High-power short-pulse laser energy measurement device and measurement method

Abstract

The present invention discloses a high-power short-pulse laser energy measuring device, including a signal acquisition and processing system and a main shell with a reflection cavity inside, the reflection cavity is spherical, and the inner wall of the reflection cavity is coated with a diffuse reflection coating, the main shell is provided with a light inlet connecting an upstream laser source and the reflection cavity, and a body scattering homogenizing sheet is provided at the light inlet; the main shell is penetrated with a plurality of photometric holes connecting the reflection cavity, and a plurality of photodetectors electrically connected to the signal acquisition and processing system through an addition circuit are arranged on the outer peripheral surface of the main shell, and each photodetector is arranged in a one-to-one correspondence with each photometric hole. The high-power short-pulse laser energy measuring device can stably and reliably implement the measurement of high-power short-pulse laser energy, avoid equipment damage during the measurement process, and has high measurement efficiency and measurement accuracy. The present invention also discloses a measurement method using the high-power short-pulse laser energy measuring device.

Description

Technical Field

[0001] The present invention relates to the technical field of optical detection supporting equipment, and in particular to a high-power short-pulse laser energy measurement device. The present invention also relates to a measurement method using the high-power short-pulse laser energy measurement device. Background Art

[0002] Short pulse lasers have the characteristics of high repetition rate, high average power, short pulse width, and high damage threshold. Many research institutes at home and abroad have conducted in-depth research on the testing and measurement of laser energy and average power, and many companies have also launched corresponding products. For high-energy laser direct measurement technology, foreign technical research and instrument development are currently mainly focused on pyroelectric measurement; while domestic related research involves calorimetric, pyroelectric, and photoelectric testing schemes.

[0003] Specifically, pyroelectric laser energy measuring instruments are excellent in relevant technical indicators, with characteristics such as high repetition rate, wide spectrum, and large dynamic range. However, they are limited by the damage resistance of their own coating materials, resulting in an average power of no more than 100W during operation, making it impossible to achieve kilohertz and kilowatt average power laser energy testing.

[0004] The damage threshold of volume absorption laser energy measurement instruments can reach tens of joules per square centimeter, but it is only suitable for single-pulse laser testing and cannot achieve high-repetition-rate laser testing.

[0005] In addition, the integrating sphere photoelectric laser energy testing instrument can realize the testing of high repetition rate and short pulse laser energy, but due to the limited damage threshold of the coating material inside the integrating sphere, it is unable to realize the measurement of short pulse and high energy density laser energy.

[0006] Therefore, how to stably and reliably implement the measurement of high-power short-pulse laser energy, ensure its measurement accuracy, and avoid damage to the measurement equipment is an important technical problem that technical personnel in this field currently need to solve. Summary of the invention

[0007] The object of the present invention is to provide a high-power short-pulse laser energy measuring device, which can stably and reliably measure the energy of high-power short-pulse lasers, avoid equipment damage during the measurement process, and has high measurement efficiency and measurement accuracy. Another object of the present invention is to provide a measurement method using the high-power short-pulse laser energy measuring device.

[0008] In order to solve the above technical problems, the present invention provides a high-power short-pulse laser energy measurement device, comprising a signal acquisition and processing system and a main shell having a reflection cavity inside, wherein the reflection cavity is spherical, and the inner wall of the reflection cavity is coated with a diffuse reflection coating, and the main shell is provided with a light inlet connecting an upstream laser source and the reflection cavity, and a volume scattering homogenizer is provided at the light inlet;

[0009] The main shell is penetrated by a plurality of photometric holes connected to the reflective cavity, and the outer peripheral surface of the main shell is arranged with a plurality of photoelectric detectors electrically connected to the signal acquisition and processing system through an adding circuit, and each of the photoelectric detectors is arranged in a one-to-one correspondence with each of the photometric holes.

[0010] Preferably, the main shell has a cooling water channel, which is located between the inner wall of the reflection cavity and the outer wall of the main shell. The main shell is also provided with a water inlet for cooling water to enter the cooling water channel and a water outlet for cooling water to be discharged from the cooling water channel.

[0011] Preferably, the cooling water channel extends along the circumference of the inner wall of the reflection cavity.

[0012] Preferably, the main housing is formed by two hemispherical sub-housings that are aligned and buckled together, the cooling water channel is located on one of the sub-housings, and the light measuring holes and the light inlet are located on the other sub-housing.

