A method for batch transfer of micro-nano structures

Abstract

The present invention provides a method for batch transferring micro-nano structures, comprising the following steps: S1: forming patterned openings on a temporary substrate; S2: forming zinc oxide micro-nano structures in the openings of the temporary substrate; S3: spin coating a first polymer solution coating covering the zinc oxide micro-nano structures on the temporary substrate; S4: spin coating a second polymer solution coating on a target flexible substrate to be transferred; S5: combining one side of the target flexible substrate with the second polymer coating with the zinc oxide micro-nano structure of the temporary substrate, so that the second polymer coating of the target substrate and the first polymer coating of the temporary substrate are hot-melt-bonded together; S6: after cooling, the template target flexible substrate is separated from the temporary substrate. The method for batch transferring micro-nano structures of the present invention is aimed at the transfer of micro-nano structures of 3D structures, and the transfer method is simple, effective and has a very high success rate.

Description

Technical Field

[0001] The invention relates to the technical field of transfer printing, and in particular to a method for batch transferring micro-nano structures. Background Art

[0002] In flexible electronics, it is very challenging to prepare functional materials with micro-nano structures directly on flexible substrates. Therefore, transferring pre-prepared micro-nano structures or devices in batches to flexible substrates is a very promising solution. Among the existing transfer technologies, most technologies focus on thin film structures of metals or functional materials (thickness less than 100nm). For the transfer of micro-nano structures with a high aspect ratio, the existing technologies cannot solve it well. Summary of the invention

[0003] The purpose of the present invention is to provide a method for batch transferring micro-nano structures which is simple, effective and has a very high success rate.

[0004] The present invention provides a method for batch transferring micro-nano structures, comprising the following steps:

[0005] S1: forming patterned openings on a temporary substrate;

[0006] S2: forming a zinc oxide micro-nanostructure in the opening of the temporary substrate;

[0007] S3: spin coating a first polymer solution coating covering the zinc oxide micro-nano structure on the temporary substrate so that the zinc oxide micro-nano structure can be completely covered, and then curing the first polymer solution coating;

[0008] S4: spin-coating a second polymer solution coating on the target flexible substrate to be transferred, and curing the second polymer solution coating;

[0009] S5: The side of the target flexible substrate having the second polymer coating is combined with the zinc oxide micro-nano structure of the temporary substrate, and pressure and heating are applied and maintained for a period of time, so that the second polymer coating of the target substrate and the first polymer coating of the temporary substrate are thermally melted together;

[0010] S6: After cooling, the template target flexible substrate is separated from the temporary substrate, that is, the zinc oxide micro-nano structure of the temporary substrate is transferred to the template target flexible substrate.

[0011] Preferably, the application of a certain pressure and the heating temperature in step S5 are maintained for 10-15 minutes.

[0012] Preferably, the specific method of step S1 is:

[0013] S11: depositing a photoresist layer on the temporary substrate;

[0014] S12: exposing and developing the photoresist layer using an electron beam to form openings arranged in an array.

[0015] Preferably, the specific method of step S2 is:

[0016] S21: Based on step S1, depositing a layer of zinc oxide solution;

[0017] S22: forming a zinc oxide micro-nanostructure in the opening through exposure;

[0018] S23: Developing to remove the photoresist layer.

[0019] The present invention also provides a method for batch transferring micro-nano structures, comprising the following steps:

[0020] S1: forming patterned openings on a temporary substrate;

[0021] S2: forming a zinc oxide micro-nanostructure in the opening of the temporary substrate;

[0022] S3: spin coating a first polymer solution coating on the target flexible substrate to be transferred, and curing the first polymer solution coating;

[0023] S4: spin coating a second polymer solution coating covering the zinc oxide micro-nano structure on the temporary substrate so that the zinc oxide micro-nano structure can be completely covered, and then curing the second polymer solution coating;

[0024] S5: The first polymer coating on the target flexible substrate is combined with the zinc oxide micro-nano structure on the temporary substrate, and pressure and heating are applied and maintained for a period of time, so that the first polymer coating on the target substrate and the second polymer coating on the temporary substrate are thermally melted together;

[0025] S6: After cooling, the template target flexible substrate is separated from the temporary substrate, that is, the zinc oxide micro-nano structure of the temporary substrate is transferred to the template target flexible substrate.

