Optical unit, optical device, and method for manufacturing optical unit

Abstract

The present invention provides an optical unit, which includes: a base, which is made of metal and has a main surface and a back surface on the opposite side of the main surface; an optical surface, which is arranged on the main surface; and a vibration element, which is arranged on the main surface or the back surface, the base includes: a supporting portion; a first extension portion and a second extension portion extending from the supporting portion; a movable portion arranged between the first extension portion and the second extension portion; and a first connecting portion connecting the first extension portion to the movable portion and a second connecting portion connecting the second extension portion to the movable portion, the vibration element is arranged on the supporting portion, and the movable portion is swung by inducing torsional vibration in the first connecting portion and the second connecting portion by vibrating the supporting portion, and the optical surface is arranged on the main surface in the movable portion.

Description

Technical Field

[0001] The present disclosure relates to an optical unit, an optical device, and a method of manufacturing the optical unit. Background Art

[0002] Patent document 1 describes an optical scanning device having a reflector vibrating portion. The reflector vibrating portion includes a substrate and a piezoelectric element arranged on the substrate. The reflector portion is mounted on the substrate via a torsion beam. In addition, a vibrator and a torsion beam supporting the vibrator are formed on the outside of the reflector portion and the torsion beam supporting it. The reflector portion and the vibrator constitute two vibrator systems, which are designed to have resonance frequencies f and 2f, or f and 3f. The piezoelectric element is connected to a frequency-variable driving circuit. In the reflector vibrating portion, a voltage is applied to the piezoelectric element to cause the piezoelectric element to expand and contract, thereby generating a plate wave on the substrate, and the vibration energy of the plate wave causes the reflector portion supported by the beam to swing, thereby providing a torque to the reflector portion.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2010-2783 Summary of the invention

[0006] Technical problem to be solved by the invention

[0007] However, in optical devices such as the above-mentioned optical scanning device, when a metal plate is used as a substrate, the light used for scanning may be reflected by parts other than the reflector and become stray light. The generation of stray light may cause a decrease in the optical characteristics of the optical scanning device.

[0008] Therefore, an object of the present disclosure is to provide an optical unit, an optical device, and a method for manufacturing the optical unit capable of improving optical characteristics.

[0009] Technical means of solving problems

[0010] The optical unit disclosed in the present invention includes: a base body, which is made of metal and has a main surface and a back side opposite to the main surface; an optical surface, which is arranged on the main surface; and a vibration element, which is arranged on the main surface or the back side, the base body includes: a support part; a first extension part and a second extension part extending from the support part; a movable part arranged between the first extension part and the second extension part; and a first connecting part connecting the first extension part to the movable part and a second connecting part connecting the second extension part to the movable part, the vibration element is arranged on the support part, and the movable part is swung by inducing torsional vibration in the first connecting part and the second connecting part by vibrating the support part, the optical surface is arranged on the main surface in the movable part, and a pear skin surface is formed on at least a part of at least any one of a first area on the support part on the main surface that is closer to the movable part than the position where the vibration element is arranged, a second area on the main surface corresponding to the first extension part and the second extension part, and a third area on the main surface or the back side that is opposite to the vibration element.

[0011] In the optical unit, a vibration element provided on a supporting portion of a substrate induces torsional vibration in a first connecting portion and a second connecting portion of the substrate, so that a movable portion provided with an optical surface swings. Therefore, by causing light to be incident on the optical surface swinging through the movable portion, various optical functions such as light scanning can be realized. In particular, in the optical unit, a pear-skin surface is formed on at least a portion of at least any one of the first area on the supporting portion on the main surface of the substrate provided with an optical surface, which is closer to the movable portion than the position where the vibration element is provided, the second area corresponding to the first extension part and the second extension part, and the third area on the main surface or the back surface opposite to the vibration element. The first area and the second area are areas on the main surface that are relatively close to the optical surface (movable portion) and where light is easily incident. Therefore, when the pear-skin surface is formed in the first area and / or the second area, the generation of stray light can be suppressed. That is, the optical characteristics are improved. In addition, when the pear-skin surface is formed in the third area, the bonding of the vibration element on the main surface or the back surface is strengthened. By firmly bonding the vibration element to the main surface or the back surface, it is possible to reliably induce torsional vibration in the first connection portion and the second connection portion to swing the optical surface (movable portion). Therefore, in this case, the optical characteristics are also improved.

[0012] In the optical unit of the present disclosure, the vibration element may be provided on the main surface, and the first region, the second region, and the third region may be formed with a pear-skin surface. In this case, the optical characteristics are reliably improved.

[0013] In the optical unit disclosed in the present invention, the entire main surface may be formed with a pear skin surface. In this case, the optical characteristics are more reliably improved. In addition, in this case, the entire main surface can be roughened when the pear skin surface is formed, so that manufacturing becomes easy.

[0014] In the optical unit disclosed in the present invention, the substrate may have a side surface connecting the main surface and the back surface, and a pear skin surface may be formed on the entire back surface and the side surface. In this case, the optical characteristics are further reliably improved. In addition, in this case, when the pear skin surface is formed, the entire surface of the substrate including the main surface, the back surface and the side surface can be roughened at the same time, so that manufacturing becomes easier.

[0015] In the optical unit of the present disclosure, the base may have a side surface connecting the main surface and the back surface, and at least a part of the side surface may be a flat surface. In this case, the strength is improved.

[0016] The optical unit of the present disclosure may include a stress relief portion provided between the optical surface and the first connecting portion and between the optical surface and the second connecting portion for relieving stress caused by the torsion of the first connecting portion and the second connecting portion. In this case, since the bending of the movable portion is suppressed, the optical characteristics are further improved.

[0017] In the optical unit disclosed in the present invention, it is also possible to further include an electrode for electrically connecting the vibration element to the outside, and the electrode is located on the support portion and the vibration element, and includes a first portion in contact with the vibration element, and a second portion provided on the support portion in a manner extending from the first portion toward the outer edge of the support portion. In this case, by providing wiring such as a lead on the second portion of the electrode extending toward the outer edge of the support portion, the vibration element can be electrically connected to the outside via the electrode. Therefore, compared with a case where wiring such as a lead is directly extended from the outside to the vibration element, the wiring such as the lead is shortened and can be stably connected. In addition, the outside here refers to a structure outside the optical unit. In an optical device having an optical unit, it may be a structure inside the optical device, such as a substrate on which the optical unit is mounted.

[0018] The optical device disclosed in the present invention includes: the above-mentioned optical unit; a light source for outputting light; and a detector, which is arranged on the optical axis of the light output from the light source and is used to detect the light, and the light source and the detector are arranged so that the optical axis can interfere with a part of the substrate due to the displacement of the substrate corresponding to the vibration of the vibration element. According to the optical device, the amplitude (swing angle) of the swing of the optical surface (movable part) can be detected based on the output of the light output from the light source and detected by the detector without being blocked by the substrate.

[0019] The optical device disclosed in the present invention includes: an optical unit, which includes a base made of metal, an optical surface arranged on the base, and a vibration element arranged on the base; and a container, which accommodates the optical unit, the base includes: a supporting part; a first extension part and a second extension part extending from the supporting part; a movable part arranged between the first extension part and the second extension part; and a first connecting part connecting the first extension part and the movable part and a second connecting part connecting the second extension part and the movable part, the vibration element is arranged on the supporting part, and the movable part is swung by inducing torsional vibration in the first connecting part and the second connecting part by vibrating the supporting part, the optical surface is arranged on the movable part, and the container is provided with an opening for allowing light to be incident on the optical surface, and at least a portion of the portion of the base exposed from the container through the opening is formed with a pear skin surface.

[0020] In the optical device, a vibration element provided on a supporting portion of a base body induces torsional vibration in a first connecting portion and a second connecting portion of the base body, so that a movable portion provided with an optical surface is swung. Therefore, by causing light to be incident on the optical surface swung via the movable portion, various optical functions such as light scanning can be realized. In particular, in the optical device, a pear-skin surface is formed on at least a portion of a portion of the base body exposed from a container via an opening. The portion of the base body exposed from a container via an opening is a portion to which light is easily incident. Thus, the generation of stray light can be suppressed. That is, the optical characteristics are improved.