[0013] Preferably, a cylindrical light-guiding boss is provided on the main shell body, the light inlet is coaxially arranged in the middle of the light-guiding boss, and the center of the reflection cavity is located on the extension line of the axis of the light inlet, and the body scattering homogenizing sheet is embedded and fixed on the inner end of the light-guiding boss.

[0014] Preferably, the light measuring holes are evenly distributed on the main housing at equal intervals along the circumference of the light guiding boss, and the light measuring holes are all located at the periphery of the light guiding boss.

[0015] Preferably, a light blocking plate adapted to the light measuring hole is protruding from the inner wall of the reflection cavity, each light blocking plate is arranged on one side of each light measuring hole in a one-to-one correspondence, and the outer wall of each light blocking plate is coated with a diffuse reflection coating.

[0016] Preferably, the photoelectric detector comprises a shell fixedly arranged on the outer wall of the main shell, a photoelectric detection module aligned with the light measuring hole is arranged in the shell, and a signal terminal electrically connecting the photoelectric detection module with the signal acquisition and processing system is arranged on the shell.

[0017] Preferably, a base is provided under the main shell body, and two guide struts extending in the vertical direction are provided on the base. Two guide sleeves are symmetrically provided on both sides of the main shell body. Each guide sleeve is aligned and slidably fitted with each guide strut in a one-to-one correspondence. The guide struts are also provided with locking limiters adapted to the guide sleeves.

[0018] The present invention also provides a measurement method, which uses the high-power short-pulse laser energy measurement device as described above, comprising the steps of:

[0019] S101, laser light emitted by a laser source passes through a volume scattering homogenizer from a light inlet, and after being attenuated by the volume scattering homogenizer so that the cross-sectional energy distribution of the laser light is homogenized, the laser light enters a reflection cavity;

[0020] S102, the laser undergoes multiple diffuse reflections in the reflection cavity, so that the light intensity distribution in the reflection cavity is uniform;

[0021] S103, each photoelectric detector collects the light signals emitted from the reflective cavity through the corresponding photometric holes, converts the light signals into electrical signals and sends them to the adding circuit;

[0022] S104, the adding circuit processes the electrical signals sent from each photoelectric detector and sends them to the signal acquisition and processing system for processing;

[0023] S105 , after processing the electrical signal, the signal acquisition and processing system displays the laser energy and related parameters of the test pulse laser emitted by the current laser source.

[0024] Compared with the above-mentioned background technology, the high-power short-pulse laser energy measurement device provided by the present invention has a working process in which the laser emitted by the laser source passes through the body scattering homogenizer from the light inlet, and the laser is attenuated by the body scattering homogenizer to make the cross-sectional energy distribution of the laser uniform, and then enters the reflection cavity. The laser undergoes multiple diffuse reflections in the reflection cavity, so that the light intensity distribution in the reflection cavity is uniform. Each photoelectric detector collects the light signal emitted from the reflection cavity through the corresponding photometric hole, and converts these light signals into electrical signals. After that, the photoelectric detector processes these electrical signals through the addition circuit and sends them to the signal acquisition and processing system for final signal processing and data acquisition. After processing, the signal acquisition and processing system feeds back to the staff in real-time display or other ways, so that the staff can understand and record the energy and other related laser parameters of the test pulse laser corresponding to the current laser source. The high-power short-pulse laser energy measurement device realizes uniform distribution of laser cross-section energy by attenuating the laser through a body scattering homogenizer and diffusely reflecting the laser through a spherical surface in a reflection cavity, effectively avoiding problems such as damage to the measuring device and low measurement accuracy caused by excessive energy concentration, thereby being able to efficiently and accurately measure the energy of various types of lasers, especially being able to meet the stable measurement of high-power short-pulse laser energy, and fully meeting the laser energy measurement requirements under various working conditions, and its measurement and operation process is simple and easy, the measurement efficiency is high, and the measurement results are accurate and reliable.

