Cleaning device and method for pellicle

Abstract

The present disclosure relates to a cleaning device and method for a photomask protective film, which comprises an air outlet module, a moving mechanism and a controller. The air outlet module is provided with a plurality of air outlet holes arranged in sequence at intervals. The air outlet holes are used to blow air towards the photomask protective film, and the air outlet direction of the air outlet holes is arranged at an angle with the photomask protective film. The position where the air outlet holes intersect with the photomask protective film according to the air outlet direction is defined as the alignment area. The moving mechanism is used to drive the photomask or the air outlet module to move, so that the alignment area moves from the first side edge of the photomask protective film to the second side edge opposite to the first side edge on the photomask protective film in sequence. In this way, the first middle part of the photomask protective film which is prone to deformation is cleaned by relatively small air pressure, thereby avoiding the adverse phenomenon of protective film damage caused by the problem that the middle part of the photomask protective film is prone to deformation. In addition, the other areas of the photomask protective film are cleaned by relatively large air pressure, thereby ensuring the cleaning effect on the photomask protective film at the same time.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the technical field of photomask cleaning, in particular to a photomask pellicle cleaning device and method. BACKGROUND

[0002] In the process of semiconductor production and manufacturing, due to machine factors or human factors, the photomask pellicle will inevitably be contaminated by out-of-specification particles, including but not limited to organic substances, pollutants, chemical residues, etc. These particles must be cleaned efficiently and thoroughly, otherwise the contaminated photomask will affect the yield of the product in the subsequent development process and have a considerable impact on production capacity.

[0003] In a common photomask process, multiple wet processes and subsequent processes are usually alternated to produce the final required components. During the alternation between wet processes and subsequent processes, the residual chemicals or water in the photomask from the wet process and any other residues must be removed to avoid affecting the subsequent process. At the same time, dust and other foreign matter generated during the movement or storage of the photomask must also be thoroughly cleaned to avoid any potential impact on the subsequent process. Therefore, each step in the cleaning process must be carefully handled to avoid economic losses.

[0004] Traditional photomask pellicle cleaning devices usually include an air knife module, such as a needle air knife, which cleans the photomask through the air knife module. During the cleaning process, the greater the air pressure of the air knife, the better the cleaning effect of the photomask pellicle. However, excessive air pressure of the air knife can cause damage to the photomask pellicle, and too little air pressure cannot meet the cleaning requirements. SUMMARY

[0005] Therefore, it is necessary to overcome the defects of the prior art and provide a photomask pellicle cleaning device and method that can ensure the cleaning effect of the photomask pellicle while avoiding damage during the cleaning process.

[0006] The technical solution is as follows: a photomask pellicle cleaning device, comprising:

[0007] an air outlet module provided with a plurality of air outlet holes arranged in sequence and at intervals, the air outlet holes being used to blow air towards the photomask pellicle, the air outlet direction of the air outlet holes being arranged at an angle to the photomask pellicle, and the position where the air outlet holes intersect the photomask pellicle in the air outlet direction being defined as an alignment area;

[0008] a moving mechanism for driving the photomask or the air outlet module to move, so that the alignment area moves from a first side edge of the photomask pellicle to a second side edge of the photomask pellicle opposite the first side edge in sequence; and

[0009] a controller electrically connected with the air outlet module, the controller being configured to adjust the air pressure of the air outlet module so that the air pressure of the air outlet module decreases during the movement of the alignment area from the first side to a first middle position of the pellicle, and so that the air pressure of the air outlet module increases during the movement of the alignment area from the first middle position of the pellicle to the second side.

[0010] In one of the embodiments, the cleaning device of the pellicle further comprises a sensor, the sensor being configured to sense the position of the pellicle and / or the air outlet module, the sensor being electrically connected with the controller, and the controller being configured to adjust the air pressure of the air outlet module according to the sensing signal of the sensor.

[0011] In one of the embodiments, the sensor is a position sensor, a distance sensor or a displacement sensor, and the number of the sensors is one or more.

[0012] In one of the embodiments, the moving mechanism is configured to drive the pellicle or the air outlet module to move along a first direction, and each air outlet hole of the air outlet module is arranged along a second direction of the pellicle in sequence and at intervals, the second direction being arranged at an angle with the first direction.

[0013] In one of the embodiments, the controller is further configured to cause the air pressure of each air outlet hole to decrease first and then increase along the second direction.

[0014] In one of the embodiments, the air outlet module further comprises a plurality of flow adjustment valves electrically connected with the controller, the plurality of flow adjustment valves being arranged corresponding to the plurality of air outlet holes, and being configured to adjust the air pressure of the air outlet holes.

[0015] In one of the embodiments, the air outlet module spans a third side and a fourth side of the pellicle along the second direction.

[0016] In one of the embodiments, the plurality of air outlet holes are arranged at equal intervals along the second direction.

