Sheet pasting device

Abstract

The present application provides a sheet attaching device capable of attaching a sheet to a ring-shaped frame in a desired orientation. The sheet attaching device has a frame storage portion that stores the ring-shaped frame. The frame storage portion includes a support table that places the ring-shaped frame, an abutting portion that is vertically provided around the support table to position the ring-shaped frame at a prescribed position of the support table, an opening and closing door that divides an area that stores the support table and the abutting portion in a side direction of the support table, a sensor that detects a closing state of the opening and closing door, an entry member that advances and retreats toward a notch of the ring-shaped frame placed on the support table in conjunction with an opening and closing operation of the opening and closing door, and a control unit.

Description

Technical Field

[0001] This invention relates to a device for attaching sheets. Background Technology

[0002] When processing various plate-shaped workpieces, such as wafers, glass substrates, and ceramic substrates on which semiconductor devices are formed, by slicing or grinding, a technique is widely used to form frame units by fixing the workpiece to the opening of an annular frame using a sheet (adhesive tape, etc.). Sheet bonding devices that fix the workpiece to the annular frame using adhesive tape are also widely used (see, for example, Patent Document 1). Generally, in a sheet bonding device, the frame storage section that stores the annular frame usually has multiple pins passing through the opening and overlapping and fixed in a predetermined position.

[0003] Patent Document 1: Japanese Patent No. 6302765

[0004] However, when the frame storage unit stores the frames by passing them through the pins, the movement of the ring frames is restricted to the direction of removal and insertion from above the pins. When storing a large number of frames at once, this becomes a laborious task of lifting the ring frames above the pins.

[0005] Furthermore, the ring frame has pre-defined cuts along a predetermined orientation, allowing the orientation of the ring frame to be determined. Using this, the orientation of the ring frame is fixed in correspondence with the orientation of the workpiece, making it easy to align the workpiece during processing. Therefore, when storing the ring frame in the sheet bonding device, it is also necessary to store the ring frame along a predetermined orientation and then bond the sheet to the ring frame with the desired orientation. Summary of the Invention

[0006] Therefore, the object of the present invention is to provide a sheet pasting device that can paste a sheet onto an annular frame with a desired orientation.

[0007] According to the present invention, a sheet-adhesive device is provided for adhering a sheet to an annular frame having slits at predetermined positions on its outer periphery, thereby securing a workpiece within the slits. The sheet-adhesive device comprises: a frame storage section for accommodating the overlapping annular frame; a frame removal unit for removing the annular frame from the frame storage section; and a sheet-adhesive unit for adhering the sheet to the annular frame and the workpiece. The frame storage section includes: a support platform for supporting the overlapping annular frame; and an abutment portion erected around the support platform for abutting the sides of the annular frame and positioning the annular frame within the support platform. The system includes: a support platform at a predetermined position; an opening / closing door that divides the area on the side of the support platform into a region for accommodating the support platform and the abutment; a sensor that detects when the opening / closing door is closed; an entry component that moves in conjunction with the opening / closing action of the opening / closing door toward the cutout of the annular frame placed on the support platform; and a control unit configured such that: when the entry component enters into the cutout of the annular frame placed on the support platform in a predetermined orientation, the opening / closing door can be closed; and when the sensor detects that the opening / closing door is closed, the control unit determines that the annular frame is placed in a predetermined orientation and allows the frame removal unit to remove the annular frame from the frame storage section.

[0008] Preferably, the support platform is fixed to the lifting unit, and the annular frame is moved out of the support platform when the uppermost overlapping annular frame is positioned at a predetermined height and the entry component is inserted into the cut.

[0009] According to the present invention, the following effect is achieved: the sheet can be adhered to the annular frame with the desired orientation. Attached Figure Description

[0010] Figure 1 This is a side view schematically showing a structural example of the sheet pasting device according to a partial cross-section.

[0011] Figure 2 It shows through Figure 1 A perspective view of an example of a sheet-attaching device for a workpiece.

[0012] Figure 3 It is shown schematically. Figure 1 A top view of the frame storage section of the sheet pasting device shown.

[0013] Figure 4 It is shown schematically in partial cross-section. Figure 3 The side view of the frame storage section shown.

[0014] Figure 5 It is shown schematically in Figure 1The top view shows an example of a sheet pasting device with the ring frame housed in the frame storage section, and the opening and closing door closed.

[0015] Figure 6 It is an illustrative representation that has been... Figure 5 A top view of an example of the frame storage section with the doors closed.

[0016] Figure 7 It is shown schematically in Figure 1 A top view of another example of a sheet pasting device in which a ring-shaped frame is housed in the frame storage section, with the opening and closing door closed.

