Processing liquid supply device and substrate processing device including the same

Abstract

The present invention provides a treatment liquid supply device and a substrate processing device including the treatment liquid supply device. Regardless of the operation of the supply device, treatment liquid within the piping is prevented from remaining or stagnating, thereby preventing bacterial contamination of the treatment liquid, improving the recovery rate of the treatment liquid, and improving the quality of the processed substrates. The present invention includes: a treatment liquid spraying unit for spraying treatment liquid; a treatment liquid supply unit for pressurizing treatment liquid stored in a treatment liquid storage tank and supplying it to the treatment liquid spraying unit; a piping module connecting the treatment liquid supply unit and the treatment liquid spraying unit, the piping module including: a main pipe connected to the treatment liquid supply unit; a plurality of branch pipes branching from the main pipe; and a plurality of discharge pipes branching from the branch pipes and connected to the treatment liquid spraying unit. The branch pipes include a first pipe, a second pipe, and a third pipe, and do not form a horizontal section perpendicular to the vertical direction.

Description

Technical Field

[0001] The present invention relates to a processing liquid supply device and a substrate processing device including the processing liquid supply device. Specifically, the present invention relates to a processing liquid supply device and a substrate processing device including the processing liquid supply device, which can prevent the processing liquid from remaining or stagnating in the piping regardless of the operation of the supply device, thereby preventing contamination of the processing liquid caused by bacteria, improving the recovery rate of the processing liquid, and also improving the quality of the processed substrate. Background Art

[0002] Substrates such as semiconductor chips and displays are manufactured through various manufacturing steps. In such substrate manufacturing steps, a step is performed in which a chemical solution is sprayed onto the substrate side to treat the substrate surface or cleaning water is sprayed onto the substrate side to remove impurities attached to the substrate surface during the manufacturing step.

[0003] In this way, in order to supply liquid processing liquid to the substrate during the substrate manufacturing step, a supply pump for conveying the processing liquid to the spray nozzle side adjacent to the substrate in the process chamber and piping equipment connecting the supply pump and the spray nozzle are required.

[0004] However, depending on the substrate manufacturing equipment, connecting the pump and the spray nozzle requires a large number of pipes with complex routings. Furthermore, in the case of multiple process chambers arranged in series, as in in-line substrate processing equipment designed to improve substrate manufacturing efficiency, the number of pipes used to transport the processing liquid to each process chamber increases, and the pipes have complex routings.

[0005] In the case of process liquid delivery piping with complex routings, a large amount of process liquid can remain in the delivery piping when the supply pump is not operating. For example, process liquid can accumulate or remain in horizontal sections of the piping, sections where flow paths change, and gaps in assembly devices connecting pipes.

[0006] Then, since the processing liquid remaining in the pipe for a long time is easily contaminated by bacterial growth, etc., the recovery rate of the processing liquid is greatly reduced. When the contaminated processing liquid is used for substrate processing, the quality of the substrate is degraded.

[0007] Prior art literature

[0008] Patent Literature

[0009] (Patent Document 1) Korean Utility Model Registration No. 0224866 (published on November 30, 2001) Summary of the Invention

[0010] Technical problem to be solved by the invention

[0011] The object of the present invention is to solve the existing problems, and the present invention provides a processing liquid supply device that can suppress the phenomenon of processing liquid remaining or stagnating in the piping regardless of the operation of the supply device, and a substrate processing device including the processing liquid supply device.

[0012] Means used to solve problems

[0013] The processing liquid supply device according to one embodiment of the present invention for solving the above-mentioned problem is characterized in that it includes: a processing liquid injection part for injecting processing liquid; a processing liquid supply part for pressurizing the processing liquid stored in the processing liquid storage tank and supplying it to the processing liquid injection part; and a piping module connecting the processing liquid supply part and the processing liquid injection part, the piping module includes: a main pipe part connected to the processing liquid supply part; a plurality of branch pipe parts branching from the main pipe part; and a plurality of discharge pipe parts branching from the branch pipe part and connected to the processing liquid injection part, the branch pipe part includes: a first pipe extending in the vertical direction, a second pipe extending obliquely relative to the vertical direction, and a third pipe formed in a curved manner to connect the first pipe and the second pipe, and no horizontal section perpendicular to the vertical direction is formed.

[0014] The inner wall surfaces of the main pipe portion, the branch pipe portion, and the discharge pipe portion may be subjected to a hydrophobic treatment.

