An inspection mechanism capable of detecting wafers of different sizes

Abstract

The present invention discloses a detection mechanism capable of detecting wafers of different sizes, comprising at least two detection components, a switching device and a driving device. Each detection component includes a pair of opposed sensors for detecting wafers, and each detection component corresponds to detecting wafers of different sizes. The driving device is connected to the switching device. Within different stroke ranges of the driving device during operation, only one detection component is driven by the switching device to extend out for wafer detection. On the one hand, it can be compatible with the mapping detection of wafer devices of different sizes and specifications. On the other hand, it effectively avoids manual replacement, improves efficiency, and also avoids repeated disassembly and assembly of the wafer loader, improving the service efficiency and lifespan of the wafer loader.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor processing equipment, and particularly to a detection mechanism capable of detecting wafers of different sizes. Background Art

[0002] With the rapid development of electronic products, the demand for wafers in the electronic market is increasing day by day, and higher requirements are put forward for the production capacity and quality of wafers. A wafer loader is a device for loading wafers at the front end of wafer production and processing equipment. The wafer loader is used to open a wafer loading cassette and detect the wafers therein. In order to detect the position of the wafers, a detection mechanism is provided on the wafer loader, and the detection mechanism detects the position and posture of the wafers in the wafer loading cassette through a pair of opposed sensors.

[0003] Currently, there are various size specifications for wafers, but generally only a detection mechanism for wafers of one size is installed on the wafer loader. The main reason is that the size differences of wafers of different sizes are relatively large, and the size differences of the loading cassettes for loading wafers of different sizes are also relatively large. Moreover, a pair of opposed sensors for detecting wafers need to extend into the wafer cassette. The distance between the opposed sensors for detecting relatively large-sized wafers is relatively large, resulting in the inability to extend into the loading cassette for relatively small-sized wafers to detect the wafers. At the same time, the distance between the opposed sensors for detecting relatively small-sized wafers is relatively small, and it cannot be accurately used for detecting relatively large-sized wafers. Therefore, it is necessary to replace the wafer detection device to detect wafers of different sizes. In order to improve the use efficiency of the wafer loader, generally, the loading function for wafers of different sizes is compatible. When replacing the wafer detection device, it is replaced manually. At the same time, when replacing, the entire wafer loader needs to be disassembled. After replacing the wafer detection device, the wafer detection device needs to be reinstalled into the equipment. It takes a certain amount of time to replace once. On the other hand, it increases the number and time of personnel entering the wafer factory, bringing inevitable pollution to the wafer production space with high environmental requirements, which has a great impact on production. Moreover, disassembling and assembling the wafer loader will also affect the docking accuracy of the manipulator or the crane system docked with it. Summary of the Invention

[0004] To overcome the above disadvantages, the purpose of the present invention is to provide a detection mechanism capable of detecting wafers of different sizes. On the one hand, it can be compatible with the mapping detection of wafer devices of different sizes. On the other hand, it effectively avoids manual disassembly and replacement, improves efficiency, and also avoids repeated disassembly and assembly of the wafer loader, improving the use efficiency and service life of the wafer loader.

[0005] To achieve the above purpose, the technical solution adopted by the present invention is: a detection mechanism capable of detecting wafers of different sizes, characterized in that: it includes at least two pairs of detection components, a switching device, and a driving device. Each pair of the detection components is used to detect wafers of different sizes, and the driving device is connected to the switching device;

[0006] The switching device includes a cam assembly. The cam assembly includes a rotating shaft corresponding to the detection component. A detection bracket corresponding to it is fixed on each pair of the rotating shafts. A pair of detection components are fixed on a pair of detection brackets. A cylindrical groove cam is sleeved on each rotating shaft. In different stroke ranges of the driving device during operation, at the same moment, only a pair of the rotating shafts are driven to rotate along their own axes, thereby driving the corresponding pair of detection components to extend for wafer detection.

[0007] The beneficial effects of the present invention are as follows: Each pair of rotating shafts corresponds to a pair of detection brackets. Two specifications of detection brackets are used to fix detection components for detecting different sizes, so as to perform mapping detection on wafer devices of different specifications. At the same time, due to the setting of the cylindrical groove cam, the driving device can push the rotating shaft to rotate, and at the same time, only a pair of rotating shafts can rotate synchronously and reversely at the same time, that is, at the same moment, only a pair of detection components work. It effectively avoids manual disassembly and replacement, improves efficiency. It also avoids repeated disassembly and assembly of the wafer loader, improving the service efficiency and life of the wafer loader.

[0008] Furthermore, the cylindrical groove cam is a hollow cylinder, sleeved on the rotating shaft respectively. A groove is also provided on the outer wall of the cylindrical groove cam. The groove includes a long straight groove, a curve groove and a short straight groove. The curve groove is located between the long straight groove and the short straight groove and is connected to the long straight groove and the curve groove. The curve groove occupies a 90-degree arc surface, that is, the inlet and outlet of the curve groove span 90 degrees in the circumferential direction of the cylindrical groove cam. When the movable pin moves in the long straight groove, since the long straight groove is parallel to the axis of the first rotating shaft, the cylindrical groove cam will not rotate at this time. But when the movable pin moves to the curve groove, due to the structure of the curve groove, during the up and down movement of the movable pin, the cylindrical groove cam will inevitably rotate, thereby driving the rotating shaft to rotate so that the detection bracket swings. Since the curve groove occupies a certain arc surface, when the movable pin slides in the curve groove, the entire cylindrical groove cam rotates 90 degrees, that is, it ensures a 90-degree swing of the detection bracket. And the curve grooves of the cylindrical groove cams on each pair of rotating shafts are at different heights. Ensure that the movable pin only enters the curve groove positions of a pair of cylindrical groove cams at the same time, and only a pair of rotating shafts can be driven to rotate at the same time.

[0009] Furthermore, when the cylindrical groove cams are at the same height, the length of the long straight groove along the axial direction of the cylindrical groove cam is greater than the sum of the length of the curve groove along the axial direction of the cylindrical groove cam and the length of the short straight groove along the axial direction of the cylinder. Ensure that the movable pin is only in the curve grooves of a pair of rotating shafts at the same moment, while other movable pins are in the long straight grooves. But when the cylindrical groove cams are at different heights, as long as it is ensured that the curve grooves of the cylindrical groove cams on each pair of rotating shafts are at different heights.