[0017] In one of the embodiments, the air outlet module comprises a support seat and a plurality of air knives arranged at intervals on the support seat, and the plurality of air outlet holes are formed in the plurality of air knives in correspondence.

[0018] A cleaning method of a pellicle, which adopts the cleaning device of the pellicle, the cleaning method comprising the following steps:

[0019] The air outlet module is moved relative to the mask to adjust the air pressure of the air outlet module, and the air pressure of the air outlet module is decreased during movement of the alignment area from the first side edge of the mask protective film to the first middle position of the mask protective film, and the air pressure of the air outlet module is increased during movement of the alignment area from the first middle position of the mask protective film to the second side edge.

[0020] In one embodiment, the step of adjusting the air pressure of the air outlet module includes sensing the position of the mask protective film and / or the air outlet module, and adjusting the air pressure of the air outlet module according to the position of the mask protective film and / or the air outlet module.

[0021] In one embodiment, the step of adjusting the air pressure of the air outlet module according to the position of the mask protective film and / or the air outlet module includes:

[0022] During the entire movement of the mask protective film relative to the air outlet module, the position of the mask protective film and / or the air outlet module is sensed in real time to obtain a sensing signal, and the air pressure of the air outlet module is adjusted in real time according to the sensing signal.

[0023] In one embodiment, the step of adjusting the air pressure of the air outlet module according to the position of the mask protective film and / or the air outlet module includes:

[0024] During the entire movement of the mask protective film relative to the air outlet module, when the alignment area is sensed to move to the first side edge position, the air pressure of the air outlet module starts to decrease, and when the alignment area is sensed to move to the first middle position, the air pressure of the air outlet module starts to increase.

[0025] In one embodiment, the step of adjusting the air pressure of the air outlet module includes: when the alignment area moves to the first side edge position, the air flow of the air outlet module is controlled to be 27.8LPM-28.2LPM; when the alignment area moves to the first middle position, the air flow of the air outlet module is controlled to be 25.8LPM-26.2LPM; and when the alignment area moves to the second side edge position, the air flow of the air outlet module is controlled to be 27.8LPM-28.2LPM.

[0026] In one embodiment, the air outlet holes of the air outlet module are arranged in sequence along the second direction of the mask protective film, and the cleaning method further includes the step of: causing the air pressure of the air outlet module to decrease first and then increase along the second direction.

[0027] In one of the embodiments, the air pressure of the air outlet module decreases first and then increases along the second direction, which specifically includes: along the second direction, the air pressure of the frontmost air outlet hole decreases to the air pressure of the middle air outlet hole, and the air pressure of the middle air outlet hole increases to the air pressure of the rearmost air outlet hole.

[0028] The cleaning device and method of the photomask protective film are characterized in that, when the air outlet module cleans the photomask protective film, the moving mechanism moves to make the air outlet module and the photomask move relative to each other, the air outlet flow decreases when the alignment area moves from the first side of the photomask protective film to the middle of the photomask protective film, and the air outlet flow increases when the alignment area moves from the middle of the photomask protective film to the second side. In this way, the middle of the photomask protective film which is prone to deformation is cleaned by relatively small air pressure, thereby avoiding the photomask protective film from being damaged due to the problem that the middle of the photomask protective film is prone to deformation. In addition, the other areas of the photomask protective film are cleaned by relatively large air pressure, thereby ensuring the cleaning effect of the photomask protective film. BRIEF DESCRIPTION OF DRAWINGS

[0029] The accompanying drawings, which form a part of the present application, are intended to provide further understanding of the present disclosure, and are used to interpret the illustrative embodiments of the present disclosure and their descriptions, and do not constitute improper limitations on the present disclosure.

[0030] In order to more clearly illustrate the technical solutions in the embodiments of the present disclosure, the accompanying drawings needed in the embodiment description will be briefly introduced. Obviously, the accompanying drawings in the following description are only some embodiments of the present disclosure, and other accompanying drawings can be obtained by those skilled in the art without any creative effort.

[0031] Figure 1 A state diagram of a photomask protective film cleaning device according to an embodiment of the present disclosure cleaning a photomask protective film;

[0032] Figure 2 A structure diagram of an alignment area of a photomask protective film cleaning device according to an embodiment of the present disclosure and a photomask protective film at different positions;

[0033] Figure 3 A diagram of air pressure at different positions of a photomask protective film along a first direction according to an embodiment of the present disclosure;

[0034] Figure 4 An x-y relationship diagram of air pressure at different positions along a first direction according to an embodiment of the present disclosure;

[0035] Figure 5This is a schematic diagram showing the wind pressure at different positions along the second direction of the photomask protective film according to an embodiment of this disclosure;

[0036] Figure 6 This is a schematic diagram showing the relationship between the magnitude of deformation at different positions along the second direction according to an embodiment of the present disclosure.

