Improved solvents for acetylene fluid storage

Abstract

Compositions comprising an acetylene fluid at least partially dissolved in an improved solvent are described. The improved solvent exhibits non-toxicity and is further characterized by a low vapor pressure to minimize solvent carryover during delivery of the acetylene fluid while maintaining suitable acetylene solubilizing capacity.

Description

Technical Field

[0001] The present invention relates to novel compositions of improved solvents for solubilizing acetylene fluids. Specifically, the improved solvents exhibit non-toxicity to acetylene fluid storage, distribution and handling, and are further characterized by low vapor pressure to minimize solvent carryover during acetylene fluid delivery while maintaining suitable acetylene solubilizing capacity. Background Art

[0002] Acetylene is widely used in industry for a variety of applications including, for example, welding and chemical synthesis. Of particular interest, acetylene is increasingly used as a source material for the deposition of carbon and carbon-containing films in the electronics industry. Applications include the deposition of amorphous carbon hard mask films.

[0003] However, storage of acetylene has presented several challenges due to its thermal instability. Acetylene can explosively decompose into carbon and hydrogen under storage conditions of high pressure and temperature, even in the absence of air or oxygen.

[0004] In order to solve the thermal instability, the acetylene cylinder is uniquely constructed. Each cylinder contains a porous filler (e.g., silica) and a solvent distributed throughout the porous filler medium, which generally includes acetone, dimethylformamide (DMF) or N-methylpyrrolidone (NMP). These solvents are traditionally selected due to their ability to solubilize acetylene. The porous filler medium is a porous block generally having a porosity of about 90% by volume. The function of the porous filler medium is to separate acetylene into small units that help to suppress the decomposition of acetylene in the pores. The function of the solvent is to absorb a large amount of acetylene at a relatively low pressure so that a high cylinder loading can be carried out in a low-pressure cylinder. The solvent is dispersed in the voids of the porous filler medium and around the porous filler medium.

[0005] Despite the improved thermal stability in such cartridge systems, applicants have discovered that certain modifications to existing acetylene cartridge fluid supply packaging result in improved storage, handling and delivery capabilities, as will now be explained. Summary of the invention

[0006] In one aspect, a composition comprising a solution of an improved solvent in combination with acetylene dissolved in the improved solvent, wherein the improved solvent is characterized by all of the following properties: (i) a vapor pressure of about 6 Torr or less at 20° C.; (ii) a Hansen solubility factor (dH) greater than about 5 MPa 0.5 ; (iii) greater non-toxicity compared to dimethylformamide (DMF) and N-methylpyrrolidone (NMP); and (iv) a chemical structure comprising at least one of an O, N or F atom, wherein at least one of the O, N or F atom is not bonded to a hydrogen atom, and further wherein the chemical structure is characterized by the absence of phosphorus, boron, calcium and nickel.

[0007] In a second aspect, an acetylene fluid supply package comprises a pressure vessel; a porous filler in the pressure vessel; an improved solvent in the porous filler, the solvent solubilizing acetylene absorbed in the improved solvent; the improved solvent comprising all of the following properties: (i) a vapor pressure of about 6 Torr or less at 20 degrees; (ii) a Hansen solubility factor (dH) greater than about 5 MPa 0.5 ; (iii) higher non-toxicity compared to dimethylformamide (DMF) and N-methylpyrrolidone (NMP); and (iv) a chemical structure comprising O, N or F atoms, wherein at least one of the O, N or F atoms is not bonded to a hydrogen atom, and further wherein the chemical structure is characterized by the absence of phosphorus, boron, calcium and nickel.

