A stage positioning assembly and a chip detection device having the same

Abstract

The application relates to the technical field of wafer production, in particular to a carrier positioning assembly and a chip detection device with the same. The carrier positioning assembly comprises a base, at least two opposite extending ends of which extend on one side, a first accommodating space is formed between the extending ends, and at least one pair of opposite first through holes are arranged on the extending ends; a supporting seat, two sides of which are provided with a mounting end and a carrier, the mounting end is arranged in the first accommodating space, a second through hole is arranged on the mounting end, and the first through hole and the second through hole are coaxial; and at least one first horizontal adjusting structure, which comprises at least one first horizontal adjusting shaft and a first adjusting block, the first horizontal adjusting shaft passes through the first through hole and the second through hole, the first adjusting block is provided with an adjusting end, the adjusting end is arranged in contact with the mounting end, the first horizontal adjusting shaft is rotated to move in the axial direction, and the position of the carrier on the supporting seat is finely adjusted through the contact friction between the mounting end and the adjusting end. The application solves the problem that the carrier is manually adjusted in the horizontal direction for a long time.

Description

Technical Field

[0001] This invention relates to the field of wafer manufacturing technology, and more specifically to a stage positioning component and a chip inspection device having the same. Background Technology

[0002] In the information age, the semiconductor chip industry has become a key high-end manufacturing industry for national development. Improving the intelligence level of chips and testing chip performance have become of paramount importance.

[0003] When testing chips of different sizes and thicknesses, the stage of the chip testing device needs to be readjusted to reposition the chip under test. Compared to automatic stage adjustment, manual stage adjustment has the advantages of low cost and high precision. However, when adjusting the horizontal position of the stage, due to the high precision required for chip positioning, manual adjustment can easily result in excessive stage movement even with slight rotation. This leads to a significant time and effort being spent by on-site personnel during the adjustment process, resulting in long debugging times and low efficiency. Summary of the Invention

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the defects of long debugging time and low efficiency when the stage of the chip detection device in the prior art is manually adjusted in the horizontal direction, so as to provide a stage positioning component and a chip detection device having the same.

[0005] To address the above problems, the present invention provides a platform positioning component, comprising:

[0006] The base has at least two opposing protruding ends extending from one side, a first receiving space being formed between the two protruding ends, and at least one pair of opposing first through holes being provided on the two protruding ends;

[0007] The support base has an installation end and a platform on both sides along the height direction. The installation end is located in the first accommodating space and has at least one second through hole. The first through hole and the second through hole are arranged coaxially.

[0008] At least one first horizontal adjustment structure is provided, the first horizontal adjustment structure includes at least one first horizontal adjustment shaft and at least one first adjustment block, the first horizontal adjustment shaft is disposed through a first through hole and a second through hole, the first adjustment block is provided with an adjustment end, the adjustment end is disposed in contact with the mounting end, the first horizontal adjustment shaft is rotated to drive the mounting end to move along the axial direction, and the position of the platform on the support is finely adjusted by the contact friction between the mounting end and the adjustment end.

[0009] Optionally, the base is provided with at least one first adjusting hole, the mounting end is provided with at least one first adjusting slot corresponding to the first adjusting hole, the opening direction of the first adjusting slot is arranged towards the first adjusting hole, and the adjusting end is arranged in contact with the first adjusting slot after penetrating through the first adjusting hole.

[0010] Optionally, the cross section of the first adjusting slot is triangular, the first adjusting slot is provided with an arc surface, and the surface of the adjusting end of the first adjusting block is provided with at least one steel ball in contact with the arc surface.

[0011] Optionally, the side of the support seat away from the mounting end is provided with at least two support ends and at least two second horizontal adjusting structures, the adjusting direction of the second horizontal adjusting structure is perpendicular to the adjusting direction of the first horizontal adjusting structure, each support end is provided with a second containing space with an opening direction towards the platform, the second containing space is suitable for containing the movable block of the platform, the two sides of the support end are provided with a pair of third through holes arranged oppositely, the movable block is provided with a fourth through hole, the third through hole and the fourth through hole are coaxially arranged, and each second horizontal adjusting structure is provided with a second horizontal adjusting shaft, and the second horizontal adjusting shaft is arranged to penetrate through the third through hole and the fourth through hole.