[0037] 10. Air outlet module; 11. Air outlet; 12. Support base; 13. Air knife; 20. Light cover; 21. Quartz glass; 22. Frame; 23. Protective film; 231. First side; 232. Second side; 233. First central position; 234. Third side; 235. Fourth side; 236. Second central position; 30. Flow regulating valve. Detailed Implementation

[0038] To make the above-described objects, features, and advantages of this disclosure more apparent and understandable, specific embodiments of this disclosure will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this disclosure. However, this disclosure can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this disclosure. Therefore, this disclosure is not limited to the specific embodiments disclosed below.

[0039] Before detailing the cleaning machine for the photomask protective film provided in the embodiments of this application, the cleaning machine and the particle removal process in the related art will be described in detail first.

[0040] In traditional technologies, such as Figure 2 As shown, the photomask 20 includes a quartz glass 21, a photomask pattern formed on the surface of the quartz glass 21, a frame 22 disposed on the surface of the photomask pattern, and a protective film 23 fixed to the surface of the frame 22. The photomask pattern comprises metallic chromium and photosensitive emulsion. The designed circuit pattern is exposed onto the photosensitive emulsion using an electronic laser device. The exposed area is developed, forming the photomask pattern on the metallic chromium. A certain gap exists between the protective film 23 and the photomask pattern. The protective film 23 serves a protective function, preventing particles from directly falling onto the photomask pattern and damaging it.

[0041] As mentioned in the background section, existing technologies suffer from the problem that excessive air pressure from the air knife can damage the photomask protective film, while insufficient air pressure fails to meet cleaning requirements and results in low cleaning efficiency. Research has found that during the cleaning process of the photomask protective film by the needle air knife, the air knife pressure remains constant, but different positions of the photomask protective film produce different deformations under the same air pressure. That is, the deformation is greater closer to the center of the photomask protective film. When the deformation exceeds the maximum withstand capacity of the photomask protective film, the photomask protective film will be damaged.

[0042] Based on the above problems existing in the related art, the present embodiment provides a cleaning device and method for a photomask protective film, which can ensure the cleaning effect and efficiency of the photomask protective film, and avoid damage to the photomask protective film during the cleaning process.

[0043] Referring to Figures 1 to 4 , Figure 1 Fig. 1 shows a state diagram of a cleaning device for a photomask protective film 23 according to an embodiment of the present disclosure cleaning the photomask protective film 23, Figure 2 Fig. 2 shows a structure diagram of an alignment area of the cleaning device for the photomask protective film 23 and different positions of the photomask protective film 23 according to an embodiment of the present disclosure, Figure 3 Fig. 3 shows a diagram of the air pressure size of the photomask protective film 23 at different positions along a first direction according to an embodiment of the present disclosure, Figure 4 Fig. 4 shows an x-y relationship diagram of the air pressure size at different positions along the first direction according to an embodiment of the present disclosure. The cleaning device for the photomask protective film 23 according to an embodiment of the present disclosure includes an air outlet module 10, a moving mechanism (not shown in the figure), and a controller (not shown in the figure). The air outlet module 10 is provided with a plurality of air outlet holes 11 arranged in sequence at intervals. The air outlet hole 11 is used to blow air towards the photomask protective film 23, and the air outlet direction of the air outlet hole 11 is arranged at an angle with the photomask protective film 23. The position where the air outlet hole 11 intersects with the photomask protective film 23 in the air outlet direction is defined as an alignment area. The moving mechanism is used to drive the photomask or the air outlet module 10 to move, so that the alignment area moves from a first side edge 231 of the photomask protective film 23 to a second side edge 232 opposite the first side edge 231 on the photomask protective film 23 in sequence. The controller is electrically connected with the air outlet module 10, and the controller is used to adjust the air pressure size of the air outlet module 10, so that the air pressure size of the air outlet module 10 shows a decreasing trend in the process of the alignment area moving from the first side edge 231 to a first middle position 233 of the photomask protective film 23, and the air pressure size of the air outlet module 10 shows an increasing trend in the process of the alignment area moving from the first middle position 233 of the photomask protective film 23 to the second side edge 232.

[0044] It should be noted that the first middle position 233 refers to defining the middle position of the photomask protective film 23 as the first middle position 233 with the running direction of the moving mechanism as the reference. The first middle position 233 is shown in Fig. 1, which spans the third side edge 234 and the fourth side edge 235 of the photomask protective film 23, and is not limited to only the center position of the photomask protective film 23. Figure 2

[0045] ​The cleaning device of the mask protective film 23, when the air outlet module 10 is cleaning the protective film 23, the moving mechanism is in action, so that the air outlet module 10 and the mask are in relative motion, in the process of moving from the first side edge 231 of the mask protective film 23 to the first middle position 233 of the mask protective film 23 in the alignment area, the air pressure is in a decreasing trend, and in the process of moving from the first middle position 233 of the mask protective film 23 to the second side edge 232, the air pressure is in an increasing trend, so that the first middle position 233 of the mask protective film 23 which is easy to deform is cleaned by relatively small air pressure, avoiding the problem of the mask protective film 23 in the middle position which is easy to deform, and the damage of the mask protective film 23 caused by the problem. In addition, the other areas of the mask protective film 23 are cleaned by relatively large air pressure, so as to ensure the cleaning effect of the mask protective film 23.

