. One spring portion 54 connects the end portion of the movable portion 52 on the negative side in the X-axis direction to the end portion of one movable portion support portion 51 on the negative side in the X-axis direction (the end portion of the base portion 515 on the negative side in the X-axis direction), and the other spring portion 54 connects the end portion of the movable portion 52 on the negative side in the X-axis direction to the end portion of the other movable portion support portion 51 on the negative side in the X-axis direction (the end portion of the base portion 515 on the negative side in the X-axis direction).

[0243] Thus, the movable portion 52 can be supported on both sides in the X-axis direction by the spring portions 53 and 54, thereby stabilizing the posture and movement of the movable portion 52. Consequently, unnecessary vibration can be reduced, and the acceleration Ax can be detected with higher accuracy.

[0244] According to this twelfth embodiment, the same effects as those of the first embodiment can be achieved. In particular, in this embodiment, since the movable portion 52 is frame-shaped and located at the outermost side, the mass of the movable portion 52 can be increased compared to the eleventh embodiment. Consequently, the sensitivity can be further improved, resulting in a highly sensitive physical quantity sensor 1.

[0245] Thirteenth embodiment

[0246] Next, a physical quantity sensor according to a thirteenth embodiment of the present invention will be described.

[0247] Figure 16 13 is a top view of a physical quantity sensor according to a thirteenth embodiment of the present invention. Figure 16 In the figure, the base and the cover are omitted and only the element portion is shown.

[0248] The physical quantity sensor 1 of the present invention is the same as the physical quantity sensor 1 of the tenth embodiment described above, except that the configuration of the element portion 3 is different.

[0249] In the following description, the differences between the physical quantity sensor 1 of the thirteenth embodiment and the first embodiment are mainly described, and descriptions of the same matters will be omitted. Figure 16 In the present invention, the same components as those in the first embodiment are denoted by the same reference numerals.

[0250] like Figure 16As shown, the first fixed electrode portion 41 has a pair of first main stems 411 arranged in the Y-axis direction. In other words, the first main stem 411 has a slit along its length and is divided into two parallel parts (branched into two). In addition, a plurality of first fixed electrode fingers 412 (412') extend from the first main stem 411 located on the positive side of the Y-axis direction to the positive side of the Y-axis direction, and a plurality of first fixed electrode fingers 412 (412") extend from the first main stem 411 located on the negative side of the Y-axis direction to the negative side of the Y-axis direction.

[0251] Similarly, the second fixed electrode portion 42 has a pair of second main stems 421 arranged in the Y-axis direction. In other words, the second main stem 421 has a slit along its length and is divided into two parallel parts (branched into two). In addition, a plurality of second fixed electrode fingers 422 (422') extend from the second main stem 421 located on the positive side of the Y-axis direction toward the positive side of the Y-axis direction, and a plurality of second fixed electrode fingers 422 (422") extend from the second main stem 421 located on the negative side of the Y-axis direction toward the negative side of the Y-axis direction.

[0252] Even with the thirteenth embodiment, the same effects as those of the first embodiment can be achieved. In particular, by providing a plurality of first trunk portions 411 and second trunk portions 421, there is an advantage in that the design freedom of the shapes (pattern shapes) of the first and second fixed electrode portions 41 and 42 is increased.

[0253] Fourteenth embodiment

[0254] Next, a physical quantity sensor device according to a fourteenth embodiment of the present invention will be described.

[0255] Figure 17 It is a cross-sectional view showing a physical quantity sensor device according to a fourteenth embodiment of the present invention.

[0256] like Figure 17 As shown, a physical quantity sensor device 1000 includes a base substrate 1010, a physical quantity sensor 1 provided on the base substrate 1010, a circuit element 1020 (IC) provided on the physical quantity sensor 1, a bonding wire BW1 electrically connecting the physical quantity sensor 1 and the circuit element 1020, a bonding wire BW2 electrically connecting the base substrate 1010 and the circuit element 1020, and a molding portion 1030 for molding the physical quantity sensor 1 and the circuit element 1020. Here, any of the first to thirteenth embodiments described above can be used as the physical quantity sensor 1.