[0021] The manufacturing method of the optical unit disclosed in the present invention includes: a first step of preparing a metal component; a second step of, after the first step, forming a substrate having a main surface and a back surface opposite to the main surface from the metal component; and a third step of, after the second step, roughening at least a portion of the substrate, the substrate including: a support portion for setting a vibration element; a first extension portion and a second extension portion extending from the support portion; a movable portion, which is arranged between the first extension portion and the second extension portion, and one side of the main surface is used to set the optical surface; and a first connecting portion connecting the first extension portion to the movable portion and a second connecting portion connecting the second extension portion to the movable portion. In the third step, at least a portion of at least any one of a first area on the support portion on the main surface that is closer to the movable portion than the position where the vibration element is set, a second area on the main surface corresponding to the first extension portion and the second extension portion, and a third area on the main surface or the back surface that is opposite to the vibration element is roughened.

[0022] Alternatively, the manufacturing method of the optical unit disclosed in the present invention includes: a first step of preparing a metal part; a second step of roughening the surface of the metal part after the first step; and a third step of forming a substrate having a roughened main surface and a roughened back surface on the opposite side of the main surface from the metal part after the second step, the substrate including: a supporting portion for setting a vibration element; a first extending portion and a second extending portion extending from the supporting portion; a movable portion, which is arranged between the first extending portion and the second extending portion, and one side of the main surface is used to set an optical surface; and a first connecting portion connecting the first extending portion and the movable portion, and a second connecting portion connecting the second extending portion and the movable portion.

[0023] For the reasons described above, any of these manufacturing methods can manufacture an optical unit having improved optical characteristics.

[0024] Effects of the Invention

[0025] According to the present disclosure, it is possible to provide an optical unit, an optical device, and a method for manufacturing an optical unit capable of improving optical characteristics. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a perspective view showing the optical device according to this embodiment.

[0027] Figure 2 Yes Figure 1 A part (cover portion) of the optical device is omitted in the perspective view shown.

[0028] Figure 3 Yes means Figure 1 and Figure 2 A plan view of the optical unit shown.

[0029] Figure 4 is along Figure 3 A cross-sectional view taken along line IV-IV.

[0030] Figure 5 Yes means Figure 3 , 4 A perspective view showing a step of a method for manufacturing an optical unit.

[0031] Figure 6 Yes means Figure 3 , 4 A perspective view showing a step of a method for manufacturing an optical unit.

[0032] Figure 7 Yes means Figure 3 , 4 A perspective view showing a step of a method for manufacturing an optical unit.

[0033] Figure 8It is a diagram showing an optical unit according to a first modified example.

[0034] Fig. 9 Yes means Figure 8 A perspective view showing a step of a method for manufacturing an optical unit.

[0035] Fig.10 Yes means Figure 8 A perspective view showing a step of a method for manufacturing an optical unit.

[0036] Fig.11 Yes means Figure 8 A perspective view showing a step of a method for manufacturing an optical unit.

[0037] Fig.12 It is a plan view showing an optical unit according to a second modification.

[0038] Fig.13 Yes means Fig.12 A plan view of a modified example of the stress relaxation portion and the setting portion shown.

[0039] Fig.14 It is a plan view showing an optical unit according to a third modified example.

[0040] Fig.15 It is a plan view showing an optical unit according to a fourth modified example.

[0041] Fig.16 It is a plan view showing an optical unit according to a fifth modification.

[0042] Fig.17 is along Fig.16 A cross-sectional view taken along line VII-VII.

[0043] Fig.18 It is a plan view showing an optical unit according to a sixth modification.

[0044] Fig.19 It is a plan view showing an optical unit according to a seventh modification.

[0045] Fig. 20 It is a perspective view showing an optical device according to a first modified example.

[0046] Fig.21 It is a perspective view showing an optical device according to a second modification.

[0047] Fig. 22 It is a perspective view showing an optical device according to a third modified example. DETAILED DESCRIPTION

[0048] An embodiment of the present disclosure is described in detail below with reference to the accompanying drawings. In addition, in each figure, the same elements or elements equivalent to each other are marked with the same symbols, and repeated descriptions are sometimes omitted. In addition, a rectangular coordinate system defined by an X-axis, a Y-axis, and a Z-axis is sometimes marked in each figure.

[0049] Figure 1 It is a perspective view showing the optical device according to this embodiment. Figure 2 Yes Figure 1 A portion of the optical device (cover) is omitted in the stereoscopic view. Figure 1 , 2 As shown, the optical device 100 includes an optical unit 1 and a container 110 for storing the optical unit 1. The container 110 has a main body 111 and a cover 112. As an example, the main body 111 is a rectangular box with one side open. A notch 111r is formed on one side wall of the main body 111.

[0050] The cover 112 is arranged on the main body 111 in a manner that the open part of the main body 111 is closed, and is installed on the main body 111 by a fixing member 114 such as a screw. An opening 112r is formed on the cover 112. Here, the opening 112r is sealed by a window member 113 made of a light-transmitting material. The window member 113 is parallel to the optical surface 20s and / or the main surface 5s described later. In addition, the opening 112r can also be open without the window member 113.

[0051] The optical device 100 further includes a wiring substrate 115. The wiring substrate 115 is provided inside the main body 111 on one side of the side wall where the notch 111r is formed, and is fixed to the main body 111. Electrodes 40 such as pads and a connector 50 are provided on the wiring substrate 115. The electrode 40 is electrically connected to one electrode of the optical unit 1 (an upper electrode 31 of the vibration element 30 described later) via wiring 41 such as a wire. Wiring (not shown) for electrically connecting the electrode 40 to the connector 50 and wiring (not shown) for electrically connecting another electrode of the optical unit 1 (a lower electrode 32 of the vibration element 30 described later) to the connector 50 are provided on the wiring substrate 115.

[0052] That is, the connector 50 is electrically connected to the vibration element 30 of the optical unit 1. A driving voltage can be supplied to the vibration element 30 from the outside of the optical device 100 via the connector 50. Next, the optical unit 1 will be described.

[0053] Figure 3 Yes means Figure 1 , 2 A plan view of the optical unit shown. Figure 4 is along Figure 3 In particular, Figure 4 (b) is Figure 4 The enlarged view of the area AR in (a). Figure 3 , 4 As shown, the optical unit 1 includes a substrate 5, an optical surface 20s and a vibration element 30. The substrate 5 is made of a metal such as iron, stainless steel, copper, permalloy, titanium, tungsten, molybdenum, etc., and is in a plate shape. The substrate 5 has a main surface 5s, a back surface 5r on the opposite side of the main surface 5s, and a side surface 5f connecting the main surface 5s and the back surface 5r to each other. Here, the direction from the back surface 5r to the main surface 5s (the thickness direction of the substrate 5) is set as the Z-axis direction. The optical surface 20s and the vibration element 30 are arranged on the main surface 5s of the substrate 5.

[0054] The base 5 includes a support portion 10, a first extension portion 11, a second extension portion 12, a first connection portion 13, a second connection portion 14, and a movable portion 15. The support portion 10, the first extension portion 11, the second extension portion 12, the first connection portion 13, the second connection portion 14, and the movable portion 15 are formed integrally with each other, and each includes a portion of the main surface 5s, the back surface 5r, and the side surface 5f. The support portion 10 is in a rectangular plate shape. The first extension portion 11 and the second extension portion 12 extend from one end (in one direction) of the support portion 10 in a state where they are spaced apart from each other.