[0046] In one embodiment, the controller adjusts the air pressure of the air outlet module 10 in the following way, which includes but is not limited to adjusting the air flow into the air outlet module 10, for example, when it is needed to reduce the air pressure of the air outlet module 10, the air flow into the air outlet module 10 is reduced, and vice versa, when it is needed to increase the air pressure of the air outlet module 10, the air flow into the air outlet module 10 is increased. Alternatively, for example, each air outlet hole 11 of the air outlet module 10 is provided with a flow adjusting valve 30, and the flow of each flow adjusting valve 30 is controlled to achieve the adjustment.

[0047] In one embodiment, the cleaning device of the mask protective film 23 further comprises a sensor (not shown in the figure). The sensor is used to sense the position of the mask protective film 23 and / or the air outlet module 10, and the sensor is electrically connected to the controller. The controller is used to adjust the air pressure of the air outlet module 10 according to the sensing signal of the sensor. In this way, the sensor senses the position of the mask protective film 23 and / or the air outlet module 10 to obtain the sensing signal, and the controller adjusts the air pressure of the air outlet module 10 according to the sensing signal, so as to achieve the decreasing trend of the air pressure in the process of moving from the first side edge 231 of the mask protective film 23 to the first middle position 233 of the mask protective film 23 in the alignment area, and the increasing trend of the air pressure in the process of moving from the first middle position 233 of the mask protective film 23 to the second side edge 232.

[0048] It should be noted that the sensor can sense the position of the mask protective film 23 and / or the air outlet module 10 in real time and obtain the sensing signal in the whole stroke process of the relative motion of the mask protective film 23 and the air outlet module 10, and adjust the air pressure of the air outlet module 10 in real time according to the sensing signal.

[0049] Of course, the sensor can also be in the entire stroke of the relative movement between the mask protective film 23 and the air outlet module 10, for example, sensing several selected positions in the entire stroke, and synchronously controlling and adjusting the air pressure of the air outlet module 10 according to the several selected positions. Specifically, the position of the air outlet module 10 is fixed and unchanged, and the movement of the mask protective film 23 is introduced by the moving mechanism, and the several selected positions include but are not limited to the initial position of the mask protective film 23, the position of the alignment area moving to the first side edge 231, the position of the alignment area moving to the first middle position 233, and the position of the alignment area moving to the second side edge 232.

[0050] As some optional solutions, the sensor can also be omitted, that is, the controller controls the movement of the moving mechanism according to the program set in it, and synchronously adjusts the air pressure of the air outlet module 10, which can also achieve that the air pressure decreases from the first side edge 231 of the mask protective film 23 to the first middle position 233 of the mask protective film 23, and the air pressure increases from the first middle position 233 of the mask protective film 23 to the second side edge 232. Specifically, as an example, the moving mechanism runs at a preset moving speed according to the set program, and according to the moving speed and moving time of the moving mechanism, the moving distance value of the moving mechanism moving the mask protective film 23 can be calculated, combined with the initial position of the mask protective film 23, so as to calculate the actual position of the mask protective film 23. In the case that the position of the air outlet module 10 is fixed and known, the relative position of the air outlet module 10 and the mask protective film 23 can be obtained, that is, the air pressure can be decreased from the first side edge 231 of the mask protective film 23 to the first middle position 233 of the mask protective film 23, and the air pressure can be increased from the first middle position 233 of the mask protective film 23 to the second side edge 232.

[0051] In an embodiment, the sensor includes but is not limited to a position sensor, a distance sensor or a displacement sensor.

[0052] Specifically, the position sensor, the distance sensor or the displacement sensor includes but is not limited to a magnetic sensor, a laser sensor, an ultrasonic sensor, an infrared sensor and the like.

[0053] In an embodiment, the number of sensors is one or more, and the specific number can be flexibly adjusted and set according to actual needs, which is not limited here.

[0054] Please refer to Figure 1 In an embodiment, the moving mechanism is used to drive the mask protective film 23 or the air outlet module 10 to move in the direction along the first direction (such as the direction indicated by the arrow f shown in the figure). Figure 1 The air outlet holes 11 of the air outlet module 10 move along the second direction of the mask protective film 23 (such as the direction indicated by the arrow g shown in the figure).Figure 1 The second direction is arranged at an angle with the first direction. In this way, when the photomask protective film 23 moves along the first direction through the air outlet module 10, since each air outlet hole 11 of the air outlet module 10 is arranged along the second direction of the photomask protective film 23, each part of the photomask protective film 23 can be cleaned in place, thereby achieving a better cleaning effect of the photomask protective film 23.

