Testing Device and Method for Optical Components, and Debugging Method for Optical Path System

Abstract

This application relates to the technical field of optical component assembly equipment, and in particular to a test device and method for an optical component, and a debugging method for an optical path system. The reference mechanism includes a reference support platform and a reference optical component. The reference optical component is arranged on the reference plane of the reference support platform. The reference optical component has a y-direction reference and an x-direction reference that intersect at a reference point. The adjustable support mechanism moves the measuring mechanism to a position where the predetermined optical axis of the measuring mechanism is perpendicular to both the y-direction reference and the x-direction reference and passes through the reference point. The test station on the reference plane is located between the reference optical component and the measuring mechanism. The eccentricity error of the optical component to be tested along the y-direction reference and the inclination error around the x-direction reference are measured by the measuring mechanism. The test method for the optical component is implemented using this device. The debugging method for the optical path system is implemented using this test method. The test device and method for the optical component and the debugging method for the optical path system achieve error decoupling between the optical component and the optical path system.

Description

Technical Field

[0001] The present application relates to the technical field of optical component assembly equipment, and in particular to a test device and method for optical components and a debugging method for an optical path system. Background Art

[0002] In a complex imaging optical path component, it usually includes various optical components such as an imaging lens, an illumination component, a beam splitting component, an attenuation component, and a folding component. The core goal of debugging the optical path component is to ensure that the eccentricity values and tilt values of each optical component are qualified.

[0003] The conventional debugging method for optical path components is to repeatedly measure and adjust the optical path components as objects, or to adjust the optical path according to the imaging quality of the optical path components, without paying attention to the eccentricity values and tilt values of each optical component being qualified, and the accuracy of the adjusted optical path components has not been able to meet the requirements. Summary of the Invention

[0004] The purpose of the present application is to provide a test device and method for optical components and a debugging method for an optical path system, so as to solve to a certain extent the technical problems in the prior art that the adjustment accuracy of the optical path components in the prior art is still insufficient and the adjustment accuracy of each optical component of the optical path components has not been paid attention to.

[0005] The present application provides a measuring device for optical components, including a measuring mechanism, an adjustable support mechanism, and a reference mechanism;

[0006] The reference mechanism includes a reference support platform and a reference optical component. The top of the reference support platform forms a reference plane. The reference optical component is detachably arranged on the reference plane. The reference optical component has a y-direction reference perpendicular to the reference plane and an x-direction reference parallel to the reference plane. The y-direction reference and the x-direction reference intersect at a reference point;

[0007] The measuring mechanism can emit a measuring beam along a predetermined optical axis. The measuring mechanism is arranged on the top of the adjustable support mechanism. The adjustable support mechanism can adjust the position of the measuring mechanism so that the measuring mechanism moves to a set position. At the set position, the predetermined optical axis is perpendicular to both the y-direction reference and the x-direction reference, and the predetermined optical axis passes through the reference point;

[0008] The reference plane has a test station for installing the optical component to be measured. The test station is located between the reference optical component and the measuring mechanism along the extension direction of the predetermined optical axis, so as to measure the eccentricity error of the y-direction reference of the optical component to be measured and the inclination error around the x-direction reference through the measuring mechanism.

[0009] In the above technical solution, further, the adjustable support mechanism includes a height adjustment component and an attitude adjustment component;

[0010] The measuring mechanism is disposed on the attitude adjustment component, and the attitude adjustment component is connected to the top end of the height adjustment component and can at least drive the measuring mechanism to rotate around the x-axis reference, so that the predetermined optical axis is perpendicular to both the y-axis reference and the x-axis reference;

[0011] The height adjustment component can be telescoped along the y-axis reference to drive the measuring mechanism to move, so that the predetermined optical axis passes through the reference point.

[0012] In any of the above technical solutions, further, the attitude adjustment component is a five-degree-of-freedom attitude adjustment component.

[0013] In any of the above technical solutions, further, the reference mechanism includes a transparent target ball and a transparent square brick, both the transparent target ball and the transparent square brick are disposed on the reference plane, and along the extending direction of the predetermined optical axis, the transparent square brick is located between the transparent target ball and the measuring mechanism.

[0014] In any of the above technical solutions, further, the material of the transparent target ball is glass;

[0015] The material of the transparent square brick is glass;

[0016] The measuring mechanism is an autocollimator.

[0017] The present application also provides a testing method for an optical component. The testing device for the optical component described in any of the above technical solutions is used to measure the optical component to be tested. The testing method for the optical component includes the following steps:

[0018] Turn on the measuring mechanism so that the measuring mechanism emits a measuring beam to the optical component to be tested;

[0019] Based on the reference optical component, the position of the measuring mechanism is adjusted to the set position through the adjustable support mechanism;

[0020] Install the optical component to be tested on the test station of the reference support platform;

[0021] Read the eccentricity error of the optical axis of the optical component to be tested relative to the reference point along the y-axis reference and the inclination error around the x-axis reference through the measuring mechanism.