[0010] Furthermore, the switching device further includes a movable pin correspondingly arranged with the cylindrical groove cam. The movable pin can be inserted into the groove and slide along the groove. The movable pins are fixedly connected to the driving device and are synchronously lifted and lowered under the action of the driving device. When the movable pins move up and down along the curved groove, they can drive the cylindrical groove cam to rotate around its own axis. When the movable pins move up and down along the long straight groove or the short straight groove, the cylindrical groove cam remains stationary, that is, when the movable pins are located in the long straight groove or the short straight groove, the cylindrical groove cam does not rotate.

[0011] Furthermore, the rotating shafts are all rotatably connected to the cross bar. The rotating shafts include a pair of first rotating shafts and a pair of second rotating shafts. The second rotating shafts are located outside the first rotating shafts. The two cylindrical groove cams arranged on the pair of first rotating shafts are designed in a mirror image structure, and the two cylindrical groove cams arranged on the pair of second rotating shafts are designed in a mirror image structure. The distance between the first rotating shafts is smaller than the distance between the second rotating shafts. The detection components on the first rotating shafts are used to detect wafers with smaller sizes, while the detection components on the second rotating shafts are used to detect wafers with larger sizes. The mirror image structure of the cylindrical groove cams on the pair of rotating shafts ensures that the pair of rotating shafts can rotate synchronously and in opposite directions.

[0012] Furthermore, the cylindrical groove cam arranged on the first rotating shaft and the cylindrical groove cam arranged on the second rotating shaft are arranged in an inverted manner with respect to each other, and the installation heights of the cylindrical groove cams in the vertical plane are the same. The cylindrical groove cams inverted at the same height ensure that the curved grooves on the first rotating shaft and the curved grooves on the second rotating shaft are at different heights. At the same time, when the movable pins move up and down, they can only enter a pair of curved grooves and push the rotating shafts to rotate.

[0013] Set the zero position of the driving device so that when the driving device is at the zero position, the movable pin is at the middle position in the height direction of the cylindrical groove cam. When the driving device drives the movable pin to move vertically downward synchronously, the movable pin of the cylindrical groove cam sleeved on the second rotating shaft slides along the curved groove. Since the movable pin has only the freedom of movement in the vertical direction and cannot move in the left and right directions, the curved groove of the cylindrical groove cam sleeved on the second rotating shaft will rotate due to the lateral component force of the corresponding movable pin, and the second rotating shaft rotates synchronously. Since the pair of cylindrical groove cams on the second rotating shaft are designed in a mirror image structure, they rotate in the opposite direction synchronously. Also, the groove includes a curved groove occupying a 90-degree arc surface. After the movable pin slides over the curved groove, the pair of cylindrical groove cams on the second rotating shaft both rotate 90°, and the second rotating shaft rotates 90° synchronously. While the movable pin of the cylindrical groove cam sleeved on the first rotating shaft slides along the straight groove. Since the movable pin has only the freedom of movement in the vertical direction and cannot move in the left and right directions, the curved groove of the cylindrical groove cam sleeved on the first rotating shaft cannot rotate due to the restriction of the corresponding movable pin and remains stationary. On the contrary, when the driving assembly drives the movable pin to move upward synchronously from the zero position, the first rotating shaft and the cylindrical groove cam sleeved thereon will rotate synchronously, while the second rotating shaft and the cylindrical groove cam sleeved thereon will remain stationary.

[0014] Furthermore, the detection bracket includes a detection short bracket fixed on a pair of first rotating shafts and a detection long bracket fixed on a pair of second rotating shafts. The length of the detection long bracket is greater than that of the detection short bracket. The detection long bracket and the detection short bracket are at different heights in the vertical direction. Positioning shoulders at different heights are respectively provided on the first rotating shaft and the second rotating shaft to facilitate the fixation of the detection bracket. When the sensor long bracket and the detection short bracket are at different heights in the vertical plane, it is ensured that the detection long bracket and the detection short bracket will not collide when in the retracted state.

[0015] Furthermore, the driving device includes a driving assembly and a push rod fixedly connected to the output shaft of the driving assembly. A plurality of movable pins are all fixed on one push rod. When a driving assembly drives the push rod to move up and down, it can drive the plurality of movable pins to move synchronously.

[0016] Furthermore, the plurality of movable pins are at the same height in the vertical direction. They can also be arranged at different heights according to the position of the cylindrical groove cam. The specific position of the movable pin is determined by the cylindrical groove cam.

[0017] Furthermore, the driving assembly includes a lead screw and a driving member. The driving member is fixed on the cross bar and can drive the lead screw to rotate along its own axial direction. The lead screw is rotatably connected to the cross bar and is arranged parallel to the first rotating shaft. The push rod is threadedly connected to the lead screw. Driven by the lead screw, the movement of the push rod is more stable.

[0018] Furthermore, the driving member and the lead screw are driven by a transmission assembly. The transmission assembly includes a driving gear and a driven gear meshing with the driving gear. The output end of the driving member passes through the cross bar and is fixedly installed with a driving gear that can rotate under its drive. The driven gear is fixed to the lower end of the lead screw passing through the cross bar. The diameter of the driving gear is smaller than that of the driven gear. Using the small gear on the driving member to drive the large gear on the lead screw can further reduce the speed and increase the output torque. In addition, gear transmission is beneficial to the parallel arrangement of the output shaft of the driving member and the lead screw, and can minimize the space required for arranging the driving member to the greatest extent.

[0019] Furthermore, a cross beam parallel to the cross bar is also fixed above the cross bar through a support shaft. The rotating shaft is rotationally connected between the cross bar and the cross beam along its own axial direction. The push rod is sleeved on the support shaft and can move up and down along the support shaft. The cross beam and the support shaft can make the overall structure more stable. At the same time, the support rod also serves as a guide rod for the push rod to improve the stability of the push rod movement.