[0055] In an embodiment, the photomask protective film 23 includes, but is not limited to, a square shape, for example, a regular shape such as a pentagon, a hexagon, a circle, an ellipse, and an irregular shape, which is not limited herein. In addition, when the photomask protective film 23 is arranged in a square shape, the first direction is arranged in a length direction of the photomask protective film 23, and the second direction is arranged in a width direction of the photomask protective film 23, and at this time, the first direction and the second direction are perpendicular to each other. Of course, when the photomask protective film 23 is arranged in other shapes, the first direction and the second direction can be flexibly adjusted and arranged according to the shape of the photomask protective film 23 to ensure a better cleaning effect of the photomask protective film 23. In this embodiment, the photomask protective film 23 is taken as a square shape, and the first direction and the second direction are perpendicular to each other as an example.

[0056] It is found through research that, referring to Figure 5 and Figure 6 , Figure 5 a schematic diagram of air pressure at different positions of the photomask protective film 23 along the second direction in an embodiment of the present disclosure is shown, Figure 6 a curve diagram of the deformation amount of the photomask protective film 23 at different positions along the arrangement direction of each air outlet hole 11 is shown. Under the premise of ensuring the cleaning effect of the photomask protective film 23, when each air outlet hole 11 of the air outlet module 10 adopts the same air pressure to clean the photomask protective film 23, the deformation amount of the photomask protective film 23 gradually increases along the A point (corresponding to the third side 234) to the B point (the middle part of the photomask protective film 23 along the arrangement direction of each air outlet hole 11, hereinafter referred to as the second middle position 236), and gradually decreases along the B point to the C point (corresponding to the fourth side 235). Since the deformation amount at the B point is large, it is easy to cause damage.

[0057] Referring to Figure 5 In an embodiment, the controller is further configured to cause the air pressure of each air outlet hole 11 to decrease first and then increase along the second direction (for details, please refer to Figure 5Thus, the second middle part position 236 of the pellicle 23 which is prone to deformation is cleaned by using a relatively small air pressure, thereby avoiding the problem of the pellicle 23 being damaged due to the middle part of the pellicle 23 being prone to deformation, and in addition, the other areas of the pellicle 23 are cleaned by using a relatively large air pressure, thereby ensuring the cleaning effect of the pellicle 23.

[0058] Referring to Figure 5 In an embodiment, the air outlet module 10 further comprises a plurality of flow adjustment valves 30 electrically connected to the controller. The plurality of flow adjustment valves 30 are arranged corresponding to the plurality of air outlet holes 11, and are used to adjust the air pressure of the air outlet holes 11.

[0059] Referring to Figure 5 In an embodiment, the air outlet module 10 spans the third side edge 234 and the fourth side edge 235 of the pellicle 23 along the second direction. Thus, the pellicle 23 can be cleaned in place, thereby achieving a better cleaning effect of the pellicle 23.

[0060] Referring to Figure 5 In an embodiment, the plurality of air outlet holes 11 are arranged at equal intervals along the second direction. Thus, a better cleaning effect of the pellicle 23 can be achieved. Of course, as some optional examples, the plurality of air outlet holes 11 are arranged at unequal intervals along the second direction, and the interval value can be flexibly adjusted and set according to actual needs, which is not limited herein.

[0061] Referring to Figures 1 to 4 In an embodiment, the air outlet module 10 comprises a support base 12 and a plurality of air knives 13 arranged at intervals on the support base 12. The plurality of air outlet holes 11 are formed in the plurality of air knives 13 correspondingly.

[0062] Of course, as an embodiment, the plurality of air knives 13 can be omitted, and for example, air outlet blocks are arranged on the support base 12, and the plurality of air outlet holes 11 are arranged at intervals and formed on the air outlet blocks correspondingly.

[0063] In an embodiment, the air knife 13 can be a strong air type air knife 13, a curved air knife 13, or an ion air knife 13.

[0064] In an embodiment, the angle between the air outlet direction of the air outlet hole 11 and the pellicle 23 is 15° to 25°. Specifically, the angle between the air outlet direction of the air outlet hole 11 and the pellicle 23 is 20°. Of course, the angle between the air outlet direction of the air outlet hole 11 and the pellicle 23 can also be any value between 0° to 15° and 25° to 90°, and how to set can be flexibly adjusted and selected according to actual needs, which is not limited herein.

[0065] Referring to Figure 3 In one embodiment, a cleaning method of the pellicle 23 is provided, which employs any of the cleaning devices of the pellicle 23 described above. The cleaning method comprises the following steps:

[0066] The air outlet module 10 is caused to move relative to the mask, the air pressure of the air outlet module 10 is adjusted, and during the movement of the pellicle 23 from the first side edge 231 to the first middle position 233 of the pellicle 23 in the alignment area, the air pressure of the air outlet module 10 is in a decreasing trend, and during the movement of the pellicle 23 from the first middle position 233 to the second side edge 232, the air pressure of the air outlet module 10 is in an increasing trend.

