Adjustment assembly, method for a detection device and automated material handling system

Abstract

The present disclosure provides an adjusting assembly of a detection device, a method and an automatic material conveying system. The adjusting assembly of the detection device comprises a sensing member and a processing module. The sensing member receives detection light and generates sensing information. The processing module compares the sensing information with preset reference information, adjusts the pose of the detection device according to the comparison result, and / or adjusts the intensity of the detection light emitted by an emitting part of the detection device. In the present disclosure, the sensing member covers the receiving part of the detection device to receive the detection light reflected by the reflecting part and generate the sensing information. The processing module determines whether the detection device is in a reference state according to the sensing information and the preset reference information. The reference state includes the pose of the detection device and / or the intensity of the detection light emitted by the emitting part. If the detection device is not in the reference state, the processing module adjusts the detection device according to the comparison result, realizes automatic and rapid adjustment of the detection device, and thus improves the speed and accuracy of the adjustment.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the technical field of semiconductor technology, and in particular, to an adjusting assembly of a detection device, a method and an automated material handling system. BACKGROUND

[0002] In a semiconductor process, wafers need to be transferred between different processes. To avoid wafer contamination or damage, the wafers are usually placed in a wafer box, and the wafer box is used to carry the wafers to achieve wafer transfer.

[0003] An automated material handling system (AMHS) is a device used to transfer wafers, which includes an overhead hoist transfer (OHT), a double loading sensor and an overhead buffer (OHB).

[0004] After the double loading sensor is installed, it needs to be debugged before it can be used normally. In the related art, the double loading sensor is fixed by fasteners, and the corresponding fasteners need to be adjusted by the staff according to experience, which results in low adjustment accuracy, long time consumption and low efficiency. SUMMARY

[0005] The following is a summary of the subject matter of the detailed description of the present disclosure. This summary is not intended to limit the scope of protection of the claims.

[0006] The present disclosure provides an adjusting assembly of a detection device, a method and an automated material handling system.

[0007] In a first aspect of the present disclosure, an adjusting assembly of a detection device is provided, the detection device comprising a transmitting part and a receiving part, the receiving part being configured to receive detection light emitted by the transmitting part and reflected by a reflecting part, the adjusting assembly of the detection device comprising:

[0008] a sensing member covering the receiving part, configured to receive the detection light and generate sensing information according to the detection light;

[0009] a processing module connected to the sensing member, the processing module being configured to receive the sensing information, compare preset reference information with the sensing information, and adjust a pose of the detection device and / or an intensity of the detection light emitted by the transmitting part according to a comparison result.

[0010] In some embodiments, the adjusting assembly comprises a mounting structure, and the sensing member is fixed to the mounting structure, and the mounting structure forms a detachable connection with the detection device.

[0011] In some embodiments, the mounting structure comprises a mounting plate and a slot arranged on a first surface of the mounting plate, the sensing member is fixed to a second surface of the mounting plate, and the slot is configured to be plugged with the detection device.

[0012] In some embodiments, the slot comprises a slot sidewall, the slot sidewall and the first surface form a mounting space for the detection device to be inserted, and a first clamping structure is arranged on the slot sidewall and / or the first surface, and the first clamping structure is configured to be clamped with the detection device.

[0013] In some embodiments, the adjusting assembly comprises an adjusting mechanism connected with the detection device, and the adjusting mechanism is configured to adjust a pose of the detection device.

[0014] The processing module is connected with the adjusting mechanism, and the processing module is configured to control the adjusting mechanism to adjust the pose of the detection device according to the comparison result.

[0015] In some embodiments, the adjusting mechanism comprises:

[0016] a first adjusting part configured to adjust a position of the detection device in a first direction;

[0017] a second adjusting part configured to adjust a position of the detection device in a second direction, and the second direction is arranged at an angle with the first direction;

[0018] a third adjusting part configured to adjust an inclination angle of the detection device.

[0019] In some embodiments, the first adjusting part comprises:

[0020] a first base body;

[0021] a first driving motor arranged on the first base body;

[0022] a lead screw connected with the first driving motor, and an axis of the lead screw extends along the first direction;

[0023] a sliding block threadedly connected with the lead screw, and the second adjusting part is fixedly connected with the sliding block.

[0024] In some embodiments, the second adjusting part comprises:

[0025] a second base body connected with the first adjusting part;

[0026] a driving part arranged on the second base body;

[0027] a first gear part, and the driving part is configured to drive the first gear part to rotate;

[0028] A second gear portion is engaged with the first gear portion, and a transmission shaft is arranged on the second gear portion and connected with the third adjusting portion;

[0029] A rocker is fixedly connected at one end with the second gear portion and rotatably connected at the other end with the second base body.

[0030] In some embodiments, the second gear portion is provided with a first arc-shaped slot, the third adjusting portion is provided with a second arc-shaped slot corresponding to the first arc-shaped slot, the centers of the first arc-shaped slot and the second arc-shaped slot coincide with the rotation center of the second gear portion, and the second base body is provided with a limiting pin which is in sliding fit with the first arc-shaped slot and the second arc-shaped slot.

[0031] In some embodiments, the driving portion comprises:

[0032] A second driving motor;

[0033] A bevel gear connected with the second driving motor;

[0034] The first gear portion comprises a disc structure, a first tooth structure arranged on one side of the disc structure, and a second tooth structure arranged on the outer periphery of the disc structure, the first tooth structure is a bevel gear and is engaged with the bevel gear, and the second tooth structure is engaged with the second gear portion.

[0035] In some embodiments, the third adjusting portion comprises:

[0036] A third base body;

[0037] A fixed seat arranged on the third base body;

[0038] A rotating shaft rotatably supported on the fixed seat, the rotating shaft being used to be connected with the detection device;

[0039] A third driving motor connected with the rotating shaft to drive the rotating shaft to rotate.

[0040] In some embodiments, the detection device comprises a double-loading sensor, and / or,

[0041] The sensing member comprises a charge-coupled device image sensor.

[0042] According to a second aspect of the present disclosure, a detection device adjusting method is provided, the detection device adjusting method comprising:

[0043] Obtaining sensing information generated by a sensing member covering a receiving portion of the detection device;

[0044] comparing the preset reference information with the sensing information to obtain a comparison result;

[0045] based on the comparison result, adjusting a pose of the detection device, and / or sending a control instruction to the detection device to adjust an intensity of detection light emitted by an emitting part of the detection device.

[0046] In some embodiments, the sensing information includes spot position information and spot shape information of reflected light; the reference information includes reference position information and reference shape information,

[0047] comparing the preset reference information with the sensing information to obtain a comparison result, including:

[0048] comparing the spot shape information with the reference shape information to determine angle difference information of a tilt angle of the detection device and a preset reference angle;

[0049] comparing the spot position information with the reference position information to determine position difference information of a position of the detection device and a preset reference position;

[0050] taking the angle difference information and the position difference information as the comparison result.