[0257] The base substrate 1010 is a substrate supporting the physical quantity sensor 1 and is, for example, an interposer substrate. Multiple connection terminals 1011 are arranged on the top surface of the base substrate 1010, and multiple mounting terminals 1012 are arranged on the bottom surface. Furthermore, internal wiring (not shown) is arranged within the base substrate 1010, and each connection terminal 1011 is electrically connected to a corresponding mounting terminal 1012 via this internal wiring. The base substrate 1010 is not particularly limited; for example, a silicon substrate, a ceramic substrate, a resin substrate, a glass substrate, or a glass epoxy substrate can be used.

[0258] The physical quantity sensor 1 is disposed on the base substrate 1010 with the base portion 2 facing downward (toward the base substrate 1010 ). The physical quantity sensor 1 is bonded to the base substrate 1010 by a bonding member.

[0259] Furthermore, the circuit element 1020 is disposed on the physical quantity sensor 1. Furthermore, the circuit element 1020 is bonded to the cover 8 of the physical quantity sensor 1 via a bonding member. Furthermore, the circuit element 1020 is electrically connected to the wirings 71, 72, and 73 of the physical quantity sensor 1 via bonding wires BW1, and is electrically connected to the connection terminals 1011 of the base substrate 1010 via bonding wires BW2. This circuit element 1020 includes, as necessary, a drive circuit for driving the physical quantity sensor 1, a detection circuit for detecting acceleration based on an output signal from the physical quantity sensor 1, and an output circuit for converting the signal from the detection circuit into a predetermined signal and outputting the signal.

[0260] The mold portion 1030 molds the physical quantity sensor 1 and the circuit element 1020. This protects the physical quantity sensor 1 and the circuit element 1020 from moisture, dust, impact, and the like. The mold portion 1030 is not particularly limited; for example, a thermosetting epoxy resin can be used, and the mold can be formed by transfer molding.

[0261] The physical quantity sensor device 1000 described above includes the physical quantity sensor 1. Therefore, the effects of the physical quantity sensor 1 can be obtained, and a highly reliable physical quantity sensor device 1000 can be obtained.

[0262] In addition, the physical quantity sensor device 1000 is not limited to the above-described configuration. For example, the physical quantity sensor 1 may be housed in a ceramic package.

[0263] Fifteenth embodiment

[0264] Next, an electronic device according to a fifteenth embodiment of the present invention will be described.

[0265] Figure 18 It is a perspective view showing an electronic device according to a fifteenth embodiment of the present invention.

[0266] Figure 18 The illustrated mobile (or notebook) personal computer 1100 is a device that utilizes an electronic device equipped with the physical quantity sensor of the present invention. In the figure, personal computer 1100 comprises a main body 1104 having a keyboard 1102 and a display unit 1106 having a display unit 1108. Display unit 1106 is rotatably supported on main body 1104 via a hinge structure. Personal computer 1100 incorporates a physical quantity sensor 1 that functions as an acceleration sensor. Any of the first to thirteenth embodiments described above can be used as physical quantity sensor 1.

[0267] Such a personal computer 1100 (electronic device) includes the physical quantity sensor 1. Therefore, the effects of the physical quantity sensor 1 described above can be obtained, and high reliability can be exhibited.

[0268] Sixteenth embodiment

[0269] Next, an electronic device according to a sixteenth embodiment of the present invention will be described.

[0270] Figure 19 It is a perspective view showing an electronic device according to a sixteenth embodiment of the present invention.

[0271] Figure 19 The illustrated portable phone 1200 (including a PHS) is a device that utilizes an electronic device equipped with the physical quantity sensor of the present invention. In the figure, portable phone 1200 includes an antenna (not shown), multiple operation buttons 1202, an earpiece 1204, and a mouthpiece 1206. A display unit 1208 is positioned between the operation buttons 1202 and the earpiece 1204. This portable phone 1200 incorporates a physical quantity sensor 1 that functions as an acceleration sensor. Any of the first to thirteenth embodiments described above can be used as physical quantity sensor 1.

[0272] Such a mobile phone 1200 (electronic device) includes the physical quantity sensor 1. Therefore, the effects of the physical quantity sensor 1 described above can be obtained, and high reliability can be exhibited.

[0273] Seventeenth embodiment

[0274] Next, an electronic device according to a seventeenth embodiment of the present invention will be described.