[0017] Figure 8 It is an illustrative representation that has been... Figure 5 A top view of another example of the frame storage section with the doors closed.

[0018] Figure 9 It is shown schematically in partial cross-section. Figure 6 The side view of the frame storage section shown.

[0019] Figure 10 It is shown schematically in partial cross-section. Figure 9 The side view shows the state in which the abutment of the frame storage section positions the annular frame.

[0020] Figure 11 It is shown schematically in partial cross-section. Figure 10 The side view shows the state in which the lifting unit of the frame storage section raises the annular frame.

[0021] Figure 12 The partial cross-section schematically shows the frame moving unit. Figure 11 A side view of the uppermost annular frame, which is mounted on the support platform of the frame storage section, in the state of being moved out.

[0022] Label Explanation

[0023] 1: Sheet pasting device; 2: Sheet pasting unit; 10: Frame storage section; 12: Support platform; 30: Abutment section; 40: Opening / closing door; 42: Sensor; 50: Entry component; 70: Frame removal unit; 100: Control unit; 200: Sheet; 201: Workpiece; 202: Annular frame; 207: Opening; 208: Outer edge (side); 209: Cut. Detailed Implementation

[0024] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the constituent elements described below include contents that are readily conceived by those skilled in the art and substantially the same. Additionally, the structures described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications to the structure can be made without departing from the spirit of the present invention.

[0025] The sheet pasting device according to an embodiment of the present invention will be described with reference to the accompanying drawings. Figure 1 This is a side view schematically showing a structural example of the sheet pasting device according to a partial cross-section. Figure 2 It shows through Figure 1 A perspective view of an example of a sheet-attaching device for a workpiece. Figure 3 It is shown schematically. Figure 1 A top view of the frame storage section of the sheet pasting device shown. Figure 4 It is shown schematically in partial cross-section. Figure 3 The side view of the frame storage section shown.

[0026] Implementation methods Figure 1 The adhesive device 1 for the sheet is used to adhere the sheet 200 to... Figure 2 The device shown is attached to the workpiece 201 and the annular frame 202. The workpiece 201 of the sheet 200 is attached to the sheet 200 by the sheet attachment device 1 of the embodiment. It is a wafer such as a disc-shaped semiconductor wafer or optical device wafer with silicon (Si), sapphire (Al2O3), gallium arsenide (GaAs) or silicon carbide (SiC) as a substrate.

[0027] like Figure 2 As shown, the workpiece 201 has devices 204 formed in each region of the front surface 203, which is divided by multiple intersecting predetermined dividing lines 210. Devices 204 are, for example, integrated circuits such as ICs (Integrated Circuits) or LSIs (Large Scale Integration), image sensors such as CCDs (Charge Coupled Devices) or CMOS (Complementary Metal Oxide Semiconductors), or MEMS (Micro Electro Mechanical Systems). Furthermore, in this invention, the workpiece 201 is not limited to a wafer, but can also be a rectangular resin-encapsulated substrate, ceramic plate, or glass plate having multiple resin-sealed devices.

[0028] In addition, the workpiece 201 is provided with an irregularly shaped portion 205 that shows the crystal orientation of the substrate. In an embodiment, the irregularly shaped portion 205 of the workpiece 201 is a cut that is formed by cutting off a portion of the outer edge of the substrate.

[0029] In one embodiment, regarding the workpiece 201, a circular sheet 200 is adhered to the back surface 206 on the back side of the front surface 203, and an annular frame 202 is adhered to the outer edge of the sheet 200. In another embodiment, the sheet 200 is formed of a flexible resin and is temporarily adhered to a strip-shaped release liner 211, peeled off from the release liner 211, and then adhered to the back surface 206 and the annular frame 202 of the workpiece 201. In yet another embodiment, the circular sheet 200 is temporarily adhered to the strip-shaped release liner 211, and when... Figure 1 When the pressing plate 6 of the sheet pasting unit 2 shown causes the peeling sheet 211 to fold back, the sheet 200 is peeled off from the peeling sheet 211 and pasted onto the workpiece 201 and the annular frame 202 by the pressing roller 7.

[0030] In one embodiment, sheet 200 has: a substrate layer formed of a non-adhesive resin; and an adhesive layer laminated on the substrate layer and formed of an adhesive resin, which is adhered to the back surface 206 and the annular frame 202 of the workpiece 201.