[0051] In some embodiments, based on the comparison result, adjusting the pose of the detection device includes: based on the comparison result, sending a control instruction to an adjusting mechanism to adjust the pose of the detection device, wherein:

[0052] determining first movement information in a first direction and second movement information in a second direction according to the position difference information;

[0053] generating a first control instruction based on the first movement information, and sending the first control instruction to a first adjusting part of the adjusting mechanism to adjust the position of the detection device in the first direction;

[0054] generating a second control instruction based on the second movement information, and sending the second control instruction to a second adjusting part of the adjusting mechanism to adjust the position of the detection device in the second direction;

[0055] generating a third control instruction based on the angle difference information, and sending the third control instruction to a third adjusting part of the adjusting mechanism to adjust the tilt angle of the detection device.

[0056] In some embodiments, the sensing information includes current information of an electrical signal converted from an optical signal; the reference information includes reference current information;

[0057] The preset reference information is compared with the sensing information to obtain a comparison result, including:

[0058] The current information of the electrical signal converted from the optical signal is compared with the reference current information to determine a current difference value, and the current difference value is taken as the comparison result;

[0059] Based on the comparison result, a control instruction is sent to the detection device, including:

[0060] According to the current difference value, a target emission light intensity of the emission part is determined;

[0061] The target emission light intensity is taken as the control instruction and sent to the detection device.

[0062] In a third aspect of the present disclosure, an automatic material conveying system is provided, which comprises a crown block and a detection device arranged on the crown block, and further comprises the adjustment assembly of the detection device as described above.

[0063] In some embodiments, the processing module is integrated into a control device of the crown block.

[0064] In the adjustment assembly of the detection device provided in the embodiments of the present disclosure, a sensing member is arranged to cover the receiving part of the detection device to receive the detection light reflected by the reflecting part and generate sensing information, and the processing module determines whether the detection device is in a reference state according to the sensing information and preset reference information, the reference state including the pose of the detection device and / or the intensity of the detection light emitted by the emission part. If the detection device is not in the reference state, the processing module adjusts the detection device according to the comparison result, so as to automatically and quickly adjust the detection device, thereby improving the speed and accuracy of the adjustment.

[0065] Other aspects can become apparent from the following detailed description, taken in conjunction with the accompanying drawings, after considering this overview. BRIEF DESCRIPTION OF DRAWINGS

[0066] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the present disclosure and, together with the description, serve to explain the principles of the embodiments of the present disclosure. In the drawings, like reference numerals are used to represent similar elements throughout. The accompanying drawings are of some embodiments of the present disclosure and not all embodiments. Other drawings can be derived from these drawings by those skilled in the art without paying creative labor.

[0067] Figure 1 is a schematic diagram of an automatic material conveying system according to an exemplary embodiment.

[0068] Figure 2 is a schematic diagram of an automatic material conveying system according to an exemplary embodiment.

[0069] Figure 3 FIG. 1 is a schematic diagram of a light path of detecting light rays according to an exemplary embodiment.

[0070] Figure 4 FIG. 1 is a schematic diagram of a light path of detecting light rays according to an exemplary embodiment.

[0071] Figure 5 FIG. 1 is a schematic diagram of a light path of detecting light rays according to an exemplary embodiment. Figure 4 FIG. 1 is a schematic diagram of a light path of detecting light rays according to an exemplary embodiment.

[0072] Figure 6 FIG. 1 is a schematic diagram of a light path of detecting light rays according to an exemplary embodiment.

[0073] Figure 7 FIG. 1 is a schematic diagram of a light path of detecting light rays according to an exemplary embodiment.

[0074] Figure 8 FIG. 1 is a schematic diagram of a light path of detecting light rays according to an exemplary embodiment.

[0075] Figure 9 FIG. 1 is a schematic diagram of a light path of detecting light rays according to an exemplary embodiment.

[0076] Figure 10 FIG. 1 is a schematic diagram of a light path of detecting light rays according to an exemplary embodiment.

[0077] Figure 11 FIG. 1 is a schematic diagram of a light path of detecting light rays according to an exemplary embodiment.

[0078] Figure 12 FIG. 1 is a schematic diagram of a light path of detecting light rays according to an exemplary embodiment.

[0079] Figure 13 FIG. 1 is a schematic diagram of a light path of detecting light rays according to an exemplary embodiment.

[0080] Figure 14 FIG. 1 is a schematic diagram of a light path of detecting light rays according to an exemplary embodiment.

[0081] Figure 15 FIG. 1 is a schematic diagram of a light path of detecting light rays according to an exemplary embodiment.

[0082] Figure 16 FIG. 1 is a schematic diagram of a light path of detecting light rays according to an exemplary embodiment.

[0083] Figure 17 FIG. 1 is a schematic diagram of a light path of detecting light rays according to an exemplary embodiment.

[0084] Figure 18 is a flow chart of an adjusting method of a detection device according to an exemplary embodiment.

[0085] Reference signs:

[0086] 100, adjusting assembly;

[0087] 10, sensing member;

[0088] 20, adjusting mechanism; 21, first adjusting part; 211, first base body; 212, first driving motor; 213, screw rod; 214, sliding block; 215, guide rail;

[0089] 22, second adjusting part; 221, second base body; 2211, mounting shaft; 2212, limiting pin; 222, driving part; 2221, second driving motor; 2222, bevel gear; 223, first gear part; 2231, disc structure; 2232, first toothed structure; 2233, second toothed structure; 224, second gear part; 2241, first arc-shaped slot; 2242, transmission shaft; 225, rocker;

[0090] 23, third adjusting part; 231, third base body; 232, fixing seat; 233, rotating shaft; 234, third driving motor; 235, second arc-shaped slot; 236, angle sensor;

[0091] 30, mounting structure; 31, mounting plate; 32, slot body; 321, slot sidewall; 3211, first clamping structure;

[0092] 200, automatic material conveying system;

[0093] 40, detection device; 41, emitting part; 42, receiving part; 43, first matching structure;

[0094] 50, crown block;

[0095] 60, reflecting part;

[0096] 70, storage shelf. DETAILED DESCRIPTION

[0097] To make the objects, technical solutions and advantages of the embodiments of the present disclosure clearer, the technical solutions in the embodiments of the present disclosure will be described clearly and completely below with reference to the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only some but not all of the embodiments of the present disclosure. Based on the embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present disclosure. It should be noted that, in the case of no conflict, the embodiments in the present disclosure and the features in the embodiments can be combined with each other at will.

[0098] In a semiconductor manufacturing process, a wafer needs to be transferred between different processes. To avoid contamination or damage of the wafer, the wafer is usually placed in a wafer box, and the wafer box is used to carry the wafer to achieve the transfer of the wafer.

[0099] An automated material handling system (AMHS) is a device for transferring wafers, which includes an overhead hoist transfer (OHT), a double loading sensor, and an overhead buffer (OHB).