[0015] Furthermore, the main pipe portion, the branch pipe portion, and the discharge pipe portion may be integrated by fusion.

[0016] Furthermore, the main pipe portion, the branch pipe portion, and the discharge pipe portion may be made of perfluoroalkoxy (PFA) fluorine resin.

[0017] The branch pipe portion may have a branch port having an inner diameter identical to that of the discharge pipe portion, and the piping module may further include a connecting component that connects the branch pipe portion and the discharge pipe portion and suppresses the formation of a gap between the branch port and the discharge pipe portion.

[0018] The connecting component may include: a first connecting portion having a through hole, which passes through the branch pipe portion to surround a portion of the branch pipe portion where the branch port is formed; and a second connecting portion which protrudes from the first connecting portion and has an insertion hole that is connected to the through hole and into which the end of the discharge pipe portion is inserted, and a support platform that tightly supports the front end surface of the end of the discharge pipe portion inserted into the insertion hole.

[0019] The first connection portion may include a first end portion and a second end portion that are spaced apart from each other by cutting out a portion of an opposite side region with respect to the second connection portion.

[0020] The connecting component may further include a coupling component that connects the first end portion and the second end portion to bring the first end portion and the second end portion closer together and pressurizes the first connection portion toward the center of the branch pipe portion.

[0021] A substrate processing apparatus according to an embodiment of the present invention is characterized by comprising: a chamber having a processing space for processing a substrate; and the above-mentioned processing liquid supplying device for supplying a processing liquid to the substrate located in the processing space.

[0022] The substrate processing apparatus according to an embodiment of the present invention may further include a processing liquid recovery device, which connects the chamber and the processing liquid storage tank and includes a recovery piping module for recovering the processing liquid used in substrate processing.

[0023] The recovery piping module may include: a first recovery piping extended along the vertical direction; a second recovery piping extended obliquely relative to the vertical direction; and a third recovery piping bent to connect the first recovery piping and the second recovery piping, and not forming a horizontal section perpendicular to the vertical direction.

[0024] Effects of the Invention

[0025] According to the present invention, a first pipe extending vertically, a second pipe inclined relative to the vertical, and a third pipe formed by a bend are used without forming a horizontal section of piping. This eliminates gaps within the piping module regardless of the operation of the process liquid supply unit. This prevents residual or stagnant process liquid, thereby fundamentally preventing the occurrence of process liquid contamination, such as bacterial growth. This improves the recovery rate of process liquid and enhances the quality of processed substrates.

[0026] According to the present invention, the main pipe portion, the branch pipe portion and the discharge pipe portion are manufactured into one piece by fusing, thereby eliminating the gap space or internal protruding structure that hinders the flow of the treatment liquid, thereby ensuring that the treatment liquid inside the piping module flows more stably without residue. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 is a schematic diagram illustrating a processing liquid supply device according to an embodiment of the present invention.

[0028] Figure 2 It shows Figure 1 Schematic diagram of the branch pipe section.

[0029] Figure 3 It shows Figure 1 Schematic diagram of the connecting parts.

[0030] Figure 4 It shows Figure 1 Schematic cross-sectional view of the connection portion of the branch pipe portion and the discharge pipe portion.

[0031] Figure 5 is a schematic diagram illustrating a substrate processing apparatus according to an embodiment of the present invention.

[0032] Description of Reference Numerals

[0033] 100: Treatment liquid supply device 110: Treatment liquid spraying unit

[0034] 120: Processing liquid supply unit 130: Piping module

[0035] 131: Main pipe 133: Branch pipe

[0036] 135: discharge pipe 130a: first pipe

[0037] 130b: Second pipe 130c: Third pipe DETAILED DESCRIPTION

[0038] Hereinafter, the preferred embodiment of the present invention that can specifically achieve the above-mentioned problem to be solved will be described with reference to the accompanying drawings. When describing this embodiment, the same names and the same reference numerals may be used for the same structures, and additional description thereof may be omitted.

[0039] Figure 1 is a schematic diagram showing a treatment liquid supply device according to an embodiment of the present invention, Figure 1 (a) shows a side view schematically, Figure 1 (b) in the figure shows a schematic top view.