[0020] Furthermore, the driving member is a motor. The output end of the motor is connected with a reducer, and the rear end of the motor is connected with an encoder. There is an installation hole on the cross bar. The reducer is sleeved in the installation hole, and the output shaft of the reducer extends out of the installation hole and is fixedly installed with the driving gear.

[0021] The forward or reverse rotation of the motor can drive the forward or reverse rotation of the lead screw through the transmission assembly. The lead screw drives the push rod to move up or down, and then the movable pin moves up or down synchronously. The encoder is an absolute encoder. The zero position set by the encoder corresponds to the zero position of the driving device, that is, corresponding to the middle position of the push rod and the movable pin in the height direction of the cylindrical groove cam. Through the absolute encoder, the absolute position of the push rod can be known, which is convenient for the system to obtain the position of the detection bracket in real time, perform precise control and judge the signal for the forward or reverse rotation of the motor. During the process of the detection bracket unfolding from the retracted state, when the motor drives the detection bracket to unfold 90°, a pair of corresponding detection components form a test circuit. After the signal of the closed test circuit is transmitted to the system, the system sends a signal to the motor to stop moving, and maintains the test circuit of the detection components until the detection of the wafer is completed.

[0022] Furthermore, the driving assembly includes a double-stroke cylinder. The cylinder body of the double-stroke cylinder is fixed on the bottom plate, and the piston rod of the double-stroke cylinder pushes the push rod to move up and down. The double-stroke cylinder directly pushes the push rod to move up and down.

[0023] Furthermore, a pair of detection components are a pair of opposed sensors fixed on a pair of detection brackets. Installation grooves for installing the opposed sensors are provided on the detection brackets. A pair of opposed sensors form an optoelectronic circuit, which is convenient for detecting the wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is the front view of the zero position state of the first embodiment of the present invention;

[0025] Figure 2 Isometric view of the zero position state of Embodiment 1 of the present invention;

[0026] Figure 3 Schematic three-dimensional diagram of the deployed state of the short bracket detected in Embodiment 1 of the present invention;

[0027] Figure 4 Schematic three-dimensional diagram of the deployed state of the long bracket detected in Embodiment 1 of the present invention;

[0028] Figure 5 Schematic three-dimensional diagram of the cylindrical groove cam in Embodiment 1 of the present invention;

[0029] Figure 6 Schematic three-dimensional diagram of the cylindrical groove cam from another angle in Embodiment 1 of the present invention;

[0030] Figure 7 Schematic diagram of the chute unfolded along the circumference in Embodiment 1 of the present invention;

[0031] Figure 8 Top view of the cylindrical groove cam in Embodiment 1 of the present invention;

[0032] Figure 9 Schematic three-dimensional structure diagram of the movable pin in Embodiment 1 of the present invention;

[0033] Figure 10 Schematic three-dimensional structure diagram of the first rotating shaft in Embodiment 1 of the present invention;

[0034] Figure 11 Schematic three-dimensional structure diagram of the second rotating shaft in Embodiment 1 of the present invention;

[0035] Figure 12 Front view of the zero position state of Embodiment 2 of the present invention;

[0036] Figure 13 Schematic diagram of the state of the small wafer detected by the detection mechanism in Embodiment 1 of the present invention;

[0037] Figure 14 Schematic diagram of the state of the large wafer detected by the detection mechanism in Embodiment 1 of the present invention;

[0038] Figure 15 Schematic three-dimensional structure diagram of the short bracket detected in Embodiment 1 of the present invention.

[0039] In the figure:

[0040] 1. Cross bar; 2. Support shaft; 3. Cylindrical groove cam; 31. Long straight groove; 32. Curved groove; 33. Short straight groove; 34. Plane; 4. First rotating shaft; 5. Second rotating shaft; 6. Detection short bracket; 61. Swing part; 611. Positioning base surface; 612. Installation groove; 62. Fixed part; 7. Detection long bracket; 8. Through-beam sensor; 9. Bushing; 10. Push rod; 11. Nut seat; 12. Lead screw; 13. Movable pin; 131. Connection part; 132. Round table part; 133. Limit ring; 14. Driven gear; 15. Driving gear; 16. Driving part; 161. Reducer; 162. Motor; 163. Encoder; 17. Positioning shoulder; 18. Cross beam;

[0041] 19. Double-stroke cylinder; 20. Floating joint; 21. Connecting rod. Detailed implementation mode

[0042] The following elaborates on the preferred embodiments of the present invention in conjunction with the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making the protection scope of the present invention more clearly defined.

[0043] Embodiment 1

[0044] In one embodiment, a detection mechanism for detecting wafers of different sizes according to the present invention includes at least two detection components, a switching device, and a driving device. Each detection component includes a pair of through-beam sensors 8 for detecting wafers, and each detection component corresponds to detecting wafers of different sizes. The driving device is connected to the switching device, and within different stroke ranges of the driving device's movement, only one detection component is driven to extend through the switching device for wafer detection.

[0045] Refer to the attached Figure 1 and 2 As shown, the detection mechanism further includes a cross bar 1, the switching device is arranged on the cross bar 1, and the switching device includes a cam assembly. The cam assembly includes at least two pairs of rotating shafts rotatably connected to the cross bar 1, and the rotating shafts are arranged corresponding to the detection components. A pair of detection brackets corresponding to the rotating shafts are fixed on one pair of rotating shafts, and a pair of through-beam sensors 8 are fixed on the pair of detection brackets. A cylindrical groove cam 3 is sleeved on each rotating shaft, and the driving device can drive only one pair of rotating shafts to rotate along their own axes within different stroke ranges at the same time, thereby driving the detection brackets on the rotating shafts to rotate.