[0100] After the double loading sensor is installed, it needs to be debugged before it can be used normally. In the related art, the double loading sensor is fixed by fasteners, and the corresponding fasteners need to be adjusted by the staff according to experience, which results in low adjustment accuracy, long time consumption, and low efficiency.

[0101] In the exemplary embodiments of the present disclosure, Figure 7 and Figure 14 a adjusting assembly 100 of a detection device 40 is provided, the detection device 40 can be a double loading sensor, the detection device 40 includes a transmitting part 41 and a receiving part 42, the transmitting part 41 can emit a detection light L1 (see Figure 2 ), and the receiving part 42 is used to receive the detection light L2 (see Figures 1 to 4 ) emitted by the transmitting part 41 and reflected by a reflecting part 60 (see Figure 2 ), the adjusting assembly 100 is used to adjust the position and angle of the detection device 40, so that the receiving part 42 of the detection device 40 can smoothly receive the detection light L2 emitted by the transmitting part 41 without obstruction, thereby being able to confirm whether there is a front opening unified pod (FOUP) or other obstacles on a storage rack 70 (see Figure 1 and Figure 2 ) according to whether the receiving part 42 receives the detection light L2 emitted by the transmitting part 41 and reflected by the reflecting part 60, thereby avoiding the placement of a wafer transfer box on the storage rack 70 again in the case that a wafer transfer box already exists on the storage rack 70, that is, avoiding double loading.

[0102] It should be noted that, referring to Figure 2The reflecting part 60 can be a flat mirror or a concave mirror. The reflecting part 60 can be installed on the storage shelf 70 in an inclined manner, so that the reflecting surface of the reflecting part 60 is directed towards the running track of the trolley 50. When the trolley 50 passes by the storage shelf 70, the detection light L1 emitted by the detection device 40 on the trolley 50 can be reflected by the reflecting part 60, and the reflected detection light L2 can be received by the sensing member 10 on the detection device 40.

[0103] In this embodiment, as shown in Figure 7 , the adjustment assembly 100 of the detection device 40 includes the sensing member 10 and a processing module (not shown). The adjustment assembly 100 can adjust the pose of the detection device 40, and the intensity of the detection light emitted by the emitting part 41 of the detection device 40. The pose of the detection device 40 includes the position of the detection device 40 in the vertical direction (Z direction shown in Figure 7 ), the position of the detection device 40 in the horizontal direction (X direction shown in FIG. 7), the angle of the detection light emitted by the detection device 40 (refer to the rotating arrow shown in Figure 12 ), and the like.

[0104] In this embodiment, referring to Figure 7 and Figure 14 , the sensing member 10 of the adjustment assembly 100 covers the receiving part 42 of the detection device 40. The sensing member 10 is used to receive the detection light emitted by the emitting part 41 of the detection device 40, and further generate sensing information according to the detection light. The sensing member 10 can be a Charge Coupled Device (CCD) image sensor, which has a photoelectric conversion function and can convert the detection light emitted by the detection device 40 (double loading sensor) into a charge signal. The sensing information can be the shape of the light spot formed by the detection light on the sensing member 10, and the position of the light spot on the sensing member 10.

[0105] In one example, the angle of the detection light emitted by the detection device is obtained. It can be understood that the emitting part 41 of the detection device 40 is integrated inside the detection device 40, so that the emission direction of the detection light L1 emitted by the emitting part 41 (refer to Figure 2 ) is fixed at a preset angle with the body of the detection device 40, such as perpendicular to the body of the detection device 40 (refer to Figure 3 ). Therefore, as shown in Figure 4 , Figure 4The area enclosed by the dashed outline represents the reference pose of the detection device 40. When the angle of the detection device 40 changes, the incident angle of the detection light L1' emitted by the emitting part 41 on the reflecting part 60 also changes, which in turn causes the angle of the reflected detection light L2' illuminating the sensing element 10 to change.

[0106] The arrangement direction of the transmitting part 41 and the receiving part 42 of the detection device 40 is relative to the traveling direction of the overhead crane 50. Figure 1 Taking a detection beam (parallel to the X direction shown in the diagram) and with a circular shape for the emission cross-section (the plane perpendicular to the emission direction of the detection beam) of the emitting part 41 as an example, viewed along the travel direction of the crane 50 (refer to...). Figure 2 and Figure 3 When the detection light shines perpendicularly onto the reflector 60, the detection device 40 is at a reference mounting angle. At this reference mounting angle, the detection light reflected by the reflector 60 forms an elliptical image on the sensing element (see reference). Figure 6 The ellipse (with a solid line outline) has a minor axis length d1 equal to the diameter d0 of the circular cross-section of the detection ray, and a major axis greater than the diameter d0 of the circular cross-section. It should be noted that the minor and major axes defined here are for ease of explanation; the minor axis is only shorter than the major axis when the detection device 40 is at the reference angle. When the installation angle of the detection device is not the reference angle, the minor axis of the ellipse lengthens due to the change in the installation angle, and thus the length of the minor axis can be greater than the length of the major axis.

[0107] Reference Figure 4 , Figure 5 , Figure 6 Taking the diameter d0 = m of the circular cross-section of the detection light (the cross-section perpendicular to the emission direction of the light), the preset emitting part 41 emits the detection light perpendicularly to the detection device 40, and the deflection angle of the detection device 40 relative to the reference pose is equal to α as an example, then the angle between the detection light L1' before reflection and the detection light L2' after reflection is 2α. From the above, it can be seen that... Figure 5 The angle between the reflected detection ray L2' and the sensing element 10 is 90°-2α, which allows us to determine the length of the minor axis of the elliptical light spot on the sensing element 10. It can be seen that the angle of incidence of the detection light at the incident reflection section 60 is different, and the shape of the light spot formed on the sensing element 10 after reflection is also different, so that the sensing information generated by the sensing element 10 is different from the preset reference information.

[0108] When the processing module obtains that the minor axis length of the elliptical spot is greater than d1, the processing module can, for example, deduce the accurate value of the deflection angle α based on the inverse trigonometric function. Then, the processing module sends an angle adjustment signal to the adjustment mechanism 20 (described in detail later), and the adjustment mechanism 20 drives the detection device 40 to adjust the angle.

[0109] In another example, to obtain the detection device in the first direction ( Figure 1 and Figure 7 Take the position in the X direction (as shown in the diagram) as an example. Refer to... Figure 6 For example, when the position of the light spot formed on the sensing element 10 shifts to the left or right, the sensing information generated by the sensing element 10 also changes accordingly. After the processing module obtains the sensing information of the sensing element 10, it can determine that the detection device 40 is not in the reference position in the first direction. Then, the adjustment signal of the adjustment mechanism 20 can be calculated based on the offset amount and offset direction of the light spot.

[0110] In another example, the sensor 10 can also acquire the intensity of the reflected light. By detecting the intensity of the light, false detections caused by excessively high or low light intensity can be avoided. For example, some wafer transfer cases are made of transparent material. When a transparent wafer transfer case is placed on the storage rack 70, if the intensity of the detected light is too high or too low, the detection device may mistakenly determine that no wafer transfer case is currently placed on the storage rack 70, thus leading to duplicate loading.