[0022] In any of the above technical solutions, further, the reference optical component includes a transparent target ball and a transparent square brick, the measuring mechanism is an autocollimator, and the autocollimator has a parallel light mode and an internal focusing mode;

[0023] The step of adjusting the position of the measuring mechanism to the set position based on the reference optical component through the adjustable support mechanism specifically includes the following steps:

[0024] Place the transparent square brick on the reference plane, adjust the autocollimator to the parallel light mode, and drive the measuring mechanism to rotate at least through the adjustable support mechanism until the predetermined optical axis is perpendicular to the side wall plane of the transparent square brick facing the autocollimator;

[0025] Place the transparent target ball on the reference plane so that the transparent square brick is located between the measuring mechanism and the transparent target ball;

[0026] Adjust the autocollimator to the internal focusing mode, and drive the measuring mechanism to move along the height direction of the reference support platform through the adjustable support mechanism until the predetermined optical axis of the autocollimator passes through the center of the transparent target ball.

[0027] In any of the above technical solutions, further, the step of reading, through the measuring mechanism, the eccentricity value of the optical axis of the optical component to be measured relative to the reference point along the y-direction reference and the inclination value around the x-direction reference specifically includes the following steps:

[0028] Measure and read, through the autocollimator, the deviation value of the measuring beam retroreflected by the optical component to be measured and the measuring beam emitted by the autocollimator along the y-direction reference, and use the deviation value along the y-direction reference as the eccentricity error of the optical axis of the optical component to be measured relative to the reference point along the y-direction reference;

[0029] Measure and read, through the autocollimator, the deviation value of the measuring beam retroreflected by the optical component to be measured and the measuring beam emitted by the autocollimator around the x-direction reference, and use the deviation value around the x-direction reference as the inclination error of the optical axis of the optical component to be measured relative to the reference point around the x-direction reference.

[0030] The present application also provides a debugging method for an optical path system, which is used to debug the optical path system. The optical path system includes a plurality of sequentially arranged optical components;

[0031] The debugging method of the optical path system includes the following steps:

[0032] Test each of the optical components by using the test method of the optical component described in any of the above technical solutions, and determine whether the eccentricity error and tilt error of each of the optical components meet the accuracy requirements;

[0033] If the eccentricity errors and tilt errors of all the optical components meet the accuracy requirements, assemble all the optical components into an optical path system;

[0034] The optical path system is taken as an optical component and the optical path system is tested using the optical component testing method described in any of the above technical solutions.

[0035] In any of the above technical solutions, further, the optical assembly is assembled from a plurality of optical elements, and the debugging method of the optical path system further comprises the following steps:

[0036] If the eccentricity error and the tilt error of the optical component do not meet the accuracy requirement, the optical component is disassembled and tested.

[0037] Compared with the prior art, the beneficial effects of this application are:

[0038] The test device of the optical component provided by the present application includes a measuring mechanism, an adjustable supporting mechanism and a reference mechanism. The reference mechanism is used to provide a reference reference for the optical axis measurement of the optical component, and the adjustable supporting mechanism is used to adjust the position of the predetermined optical axis of the measuring mechanism with reference to the reference mechanism, so that the deviation value between the optical axis of the optical component and the predetermined optical axis of the measuring mechanism along the y-direction reference and the inclination value around the x-direction reference are used as the eccentricity error of the optical axis of the optical component along the y-direction reference and the inclination error around the x-direction reference, so as to obtain the integration error of the optical component, that is, before assembling multiple optical components into an optical path system, the integration error of each optical component is measured separately, so as to realize the error decoupling between the optical component and the optical path system to which it belongs, thereby improving the integration accuracy of the optical path system.

[0039] The optical component testing method provided in the present application uses the above-mentioned optical component testing device to test the optical component, thereby being able to achieve all the beneficial effects of the optical component testing device.

[0040] The debugging method of the optical path system provided in the present application adopts the above-mentioned optical component testing method to test the integration accuracy of each optical component included in the optical path system one by one. When the integration errors of all optical components included in the optical path system are qualified, the above-mentioned optical component testing method is then adopted to test the optical path system composed of all optical components as a whole, and the integrated assembly error of the optical path system as a whole is obtained. If the integrated manufacturing error of the optical path system as a whole is unqualified, it means that the error is caused in the process of assembling multiple optical components. In other words, before the optical path system is integrated, each optical component in the optical path system is offline tested and adjusted to ensure the integration accuracy of each optical component in four degrees of freedom, realize the decomposition of the dimensional chain error of the optical path system and the optical components, and improve the integration accuracy of the optical path system. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] To more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0042] Figure 1 Schematic structural diagram of the test device for the optical component provided in the first embodiment of the present application;

[0043] Figure 2 Schematic structural diagram of the imaging lens assembly, which is the test object of the test method for the optical component provided in the second embodiment of the present application.