[0046] Refer to the attached Figure 1 and 2As shown in the figure, there are two pairs of rotating shafts, including a pair of first rotating shafts 4 and a pair of second rotating shafts 5. The second rotating shafts 5 are located outside the first rotating shafts 4, and the axes of the first rotating shafts 4 and the second rotating shafts 5 are parallel to each other and located in the same vertical plane. A pair of detection short brackets 6 are fixed on the first rotating shafts 4. The two detection short brackets 6 are respectively fixedly connected to the two first rotating shafts 4, and the two detection short brackets 6 are in a mirror image structure. A pair of detection long brackets 7 are fixed on the second rotating shafts 5. The two detection long brackets 7 are respectively fixedly connected to the two second rotating shafts 5, and the two detection long brackets 7 are in a mirror image structure. Both the detection long brackets 7 and the detection short brackets 6 are arranged perpendicular to the axis of the first rotating shafts 4, and the length of the detection long brackets 7 is greater than the length of the detection short brackets 6. That is, the lengths of the detection long brackets 7 and the detection short brackets 6 respectively adapt to wafers with relatively large sizes and wafers with relatively small sizes to be detected. A pair of transmitting ends and receiving ends of a pair of opposed sensors 8 are respectively arranged on a pair of detection long brackets 7, and a pair of transmitting ends and receiving ends of another pair of opposed sensors 8 are also arranged on a pair of detection short brackets 6.

[0047] The driving device can drive the first rotating shafts 4 and the second rotating shafts 5 to rotate around their own axes respectively within different stroke ranges. That is, at the same time, only one of the pair of first rotating shafts 4 and the pair of second rotating shafts 5 can be driven to rotate synchronously and reversely along its own axis. That is, within the same time, the two first rotating shafts 4 rotate synchronously and reversely, and the two second rotating shafts 5 do not rotate, or the two second rotating shafts 5 rotate synchronously and reversely, and the two first rotating shafts 4 do not rotate.

[0048] A cylindrical groove cam 3 is sleeved on each of the first rotating shafts 4 and the second rotating shafts 5. The cylindrical groove cam 3 is fixed on the first rotating shafts 4 and the second rotating shafts 5 and rotates synchronously with the first rotating shafts 4 and the second rotating shafts 5.

[0049] Refer to the appendix Figure 5 As shown in the figure, the cylindrical groove cam 3 is a hollow cylinder and is respectively sleeved on the first rotating shafts 4 and the second rotating shafts 5. A groove is also opened on the outer wall of the cylindrical groove cam 3, and the groove runs through the cylindrical groove cam 3 up and down. The groove includes a long straight groove 31, a curved groove 32 and a short straight groove 33. The curved groove 32 is located between the long straight groove 31 and the short straight groove 33 and is connected to the long straight groove 31 and the curved groove 32. The curved groove 32 occupies a 90-degree arc surface. That is, the inlet and outlet of the curved groove 32 span 90 degrees in the circumferential direction of the cylindrical groove cam 3. Refer to the appendix Figure 8 As shown in the figure, from the top view angle of the cylindrical groove cam 3, the connection line from the inlet of the curved groove 32 to the midpoint of the axis of the cylindrical groove cam 3 and the connection line from the outlet of the curved groove 32 to the midpoint of the axis of the cylindrical groove cam 3 form a 90-degree angle. The long straight groove 31 and the short straight groove 33 are arranged along the axis of the cylindrical groove cam 3. The curved groove 32 is in an S shape and is arranged along the circumferential direction of the cam. The long straight groove 31 and the short straight groove 33 are respectively tangent to both ends of the curved groove 32.

[0050] The cylindrical groove cams 3 installed on the first rotating shaft 4 and the second rotating shaft 5 have the same structure, but the cylindrical groove cams 3 on the first rotating shaft 4 and the second rotating shaft 5 are arranged in an inverted manner, that is, the cylindrical groove cams 3 on the first rotating shaft 4 and the cylindrical groove cams 3 on the second rotating shaft 5 are installed upside down, that is, the curve groove 32 of the cylindrical groove cam 3 sleeved on the first rotating shaft 4 is arranged on the upper part, and the curve groove 32 of the cylindrical groove cam 3 sleeved on the second rotating shaft 5 is arranged on the lower part. Ensure that the curve grooves 32 of the cylindrical cams 3 on the first rotating shaft 4 and the curve grooves 32 of the cylindrical cams 3 on the second rotating shaft 5 are at different heights.

[0051] When three pairs of rotating shafts are provided, the curve grooves of the cylindrical groove cams on each pair of rotating shafts are at different heights, ensuring that the movable pins 13 can only enter the curve groove positions of one pair of cylindrical groove cams at the same time.

[0052] A pair of cylindrical groove cams 3 arranged on a pair of first rotating shafts 4 are designed in a mirror image structure. Similarly, a pair of cylindrical groove cams 3 arranged on a pair of second rotating shafts 5 are designed in a mirror image structure, ensuring that a pair of first rotating shafts 4 rotate synchronously in opposite directions and a pair of second rotating shafts 5 rotate synchronously in opposite directions.

[0053] The cylindrical groove cams 3 are arranged in a mirror image on a pair of first rotating shafts 4, that is, the two cylindrical groove cams 3 installed on a pair of first rotating shafts 4 are symmetric about the center line of the connection line of the first rotating shafts 4 and have the same installation height. The mirror image structure of the cylindrical groove cams 3 on the first rotating shafts 4 ensures that the two first rotating shafts 4 can rotate synchronously in opposite directions, and further enables the two detection short brackets 6 fixed on the two first rotating shafts 4 to swing in opposite directions in the same horizontal plane. The cylindrical groove cams 3 are arranged in a mirror image on a pair of second rotating shafts 5, that is, the two cylindrical groove cams 3 installed on a pair of second rotating shafts 5 are symmetric about the center line of the connection line of the second rotating shafts 5 and have the same installation height. The mirror image structure of the cylindrical groove cams 3 on the second rotating shafts 5 ensures that the two second rotating shafts 5 can rotate synchronously in opposite directions, and further enables the two detection long brackets 7 on the two second rotating shafts 5 to swing in opposite directions in the same horizontal plane.

[0054] The switching device further includes a movable pin 13 corresponding to the cylindrical groove cam 3. The end of the movable pin 13 is inserted into the groove and can move along the groove. The movable pin 13 is connected to the driving device and moves up and down under the drive of the driving device. When the movable pin 13 moves up and down, it can drive the cylindrical groove cam 3 to rotate around its own axis.