[0008] In a third aspect, a system includes at least one acetylene fluid supply package and a processing tool utilizing acetylene, wherein the processing tool utilizing acetylene is in fluid communication with the at least one acetylene fluid supply package, wherein the at least one acetylene fluid supply package includes: a pressure vessel; a porous filler in the pressure vessel; an improved solvent in the porous filler, the solvent solubilizing acetylene absorbed in the improved solvent; the improved solvent including all of the following properties: (i) a vapor pressure of about 6 Torr or less at 20 degrees; (ii) a Hansen solubility factor (dH) greater than about 5 MPa 0.5 ; (iii) greater non-toxicity than dimethylformamide (DMF) and N-methylpyrrolidone (NMP); and (iv) a chemical structure comprising O, N or F atoms, wherein at least one of the O, N or F atoms is not bonded to a hydrogen atom, and further, wherein the chemical structure is characterized by the absence of phosphorus, boron, calcium and nickel; wherein the at least one acetylene fluid supply package is configured to allow discharge of the acetylene fluid under dispensing conditions; and further, wherein the processing tool utilizing acetylene is configured to receive the acetylene fluid from the at least one acetylene fluid supply package. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 is a representative schematic diagram of an acetylene fluid supply package having an improved solvent in combination with an acetylene fluid at least partially dissolved in the improved solvent;

[0010] Figure 2 It is equipped with a solvent trap Figure 1 Representative schematic diagram of

[0011] Figure 3 yes Figure 2 A variation of whereby the solvent trap device is located at a different location; and

[0012] Figure 4 A process diagram is shown illustrating a representative method of supplying a package with acetylene fluid using a downstream processing tool. DETAILED DESCRIPTION

[0013] The compositions, fluid supply packages, and systems disclosed herein may include, consist of, or consist essentially of any of the specific components and structures illustratively described herein. The present disclosure further contemplates restrictively defined compositions, fluid supply packages, and systems, e.g., where one or more of the specifically described parts, components, and structures may be specifically omitted in defining an operational embodiment of the present disclosure.

[0014] As used herein and throughout, the term "fluid" is intended to include gases, vapors, liquids, and mixtures of the foregoing. "Acetylene fluid" as used herein and throughout is intended to mean substantially all of the acetylene is stored under pressure in the gas phase during storage in the container, but a small amount of solvent may be incorporated as the acetylene fluid is withdrawn from the container. The term "solvent" or "solvent fluid" is intended to refer substantially to a solvent in a liquid phase that is in substantial equilibrium with a corresponding gas phase of relatively lower vapor pressure.

[0015] Any of "container" or "cylinder" or "package" or "delivery package" or "fluid supply package" may be used herein and interchangeably throughout to refer to any storage, filling, delivery or transportable container.

[0016] As used herein and throughout with respect to vapor pressure, "about" means + / - 3 Torr.

[0017] The present invention recognizes the shortcomings of existing acetylene fluid supply packages. For example, applicants have observed that acetone has an unacceptably high vapor pressure when used as a solvent, and therefore acetone vapor can be drawn from a storage container and undesirably transported with dispensed acetylene. For several applications, such as deposition of carbon and carbon-containing films, including amorphous carbon hard mask films in the electronics industry, the acetone solvent becomes a contaminant in the acetylene. As a result, acetone can ultimately reduce film deposition rates and affect process uniformity and consistency.

[0018] In order to reduce the pollution in those applications that cannot tolerate solvent impurities in the obtained carbon-containing film derived from acetylene, alternative solvents with lower vapor pressure than acetone have been used for acetylene storage and delivery. For example, DMF and N-methylpyrrolidone (NMP) have been used as solvents as a part of acetylene fluid supply packages. However, DMF and NMP both show toxicity. Specifically, DMF and NMP have the risk of reproductive toxicity (i.e., teratogenicity). Due to such health risks, the commercial use of DMF and NMP has been restricted to several countries. Materials with reproductive toxicity risk are classified as having H360 hazard statement codes under the Global Chemical Classification and Labeling Harmonization System (GHS). It should be understood that toxicity as used herein refers to those materials classified as having H360 hazard statement codes.