[0031] The annular frame 202 is formed of rigid resin or metal and is shaped as a ring with an opening 207 on its inner side. The inner diameter of the annular frame 202 is larger than the outer diameter of the workpiece 201. Furthermore, the annular frame 202 has multiple arc-shaped portions 208-1, multiple straight portions 208-2 connected to the arc-shaped portions 208-1, and a cutout 209 formed by cutting off a portion of the arc-shaped portion. That is, the annular frame 202 has a cutout 209 at a predetermined position on its outer edge.

[0032] The ring frame 202 seals the opening 207 by attaching a piece 200 to the back surface 206 of the workpiece 201, and the workpiece 201 is fixed inside the opening 207 by means of the piece 200. In addition, the outer edge of the piece 200 attached to the back surface 206 of the workpiece 201 is attached to the ring frame 202 in a predetermined desired orientation such that the relative orientation of the cut 209 with respect to the irregularly shaped portion 205 is set.

[0033] Furthermore, in this embodiment, the annular frame 202 uses a large-diameter annular frame 202-1 and a small-diameter annular frame 202-2 with different outer diameters. The outer diameter of the large-diameter annular frame 202-1 is larger than that of the small-diameter annular frame 202-2. Hereinafter, in this specification, when distinguishing between them, they will be referred to as the large-diameter annular frame 202-1 and the small-diameter annular frame 202-2; when not distinguishing them, they will be simply referred to as the annular frame 202.

[0034] The sheet-attaching device 1 of the embodiment is a device that attaches a sheet 200, which seals the opening 207 of the annular frame 202, to the annular frame 202, which has a cut 209 at a predetermined position on the outer edge 208, thereby fixing the workpiece 201 in the opening 207 by means of the sheet 200. Furthermore, the sheet-attaching device 1 of the embodiment is also a device that attaches the sheet 200 to the workpiece 201 and the annular frame 202 in such a manner that the relative orientation of the cut 209 and the irregularly shaped portion 205 is the desired orientation as described above.

[0035] like Figure 1 As shown, the sheet pasting device 1 includes: a sheet pasting unit 2, which pastes the sheet 200 onto an annular frame 202 and a workpiece 201; a frame storage section 10, which accommodates the annular frame 202 overlappingly; and a frame removal unit 70, which removes the annular frame 202 from the frame storage section 10 and moves the annular frame 202 removed from the frame storage section 10 into the sheet pasting unit 2.

[0036] like Figure 1 As shown, the sheet pasting unit 2 has a chuck worktable 3, a winding part 4, a pasting part 5, and a relative moving part (not shown).

[0037] The chuck table 3 holds the workpiece 201 and the annular frame 202. The chuck table 3 places and holds the annular frame 202, which is moved in by the frame removal unit 70, and the workpiece 201, which is moved in by the workpiece conveying unit, on its upper surface. The chuck table 3 positions the annular frame 202 in a desired orientation relative to the workpiece 201 placed on its upper surface.

[0038] In addition, in the embodiment, the chuck worktable 3 positions the back surface 206 of the workpiece 201 and the upper surface of the annular frame 202 on the same plane.

[0039] The winding section 4 feeds the release sheet 211, which is rotatably wound around its outer circumference and has the release sheet 211 temporarily bonded to it, onto the chuck table 3. The winding section 4 is configured to rotate freely around an axis and wind the front end side of the release sheet 211 around its outer circumference. The winding section 4 is rotated by a motor (not shown) in the direction of winding the release sheet 211 around its outer circumference, thereby feeding the release sheet 211 out of the tape roll.

[0040] The adhesive part 5 attaches the sheet 200 to the workpiece 201 and the annular frame 202 fixed on the chuck worktable 3 using the peeling sheet 211 fed from the winding part 4. The adhesive part 5 includes: a pressing plate 6 disposed to the side of the winding part 4, which folds the sheet 200 back using its conical front end; a pressing roller 7 disposed next to the pressing plate 6; and a relative moving part (not shown).

[0041] The pressing plate 6 is formed in a plate shape that is inclined relative to the horizontal direction, with the front end of the side away from the film roll positioned downwards. The front end of the pressing plate 6 gradually thins away from the film roll. The width of the pressing plate 6 is greater than the width of the film 200. The pressing plate 6 feeds the adhesive layer of the film 200, which is folded back on the front end, toward the annular frame 202 fixed on the chuck table 3 and the workpiece 201.

[0042] The pressing roller 7 is configured with its axis parallel to the axis of the sheet roll and the winding section 4 and is supported so that it can rotate freely about its axis. The pressing roller 7 further presses the sheet 200, which is fed to the annular frame 202 and the workpiece 201 by the pressing plate 6, onto the annular frame 202 and the workpiece 201.