[0044] Reference numerals:

[0045] 1 - Adjustable support mechanism; 12 - Attitude adjustment component; 13 - Height adjustment component; 2 - Reference mechanism; 21 - Reference support platform; 210 - Reference plane; 22 - Transparent target ball; 23 - Transparent square brick; 3 - Imaging lens assembly; 31 - Lens; 32 - Lens barrel; 33 - Lens base; 4 - Measuring mechanism. Specific embodiments

[0046] The following will clearly and completely describe the technical solutions of the present invention in conjunction with the drawings. Obviously, the described embodiments are some embodiments of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present invention.

[0047] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0048] In the description of the present invention, it should be noted that, unless otherwise clearly specified and defined, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0049] Embodiment 1

[0050] See Figures 1 to 2 As shown, the embodiment of the present application provides a test device for an optical component to measure the eccentricity value and tilt value of the optical component to be tested. The test device for the optical component includes a measuring mechanism 4, an adjustable support mechanism 1, and a reference mechanism 2.

[0051] In the following, the above components of the test device for the optical component will be specifically described.

[0052] In an alternative solution of this embodiment, the reference mechanism 2 includes a reference support platform 21 and a reference optical component. A reference plane 210 is formed on the top of the reference support platform 21. The reference optical component is detachably disposed on the reference plane 210. On the one hand, the reference plane 210 establishes a reference in the height direction for the reference system established by the reference optical component. On the other hand, the connection relationship between the reference optical component and the reference plane 210 is set to be detachable, which is convenient for replacing the corresponding reference optical component according to the optical axis characteristics of the optical component to be tested.

[0053] The reference optical component has a y-direction reference perpendicular to the reference plane 210 and an x-direction reference parallel to the reference plane 210. The y-direction reference and the x-direction reference intersect at a reference point. Further, the reference optical component also has a z-direction reference that is perpendicular to both the x-direction reference and the y-direction reference and passes through the reference point. The z-direction reference is parallel to the reference plane 210. It can be understood that the x-direction reference, the y-direction reference, and the z-axis reference of the reference optical component intersect at the reference point and are perpendicular to each other pairwise.

[0054] The reference plane 210 has a test station for installing the optical component to be tested. Then, the optical axis position of the optical component to be tested is determined based on the reference plane 210. The positions of the y-direction reference, the x-direction reference, and the reference point of the reference optical component are also determined based on the reference plane 210.

[0055] In view of this, if the optical axis position of the optical component to be measured meets the accuracy requirements, the distance between the optical axis of the optical component to be measured and the reference plane 210 should be equal to the distance between the reference point of the reference optical component and the reference plane 210 within the accuracy requirements. That is to say, the optical axis of the optical component to be measured should meet the eccentricity accuracy requirements along the y-direction reference within the accuracy requirements, and the optical axis of the optical component to be measured should be perpendicular to the plane determined by the x-direction reference and the y-direction reference of the reference optical component within the accuracy requirements. That is to say, the optical axis of the optical component to be measured should meet the inclination accuracy requirements around the x-direction reference within the accuracy requirements.

[0056] The test station is located between the reference optical component and the measuring mechanism 4 along the extending direction of the predetermined optical axis. Thus, with the test station vacant, the measuring mechanism 4 is moved to the set position with the reference optical component as a reference. Then, the optical component to be measured is installed on the test station. The measuring mechanism 4 emits a measuring beam along the predetermined optical axis. The optical component to be measured reflects the measuring beam, and the reflected measuring beam is received by the measuring mechanism 4. The measuring mechanism 4 measures the eccentricity value of the optical component to be measured along the y-direction reference and the inclination value around the x-direction reference according to the direction of the reflected measuring beam of the optical component to be measured.

[0057] Generally speaking, the distance position of the reference point relative to the reference plane 210 is determined according to the ideal optical axis position of the optical component to be measured, and thus the reference optical component is replaced according to the ideal optical axis position of the optical component to be measured to ensure that the relative position between the reference point of the reference optical component and the reference plane 210 corresponds to the ideal optical axis position of the optical component to be measured.

[0058] The measuring mechanism 4 can emit a measuring beam along the predetermined optical axis. The measuring mechanism 4 is arranged on the top of the adjustable support mechanism 1. The adjustable support mechanism 1 can adjust the position of the measuring mechanism 4 to move the measuring mechanism 4 to the set position. Specifically, the position of the measuring mechanism 4 is adjusted with reference to the y-direction reference, the reference point, and the x-direction reference of the reference optical component until the measuring mechanism 4 is moved to the set position. In the set position, the predetermined optical axis is perpendicular to both the y-direction reference and the x-direction reference. That is to say, the position of the predetermined optical axis coincides with the x-direction reference of the reference optical component, so that the position of the measuring beam emitted by the measuring mechanism 4 coincides with the ideal position of the optical axis of the optical component to be measured around the x-reference.