[0019] Therefore, in view of such disadvantages of using traditional solvents in acetylene storage and delivery systems, applicants have identified improved solvents that are safer alternatives to traditional solvents for storing and delivering acetylene. The present invention requires a combination of certain properties. The properties of the improved solvent are characterized by having (i) a vapor pressure of about 6 Torr or less at 20°C; (ii) higher non-toxicity compared to dimethylformamide (DMF) and N-methylpyrrolidone (NMP); (iii) a chemical structure comprising at least one of O, N or F atoms, wherein at least one of the O, N or F atoms is not bonded to a hydrogen atom, and further, wherein the chemical structure is characterized by the absence of phosphorus, boron, calcium and nickel; and (iv) a Hansen solubility factor (dH) greater than about 5 MPa 0.5 Improved solvents having the foregoing attributes may be used as part of acetylene storage and delivery systems that do not exhibit a sharp drop in acetylene solubilizing performance relative to conventional solvents.

[0020] In contrast, conventional solvents such as DMF and NMP are typically classified as H360 under the Global Harmonized System of Classification and Labeling of Chemicals (see Table 1). In other words, they present a risk of reproductive toxicity and teratogenicity. The solvents of the present invention do not pose a risk of reproductive toxicity and, therefore, are characterized by the absence of an H360 hazard statement code as classified by the GHS. Due to the absence of an H360 classification, the solvents of the present invention are generally more benign.

[0021] surface@

[0022]

[0023] In addition to higher non-toxicity, the solvent of the present invention also maintains enough solubility and interaction with acetylene. The applicant has identified a combination of properties necessary for the effective solubility of the solvent in the acetylene fluid. The solvent molecules and the acetylene molecules attract each other so that at least a portion of the acetylene molecules can reside in the solvent under a thermodynamically stable state. On the contrary, if the solvent molecules and the acetylene molecules repel each other, the acetylene solubility in the expected solvent is insufficient (that is, the solubility in acetylene is less than the solubility of the traditionally used solvents DMF, acetone and NMP). Acetylene has a chemical structure of C2H2 with a triple bond between carbon atoms. Each carbon atom is covalently bonded to a hydrogen atom, and the hydrogen atom represents an available center for molecular interaction with the solvent. The hydrogen atom can preferably be hydrogen-bonded with the negative site in the solvent molecule to achieve enough solubility. This negative polarity site can be obtained by selecting a polar solvent with an electronegative site provided via N, O or F atoms. The acetylene solubility in the solvent increases with the effectiveness of the hydrogen bonding of the solvent and the acetylene molecules. Applicants have discovered that the effectiveness of hydrogen bonding can be reliably assessed by the Hansen Solubility Interaction Parameter, designated δh, which is defined in the art as the energy from hydrogen bonds between molecules. This parameter indicates how strongly a solvent can form intramolecular or intermolecular hydrogen bonds. The higher the δh value, the more effective the solvent is at forming hydrogen bonds therewith. With respect to the present invention, for a particular solvent, a higher δh indicates a higher solubility of the acetylene fluid within the solvent molecules. In a preferred embodiment, δh is greater than about 5 MPa. 0.5 .

[0024] Another property essential to the present invention is to avoid, reduce or minimize OH, FH or NH bonds within the solvent molecule, so that the molecular structure of the solvent contains at least one O, N or F atom that is not bonded to an H atom within the solvent molecule. Applicants have discovered that an excess of OH, FH or NH bonds within the solvent molecule may result in a tendency for the solvent molecule to hydrogen bond with itself, thereby potentially limiting the availability of electronegative sites for hydrogen bonding with acetylene molecules, thereby generating intermolecular hydrogen bonds. For example, and not intended to be limiting, if the solvent molecule contains two oxygen atoms, at least one of the two oxygen atoms cannot bond to a hydrogen atom within the molecule to reduce the tendency for self-hydrogen bonding within the solvent molecule.