[0012] Optionally, each second horizontal adjusting structure further comprises at least one second adjusting block, the support end is provided with a second adjusting hole corresponding to the movable block, and the adjusting end of the second adjusting block is in sliding connection with the movable block after penetrating through the second adjusting hole.

[0013] Optionally, a third containing space is formed between the two adjacent support ends, the third containing space is suitable for containing the platform, the two sides of the platform are respectively provided with an activity table corresponding to the support end, and the movable block is arranged on one side of the activity table.

[0014] Optionally, the activity table is provided with a fourth containing space with an opening direction towards the platform, the two sides of the fourth containing space are provided with a pair of fifth through holes arranged symmetrically, and the fourth containing space contains a height adjusting structure.

[0015] Optionally, the height adjusting structure comprises a first height adjusting block, a second height adjusting block and a height adjusting shaft, the two ends of the first height adjusting block are respectively fixedly connected with the platform and the second height adjusting block, the two ends of the height adjusting shaft are arranged in the fifth through hole, the height adjusting shaft is provided with at least one conical inclined surface, and the conical inclined surface is in linear contact with the first height adjusting block.

[0016] Optionally, the first height adjusting block is provided with two parallel adjusting surfaces and a first transition inclined surface, the second height adjusting block is provided with a second transition inclined surface, and the height adjusting shaft is provided with two conical inclined surfaces and a conical transition surface, each of the conical inclined surfaces and the adjusting surfaces are in linear contact, and the conical transition surface is in linear contact with the second transition inclined surface of the second height adjusting block.

[0017] The chip detection device also comprises a rotating disc provided with a pair of the stage positioning assemblies arranged oppositely.

[0018] The technical scheme has the following advantages:

[0019] 1. The stage positioning assembly comprises a base, at least two extending ends are extended from one side of the base and arranged oppositely, a first accommodating space is formed between the two extending ends, and at least one pair of first through holes are arranged on the two extending ends oppositely; a support seat is provided with a mounting end and a stage arranged on two sides in the height direction respectively, the mounting end is located in the first accommodating space, at least one second through hole is arranged on the mounting end, and the first through hole and the second through hole are coaxial; at least one first horizontal adjusting structure comprises at least one first horizontal adjusting shaft and at least one first adjusting block, the first horizontal adjusting shaft is arranged through the first through hole and the second through hole, the first adjusting block is provided with an adjusting end, the adjusting end is arranged in contact with the mounting end, the mounting end is moved along the axis direction by rotating the first horizontal adjusting shaft, and the position of the stage on the support seat is finely adjusted by the contact friction between the mounting end and the adjusting end. The first accommodating space is formed between the two extending ends, the mounting end of the support seat is located in the first accommodating space, the first through hole arranged on the two extending ends oppositely and the second through hole arranged on the mounting end are coaxial, the first horizontal adjusting shaft is arranged through the first through hole and the second through hole, the mounting end is moved along the axis direction of the first horizontal adjusting shaft by rotating the first horizontal adjusting shaft, the mounting end is in contact with the adjusting end during the movement of the mounting end, the friction in the contact generates resistance to the movement of the mounting end, the length of the movement distance of the mounting end in the manual adjustment is limited, and the position of the stage on the support seat is finely adjusted. At the same time, after the positions of the base and the mounting end are adjusted, the positions of the mounting end and the base are relatively fixed due to the friction between the mounting end and the adjusting end, the mounting end does not need to be fixed by using a locking screw or other components, and the structure is simple.