[0043] The relative movement unit causes the chuck table 3 and the adhesive part 5 to move relative to each other along the upper surface of the chuck table 3. In this embodiment, the relative movement unit moves the chuck table 3 along the upper surface.

[0044] The pasting part 5 moves along the upper surface in a direction away from the winding part 4 from a position where the chuck table 3 presses the piece 200 folded back on the front end of the pressing plate 6 onto the end of the annular frame 202 away from the winding part 4, thereby pasting the piece 200 delivered by the winding part 4 onto the workpiece 201 and the annular frame 202.

[0045] like Figure 1 and Figure 3 As shown, the frame storage section 10 has a base 11, a support platform 12, a lifting unit 20, a backing part 30, and a backing part sliding mechanism 31 (only). Figure 1 (As shown), the base 11 includes an opening / closing door 40, a sensor 42, an entry component 50, a linkage mechanism 53, and a control unit 100. The upper and lower surfaces of the base 11 are formed into flat plates along the horizontal direction.

[0046] A support platform 12 is disposed at the center of the upper surface of the base 11, providing a space for multiple overlapping annular frames 202. The upper and lower surfaces of the support platform 12 are formed into flat circular plates along the horizontal direction, and a cutout 13 is formed at the outer edge to allow the abutment portion 30 to enter. In addition, in this embodiment, the support platform 12 is used to place the annular frames 202 with the straight portion 208-2 facing the abutment portion 30.

[0047] The lifting unit 20 causes the support platform 12 to move up and down in a direction perpendicular to the upper and lower surfaces of the base 11 and the support platform 12. The lifting unit 20 includes: a motor (not shown); a lead screw that rotates about its axis via the motor; and a lifting block 21 that moves up and down as the lead screw rotates about its axis and is fixed to the support platform 12. The lifting unit 20 is fixed to the support platform 12 by the lifting block, which is fixed to the support platform 12.

[0048] Abutment portions 30 are erected around the support platform 12, and are abutted against by the straight portion 208-2 of the outer edge 208 of the annular frame 202 placed on the support platform 12, thereby positioning the annular frame 202 at a predetermined position on the support platform 12. The abutment portions 30 are formed as columns erected from the base 11, and multiple abutment portions 30 are arranged around the support platform 12 on the base 11. In this embodiment, abutment portions 30 are provided against the lifting block 21 of the lifting unit 20 of the base 11, and the abutment portions 30 are mutually clamped to the center of the support platform 12 and face each other. Figure 1 As shown in the front view of the frame storage section 10, the abutment portion 30 of the lifting block 21 is positioned between two abutment portions 30 (hereinafter referred to as 30-1), for a total of three abutment portions 30. Furthermore, in this specification, the abutment portions 30 are indicated by numeral 30 when not distinguishing them, and by numeral 30-1 when distinguishing the two abutment portions 30-1 from the other abutment portions.

[0049] The abutment part 30 moves parallel to the upper and lower surfaces of the base 11 and the support platform 12 and radially along the support platform 12 via the abutment part sliding mechanism 31. Multiple abutment parts 30 move simultaneously in the same direction radially along the support platform 12 via the abutment part sliding mechanism 31. When the multiple abutment parts 30 move towards the center of the support platform 12, they abut against the straight portion 208-2 of the outer edge 208 of the annular frame 202, pushing the straight portion 208-2 of the outer edge 208 of the annular frame 202 and positioning the annular frame 202 at a predetermined position on the support platform 12.

[0050] The sliding mechanism 31 of the abutment parts causes all the abutment parts 30 to move in the same radial direction in the support platform 12. For example... Figure 1As shown, the abutment sliding mechanism 31 includes: a motor (not shown); a circular plate member 32 disposed at the center of the upper surface of the base 11 and below the support platform 12, which rotates about an axis via the motor; a track 33, which is provided in a one-to-one correspondence with the abutment 30 and is radially parallel to the support platform 12 and fixed to the support platform 12; a sliding block 34, which is provided in a one-to-one correspondence with the abutment 30 and is supported so as to move freely on the track 33 and fixes the corresponding abutment 30; and a connecting rod 35, the two ends of which are connected to each sliding block 34 and the circular plate member 32. The abutment sliding mechanism 31 rotates the circular plate member 32 about an axis via the motor, thereby causing the sliding block 34, i.e., the abutment 30, to move simultaneously in the same direction along the radial direction of the support platform 12.

[0051] Additionally, the frame storage section 10 has a support plate 14 erected from the base 11 near one of the two abutment sections 30-1. Figure 3 (As shown).