[0275] Figure 20 It is a perspective view showing an electronic device according to a seventeenth embodiment of the present invention.

[0276] Figure 20The digital still camera 1300 shown is a device that utilizes an electronic device equipped with the physical quantity sensor of the present invention. In the figure, a display unit 1310 is provided on the back of a housing (body) 1302 and is configured to display images based on imaging signals from a CCD. Display unit 1310 functions as a viewfinder that displays an electronic image of a subject. Furthermore, a light receiving unit 1304, including an optical lens (imaging optical system) and a CCD, is provided on the front side (the back side in the figure) of housing 1302. When the photographer confirms the subject image displayed on display unit 1310 and presses shutter button 1306, the imaging signal from the CCD is forwarded and stored in memory 1308. This digital still camera 1300 incorporates a physical quantity sensor 1 that functions as an acceleration sensor. Any of the first to thirteenth embodiments described above can be used as physical quantity sensor 1.

[0277] Such a digital still camera 1300 (electronic device) includes the physical quantity sensor 1. Therefore, the effects of the physical quantity sensor 1 described above can be obtained, and high reliability can be exhibited.

[0278] In addition, in addition to the personal computers and portable telephones of the above-mentioned methods and the digital still camera of this embodiment, the electronic equipment of the present invention is also suitable for smartphones, tablet terminals, clocks (including smart watches), inkjet ejection devices (for example, inkjet printers), portable personal computers, televisions, wearable terminals such as HMDs (head-mounted displays), cameras, video tape recorders, car navigation systems, pagers, electronic notepads (also including communication functions), electronic dictionaries, calculators, electronic game devices, word processors, workstations, videophones, TV monitors for crime prevention, electronic binoculars, POS terminals, medical equipment (for example, electronic thermometers, blood pressure monitors, blood glucose meters, electrocardiogram measuring devices, ultrasonic diagnostic devices, electronic endoscopes), fish finders, various measuring instruments, mobile terminal base station equipment, instruments (for example, instruments for vehicles, aircraft and ships), flight simulators, network servers, etc.

[0279] Eighteenth embodiment

[0280] Next, a moving object according to an eighteenth embodiment of the present invention will be described.

[0281] Figure 21 It is a perspective view showing a moving body according to an eighteenth embodiment of the present invention.

[0282] Figure 21The illustrated automobile 1500 is a mobile vehicle that utilizes a physical quantity sensor according to the present invention. In this figure, automobile 1500 incorporates a physical quantity sensor 1 serving as an acceleration sensor. Physical quantity sensor 1 detects the posture of vehicle body 1501. The detection signal from physical quantity sensor 1 is supplied to vehicle posture control device 1502. Vehicle posture control device 1502 detects the posture of vehicle body 1501 based on the signal and, based on the detection result, controls the stiffness of the suspension and the braking of each wheel 1503. Any of the first to thirteenth embodiments described above can be used as physical quantity sensor 1.

[0283] Such a car 1500 (moving object) includes the physical quantity sensor 1. Therefore, the effects of the above-described physical quantity sensor 1 can be obtained, and high reliability can be exhibited.

[0284] In addition, the physical quantity sensor 1 can also be widely used in electronic control units (ECUs) such as car navigation systems, car air conditioners, anti-lock braking systems (ABS), airbags, tire pressure monitoring systems (TPMS), engine control, and battery monitors for hybrid vehicles and electric vehicles.

[0285] In addition, the mobile object is not limited to the automobile 1500, and can also be applied to, for example, airplanes, rockets, artificial satellites, ships, AGVs (automated guided vehicles), bipedal walking robots, unmanned aircraft such as drones, etc.

[0286] Although the physical quantity sensor, physical quantity sensor device, electronic device, and mobile body of the present invention have been described above based on the illustrated embodiments, the present invention is not limited thereto, and the configuration of each component can be replaced with any configuration having the same function. In addition, any other components can be added to the present invention. In addition, the above embodiments can be appropriately combined. In the above embodiments, the X-axis direction (first direction) and the Y-axis direction (second direction) are orthogonal, but the present invention is not limited thereto and can also cross.