[0020] 2. The base positioning assembly provided by the present application is provided with at least one first adjusting hole on the base, at least one first adjusting slot corresponding to the first adjusting hole is provided on the mounting end, the opening direction of the first adjusting slot is arranged towards the first adjusting hole, and the adjusting end is arranged in contact with the first adjusting slot after penetrating through the first adjusting hole. By arranging the first adjusting slot, the adjusting end is in contact with the first adjusting slot, and the mounting end can also be prevented from deviating when moving along the axis of the first horizontal adjusting shaft. The contact between the adjusting end of the first adjusting block and the adjusting slot plays a limiting role, so that the mounting end moves along the axis of the first horizontal adjusting shaft, thereby ensuring that the position of the base moves along a straight line.

[0021] 3. The base positioning assembly provided by the present application is provided with at least one steel ball between the surface of the adjusting end of the first adjusting block and the first adjusting slot, and the outer surface of the steel ball is in contact with the arc surface. When the steel ball is located between the first adjusting slot and the surface of the adjusting end of the first adjusting block, the steel ball will slightly lift the adjusting slot, causing the first horizontal adjusting shaft to slightly bend. The slightly bent first horizontal adjusting shaft is just in a critical state for moving the mounting end along the axis of the first horizontal adjusting shaft, thereby further increasing the difficulty of moving the mounting end and making it more difficult to move the mounting end and the base, so as to realize more accurate position adjustment of the mounting end.

[0022] 4. The base positioning assembly provided by the present application is provided with at least two supporting ends and at least two second horizontal adjusting structures on the side of the supporting seat away from the mounting end. The adjusting direction of the second horizontal adjusting structure is perpendicular to the adjusting direction of the first horizontal adjusting structure. A second containing space with an opening towards the base is arranged on each supporting end, and the second containing space is suitable for containing the movable block of the base. A pair of third through holes are arranged on the two sides of the supporting end in a relative manner, and the movable block is provided with a fourth through hole. The third through hole and the fourth through hole are coaxially arranged. Each second horizontal adjusting structure is provided with a second horizontal adjusting shaft, and the second horizontal adjusting shaft is arranged through the third through hole and the fourth through hole. The two sides of the supporting end are provided with a pair of third through holes arranged in a relative manner, and the movable block is provided with a fourth through hole. The third through hole and the fourth through hole are coaxially arranged, and the second horizontal adjusting shaft is arranged through the third through hole and the fourth through hole, so as to adjust the position of the movable block through the second horizontal adjusting shaft. The adjusting direction of the first horizontal adjusting structure is perpendicular to the adjusting direction of the second horizontal adjusting structure, so as to realize adjustment of the base in two different directions in the horizontal plane.

[0023] 5. The base positioning assembly provided by the present application further comprises at least one second adjusting block for each second horizontal adjusting structure. The supporting end is provided with a second adjusting hole corresponding to the movable block, and the adjusting end of the second adjusting block is in sliding connection with the movable block after penetrating through the second adjusting hole, so as to provide friction resistance when rotating the second horizontal adjusting rod to adjust the position of the movable block, thereby reducing the adjusting distance of the second horizontal adjusting rod.

[0024] 6. The stage positioning assembly provided by the present application, a third accommodating space is formed between two adjacent support ends, the third accommodating space accommodates a stage, a movable table is arranged on each side of the stage and corresponding support end, and a movable block is arranged on one side of the movable table, so that the second horizontal adjusting shaft drives the movable table and the stage to move by adjusting the movable block.

[0025] 7. The stage positioning assembly provided by the present application, the movable table is provided with a fourth accommodating space with an opening facing the stage, two sides of the fourth accommodating space are provided with a pair of fifth through holes arranged symmetrically, and the fourth accommodating space accommodates a height adjusting structure, the height adjusting structure is used for adjusting the height of the stage. The height adjusting structure comprises a first height adjusting block, a second height adjusting block and a height adjusting shaft, two ends of the first height adjusting block are fixedly connected with the stage and the second height adjusting block respectively, two ends of the height adjusting shaft are arranged in the fifth through holes, the height adjusting shaft is provided with at least one conical inclined surface, and the conical inclined surface is in linear contact with the first height adjusting block. The conical inclined surface of the height adjusting shaft is in linear contact with the first height adjusting block, so that the length of the linear contact between the conical inclined surface and the first height adjusting block is adjusted along the axial direction of the height adjusting shaft, and the stage fixedly connected with the first height adjusting block is driven to rise or fall.