[0025] In the measurement method provided by the present invention, the laser at the light inlet is first attenuated by a body scattering homogenizer to reduce the local energy intensity of the laser and make its cross-sectional energy distribution uniform. Then, the laser is diffusely reflected by a diffuse reflection coating in the reflection cavity, so that the laser forms a light beam with uniform light intensity distribution after multiple diffuse reflections. Then, the light signal in the reflection cavity is collected by each photodetector at each photometric hole and converted into an electrical signal. After being processed by an addition circuit, these electrical signals are sent to a signal acquisition and processing system. Finally, the signal acquisition and processing system processes these electrical signals to obtain corresponding laser energy and other related parameters, and feeds these parameters back to the staff. The entire operation process of the measurement method is simple and efficient, and can fully meet the measurement of various types of laser energy and related parameters including the measurement of high-power short-pulse laser energy. It has a high adaptability to working conditions and the measurement results are accurate and reliable. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 An axonometric diagram of the assembly structure of a high-power short-pulse laser energy measurement device provided by a specific embodiment of the present invention;

[0028] Figure 2 for Figure 1 A front view of

[0029] Figure 3 for Figure 2 Left view of

[0030] Figure 4 for Figure 2 A top view of

[0031] Figure 5 for Figure 1 A side view of the main housing and its associated assemblies.

[0032] in,

[0033] 11-Main shell;

[0034] 111-reflection cavity;

[0035] 112-diffuse reflection coating;

[0036] 113-light inlet;

[0037] 114-photometric hole;

[0038] 115-sub-housing;

[0039] 116-light baffle;

[0040] 12- Volume scattering homogenizer;

[0041] 121-light guide boss;

[0042] 13- Photodetector;

[0043] 131-housing;

[0044] 132-photoelectric detection module;

[0045] 133-signal terminal;

[0046] 14-Cooling water channel;

[0047] 141-water inlet;

[0048] 142-water outlet;

[0049] 15- base;

[0050] 151- guide support rod;

[0051] 152-guide sleeve;

[0052] 153-Locking limiter. DETAILED DESCRIPTION

[0053] The core of the present invention is to provide a high-power short-pulse laser energy measuring device, which can stably and reliably implement the measurement of high-power short-pulse laser energy, avoid equipment damage during the measurement process, and has high measurement efficiency and measurement accuracy; at the same time, a measurement method using the high-power short-pulse laser energy measuring device is provided.

[0054] In order to enable those skilled in the art to better understand the solution of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0055] Please refer to Figures 1 to 5 , Figure 1 An axonometric diagram of the assembly structure of a high-power short-pulse laser energy measurement device provided by a specific embodiment of the present invention; Figure 2 for Figure 1 A front view of Figure 3 for Figure 2 Left view of Figure 4 for Figure 2 A top view of Figure 5 for Figure 1 A side view of the main housing and its associated assemblies.

[0056] In a specific embodiment, the high-power short-pulse laser energy measurement device provided by the present invention includes a signal acquisition and processing system and a main housing 11 having a reflection cavity 111 inside, the reflection cavity 111 is spherical, and the inner wall of the reflection cavity 111 is coated with a diffuse reflection coating 112, and the main housing 11 is provided with a light inlet 113 connecting the upstream laser source and the reflection cavity 111, and a body scattering homogenizer 12 is provided at the light inlet 113;

[0057] The main shell 11 is penetrated by a plurality of photometric holes 114 connected to the reflective cavity 111 , and a plurality of photodetectors 13 electrically connected to the signal acquisition and processing system through an adding circuit are arranged on the outer peripheral surface of the main shell 11 , and each photodetector 13 is arranged in one-to-one correspondence with each photometric hole 114 .

[0058] During operation, the laser emitted by the laser source passes through the body scattering homogenizer 12 from the light inlet 113. The laser is attenuated by the body scattering homogenizer 12 to make the cross-sectional energy distribution of the laser uniform, and then enters the reflection cavity 111. The laser undergoes multiple diffuse reflections in the reflection cavity 111, so that the light intensity distribution in the reflection cavity 111 is uniform. Each photodetector 13 collects the light signal emitted from the reflection cavity 111 through the corresponding photometric hole 114, and converts these light signals into electrical signals. After that, the photodetector 13 processes these electrical signals through the addition circuit and sends them to the signal acquisition and processing system for final signal processing and data acquisition. After processing, the signal acquisition and processing system feeds back to the staff in real-time display or other ways, so that the staff can understand and record the energy of the test pulse laser corresponding to the current laser source and other related laser parameters. The high-power short-pulse laser energy measurement device realizes uniform distribution of laser cross-section energy by attenuating the laser with the body scattering homogenizer 12 and cooperating with diffuse reflection of the laser by the spherical surface in the reflection cavity 111, thereby effectively avoiding problems such as damage to the measuring device and low measurement accuracy caused by excessive energy concentration, so that energy of various types of lasers can be measured efficiently and accurately, especially stable measurement of high-power short-pulse laser energy can be achieved, and laser energy measurement requirements under various working conditions are fully met. Moreover, the measurement and operation process is simple and easy, the measurement efficiency is high, and the measurement results are accurate and reliable.