[0287] In the above embodiment, a configuration including one element portion is described, but a plurality of element portions may be provided. In this case, by providing a plurality of element portions with detection axes different from each other, accelerations in a plurality of axial directions can be detected.

[0288] Furthermore, in the above-described embodiment, the acceleration sensor that detects acceleration is described as being used as the physical quantity sensor. However, the physical quantity detected by the physical quantity sensor is not limited to acceleration.

Claims

1. A physical quantity sensor, characterized in that: When three axes orthogonal to each other are defined as an X-axis, a Y-axis, and a Z-axis, the physical quantity sensor includes: base; a first trunk support portion fixed to the base; a second trunk supporting portion, arranged along a Y-axis direction parallel to the Y-axis with the first trunk supporting portion, and fixed to the base; a movable fixing portion, arranged between the first trunk supporting portion and the second trunk supporting portion when viewed from above in a Z-axis direction parallel to the Z-axis, and fixed to the base; a pair of first trunk portions, separately arranged on the positive side of the X-axis of the first trunk portion supporting portion and the negative side of the X-axis of the first trunk portion supporting portion, and supported by the first trunk portion supporting portion; a plurality of first fixed electrode fingers, arranged on the pair of first main bodies in an X-axis direction parallel to the X-axis and along the Y-axis direction; a pair of second trunk portions, separately arranged on the positive side of the X-axis of the second trunk portion support portion and the negative side of the X-axis of the second trunk portion support portion, and supported by the second trunk portion support portion; a plurality of second fixed electrode fingers, arranged on the pair of second main bodies along the X-axis direction and along the Y-axis direction; a pair of movable support parts, supported by the movable fixing part, and separately arranged on the positive side of the X-axis and the negative side of the X-axis; a frame portion connected to one of the pair of movable support portions via a first spring portion and connected to the other of the pair of movable support portions via a second spring portion; a plurality of first movable electrode fingers provided on the frame portion and facing the plurality of first fixed electrode fingers in the X-axis direction; and A plurality of second movable electrode fingers are provided on the frame portion and are opposed to the plurality of second fixed electrode fingers in the X-axis direction. The pair of first main bodies are inclined toward the positive side of the Y axis, The pair of second trunk portions are inclined toward the negative side of the Y-axis.

2. The physical quantity sensor according to claim 1, wherein In a plan view from the Z-axis direction, two joints between the movable fixing portion and the base portion are provided along the X-axis.

3. The physical quantity sensor according to claim 1, wherein In a plan view from the Z-axis direction, two joints between the movable fixing portion and the base portion are provided along the Y-axis.

4. The physical quantity sensor according to claim 1, wherein The inclination of the pair of first trunk portions relative to the X-axis is greater than or equal to 10° and less than or equal to 45°. The pair of second trunk portions have an inclination of not less than 10° and not more than 45° with respect to the X-axis.

5. The physical quantity sensor according to claim 4, wherein The inclination of the pair of first trunk portions relative to the X-axis is greater than or equal to 10° and less than or equal to 30°. An inclination of the pair of second trunk portions with respect to the X-axis is greater than or equal to 10° and less than or equal to 30°.

6. The physical quantity sensor according to claim 1, wherein With respect to the first main body portion of the pair of first main bodies disposed on the positive side of the X-axis, the lengths of the plurality of first fixed electrode fingers disposed on the positive side of the Y-axis gradually decrease toward the positive side of the X-axis. The lengths of the plurality of first fixed electrode fingers arranged on the positive side of the Y axis relative to the first main body arranged on the negative side of the X axis in the pair of first main bodies gradually decrease toward the negative side of the X axis. The lengths of the plurality of first fixed electrode fingers arranged on the negative side of the Y axis relative to the first main body arranged on the positive side of the X axis in the pair of first main bodies gradually increase toward the positive side of the X axis. With respect to the first main body portion of the pair of first main bodies disposed on the negative side of the X-axis, the lengths of the plurality of first fixed electrode fingers disposed on the negative side of the Y-axis gradually increase toward the negative side of the X-axis. With respect to the second main body portion of the pair of second main bodies disposed on the positive side of the X-axis, the lengths of the plurality of second fixed electrode fingers disposed on the positive side of the Y-axis gradually increase toward the positive side of the X-axis. The lengths of the plurality of second fixed electrode fingers arranged on the positive side of the Y axis relative to the second main body arranged on the negative side of the X axis in the pair of second main bodies gradually increase toward the negative side of the X axis. The lengths of the plurality of second fixed electrode fingers arranged on the negative side of the Y axis relative to the second main body arranged on the positive side of the X axis in the pair of second main bodies gradually decrease toward the positive side of the X axis. The lengths of the plurality of second fixed electrode fingers arranged on the negative side of the Y axis relative to the second main body portion of the pair of second main bodies arranged on the negative side of the X axis gradually decrease toward the negative side of the X axis.