[0026] The method for batch transferring micro-nano structures of the present invention is aimed at the transfer of micro-nano structures of 3D structures. The transfer method is simple, effective and has a very high success rate, which can greatly extend the life of the temporary substrate; micro-nano patterns with high aspect ratios can be patterned on the template target flexible substrate; the entire process is similar to nanoimprinting, is low-cost, and can be applied on a large scale. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 It is a schematic structural diagram of a temporary storage substrate of the method for batch transferring micro-nano structures on a surface of the present invention;

[0029] Figure 2 It is a schematic structural diagram of forming a zinc oxide micro-nano structure on a temporary substrate in the method for batch transferring micro-nano structures of the present invention;

[0030] Figure 3 It is a structural schematic diagram of spin coating a polymer coating on a temporary substrate in the method for batch transferring micro-nano structures of the present invention;

[0031] Figure 4 It is a schematic structural diagram of the temporary storage substrate and the target flexible substrate for transferring in the method for batch transferring micro-nano structures of the present invention;

[0032] Figure 5 It is a schematic structural diagram of separation of a temporary storage substrate and a target flexible substrate in the method for batch transferring micro-nano structures of the present invention;

[0033] Figure 6 It is a schematic structural diagram of zinc oxide micro-nano structures on a flexible substrate in the method for batch transferring micro-nano structures of the present invention. DETAILED DESCRIPTION

[0034] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0035] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, in the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined.

[0036] The invention discloses a method for batch transferring micro-nano structures, belonging to the technical field of transfer printing, such as Miro-LED transfer technology.

[0037] A method for batch transferring micro-nano structures comprises the following steps:

[0038] S1: Figure 1 As shown, a patterned opening 11 is formed on a temporary substrate 10;

[0039] S2: Figure 2 As shown, a zinc oxide micro-nano structure 12 is formed in the opening 11 of the temporary substrate 10;

[0040] S3: Figure 3 As shown, a first polymer solution coating 13 covering the zinc oxide micro-nano structure 12 is spin-coated on the temporary substrate 10 so that the zinc oxide micro-nano structure 12 can be completely covered, and then the first polymer solution coating 13 is cured (such as thermal curing or UV curing);

[0041] S4: Figure 4 As shown, a second polymer solution coating 21 is also spin-coated on the target flexible substrate 20 to be transferred, and the second polymer solution coating 21 is cured;

[0042] S5: Figure 4 As shown, one side of the target flexible substrate 20 having the second polymer coating 21 is combined with the zinc oxide micro-nano structure 12 of the temporary substrate 10, and pressure and heating are applied and maintained for a period of time, so that the second polymer coating 21 of the target substrate 20 and the first polymer coating 13 of the temporary substrate 10 are thermally melted together;

[0043] S6: Figure 5 and Figure 6 After cooling to room temperature, the template target flexible substrate 20 is separated from the temporary substrate 10 , that is, the zinc oxide micro-nano structure 12 of the temporary substrate 10 is transferred to the template target flexible substrate 20 .

[0044] In step S5, a certain pressure is applied and the heating temperature is maintained for 10-15 minutes.

[0045] The specific method of step S1 is:

[0046] S11: depositing a photoresist layer (not shown) on the temporary substrate 10;

[0047] S12: using an electron beam to expose and develop the photoresist layer to form openings arranged in an array (not shown).

[0048] S2: Figure 2As shown, a zinc oxide micro-nano structure 12 is formed in the opening 11 of the temporary substrate 10;

[0049] The specific method of step S2 is:

[0050] S21: Based on step S1, depositing a layer of zinc oxide solution;

[0051] S22: forming a zinc oxide micro-nano structure 12 in the opening 11 by exposure;

[0052] S23: Developing to remove the photoresist layer.

[0053] The order of the above steps S3 and S4 can also be replaced. A method for batch transferring micro-nano structures comprises the following steps:

[0054] S1: Figure 1 As shown, a patterned opening 11 is formed on a temporary substrate 10;

[0055] S2: Figure 2 As shown, a zinc oxide micro-nano structure 12 is formed in the opening 11 of the temporary substrate 10;

[0056] S3: Figure 4 As shown, a first polymer solution coating is spin-coated on the target flexible substrate 20 to be transferred, and the first polymer solution coating is cured;

[0057] S4: Figure 3 As shown, a second polymer solution coating covering the zinc oxide micro-nano structure 12 is also spin-coated on the temporary substrate 10 so that the zinc oxide micro-nano structure 12 can be completely covered, and then the second polymer solution coating is cured (such as thermal curing or UV curing);

[0058] S5: Figure 4 As shown, one side of the target flexible substrate 20 having the first polymer coating is combined with the zinc oxide micro-nano structure 12 of the temporary substrate 10, and pressure and heating are applied and maintained for a period of time, so that the first polymer coating of the target substrate 20 and the second polymer coating of the temporary substrate 10 are thermally melted together;

[0059] S6: Figure 5 and Figure 6 After cooling to room temperature, the template target flexible substrate 20 is separated from the temporary substrate 10 , that is, the zinc oxide micro-nano structure 12 of the temporary substrate 10 is transferred to the template target flexible substrate 20 .