[0052] The opening / closing door 40 is positioned to the side of the support platform 12, defining an area relative to the outside that houses the support platform 12 and the abutment parts 30. This area, encompassing the upper surface of the support platform 12 and the abutment parts 30, is surrounded by multiple abutment parts 30. The two surfaces of the opening / closing door 40 are formed flat along the vertical direction, as shown... Figure 3 and Figure 4 As shown, the door 40 is rotatably supported on the support plate 14 via a hinge (not shown) with one end in the width direction as the center.

[0053] The opening and closing door 40 is centered on one end in the width direction. Figure 3 The door 40 rotates between the position shown by the dashed line, which is along the outer edge of the base 11 and closes the two abutment parts 30-1, and the position that intersects the outer edge of the base 11 and opens the two abutment parts 30-1. Hereinafter, the rotational motion of the door 40 centered on one end in the width direction will be described as the opening and closing motion of the door 40.

[0054] When the door 40 closes between the two abutment portions 30-1, it restricts the placement of the annular frame 202 on the support platform 12 from the outside and restricts the removal of the annular frame 202 from the support platform 12 to the outside. Conversely, when the door 40 opens between the two abutment portions 30-1, it allows the annular frame 202 to be placed on the support platform 12 from the outside and allows the annular frame 202 to be removed from the support platform 12 to the outside.

[0055] Thus, in the frame storage section 10, by positioning the annular frame 202 on the side of the support platform 12 on the upper surface, and positioning the annular frame 202 against the abutment portion 30 and the opening / closing door 40 of the support platform 12, the annular frame 202 can be placed on the support platform 12 from the side, and the annular frame 202 on the support platform 12 can be removed to the outside from the side. Furthermore, in this embodiment, the opening / closing door 40 is provided with a handle 41 that can be gripped by an operator.

[0056] Sensor 42 detects whether the door 40 is closed and outputs the detection result to control unit 100. In an embodiment, sensor 42 may be, for example, a proximity sensor that detects the door 40 closing between the two abutment parts 30.

[0057] The entry component 50 moves forward and backward toward the cutout 209 of the annular frame 202 placed on the support platform 12 through the linkage mechanism 53 and the opening and closing action of the opening and closing door 40.

[0058] like Figure 3 As shown, an entry component 50 is disposed around the support platform 12 and is formed as a cylinder erected on a sliding base 51 that is radially movable from the support platform 12 and mounted on the base 11. The longitudinal direction of the entry component 50 is perpendicular to the upper and lower surfaces of the support platform 12, that is, parallel to the direction of the plurality of annular frames 202 overlapping on the support platform 12. The sliding base 51 is supported by a sliding support base 52 on the base 11. Figure 4 (As shown) The support can slide freely in the radial direction of the support platform 12.

[0059] When the annular frame 202 is placed on the support platform 12 in the prescribed orientation that is the desired orientation when it is pasted onto the sheet 200 by the sheet pasting unit 2, the entry member 50 is opposite to the cutout 209 of the annular frame 202.

[0060] The linkage mechanism 53 links the opening and closing action of the door 40 with the forward and backward movement of the entry member 50 relative to the cutout 209 of the annular frame 202 mounted on the support platform 12. Regarding the linkage mechanism 53, when the door 40 opens between the two abutment portions 30, the sliding base 51 moves radially outward from the support platform 12, causing the entry member 50 to move away from the cutout 209 of the annular frame 202 mounted on the support platform 12. Conversely, when the door 40 closes between the two abutment portions 30, the sliding base 51 moves radially inward from the support platform 12, causing the entry member 50 to move toward the cutout 209 of the annular frame 202 mounted on the support platform 12.

[0061] In the implementation method, such as Figure 4As shown, the linkage mechanism 53 has a first tension coil spring 54 and a second tension coil spring 55. The two ends of the first tension coil spring 54 are mounted on the sliding base 51 and the opening / closing door 40, applying force in a direction that brings them closer together. The two ends of the second tension coil spring 55 are mounted on the upright column 15 (erected from the base 11 and located radially inside the support platform 12 than the sliding base 51) and the sliding base 51, applying force in a direction that brings them closer together.

[0062] Thus, regarding linkage 53, when the opening / closing door 40 is opened, the first tension coil spring 54 pulls the sliding base 51 radially outward toward the support platform 12, causing the entry component 50 to exit from the cutout 209 of the annular frame 202 placed on the support platform 12. Regarding linkage 53, when the opening / closing door 40 is closed, the second tension coil spring 55 pulls the sliding base 51 radially inward toward the support platform 12, causing the entry component 50 to move toward the cutout 209 of the annular frame 202 placed on the support platform 12.