7. A physical quantity sensor device, characterized in that: The physical quantity sensor device includes: The physical quantity sensor according to claim 1; and The circuit detects a physical quantity based on an output signal from the physical quantity sensor.

8. The physical quantity sensor device according to claim 7, wherein The physical quantity sensor device includes a ceramic package housing the physical quantity sensor and the circuit.

9. The physical quantity sensor device according to claim 7, wherein: The physical quantity sensor and the circuit are molded.

10. An electronic device, characterized in that: The electronic device comprises: The physical quantity sensor according to claim 1; and The housing accommodates the physical quantity sensor.

11. A mobile object, characterized in that: The mobile body includes: The physical quantity sensor according to claim 1; and The posture control device controls the posture based on the detection signal from the physical quantity sensor.

12. A physical quantity sensor, characterized in that: When three axes orthogonal to each other are defined as an X-axis, a Y-axis, and a Z-axis, the physical quantity sensor includes: base; a first trunk support portion fixed to the base; a second trunk supporting portion, arranged along an X-axis direction parallel to the X-axis with the first trunk supporting portion, and fixed to the base; a movable portion supporting portion, arranged between the first trunk portion supporting portion and the second trunk portion supporting portion when viewed from above in the Z-axis direction, and fixed to the base portion; A first trunk portion and a second trunk portion are separately arranged on the positive side of the X-axis of the first trunk portion support portion and supported by the first trunk portion support portion; a plurality of first fixed electrode fingers arranged along the X-axis direction on the first trunk portion and along a Y-axis direction parallel to the Y-axis; a plurality of second fixed electrode fingers arranged along the X-axis direction on the second trunk portion and along the Y-axis direction; a third main body portion and a fourth main body portion, each of which is separately disposed on the negative side of the X-axis of the second main body portion support portion and supported by the second main body portion support portion; a plurality of third fixed electrode fingers arranged along the X-axis direction on the third trunk portion and along the Y-axis direction; a plurality of fourth fixed electrode fingers arranged along the X-axis direction on the fourth trunk portion and along the Y-axis direction; a frame portion connected to the positive side of the Y axis of the movable portion supporting portion via a first spring portion and connected to the negative side of the Y axis of the movable portion supporting portion via a second spring portion; a plurality of first movable electrode fingers disposed on the frame portion and facing the plurality of first fixed electrode fingers in the X-axis direction; a plurality of second movable electrode fingers, provided on the frame portion and facing the plurality of second fixed electrode fingers in the X-axis direction; a plurality of third movable electrode fingers provided on the frame portion and facing the plurality of third fixed electrode fingers in the X-axis direction; and A plurality of fourth movable electrode fingers are provided on the frame portion and are opposed to the plurality of fourth fixed electrode fingers in the X-axis direction. The first trunk portion is inclined toward the positive side of the Y axis, The second trunk portion is inclined toward the negative side of the Y axis. The third trunk portion is inclined toward the positive side of the Y axis, The fourth trunk portion is inclined toward the negative side of the Y-axis.

13. The physical quantity sensor according to claim 12, wherein: The inclination of the first trunk portion relative to the X-axis is greater than or equal to 10° and less than or equal to 45°. The inclination of the second trunk portion relative to the X-axis is greater than or equal to 10° and less than or equal to 45°. The inclination of the third trunk portion relative to the X-axis is greater than or equal to 10° and less than or equal to 45°. The inclination of the fourth trunk portion with respect to the X-axis is greater than or equal to 10° and less than or equal to 45°.