[0055] As an example, the first extension portion 11 and the second extension portion 12 are of the same shape as each other, and extend parallel to each other in a manner where the intervals between them along the Y-axis direction are constant. Here, the extension direction of the first extension portion 11 and the second extension portion 12 is set to the X-axis direction, and the direction in which the first extension portion 11 and the second extension portion 12 are opposite to each other is set to the Y-axis direction. The first extension portion 11 and the second extension portion 12 are, for example, in the shape of an elongated rectangular plate (a rod with a rectangular cross-section). Here, the first extension portion 11 and the second extension portion 12 are supported by the support portion 10 only at one end in the X-axis direction, forming a cantilever beam. In addition, the first extension portion 11 and the second extension portion 12 may also have a portion extending in a direction intersecting the X-axis direction.

[0056] The movable portion 15 is disposed between the first extension portion 11 and the second extension portion 12. More specifically, the movable portion 15 is disposed in the middle of the first extension portion 11 and the second extension portion 12 in the Y-axis direction. The movable portion 15 is formed in a disk shape here, but can be configured in any shape according to the shape of the optical surface 20s, for example.

[0057] The first connecting portion 13 extends from the first extension portion 11 in the Y-axis direction and is connected to the movable portion 15. Thus, the first connecting portion 13 connects the first extension portion 11 and the movable portion 15 to each other. The second connecting portion 14 extends from the second extension portion 12 in the Y-axis direction and is connected to the movable portion 15. Thus, the second connecting portion 14 connects the second extension portion 12 and the movable portion 15 to each other. Here, the first connecting portion 13 and the second connecting portion 14 are arranged at the same position in the X-axis direction of the first extension portion 11 and the second extension portion 12. The first connecting portion 13 and the second connecting portion 14 are located on a single straight line in the Y-axis direction. According to the positional relationship between the first extension portion 11 and the second extension portion 12 and the movable portion 15, the length of the first connecting portion 13 in the Y-axis direction is the same as the length of the second connecting portion 14 in the Y-axis direction. Here, the first connecting portion 13 and the second connecting portion 14 have the same shape.

[0058] The first connecting portion 13 and the second connecting portion 14 are in the shape of an elongated rectangular plate (a bar having a rectangular cross section). As described later, the first connecting portion 13 and the second connecting portion 14 function as a torsion bar that is elastically deformed in a twisting manner in accordance with the deformation (displacement) of the first extending portion 11 and the second extending portion 12. The movable portion 15 is supported via the first connecting portion 13 and the second connecting portion 14, and swings (is supported to be swingable) around an axis along the Y-axis direction in accordance with the elastic deformation of the first connecting portion 13 and the second connecting portion 14.

[0059] The optical unit 1 also has an optical component 20. The optical component 20 is formed in a disk shape, and one surface is an optical surface 20s. The optical component 20 is mounted on the movable part 15 in a manner that the surface on the opposite side of the optical surface 20s faces the main surface 5s, that is, the optical surface 20s faces the side opposite to the main surface 5s. Therefore, in the optical unit 1, the optical surface 20s is arranged on the main surface 5s in the movable part 15. The optical surface 20s (the center of the optical surface 20s) is arranged in the middle position of the first extension part 11 and the second extension part 12 in the Y-axis direction. Here, the base 5 and the optical surface 20s are linearly symmetrical about a straight line passing through the center of the optical surface 20s and along the X-axis direction. The optical surface 20s is, for example, a reflective mirror surface (reflection surface). In this case, the optical component 20 is formed of a semiconductor material such as silicon or glass, and the optical surface 20s is formed by forming a reflective film on one surface. In addition, the reflective film on one surface of the optical component 20 can be omitted. That is, one surface of the optical component 20 itself can also be used as the optical surface 20s.

[0060] The vibration element 30 is arranged on the support portion 10. Here, the vibration element 30 is arranged on the main surface 5s. An upper electrode 31 is provided on the surface of the vibration element 30 on the side opposite to the main surface 5s. A lower electrode 32 is provided between the vibration element 30 and the main surface 5s. The upper electrode 31 is in contact with (electrically connected to) the vibration element 30. Here, the lower electrode 32 is in contact with (electrically connected to) the vibration element 30 and the support portion 10. That is, the vibration element 30 is bonded to the main surface 5s through the lower electrode 32. However, a conductive adhesive layer may also be provided between the main surface 5s and the lower electrode 32 and / or between the lower electrode 32 and the vibration element 30. In this case, the conductive adhesive layer facilitates the bonding of the vibration element 30 to the main surface 5s.

[0061] As described above, the vibration element 30 is electrically connected to the base 5 via the lower electrode 32 (and the conductive adhesive layer). The base 5 (i.e., the optical unit 1) is fixed to the wiring substrate 115, for example, by a conductive adhesive layer or mechanical fixing, and is electrically connected to the wiring connected to the connector 50 of the wiring substrate 115. That is, the vibration element 30 is electrically connected to the connector 50 via the upper electrode 31, the wiring 41, the electrode 40, and the wiring substrate 115. Furthermore, the vibration element 30 is electrically connected to the connector 50 via the lower electrode 32 (and the conductive adhesive layer) and the wiring substrate 115. Therefore, the upper electrode 31 and the lower electrode 32 are used for electrical connection between the vibration element 30 and the outside (the outside of the optical unit 1).

[0062] Thus, the vibration element 30 is deformed and / or vibrated according to the driving voltage supplied from the outside via the connector 50, thereby vibrating the support portion 10. Thus, the vibration element 30 induces torsional vibration (torsional resonance) in the first connecting portion 13 and the second connecting portion 14 via the vibration of the support portion 10, and causes the movable portion 15 and the optical surface 20s to swing. That is, in the optical unit 1, the torsional resonance system of the first connecting portion 13, the second connecting portion 14, the movable portion 15, and the optical component 20 and the vibration element 30 are arranged at separate positions, and a Lamb wave resonance structure is adopted, thereby generating torsional resonance with high driving efficiency.

[0063] The vibration element 30 is provided on the support portion 10 in such a manner that the center of the vibration element 30 coincides with the center of the movable portion 15 and the optical surface 20s in the Y-axis direction. That is, the vibration element 30 is arranged in the middle position between the first extension portion 11 and the second extension portion 12 in the Y-axis direction. The position of the vibration element 30 in the X-axis direction can be arbitrarily set according to the form of torsional vibration to be induced. The vibration element 30 is composed of a piezoelectric body, for example.

[0064] In the optical device 100 as described above, light (e.g., laser light) is incident into the container 110 via the window member 113 and the opening 112r of the cover 112. The light incident into the container 110 is reflected by the optical surface 20s and is emitted to the outside via the window member 113 and the opening 112r. The optical surface 20s swings periodically. Therefore, the direction of light emitted from the container 110 changes periodically and continuously with the swing of the optical surface 20s. Thus, the optical device 100 can function as an optical scanning device. In this case, the scanning direction of the light is the X-axis direction.

[0065] Here, in the optical unit 1, a pear skin surface (dark glossy surface) is formed on at least a part of at least any one of the first region R1 on the support portion 10 on the main surface 5s, which is closer to the movable portion 15 than the position where the vibration element 30 is provided, the second region R2 on the main surface 5s corresponding to the first extension portion 11 and the second extension portion 12, and the third region R3 on the main surface 5s, which is opposite to the vibration element 30. The first region R1 is a region that is closer to the movable portion 15 side (positive side in the X-axis direction) than the straight line L1, which passes through the outer edge of the movable portion 15 side of the vibration element 30 as a boundary. The second region R2 is a surface of the first extension portion 11 and the second extension portion 12. The third region R3 is a region that overlaps with the vibration element 30 when viewed from the Z-axis direction.

[0066] In the present embodiment, the first region R1, the second region R2, and the third region R3 are formed with a pear-skin surface as a whole. More specifically, the pear-skin surface is formed on the entire main surface 5s, the entire back surface 5r, and at least a portion of the side surface 5f (the area of ​​the side surface 5f where the pear-skin surface is formed will be described later). That is, in addition to the first region R1 to the third region R3 described above, the pear-skin surface is also formed on the area corresponding to the first connecting portion 13 and the second connecting portion 14 in the main surface 5s and the area corresponding to the movable portion 15 in the main surface 5s.