[0059] And in the set position, the predetermined optical axis passes through the reference point. That is to say, further, along the y-direction reference, the position of the predetermined optical axis coincides with the position of the reference optical component along the y-direction reference, so that the position of the measuring beam emitted by the measuring mechanism 4 coincides with the ideal position of the optical axis of the optical component to be measured along the y-direction reference.

[0060] The test station is located between the reference optical component and the measuring mechanism 4 along a predetermined optical axis. Thus, in the state where the test station is empty, the measuring mechanism 4 is moved to the set position with the reference optical component as a reference, and then the optical component to be tested is installed on the test station. The measuring mechanism 4 emits a measuring beam along the predetermined optical axis, and the optical component to be tested reflects the measuring beam. The reflected measuring beam is received by the measuring mechanism 4, and the measuring mechanism 4 measures the eccentricity error of the optical axis of the optical component to be tested along the y-direction reference and the tilt error around the x-direction reference according to the position of the reflected measuring beam of the optical component to be tested.

[0061] In this embodiment, the measuring mechanism 4 is an autocollimator. An autocollimator, also known as an "autocollimating light tube" and "optical flatness checker", is a measuring instrument that converts angle measurement into linear measurement using the principle of autocollimation of light. Specifically, its working principle is that the measuring beam is a parallel beam, and the measuring beam is reflected back to the measuring mechanism 4 by the optical component to be tested. If the optical axis of the optical component to be tested is skewed relative to the predetermined optical axis, then the reflected measuring beam will deviate from the original position when it exits. By reading through the eyepiece or automatically calculating through image recognition of the beam return cross image, the eccentricity value and tilt value of the optical axis of the optical component to be tested relative to the predetermined optical axis can be measured. That is to say, correspondingly, the eccentricity error of the optical axis of the optical component to be tested along the y-direction reference and the tilt error around the x-direction reference can be obtained.

[0062] In an alternative solution of this embodiment, the reference mechanism 2 includes a transparent target ball 22 and a transparent square brick 23, and both the transparent target ball 22 and the transparent square brick 23 are arranged on the reference plane 210 of the reference support platform 21.

[0063] Along the extension direction of the predetermined optical axis, the transparent square brick 23 is located between the transparent target ball 22 and the measuring mechanism 4. Among them, the side wall plane of the transparent square brick 23 facing the measuring mechanism 4 is used as the reference around the x-direction. The side wall plane of the transparent square brick 23 used as the reference around the x-direction is perpendicular to the reference plane 210. The center of the transparent target ball 22 is used as the reference point, the radial line of the transparent target ball 22 perpendicular to the reference plane 210 is used as the y-direction reference, the radial line of the transparent target ball 22 perpendicular to the y-direction reference and parallel to the reference plane 210 is used as the x-direction reference, and the x-direction reference is parallel to the side wall plane of the transparent square brick 23 used as the reference around the x-direction. In view of this, the radial line of the transparent target ball 22 perpendicular to the y-direction reference and perpendicular to the x-direction reference is used as the z-direction reference.

[0064] Optionally, to prevent the transparent target ball 22 from rolling on the reference plane 210, the bottom end of the transparent target ball 22 is planar to form the bottom plane of the transparent target ball 22, and the difference between the distance from the center of the transparent target ball 22 to the bottom plane of the transparent target ball 22 and the radius of the transparent target ball 22 is not greater than 5 μm, so as to ensure that the bottom plane provided on the transparent target ball 22 will not cause an excessive height error of the reference point relative to the reference plane 210.

[0065] In this embodiment, the material of the transparent target ball 22 is glass, and the material of the transparent square brick 23 is glass to meet the light transmittance of the transparent target ball 22 and the transparent square brick 23.

[0066] In an alternative solution of this embodiment, the adjustable support mechanism 1 includes a height adjustment component 13 and an attitude adjustment component 12.

[0067] The measuring mechanism 4 is arranged on the attitude adjustment component 12. The attitude adjustment component 12 is connected to the top of the height adjustment component 13 and can at least drive the measuring mechanism 4 to rotate around the x-axis reference, so that the predetermined optical axis is perpendicular to both the y-axis reference and the x-axis reference. That is to say, the predetermined optical axis is perpendicular to the side wall plane of the transparent square brick 23 as the side wall plane around the x-axis reference.