[0026] 8. The stage positioning assembly provided by the present application, the first height adjusting block is provided with two parallel adjusting surfaces and a first transition inclined surface, the second height adjusting block is provided with a second transition inclined surface, and the height adjusting shaft is provided with two conical inclined surfaces and a conical transition surface, each conical inclined surface is in linear contact with the adjusting surface, and the conical transition surface is in linear contact with the second transition inclined surface of the second height adjusting block. During the rising process, the height adjusting shaft is rotated, the length of the linear contact between the conical inclined surface and the adjusting surface changes, so that the stage is driven to rise by the first height adjusting block. During the falling process, the conical transition surface is in linear contact with the second transition inclined surface of the second height adjusting block, the height adjusting shaft is rotated to transfer force from the height adjusting shaft to the second transition inclined surface of the second height adjusting block, and then the second height adjusting block drives the first height adjusting block and the stage to move downward. During the rising or falling process of the stage, the conical inclined surface and the adjusting surface, and the conical transition surface and the second transition inclined surface are kept in close linear contact, and the stability of the stage in the height adjustment is maintained.

[0027] 9. The chip detection device provided by the present application has the advantages of any one of the above-mentioned stage positioning assemblies. The device further comprises a rotating disc provided with a pair of stage positioning assemblies arranged oppositely, so as to improve the test efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0028] In order to make the technical solutions in the specific embodiments of the present application or prior art clearer, the accompanying drawings needed in the description of the specific embodiments or prior art will be briefly introduced. Obviously, the accompanying drawings in the following description are only some embodiments of the present application, and other accompanying drawings can be obtained by those skilled in the art without any creative effort based on these accompanying drawings.

[0029] Figure 1 A structural schematic view of a carrier positioning assembly provided in an embodiment of the present application;

[0030] Figure 2 An exploded structural schematic view of a carrier positioning assembly provided in an embodiment of the present application;

[0031] Figure 3 A structural schematic view of a base provided in an embodiment of the present application;

[0032] Figure 4 A structural schematic view of a support seat provided in an embodiment of the present application;

[0033] Figure 5 A structural schematic view of a first adjusting block provided in an embodiment of the present application;

[0034] Figure 6 A structural schematic view of a height adjusting shaft provided in an embodiment of the present application;

[0035] Figure 7 A structural schematic view of a first height adjusting block provided in an embodiment of the present application;

[0036] Figure 8 A structural schematic view of a second height adjusting block provided in an embodiment of the present application;

[0037] Figure 9 A structural schematic view of a movable table provided in an embodiment of the present application;

[0038] Figure 10 A structural schematic view of the first height adjusting block and the second height adjusting block respectively cooperating with the height adjusting shaft provided in an embodiment of the present application.

[0039] Explanation of reference signs: 1, base; 2, first horizontal adjusting shaft; 3, supporting seat; 4, movable table; 5, second height adjusting block; 6, first height adjusting block; 7, loading table; 8, height adjusting shaft; 9, second horizontal adjusting shaft; 10, second adjusting block; 11, first adjusting block; 12, first containing space; 13, extending end; 14, first through hole; 15, first adjusting hole; 16, mounting end; 17, first adjusting groove; 18, second through hole; 19, supporting end; 20, third through hole; 21, second adjusting hole; 22, third containing space; 23, second containing space; 24, adjusting end; 25, conical inclined surface; 26, conical transition surface; 27, adjusting surface; 28, first transition inclined surface; 29, fourth containing space; 30, fifth through hole; 31, fourth through hole; 32, second adjusting groove; 33, movable block; 34, second transition inclined surface. DETAILED DESCRIPTION

[0040] The technical solutions of the present application will be described clearly and completely below in conjunction with the drawings. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0041] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third" are only for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0042] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0043] In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

[0044] As Figure 1 - Figure 10The specific embodiment of the shown carrier positioning assembly comprises, from bottom to top, a base 1, a support seat 3, the surface of the support seat 3 away from the base 1 is provided with a carrier 7 and a pair of height adjustment structures respectively arranged on both sides of the carrier 7.