[0055] The moving direction of the movable pin 13 is parallel to the axial direction of the first rotating shaft 4. When the movable pin 13 moves in the long straight groove 31, since the long straight groove 31 and the axis of the first rotating shaft 4 are parallel, the cylindrical groove cam 3 will not rotate at this time. However, when the movable pin 13 moves to the curved groove 32, due to the structure of the curved groove 32, during the up and down movement of the movable pin 13, the cylindrical groove cam 3 will inevitably rotate, thereby driving the first rotating shaft 4 or the second rotating shaft 5 to rotate, so that the detection long bracket 7 or the detection short bracket 6 swings. Since the curved groove 32 occupies a 90-degree arc surface, when the movable pin 13 slides in the curved groove 32, the entire cylindrical groove cam 3 rotates 90 degrees, that is, it ensures the 90-degree swing of the detection long bracket 7 or the detection short bracket 6.

[0056] When the driving device drives the movable pin 13 to move vertically downward, the movable pin 13 of the cylindrical groove cam 3 sleeved on the second rotating shaft 5 slides along the curved groove 32. Since the movable pin 13 has only the freedom of movement in the vertical direction and cannot move in the left and right directions, the curved groove 32 of the cylindrical groove cam 3 sleeved on the second rotating shaft 5 will rotate due to the lateral component force of the corresponding movable pin 13, and the second rotating shaft 5 will rotate synchronously. Since the pair of cylindrical groove cams 3 on the second rotating shaft 5 are designed in a mirror image structure, they rotate synchronously in the opposite direction. The curved groove 32 occupies a 90-degree arc surface. After the movable pin 13 slides past the curved groove 32, the pair of cylindrical groove cams 3 on the second rotating shaft 5 both rotate 90°, and the second rotating shaft 5 rotates synchronously 90°. And the movable pin 13 of the cylindrical groove cam 3 sleeved on the first rotating shaft 4 slides along the long straight groove 31. Since the movable pin 13 has only the freedom of movement in the vertical direction and cannot move in the left and right directions, the curved groove 32 of the cylindrical groove cam 3 sleeved on the first rotating shaft 4 cannot rotate due to the restriction of the corresponding movable pin 13 and remains stationary. On the contrary, when the driving assembly drives the push rod 10 and the movable pin 13 to move upward synchronously from the zero position, the first rotating shaft 4 and the cylindrical groove cam 3 sleeved thereon will rotate synchronously, while the second rotating shaft 5 and the cylindrical groove cam 3 sleeved thereon will remain stationary.

[0057] Refer to the attached Figure 1 and 2 As shown, the driving device includes a driving assembly and a push rod 10 fixedly connected to the output shaft of the driving assembly. A plurality of movable pins 13 are fixedly connected to one push rod 10 together. The plurality of movable pins are all at the same height. However, when the cylindrical groove cams 3 are at different heights, the movable pins may not be at the same height, and the height of the movable pins is flexibly adjusted according to the position of the cylindrical groove cams 3.

[0058] The driving component in this embodiment includes a lead screw 12 and a driving member 16 for driving the lead screw 12 to rotate along its own axial direction. The lead screw 12 is rotatably connected to the cross bar 1 and is arranged parallel to the first rotating shaft 4. The driving member 16 is fixed on the cross bar 1. A nut seat 11 is fixed on the push rod 10, which is sleeved outside the lead screw 12 and is threadedly connected to the lead screw 12. When the driving member 16 drives the lead screw 12 to rotate, the nut seat 11 moves up and down along the lead screw 12, thereby driving the push rod 10 and the movable pin 13 to move up and down.

[0059] The driving member 16 and the lead screw 12 are driven by a transmission component. The transmission component includes a driving gear 15 and a driven gear 14 meshing with the driving gear 15. The output end of the driving member 16 is fixed with a driving gear 15 that can rotate under its drive. A driven gear 14 meshing with the driving gear 15 is fixed on the lead screw 12. Both the driving gear 15 and the driven gear 14 are located at the lower end of the cross bar 1.

[0060] The transmission component can also be a transmission belt and a transmission wheel, as long as it can drive the lead screw 12 to rotate when the driving member 16 acts.

[0061] The driving member 16 is a motor 162. The output end of the motor 162 is connected with a speed reducer 161. The rear end of the motor 162 is connected with an encoder 163. There is a mounting hole on the cross bar 1. The speed reducer 161 is sleeved in the mounting hole. The output shaft of the speed reducer 161 extends out of the mounting hole and is fixedly installed with the driving gear 15. The use of the speed reducer 161 can reduce the rotation speed of the motor 162, reduce the moment of inertia of the moving parts, make the movement more stable. At the same time, the speed reducer 161 can increase the torque of the motor 162, reduce the size of the motor 162 by increasing its torque, and make the whole device more compact and lightweight. When the motor 162 rotates forward and backward, it can drive the lead screw 12 to rotate clockwise and counterclockwise through the transmission of the driving gear 15 and the driven gear 14, thereby driving the nut seat 11 and the push rod 10 to move up and down.

[0062] The encoder 163 used in this embodiment is an absolute encoder 163. The zero position set by the encoder 163 corresponds to the zero position of the driving component, that is, it corresponds to the middle position of the push rod 10 and the movable pin 13 in the height direction of the cylindrical groove cam 3. Through the absolute encoder 163, the absolute position of the push rod 10 can be known, which is convenient for the system to obtain the positions of the detection long bracket 7 and the detection short bracket 6 at all times, and perform precise control and judge the signal for the motor 162 to rotate forward or backward. During the process of the detection long bracket 7 or the detection short bracket 6 unfolding from the retracted state, after the motor 162 drives the detection long bracket 7 or the detection short bracket 6 to unfold 90°, a pair of opposed sensors 8 form a photoelectric circuit. After the signal of the closed photoelectric circuit is transmitted to the system, the system sends a signal to the motor 162 to stop moving, and maintains the photoelectric circuit of the opposed sensors 8 until the detection of the wafer is completed.