[0025] The combination of (i) a sufficiently high δh and (ii) a molecular structure of the solvent containing at least one O, N, or F atom that is not bonded to an H atom therein promotes the ability of the solvent molecules to more effectively interact with and solubilize the acetylene molecules. In other words, δh is greater than about 5 MPa. 0.5 The combination with a solvent structure that avoids or minimizes intramolecular H-bonding within the solvent molecules can promote H-bonding between the solvent and the acetylene molecules.

[0026] Although providing non-toxicity and effective solubility of solvent and acetylene fluid is crucial, the present invention also requires solvent molecules to show relatively low vapor pressure to reduce its carrying during distributing acetylene.In this regard, solvent of the present invention has about 6 torrs or less vapor pressure at 20 degrees Celsius.Utilize solvent molecules with lower vapor pressure to minimize the pollution of acetylene distributed to downstream applications.The relatively low vapor pressure of solvent of the present invention makes the carrying of solvent minimum during acetylene distribution, thereby allows to send high-purity acetylene.On the contrary, the vapor pressure of conventional solvents such as acetone is 230 torrs, which has a large amount of pollutant risks (Table 1), and this is due to a large amount of acetone having the trend of extracting out from container along with acetylene.

[0027] Having described all the necessary attributes of the solvents of the present invention, Table 1 depicts representative, non-limiting examples of solvents in accordance with the principles of the present invention. The solvents are compared to prior art solvents. It can be seen that mesityl oxide, dihydrolevoglucosidone; tetraethylene glycol dimethyl ether; acetic anhydride; cyclohexanone; and 4-methoxy-4-methyl-2-pentanone (pentoxone) are solvents that are expected to be safer in handling and exhibit sufficient solubility with acetylene fluids within the container. All of the solvents of the present invention are characterized by the absence of H360 classification; exhibiting a relatively low vapor pressure of about 6 Torr or less; having a vapor pressure greater than about 5 MPa. 0.5 The Hansen solubility interaction parameter, designated as δh, is an improvement over the conventional solvents for storing and delivering acetylene. Table 1 lists DMF, acetone, and NMP as representative of conventional solvents for storing acetylene under the title prior art. It can be seen that conventional solvents have one or more deficiencies, such as H360 toxicity and / or unacceptably high vapor pressures. The Hansen solubility factor (dH) values ​​are calculated using software commercially available as HSPiP software and utilizing the https: / / www.hansen-solubility.com / contact.php. Official website generated.

[0028] It should be understood that the present invention contemplates other solvents not in Table 1, including but not limited to acetyl pyrrolidone.

[0029] Figure 1 , Figure 2 and Figure 3 An example of a representative acetylene storage and delivery system loaded with a solvent of the present invention is shown. Figure 1A storage container 1 is shown having an internal volume occupied by a porous medium 2 (e.g., silica) preloaded within the container 1. One or more solvents 2a of the present invention are dispersed or loaded into and around the porous medium 2. C2H2 is stored by solubilizing C2H2 (2b) in the solvent to a desired pressure. Typical fill pressures range from 200psig to 300psig under ambient conditions. A pressure regulator device (4) is installed at the outlet of the cylinder to reduce the outlet pressure to the desired pressure (about 15psig to 30psig) and then connected to a flow control device for ease of operation. A shut-off valve 3 is shown along the top of the container 1. The acetylene fluid 2b is at least partially dissolved in the improved solvent 2a.

[0030] Figure 2 Shows Figure 1 A container 1, wherein at least a portion of the acetylene fluid 2b is dissolved in one or more of the solvents 2a of the present invention, which are dispersed in and around the porous medium 2 combined with a solvent trap 5. A cylinder or storage container (1) filled with a porous filler material (2) is loaded with the desired solvent (2a). The solvent is dispersed in the voids in and around the porous filler material. C2H2 is stored by solubilizing C2H2 (2b) in the solvent to the desired pressure. Typical filling pressures are in the range of 200psig to 300psig under ambient conditions. The solvent trap 5 is a tank containing an adsorbent material (5) that is installed upstream of the outlet of the cylinder and the pressure regulating device 4. It should be understood that the tank can be loaded with any suitable desired adsorbent medium, such as activated carbon, zeolite or metal organic framework, which is capable of capturing the solvent of the present invention that may pass through it due to being drawn out from the internal volume of the container 1. In this way, removal of any entrained solvent can be achieved, thereby improving the purity of the delivered acetylene required for critical applications such as the deposition of carbon films for electronic device manufacturing.