[0067] In addition, as an example, the pear skin surface here refers to a surface having a surface roughness Ra greater than 0.4 (μm). Alternatively, the pear skin surface here may be a surface that has been roughened so that the surface roughness Ra is 6.3 (μm) or more. On the other hand, a surface having a surface roughness Ra less than 6.3 (μm) is sometimes referred to as a flat surface. Moreover, a surface having a surface roughness Ra of 0.4 (μm) or less may be a mirror surface. The height or spacing of the bumps on the pear skin surface may be regular or irregular. Alternatively, the bumps on the pear skin surface may have or may not have directionality.

[0068] Next, a method for manufacturing the above-mentioned optical unit 1 will be described. Figures 5 to 7 Yes means Figure 3 , 4 A perspective view of a step in the manufacturing method of an optical unit shown in FIG. Figure 5 As shown in (a), a rectangular plate-shaped metal plate (metal member) 5A is prepared (first step). The metal plate 5A has a main surface 5As, a back surface 5Ar opposite to the main surface 5As, and a side surface 5Af connecting the main surface 5As and the back surface 5Ar.

[0069] Then, if Figure 5 As shown in (b), at least a portion of the surface (main surface 5As, back surface 5Ar and side surface 5Af) of the metal plate 5A is roughened to form the metal plate 5B (second step). Here, as an example, the metal plate 5B is formed by roughening the entire surface of the metal plate 5A. The metal plate 5B has a roughened main surface 5Bs, a back surface 5Br and a side surface 5Bf. As a roughening method, laser ablation, etching or mechanical grinding can be cited. Here, because the entire surface of the metal plate 5A is roughened at the same time, as a roughening method, a method of etching by immersing the entire metal plate 5A in an etching solution can be used (other methods may also be used). In addition, the roughening here refers to the formation of the above-mentioned pear skin surface.

[0070] Then, if Figure 6 As shown in (a), a part of the metal plate 5B is removed (cut off) to form a metal plate 5C including a plurality of (here, three) substrates 5 (third step). Each substrate 5 is a part 1A that will later become the optical unit 1. As a method of removing a part of the metal plate 5B, stamping or etching can be used. The substrate 5 includes a roughened (i.e., pear-skinned) main surface 5s, a back surface 5r, and a side surface 5f that is partially roughened. The area of ​​the side surface 5f that was originally the side surface 5Bf of the metal plate 5B is roughened to form a pear-skinned surface, and the area newly formed in the third step is not roughened and is a flat surface.

[0071] That is, in the optical unit 1 manufactured by this manufacturing method, at least a portion of the side surface 5f is a flat surface. The flat surface area of ​​the side surface 5f is an area of ​​the support portion 10 facing the movable portion 15, an area of ​​the first extension portion 11 and the second extension portion 12 facing each other, an area corresponding to both side surfaces of the first connection portion 13 and the second connection portion 14, and an area corresponding to the outer side surface of the movable portion 15.

[0072] In addition, the order of the second step and the third step can be reversed. In this case, after a portion of the metal plate 5A is removed and a metal plate 5C including a plurality of substrates 5 is formed from the metal plate 5A, at least a portion of the surface of the metal plate 5C is roughened. At this time, when the entire surface of the metal plate 5C is roughened, the side surface 5f of the substrate 5 is roughened as a whole. That is, in the optical unit 1 manufactured in this case, a pear-skin surface is formed on the entire side surface 5f. On the other hand, when a portion of the surface of the metal plate 5C is roughened, at least a portion of at least any one of the first region R1, the second region R2, and the third region R3 in the main surface 5s of the substrate 5 can be selectively roughened. For example, laser ablation can be used as a method of selective roughening.

[0073] In subsequent steps, such as Figure 6 As shown in (b), the vibration element 30 (and the upper electrode 31 and the lower electrode 32) are formed on the support portion 10 of each substrate 5 (the fourth step). Thus, the plate component 5D including a plurality of units 1B composed of the substrate 5 and the vibration element 30 is formed. In the case where the vibration element 30 is a piezoelectric body, as a method for forming the piezoelectric body, for example, a printing method, pasting a piezoelectric body sheet, film formation and patterning by a vapor phase growth method, or film formation and patterning by a liquid phase growth method can be used.

[0074] Then, if Figure 7 As shown in (a), an optical surface 20s is provided on the movable portion 15 of each base 5 (fifth step). Here, the optical surface 20s is provided on the movable portion 15 by mounting the optical component 20 including the optical surface 20s on the movable portion 15. Thus, a plate component 5E including a plurality of optical units 1 is formed. In addition, the order of the fourth step and the fifth step can be reversed.

[0075] Afterwards, if Figure 7 As shown in (b), by cutting off each optical unit 1 (sixth step), a single-chip optical unit 1 is obtained. In addition, the order of the fifth step and the sixth step can be reversed. In addition, in the above manufacturing method, a method for manufacturing a plurality of optical units 1 at a time is described, but the optical units 1 can also be manufactured one by one. In this case, the sixth step is not required.

[0076] As described above, in the optical unit 1, the vibration element 30 provided on the support portion 10 of the base 5 causes the support portion 10 to vibrate, thereby inducing torsional vibration in the first connecting portion 13 and the second connecting portion 14 of the base 5, and causing the movable portion 15 provided with the optical surface 20s to swing. Thus, by causing light to be incident on the optical surface 20s swinging through the movable portion 15, various optical functions such as light scanning can be realized. In particular, in the optical unit 1, a pear skin surface is formed in at least a part of at least any one of the first region R1 on the support portion 10 on the main surface 5s of the base 5 provided with the optical surface 20s, which is closer to the movable portion 15 than the position where the vibration element 30 is provided, the second region R2 corresponding to the first extension portion 11 and the second extension portion 12, and the third region R3 on the main surface 5s which is opposite to the vibration element 30.

[0077] The first region R1 and the second region R2 are regions of the main surface 5s that are relatively close to the optical surface 20s (movable portion 15) and to which light is easily incident. Therefore, when a pear-skin surface is formed in the first region R1 and / or the second region R2, the generation of stray light can be suppressed. That is, the optical characteristics are improved. In addition, when a pear-skin surface is formed in the third region R3, the adhesion of the vibration element 30 (the layer that helps the vibration element 30 to be bonded) on the third region R3 is improved, and the bonding between the vibration element 30 and the main surface 5s is strengthened. By firmly bonding the vibration element 30 to the main surface 5s, it is possible to reliably induce torsional vibrations in the first connecting portion 13 and the second connecting portion 14 as the vibration of the vibration element 30 causes the optical surface 20s (movable portion 15) to swing. As a result, the optical characteristics are also improved in this case.

[0078] In the optical unit 1, the base 5 is made of metal. Therefore, it is considered desirable to form the surface of the base 5 into a flat surface from the viewpoint of maintaining the strength of the base 5 and suppressing rusting of the base 5. In contrast, as described above, the optical unit 1 forms a flat surface on the surface of the base 5 from the viewpoint of improving optical characteristics.

[0079] In addition, in the optical unit 1, the vibration element 30 is arranged on the main surface 5s, and a pear skin surface is formed in the first region R1, the second region R2, and the third region R3. Therefore, the optical characteristics are reliably improved. In addition, in the optical unit 1, because the pear skin surface is formed on the entire main surface 5s, the optical characteristics are more reliably improved. In addition, in this case, since the entire main surface 5s can be roughened at the same time when the pear skin surface is formed, the manufacturing becomes easy. Moreover, in the optical unit 1, because the pear skin surface is also formed on at least a portion of the side 5f, the stray light generated by the side 5f is suppressed, and the optical characteristics are more reliably improved.

[0080] Furthermore, if the order of the second step and the third step is reversed in the above-mentioned manufacturing method, and the surface of the metal plate 5C is roughened after the metal plate 5C including the plurality of substrates 5 is formed, that is, when the entire surface of the metal plate 5C is roughened, the entire side surface 5f of the substrate 5 is roughened. In this case, the entire side surface 5f is formed as a pear skin surface in the optical unit 1. Therefore, in this case, the optical characteristics can be more reliably improved.

