A dual-channel graphite boat loading and unloading machine
By designing a dual-channel graphite boat wafer loading and unloading integrated machine and adopting a protective clamping component and clamping block structure, the problems of long production cycle and friction damage during silicon wafer coating are solved, and stable fixation and efficient production are achieved.
Patent Information
- Application Number
- CN202210588374.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2022-05-26
- Publication Date
- 2025-09-12
- Estimated Expiration
- 2042-05-26
AI Technical Summary
During the silicon wafer coating process, the existing graphite boat needs to be plated on the front and back sides separately, resulting in a long production cycle and high costs. In addition, long-term friction will damage the graphite boat and the product.
A dual-channel graphite boat loading and unloading machine is designed, which adopts a protective clamping component and a clamping block structure to reduce friction damage and improve stability and replacement efficiency.
The protective clamping assembly and clamping block structure can stably fix the silicon wafer, reduce friction damage, and improve production efficiency and the service life of the graphite boat.
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Figure CN115050676B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of graphite boat loading and unloading sheet applications, in particular to a dual-channel graphite boat loading and unloading sheet integrated machine. Background Art
[0002] At present, due to the extremely rich reserves of silicon in the earth's crust and the excellent electrical and mechanical properties of crystalline silicon solar cells compared to other solar cells, crystalline silicon solar cells occupy an important position in the photovoltaic field. When coating the surface of silicon wafers, the uncoated silicon wafers need to be inserted into the graphite boat of the PECVD vacuum coating equipment. Generally, the front or back side is coated first. After coating one side, the silicon wafer is taken out of the graphite boat by an automatic loading and unloading machine, turned over and coated on the other side. The separate coating of the front and back sides leads to a long production cycle and high production costs.
[0003] When using a traditional graphite boat, the processed product needs to be placed in the graphite boat for fixation, and the graphite boat is constantly installed and disassembled, which will cause friction to the graphite boat. Long-term friction will cause damage to the graphite boat and the product. At the same time, it needs to be replaced, which increases the cost. Therefore, the present invention proposes a dual-channel graphite boat loading and unloading machine. Summary of the Invention
[0004] The technical problem to be solved by the present invention is to provide a dual-channel graphite boat loading and unloading integrated machine. By arranging a protective clamping component on the internal connection of the graphite boat, it is possible to stabilize the internal products when they are placed, reducing the friction on the surrounding graphite and thus causing damage. At the same time, it is convenient to disassemble and replace the locking stabilization component in the later stage, thereby improving work efficiency.
[0005] To solve the above technical problems, the present invention adopts a technical solution: providing a dual-channel graphite boat loading and unloading integrated machine, comprising two fixed plates, wherein first tie rods are evenly provided through the two fixed plates, and multiple first tie rods are provided through multiple graphite plates, and multiple second tie rods are symmetrically provided through the multiple graphite plates near the end surfaces, and the multiple first tie rods respectively pass through multiple partitions;
[0006] A clamping assembly is provided inside each of the multiple partitions, and the clamping assembly includes a limit plate, the side walls of the limit plate are evenly fixedly connected with multiple positioning rings, the inner walls of the multiple positioning rings are threadedly connected with springs, the side walls of the limit plate away from the positioning rings are evenly fixedly connected with multiple connecting columns, the end faces of the multiple connecting columns are fixedly connected with clamping blocks, and the reaction force of the spring is used to make the limit plate drive the multiple connecting columns to move, thereby driving the clamping blocks to move, and finally clamping and fixing the products placed therein.
[0007] Both of the second pull rods are penetrated by a spacer, and the plurality of spacers are alternately distributed with the plurality of graphite plates.
[0008] The above technical solution facilitates connection and fixation at the end face, thereby facilitating the use of the entire device.
[0009] The two second pull rods pass through the two fixing plates near the end surfaces and are fixed by locking nuts.
[0010] The above technical solution is used to install and fix the fixing plate and the graphite plate.