[0063] To improve the stability of the rotation of the first rotating shaft 4 and the second rotating shaft 5, a cross beam 18 parallel to the cross bar 1 is also fixed above the cross bar 1 through a support shaft 2. The first rotating shaft 4 and the second rotating shaft 5 are rotationally connected between the cross bar 1 and the cross beam 18 along their own axial directions. Deep groove ball bearings are arranged on both the support shaft 2 and the cross bar 1. Bushings are fixed at the ends of the first rotating shaft 4 and the second rotating shaft 5, and the bushings can be inserted into the deep groove ball bearings to be rotationally connected with the deep groove ball bearings.

[0064] The push rod 10 is sleeved on the support shaft 2 and can move up and down along the support shaft 2, improving the stability of the movement of the push rod 10. A bushing 9 that can move up and down along the support shaft 2 is arranged on the push rod 10. At the same time, the lead screw 12 is located at the middle position between the two first rotating shafts 4, making the two first rotating shafts 4 and the two second rotating shafts 5 axially symmetric with respect to the lead screw 12, improving the stability of the entire detection mechanism.

[0065] Since the cylindrical groove cams 3 on the first rotating shaft 4 and the second rotating shaft 5 are arranged upside down, at the same time, the movable pin 13 enters the curved groove 32 on the cylindrical groove cam 3 on the first rotating shaft 4 and the long straight groove 31 on the cylindrical groove cam 3 on the second rotating shaft 5, or enters the long straight groove 31 on the cylindrical groove cam 3 on the first rotating shaft 4 and the curved groove 32 on the cylindrical groove cam 3 on the second rotating shaft 5. That is, only one of the first rotating shaft 4 and the second rotating shaft 5 can rotate at the same time, and one of the detection short bracket 6 and the detection long bracket 7 can swing. In the initial state, the movable pin 13 is located in the long straight groove 31 on the cylindrical groove cam 3 on the first rotating shaft 4 and the long straight groove 31 on the cylindrical groove cam 3 on the second rotating shaft 5.

[0066] See the appendix Figure 7 As shown, the length of the long straight groove 31 along the axial direction of the cylindrical groove cam 3 is L1, the length of the curved groove 32 along the axial direction of the cylindrical groove cam 3 is S, and the length of the short straight groove 33 along the axial direction of the cylindrical groove cam 3 is L2, where L1 > S > L2, and L1 > S + L2. When the cylindrical groove cams 3 are placed at the same height, the long straight groove 31 uses the longest length. When the movable pin 13 slides in the long straight groove 31, the rotating shaft does not rotate. Therefore, the position where the movable pin 13 is located in the long straight groove 31 is used as the initial zero position. The length of the long straight groove 31 is greater than that of the curved groove 32, ensuring that when the movable pin 13 slides in the curved groove 32 of a group of cylindrical groove cams 3, the movable pin 13 of the other group of cylindrical groove cams 3 is always located in the long straight groove 31, and the situation where the two groups of rotating shafts rotate simultaneously will not occur. When the movable pin 13 moves into the curved groove 32, it can drive the cylindrical groove cam 3 to rotate until it finally slides into the short straight groove 33, completing a 90° rotation of the cylindrical groove cam 3. The short straight groove 33 has the shortest length, saving space. After the movable pin 13 slides into the short straight groove 33, it indicates that the rotation is completed, and the movable pin 13 does not need to slide continuously.

[0067] However, if the cylindrical groove cam 3 is located at different heights in the vertical direction, at this time, it is not necessary to strictly limit L1 > S + L2. Different lengths of long straight grooves, curved grooves, and short straight grooves can be flexibly selected according to the height of the cylindrical groove cam 3, as long as it is ensured that the movable pin only enters a pair of curved grooves at the same time, and during the sliding process in the curved grooves, the movable pin is located in the long straight groove or the short straight groove within the cylindrical groove cam 3 on other pairs of rotating shafts.

[0068] Refer to the appendix Figure 6 As shown, in this embodiment, the cylindrical groove cam 3 is fixedly connected to the first rotating shaft 4 and the second rotating shaft 5 by bolts. A plane 34 is cut axially on the outer wall of the cylindrical groove cam 3. The plane 34 is arranged on the plane symmetric to the axis of the cylindrical groove cam 3 of the straight groove, and the through holes through which the bolts pass are arranged on this plane 34. On the one hand, the bolts abut against the plane 34 to improve the connection stability. On the other hand, the setting of the plane 34 plays a marking role, and the position of the cylindrical groove cam 3 can be intuitively and quickly determined from the plane 34. When the cylindrical groove cam 3 is initially installed, the plane 34 is parallel to the front and rear plates of the cross bar. At this time, the opening of the straight groove faces the movable pin 13, and the movable pin 13 is located in the straight groove.

[0069] A positioning base surface 611 is provided on both the detection long bracket 7 and the detection short bracket 6. Refer to the appendix Figure 15 As shown, both the detection long bracket 7 and the detection short bracket 6 include a swinging part 61 in the shape of a cuboid. An installation groove 612 for embedding the opposed sensor is opened on the upper end surface of the swinging part 61. The two side walls of the swinging part 61 are the positioning base surfaces 611. When initially installed, the positioning base surface 611 is parallel to the plane 34. That is, it is ensured that the detection long bracket 7 and the detection short bracket 6 are in the retracted state in the initial state. When the movable pin 13 slides in the straight groove, the detection long bracket 7 and the detection short bracket 6 are always in the retracted state. A fixing part 62 perpendicular to the swinging part extends along the side wall on one side of the swinging part close to the first rotating shaft and the second rotating shaft. The fixing part is sleeved on the first rotating shaft and the second rotating shaft and is fixedly connected to the first rotating shaft and the second rotating shaft by bolts.

[0070] Refer to the appendix Figure 9 As shown, in this embodiment, the movable pin 13 includes a connecting part 131 with a cylindrical structure and a frustum part 132 with a frustum structure at the end of the connecting part 131. The side of the frustum part 132 away from the connecting part 131 is a small circular surface, and the diameter of the large circular surface of the frustum part 132 is the same as the diameter of the connecting part 131. The movable pin 13 is inserted into the groove from the small circular surface. A limiting ring 133 is arranged circumferentially on the outer wall of the connecting part 131. The limiting ring 133 abuts against the outer wall of the cylindrical groove cam 3 to limit the distance of the movable pin 13 inserted into the groove.