[0045] As shown in Figure 1 , Figure 2 and Figure 3 , one side of the base 1 extends to form two extension ends 13, a first accommodating space 12 is formed between the two extension ends 13, and two pairs of first through holes 14 are arranged on the two extension ends 13. Figure 3 、 Figure 4 As shown in Figure 1 and Figure 2 , the support seat 3 is provided with a mounting end 16 and a carrier 7 on both sides in the height direction, wherein the mounting end 16 is located in the first accommodating space 12, two second through holes 18 are arranged on the mounting end 16, and the first through holes 14 and the second through holes 18 are coaxial. In order to adjust the position of the mounting end 16, as shown in ,

[0046] and Figure 3 , Figure 4 and Figure 5 , the first horizontal adjustment structure further comprises two first horizontal adjustment shafts 2, the first horizontal adjustment shafts 2 pass through the first through holes 14 and the second through holes 18, bearings are arranged between the first horizontal adjustment shafts 2 and the first through holes 14, and the bearings are arranged to make the rotation of the first horizontal adjustment shafts 2 more stable. At the same time, the first horizontal adjustment shafts 2 are threadedly connected with the second through holes 18, when the first horizontal adjustment shafts 2 are rotated, the mounting end 16 will drive the carrier 7 to move along the axis direction of the first horizontal adjustment shafts 2.

[0046] In order to avoid the problem that the carrier 7 moves too far when the first horizontal adjustment shafts 2 are slightly rotated, as shown in Figure 3 、 Figure 4 and Figure 5 , the first horizontal adjustment structure further comprises a first horizontal limiting mechanism, the first horizontal limiting mechanism comprises a first horizontal limiting plate 4 and a first horizontal limiting rod 5, the first horizontal limiting plate 4 is arranged on the support seat 3, the first horizontal limiting rod 5 is arranged on the mounting end 16, and the first horizontal limiting plate 4 and the first horizontal limiting rod 5 are arranged to be in contact with each other.As shown, the first horizontal adjusting structure further comprises two first adjusting blocks 11, the base 1 is provided with two first adjusting holes 15, and the mounting end 16 is provided with a triangular first adjusting slot 17 corresponding to the first adjusting hole 15, wherein the opening direction of the first adjusting slot 17 is arranged towards the first adjusting hole 15, the adjusting end 24 of the first adjusting block 11 passes through the first adjusting hole 15, and the periphery of the first adjusting block 11 is fixedly connected with the base 1 by a bolt. In order to further limit the moving distance of the platform 7 driven by rotating the first horizontal adjusting shaft 2, an arc surface is arranged in the first adjusting slot 17, two steel balls are arranged between the surface of the adjusting end 24 and the first adjusting slot 17, and the surfaces of the steel balls are respectively in contact with the surface of the adjusting end 24 and the arc surface of the first adjusting slot 17. When the first adjusting block 11 is tightly connected with the base 1, the steel balls are in close contact with the arc surface, the first horizontal adjusting shaft 2 in the second through hole 18 is in a slightly curved state, so that the first horizontal adjusting shaft 2 is just in a rotatable state, and the on-site personnel can only move the mounting end 16 by a very small distance (for example, 1 micrometer) by rotating the first horizontal adjusting shaft 2. When it is necessary to rotate the first horizontal adjusting shaft 2 to move the mounting end 16 by a larger distance, the bolt is rotated to make the first adjusting block 11 and the base 1 in a slightly loose state, the first horizontal adjusting shaft 2 is in a straight state, and then the on-site personnel can move the mounting end 16 by a larger distance (for example, 10 micrometers) by rotating the first horizontal adjusting shaft 2.