[0081] Furthermore, according to the above-described method of manufacturing the optical unit 1 , the optical unit 1 having improved optical characteristics can be manufactured for the same reason.

[0082] The above embodiment is an example of the present disclosure. Therefore, the present disclosure is not limited to the above example, and various modifications are possible. Next, a modification example is described.

[0083] [First Modification of the Optical Unit]

[0084] Figure 8 It is a diagram showing an optical unit according to a first modified example. Figure 8 (a) is a plane diagram, Figure 8 (b) is a cross-sectional view along line VIII-VIII. Figure 8 As shown, the optical unit 2A according to the first modification example is different from the optical unit 1 in that it does not include the optical component 20 , but is identical to the optical unit 1 in other respects.

[0085] In the optical unit 2A, the optical surface 20s is directly provided on the main surface 5s in the movable part 15s. For example, by mirroring the main surface 5s in the movable part 15s, the optical surface 20s is directly formed on the main surface 5s as a reflection mirror surface (reflection surface). In other words, in the optical unit 2A, the area of ​​the main surface 5s corresponding to the movable part 15s is the optical surface 20s. As an example, the optical unit 2A can be manufactured as follows.

[0086] Figures 9-11 Yes means Figure 8 1 is a perspective view of a step in the method for manufacturing an optical unit. In the method for manufacturing an optical unit 2A, first, Fig. 9 As shown in (a), a metal plate (metal component) 6A is prepared (first step). The metal plate 6A has a main surface 6As, a back surface 6Ar on the opposite side of the main surface 6As, and a side surface 6Af connecting the main surface 6As and the back surface 6Ar to each other. Among the surfaces of the metal plate 6A, at least the main surface 6As has been mirror-finished. That is, in the first step, a metal plate 6A whose main surface 6As has been mirror-finished is prepared.

[0087] Then, if Fig. 9As shown in (b), after forming a mask 61 on the main surface 6As, the surface of the metal plate 6A is roughened to form a metal plate 6B having a roughened main surface 6Bs, a back surface 6Br, and a side surface 6Bf (second step). Here, the mask 61 is provided in the area which will later become the movable part 15. As a result, in the metal plate 6B, a mirror surface remains in the area where the mask 61 is provided, forming an optical surface 20s.

[0088] Then, if Fig.10 As shown in (b), a portion of the metal plate 6B is removed (cut off) to form a metal plate 6C including a plurality (here, three) of units 2B consisting of a substrate 5 and an optical surface 20s (third step). The substrate 5 includes a roughened (i.e., pear-skinned) main surface 5s, a back surface 5r, and a partially roughened side surface 5f. The area of ​​the side surface 5f that was originally the side surface 6Bf of the metal plate 6B is roughened, and the area newly formed in the third step is not roughened.

[0089] In addition, the order of the second step and the third step can be reversed. In this case, after a portion of the metal plate 6A is removed to form a metal plate 6C including a plurality of substrates 5, a mask 61 is provided on the metal plate 6C to perform surface roughening. In the subsequent steps, as shown in FIG. Fig.11 As shown in (a), the vibration element 30 (and the upper electrode 31 and the lower electrode 32) are formed on the support portion 10 of each base 5 (fourth step). Thus, the plate member 6D including the plurality of optical cells 2A is formed.

[0090] Afterwards, if Fig.11 As shown in (b), the individual optical units 2A are cut off (the sixth step) to obtain the individual optical units 2A. In the above manufacturing method, the method of manufacturing a plurality of optical units 2A at once is described, but the optical units 2A may also be manufactured one by one. In this case, the sixth step is not required.

[0091] The above optical unit 2A suppresses stray light and strengthens the bonding of the vibration element 30 by forming a pear skin surface, similarly to the optical unit 1, thereby achieving improved optical characteristics. In addition, in the optical unit 2A, since the optical surface 20s is directly formed on the main surface 5s of the movable part 15s, it is not necessary to prepare an optical component 20 that is separate from the base 5, thereby achieving cost reduction. Moreover, according to the optical unit 2A, compared with the case of using the optical component 20, the warping of the optical surface 20s is suppressed.

[0092] [Second Modification of Optical Unit]

[0093] Fig.12 is a plan view showing an optical unit according to a second modified example. Fig.12As shown, the optical unit 2C of the second modified example is different from the optical unit 1 in that it has a stress relief portion 16, but is identical to the optical unit 1 in other aspects. The stress relief portion 16 is used to relieve stress caused by the torsion of the first connecting portion 13 and the second connecting portion 14. Therefore, the stress relief portion 16 is located between the optical surface 20s and the first connecting portion 13, and between the optical surface 20s and the second connecting portion 14.

[0094] More specifically, in the optical unit 2C, the movable portion 15 includes a stress relief portion 16 and a setting portion 17 for setting the optical surface 20s. That is, in the second modified example, the stress relief portion 16 is formed on the base 5 as a part of the movable portion 15. The stress relief portion 16 includes a first portion 16a connected to the first connecting portion 13 and a second portion 16b connected to the second connecting portion 14. The first portion 16a branches from the first connecting portion 13 in two directions, the positive side and the negative side in the X-axis direction, while extending toward the second connecting portion 14. The second portion 16b extends from the second connecting portion 14 in two directions, the positive side and the negative side in the X-axis direction, while extending toward the first connecting portion 13.

[0095] The first portion 16a and the second portion 16b are connected to each other at the middle position of the first extension portion 11 and the second extension portion 12 in the Y-axis direction and are integrated to form a ring shape as a whole. Here, the first portion 16a and the second portion 16b are respectively in the shape of an arc (semicircle), and are integrated to form a ring shape. The width of each of the first portion 16a and the second portion 16b (the dimension in the direction intersecting the Z-axis direction and the extension direction) is smaller than the width of the first connecting portion 13 and the second connecting portion 14 and the width of the setting portion 17.

[0096] The installation part 17 extends in the X-axis direction in a manner (here, in a straight line) over a pair of connecting parts of the first part 16a and the second part 16b. Here, the optical surface 20s is provided on the installation part 17 by installing the optical component 20 on the installation part 17. However, the optical surface 20s may be directly provided on the installation part 17 by mirror-finishing the main surface 5s of the installation part 17.

[0097] The above optical unit 2C is also similar to the optical unit 1, and can suppress stray light and strengthen the bonding of the vibration element 30 by forming a pear skin surface, thereby achieving improved optical characteristics. In addition, in the optical unit 2C, the transmission path of the stress caused by the torsion of the first connecting portion 13 is divided by the first part 16a branched in two directions in the stress relief portion 16, and the transmission path of the stress caused by the torsion of the second connecting portion 14 is similarly divided by the second part 16b branched in two directions. Moreover, because the widths of the first part 16a and the second part 16b of the stress relief portion 16 are relatively small, the stress relief portion 16 is deformed preferentially. As a result, the stress caused by the torsion of the first connecting portion 13 and the second connecting portion 14 is relieved in the stress relief portion 16, and the optical surface 20s is suppressed from being flexed via the setting portion 17. As a result, the optical characteristics are further improved.

[0098] Here, the stress relief portion 16 and the setting portion 17 (i.e., the movable portion 15) can be configured as a flat surface instead of a pear-skin surface on the side 5f. In the optical unit 2C, by providing the stress relief portion 16 on the movable portion 15, the area of ​​the region corresponding to the movable portion 15 on the side 5f becomes larger. Therefore, by configuring the region corresponding to the movable portion 15 on the side 5f as a flat surface, the effect of suppressing the reduction in strength is relatively large. In addition, in this case, compared with the case where a pear-skin surface is formed on the region corresponding to the movable portion 15 on the side 5f, a structure closer to the design value can be formed, and the movement of the movable portion 15 can be stabilized, and the stabilization of the optical characteristics can be achieved.