[0071] To ensure that the long detection bracket 7 and the short detection bracket 6 do not collide when in the retracted state, the fixing points of the long detection bracket 7 and the short detection bracket 6 with the second rotating shaft 5 and the first rotating shaft 4 are located at different heights. Refer to the appendix Figure 10 and 11 As shown, positioning shoulders 17 are respectively installed on the first rotating shaft 4 and the second rotating shaft 5 at different heights. The positioning shoulders 17 define the positions of the long detection bracket 7 and the short detection bracket 6, so that the long detection bracket 7 and the short detection bracket 6 are located at different heights in the axial positions of the first rotating shaft 4 and the second rotating shaft 5. The height of the long detection bracket 7 in the vertical plane 34 is higher than that of the short detection bracket 6, or the height of the long detection bracket 7 in the vertical plane 34 can also be lower than that of the short detection bracket 6.

[0072] In the initial state, the drive assembly is placed at the zero position. Refer to the appendix Figure 2 As shown, correspondingly, the positioning bases of a pair of long detection brackets 7 coincide, and the positioning bases of a pair of short detection brackets 6 also coincide. A pair of long detection brackets 7 and a pair of short detection brackets 6 are both in the retracted state, and a pair of opposed sensors 8 are respectively installed on a pair of long detection brackets 7 and a pair of short detection brackets 6. When the motor 162 of the drive assembly starts to act and drives the push rod 10 and the movable pin 13 to move upward synchronously from the zero position, it can drive the first rotating shaft 4 and the short detection bracket 6 to rotate synchronously. After the first rotating shaft 4 and the short detection bracket 6 rotate synchronously by 90°, the positioning bases of a pair of short detection brackets 6 are parallel to each other, and the light emitting part and the light receiving part of a pair of opposed sensors 8 installed thereon are butted to form an optoelectronic circuit, and the detection of wafers of corresponding sizes can be carried out. The state of the detection mechanism at this time is shown in the appendix Figure 4 and 14 As shown. The long detection bracket 7 and the second rotating shaft 5 remain stationary and are still in the retracted state, which will not affect the detection of a pair of opposed sensors 8 on the short detection bracket 6. On the contrary, when the motor 162 of the drive assembly starts to act and drives the push rod 10 and the movable pin 13 to move downward synchronously from the zero position, it can drive the second rotating shaft 5 and the long detection bracket 7 to rotate synchronously. After the second rotating shaft 5 and the long detection bracket 7 rotate synchronously by 90°, the positioning bases of a pair of short and long brackets of the sensors are parallel to each other, and the light emitting part and the light receiving part of a pair of opposed sensors 8 installed thereon are butted to form an optoelectronic circuit, and the detection of wafers of corresponding sizes can be carried out. The state of the detection mechanism at this time is shown in the appendix Figure 3 and the appendix Figure 13 As shown, while the short detection bracket 6 and the first rotating shaft 4 remain stationary and are still in the retracted state, which will not affect the detection of a pair of opposed sensors 8 on the long detection bracket 7.

[0073] Embodiment 2

[0074] Compared with Embodiment 1, this embodiment is only different in the structure of the drive assembly. Refer to the appendix Figure 12As shown in the figure, the drive assembly in this embodiment includes a double-stroke cylinder 19. The double-stroke cylinder 19 is fixed to a bottom plate (not shown in the figure) through a fixed bracket, and the bottom plate is fixedly connected to the cross bar 1. The piston rod of the double-stroke cylinder 19 is fixedly connected with a floating joint 20, the floating joint 20 is connected with a connecting rod 21, and the connecting rod 21 is fixedly connected with a push rod 10. When the double-stroke cylinder 19 acts, it can push the push rod 10 to move up and down.

[0075] The center line of the connection line of the two first rotating shafts 4 coincides with the center line of the connection line of the two second rotating shafts 5, and the double-stroke cylinder 19 is fixed on this center line. That is, the entire cam assembly is arranged in a mirror image with respect to the double-stroke cylinder 19.

[0076] In the initial state, the initial position of the double-stroke cylinder 19 is the extended state of the first stroke. At this time, the movable pin 13 is located at the connection of the long straight groove 31 and the curved groove 32, and both the detection long bracket 7 and the detection short bracket are in the retracted state. When the detection mechanism needs to detect a small-sized wafer, the double-stroke cylinder 19 moves the second stroke. The double-stroke cylinder 19 pushes the push rod 10 to move upward. The movable pin 13 mounted on the push rod 10 moves upward, generating a thrust on the curved groove 32 of the cylindrical groove cam 3 on the first rotating shaft 4, respectively pushing the cylindrical groove cams 3 on the left and right sides of the first rotating shaft 4 to rotate in opposite directions, each rotating 90 degrees. Furthermore, the emission end and the receiving end small holes of the transmissive sensor 8 mounted on the detection short bracket 6 are concentric, which can realize the emission and reception of light, and thus realize the detection function. During this process, the movable pin 13 moves upward and acts on the long straight groove 31 of the cylindrical groove cam 3 on the second rotating shaft 5. Therefore, the cylindrical groove cam 3 fixedly connected to the detection long bracket 7 does not rotate, and thus the detection long bracket 7 always remains in the initial retracted state.

[0077] When the detection mechanism is not operating temporarily or when it is necessary to replace the long detection bracket 7 for operation, the second stroke of the double-stroke cylinder 19 retracts. The double-stroke cylinder 19 pushes the push rod 10 back to the initial position, generating a thrust on the curve groove 32 of the cylindrical groove cam 3 on the first rotating shaft 4. The first rotating shaft 4 rotates in the opposite direction to the above-mentioned rotation process, retracting the short detection bracket 6 to the initial folded state. Then the first stroke of the double-stroke cylinder 19 retracts. The double-stroke cylinder 19 pushes the push rod 10 downward. The movable pin 13 installed on the push rod 10 moves downward, generating a thrust on the curve groove 32 of the cylindrical groove cam 3 on the second rotating shaft 5, respectively pushing the left and right cylindrical groove cams 3 on the second rotating shaft 5 to rotate in opposite directions, each rotating 90 degrees. Furthermore, the emission end and the receiving end holes of the transmissive sensor 8 installed on the long detection bracket 7 are concentric, enabling the emission and reception of light, and thus realizing the function of large-size wafer detection. During this process, the movable pin 13 moves downward and acts on the long straight groove 31 of the cylindrical groove cam 3 on the first rotating shaft 4. Therefore, the cylindrical groove cam 3 fixedly connected to the short detection bracket 6 does not rotate, and thus the short detection bracket 6 always remains in the initial folded state.