[0068] Among them, the attitude adjustment component 12 can adopt components such as a turntable with an attitude adjustment function in the prior art to drive the attitude adjustment of the measuring mechanism 4 relative to the top of the height adjustment component 13.

[0069] Optionally, the attitude adjustment component 12 is a five-degree-of-freedom attitude adjustment component 12. Specifically, the five-degree-of-freedom attitude adjustment component 12 can drive the measuring mechanism 4 to move along the extension direction of the x-axis reference, move along the extension direction of the z-axis reference, rotate around the x-axis reference, rotate around the y-axis reference, and rotate around the z-axis reference.

[0070] The height adjustment component 13 can expand and contract along the y-axis reference to drive the measuring mechanism 4 to move, so that on the premise of ensuring that the predetermined optical axis is perpendicular to the x-axis reference, the measuring mechanism 4 can be adjusted to the position where the predetermined optical axis passes through the reference point, that is, the measuring mechanism 4 is adjusted to the set position.

[0071] Among them, the height adjustment component 13 can be, for example, a gallows or a frame body that uses a cylinder or an electric cylinder as a driving source to achieve expansion and contraction.

[0072] Embodiment 2

[0073] Embodiment 2 provides a test method for an optical component. This embodiment is implemented by the test device for the optical component in Embodiment 1. The technical features of the test device for the optical component disclosed in Embodiment 1 are also applicable to this embodiment, and the technical features of the test device for the optical component already disclosed in Embodiment 1 will not be described repeatedly.

[0074] The test method for the optical component provided in this embodiment includes the following steps:

[0075] Step S100: Turn on the measuring mechanism 4 so that the measuring mechanism 4 emits a measuring beam towards the optical component to be tested.

[0076] Step S110: Based on the reference optical component, adjust the position of the measuring mechanism 4 to a set position through the adjustable support mechanism 1.

[0077] Step S120: Install the optical component to be tested on the test station on the reference support platform 21.

[0078] Step S130: Read, through the measuring mechanism 4, the eccentricity error of the optical axis of the optical component to be tested relative to the reference point along the y-direction reference and the tilt error around the x-direction reference.

[0079] Specifically, on the one hand, the measuring beam emitted by the measuring mechanism 4 turned on in step S100 provides a reference medium for adjusting the position of the measuring mechanism 4 in step S110 according to the reference optical component, so that the predetermined optical axis of the measuring mechanism 4 moves to the ideal position of the optical axis of the optical component to be tested.

[0080] On the other hand, the measuring beam emitted by the measuring mechanism 4 turned on in step S100 provides a medium for measuring the offset of the measuring beam retroreflected by the optical component to be tested by the measuring mechanism 4 in steps S120 and S130. Thus, according to the measured offset, the eccentricity error of the optical axis of the optical component to be tested relative to the reference point along the y-direction reference and the tilt error around the x-direction reference are obtained.

[0081] In this embodiment, the reference optical component includes a transparent target ball 22 and a transparent square brick 23, and the measuring mechanism 4 is an autocollimator, which has a parallel light mode and an internal focusing mode. In view of this, step S110 includes the following steps:

[0082] Step S111: Place the transparent square brick 23 on the reference plane 210, adjust the autocollimator to the parallel light mode, and at least drive the measuring mechanism 4 to rotate through the adjustable support mechanism 1 until the predetermined optical axis is perpendicular to the side wall plane of the transparent square brick 23 facing the autocollimator.

[0083] Step S112: Place the transparent target ball 22 on the reference plane 210 so that the transparent square brick 23 is located between the measuring mechanism 4 and the transparent target ball 22.

[0084] Step S113: Adjust the autocollimator to the internal focusing mode. Drive the measuring mechanism 4 to move along the height direction of the reference support platform 21 through the adjustable support mechanism 1 until the predetermined optical axis of the autocollimator passes through the center of the transparent target ball 22.

[0085] Among them, in step S111, the transparent square brick 23 is in the shape of a cuboid. Take the side wall plane of the cuboid-shaped transparent square brick 23 facing the measuring mechanism 4 and perpendicular to the reference plane 210 as the x-axis reference. While adjusting the position of the measuring mechanism 4, read the imaging situation of the retroreflected measuring beam on the measuring mechanism 4. If the cross spot of the returned measuring beam coincides with the cross center of the measuring mechanism 4, it means that the measuring mechanism 4 has been adjusted to a position where the predetermined optical axis is perpendicular to the side wall plane of the transparent square brick 23 facing the autocollimator. In this position, the predetermined optical axis of the measuring mechanism 4 coincides with the x-axis reference, thereby completing the attitude adjustment of the measuring mechanism 4.