[0040] Reference Figure 1 According to this embodiment, the processing liquid supply device 100 is a device for supplying liquid processing liquid to an object to be processed (such as a substrate), and can include a processing liquid injection unit 110, a processing liquid supply unit 120 and a piping module 130.

[0041] The processing liquid spraying unit 110 can spray the processing liquid toward the object to be processed. As the processing liquid spraying unit 110, a nozzle can be used.

[0042] The processing liquid supply unit 120 can pressurize the processing liquid stored in the processing liquid storage tank 121 and supply the pressurized processing liquid to the processing liquid injection unit 110. As the processing liquid supply unit 120, a pump can be used.

[0043] That is, the treatment liquid stored in the treatment liquid storage tank 121 can be pressurized by the treatment liquid supply unit 120 and transported to the treatment liquid spray unit 110, and can be supplied to the object while being sprayed from the treatment liquid spray unit 110. In this way, the surface of the object can be treated with the treatment liquid.

[0044] The piping module 130 may connect the processing liquid supply unit 120 and the processing liquid injection unit 110 , and guide the transfer of the processing liquid from the processing liquid supply unit 120 to the processing liquid injection unit 110 .

[0045] The piping module 130 according to the embodiment may include a main pipe portion 131 , a branch pipe portion 133 , and a discharge pipe portion 135 .

[0046] One end of the main pipe portion 131 may be connected to the treatment liquid supply portion 120 , and the treatment liquid may flow in from the treatment liquid supply portion 120 .

[0047] The main pipe portion 131 according to an embodiment may be extended obliquely relative to the vertical direction D1 so as not to form a horizontal section perpendicular to the vertical direction D1. In other words, it may be arranged to be inclined upward from one end connected to the processing liquid supply unit 120 to the other end.

[0048] Therefore, the processing liquid remaining in the main pipe portion 131 when the processing liquid supply portion 120 is not in operation can flow down toward the processing liquid supply portion 120 by gravity and be recovered.

[0049] The main pipe portion 131 may have a branch port for connecting to the branch pipe portion 133 .

[0050] The branch port of the main pipe portion 131 may be formed to have the same inner diameter as that of the branch pipe portion 133 .

[0051] The main pipe portion 131 may have a plurality of branch openings arranged along the length direction of the main pipe portion 131 in accordance with the number of the branch pipe portions 133 .

[0052] One end of the branch pipe portion 133 may be integrally connected to the branch port of the main pipe portion 131 by fusion. Thus, no gap space or protruding structure is formed at the connection portion between the main pipe portion 131 and the branch pipe portion 133.

[0053] In addition, the inner wall surface of the main pipe portion 131 may be treated to be hydrophobic.

[0054] By forming a hydrophobic coating on the inner wall surface of the main pipe portion 131 , the treatment liquid remaining inside the main pipe portion 131 when the treatment liquid supply portion 120 is not operating can more efficiently flow down toward the treatment liquid supply portion 120 by gravity and be recovered.

[0055] In addition, the main pipe portion 131 may also be made of a hydrophobic material.

[0056] For example, the main pipe portion 131 may be made of perfluoroalkoxy (PFA) fluororesin. As is known to all, PFA fluororesin has excellent heat resistance, chemical resistance, and weather resistance, and has excellent mechanical strength at high temperatures, thus facilitating the forming of pipe or tube joints.

[0057] One end of the branch pipe portion 133 may be connected to the main pipe portion 131, and a plurality of branch pipe portions 133 may be provided so as to be coupled to each branch port of the main pipe portion 131. Therefore, the processing liquid inside the main pipe portion 131 may be branched and flow to the plurality of branch pipe portions 133.

[0058] Furthermore, a flow rate measuring unit 137 and a flow rate regulating unit 138 may be provided at the end of the branch pipe portion 133 adjacent to the main pipe portion 131. The flow rate measuring unit 137 can measure the flow rate of the treatment liquid flowing through the branch pipe portion 133, and the flow rate regulating unit 138 can regulate the flow rate of the treatment liquid flowing inside the branch pipe portion 133 based on the flow rate measured by the flow rate measuring unit 137.

[0059] According to an embodiment, the branch pipe portion 133 may include a first pipe 130a extending along the vertical direction D1, a second pipe 130b extending obliquely relative to the vertical direction D1, and a third pipe 130c bent to connect the first pipe 130a and the second pipe 130b. In other words, the branch pipe portion 133 may not define a horizontal section perpendicular to the vertical direction D1.