[0047] As shown in Figure 1 , Figure 2 , Figure 4 and Figure 9 , the supporting seat 3 is provided with two supporting ends 19 and two second horizontal adjusting structures on the side away from the mounting end 16, one supporting end 19 corresponds to one second horizontal adjusting structure, and the adjusting direction of the second horizontal adjusting structure is perpendicular to that of the first horizontal adjusting structure, so as to drive the platform 7 to move in two mutually perpendicular directions in the horizontal plane. As shown in Figure 4 , Figure 9 , each supporting end 19 is provided with a second containing space 23 with an opening facing the platform 7, the second containing space 23 is suitable for containing the movable block 33 of the height adjusting structure, and each supporting end 19 is provided with a pair of third through holes 20 oppositely arranged on the two sides, and the movable block 33 is provided with a fourth through hole 31, wherein the third through hole 20 and the fourth through hole 31 are coaxially arranged. In order to facilitate the movement of the movable block 33, the second horizontal adjusting structure is provided with a second horizontal adjusting shaft 9, and the second horizontal adjusting shaft 9 passes through the third through hole 20 and the fourth through hole 31. A bearing is arranged between the second horizontal adjusting shaft 9 and the third through hole 20, so that the rotation of the second horizontal adjusting shaft 9 is more stable. At the same time, the second horizontal adjusting shaft 9 is threadedly connected with the fourth through hole 31, and when the second horizontal adjusting shaft 9 is rotated, the movable block 33 drives the platform 7 to move along the axial direction of the second horizontal adjusting shaft 9.

[0048] To avoid the problem of the stage 7 moving too far due to a slight rotation of the second horizontal adjustment shaft 9, such as Figure 1 , Figure 2 , Figure 4 and Figure 9 As shown, the second horizontal adjustment structure also includes two second adjustment blocks 10, each corresponding to a support end 19. Each support end 19 is provided with a second adjustment hole 21. The movable block 33 is provided with a triangular second adjustment groove 32 corresponding to the second adjustment hole 21. The opening direction of the second adjustment groove 32 faces the second adjustment hole 21. The adjustment end 24 of the second adjustment block 10 passes through the second adjustment hole 21. The periphery of the second adjustment block 10 is fixedly connected to the support end 19 by bolts. To further limit the distance that the platform 7 moves when the second horizontal adjustment shaft 9 is rotated, an arc-shaped surface is provided in the second adjustment groove 32. Two steel balls are provided between the surface of the adjustment end 24 and the second adjustment groove 32. The surfaces of the steel balls contact the surface of the adjustment end 24 and the arc-shaped surface of the second adjustment groove 32, respectively. When the second adjusting block 10 is tightly connected to the support end 19, the steel ball will fit against the arc-shaped surface to slightly lift the second adjusting groove 32, causing the second horizontal adjusting shaft 9 in the fourth through hole 31 to be in a slightly bent state, so that the second horizontal adjusting shaft 9 is just in a rotatable state. When the field personnel rotate the second horizontal adjusting shaft 9, the movable block 33 can only move a very small distance (e.g., 1 micrometer). When it is necessary to rotate the second horizontal adjusting shaft 9 to move the support end 19 a larger distance, the bolt is rotated to make the second adjusting block 10 and the support end 19 slightly loose, so that the second horizontal adjusting shaft 9 is in a straight state. When the field personnel then rotate the second horizontal adjusting shaft 9, the movable block 33 can move a larger distance (e.g., 10 micrometers).