[0067] The cleaning method of the pellicle 23 described above uses a relatively small air pressure for cleaning and blowing in the first middle position 233 of the pellicle 23 which is prone to deformation, thereby avoiding the undesirable phenomenon of damage to the pellicle 23 caused by the problem of deformation in the middle part of the pellicle 23. In addition, a relatively large air pressure is used for cleaning and blowing in other areas of the pellicle 23, thereby ensuring the cleaning effect of the pellicle 23.

[0068] It should be noted that the decreasing trend can be gradually decreased in a linear manner, or for example, decreased in a stepped manner, or decreased in other regular or irregular manners. The specific manner can be adjusted and set flexibly according to actual needs, and is not limited herein. The decreasing trend in the present embodiment can be shown in the curve S1 as shown in Figure 4 , or can be shown in the curve diagram of gas flow and displacement as shown in Figure 3 . In addition, the increasing trend can be gradually increased in a linear manner, or for example, increased in a stepped manner, or increased in other regular or irregular manners. The specific manner can be adjusted and set flexibly according to actual needs, and is not limited herein. The increasing trend in the present embodiment can be shown in the curve S1 as shown in Figure 4 , or can be shown in the curve diagram of gas flow and displacement as shown in Figures 2 to 4 .

[0069] Referring to Figures 2 to 4In one embodiment, the step of adjusting the air pressure of the air outlet module 10 includes: sensing the position of the mask protection film 23 and / or the air outlet module 10, and adjusting the air pressure of the air outlet module 10 according to the position of the mask protection film 23 and / or the air outlet module 10. In this way, the position of the mask protection film 23 and / or the air outlet module 10 is sensed to obtain a sensing signal, and the air pressure of the air outlet module 10 is adjusted according to the sensing signal, so that the air pressure decreases from the first side edge 231 to the first middle position 233 of the mask protection film 23, and the air pressure increases from the first middle position 233 to the second side edge 232.

[0070] Referring to Figures 2 to 4 In one embodiment, the step of adjusting the air pressure of the air outlet module 10 according to the position of the mask protection film 23 and / or the air outlet module 10 includes:

[0071] In the entire stroke of the relative movement between the mask protection film 23 and the air outlet module 10, the position of the mask protection film 23 and / or the air outlet module 10 is sensed in real time to obtain a sensing signal, and the air pressure of the air outlet module 10 is adjusted in real time according to the sensing signal.

[0072] In another embodiment, the step of adjusting the air pressure of the air outlet module 10 according to the position of the mask protection film 23 and / or the air outlet module 10 includes:

[0073] In the entire stroke of the relative movement between the mask protection film 23 and the air outlet module 10, when the sensing alignment area moves to the position of the first side edge 231, the air pressure of the air outlet module 10 starts to decrease, and when the sensing alignment area moves to the first middle position 233, the air pressure of the air outlet module 10 starts to increase.

[0074] Referring to Figure 4 , Figure 5 In one embodiment, the step of adjusting the air pressure of the air outlet module 10 includes:

[0075] When the alignment area moves to the position of the first side edge 231, the air flow of the air outlet module 10 is controlled to be 27.8 LPM-28.2 LPM;

[0076] At this time, the coordinate of the alignment area on the x-axis is set to 0 accordingly. In particular, when the alignment area moves to the position of the first side edge 231, the air flow of the air outlet module 10 is controlled to be, for example, 27.8 LPM, 27.9 LPM, 28 LPM, 28.1 LPM or 28.2 LPM, and of course can be flexibly adjusted to other air pressure values outside the range of 27.8 LPM-28.2 LPM according to actual needs.

[0077] When the alignment area moves to the first middle position 233, the air flow of the air outlet module 10 is controlled to be 25.8 LPM-26.2 LPM.

[0078] At this time, the coordinate of the alignment area on the x-axis is set to 76.2 accordingly, which is determined according to the length of the mask protective film 23, specifically half of the length of the mask protective film 23. In particular, when the alignment area moves to the first middle position 233, the air flow of the air outlet module 10 is controlled to be, for example, 25.8 LPM, 25.9 LPM, 26 LPM, 26.1 LPM or 26.2 LPM, and of course can be flexibly adjusted to other air pressure values outside the range of 25.8 LPM-26.2 LPM according to actual needs.

[0079] When the alignment area moves to the position of the second side edge 232, the air flow of the air outlet module 10 is controlled to be 27.8 LPM-28.2 LPM. It has been found through research that when the air flow is set to this range, the cleaning effect on the mask protective film 23 can be ensured, and at the same time, the problem of damage to the mask protective film 23 due to the deformation of the middle part of the mask protective film 23 can be avoided.