[0060] Here, a plurality of first pipes 130a, second pipes 130b, and third pipes 130c may be provided. For example, the branch pipe portion 133 may have a structure of first pipe-third pipe-second pipe-third pipe-first pipe-third pipe-second pipe.

[0061] Furthermore, the branch pipe portion 133 connects the pipes by fusing and uses the bent third pipe 130 c instead of a separate assembly device for direction change, thereby eliminating gaps and protruding structures inside the pipes.

[0062] Therefore, when the processing liquid supply part 120 is not in operation, the processing liquid inside the branch pipe part 133 can flow down toward the main pipe part 131 by gravity and be completely recovered without any residue.

[0063] The branch pipe portion 133 may have a branch port for connecting to the discharge pipe portion 135 .

[0064] The branch port of the branch pipe portion 133 may be formed to penetrate and have the same inner diameter as that of the discharge pipe portion 135 .

[0065] The branch pipe portion 133 may have a plurality of branch ports corresponding to the number of the discharge pipe portions 135 , and may be provided along the length direction of the branch pipe portion 135 .

[0066] One end of the discharge pipe portion 135 may be integrally connected to the branch port of the branch pipe portion 133 by fusion. Thus, no gap space or protruding structure is formed at the connection portion between the branch pipe portion 133 and the discharge pipe portion 135.

[0067] In addition, a setting hole for combining auxiliary devices such as the flow measuring part 137 and the flow regulating part 138 may be provided at the branch pipe part 133, and the flow measuring part 137 and the flow regulating part 138 may be integrally combined to the setting hole by fusion.

[0068] In addition, like the main pipe 131, the inner wall of the branch pipe 133 may also be treated to be hydrophobic. Thus, when the processing liquid supply unit 120 is not in operation, the processing liquid remaining in the branch pipe 133 can flow down the main pipe 131 more efficiently by gravity and be recovered.

[0069] In addition, like the main pipe portion 131 , the branch pipe portion 133 may also be made of a hydrophobic material such as PFA fluororesin.

[0070] One end of the discharge pipe portion 135 may be connected to the branch pipe portion 133 , and the other end may be connected to the processing liquid spraying portion 110 .

[0071] In addition, a plurality of discharge pipes 135 may be provided so as to be coupled to each branch port of the branch pipe 133. Therefore, the treatment liquid inside the branch pipe 133 may branch and flow to the plurality of discharge pipes 135 and may be sprayed toward the object through the treatment liquid spraying unit 110.

[0072] When a spray nozzle is used as the processing liquid spraying unit 110 , a plurality of spray nozzles may be arranged at intervals along the longitudinal direction of the discharge pipe portion 135 .

[0073] The discharge pipe portion 135 according to an embodiment may extend obliquely relative to the vertical direction D1 so as not to form a horizontal section perpendicular to the vertical direction D1. Specifically, the discharge pipe portion 135 may be configured to tilt upward from one end connected to the branch pipe portion 133 to the other end connected to the treatment liquid sprayer 110.

[0074] Therefore, when the processing liquid supply unit 120 is not operating, the processing liquid remaining in the discharge pipe unit 135 can flow down in the direction of the branch pipe unit 133 by gravity and be recovered.

[0075] In addition, like the branch pipe 133, the inner wall of the discharge pipe 135 may also be treated to be hydrophobic. Thus, when the treatment liquid supply unit 120 is not in operation, the treatment liquid remaining in the discharge pipe 135 can flow down the branch pipe 133 more efficiently by gravity and be recovered.

[0076] In addition, like the branch pipe portion 133 , the discharge pipe portion 133 may also be made of a hydrophobic material such as PFA fluororesin.

[0077] Figure 2 It shows Figure 1 Schematic diagram of the branch pipe section.

[0078] Add reference Figure 2 According to this embodiment, the branch pipe portion 133 may include a first pipe 130 a , a second pipe 130 b , and a third pipe 130 c .

[0079] The first pipe 130 a may be formed to extend in the vertical direction D1 .

[0080] A plurality of first pipes 130 a may be provided, and the plurality of first pipes 130 a may be extended for use as needed.

[0081] In this case, the plurality of first pipes 130a can be integrated by fusing while their opposing ends are in close contact. By fusing the first pipes 130a together without requiring unnecessary assembly equipment, gaps or internal protruding structures that could obstruct the flow of the treatment liquid can be eliminated, ensuring stable flow without residue regardless of the operation of the treatment liquid supply unit 120.