[0078] The above embodiments are only for illustrating the technical concept and features of the present invention, and the purpose is to enable those who are familiar with this technology to understand the content of the present invention and implement it. It cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit and essence of the present invention should be covered within the protection scope of the present invention.

Claims

1. A detection mechanism capable of detecting wafers of different sizes, characterized in that: It includes at least two pairs of detection components, a switching device and a driving device. Each pair of the detection components is used to detect wafers of different sizes, and the driving device is connected to the switching device; Wherein the switching device includes a cam assembly. The cam assembly includes a rotating shaft corresponding to the detection components. A detection bracket corresponding to it is fixed on each pair of the rotating shafts. A pair of detection components is fixed on a pair of detection brackets. A cylindrical groove cam is sleeved on each rotating shaft. In different stroke ranges of the driving device during operation, at the same moment, only one pair of the rotating shafts is driven to rotate along its own axis, so as to drive the corresponding pair of detection components to extend for wafer detection; The cylindrical groove cam is a hollow cylinder and is sleeved on the rotating shaft respectively. A groove is also opened on the outer wall of the cylindrical groove cam. The groove includes a long straight groove, a curve groove and a short straight groove. The curve groove is located between the long straight groove and the short straight groove and is communicated with the long straight groove and the short straight groove. The curve groove occupies a 90-degree arc surface; The switching device further includes a movable pin corresponding to the cylindrical groove cam. The movable pin can be inserted into the groove and can slide along the groove. The movable pins are all fixedly connected to the driving device and are synchronously lifted and lowered under the action of the driving device. The movable pin can drive the cylindrical groove cam to rotate around its own axis during the up and down movement along the curve groove, and the cylindrical groove cam remains stationary during the up and down movement of the movable pin along the long straight groove or the short straight groove.

2. The detection mechanism for detecting wafers of different sizes according to claim 1, characterized in that: The length of the long straight groove along the axial direction of the cylindrical groove cam is greater than the sum of the length of the curve groove along the axial direction of the cylindrical groove cam and the length of the short straight groove along the axial direction of the cylinder.

3. The detection mechanism for detecting wafers of different sizes according to any one of claims 1-2, characterized in that: The rotating shafts are all rotatably connected to the cross bar. The rotating shafts include a pair of first rotating shafts and a pair of second rotating shafts. The second rotating shafts are located outside the first rotating shafts. The two cylindrical groove cams arranged on a pair of the first rotating shafts are designed in a mirror image structure, and the two cylindrical groove cams arranged on a pair of the second rotating shafts are designed in a mirror image structure.

4. The detection mechanism for detecting wafers of different sizes according to claim 3, characterized in that: The cylindrical groove cam arranged on the first rotating shaft and the cylindrical groove cam arranged on the second rotating shaft are arranged in an inverted manner with respect to each other, and the installation heights of the cylindrical groove cams in the vertical plane are the same.

5. The detection mechanism for detecting wafers of different sizes according to claim 3, characterized in that: The detection brackets include detection short brackets fixed on a pair of first rotating shafts and detection long brackets fixed on a pair of second rotating shafts. The detection long brackets and the detection short brackets are located at different heights in the vertical direction.

6. The detection mechanism for detecting wafers of different sizes according to claim 3, characterized in that: The driving device includes a driving assembly and a push rod fixedly connected to the output shaft of the driving assembly. A plurality of the movable pins are all fixed on the push rod.

7. The detection mechanism for detecting wafers of different sizes according to claim 6, characterized in that: A plurality of the movable pins are located at the same height in the vertical direction.

8. The detection mechanism capable of detecting wafers of different sizes according to claim 6, wherein: The driving assembly includes a lead screw and a driving member. The driving member is fixed on the cross bar and can drive the lead screw to rotate along its own axial direction. The lead screw is rotatably connected to the cross bar and is arranged parallel to the rotating shaft. The push rod is threadedly connected to the lead screw.

9. The detection mechanism for detecting wafers of different sizes according to claim 8, wherein: The driving member and the lead screw are driven by a transmission assembly. The transmission assembly includes a driving gear and a driven gear meshing with the driving gear. The output end of the driving member passes through the cross bar and is fixedly installed with a driving gear that can rotate under its drive. The driven gear is fixed on one end of the lead screw passing through the cross bar.

10. The detection mechanism for detecting wafers of different sizes according to claim 6, characterized in that: Above the cross bar, a cross beam parallel to the cross bar is also fixed through a support shaft. The rotating shaft is rotatably connected between the cross bar and the cross beam along its own axial direction. The push rod is sleeved on the support shaft and can move up and down along the support shaft.

11. The detection mechanism capable of detecting wafers of different sizes according to claim 9, characterized in that: The driving member is a motor. The output end of the motor is connected with a reducer. The rear end of the motor is connected with an encoder. An installation hole is provided on the cross bar. The reducer is sleeved in the installation hole. The output shaft of the reducer extends out of the installation hole and is fixedly connected with the driving gear.

12. The detection mechanism for detecting wafers of different sizes according to claim 7, characterized in that: The driving assembly includes a double-stroke cylinder. The cylinder body of the double-stroke cylinder is fixed on the bottom plate. The piston rod of the double-stroke cylinder pushes the push rod to move up and down.

13. The detection mechanism for detecting wafers of different sizes according to claim 1, characterized in that: A pair of the detection components are a pair of opposed sensors fixed on a pair of detection brackets. Installation grooves for installing the opposed sensors are provided on the detection brackets.

Images