[0031] Figure 3 Another embodiment is shown with a tank containing the adsorbent material (5), which is installed downstream of the pressure regulating device.

[0032] It should be understood that Figure 1 , Figure 2 and Figure 3Represent the non-limiting example of the storage and delivery package with improved solvent 2a, porous medium 2 and acetylene 2b. Without departing from the scope of the present invention, it is conceivable that other configurations of storage and delivery package are provided.For example, the acetylene fluid supply package of the present disclosure can be any configuration suitable for accommodating acetylene fluid 2b during storage and transportation conditions and discharging acetylene fluid 2b from fluid supply package 1 under distribution conditions.Should be understood that single solvent 2a can be utilized, or a mixture of two or more solvents 2a can be utilized, wherein the resulting mixture is characterized by each in the required attribute of the present invention as discussed above.Distribution conditions can be adapted to realize distribution by actuating the fluid distribution assembly, for example, by opening the valve in the valve head of the fluid distribution assembly of the package.

[0033] The present invention contemplates various fields of use of the compositions described herein. For example, some methods include, but are not limited to, chemical vapor deposition, plasma enhanced chemical vapor deposition, beam-line ion implantation, and plasma immersion ion implantation. Figure 4 One example of the use of the acetylene delivery package of the present invention is shown in FIG. Figure 4 The use of an acetylene delivery package operably connected to certain processing equipment in a method of depositing a carbon film for electronic device manufacturing applications is shown. One or more acetylene delivery packages are configured within a gas cabinet. Acetylene is delivered from Figure 1 , Figure 2 or Figure 3 The acetylene is drawn from an acetylene delivery package and then distributed into the processing chamber by a flow control device, which can be configured to establish a flow rate of acetylene that can be in the range of 0.1 slpm to 10 slpm. The processing chamber is preferably maintained at a pressure in the range of 0.1 torr to 10 torr. The target substrate is heated to an elevated temperature in the range of 100°C to 800°C to assist in the deposition of a high purity carbon film. The processing chamber can be equipped with a plasma source to assist in the carbon deposition process. It should be understood that the acetylene delivery package can operate at other flow rates, temperatures and pressures.

[0034] It should be further understood that Figure 1 The plurality of acetylene delivery packages shown can be loaded into a gas cabinet. The outlet of each of the acetylene delivery packages is connected to a dedicated flow control device, each of which leads to an inlet of the processing chamber. Acetylene can be stored in each delivery package at a pressure of up to about 300 psig. When the shut-off valve is actuated to the open position, a controlled flow of acetylene will be dispensed from its dedicated container.

[0035] It is further understood that multiple acetylene delivery packages may be connected together in parallel to form a package bundle, and the combined flow line then separated into different flow lines each connected to a dedicated flow control device.

[0036] The deposited carbon film can be used for various applications, including but not limited to a protective layer above the bottom film during the subsequent etching method step, or a conductive carbon film for transmitting electrons. Many applications are sensitive to impurities or undesirable pollution, and because such pollution may adversely affect film properties, including its optical properties, electrical properties or robustness in other subsequent methods. In such cases, the supply of acetylene stable in a solvent containing a reactive element can form a non-volatile reaction product under deposition conditions, which is undesirable. Even relatively low vapor pressure solvents can be delivered to the processing chamber with different traces, and adversely affect film properties. Therefore, for the present application, acetylene solvents containing metal or inorganic impurities (such as boron, calcium, nickel and phosphorus) are undesirable. In this regard, one of the attributes of the present invention is: the chemical structure is characterized in that there is no boron, calcium, nickel and phosphorus.