[0059] It should be pointed out that in actual applications, the diffuse reflection coating 112 can be an aluminum oxide coating or a barium sulfate coating, or it can be other inorganic material coatings that can meet the diffuse reflection requirements. The staff can flexibly select and adjust according to the actual working conditions and comprehensively consider factors such as equipment cost. In principle, as long as it can meet the actual application needs of the high-power short-pulse laser energy measurement device, it can be used.

[0060] It should be noted that, under normal circumstances, the material of the main shell 11 can be aluminum alloy, or other materials that are lightweight, have high structural strength and will not interfere with or affect laser measurement. The staff can also flexibly select and adjust the specific material of the main shell 11 according to actual working conditions. In principle, as long as it can meet the actual application needs of the high-power short-pulse laser energy measurement device, it can be used.

[0061] In addition, it should be noted that Figure 5As shown, the incident laser path and direction can refer to the hollow arrows in the figure, and the light path and direction after being processed by the body scattering homogenizer 12 can refer to the solid arrows in the figure. It is not difficult to understand that the light path indicated by the arrows in the figure is only for distance description. In actual working conditions, due to differences in equipment structure layout and working environment, the light path may be different, but the working principle of the equipment is consistent with that mentioned in this solution.

[0062] Furthermore, the main housing 11 has a cooling water channel 14, which is located between the inner wall of the reflection cavity 111 and the outer wall of the main housing 11. The main housing 11 is also provided with a water inlet 141 for cooling water to enter the cooling water channel 14 and a water outlet 142 for cooling water to be discharged from the cooling water channel 14. When the equipment is in operation, cooling water can be introduced into the cooling water channel 14 through the water inlet 141, and the cooling water after heat exchange is completed can be quickly discharged through the water outlet 142, so as to efficiently cool down the main housing 11 and the reflection cavity 111 and other related structures and components, thereby effectively reducing the operating temperature of the main functional components of the high-power short pulse laser energy measurement device, avoiding component damage or failure due to excessive temperature, thereby further ensuring the measurement effect and adaptability of high-power short pulse lasers, greatly optimizing the working condition adaptability and working stability of the measurement device, and ensuring data measurement accuracy.

[0063] Furthermore, the cooling water channel 14 extends along the circumferential direction of the inner wall of the reflection cavity 111. The cooling water channel 14 is arranged to extend axially along the inner wall of the reflection cavity 111, so that each part of the reflection cavity 111 can perform efficient and sufficient heat exchange with the cooling water in the cooling water channel 14, so as to simultaneously and efficiently cool down each part of the reflection cavity 111 and the main housing 11, so that the overall operating temperature of the equipment is uniform and appropriate, and components are prevented from being damaged due to high temperature, thereby ensuring the stability of equipment operation and the accuracy of data measurement.

[0064] In addition, the main housing 11 is formed by two hemispherical sub-housings 115 that are aligned and buckled together, the cooling water channel 14 is located on one of the sub-housings 115, and each photometric hole 114 and the light inlet 113 are located on the other sub-housing 115. In this arrangement, the main signal acquisition and data processing components such as the photometric hole 114, the light inlet 113 and the photoelectric detector 13 can be effectively separated from the main cooling components such as the cooling water channel 14 and its matching water inlet, so as to avoid structural interference and influence between them, make full use of the assembly space on the main structure of the main housing 11, avoid excessive concentration of components at local positions on the main housing 11, and cause the structure to be bloated, thereby optimizing the overall structural layout of the high-power short-pulse laser energy measurement device.

[0065] On the other hand, a cylindrical light-guiding boss 121 is provided on the main housing 11, and the light inlet 113 is coaxially provided in the middle of the light-guiding boss 121, and the center of the reflective cavity 111 is located on the extension line of the axis of the light inlet 113. The light-guiding boss 121 can provide certain position limiting and guiding for the incident laser, and provide certain structural protection for the light inlet 113, so as to avoid collision or structural damage at the light inlet 113.