[0049] like Figure 4 As shown, a third receiving space 22 is formed between the two supporting ends 19. The third receiving space 22 contains a platform 7. A movable platform 4 is provided on each side of the platform 7 between it and the corresponding supporting end 19. A movable block 33 is located on the movable platform 4 on the side opposite to the platform 7, and the movable block 33 is located within the second receiving space 23. Figure 1 , Figure 2 , Figure 6 , Figure 7 , Figure 8 and Figure 9As shown, a height adjustment structure is located between the movable platform 4 and the carrier platform 7. The movable platform 4 has a fourth receiving space 29 with an opening facing the carrier platform 7. The fourth receiving space 29 houses the height adjustment structures. Each height adjustment structure includes a first height adjustment block 6, a second height adjustment block 5, and a height adjustment shaft 8. The two ends of the first height adjustment block 6 are fixedly connected to the carrier platform 7 and the second height adjustment block 5, respectively, to achieve a fixed connection between the height adjustment structure and the carrier platform 7. A pair of symmetrically arranged fifth through holes 30 are provided on both sides of the movable platform 4, and the two ends of the height adjustment shaft 8 are threadedly connected to the fifth through holes 30. Figure 7 , Figure 8 and Figure 10 As shown, the first height adjusting block 6 has two parallel adjusting surfaces 27 and a first transition slope 28, wherein the two adjusting surfaces 27 are spaced apart, and the first transition slope 28 is located between the two adjusting surfaces 27. The second height adjusting block 5 has a second transition slope 34. The height adjusting shaft 8 has two conical slopes 25 and a conical transition surface 26. Each conical slope 25 is in linear contact with the adjusting surface 27, and each conical transition surface 26 is in linear contact with the second transition slope 34 of the second height adjusting block 5.

[0050] A chip inspection device is also provided, including the aforementioned stage positioning component, as well as a turntable and a vision component. The turntable is provided with a pair of stage positioning components arranged opposite to each other, and the pair of stage positioning components are arranged at a flat angle.

[0051] In the specific implementation process, before the chip begins testing, the stage 7 needs to be positioned first. The chip to be tested is placed on the stage 7, and then placed inside the vision component. The vision component determines the chip's position. When the height of the stage 7 needs to be adjusted, the height adjustment shaft 8 is rotated to change the length of the linear contact between the conical inclined surface 25 and the adjustment surface 27, causing the stage 7 to rise. The linear length between the conical transition surface 26 and the second transition inclined surface 34 is changed to cause the stage 7 to fall. When adjustment is needed along the first horizontal adjustment structure direction, the first horizontal adjustment shaft 2 is rotated to move the mounting end 16 and the stage 7 along the axis of the first horizontal adjustment shaft 2. When adjustment is needed along the second horizontal adjustment structure direction, the first horizontal adjustment shaft 2 is rotated to move the stage 7 along the axis of the first horizontal adjustment shaft 2. Through the adjustment of height and horizontal direction, the chip to be tested is accurately positioned for subsequent testing.

[0052] The platform positioning component provided by this invention enables fine-tuning of the platform position and has the advantages of compact structure, easy adjustment, and high precision.

[0053] As an alternative implementation, the number of protruding ends 13 may be 3, 4 or even more.

[0054] As an alternative implementation, the number of mounting ends 16 can be two, three, or even more.

[0055] As an alternative implementation, the number of first through holes 14 may be 1 pair, 3 pairs, 4 pairs or even more pairs.

[0056] As an alternative implementation, the number of through holes in the second through hole 18 may be 1, 3, 4 or even more.

[0057] As an alternative implementation, the first adjustment groove 17 and the second adjustment groove 32 may also be rectangular or other shapes.

[0058] As an alternative implementation, the number of steel balls can be 1, 3, 4 or even more.

[0059] As an alternative implementation, the number of stage positioning components on the turntable can be one, three, four, or even more.

[0060] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

Claims

1. A platform positioning assembly, characterized in that, include: A base (1) has at least two opposing protruding ends (13) extending from one side of the base (1), a first receiving space (12) is formed between the two protruding ends (13), and at least one pair of opposing first through holes (14) are provided on the two protruding ends (13). The support base (3) has an installation end (16) and a platform (7) on both sides along the height direction. The installation end (16) is located in the first accommodating space (12). The installation end (16) has at least one second through hole (18). The first through hole (14) and the second through hole (18) are arranged coaxially. At least one first horizontal adjustment structure is provided, the first horizontal adjustment structure includes at least one first horizontal adjustment shaft (2) and at least one first adjustment block (11). The first horizontal adjustment shaft (2) is disposed through a first through hole (14) and a second through hole (18). The first adjustment block (11) is provided with an adjustment end (24). The adjustment end (24) is disposed in contact with the mounting end (16). The first horizontal adjustment shaft (2) is rotated to drive the mounting end (16) to move along the axial direction. The position of the platform (7) on the support base (3) is finely adjusted by the contact friction between the mounting end (16) and the adjustment end (24).