[0099] In addition, the shapes of the stress relief portion 16 and the setting portion 17 are not limited to the above-mentioned examples. Fig.13 As shown in (a), the setting portion 17 is provided in a manner extending in the Y-axis direction. In this case, the first portion 16a and the second portion 16b of the stress relief portion 16 are respectively branched from the first connecting portion 13 and the second connecting portion 14 in the positive and negative directions of the X-axis direction, and the branch portions are connected to each other again, so as to extend in a ring shape. Next, the setting portion 17 is extended linearly in the Y-axis direction in a manner of being bridged over the first portion 16a and the second portion 16b. In this case, the first portion 16a and the second portion 16b are connected via the setting portion 17.

[0100] In addition, as another example, Fig.13As shown in (b), a plurality of (here two) setting portions 17 are provided. Here, a pair of setting portions 17 extend in the X-axis direction while being spaced apart from each other. In this case, the first portion 16a and the second portion 16b of the stress relief portion 16 are composed of a portion extending in the X-axis direction (linearly) while branching from the first connecting portion 13 and the second connecting portion 14 in both the positive and negative directions of the X-axis direction, and a portion extending in the Y-axis direction (linearly) from the end of the portion. The first portion 16a and the second portion 16b are connected to each other and integrated in the portion extending in the Y-axis direction, and are annular (here a rectangular annular shape) as a whole. Next, the setting portion 17 extends linearly in the X-axis direction in a manner of being mounted on the first portion 16a and the second portion 16b.

[0101] Furthermore, the above-mentioned example describes an example in which the first portion 16a and the second portion 16b of the stress relief portion 16 are respectively branched in two directions from the first connecting portion 13 and the second connecting portion 14. However, the first portion 16a and the second portion 16b may also be configured to branch in three or more directions from the first connecting portion 13 and the second connecting portion 14. That is, here, the stress relief portion 16 is a portion that is provided integrally with the base 5 between the optical surface 20s and the first connecting portion 13 and between the optical surface 20s and the second connecting portion 14 and branches into a plurality of portions.

[0102] [Third Modification of Optical Unit]

[0103] Fig.14 FIG. 2 is a plan view showing an optical unit according to a third modified example. Fig.14 As shown, the optical unit 2D of the third modification example is different from the optical unit 1 in that it has a stress relieving portion 21 and in the shape of the movable portion 15, but is identical to the optical unit 1 in other aspects. The stress relieving portion 21 is used to relieve stress caused by the torsion of the first connecting portion 13 and the second connecting portion 14, as in the second modification example. Therefore, the stress relieving portion 21 is located between the optical surface 20s and the first connecting portion 13, and between the optical surface 20s and the second connecting portion 14, as in the second modification example.

[0104] However, in the third modified example, the stress relief portion 21 is formed integrally with the optical component 20. That is, the stress relief portion 21 is provided around the optical component 20 in an annular shape (here, in a circular ring shape) so as to surround the optical component 20 as viewed from the Z-axis direction. A more specific description will be given. Here, the first connecting portion 13 and the second connecting portion 14 are connected to each other at the center position of the first extension portion 11 and the second extension portion 12 in the Y-axis direction, and the movable portion 15 extends from the connection portion between the first extension portion 11 and the second extension portion 12 to both sides (in a straight line) in the X-axis direction.

[0105] Furthermore, the stress relief portion 21 includes a first portion 21a fixed to a portion of the movable portion 15 on one side in the X-axis direction and a second portion 21b fixed to a portion of the movable portion 15 on the other side in the X-axis direction. The first portion 21a branches from a fixed portion 22a fixed to the movable portion 15 in two directions, the positive side and the negative side in the Y-axis direction, while extending in the X-axis direction. The second portion 21b branches from a fixed portion 22b fixed to the movable portion 15 in two directions, the positive side and the negative side in the Y-axis direction, while extending in the X-axis direction. The first portion 21a and the second portion 21b are connected to each other and integrated at positions overlapping the first connecting portion 13 and the second connecting portion 14, respectively, as viewed from the Z-axis direction, and are annular in shape as a whole.

[0106] Here, the first part 21a and the second part 21b are respectively in the shape of an arc (semicircle), and are integrated with each other to form an annular ring. The width of each of the first part 21a and the second part 21b (the dimension in the direction intersecting the Z-axis direction and the extension direction) is smaller than the width of the first connecting part 13 and the second connecting part 14 and the width of the movable part 15. The optical component 20 and the stress relief part 21 are connected to each other and integrated (formed in one piece by the same material as the optical component 20) by a pair of connecting parts 23 provided at the connecting part of the first part 21a and the second part 21b. On the other hand, the optical component 20 and the stress relief part 21 are separated in the part other than the connecting part 23, and a space is formed between each other. In addition, the optical surface 20s is spaced apart from the movable part 15 in the Z-axis direction.

[0107] The above optical unit 2D is also similar to the optical unit 1, and can suppress stray light and strengthen the bonding of the vibration element 30 by forming a pear skin surface, thereby achieving improved optical characteristics. In addition, in the optical unit 2D, the transmission path of the stress caused by the torsion of the first connecting portion 13 and the second connecting portion 14 is divided by the first part 21a branching in two directions from the fixed portion 22a fixed to the movable portion 15, and is divided by the second part 21b branching in two directions from the fixed portion 22b fixed to the movable portion 15. Moreover, because the widths of the first part 21a and the second part 21b of the stress relief portion 21 are relatively small, the stress relief portion 21 is deformed preferentially. As a result, the stress caused by the torsion of the first connecting portion 13 and the second connecting portion 14 is relieved in the stress relief portion 21, and the deflection of the optical surface 20s is suppressed. As a result, the optical characteristics are further improved.

[0108] In the above example, the first part 21a and the second part 21b of the stress relief part 21 are respectively branched in two directions from the fixed parts 22a and 22b fixed to the movable part 15. However, the first part 21a and the second part 21b can also be configured to branch in three or more directions from the fixed parts 22a and 22b. That is, here, the stress relief part 21 is a part that is provided as a whole with the optical component 20 between the optical surface 20s and the first connecting part 13, and between the optical surface 20s and the second connecting part 14 (separate from the base 5) and branches into a plurality of parts.

[0109] [Fourth Modification of Optical Unit]

[0110] Fig.15 is a plan view showing an optical unit according to a fourth variation. Fig.15 As shown, the optical unit 2E of the fourth modification example is different from the optical unit 1 in that it includes an optical component 60 instead of the optical component 20 and in the shape of the movable portion 15 , but is identical to the optical unit 1 in other aspects.

[0111] Here, an opening 15p is formed in the movable part 15. Here, the movable part 15 is in the shape of a ring with a circular opening 15p, but it can also be other shapes. The optical component 60 is installed on the movable part 15 in a manner such that its center coincides with the center of the opening 15p. More specifically, as an example, the optical component 60 is formed in the shape of a circular plate, including an optical surface 60s and an optical surface 60r on the opposite side of the optical surface 60s. The optical component 60 is installed on the movable part 15 in a manner such that the optical surface 60r faces the main surface 5s, that is, in a manner such that the optical surface 60s is located on the side opposite to the main surface 5s. Therefore, in the optical unit 2E, a pair of optical surfaces 60s and 60r are arranged on the main surface 5s in the movable part 15. The optical component 60 is made of a light-transmitting material.

[0112] As an example, such an optical component 60 may be configured as a spectroscopic filter. In this case, by forming an antireflection film on the optical surface 60s as the incident surface of light and forming a spectroscopic filter on the optical surface 60r as the exit surface of light, the optical unit 2E may be configured as a spectroscopic element in which the wavelength of the transmitted light changes with the swing angle of the movable part 15.