[0086] During the process of adjusting the attitude of the measuring mechanism 4, driving the measuring mechanism 4 to rotate at least means that if only one, two combinations, or three combinations of the three motion forms of rotating the measuring mechanism 4 around the x-axis reference, rotating around the y-axis reference, and rotating around the z-axis reference can make the predetermined optical axis of the measuring mechanism 4 coincide with the x-axis reference, then only drive the measuring mechanism 4 to rotate through the adjustable support mechanism 1.

[0087] If only driving the measuring mechanism 4 to rotate through the adjustable support mechanism 1 cannot make the predetermined optical axis of the measuring mechanism 4 coincide with the x-axis reference. Then, the measuring mechanism 4 can also be translated along the x-axis reference and along the z-axis reference to make the predetermined optical axis of the measuring mechanism 4 coincide with the x-axis reference.

[0088] Thus, through step S111, the attitude of the measuring mechanism 4 is set, so as to perform height adjustment along the y-axis reference in the set attitude in step S112.

[0089] In step S112, the bottom of the transparent target ball 22 is in contact with the reference plane 210. Thus, the reference point is calibrated through the center of the transparent target ball 22, the y-axis reference is calibrated through the radial line of the transparent target ball 22 perpendicular to the reference plane 210, and the x-axis reference is calibrated through the radial line of the transparent target ball 22 parallel to the reference plane 210 and parallel to the side wall plane of the transparent square brick 23 as the x-axis reference.

[0090] The transparent square brick 23 is located between the measuring mechanism 4 and the transparent target ball 22, so that the test light beam can first pass through the transparent square brick 23 and then be transmitted to the transparent target ball 22, so that the position of the measuring mechanism 4 is adjusted in step S113 based on the posture adjusted by the transparent square brick 23.

[0091] In step S113, while adjusting the position of the measuring mechanism 4, the imaging of the reflected measurement implanted on the measuring mechanism 4 is read. If the cross spot of the returned measuring light beam coincides with the cross center of the measuring mechanism 4, it means that the measuring mechanism 4 has been adjusted to the position where the predetermined optical axis passes through the center of the transparent target sphere 22. At this position, the predetermined optical axis of the measuring mechanism 4 coincides with the center of the target sphere along the y-direction reference, thereby completing the height adjustment of the measuring mechanism 4.

[0092] In this process, on the basis of the measuring mechanism 4 maintaining the posture adjusted in step S111, the position of the measuring mechanism 4 along the y-direction reference is adjusted, that is, the height position of the measuring mechanism 4 is adjusted. Finally, after the height position of the measuring mechanism 4 is adjusted, the measuring mechanism 4 is in the adjusted position. In the adjusted position, the predetermined optical axis is perpendicular to both the y-direction reference and the x-direction reference, and the predetermined optical axis passes through the reference point.

[0093] In this embodiment, step S130 includes the following steps:

[0094] Step S131, measuring and reading the deviation value of the measuring light beam reflected by the optical component to be measured and the measuring light beam emitted by the autocollimator along the y-direction reference by the autocollimator, and taking the deviation value along the y-direction reference as the eccentricity error of the optical axis of the optical component to be measured relative to the reference point along the y-direction reference;

[0095] Step S132, measuring and reading the deviation value of the measurement beam reflected by the optical component to be measured and the measurement beam emitted by the autocollimator around the x-direction reference by the autocollimator, and taking the deviation value around the x-direction reference as the inclination error of the optical axis of the optical component to be measured relative to the reference point around the x-direction reference.

[0096] In step S131 and step S132, after the reference is determined in step S110 and the position of the measuring mechanism 4 is adjusted, the eccentricity error of the optical component to be measured along the y-direction reference and the inclination error around the x-direction reference can be quickly and accurately obtained.

[0097] The optical component testing method in this embodiment has the advantages of the optical component testing device in the first embodiment, and the advantages of the optical component testing device disclosed in the first embodiment are not described again here.

[0098] Embodiment 3

[0099] Embodiment 3 provides a debugging method for an optical path system. This embodiment adopts the testing method of the optical components in Embodiment 2, and the technical features of the testing method of the optical components in Embodiment 2 are also applicable to this embodiment. The technical features of the testing method of the optical components in Embodiment 2 that have been disclosed in Embodiment 2 will not be described repeatedly.

[0100] For the debugging method of the optical path system provided in this embodiment, the optical path system includes a plurality of sequentially arranged optical components. In view of this, the debugging method of the optical path system includes the following steps:

[0101] Step S1, use the above-mentioned testing method of the optical components to test each optical component, and judge whether the eccentricity error and tilt error of each optical component meet the accuracy requirements;

[0102] Step S2, if the eccentricity errors and tilt errors of all optical components meet the accuracy requirements, assemble all optical components into an optical path system;

[0103] Step S3, take the optical path system as an optical component, and use the above-mentioned testing method of the optical components to test the optical path system.