[0080] At this time, the coordinate of the alignment area on the x-axis is set to 154.2 accordingly. In particular, when the alignment area moves to the position of the second side edge 232, the air flow of the air outlet module 10 is controlled to be, for example, 27.8 LPM, 27.9 LPM, 28 LPM, 28.1 LPM or 28.2 LPM, and of course can be flexibly adjusted to other air pressure values outside the range of 27.8 LPM-28.2 LPM according to actual needs.

[0081] Please refer to Figure 5 In an embodiment, the air pressure of the air outlet module 10 is made to decrease first and then increase along the second direction (as shown by the curve S2 of Figure 5 Thus, the relatively small air pressure is used for cleaning the second middle position 236 of the mask protective film 23 which is prone to deformation, so as to avoid the problem of damage to the mask protective film 23 due to the deformation of the middle part of the mask protective film 23, and at the same time, the relatively large air pressure is used for cleaning other areas of the mask protective film 23, so as to ensure the cleaning effect on the mask protective film 23.

[0082] Referring to Figure 5 Specifically, the air pressure of the frontmost air outlet 11 is gradually decreased to the air pressure of the air outlet 11 at the middle position, and the air pressure of the air outlet 11 at the middle position is gradually increased to the air pressure of the rearmost air outlet 11 along the second direction.

[0083] Referring to Figure 5 Specifically, the air pressure of each air outlet 11 is gradually decreased from the first air outlet 11 to the air outlet 11 at the second middle position 236, and gradually increased from the air outlet 11 at the second middle position 236 to the last air outlet 11 along the second direction. As an example, the number of air outlets 11 is 12, the air pressure of the air outlets 11 is gradually decreased from the first air outlet to the sixth air outlet, and gradually increased from the seventh air outlet to the twelfth air outlet.

[0084] It should be noted that the gradual decrease of the air pressure can be gradually decreased one by one, or for example, gradually decreased every two, that is, for example, the air pressure of the first air outlet 11 is the same as that of the second air outlet 11, the air pressure of the third air outlet 11 is the same as that of the fourth air outlet 11, but the air pressure of the third air outlet 11 is smaller than that of the first air outlet 11. Similarly, the gradual increase of the air pressure can be gradually increased one by one, or for example, gradually increased every two.

[0085] Referring to ​ In an embodiment, the air pressure of the first air outlet 11 to the air outlet 11 at the second middle position 236 can be gradually decreased in a linear manner, or in a non-linear manner, which is not limited here and can be flexibly adjusted and set according to actual needs. Similarly, the air pressure of the air outlet 11 at the second middle position 236 to the last air outlet 11 can be gradually increased in a linear manner, or in a non-linear manner, which is not limited here and can be flexibly adjusted and set according to actual needs.

[0086] The technical features of the above embodiments can be combined in any manner. In order to make the description concise, all possible combinations of the technical features in the above embodiments are not described, however, as long as the combinations of the technical features do not exist contradictory, it should be considered as the scope of the present disclosure.

[0087] The above-described embodiments are merely illustrative of the present disclosure and do not limit the scope of the patent. It should be pointed out that those skilled in the art can make various modifications and improvements without departing from the concept of the present disclosure, and these modifications and improvements shall fall within the scope of the present disclosure. Therefore, the scope of the patent of the present disclosure shall be subject to the appended claims.

[0088] In the description of the present disclosure, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are merely for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be construed as limiting the present disclosure.

[0089] In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present disclosure, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise explicitly specified and limited.

[0090] In the present disclosure, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting", "fixing" and the like should be understood broadly, for example, it can be fixed connection, or detachable connection, or integral; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium, it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meaning of the above terms in the present disclosure can be understood according to the specific circumstances.

[0091] In the present disclosure, unless otherwise explicitly specified and limited, the first feature "on" or "under" the second feature can be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0092] It is to be understood that when an element such as a layer, region or substrate is referred to as being "on" or "connected to" another element, it can be directly on or connected to the other element or intervening elements can be present. In contrast, when an element is referred to as being "directly on" or "directly connected to" another element, there are no intervening elements present. It will be understood that, although the terms "first", "second", etc. can be used herein to describe various elements, these elements should not be limited by these terms since such elements are commonly known with other elements except that they are not explicitly mentioned. The terms "comprises", "comprising", "includes", "including" and the like can be used herein, and these terms are intended to be interpreted expansively and be taken to include the possibility that elements, components, or steps therebetween can be additional elements, components or steps. The terms "a", "an", and "the" and similar referents in the context of an embodiment described herein are to be construed to be open-ended, allowing for the possibility that there are alternatives in use, the same as the

Claims

1. A cleaning device for a photomask protective film, characterized in that, The cleaning device for the photomask protective film includes: An air outlet module is provided with a plurality of air outlet holes arranged at intervals in sequence. The air outlet holes are used to outlet air toward the photomask protective film. The outlet air outlet direction is set at an angle to the photomask protective film. The position where the outlet air outlet intersects the photomask protective film according to the outlet air direction is defined as the alignment area. A moving mechanism, the moving mechanism being used to drive the photomask or the air outlet module to move, such that the alignment area sequentially moves from a first side of the photomask protective film to a second side of the photomask protective film opposite to the first side; and A controller electrically connected to the air outlet module is configured to adjust the air pressure of the air outlet module such that the air pressure decreases as the alignment area moves from the first side to the first center position of the photomask, and increases as the alignment area moves from the first center position of the photomask to the second side.