[0082] The second pipe 130 b may be formed to extend obliquely with respect to the vertical direction D1 .

[0083] A plurality of second pipes 130 b may be provided, and the plurality of second pipes 130 b may be extended for use as needed.

[0084] At this time, the plurality of second pipes 130b may be integrally connected by fusion while the opposing ends are brought into close contact with each other.

[0085] The third pipe 130c may be bent to connect the first pipe 130a to the second pipe 130b. The degree of the bend of the third pipe 130c may be determined by the degree of inclination of the second pipe 130b with respect to the vertical direction D1.

[0086] In this case, one end of the third pipe 130c can be fused together with the end of the first pipe 130a, while the other end can be fused together with the end of the second pipe 130b. By connecting the pipes through fusion and using the bent third pipe 130c in place of a separate assembly device for changing direction, gaps and protruding structures within the pipes can be completely eliminated.

[0087] Of course, the third pipe 130c may connect two second pipes 130b having different inclination angles with respect to the vertical direction D1.

[0088] In addition, a plurality of third pipes 130c may be provided, and the plurality of third pipes 130c may be extended and used as needed.

[0089] As described above, the branch pipe portion 133 does not form a horizontal section perpendicular to the vertical direction D1, and the first pipe 130a extended along the vertical direction D1, the second pipe 130b inclined relative to the vertical direction D1, and the third pipe 130c connecting the first pipe 130a and the second pipe 130b can suppress the residue of the treatment liquid inside the branch pipe portion 133 regardless of the operation of the treatment liquid supply portion 120, thereby fundamentally blocking the occurrence of an environment where the treatment liquid is contaminated, such as bacterial growth.

[0090] In addition, the first piping 130a, the second piping 130b and the third piping 130c are integrated by fusion without unnecessary assembly devices, thereby eliminating gap spaces or internal protruding structures that hinder the flow of the processing liquid. As a result, the stable flow of the processing liquid flowing inside the piping module 130 can be ensured without any residue, regardless of the operation of the processing liquid supply part 120.

[0091] In addition, if Figure 1 and Figure 2 As shown, the main pipe portion 131 and the discharge pipe portion 135 have a single piping structure extending obliquely relative to the vertical direction D1, and only the branch pipe portion 133 has a composite piping structure including the first pipe 130a, the second pipe 130b and the third pipe 130c.

[0092] Of course, unlike the situation shown in the figure, the main pipe portion 131 and the discharge pipe portion 135 can also be constructed to include: a first pipe 130a extended along the vertical direction D1, a second pipe 130b extended obliquely relative to the vertical direction D1, and a third pipe 130c bent to connect the first pipe 130a and the second pipe 130b without forming a horizontal section perpendicular to the vertical direction D1.

[0093] Furthermore, manifold piping structures, where multiple branch pipes are joined to a single pipe, can create gaps at the connection points due to the difference in shape between the branch openings formed on the main pipe and the ends of the branch pipes. To address this issue, the pipe connection points can be machined separately, or a separate assembly device for the branch pipes can be used.

[0094] According to this embodiment, the piping module 130 may further include a connecting component 140, which, when connecting the flat end of the branch pipe portion 133 to the branch port formed on the outer peripheral surface of the main pipe portion 131, or connecting the flat end of the discharge pipe portion 135 to the branch port formed on the outer peripheral surface of the branch pipe portion 133, can block the formation of a gap that may cause residual treatment liquid while ensuring the airtightness of the connection portion.

[0095] The connecting component 140 can connect the branch pipe portion 133 branched from the main pipe portion 131, or connect the exhaust pipe portion 135 branched from the branch pipe portion 133, and can block the formation of gaps that cannot ensure airtightness at the connection portion or cause the processing liquid to remain.

[0096] Figure 3 It shows Figure 1 Schematic diagram of the connected components, Figure 4 It shows Figure 1 Schematic cross-sectional view of the connection portion of the branch pipe portion and the discharge pipe portion.

[0097] Reference Figure 3 and Figure 4 , the connecting component 140 may include a first connecting portion 141 and a second connecting portion 143 .

[0098] The first connection portion 141 may have a through hole 141 a penetrating the branch pipe portion 133 , whereby the first connection portion 141 may surround a portion of the branch pipe portion 133 where the branch opening 133 a is formed.