[0104] Among them, in Step S1, the optical components pointed out refer to the integrated components obtained by assembling a plurality of optical elements. The errors measured by the above-mentioned testing method of the optical components are the integrated errors of the optical components, rather than the errors of a certain specific optical element included in the optical components. Therefore, the final assembly indexes of the optical components can be tested, which is beneficial to directly judge whether the dimensional chain tolerance of the optical components meets the standard, and effectively improves the integration efficiency.

[0105] That is to say, in Step S1, the integrated errors of each optical component included in the optical system are detected one by one to ensure that the integrated error of the optical system assembled in Step S2 is not caused by the integrated error of a certain optical component not meeting the accuracy requirements, realizing the decoupling of the integrated error of the optical components and the integrated error of the optical path system, thus providing a basis for ensuring the integration accuracy of the optical system.

[0106] As an example, the optical path system includes a plurality of optical components such as an imaging lens assembly 3, a lighting assembly, a beam splitting assembly, an attenuation assembly, and a folding assembly. The integrated errors of the imaging lens assembly 3, the lighting assembly, the beam splitting assembly, the attenuation assembly, the folding assembly and other optical components can be detected by the above-mentioned testing method of the optical components to ensure whether the integrated error of each optical component meets the accuracy requirements.

[0107] If the integration errors of multiple optical components such as the imaging lens assembly 3, the illumination assembly, the beam splitting assembly, the attenuation assembly, and the folding assembly all meet the accuracy requirements, then assemble the multiple optical components such as the imaging lens assembly 3, the illumination assembly, the beam splitting assembly, the attenuation assembly, and the folding assembly into an optical path system, and detect the assembled optical path system by the above-mentioned optical component testing method. If the integration error of the optical path system meets the accuracy requirements, then the debugging of the optical path system can be completed.

[0108] If the integration error of the optical path system does not meet the accuracy requirements, it means that the assembly error generated during the assembly of multiple optical path systems does not meet the standard, resulting in the integration error of the optical path system not meeting the accuracy requirements. The optical path system can be reassembled and tested until the integration error of the optical path system meets the accuracy requirements.

[0109] In this embodiment, if the eccentricity error and tilt error of the optical component do not meet the accuracy requirements, disassemble and detect the optical component. Specifically, after disassembling the optical component, multiple optical elements are obtained, and each optical element is detected by using existing detection equipment and detection methods, which will not be elaborated here.

[0110] As an example, as Figure 2 shown, the imaging lens assembly 3 includes a lens 31, a lens barrel 32, and a lens mount 33. For this imaging lens assembly 3, the test object of the above-mentioned optical component testing method is the eccentricity error of dimension A3 along the y-direction reference and the inclination error around the x-direction reference. Only when the error of dimension A3 does not meet the accuracy requirements, decompose the dimension chain of the imaging lens assembly 3, measure the integrated assembly dimension A1 of the lens barrel 32 and the lens mount 33 by using existing optical instruments, and measure the assembly error dimension A2 between the lens 31 and the lens barrel 32, so as to check dimensions A1 and A2, and thus perform data closed-loop analysis on the imaging lens assembly 3 in combination with the measured dimension A3.

[0111] It can be understood that after detecting and adjusting the optical elements of the optical component, a new optical component can be reassembled and integrated, and then the above-mentioned optical component testing method can be used to test the new optical component to determine whether the integration error of the new optical component meets the accuracy requirements.

[0112] The optical component testing method in this embodiment has the advantages of the optical component testing method in Embodiment 2, and the advantages of the optical component testing method disclosed in Embodiment 2 will not be repeated here.

[0113] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or equivalently replace some or all of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the various embodiments of the present invention. In addition, those skilled in the art can understand that although some of the embodiments described herein include certain features included in other embodiments but not other features, the combination of the features of different embodiments means within the scope of the present invention and forms different embodiments. For example, any one of the claimed embodiments can be used in any combination. The information disclosed in this background art section is only intended to deepen the understanding of the overall background art of the present invention, and should not be regarded as an admission or any form of suggestion that this information constitutes the prior art known to those skilled in the art.

Claims

1. A testing device for an optical component, characterized in that, The test device for the optical component includes a measuring mechanism, an adjustable support mechanism, and a reference mechanism; The reference mechanism includes a reference support platform and a reference optical component. The top of the reference support platform forms a reference plane. The reference optical component is detachably arranged on the reference plane. The reference optical component has a y-direction reference perpendicular to the reference plane and an x-direction reference parallel to the reference plane. The y-direction reference and the x-direction reference intersect at a reference point; The measuring mechanism can emit a measuring beam along a predetermined optical axis. The measuring mechanism is arranged on the top of the adjustable support mechanism. The adjustable support mechanism can adjust the position of the measuring mechanism so that the measuring mechanism moves to a set position. At the set position, the predetermined optical axis is perpendicular to both the y-direction reference and the x-direction reference, and the predetermined optical axis passes through the reference point; The reference plane has a test station for installing the optical component to be tested. The test station is located between the reference optical component and the measuring mechanism along the extension direction of the predetermined optical axis, so as to measure the eccentricity error of the optical component to be tested along the y-direction reference and the inclination error around the x-direction reference through the measuring mechanism.