[0060] In step S5, a certain pressure is applied and the heating temperature is maintained for 10-15 minutes.

[0061] The method for batch transferring micro-nano structures of the present invention is aimed at the transfer of micro-nano structures of 3D structures. The transfer method is simple, effective and has a very high success rate, which can greatly extend the life of the temporary substrate; micro-nano patterns with high aspect ratios can be patterned on the template target flexible substrate; the entire process is similar to nanoimprinting, is low-cost, and can be applied on a large scale.

[0062] What is disclosed above is only a preferred embodiment of the present invention, and it certainly cannot be used to limit the scope of rights of the present invention. Ordinary technicians in this field can understand that all or part of the processes of the above embodiment and equivalent changes made according to the claims of the present invention still fall within the scope of the invention.

Claims

1. A method for batch transfer of micro-nano structures, characterized in that: The steps include: S1: forming a patterned opening (11) on a temporary substrate (10); S2: forming a zinc oxide micro-nanostructure (12) in the opening (11) of the temporary substrate (10); S3: spin coating a first polymer solution coating (13) covering the zinc oxide micro-nano structure (12) on the temporary substrate (10) so that the zinc oxide micro-nano structure (12) is completely covered, and then curing the first polymer solution coating (13); S4: similarly spin coating a second polymer solution coating (21) on the target flexible substrate (20) to be transferred, and curing the second polymer solution coating (21); S5: The side of the target flexible substrate (20) having the second polymer coating is combined with the zinc oxide micro-nanostructure (12) of the temporary substrate (10), and pressure and heating are applied and maintained for a period of time, so that the second polymer coating of the target flexible substrate (20) and the first polymer coating of the temporary substrate (10) are thermally melted together; S6: after cooling, the target flexible substrate (20) is separated from the temporary substrate (10), i.e., the zinc oxide micro-nanostructure (12) on the temporary substrate (10) is transferred to the target flexible substrate (20); The specific method of step S1 is: S11: depositing a photoresist layer on the temporary substrate (10); S12: exposing and developing the photoresist layer using an electron beam to form openings arranged in an array.

2. The method for batch transferring micro-nano structures according to claim 1, characterized in that: The simultaneous application of pressure and heating in step S5 is maintained for 10-15 minutes.

3. The method for batch transferring micro-nano structures according to claim 1, characterized in that: The specific method of step S2 is: S21: Based on step S1, depositing a layer of zinc oxide solution; S22: forming a zinc oxide micro-nanostructure (12) located in the opening (11) by exposure; S23: Developing to remove the photoresist layer.

4. A method for batch transfer of micro-nano structures, characterized in that: The steps include: S1: forming a patterned opening (11) on a temporary substrate (10); S2: forming a zinc oxide micro-nanostructure (12) in the opening (11) of the temporary substrate (10); S3: spin coating a first polymer solution coating on the target flexible substrate (20) to be transferred, and curing the first polymer solution coating; S4: spin coating a second polymer solution coating covering the zinc oxide micro-nano structure (12) on the temporary substrate (10) so that the zinc oxide micro-nano structure (12) can be completely covered, and then curing the second polymer solution coating; S5: The surface of the target flexible substrate (20) having the first polymer coating is combined with the zinc oxide micro-nanostructure (12) of the temporary substrate (10), and pressure and heating are applied and maintained for a period of time, so that the first polymer coating of the target flexible substrate (20) and the second polymer coating of the temporary substrate (10) are thermally melted together; S6: after cooling, the target flexible substrate (20) is separated from the temporary substrate (10), i.e., the zinc oxide micro-nanostructure (12) on the temporary substrate (10) is transferred to the target flexible substrate (20); The specific method of step S1 is: S11: depositing a photoresist layer on the temporary substrate (10); S12: exposing and developing the photoresist layer using an electron beam to form openings arranged in an array.

5. The method for batch transferring micro-nano structures according to claim 4, characterized in that: The simultaneous application of pressure and heating in step S5 is maintained for 10-15 minutes.

6. The method for batch transferring micro-nano structures according to claim 5, characterized in that: The specific method of step S2 is: S21: On the basis of step S1, depositing a layer of zinc oxide solution; S22: forming a zinc oxide micro-nanostructure (12) located in the opening (11) by exposure; S23: Developing to remove the photoresist layer.

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