[0037] The ability of the present invention to produce high purity membranes is superior to conventional solvents, such as acetone, which serves as a contaminant in several of the above-mentioned applications where high purity acetylene is required. Acetone serves as a contaminant that can adversely affect the properties of carbon membranes used during electronic device manufacturing.

[0038] As has been described, the present invention presents a novel solvent which exhibits increased non-toxicity characterized by the absence of an H360 hazard statement code, while still maintaining acetylene solubilizing capabilities in a manner that allows for the withdrawal of a high purity acetylene product from storage and delivery containers.

[0039] Each of the improved solvents 2a has a different solubilizing capacity for acetylene 2b, which translates into a specific volume expansion of the solvent 2a within the cylinder 1. The loading of each of the solvents 2a into the cylinder 1 must be determined solvent by solvent, and taking into account the volume expansion of the particular solvent 2a due to the gaseous acetylene 2b dissolved in the particular solvent 2a, so that sufficient free space of at least about 10% of the cylinder free body volume is maintained in the cylinder 1 to ensure that the cylinder will not become fully hydraulic. In addition, the loading amount of each improved solvent 2a must allow sufficient acetylene to be dissolved therein without over-pressurizing the cylinder 1. Therefore, the importance of the loading parameters for each of the improved solvents 2a of the present invention to be loaded into the cylinder 1 is a unique value, as has been experimentally determined by the applicant. For example, the amount of mesityl oxide that can be loaded into the cylinder 1 is no more than about 0.54 kg of mesityl oxide per liter of cylinder volume, preferably no more than about 0.51 kg of mesityl oxide per liter of cylinder volume, and more preferably no more than about 0.49 kg of mesityl oxide per liter of cylinder volume. For another example, the amount of 4-methoxy-4-methyl-2-pentanone that can be loaded into the cylinder 1 is no more than about 0.55 kg of 4-methoxy-4-methyl-2-pentanone per liter of cylinder volume, preferably no more than about 0.53 kg of 4-methoxy-4-methyl-2-pentanone per liter of cylinder volume, and more preferably no more than about 0.50 kg of 4-methoxy-4-methyl-2-pentanone per liter of cylinder volume.

[0040] Although certain embodiments of what are considered to be the present invention have been shown and described, it should of course be understood that modifications and changes in form or detail may be readily made without departing from the spirit and scope of the present invention. Therefore, the present invention is not limited to the exact forms and details shown and described herein, nor is it limited to anything within the overall scope of the present invention disclosed herein and hereinafter claimed.

Claims

1. An acetylene fluid supply package, comprising: Pressure vessels; A porous filler in the pressure vessel; an improved solvent within the porous filler, the improved solvent solubilizing acetylene absorbed within the improved solvent; The improved solvents include all of the following attributes: (i) a vapor pressure of 6 + / - 3 Torr or less at 20 degrees; (ii) Hansen solubility factor (dH) greater than 5 MPa 0.5 ; (iii) higher non-toxicity compared to dimethylformamide (DMF) and N-methylpyrrolidone (NMP); and (iv) a chemical structure comprising O, N or F atoms, wherein at least one of the O, N or F atoms is not bonded to a hydrogen atom, and further wherein the chemical structure is characterized by the absence of phosphorus, boron, calcium and nickel; Wherein the improved solvent is mesityl oxide, and the mesityl oxide is loaded into the pressure vessel in an amount of no more than 0.54 kg of mesityl oxide per liter of the pressure vessel volume.

2. The acetylene fluid supply package of claim 1 further comprising acetylene at a stable state at a pressure up to 300 psig under ambient conditions.

3. The acetylene fluid supply package of claim 1, wherein the improved solvent is mesityl oxide, and the mesityl oxide is loaded into the pressure vessel in an amount of no more than 0.51 kg of mesityl oxide per liter of the pressure vessel volume.