2. The testing device for the optical component according to claim 1, characterized in that, The adjustable support mechanism includes a height adjustment component and an attitude adjustment component; The measuring mechanism is arranged on the attitude adjustment component. The attitude adjustment component is connected to the top of the height adjustment component and can at least drive the measuring mechanism to rotate around the x-direction reference so that the predetermined optical axis is perpendicular to both the y-direction reference and the x-direction reference; The height adjustment component can expand and contract along the y-direction reference to drive the measuring mechanism to move so that the predetermined optical axis passes through the reference point.

3. The testing device for the optical component according to claim 2, characterized in that, The attitude adjustment component is a five-degree-of-freedom attitude adjustment component.

4. The testing device for the optical component according to claim 1, characterized in that, The reference mechanism includes a transparent target ball and a transparent square brick. Both the transparent target ball and the transparent square brick are arranged on the reference plane. Along the extension direction of the predetermined optical axis, the transparent square brick is located between the transparent target ball and the measuring mechanism.

5. The test device for the optical component according to claim 4, characterized in that, The material of the transparent target ball is glass; The material of the transparent square brick is glass; The measuring mechanism is an autocollimator.

6. A testing method for an optical component, characterized in that, Using the test device for the optical component according to any one of claims 1 to 5 to measure the optical component to be tested, the test method for the optical component includes the following steps: Turn on the measuring mechanism so that the measuring mechanism emits a measuring beam towards the optical component to be tested; Based on the reference optical component, adjust the position of the measuring mechanism to the set position through the adjustable support mechanism; Install the optical component to be tested on the test station on the reference support platform; Read, through the measuring mechanism, the eccentricity error of the optical axis of the optical component to be tested relative to the reference point along the y-direction reference and the inclination error around the x-direction reference.

7. The test method of the optical component according to claim 6, characterized in that, The reference optical component includes a transparent target ball and a transparent square brick. The measuring mechanism is an autocollimator. The autocollimator has a parallel light mode and an internal focusing mode; The step of adjusting the position of the measuring mechanism to the set position based on the reference optical component through the adjustable support mechanism specifically includes the following steps: Place the transparent square brick on the reference plane, adjust the autocollimator to the parallel light mode, and at least drive the measuring mechanism to rotate through the adjustable support mechanism until the predetermined optical axis is perpendicular to the side wall plane of the transparent square brick facing the autocollimator; Place the transparent target ball on the reference plane so that the transparent square brick is located between the measuring mechanism and the transparent target ball; Adjust the autocollimator to the internal focusing mode, and drive the measuring mechanism to move along the height direction of the reference support platform through the adjustable support mechanism until the predetermined optical axis of the autocollimator passes through the center of the transparent target ball.

8. The testing method of the optical component according to claim 7, characterized in that, The step of reading, through the measuring mechanism, the eccentricity value of the optical axis of the optical component to be measured relative to the reference point along the y-direction reference and the inclination angle value around the x-direction reference specifically includes the following steps: Measure and read, through the autocollimator, the deviation value of the measuring beam retroreflected by the optical component to be measured and the measuring beam emitted by the autocollimator along the y-direction reference, and use the deviation value along the y-direction reference as the eccentricity error of the optical axis of the optical component to be measured relative to the reference point along the y-direction reference; Measure and read, through the autocollimator, the deviation value of the measuring beam retroreflected by the optical component to be measured and the measuring beam emitted by the autocollimator around the x-direction reference, and use the deviation value around the x-direction reference as the inclination angle error of the optical axis of the optical component to be measured relative to the reference point around the x-direction reference.

9. A debugging method for an optical path system, characterized in that For debugging an optical path system, the optical path system includes a plurality of successively arranged optical components; The debugging method of the optical path system includes the following steps: Use the test method of the optical component according to any one of claims 6 to 8 to test each of the optical components, and determine whether the eccentricity error and tilt error of each of the optical components meet the accuracy requirements; If the eccentricity errors and tilt errors of all the optical components meet the accuracy requirements, assemble all the optical components into an optical path system; Use the optical path system as an optical component, and use the test method of the optical component according to any one of claims 6 to 8 to test the optical path system.

10. The debugging method of the optical path system according to claim 9, characterized in that, The optical component is assembled from a plurality of optical elements, and the debugging method of the optical path system further includes the following steps: If there are optical components whose eccentricity errors and tilt errors do not meet the accuracy requirements, disassemble and detect the optical components.

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