[0099] The second connection portion 143 may be integrally combined with the first connection portion 141 and may be formed to protrude from the first connection portion 141. Furthermore, the second connection portion 143 may have an insertion hole 143a that communicates with the through hole 141a and into which the end of the discharge pipe portion 135 is inserted. Furthermore, the second connection portion 143 may have a support platform 143b that closely supports the front end surface of the end of the discharge pipe portion 135 inserted into the insertion hole 143a.

[0100] Through such a connecting component 140, the outer peripheral surface of the branch port 133a of the branch pipe portion 133 is tightly attached to the inner peripheral surface of the through hole 141a of the first connecting portion 141, and the front end surface of the discharge pipe portion 135 is tightly attached to the support platform 143b of the second connecting portion 143, which can block the formation of a gap between the branch pipe portion 133 and the discharge pipe portion 135.

[0101] At this time, the edges of the through hole 141a and the outer peripheral surface of the branch pipe portion 133 that are connected to each other can be integrated by fusion. In addition, the edges of the insertion hole 143a and the outer peripheral surface of the discharge pipe portion 135 that are connected to each other can also be integrated by fusion.

[0102] Furthermore, the first connecting portion 141 may include a first end portion 141b and a second end portion 141c that are spaced apart from each other by cutting out a portion of the opposite side with respect to the second connecting portion 143. The first end portion 141b and the second end portion 141c can be separated or brought closer together by an external force, thereby allowing the first connecting portion 141 to expand or contract relative to the center of the branch pipe portion 133 with respect to the second connecting portion 143.

[0103] Therefore, insertion and separation of the branch pipe portion 133 may be more easily performed through the through-hole 141 a of the first connection portion 141 .

[0104] In addition, the connection member 140 may further include a coupling member 145 .

[0105] The coupling member 145 can penetrate the first end portion 141b and the second end portion 141c to connect the first end portion 141b and the second end portion 141c. Such a coupling member 145 can bring the first end portion 141b and the second end portion 141c closer together and press the first connecting portion 141 toward the center of the branch pipe portion 133 to secure it. Bolts or nuts can be used as the coupling member.

[0106] Figure 5 is a schematic diagram illustrating a substrate processing apparatus according to an embodiment of the present invention.

[0107] Reference Figure 5 The substrate processing apparatus according to the embodiment of the present invention may include a chamber 200, a substrate conveying apparatus 300, and a processing liquid supply apparatus 100 (refer to Figure 2 ).

[0108] The chamber 200 may have a processing space for processing the substrate 1 .

[0109] The substrate transfer device 300 may be disposed in the processing space of the chamber 200 and may transfer the substrate 1 from one side of the processing space to the other side. The substrate 1 being transferred by the substrate transfer device 300 may be surface-treated using the processing liquid supplied by the processing liquid supply device 100.

[0110] The substrate transfer device 300 may include a driving shaft having rollers, and the substrate 1 may be transferred by a rotational force of the rollers in a state of being supported by the rollers.

[0111] The processing liquid supply device 100 can supply the processing liquid to the substrate 1 located in the processing space of the chamber 200. Such a processing liquid supply device 100 can use the above-mentioned processing liquid supply device.

[0112] Reference Figure 2 Supplementary explanation is provided. The discharge pipe portion 135 of the processing liquid supply device 100 can be extended in a direction perpendicular to the conveying direction of the substrate 1 within the processing space of the chamber 200 so as to be arranged on the upper side of the substrate 1. At this time, the substrate 1 can be conveyed at an angle of first angle relative to the ground. A plurality of processing liquid injection portions 110 can be provided along the length direction of the discharge pipe portion 135. In addition, the processing liquid injection portion 110 is arranged at an angle relative to the ground, and is arranged at an angle the same as the first angle, thereby making it possible to uniformly supply the processing liquid to the entire surface of the substrate 1 being conveyed.

[0113] In addition, the substrate processing apparatus may further include a processing liquid recovery device.

[0114] The processing liquid recovery device may include a recovery piping module 430 connecting the chamber 200 and the processing liquid storage tank 121 .

[0115] That is, the processing liquid used for processing the substrate 1 in the chamber 200 can be recovered to the processing liquid storage tank 121 through the recovery piping module 430 .