[0066] Specifically, the body scattering light homogenizing sheet 12 is embedded and fixed to the inner end of the light guide boss 121. In this arrangement, the light guide boss 121 can be used to form a certain structural protection for the main structure of the body scattering light homogenizing sheet 12, so as to prevent the body scattering light homogenizing sheet 12 from being adversely affected by the external environment when it is exposed at the outer end of the light guide boss 121. At the same time, the laser beam attenuated by the body scattering light homogenizing sheet 12 can smoothly enter the reflection cavity 111, so as to prevent the laser beam from being interfered and affected by other components.

[0067] More specifically, the photometric holes 114 are evenly distributed on the main housing 11 along the circumference of the light guide boss 121, and the photometric holes 114 are all located at the periphery of the light guide boss 121. Evenly distributing the photometric holes 114 at equal distances at the periphery of the light guide boss 121 can further optimize the assembly component layout on the main housing 11, and ensure that the light signal collected by the photodetector 13 corresponding to each photometric hole 114 is more uniform and stable, ensuring the subsequent data collection and processing effect, and making the corresponding laser energy measurement data more accurate and reliable.

[0068] In addition, it should be noted that a light blocking plate 116 adapted to the light measuring hole 114 is protruded from the inner wall of the reflection cavity 111 , each light blocking plate 116 is arranged one by one on one side of each light measuring hole 114 , and the outer wall of the light blocking plate 116 is coated with a diffuse reflection coating. Each light blocking plate 116 can be adapted to each photometric hole 114 one by one, and the diffuse reflection coating on the outer wall of the light blocking plate 116 cooperates with the diffuse reflection coating 112 on the inner wall of the main structure of the reflection cavity 111 to ensure the diffuse reflection processing effect of the laser beam incident into the reflection cavity 111, so as to prevent the laser beam incident into the reflection cavity 111 from entering the photometric hole 114 at a high light intensity without multiple diffuse reflection processing, thereby avoiding damage to the photodetector 13 by high-intensity and high-energy light, and ensuring that the laser is diffusely reflected and fully homogenized in the reflection cavity 111 before passing through the photometric hole 114, thereby ensuring the optical signal collection accuracy at each photodetector 13 and the stability of equipment operation.

[0069] On this basis, it should be noted that, considering the incident state of light under most working conditions, the light-metering hole 114 is preferably arranged between the light-blocking plate 116 and the body scattering homogenizing plate 12 adapted to the light-metering hole 114, so as to effectively prevent the light that reaches the light-metering hole 114 after only one or two reflections on the inner wall of the reflection cavity 111 from directly emitting out of the light-metering hole; and the light-blocking plate 116 is preferably arranged along the radial extension of the reflection cavity 111, so as to optimize its light reflection effect. Of course, considering the differences in actual working conditions and the differences in requirements during specific operation applications, the specific structural shape, arrangement direction and relative position relationship between the light-blocking plate 116 and the light-metering hole 114 can be flexibly selected and adjusted according to the specific working conditions. In principle, as long as the reflection effect of the light can be guaranteed and the actual application needs of the high-power short-pulse laser energy measurement device can be met, it can be used.

[0070] In addition, the photodetector 13 includes a housing 131 fixedly arranged on the outer wall of the main housing 11, a photodetection module 132 aligned and matched with the light measuring hole 114 is arranged in the housing 131, and a signal terminal 133 electrically connecting the photodetection module 132 and the signal acquisition and processing system is arranged on the housing 131. The housing 131 can provide sufficient structural protection for the main functional components such as the photodetection module 132, and ensure the assembly strength between the main structure of the photodetector 13 and the main housing 11.

[0071] In practical applications, the housing 131 of the photodetector 13 can be reliably fixed to the main housing 11 by bolts, or other connection forms with high assembly strength and easy disassembly and assembly can be used, so that the photodetector 13 and its related accessories can be removed when necessary, and corresponding component maintenance or replacement operations can be carried out to ensure the overall smooth operation of the high-power short-pulse laser energy measurement equipment.