[0113] By using such a spectroscopic element, it is possible to construct a spectroscopic device that allows light emitted from a light source and transmitted or reflected from a measurement object to pass through the spectroscopic element (or further reflected or split by the spectroscopic element) and be detected by a light detector. Alternatively, by arranging such a spectroscopic element together with a laser medium inside an optical resonant cavity, it is possible to construct a wavelength-variable light source that outputs light transmitted from the spectroscopic element and amplified by the optical resonant cavity. In addition, a transmission-type grating (or a reflection-type grating) can be used instead of a spectroscopic filter. Moreover, by making the optical component 60 a transmission-refractive element, the optical unit 2E can be constructed as an optical path changer.

[0114] The optical unit 2E configured as a transmission type as described above can also suppress stray light and strengthen the bonding of the vibration element 30 by forming a pear-skin surface, similarly to the optical unit 1, thereby achieving improved optical characteristics.

[0115] [Fifth Modification of Optical Unit]

[0116] Fig.16 It is a plan view showing an optical unit according to a fifth modification. Fig.17 is along Fig.16 The cross-sectional view of the line VII-VII. Fig.16 , 17 As shown, the optical unit 2F according to the fifth modification example is different from the optical unit 1 in the electrical connection structure of the vibration element 30 , and is identical to the optical unit 1 in other respects.

[0117] That is, in the optical unit 2F, the upper electrode 31 extends from the vibration element 30 on the support portion 10. More specifically, the upper electrode 31 is located on the support portion 10 and the vibration element 30, and includes a first portion 31a in contact with the vibration element 30, and a second portion 31b provided on the support portion 10 in a manner extending from the first portion 31a toward the outer edge of the support portion 10. An insulating layer 33 is provided between the second portion 31b and the support portion 10 (the main surface 5s).

[0118] The first portion 31a is a portion of the upper electrode 31 that overlaps with the vibration element 30 when viewed from the Z-axis direction. The second portion 31b is a portion of the upper electrode 31 that does not overlap with the vibration element 30 when viewed from the Z-axis direction (a portion that extends from the vibration element 30). When viewed from the Z-axis direction, the shortest distance between the second portion 31b and the outer edge of the support portion 10 is smaller than the shortest distance between the first portion 31a and the outer edge of the support portion 10.

[0119] The above optical unit 2F is similar to the optical unit 1, and can suppress stray light and strengthen the bonding of the vibration element 30 by forming a pear skin surface, thereby achieving improved optical characteristics. In addition, in the optical unit 2F, by providing wiring such as leads (for example, wiring 41 of the optical device 100) in the second part 31b extending toward the outer edge of the support part 10, it is possible to electrically connect the vibration element 30 to the outside. Therefore, compared with the case where wiring such as leads is directly extended to the vibration element 30 from the outside, the wiring such as leads is shortened and can be stably connected. In addition, the outside here refers to a structure outside the optical unit 2F. In an optical device (for example, the optical device 100) having the optical unit 2F, it can be a structure inside the optical device, such as a substrate on which the optical unit 2F is installed (for example, the wiring substrate 115 of the optical device 100).

[0120] [Sixth Modification of Optical Unit]

[0121] Fig.18 is a plan view showing an optical unit according to a sixth variation. Fig.18 As shown, the optical unit 2G according to the sixth modification example is different from the optical unit 1 in the electrical connection structure of the vibration element 30 corresponding to the shape of the support portion 10 , and is identical to the optical unit 1 in other respects.

[0122] That is, in the optical unit 2G, an opening 10p is formed in the support portion 10. The opening 10p is a through hole that penetrates the base 5 in the support portion 10. The opening 10p is formed in the support portion 10 so that, when viewed from the Z-axis direction, the shortest distance between the inner edge of the opening 10p and the outer edge of the support portion 10 is smaller than the shortest distance between the vibration element 30 (upper electrode 31) and the outer edge of the support portion 10. The optical unit 2G is mounted on the wiring substrate 115 in such a manner that the electrode 40 provided on the wiring substrate 115 is exposed from the opening 10p to the main surface 5s side. Moreover, the wiring 41 is connected to the electrode 40 and the vibration element 30 (upper electrode 31) via the opening 10p.

[0123] The optical unit 2G can also improve optical characteristics by forming a pear-skin surface to suppress stray light and strengthen the bonding of the vibration element 30, similarly to the optical unit 1. In addition, similarly to the optical unit 2F, the optical unit 2G can also shorten the wiring 41 such as electric wires, thereby enabling stable connection.

[0124] [Seventh Modification of Optical Unit]

[0125] Fig.19 FIG. 2 is a plan view showing an optical unit according to a seventh variation. Fig.19As shown in FIG. 1 , the optical unit 2H of the seventh modification example is different from the optical unit 1 in the range of forming the pear skin surface, and is identical to the optical unit 1 in other aspects. In the optical unit 2H, the pear skin surface is formed on the portion of the base 5 exposed from the opening 112r provided in the cover 112 of the container 110. The portion of the base 5 exposed from the opening 112r is a portion of the base 5 including the movable portion 15 (that is, the optical surface 20s), and is located on the inner side of the opening 112r when viewed from the Z-axis direction.

[0126] Here, the fourth region R4 including the entire region exposed from the opening 112r in the main surface 5s of the substrate 5 is formed with a pear skin surface as a whole. On the other hand, the region R5 other than the fourth region R4 in the main surface 5s of the substrate 5 is not formed with a pear skin surface (constituting a flat surface). As shown in the figure, the fourth region R4 may not reach the straight line L1 passing through the outer edge of the movable part 15 on one side of the vibration element 30, or may extend beyond the straight line L1. In addition, it is not limited to the case where the pear skin surface is formed on the entire portion of the substrate 5 exposed from the opening 112r, as long as the pear skin surface is formed on at least a portion. Fig.19 In FIG. 1 , hatching is indicated in the fourth region R4 for convenience.

[0127] The above optical unit 2H can also suppress stray light by forming a pear-skin surface similarly to the optical unit 1, thereby improving the optical characteristics.

[0128] [First Modification of Optical Device]

[0129] Fig. 20 is a perspective view showing an optical device according to a first variant. Fig. 20 As shown, the optical device 100A is different from the optical device 100 in that it includes a container 110A instead of the container 110 , and is identical to the optical device 100 in other respects.

[0130] The container 110A further includes a frame 116A disposed on the cover 112. The frame 116A is disposed on the cover 112 in an upright manner along the inner edge of the opening 112r of the cover 112. A window member 113 is mounted on the top of the frame 116A to seal the opening 112r. The height of the frame 116A relative to the cover 112 decreases (or increases) as it moves from one side of the Y-axis direction to the other side. Therefore, the window member 113 is tilted in the Y-axis direction (a direction orthogonal to the scanning direction of the light). By tilting the window member 113 in this way, stray light emitted to the outside through the window member 113 can be suppressed.

[0131] [Second Modification of Optical Device]

[0132] Fig.21 is a perspective view showing an optical device according to a second variant. Fig.21As shown, the optical device 100B is different from the optical device 100 in that it includes a container 110B instead of the container 110 , and is identical to the optical device 100 in other respects.

[0133] The container 110B also has a frame 116B provided on the cover 112. The frame 116B is provided on the cover 112 along the inner edge of the opening 112r of the cover 112. A window member 113 is installed on the top of the frame 116B to seal the opening 112r. The height of the frame 116B relative to the cover 112 decreases (or increases) as it goes from one side of the X-axis direction to the other side. Therefore, the window member 113 is tilted in the X-axis direction (the scanning direction of the light). By tilting the window member 113 in this way, stray light emitted to the outside through the window member 113 can be suppressed.

[0134] [Third Modification of Optical Device]

[0135] Fig. 22 It is a perspective view showing an optical device according to a third modified example. Fig. 22 The container 110 and the wiring substrate 115 are omitted. Fig. 22 As shown, the optical device 100C of the third modification example is different from the optical device 100 in that it further includes a light source 71 and a detector 72 , and is identical to the optical device 100 in other aspects.