[0063] When the door 40 is closed, the linkage mechanism 53 causes the entry component 50 to enter the cutout 209 of the annular frame 202 placed on the support platform 12 in a predetermined orientation. However, when at least one of the annular frames 202 placed on the support platform 12 is placed in an orientation different from the predetermined orientation, even if the door 40 is to be closed, the entry component 50 cannot enter the cutout 209 because it contacts the arcuate portion 208-1 of the outer edge 208 of the at least one annular frame 202.

[0064] like Figure 3 As shown, the linkage mechanism 53 has a closing allowance restriction part 56. The closing allowance restriction part 56 allows the opening / closing door 40 to close when the entry member 50 enters into all the cutouts 209 of the annular frame 202 mounted on the support platform 12, and restricts the opening / closing door 40 from closing when the entry member 50 does not enter into the cutouts 209 of the annular frame 202 mounted on the support platform 12. In this embodiment, the closing allowance restriction part 56 is formed extending from the sliding base 51 toward the opening / closing door 40. When the entry member 50 does not enter into the cutouts 209 of the annular frame 202 mounted on the support platform 12, the closing allowance restriction part 56 interferes with the opening / closing door 40, restricting the opening / closing door 40 from closing; when the entry member 50 enters into the cutouts 209 of the annular frame 202 mounted on the support platform 12, it does not interfere with the opening / closing door 40, allowing the opening / closing door 40 to close.

[0065] Thus, the door 40 is configured to close when the entry component 50 enters the cutout 209 of the annular frame 202 placed on the support platform 12 in a predetermined orientation via the linkage mechanism 53. Furthermore, the door 40 is restricted from closing when the entry component 50 is unable to enter at least one cutout 209 of the annular frame 202 placed on the support platform 12 in an orientation different from the predetermined orientation via the linkage mechanism 53.

[0066] In addition, such as Figure 1 and Figure 3 As shown, the frame storage unit 10 in this embodiment includes a detection sensor 60, which detects when the uppermost annular frame 202, one of a plurality of annular frames 202 stacked on the support platform 12, is positioned at a predetermined height. Furthermore, in this embodiment, the predetermined height refers to the height at which the upper ends of the plurality of abutment portions 30 are located on the same plane. The detection sensor 60 detects when the uppermost annular frame 202 is positioned at the predetermined height and outputs the detection result to the control unit 100.

[0067] The control unit 100 controls each of the aforementioned components constituting the frame storage section 10. Furthermore, in this embodiment, the control unit 100 controls each of the aforementioned components of the sheet-attaching device 1, causing the sheet-attaching device 1 to perform the attaching operation on the workpiece 201 and the sheet 200 of the annular frame 202. The control unit 100 is a computer capable of executing computer programs, and it includes: an arithmetic processing unit having a microprocessor such as a CPU (central processing unit); a storage device having a memory such as ROM (read-only memory) or RAM (random access memory); and an input / output interface device.

[0068] The arithmetic processing unit of the control unit 100 executes a computer program stored in the ROM on the RAM, generating control signals for controlling the frame storage unit 10 and the sheet pasting device 1. The arithmetic processing unit of the control unit 100 outputs the generated control signals to each component of the frame storage unit 10 and the sheet pasting device 1 via an input / output interface device.

[0069] In addition, the control unit 100 is connected to a display unit, such as a liquid crystal display device that displays the status or image of the pasting action, and an input unit used by the operator when registering processing information. The input unit consists of at least one of a touch panel and a keyboard provided on the display unit.

[0070] Next, an example of the pasting operation of the sheet 200 of the sheet pasting device 1 will be described. Figure 5 It is shown schematically in Figure 1 The top view shows an example of a sheet pasting device with the ring frame housed in the frame storage section, and the opening and closing door closed. Figure 6 It is an illustrative representation that has been... Figure 5 A top view of an example of the frame storage section with the doors closed. Figure 7 It is shown schematically in Figure 1 A top view of another example of a sheet pasting device in which a ring-shaped frame is housed in the frame storage section, with the opening and closing door closed. Figure 8 It is an illustrative representation that has been... Figure 5 A top view of another example of the frame storage section with the doors closed. Figure 9 It is shown schematically in partial cross-section. Figure 6 The side view of the frame storage section shown. Figure 10 It is shown schematically in partial cross-section. Figure 9 The side view shows the state in which the abutment of the frame storage section positions the annular frame. Figure 11 It is shown schematically in partial cross-section. Figure 10 The side view shows the state in which the lifting unit of the frame storage section raises the annular frame. Figure 12 The partial cross-section schematically shows the frame moving unit being placed on Figure 11 A side view of the uppermost ring frame of the support platform of the frame storage section shown, in the state of being moved out.