[0111] In this embodiment, refer to Figure 7 The adjustment mechanism 20 of the adjustment assembly 100 is connected to the detection device 40. The adjustment mechanism 20 is used to adjust the position and orientation of the detection device 40, which has been described in the previous embodiments and will not be repeated here. The adjustment mechanism 20 needs to be equipped with a drive unit, such as a drive motor, cylinder, electric push rod, etc.

[0112] In one example, when the drive unit is a drive motor, the transmission mechanism can be a lead screw and slider mechanism. The lead screw and slider mechanism can convert the torque output by the drive motor into linear motion, thereby driving the detection device 40 and the sensing element 10 in the traveling direction of the crane 50. Figure 7 The detector 40 can move in the X direction (shown in Figure 7) or vertical direction (Z direction shown in Figure 7) to adjust the position of the detector 40. The drive motor can also directly drive the detector 40 to rotate to adjust the emission angle of the detection light emitted by the emitter 41.

[0113] In another example (not shown in the accompanying drawings), a telescopic cylinder can move the detection device vertically or in the direction of crane travel to adjust its position. Alternatively, the telescopic cylinder can also adjust the detection device via a rack and pinion mechanism. For instance, the output shaft of the telescopic cylinder is connected to a rack, and the gear is connected to the detection device. The telescopic cylinder's extension and retraction causes the rack to move linearly, which in turn drives the gear to rotate, thus rotating the detection device and adjusting the emission angle of the detection light. It is understood that both the electric actuator and the telescopic cylinder are devices that output linear motion, and their principles are the same, so they will not be elaborated further here.

[0114] In this embodiment, refer to Figure 1 The processing module (not shown) of the adjustment component 100 is connected to both the sensing element 10 and the adjustment mechanism 20. The connection between the processing module and the sensing element 10 and the adjustment mechanism 20 can be wired or wireless. For example, the processing module can be wired to the sensing element 10 and wirelessly connected to the adjustment mechanism 20. Or, for example, the processing module can be wirelessly connected to both the sensing element 10 and the adjustment mechanism 20.

[0115] The processing module pre-stores reference information. It receives sensing information generated by the sensing element 10, compares it with the reference information, and controls the adjustment structure to adjust the pose of the detection device 40 according to the comparison result, thereby adjusting the detection device 40 to the reference pose corresponding to the reference information. The reference information can be in the form of a range interval. When the sensing information falls within the range interval of the reference information, the detection device is considered to be close to the reference position, allowing subsequent processes to proceed. To improve accuracy, the range interval can be gradually reduced; the accuracy is highest when the range interval is reduced to a single value.

[0116] In this embodiment, by providing a sensing element 10 to cover the receiving part 42 of the detection device 40, the detection light reflected back from the reflecting part 60 is received, and sensing information is generated. The processing module compares the sensing information with preset reference information to determine whether the detection device 40 is in a reference state. If it is not in a reference state, the detection device 40 is adjusted according to the comparison result, thereby achieving automatic and rapid adjustment of the detection device 40. Compared with the adjustment methods in related technologies, the speed and accuracy of adjusting the detection device 40 are improved. The processing module can also adjust the intensity of the detection light emitted by the emitting part.

[0117] In one exemplary embodiment, such as Figure 7As shown in FIG. 1, an adjusting assembly 100 of a detection device 40 is shown, the detection device 40 comprises a transmitting part 41 and a receiving part 42, the receiving part 42 is used for receiving detection light emitted by the transmitting part 41 and reflected by a reflecting part 60, the adjusting assembly 100 of the detection device 40 comprises a sensing member 10 and a processing module (not shown). Wherein, the sensing member 10 covers the receiving part 42 of the detection device 40, is used for receiving the detection light, and generates sensing information according to the detection light, the adjusting mechanism 20 is connected with the detection device 40, is used for adjusting the detection device 40, the processing module is connected with the sensing member 10, and the processing module is used for receiving the sensing information, comparing preset reference information with the sensing information, and adjusting the detection device 40 according to a comparison result, so as to adjust the detection device 40 to a reference state corresponding to the reference information.

[0118] As shown in FIG. 1, Figure 14 , Figure 15 , Figure 16 , Figure 17 As shown in FIG. 1, the adjusting assembly 100 comprises a mounting structure 30, the sensing member 10 is fixed to the mounting structure 30, and the mounting structure 30 is detachably connected with the detection device 40. The detachable connection mode is, for example, magnetic connection, fastener (for example, screw) connection, buckle clamping and the like. By setting the sensing member 10 and the detection device 40 in a detachable connection mode, the sensing member 10 can be quickly removed after the pose debugging is completed, and repeated use is realized.

[0119] As shown in FIG. 1, Figures 14 to 17 As shown in FIG. 1, the mounting structure 30 comprises a mounting plate 31 and a groove 32 provided on a first surface of the mounting plate 31, the sensing member 10 is fixed to a second surface of the mounting plate 31, and the groove 32 is used for plug-in cooperation with the detection device 40.

[0120] As shown in FIG. 1, Figures 14 to 17 As shown in FIG. 1, the groove 32 comprises a groove side wall 321, and the groove side wall 321 and the first surface enclose a mounting space for inserting the detection device 40.

[0121] In one example, referring to Figures 7 to 13The first clamping structure 3211 is a strip-shaped protrusion, and the detection device 40 is provided with a first matching structure 43 which is a strip-shaped groove. The first clamping structure 4211 matches with the first matching structure 43 of the detection device 40 in a manner such as interference fit, buckle limiting, etc., so as to connect the sensing member 10 and the detection device 40. It should be noted that the first clamping structure can also be a strip-shaped groove, so that the first matching structure is a strip-shaped protrusion. Of course, a strip-shaped protrusion and a strip-shaped groove can also be provided on the groove side wall at the same time, and this is not limited thereto. The first clamping structure can also be provided on the mounting plate, and the first clamping structure can also be provided on the groove side wall and the mounting plate at the same time.

[0122] In another example (which is not shown in the drawings), a through hole is provided on the groove side wall, and a threaded groove is provided on the detection device, so that a fastener can pass through the through hole of the groove side wall and match with the threaded groove on the detection device, so as to detachably connect the mounting structure and the detection device.

[0123] In this embodiment, as shown in Figures 7 to 13 , the adjusting assembly 100 further comprises an adjusting mechanism 20, which is connected with the detection device 40 and the processing module. The adjusting mechanism 20 can adjust the pose of the detection device 40 according to the comparison result of the processing module, so as to adjust the detection device 40 to a reference pose corresponding to the reference information.

[0124] In this embodiment, as shown in Figure 7 , the adjusting mechanism 20 of the adjusting assembly 100 comprises a first adjusting part 21, a second adjusting part 22 and a third adjusting part 23. The first adjusting part 21 is used for adjusting the position of the detection device 40 in a first direction (X direction shown in Figure 7 ), the second adjusting part 22 is used for adjusting the position of the detection device 40 in a second direction (Z direction shown in Figure 12 ), and the second direction is arranged at an angle with the first direction. The third adjusting part 23 is used for adjusting the inclination angle of the detection device (refer to the annular arrow shown in Figure 7 ).