[0011] The plurality of partitions are symmetrically provided with through holes near the top and the bottom, and the plurality of first pull rods pass through the partitions respectively through the through holes.
[0012] The above technical solution facilitates the installation and fixing of the partition frame.
[0013] The end surfaces of the plurality of springs away from the limiting plate are respectively arranged to be tightly fitted with the inner side walls of the partition frame.
[0014] The above technical solution facilitates the positioning of the spring, thereby utilizing the spring's force to perform clamping movement.
[0015] The plurality of connecting posts respectively penetrate the opposite side walls of the partition frame and are smoothly fitted therewith.
[0016] The above technical solution facilitates driving the clamping block to press and clamp the placed product.
[0017] The plurality of clamping blocks are all arranged in a semi-cylindrical shape.
[0018] The above technical solution can reduce the clamping area of the product, thereby reducing friction damage.
[0019] The beneficial effects of the present invention are as follows:
[0020] 1. The dual-channel graphite boat loading and unloading machine proposed in the present invention provides a protective locking assembly at the internal connection of the graphite boat, thereby stabilizing the internal product when it is placed, reducing friction on the surrounding graphite and thus reducing damage;
[0021] 2. The dual-channel graphite boat loading and unloading integrated machine proposed in the present invention is capable of protecting the clamped and fixed products by providing a protective layer on the clamping block of the clamping assembly to prevent them from being damaged during the processing. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] Figure 1 This is a top view of a dual-channel graphite boat loading and unloading machine according to the present invention;
[0023] Figure 2 This is a structural diagram of the partition frame of a dual-channel graphite boat loading and unloading machine of the present invention;
[0024] Figure 3 This is a cross-sectional view of a partition frame of a dual-channel graphite boat loading and unloading machine according to the present invention;
[0025] Figure 4 This is a structural diagram of the dismantled parts of a dual-channel graphite boat loading and unloading machine of the present invention;
[0026] Figure 5 for Figure 3 Structural diagram at point A in the middle.
[0027] In the figure: 1, fixed plate; 2, first pull rod; 3, graphite plate; 4, spacer; 5, second pull rod; 6, spacer; 61, through hole; 7, limit plate; 71, positioning ring; 72, spring; 73, connecting column; 74, clamping block. DETAILED DESCRIPTION
[0028] The following are specific embodiments of the present invention and the accompanying drawings to further describe the technical solutions of the present invention, but the present invention is not limited to these embodiments.
[0029] See also Figure 1-2 , a dual-channel graphite boat loading and unloading integrated machine, including two fixed plates 1, the two fixed plates 1 are evenly penetrated with first pull rods 2, multiple first pull rods 2 are penetrated with multiple graphite plates 3, two second pull rods 5 are penetrated with spacers 4, multiple spacers 4 are alternately distributed with multiple graphite plates 3, which are convenient for connection and fixation at the end face, thereby facilitating the use of the entire device, multiple graphite plates 3 are symmetrically penetrated with second pull rods 5 near the end face, two second pull rods 5 are penetrated by the two fixed plates 1 near the end face, and are fixed by locking nuts for installing and fixing the fixed plate 1 and the graphite plate 3, multiple first pull rods 2 respectively penetrate multiple spacers 6, multiple spacers 6 are symmetrically opened with through holes 61 near the top and bottom positions, multiple first pull rods 2 respectively penetrate the spacers 6 through the through holes 61, which is convenient for installing and fixing the spacers 6.