[0136] The light source 71 outputs light C (e.g., laser). The detector 72 is arranged on the optical axis of the light C output from the light source 71, and is used to detect the light C. The detector 72 may be, for example, a single-element PD or APD, SiPM, or an array or sensor or image sensor thereof, or a position detection sensor. The light source 71 and the detector 72 are arranged so that the optical axis of the light C can interfere with a portion of the substrate 5 due to the displacement of the substrate 5 corresponding to the vibration of the vibration element 30. Fig. 22 In (a), the optical axis of the light C is set so as to interfere with the movable part 15 as the movable part 15 swings. Fig. 22 In (b), a connecting portion 19 connecting the first extension portion 11 and the second extension portion 12 is provided on the base 5 on the side opposite to the support portion 10 across the movable portion 15, and the optical axis of the light C is set to interfere with the connecting portion 19 in response to the deformation (displacement) of the connecting portion 19. In addition, the connecting portion 19 has, for example, the same cross-sectional shape (cross-sectional shape on the XZ plane) as the first connecting portion 13 and the second connecting portion 14.

[0137] According to the above optical device 100C, the amplitude (swing angle) of the swing of the optical surface 20s (movable part 15) can be detected based on the output of the light output from the light source 71 and detected by the detector 72 without being blocked by the base 5. In addition, in the example shown in the figure, an example in which the light source 71 and the detector 72 are arranged outside the optical unit 1 is described, but the light source 71 and / or the detector 72 can also be arranged on the base 5. For example, it is also possible to make the optical axis of the light C interfere with the movable part 15 by arranging one of the light source 71 and the detector 72 on the first extension part 11 or the second extension part 12. In addition, it is also possible to form a through hole at a position of the support part 10 that is closer to the movable part 15 than the vibration element 30, and to arrange the light source 71 in a manner protruding from the through hole to the main surface 5s side. In addition, the light source 71 and the detector 72 can be arranged so that the optical axis of the light C interferes with any part, not limited to the movable part 15 and the connecting part 19. By forming a pear-skin surface in a region of the main surface 5 s of the base 5 that may interfere with the optical axis of the light C, it is possible to suppress stray light of the light C and accurately detect the swing angle.

[0138] Furthermore, in the above-described example, the detector 72 is configured to detect the light C that is not blocked by a part of the base 5 and is transmitted. However, the detector 72 may be configured to detect the light C that is reflected by a part of the base 5. More specifically, the detector 72 may be configured to detect the light C that is reflected by the side surface 5f of the base 5 or the connecting portion 19. In this case, the amplitude (swing angle) of the swing of the optical surface 20s (movable portion 15) can also be detected based on the output of the detector 72.

[0139] [Other Modifications]

[0140] The above describes the modified examples of the optical unit and the optical device, but the present disclosure is not limited to the above modified examples and can be further modified. For example, the optical devices 100, 100A, and 100B can include any of the optical units 2A, 2C, 2D, 2E, 2F, 2G, and 2H instead of the above-mentioned optical unit 1. In addition, the structures of the various parts of the optical units 1, 2A, 2C, 2D, 2E, 2F, 2G, and 2H can be applied to each other.

[0141] For example, the stress relief portion 16 of the optical unit 2C can be applied to the optical unit 2A in which the optical surface 20s is directly provided on the movable portion 15. In addition, the stress relief portion 16 of the optical unit 2C or the stress relief portion 21 of the optical unit 2D can be applied to the transmission type optical unit 2E. In addition, the stress relief portion 16 and the stress relief portion 21 can be used together. In addition, the electrical connection method of the vibration element of the optical unit 2F and 2G can also be applied to the other optical units 2A, 2C, 2D, 2E, and 2H.

[0142] In the above example, the vibration element 30 is provided on the main surface 5s of the base 5, but the vibration element 30 may be provided on the back surface 5r of the base 5 according to the required vibration mode. In each of the above optical units, the pear skin surface may be formed only in the area corresponding to the first connecting portion 13 and the second connecting portion 14 in the main surface 5s.

[0143] Industrial Applicability

[0144] An optical unit, an optical device, and a method for manufacturing the optical unit capable of improving optical characteristics can be provided.

[0145] Description of Reference Numerals

[0146] 1, 2A, 2C, 2D, 2E, 2F, 2G, 2H...optical unit, 5...substrate, 5s...principal surface, 5r...back surface, 5f...side surface, 10...support portion, 11...first extension portion, 12...second extension portion, 13...first connecting portion, 14...second connecting portion, 15...movable portion, 16, 21...stress relief portion, 20s, 60s, 60r...optical surface, 30...vibration element, 31...upper electrode, 31a...first portion, 31b...second portion, 71...light source, 72...detector, 100, 100A, 100B...optical device, 110, 110A, 110B...container, 112r...opening, R1...first region, R2...second region, R3...third region.

Claims

1. An optical unit, comprising: a substrate made of metal and having a main surface and a back surface opposite to the main surface; an optical surface disposed on the main surface; and a vibration element disposed on the main surface or the back surface, The substrate comprises: Supporting part; a first extension portion and a second extension portion extending from the support portion; a movable portion disposed between the first extending portion and the second extending portion; and a first connecting portion connecting the first extending portion and the movable portion, and a second connecting portion connecting the second extending portion and the movable portion, The vibration element is provided on the support portion, and causes the support portion to vibrate to induce torsional vibration in the first connection portion and the second connection portion, thereby causing the movable portion to swing. The optical surface is provided on the main surface in the movable part, A pear-skin surface is directly formed on at least a portion of a third region of the main surface or the back surface of the base body made of metal, the third region facing the vibration element.

2. The optical unit according to claim 1, wherein: A pear-skin surface is formed on at least a portion of a first area on the main surface that is closer to the movable part than the position where the vibration element is provided and a second area on the main surface that corresponds to the first extension part and the second extension part.

3. The optical unit according to claim 2, wherein: The vibration element is arranged on the main surface, A pear skin surface is formed in the first region, the second region, and the third region.

4. The optical unit according to any one of claims 1 to 3, wherein: The main surface is entirely provided with a pear-skin finish.

5. The optical unit according to any one of claims 1 to 4, wherein: The base has a side surface connecting the main surface and the back surface, The entire back surface and the side surface are formed with a pear-skin surface.

6. The optical unit according to any one of claims 1 to 4, wherein: The base has a side surface connecting the main surface and the back surface, At least a portion of the side surface is a flat surface.

7. The optical unit according to any one of claims 1 to 6, wherein: A stress relieving portion is provided between the optical surface and the first connecting portion and between the optical surface and the second connecting portion to relieve stress caused by torsion of the first connecting portion and the second connecting portion.

8. The optical unit according to any one of claims 1 to 7, wherein: Also includes an electrode for electrically connecting the vibration element to the outside, The electrode is located on the support portion and the vibration element, and includes a first portion in contact with the vibration element, and a second portion provided on the support portion in a manner extending from the first portion toward an outer edge of the support portion.

9. An optical device comprising: The optical unit according to any one of claims 1 to 8; a light source for outputting light; and a detector arranged on the optical axis of the light output from the light source and configured to detect the light, The light source and the detector are arranged so that the optical axis can interfere with a portion of the base due to displacement of the base corresponding to vibration of the vibration element.

10. A method for manufacturing an optical unit, comprising: The first step is to prepare the metal parts; A second step, after the first step, forming a base having a main surface and a back surface opposite to the main surface from the metal member; and A third step, after the second step, roughening at least a portion of the substrate, The substrate comprises: A support for arranging a vibrating element; a first extension portion and a second extension portion extending from the support portion; A movable portion, which is disposed between the first extension portion and the second extension portion, and the main surface side of which is used to set an optical surface; and a first connecting portion connecting the first extending portion and the movable portion, and a second connecting portion connecting the second extending portion and the movable portion, In the third step, at least a portion of a third region of the main surface or the back surface of the base body made of metal, which faces the vibration element, is directly roughened.

11. The method for manufacturing an optical unit according to claim 10, wherein: In the third step, at least a portion of at least any one of a first region on the main surface that is closer to the movable portion than the position where the vibration element is provided and a second region on the main surface that corresponds to the first extension portion and the second extension portion is roughened.

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