14. The physical quantity sensor according to claim 13, wherein The inclination of the first trunk portion relative to the X-axis is greater than or equal to 10° and less than or equal to 30°. The inclination of the second trunk portion relative to the X-axis is greater than or equal to 10° and less than or equal to 30°. The inclination of the third trunk portion relative to the X-axis is greater than or equal to 10° and less than or equal to 30°. The inclination of the fourth trunk portion with respect to the X-axis is greater than or equal to 10° and less than or equal to 30°.

15. The physical quantity sensor according to claim 12, wherein The lengths of the plurality of first fixed electrode fingers arranged on the positive side of the Y-axis relative to the first main body gradually decrease toward the positive side of the X-axis. The lengths of the plurality of first fixed electrode fingers arranged on the negative side of the Y-axis relative to the first trunk portion gradually increase toward the positive side of the X-axis. The lengths of the plurality of second fixed electrode fingers arranged on the positive side of the Y-axis relative to the second main body gradually increase toward the positive side of the X-axis. The lengths of the plurality of second fixed electrode fingers arranged on the negative side of the Y-axis relative to the second main body gradually decrease toward the positive side of the X-axis. With respect to the third main body, the lengths of the plurality of third fixed electrode fingers arranged on the positive side of the Y axis gradually decrease toward the negative side of the X axis. The lengths of the plurality of third fixed electrode fingers arranged on the negative side of the Y-axis relative to the third main body gradually increase toward the negative side of the X-axis. With respect to the fourth main body, the lengths of the plurality of fourth fixed electrode fingers arranged on the positive side of the Y axis gradually increase toward the negative side of the X axis. The lengths of the plurality of fourth fixed electrode fingers arranged on the negative side of the Y-axis relative to the fourth trunk portion gradually decrease toward the negative side of the X-axis.

16. A physical quantity sensor, characterized in that: When three axes orthogonal to each other are defined as an X-axis, a Y-axis, and a Z-axis, the physical quantity sensor includes: base; a first trunk support portion fixed to the base; a second trunk supporting portion, arranged along an X-axis direction parallel to the X-axis with the first trunk supporting portion, and fixed to the base; The first movable portion supporting portion includes: a first extending portion extending along a Y-axis direction parallel to the Y-axis and fixed to the base portion; a second movable portion supporting portion, comprising: a second extending portion arranged along the Y-axis direction with the first movable supporting portion, extending along the Y-axis direction, and fixed to the base portion; A first trunk portion and a second trunk portion are separately arranged on the positive side of the X-axis of the first trunk portion support portion and supported by the first trunk portion support portion; a plurality of first fixed electrode fingers arranged along the X-axis direction on the first trunk portion and along the Y-axis direction; a plurality of second fixed electrode fingers arranged along the X-axis direction on the second trunk portion and along the Y-axis direction; a third main body portion and a fourth main body portion, each of which is separately disposed on the negative side of the X-axis of the second main body portion support portion and supported by the second main body portion support portion; a plurality of third fixed electrode fingers arranged along the X-axis direction on the third trunk portion and along the Y-axis direction; a plurality of fourth fixed electrode fingers arranged along the X-axis direction on the fourth trunk portion and along the Y-axis direction; a frame portion connected to the first movable portion supporting portion on the positive side of the X axis via a first spring portion, connected to the first movable portion supporting portion on the negative side of the X axis via a second spring portion, connected to the second movable portion supporting portion on the positive side of the X axis via a third spring portion, and connected to the second movable portion supporting portion on the negative side of the X axis via a fourth spring portion; a plurality of first movable electrode fingers disposed on the frame portion and facing the plurality of first fixed electrode fingers in the X-axis direction; a plurality of second movable electrode fingers, provided on the frame portion and facing the plurality of second fixed electrode fingers in the X-axis direction; a plurality of third movable electrode fingers provided on the frame portion and facing the plurality of third fixed electrode fingers in the X-axis direction; and A plurality of fourth movable electrode fingers are provided on the frame portion and are opposed to the plurality of fourth fixed electrode fingers in the X-axis direction. The first trunk portion is inclined toward the positive side of the Y axis, The second trunk portion is inclined toward the negative side of the Y axis. The third trunk portion is inclined toward the positive side of the Y axis, The fourth trunk portion is inclined toward the negative side of the Y-axis.

Images