[0125] It should be noted that any one of the first adjusting part 21, the second adjusting part 22 and the third adjusting part 23 can be connected with the crown block 50. For example, when the first adjusting part 21 is connected with the crown block 50, the second adjusting part 22 is mounted on the first adjusting part 21, and the third adjusting part 23 is mounted on the second adjusting part 22. For another example, the second adjusting part 22 can be connected with the crown block 50, the first adjusting part 21 is mounted on the second adjusting part 22, and the third adjusting part 23 is mounted on the first adjusting part 21. Here, no more examples are given. In the embodiments of the present disclosure, the scheme in which the first adjusting part 21 is connected with the crown block 50 is taken as an example for description.

[0126] For the first adjusting part 21:

[0127] In one example, referring to Figure 8 , Figure 9 , Figure 7 , the first adjusting part 21 comprises a first base body 211, a first driving motor 212, a screw rod 213, a sliding block 214 and a sliding rail 215, and the detection device 40 can be directly or indirectly mounted on the sliding block 214. The first base body 211 is connected with the headstock 50, and the first base body 211 serves as a mounting base body of the adjusting assembly 100 and the headstock 50, and the connection mode can be, for example, fastener connection, welding, buckle clamping and the like, or can be an integral structure. The first driving motor 212 is mounted on the first base body 211, and the output shaft of the first driving motor 212 is fixedly connected with the screw rod 213, for example, through a shaft coupling. The sliding block 214 is in sliding connection with the sliding rail 215 on the first base body 211, and the screw rod 213 cooperates with the sliding block 214 to convert the torque output by the first driving motor 212 into linear motion of the sliding block 214 in the first direction (X direction shown in the figure), so as to adjust the position of the detection device 40 in the first direction. The second adjusting part is fixedly connected with the sliding block. Figure 9

[0128] In another example (which is not shown in the drawings), the first adjusting part comprises a first base body, a telescopic cylinder and a sliding block. The output shaft of the telescopic cylinder is fixedly connected with the sliding block, and the output shaft of the output cylinder can be telescoped in the first direction to drive the sliding block to move linearly in the first direction, so as to adjust the position of the detection device in the first direction.

[0129] For the second adjusting part 22:

[0130] In one example, referring to Figure 10 , Figure 11 , Figure 7 ​The second adjusting part 22 comprises a second base 221, and a driving part 222, a first gear part 223, a second gear part 224 and a rocker 225 installed on the second base 221. The rocker 225 is fixedly connected with the second gear part 224, and the rocker 225 and the second gear part 224 can be directly or indirectly installed with the detection device 40. The second base 221 is fixedly connected with the sliding block 214 of the first adjusting part 21 (the connection mode is not described herein), and the driving part 222 can be a driving motor. An output shaft of the driving motor is connected with the first gear part 223. The torque output by the driving part 222 is transmitted to the second gear part 224 through the first gear part 223. Since the second gear part 224 is fixedly connected with the rocker 225, and the rocker 225 is rotationally connected with the mounting shaft 2211 on the second base 221, the first gear part 223 can drive the whole composed of the second gear part 224 and the rocker 225 to rotate, thereby driving the detection device 40 directly or indirectly installed on the second gear part 224 and the rocker 225 to move in the vertical direction (Z direction) of the figure, so as to adjust the position of the detection device 40 in the vertical direction. Figure 9 In one example, taking the orientation shown in Figure 7 as an example, and combining Figure 10 , when the position of the light spot formed on the sensing member 10 is at the lower position, it means that the height of the sensing member 10 in the vertical direction is too high, so that the driving part 222 can drive the second gear part 224 and the rocker 225 to rotate clockwise around the mounting shaft 2211, so as to raise the vertical position of the emitting part 41, and lower the vertical position of the sensing member 10, thereby realizing the upward movement of the position of the light spot relative to the sensing member 10 to the reference position.

[0131] In this example, referring to Figure 13 , the second gear part 224 is provided with a first arc-shaped groove 2241, and the third adjusting part 23 (referring to Figure 10 ) is provided with a second arc-shaped groove 235. The positions and shapes of the first arc-shaped groove 2241 and the second arc-shaped groove 235 correspond to each other, wherein the centers of the first arc-shaped groove 2241 and the second arc-shaped groove 235 both coincide with the axis of the mounting shaft 2211. Referring to Figure 11 and Figure 9The second base 221 is provided with a limiting pin 2212, the limiting pin 2212 penetrates the first arc-shaped slot 2241 and the second arc-shaped slot 235 in sequence, and the limiting pin 2212 is in clearance fit with the first arc-shaped slot 2241 and the second arc-shaped slot 235, so that the limiting pin 2212 can slide in the first arc-shaped slot 2241 and the second arc-shaped slot 235. When the limiting pin 2212 contacts the edge of the first arc-shaped slot 2241, the rotation of the second gear part 224 and the rocker 225 can be limited, so as to avoid that when the initial pose of the detection device 40 is too different from the reference pose, the second gear part 224 is excessively rotated by the first gear part 223, and the second gear part 224 is disengaged.

[0132] In this example, with reference to Figure 10 , Figure 11 , Figure 11 The driving part 222 includes a second driving motor 2221 and a bevel gear 2222 connected with the second driving motor 2221. The first gear part 223 includes a disc structure 2231 and a first toothed structure 2232 provided on one side of the disc structure 2231, the axis of the first toothed structure 2232 coincides with the axis of the disc structure 2231, and the bevel gear 2222 of the driving part 222 is engaged with the toothed first toothed structure 2232. The number of teeth of the bevel gear 2222 can be set to be less than the number of teeth of the first toothed structure 2232, so that the first toothed structure 2232 can rotate a smaller angle when the second driving motor 2221 rotates a preset angle, thereby improving the adjustment accuracy. The first gear part 223 further includes a second toothed structure 2233 provided on the outer periphery of the disc structure 2231, the second toothed structure 2233 is engaged with the second gear part 224, and the axis of the second toothed structure 2233 coincides with the axis of the disc structure 2231, so that the torque output by the second driving motor 2221 is transmitted to the first toothed structure 2232 through the bevel gear 2222, then transmitted to the disc structure 2231 through the first toothed structure 2232, and finally transmitted to the second toothed structure 2233 through the disc structure 2231, so as to drive the second gear part 224 and the rocker 225 to rotate, thereby achieving the position adjustment of the detection device 40.

[0133] In another example (which is not shown in the drawings), the second adjustment part can also be an adjustment in the vertical direction, for example, the second adjustment part includes a second base and an electric push rod mounted on the second base. The output shaft of the electric push rod is directly or indirectly connected with the third adjustment part, wherein the extension direction of the electric push rod is the vertical direction, so as to drive the detection device to adjust in the vertical direction.