2. The cleaning device for the photomask protective film according to claim 1, characterized in that, The cleaning device for the photomask also includes a sensor; the sensor is used to sense the position of the photomask and / or the air outlet module, and the sensor is electrically connected to the controller; the controller is used to adjust the air pressure of the air outlet module according to the sensing signal from the sensor.

3. The cleaning device for the photomask protective film according to claim 2, characterized in that, The sensor is a position sensor, a distance sensor, or a displacement sensor; the number of the sensors can be one or more.

4. The cleaning device for the photomask protective film according to claim 1, characterized in that, The moving mechanism is used to drive the photomask or the air outlet module to move along a first direction. Each air outlet of the air outlet module is arranged at intervals along a second direction of the photomask, and the second direction is arranged at an angle to the first direction.

5. The cleaning device for the photomask protective film according to claim 4, characterized in that, The controller is also configured to cause the air pressure of each of the air outlets to first decrease and then increase along the second direction.

6. The cleaning device for the photomask protective film according to claim 5, characterized in that, The air outlet module also includes a plurality of flow adjustment valves electrically connected to the controller; the plurality of flow adjustment valves are correspondingly arranged with the plurality of air outlets and are used to adjust the air pressure of the air outlets.

7. The cleaning device for the photomask protective film according to claim 4, characterized in that, The air outlet module spans the third and fourth sides of the photomask along the second direction.

8. The cleaning device for the photomask protective film according to claim 4, characterized in that, The plurality of air outlets are arranged at equal intervals along the second direction.

9. The cleaning device for the photomask protective film according to claim 1, characterized in that, The air outlet module includes a support base and a plurality of air blades spaced apart on the support base, with the plurality of air outlet holes correspondingly formed in the plurality of air blades.

10. A method for cleaning a photomask protective film, characterized in that, The cleaning apparatus employing the photomask protective film as described in any one of claims 1 to 9, the cleaning method comprising the following steps: This causes the air outlet module to move relative to the photomask, adjusting the air pressure of the air outlet module. During the movement from the first side of the photomask protective film to the first middle position of the photomask protective film in the alignment area, the air pressure of the air outlet module tends to decrease, and during the movement from the first middle position of the photomask protective film to the second side, the air pressure of the air outlet module tends to increase.

11. The cleaning method according to claim 10, characterized in that, The step of adjusting the air pressure of the air outlet module includes: sensing the position of the photomask and / or the air outlet module, and adjusting the air pressure of the air outlet module according to the position of the photomask and / or the air outlet module.

12. The cleaning method according to claim 11, characterized in that, The steps of adjusting the air pressure of the air outlet module according to the position of the photomask and / or the air outlet module include: Throughout the entire stroke of the relative movement between the photomask and the air outlet module, the position of the photomask and / or the air outlet module is sensed in real time and a sensing signal is obtained. The air pressure of the air outlet module is adjusted in real time according to the sensing signal.

13. The cleaning method according to claim 11, characterized in that, The steps of adjusting the air pressure of the air outlet module according to the position of the photomask and / or the air outlet module include: During the entire stroke of the relative movement between the photomask and the air outlet module, when the sensing alignment area moves to the first side position, the air pressure of the air outlet module begins to decrease; when the sensing alignment area moves to the first middle position, the air pressure of the air outlet module begins to increase.

14. The cleaning method according to claim 11, characterized in that, The step of adjusting the air pressure of the air outlet module includes: when the alignment area moves to the first side position, the air outlet flow rate of the air outlet module is controlled to be 27.8 LPM-28.2 LPM; when the alignment area moves to the first middle position, the air outlet flow rate of the air outlet module is controlled to be 25.8 LPM-26.2 LPM; when the alignment area moves to the second side position, the air outlet flow rate of the air outlet module is controlled to be 27.8 LPM-28.2 LPM.

15. The cleaning method according to claim 11, characterized in that, The air outlets of the air outlet module are arranged sequentially at intervals along the second direction of the photomask. The cleaning method further includes the step of making the air pressure of the air outlet module first decrease and then increase along the second direction.

16. The cleaning method according to claim 15, characterized in that, The method of making the air pressure of the air outlet module show a trend of first decreasing and then increasing along the second direction specifically includes: along the second direction, making the air pressure of the air outlet at the foremost position decrease from the air pressure of the air outlet at the middle position, and making the air pressure of the air outlet at the middle position increase from the air pressure of the air outlet at the rearmost position.

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