4. The acetylene fluid supply package of claim 1, wherein the improved solvent is mesityl oxide, and the mesityl oxide is loaded into the pressure vessel in an amount of no greater than 0.49 kg of mesityl oxide per liter of the pressure vessel volume.

5. An acetylene fluid supply package, comprising Pressure vessels; A porous filler in the pressure vessel; an improved solvent within the porous filler, the improved solvent solubilizing acetylene absorbed within the improved solvent; The improved solvents include all of the following attributes: (i) a vapor pressure of 6 + / - 3 Torr or less at 20 degrees; (ii) Hansen solubility factor (dH) greater than 5 MPa 0.5 ; (iii) higher non-toxicity compared to dimethylformamide (DMF) and N-methylpyrrolidone (NMP); and (iv) a chemical structure comprising O, N or F atoms, wherein at least one of the O, N or F atoms is not bonded to a hydrogen atom, and further wherein the chemical structure is characterized by the absence of phosphorus, boron, calcium and nickel; The improved solvent is 4-methoxy-4-methyl-2-pentanone, and the 4-methoxy-4-methyl-2-pentanone is loaded into the pressure vessel in an amount of no more than 0.55 kg of 4-methoxy-4-methyl-2-pentanone per liter of the pressure vessel volume.

6. The acetylene fluid supply package of claim 5, further comprising acetylene at a stable state at a pressure up to 300 psig under ambient conditions.

7. The acetylene fluid supply package of claim 5, wherein the improved solvent is 4-methoxy-4-methyl-2-pentanone, and the 4-methoxy-4-methyl-2-pentanone is loaded into the pressure vessel in an amount of no more than 0.53 kg of 4-methoxy-4-methyl-2-pentanone per liter of the pressure vessel volume.

8. The acetylene fluid supply package of claim 5, wherein the improved solvent is 4-methoxy-4-methyl-2-pentanone, and the 4-methoxy-4-methyl-2-pentanone is loaded into the pressure vessel in an amount of no more than 0.50 kg of 4-methoxy-4-methyl-2-pentanone per liter of the pressure vessel volume.

9. A system comprising at least one acetylene fluid supply package and a process tool utilizing acetylene, the process tool utilizing acetylene being in fluid communication with the at least one acetylene fluid supply package, the at least one acetylene fluid supply package comprising: Pressure vessels; A porous filler in the pressure vessel; an improved solvent within the porous filler, the improved solvent solubilizing acetylene absorbed within the improved solvent; The improved solvents include all of the following attributes: (i) a vapor pressure of 6 + / - 3 Torr or less at 20 degrees; (ii) Hansen solubility factor (dH) greater than 5 MPa 0.5 ; (iii) higher non-toxicity compared to dimethylformamide (DMF) and N-methylpyrrolidone (NMP); and (iv) a chemical structure comprising O, N or F atoms, wherein at least one of the O, N or F atoms is not bonded to a hydrogen atom, and further wherein the chemical structure is characterized by the absence of phosphorus, boron, calcium and nickel; wherein said at least one acetylene fluid supply package is configured to allow discharge of said acetylene fluid under a dispensing condition; Further, wherein the acetylene-utilizing processing tool is configured to receive the acetylene fluid from the at least one acetylene fluid supply package; and Further, the improved solvent is mesityl oxide or 4-methoxy-4-methyl-2-pentanone, the mesityl oxide is loaded into the pressure vessel in an amount of no more than 0.54 kg of mesityl oxide per liter of the pressure vessel volume, and the 4-methoxy-4-methyl-2-pentanone is loaded into the pressure vessel in an amount of no more than 0.55 kg of 4-methoxy-4-methyl-2-pentanone per liter of the pressure vessel volume.

10. The system of claim 9, wherein the processing tool comprises a chemical vapor deposition tool.

11. The system of claim 9, wherein the at least one acetylene fluid supply package is contained in a gas box.

12. The system of claim 9, wherein the vapor pressure is 9 Torr or less.

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