[0134] For the third adjustment part 23:

[0135] In one example, as shown inFigure 12 、 Figure 13 、 Figure 12 As shown in FIG. 13, the third adjusting part 23 comprises a third base 231, a fixing seat 232, a rotating shaft 233 and a third driving motor 234, and the rotating shaft 233 is fixedly connected with the detection device 40. The third base 231 can be fixedly connected with the second gear part 224 of the second adjusting part 22, for example, the third base 231 is fixedly connected with a transmission shaft 2242 on the second gear part 224, and the transmission shaft is connected with the third adjusting part. The third base 231 is also fixedly connected with the mounting shaft 2211 of the second base 221, and when the second gear part 224 and the rocker 225 rotate, the third base 231 can be driven to rotate around the mounting shaft 2211. The fixing seat 232 is arranged on the third base 231, and the rotating shaft 233 is rotatably arranged on the fixing seat 232. The rotating shaft 233 is also fixedly connected with an output shaft of the third driving motor 234, and under the driving of the third driving motor 234, the rotating shaft 233 rotates around the fixing seat 232, thereby driving the detection device 40 to adjust the angle.

[0136] Referring to Figure 13 and Figure 18 , the third adjusting part 23 further comprises an angle sensor 236, which can be arranged in the axial direction of the rotating shaft 233 to accurately generate the angle information of the detection device. In the embodiment, the angle sensor is arranged at the tail of the third driving motor.

[0137] The third adjusting part 23 can further comprise a worm (not shown) and a worm gear (not shown), for example, the output shaft of the third driving motor 234 is fixedly connected with the worm, and the worm gear is fixedly connected with the rotating shaft 233. When the third driving motor 234 drives the worm to rotate, the torque is transmitted to the worm gear and the rotating shaft 233. It can be understood that the worm gear and worm mechanism has self-locking function, and only the worm can drive the worm gear to rotate, therefore, by arranging the third driving motor to drive the detection device to adjust the angle through the worm and worm gear, the weight of the detection device is avoided to cause the service life of the third driving motor to be reduced, and the worm needs to rotate several rounds to drive the worm gear to rotate one round, which can realize that the detection device only rotates a very small angle after the third driving motor rotates a large angle, thereby improving the adjustment accuracy.

[0138] According to the exemplary embodiments of the present disclosure, as shown in Figure 6 , a detection device adjusting method is shown, which is used to adjust the pose of the detection device before the automatic material handling system transports the materials, and / or adjust the intensity of the detection light emitted by the emission part of the detection device. The detection device adjusting method comprises:

[0139] S100, obtaining sensing information generated by a sensing member covering a receiving part of the detection device.

[0140] In this step, the detection light emitted by the emitting part of the detection device is reflected by the reflecting part. Since the sensing member covers the receiving part of the detection device, the reflected detection light cannot reach the receiving part of the detection device, but is intercepted by the sensing member. After the sensing member receives the detection light, the sensing information can be generated according to the light spot formed by the detection light.

[0141] In one example, the sensing member is, for example, a charge-coupled device image sensor, which is a photoelectric conversion sensor. The sensing member can generate different electrical signals according to parameters such as the shape of the light spot and the intensity of the light. For example, when the shape of the light spot is an ellipse, the sensing information includes the contour of the ellipse, the length of the major axis, the length of the minor axis, and the like. Alternatively, the sensing information includes the position of the light spot on the sensing member and the intensity of the light of the light spot.

[0142] For example, the incident angle of the detection light on the reflecting part is different, and the incident angle of the reflected detection light on the sensing member is also different. Therefore, when the pose of the detection device changes, the shape and position of the light spot on the sensing member change, while the shape of the cross section of the light (a plane perpendicular to the extension direction of the light) remains unchanged.

[0143] S200, compare the preset reference information with the sensing information to obtain a comparison result.

[0144] This step can be performed in the processing module.

[0145] The preset reference information can be stored in the processing module. The preset reference information indicates the sensing information that should be generated by the sensing member when the detection device is in the desired (correct) state.

[0146] The numerical value of the reference information can be data information obtained after manual calibration, or data information obtained according to experience. For example, a technician manually adjusts the detection device without the sensing member to the reference position, and then installs the sensing member on the detection device. At this time, the sensing information generated by the sensing member can be stored as the reference information in the processing module as the reference in the subsequent debugging process. In order to improve the accuracy of the reference information determined by manual calibration, the crown can be started to drive the detection device to pass through each storage shelf in turn, that is, to run for trial to determine whether the current pose of the detection device is correct. It should be noted that the wafer carrier is not required to be placed on the crown during the trial running, so as to avoid that when the manual calibration has an error, the automatic material handling system still places the wafer carrier on the storage shelf where the wafer carrier has been placed, that is, to avoid double loading.

[0147] S300, based on the comparison result, adjusting the pose of the detection device, and / or sending a control instruction to the detection device to adjust the intensity of the detection light emitted by the emitting part of the detection device.

[0148] In this step, when the reference information is a specific numerical value, the comparison manner can be subtraction, division or the like between the numerical value of the sensing information and the numerical value of the reference information, so that the comparison result can be a difference value or a ratio value. The reference information can also be a numerical range interval, and then it can be directly judged whether the numerical value of the sensing information falls within the numerical range interval of the reference information. When the sensing information falls within the numerical range interval, it is determined that the detection device currently does not need to be adjusted.

[0149] For example, the reference information is an ellipse spot with a short axis length of 1 μm, and the data of the sensing information is a short axis length of 1.1 μm. The comparison result can be +0.1 μm or 110%. Obviously, the current sensing information deviates from the reference information, and then the processing module can calculate the numerical value that needs to be adjusted. The processing module controls the operation of the adjustment mechanism according to the numerical value that needs to be adjusted.

[0150] In the embodiments of the present disclosure, the sensing information of the sensing member is compared with the preset reference information to obtain a comparison result, and then the detection device is adjusted according to the comparison result, so that the detection device is automatically and quickly adjusted. Compared with the adjustment method in the related art, the adjustment speed and accuracy are greatly improved.

[0151] In one example embodiment, the sensing information includes spot position information and spot shape information of reflected light, and the reference information includes reference position information and reference shape information. Step S200 in the above embodiment can include the following steps:

[0152] S210, comparing the spot shape information and the reference shape information to determine the angle difference information between the tilt angle of the detection device and the preset reference angle.

[0153] The implementation principle of this step has been described above for the adjustment assembly of the detection device, and will not be repeated here.

[0154] S220, comparing the spot position information and the reference position information to determine the position difference information between the position of the detection device and the preset reference position.

[0155] In this step, when the position of the detection device changes, the position of the detection light irradiated on the reflection part will also change. For example, when the detection device moves away from the reflection part, the paths of the detection light before and after reflection will become longer, so that the spot formed on the sensing member is farther away from the emission part, the detection device makes a judgment error, and then causes double loading.