2. The platform positioning assembly according to claim 1, characterized in that, The base (1) is provided with at least one first adjustment hole (15), and the mounting end (16) is provided with at least one first adjustment groove (17) corresponding to the first adjustment hole (15). The opening direction of the first adjustment groove (17) is set towards the first adjustment hole (15). After the adjustment end (24) passes through the first adjustment hole (15), it contacts the first adjustment groove (17).

3. The platform positioning assembly according to claim 2, characterized in that, The first adjustment groove (17) has a triangular cross-section and an arc-shaped surface inside. At least one steel ball is provided between the surface of the adjustment end (24) of the first adjustment block (11) and the first adjustment groove (17), and the outer surface of the steel ball is in contact with the arc-shaped surface.

4. The platform positioning assembly according to any one of claims 1-3, characterized in that, The support base (3) has at least two support ends (19) and at least two second horizontal adjustment structures on the side away from the mounting end (16). The adjustment direction of the second horizontal adjustment structure is perpendicular to the adjustment direction of the first horizontal adjustment structure. Each support end (19) has a second accommodating space (23) with an opening facing the platform (7). The second accommodating space (23) is suitable for accommodating the movable block (33) of the platform (7). The two sides of the support end (19) have a pair of oppositely arranged third through holes (20). The movable block (33) has a fourth through hole (31). The third through hole (20) and the fourth through hole (31) are arranged coaxially. Each second horizontal adjustment structure has a second horizontal adjustment shaft (9). The second horizontal adjustment shaft (9) passes through the third through hole (20) and the fourth through hole (31).

5. The platform positioning assembly according to claim 4, characterized in that, Each of the second horizontal adjustment structures further includes at least one second adjustment block (10), the support end (19) is provided with a second adjustment hole (21) corresponding to the movable block (33), and the adjustment end (24) of the second adjustment block (10) passes through the second adjustment hole (21) and is slidably connected to the movable block (33).

6. The platform positioning assembly according to claim 4, characterized in that, A third accommodating space (22) is formed between two adjacent support ends (19), the third accommodating space (22) is suitable for accommodating the platform (7), and a movable platform (4) is provided between each side of the platform (7) and the corresponding support end (19), and the movable block (33) is provided on one side of the movable platform (4).

7. The platform positioning assembly according to claim 6, characterized in that, The movable platform (4) has a fourth accommodating space (29) with an opening facing the platform (7). A pair of fifth through holes (30) are symmetrically arranged on both sides of the fourth accommodating space (29). The fourth accommodating space (29) contains a height adjustment structure.

8. The platform positioning assembly according to claim 7, characterized in that, The height adjustment structure includes a first height adjustment block (6), a second height adjustment block (5), and a height adjustment shaft (8). The two ends of the first height adjustment block (6) are fixedly connected to the platform (7) and the second height adjustment block (5), respectively. The two ends of the height adjustment shaft (8) are respectively located in the fifth through hole (30). The height adjustment shaft (8) is provided with at least one conical inclined surface (25), and the conical inclined surface (25) is in linear contact with the first height adjustment block (6).

9. The platform positioning assembly according to claim 8, characterized in that, The first height adjustment block (6) has two parallel adjustment surfaces (27) and a first transition slope (28), the second height adjustment block (5) has a second transition slope (34), and the height adjustment shaft (8) has two conical slopes (25) and a conical transition surface (26). Each conical slope (25) is in linear contact with the adjustment surface (27), and the conical transition surface (26) is in linear contact with the second transition slope (34) of the second height adjustment block (5).

10. A chip detection device, characterized in that, The platform (7) positioning assembly according to any one of claims 1-9 is further comprising a turntable on which a pair of the platform positioning assemblies are disposed opposite to each other.

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