[0072] In addition, a base 15 is provided below the main shell 11, and two guide struts 151 extending in the vertical direction are provided on the base 15. Two guide sleeves 152 are symmetrically provided on both sides of the main shell 11. Each guide sleeve 152 is aligned and slidably fitted with each guide strut 151 in a one-to-one correspondence. A locking limiter 153 adapted to the guide sleeve 152 is also provided on the guide strut 151. When the equipment is in operation, the sliding adaptation structure between the guide sleeve 152 and the guide support rod 151 can be used to control the main housing 11 to move up and down along the axial direction of the guide support rod 151 to an appropriate position. After moving to the proper position, the current relative position of the guide sleeve 152 and the guide support rod 151 can be reliably locked and limited by the locking limiter 153, thereby realizing the reliable limitation of the working position of the main housing 11 and its related assemblies, and ensuring the constant and reliable position of the main structure during the subsequent operation of the equipment; when the working position of the main housing 11 and its related assemblies needs to be readjusted, it is only necessary to unlock the locking limiter 153 to restore the relative sliding ability between the guide sleeve 152 and the guide support rod 151. The base 15 cooperates with the guide support rod 151 to provide sufficient and reliable structural support for the main housing 11 and its related assemblies, and the sliding adaptation structure between the guide sleeve 152 and the guide support rod 151 can flexibly adjust the working position of the main housing 11 to meet the working requirements of the equipment under different working conditions.

[0073] In a specific embodiment, a high-power short-pulse laser energy measurement method provided in a specific embodiment of the present invention adopts the high-power short-pulse laser energy measurement device as described above, including:

[0074] Step S101, laser light emitted by a laser source passes through the body scattering light homogenizing plate 12 from the light inlet 113, and after being attenuated by the body scattering light homogenizing plate 12 so that the cross-sectional energy distribution of the laser light is homogenized, the laser light enters the reflection cavity 111;

[0075] Step S102: The laser undergoes multiple diffuse reflections in the reflection cavity 111, so that the light intensity distribution in the reflection cavity 111 is uniform;

[0076] Step S103, each photodetector 13 collects the light signals emitted from the reflection cavity 111 through the corresponding light measuring hole 114, and converts the light signals into electrical signals and then sends them to the adding circuit;

[0077] Step S104, the adding circuit processes the electrical signals sent from each photodetector 13 and sends them to the signal acquisition and processing system for processing;

[0078] Step S105: After processing the electrical signal, the signal acquisition and processing system displays the laser energy and related parameters of the test pulse laser emitted by the current laser source.

[0079] In summary, the high-power short-pulse laser energy measurement device provided in the present invention has a working process in which the laser emitted by the laser source passes through the body scattering homogenizer from the light inlet, and the laser is attenuated by the body scattering homogenizer to make the cross-sectional energy distribution of the laser uniform, and then enters the reflection cavity. The laser undergoes multiple diffuse reflections in the reflection cavity, so that the light intensity distribution in the reflection cavity is uniform. Each photoelectric detector collects the light signal emitted from the reflection cavity through the corresponding photometric hole, and converts these light signals into electrical signals. After that, the photoelectric detector processes these electrical signals through the addition circuit and sends them to the signal acquisition and processing system for final signal processing and data acquisition. After processing, the signal acquisition and processing system feeds back to the staff in real-time display or other ways, so that the staff can understand and record the energy of the test pulse laser corresponding to the current laser source and other related laser parameters. The high-power short-pulse laser energy measurement device realizes uniform distribution of laser cross-section energy by attenuating the laser through a body scattering homogenizer and diffusely reflecting the laser through a spherical surface in a reflection cavity, effectively avoiding problems such as damage to the measuring device and low measurement accuracy caused by excessive energy concentration, thereby being able to efficiently and accurately measure the energy of various types of lasers, especially being able to meet the stable measurement of high-power short-pulse laser energy, and fully meeting the laser energy measurement requirements under various working conditions, and its measurement and operation process is simple and easy, the measurement efficiency is high, and the measurement results are accurate and reliable.

[0080] In addition, the high-power short-pulse laser energy measurement method using the measurement device provided by the present invention first implements attenuation processing on the laser at the light inlet through a body scattering homogenizer to reduce the local energy intensity of the laser and make its cross-sectional energy distribution uniform, and then diffusely reflects the laser through a diffuse reflection coating in the reflection cavity, so that the laser forms a light beam with uniform light intensity distribution after multiple diffuse reflections, and then collects the light signal in the reflection cavity at each photometric hole through each photodetector and converts it into an electrical signal, and then sends these electrical signals to the signal acquisition and processing system after processing by the addition circuit, and finally the signal acquisition and processing system processes these electrical signals to obtain the corresponding laser energy and other related parameters, and feeds these parameters back to the staff. The entire operation process of the measurement method is simple and efficient, and can fully meet the measurement of various types of laser energy and related parameters including the measurement of high-power short-pulse laser energy, has high adaptability to working conditions, and the measurement results are accurate and reliable.