[0156] It should be noted that the order of comparison of the spot shape information and the position information is not limited, and the position information can be compared first, or the position information and the angle information can be compared at the same time.

[0157] S230, taking the angle difference information and the position difference information as the comparison result.

[0158] In this step, the processor adjusts the installation angle and installation position of the detection device according to the angle difference information and the position difference information.

[0159] In an example embodiment, step S300 in the above embodiment can include the following steps:

[0160] S310, determining first movement information in the first direction and second movement information in the second direction according to the position difference information.

[0161] In this step, the first movement information can be the distance that the detection device needs to adjust in the first direction. In an example, the first movement information is +0.1 mm, and the detection device needs to move 0.1 mm in the first direction. In another example, the first movement information is -0.2 mm, and the detection device needs to move 0.2 mm in the opposite direction of the first direction. The description of positive numbers, negative numbers and numerical values is only illustrative and does not constitute a limitation on the technical solutions of the present disclosure.

[0162] The principle of the second movement information can be the same as that of the first movement information, which will not be described here.

[0163] S320, generating a first control instruction based on the first movement information and sending the first control instruction to a first adjusting part of the adjusting mechanism to adjust the position of the detection device in the first direction.

[0164] In this step, the first movement information includes the distance that the detection device needs to move and the direction that the detection device needs to move. Taking the first adjusting part including a first driving motor, a screw rod and a sliding block as an example, the sliding block can move a preset distance in the first direction based on the first driving motor rotating a preset angle, and then the angle that the first driving motor needs to rotate in the forward direction or in the reverse direction can be determined according to the first movement information.

[0165] S330, generating a second control instruction based on the second movement information and sending the second control instruction to a second adjusting part of the adjusting mechanism to adjust the position of the detection device in the second direction.

[0166] In this step, the second movement information can include the distance that the detection device needs to move and the angle that the detection device needs to move. Taking the second adjusting part including an electric push rod as an example, when the detection device is too high in the vertical direction, the second movement instruction can be that the motor inside the electric push rod rotates in the reverse direction by a corresponding number of turns, so that the position of the detection device is lowered. When the position of the detection device in the vertical direction is too low, the second movement instruction can be that the motor inside the electric push rod rotates in the forward direction by a preset number of turns, so that the position of the detection device is raised.

[0167] The second mobile information in this step can also include the angle of self-rotation required by the detection device and the direction of self-rotation. Taking the second adjusting part including the second driving motor, the first gear part, the second gear part and the connecting rod as an example, the second driving motor can drive the second gear part and the connecting rod to swing, so that the detection device and the sensing member form self-rotation, so as to Figure 1 For example, as shown in the orientation, when the spot position on the sensing member is low, it indicates that the position of the sensing member is too high, and then the second gear part and the connecting rod need to rotate clockwise around the mounting shaft, so that the position of the sensing member mounted on the detection device is lowered to adjust the spot to the reference position. The second control instruction can be the number of turns of the driving motor in the forward or reverse direction.

[0168] S340, generating a third control instruction based on the angle difference information, and sending the third control instruction to the third adjusting part of the adjusting mechanism to adjust the tilt angle of the detection device.

[0169] In this step, the third control instruction can be the number of turns of the third driving motor in the forward or reverse direction.

[0170] In an example embodiment, the sensing information generated by the sensing member also includes current information converted from the optical signal, and the preset reference information includes reference current information.

[0171] The step S200 in the above embodiment further includes the following steps:

[0172] S230, comparing the current information of the electrical signal converted from the optical signal with the reference current information to determine the current difference value, and taking the current difference value as the comparison result.

[0173] In this step, the higher the light intensity of the detection light, the higher the current intensity in the current information converted from the spot of the detection light on the sensing member. The method of determining the current difference value can be that the current information currently converted is subtracted from the reference current information. In an example, when the current difference value is positive, it indicates that the current light intensity is too high. The method of determining the current difference value can also be that the reference current information is subtracted from the current information, so that when the current difference value is negative, it indicates that the current light intensity is too high.

[0174] After generating the current difference value, the step S300 in the above embodiment can further include the following steps:

[0175] S350, determining the target emission light intensity of the emission part according to the current difference value.

[0176] In this step, the current intensity and the detected light intensity in the current information have a preset functional relationship. In one example, the current intensity and the light intensity are directly proportional. Thus, the current light intensity and the light intensity that needs to be reduced can be calculated in reverse based on the current current information and the current difference. The target emitted light intensity is obtained by subtracting the current light intensity and the light intensity that needs to be reduced.

[0177] In another example, when the current difference is determined to be non-zero, it can be determined that the current light intensity is not the reference light intensity, and the preset target emitted light intensity can be calculated directly based on the reference current information.

[0178] S360: The intensity of the light emitted by the target is sent as a control command to the detection device.

[0179] In this step, the processing module can send control commands to the detection device via wired or wireless transmission. The detection device adjusts the intensity of the emitted light to the intensity of the target emitted light according to the received control commands.

[0180] According to exemplary embodiments of this disclosure, such as Figure 2 , Figure 7 and Figure 2 As shown, an automated material handling system 200 is also provided. The automated material handling system 200 includes an overhead crane 50 and a detection device 40 installed on the overhead crane 50, and a device installed below the overhead crane 50. ​ The storage rack 70 (shown in the opposite direction of the Z direction) and the adjustment assembly 100 of the detection device 40 provided in the above embodiments of this disclosure are mounted on the overhead crane 50 and are used to install the detection device 40 and adjust the detection device 40. The storage rack 70 is the wafer cassette storage rack (Overhead Buffer, OHB).

[0181] An automatic material handling system equipped with the adjustment component provided in this embodiment of the present disclosure has an adjustment component that covers the receiving part of the detection device with a sensing element to receive the detection light reflected back by the reflecting part and generate sensing information. The processing module compares the sensing information with preset reference information to determine whether the detection device is in a reference state. If it is not in a reference state, the detection device is adjusted according to the comparison result, thereby realizing automatic and rapid adjustment of the detection device. Compared with the adjustment method in related technologies, the adjustment speed and accuracy are greatly improved, the calibration time of the automatic material handling system is shortened, and labor is saved.

[0182] In one embodiment, the processing module is integrated into the crane's control device. By integrating the processing module into the crane's control device, the crane's control device becomes more integrated, facilitating unified management and control.

[0183] The embodiments or examples in the specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between embodiments can be mutually referred to.

[0184] In the description of the specification, the description of the terms "embodiment", "exemplary embodiment", "some embodiments", "illustrative embodiments", "example", and the like means that the specific features, structures, materials, or characteristics described in connection with the embodiments or examples are included in at least one embodiment or example of the disclosure.

[0185] In the specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0186] In the description of the disclosure, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the disclosure and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the disclosure.

[0187] It can be understood that the terms "first", "second", and the like used in the disclosure can be used in the disclosure to describe various structures, but these structures are not limited by these terms. These terms are only used to distinguish the first structure from another structure.