[0030] like Figure 3-5As shown, a plurality of spacers 6 are provided with a clamping assembly inside, and the clamping assembly includes a limit plate 7, and the side wall of the limit plate 7 is evenly fixedly connected with a plurality of positioning rings 71, and the inner walls of the plurality of positioning rings 71 are threadedly connected with springs 72, and the end surfaces of the plurality of springs 72 away from the limit plate 7 are respectively tightly fitted with the inner side walls of the spacer 6, so as to facilitate the positioning of the springs 72, thereby utilizing the force of the springs 72 to perform the clamping movement, and the side wall of the limit plate 7 away from the positioning ring 71 is evenly fixedly connected with a plurality of connecting columns 73. Multiple connecting columns 73 respectively pass through the opposite side walls of the partition frame 6 and are smoothly fitted therewith, so as to drive the clamping blocks 74 to press and clamp the products placed therein. The end faces of the multiple connecting columns 73 are fixedly connected with the clamping blocks 74. The reaction force of the spring 72 is used to make the limit plate 7 drive the multiple connecting columns 73 to move, thereby driving the clamping blocks 74 to move, and finally clamping and fixing the products placed therein. The multiple clamping blocks 74 are all semi-cylindrical, which is convenient for reducing the clamping area of the product, thereby reducing friction damage.
[0031] When the present invention is in use, the fixed plate 1 and the graphite plate 3 are first locked and fixed by the first pull rod 2, and the partition frame 6 and the graphite plate 3 are fixed alternately. Then, the spacer 4 and multiple graphite plates 3 are fixed alternately by the second pull rod 5. When the product to be processed is placed, the side wall of the product is placed downward along the slide groove opened on the side wall of the partition frame 6, so that it slides into the relatively fitting clamping blocks 74, so that the clamping block 74 uses the reaction force of the spring 72 to make the limit plate 7 drive the multiple connecting columns 73 to move, thereby driving the clamping block 74 to move. Finally, the placed product is clamped and fixed, which is convenient for its use, reduces friction loss, and improves the service life of the graphite boat.
[0032] The above components are all common standard parts or components known to those skilled in the art, and their structures and principles can be known to those skilled in the art through technical manuals or conventional experimental methods.
[0033] The specific embodiments described herein are merely illustrative of the spirit of the present invention. Persons skilled in the art may make various modifications, additions, or substitutions to the described specific embodiments without departing from the spirit of the present invention or exceeding the scope of the appended claims.
Claims
1. A dual-channel graphite boat loading and unloading machine, comprising two fixed plates (1), characterized in that: The two fixed plates (1) are evenly penetrated by first tie rods (2), a plurality of the first tie rods (2) are penetrated by a plurality of graphite plates (3), a plurality of the graphite plates (3) are symmetrically penetrated by second tie rods (5) near the end surfaces, and a plurality of the first tie rods (2) respectively penetrate a plurality of spacers (6); A clamping assembly is provided inside each of the plurality of the partitions (6), and the clamping assembly includes a limit plate (7), the side wall of the limit plate (7) is evenly fixedly connected with a plurality of positioning rings (71), the inner walls of the plurality of positioning rings (71) are threadedly connected with springs (72), the side wall of the limit plate (7) away from the positioning ring (71) is evenly fixedly connected with a plurality of connecting columns (73), and the end faces of the plurality of connecting columns (73) are fixedly connected with clamping blocks (74); the plurality of the partitions (6) are symmetrically provided with through holes (61) near the top and bottom, and the plurality of the first pull rods (2) respectively pass through the partitions (6) through the through holes (61); the end faces of the plurality of the springs (72) away from the limit plate (7) are respectively tightly fitted with the inner side walls of the partition (6); the plurality of the connecting columns (73) respectively pass through the opposite side walls of the partition (6) and are smoothly fitted therewith.
2. The dual-channel graphite boat loading and unloading machine according to claim 1, characterized in that: Both of the second pull rods (5) are provided with spacers (4) running through them, and the plurality of spacers (4) are respectively distributed alternately with the plurality of graphite plates (3).
3. The dual-channel graphite boat loading and unloading machine according to claim 1, characterized in that: The two second pull rods (5) pass through the two fixing plates (1) near the end surfaces and are fixed by locking nuts.
4. The dual-channel graphite boat loading and unloading machine according to claim 1, characterized in that: The plurality of clamping blocks (74) are all arranged in a semi-cylindrical shape.
Citation Information
Patent Citations
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