[0071] First, the sheet pasting device 1 opens the opening and closing door 40 of the frame storage section 10, and from the side of the frame storage section 10, through the two abutment parts 30-1, the straight part 208-2 of the outer edge 208 of the annular frame 202 abuts against the abutment part 30 on the side of the lifting unit 20, as shown. Figure 5 As shown, at least one annular frame 202 is placed on the support platform 12. When the sheet pasting device 1 stores a predetermined number of annular frames 202 in the frame storage section 10, as... Figure 5 As shown, the operator rotates the opening / closing door 40 in the direction that closes the two abutment parts 30.

[0072] At this time, when all the annular frames 202 are placed on the support platform 12 in the specified orientation, as Figure 6 As shown, the entry component 50 enters into the cutouts 209 of all annular frames 202, and the opening / closing door 40 closes the two abutment portions 30-1. Additionally, when at least one annular frame 202 is placed on the support platform 12 in an orientation different from the predetermined orientation, as... Figure 7As shown, the entry component 50 cannot enter all the cuts 209 of the annular frame 202, and the closing of the opening and closing door 40 is restricted by the closing allowable restriction part 56.

[0073] like Figure 7 As shown, when the opening / closing door 40 cannot be closed, the sheet pasting device 1, upon operator confirmation, changes the orientation of the annular frames 202 within the frame storage section 10, placing all the annular frames 202 on the support platform 12 with the prescribed orientation. Furthermore, Figure 5 , Figure 6 and Figure 7 This shows the state in which multiple large-diameter annular frames 202-1 are placed on the support platform 12.

[0074] Furthermore, in the sheet pasting device 1, when the small-diameter annular frame 202-2 is placed on the support platform 12 of the frame storage section 10 and all the small-diameter annular frames 202-2 are placed on the support platform 12 in a predetermined orientation, such as Figure 8 As shown, the entry component 50 enters into the cutouts 209 of all the small-diameter annular frames 202-2, and the opening and closing door 40 closes the two abutment parts 30-1.

[0075] Thus, as Figure 9 As shown, when the insert member 50 of the frame storage section 10 enters the cutout 209 of the annular frame 202 on the support platform 12, the sheet pasting device 1 closes the opening / closing door 40. The sensor 42 of the sheet pasting device 1 detects that the opening / closing door 40 is closed (i.e., all the annular frames 202 on the support platform 12 are in the specified orientation) and outputs the detection result to the control unit 100.

[0076] When the control unit 100 of the sheet pasting device 1 receives information from the sensor 42 indicating that the door 40 is closed, it moves all the abutment parts 30 radially toward the center of the support platform 12 via the abutment sliding mechanism 31. Figure 10 As shown, in the sheet pasting device 1, multiple abutting parts 30 abut against the straight part 208-2 of the outer edge 208 of the annular frame 202, and push the straight part 208-2 of the outer edge 208 of the annular frame 202 to position the annular frame 202 at a predetermined position on the support platform 12.

[0077] The control unit 100 of the sheet pasting device 1 moves all the abutment parts 30 radially toward the outer periphery of the support platform 12 via the abutment sliding mechanism 31. The control unit 100 of the sheet pasting device 1 raises the support platform 12 and the annular frame 202 on the support platform 12 via the lifting unit 20. When the detection sensor 60 detects that the uppermost annular frame 202 is positioned at a predetermined height, it outputs information to the control unit 100 indicating that the uppermost annular frame 202 is positioned at the predetermined height.

[0078] When the control unit 100 of the sheet pasting device 1 receives information from the detection sensor 60 indicating that the uppermost annular frame 202 is positioned at a predetermined height, it stops the rise of the support platform 12 of the lifting unit 20. After the control unit 100 of the sheet pasting device 1 moves the frame removal unit 70 above the frame storage section 10 via a moving mechanism (not shown), it descends toward the frame storage section 10, as... Figure 11 As shown, the attraction and holding part 71 of the frame removal unit 70 comes into contact with the uppermost annular frame 202.

[0079] The sheet pasting device 1 attracts and holds the uppermost annular frame 202 to the attracting and holding part 71 of the frame removal unit 70, such as Figure 12 As shown, regarding the frame storage section 10, the control unit 100 raises the suction-held annular frame 202 above the abutment section 30 via a moving mechanism (not shown). In the sheet pasting device 1, the control unit 100 moves the frame transfer unit 70, which holds the annular frame 202, to the sheet pasting unit 2 via a moving mechanism (not shown), and moves the annular frame 202 onto the upper surface of the chuck table 3 of the sheet pasting unit 2.