[0116] The recovery piping module 430 may have the same structure as the branch pipe portion 133 of the treatment liquid supply piping module 130 .

[0117] That is, the recovery piping module 430 may include: a first recovery piping extended along the vertical direction D1, a second recovery piping extended obliquely relative to the vertical direction D1, and a third recovery piping bent to connect the first recovery piping and the second recovery piping.

[0118] In this way, like the processing liquid supply piping module 130, the recovery piping module 430 does not form a horizontal section perpendicular to the vertical direction D1, and includes: a first recovery piping extended along the vertical direction D1, a second recovery piping inclined relative to the vertical direction D1, and a third recovery piping connecting the first recovery piping and the second recovery piping, and the processing liquid used for processing the substrate 1 in the chamber 200 can be effectively discharged and recovered to the side of the processing liquid storage tank 121 without any residue.

[0119] As described above, the preferred embodiments of the present invention have been described with reference to the accompanying drawings. However, those skilled in the art may make various modifications or changes to the present invention without departing from the scope of the concept and field of the present invention described in the claims.

Claims

1. A treatment liquid supply device, characterized in that: include: a treatment liquid spraying portion for spraying the treatment liquid; a treatment liquid supply portion for pressurizing the treatment liquid stored in the treatment liquid storage portion and supplying the pressurized treatment liquid to the treatment liquid spraying portion; as well as A piping module connecting the treatment liquid supply unit and the treatment liquid injection unit, The piping module includes: a main pipe portion connected to the treatment liquid supply portion; a plurality of branch pipe portions branching from the main pipe portion; a plurality of discharge pipe portions branching from the branch pipe portions and connected to the treatment liquid injection portion; and a connecting component connecting the main pipe portion and the branch pipe portion, or connecting the branch pipe portion and the discharge pipe portion. The main pipe portion is tilted upward from one end connected to the treatment liquid supply portion toward the other end connected to the branch pipe portion to avoid forming a horizontal section perpendicular to the vertical direction. The pipe connecting the processing liquid storage part and the processing liquid supply part is formed to be inclined upward from one end connected to the processing liquid storage part toward the other end connected to the processing liquid supply part. The branch pipe portion includes: a first pipe extending in the vertical direction; a second pipe extending obliquely relative to the vertical direction; and a third pipe bent to connect the first pipe and the second pipe. The first pipe, the second pipe, and the third pipe do not form a horizontal section perpendicular to the vertical direction, are integrated by fusion, and have a branch port with the same inner diameter as the inner diameter of the discharge pipe portion. The connecting member includes a first connecting portion, a second connecting portion, and a coupling member to suppress the formation of a gap between the branch port and the discharge pipe portion. The first connecting portion has a through hole, and the through hole penetrates the branch pipe portion to surround a portion of the branch pipe portion where the branch port is formed. The second connection portion is formed to protrude from the first connection portion and has an insertion hole that communicates with the through hole and is inserted into the end of the discharge pipe portion, and a support base that tightly supports the front end surface of the end of the discharge pipe portion inserted into the insertion hole. The first connecting portion includes a first end portion and a second end portion that are separated and arranged by cutting out a portion of the opposite side with respect to the second connecting portion. The coupling member connects the first end portion and the second end portion to bring the first end portion and the second end portion closer together, and pressurizes the first connection portion toward the center of the branch pipe portion.

2. The processing liquid supply device according to claim 1, characterized in that The inner wall surfaces of the main pipe portion, the branch pipe portion, and the discharge pipe portion are subjected to a hydrophobic treatment.

3. The processing liquid supply device according to claim 1, characterized in that The main pipe portion, the branch pipe portion, and the discharge pipe portion are made of perfluoroalkoxy (PFA) fluororesin.

4. A substrate processing device, characterized in that: include: a chamber having a processing space for processing a substrate; as well as The processing liquid supply device according to claim 1 is used to supply processing liquid to the substrate located in the processing space.

5. The substrate processing apparatus according to claim 4, wherein: The process liquid recovery device further includes a process liquid recovery device, which connects the chamber and the process liquid storage unit and has a recovery piping module for recovering the process liquid used in substrate processing. The recovery piping module includes: a first recovery piping extended along the vertical direction; a second recovery piping extended obliquely relative to the vertical direction; and a third recovery piping formed in a curved manner to connect the first recovery piping and the second recovery piping, and does not form a horizontal section perpendicular to the vertical direction.

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