[0081] The high-power short pulse laser energy measurement device provided by the present invention and the measurement method using the high-power short pulse laser energy measurement device are introduced in detail above. Specific examples are used herein to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea. It should be pointed out that for ordinary technicians in this technical field, without departing from the principle of the present invention, several improvements and modifications can be made to the present invention, and these improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims

1. A high-power short-pulse laser energy measurement device, characterized in that: It includes a signal acquisition and processing system and a main shell with a reflection cavity inside, the reflection cavity is spherical, and the inner wall of the reflection cavity is coated with a diffuse reflection coating, the main shell is provided with a light inlet connecting an upstream laser source and the reflection cavity, and a volume scattering homogenizer is provided at the light inlet; The main housing is provided with a plurality of light measuring holes connected to the reflective cavity, and the outer peripheral surface of the main housing is provided with a plurality of photoelectric detectors electrically connected to the signal acquisition and processing system through an adding circuit, and each of the photoelectric detectors is arranged in a one-to-one correspondence with each of the light measuring holes; The main shell has a cooling water channel, the cooling water channel is located between the inner wall of the reflection cavity and the outer wall of the main shell, and the main shell is also provided with a water inlet for cooling water to flow into the cooling water channel and a water outlet for cooling water to be discharged from the cooling water channel; The main housing is provided with a cylindrical light-guiding boss, the light inlet is coaxially arranged in the middle of the light-guiding boss, and the center of the reflective cavity is located on the extension line of the axis of the light inlet, and the volume scattering light-homogenizing sheet is embedded and fixed on the inner end of the light-guiding boss; A light-blocking plate adapted to the light-measuring hole is protruding from the inner wall of the reflection cavity, each of the light-blocking plates is arranged on one side of each of the light-measuring holes in a one-to-one correspondence, and the outer walls of the light-blocking plates are coated with a diffuse reflection coating; The photoelectric detector comprises a shell fixedly arranged on the outer wall of the main housing, a photoelectric detection module aligned with the photometric hole is arranged in the shell, and a signal terminal electrically connecting the photoelectric detection module and the signal acquisition and processing system is arranged on the shell; A base is provided below the main shell, and two guide struts extending in the vertical direction are provided on the base. Two guide sleeves are symmetrically provided on both sides of the main shell. Each guide sleeve is aligned with and slidably fitted on the guide strut in a one-to-one correspondence. A locking limiter adapted to the guide sleeve is also provided on the guide strut.

2. The high-power short-pulse laser energy measurement device according to claim 1, characterized in that: The cooling water channel extends along the circumference of the inner wall of the reflection cavity.

3. The high-power short-pulse laser energy measurement device according to claim 1, characterized in that: The main shell is formed by two hemispherical sub-shells that are aligned and buckled together, the cooling water channel is located on one of the sub-shells, and the light measuring holes and the light inlet are located on the other sub-shell.

4. The high-power short-pulse laser energy measurement device according to claim 1, characterized in that: The light measuring holes are evenly distributed on the main shell at equal distances along the circumference of the light guiding boss, and the light measuring holes are all located at the periphery of the light guiding boss.

5. A measurement method, using the high-power short-pulse laser energy measurement device according to any one of claims 1 to 4, characterized in that: Includes steps: S101, laser light emitted by a laser source passes through a volume scattering homogenizer from a light inlet, and after being attenuated by the volume scattering homogenizer so that the cross-sectional energy distribution of the laser light is homogenized, the laser light enters a reflection cavity; S102, the laser undergoes multiple diffuse reflections in the reflection cavity, so that the light intensity distribution in the reflection cavity is uniform; S103, each photoelectric detector collects the light signals emitted from the reflective cavity through the corresponding photometric holes, converts the light signals into electrical signals and sends them to the adding circuit; S104, the adding circuit processes the electrical signals sent from each photoelectric detector and sends them to the signal acquisition and processing system for processing; S105 , after processing the electrical signal, the signal acquisition and processing system displays the laser energy and related parameters of the test pulse laser emitted by the current laser source.

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