[0080] Then, the sheet bonding device 1 bonds the sheet 200 to the workpiece 201 and the annular frame 202 via the sheet bonding unit 2. Additionally, Figure 9 , Figure 10 , Figure 11 and Figure 12 The diagram shows a state where multiple large-diameter annular frames 202-1 are placed on the support platform 12. Furthermore, in the sheet pasting device 1, after the opening / closing door 40 is closed, the entry member 50 continues to enter the cutout 209 of the annular frame 202 placed on the support platform 12. Thus, with the uppermost annular frame 202 positioned at a predetermined height and the entry member 50 inserted into the cutout 209, the annular frame 202 is removed from the support platform 12.

[0081] Additionally, when the control unit 100 of the sheet pasting device 1 detects that the opening / closing door 40 is closed using the sensor 42, as described above... Figure 9 , Figure 10 , Figure 11and Figure 12 As shown, each component is controlled. Therefore, when the sensor 42 detects that the opening / closing door 40 is closed, the control unit 100 of the sheet pasting device 1 determines that the annular frame 202 is placed in a predetermined orientation, and allows the frame removal unit 70 to remove the annular frame 202 from the frame storage section 10.

[0082] In the sheet pasting device 1 of the above-described embodiment, the frame storage unit 10 includes: an entry member 50 that enters into the cutout 209 of the annular frame 202 placed on the support platform 12; a closing allowance restriction 56 that restricts the opening / closing door 40 from closing when the entry member 50 does not enter the cutout 209; and a sensor 42 that detects when the opening / closing door 40 is closed; etc. Therefore, if the opening / closing door 40 is not closed, it can be determined that the orientation of the annular frame 202 is inconsistent. Therefore, the sheet pasting device 1 will not paste the sheet 200 when the orientation of the annular frame 202 is incorrect. As a result, the sheet pasting device 1 of the embodiment has the following effect: it can paste the sheet 200 onto the annular frame 202 with the desired orientation.

[0083] Furthermore, the sheet pasting device 1 of the embodiment has an abutment portion 30 that abuts the frame storage portion 10 against the straight portion 208-2 of the outer edge 208 of the ring frame 202, based on the alignment of the ring frame 202 with the frame storage portion achieved by the pin in the conventional frame storage portion. Therefore, the ring frame 202 can be placed on the support platform 12 of the frame storage portion 10 from the side, and the operation of the operator picking up and putting down the ring frame 202 can be suppressed.

[0084] In addition, the sheet pasting device 1 of the embodiment uses a sensor 42 that is normally provided on the opening and closing door 40 to detect whether the opening and closing door 40 is closed, so it also has the effect of not needing to set up a new sensor in order to detect the orientation of the ring frame 202.

[0085] Furthermore, the present invention is not limited to the embodiments described above. That is, various modifications and implementations can be made without departing from the spirit of the present invention. In the present invention, sheet 200 may also be a sheet without an adhesive layer but only a substrate layer formed of thermoplastic resin.

Claims

1. A sheet-adhesive device for adhering a sheet to an annular frame having slits at predetermined positions on its outer periphery, thereby securing a workpiece within the opening by means of the sheet, wherein... The adhesive patch has the following features: A frame storage section for the overlapping storage of the annular frame; A frame removal unit removes the annular frame from the frame storage section; and The sheet bonding unit bonds the sheet to the annular frame and the workpiece. The frame storage section includes: A support platform on which the annular frame is stacked; The abutment is erected around the support platform for the sides of the annular frame to abut against, and positions the annular frame at a predetermined position on the support platform. The door opens and closes, and divides the area on the side of the support platform into a region for accommodating the support platform and the abutment. The sensor detects whether the door is closed. The entry component moves in conjunction with the opening and closing action of the door, advancing and retracting toward the cutout of the annular frame placed on the support platform. as well as Control unit The door is configured to close when the entry component enters the cutout in the annular frame placed on the support platform in a predetermined orientation. When the sensor detects that the door is closed, the control unit determines that the annular frame is positioned in the prescribed orientation and allows the frame removal unit to remove the annular frame from the frame storage section.

2. The sheet pasting device according to claim 1, wherein, The support platform is fixed to the lifting unit. With the uppermost ring frame, which is stacked on top of each other, positioned at a predetermined height and the entry component inserted into the cut, the ring frame is moved out of the support platform.

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