[0188] In one or more drawings, the same elements are represented by similar reference numerals. For the sake of clarity, parts of the drawings are not drawn to scale. In addition, some known parts can not be shown. For the sake of simplicity, structures obtained after several steps can be described in one drawing. Many specific details of the disclosure are described below, such as the structure, material, size, processing process, and technology of the device, in order to more clearly understand the disclosure. However, as those skilled in the art can understand, the disclosure can be implemented without these specific details.

[0189] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the disclosure, and not to limit them; although the disclosure has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that the technical solutions described in the foregoing embodiments can be modified, or some or all of the technical features can be replaced by equivalents; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the disclosure.

Claims

1. An adjusting assembly of a detection device, the detection device comprising a transmitting part and a receiving part, the receiving part being used to receive detection light rays emitted by the transmitting part and reflected by a reflecting part, characterized in that, The adjusting assembly of the detection device comprises: a sensing member covering the receiving portion, configured to receive the detection light and generate sensing information according to the detection light; a processing module connected to the sensing member, configured to receive the sensing information, compare the sensing information with preset reference information, and adjust the pose of the detection device and / or the intensity of the detection light emitted by the emitting portion according to the comparison result; the adjusting assembly comprises an adjusting mechanism connected to the detection device, configured to adjust the pose of the detection device; the processing module is connected to the adjusting mechanism, and the processing module is configured to control the adjusting mechanism to adjust the pose of the detection device according to the comparison result; the adjusting mechanism comprises: a first adjusting portion configured to adjust the position of the detection device in a first direction; a second adjusting portion configured to adjust the position of the detection device in a second direction, the second direction being arranged at an angle with the first direction; a third adjusting portion configured to adjust the inclination angle of the detection device; the first adjusting portion comprises: a first base body; a first driving motor arranged on the first base body; a lead screw connected to the first driving motor, the axis of the lead screw extending along the first direction; a sliding block threadedly connected to the lead screw, the second adjusting portion being fixedly connected to the sliding block; the second adjusting portion comprises: a second base body connected to the first adjusting portion; a driving portion arranged on the second base body; a first gear portion, the driving portion being capable of driving the first gear portion to rotate; a second gear portion meshing with the first gear portion, a transmission shaft being arranged on the second gear portion, the transmission shaft being connected to the third adjusting portion; a rocker, one end of the rocker being fixedly connected to the second gear portion, the other end of the rocker being rotatably connected to the second base body; the third adjusting portion comprises: a third base body; a fixing seat arranged on the third base body; a rotating shaft rotatably supported on the fixing seat, the rotating shaft being configured to be connected to the detection device; a third driving motor connected to the rotating shaft to drive the rotating shaft to rotate.

2. The adjustment assembly of a detection device according to claim 1, characterized in that The adjusting assembly comprises a mounting structure, the sensing member being fixed to the mounting structure, and the mounting structure being detachably connected to the detection device.

3. The conditioning assembly of a detection device of claim 2, wherein, The mounting structure comprises a mounting plate and a groove arranged on a first surface of the mounting plate, the sensing member being fixed to a second surface of the mounting plate, and the groove being configured to be inserted into the detection device.

4. The conditioning assembly of a detection device of claim 3, wherein, The groove comprises a groove side wall, the groove side wall and the first surface enclosing a mounting space for the detection device to be inserted into, and a first clamping structure being arranged on the groove side wall and / or the first surface, the first clamping structure being configured to clamp the detection device.

5. The adjustment assembly of a detection device according to claim 1, wherein, The second gear part is provided with a first arc-shaped slot, the third adjusting part is provided with a second arc-shaped slot corresponding to the first arc-shaped slot, the centers of the first arc-shaped slot and the second arc-shaped slot coincide with the rotation center of the second gear part, the second base body is provided with a limiting pin, and the limiting pin is in sliding fit with the first arc-shaped slot and the second arc-shaped slot.

6. The conditioning assembly of a detection device of claim 1, wherein, The driving part comprises: a second driving motor; a bevel gear connected with the second driving motor; The first gear part comprises a disc structure, a first tooth structure provided on one side of the disc structure, and a second tooth structure provided on the outer periphery of the disc structure, the first tooth structure is a bevel gear and is in mesh with the bevel gear, and the second tooth structure is in mesh with the second gear part.

7. An adjustment assembly for a detection device according to any one of claims 1 to 6, wherein, The detection device comprises a double-loading sensor, and / or The sensing member comprises a charge-coupled device image sensor.

8. A method of adjusting a detection device using the adjustment assembly according to any one of claims 1 to 7, characterized in that The adjusting method of the detection device comprises: obtaining sensing information generated by a sensing member covering a receiving part of the detection device; comparing preset reference information with the sensing information to obtain a comparison result; based on the comparison result, adjusting the pose of the detection device, and / or sending a control instruction to the detection device to adjust the intensity of the detection light emitted by the emitting part of the detection device.

9. The adjustment method of a detection device according to claim 8, characterized in that, The sensing information comprises spot position information and spot shape information of reflected light, and the reference information comprises reference position information and reference shape information. The comparison of the preset reference information and the sensing information to obtain a comparison result comprises: comparing the spot shape information and the reference shape information to determine angle difference information of the inclination angle of the detection device and the preset reference angle; comparing the spot position information and the reference position information to determine position difference information of the position of the detection device and the preset reference position; the angle difference information and the position difference information are taken as the comparison result.

10. The adjustment method of a detection device according to claim 9, characterized in that, Based on the comparison result, adjusting the pose of the detection device comprises: based on the comparison result, sending a control instruction to an adjusting mechanism to adjust the pose of the detection device, wherein: determining first movement information in a first direction and second movement information in a second direction according to the position difference information; generating a first control instruction based on the first movement information and sending the first control instruction to a first adjusting part of the adjusting mechanism to adjust the position of the detection device in the first direction; generating a second control instruction based on the second movement information and sending the second control instruction to a second adjusting part of the adjusting mechanism to adjust the position of the detection device in the second direction; generating a third control instruction based on the angle difference information and sending the third control instruction to a third adjusting part of the adjusting mechanism to adjust the inclination angle of the detection device.

11. The adjustment method of a detection device according to claim 8, characterized in that, The sensing information comprises current information of an electrical signal converted from an optical signal; The reference information comprises reference current information; The comparison of the preset reference information and the sensing information to obtain a comparison result comprises: comparing the current information of the electrical signal converted from the optical signal with the reference current information to determine a current difference value, and taking the current difference value as the comparison result; based on the comparison result, sending a control instruction to the detection device, including: determining a target emission light intensity of the emission part according to the current difference value; sending the target emission light intensity to the detection device as the control instruction.

12. An automated material handling system, characterized by, The automatic material conveying system comprises a crown block and a detection device arranged on the crown block, and further comprises the adjustment assembly of the detection device according to any one of claims 1 to 7.

13. The automated material handling system of claim 12, wherein, The processing module is integrated in a control device of the crown block.

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